ATE496362T1 - Verfahren und vorrichtung zur betätigung von anzeigen - Google Patents

Verfahren und vorrichtung zur betätigung von anzeigen

Info

Publication number
ATE496362T1
ATE496362T1 AT06721031T AT06721031T ATE496362T1 AT E496362 T1 ATE496362 T1 AT E496362T1 AT 06721031 T AT06721031 T AT 06721031T AT 06721031 T AT06721031 T AT 06721031T AT E496362 T1 ATE496362 T1 AT E496362T1
Authority
AT
Austria
Prior art keywords
light
reflective optical
optical cavity
transmissive region
image pixel
Prior art date
Application number
AT06721031T
Other languages
English (en)
Inventor
Nesbitt Hagood
Jasper Steyn
Original Assignee
Pixtronix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/218,690 external-priority patent/US7417782B2/en
Priority claimed from US11/251,034 external-priority patent/US7304785B2/en
Priority claimed from US11/251,452 external-priority patent/US7304786B2/en
Priority claimed from US11/251,035 external-priority patent/US7271945B2/en
Application filed by Pixtronix Inc filed Critical Pixtronix Inc
Application granted granted Critical
Publication of ATE496362T1 publication Critical patent/ATE496362T1/de

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/04Networks or arrays of similar microstructural devices
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0054For holding or placing an element in a given position
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/03Microengines and actuators
    • B81B2201/032Bimorph and unimorph actuators, e.g. piezo and thermo
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/03Microengines and actuators
    • B81B2201/038Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/04Optical MEMS
    • B81B2201/045Optical switches
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/05Type of movement
    • B81B2203/051Translation according to an axis parallel to the substrate
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00Aspects of the constitution of display devices
    • G09G2300/08Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
    • G09G2300/0809Several active elements per pixel in active matrix panels
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00Command of the display device
    • G09G2310/02Addressing, scanning or driving the display screen or processing steps related thereto
    • G09G2310/0262The addressing of the pixel, in a display other than an active matrix LCD, involving the control of two or more scan electrodes or two or more data electrodes, e.g. pixel voltage dependent on signals of two data electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Micromachines (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Details Of Measuring Devices (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Push-Button Switches (AREA)
AT06721031T 2005-02-23 2006-02-23 Verfahren und vorrichtung zur betätigung von anzeigen ATE496362T1 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US65582705P 2005-02-23 2005-02-23
US67605305P 2005-04-29 2005-04-29
US11/218,690 US7417782B2 (en) 2005-02-23 2005-09-02 Methods and apparatus for spatial light modulation
US11/251,034 US7304785B2 (en) 2005-02-23 2005-10-14 Display methods and apparatus
US11/251,452 US7304786B2 (en) 2005-02-23 2005-10-14 Methods and apparatus for bi-stable actuation of displays
US11/251,035 US7271945B2 (en) 2005-02-23 2005-10-14 Methods and apparatus for actuating displays
PCT/US2006/006552 WO2006091791A2 (en) 2005-02-23 2006-02-23 Methods and apparatus for actuating displays

Publications (1)

Publication Number Publication Date
ATE496362T1 true ATE496362T1 (de) 2011-02-15

Family

ID=36406025

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06721031T ATE496362T1 (de) 2005-02-23 2006-02-23 Verfahren und vorrichtung zur betätigung von anzeigen

Country Status (10)

Country Link
EP (5) EP1858796B1 (de)
JP (7) JP4616890B2 (de)
KR (2) KR101157502B1 (de)
CN (6) CN103345058A (de)
AT (1) ATE496362T1 (de)
BR (1) BRPI0607880A2 (de)
CA (4) CA2598740C (de)
DE (1) DE602006019695D1 (de)
ES (3) ES2524296T3 (de)
WO (1) WO2006091791A2 (de)

Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7417782B2 (en) 2005-02-23 2008-08-26 Pixtronix, Incorporated Methods and apparatus for spatial light modulation
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
WO2007145970A2 (en) * 2006-06-05 2007-12-21 Pixtronix, Inc. Circuits for controlling display apparatus
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
JP2013061658A (ja) * 2007-01-19 2013-04-04 Pixtronix Inc Memsディスプレイ装置
CN103399399A (zh) * 2008-02-12 2013-11-20 皮克斯特隆尼斯有限公司 带有应力梁的机械式光调制器
US8248560B2 (en) 2008-04-18 2012-08-21 Pixtronix, Inc. Light guides and backlight systems incorporating prismatic structures and light redirectors
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
WO2010054244A2 (en) 2008-11-07 2010-05-14 Cavendish Kinetics, Inc. Method of using a plurality of smaller mems devices to replace a larger mems device
KR101557485B1 (ko) 2008-12-09 2015-10-06 삼성전자 주식회사 마이크로 셔터 디바이스 및 그 제조방법
KR101588000B1 (ko) 2009-08-18 2016-01-25 삼성디스플레이 주식회사 표시 장치 구동 방법 및 이를 이용한 표시 장치
KR101570854B1 (ko) * 2009-08-21 2015-11-23 삼성디스플레이 주식회사 마이크로 셔터 및 이를 포함하는 표시 장치
KR101614463B1 (ko) 2009-11-05 2016-04-22 삼성디스플레이 주식회사 멤스 소자를 이용한 표시 장치 및 그 제조 방법
KR101723149B1 (ko) 2009-12-30 2017-04-05 삼성디스플레이 주식회사 엠이엠에스 표시판 및 이를 포함하는 표시 장치
KR101798312B1 (ko) 2010-02-02 2017-11-15 스냅트랙, 인코포레이티드 디스플레이 장치를 제어하기 위한 회로
WO2011097252A2 (en) 2010-02-02 2011-08-11 Pixtronix, Inc. Methods for manufacturing cold seal fluid-filled display apparatus
KR20120067695A (ko) 2010-12-16 2012-06-26 삼성전자주식회사 표시 장치와 이의 제조 방법
US8953120B2 (en) 2011-01-07 2015-02-10 Semiconductor Energy Laboratory Co., Ltd. Display device
KR20120102387A (ko) 2011-03-08 2012-09-18 삼성전자주식회사 표시 장치와 이의 제조 방법
KR20120111809A (ko) 2011-04-01 2012-10-11 삼성디스플레이 주식회사 표시장치
JP5801602B2 (ja) * 2011-05-12 2015-10-28 ピクストロニクス,インコーポレイテッド 画像表示装置
JP5727303B2 (ja) * 2011-06-03 2015-06-03 ピクストロニクス,インコーポレイテッド 表示装置
JP5762842B2 (ja) * 2011-06-21 2015-08-12 ピクストロニクス,インコーポレイテッド 表示装置及び表示装置の製造方法
US9134529B2 (en) 2011-07-21 2015-09-15 Pixronix, Inc. Display device with tapered light reflecting layer and manufacturing method for same
KR20130072847A (ko) 2011-12-22 2013-07-02 삼성디스플레이 주식회사 표시 장치와 이의 제조 방법
JP6273255B2 (ja) * 2012-03-27 2018-01-31 ケー.エー.アドバタイジング ソリューションズ リミテッド 反射性の動的な色彩装置
US9030723B2 (en) * 2013-01-18 2015-05-12 Pixtronix, Inc. Asymmetric travel for MEMS light modulator
JP2014142491A (ja) * 2013-01-24 2014-08-07 Pixtronix Inc 表示装置
US9217857B2 (en) * 2013-03-12 2015-12-22 Pixtronix, Inc. Multi-state shutter assemblies having segmented drive electrode sets
US9134530B2 (en) * 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus incorporating dual-level shutters
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
JP2014178513A (ja) 2013-03-15 2014-09-25 Pixtronix Inc 表示装置
US9747846B2 (en) 2013-07-01 2017-08-29 Sharp Kabushiki Kaisha Display device
JP5935849B2 (ja) 2013-10-04 2016-06-15 カシオ計算機株式会社 画像処理装置、画像処理方法及びプログラム
US9245311B2 (en) * 2014-01-02 2016-01-26 Pixtronix, Inc. Display apparatus actuators including anchored and suspended shutter electrodes
FR3042789B1 (fr) 2015-10-21 2019-07-12 Commissariat A L'energie Atomique Et Aux Energies Alternatives Structure microelectromecanique et/ou nanoelectromecanique a actionnement electrothermique comportant au moins deux poutres d'actionnement polarisables differemment
FR3042788B1 (fr) * 2015-10-21 2017-12-08 Commissariat Energie Atomique Structure microelectromecanique et/ou nanoelectromecanique a actionnement electrothermique offrant un rendement ameliore
CN105607247B (zh) * 2016-01-04 2019-02-19 京东方科技集团股份有限公司 一种光阀、阵列基板及显示装置
JP6953118B2 (ja) * 2016-07-04 2021-10-27 エドワード・パクチャン ディスプレイのためのmems光変調器
JP6953117B2 (ja) * 2016-07-04 2021-10-27 エドワード・パクチャン Memsディスプレイのための光変調器
WO2018168658A1 (ja) * 2017-03-17 2018-09-20 住友精密工業株式会社 変位拡大機構及びそれを用いたシャッタ装置
JP7016350B2 (ja) * 2017-03-17 2022-02-04 住友精密工業株式会社 Mems素子及びそれを用いた光学装置
RU2688904C1 (ru) * 2018-09-28 2019-05-22 Акционерное общество "Научно-исследовательский институт "Полюс" им. М.Ф. Стельмаха" Приемник оптических сигналов
RU2694463C1 (ru) * 2018-09-28 2019-07-15 Акционерное общество "Научно-исследовательский институт "Полюс" им. М.Ф. Стельмаха" Импульсное фотоприемное устройство
RU2688906C1 (ru) * 2018-09-28 2019-05-22 Акционерное общество "Научно-исследовательский институт "Полюс" им. М.Ф. Стельмаха" Приемник оптических импульсов
RU2692830C1 (ru) * 2018-09-28 2019-06-28 Акционерное общество "Научно-исследовательский институт "Полюс" им. М.Ф. Стельмаха" Приемник лазерных импульсов
RU2688907C1 (ru) * 2018-09-28 2019-05-22 Акционерное общество "Научно-исследовательский институт "Полюс" им. М.Ф. Стельмаха" Фотоприемное устройство

Family Cites Families (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933077U (ja) * 1982-08-23 1984-02-29 株式会社小糸製作所 液晶表示器
KR950010659B1 (ko) * 1992-11-10 1995-09-21 재단법인한국전자통신연구소 마이크로 광개폐 장치 및 그 제조방법
JP2555922B2 (ja) * 1993-02-26 1996-11-20 日本電気株式会社 静電駆動マイクロシャッターおよびシャッターアレイ
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US7123216B1 (en) * 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
JP3533759B2 (ja) * 1995-06-08 2004-05-31 凸版印刷株式会社 ホログラムを用いたカラー液晶表示装置
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
JP3799092B2 (ja) * 1995-12-29 2006-07-19 アジレント・テクノロジーズ・インク 光変調装置及びディスプレイ装置
JPH09218360A (ja) * 1996-02-08 1997-08-19 Ricoh Co Ltd メカニカル光シャッタ
FR2747802B1 (fr) * 1996-04-18 1998-05-15 Commissariat Energie Atomique Microdispositif optomecanique, et application a un microdeflecteur optomecanique
JPH10333145A (ja) * 1997-05-30 1998-12-18 Sanyo Electric Co Ltd 採光機構付液晶表示装置
US6046836A (en) * 1998-03-06 2000-04-04 Electro-Optical Products Corporation Low frequency optical shutter
US6523961B2 (en) * 2000-08-30 2003-02-25 Reflectivity, Inc. Projection system and mirror elements for improved contrast ratio in spatial light modulators
WO2000017695A1 (en) * 1998-09-24 2000-03-30 Reflectivity, Inc. A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
JP2000214393A (ja) * 1999-01-20 2000-08-04 Fuji Photo Film Co Ltd 光変調素子及びアレイ型光変調素子並びに平面表示装置
JP2000111813A (ja) * 1998-10-05 2000-04-21 Fuji Photo Film Co Ltd 光変調素子及びアレイ型光変調素子並びに平面表示装置
US6639572B1 (en) * 1998-10-28 2003-10-28 Intel Corporation Paper white direct view display
US6034807A (en) * 1998-10-28 2000-03-07 Memsolutions, Inc. Bistable paper white direct view display
US6288824B1 (en) * 1998-11-03 2001-09-11 Alex Kastalsky Display device based on grating electromechanical shutter
CA2365547A1 (en) * 1999-03-04 2000-09-08 Flixel Ltd. Micro-mechanical flat panel display with touch sensitive input and vibration source
JP2000321566A (ja) * 1999-05-11 2000-11-24 Ricoh Microelectronics Co Ltd 液晶表示装置
US6507138B1 (en) * 1999-06-24 2003-01-14 Sandia Corporation Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement
US6275320B1 (en) * 1999-09-27 2001-08-14 Jds Uniphase, Inc. MEMS variable optical attenuator
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US7041224B2 (en) * 1999-10-26 2006-05-09 Reflectivity, Inc. Method for vapor phase etching of silicon
KR100312432B1 (ko) * 1999-11-25 2001-11-05 오길록 마이크로 구조체를 이용한 광스위치
JP3884207B2 (ja) * 2000-01-20 2007-02-21 インターナショナル・ビジネス・マシーンズ・コーポレーション 液晶表示装置
US6747784B2 (en) * 2000-03-20 2004-06-08 Np Photonics, Inc. Compliant mechanism and method of forming same
AU7289801A (en) * 2000-04-11 2001-10-23 Sandia Corp Microelectromechanical apparatus for elevating and tilting a platform
JP4439084B2 (ja) * 2000-06-14 2010-03-24 日東電工株式会社 液晶表示装置
JP2002040337A (ja) * 2000-07-24 2002-02-06 Fuji Photo Film Co Ltd 光変調素子及びそれを用いた露光装置並びに平面表示装置
US6738177B1 (en) * 2000-09-05 2004-05-18 Siwave, Inc. Soft snap-down optical element using kinematic supports
US6775048B1 (en) * 2000-10-31 2004-08-10 Microsoft Corporation Microelectrical mechanical structure (MEMS) optical modulator and optical display system
US6760505B1 (en) * 2000-11-08 2004-07-06 Xerox Corporation Method of aligning mirrors in an optical cross switch
JP2002333619A (ja) * 2001-05-07 2002-11-22 Nec Corp 液晶表示素子およびその製造方法
JP2003029295A (ja) * 2001-07-11 2003-01-29 Sony Corp 液晶表示装置
US6701039B2 (en) * 2001-10-04 2004-03-02 Colibrys S.A. Switching device, in particular for optical applications
EP2423717A3 (de) * 2001-12-14 2012-12-12 QUALCOMM MEMS Technologies, Inc. System zur gleichformigen beleuchtung
JP3755460B2 (ja) * 2001-12-26 2006-03-15 ソニー株式会社 静電駆動型mems素子とその製造方法、光学mems素子、光変調素子、glvデバイス、レーザディスプレイ、及びmems装置
US7705826B2 (en) * 2002-02-09 2010-04-27 New Visual Media Group, L.L.C. Flexible video displays and their manufacture
WO2003081315A1 (en) * 2002-03-26 2003-10-02 Dicon A/S Micro light modulator arrangement
US7125451B2 (en) * 2002-04-23 2006-10-24 Sharp Laboratories Of America, Inc. Crystal-structure-processed mechanical devices and methods and systems for making
US7362889B2 (en) * 2002-05-10 2008-04-22 Massachusetts Institute Of Technology Elastomeric actuator devices for magnetic resonance imaging
JP2004053839A (ja) * 2002-07-18 2004-02-19 Murata Mfg Co Ltd 光スイッチ装置
US7370185B2 (en) * 2003-04-30 2008-05-06 Hewlett-Packard Development Company, L.P. Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
KR100513723B1 (ko) * 2002-11-18 2005-09-08 삼성전자주식회사 Mems스위치
WO2004086098A2 (en) * 2002-12-03 2004-10-07 Flixel Ltd. Display devices
JP4476649B2 (ja) * 2003-03-19 2010-06-09 ゼロックス コーポレイション マイクロ電子機械システムの光学的多状態ラッチスイッチ
US7218499B2 (en) * 2003-05-14 2007-05-15 Hewlett-Packard Development Company, L.P. Charge control circuit
JP4338442B2 (ja) * 2003-05-23 2009-10-07 富士フイルム株式会社 透過型光変調素子の製造方法
US7304556B2 (en) * 2003-08-11 2007-12-04 Murata Manufacturing Co., Ltd. Buckling actuator
JP2005134896A (ja) * 2003-10-10 2005-05-26 Japan Aviation Electronics Industry Ltd 微小可動デバイス

Also Published As

Publication number Publication date
EP2336081B1 (de) 2014-09-24
WO2006091791A3 (en) 2006-11-23
JP2012168562A (ja) 2012-09-06
EP2287110A3 (de) 2012-06-13
WO2006091791A2 (en) 2006-08-31
JP2011039534A (ja) 2011-02-24
CN103336362A (zh) 2013-10-02
JP2014098924A (ja) 2014-05-29
JP5551208B2 (ja) 2014-07-16
ES2468017T3 (es) 2014-06-13
ES2524296T3 (es) 2014-12-05
JP2012212150A (ja) 2012-11-01
CA2795302C (en) 2015-06-23
KR20070114161A (ko) 2007-11-29
BRPI0607880A2 (pt) 2009-10-20
CN103336360B (zh) 2016-07-06
CN103336362B (zh) 2015-10-14
JP2012212151A (ja) 2012-11-01
JP2012212149A (ja) 2012-11-01
KR20100034040A (ko) 2010-03-31
EP1858796B1 (de) 2011-01-19
EP2336081A2 (de) 2011-06-22
JP5636395B2 (ja) 2014-12-03
EP2287110A2 (de) 2011-02-23
EP2808864A2 (de) 2014-12-03
JP5676525B2 (ja) 2015-02-25
CN102323666A (zh) 2012-01-18
JP2008532068A (ja) 2008-08-14
JP4616890B2 (ja) 2011-01-19
CA2598740C (en) 2013-02-19
CA2795329C (en) 2015-04-07
ES2507498T3 (es) 2014-10-15
EP2287110B1 (de) 2014-07-23
CN103336360A (zh) 2013-10-02
CN103336361A (zh) 2013-10-02
DE602006019695D1 (de) 2011-03-03
EP2336081A3 (de) 2012-04-25
JP5722470B2 (ja) 2015-05-20
CN102323665B (zh) 2015-01-28
JP5936813B2 (ja) 2016-06-22
CN102323665A (zh) 2012-01-18
CA2598740A1 (en) 2006-08-31
CA2795356A1 (en) 2006-08-31
KR101157502B1 (ko) 2012-06-15
WO2006091791A9 (en) 2006-10-12
EP2322971A3 (de) 2012-04-04
CA2795329A1 (en) 2006-08-31
EP2808864A3 (de) 2014-12-24
CA2795302A1 (en) 2006-08-31
EP1858796A2 (de) 2007-11-28
EP2322971A2 (de) 2011-05-18
EP2322971B1 (de) 2014-04-30
CN103345058A (zh) 2013-10-09
CN102323666B (zh) 2015-02-04

Similar Documents

Publication Publication Date Title
ATE496362T1 (de) Verfahren und vorrichtung zur betätigung von anzeigen
EP1544671A3 (de) Beleuchtungsvorrichtung mit bewegenden LEDs und Bildprojektionsgerät mit dieser Vorrichtung
TW200720062A (en) Rapid prototyping apparatus and method of rapid prototyping
DE602005027297D1 (de) Geräte und Verfahren zur Beleuchtung einer Anzeige mit interferometrischen Modulatoren
WO2005026843A3 (en) Illumination system for a microlithography projection exposure installation
WO2007075730A3 (en) Sign and method for lighting
WO2008019936A3 (en) Microlithographic projection exposure apparatus and microlithographic exposure method
TW200802277A (en) Lighting device with an array of controlled emitters
ATE545926T1 (de) Multispektrale lichtquelle fur einer projektorbildanzeigevorrichtung
DE60204557D1 (de) Anzeigevorrichtung
TW200707022A (en) Display with sub-region backlighting
EP1401215A3 (de) Flüssigkristallvideoprojektor
EP1777693A3 (de) Hintergrundbeleuchtung und Verfahren zur Steuerung der Lichtquelle
DE602006009432D1 (de) Verfahren und Systeme zur Bildprojektion
WO2007034398A3 (en) Illumination system for illuminating display devices, and display device provided with such an illumination system
TW200609624A (en) A display and a backlight module thereof
WO2009020138A1 (ja) 照明装置および液晶表示装置
WO2008133142A1 (ja) 照明装置およびこれを備えた表示装置
TW200833999A (en) Lighting device and lighting method
TW200712731A (en) Projection display apparatus having image modulation timing changing function
BR0209722A (pt) Dispositivo de exibição, e, método para formação de imagem de cor
TW200712743A (en) Projection type display unit
WO2008024280A3 (en) An image display system having adjustable intensities
WO2008132796A1 (ja) レーザ背面照射装置及び液晶表示装置
TW200745604A (en) Method of operating a projection system using active light modulation

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties