ATE403144T1 - Verfahren und anordnung zur detektion von partikeln auf halbleitern - Google Patents

Verfahren und anordnung zur detektion von partikeln auf halbleitern

Info

Publication number
ATE403144T1
ATE403144T1 AT04726541T AT04726541T ATE403144T1 AT E403144 T1 ATE403144 T1 AT E403144T1 AT 04726541 T AT04726541 T AT 04726541T AT 04726541 T AT04726541 T AT 04726541T AT E403144 T1 ATE403144 T1 AT E403144T1
Authority
AT
Austria
Prior art keywords
semiconductors
particulate
semiconductor
contaminant
defects
Prior art date
Application number
AT04726541T
Other languages
English (en)
Inventor
Victor Higgs
Original Assignee
Aoti Operating Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aoti Operating Co Inc filed Critical Aoti Operating Co Inc
Application granted granted Critical
Publication of ATE403144T1 publication Critical patent/ATE403144T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6489—Photoluminescence of semiconductors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
AT04726541T 2003-04-09 2004-04-08 Verfahren und anordnung zur detektion von partikeln auf halbleitern ATE403144T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0308182.5A GB0308182D0 (en) 2003-04-09 2003-04-09 Detection method and apparatus

Publications (1)

Publication Number Publication Date
ATE403144T1 true ATE403144T1 (de) 2008-08-15

Family

ID=9956474

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04726541T ATE403144T1 (de) 2003-04-09 2004-04-08 Verfahren und anordnung zur detektion von partikeln auf halbleitern

Country Status (9)

Country Link
US (1) US7589834B2 (de)
EP (1) EP1611431B1 (de)
JP (1) JP2006522929A (de)
KR (1) KR20060015497A (de)
AT (1) ATE403144T1 (de)
DE (1) DE602004015435D1 (de)
GB (1) GB0308182D0 (de)
TW (1) TW200506343A (de)
WO (1) WO2004090516A1 (de)

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US10018565B2 (en) * 2015-05-04 2018-07-10 Semilab Semiconductor Physics Laboratory Co., Ltd. Micro photoluminescence imaging with optical filtering
US10551320B2 (en) * 2017-01-30 2020-02-04 Kla-Tencor Corporation Activation of wafer particle defects for spectroscopic composition analysis
TWI662273B (zh) * 2018-08-20 2019-06-11 友達晶材股份有限公司 缺陷檢測設備及缺陷檢測方法
CN113782465B (zh) * 2021-11-11 2022-02-18 西安奕斯伟材料科技有限公司 用于检测晶圆表面金属的方法
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Also Published As

Publication number Publication date
US20060262296A1 (en) 2006-11-23
KR20060015497A (ko) 2006-02-17
EP1611431B1 (de) 2008-07-30
EP1611431A1 (de) 2006-01-04
WO2004090516A1 (en) 2004-10-21
JP2006522929A (ja) 2006-10-05
US7589834B2 (en) 2009-09-15
TW200506343A (en) 2005-02-16
DE602004015435D1 (de) 2008-09-11
GB0308182D0 (en) 2003-05-14

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