ATE394598T1 - Erfassung von verunreinigungen in einem durch eine vakuumpumpe gepumpten fluid - Google Patents
Erfassung von verunreinigungen in einem durch eine vakuumpumpe gepumpten fluidInfo
- Publication number
- ATE394598T1 ATE394598T1 AT04768529T AT04768529T ATE394598T1 AT E394598 T1 ATE394598 T1 AT E394598T1 AT 04768529 T AT04768529 T AT 04768529T AT 04768529 T AT04768529 T AT 04768529T AT E394598 T1 ATE394598 T1 AT E394598T1
- Authority
- AT
- Austria
- Prior art keywords
- vacuum pump
- impurities
- capture
- fluid pumped
- fluid
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B29/00—Other pumps with movable, e.g. rotatable cylinders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/50—Presence of foreign matter in the fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/60—Fluid transfer
- F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0322609A GB0322609D0 (en) | 2003-09-26 | 2003-09-26 | Detection of contaminants within pumped fluid |
GB0409275A GB0409275D0 (en) | 2003-09-26 | 2004-04-26 | Detection of contaminants within pumped fluid |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE394598T1 true ATE394598T1 (de) | 2008-05-15 |
Family
ID=34395448
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT04768529T ATE394598T1 (de) | 2003-09-26 | 2004-09-16 | Erfassung von verunreinigungen in einem durch eine vakuumpumpe gepumpten fluid |
Country Status (7)
Country | Link |
---|---|
US (1) | US20070028669A1 (de) |
EP (1) | EP1668253B1 (de) |
JP (1) | JP2007506903A (de) |
KR (1) | KR20060090232A (de) |
AT (1) | ATE394598T1 (de) |
DE (1) | DE602004013612D1 (de) |
WO (1) | WO2005031169A1 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6856113B1 (en) | 2004-05-12 | 2005-02-15 | Cube Investments Limited | Central vacuum cleaning system motor control circuit mounting post, mounting configuration, and mounting methods |
FR2878913B1 (fr) * | 2004-12-03 | 2007-01-19 | Cit Alcatel | Controle des pressions partielles de gaz pour optimisation de procede |
US7690075B2 (en) | 2005-10-07 | 2010-04-06 | Cube Investments Limited | Central vacuum cleaner control, unit and system with contaminant sensor |
DE102008041592A1 (de) * | 2008-08-27 | 2010-03-04 | Carl Zeiss Smt Ag | Detektion von kontaminierenden Stoffen in einer EUV-Lithographieanlage |
DE102009059824A1 (de) * | 2009-12-21 | 2011-06-22 | Inficon GmbH, 50968 | Verfahren und Vorrichtung zur Leckbestimmung |
US9060765B2 (en) | 2010-11-08 | 2015-06-23 | Bovie Medical Corporation | Electrosurgical apparatus with retractable blade |
US9144453B2 (en) | 2010-11-08 | 2015-09-29 | Bovie Medical Corporation | Multi-mode electrosurgical apparatus |
US9770285B2 (en) | 2010-11-08 | 2017-09-26 | Bovie Medical Corporation | System and method for identifying and controlling an electrosurgical apparatus |
US9095333B2 (en) | 2012-07-02 | 2015-08-04 | Bovie Medical Corporation | Systems and methods of discriminating between argon and helium gases for enhanced safety of medical devices |
US8998899B2 (en) | 2010-11-08 | 2015-04-07 | Bovie Medical Corporation | Multi-button electrosurgical apparatus |
KR20170051514A (ko) | 2014-09-11 | 2017-05-11 | 에이에스엠엘 네델란즈 비.브이. | 방사선 소스를 모니터링하는 디바이스, 방사선 소스, 방사선 소스를 모니터링하는 방법, 디바이스 제조 방법 |
WO2016123147A1 (en) | 2015-01-28 | 2016-08-04 | Bovie Medical Corporation | Cold plasma electrosurgical apparatus with bent tip applicator |
GB201519145D0 (en) * | 2015-10-29 | 2015-12-16 | Gas Measurement Instr Ltd | Smart pump for a portable gas detection instrument |
US10386259B2 (en) * | 2016-08-25 | 2019-08-20 | General Electric Company | Hazgas system with acoustic wave sensors |
WO2018140944A1 (en) | 2017-01-30 | 2018-08-02 | Bovie Medical Corporation | Electrosurgical apparatus with flexible shaft |
US11877788B2 (en) | 2017-05-30 | 2024-01-23 | Apyx Medical Corporation | Electrosurgical apparatus with robotic tip |
WO2019241718A1 (en) * | 2018-06-15 | 2019-12-19 | Lam Research Corporation | Cleaning system for removing deposits from pump in an exhaust of a substrate processing system |
US11284018B1 (en) * | 2020-09-15 | 2022-03-22 | Applied Materials, Inc. | Smart camera substrate |
CN117191924B (zh) * | 2023-08-03 | 2024-04-05 | 哈尔滨工业大学 | 高效分离和动态表征的分子污染物原位分析检测装置 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3616680A (en) * | 1969-10-27 | 1971-11-02 | Sargent Welch Scientific Co | Leak detector |
US4255088A (en) * | 1979-06-14 | 1981-03-10 | Valleylab, Inc. | Liquid pumping system having means for detecting gas in the pump |
US4472962A (en) * | 1981-08-03 | 1984-09-25 | Balzers Aktiengesellschaft | Low pressure leak detector |
US4835114A (en) * | 1986-02-19 | 1989-05-30 | Hitachi, Ltd. | Method for LPCVD of semiconductors using oil free vacuum pumps |
DE3616319C1 (de) * | 1986-05-15 | 1987-07-02 | Cit Alcatel Gmbh | Heliumlecksuchanlage |
EP0283543B1 (de) * | 1987-03-27 | 1991-12-11 | Leybold Aktiengesellschaft | Lecksuchgerät und Betriebsverfahren dazu |
EP0344345B1 (de) * | 1988-06-01 | 1991-09-18 | Leybold Aktiengesellschaft | Pumpsystem für ein Lecksuchgerät |
US5049168A (en) * | 1988-09-12 | 1991-09-17 | Philip Danielson | Helium leak detection method and system |
DE4140366A1 (de) * | 1991-12-07 | 1993-06-09 | Leybold Ag, 6450 Hanau, De | Lecksucher fuer vakuumanlagen sowie verfahren zur durchfuehrung der lecksuche an vakuumanlagen |
DE4228313A1 (de) * | 1992-08-26 | 1994-03-03 | Leybold Ag | Gegenstrom-Lecksucher mit Hochvakuumpumpe |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
JP2655315B2 (ja) * | 1994-06-29 | 1997-09-17 | 日本真空技術株式会社 | 複合分子ポンプを使用した漏洩探知装置 |
DE4442174A1 (de) * | 1994-11-26 | 1996-05-30 | Leybold Ag | Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu |
DE4445829A1 (de) * | 1994-12-22 | 1996-06-27 | Leybold Ag | Gegenstrom-Schnüffellecksucher |
ES2192568T3 (es) * | 1994-12-23 | 2003-10-16 | Unaxis Balzers Ag | Procedimiento para el analisis de gases y analizador de gases. |
DE19504278A1 (de) * | 1995-02-09 | 1996-08-14 | Leybold Ag | Testgas-Lecksuchgerät |
GB9512929D0 (en) * | 1995-06-24 | 1995-08-30 | Sun Electric Uk Ltd | Multi-gas sensor systems for automatic emissions measurement |
US5823747A (en) * | 1996-05-29 | 1998-10-20 | Waters Investments Limited | Bubble detection and recovery in a liquid pumping system |
GB9701553D0 (en) * | 1997-01-25 | 1997-03-12 | Osborne Graham W | Forecourt fuel pumps |
DE19735250A1 (de) * | 1997-08-14 | 1999-02-18 | Leybold Vakuum Gmbh | Verfahren zum Betrieb eines Heliumlecksuchers und für die Durchführung dieses Verfahrens geeigneter Heliumlecksucher |
US6198792B1 (en) * | 1998-11-06 | 2001-03-06 | Euv Llc | Wafer chamber having a gas curtain for extreme-UV lithography |
FR2807951B1 (fr) * | 2000-04-20 | 2003-05-16 | Cit Alcatel | Procede et systeme de pompage des chambres de transfert d'equipement de semi-conducteur |
DE10055057A1 (de) * | 2000-11-07 | 2002-05-08 | Pfeiffer Vacuum Gmbh | Leckdetektorpumpe |
DE10124225B4 (de) * | 2001-05-18 | 2006-03-02 | Tetra Laval Holdings & Finance S.A. | Verfahren und Vorrichtung zum Bestimmen der Permeation einer Barriereschicht |
US6663352B2 (en) * | 2001-07-25 | 2003-12-16 | Itt Manufacturing Enterprises, Inc. | Method and apparatus for dynamically determining vapor pressure in pumping systems |
DE10156205A1 (de) * | 2001-11-15 | 2003-06-05 | Inficon Gmbh | Testgaslecksuchgerät |
US20030114942A1 (en) * | 2001-12-17 | 2003-06-19 | Varone John J. | Remote display module |
-
2004
- 2004-09-16 DE DE602004013612T patent/DE602004013612D1/de active Active
- 2004-09-16 WO PCT/GB2004/003983 patent/WO2005031169A1/en active IP Right Grant
- 2004-09-16 AT AT04768529T patent/ATE394598T1/de not_active IP Right Cessation
- 2004-09-16 EP EP04768529A patent/EP1668253B1/de active Active
- 2004-09-16 JP JP2006527460A patent/JP2007506903A/ja not_active Abandoned
- 2004-09-16 KR KR1020067005916A patent/KR20060090232A/ko not_active Application Discontinuation
- 2004-09-16 US US10/572,890 patent/US20070028669A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2005031169A1 (en) | 2005-04-07 |
EP1668253B1 (de) | 2008-05-07 |
KR20060090232A (ko) | 2006-08-10 |
DE602004013612D1 (de) | 2008-06-19 |
EP1668253A1 (de) | 2006-06-14 |
JP2007506903A (ja) | 2007-03-22 |
US20070028669A1 (en) | 2007-02-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |