TW200721245A - Pump apparatus for semiconductor processing - Google Patents

Pump apparatus for semiconductor processing

Info

Publication number
TW200721245A
TW200721245A TW095137044A TW95137044A TW200721245A TW 200721245 A TW200721245 A TW 200721245A TW 095137044 A TW095137044 A TW 095137044A TW 95137044 A TW95137044 A TW 95137044A TW 200721245 A TW200721245 A TW 200721245A
Authority
TW
Taiwan
Prior art keywords
semiconductor processing
pump apparatus
pump
pressure
transition
Prior art date
Application number
TW095137044A
Other languages
Chinese (zh)
Inventor
Graeme Huntley
Original Assignee
Boc Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Inc filed Critical Boc Group Inc
Publication of TW200721245A publication Critical patent/TW200721245A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C19/00—Sealing arrangements in rotary-piston machines or engines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/04—Shafts or bearings, or assemblies thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Reciprocating Pumps (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

The invention relates to a pump apparatus for use in semiconductor processing. The apparatus may include a single pump configured to transition a substance flow from about molecular pressure to about atmospheric pressure.
TW095137044A 2005-10-06 2006-10-05 Pump apparatus for semiconductor processing TW200721245A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/244,744 US20070081893A1 (en) 2005-10-06 2005-10-06 Pump apparatus for semiconductor processing

Publications (1)

Publication Number Publication Date
TW200721245A true TW200721245A (en) 2007-06-01

Family

ID=37911212

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095137044A TW200721245A (en) 2005-10-06 2006-10-05 Pump apparatus for semiconductor processing

Country Status (7)

Country Link
US (1) US20070081893A1 (en)
EP (1) EP1934482A2 (en)
JP (1) JP2009513861A (en)
KR (1) KR20080056192A (en)
CN (1) CN101501342A (en)
TW (1) TW200721245A (en)
WO (1) WO2007044260A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2498816A (en) * 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102012003680A1 (en) * 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh vacuum pump
CN106062374B (en) * 2014-03-03 2019-09-10 诺沃皮尼奥内股份有限公司 For running the method and system for having the back-to-back compressor of effluent
US11199267B2 (en) * 2019-08-16 2021-12-14 Applied Materials, Inc. Symmetric flow valve for higher flow conductance

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04219493A (en) * 1990-08-10 1992-08-10 Ebara Corp Turbo-molecular pump
CN100414612C (en) * 1995-10-09 2008-08-27 松下电器产业株式会社 Optic disc
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
GB9708397D0 (en) * 1997-04-25 1997-06-18 Boc Group Plc Improvements in vacuum pumps
GB9719634D0 (en) * 1997-09-15 1997-11-19 Boc Group Plc Improvements in vacuum pumps
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
EP0965756B1 (en) * 1998-06-17 2006-02-08 The BOC Group plc Screw pump
JP3961155B2 (en) * 1999-05-28 2007-08-22 Ｂｏｃエドワーズ株式会社 Vacuum pump
US6129534A (en) * 1999-06-16 2000-10-10 The Boc Group Plc Vacuum pumps
GB9930556D0 (en) * 1999-12-23 2000-02-16 Boc Group Plc Improvements in vacuum pumps
GB0004404D0 (en) * 2000-02-24 2000-04-12 Boc Group Plc Improvements in vacuum pumps
JP2002327698A (en) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd Vacuum pump
JP2003021093A (en) * 2001-07-05 2003-01-24 Boc Edwards Technologies Ltd Vacuum pump

Also Published As

Publication number Publication date
WO2007044260A3 (en) 2009-04-30
US20070081893A1 (en) 2007-04-12
KR20080056192A (en) 2008-06-20
EP1934482A2 (en) 2008-06-25
CN101501342A (en) 2009-08-05
WO2007044260A2 (en) 2007-04-19
JP2009513861A (en) 2009-04-02

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