ATE194780T1 - Trockene abgasbehandlung - Google Patents
Trockene abgasbehandlungInfo
- Publication number
- ATE194780T1 ATE194780T1 AT89906149T AT89906149T ATE194780T1 AT E194780 T1 ATE194780 T1 AT E194780T1 AT 89906149 T AT89906149 T AT 89906149T AT 89906149 T AT89906149 T AT 89906149T AT E194780 T1 ATE194780 T1 AT E194780T1
- Authority
- AT
- Austria
- Prior art keywords
- pct
- date dec
- sec
- exhaust treatment
- inlet
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Analytical Chemistry (AREA)
- Environmental & Geological Engineering (AREA)
- Biomedical Technology (AREA)
- Health & Medical Sciences (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Treating Waste Gases (AREA)
- Exhaust Gas Treatment By Means Of Catalyst (AREA)
- Silicon Compounds (AREA)
- Sampling And Sample Adjustment (AREA)
- Catalysts (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB888813270A GB8813270D0 (en) | 1988-06-04 | 1988-06-04 | Dry exhaust gas conditioning |
PCT/GB1989/000600 WO1989011905A1 (en) | 1988-06-04 | 1989-05-31 | Dry exhaust gas conditioning |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE194780T1 true ATE194780T1 (de) | 2000-08-15 |
Family
ID=10638097
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT89906149T ATE194780T1 (de) | 1988-06-04 | 1989-05-31 | Trockene abgasbehandlung |
Country Status (8)
Country | Link |
---|---|
US (1) | US5213767A (de) |
EP (1) | EP0419507B1 (de) |
JP (1) | JP2795504B2 (de) |
KR (1) | KR0125920B1 (de) |
AT (1) | ATE194780T1 (de) |
DE (1) | DE68929232T2 (de) |
GB (1) | GB8813270D0 (de) |
WO (1) | WO1989011905A1 (de) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5417934A (en) * | 1988-06-04 | 1995-05-23 | Boc Limited | Dry exhaust gas conditioning |
US5582865A (en) * | 1988-12-12 | 1996-12-10 | Extraction Systems, Inc. | Non-woven filter composite |
US5626820A (en) * | 1988-12-12 | 1997-05-06 | Kinkead; Devon A. | Clean room air filtering |
US5486340A (en) * | 1989-12-02 | 1996-01-23 | The Boc Group Plc | Exhaust gas conditioning |
GB8927314D0 (en) * | 1989-12-02 | 1990-01-31 | Plasma Products Limited | Exhaust gas conditioning |
DE4233119C1 (de) * | 1992-10-02 | 1993-12-09 | Veitscher Magnesitwerke Ag | Verfahren zur Reduzierung des Schadstoffgehaltes von Rauchgasen in einem Ofenaggregat |
DE69425003T2 (de) * | 1993-02-11 | 2001-03-08 | The Boc Group Plc, Windlesham | Verfahren zur Reinigung von Gasströmen |
US5853678A (en) * | 1993-03-17 | 1998-12-29 | Nipon Sanso Corporation | Method for removing hydrides, alkoxides and alkylates out of a gas using cupric hydroxide |
JP3340510B2 (ja) * | 1993-05-19 | 2002-11-05 | 日本パイオニクス株式会社 | 有害ガスの浄化方法 |
US5607647A (en) * | 1993-12-02 | 1997-03-04 | Extraction Systems, Inc. | Air filtering within clean environments |
US5885845A (en) * | 1993-12-22 | 1999-03-23 | Nippon Sanso Corporation | Method for detecting inorganic hydrides, inorganic halides and organometallic compounds in a gas using copper hydroxide |
JP3280173B2 (ja) * | 1994-11-29 | 2002-04-30 | 日本エア・リキード株式会社 | 排ガス処理装置 |
US5856198A (en) * | 1994-12-28 | 1999-01-05 | Extraction Systems, Inc. | Performance monitoring of gas-phase air filters |
US5468459A (en) * | 1995-02-28 | 1995-11-21 | The Boc Group, Inc. | Gas stream treatment method for removing per-fluorocarbons |
US6776970B1 (en) * | 1995-08-07 | 2004-08-17 | Giorgio Vergani | Getter materials for deoxygenating ammonia/oxygen gas mixtures at low temperature |
JP4037475B2 (ja) * | 1996-09-04 | 2008-01-23 | 忠弘 大見 | ハロゲン系化合物を含有する排ガスの処理方法 |
GB9608061D0 (en) | 1996-04-16 | 1996-06-19 | Boc Group Plc | Removal of noxious substances from gas streams |
US5928426A (en) * | 1996-08-08 | 1999-07-27 | Novellus Systems, Inc. | Method and apparatus for treating exhaust gases from CVD, PECVD or plasma etch reactors |
US5759498A (en) * | 1996-12-12 | 1998-06-02 | United Microelectronics Corp. | Gas exhaust apparatus |
US5955037A (en) * | 1996-12-31 | 1999-09-21 | Atmi Ecosys Corporation | Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases |
CA2327658A1 (en) | 1998-04-09 | 1999-10-21 | Uhp Materials, Inc. | Preparation and purification of diborane |
KR100546282B1 (ko) * | 1999-01-11 | 2006-01-26 | 삼성전자주식회사 | 칼슘화합물을 이용한 유해가스 정화방법 |
US20030049182A1 (en) * | 2000-05-01 | 2003-03-13 | Christopher Hertzler | System and method for abatement of dangerous substances from a waste gas stream |
US6821489B1 (en) * | 2000-10-10 | 2004-11-23 | International Business Machines Corporation | System and method for abating the simultaneous flow of silane and arsine |
US7067091B2 (en) * | 2001-06-28 | 2006-06-27 | Sued-Chemie Catalysts Japan Inc. | Treating agent for metal-hydride-containing exhaust gas and method of preparing the same as well as method of treating metal-hydride-containing exhaust gas |
US6818566B2 (en) * | 2002-10-18 | 2004-11-16 | The Boc Group, Inc. | Thermal activation of fluorine for use in a semiconductor chamber |
US20040185661A1 (en) * | 2003-03-17 | 2004-09-23 | Sherer John Michael | Scrubber system for pretreatment of an effluent waste stream containing arsenic |
US20050053535A1 (en) * | 2003-09-08 | 2005-03-10 | Seh America, Inc. | Gettering filter and associated method for removing oxygen from a gas |
US20050123463A1 (en) * | 2003-12-05 | 2005-06-09 | Seeley Andrew J. | Treatment of exhaust gases |
US7569193B2 (en) | 2003-12-19 | 2009-08-04 | Applied Materials, Inc. | Apparatus and method for controlled combustion of gaseous pollutants |
US7736599B2 (en) | 2004-11-12 | 2010-06-15 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
US7368000B2 (en) * | 2004-12-22 | 2008-05-06 | The Boc Group Plc | Treatment of effluent gases |
JP5102217B2 (ja) * | 2005-10-31 | 2012-12-19 | アプライド マテリアルズ インコーポレイテッド | プロセス削減反応器 |
KR100654922B1 (ko) * | 2006-01-26 | 2006-12-06 | 주식회사 코캣 | 반도체 제조공정으로부터 발생하는 배가스 처리장치 및방법 |
GB0602506D0 (en) * | 2006-02-08 | 2006-03-22 | Boc Group Plc | Method of treating a gas stream |
JP2008086913A (ja) * | 2006-10-02 | 2008-04-17 | Central Glass Co Ltd | フッ素含有ガス中のフッ素の除去方法 |
US8512452B2 (en) | 2008-08-19 | 2013-08-20 | Tel Solar Ag | Hot-trap assembly for trapping unreacted gas by-products |
TW201016294A (en) * | 2008-08-19 | 2010-05-01 | Oerlikon Solar Ip Ag Trubbach | Hot-trap assembly for trapping unreacted gas by-products using catalytically active surfaces |
US20110212010A1 (en) * | 2009-09-02 | 2011-09-01 | Despatch Industries Limited Partnership | Apparatus and Method for Thermal Destruction of Volatile Organic Compounds |
JP5485669B2 (ja) * | 2009-12-03 | 2014-05-07 | 大旺新洋株式会社 | 酸性ガスの中和処理方法及びその装置 |
MX2014011720A (es) * | 2012-03-30 | 2016-08-08 | Fuel Tech Inc | Procesos en seco, aparatos, composiciones y sistemas para reducir los oxidos de azufre y el acido clorhidrico (hc1). |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4036940A (en) * | 1975-12-29 | 1977-07-19 | Monsanto Company | Recovery of iodine |
SU990273A1 (ru) * | 1980-12-01 | 1983-01-23 | Ленинградский Институт Авиационного Приборостроения | Способ очистки отход щих газов от паров тIсL @ |
JPS5949822A (ja) * | 1982-09-14 | 1984-03-22 | Nippon Sanso Kk | 揮発性無機水素化物等を含有するガスの処理方法 |
US4442077A (en) * | 1982-09-27 | 1984-04-10 | Chemical Engineering Technology, Inc. | Method of removing hydrides of phosphorus, arsenic, antimony and bismuth from hydrocarbon and non-hydrocarbon streams |
DD221088A1 (de) * | 1983-09-12 | 1985-04-17 | Univ Schiller Jena | Verfahren und anordnung zur entgiftung von f-kohlenstoffhaltigen abgasen |
JPS61101231A (ja) * | 1984-10-23 | 1986-05-20 | Central Glass Co Ltd | フツ素ガスの除去方法 |
GB8429709D0 (en) * | 1984-11-23 | 1985-01-03 | Alcan Int Ltd | Halogen-containing organic compounds |
JPS61204025A (ja) * | 1985-03-06 | 1986-09-10 | Central Glass Co Ltd | Nf↓3の除害方法 |
DE3561499D1 (en) * | 1985-03-13 | 1988-03-03 | Japan Pionics | Method of cleaning exhaust gases |
US4629611A (en) * | 1985-04-29 | 1986-12-16 | International Business Machines Corporation | Gas purifier for rare-gas fluoride lasers |
US4684510A (en) * | 1985-12-20 | 1987-08-04 | Hewlett-Packard Company | Method and apparatus for prevention of atmospheric corrosion of electronic equipment |
JPS62152519A (ja) * | 1985-12-26 | 1987-07-07 | Iwatani & Co | ハロゲン系廃ガスの乾式処理方法 |
JPS6312322A (ja) * | 1986-07-04 | 1988-01-19 | Showa Denko Kk | 排ガス処理方法 |
DE3869480D1 (de) * | 1987-06-01 | 1992-04-30 | Japan Pionics | Verfahren zum reinigen von abgas. |
JPS6430626A (en) * | 1987-07-28 | 1989-02-01 | Ebara Res Co Ltd | Treatment of exhaust gas |
-
1988
- 1988-06-04 GB GB888813270A patent/GB8813270D0/en active Pending
-
1989
- 1989-05-31 EP EP89906149A patent/EP0419507B1/de not_active Expired - Lifetime
- 1989-05-31 AT AT89906149T patent/ATE194780T1/de not_active IP Right Cessation
- 1989-05-31 KR KR1019900700226A patent/KR0125920B1/ko not_active IP Right Cessation
- 1989-05-31 WO PCT/GB1989/000600 patent/WO1989011905A1/en active IP Right Grant
- 1989-05-31 US US07/613,572 patent/US5213767A/en not_active Expired - Lifetime
- 1989-05-31 JP JP1505673A patent/JP2795504B2/ja not_active Expired - Fee Related
- 1989-05-31 DE DE68929232T patent/DE68929232T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH04502726A (ja) | 1992-05-21 |
GB8813270D0 (en) | 1988-07-06 |
KR0125920B1 (ko) | 1997-12-19 |
EP0419507A1 (de) | 1991-04-03 |
JP2795504B2 (ja) | 1998-09-10 |
DE68929232T2 (de) | 2001-01-25 |
DE68929232D1 (de) | 2000-08-24 |
EP0419507B1 (de) | 2000-07-19 |
WO1989011905A1 (en) | 1989-12-14 |
KR900701374A (ko) | 1990-12-01 |
US5213767A (en) | 1993-05-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
REN | Ceased due to non-payment of the annual fee |