WO2024106303A1 - Iodohydrocarbon mixture, method for producing iodohydrocarbon mixture, and container filled with iodohydrocarbon mixture - Google Patents
Iodohydrocarbon mixture, method for producing iodohydrocarbon mixture, and container filled with iodohydrocarbon mixture Download PDFInfo
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- WO2024106303A1 WO2024106303A1 PCT/JP2023/040411 JP2023040411W WO2024106303A1 WO 2024106303 A1 WO2024106303 A1 WO 2024106303A1 JP 2023040411 W JP2023040411 W JP 2023040411W WO 2024106303 A1 WO2024106303 A1 WO 2024106303A1
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- iodinated
- hydrocarbon
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- hydrocarbon mixture
- container
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- 239000000203 mixture Substances 0.000 title claims abstract description 121
- 238000004519 manufacturing process Methods 0.000 title claims description 23
- 150000002430 hydrocarbons Chemical class 0.000 claims description 145
- 229930195733 hydrocarbon Natural products 0.000 claims description 135
- 239000004215 Carbon black (E152) Substances 0.000 claims description 125
- NZZFYRREKKOMAT-UHFFFAOYSA-N diiodomethane Chemical compound ICI NZZFYRREKKOMAT-UHFFFAOYSA-N 0.000 claims description 26
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical class O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 22
- 230000018044 dehydration Effects 0.000 claims description 10
- 238000006297 dehydration reaction Methods 0.000 claims description 10
- 239000002994 raw material Substances 0.000 claims description 10
- 229930195734 saturated hydrocarbon Natural products 0.000 claims description 10
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical class [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims description 8
- 235000013675 iodine Nutrition 0.000 claims description 8
- 125000004432 carbon atom Chemical group C* 0.000 claims description 4
- 230000006866 deterioration Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 229910021536 Zeolite Inorganic materials 0.000 description 7
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 7
- 239000010457 zeolite Substances 0.000 description 7
- OKJPEAGHQZHRQV-UHFFFAOYSA-N Triiodomethane Natural products IC(I)I OKJPEAGHQZHRQV-UHFFFAOYSA-N 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- INQOMBQAUSQDDS-UHFFFAOYSA-N iodomethane Chemical compound IC INQOMBQAUSQDDS-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 239000011630 iodine Substances 0.000 description 4
- 229910052740 iodine Inorganic materials 0.000 description 4
- 239000003463 adsorbent Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 2
- 238000005443 coulometric titration Methods 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000769 gas chromatography-flame ionisation detection Methods 0.000 description 2
- 239000002808 molecular sieve Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 2
- 229910001845 yogo sapphire Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920002430 Fibre-reinforced plastic Polymers 0.000 description 1
- 229910000617 Mangalloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- -1 aluminum alloys Chemical class 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 239000013064 chemical raw material Substances 0.000 description 1
- VNTLIPZTSJSULJ-UHFFFAOYSA-N chromium molybdenum Chemical compound [Cr].[Mo] VNTLIPZTSJSULJ-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 239000011151 fibre-reinforced plastic Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C17/00—Preparation of halogenated hydrocarbons
- C07C17/38—Separation; Purification; Stabilisation; Use of additives
- C07C17/389—Separation; Purification; Stabilisation; Use of additives by adsorption on solids
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C19/00—Acyclic saturated compounds containing halogen atoms
- C07C19/07—Acyclic saturated compounds containing halogen atoms containing iodine
Definitions
- the present invention relates to an iodinated hydrocarbon mixture, a method for producing an iodinated hydrocarbon mixture, and a container for filling the iodinated hydrocarbon mixture.
- Iodohydrocarbons are compounds that are widely used industrially as chemical raw materials and solvents. In recent years, they have also come to be used in various processes in semiconductor manufacturing. Unlike the plastic and glass containers that are generally used as storage containers for chemical raw material applications, metal containers such as metal high-pressure containers (cylinders) or metal canisters are used as storage containers for these iodinated hydrocarbons used in various processes in semiconductor manufacturing.
- metal containers such as metal high-pressure containers (cylinders) or metal canisters are used as storage containers for these iodinated hydrocarbons used in various processes in semiconductor manufacturing.
- Patent Document 1 listed below discloses a method of arranging a stabilizing material for iodinated hydrocarbons inside an iodinated hydrocarbon storage container, the stabilizing material having a contact surface with the iodinated hydrocarbon liquid and a contact surface with the iodinated hydrocarbon gas made of metallic copper, metallic silver, or the like.
- iodinated hydrocarbons when used, for example, in the application of forming semiconductor films, they may be stored in metal containers at high temperatures (for example, at a temperature of 100° C. or higher) for the purpose of increasing the vapor pressure in order to ensure the supply of iodinated hydrocarbons to semiconductor manufacturing equipment or the like.
- the iodinated hydrocarbon described in Patent Document 1 has room for improvement in terms of suppressing deterioration of the quality of the iodinated hydrocarbon, particularly at high temperatures.
- iodinated hydrocarbons since iodinated hydrocarbons contain trace amounts of water and other impurities, strictly speaking they are mixtures rather than pure substances. For this reason, in this specification, "iodinated hydrocarbons" will be referred to as "iodinated hydrocarbon mixtures.”
- the present invention was made in consideration of the above problems, and aims to provide an iodized hydrocarbon mixture that can suppress quality deterioration even when stored at high temperatures, a method for producing the iodized hydrocarbon mixture, and a container for filling the iodized hydrocarbon mixture.
- one aspect of the present invention provides an iodohydrocarbon mixture containing an iodohydrocarbon and moisture, wherein the concentration of the moisture in the iodohydrocarbon mixture is 140 ppm by mass or less.
- This iodinated hydrocarbon mixture can suppress deterioration in quality even when stored at high temperatures.
- Another aspect of the present invention provides a method for producing the above-mentioned iodinated hydrocarbon mixture, comprising a dehydration step of dehydrating a raw material containing iodinated hydrocarbon and moisture. According to this method for producing an iodinated hydrocarbon mixture, it is possible to produce an iodinated hydrocarbon mixture that can suppress deterioration in quality even when stored at high temperatures.
- Yet another aspect of the present invention provides an iodo-hydrocarbon mixture-filled container comprising a container and an iodo-hydrocarbon mixture filled in the container, the iodo-hydrocarbon mixture containing an iodo-hydrocarbon and moisture, wherein the moisture concentration in the iodo-hydrocarbon mixture is 140 ppm by mass or less.
- this container filled with an iodohydrocarbon mixture deterioration in the quality of the iodohydrocarbon mixture can be suppressed even when the container is filled with the iodohydrocarbon mixture and stored at high temperatures.
- the hydrocarbon group may have 1 to 4 carbon atoms and 1 to 3 iodines.
- the iodinated hydrocarbon may be an iodinated saturated hydrocarbon.
- the iodinated hydrocarbon may be diiodomethane.
- iodinated hydrocarbon refers to a compound represented by RI (R represents a hydrocarbon group, and I represents iodine), or a compound in which some of the hydrogen atoms contained in R of this compound have been replaced with iodine.
- the present invention provides an iodized hydrocarbon mixture that can suppress quality deterioration even when stored at high temperatures, a method for producing the iodized hydrocarbon mixture, and a container for filling the iodized hydrocarbon mixture.
- FIG. 1 is a partial cross-sectional view showing a schematic diagram of one embodiment of an iodinated hydrocarbon mixture filling container of the present invention.
- the iodinated hydrocarbon mixture contains an iodinated hydrocarbon and moisture.
- the concentration of moisture in the iodinated hydrocarbon mixture is 140 ppm by mass or less. This iodinated hydrocarbon mixture can suppress deterioration in quality even when stored at high temperatures.
- the iodinated hydrocarbon is not particularly limited, for example, when the iodinated hydrocarbon is used for the purpose of forming a semiconductor film, the iodinated hydrocarbon is preferably an iodinated hydrocarbon having a high vapor pressure from the viewpoint of handling.
- the iodinated hydrocarbon having a high vapor pressure an iodinated hydrocarbon having a hydrocarbon group with a carbon number of 1 to 8 and an iodine number of 1 to 4 is preferable, and an iodinated hydrocarbon having a hydrocarbon group with a carbon number of 1 to 4 and an iodine number of 1 to 3 is more preferable.
- the iodinated hydrocarbon may be an iodinated saturated hydrocarbon or an iodinated unsaturated hydrocarbon, i.e., the hydrocarbon group of the iodinated hydrocarbon may be a saturated hydrocarbon group or an unsaturated hydrocarbon group.
- An example of the iodinated saturated hydrocarbon is diiodomethane.
- the water concentration of the iodinated hydrocarbon may be 140 ppm by mass or less, but is preferably 120 ppm by mass or less, more preferably 100 ppm by mass or less, even more preferably 80 ppm by mass or less, still more preferably 50 ppm by mass or less, and particularly preferably 30 ppm by mass or less.
- the water concentration of the iodinated hydrocarbon may be 0.1 ppm by mass or more, 0.5 ppm by mass or more, 1.0 ppm by mass or more, 5.0 ppm by mass or more, 10 ppm by mass or more, 15 ppm by mass or more, or 20 ppm by mass or more.
- the water concentration in the iodinated hydrocarbon mixture is a value measured by a Karl Fischer moisture meter.
- a moisture concentration meter sold by a measuring device manufacturer can be used.
- An example of such a moisture concentration meter is the coulometric titration Karl Fischer moisture meter manufactured by Hiranuma Corporation.
- the method for producing an iodized hydrocarbon mixture according to the present invention is a method for producing an iodized hydrocarbon mixture containing iodized hydrocarbons and moisture, the moisture concentration of which is 140 mass ppm or less, and includes a dehydration step of dehydrating a raw material containing iodized hydrocarbons and moisture.
- the raw material may be a mixture containing an iodinated hydrocarbon and water, and the water concentration in the raw material is not particularly limited.
- the moisture concentration in the raw material may be 1000 ppm by mass or less, or may be 200 ppm by mass or less.
- the dehydration method is not particularly limited as long as it is a method capable of reducing the moisture concentration in the raw material, which is the iodinated hydrocarbon mixture before dehydration.
- Examples of the dehydration method include distillation of the iodinated hydrocarbon mixture before dehydration and a method of dehydrating the iodinated hydrocarbon mixture before dehydration by contacting it with a moisture adsorbent.
- the type of moisture adsorbent is not particularly limited, but examples of the moisture adsorbent include zeolite, activated carbon, and silica gel.
- the type of zeolite is not particularly limited, and the molar ratio of SiO2 and Al2O3 contained in the zeolite ( SiO2 / Al2O3 ratio) and the pore size of the zeolite are also not particularly limited.
- the zeolite is preferably a zeolite that does not react with iodinated hydrocarbons.
- a zeolite is, for example, molecular sieve 4A.
- the dehydrated raw material may be mixed with water to adjust the water concentration in the iodinated hydrocarbon mixture.
- the water concentration in the iodinated hydrocarbon mixture finally obtained by the method for producing an iodinated hydrocarbon mixture according to the present invention may be 140 ppm by mass or less, but the water concentration is preferably 120 ppm by mass or less, more preferably 100 ppm by mass or less, even more preferably 80 ppm by mass or less, still more preferably 50 ppm by mass or less, and particularly preferably 30 ppm by mass or less.
- the water concentration in the iodinated hydrocarbon mixture may be 0.1 ppm by mass or more, 0.5 ppm by mass or more, 1.0 ppm by mass or more, 5.0 ppm by mass or more, 10 ppm by mass or more, 15 ppm by mass or more, or 20 ppm by mass or more.
- FIG. 1 is a partial cross-sectional view that shows a schematic view of one embodiment of a container filled with an iodinated hydrocarbon mixture according to the present invention.
- the iodinated hydrocarbon mixture filling container 100 includes a container 10 and an iodinated hydrocarbon mixture 20 filled in the container 10.
- the iodinated hydrocarbon mixture 20 contains iodinated hydrocarbons and moisture, and the moisture concentration in the iodinated hydrocarbon mixture 20 is 140 ppm by mass or less. According to this iodinated hydrocarbon mixture filled container 100, even if the container 10 is filled with the iodinated hydrocarbon mixture 20 and stored at high temperatures, deterioration in the quality of the iodinated hydrocarbon mixture 20 can be suppressed.
- the container 10 will now be described.
- ⁇ Container> Although there are no particular limitations on the material constituting the container 10, it is preferable to use a material that can ensure airtightness and has excellent pressure resistance. Examples of such materials include alloy steels such as manganese steel, stainless steel, and chromium-molybdenum steel, carbon steel, and metals such as aluminum alloys, and composite materials such as fiber-reinforced plastics.
- the container 10 includes a cylindrical body 11 having an inner surface 10a. Specifically, as shown in Fig. 1, the container 10 further includes a bottom 12 provided at the lower end of the cylindrical body 11, a lid 13 provided at the upper end side of the cylindrical body 11, and a valve 14 provided on the lid 13.
- the valve 14 includes a valve for filling the iodinated hydrocarbon mixture 20 and a valve for discharging the iodinated hydrocarbon mixture 20.
- the valve 14 may be a single valve. In this case, the valve 14 serves both as a valve for filling the iodinated hydrocarbon mixture 20 and a valve for discharging the iodinated hydrocarbon mixture 20.
- the container 10 may be constructed of a single layer, or may be constructed of a laminate of two or more layers.
- the container 10 is preferably pressure resistant, so that the iodinated hydrocarbon mixture 20 can be stored in a pressurized state.
- the method for manufacturing the container 100 filled with an iodinated hydrocarbon mixture includes a step of filling the container 10 with an iodinated hydrocarbon mixture 20 to manufacture the container 100 filled with an iodinated hydrocarbon mixture.
- iodized hydrocarbon mixtures are highly reactive. For this reason, it is preferable that the iodized hydrocarbon mixture 20 is filled in a light-shielded and dehumidified environment to prevent the inclusion of air when filling the container.
- the iodized hydrocarbon mixture 20 is introduced into the container 10 in an inert gas atmosphere, and the container 10 is sealed and filled with the iodized hydrocarbon mixture 20. From the viewpoint of preventing the inclusion of air when filling the container 10, it is more preferable to connect the iodized hydrocarbon mixture supply source and the container 10 with piping and fill the container 10 with the iodized hydrocarbon mixture 20 in a closed system that minimizes the possibility of air inclusion.
- the iodized hydrocarbon mixture supply source may be connected with piping to the container 10 that has been previously depressurized, and the iodized hydrocarbon mixture 20 may be filled into the container 10 by utilizing the pressure difference between the container 10 and the iodized hydrocarbon mixture supply source.
- an inert gas may be sealed inside the container 10 and the iodinated hydrocarbon mixture 20 may be stored under normal pressure or under pressure, or an iodinated hydrocarbon mixture supply source may be connected by piping to the container 10 in which an inert gas has already been sealed, and the iodinated hydrocarbon mixture 20 may be pumped with the inert gas and filled into the container 10.
- Example 1 The diiodomethane mixture as the raw material was dehydrated by contacting it with molecular sieve 4A (manufactured by Tosoh Corporation, product name: Zeorum A-4) to prepare a mixture of diiodomethane as an iodinated hydrocarbon and water as a diiodomethane mixture.
- the water concentration in the diiodomethane mixture was measured with a Karl Fischer moisture meter (manufactured by HIRANUMA Corporation, product name: AQ-2200S, coulometric titration method) and was found to be 24 ppm by mass, as shown in Table 1.
- Example 2 The diiodomethane mixture obtained in Example 1 was mixed with water to prepare a diiodomethane mixture having a water concentration of 47 ppm by mass, as shown in Table 1.
- Example 3 The diiodomethane mixture obtained in Example 1 was mixed with water to prepare a diiodomethane mixture having a water concentration of 94 ppm by mass as shown in Table 1.
- a metal container was prepared as follows. First, a cylindrical pipe made of SUS316L (inner diameter 6.35 mm ⁇ length 100 mm ⁇ thickness 1.0 mm) with female nuts on both ends was prepared as a cylindrical body, and a SUS316 cap was attached to the lower end of the pipe as a bottom part using a Swagelok (registered trademark) tube joint. In this way, the main body of the metal container was obtained.
- SUS316L inner diameter 6.35 mm ⁇ length 100 mm ⁇ thickness 1.0 mm
- Swagelok registered trademark
- test sample was placed in a constant temperature bath and stored at 130° C. After storing the test sample for 13 days, it was removed from the constant temperature bath and allowed to cool to 20-25° C., after which the purity of the diiodomethane mixture, the concentration of iodomethane in the diiodomethane mixture, and the concentrations of other components (components other than diiodomethane and iodomethane) were measured using the GC-FID. The results are shown in Table 1.
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Abstract
This iodohydrocarbon mixture contains an iodohydrocarbon and moisture. The moisture concentration in this iodohydrocarbon mixture is 140 ppm by mass or less.
Description
本発明は、ヨウ化炭化水素混合物、ヨウ化炭化水素混合物の製造方法及びヨウ化炭化水素混合物充填容器に関する。
The present invention relates to an iodinated hydrocarbon mixture, a method for producing an iodinated hydrocarbon mixture, and a container for filling the iodinated hydrocarbon mixture.
ヨウ化炭化水素は、化成品原料、溶剤としての用途があり、産業上多用されている化合物である。近年、ヨウ化炭化水素は、半導体製造における各種工程でも利用されるようになっている。このような半導体製造における各種工程で利用されるヨウ化炭化水素の保存用容器としては、化成品原料用途での保管容器として一般的に用いられる樹脂製容器やガラス製容器とは異なり、金属製高圧容器(シリンダー)または金属製キャニスターなどの金属容器が使用される。
Iodohydrocarbons are compounds that are widely used industrially as chemical raw materials and solvents. In recent years, they have also come to be used in various processes in semiconductor manufacturing. Unlike the plastic and glass containers that are generally used as storage containers for chemical raw material applications, metal containers such as metal high-pressure containers (cylinders) or metal canisters are used as storage containers for these iodinated hydrocarbons used in various processes in semiconductor manufacturing.
しかし、ヨウ化炭化水素は、保管状態等の因子により純度低下が生じることは知られるところである。この性質は一産業にとって未だに大きな課題となっている。
この課題の解決策として、例えば下記特許文献1では、ヨウ化炭化水素貯蔵容器内に、ヨウ化炭化水素液体との接触面とヨウ化炭化水素気体との接触面とを金属銅や金属銀などで構成したヨウ化炭化水素の安定化材を配置する方法が開示されている。 However, it is known that the purity of iodinated hydrocarbons can decrease depending on factors such as storage conditions, and this property remains a major issue for the industry.
As a solution to this problem, for example, Patent Document 1 listed below discloses a method of arranging a stabilizing material for iodinated hydrocarbons inside an iodinated hydrocarbon storage container, the stabilizing material having a contact surface with the iodinated hydrocarbon liquid and a contact surface with the iodinated hydrocarbon gas made of metallic copper, metallic silver, or the like.
この課題の解決策として、例えば下記特許文献1では、ヨウ化炭化水素貯蔵容器内に、ヨウ化炭化水素液体との接触面とヨウ化炭化水素気体との接触面とを金属銅や金属銀などで構成したヨウ化炭化水素の安定化材を配置する方法が開示されている。 However, it is known that the purity of iodinated hydrocarbons can decrease depending on factors such as storage conditions, and this property remains a major issue for the industry.
As a solution to this problem, for example, Patent Document 1 listed below discloses a method of arranging a stabilizing material for iodinated hydrocarbons inside an iodinated hydrocarbon storage container, the stabilizing material having a contact surface with the iodinated hydrocarbon liquid and a contact surface with the iodinated hydrocarbon gas made of metallic copper, metallic silver, or the like.
ところで、ヨウ化炭化水素は、例えば半導体の成膜用途で使用される場合には、半導体製造装置などへのヨウ化炭化水素の供給量を確保するために、蒸気圧を高める目的で高温(例えば100℃以上の温度)の金属容器内で保管されることがある。
しかしながら、上記特許文献1に記載のヨウ化炭化水素は、特に高温下におけるヨウ化炭化水素の品質劣化の抑制の点で改善の余地を有していた。
なお、ヨウ化炭化水素は、微量の水分その他の不純物を含んでいるため、厳密には純物質ではなく混合物である。このため、本明細書においては、「ヨウ化炭化水素」を「ヨウ化炭化水素混合物」と呼ぶこととする。 Incidentally, when iodinated hydrocarbons are used, for example, in the application of forming semiconductor films, they may be stored in metal containers at high temperatures (for example, at a temperature of 100° C. or higher) for the purpose of increasing the vapor pressure in order to ensure the supply of iodinated hydrocarbons to semiconductor manufacturing equipment or the like.
However, the iodinated hydrocarbon described in Patent Document 1 has room for improvement in terms of suppressing deterioration of the quality of the iodinated hydrocarbon, particularly at high temperatures.
In addition, since iodinated hydrocarbons contain trace amounts of water and other impurities, strictly speaking they are mixtures rather than pure substances. For this reason, in this specification, "iodinated hydrocarbons" will be referred to as "iodinated hydrocarbon mixtures."
しかしながら、上記特許文献1に記載のヨウ化炭化水素は、特に高温下におけるヨウ化炭化水素の品質劣化の抑制の点で改善の余地を有していた。
なお、ヨウ化炭化水素は、微量の水分その他の不純物を含んでいるため、厳密には純物質ではなく混合物である。このため、本明細書においては、「ヨウ化炭化水素」を「ヨウ化炭化水素混合物」と呼ぶこととする。 Incidentally, when iodinated hydrocarbons are used, for example, in the application of forming semiconductor films, they may be stored in metal containers at high temperatures (for example, at a temperature of 100° C. or higher) for the purpose of increasing the vapor pressure in order to ensure the supply of iodinated hydrocarbons to semiconductor manufacturing equipment or the like.
However, the iodinated hydrocarbon described in Patent Document 1 has room for improvement in terms of suppressing deterioration of the quality of the iodinated hydrocarbon, particularly at high temperatures.
In addition, since iodinated hydrocarbons contain trace amounts of water and other impurities, strictly speaking they are mixtures rather than pure substances. For this reason, in this specification, "iodinated hydrocarbons" will be referred to as "iodinated hydrocarbon mixtures."
本発明は、上記のような課題に鑑みてなされたものであり、高温下で保管されても品質劣化を抑制できるヨウ化炭化水素混合物、ヨウ化炭化水素混合物の製造方法及びヨウ化炭化水素混合物充填容器を提供することを目的とする。
The present invention was made in consideration of the above problems, and aims to provide an iodized hydrocarbon mixture that can suppress quality deterioration even when stored at high temperatures, a method for producing the iodized hydrocarbon mixture, and a container for filling the iodized hydrocarbon mixture.
本発明者らは上記課題を解決するため鋭意研究を重ねた結果、ヨウ化炭化水素混合物中の水分濃度を特定の値以下にすることにより、上記課題を解決し得ることを見出し、本発明を完成するに至った。
As a result of extensive research into solving the above problems, the inventors discovered that the above problems could be solved by reducing the water concentration in the iodinated hydrocarbon mixture to a specific value or less, and thus completed the present invention.
すなわち、本発明の一側面は、ヨウ化炭化水素と水分とを含有するヨウ化炭化水素混合物であって、前記ヨウ化炭化水素混合物中の前記水分の濃度が140質量ppm以下であるヨウ化炭化水素混合物を提供する。
このヨウ化炭化水素混合物によれば、高温下で保管されても品質劣化を抑制できる。 That is, one aspect of the present invention provides an iodohydrocarbon mixture containing an iodohydrocarbon and moisture, wherein the concentration of the moisture in the iodohydrocarbon mixture is 140 ppm by mass or less.
This iodinated hydrocarbon mixture can suppress deterioration in quality even when stored at high temperatures.
このヨウ化炭化水素混合物によれば、高温下で保管されても品質劣化を抑制できる。 That is, one aspect of the present invention provides an iodohydrocarbon mixture containing an iodohydrocarbon and moisture, wherein the concentration of the moisture in the iodohydrocarbon mixture is 140 ppm by mass or less.
This iodinated hydrocarbon mixture can suppress deterioration in quality even when stored at high temperatures.
また、本発明の別の一側面は、上述したヨウ化炭化水素混合物を製造する方法であって、ヨウ化炭化水素と水分とを含有する原料を脱水する脱水工程を含む、ヨウ化炭化水素混合物の製造方法を提供する。
このヨウ化炭化水素混合物の製造方法によれば、高温下で保管されても品質劣化を抑制できるヨウ化炭化水素混合物を製造できる。 Another aspect of the present invention provides a method for producing the above-mentioned iodinated hydrocarbon mixture, comprising a dehydration step of dehydrating a raw material containing iodinated hydrocarbon and moisture.
According to this method for producing an iodinated hydrocarbon mixture, it is possible to produce an iodinated hydrocarbon mixture that can suppress deterioration in quality even when stored at high temperatures.
このヨウ化炭化水素混合物の製造方法によれば、高温下で保管されても品質劣化を抑制できるヨウ化炭化水素混合物を製造できる。 Another aspect of the present invention provides a method for producing the above-mentioned iodinated hydrocarbon mixture, comprising a dehydration step of dehydrating a raw material containing iodinated hydrocarbon and moisture.
According to this method for producing an iodinated hydrocarbon mixture, it is possible to produce an iodinated hydrocarbon mixture that can suppress deterioration in quality even when stored at high temperatures.
また、本発明のさらに別の一側面は、容器と、前記容器に充填され、ヨウ化炭化水素と水分とを含有するヨウ化炭化水素混合物とを備えるヨウ化炭化水素混合物充填容器であって、前記ヨウ化炭化水素混合物中の水分濃度が140質量ppm以下である、ヨウ化炭化水素混合物充填容器を提供する。
このヨウ化炭化水素混合物充填容器によれば、容器内にヨウ化炭化水素混合物が充填されて高温下で保管されてもヨウ化炭化水素混合物の品質劣化を抑制できる。 Yet another aspect of the present invention provides an iodo-hydrocarbon mixture-filled container comprising a container and an iodo-hydrocarbon mixture filled in the container, the iodo-hydrocarbon mixture containing an iodo-hydrocarbon and moisture, wherein the moisture concentration in the iodo-hydrocarbon mixture is 140 ppm by mass or less.
According to this container filled with an iodohydrocarbon mixture, deterioration in the quality of the iodohydrocarbon mixture can be suppressed even when the container is filled with the iodohydrocarbon mixture and stored at high temperatures.
このヨウ化炭化水素混合物充填容器によれば、容器内にヨウ化炭化水素混合物が充填されて高温下で保管されてもヨウ化炭化水素混合物の品質劣化を抑制できる。 Yet another aspect of the present invention provides an iodo-hydrocarbon mixture-filled container comprising a container and an iodo-hydrocarbon mixture filled in the container, the iodo-hydrocarbon mixture containing an iodo-hydrocarbon and moisture, wherein the moisture concentration in the iodo-hydrocarbon mixture is 140 ppm by mass or less.
According to this container filled with an iodohydrocarbon mixture, deterioration in the quality of the iodohydrocarbon mixture can be suppressed even when the container is filled with the iodohydrocarbon mixture and stored at high temperatures.
上記ヨウ化炭化水素においては、炭化水素基の炭素数が1~4であり、ヨウ素数が1~3であってよい。
In the above iodinated hydrocarbons, the hydrocarbon group may have 1 to 4 carbon atoms and 1 to 3 iodines.
上記ヨウ化炭化水素は、ヨウ化飽和炭化水素であってよい。
The iodinated hydrocarbon may be an iodinated saturated hydrocarbon.
上記ヨウ化炭化水素は、ジヨードメタンであってよい。
The iodinated hydrocarbon may be diiodomethane.
なお、本発明において、ヨウ化炭化水素は、RI(Rは炭化水素基を表し、Iはヨウ素を表す)で表される化合物、又は、この化合物のRに含まれる水素原子の一部をヨウ素に置換した化合物をいう。
In the present invention, iodinated hydrocarbon refers to a compound represented by RI (R represents a hydrocarbon group, and I represents iodine), or a compound in which some of the hydrogen atoms contained in R of this compound have been replaced with iodine.
本発明によれば、高温下で保管されても品質劣化を抑制できるヨウ化炭化水素混合物、ヨウ化炭化水素混合物の製造方法及びヨウ化炭化水素混合物充填容器が提供される。
The present invention provides an iodized hydrocarbon mixture that can suppress quality deterioration even when stored at high temperatures, a method for producing the iodized hydrocarbon mixture, and a container for filling the iodized hydrocarbon mixture.
以下、本発明の実施形態について詳細に説明する。
The following describes in detail an embodiment of the present invention.
<ヨウ化炭化水素混合物>
まず、本発明の一側面のヨウ化炭化水素混合物の実施形態について説明する。
ヨウ化炭化水素混合物は、ヨウ化炭化水素と水分とを含有する。ヨウ化炭化水素混合物中の水分の濃度は140質量ppm以下である。
このヨウ化炭化水素混合物によれば、高温下で保管されても品質劣化を抑制できる。 <Iodohydrocarbon mixture>
First, an embodiment of an iodinated hydrocarbon mixture according to one aspect of the present invention will be described.
The iodinated hydrocarbon mixture contains an iodinated hydrocarbon and moisture. The concentration of moisture in the iodinated hydrocarbon mixture is 140 ppm by mass or less.
This iodinated hydrocarbon mixture can suppress deterioration in quality even when stored at high temperatures.
まず、本発明の一側面のヨウ化炭化水素混合物の実施形態について説明する。
ヨウ化炭化水素混合物は、ヨウ化炭化水素と水分とを含有する。ヨウ化炭化水素混合物中の水分の濃度は140質量ppm以下である。
このヨウ化炭化水素混合物によれば、高温下で保管されても品質劣化を抑制できる。 <Iodohydrocarbon mixture>
First, an embodiment of an iodinated hydrocarbon mixture according to one aspect of the present invention will be described.
The iodinated hydrocarbon mixture contains an iodinated hydrocarbon and moisture. The concentration of moisture in the iodinated hydrocarbon mixture is 140 ppm by mass or less.
This iodinated hydrocarbon mixture can suppress deterioration in quality even when stored at high temperatures.
以下、ヨウ化炭化水素及び水分について詳細に説明する。
Hereafter, we will explain in detail about iodinated hydrocarbons and moisture.
(ヨウ化炭化水素)
ヨウ化炭化水素は特に限定されるものではないが、例えばヨウ化炭化水素が半導体の成膜用途で使用される場合には、取り扱いの観点から、ヨウ化炭化水素は、高い蒸気圧を有するヨウ化炭化水素であることが好ましい。高い蒸気圧を有するヨウ化炭化水素としては、炭化水素基の炭素数が1~8でありヨウ素数が1~4であるヨウ化炭化水素が好ましく、炭化水素基の炭素数が1~4でありヨウ素数が1~3であるヨウ化炭化水素がより好ましい。これらのヨウ化炭化水素は常温で液体または固体の状態で存在するが、上記の高い蒸気圧を有するヨウ化炭化水素のうち、常温で液体の状態で存在するヨウ化炭化水素が、取り扱いの観点からは好ましい。
ヨウ化炭化水素は、ヨウ化飽和炭化水素でもヨウ化不飽和炭化水素でもよい。すなわち、ヨウ化炭化水素の炭化水素基は、飽和炭化水素基でも不飽和炭化水素基でもよい。
ヨウ化飽和炭化水素としては、例えばジヨードメタンが挙げられる。 (Iodohydrocarbons)
Although the iodinated hydrocarbon is not particularly limited, for example, when the iodinated hydrocarbon is used for the purpose of forming a semiconductor film, the iodinated hydrocarbon is preferably an iodinated hydrocarbon having a high vapor pressure from the viewpoint of handling. As the iodinated hydrocarbon having a high vapor pressure, an iodinated hydrocarbon having a hydrocarbon group with a carbon number of 1 to 8 and an iodine number of 1 to 4 is preferable, and an iodinated hydrocarbon having a hydrocarbon group with a carbon number of 1 to 4 and an iodine number of 1 to 3 is more preferable. These iodinated hydrocarbons exist in a liquid or solid state at room temperature, but among the above-mentioned iodinated hydrocarbons having a high vapor pressure, an iodinated hydrocarbon that exists in a liquid state at room temperature is preferable from the viewpoint of handling.
The iodinated hydrocarbon may be an iodinated saturated hydrocarbon or an iodinated unsaturated hydrocarbon, i.e., the hydrocarbon group of the iodinated hydrocarbon may be a saturated hydrocarbon group or an unsaturated hydrocarbon group.
An example of the iodinated saturated hydrocarbon is diiodomethane.
ヨウ化炭化水素は特に限定されるものではないが、例えばヨウ化炭化水素が半導体の成膜用途で使用される場合には、取り扱いの観点から、ヨウ化炭化水素は、高い蒸気圧を有するヨウ化炭化水素であることが好ましい。高い蒸気圧を有するヨウ化炭化水素としては、炭化水素基の炭素数が1~8でありヨウ素数が1~4であるヨウ化炭化水素が好ましく、炭化水素基の炭素数が1~4でありヨウ素数が1~3であるヨウ化炭化水素がより好ましい。これらのヨウ化炭化水素は常温で液体または固体の状態で存在するが、上記の高い蒸気圧を有するヨウ化炭化水素のうち、常温で液体の状態で存在するヨウ化炭化水素が、取り扱いの観点からは好ましい。
ヨウ化炭化水素は、ヨウ化飽和炭化水素でもヨウ化不飽和炭化水素でもよい。すなわち、ヨウ化炭化水素の炭化水素基は、飽和炭化水素基でも不飽和炭化水素基でもよい。
ヨウ化飽和炭化水素としては、例えばジヨードメタンが挙げられる。 (Iodohydrocarbons)
Although the iodinated hydrocarbon is not particularly limited, for example, when the iodinated hydrocarbon is used for the purpose of forming a semiconductor film, the iodinated hydrocarbon is preferably an iodinated hydrocarbon having a high vapor pressure from the viewpoint of handling. As the iodinated hydrocarbon having a high vapor pressure, an iodinated hydrocarbon having a hydrocarbon group with a carbon number of 1 to 8 and an iodine number of 1 to 4 is preferable, and an iodinated hydrocarbon having a hydrocarbon group with a carbon number of 1 to 4 and an iodine number of 1 to 3 is more preferable. These iodinated hydrocarbons exist in a liquid or solid state at room temperature, but among the above-mentioned iodinated hydrocarbons having a high vapor pressure, an iodinated hydrocarbon that exists in a liquid state at room temperature is preferable from the viewpoint of handling.
The iodinated hydrocarbon may be an iodinated saturated hydrocarbon or an iodinated unsaturated hydrocarbon, i.e., the hydrocarbon group of the iodinated hydrocarbon may be a saturated hydrocarbon group or an unsaturated hydrocarbon group.
An example of the iodinated saturated hydrocarbon is diiodomethane.
(水分)
ヨウ化炭化水素の水分濃度は140質量ppm以下であればよいが、好ましくは120質量ppm以下であり、より好ましくは100質量ppm以下であり、より一層好ましくは80質量ppm以下であり、さらにより好ましくは50質量ppm以下であり、特に好ましくは30質量ppm以下である。
ヨウ化炭化水素の水分濃度は0.1質量ppm以上、0.5質量ppm以上、1.0質量ppm以上、5.0質量ppm以上、10質量ppm以上、15質量ppm以上、又は20質量ppm以上であってもよい。 (moisture)
The water concentration of the iodinated hydrocarbon may be 140 ppm by mass or less, but is preferably 120 ppm by mass or less, more preferably 100 ppm by mass or less, even more preferably 80 ppm by mass or less, still more preferably 50 ppm by mass or less, and particularly preferably 30 ppm by mass or less.
The water concentration of the iodinated hydrocarbon may be 0.1 ppm by mass or more, 0.5 ppm by mass or more, 1.0 ppm by mass or more, 5.0 ppm by mass or more, 10 ppm by mass or more, 15 ppm by mass or more, or 20 ppm by mass or more.
ヨウ化炭化水素の水分濃度は140質量ppm以下であればよいが、好ましくは120質量ppm以下であり、より好ましくは100質量ppm以下であり、より一層好ましくは80質量ppm以下であり、さらにより好ましくは50質量ppm以下であり、特に好ましくは30質量ppm以下である。
ヨウ化炭化水素の水分濃度は0.1質量ppm以上、0.5質量ppm以上、1.0質量ppm以上、5.0質量ppm以上、10質量ppm以上、15質量ppm以上、又は20質量ppm以上であってもよい。 (moisture)
The water concentration of the iodinated hydrocarbon may be 140 ppm by mass or less, but is preferably 120 ppm by mass or less, more preferably 100 ppm by mass or less, even more preferably 80 ppm by mass or less, still more preferably 50 ppm by mass or less, and particularly preferably 30 ppm by mass or less.
The water concentration of the iodinated hydrocarbon may be 0.1 ppm by mass or more, 0.5 ppm by mass or more, 1.0 ppm by mass or more, 5.0 ppm by mass or more, 10 ppm by mass or more, 15 ppm by mass or more, or 20 ppm by mass or more.
ここで、ヨウ化炭化水素混合物中の水分濃度は、カールフィッシャー水分計によって測定される値である。具体的に、ヨウ化炭化水素混合物中の水分濃度を測定する場合、測定器メーカーより販売されている水分濃度計を用いることができる。このような水分濃度計としては、例えば株式会社Hiranuma製の電量滴定法カールフィッシャー水分計などが挙げられる。
Here, the water concentration in the iodinated hydrocarbon mixture is a value measured by a Karl Fischer moisture meter. Specifically, when measuring the water concentration in the iodinated hydrocarbon mixture, a moisture concentration meter sold by a measuring device manufacturer can be used. An example of such a moisture concentration meter is the coulometric titration Karl Fischer moisture meter manufactured by Hiranuma Corporation.
<ヨウ化炭化水素混合物の製造方法>
次に、本発明の別の一側面のヨウ化炭化水素混合物の製造方法の実施形態について説明する。 <Method for producing iodinated hydrocarbon mixture>
Next, an embodiment of a method for producing an iodinated hydrocarbon mixture according to another aspect of the present invention will be described.
次に、本発明の別の一側面のヨウ化炭化水素混合物の製造方法の実施形態について説明する。 <Method for producing iodinated hydrocarbon mixture>
Next, an embodiment of a method for producing an iodinated hydrocarbon mixture according to another aspect of the present invention will be described.
本発明に係るヨウ化炭化水素混合物の製造方法は、ヨウ化炭化水素と水分とを含有し、水分の濃度が140質量ppm以下であるヨウ化炭化水素混合物の製造方法であって、ヨウ化炭化水素と水分とを含有する原料を脱水する脱水工程を含む。
The method for producing an iodized hydrocarbon mixture according to the present invention is a method for producing an iodized hydrocarbon mixture containing iodized hydrocarbons and moisture, the moisture concentration of which is 140 mass ppm or less, and includes a dehydration step of dehydrating a raw material containing iodized hydrocarbons and moisture.
(脱水工程)
原料は、ヨウ化炭化水素と水分とを含有する混合物であればよく、原料中の水分濃度は特に限定されるものではない。
原料中の水分濃度は、1000質量ppm以下であってよく、200質量ppm以下であってもよい。 (Dehydration process)
The raw material may be a mixture containing an iodinated hydrocarbon and water, and the water concentration in the raw material is not particularly limited.
The moisture concentration in the raw material may be 1000 ppm by mass or less, or may be 200 ppm by mass or less.
原料は、ヨウ化炭化水素と水分とを含有する混合物であればよく、原料中の水分濃度は特に限定されるものではない。
原料中の水分濃度は、1000質量ppm以下であってよく、200質量ppm以下であってもよい。 (Dehydration process)
The raw material may be a mixture containing an iodinated hydrocarbon and water, and the water concentration in the raw material is not particularly limited.
The moisture concentration in the raw material may be 1000 ppm by mass or less, or may be 200 ppm by mass or less.
脱水の方法は、脱水前のヨウ化炭化水素混合物である原料中の水分濃度を低下させることができる方法であれば特に限定されるものではない。脱水の方法としては、例えば脱水前のヨウ化炭化水素混合物の蒸留、及び、脱水前のヨウ化炭化水素混合物を水分吸着剤に接触させて脱水する方法が挙げられる。
The dehydration method is not particularly limited as long as it is a method capable of reducing the moisture concentration in the raw material, which is the iodinated hydrocarbon mixture before dehydration. Examples of the dehydration method include distillation of the iodinated hydrocarbon mixture before dehydration and a method of dehydrating the iodinated hydrocarbon mixture before dehydration by contacting it with a moisture adsorbent.
水分吸着剤の種類は特に限定されるものではないが、水分吸着剤としては、例えばゼオライト、活性炭及びシリカゲルが挙げられる。ここで、ゼオライトの種類は特に限定されるものではなく、ゼオライトに含有されるSiO2及びAl2O3のモル比(SiO2/Al2O3比)、ゼオライトの細孔径も特に限定はされない。但し、ゼオライトとしては、ヨウ化炭化水素と反応しないゼオライトが好ましい。このようなゼオライトとしては、例えばモレキュラーシーブ4Aが挙げられる。
The type of moisture adsorbent is not particularly limited, but examples of the moisture adsorbent include zeolite, activated carbon, and silica gel. Here, the type of zeolite is not particularly limited, and the molar ratio of SiO2 and Al2O3 contained in the zeolite ( SiO2 / Al2O3 ratio) and the pore size of the zeolite are also not particularly limited. However, the zeolite is preferably a zeolite that does not react with iodinated hydrocarbons. Such a zeolite is, for example, molecular sieve 4A.
脱水工程の後、脱水後の原料と、水分とを混合し、ヨウ化炭化水素混合物中の水分濃度を調整してもよい。
After the dehydration step, the dehydrated raw material may be mixed with water to adjust the water concentration in the iodinated hydrocarbon mixture.
本発明に係るヨウ化炭化水素混合物の製造方法により最終的に得られるヨウ化炭化水素混合物中の水分濃度は、140質量ppm以下であればよいが、水分濃度は好ましくは120質量ppm以下であり、より好ましくは100質量ppm以下であり、より一層好ましくは80質量ppm以下であり、さらに好ましくは50質量ppm以下であり、特に好ましくは30質量ppm以下である。
ヨウ化炭化水素混合物中の水分濃度は0.1質量ppm以上、0.5質量ppm以上、1.0質量ppm以上、5.0質量ppm以上、10質量ppm以上、15質量ppm以上、又は20質量ppm以上であってもよい。 The water concentration in the iodinated hydrocarbon mixture finally obtained by the method for producing an iodinated hydrocarbon mixture according to the present invention may be 140 ppm by mass or less, but the water concentration is preferably 120 ppm by mass or less, more preferably 100 ppm by mass or less, even more preferably 80 ppm by mass or less, still more preferably 50 ppm by mass or less, and particularly preferably 30 ppm by mass or less.
The water concentration in the iodinated hydrocarbon mixture may be 0.1 ppm by mass or more, 0.5 ppm by mass or more, 1.0 ppm by mass or more, 5.0 ppm by mass or more, 10 ppm by mass or more, 15 ppm by mass or more, or 20 ppm by mass or more.
ヨウ化炭化水素混合物中の水分濃度は0.1質量ppm以上、0.5質量ppm以上、1.0質量ppm以上、5.0質量ppm以上、10質量ppm以上、15質量ppm以上、又は20質量ppm以上であってもよい。 The water concentration in the iodinated hydrocarbon mixture finally obtained by the method for producing an iodinated hydrocarbon mixture according to the present invention may be 140 ppm by mass or less, but the water concentration is preferably 120 ppm by mass or less, more preferably 100 ppm by mass or less, even more preferably 80 ppm by mass or less, still more preferably 50 ppm by mass or less, and particularly preferably 30 ppm by mass or less.
The water concentration in the iodinated hydrocarbon mixture may be 0.1 ppm by mass or more, 0.5 ppm by mass or more, 1.0 ppm by mass or more, 5.0 ppm by mass or more, 10 ppm by mass or more, 15 ppm by mass or more, or 20 ppm by mass or more.
<ヨウ化炭化水素混合物充填容器>
次に、本発明のさらに別の一側面のヨウ化炭化水素混合物充填容器の実施形態について図1を参照しながら説明する。図1は、本発明のヨウ化炭化水素混合物充填容器の一実施形態を概略的に示す部分断面図である。 <Container filled with iodinated hydrocarbon mixture>
Next, an embodiment of a container filled with an iodinated hydrocarbon mixture according to yet another aspect of the present invention will be described with reference to Fig. 1. Fig. 1 is a partial cross-sectional view that shows a schematic view of one embodiment of a container filled with an iodinated hydrocarbon mixture according to the present invention.
次に、本発明のさらに別の一側面のヨウ化炭化水素混合物充填容器の実施形態について図1を参照しながら説明する。図1は、本発明のヨウ化炭化水素混合物充填容器の一実施形態を概略的に示す部分断面図である。 <Container filled with iodinated hydrocarbon mixture>
Next, an embodiment of a container filled with an iodinated hydrocarbon mixture according to yet another aspect of the present invention will be described with reference to Fig. 1. Fig. 1 is a partial cross-sectional view that shows a schematic view of one embodiment of a container filled with an iodinated hydrocarbon mixture according to the present invention.
図1に示すように、ヨウ化炭化水素混合物充填容器100は、容器10と、容器10内に充填されるヨウ化炭化水素混合物20とを備える。ヨウ化炭化水素混合物20は、ヨウ化炭化水素と水分とを含有しており、ヨウ化炭化水素混合物20中の水分濃度は140質量ppm以下となっている。
このヨウ化炭化水素混合物充填容器100によれば、容器10内にヨウ化炭化水素混合物20が充填されて高温下で保管されてもヨウ化炭化水素混合物20の品質劣化を抑制できる。 As shown in Fig. 1, the iodinated hydrocarbonmixture filling container 100 includes a container 10 and an iodinated hydrocarbon mixture 20 filled in the container 10. The iodinated hydrocarbon mixture 20 contains iodinated hydrocarbons and moisture, and the moisture concentration in the iodinated hydrocarbon mixture 20 is 140 ppm by mass or less.
According to this iodinated hydrocarbon mixture filledcontainer 100, even if the container 10 is filled with the iodinated hydrocarbon mixture 20 and stored at high temperatures, deterioration in the quality of the iodinated hydrocarbon mixture 20 can be suppressed.
このヨウ化炭化水素混合物充填容器100によれば、容器10内にヨウ化炭化水素混合物20が充填されて高温下で保管されてもヨウ化炭化水素混合物20の品質劣化を抑制できる。 As shown in Fig. 1, the iodinated hydrocarbon
According to this iodinated hydrocarbon mixture filled
以下、容器10について説明する。
<容器>
容器10を構成する材質は特に制限されるものではないが、気密性が確保でき、耐圧性に優れる材質を使用することが好ましい。このような材質としては、例えば、マンガン鋼、ステンレス鋼、クロムモリブデン鋼などの合金鋼、炭素鋼、及び、アルミニウム合金などの金属、繊維強化プラスチックなどの複合材料などが挙げられる。 Thecontainer 10 will now be described.
<Container>
Although there are no particular limitations on the material constituting thecontainer 10, it is preferable to use a material that can ensure airtightness and has excellent pressure resistance. Examples of such materials include alloy steels such as manganese steel, stainless steel, and chromium-molybdenum steel, carbon steel, and metals such as aluminum alloys, and composite materials such as fiber-reinforced plastics.
<容器>
容器10を構成する材質は特に制限されるものではないが、気密性が確保でき、耐圧性に優れる材質を使用することが好ましい。このような材質としては、例えば、マンガン鋼、ステンレス鋼、クロムモリブデン鋼などの合金鋼、炭素鋼、及び、アルミニウム合金などの金属、繊維強化プラスチックなどの複合材料などが挙げられる。 The
<Container>
Although there are no particular limitations on the material constituting the
容器10は、内面10aを有する円筒胴部11を備える。具体的には、図1に示すように、容器10は、円筒胴部11の下端に設けられる底部12と、円筒胴部11の上端側に設けられる蓋部13と、蓋部13に設けられるバルブ14とをさらに備える。本実施形態では、バルブ14は、ヨウ化炭化水素混合物20を充填させるためのバルブと、ヨウ化炭化水素混合物20を排出させるバルブとで構成される。バルブ14は、1つのバルブで構成されてもよい。この場合、バルブ14は、ヨウ化炭化水素混合物20を充填させるバルブと排出させるバルブを兼ねることになる。
容器10は、単一の層で構成されてもよく、2種以上の層の積層体で構成されていてもよい。
容器10は耐圧性を有することが好ましい。この場合、ヨウ化炭化水素混合物20を加圧状態で収納することができる。 Thecontainer 10 includes a cylindrical body 11 having an inner surface 10a. Specifically, as shown in Fig. 1, the container 10 further includes a bottom 12 provided at the lower end of the cylindrical body 11, a lid 13 provided at the upper end side of the cylindrical body 11, and a valve 14 provided on the lid 13. In this embodiment, the valve 14 includes a valve for filling the iodinated hydrocarbon mixture 20 and a valve for discharging the iodinated hydrocarbon mixture 20. The valve 14 may be a single valve. In this case, the valve 14 serves both as a valve for filling the iodinated hydrocarbon mixture 20 and a valve for discharging the iodinated hydrocarbon mixture 20.
Thecontainer 10 may be constructed of a single layer, or may be constructed of a laminate of two or more layers.
Thecontainer 10 is preferably pressure resistant, so that the iodinated hydrocarbon mixture 20 can be stored in a pressurized state.
容器10は、単一の層で構成されてもよく、2種以上の層の積層体で構成されていてもよい。
容器10は耐圧性を有することが好ましい。この場合、ヨウ化炭化水素混合物20を加圧状態で収納することができる。 The
The
The
<ヨウ化炭化水素充填容器の製造方法>
次に、本発明のヨウ化炭化水素混合物充填容器の製造方法の実施形態について説明する。 <Method of manufacturing container filled with iodinated hydrocarbon>
Next, an embodiment of the method for producing a container filled with an iodinated hydrocarbon mixture of the present invention will be described.
次に、本発明のヨウ化炭化水素混合物充填容器の製造方法の実施形態について説明する。 <Method of manufacturing container filled with iodinated hydrocarbon>
Next, an embodiment of the method for producing a container filled with an iodinated hydrocarbon mixture of the present invention will be described.
ヨウ化炭化水素混合物充填容器100の製造方法は、容器10にヨウ化炭化水素混合物20を充填してヨウ化炭化水素混合物充填容器100を製造する工程を含む。
The method for manufacturing the container 100 filled with an iodinated hydrocarbon mixture includes a step of filling the container 10 with an iodinated hydrocarbon mixture 20 to manufacture the container 100 filled with an iodinated hydrocarbon mixture.
一般に、ヨウ化炭化水素混合物は反応性が高い。このため、ヨウ化炭化水素混合物20は、容器への充填時の大気の混入を避けるために、遮光及び除湿環境下で充填されることが好ましい。例えば、不活性ガス雰囲気下でヨウ化炭化水素混合物20を容器10に導入し、容器10を密封してヨウ化炭化水素混合物20を容器10に充填する。容器10への充填時の大気の混入を避ける観点からは、ヨウ化炭化水素混合物供給源と容器10とを配管で接続し、大気の混入する可能性を極力低減した閉鎖系でヨウ化炭化水素混合物20を容器10に充填することがより好ましい。例えば、あらかじめ減圧した容器10にヨウ化炭化水素供給源を配管で接続し、容器10とヨウ化炭化水素混合物供給源との間の差圧を利用してヨウ化炭化水素混合物20を容器10に充填してもよい。
In general, iodized hydrocarbon mixtures are highly reactive. For this reason, it is preferable that the iodized hydrocarbon mixture 20 is filled in a light-shielded and dehumidified environment to prevent the inclusion of air when filling the container. For example, the iodized hydrocarbon mixture 20 is introduced into the container 10 in an inert gas atmosphere, and the container 10 is sealed and filled with the iodized hydrocarbon mixture 20. From the viewpoint of preventing the inclusion of air when filling the container 10, it is more preferable to connect the iodized hydrocarbon mixture supply source and the container 10 with piping and fill the container 10 with the iodized hydrocarbon mixture 20 in a closed system that minimizes the possibility of air inclusion. For example, the iodized hydrocarbon mixture supply source may be connected with piping to the container 10 that has been previously depressurized, and the iodized hydrocarbon mixture 20 may be filled into the container 10 by utilizing the pressure difference between the container 10 and the iodized hydrocarbon mixture supply source.
なお、ヨウ化炭化水素混合物20を容器10に充填した後に、容器10内で不活性ガスを封入してヨウ化炭化水素混合物20を常圧下又は加圧下で保管してもよいし、あらかじめ不活性ガスを封入した容器10にヨウ化炭化水素混合物供給源を配管で接続し、ヨウ化炭化水素混合物20を不活性ガスで圧送して容器10に充填してもよい。
After the iodinated hydrocarbon mixture 20 is filled into the container 10, an inert gas may be sealed inside the container 10 and the iodinated hydrocarbon mixture 20 may be stored under normal pressure or under pressure, or an iodinated hydrocarbon mixture supply source may be connected by piping to the container 10 in which an inert gas has already been sealed, and the iodinated hydrocarbon mixture 20 may be pumped with the inert gas and filled into the container 10.
以下、実施例および比較例を挙げて本発明について更に具体的に説明する。ただし、本発明は以下の実施例に限定されるものではない。
The present invention will be explained in more detail below with reference to examples and comparative examples. However, the present invention is not limited to the following examples.
(実施例1)
原料のジヨードメタン混合物を、モレキュラーシーブ4A(東ソー製、商品名:ゼオラムA―4)に接触させて脱水することにより、ヨウ化炭化水素としてのジヨードメタンと水との混合物をジヨードメタン混合物として用意した。ジヨードメタン混合物中の水分濃度は、カールフィッシャー水分計(株式会社HIRANUMA製、製品名:AQ-2200S、電量滴定法)にて測定したところ、表1に示すとおり24質量ppmであった。 Example 1
The diiodomethane mixture as the raw material was dehydrated by contacting it with molecular sieve 4A (manufactured by Tosoh Corporation, product name: Zeorum A-4) to prepare a mixture of diiodomethane as an iodinated hydrocarbon and water as a diiodomethane mixture. The water concentration in the diiodomethane mixture was measured with a Karl Fischer moisture meter (manufactured by HIRANUMA Corporation, product name: AQ-2200S, coulometric titration method) and was found to be 24 ppm by mass, as shown in Table 1.
原料のジヨードメタン混合物を、モレキュラーシーブ4A(東ソー製、商品名:ゼオラムA―4)に接触させて脱水することにより、ヨウ化炭化水素としてのジヨードメタンと水との混合物をジヨードメタン混合物として用意した。ジヨードメタン混合物中の水分濃度は、カールフィッシャー水分計(株式会社HIRANUMA製、製品名:AQ-2200S、電量滴定法)にて測定したところ、表1に示すとおり24質量ppmであった。 Example 1
The diiodomethane mixture as the raw material was dehydrated by contacting it with molecular sieve 4A (manufactured by Tosoh Corporation, product name: Zeorum A-4) to prepare a mixture of diiodomethane as an iodinated hydrocarbon and water as a diiodomethane mixture. The water concentration in the diiodomethane mixture was measured with a Karl Fischer moisture meter (manufactured by HIRANUMA Corporation, product name: AQ-2200S, coulometric titration method) and was found to be 24 ppm by mass, as shown in Table 1.
(実施例2)
実施例1で得られたジヨードメタン混合物と、水分とを混合することにより、表1に示すとおり、水分濃度が47質量ppmのジヨードメタン混合物を用意した。 Example 2
The diiodomethane mixture obtained in Example 1 was mixed with water to prepare a diiodomethane mixture having a water concentration of 47 ppm by mass, as shown in Table 1.
実施例1で得られたジヨードメタン混合物と、水分とを混合することにより、表1に示すとおり、水分濃度が47質量ppmのジヨードメタン混合物を用意した。 Example 2
The diiodomethane mixture obtained in Example 1 was mixed with water to prepare a diiodomethane mixture having a water concentration of 47 ppm by mass, as shown in Table 1.
(実施例3)
実施例1で得られたジヨードメタン混合物と、水分とを混合することにより、表1に示すとおり水分濃度が94質量ppmのジヨードメタン混合物を用意した。 Example 3
The diiodomethane mixture obtained in Example 1 was mixed with water to prepare a diiodomethane mixture having a water concentration of 94 ppm by mass as shown in Table 1.
実施例1で得られたジヨードメタン混合物と、水分とを混合することにより、表1に示すとおり水分濃度が94質量ppmのジヨードメタン混合物を用意した。 Example 3
The diiodomethane mixture obtained in Example 1 was mixed with water to prepare a diiodomethane mixture having a water concentration of 94 ppm by mass as shown in Table 1.
(比較例1)
表1に示すとおり水分濃度が165質量ppmのジヨードメタン混合物を用意した。 (Comparative Example 1)
As shown in Table 1, a diiodomethane mixture having a water concentration of 165 ppm by mass was prepared.
表1に示すとおり水分濃度が165質量ppmのジヨードメタン混合物を用意した。 (Comparative Example 1)
As shown in Table 1, a diiodomethane mixture having a water concentration of 165 ppm by mass was prepared.
<試験サンプルの準備>
まず、以下のようにして金属容器を作製した。
はじめに、両端にメスナットの付いた円柱状(内径6.35mm×長さ100mm×肉厚1.0mm)のSUS316Lの配管を円筒胴部として用意し、配管の下端に底部としてのSUS316のキャップをSwagelok(登録商標)チューブ継手を用いて取り付けた。こうして金属容器の本体部を得た。
次に、乾燥N2雰囲気下で、上記の金属容器の本体部に、上記のようにして用意したジヨードメタン混合物0.75mL(容器容積の半分量程)を入れた後、配管の上端に金属容器の本体部の蓋部としてSUS316のキャップをSwagelok(登録商標)チューブ継手を用いて取り付けて密封した。こうして試験サンプルを得た。 <Preparation of test samples>
First, a metal container was prepared as follows.
First, a cylindrical pipe made of SUS316L (inner diameter 6.35 mm ×length 100 mm × thickness 1.0 mm) with female nuts on both ends was prepared as a cylindrical body, and a SUS316 cap was attached to the lower end of the pipe as a bottom part using a Swagelok (registered trademark) tube joint. In this way, the main body of the metal container was obtained.
Next, 0.75 mL of the diiodomethane mixture prepared as described above (about half the volume of the container) was placed in the main body of the metal container under a dry N2 atmosphere, and then a SUS316 cap was attached to the top end of the pipe as a lid for the main body of the metal container using a Swagelok (registered trademark) tube joint to seal it. Thus, a test sample was obtained.
まず、以下のようにして金属容器を作製した。
はじめに、両端にメスナットの付いた円柱状(内径6.35mm×長さ100mm×肉厚1.0mm)のSUS316Lの配管を円筒胴部として用意し、配管の下端に底部としてのSUS316のキャップをSwagelok(登録商標)チューブ継手を用いて取り付けた。こうして金属容器の本体部を得た。
次に、乾燥N2雰囲気下で、上記の金属容器の本体部に、上記のようにして用意したジヨードメタン混合物0.75mL(容器容積の半分量程)を入れた後、配管の上端に金属容器の本体部の蓋部としてSUS316のキャップをSwagelok(登録商標)チューブ継手を用いて取り付けて密封した。こうして試験サンプルを得た。 <Preparation of test samples>
First, a metal container was prepared as follows.
First, a cylindrical pipe made of SUS316L (inner diameter 6.35 mm ×
Next, 0.75 mL of the diiodomethane mixture prepared as described above (about half the volume of the container) was placed in the main body of the metal container under a dry N2 atmosphere, and then a SUS316 cap was attached to the top end of the pipe as a lid for the main body of the metal container using a Swagelok (registered trademark) tube joint to seal it. Thus, a test sample was obtained.
<品質劣化抑制効果の確認試験>
上記試験サンプルについて、以下のようにしてジヨードメタン混合物に対する品質劣化抑制効果の確認試験を行った。
すなわち、まず、上記試験サンプルについて、ジヨードメタン混合物の純度、ジヨードメタン混合物中のヨードメタンの濃度、及び、その他の成分(ジヨードメタン及びヨードメタン以外の成分)の濃度を、GC-FID(株式会社島津製作所社製、製品名:GC-2014)を用いて保管前の純度又は濃度として測定した。結果を表1に示す。
次に、試験サンプルを恒温槽に入れて130℃で保管した。そして、試験サンプルを13日間保管した時点で、恒温槽から取り出し、20~25℃まで放冷後に、ジヨードメタン混合物の純度、ジヨードメタン混合物中のヨードメタンの濃度、及び、その他の成分(ジヨードメタン及びヨードメタン以外の成分)の濃度を上記GC-FIDを用いて測定した。結果を表1に示す。 <Confirmation test for quality deterioration prevention effect>
The above test samples were subjected to a test for confirming the effect of inhibiting deterioration of quality caused by a diiodomethane mixture as described below.
That is, first, the purity of the diiodomethane mixture, the concentration of iodomethane in the diiodomethane mixture, and the concentrations of other components (components other than diiodomethane and iodomethane) of the above test samples were measured as the purity or concentration before storage using a GC-FID (manufactured by Shimadzu Corporation, product name: GC-2014). The results are shown in Table 1.
Next, the test sample was placed in a constant temperature bath and stored at 130° C. After storing the test sample for 13 days, it was removed from the constant temperature bath and allowed to cool to 20-25° C., after which the purity of the diiodomethane mixture, the concentration of iodomethane in the diiodomethane mixture, and the concentrations of other components (components other than diiodomethane and iodomethane) were measured using the GC-FID. The results are shown in Table 1.
上記試験サンプルについて、以下のようにしてジヨードメタン混合物に対する品質劣化抑制効果の確認試験を行った。
すなわち、まず、上記試験サンプルについて、ジヨードメタン混合物の純度、ジヨードメタン混合物中のヨードメタンの濃度、及び、その他の成分(ジヨードメタン及びヨードメタン以外の成分)の濃度を、GC-FID(株式会社島津製作所社製、製品名:GC-2014)を用いて保管前の純度又は濃度として測定した。結果を表1に示す。
次に、試験サンプルを恒温槽に入れて130℃で保管した。そして、試験サンプルを13日間保管した時点で、恒温槽から取り出し、20~25℃まで放冷後に、ジヨードメタン混合物の純度、ジヨードメタン混合物中のヨードメタンの濃度、及び、その他の成分(ジヨードメタン及びヨードメタン以外の成分)の濃度を上記GC-FIDを用いて測定した。結果を表1に示す。 <Confirmation test for quality deterioration prevention effect>
The above test samples were subjected to a test for confirming the effect of inhibiting deterioration of quality caused by a diiodomethane mixture as described below.
That is, first, the purity of the diiodomethane mixture, the concentration of iodomethane in the diiodomethane mixture, and the concentrations of other components (components other than diiodomethane and iodomethane) of the above test samples were measured as the purity or concentration before storage using a GC-FID (manufactured by Shimadzu Corporation, product name: GC-2014). The results are shown in Table 1.
Next, the test sample was placed in a constant temperature bath and stored at 130° C. After storing the test sample for 13 days, it was removed from the constant temperature bath and allowed to cool to 20-25° C., after which the purity of the diiodomethane mixture, the concentration of iodomethane in the diiodomethane mixture, and the concentrations of other components (components other than diiodomethane and iodomethane) were measured using the GC-FID. The results are shown in Table 1.
なお、上記ジヨードメタン混合物の純度は、下記式により算出されるものである。
ジヨードメタン混合物の純度(%)
=100%-ヨードメタンの濃度(%)-その他の成分の濃度(%)
ここで、純度及び濃度の単位%はGC area%(得られたGCチャートの面積%)である。 The purity of the diiodomethane mixture is calculated according to the following formula.
Purity of diiodomethane mixture (%)
= 100% - iodomethane concentration (%) - other component concentration (%)
Here, the unit % of purity and concentration is GC area % (area % of the obtained GC chart).
ジヨードメタン混合物の純度(%)
=100%-ヨードメタンの濃度(%)-その他の成分の濃度(%)
ここで、純度及び濃度の単位%はGC area%(得られたGCチャートの面積%)である。 The purity of the diiodomethane mixture is calculated according to the following formula.
Purity of diiodomethane mixture (%)
= 100% - iodomethane concentration (%) - other component concentration (%)
Here, the unit % of purity and concentration is GC area % (area % of the obtained GC chart).
表1で示されるように、実施例1~3は、比較例1よりも、高温での保管の前後で、ヨードメタンの濃度の増加が小さく、ジヨードメタン混合物の純度の低下が小さいことから、高温で保管されてもジヨードメタン混合物の品質劣化が抑制されていることが分かった。
As shown in Table 1, in Examples 1 to 3, the increase in iodomethane concentration was smaller before and after storage at high temperatures than in Comparative Example 1, and the decrease in purity of the diiodomethane mixture was smaller. This indicates that the deterioration of the quality of the diiodomethane mixture is suppressed even when stored at high temperatures.
このことから、本発明のヨウ化炭化水素混合物によれば、高温下で保管されても品質劣化を抑制できることが確認された。
This confirms that the iodinated hydrocarbon mixture of the present invention can suppress quality deterioration even when stored at high temperatures.
10…容器、10a…内面、11…円筒胴部、12…底部、13…蓋部、14…バルブ、20…ヨウ化炭化水素混合物、100…ヨウ化炭化水素充填容器。
10...container, 10a...inner surface, 11...cylindrical body, 12...bottom, 13...lid, 14...valve, 20...iodinated hydrocarbon mixture, 100...container filled with iodinated hydrocarbon.
Claims (12)
- ヨウ化炭化水素と水分とを含有するヨウ化炭化水素混合物であって、
前記ヨウ化炭化水素混合物中の前記水分の濃度が140質量ppm以下である、ヨウ化炭化水素混合物。 An iodinated hydrocarbon mixture containing an iodinated hydrocarbon and moisture,
The iodinated hydrocarbon mixture has a moisture concentration of 140 ppm by mass or less. - 前記ヨウ化炭化水素における炭化水素基の炭素数が1~4であり、ヨウ素数が1~3である、請求項1に記載のヨウ化炭化水素混合物。 The iodized hydrocarbon mixture according to claim 1, wherein the number of carbon atoms in the hydrocarbon group in the iodized hydrocarbon is 1 to 4, and the number of iodines is 1 to 3.
- 前記ヨウ化炭化水素がヨウ化飽和炭化水素である、請求項1に記載のヨウ化炭化水素混合物。 The iodinated hydrocarbon mixture of claim 1, wherein the iodinated hydrocarbon is an iodinated saturated hydrocarbon.
- 前記ヨウ化飽和炭化水素がジヨードメタンである、請求項3に記載のヨウ化炭化水素混合物。 The iodinated hydrocarbon mixture of claim 3, wherein the iodinated saturated hydrocarbon is diiodomethane.
- 請求項1に記載のヨウ化炭化水素混合物を製造する方法であって、
ヨウ化炭化水素と水分とを含有する原料を脱水する脱水工程を含む、ヨウ化炭化水素混合物の製造方法。 2. A method for producing the iodinated hydrocarbon mixture of claim 1, comprising the steps of:
A method for producing an iodinated hydrocarbon mixture, comprising a dehydration step of dehydrating a raw material containing iodinated hydrocarbon and moisture. - 前記ヨウ化炭化水素における炭化水素基の炭素数が1~4であり、ヨウ素数が1~3である、請求項4に記載のヨウ化炭化水素混合物の製造方法。 The method for producing an iodized hydrocarbon mixture according to claim 4, wherein the number of carbon atoms in the hydrocarbon group in the iodized hydrocarbon is 1 to 4 and the number of iodines is 1 to 3.
- 前記ヨウ化炭化水素がヨウ化飽和炭化水素である、請求項6に記載のヨウ化炭化水素混合物の製造方法。 The method for producing an iodinated hydrocarbon mixture according to claim 6, wherein the iodinated hydrocarbon is an iodinated saturated hydrocarbon.
- 前記ヨウ化飽和炭化水素がジヨードメタンである、請求項7に記載のヨウ化炭化水素混合物の製造方法。 The method for producing an iodized hydrocarbon mixture according to claim 7, wherein the iodized saturated hydrocarbon is diiodomethane.
- 容器と、
前記容器に充填され、ヨウ化炭化水素と水とを含有するヨウ化炭化水素混合物とを備えるヨウ化炭化水素混合物充填容器であって、
前記ヨウ化炭化水素混合物中の水分濃度が140質量ppm以下である、ヨウ化炭化水素混合物充填容器。 A container;
an iodinated hydrocarbon mixture filled container comprising an iodinated hydrocarbon mixture containing an iodinated hydrocarbon and water, the iodinated hydrocarbon mixture being filled in the container,
A container filled with an iodinated hydrocarbon mixture, wherein the water concentration in the iodinated hydrocarbon mixture is 140 ppm by mass or less. - 前記ヨウ化炭化水素における炭化水素基の炭素数が1~4であり、ヨウ素数が1~3である、請求項9に記載のヨウ化炭化水素混合物充填容器。 The container for filling an iodized hydrocarbon mixture according to claim 9, wherein the number of carbon atoms in the hydrocarbon group in the iodized hydrocarbon is 1 to 4, and the number of iodines is 1 to 3.
- 前記ヨウ化炭化水素がヨウ化飽和炭化水素である、請求項10に記載のヨウ化炭化水素混合物充填容器。 The container for filling an iodinated hydrocarbon mixture according to claim 10, wherein the iodinated hydrocarbon is an iodinated saturated hydrocarbon.
- 前記ヨウ化飽和炭化水素がジヨードメタンである、請求項11に記載のヨウ化炭化水素混合物充填容器。 The container filled with an iodinated hydrocarbon mixture according to claim 11, wherein the iodinated saturated hydrocarbon is diiodomethane.
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JP2010159223A (en) * | 2009-01-07 | 2010-07-22 | Toho Earthtech Inc | Method for producing iodine compound |
JP2016222548A (en) * | 2015-05-27 | 2016-12-28 | 東ソー株式会社 | Manufacturing method of alkyl iodide compound |
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2023
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JPS55122729A (en) * | 1979-03-15 | 1980-09-20 | Nec Corp | Prevention of coloring of methylene iodide solution |
JPS58140037A (en) * | 1982-02-15 | 1983-08-19 | Mitsubishi Gas Chem Co Inc | Recovery method of methyl iodide |
JP2005024073A (en) * | 2003-07-02 | 2005-01-27 | Nippo Kagaku Kk | Alkyl iodide storage container and purifying method of alkyl iodide |
JP2010159223A (en) * | 2009-01-07 | 2010-07-22 | Toho Earthtech Inc | Method for producing iodine compound |
JP2016222548A (en) * | 2015-05-27 | 2016-12-28 | 東ソー株式会社 | Manufacturing method of alkyl iodide compound |
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