WO2024080033A1 - Beam combining device and laser processing machine - Google Patents

Beam combining device and laser processing machine Download PDF

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Publication number
WO2024080033A1
WO2024080033A1 PCT/JP2023/031964 JP2023031964W WO2024080033A1 WO 2024080033 A1 WO2024080033 A1 WO 2024080033A1 JP 2023031964 W JP2023031964 W JP 2023031964W WO 2024080033 A1 WO2024080033 A1 WO 2024080033A1
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Prior art keywords
laser beam
guide light
light
laser
wedge prism
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PCT/JP2023/031964
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French (fr)
Japanese (ja)
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哲也 小林
陽亮 有本
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株式会社アマダ
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements

Definitions

  • the present invention relates to a beam combining device and a laser processing machine.
  • Laser processing machines In recent years, the laser beams used by laser processing machines to process sheet metal as a workpiece have become increasingly powerful (higher brightness). Laser processing machines sometimes superimpose two laser beams with different wavelengths emitted from two laser oscillators using optical components such as a dichroic mirror with a wavelength-selective coating to increase the power of the laser beam. Laser processing machines also have the function of irradiating the sheet metal with a guide light made of visible light in order to determine the starting position of processing and to check the processing trajectory (see Patent Document 1).
  • a dichroic mirror installed in a beam coupler, which is a beam combining device, and emit a guide light onto the same optical axis as the combined laser beam
  • at least two mirrors are required.
  • Increasing the number of optical components requires a mechanism for adjusting the position of each optical component, which makes the adjustment work more complicated and increases the size of the beam coupler.
  • the higher the power of the laser beam the more susceptible it is to the effects of thermal lenses, so it is desirable to reduce the number of optical components such as lenses and mirrors as much as possible.
  • a first aspect of one or more embodiments includes a first collimating lens that converts a first laser beam of divergent light having a first wavelength emitted from a first laser oscillator into collimated light, a second collimating lens that converts a second laser beam of divergent light having a second wavelength emitted from a second laser oscillator into collimated light, a first surface that is coated with a first coating that has a property of reflecting the first laser beam converted into collimated light by the first collimating lens and transmitting a guide light consisting of visible light, and a second collimating lens that has a property of transmitting the second laser beam converted into collimated light by the second collimating lens and reflecting the guide light.
  • the present invention provides a beam combining device that includes a wedge prism that emits a combined laser beam by combining the first laser beam reflected by the first surface with the second laser beam that has been transmitted through the second surface and the first surface in this order, and emits the guide light reflected by the second surface and transmitted through the first surface onto the same optical axis as the optical axis of the combined laser beam, and a focusing lens that focuses the combined laser beam or the guide light emitted from the wedge prism and inputs it into an optical fiber that transmits the combined laser beam or the guide light.
  • the laser beams of two wavelengths are combined by a wedge prism, and the guide light is emitted on the same optical axis as the optical axis of the combined laser beam, thereby realizing a configuration in which the combined laser beam and the guide light are emitted on the same optical axis with a small number of optical components.
  • a second aspect of one or more of the embodiments provides a laser processing machine including the first laser oscillator, the second laser oscillator, the beam combining device of the first aspect, a guide light emitting unit that emits the guide light toward the wedge prism, and a processing head that irradiates the combined laser beam or the guide light transmitted by the optical fiber onto a workpiece to be processed.
  • the laser beams of two wavelengths are combined by a wedge prism, and the guide light is emitted on the same optical axis as the optical axis of the combined laser beam, thereby realizing a configuration in which the combined laser beam and the guide light are emitted on the same optical axis with a small number of optical components.
  • the workpiece can be processed after the processing start position is determined and the processing trajectory is confirmed using the guide light.
  • the beam combining device and laser processing machine can combine laser beams of two wavelengths with a small number of optical components and emit a guide light onto the same optical axis as the optical axis of the combined laser beam.
  • FIG. 1 illustrates a beam combining device and a laser processing machine according to one or more embodiments.
  • FIG. 2A is a cross-sectional view of a position adjustment mechanism for a first collimating lens included in a beam combining device according to one or more embodiments, taken along a plane perpendicular to the Z axis.
  • FIG. 2B is a cross-sectional view of a position adjustment mechanism for a first collimating lens included in a beam combining device according to one or more embodiments, taken along a plane perpendicular to the X-axis.
  • FIG. 3 is a characteristic diagram illustrating the reflection and transmission characteristics of first and second coatings applied to the first and second surfaces of a wedge prism included in a beam combining device according to one or more embodiments.
  • the beam combining device includes a first collimating lens, a second collimating lens, a wedge prism, and a focusing lens.
  • the first collimating lens converts a first laser beam of divergent light having a first wavelength emitted from a first laser oscillator into collimated light.
  • the second collimating lens converts a second laser beam of divergent light having a second wavelength emitted from a second laser oscillator into collimated light.
  • the wedge prism includes a first surface that is coated with a first coating having a property of reflecting the first laser beam converted into collimated light by the first collimating lens and transmitting a guide light consisting of visible light, and a second surface that is coated with a second coating having a property of transmitting the second laser beam converted into collimated light by the second collimating lens and reflecting the guide light.
  • the first coating has a property of transmitting the second laser beam that has passed through the second surface.
  • the wedge prism emits a combined laser beam that combines the first laser beam reflected by the first surface with the second laser beam that has been transmitted through the second surface and the first surface in that order, and emits the guide light that has been reflected by the second surface and transmitted through the first surface onto the same optical axis as the optical axis of the combined laser beam.
  • the focusing lens focuses the combined laser beam or the guide light emitted from the wedge prism and makes it incident on the optical fiber that transmits the combined laser beam or the guide light.
  • the laser processing machine includes the first laser oscillator, the second laser oscillator, a beam combining device of the first aspect, a guide light emitting unit that emits the guide light toward the wedge prism, and a processing head that irradiates the combined laser beam or the guide light transmitted by the optical fiber onto a workpiece to be processed.
  • FIG. 1 shows a beam combining device and a laser processing machine according to one or more embodiments.
  • the laser processing machine 100 according to one or more embodiments shown in FIG. 1 includes a first laser oscillator 11, a second laser oscillator 12, a beam coupler 20 which is a beam combining device according to one or more embodiments, and a processing head 40.
  • the first laser oscillator 11 and the second laser oscillator 12 are, for example, a fiber laser oscillator, a disk laser oscillator, or a direct diode laser oscillator.
  • the connector 13c of the feeding fiber 13 that transmits the first laser beam emitted from the first laser oscillator 11 is connected to the end of the protrusion 201p in the housing 201 of the beam coupler 20.
  • the connector 14c of the feeding fiber 14 that transmits the second laser beam emitted from the second laser oscillator 12 is connected to one end of the main body 201m in the housing 201.
  • the first connector 30c1 of the process fiber 30 is connected to the other end of the main body 201m, and the second connector 30c2 is connected to the housing 401 of the processing head 40.
  • the beam coupler 20 includes a first collimating lens 21, a second collimating lens 22, a wedge prism 23, and a focusing lens 24 in a housing 201.
  • a guide light emitting unit 26 is provided on the outside of the beam coupler 20, which emits guide light consisting of visible light for determining the processing start position and checking the processing trajectory.
  • the guide light emitting unit 26 is attached to the outer surface of the housing 201, and irradiates the guide light shown by the dashed line to the wedge prism 23 through an opening provided in the housing 201.
  • the guide light emitting unit 26 may be provided inside the housing 201.
  • the first surface 23a of the wedge prism 23 is coated with a first coating, which will be described later.
  • the second surface 23b, which faces the first surface 23a of the wedge prism 23, is coated with a second coating, which will be described later.
  • the first laser beam emitted from the first laser oscillator 11 has a wavelength ⁇ 1
  • the second laser beam emitted from the second laser oscillator 12 has a wavelength ⁇ 2 that is shorter than the wavelength ⁇ 1.
  • the first laser beam, the second laser beam, and the combined laser beam described below are indicated by dashed dotted lines.
  • the guide light has a wavelength ⁇ 3, and has a relationship of ⁇ 1> ⁇ 2> ⁇ 3.
  • the wavelength ⁇ 1 and the wavelength ⁇ 2 are 1030 nm to 1090 nm
  • the wavelength ⁇ 3 is 600 nm to 700 nm.
  • the first laser beam emitted from the first laser oscillator 11 is transmitted to the beam coupler 20 by the feeding fiber 13.
  • the second laser beam emitted from the second laser oscillator 12 is transmitted to the beam coupler 20 by the feeding fiber 14.
  • the first collimating lens 21 converts the first laser beam of diverging light emitted from the end of the feeding fiber 13 into collimated light.
  • the first laser beam converted into collimated light is incident on the first surface 23a of the wedge prism 23.
  • the second collimating lens 22 converts the second laser beam of diverging light emitted from the end of the feeding fiber 14 into collimated light.
  • the second laser beam converted into collimated light is incident on the second surface 23b of the wedge prism 23.
  • the first collimating lens 21 and the second collimating lens 22 are biconvex lenses in which both the entrance surface and the exit surface of the laser beam are convex, but they may also be plano-convex lenses in which the entrance surface is flat and the exit surface is convex.
  • the lens shapes of the first collimating lens 21 and the second collimating lens 22 are not limited.
  • the focusing lens 24 and the collimating lens 41 or focusing lens 43 in the processing head 40 which will be described later, may also be biconvex lenses or plano-convex lenses, and the lens shapes are not limited.
  • FIG. 2A is a cross-sectional view of the position adjustment mechanism 50 of the first collimator lens 21 provided in the beam coupler 20, cut along a plane perpendicular to the Z axis.
  • FIG. 2B is a cross-sectional view of the position adjustment mechanism 50 of the first collimator lens 21 provided in the beam coupler 20, cut along a plane perpendicular to the X axis.
  • the position of the first collimator lens 21 is adjusted by the position adjustment mechanism 50 as shown in FIG. 2A and FIG. 2B.
  • the position of the second collimator lens 22 is also adjusted by a position adjustment mechanism similar to the position adjustment mechanism 50 shown in FIG. 2A and FIG. 2B.
  • the optical axis direction of the first laser beam emitted from the first collimator lens 21 is the Z axis, and the two orthogonal directions perpendicular to the Z axis are the X axis and the Y axis.
  • the first collimator lens 21 is a plano-convex lens.
  • the first collimator lens 21 is held in the position adjustment mechanism 50 by the lens holder 51.
  • two coil springs 53x extending in the X-axis direction apply a force in the X-axis direction to the lens holder 51
  • two coil springs 53y extending in the Y-axis direction apply a force in the Y-axis direction to the lens holder 51.
  • the position of the lens holder 51 in the X-axis direction can be adjusted by turning the X-axis adjustment screw member 52x
  • the position of the lens holder 51 in the Y-axis direction can be adjusted by turning the Y-axis adjustment screw member 52y.
  • the connector 13c is attached to a receiver 20R (not shown in FIG. 1) provided at the end of the protrusion 201p.
  • Two coil springs 53z extending in the Z-axis direction apply a force in the Z-axis direction to the lens holder 51.
  • a movable inner cylinder 54 is provided adjacent to the lens holder 51 inside the protrusion 201p.
  • a thread 54sw is formed at the end of the movable inner cylinder 54, and a thread 20sw is formed on the opposing inner circumferential surface of the protrusion 201p.
  • the first coating applied to the first surface 23a of the wedge prism 23 has the property of reflecting the first laser beam converted into collimated light. Therefore, the first laser beam is reflected by the first surface 23a and heads toward the focusing lens 24.
  • the second coating applied to the second surface 23b of the wedge prism 23 has the property of transmitting the second laser beam converted into collimated light.
  • the first coating has the property of transmitting the second laser beam that has passed through the second surface 23b. Therefore, the second laser beam passes through the second surface 23b and the first surface 23a in this order and heads toward the focusing lens 24.
  • the first coating also has the property of transmitting the guide light emitted from the guide light emission section 26.
  • the second coating also has the property of reflecting the guide light. Therefore, the guide light passes through the first surface 23a, is reflected by the second surface 23b, and passes through the first surface 23a again to proceed toward the focusing lens 24.
  • the positions of the first collimating lens 21 and the second collimating lens 22 are adjusted so that the first laser beam reflected by the first surface 23a and the second laser beam transmitted through the second surface 23b and the first surface 23a are superimposed on each other.
  • the attachment position of the guide light emitting unit 26 relative to the housing 201 and the direction in which the guide light is emitted are adjusted so that the guide light reflected by the second surface 23b travels along the same optical axis as the optical axis of the combined laser beam toward the focusing lens 24.
  • the position of the first collimator lens 21 in the X-axis, Y-axis, and Z-axis directions is adjusted by the position adjustment mechanism 50.
  • the position of the second collimator lens 22 in the X-axis, Y-axis, and Z-axis directions is adjusted by a position adjustment mechanism similar to the position adjustment mechanism 50.
  • the wedge prism 23 generates and emits a combined laser beam by combining the first laser beam and the second laser beam by superimposing them on each other.
  • the focusing lens 24 focuses the combined laser beam and makes it incident on the core of the process fiber 30.
  • the process fiber 30 is an optical fiber that transmits the combined laser beam to the processing head 40.
  • the processing head 40 includes a collimating lens 41, a bend mirror 42, and a focusing lens 43 in a housing 401.
  • the collimating lens 41 converts the divergent combined laser beam emitted from the end of the process fiber 30 into collimated light.
  • the collimating lens 41 bends the traveling direction of the combined laser beam converted into collimated light by 90 degrees.
  • the focusing lens 43 focuses the incident combined laser beam and irradiates it onto the sheet metal W to be processed.
  • the laser processing machine 100 may be a processing machine that cuts the sheet metal W, or may be a processing machine that welds the sheet metal W.
  • the sheet metal W is an example of a workpiece, and the workpiece is not limited to sheet metal.
  • the focusing lens 43 focuses the incident guide light and irradiates it on the metal sheet W.
  • the operator can determine the processing start position and check the processing trajectory. Note that in FIG. 1, the guide light shown by the dashed line is not shown as being incident on the processing head 40 and irradiated on the metal sheet W, but it is irradiated on the metal sheet W in the same way as the combined laser beam shown by the dashed line.
  • FIG. 3 is a characteristic diagram showing the reflection and transmission characteristics of the first and second coatings applied to the first surface 23a and second surface 23b of the wedge prism 23 provided in the beam coupler 20.
  • FIG. 3 shows the reflection and transmission characteristics Ca of the first coating and the reflection and transmission characteristics Cb of the second coating.
  • the reflection and transmission characteristics Ca of the first coating are characteristics that reflect the first laser beam having a wavelength ⁇ 1 and transmit the second laser beam having a wavelength ⁇ 2 and the guide light having a wavelength ⁇ 3.
  • the reflection and transmission characteristics Cb of the second coating are characteristics that reflect the wavelength ⁇ 3 and transmit the second laser beam having a wavelength ⁇ 2.
  • the beam coupler 20 equipped with the wedge prism 23 can supply a combined laser beam to the processing head 40 when the first and second laser beams are incident, and can supply the guide light to the processing head 40 when the guide light is incident.
  • the beam coupler 20 is configured so that the wedge prism 23 emits a combined laser beam obtained by superimposing the first laser beam and the second laser beam on each other, thereby enabling the laser beam to have a high output.
  • the beam coupler 20 is configured so that the wedge prism 23 emits the guide light onto the same optical axis as the optical axis of the combined laser beam, thereby realizing a configuration in which the combined laser beam and the guide light are emitted onto the same optical axis with a small number of optical components.
  • the laser processing machine 100 includes a processing head 40 that irradiates the combined laser beam transmitted by the first laser oscillator 11, the second laser oscillator 12, the beam coupler 20, and the process fiber 30 onto the metal sheet W to be processed.
  • the laser processing machine 100 can emit the combined laser beam and the guide light on the same optical axis with a small number of optical components, and the operator can process the metal sheet W after determining the processing start position and checking the processing trajectory.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

A first surface (23a) of a wedge prism (23) has a first coating, and a second surface (23b) thereof has a second coating. The wedge prism (23) emits a combined laser beam obtained by superimposing on one another a first laser beam reflected by the first surface (23a) and a second laser beam that has been transmitted through the second surface (23b) and the first surface (23a) in the stated order. The second coating has the characteristic of reflecting guide light. The wedge prism (23) emits the guide light which has been reflected by the second surface (23b) and transmitted through the first surface (23a), on an optical axis that is the same as an optical axis of the combined laser beam.

Description

ビーム結合装置及びレーザ加工機Beam combining device and laser processing machine
　本発明は、ビーム結合装置及びレーザ加工機に関する。 The present invention relates to a beam combining device and a laser processing machine.
　近年、レーザ加工機が被加工材である板金を加工する際に使用するレーザビームの高出力化（高輝度化）が進んでいる。レーザ加工機は、２つのレーザ発振器より射出された波長が異なる２つのレーザビームを、波長選択性コーティングを施したダイクロイックミラー等の光学部品で互いに重畳してレーザビームの高出力化することがある。また、レーザ加工機は、加工開始位置を決めたり、加工の軌跡を確認したりするために、可視光よりなるガイド光を板金に照射する機能を備えている（特許文献１参照）。 In recent years, the laser beams used by laser processing machines to process sheet metal as a workpiece have become increasingly powerful (higher brightness). Laser processing machines sometimes superimpose two laser beams with different wavelengths emitted from two laser oscillators using optical components such as a dichroic mirror with a wavelength-selective coating to increase the power of the laser beam. Laser processing machines also have the function of irradiating the sheet metal with a guide light made of visible light in order to determine the starting position of processing and to check the processing trajectory (see Patent Document 1).
特開２０２１－１５４３３６号公報JP 2021-154336 A
　ビーム結合装置であるビームカプラ内に設けたダイクロイックミラーを用いて、２つの波長のレーザビームを結合し、ガイド光を結合したレーザビームの光軸と同じ光軸上に射出させようとすると、少なくとも２枚のミラーが必要となる。光学部品が増えると各光学部品の位置調整機構が必要となり、調整作業の煩雑さを招き、ビームカプラが大型化してしまう。レーザビームが高出力になればなるほど熱レンズの影響を受けやすくなるため、レンズまたはミラー等の光学部品をできるだけ少なくすることが望まれる。 If you want to combine two laser beams of different wavelengths using a dichroic mirror installed in a beam coupler, which is a beam combining device, and emit a guide light onto the same optical axis as the combined laser beam, at least two mirrors are required. Increasing the number of optical components requires a mechanism for adjusting the position of each optical component, which makes the adjustment work more complicated and increases the size of the beam coupler. The higher the power of the laser beam, the more susceptible it is to the effects of thermal lenses, so it is desirable to reduce the number of optical components such as lenses and mirrors as much as possible.
　１またはそれ以上の実施形態の第１の態様は、第１のレーザ発振器より射出される第１の波長を有する発散光の第１のレーザビームをコリメート光に変換する第１のコリメートレンズと、第２のレーザ発振器より射出される第２の波長を有する発散光の第２のレーザビームをコリメート光に変換する第２のコリメートレンズと、前記第１のコリメートレンズによってコリメート光に変換された前記第１のレーザビームを反射し、かつ可視光よりなるガイド光を透過させる特性を有する第１のコーティングが施された第１の面と、前記第２のコリメートレンズによってコリメート光に変換された前記第２のレーザビームを透過させ、かつ前記ガイド光を反射する特性を有する第２のコーティングが施された第２の面とを含み、前記第１のコーティングは、前記第２の面を透過した前記第２のレーザビームを透過させる特性を有し、前記第１の面で反射した前記第１のレーザビームと、前記第２の面及び前記第１の面をこの順で透過した前記第２のレーザビームとを結合させた結合レーザビームを射出し、前記第２の面で反射して前記第１の面を透過した前記ガイド光を前記結合レーザビームの光軸と同じ光軸上に射出するウェッジプリズムと、前記ウェッジプリズムより射出された前記結合レーザビームまたは前記ガイド光を集束させて、前記結合レーザビームまたは前記ガイド光を伝送する光ファイバに入射させる集束レンズとを備えるビーム結合装置を提供する。 A first aspect of one or more embodiments includes a first collimating lens that converts a first laser beam of divergent light having a first wavelength emitted from a first laser oscillator into collimated light, a second collimating lens that converts a second laser beam of divergent light having a second wavelength emitted from a second laser oscillator into collimated light, a first surface that is coated with a first coating that has a property of reflecting the first laser beam converted into collimated light by the first collimating lens and transmitting a guide light consisting of visible light, and a second collimating lens that has a property of transmitting the second laser beam converted into collimated light by the second collimating lens and reflecting the guide light. The present invention provides a beam combining device that includes a wedge prism that emits a combined laser beam by combining the first laser beam reflected by the first surface with the second laser beam that has been transmitted through the second surface and the first surface in this order, and emits the guide light reflected by the second surface and transmitted through the first surface onto the same optical axis as the optical axis of the combined laser beam, and a focusing lens that focuses the combined laser beam or the guide light emitted from the wedge prism and inputs it into an optical fiber that transmits the combined laser beam or the guide light.
　１またはそれ以上の実施形態の第１の態様によれば、ウェッジプリズムによって２つの波長のレーザビームを結合し、ガイド光を結合したレーザビームの光軸と同じ光軸上に射出するので、少ない光学部品で結合レーザビームとガイド光とを同じ光軸上に射出する構成が実現される。 According to a first aspect of one or more embodiments, the laser beams of two wavelengths are combined by a wedge prism, and the guide light is emitted on the same optical axis as the optical axis of the combined laser beam, thereby realizing a configuration in which the combined laser beam and the guide light are emitted on the same optical axis with a small number of optical components.
　１またはそれ以上の実施形態の第２の態様は、前記第１のレーザ発振器と、前記第２のレーザ発振器と、第１の態様のビーム結合装置と、前記ガイド光を前記ウェッジプリズムに向けて射出するガイド光射出部と、前記光ファイバによって伝送される前記結合レーザビームまたは前記ガイド光を加工対象の被加工材に照射する加工ヘッドとを備えるレーザ加工機を提供する。 A second aspect of one or more of the embodiments provides a laser processing machine including the first laser oscillator, the second laser oscillator, the beam combining device of the first aspect, a guide light emitting unit that emits the guide light toward the wedge prism, and a processing head that irradiates the combined laser beam or the guide light transmitted by the optical fiber onto a workpiece to be processed.
　１またはそれ以上の実施形態の第２の態様によれば、ウェッジプリズムによって２つの波長のレーザビームを結合し、ガイド光を結合したレーザビームの光軸と同じ光軸上に射出するので、少ない光学部品で結合レーザビームとガイド光とを同じ光軸上に射出する構成が実現される。１またはそれ以上の実施形態の第２の態様によれば、ガイド光によって加工開始位置を決めたり、加工の軌跡を確認したりした上で、被加工材を加工することができる。 According to a second aspect of one or more of the embodiments, the laser beams of two wavelengths are combined by a wedge prism, and the guide light is emitted on the same optical axis as the optical axis of the combined laser beam, thereby realizing a configuration in which the combined laser beam and the guide light are emitted on the same optical axis with a small number of optical components. According to the second aspect of one or more of the embodiments, the workpiece can be processed after the processing start position is determined and the processing trajectory is confirmed using the guide light.
　１またはそれ以上の実施形態に係るビーム結合装置及びレーザ加工機によれば、少ない光学部品で、２つの波長のレーザビームを結合し、ガイド光を結合したレーザビームの光軸と同じ光軸上に射出することができる。 The beam combining device and laser processing machine according to one or more of the embodiments can combine laser beams of two wavelengths with a small number of optical components and emit a guide light onto the same optical axis as the optical axis of the combined laser beam.
図１は、１またはそれ以上の実施形態に係るビーム結合装置及びレーザ加工機を示す図である。FIG. 1 illustrates a beam combining device and a laser processing machine according to one or more embodiments. 図２Ａは、１またはそれ以上の実施形態に係るビーム結合装置が備える第１のコリメートレンズの位置調整機構をＺ軸と直交する面で切断した断面図である。FIG. 2A is a cross-sectional view of a position adjustment mechanism for a first collimating lens included in a beam combining device according to one or more embodiments, taken along a plane perpendicular to the Z axis. 図２Ｂは、１またはそれ以上の実施形態に係るビーム結合装置が備える第１のコリメートレンズの位置調整機構をＸ軸と直交する面で切断した断面図である。FIG. 2B is a cross-sectional view of a position adjustment mechanism for a first collimating lens included in a beam combining device according to one or more embodiments, taken along a plane perpendicular to the X-axis. 図３は、１またはそれ以上の実施形態に係るビーム結合装置が備えるウェッジプリズムの第１の面及び第２の面に施されている第１及び第２のコーティングに施されている反射・透過特性を示す特性図である。FIG. 3 is a characteristic diagram illustrating the reflection and transmission characteristics of first and second coatings applied to the first and second surfaces of a wedge prism included in a beam combining device according to one or more embodiments.
　１またはそれ以上の実施形態に係るビーム結合装置は、第１のコリメートレンズ、第２のコリメートレンズ、ウェッジプリズム、集束レンズを備える。前記第１のコリメートレンズは、第１のレーザ発振器より射出される第１の波長を有する発散光の第１のレーザビームをコリメート光に変換する。前記第２のコリメートレンズは、第２のレーザ発振器より射出される第２の波長を有する発散光の第２のレーザビームをコリメート光に変換する。 The beam combining device according to one or more embodiments includes a first collimating lens, a second collimating lens, a wedge prism, and a focusing lens. The first collimating lens converts a first laser beam of divergent light having a first wavelength emitted from a first laser oscillator into collimated light. The second collimating lens converts a second laser beam of divergent light having a second wavelength emitted from a second laser oscillator into collimated light.
　前記ウェッジプリズムは、前記第１のコリメートレンズによってコリメート光に変換された前記第１のレーザビームを反射し、かつ可視光よりなるガイド光を透過させる特性を有する第１のコーティングが施された第１の面と、前記第２のコリメートレンズによってコリメート光に変換された前記第２のレーザビームを透過させ、かつ前記ガイド光を反射する特性を有する第２のコーティングが施された第２の面とを含む。前記第１のコーティングは、前記第２の面を透過した前記第２のレーザビームを透過させる特性を有する。 The wedge prism includes a first surface that is coated with a first coating having a property of reflecting the first laser beam converted into collimated light by the first collimating lens and transmitting a guide light consisting of visible light, and a second surface that is coated with a second coating having a property of transmitting the second laser beam converted into collimated light by the second collimating lens and reflecting the guide light. The first coating has a property of transmitting the second laser beam that has passed through the second surface.
　前記ウェッジプリズムは、前記第１の面で反射した前記第１のレーザビームと、前記第２の面及び前記第１の面をこの順で透過した前記第２のレーザビームとを結合させた結合レーザビームを射出し、前記第２の面で反射して前記第１の面を透過した前記ガイド光を前記結合レーザビームの光軸と同じ光軸上に射出する。 The wedge prism emits a combined laser beam that combines the first laser beam reflected by the first surface with the second laser beam that has been transmitted through the second surface and the first surface in that order, and emits the guide light that has been reflected by the second surface and transmitted through the first surface onto the same optical axis as the optical axis of the combined laser beam.
　前記集束レンズは、前記ウェッジプリズムより射出された前記結合レーザビームまたは前記ガイド光を集束させて、前記結合レーザビームまたは前記ガイド光を伝送する光ファイバに入射させる。 The focusing lens focuses the combined laser beam or the guide light emitted from the wedge prism and makes it incident on the optical fiber that transmits the combined laser beam or the guide light.
　１またはそれ以上の実施形態に係るレーザ加工機は、前記第１のレーザ発振器と、前記第２のレーザ発振器と、第１の態様のビーム結合装置と、前記ガイド光を前記ウェッジプリズムに向けて射出するガイド光射出部と、前記光ファイバによって伝送される前記結合レーザビームまたは前記ガイド光を加工対象の被加工材に照射する加工ヘッドとを備える。 The laser processing machine according to one or more embodiments includes the first laser oscillator, the second laser oscillator, a beam combining device of the first aspect, a guide light emitting unit that emits the guide light toward the wedge prism, and a processing head that irradiates the combined laser beam or the guide light transmitted by the optical fiber onto a workpiece to be processed.
　以下、１またはそれ以上の実施形態に係るビーム結合装置及びレーザ加工機について、添付図面を参照して具体的に説明する。図１は、１またはそれ以上の実施形態に係るビーム結合装置及びレーザ加工機を示す。図１に示す１またはそれ以上の実施形態に係るレーザ加工機１００は、第１のレーザ発振器１１、第２のレーザ発振器１２、１またはそれ以上の実施形態に係るビーム結合装置であるビームカプラ２０、加工ヘッド４０を備える。第１のレーザ発振器１１及び第２のレーザ発振器１２は、例えば、ファイバレーザ発振器、ディスクレーザ発振器、またはダイレクトダイオードレーザ発振器である。 Below, a beam combining device and a laser processing machine according to one or more embodiments will be specifically described with reference to the accompanying drawings. FIG. 1 shows a beam combining device and a laser processing machine according to one or more embodiments. The laser processing machine 100 according to one or more embodiments shown in FIG. 1 includes a first laser oscillator 11, a second laser oscillator 12, a beam coupler 20 which is a beam combining device according to one or more embodiments, and a processing head 40. The first laser oscillator 11 and the second laser oscillator 12 are, for example, a fiber laser oscillator, a disk laser oscillator, or a direct diode laser oscillator.
　第１のレーザ発振器１１より射出される第１のレーザビームを伝送するフィーディングファイバ１３のコネクタ１３ｃは、ビームカプラ２０の筐体２０１における突出部２０１ｐの端部に接続されている。第２のレーザ発振器１２より射出される第２のレーザビームを伝送するフィーディングファイバ１４のコネクタ１４ｃは、筐体２０１における本体部２０１ｍの一方の端部に接続されている。プロセスファイバ３０の第１のコネクタ３０ｃ１は本体部２０１ｍの他方の端部に接続され、第２のコネクタ３０ｃ２は加工ヘッド４０の筐体４０１に接続されている。 The connector 13c of the feeding fiber 13 that transmits the first laser beam emitted from the first laser oscillator 11 is connected to the end of the protrusion 201p in the housing 201 of the beam coupler 20. The connector 14c of the feeding fiber 14 that transmits the second laser beam emitted from the second laser oscillator 12 is connected to one end of the main body 201m in the housing 201. The first connector 30c1 of the process fiber 30 is connected to the other end of the main body 201m, and the second connector 30c2 is connected to the housing 401 of the processing head 40.
　ビームカプラ２０は、筐体２０１内に、第１のコリメートレンズ２１、第２のコリメートレンズ２２、ウェッジプリズム２３、集束レンズ２４を備える。ビームカプラ２０の外部には、加工開始位置を決めたり、加工の軌跡を確認したりするための可視光よりなるガイド光を射出するガイド光射出部２６が設けられている。図１においては、ガイド光射出部２６は筐体２０１の外面に取り付けられており、筐体２０１に設けた開口を介して破線で示すガイド光をウェッジプリズム２３に照射する。ガイド光射出部２６が筐体２０１内に設けられていてもよい。 The beam coupler 20 includes a first collimating lens 21, a second collimating lens 22, a wedge prism 23, and a focusing lens 24 in a housing 201. A guide light emitting unit 26 is provided on the outside of the beam coupler 20, which emits guide light consisting of visible light for determining the processing start position and checking the processing trajectory. In FIG. 1, the guide light emitting unit 26 is attached to the outer surface of the housing 201, and irradiates the guide light shown by the dashed line to the wedge prism 23 through an opening provided in the housing 201. The guide light emitting unit 26 may be provided inside the housing 201.
　ウェッジプリズム２３の第１の面２３ａには、後述する第１のコーティングが施されている。ウェッジプリズム２３の第１の面２３ａと対向する第２の面２３ｂには、後述する第２のコーティングが施されている。 The first surface 23a of the wedge prism 23 is coated with a first coating, which will be described later. The second surface 23b, which faces the first surface 23a of the wedge prism 23, is coated with a second coating, which will be described later.
　第１のレーザ発振器１１より射出される第１のレーザビームは波長λ１を有し、第２のレーザ発振器１２より射出される第２のレーザビームは波長λ１より短波長である波長λ２を有する。第１のレーザビーム、第２のレーザビーム、及び後述する結合レーザビームを一点鎖線で示す。ガイド光は波長λ３を有し、λ１＞λ２＞λ３の関係を有する。例えば、波長λ１及び波長λ２は１０３０ｎｍ~１０９０ｎｍの波長であり、波長λ３は６００ｎｍ～７００ｎｍである。 The first laser beam emitted from the first laser oscillator 11 has a wavelength λ1, and the second laser beam emitted from the second laser oscillator 12 has a wavelength λ2 that is shorter than the wavelength λ1. The first laser beam, the second laser beam, and the combined laser beam described below are indicated by dashed dotted lines. The guide light has a wavelength λ3, and has a relationship of λ1>λ2>λ3. For example, the wavelength λ1 and the wavelength λ2 are 1030 nm to 1090 nm, and the wavelength λ3 is 600 nm to 700 nm.
　第１のレーザ発振器１１より射出された第１のレーザビームは、フィーディングファイバ１３によってビームカプラ２０へと伝送される。第２のレーザ発振器１２より射出された第２のレーザビームは、フィーディングファイバ１４によってビームカプラ２０へと伝送される。 The first laser beam emitted from the first laser oscillator 11 is transmitted to the beam coupler 20 by the feeding fiber 13. The second laser beam emitted from the second laser oscillator 12 is transmitted to the beam coupler 20 by the feeding fiber 14.
　第１のコリメートレンズ２１は、フィーディングファイバ１３の端部より射出される発散光の第１のレーザビームをコリメート光に変換する。コリメート光に変換された第１のレーザビームは、ウェッジプリズム２３の第１の面２３ａに入射する。第２のコリメートレンズ２２は、フィーディングファイバ１４の端部より射出される発散光の第２のレーザビームをコリメート光に変換する。コリメート光に変換された第２のレーザビームは、ウェッジプリズム２３の第２の面２３ｂに入射する。 The first collimating lens 21 converts the first laser beam of diverging light emitted from the end of the feeding fiber 13 into collimated light. The first laser beam converted into collimated light is incident on the first surface 23a of the wedge prism 23. The second collimating lens 22 converts the second laser beam of diverging light emitted from the end of the feeding fiber 14 into collimated light. The second laser beam converted into collimated light is incident on the second surface 23b of the wedge prism 23.
　図１においては、第１のコリメートレンズ２１及び第２のコリメートレンズ２２をレーザビームの入射面及び射出面の双方が凸面である両凸レンズとしているが、入射面が平面で射出面が凸面である平凸レンズであってもよい。第１のコリメートレンズ２１及び第２のコリメートレンズ２２のレンズの形状は限定されない。同様に、集束レンズ２４及び加工ヘッド４０内の後述するコリメートレンズ４１または集束レンズ４３も、両凸レンズであってもよいし、平凸レンズであってもよく、レンズの形状は限定されない。 In FIG. 1, the first collimating lens 21 and the second collimating lens 22 are biconvex lenses in which both the entrance surface and the exit surface of the laser beam are convex, but they may also be plano-convex lenses in which the entrance surface is flat and the exit surface is convex. The lens shapes of the first collimating lens 21 and the second collimating lens 22 are not limited. Similarly, the focusing lens 24 and the collimating lens 41 or focusing lens 43 in the processing head 40, which will be described later, may also be biconvex lenses or plano-convex lenses, and the lens shapes are not limited.
　図２Ａは、ビームカプラ２０が備える第１のコリメートレンズ２１の位置調整機構５０をＺ軸と直交する面で切断した断面図である。図２Ｂは、ビームカプラ２０が備える第１のコリメートレンズ２１の位置調整機構５０をＸ軸と直交する面で切断した断面図である。第１のコリメートレンズ２１は、図２Ａ及び図２Ｂに示すような位置調整機構５０によって位置が調整されている。第２のコリメートレンズ２２も、図２Ａ及び図２Ｂに示す位置調整機構５０と同様の位置調整機構によって位置が調整されている。第１のコリメートレンズ２１より射出される第１のレーザビームの光軸方向をＺ軸、Ｚ軸に直交する２つの直交する方向をＸ軸及びＹ軸とする。図２Ｂに示すように、ここでは第１のコリメートレンズ２１を平凸レンズとしている。 2A is a cross-sectional view of the position adjustment mechanism 50 of the first collimator lens 21 provided in the beam coupler 20, cut along a plane perpendicular to the Z axis. FIG. 2B is a cross-sectional view of the position adjustment mechanism 50 of the first collimator lens 21 provided in the beam coupler 20, cut along a plane perpendicular to the X axis. The position of the first collimator lens 21 is adjusted by the position adjustment mechanism 50 as shown in FIG. 2A and FIG. 2B. The position of the second collimator lens 22 is also adjusted by a position adjustment mechanism similar to the position adjustment mechanism 50 shown in FIG. 2A and FIG. 2B. The optical axis direction of the first laser beam emitted from the first collimator lens 21 is the Z axis, and the two orthogonal directions perpendicular to the Z axis are the X axis and the Y axis. As shown in FIG. 2B, the first collimator lens 21 is a plano-convex lens.
　図２Ａ及び図２Ｂに示すように、第１のコリメートレンズ２１はレンズホルダ５１によって位置調整機構５０に保持されている。図２Ａに示すように、Ｘ軸方向に伸びる２つのコイルスプリング５３ｘはレンズホルダ５１にＸ軸方向の力を与えており、Ｙ軸に伸びる２つのコイルスプリング５３ｙはレンズホルダ５１にＹ軸方向の力を与えている。Ｘ軸調整用ねじ部材５２ｘを回すことによってレンズホルダ５１のＸ軸方向の位置を調整することができ、Ｙ軸調整用ねじ部材５２ｙを回すことによってレンズホルダ５１のＹ軸方向の位置を調整することができる。 As shown in Figures 2A and 2B, the first collimator lens 21 is held in the position adjustment mechanism 50 by the lens holder 51. As shown in Figure 2A, two coil springs 53x extending in the X-axis direction apply a force in the X-axis direction to the lens holder 51, and two coil springs 53y extending in the Y-axis direction apply a force in the Y-axis direction to the lens holder 51. The position of the lens holder 51 in the X-axis direction can be adjusted by turning the X-axis adjustment screw member 52x, and the position of the lens holder 51 in the Y-axis direction can be adjusted by turning the Y-axis adjustment screw member 52y.
　図２Ｂに示すように、コネクタ１３ｃは、突出部２０１ｐの端部に設けられている図１では図示が省略されているレシーバ２０Ｒに装着されている。Ｚ軸方向に伸びる２つのコイルスプリング５３ｚはレンズホルダ５１にＺ軸方向の力を与えている。突出部２０１ｐ内には、レンズホルダ５１に隣接して可動内筒５４が設けられている。可動内筒５４の端部にはねじ５４ｓｗが形成されており、突出部２０１ｐの対向する内周面にはねじ２０ｓｗが形成されている。可動内筒５４の位置をＺ軸方向に調整することにより、レンズホルダ５１のＺ軸方向の位置を調整することができる。 As shown in FIG. 2B, the connector 13c is attached to a receiver 20R (not shown in FIG. 1) provided at the end of the protrusion 201p. Two coil springs 53z extending in the Z-axis direction apply a force in the Z-axis direction to the lens holder 51. A movable inner cylinder 54 is provided adjacent to the lens holder 51 inside the protrusion 201p. A thread 54sw is formed at the end of the movable inner cylinder 54, and a thread 20sw is formed on the opposing inner circumferential surface of the protrusion 201p. By adjusting the position of the movable inner cylinder 54 in the Z-axis direction, the position of the lens holder 51 in the Z-axis direction can be adjusted.
　図１に戻り、ウェッジプリズム２３の第１の面２３ａに施されている第１のコーティングは、コリメート光に変換された第１のレーザビームを反射する特性を有する。従って、第１のレーザビームは、第１の面２３ａで反射して集束レンズ２４へと向かう。ウェッジプリズム２３の第２の面２３ｂに施されている第２のコーティングは、コリメート光に変換された第２のレーザビームを透過させる特性を有する。第１のコーティングは、第２の面２３ｂを透過した第２のレーザビームを透過させる特性を有する。従って、第２のレーザビームは、第２の面２３ｂ及び第１の面２３ａをこの順で透過して集束レンズ２４へと向かう。 Returning to FIG. 1, the first coating applied to the first surface 23a of the wedge prism 23 has the property of reflecting the first laser beam converted into collimated light. Therefore, the first laser beam is reflected by the first surface 23a and heads toward the focusing lens 24. The second coating applied to the second surface 23b of the wedge prism 23 has the property of transmitting the second laser beam converted into collimated light. The first coating has the property of transmitting the second laser beam that has passed through the second surface 23b. Therefore, the second laser beam passes through the second surface 23b and the first surface 23a in this order and heads toward the focusing lens 24.
　第１のコーティングは、さらに、ガイド光射出部２６より射出されるガイド光を透過させる特性を有する。第２のコーティングは、さらに、ガイド光を反射する特性を有する。従って、ガイド光は、第１の面２３ａを透過して第２の面２３ｂで反射し、第１の面２３ａを再び透過して集束レンズ２４へと向かう。 The first coating also has the property of transmitting the guide light emitted from the guide light emission section 26. The second coating also has the property of reflecting the guide light. Therefore, the guide light passes through the first surface 23a, is reflected by the second surface 23b, and passes through the first surface 23a again to proceed toward the focusing lens 24.
　第１のコリメートレンズ２１及び第２のコリメートレンズ２２は、第１の面２３ａで反射した第１のレーザビームと、第２の面２３ｂ及び第１の面２３ａを透過した第２のレーザビームとが互いに重畳するように位置が調整されている。ガイド光射出部２６は、第２の面２３ｂで反射したガイド光が、結合したレーザビームの光軸と同じ光軸上を進行して集束レンズ２４へと向かうように、筐体２０１に対する取り付け位置及びガイド光を照射する向きが調整されている。 The positions of the first collimating lens 21 and the second collimating lens 22 are adjusted so that the first laser beam reflected by the first surface 23a and the second laser beam transmitted through the second surface 23b and the first surface 23a are superimposed on each other. The attachment position of the guide light emitting unit 26 relative to the housing 201 and the direction in which the guide light is emitted are adjusted so that the guide light reflected by the second surface 23b travels along the same optical axis as the optical axis of the combined laser beam toward the focusing lens 24.
　上記のように、第１のコリメートレンズ２１は位置調整機構５０によって第１のコリメートレンズ２１におけるＸ軸、Ｙ軸、Ｚ軸の各方向の位置が調整されている。第２のコリメートレンズ２２は、位置調整機構５０と同様の位置調整機構によって第２のコリメートレンズ２２におけるＸ軸、Ｙ軸、Ｚ軸の各方向の位置が調整されている。 As described above, the position of the first collimator lens 21 in the X-axis, Y-axis, and Z-axis directions is adjusted by the position adjustment mechanism 50. The position of the second collimator lens 22 in the X-axis, Y-axis, and Z-axis directions is adjusted by a position adjustment mechanism similar to the position adjustment mechanism 50.
　従って、ウェッジプリズム２３は、第１のレーザビームと第２のレーザビームとを互いに重畳させることにより結合させた結合レーザビームを生成して射出する。集束レンズ２４は、結合レーザビームを集束させてプロセスファイバ３０のコアに入射させる。プロセスファイバ３０は、結合レーザビームを加工ヘッド４０へと伝送する光ファイバである。ウェッジプリズム２３にガイド光が入射されるときには、集束レンズ２４はガイド光を集束させてプロセスファイバ３０のコアに入射させる。 Therefore, the wedge prism 23 generates and emits a combined laser beam by combining the first laser beam and the second laser beam by superimposing them on each other. The focusing lens 24 focuses the combined laser beam and makes it incident on the core of the process fiber 30. The process fiber 30 is an optical fiber that transmits the combined laser beam to the processing head 40. When the guide light is incident on the wedge prism 23, the focusing lens 24 focuses the guide light and makes it incident on the core of the process fiber 30.
　加工ヘッド４０は、筐体４０１内に、コリメートレンズ４１、ベンドミラー４２、集束レンズ４３を備える。コリメートレンズ４１は、プロセスファイバ３０の端部より射出される発散光の結合レーザビームをコリメート光に変換する。コリメートレンズ４１は、コリメート光に変換された結合レーザビームの進行方向を９０度曲げる。集束レンズ４３は、入射された結合レーザビームを集束させて、加工対象の板金Ｗに照射する。レーザ加工機１００は、板金Ｗを切断する加工機であってもよいし、板金Ｗを溶接する加工機であってもよい。板金Ｗは被加工材の一例であり、被加工材は板金に限定されない。 The processing head 40 includes a collimating lens 41, a bend mirror 42, and a focusing lens 43 in a housing 401. The collimating lens 41 converts the divergent combined laser beam emitted from the end of the process fiber 30 into collimated light. The collimating lens 41 bends the traveling direction of the combined laser beam converted into collimated light by 90 degrees. The focusing lens 43 focuses the incident combined laser beam and irradiates it onto the sheet metal W to be processed. The laser processing machine 100 may be a processing machine that cuts the sheet metal W, or may be a processing machine that welds the sheet metal W. The sheet metal W is an example of a workpiece, and the workpiece is not limited to sheet metal.
　加工ヘッド４０にガイド光が入射されるときには、集束レンズ４３は、入射されたガイド光を集束させて板金Ｗに照射する。ガイド光を板金Ｗに照射することにより、オペレータは、加工開始位置を決めたり、加工の軌跡を確認したりすることができる。なお、図１においては、破線で示すガイド光が加工ヘッド４０に入射されて板金Ｗに照射される様子を図示していないが、一点鎖線で示す結合レーザビームと同様に板金Ｗに照射される。 When the guide light is incident on the processing head 40, the focusing lens 43 focuses the incident guide light and irradiates it on the metal sheet W. By irradiating the metal sheet W with the guide light, the operator can determine the processing start position and check the processing trajectory. Note that in FIG. 1, the guide light shown by the dashed line is not shown as being incident on the processing head 40 and irradiated on the metal sheet W, but it is irradiated on the metal sheet W in the same way as the combined laser beam shown by the dashed line.
　図３は、ビームカプラ２０が備えるウェッジプリズム２３の第１の面２３ａ及び第２の面２３ｂに施されている第１及び第２のコーティングに施されている反射・透過特性を示す特性図である。図３には、第１のコーティングの反射・透過特性Ｃａと第２のコーティングの反射・透過特性Ｃｂを示している。図３に示すように、第１のコーティングの反射・透過特性Ｃａは、波長λ１を有する第１のレーザビームを反射し、波長λ２を有する第２のレーザビーム及び波長λ３を有するガイド光を透過させる特性である。第２のコーティングの反射・透過特性Ｃｂは、波長λ３を反射し、波長λ２を有する第２のレーザビームを透過させる特性である。 FIG. 3 is a characteristic diagram showing the reflection and transmission characteristics of the first and second coatings applied to the first surface 23a and second surface 23b of the wedge prism 23 provided in the beam coupler 20. FIG. 3 shows the reflection and transmission characteristics Ca of the first coating and the reflection and transmission characteristics Cb of the second coating. As shown in FIG. 3, the reflection and transmission characteristics Ca of the first coating are characteristics that reflect the first laser beam having a wavelength λ1 and transmit the second laser beam having a wavelength λ2 and the guide light having a wavelength λ3. The reflection and transmission characteristics Cb of the second coating are characteristics that reflect the wavelength λ3 and transmit the second laser beam having a wavelength λ2.
　従って、ウェッジプリズム２３を備えるビームカプラ２０は、上記のように、第１及び第２のレーザビームが入射されるときには、結合レーザビームを加工ヘッド４０へと供給し、ガイド光が入射されるときには、ガイド光を加工ヘッド４０へと供給することができる。 Therefore, as described above, the beam coupler 20 equipped with the wedge prism 23 can supply a combined laser beam to the processing head 40 when the first and second laser beams are incident, and can supply the guide light to the processing head 40 when the guide light is incident.
　以上のように、ビームカプラ２０は、ウェッジプリズム２３が第１のレーザビームと第２のレーザビームとを互いに重畳させることにより結合させた結合レーザビームを射出するように構成されているので、レーザビームを高出力化することができる。ビームカプラ２０は、ウェッジプリズム２３がガイド光を結合レーザビームの光軸と同じ光軸上に射出するように構成されているので、少ない光学部品で結合レーザビームとガイド光とを同じ光軸上に射出する構成を実現している。 As described above, the beam coupler 20 is configured so that the wedge prism 23 emits a combined laser beam obtained by superimposing the first laser beam and the second laser beam on each other, thereby enabling the laser beam to have a high output. The beam coupler 20 is configured so that the wedge prism 23 emits the guide light onto the same optical axis as the optical axis of the combined laser beam, thereby realizing a configuration in which the combined laser beam and the guide light are emitted onto the same optical axis with a small number of optical components.
　レーザ加工機１００は、第１のレーザ発振器１１、第２のレーザ発振器１２、ビームカプラ２０、プロセスファイバ３０によって伝送される結合レーザビームを加工対象の板金Ｗに照射する加工ヘッド４０を備える。レーザ加工機１００によれば、少ない光学部品で結合レーザビームとガイド光とを同じ光軸上に射出することができ、オペレータは、加工開始位置を決めたり、加工の軌跡を確認したりした上で、板金Ｗを加工することができる。 The laser processing machine 100 includes a processing head 40 that irradiates the combined laser beam transmitted by the first laser oscillator 11, the second laser oscillator 12, the beam coupler 20, and the process fiber 30 onto the metal sheet W to be processed. The laser processing machine 100 can emit the combined laser beam and the guide light on the same optical axis with a small number of optical components, and the operator can process the metal sheet W after determining the processing start position and checking the processing trajectory.
　本発明は以上説明した１またはそれ以上の実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲において種々変更可能である。 The present invention is not limited to one or more of the embodiments described above, and various modifications are possible without departing from the spirit of the present invention.
　本願は、２０２２年１０月１２日に日本国特許庁に出願された特願２０２２－１６４３１４号に基づく優先権を主張するものであり、その全ての開示内容は引用によりここに援用される。 This application claims priority to Patent Application No. 2022-164314, filed with the Japan Patent Office on October 12, 2022, the entire disclosure of which is incorporated herein by reference.

Claims (2)

  1. 　第１のレーザ発振器より射出される第１の波長を有する発散光の第１のレーザビームをコリメート光に変換する第１のコリメートレンズと、
    　第２のレーザ発振器より射出される第２の波長を有する発散光の第２のレーザビームをコリメート光に変換する第２のコリメートレンズと、
    　前記第１のコリメートレンズによってコリメート光に変換された前記第１のレーザビームを反射し、かつ可視光よりなるガイド光を透過させる特性を有する第１のコーティングが施された第１の面と、前記第２のコリメートレンズによってコリメート光に変換された前記第２のレーザビームを透過させ、かつ前記ガイド光を反射する特性を有する第２のコーティングが施された第２の面とを含み、前記第１のコーティングは、前記第２の面を透過した前記第２のレーザビームを透過させる特性を有し、前記第１の面で反射した前記第１のレーザビームと、前記第２の面及び前記第１の面をこの順で透過した前記第２のレーザビームとを結合させた結合レーザビームを射出し、前記第２の面で反射して前記第１の面を透過した前記ガイド光を前記結合レーザビームの光軸と同じ光軸上に射出するウェッジプリズムと、
    　前記ウェッジプリズムより射出された前記結合レーザビームまたは前記ガイド光を集束させて、前記結合レーザビームまたは前記ガイド光を伝送する光ファイバに入射させる集束レンズと、
    　を備えるビーム結合装置。     a first collimating lens for converting a first laser beam of divergent light having a first wavelength emitted from a first laser oscillator into a collimated light;
    a second collimating lens for converting a second laser beam of divergent light having a second wavelength emitted from a second laser oscillator into a collimated light;
    a wedge prism including: a first surface provided with a first coating having a property of reflecting the first laser beam converted into collimated light by the first collimating lens and transmitting a guide light made of visible light; and a second surface provided with a second coating having a property of transmitting the second laser beam converted into collimated light by the second collimating lens and reflecting the guide light, the first coating having a property of transmitting the second laser beam transmitted through the second surface; the wedge prism emitting a combined laser beam obtained by combining the first laser beam reflected at the first surface and the second laser beam transmitted through the second surface and the first surface in this order, and emitting the guide light reflected at the second surface and transmitted through the first surface onto the same optical axis as the optical axis of the combined laser beam;
    a focusing lens for focusing the combined laser beam or the guide light emitted from the wedge prism and inputting the combined laser beam or the guide light into an optical fiber that transmits the combined laser beam or the guide light;
    A beam combining device comprising:
  2. 　前記第１のレーザ発振器と、
    　前記第２のレーザ発振器と、
    　請求項１に記載のビーム結合装置と、
    　前記ガイド光を前記ウェッジプリズムに向けて射出するガイド光射出部と、
    　前記光ファイバによって伝送される前記結合レーザビームまたは前記ガイド光を被加工材に照射する加工ヘッドと、
    　を備えるレーザ加工機。     the first laser oscillator;
    the second laser oscillator;
    A beam combining device according to claim 1 ;
    a guide light emission section that emits the guide light toward the wedge prism;
    a processing head that irradiates a workpiece with the combined laser beam or the guide light transmitted by the optical fiber;
    A laser processing machine comprising:
PCT/JP2023/031964 2022-10-12 2023-08-31 Beam combining device and laser processing machine WO2024080033A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003225786A (en) * 2002-01-30 2003-08-12 Uht Corp Laser beam machining unit and machining device equipped therewith
JP2003270566A (en) * 2002-03-18 2003-09-25 Fuji Xerox Co Ltd Light source device and optical scanner using it
JP2010153584A (en) * 2008-12-25 2010-07-08 Mitsubishi Electric Corp Optical module and wavelength control method
JP2019193944A (en) * 2018-05-01 2019-11-07 株式会社島津製作所 Laser processing device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003225786A (en) * 2002-01-30 2003-08-12 Uht Corp Laser beam machining unit and machining device equipped therewith
JP2003270566A (en) * 2002-03-18 2003-09-25 Fuji Xerox Co Ltd Light source device and optical scanner using it
JP2010153584A (en) * 2008-12-25 2010-07-08 Mitsubishi Electric Corp Optical module and wavelength control method
JP2019193944A (en) * 2018-05-01 2019-11-07 株式会社島津製作所 Laser processing device

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