WO2024080032A1 - Beam combining device and laser processing machine - Google Patents

Beam combining device and laser processing machine Download PDF

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Publication number
WO2024080032A1
WO2024080032A1 PCT/JP2023/031951 JP2023031951W WO2024080032A1 WO 2024080032 A1 WO2024080032 A1 WO 2024080032A1 JP 2023031951 W JP2023031951 W JP 2023031951W WO 2024080032 A1 WO2024080032 A1 WO 2024080032A1
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Prior art keywords
laser beam
wedge prism
light
laser
coating
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PCT/JP2023/031951
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French (fr)
Japanese (ja)
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哲也 小林
陽亮 有本
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株式会社アマダ
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Publication of WO2024080032A1 publication Critical patent/WO2024080032A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements

Definitions

  • This disclosure relates to a beam combining device and a laser processing machine.
  • Laser processing machines In recent years, the laser beams used by laser processing machines to process sheet metal workpieces have become increasingly powerful (higher brightness). Laser processing machines sometimes superimpose two laser beams with different wavelengths emitted from two laser oscillators using optical components with wavelength-selective coatings to increase the power of the laser beam.
  • Increasing the power of the laser beam as described above makes it easier for unwanted light to be generated due to stimulated Raman scattering in the optical fiber that transmits the laser beam to the processing head.
  • unwanted light is generated due to stimulated Raman scattering, the quality of the laser beam deteriorates, which may result in a deterioration in the processing quality of the workpiece.
  • the processing speed may have to be reduced, which may result in a decrease in processing efficiency.
  • unwanted light due to stimulated Raman scattering may enter the laser oscillator, causing damage to the laser oscillator (see Patent Document 1).
  • a first aspect of one or more embodiments includes a first collimating lens that converts a first laser beam of divergent light having a first wavelength emitted from a first laser oscillator into collimated light, a second collimating lens that converts a second laser beam of divergent light having a second wavelength emitted from a second laser oscillator into collimated light, a first surface that is provided with a first coating having a property of reflecting the first laser beam converted into collimated light by the first collimating lens, and a second collimating lens that transmits the second laser beam converted into collimated light by the second collimating lens.
  • the present invention provides a beam combining device that includes a second surface coated with a second coating having a characteristic of transmitting the second laser beam transmitted through the second surface, a wedge prism that emits a combined laser beam by superimposing the first laser beam reflected by the first surface and the second laser beam transmitted through the second surface and the first surface in this order, and a focusing lens that focuses the combined laser beam emitted from the wedge prism and inputs it into an optical fiber that transmits the combined laser beam.
  • the second coating has a characteristic of reflecting at least the second unwanted light of the first unwanted light generated based on the first laser beam by stimulated Raman scattering and traveling from the optical fiber to the wedge prism, and the second unwanted light generated based on the second laser beam by stimulated Raman scattering and traveling from the optical fiber to the wedge prism, and the wedge prism reflects at least the second unwanted light in a third direction different from the first direction, which is the direction of the optical axis of the combined laser beam traveling from the wedge prism to the focusing lens, and the second direction, which is the direction of the optical axis of the first laser beam traveling from the first collimating lens to the wedge prism.
  • the wedge prism superimposes the first laser beam and the second laser beam on each other to emit a combined laser beam, thereby enabling the laser beam to have a high output.
  • at least the second unwanted light is not directed toward the first and second collimating lenses, thereby reducing defects caused by the unwanted light due to stimulated Raman scattering.
  • a second aspect of one or more of the embodiments provides a laser processing machine including the first laser oscillator, the second laser oscillator, the beam combining device of the first aspect, and a processing head that irradiates the combined laser beam transmitted by the optical fiber onto a workpiece to be processed.
  • the wedge prism superimposes the first laser beam and the second laser beam on each other to emit a combined laser beam, thereby enabling the laser beam to be made high-powered.
  • at least the second unwanted light is not directed toward the first and second collimating lenses, thereby reducing defects caused by the unwanted light due to stimulated Raman scattering.
  • the workpiece can be processed with a high-power laser beam.
  • the beam combining device and laser processing machine can superimpose two laser beams with different wavelengths to produce a high-power laser beam, thereby reducing defects caused by unwanted light due to stimulated Raman scattering.
  • FIG. 1 illustrates a beam combining device and a laser processing machine according to one or more embodiments.
  • FIG. 2A is a cross-sectional view of a position adjustment mechanism for a first collimating lens included in a beam combining device according to one or more embodiments, taken along a plane perpendicular to the Z axis.
  • FIG. 2B is a cross-sectional view of a position adjustment mechanism for a first collimating lens included in a beam combining device according to one or more embodiments, taken along a plane perpendicular to the X-axis.
  • FIG. 3 is a characteristic diagram illustrating a first example of the operation of a wedge prism included in a beam combining device according to one or more embodiments.
  • FIG. 4 is a characteristic diagram showing a second example, which is more preferable than the first example, for explaining the operation of a wedge prism included in a beam combining device according to one or more embodiments of the present invention.
  • the beam combining device includes a first collimating lens, a second collimating lens, a wedge prism, and a focusing lens.
  • the first collimating lens converts a first laser beam of divergent light having a first wavelength emitted from a first laser oscillator into collimated light.
  • the second collimating lens converts a second laser beam of divergent light having a second wavelength emitted from a second laser oscillator into collimated light.
  • the wedge prism includes a first surface having a first coating with a characteristic of reflecting the first laser beam converted into collimated light by the first collimating lens, and a second surface having a second coating with a characteristic of transmitting the second laser beam converted into collimated light by the second collimating lens.
  • the first coating has a characteristic of transmitting the second laser beam transmitted through the second surface.
  • the wedge prism emits a combined laser beam obtained by combining the first laser beam reflected by the first surface and the second laser beam transmitted through the second surface and the first surface in this order by superimposing them on each other.
  • the focusing lens focuses the combined laser beam emitted from the wedge prism and makes it incident on the optical fiber that transmits the combined laser beam.
  • the second coating has a characteristic of reflecting at least the second unwanted light of a first unwanted light generated by stimulated Raman scattering based on the first laser beam and traveling from the optical fiber to the wedge prism, and a second unwanted light generated by stimulated Raman scattering based on the second laser beam and traveling from the optical fiber to the wedge prism.
  • the wedge prism reflects at least the second unwanted light in a third direction different from a first direction which is the direction of the optical axis of the combined laser beam traveling from the wedge prism to the focusing lens, and a second direction which is the direction of the optical axis of the first laser beam traveling from the first collimating lens to the wedge prism.
  • the laser processing machine includes the first laser oscillator, the second laser oscillator, a beam combining device according to one or more embodiments, and a processing head that irradiates the combined laser beam transmitted by the optical fiber onto a workpiece to be processed.
  • FIG. 1 shows a beam combining device and a laser processing machine according to one or more embodiments.
  • the laser processing machine 100 according to one or more embodiments shown in FIG. 1 includes a first laser oscillator 11, a second laser oscillator 12, a beam coupler 20 which is a beam combining device according to one or more embodiments, and a processing head 40.
  • the first laser oscillator 11 and the second laser oscillator 12 are, for example, a fiber laser oscillator, a disk laser oscillator, or a direct diode laser oscillator.
  • the connector 13c of the feeding fiber 13 that transmits the first laser beam emitted from the first laser oscillator 11 is connected to the end of the protrusion 201p in the housing 201 of the beam coupler 20.
  • the connector 14c of the feeding fiber 14 that transmits the second laser beam emitted from the second laser oscillator 12 is connected to one end of the main body 201m in the housing 201.
  • the first connector 30c1 of the process fiber 30 is connected to the other end of the main body 201m, and the second connector 30c2 is connected to the housing 401 of the processing head 40.
  • the beam coupler 20 includes a first collimating lens 21, a second collimating lens 22, a wedge prism 23, a focusing lens 24, and a beam damper 25 within a housing 201. Although it is not essential that the beam coupler 20 includes the beam damper 25, it is preferable that the beam coupler 20 includes the beam damper 25.
  • a first coating which will be described later, is applied to the first surface 23a of the wedge prism 23.
  • a second coating which will be described later, is applied to the second surface 23b, which faces the first surface 23a of the wedge prism 23.
  • the first laser beam emitted from the first laser oscillator 11 has a wavelength ⁇ 1
  • the second laser beam emitted from the second laser oscillator 12 has a wavelength ⁇ 2 that is longer than the wavelength ⁇ 1.
  • the first laser beam, the second laser beam, and a combined laser beam described below are indicated by dashed dotted lines. It is preferable that the difference between the wavelengths ⁇ 1 and ⁇ 2 is less than 50 nm. The reason for this will be described later. Note that in order to superimpose two laser beams with different wavelengths on each other, the difference in the wavelengths of the two laser beams must be at least 5 nm. Therefore, the difference between the wavelengths ⁇ 1 and ⁇ 2 is at least 5 nm.
  • the first laser beam emitted from the first laser oscillator 11 is transmitted to the beam coupler 20 by the feeding fiber 13.
  • the second laser beam emitted from the second laser oscillator 12 is transmitted to the beam coupler 20 by the feeding fiber 14.
  • the first collimating lens 21 converts the first laser beam of diverging light emitted from the end of the feeding fiber 13 into collimated light.
  • the first laser beam converted into collimated light is incident on the first surface 23a of the wedge prism 23.
  • the second collimating lens 22 converts the second laser beam of diverging light emitted from the end of the feeding fiber 14 into collimated light.
  • the second laser beam converted into collimated light is incident on the second surface 23b of the wedge prism 23.
  • the first collimating lens 21 and the second collimating lens 22 are biconvex lenses in which both the entrance surface and the exit surface of the laser beam are convex, but they may also be plano-convex lenses in which the entrance surface is flat and the exit surface is convex.
  • the lens shapes of the first collimating lens 21 and the second collimating lens 22 are not limited.
  • the focusing lens 24 and the collimating lens 41 or focusing lens 43 in the processing head 40 which will be described later, may also be biconvex lenses or plano-convex lenses, and the lens shapes are not limited.
  • FIG. 2A is a cross-sectional view of the position adjustment mechanism 50 of the first collimator lens 21 provided in the beam coupler 20, cut along a plane perpendicular to the Z axis.
  • FIG. 2B is a cross-sectional view of the position adjustment mechanism 50 of the first collimator lens 21 provided in the beam coupler 20, cut along a plane perpendicular to the X axis.
  • the position of the first collimator lens 21 is adjusted by the position adjustment mechanism 50 as shown in FIG. 2A and FIG. 2B.
  • the position of the second collimator lens 22 is also adjusted by a position adjustment mechanism similar to the position adjustment mechanism 50 shown in FIG. 2A and FIG. 2B.
  • the optical axis direction of the first laser beam emitted from the first collimator lens 21 is the Z axis, and the two orthogonal directions perpendicular to the Z axis are the X axis and the Y axis.
  • the first collimator lens 21 is a plano-convex lens.
  • the first collimator lens 21 is held in the position adjustment mechanism 50 by the lens holder 51.
  • two coil springs 53x extending in the X-axis direction apply a force in the X-axis direction to the lens holder 51
  • two coil springs 53y extending in the Y-axis direction apply a force in the Y-axis direction to the lens holder 51.
  • the position of the lens holder 51 in the X-axis direction can be adjusted by turning the X-axis adjustment screw member 52x
  • the position of the lens holder 51 in the Y-axis direction can be adjusted by turning the Y-axis adjustment screw member 52y.
  • the connector 13c is attached to a receiver 20R (not shown in FIG. 1) provided at the end of the protrusion 201p.
  • Two coil springs 53z extending in the Z-axis direction apply a force in the Z-axis direction to the lens holder 51.
  • a movable inner cylinder 54 is provided adjacent to the lens holder 51 inside the protrusion 201p.
  • a male thread 54sw is formed on the outer peripheral surface of the end of the movable inner cylinder 54, and a female thread 20sw that meshes with the male thread 54sw is formed on the opposing inner peripheral surface of the protrusion 201p.
  • the first coating applied to the first surface 23a of the wedge prism 23 has the property of reflecting the first laser beam converted into collimated light. Therefore, the first laser beam is reflected by the first surface 23a and heads toward the focusing lens 24.
  • the second coating applied to the second surface 23b of the wedge prism 23 has the property of transmitting the second laser beam converted into collimated light.
  • the first coating has the property of transmitting the second laser beam that has passed through the second surface 23b. Therefore, the second laser beam passes through the second surface 23b and the first surface 23a in this order and heads toward the focusing lens 24.
  • the positions of the first collimating lens 21 and the second collimating lens 22 are adjusted so that the first laser beam reflected by the first surface 23a and the second laser beam transmitted through the second surface 23b and the first surface 23a are superimposed on each other.
  • the position of the first collimating lens 21 is adjusted in the X-axis, Y-axis, and Z-axis directions of the first collimating lens 21 by the position adjustment mechanism 50.
  • the position of the second collimating lens 22 is adjusted in the X-axis, Y-axis, and Z-axis directions of the second collimating lens 22 by a position adjustment mechanism similar to the position adjustment mechanism 50.
  • the wedge prism 23 generates and emits a combined laser beam by superimposing the first laser beam and the second laser beam on each other.
  • the focusing lens 24 focuses the combined laser beam and makes it incident on the core of the process fiber 30.
  • the process fiber 30 is an optical fiber that transmits the combined laser beam to the processing head 40.
  • the processing head 40 includes a collimating lens 41, a bend mirror 42, and a focusing lens 43 in a housing 401.
  • the collimating lens 41 converts the divergent combined laser beam emitted from the end of the process fiber 30 into collimated light.
  • the collimating lens 41 bends the traveling direction of the combined laser beam converted into collimated light by 90 degrees.
  • the focusing lens 43 focuses the incident combined laser beam and irradiates it onto the sheet metal W to be processed.
  • the laser processing machine 100 may be a processing machine that cuts the sheet metal W, or may be a processing machine that welds the sheet metal W.
  • the sheet metal W is an example of a workpiece, and the workpiece is not limited to sheet metal.
  • the process fiber 30 has a length of 10 m to 20 m.
  • unwanted light is likely to be generated due to stimulated Raman scattering, which is one of the nonlinear phenomena of optical fibers.
  • SRS light the unwanted light due to stimulated Raman scattering
  • the generation threshold Pth at which SRS light is generated is given by the following formula (1) using the effective core area Aeff, polarization factor fp, Raman gain gR, and effective fiber length Leff of the process fiber 30.
  • Pth 16 ⁇ ⁇ Aeff / (fp gR Leff) ⁇ ...
  • the generation threshold Pth becomes larger and SRS light becomes less likely to be generated.
  • the beam quality deteriorates, and the processing quality decreases, especially when the metal plate W is a thin plate. Therefore, it is difficult to adopt a measure to suppress the generation of SRS light by increasing the core diameter of the process fiber 30.
  • the generation threshold Pth becomes larger and SRS light becomes less likely to be generated.
  • the process fiber 30 is long, at 10 m to 20 m, and it is also difficult to adopt a measure to suppress the generation of SRS light by shortening the process fiber 30.
  • the SRS light generated in the process fiber 30 may travel toward the beam coupler 20. If the SRS light that has entered the beam coupler 20 is incident on the first laser oscillator 11 or the second laser oscillator 12, there is a risk of damaging the first laser oscillator 11 or the second laser oscillator 12, so the beam coupler 20 is configured as follows.
  • FIG. 3 is a characteristic diagram showing a first example for explaining the operation of the wedge prism 23 provided in the beam coupler 20.
  • FIG. 3 shows the reflection/transmission characteristic C11 of the first coating and the reflection/transmission characteristic C21 of the second coating when the difference between the wavelength ⁇ 1 of the first laser beam and the wavelength ⁇ 2 of the second laser beam greatly exceeds 50 nm.
  • the first SRS light (first unwanted light) generated based on the first laser beam is generated at a wavelength ⁇ s1 that is about 50 nm longer than the wavelength ⁇ 1
  • the second SRS light (second unwanted light) generated based on the second laser beam is generated at a wavelength ⁇ s2 that is about 50 nm longer than the wavelength ⁇ 2.
  • FIG. 3 also shows the light intensity characteristic LB1 of the first laser beam, the light intensity characteristic LB2 of the second laser beam, the light intensity characteristic SRS1 of the first SRS light, and the light intensity characteristic SRS2 of the second SRS light.
  • the reflection/transmission characteristic C21 of the second coating is a characteristic that transmits the second laser beam and reflects the second SRS light.
  • the reflection/transmission characteristic C11 of the first coating is a characteristic that reflects the first laser beam and the first SRS light. Therefore, when the wavelengths ⁇ 1, ⁇ 2, ⁇ s1, and ⁇ s2 are in the wavelength positional relationship shown in FIG. 3 and the first and second coatings have the reflection/transmission characteristics C11 and C21 shown in FIG. 3, respectively, the wedge prism 23 reflects the second SRS light in the direction shown in FIG. 1.
  • the direction of the optical axis of the combined laser beam traveling from the wedge prism 23 to the focusing lens 24 is defined as a first direction.
  • the direction of the optical axis of the first laser beam traveling from the first collimating lens 21 to the wedge prism 23 is defined as a second direction.
  • the wedge prism 23 reflects the second SRS light in a third direction different from the first and second directions.
  • the beam damper 25 is made of an aluminum material that has been black anodized.
  • the beam damper 25 absorbs the incident second SRS light and prevents it from traveling toward the first collimator lens 21 or the second collimator lens 22.
  • FIG. 4 is a characteristic diagram showing a second example, which is more preferable than the first example, for explaining the operation of the wedge prism 23 provided in the beam coupler 20.
  • FIG. 4 shows the preferred reflection/transmission characteristics C12 of the reflectance of the first coating and the preferred reflection/transmission characteristics C22 of the reflectance of the second coating, with the difference between the wavelength ⁇ 1 of the first laser beam and the wavelength ⁇ 2 of the second laser beam being less than 50 nm. Since the difference between the wavelength ⁇ 1 and the wavelength ⁇ 2 is less than 50 nm, the wavelengths ⁇ 1, ⁇ 2, ⁇ s1, and ⁇ s2 are in the wavelength positional relationship shown in FIG. 4.
  • the reflection/transmission characteristic C22 of the second coating is a characteristic that transmits the second laser beam and reflects the first and second SRS lights.
  • the reflection/transmission characteristic C12 of the first coating is a characteristic that reflects the first laser beam. Therefore, when the wavelengths ⁇ 1, ⁇ 2, ⁇ s1, and ⁇ s2 are in the wavelength positional relationship shown in FIG. 4 and the first and second coatings have the reflection/transmission characteristics C12 and C22 shown in FIG. 4, respectively, the wedge prism 23 reflects the first and second SRS lights in the third direction.
  • the beam damper 25 absorbs the incident first and second SRS lights and prevents them from traveling toward the first collimating lens 21 or the second collimating lens 22.
  • the second coating applied to the second surface 23b of the wedge prism 23 has the property of reflecting at least the second SRS light of the first SRS light and the second SRS light, and preferably has the property of reflecting both the first and second SRS lights.
  • the difference between the wavelength ⁇ 1 and the wavelength ⁇ 2 is less than 50 nm.
  • the beam coupler 20 is configured so that the wedge prism 23 superimposes the first laser beam and the second laser beam on each other to emit a combined laser beam, thereby enabling the laser beam to have a high output.
  • the beam coupler 20 is configured so that the wedge prism 23 reflects at least the second SRS light in the third direction, so that at least the second SRS light does not travel toward the first collimator lens 21 and the second collimator lens 22. Therefore, the beam coupler 20 can reduce problems caused by the SRS light.
  • the beam coupler 20 is preferably configured so that the wedge prism 23 reflects the first and second SRS lights in a third direction. With this configuration, the first and second SRS lights do not travel toward the first collimator lens 21 and the second collimator lens 22. Therefore, with the beam coupler 20 configured to reflect the first and second SRS lights in the third direction, problems caused by the SRS lights can be further reduced.
  • the beam coupler 20 described above has the advantage of being able to combine the first and second laser beams with a small number of optical components, while also reducing problems caused by SRS light.
  • the laser processing machine 100 includes a processing head 40 that irradiates the combined laser beam transmitted by the first laser oscillator 11, the second laser oscillator 12, the beam coupler 20, and the process fiber 30 onto the metal sheet W to be processed.
  • the laser processing machine 100 reduces defects caused by SRS light and can process the metal sheet W with a high-output laser beam.

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  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
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  • Optical Couplings Of Light Guides (AREA)

Abstract

A first surface (23a) of a wedge prism (23) has a first coating, and a second surface (23b) thereof has a second coating. The wedge prism (23) emits a combined laser beam obtained by superimposing on one another a first laser beam reflected by the first surface (23a) and a second laser beam that has been transmitted through the second surface (23b) and the first surface (23a) in the stated order. The second coating has the characteristic of reflecting at least second unnecessary light among first unnecessary light, which is generated by means of stimulated Raman scattering on the basis of the first laser beam and which is directed toward the wedge prism (23) from an optical fiber (process fiber (30)), and said second unnecessary light, which is generated by means of stimulated Raman scattering on the basis of the second laser beam and which is directed toward the wedge prism (23) from the optical fiber.

Description

ビーム結合装置及びレーザ加工機Beam combining device and laser processing machine
　本開示は、ビーム結合装置及びレーザ加工機に関する。 This disclosure relates to a beam combining device and a laser processing machine.
　近年、レーザ加工機が被加工材である板金を加工する際に使用するレーザビームの高出力化（高輝度化）が進んでいる。レーザ加工機は、２つのレーザ発振器より射出された波長が異なる２つのレーザビームを、波長選択性コーティングを施した光学部品で互いに重畳してレーザビームを高出力化することがある。 In recent years, the laser beams used by laser processing machines to process sheet metal workpieces have become increasingly powerful (higher brightness). Laser processing machines sometimes superimpose two laser beams with different wavelengths emitted from two laser oscillators using optical components with wavelength-selective coatings to increase the power of the laser beam.
特開２０１９－２０２３４２号公報JP 2019-202342 A
　上記のようにレーザビームの高出力化すると、レーザビームを加工ヘッドへと伝送する光ファイバ内で誘導ラマン散乱による不要光が発生しやすくなる。誘導ラマン散乱による不要光が発生すると、レーザビームの品質が悪化するため、被加工材の加工品質を悪化させることがある。加工品質の悪化を回避するために加工速度を低下させざるを得なくなり、加工の効率が落ちてしまうことがある。また、誘導ラマン散乱による不要光がレーザ発振器に入射して、レーザ発振器が破損するおそれがある（特許文献１参照）。 Increasing the power of the laser beam as described above makes it easier for unwanted light to be generated due to stimulated Raman scattering in the optical fiber that transmits the laser beam to the processing head. When unwanted light is generated due to stimulated Raman scattering, the quality of the laser beam deteriorates, which may result in a deterioration in the processing quality of the workpiece. In order to avoid the deterioration of the processing quality, the processing speed may have to be reduced, which may result in a decrease in processing efficiency. In addition, unwanted light due to stimulated Raman scattering may enter the laser oscillator, causing damage to the laser oscillator (see Patent Document 1).
　波長が異なる２つのレーザビームを重畳することによりレーザビームを高出力化しながら、誘導ラマン散乱による不要光に起因する不具合を軽減させることができる新たな構成の登場が望まれる。 There is a need for a new configuration that can increase the output of a laser beam by superimposing two laser beams with different wavelengths while reducing defects caused by unwanted light due to stimulated Raman scattering.
　１またはそれ以上の実施形態の第１の態様は、第１のレーザ発振器より射出される第１の波長を有する発散光の第１のレーザビームをコリメート光に変換する第１のコリメートレンズと、第２のレーザ発振器より射出される第２の波長を有する発散光の第２のレーザビームをコリメート光に変換する第２のコリメートレンズと、前記第１のコリメートレンズによってコリメート光に変換された前記第１のレーザビームを反射する特性を有する第１のコーティングが施された第１の面と、前記第２のコリメートレンズによってコリメート光に変換された前記第２のレーザビームを透過させる特性を有する第２のコーティングが施された第２の面とを含み、前記第１のコーティングは、前記第２の面を透過した前記第２のレーザビームを透過させる特性を有し、前記第１の面で反射した前記第１のレーザビームと、前記第２の面及び前記第１の面をこの順で透過した前記第２のレーザビームとを互いに重畳させることにより結合させた結合レーザビームを射出するウェッジプリズムと、前記ウェッジプリズムより射出された前記結合レーザビームを集束させて、前記結合レーザビームを伝送する光ファイバに入射させる集束レンズとを備えるビーム結合装置を提供する。 A first aspect of one or more embodiments includes a first collimating lens that converts a first laser beam of divergent light having a first wavelength emitted from a first laser oscillator into collimated light, a second collimating lens that converts a second laser beam of divergent light having a second wavelength emitted from a second laser oscillator into collimated light, a first surface that is provided with a first coating having a property of reflecting the first laser beam converted into collimated light by the first collimating lens, and a second collimating lens that transmits the second laser beam converted into collimated light by the second collimating lens. The present invention provides a beam combining device that includes a second surface coated with a second coating having a characteristic of transmitting the second laser beam transmitted through the second surface, a wedge prism that emits a combined laser beam by superimposing the first laser beam reflected by the first surface and the second laser beam transmitted through the second surface and the first surface in this order, and a focusing lens that focuses the combined laser beam emitted from the wedge prism and inputs it into an optical fiber that transmits the combined laser beam.
　第１の態様のビーム結合装置において、前記第２のコーティングは、誘導ラマン散乱によって前記第１のレーザビームに基づいて発生する、前記光ファイバから前記ウェッジプリズムへと向かう第１の不要光と、誘導ラマン散乱によって前記第２のレーザビームに基づいて発生する、前記光ファイバから前記ウェッジプリズムへと向かう第２の不要光とのうち、少なくとも前記第２の不要光を反射する特性を有し、前記ウェッジプリズムは、少なくとも前記第２の不要光を、前記ウェッジプリズムから前記集束レンズへと向かう前記結合レーザビームの光軸の方向である第１の方向と、前記第１のコリメートレンズから前記ウェッジプリズムへと向かう前記第１のレーザビームの光軸の方向である第２の方向とは異なる第３の方向に反射させる。 In the beam combining device of the first aspect, the second coating has a characteristic of reflecting at least the second unwanted light of the first unwanted light generated based on the first laser beam by stimulated Raman scattering and traveling from the optical fiber to the wedge prism, and the second unwanted light generated based on the second laser beam by stimulated Raman scattering and traveling from the optical fiber to the wedge prism, and the wedge prism reflects at least the second unwanted light in a third direction different from the first direction, which is the direction of the optical axis of the combined laser beam traveling from the wedge prism to the focusing lens, and the second direction, which is the direction of the optical axis of the first laser beam traveling from the first collimating lens to the wedge prism.
　１またはそれ以上の実施形態の第１の態様によれば、ウェッジプリズムが第１のレーザビームと第２のレーザビームとを互いに重畳させることにより結合させた結合レーザビームを射出するので、レーザビームを高出力化することができる。１またはそれ以上の実施形態の第１の態様によれば、少なくとも第２の不要光が第１及び第２のコリメートレンズに向かうことがないので、誘導ラマン散乱による不要光に起因する不具合を軽減させることができる。 According to a first aspect of one or more embodiments, the wedge prism superimposes the first laser beam and the second laser beam on each other to emit a combined laser beam, thereby enabling the laser beam to have a high output. According to a first aspect of one or more embodiments, at least the second unwanted light is not directed toward the first and second collimating lenses, thereby reducing defects caused by the unwanted light due to stimulated Raman scattering.
　１またはそれ以上の実施形態の第２の態様は、前記第１のレーザ発振器と、前記第２のレーザ発振器と、第１の態様のビーム結合装置と、前記光ファイバによって伝送される前記結合レーザビームを加工対象の被加工材に照射する加工ヘッドとを備えるレーザ加工機を提供する。 A second aspect of one or more of the embodiments provides a laser processing machine including the first laser oscillator, the second laser oscillator, the beam combining device of the first aspect, and a processing head that irradiates the combined laser beam transmitted by the optical fiber onto a workpiece to be processed.
　１またはそれ以上の実施形態の第２の態様によれば、ウェッジプリズムが第１のレーザビームと第２のレーザビームとを互いに重畳させることにより結合させた結合レーザビームを射出するので、レーザビームを高出力化することができる。１またはそれ以上の実施形態の第２の態様によれば、少なくとも第２の不要光が第１及び第２のコリメートレンズに向かうことがないので、誘導ラマン散乱による不要光に起因する不具合を軽減させることができる。１またはそれ以上の実施形態の第２の態様によれば、高出力のレーザビームで被加工材を加工することができる。 According to the second aspect of one or more of the embodiments, the wedge prism superimposes the first laser beam and the second laser beam on each other to emit a combined laser beam, thereby enabling the laser beam to be made high-powered. According to the second aspect of one or more of the embodiments, at least the second unwanted light is not directed toward the first and second collimating lenses, thereby reducing defects caused by the unwanted light due to stimulated Raman scattering. According to the second aspect of one or more of the embodiments, the workpiece can be processed with a high-power laser beam.
　１またはそれ以上の実施形態に係るビーム結合装置及びレーザ加工機によれば、波長が異なる２つのレーザビームを互いに重畳することによりレーザビームを高出力化することができ、誘導ラマン散乱による不要光に起因する不具合を軽減させることができる。 The beam combining device and laser processing machine according to one or more embodiments can superimpose two laser beams with different wavelengths to produce a high-power laser beam, thereby reducing defects caused by unwanted light due to stimulated Raman scattering.
図１は、１またはそれ以上の実施形態に係るビーム結合装置及びレーザ加工機を示す図である。FIG. 1 illustrates a beam combining device and a laser processing machine according to one or more embodiments. 図２Ａは、１またはそれ以上の実施形態に係るビーム結合装置が備える第１のコリメートレンズの位置調整機構をＺ軸と直交する面で切断した断面図である。FIG. 2A is a cross-sectional view of a position adjustment mechanism for a first collimating lens included in a beam combining device according to one or more embodiments, taken along a plane perpendicular to the Z axis. 図２Ｂは、１またはそれ以上の実施形態に係るビーム結合装置が備える第１のコリメートレンズの位置調整機構をＸ軸と直交する面で切断した断面図である。FIG. 2B is a cross-sectional view of a position adjustment mechanism for a first collimating lens included in a beam combining device according to one or more embodiments, taken along a plane perpendicular to the X-axis. 図３は、１またはそれ以上の実施形態に係るビーム結合装置が備えるウェッジプリズムの動作を説明するための第１の例を示す特性図である。FIG. 3 is a characteristic diagram illustrating a first example of the operation of a wedge prism included in a beam combining device according to one or more embodiments. 図４は、１またはそれ以上の実施形態に係るビーム結合装置が備えるウェッジプリズムの動作を説明するための、第１の例より好ましい第２の例を示す特性図である。FIG. 4 is a characteristic diagram showing a second example, which is more preferable than the first example, for explaining the operation of a wedge prism included in a beam combining device according to one or more embodiments of the present invention.
　１またはそれ以上の実施形態に係るビーム結合装置は、第１のコリメートレンズ、第２のコリメートレンズ、ウェッジプリズム、集束レンズを備える。前記第１のコリメートレンズは、第１のレーザ発振器より射出される第１の波長を有する発散光の第１のレーザビームをコリメート光に変換する。前記第２のコリメートレンズは、第２のレーザ発振器より射出される第２の波長を有する発散光の第２のレーザビームをコリメート光に変換する。 The beam combining device according to one or more embodiments includes a first collimating lens, a second collimating lens, a wedge prism, and a focusing lens. The first collimating lens converts a first laser beam of divergent light having a first wavelength emitted from a first laser oscillator into collimated light. The second collimating lens converts a second laser beam of divergent light having a second wavelength emitted from a second laser oscillator into collimated light.
　前記ウェッジプリズムは、前記第１のコリメートレンズによってコリメート光に変換された前記第１のレーザビームを反射する特性を有する第１のコーティングが施された第１の面と、前記第２のコリメートレンズによってコリメート光に変換された前記第２のレーザビームを透過させる特性を有する第２のコーティングが施された第２の面とを含む。前記第１のコーティングは、前記第２の面を透過した前記第２のレーザビームを透過させる特性を有する。前記ウェッジプリズムは、前記第１の面で反射した前記第１のレーザビームと、前記第２の面及び前記第１の面をこの順で透過した前記第２のレーザビームとを互いに重畳させることにより結合させた結合レーザビームを射出する。 The wedge prism includes a first surface having a first coating with a characteristic of reflecting the first laser beam converted into collimated light by the first collimating lens, and a second surface having a second coating with a characteristic of transmitting the second laser beam converted into collimated light by the second collimating lens. The first coating has a characteristic of transmitting the second laser beam transmitted through the second surface. The wedge prism emits a combined laser beam obtained by combining the first laser beam reflected by the first surface and the second laser beam transmitted through the second surface and the first surface in this order by superimposing them on each other.
　前記集束レンズは、前記ウェッジプリズムより射出された前記結合レーザビームを集束させて、前記結合レーザビームを伝送する光ファイバに入射させる。 The focusing lens focuses the combined laser beam emitted from the wedge prism and makes it incident on the optical fiber that transmits the combined laser beam.
　１またはそれ以上の実施形態に係るビーム結合装置において、前記第２のコーティングは、誘導ラマン散乱によって前記第１のレーザビームに基づいて発生する、前記光ファイバから前記ウェッジプリズムへと向かう第１の不要光と、誘導ラマン散乱によって前記第２のレーザビームに基づいて発生する、前記光ファイバから前記ウェッジプリズムへと向かう第２の不要光とのうち、少なくとも前記第２の不要光を反射する特性を有する。前記ウェッジプリズムは、少なくとも前記第２の不要光を、前記ウェッジプリズムから前記集束レンズへと向かう前記結合レーザビームの光軸の方向である第１の方向と、前記第１のコリメートレンズから前記ウェッジプリズムへと向かう前記第１のレーザビームの光軸の方向である第２の方向とは異なる第３の方向に反射させる。 In one or more embodiments of the beam combining device, the second coating has a characteristic of reflecting at least the second unwanted light of a first unwanted light generated by stimulated Raman scattering based on the first laser beam and traveling from the optical fiber to the wedge prism, and a second unwanted light generated by stimulated Raman scattering based on the second laser beam and traveling from the optical fiber to the wedge prism. The wedge prism reflects at least the second unwanted light in a third direction different from a first direction which is the direction of the optical axis of the combined laser beam traveling from the wedge prism to the focusing lens, and a second direction which is the direction of the optical axis of the first laser beam traveling from the first collimating lens to the wedge prism.
　１またはそれ以上の実施形態に係るレーザ加工機は、前記第１のレーザ発振器と、前記第２のレーザ発振器と、１またはそれ以上の実施形態に係るビーム結合装置と、前記光ファイバによって伝送される前記結合レーザビームを加工対象の被加工材に照射する加工ヘッドとを備える。 The laser processing machine according to one or more embodiments includes the first laser oscillator, the second laser oscillator, a beam combining device according to one or more embodiments, and a processing head that irradiates the combined laser beam transmitted by the optical fiber onto a workpiece to be processed.
　以下、１またはそれ以上の実施形態に係るビーム結合装置及びレーザ加工機について、添付図面を参照して具体的に説明する。図１は、１またはそれ以上の実施形態に係るビーム結合装置及びレーザ加工機を示す。図１に示す１またはそれ以上の実施形態に係るレーザ加工機１００は、第１のレーザ発振器１１、第２のレーザ発振器１２、１またはそれ以上の実施形態に係るビーム結合装置であるビームカプラ２０、加工ヘッド４０を備える。第１のレーザ発振器１１及び第２のレーザ発振器１２は、例えば、ファイバレーザ発振器、ディスクレーザ発振器、またはダイレクトダイオードレーザ発振器である。 Below, a beam combining device and a laser processing machine according to one or more embodiments will be specifically described with reference to the accompanying drawings. FIG. 1 shows a beam combining device and a laser processing machine according to one or more embodiments. The laser processing machine 100 according to one or more embodiments shown in FIG. 1 includes a first laser oscillator 11, a second laser oscillator 12, a beam coupler 20 which is a beam combining device according to one or more embodiments, and a processing head 40. The first laser oscillator 11 and the second laser oscillator 12 are, for example, a fiber laser oscillator, a disk laser oscillator, or a direct diode laser oscillator.
　第１のレーザ発振器１１より射出される第１のレーザビームを伝送するフィーディングファイバ１３のコネクタ１３ｃは、ビームカプラ２０の筐体２０１における突出部２０１ｐの端部に接続されている。第２のレーザ発振器１２より射出される第２のレーザビームを伝送するフィーディングファイバ１４のコネクタ１４ｃは、筐体２０１における本体部２０１ｍの一方の端部に接続されている。プロセスファイバ３０の第１のコネクタ３０ｃ１は本体部２０１ｍの他方の端部に接続され、第２のコネクタ３０ｃ２は加工ヘッド４０の筐体４０１に接続されている。 The connector 13c of the feeding fiber 13 that transmits the first laser beam emitted from the first laser oscillator 11 is connected to the end of the protrusion 201p in the housing 201 of the beam coupler 20. The connector 14c of the feeding fiber 14 that transmits the second laser beam emitted from the second laser oscillator 12 is connected to one end of the main body 201m in the housing 201. The first connector 30c1 of the process fiber 30 is connected to the other end of the main body 201m, and the second connector 30c2 is connected to the housing 401 of the processing head 40.
　ビームカプラ２０は、筐体２０１内に、第１のコリメートレンズ２１、第２のコリメートレンズ２２、ウェッジプリズム２３、集束レンズ２４、ビームダンパ２５を備える。ビームカプラ２０がビームダンパ２５を備えることは必須ではないが、ビームダンパ２５を備えることが好ましい。ウェッジプリズム２３の第１の面２３ａには、後述する第１のコーティングが施されている。ウェッジプリズム２３の第１の面２３ａと対向する第２の面２３ｂには、後述する第２のコーティングが施されている。 The beam coupler 20 includes a first collimating lens 21, a second collimating lens 22, a wedge prism 23, a focusing lens 24, and a beam damper 25 within a housing 201. Although it is not essential that the beam coupler 20 includes the beam damper 25, it is preferable that the beam coupler 20 includes the beam damper 25. A first coating, which will be described later, is applied to the first surface 23a of the wedge prism 23. A second coating, which will be described later, is applied to the second surface 23b, which faces the first surface 23a of the wedge prism 23.
　第１のレーザ発振器１１より射出される第１のレーザビームは波長λ１を有し、第２のレーザ発振器１２より射出される第２のレーザビームは波長λ１より長波長である波長λ２を有する。第１のレーザビーム、第２のレーザビーム、及び後述する結合レーザビームを一点鎖線で示す。波長λ１と波長λ２との差は５０ｎｍ未満とするのがよい。その理由については後述する。なお、波長が異なる２つのレーザビームを互いに重畳させるためには、２つのレーザビームの波長の差は少なくとも５ｎｍ必要である。よって、波長λ１と波長λ２との差は少なくとも５ｎｍである。 The first laser beam emitted from the first laser oscillator 11 has a wavelength λ1, and the second laser beam emitted from the second laser oscillator 12 has a wavelength λ2 that is longer than the wavelength λ1. The first laser beam, the second laser beam, and a combined laser beam described below are indicated by dashed dotted lines. It is preferable that the difference between the wavelengths λ1 and λ2 is less than 50 nm. The reason for this will be described later. Note that in order to superimpose two laser beams with different wavelengths on each other, the difference in the wavelengths of the two laser beams must be at least 5 nm. Therefore, the difference between the wavelengths λ1 and λ2 is at least 5 nm.
　第１のレーザ発振器１１より射出された第１のレーザビームは、フィーディングファイバ１３によってビームカプラ２０へと伝送される。第２のレーザ発振器１２より射出された第２のレーザビームは、フィーディングファイバ１４によってビームカプラ２０へと伝送される。 The first laser beam emitted from the first laser oscillator 11 is transmitted to the beam coupler 20 by the feeding fiber 13. The second laser beam emitted from the second laser oscillator 12 is transmitted to the beam coupler 20 by the feeding fiber 14.
　第１のコリメートレンズ２１は、フィーディングファイバ１３の端部より射出される発散光の第１のレーザビームをコリメート光に変換する。コリメート光に変換された第１のレーザビームは、ウェッジプリズム２３の第１の面２３ａに入射する。第２のコリメートレンズ２２は、フィーディングファイバ１４の端部より射出される発散光の第２のレーザビームをコリメート光に変換する。コリメート光に変換された第２のレーザビームは、ウェッジプリズム２３の第２の面２３ｂに入射する。 The first collimating lens 21 converts the first laser beam of diverging light emitted from the end of the feeding fiber 13 into collimated light. The first laser beam converted into collimated light is incident on the first surface 23a of the wedge prism 23. The second collimating lens 22 converts the second laser beam of diverging light emitted from the end of the feeding fiber 14 into collimated light. The second laser beam converted into collimated light is incident on the second surface 23b of the wedge prism 23.
　図１においては、第１のコリメートレンズ２１及び第２のコリメートレンズ２２をレーザビームの入射面及び射出面の双方が凸面である両凸レンズとしているが、入射面が平面で射出面が凸面である平凸レンズであってもよい。第１のコリメートレンズ２１及び第２のコリメートレンズ２２のレンズの形状は限定されない。同様に、集束レンズ２４及び加工ヘッド４０内の後述するコリメートレンズ４１または集束レンズ４３も、両凸レンズであってもよいし、平凸レンズであってもよく、レンズの形状は限定されない。 In FIG. 1, the first collimating lens 21 and the second collimating lens 22 are biconvex lenses in which both the entrance surface and the exit surface of the laser beam are convex, but they may also be plano-convex lenses in which the entrance surface is flat and the exit surface is convex. The lens shapes of the first collimating lens 21 and the second collimating lens 22 are not limited. Similarly, the focusing lens 24 and the collimating lens 41 or focusing lens 43 in the processing head 40, which will be described later, may also be biconvex lenses or plano-convex lenses, and the lens shapes are not limited.
　図２Ａは、ビームカプラ２０が備える第１のコリメートレンズ２１の位置調整機構５０をＺ軸と直交する面で切断した断面図である。図２Ｂは、ビームカプラ２０が備える第１のコリメートレンズ２１の位置調整機構５０をＸ軸と直交する面で切断した断面図である。第１のコリメートレンズ２１は、図２Ａ及び図２Ｂに示すような位置調整機構５０によって位置が調整されている。第２のコリメートレンズ２２も、図２Ａ及び図２Ｂに示す位置調整機構５０と同様の位置調整機構によって位置が調整されている。第１のコリメートレンズ２１より射出される第１のレーザビームの光軸方向をＺ軸、Ｚ軸に直交する２つの直交する方向をＸ軸及びＹ軸とする。図２Ｂに示すように、ここでは第１のコリメートレンズ２１を平凸レンズとしている。 2A is a cross-sectional view of the position adjustment mechanism 50 of the first collimator lens 21 provided in the beam coupler 20, cut along a plane perpendicular to the Z axis. FIG. 2B is a cross-sectional view of the position adjustment mechanism 50 of the first collimator lens 21 provided in the beam coupler 20, cut along a plane perpendicular to the X axis. The position of the first collimator lens 21 is adjusted by the position adjustment mechanism 50 as shown in FIG. 2A and FIG. 2B. The position of the second collimator lens 22 is also adjusted by a position adjustment mechanism similar to the position adjustment mechanism 50 shown in FIG. 2A and FIG. 2B. The optical axis direction of the first laser beam emitted from the first collimator lens 21 is the Z axis, and the two orthogonal directions perpendicular to the Z axis are the X axis and the Y axis. As shown in FIG. 2B, the first collimator lens 21 is a plano-convex lens.
　図２Ａ及び図２Ｂに示すように、第１のコリメートレンズ２１はレンズホルダ５１によって位置調整機構５０に保持されている。図２Ａに示すように、Ｘ軸方向に伸びる２つのコイルスプリング５３ｘはレンズホルダ５１にＸ軸方向の力を与えており、Ｙ軸に伸びる２つのコイルスプリング５３ｙはレンズホルダ５１にＹ軸方向の力を与えている。Ｘ軸調整用ねじ部材５２ｘを回すことによってレンズホルダ５１のＸ軸方向の位置を調整することができ、Ｙ軸調整用ねじ部材５２ｙを回すことによってレンズホルダ５１のＹ軸方向の位置を調整することができる。 As shown in Figures 2A and 2B, the first collimator lens 21 is held in the position adjustment mechanism 50 by the lens holder 51. As shown in Figure 2A, two coil springs 53x extending in the X-axis direction apply a force in the X-axis direction to the lens holder 51, and two coil springs 53y extending in the Y-axis direction apply a force in the Y-axis direction to the lens holder 51. The position of the lens holder 51 in the X-axis direction can be adjusted by turning the X-axis adjustment screw member 52x, and the position of the lens holder 51 in the Y-axis direction can be adjusted by turning the Y-axis adjustment screw member 52y.
　図２Ｂに示すように、コネクタ１３ｃは、突出部２０１ｐの端部に設けられている図１では図示が省略されているレシーバ２０Ｒに装着されている。Ｚ軸方向に伸びる２つのコイルスプリング５３ｚはレンズホルダ５１にＺ軸方向の力を与えている。突出部２０１ｐ内には、レンズホルダ５１に隣接して可動内筒５４が設けられている。可動内筒５４の端部の外周面には雄ねじ５４ｓｗが形成されており、突出部２０１ｐの対向する内周面には雄ねじ５４ｓｗと噛み合う螺合雌ねじ２０ｓｗが形成されている。可動内筒５４の位置をＺ軸方向に調整することにより、レンズホルダ５１のＺ軸方向の位置を調整することができる。 As shown in FIG. 2B, the connector 13c is attached to a receiver 20R (not shown in FIG. 1) provided at the end of the protrusion 201p. Two coil springs 53z extending in the Z-axis direction apply a force in the Z-axis direction to the lens holder 51. A movable inner cylinder 54 is provided adjacent to the lens holder 51 inside the protrusion 201p. A male thread 54sw is formed on the outer peripheral surface of the end of the movable inner cylinder 54, and a female thread 20sw that meshes with the male thread 54sw is formed on the opposing inner peripheral surface of the protrusion 201p. By adjusting the position of the movable inner cylinder 54 in the Z-axis direction, the position of the lens holder 51 in the Z-axis direction can be adjusted.
　図１に戻り、ウェッジプリズム２３の第１の面２３ａに施されている第１のコーティングは、コリメート光に変換された第１のレーザビームを反射する特性を有する。従って、第１のレーザビームは、第１の面２３ａで反射して集束レンズ２４へと向かう。ウェッジプリズム２３の第２の面２３ｂに施されている第２のコーティングは、コリメート光に変換された第２のレーザビームを透過させる特性を有する。第１のコーティングは、第２の面２３ｂを透過した第２のレーザビームを透過させる特性を有する。従って、第２のレーザビームは、第２の面２３ｂ及び第１の面２３ａをこの順で透過して集束レンズ２４へと向かう。 Returning to FIG. 1, the first coating applied to the first surface 23a of the wedge prism 23 has the property of reflecting the first laser beam converted into collimated light. Therefore, the first laser beam is reflected by the first surface 23a and heads toward the focusing lens 24. The second coating applied to the second surface 23b of the wedge prism 23 has the property of transmitting the second laser beam converted into collimated light. The first coating has the property of transmitting the second laser beam that has passed through the second surface 23b. Therefore, the second laser beam passes through the second surface 23b and the first surface 23a in this order and heads toward the focusing lens 24.
　第１のコリメートレンズ２１及び第２のコリメートレンズ２２は、第１の面２３ａで反射した第１のレーザビームと、第２の面２３ｂ及び第１の面２３ａを透過した第２のレーザビームとが互いに重畳するように位置が調整されている。上記のように、第１のコリメートレンズ２１は位置調整機構５０によって第１のコリメートレンズ２１におけるＸ軸、Ｙ軸、Ｚ軸の各方向の位置が調整されている。第２のコリメートレンズ２２は、位置調整機構５０と同様の位置調整機構によって第２のコリメートレンズ２２におけるＸ軸、Ｙ軸、Ｚ軸の各方向の位置が調整されている。 The positions of the first collimating lens 21 and the second collimating lens 22 are adjusted so that the first laser beam reflected by the first surface 23a and the second laser beam transmitted through the second surface 23b and the first surface 23a are superimposed on each other. As described above, the position of the first collimating lens 21 is adjusted in the X-axis, Y-axis, and Z-axis directions of the first collimating lens 21 by the position adjustment mechanism 50. The position of the second collimating lens 22 is adjusted in the X-axis, Y-axis, and Z-axis directions of the second collimating lens 22 by a position adjustment mechanism similar to the position adjustment mechanism 50.
　従って、ウェッジプリズム２３は、第１のレーザビームと第２のレーザビームとを互いに重畳させることにより結合させた結合レーザビームを生成して射出する。集束レンズ２４は、結合レーザビームを集束させてプロセスファイバ３０のコアに入射させる。プロセスファイバ３０は、結合レーザビームを加工ヘッド４０へと伝送する光ファイバである。 Therefore, the wedge prism 23 generates and emits a combined laser beam by superimposing the first laser beam and the second laser beam on each other. The focusing lens 24 focuses the combined laser beam and makes it incident on the core of the process fiber 30. The process fiber 30 is an optical fiber that transmits the combined laser beam to the processing head 40.
　加工ヘッド４０は、筐体４０１内に、コリメートレンズ４１、ベンドミラー４２、集束レンズ４３を備える。コリメートレンズ４１は、プロセスファイバ３０の端部より射出される発散光の結合レーザビームをコリメート光に変換する。コリメートレンズ４１は、コリメート光に変換された結合レーザビームの進行方向を９０度曲げる。集束レンズ４３は、入射された結合レーザビームを集束させて、加工対象の板金Ｗに照射する。レーザ加工機１００は、板金Ｗを切断する加工機であってもよいし、板金Ｗを溶接する加工機であってもよい。板金Ｗは被加工材の一例であり、被加工材は板金に限定されない。 The processing head 40 includes a collimating lens 41, a bend mirror 42, and a focusing lens 43 in a housing 401. The collimating lens 41 converts the divergent combined laser beam emitted from the end of the process fiber 30 into collimated light. The collimating lens 41 bends the traveling direction of the combined laser beam converted into collimated light by 90 degrees. The focusing lens 43 focuses the incident combined laser beam and irradiates it onto the sheet metal W to be processed. The laser processing machine 100 may be a processing machine that cuts the sheet metal W, or may be a processing machine that welds the sheet metal W. The sheet metal W is an example of a workpiece, and the workpiece is not limited to sheet metal.
　以上のように構成されるレーザ加工機１００において、プロセスファイバ３０は１０ｍ～２０ｍの長さを有する。結合レーザビームをプロセスファイバ３０によって伝送するとき、光ファイバの非線形現象の１つである誘導ラマン散乱による不要光が発生しやすい。以下、誘導ラマン散乱による不要光をＳＲＳ光と称することとする。ＳＲＳ光が発生する発生閾値Ｐｔｈは、プロセスファイバ３０の有効コア断面積Ａｅｆｆ、偏光因子ｆｐ、ラマン利得ｇＲ、有効ファイバ長Ｌｅｆｆを用いて、次の式（１）で与えられる。
　Ｐｔｈ＝１６×｛Ａｅｆｆ／（ｆｐ・ｇＲ・Ｌｅｆｆ）｝　　…（１） In the laser processing machine 100 configured as above, the process fiber 30 has a length of 10 m to 20 m. When the combined laser beam is transmitted through the process fiber 30, unwanted light is likely to be generated due to stimulated Raman scattering, which is one of the nonlinear phenomena of optical fibers. Hereinafter, the unwanted light due to stimulated Raman scattering will be referred to as SRS light. The generation threshold Pth at which SRS light is generated is given by the following formula (1) using the effective core area Aeff, polarization factor fp, Raman gain gR, and effective fiber length Leff of the process fiber 30.
Pth = 16 × {Aeff / (fp gR Leff)} ... (1)
　式（１）より、プロセスファイバ３０のコアを大口径化すれば、発生閾値Ｐｔｈが大きくなってＳＲＳ光が発生しにくくなる。しかしながら、プロセスファイバ３０のコアを大口径化するとビーム品質が悪化し、特に板金Ｗが薄板である場合の加工品質が低下する。従って、プロセスファイバ３０のコアを大口径化することによってＳＲＳ光の発生を抑えるという対策を採用することは困難である。また、式（１）より、プロセスファイバ３０を短くすれば、発生閾値Ｐｔｈが大きくなってＳＲＳ光が発生しにくくなる。しかしながら、上記のようにプロセスファイバ３０は１０ｍ～２０ｍと長く、プロセスファイバ３０を短くすることによってＳＲＳ光の発生を抑えるという対策を採用することも困難である。 According to formula (1), if the core of the process fiber 30 is made larger, the generation threshold Pth becomes larger and SRS light becomes less likely to be generated. However, if the core of the process fiber 30 is made larger, the beam quality deteriorates, and the processing quality decreases, especially when the metal plate W is a thin plate. Therefore, it is difficult to adopt a measure to suppress the generation of SRS light by increasing the core diameter of the process fiber 30. Furthermore, according to formula (1), if the process fiber 30 is shortened, the generation threshold Pth becomes larger and SRS light becomes less likely to be generated. However, as described above, the process fiber 30 is long, at 10 m to 20 m, and it is also difficult to adopt a measure to suppress the generation of SRS light by shortening the process fiber 30.
　従って、結合レーザビームをプロセスファイバ３０によって伝送するときにＳＲＳ光が発生することを回避することは実質的に困難である。プロセスファイバ３０で発生するＳＲＳ光は、ビームカプラ２０へと向かうことがある。仮に、ビームカプラ２０内に侵入したＳＲＳ光が第１のレーザ発振器１１または第２のレーザ発振器１２に入射すると第１のレーザ発振器１１または第２のレーザ発振器１２が破損するおそれがあるため、ビームカプラ２０を次のように構成している。 Therefore, it is practically difficult to avoid the generation of SRS light when the combined laser beam is transmitted through the process fiber 30. The SRS light generated in the process fiber 30 may travel toward the beam coupler 20. If the SRS light that has entered the beam coupler 20 is incident on the first laser oscillator 11 or the second laser oscillator 12, there is a risk of damaging the first laser oscillator 11 or the second laser oscillator 12, so the beam coupler 20 is configured as follows.
　図３は、ビームカプラ２０が備えるウェッジプリズム２３の動作を説明するための第１の例を示す特性図である。図３には、第１のレーザビームの波長λ１と第２のレーザビームの波長λ２との差が５０ｎｍを大きく超える場合における、第１のコーティングの反射・透過特性Ｃ１１と第２のコーティングの反射・透過特性Ｃ２１を示している。例えば、第１のレーザビームに基づいて発生する第１のＳＲＳ光（第１の不要光）は波長λ１より５０ｎｍ程度、長波長側の波長λｓ１に発生し、第２のレーザビームに基づいて発生する第２のＳＲＳ光（第２の不要光）は波長λ２より５０ｎｍ程度、長波長側の波長λｓ２に発生する。 FIG. 3 is a characteristic diagram showing a first example for explaining the operation of the wedge prism 23 provided in the beam coupler 20. FIG. 3 shows the reflection/transmission characteristic C11 of the first coating and the reflection/transmission characteristic C21 of the second coating when the difference between the wavelength λ1 of the first laser beam and the wavelength λ2 of the second laser beam greatly exceeds 50 nm. For example, the first SRS light (first unwanted light) generated based on the first laser beam is generated at a wavelength λs1 that is about 50 nm longer than the wavelength λ1, and the second SRS light (second unwanted light) generated based on the second laser beam is generated at a wavelength λs2 that is about 50 nm longer than the wavelength λ2.
　また、図３には、第１のレーザビームの光強度特性ＬＢ１、第２のレーザビームの光強度特性ＬＢ２、第１のＳＲＳ光の光強度特性ＳＲＳ１、第２のＳＲＳ光の光強度特性ＳＲＳ２を併せて示している。 FIG. 3 also shows the light intensity characteristic LB1 of the first laser beam, the light intensity characteristic LB2 of the second laser beam, the light intensity characteristic SRS1 of the first SRS light, and the light intensity characteristic SRS2 of the second SRS light.
　図３に示すように、第２のコーティングの反射・透過特性Ｃ２１は、第２のレーザビームを透過させ、第２のＳＲＳ光を反射する特性である。第１のコーティングの反射・透過特性Ｃ１１は、第１のレーザビーム及び第１のＳＲＳ光を反射する特性である。従って、波長λ１、λ２、λｓ１、λｓ２が図３に示す波長上の位置関係にあり、第１及び第２のコーティングがそれぞれ図３に示す反射・透過特性Ｃ１１及びＣ２１を有するとき、ウェッジプリズム２３は、第２のＳＲＳ光を図１に示す方向に反射させる。 As shown in FIG. 3, the reflection/transmission characteristic C21 of the second coating is a characteristic that transmits the second laser beam and reflects the second SRS light. The reflection/transmission characteristic C11 of the first coating is a characteristic that reflects the first laser beam and the first SRS light. Therefore, when the wavelengths λ1, λ2, λs1, and λs2 are in the wavelength positional relationship shown in FIG. 3 and the first and second coatings have the reflection/transmission characteristics C11 and C21 shown in FIG. 3, respectively, the wedge prism 23 reflects the second SRS light in the direction shown in FIG. 1.
　ウェッジプリズム２３から集束レンズ２４へと向かう結合レーザビームの光軸の方向を第１の方向とする。第１のコリメートレンズ２１からウェッジプリズム２３へと向かう第１のレーザビームの光軸の方向を第２の方向とする。ウェッジプリズム２３は、第２のＳＲＳ光を第１及び第２の方向とは異なる第３の方向に反射させる。 The direction of the optical axis of the combined laser beam traveling from the wedge prism 23 to the focusing lens 24 is defined as a first direction. The direction of the optical axis of the first laser beam traveling from the first collimating lens 21 to the wedge prism 23 is defined as a second direction. The wedge prism 23 reflects the second SRS light in a third direction different from the first and second directions.
　例えば、ビームダンパ２５は、黒アルマイト処理を施したアルミニウム素材で形成されている。ビームダンパ２５は、入射する第２のＳＲＳ光を吸収して、第１のコリメートレンズ２１または第２のコリメートレンズ２２へと向かうことを防止する。 For example, the beam damper 25 is made of an aluminum material that has been black anodized. The beam damper 25 absorbs the incident second SRS light and prevents it from traveling toward the first collimator lens 21 or the second collimator lens 22.
　図４は、ビームカプラ２０が備えるウェッジプリズム２３の動作を説明するための、第１の例より好ましい第２の例を示す特性図である。図４は、第１のレーザビームの波長λ１と第２のレーザビームの波長λ２との差を５０ｎｍ未満として、第１のコーティングの反射率の好ましい反射・透過特性Ｃ１２と第２のコーティングの反射率の好ましい反射・透過特性Ｃ２２を示している。波長λ１と波長λ２との差が５０ｎｍ未満であるから、波長λ１、λ２、λｓ１、λｓ２は図４に示す波長上の位置関係にある。 FIG. 4 is a characteristic diagram showing a second example, which is more preferable than the first example, for explaining the operation of the wedge prism 23 provided in the beam coupler 20. FIG. 4 shows the preferred reflection/transmission characteristics C12 of the reflectance of the first coating and the preferred reflection/transmission characteristics C22 of the reflectance of the second coating, with the difference between the wavelength λ1 of the first laser beam and the wavelength λ2 of the second laser beam being less than 50 nm. Since the difference between the wavelength λ1 and the wavelength λ2 is less than 50 nm, the wavelengths λ1, λ2, λs1, and λs2 are in the wavelength positional relationship shown in FIG. 4.
　図４に示すように、第２のコーティングの反射・透過特性Ｃ２２は、第２のレーザビームを透過させ、第１及び第２のＳＲＳ光を反射する特性である。第１のコーティングの反射・透過特性Ｃ１２は、第１のレーザビームを反射する特性である。従って、波長λ１、λ２、λｓ１、λｓ２が図４に示す波長上の位置関係にあり、第１及び第２のコーティングがそれぞれ図４に示す反射・透過特性Ｃ１２及びＣ２２を有するとき、ウェッジプリズム２３は、第１及び第２のＳＲＳ光を第３の方向に反射させる。 As shown in FIG. 4, the reflection/transmission characteristic C22 of the second coating is a characteristic that transmits the second laser beam and reflects the first and second SRS lights. The reflection/transmission characteristic C12 of the first coating is a characteristic that reflects the first laser beam. Therefore, when the wavelengths λ1, λ2, λs1, and λs2 are in the wavelength positional relationship shown in FIG. 4 and the first and second coatings have the reflection/transmission characteristics C12 and C22 shown in FIG. 4, respectively, the wedge prism 23 reflects the first and second SRS lights in the third direction.
　ビームダンパ２５は、入射する第１及び第２のＳＲＳ光を吸収して、第１のコリメートレンズ２１または第２のコリメートレンズ２２へと向かうことを防止する。 The beam damper 25 absorbs the incident first and second SRS lights and prevents them from traveling toward the first collimating lens 21 or the second collimating lens 22.
　このように、ウェッジプリズム２３の第２の面２３ｂに施されている第２のコーティングは、第１のＳＲＳ光と第２のＳＲＳ光とのうち、少なくとも第２のＳＲＳ光を反射する特性を有し、好ましくは、第１及び第２のＳＲＳ光を反射する特性を有する。ウェッジプリズム２３の第２の面２３ｂで第１及び第２のＳＲＳ光を反射させるために、波長λ１と波長λ２との差を５０ｎｍ未満とするのがよい。 In this way, the second coating applied to the second surface 23b of the wedge prism 23 has the property of reflecting at least the second SRS light of the first SRS light and the second SRS light, and preferably has the property of reflecting both the first and second SRS lights. In order to reflect the first and second SRS lights on the second surface 23b of the wedge prism 23, it is preferable that the difference between the wavelength λ1 and the wavelength λ2 is less than 50 nm.
　以上のように、ビームカプラ２０は、ウェッジプリズム２３が第１のレーザビームと第２のレーザビームとを互いに重畳させることにより結合させた結合レーザビームを射出するように構成されているので、レーザビームを高出力化することができる。ビームカプラ２０は、ウェッジプリズム２３が少なくとも第２のＳＲＳ光を第３の方向に反射させるように構成されているので、少なくとも第２のＳＲＳ光が第１のコリメートレンズ２１及び第２のコリメートレンズ２２に向かうことがない。よって、ビームカプラ２０によれば、ＳＲＳ光に起因する不具合を軽減させることができる。 As described above, the beam coupler 20 is configured so that the wedge prism 23 superimposes the first laser beam and the second laser beam on each other to emit a combined laser beam, thereby enabling the laser beam to have a high output. The beam coupler 20 is configured so that the wedge prism 23 reflects at least the second SRS light in the third direction, so that at least the second SRS light does not travel toward the first collimator lens 21 and the second collimator lens 22. Therefore, the beam coupler 20 can reduce problems caused by the SRS light.
　ビームカプラ２０は、ウェッジプリズム２３が第１及び第２のＳＲＳ光を第３の方向に反射させるように構成されていることが好ましい。このように構成されていれば、第１及び第２のＳＲＳ光が第１のコリメートレンズ２１及び第２のコリメートレンズ２２に向かうことがない。よって、第１及び第２のＳＲＳ光を第３の方向に反射させるように構成されているビームカプラ２０によれば、ＳＲＳ光に起因する不具合をさらに軽減させることができる。 The beam coupler 20 is preferably configured so that the wedge prism 23 reflects the first and second SRS lights in a third direction. With this configuration, the first and second SRS lights do not travel toward the first collimator lens 21 and the second collimator lens 22. Therefore, with the beam coupler 20 configured to reflect the first and second SRS lights in the third direction, problems caused by the SRS lights can be further reduced.
　ところで、ビームカプラを構成する光学部品が増えると各光学部品の位置調整機構が必要となり、調整作業の煩雑さを招き、ビームカプラが大型化してしまう。レーザビームが高出力になればなるほど熱レンズの影響を受けやすくなるため、レンズまたはミラー等の光学部品をできるだけ少なくすることが望まれる。以上説明したビームカプラ２０によれば、少ない光学部品で第１のレーザビームと第２のレーザビームと結合させることができるという特長を有しつつ、ＳＲＳ光に起因する不具合を軽減させることができる。 However, increasing the number of optical components constituting a beam coupler requires a mechanism for adjusting the position of each optical component, which complicates the adjustment work and increases the size of the beam coupler. The higher the power of the laser beam, the more susceptible it is to the effects of thermal lenses, so it is desirable to reduce the number of optical components such as lenses and mirrors as much as possible. The beam coupler 20 described above has the advantage of being able to combine the first and second laser beams with a small number of optical components, while also reducing problems caused by SRS light.
　レーザ加工機１００は、第１のレーザ発振器１１、第２のレーザ発振器１２、ビームカプラ２０、プロセスファイバ３０によって伝送される結合レーザビームを加工対象の板金Ｗに照射する加工ヘッド４０を備える。レーザ加工機１００によれば、ＳＲＳ光に起因する不具合を軽減させ、高出力のレーザビームで板金Ｗを加工することができる。 The laser processing machine 100 includes a processing head 40 that irradiates the combined laser beam transmitted by the first laser oscillator 11, the second laser oscillator 12, the beam coupler 20, and the process fiber 30 onto the metal sheet W to be processed. The laser processing machine 100 reduces defects caused by SRS light and can process the metal sheet W with a high-output laser beam.
　本発明は以上説明した１またはそれ以上の実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲において種々変更可能である。 The present invention is not limited to one or more of the embodiments described above, and various modifications are possible without departing from the spirit of the present invention.
　本願は、２０２２年１０月１２日に日本国特許庁に出願された特願２０２２－１６４３０３号に基づく優先権を主張するものであり、その全ての開示内容は引用によりここに援用される。 This application claims priority to Patent Application No. 2022-164303, filed with the Japan Patent Office on October 12, 2022, the entire disclosure of which is incorporated herein by reference.

Claims (4)

  1. 　第１のレーザ発振器より射出される第１の波長を有する発散光の第１のレーザビームをコリメート光に変換する第１のコリメートレンズと、
    　第２のレーザ発振器より射出される第２の波長を有する発散光の第２のレーザビームをコリメート光に変換する第２のコリメートレンズと、
    　前記第１のコリメートレンズによってコリメート光に変換された前記第１のレーザビームを反射する特性を有する第１のコーティングが施された第１の面と、前記第２のコリメートレンズによってコリメート光に変換された前記第２のレーザビームを透過させる特性を有する第２のコーティングが施された第２の面とを含み、前記第１のコーティングは、前記第２の面を透過した前記第２のレーザビームを透過させる特性を有し、前記第１の面で反射した前記第１のレーザビームと、前記第２の面及び前記第１の面をこの順で透過した前記第２のレーザビームとを互いに重畳させることにより結合させた結合レーザビームを射出するウェッジプリズムと、
    　前記ウェッジプリズムより射出された前記結合レーザビームを集束させて、前記結合レーザビームを伝送する光ファイバに入射させる集束レンズと、
    　を備え、
    　前記第２のコーティングは、誘導ラマン散乱によって前記第１のレーザビームに基づいて発生する、前記光ファイバから前記ウェッジプリズムへと向かう第１の不要光と、誘導ラマン散乱によって前記第２のレーザビームに基づいて発生する、前記光ファイバから前記ウェッジプリズムへと向かう第２の不要光とのうち、少なくとも前記第２の不要光を反射する特性を有し、
    　前記ウェッジプリズムは、少なくとも前記第２の不要光を、前記ウェッジプリズムから前記集束レンズへと向かう前記結合レーザビームの光軸の方向である第１の方向と、前記第１のコリメートレンズから前記ウェッジプリズムへと向かう前記第１のレーザビームの光軸の方向である第２の方向とは異なる第３の方向に反射させる
    　ビーム結合装置。     a first collimating lens for converting a first laser beam of divergent light having a first wavelength emitted from a first laser oscillator into a collimated light;
    a second collimating lens for converting a second laser beam of divergent light having a second wavelength emitted from a second laser oscillator into a collimated light;
    a wedge prism including a first surface on which a first coating having a property of reflecting the first laser beam converted into collimated light by the first collimating lens and a second surface on which a second coating having a property of transmitting the second laser beam converted into collimated light by the second collimating lens, the first coating having a property of transmitting the second laser beam transmitted through the second surface, the wedge prism emitting a combined laser beam obtained by combining the first laser beam reflected at the first surface and the second laser beam transmitted through the second surface and the first surface in this order by superimposing them on each other;
    a focusing lens for focusing the combined laser beam emitted from the wedge prism and inputting the combined laser beam into an optical fiber that transmits the combined laser beam;
    Equipped with
    the second coating has a characteristic of reflecting at least the second unwanted light of a first unwanted light generated based on the first laser beam by stimulated Raman scattering and traveling from the optical fiber to the wedge prism, and a second unwanted light generated based on the second laser beam by stimulated Raman scattering and traveling from the optical fiber to the wedge prism;
    A beam combining device, wherein the wedge prism reflects at least the second unwanted light in a third direction different from a first direction which is the direction of the optical axis of the combined laser beam traveling from the wedge prism to the focusing lens and a second direction which is the direction of the optical axis of the first laser beam traveling from the first collimating lens to the wedge prism.
  2. 　前記第２のコーティングは、前記第１及び第２の不要光を反射する特性を有し、
    　前記ウェッジプリズムは、前記第１及び第２の不要光を、前記第３の方向に反射させる
    　請求項１に記載のビーム結合装置。     the second coating has a characteristic of reflecting the first and second unwanted lights;
    The beam combining device according to claim 1 , wherein the wedge prism reflects the first and second unwanted light beams in the third direction.
  3. 　前記第２のコーティングで反射した前記第１の不要光または前記第１及び第２の不要光を吸収するビームダンパをさらに備える請求項１または２に記載のビーム結合装置。 The beam combining device according to claim 1 or 2, further comprising a beam damper that absorbs the first unwanted light or the first and second unwanted light reflected by the second coating.
  4. 　前記第１のレーザ発振器と、
    　前記第２のレーザ発振器と、
    　請求項１～３のいずれか１項に記載のビーム結合装置と、
    　前記光ファイバによって伝送される前記結合レーザビームを被加工材に照射する加工ヘッドと、
    　を備えるレーザ加工機。     the first laser oscillator;
    the second laser oscillator;
    A beam combining device according to any one of claims 1 to 3;
    a processing head that irradiates a workpiece with the combined laser beam transmitted by the optical fiber;
    A laser processing machine comprising:
PCT/JP2023/031951 2022-10-12 2023-08-31 Beam combining device and laser processing machine WO2024080032A1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014014068A1 (en) * 2012-07-18 2014-01-23 古河電気工業株式会社 Optical fiber laser device
JP2016201558A (en) * 2011-05-31 2016-12-01 古河電気工業株式会社 Processing device
JP2019197081A (en) * 2018-05-07 2019-11-14 ファナック株式会社 Laser oscillator
JP2019202342A (en) * 2018-05-25 2019-11-28 株式会社アマダホールディングス Processing head
JP2020151758A (en) * 2019-03-20 2020-09-24 株式会社フジクラ Laser processing device, laser processing method and method for manufacturing secondary battery

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016201558A (en) * 2011-05-31 2016-12-01 古河電気工業株式会社 Processing device
WO2014014068A1 (en) * 2012-07-18 2014-01-23 古河電気工業株式会社 Optical fiber laser device
JP2019197081A (en) * 2018-05-07 2019-11-14 ファナック株式会社 Laser oscillator
JP2019202342A (en) * 2018-05-25 2019-11-28 株式会社アマダホールディングス Processing head
JP2020151758A (en) * 2019-03-20 2020-09-24 株式会社フジクラ Laser processing device, laser processing method and method for manufacturing secondary battery

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