WO2024011701A1 - 一种光纤盘线装置 - Google Patents

一种光纤盘线装置 Download PDF

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Publication number
WO2024011701A1
WO2024011701A1 PCT/CN2022/112048 CN2022112048W WO2024011701A1 WO 2024011701 A1 WO2024011701 A1 WO 2024011701A1 CN 2022112048 W CN2022112048 W CN 2022112048W WO 2024011701 A1 WO2024011701 A1 WO 2024011701A1
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WIPO (PCT)
Prior art keywords
optical fiber
outlet
wire trough
section
inlet
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PCT/CN2022/112048
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English (en)
French (fr)
Inventor
孙展
高立冬
常密生
Original Assignee
北京华卓精科科技股份有限公司
北京优微精密测控技术研究有限公司
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Publication of WO2024011701A1 publication Critical patent/WO2024011701A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/44—Mechanical structures for providing tensile strength and external protection for fibres, e.g. optical transmission cables
    • G02B6/4439—Auxiliary devices
    • G02B6/444—Systems or boxes with surplus lengths
    • G02B6/4452—Distribution frames

Definitions

  • the present application relates to the technical field of optical fiber storage and routing, and specifically, to an optical fiber reeling device.
  • the fiber optic components run through the coarse motion frame and fine motion frame of the entire workbench.
  • the types, functions, and lengths of optical fibers involved in the coarse motion framework vary, and when the workpiece stage of the photolithography machine is working, the disturbance caused by the movement has a great impact on the optical fiber transmission.
  • the length of the pigtail entering the coarse motion frame is also different. If optical fibers of different lengths enter the coarse motion frame, it will not only be detrimental to the layout of optical fiber cables, but will also cause different forms of irregular disturbances, all of which will have a great impact on measurement accuracy. Therefore, effective management of optical fiber is required.
  • optical fiber management solutions on the market usually include two circular cable troughs, and the purpose of optical fiber management is achieved by winding optical fibers into the cable troughs in sequence.
  • this optical fiber management solution is generally suitable for optical fibers that are short in length, have no special requirements for the management disk space, and are used in a relatively static state.
  • the length of the optical fiber involved will generally It is larger than the length of the inner cavity of the optical fiber management device, and all of it is integrated into the circular cable trough.
  • the internal wiring must be messy, and there are no clear optical fiber entrances and exits, which is not conducive to later maintenance by staff.
  • optical fiber cabling devices with upgraded performance on the market, when these optical fiber management disks are used, it is still impossible to classify and manage the four sets of read head pigtails in a limited space, which is not conducive to subsequent integration. .
  • the purpose of this application is to provide an optical fiber reeling device to solve the technical problem that the existing optical fiber reeling device cannot classify and manage four groups of read head pigtails, which is not conducive to subsequent integration.
  • the optical fiber cabling device provided by the present application includes an optical fiber sorting tray.
  • the optical fiber sorting tray has an entrance area, a wiring area and an exit area arranged sequentially along the wiring direction, wherein the entrance area is provided with multiple entrances, so
  • the cable reeling area is provided with a plurality of cable reeling troughs, and the outlet area is provided with a plurality of outlets.
  • the number of the inlets, the number of the cable reeling troughs, and the number of the outlets are the same.
  • the plurality of cable reeling troughs are The wire incoming ends are connected to a plurality of the inlets in a one-to-one correspondence, the outlet ends of a plurality of the wire ducts are connected to a plurality of the outlets in a one-to-one correspondence, and the multiple wire ducts are not connected to each other. ;
  • a plurality of the inlets are respectively configured to allow multiple groups of optical fibers from the reading heads to enter, and a plurality of the cable troughs are configured to allow multiple groups of the optical fibers to have the same outlet length at the corresponding outlets, and the optical fibers are used for reading The pigtail of the head.
  • the plurality of inlets include a first inlet, a second inlet, a third inlet and a fourth inlet
  • the plurality of wire ducts include a first wire trough, a second wire trough and a third wire trough.
  • the plurality of outlets including a first outlet, a second outlet, a third outlet and a fourth outlet, wherein the first inlet, the first tray wire trough and the first outlet They are connected in sequence along the wiring direction; the second inlet, the second disk wire trough and the second outlet are connected in sequence along the wiring direction; the third inlet, the third disk wire duct and the third The three outlets are connected in sequence along the wiring direction; the fourth inlet, the fourth wire trough and the fourth outlet are connected in sequence along the wiring direction.
  • the wire groove includes at least one or a combination of more of wavy sections, C-shaped sections, O-shaped sections, ⁇ -shaped sections and straight sections.
  • the first plate wire trough includes a first C-shaped wire trough segment and a first O-shaped wire trough segment, the inlet of the first C-shaped wire trough segment is connected with the first inlet, and the first The outlet of the C-shaped wire trough section is connected with the inlet of the first O-shaped wire trough section, and the outlet of the first O-shaped wire trough section is connected with the first outlet; and/or the second coiled wire
  • the trough includes a second O-shaped wire trough section, an inlet of the second O-shaped wire trough section communicates with the second inlet, and an outlet of the second O-shaped wire trough section communicates with the second outlet; and/ Or, the third plate wire trough includes a second C-shaped wire trough section, the inlet of the second C-shaped wire trough section is connected with the third inlet, and the outlet of the second C-shaped wire trough section is connected with the third wire trough section.
  • the third outlet is connected; and/or, the fourth plate wire trough includes a first wavy wire trough section and a first ⁇ -shaped wire trough section, and the inlet of the first wavy wire trough section is connected to the fourth wire trough.
  • the inlet is connected, the outlet of the first wavy wire trough section is connected with the inlet of the first ⁇ -shaped wire trough section, and the outlet of the first ⁇ -shaped wire trough section is connected with the fourth outlet.
  • first C-shaped wire trough section is arranged around the second O-shaped wire trough section, and/or the second C-shaped wire trough section is arranged around the first O-shaped wire trough section, and /Or, both the first wavy wire trough section and the first ⁇ -shaped wire trough section are arranged close to the outline of the optical fiber organizing tray.
  • the wire groove has a wide groove section and a narrow groove section, the groove width of the narrow groove section is not less than the diameter of the optical fiber, and the groove width of the wide groove section is greater than the groove width of the narrow groove section.
  • the height of the optical fiber organizing tray in the inlet area is lower than the height in the outlet area.
  • the optical fiber reel device further includes an optical fiber fixing structure, the optical fiber fixing structure is installed on the optical fiber sorting tray, and the optical fiber fixing structure is configured to limit the optical fiber to the optical fiber sorting tray.
  • the optical fiber fixing structure includes a plurality of optical fiber inlet clamps, a plurality of optical fiber fixing blocks and a plurality of optical fiber outlet clamps, wherein a plurality of the optical fiber inlet clamps are provided in the entrance area, and a plurality of the optical fiber fixing blocks Disposed in the reel area, a plurality of optical fiber outlet clips are disposed in the outlet area.
  • the material of the optical fiber organizing disk is photosensitive resin.
  • the entrance area is provided with multiple entrances
  • the coiling area is provided with multiple coiling troughs that are the same number as the entrances.
  • the exit area is provided with a plurality of outlets equal to the number of wire troughs, so that each entrance corresponds to one wire trough, and each wire trough corresponds to one outlet.
  • the optical fiber cabling device will be described assuming that the number of entrances, the number of cabling troughs, and the number of outlets are four.
  • the four groups of read head pigtails can be entered through four entrances respectively. After that, after the four coiling troughs have been coiled respectively, they can be led out through four exits. , at this time, the pigtails of the four sets of read heads have the same outlet length at the four outlets.
  • the optical fiber coiling device can classify and manage the pigtails of four groups of read heads, so that the pigtails of the four groups of read heads enter through different entrances, and then are led out through different exits after being coiled in different coiling troughs. , provides an effective path for the pigtails of the four groups of read heads to enter the coarse motion frame from the workpiece stage of the photolithography machine, and allows the pigtails of the four groups of read heads to have the same outlet length at their respective exits.
  • the optical fiber coiling device has clear optical fiber entrances and exits, and each group of optical fiber coils is independent of each other, which facilitates subsequent maintenance by staff; the exit has the same outlet length, which facilitates subsequent integration.
  • Figure 1 is a schematic diagram of the installation of the optical fiber reeling device relative to the workpiece table and the coarse motion frame according to Embodiment 1 of the present application;
  • Figure 2 is a schematic diagram of the optical fiber cabling device provided in Embodiment 1 of the present application for cabling the optical fiber of the read head;
  • Figure 3 is a partial structural schematic diagram of the optical fiber cabling device provided in the first embodiment of the present application in the entrance area of the optical fiber sorting tray;
  • Figure 4 is a schematic structural diagram of an optical fiber cabling device provided in Embodiment 1 of the present application.
  • Figure 5 is a schematic structural diagram of the optical fiber outlet clamp of the optical fiber reeling device provided in Embodiment 1 of the present application when fixing the optical fiber;
  • Figure 6 is a schematic structural diagram of an optical fiber cabling device provided in Embodiment 2 of the present application.
  • Figure 1 is a schematic diagram of the installation of the optical fiber reeling device provided in the first embodiment relative to the workpiece table 51 and the coarse motion frame 52. As shown in FIG. 1 , this embodiment provides an optical fiber reeling device configured to classify and manage optical fibers between the workpiece table 51 and the coarse motion frame 52 .
  • Figure 2 is a schematic diagram of the optical fiber cabling device provided in the first embodiment of the present invention for cabling the optical fiber of the read head.
  • Figure 3 is a partial structural schematic view of the optical fiber cabling device provided in the first embodiment in the entrance area of the optical fiber sorting tray 14.
  • Figure 4 This is a schematic structural diagram of the optical fiber cabling device provided in Embodiment 1.
  • the optical fiber cabling device provided by this embodiment includes an optical fiber organizing tray 14.
  • the optical fiber organizing tray 14 has an entrance area, a coiling area, and an exit area that are sequentially arranged along the wiring direction.
  • the entrance area is provided with a first entrance 31, a second entrance 32, a third entrance 33 and a fourth entrance 34
  • the cable tray area is provided with a first tray wire trough, a second tray wire trough, a third tray wire trough and a fourth tray.
  • Wire trough, the exit area is provided with a first outlet 41, a second outlet 42, a third outlet 43 and a fourth outlet 44, wherein the first inlet 31, the first wire trough and the first outlet 41 are sequentially connected along the wiring direction.
  • the second inlet 32, the second wire trough and the second outlet 42 are connected in sequence along the wiring direction
  • the third inlet 33, the third wire trough and the third outlet 43 are connected in sequence along the wiring direction
  • the fourth wire trough and the fourth outlet 44 are connected in sequence along the wiring direction
  • the first wire trough, the second wire trough, the third wire trough and the fourth wire trough are not connected to each other.
  • the first inlet 31 is configured to allow the optical fiber of the first read head 12 to enter
  • the second inlet 32 is configured to allow the optical fiber of the second read head 11 to enter
  • the third inlet 33 is configured to allow the third inlet to enter.
  • the optical fiber of the reading head 16 enters, and the fourth inlet 34 is configured to allow the optical fiber of the fourth reading head 15 to enter; the first disk wire trough, the second disk wire trough, the third disk wire trough and the fourth disk wire trough are configured
  • the optical fiber of the first reading head 12 is at the first outlet 41
  • the optical fiber of the second reading head 11 is at the second outlet 42
  • the optical fiber of the third reading head 16 is at the third outlet 43
  • the optical fiber of the fourth reading head 15 is at the third outlet.
  • the four outlets 44 have the same outlet length, in which the optical fiber refers to the pigtail 13 of each reading head, and there are a total of 20 optical fibers in the four groups of reading heads.
  • the pigtails 13 of the first read head 12 can enter through the first entrance 31, and after the first wire trough has undergone the wire coiling operation, the pigtails 13 can enter through the first outlet 41.
  • the fiber optic cabling device can classify and manage the pigtails 13 of four groups of read heads, so that the pigtails 13 of the four groups of read heads enter through different entrances, and then are coiled in different cabling troughs.
  • the outlet lead provides an effective path for the four groups of read head pigtails 13 to enter the coarse motion frame 52 from the photolithography machine workpiece stage 51, and allows the four groups of read head pigtails 13 to have the same outlet length at their respective exits.
  • the optical fiber coiling device has clear optical fiber entrances and exits, and each group of optical fiber coils is independent of each other, which facilitates subsequent maintenance by staff; the exit has the same outlet length, which facilitates subsequent integration.
  • the lithography machine requires a total of eight reading heads.
  • the eight reading heads are arranged in groups of four and are respectively arranged on two workpiece stages 51.
  • Each workpiece stage 51 is equipped with four reading heads.
  • the pigtails 13 of each four reading heads pass through An above-mentioned optical fiber reeling device is used for classification and management.
  • the number of read heads required by the lithography machine changes, the number of entrances, the number of tray slots and the number of exits provided on the optical fiber sorting tray 14 can be adjusted adaptively. In this embodiment, only four Classification and sorting of the read head pigtails 13, and an exemplary description of the structure of the optical fiber sorting tray 14 are given.
  • the optical fiber reeling device may also include a cable lifting rod and a cable pressing plate.
  • the cable lifting rod is configured to extract the optical fiber and has a structure similar to a hook. , so that the optical fiber can fit to the bottom surface of the coiling trough to ensure the coiling effect.
  • an optical fiber fixing clamp 53 is provided on the side of the workpiece table 51.
  • the optical fiber fixing clamp 53 is configured to clean the pigtail 13 of the reading head before it enters the optical fiber sorting tray 14. Fix and guide the pigtail 13 of the read head to the corresponding inlet.
  • the optical fiber sorting tray 14 is generally rectangular, with the outlet area disposed at a short side of the rectangle, and the inlet area disposed at a long side of the rectangle, and the inlet area is far away from the outlet area.
  • the first reading head 12 and the fourth reading head 15 are close to the coarse motion frame 52, so that the length of the first reading head 12 and the fourth reading head 15 entering the optical fiber sorting tray 14 is longer.
  • the second read head 11 and the third read head 16 are far away from the coarse motion frame 52 , so that the length of the second read head 11 and the third read head 16 entering the optical fiber sorting tray 14 is shorter.
  • the wire groove includes at least one or a combination of more of wavy sections, C-shaped sections, O-shaped sections, ⁇ -shaped sections and straight sections.
  • the staff can adaptively select the shape of the curve segments that make up the coiling trough or even a combination of curve segments of different shapes, so that the optical fiber after coiling has Same outlet length.
  • the first tray wire trough may include a first C-shaped wire trough section 204 and a first O-shaped wire trough section 207, wherein the entrance of the first C-shaped wire trough section 204 is connected to the first C-shaped wire trough section 204.
  • An inlet 31 is connected, the outlet of the first C-shaped wire trough section 204 is connected with the inlet of the first O-shaped wire trough section 207, and the outlet of the first O-shaped wire trough section 207 is connected with the first outlet 41 through the first horizontal wire trough section 203. Connected.
  • This arrangement of the first tray cable trough can greatly increase the coiling path of the pigtail 13 of the first reading head 12 on the optical fiber sorting tray 14, thereby shortening its outlet length at the first outlet 41.
  • the first C-shaped wire trough section 204 is close to the exit area
  • the first O-shaped wire trough section 207 is close to the entrance area
  • the first O-shaped wire trough section 207 and the first C-shaped wire trough section 204 are located along the optical fiber organizing tray 14 Length direction spacing setting.
  • the second plate wire trough may include a second O-shaped wire trough section 205.
  • the inlet of the second O-shaped wire trough section 205 is connected with the second inlet 32.
  • the second O-shaped wire trough The outlet of section 205 is connected to the second outlet 42 .
  • the width of the second O-shaped wire trough section 205 is 2-2.5 times the width of the first O-shaped wire trough section 207 . That is to say, when the pigtail 13 of the second read head 11 enters the second inlet 32, it will enter the second O-shaped wire trough section 205 and coil twice in at least part of the second O-shaped wire trough section 205. Then, take the second exit 42.
  • This arrangement of the second tray cable trough can reduce the wiring path of the pigtail 13 of the second read head 11 on the optical fiber sorting tray 14, so that its outlet length at the second outlet 42 is equal to that of the first read head 12 The length of the pigtail 13 at the first outlet 41.
  • the second O-shaped wire trough section 205 is located between the inlet area and the outlet area. That is to say, the pigtail 13 of the second read head 11 is actually coiled in the second O-shaped wire trough section 205. 1.5 laps.
  • the first C-shaped wire trough section 204 is arranged around the second O-shaped wire trough section 205 .
  • Such an arrangement can realize effective utilization of the cabling area, so that the optical fiber sorting tray 14 can perform the cabling operation for the pigtail 13 of the second read head 11 in a limited space.
  • the third tray wire trough may include a second C-shaped wire trough section 208.
  • the inlet of the second C-shaped wire trough section 208 is connected with the third inlet 33.
  • the second C-shaped wire trough The exit of section 208 is connected with the third exit 43 .
  • the outlet of the second C-shaped wire trough section 208 is connected with the third outlet 43 through the second horizontal wire trough section 212 .
  • This arrangement of the third tray cable trough can reduce the winding path of the pigtail 13 of the third read head 16 on the optical fiber sorting tray 14, so that its outlet length at the third outlet 43 is equal to that of the first read head 12 The length of the pigtail 13 at the first outlet 41.
  • the second C-shaped wire trough section 208 is arranged around the first O-shaped wire trough section 207 .
  • Such an arrangement can achieve further effective utilization of the cabling area, which facilitates the optical fiber sorting tray 14 to carry out the cabling operation of the pigtail 13 of the third read head 16 in a limited space.
  • the fourth wire trough may include a first wavy wire trough section 209 and a first ⁇ -shaped wire trough section 211.
  • the inlet of the first wavy wire trough section 209 and the fourth inlet 34 is connected, the outlet of the first wavy wire trough section 209 is connected with the inlet of the first ⁇ -shaped wire trough section 211, and the outlet of the first ⁇ -shaped wire trough section 211 is connected with the fourth outlet 44.
  • the pigtail 13 of the fourth read head 15 when the pigtail 13 of the fourth read head 15 enters from the fourth inlet 34, it will pass through the wavy wire trough section and the first ⁇ -shaped wire trough section 211, and then be led out from the fourth outlet 44.
  • the first wavy wire trough section 209 and the first ⁇ -shaped wire trough section 211 are both arranged close to the outline of the optical fiber organizing tray 14 .
  • This arrangement of the fourth tray cable trough not only ensures that the length of the cable outlet at the fourth outlet 44 is equal to the length of the cable outlet at the other outlets, but also realizes the arrangement of the fiber optic cable tray by arranging the first wavy cable trough section 209
  • the effective use of the edge area of 14 further reduces the space occupied in the cable tray area, thereby facilitating the compact design of the optical fiber organizing tray 14 .
  • the pigtails 13 of the first read head 12 and the fourth read head 15 close to the coarse motion frame 52 have a longer cable path on the fiber sorting tray 14, so that the first read head 12 and the fourth read head 15 have a longer path.
  • the lengths of the pigtails 13 of the four readheads 15 at their respective exits are shortened, while the pigtails 13 of the second readhead 11 and the third readhead 16 that are far away from the coarse motion frame 52 have shorter lengths at the fiber sorting tray 14 coil path, so that the pigtails 13 of the second read head 11 and the third read head 16 have the same shape as the pigtails 13 of the first read head 12 and the fourth read head 15 at their respective exits.
  • Outlet length Outlet length.
  • first wire trough, the second wire trough, the third wire trough and the fourth wire trough also allows the optical fiber to have a larger bending radius, reducing the damage to the optical fiber after the wire spooling. of damage.
  • the diameter of the optical fiber is 0.9mm, and the depth of each wire trough is 5mm, which can meet the requirement of one reading head to wind five optical fibers 54 in sequence;
  • the first C-shaped wire trough section 204, the first O-shaped wire trough The trough section 207, the first horizontal wire trough section 203, the second C-shaped wire trough section 208, the first wavy wire trough section 209 and the width are all 1mm, the second O-shaped wire trough section 205 and the first ⁇ -shaped wire trough section
  • the width of 211 is 2mm, that is to say, the pigtail 13 of the fourth reading head 15 is also coiled 1.5 times in the first ⁇ -shaped wire trough section 211.
  • the height of the optical fiber organizing tray 14 in the entrance area is lower than its height in the exit area.
  • Such an arrangement creates a height difference between the entrance area and the exit area. Even if the workpiece table 51 performs a corner test or the coarse motion frame 52 collides, the optical fibers located in each cable trough will not be pulled.
  • This arrangement that uses height differences to compensate for optical fiber pulling caused by external collisions plays a role in protecting the pigtail 13 of the read head and reduces disturbance to the optical fiber.
  • the inlet area is 7mm lower than the outlet area.
  • the cable groove has a wide groove section and a narrow groove section.
  • the groove width of the narrow groove section is not less than the diameter of the optical fiber, and the groove width of the wide groove section is greater than the groove width of the narrow groove section.
  • the first O-shaped wire trough section 207 can be regarded as a narrow trough section, and the second O-shaped wire trough section 205 can be regarded as a wide trough section.
  • the role of the wide trough section is It is to increase the number of coils to meet the coiling requirements of longer optical fibers; of course, in this embodiment, the second C-shaped wire trough section 208 and the first wavy wire trough section 209 can also be regarded as wide slot sections. At this time, the function of the wide groove section is to provide precision compensation for the coiling process to reduce the accuracy requirements during coiling.
  • the optical fiber cabling device may also include an optical fiber fixing structure.
  • the optical fiber fixing structure is installed on the optical fiber sorting tray 14 , and the optical fiber fixing structure is configured to limit the optical fiber to the optical fiber sorting tray 14 .
  • the arrangement of the optical fiber fixing structure realizes the fixation of the optical fiber on the optical fiber sorting tray 14 .
  • the vibration of the coarse movement frame 52 caused by the external environment can be prevented from being transmitted to the optical fiber sorting tray 14, causing relative displacement between the optical fiber sorting tray 14 and the optical fibers on it.
  • the resulting fiber pulling problem on the one hand, prevents the fiber from lifting, and on the other hand, increases the damping to block the vibration transmitted from the cable end of the coarse-moving frame, thereby effectively avoiding fiber damage and reduction in transmission efficiency caused by external factors. Improved the working efficiency of each reading head.
  • the optical fiber fixing structure may include multiple optical fiber inlet clamps 35, multiple optical fiber fixing blocks and multiple optical fiber outlet clamps, wherein the multiple optical fiber inlet clamps 35 are disposed in the entrance area. , a plurality of optical fiber fixing blocks are arranged in the coiling area, and a plurality of optical fiber outlet clamps are arranged in the outlet area.
  • the number of optical fiber fixing blocks is six.
  • the optical fiber fixing block can be an L-shaped block, a T-shaped block or an I-shaped block, all of which can achieve the purpose of fixing the optical fiber.
  • the optical fiber organizing tray 14 is provided with a fixing hole 210 , and the optical fiber fixing block is fixedly connected to the fixing hole 210 .
  • the optical fiber fixing block can be fixed at the fixing hole 210 in the form of plug-in fixation.
  • Figure 5 is a schematic structural diagram of the optical fiber outlet clamp of the optical fiber reeling device provided in the first embodiment when fixing the optical fiber.
  • the optical fiber outlet clamp includes an upper optical fiber clamp 201 and a lower optical fiber clamp 202.
  • the lower optical fiber clamp 202 is fixed to the optical fiber organizing tray 14, and the upper optical fiber clamp 201 is inverted L-shaped.
  • the upper optical fiber clamp 201 is docked with the lower optical fiber clamp 202 provided on the optical fiber organizing tray 14 so that a limiting space is formed between them for allowing five optical fibers 54 to pass through.
  • the upper optical fiber clamp 201 can be connected to the lower optical fiber clamp 202 through connecting screws.
  • the structure of the optical fiber inlet clamp 35 is the same as the structure of the above-mentioned optical fiber outlet clamp, and will not be described again in this embodiment.
  • the optical fiber organizing tray 14 is made of photosensitive resin. Such an arrangement can increase the friction between the outer wall of the optical fiber and the cable trough, preventing the optical fiber from warping. Moreover, the photosensitive resin material will not be affected by the deep ultraviolet light inside the lithography machine and be deformed. Compared with other materials, it is more durable. Stablize.
  • the optical fiber organizing disk 14 is made of white photosensitive resin material.
  • the optical fiber coiling device may also include an optical fiber winding block 206.
  • the optical fiber winding block 206 is disposed in the entrance area, and the optical fiber winding block 206 is configured to guide the optical fiber from the corresponding Entrance to enter.
  • the number of optical fiber winding blocks 206 is two, and the two optical fiber winding blocks 206 are spaced apart in the left and right direction (from the perspective of FIG. 4 ), wherein the optical fiber winding blocks 206 on the left are configured in a pair of first The pigtail 13 of the read head 12 and the pigtail 13 of the second read head 11 are guided, and the optical fiber winding block 206 on the right side is configured to guide the pigtail 13 of the third read head 16 and the fourth read head 15 .
  • FIG. 6 is a schematic structural diagram of the optical fiber reeling device provided in the second embodiment. As shown in Figure 6, this embodiment provides another optical fiber reeling device.
  • the installation structure of the optical fiber reeling device relative to the workpiece table and the coarse motion frame is different from the installation structure of the optical fiber reeling device relative to the workpiece table in the first embodiment.
  • the installation structure is the same as that of the coarse motion frame, so no details will be given. In the following text, only the differences between this optical fiber reeling device and the optical fiber reeling device in the first embodiment will be described.
  • first wire duct, the second wire duct, the third wire duct, and the fourth wire trough are generally arranged in an up-and-down direction (from the perspective of Figure 6), where , from top to bottom, the first wire trough, the second wire trough, the third wire trough and the fourth wire trough are arranged in sequence.
  • the first disk wire trough includes a third O-shaped wire trough section 213 and a second wavy wire trough section 214.
  • the inlet of the third O-shaped wire trough section 213 is connected with the first inlet 31.
  • the outlet of section 213 is connected with the inlet of the second wavy wire trough section 214, and the outlet of the second wavy wire trough section 214 is connected with the first outlet 41;
  • the second plate wire trough includes a third horizontal wire trough section 215 and a fourth O shape wire trough section 216, the inlet of the third horizontal wire trough section 215 is connected with the second inlet 32, the outlet of the third horizontal wire trough section 215 is connected with the inlet of the fourth O-shaped wire trough section 216, and the fourth O-shaped wire trough section 216
  • the outlet is connected with the second outlet 42;
  • the third plate wire trough includes a fifth O-shaped wire trough section 217 and a fourth horizontal wire trough section 218, and the inlet of the fifth O-shaped wire trough section 217 is connected with the third inlet 33.
  • the outlet of the O-shaped wire trough section 217 is connected with the inlet of the fourth horizontal wire trough section 218, and the outlet of the fourth horizontal wire trough section 218 is connected with the third outlet 43;
  • the fourth disk wire trough includes a second ⁇ -shaped wire trough section 219, The inlet of the second ⁇ -shaped wire trough section 219 is connected with the fourth inlet 34 , and the outlet of the second ⁇ -shaped wire trough section is connected with the fourth outlet 44 .
  • the pigtails 13 of the first read head 12 can enter through the first inlet 31, pass through the third O-shaped trough section 213 for two turns, and then enter the second wave.
  • the shaped wire trough section 214 is led out from the first outlet 41; the pigtail 13 of the second reading head 11 enters from the second inlet 32 and enters the fourth O-shaped wire trough section 216 through the third horizontal wire trough section 215.
  • the O-shaped wire trough section 216 is coiled once, it is led out from the second outlet 42; the pigtail 13 of the third reading head 16 enters from the third entrance 33, and then enters the fifth O-shaped wire duct section 217 after being coiled once.
  • the four horizontal wire trough sections 218 are finally led out from the third outlet 43; the pigtail 13 of the fourth reading head 15 enters through the fourth inlet 34, and after one and a half turns through the second ⁇ -shaped wire trough section 219, it exits from the fourth Take exit 44.
  • the first wire trough close to the upper edge of the optical fiber organizing tray 14 and the second wire trough close to the lower edge of the optical fiber organizing tray 14 have a longer wire path, so that the first reading head 12 and the second wire trough are
  • the lengths of the pigtails 13 of the four reading heads 15 at their respective outlets are shortened, while the second and third wire troughs located between the first and fourth wire troughs have shorter lengths.
  • the winding path is such that the pigtails 13 of the second read head 11 and the third read head 16 have the same outlets as the pigtails 13 of the first read head 12 and the fourth read head 15 at their respective outlets. length.
  • the third O-shaped wire trough section 213, the fourth O-shaped wire trough section 216, the fifth O-shaped wire trough section 217 and the second ⁇ -shaped wire trough section 219 are wide trough sections to accommodate multiple turns ( larger than one circle). At the same time, precision compensation is also performed on the winding process to reduce the accuracy requirements during winding.
  • optical fiber fixing blocks are also provided to fix the pigtails 13 in each cable trough.
  • the number and position of the optical fiber fixing blocks can be determined by the staff according to the usage requirements, as long as the optical fiber fixing blocks can be effectively fixed to the pigtail 13 through the arrangement of the optical fiber fixing blocks.
  • This embodiment does not fix the optical fiber.
  • the number and location of fixed blocks are limited.
  • a guide edge 220 is provided at the entrance of the second ⁇ -shaped wire trough section 219 .
  • the arrangement of the guide edge 220 can guide the pigtail 13 entering from the fourth entrance 34, so that when the pigtail 13 is coiled using the fourth coiling trough, the pigtail 13 entering from the fourth entrance 34 will 13 can enter the second ⁇ -shaped wire trough section 219 along the guide edge 220, and then be led out from the fourth outlet 44, thereby improving the wire coiling efficiency.
  • the optical fiber cabling device provided by this application can classify and manage multiple groups of read head pigtails, so that the pigtails of multiple groups of read heads have the same outlet length at their respective exits.
  • the optical fiber coiling device has clear optical fiber entrances and exits, and each group of optical fiber coils is independent of each other, which facilitates subsequent maintenance by staff; the exit has the same outlet length, which facilitates subsequent integration.

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Abstract

一种光纤盘线装置，包括光纤整理盘（14），光纤整理盘（14）具有沿走线方向依次设置的入口区域、盘线区域和出口区域，入口区域设置有多个入口（31，32，33，34），盘线区域设置有多个盘线槽，出口区域设置有多个出口（41，42，43，44），入口的数量、盘线槽的数量和出口的数量相同，多个盘线槽的进线端分别与多个入口（31，32，33，34）一一对应地连通，多个盘线槽的出线端分别与多个出口（41，42，43，44）一一对应地连通；多个入口（31，32，33，34）分别配置成使多组读数头（12，11，16，15）的光纤进入，多个盘线槽配置成使多组光纤在相应的出口（41，42，43，44）具有相同的出线长度。光纤盘线装置能够对四组读数头尾纤（13）进行分类和管理。

Description

一种光纤盘线装置
相关申请的交叉引用
本申请要求于2022年7月14日提交中国专利局的申请号为202210826706.8、名称为“一种光纤盘线装置”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及光纤收纳走线技术领域，具体而言，涉及一种光纤盘线装置。
背景技术
在光栅测量***中，光纤部件贯穿整个工作台的粗动框架与微动框架。粗动框架内涉及的光纤种类、功能、长度各不相同，并且在光刻机工件台工作时，运动引起的扰动对光纤传输影响极大。再者，根据读数头相对于微动框架的布局，由于光栅测量***中四个读数头的安装位置不同，导致尾纤进入粗动框架的长短也不同。如果长短不一的光纤进入到粗动框架内，不但不利于光纤线缆的布局，也将带来不同形式、无规律可循的扰动，这些均会对测量精度产生极大的影响。因此，需要对光纤进行有效管理。
目前，市场上使用最广泛的光纤管理方案通常包括两个圆形盘线槽，通过将光纤依次缠绕进盘线槽，达到光纤管理的目的。然而，这种光纤管理方案，一般适用于长度较短、对管理盘摆放空间没有特殊要求且在相对静止的状态下使用的光纤，而且，即便如此，由于所涉及光纤的长度一般情况下会大于光纤管理装置内腔的长度，将其全部集成至圆形盘线槽内，且内部走线情况必然杂乱无章，且没有明确的光纤入口与出口，不利于后期工作人员维护。
虽然，目前市面上也有一些性能升级的光纤盘线装置，但是，这些光纤管理盘在使用时，仍然无法做到在有限的空间内对四组读数头尾纤进行分类和管理，不利于后续集成。
申请内容
本申请的目的在于提供一种光纤盘线装置，以解决现有光纤盘线装置无法对四组读数头尾纤进行分类和管理，不利于后续集成的技术问题。
本申请提供的光纤盘线装置，包括光纤整理盘，所述光纤整理盘具有沿走线方向依次设置的入口区域、盘线区域和出口区域，其中，所述入口区域设置有多个入口，所述盘线区域设置有多个盘线槽，所述出口区域设置有多个出口，所述入口的数量、所述盘线槽的数量和所述出口的数量相同，多个所述盘线槽的进线端分别与多个所述入口一一对应地连通，多个所述盘线槽的出线端分别与多个所述出口一一对应地连通，多个所述盘线槽互不连通；多个所述入口分别配置成使多组读数头的光纤进入，多个所述盘线槽配置成使多组所述光纤在相应的所述出口具有相同的出线长度，所述光纤为读数头的尾纤。
进一步地，所述多个入口包括第一入口、第二入口、第三入口和第四入口，所述多个 盘线槽包括第一盘线槽、第二盘线槽、第三盘线槽和第四盘线槽，所述多个出口包括第一出口、第二出口、第三出口和第四出口，其中，所述第一入口、所述第一盘线槽和所述第一出口沿走线方向依次连通；所述第二入口、所述第二盘线槽和所述第二出口沿走线方向依次连通；所述第三入口、所述第三盘线槽和所述第三出口沿走线方向依次连通；所述第四入口、所述第四盘线槽和所述第四出口沿走线方向依次连通。
进一步地，所述盘线槽包括波浪形段、C形段、O形段、∞形段和直线段中的至少一种或多种的组合。
进一步地，所述第一盘线槽包括第一C形线槽段和第一O形线槽段，所述第一C形线槽段的入口与所述第一入口连通，所述第一C形线槽段的出口与所述第一O形线槽段的入口连通，所述第一O形线槽段的出口与所述第一出口连通；和/或，所述第二盘线槽包括第二O形线槽段，所述第二O形线槽段的入口与所述第二入口连通，所述第二O形线槽段的出口与所述第二出口连通；和/或，所述第三盘线槽包括第二C形线槽段，所述第二C形线槽段的入口与所述第三入口连通，所述第二C形线槽段的出口与所述第三出口连通；和/或，所述第四盘线槽包括第一波浪形线槽段和第一∞形线槽段，所述第一波浪形线槽段的入口与所述第四入口连通，所述第一波浪形线槽段的出口与所述第一∞形线槽段的入口连通，所述第一∞形线槽段的出口与所述第四出口连通。
进一步地，所述第一C形线槽段环绕所述第二O形线槽段设置，和/或，所述第二C形线槽段环绕所述第一O形线槽段设置，和/或，所述第一波浪形线槽段和所述第一∞形线槽段均靠近所述光纤整理盘的轮廓设置。
进一步地，所述盘线槽具有宽槽段和窄槽段，所述窄槽段的槽宽不小于光纤的直径，所述宽槽段的槽宽大于所述窄槽段的槽宽。
进一步地，所述光纤整理盘在所述入口区域的高度低于其在所述出口区域的高度。
进一步地，所述光纤盘线装置还包括光纤固定结构，所述光纤固定结构安装于所述光纤整理盘，所述光纤固定结构配置成将所述光纤限位于所述光纤整理盘。
进一步地，所述光纤固定结构包括多个光纤入口夹、多个光纤固定块和多个光纤出口夹，其中，多个所述光纤入口夹设置于所述入口区域，多个所述光纤固定块设置于所述盘线区域，多个所述光纤出口夹设置于所述出口区域。
进一步地，所述光纤整理盘的材质为光敏树脂。
本申请光纤盘线装置带来的有益效果是：
通过在光纤整理盘设置沿走线方向依次排布的入口区域、盘线区域和出口区域，其中，入口区域设置有多个入口，盘线区域设置有与入口数量相同的多个盘线槽，出口区域设置有与盘线槽数量相同的多个出口，使得每个入口对应一个盘线槽，每个盘线槽对应一个出 口。
以入口的数量、盘线槽的数量和出口的数量为四个时，对该光纤盘线装置进行说明。当需要对四组读数头尾纤进行分类和管理时，可以分别使四组读数头尾纤由四个入口进入，之后，在四个盘线槽分别经过盘线操作后，由四个出口引出，此时，四组读数头的尾纤在四个出口处具有相同的出线长度。
该光纤盘线装置能够实现对四组读数头尾纤的分类和管理，使得四组读数头的尾纤分别由不同的入口进入，再经过不同的盘线槽的盘线后由不同的出口引出，为四组读数头尾纤由光刻机工件台进入粗动框架提供了有效的路径，并使得四组读数头的尾纤在各自的出口处具有相同的出线长度。该光纤盘线装置具有明确的光纤入口和出口，同时各组光纤盘线相互独立，利于后期工作人员维护；出口处具有相同的出线长度，利于后续集成。
附图说明
为了更清楚地说明本申请实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本申请的实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据提供的附图获得其他的附图。
图1为本申请实施例一提供的光纤盘线装置相对于工件台和粗动框架的安装示意图；
图2为本申请实施例一提供的光纤盘线装置对读数头光纤进行盘线的示意图；
图3为本申请实施例一提供的光纤盘线装置在光纤整理盘入口区域的局部结构示意图；
图4为本申请实施例一提供的光纤盘线装置的结构示意图；
图5为本申请实施例一提供的光纤盘线装置的光纤出口夹对光纤进行固定时的结构示意图；
图6为本申请实施例二提供的光纤盘线装置的结构示意图。
附图标记说明：
11-第二读数头；12-第一读数头；13-尾纤；14-光纤整理盘；15-第四读数头；16-第三读数头；201-光纤上夹；202-光纤下夹；203-第一水平线槽段；204-第一C形线槽段；205-第二O形线槽段；206-光纤绕线块；207-第一O形线槽段；208-第二C形线槽段；209-第一波浪形线槽段；210-固定孔；211-第一∞形线槽段；212-第二水平线槽段；213-第三O形线槽段；214-第二波浪形线槽段；215-第三水平线槽段；216-第四O形线槽段；217-第五O形线槽段；218-第四水平线槽段；219-第二∞形线槽段；220-引导边；31-第一入口；32-第二入口；33-第三入口；34-第四入口；35-光纤入口夹；41-第一出口；42-第二出口；43-第三出口；44-第四出口；51-工件台；52-粗动框架；53-光纤固定夹；54-五根光纤。
具体实施方式
为使本申请的上述目的、特征和优点能够更为明显易懂，下面结合附图对本申请的具体实施例做详细的说明。应当理解，此处所描述的具体实施例仅仅用以解释本申请，并不用于限定本申请。
实施例一
图1为本实施例一提供的光纤盘线装置相对于工件台51和粗动框架52的安装示意图。如图1所示，本实施例提供了一种光纤盘线装置，配置成对工件台51与粗动框架52之间的光纤进行分类和管理。
图2为本实施例一提供的光纤盘线装置对读数头光纤进行盘线的示意图，图3为本实施例一提供的光纤盘线装置在光纤整理盘14入口区域的局部结构示意图，图4为本实施例一提供的光纤盘线装置的结构示意图。如图2至图4所示，本实施例提供的光纤盘线装置，包括光纤整理盘14，光纤整理盘14具有沿走线方向依次设置的入口区域、盘线区域和出口区域，具体地，入口区域设置有第一入口31、第二入口32、第三入口33和第四入口34，盘线区域设置有第一盘线槽、第二盘线槽、第三盘线槽和第四盘线槽，出口区域设置有第一出口41、第二出口42、第三出口43和第四出口44，其中，第一入口31、第一盘线槽和第一出口41沿走线方向依次连通，第二入口32、第二盘线槽和第二出口42沿走线方向依次连通，第三入口33、第三盘线槽和第三出口43沿走线方向依次连通，第四入口34、第四盘线槽和第四出口44沿走线方向依次连通，且第一盘线槽、第二盘线槽、第三盘线槽和第四盘线槽互不连通。
请继续参照图2和图3，第一入口31配置成使第一读数头12的光纤进入，第二入口32配置成使第二读数头11的光纤进入，第三入口33配置成使第三读数头16的光纤进入，第四入口34配置成使第四读数头15的光纤进入；第一盘线槽、第二盘线槽、第三盘线槽和第四盘线槽四者，配置成使第一读数头12的光纤在第一出口41、第二读数头11的光纤在第二出口42、第三读数头16的光纤在第三出口43和第四读数头15的光纤在第四出口44具有相同的出线长度，其中，光纤指的是各读数头的尾纤13，四组读数头的光纤共20根。
在对四组读数头尾纤13进行分类和管理时，可以使第一读数头12的尾纤13由第一入口31进入，在第一盘线槽经过盘线操作后，由第一出口41引出；使第二读数头11的尾纤13由第二入口32进入，在第二盘线槽经过盘线操作后，由第二出口42引出；使第三读数头16的尾纤13由第三入口33进入，在第三盘线槽经过盘线操作后，由第三出口43引出；使第四读数头15的尾纤13由第四入口34进入，在第四盘线槽经过盘线操作后，由第四出口44引出，此时，四组读数头的尾纤13在四个出口处具有相同的出线长度。
该光纤盘线装置能够实现对四组读数头尾纤13的分类和管理，使得四组读数头的尾纤13分别由不同的入口进入，再经过不同的盘线槽的盘线后由不同的出口引出，为四组读数头尾纤13由光刻机工件台51进入粗动框架52提供了有效的路径，并使得四组读数头的尾纤13在各自的出口处具有相同的出线长度。该光纤盘线装置具有明确的光纤入口和出口，同时各组光纤盘线相互独立，利于后期工作人员维护；出口处具有相同的出线长度，利于后续集成。
光刻机总共需要八个读数头，八个读数头每四个一组，分别布置于两个工件台51，每个工件台51配四个读数头，每四个读数头的尾纤13通过一个上述光纤盘线装置进行分类和管理。
需要说明的是，当光刻机需要的读数头的数量发生变化时，设置于光纤整理盘14的入口数量、盘线槽数量和出口数量可以进行适应性调整，本实施例中，仅仅以四个读数头尾纤13的分类和整理，对光纤整理盘14的结构进行示例性说明。
本实施例中，该光纤盘线装置还可以包括提线棒和压线板，其中，提线棒配置成提取光纤，其结构类似于钩子，压线板配置成在光纤盘入盘线槽时，使光纤能够贴合至盘线槽的底面，以保证盘线效果。
请继续参照图3，本实施例中，工件台51侧边设置有光纤固定夹53，光纤固定夹53配置成在读数头的尾纤13进入光纤整理盘14之前对读数头的尾纤13进行固定，并将该读数头的尾纤13引导至相应的入口处。
本实施例中，光纤整理盘14大致呈矩形，出口区域设置在矩形的一个短边处，入口区域设置在矩形的一个长边处，且入口区域远离出口区域。
请继续参照图2，本实施例中，第一读数头12和第四读数头15靠近粗动框架52，使得第一读数头12和第四读数头15进入光纤整理盘14的长度较长，而第二读数头11和第三读数头16远离粗动框架52，使得第二读数头11和第三读数头16进入光纤整理盘14的长度较短。
本实施例中，盘线槽包括波浪形段、C形段、O形段、∞形段和直线段中的至少一种或多种的组合。
在实际使用中，工作人员可以根据待进行盘线的光纤的长度，适应性地选择组成盘线槽的曲线段的形状甚至是不同形状的曲线段的组合，以使得经过盘线后的光纤具有相同的出线长度。
请继续参照图4，本实施例中，第一盘线槽可以包括第一C形线槽段204和第一O形线槽段207，其中，第一C形线槽段204的入口与第一入口31连通，第一C形线槽段204的出口与第一O形线槽段207的入口连通，第一O形线槽段207的出口通过第一水平线槽 段203与第一出口41连通。也就是说，当第一读数头12的尾纤13自第一入口31进入后，将依次经第一C形线槽段204、第一O形线槽段207和第一水平线槽段203后，由第一出口41引出。
这种第一盘线槽的设置形式，能够大大增加第一读数头12的尾纤13在光纤整理盘14的盘线路径，从而缩短其在第一出口41处的出线长度。
具体地，第一C形线槽段204靠近出口区域，第一O形线槽段207靠近入口区域，第一O形线槽段207和第一C形线槽段204沿光纤整理盘14的长度方向间隔设置。
请继续参照图4，本实施例中，第二盘线槽可以包括第二O形线槽段205，第二O形线槽段205的入口与第二入口32连通，第二O形线槽段205的出口与第二出口42连通。其中，第二O形线槽段205的宽度是第一O形线槽段207的宽度的2-2.5倍。也就是说，当第二读数头11的尾纤13自第二入口32进入后，将进入第二O形线槽段205，并在第二O形线槽段205至少部分槽段盘两圈后，自第二出口42引出。
这种第二盘线槽的设置形式，能够减少第二读数头11的尾纤13在光纤整理盘14的盘线路径，从而使得其在第二出口42处的出线长度等于第一读数头12的尾纤13在第一出口41处的长度。
具体地，本实施例中，第二O形线槽段205位于入口区域与出口区域之间，也就是说，第二读数头11的尾纤13在第二O形线槽段205实际盘线1.5圈。
请继续参照图4，本实施例中，第一C形线槽段204环绕第二O形线槽段205设置。如此设置，能够实现对盘线区域的有效利用，使得光纤整理盘14在有限空间内实现对第二读数头11尾纤13的盘线操作。
请继续参照图4，本实施例中，第三盘线槽可以包括第二C形线槽段208，第二C形线槽段208的入口与第三入口33连通，第二C形线槽段208的出口与第三出口43连通。其中，第二C形线槽段208的出口通过第二水平线槽段212与第三出口43连通。
这种第三盘线槽的设置形式，能够减少第三读数头16的尾纤13在光纤整理盘14的盘线路径，从而使得其在第三出口43处的出线长度等于第一读数头12的尾纤13在第一出口41处的长度。
请继续参照图4，本实施例中，第二C形线槽段208环绕第一O形线槽段207设置。如此设置，能够实现对盘线区域进一步的有效利用，利于光纤整理盘14在有限空间内实现对第三读数头16的尾纤13的盘线操作。
请继续参照图4，本实施例中，第四盘线槽可以包括第一波浪形线槽段209和第一∞形线槽段211，第一波浪形线槽段209的入口与第四入口34连通，第一波浪形线槽段209的出口与第一∞形线槽段211的入口连通，第一∞形线槽段211的出口与第四出口44连通。 也就是说，当第四读数头15的尾纤13自第四入口34进入后，将依次经波浪形形线槽段、第一∞形线槽段211后，由第四出口44引出。其中，第一波浪形线槽段209和第一∞形线槽段211均靠近光纤整理盘14的轮廓设置。
这种第四盘线槽的设置形式，在保证第四出口44处的出线长度与其他各出口处出线长度相等的同时，还通过设置第一波浪形线槽段209，实现了对光纤整理盘14边缘区域的有效利用，进一步减少了盘线区域的空间占用，从而有利于光纤整理盘14的结构紧凑化设计。
通过上述设置，使得靠近粗动框架52的第一读数头12和第四读数头15两者的尾纤13在光纤整理盘14具有较长的盘线路径，从而使得第一读数头12和第四读数头15两者的尾纤13在各自出口处的长度缩短，而远离粗动框架52的第二读数头11和第三读数头16两者的尾纤13在光纤整理盘14具有较短的盘线路径，从而使得第二读数头11和第三读数头16两者的尾纤13在各自出口处，具有与上述第一读数头12和第四读数头15两者尾纤13相同的出线长度。
另外，第一盘线槽、第二盘线槽、第三盘线槽和第四盘线槽的这种结构形式，还使得光纤具有较大的弯折半径，减少了盘线后对光纤造成的损坏。
本实施例中，光纤的直径为0.9mm，各盘线槽的槽深为5mm，可以满足一个读数头五根光纤54依次盘绕的需求；第一C形线槽段204、第一O形线槽段207、第一水平线槽段203、第二C形线槽段208、第一波浪形线槽段209和宽度均为1mm，第二O形线槽段205和第一∞形线槽段211的宽度均为2mm，也就是说，第四读数头15的尾纤13在第一∞形线槽段211中也盘1.5圈。
本实施例中，光纤整理盘14在入口区域的高度低于其在出口区域的高度。如此设置，使得入口区域与出口区域形成高度差，即便是工件台51进行转角的测试或粗动框架52发生碰撞，位于各盘线槽中的光纤也不会发生拉扯。这种利用高度差弥补因外界碰撞导致的光纤拉扯的设置形式，起到了保护读数头的尾纤13的作用，减少了对光纤造成的扰动。
具体地，入口区域低于出口区域7mm。
也就是说，本实施例中，盘线槽具有宽槽段和窄槽段，具体地，窄槽段的槽宽不小于光纤的直径，宽槽段的槽宽大于窄槽段的槽宽。具体到本实施例中，第一O形线槽段207可以被看成是窄槽段，而第二O形线槽段205可以被看成是宽槽段，此时，宽槽段的作用是增加盘线圈数，以满足较长光纤的盘线需求；当然，本实施例中，第二C形线槽段208和第一波浪形线槽段209也可以被看成是宽槽段，此时，宽槽段的作用是对盘线过程进行精度补偿，以降低盘线时的精度要求。
请继续参照图4，本实施例中，该光纤盘线装置还可以包括光纤固定结构，具体地，光纤固定结构安装于光纤整理盘14，光纤固定结构配置成将光纤限位于光纤整理盘14。
光纤固定结构的设置，实现了对光纤在光纤整理盘14的固定。当光刻机工件台51工作时，通过设置光纤固定结构，能够避免因外界环境所导致的粗动框架52振动传递至光纤整理盘14，而使光纤整理盘14与其上的光纤发生相对位移，进而导致的光纤拉扯问题，一方面，防止光纤翘起，另一方面，增大阻尼，阻隔粗动框架线缆端传上来的振动，从而有效避免因外界因素造成光纤损坏以及传输效率的降低，提升了各读数头的工作效率。
请继续参照图3和图4，本实施例中，光纤固定结构可以包括多个光纤入口夹35、多个光纤固定块和多个光纤出口夹，其中，多个光纤入口夹35设置于入口区域，多个光纤固定块设置于盘线区域，多个光纤出口夹设置于出口区域。
如此设置，使得各读数头的尾纤13从进入光纤整理盘14至引出光纤整理盘14的整个盘线路径，均被有效固定。
具体地，本实施例中，光纤固定块的数量为六个。其中，光纤固定块可以为L形块、T形块或工形块，其均能够起到对光纤固定的目的。
请继续参照图4，本实施例中，光纤整理盘14开设有固定孔210，光纤固定块固定连接于固定孔210。其中，光纤固定块在固定孔210处的固定可以采用插接固定的形式。
图5为本实施例一提供的光纤盘线装置的光纤出口夹对光纤进行固定时的结构示意图。如图5所示，具体地，光纤出口夹包括光纤上夹201和光纤下夹202，具体地，光纤下夹202固定于光纤整理盘14，光纤上夹201为倒L形，倒L形的光纤上夹201与设置于光纤整理盘14的光纤下夹202对接，使得二者之间形成配置成使五根光纤54穿过的限位空间。其中，光纤上夹201可通过连接螺钉连接于光纤下夹202。
本实施例中，光纤入口夹35的结构与上述光纤出口夹的结构相同，本实施例不再赘述。
本实施例中，光纤整理盘14的材质为光敏树脂。如此设置，能够增大光纤外壁与盘线槽之间的摩擦力，防止光纤翘起，并且，光敏树脂材料不会受到光刻机内部深紫外光的影响而发生变形，相比于其他材料更加稳定。
具体地，光纤整理盘14为白色光敏树脂材料。
请继续参照图4，本实施例中，该光纤盘线装置还可以包括光纤绕线块206，具体地，光纤绕线块206设置于入口区域，光纤绕线块206配置成引导光纤自相应的入口进入。
本实施例中，光纤绕线块206的数量为两个，两个光纤绕线块206沿左右方向(图4视角下)间隔设置，其中，左侧的光纤绕线块206配置成对第一读数头12的尾纤13和第二读数头11的尾纤13进行引导，右侧的光纤绕线块206配置成对第三读数头16和第四读数头15的尾纤13进行引导。
实施例二
图6为本实施例二提供的光纤盘线装置的结构示意图。如图6所示，本实施例提供了 另一种光纤盘线装置，该光纤盘线装置相对于工件台和粗动框架的安装结构，与上述实施例一的光纤盘线装置相对于工件台和粗动框架的安装结构相同，故不再赘述。下述文字中，仅对该光纤盘线装置与上述实施例一中的光纤盘线装置的不同之处进行描述。
请继续参照图6，本实施例中，第一盘线槽、第二盘线槽、第三盘线槽和第四盘线槽四者大致呈上下方向(图6视角下)排布，其中，由上至下，第一盘线槽、第二盘线槽、第三盘线槽和第四盘线槽依次设置。
具体地，第一盘线槽包括第三O形线槽段213和第二波浪形线槽段214，第三O形线槽段213的入口与第一入口31连通，第三O形线槽段213的出口与第二波浪形线槽段214的入口连通，第二波浪形线槽段214的出口与第一出口41连通；第二盘线槽包括第三水平线槽段215和第四O形线槽段216，第三水平线槽段215的入口与第二入口32连通，第三水平线槽段215的出口与第四O形线槽段216的入口连通，第四O形线槽段216的出口与第二出口42连通；第三盘线槽包括第五O形线槽段217和第四水平线槽段218，第五O形线槽段217的入口与第三入口33连通，第五O形线槽段217的出口与第四水平线槽段218的入口连通，第四水平线槽段218的出口与第三出口43连通；第四盘线槽包括第二∞形线槽段219，第二∞形线槽段219的入口与第四入口34连通，第二∞形线槽段的出口与第四出口44连通。
在对四组读数头尾纤13进行分类和管理时，可以使第一读数头12的尾纤13由第一入口31进入，经第三O形线槽段213盘两圈后进入第二波浪形线槽段214，由第一出口41引出；使第二读数头11的尾纤13由第二入口32进入，经第三水平线槽段215进入第四O形线槽段216，在第四O形线槽段216盘一圈后，由第二出口42引出；使第三读数头16的尾纤13由第三入口33进入，经第五O形线槽段217盘一圈后进入第四水平线槽段218，并最终由第三出口43引出；使第四读数头15的尾纤13由第四入口34进入，经第二∞形线槽段219盘一圈半后，由第四出口44引出。
通过上述设置，使得靠近光纤整理盘14上边缘的第一盘线槽以及靠近光纤整理盘14下边缘的第二盘线槽，具有较长的盘线路径，从而使得第一读数头12和第四读数头15两者的尾纤13在各自出口处的长度缩短，而位于第一盘线槽与第四盘线槽之间的第二盘线槽、第三盘线槽则具有较短的盘线路径，从而使得第二读数头11和第三读数头16两者的尾纤13在各自出口处，具有与上述第一读数头12和第四读数头15两者尾纤13相同的出线长度。
本实施例中，第三O形线槽段213、第四O形线槽段216、第五O形线槽段217和第二∞形线槽段219为宽槽段，以适应多圈(大于一圈)盘线需求，同时，也对盘线过程进行精度补偿，以降低盘线时的精度要求。
本实施例中，同样设置有若干光纤固定块，以实现对各盘线槽中尾纤13的固定。其中，光纤固定块的数量及位置可以由工作人员根据使用需求进行确定，其只要是通过这种光纤固定块的设置形式，能够实现对尾纤13的有效固定即可，本实施例并不对光纤固定块的数量及位置进行限制。
请继续参照图6，本实施例中，在第二∞形线槽段219的入口处设置有引导边220。引导边220的设置，能够对自第四入口34进入的尾纤13起到导向作用，使得在利用第四盘线槽对尾纤13进行盘线操作时，自第四入口34进入的尾纤13可以顺着引导边220进入第二∞形线槽段219，进而由第四出口44引出，提高了盘线效率。
虽然本申请披露如上，但本申请并非限定于此。任何本领域技术人员，在不脱离本申请的精神和范围内，均可作各种更动与修改，因此本申请的保护范围应当以权利要求所限定的范围为准。
最后，还需要说明的是，在本文中，诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来，而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且，术语“包括”或者其任何其他变体意在涵盖非排他性的包含，从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素，而且还包括没有明确列出的其他要素，或者是还包括为这种过程、方法、物品或者设备所固有的要素。在没有更多限制的情况下，由语句“包括一个……”限定的要素，并不排除在包括所述要素的过程、方法、物品或者设备中还存在另外的相同要素。
上述实施例中，诸如“左”、“右”等方位的描述，均基于附图所示。
对所公开的实施例的上述说明，使本领域专业技术人员能够实现或使用本申请。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的，本文中所定义的一般原理可以在不脱离本申请的精神或范围的情况下，在其它实施例中实现。因此，本申请将不会被限制于本文所示的这些实施例，而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。
工业实用性
本申请提供的光纤盘线装置，能够实现对多组读数头尾纤的分类和管理，使得多组读数头的尾纤在各自的出口处具有相同的出线长度。该光纤盘线装置具有明确的光纤入口和出口，同时各组光纤盘线相互独立，利于后期工作人员维护；出口处具有相同的出线长度，利于后续集成。

Claims (10)

  1. 一种光纤盘线装置，其特征在于，包括光纤整理盘(14)，所述光纤整理盘(14)具有沿走线方向依次设置的入口区域、盘线区域和出口区域，其中，所述入口区域设置有多个入口，所述盘线区域设置有多个盘线槽，所述出口区域设置有多个出口，所述入口的数量、所述盘线槽的数量和所述出口的数量相同，多个所述盘线槽的进线端分别与多个所述入口一一对应地连通，多个所述盘线槽的出线端分别与多个所述出口一一对应地连通，多个所述盘线槽互不连通；多个所述入口分别配置成使多组读数头的光纤进入，多个所述盘线槽配置成使多组所述光纤在相应的所述出口具有相同的出线长度，所述光纤为读数头的尾纤(13)。
  2. 根据权利要求1所述的光纤盘线装置，其特征在于，所述多个入口包括第一入口(31)、第二入口(32)、第三入口(33)和第四入口(34)，所述多个盘线槽包括第一盘线槽、第二盘线槽、第三盘线槽和第四盘线槽，所述多个出口包括第一出口(41)、第二出口(42)、第三出口(43)和第四出口(44)，其中，所述第一入口(31)、所述第一盘线槽和所述第一出口(41)沿走线方向依次连通；所述第二入口(32)、所述第二盘线槽和所述第二出口(42)沿走线方向依次连通；所述第三入口(33)、所述第三盘线槽和所述第三出口(43)沿走线方向依次连通；所述第四入口(34)、所述第四盘线槽和所述第四出口(44)沿走线方向依次连通。
  3. 根据权利要求2所述的光纤盘线装置，其特征在于，所述盘线槽包括波浪形段、C形段、O形段、∞形段和直线段中的至少一种或多种的组合。
  4. 根据权利要求3所述的光纤盘线装置，其特征在于，所述第一盘线槽包括第一C形线槽段(204)和第一O形线槽段(207)，所述第一C形线槽段(204)的入口与所述第一入口(31)连通，所述第一C形线槽段(204)的出口与所述第一O形线槽段(207)的入口连通，所述第一O形线槽段(207)的出口与所述第一出口(41)连通；和/或，所述第二盘线槽包括第二O形线槽段(205)，所述第二O形线槽段(205)的入口与所述第二入口(32)连通，所述第二O形线槽段(205)的出口与所述第二出口(42)连通；和/或，所述第三盘线槽包括第二C形线槽段(208)，所述第二C形线槽段(208)的入口与所述第三入口(33)连通，所述第二C形线槽段(208)的出口与所述第三出口(43)连通；和/或，所述第四盘线槽包括第一波浪形线槽段(209)和第一∞形线槽段(211)，所述第一波浪形线槽段(209)的入口与所述第四入口(34)连通，所述第一波浪形线槽段(209)的出口与所述第一∞形线槽段(211)的入口连通，所述第一∞形线槽段(211)的出口与所述第四出口(44)连通。
  5. 根据权利要求4所述的光纤盘线装置，其特征在于，所述第一C形线槽段(204) 环绕所述第二O形线槽段(205)设置，和/或，所述第二C形线槽段(208)环绕所述第一O形线槽段(207)设置，和/或，所述第一波浪形线槽段(209)和所述第一∞形线槽段(211)均靠近所述光纤整理盘(14)的轮廓设置。
  6. 根据权利要求1-5任一项所述的光纤盘线装置，其特征在于，所述盘线槽具有宽槽段和窄槽段，所述窄槽段的槽宽不小于光纤的直径，所述宽槽段的槽宽大于所述窄槽段的槽宽。
  7. 根据权利要求1-6任一项所述的光纤盘线装置，其特征在于，所述光纤整理盘(14)在所述入口区域的高度低于其在所述出口区域的高度。
  8. 根据权利要求1-7任一项所述的光纤盘线装置，其特征在于，所述光纤盘线装置还包括光纤固定结构，所述光纤固定结构安装于所述光纤整理盘(14)，所述光纤固定结构配置成将所述光纤限位于所述光纤整理盘(14)。
  9. 根据权利要求8所述的光纤盘线装置，其特征在于，所述光纤固定结构包括多个光纤入口夹(35)、多个光纤固定块和多个光纤出口夹，其中，多个所述光纤入口夹(35)设置于所述入口区域，多个所述光纤固定块设置于所述盘线区域，多个所述光纤出口夹设置于所述出口区域。
  10. 根据权利要求1-9任一项所述的光纤盘线装置，其特征在于，所述光纤整理盘(14)的材质为光敏树脂。
PCT/CN2022/112048 2022-07-14 2022-08-12 一种光纤盘线装置 WO2024011701A1 (zh)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104944225A (zh) * 2015-05-06 2015-09-30 武汉博激世纪科技有限公司 一种便携式盘光纤装置
CN208521041U (zh) * 2018-08-14 2019-02-19 濮阳光电产业技术研究院 一种光纤盘线盒
CN208780870U (zh) * 2018-09-03 2019-04-23 北京国正信安***控制技术有限公司 一种光缆配线装置
CN112099162A (zh) * 2020-08-26 2020-12-18 江苏通鼎宽带有限公司 光纤配线架子框用尾纤存储盘及尾纤存储方法
CN214278472U (zh) * 2020-09-22 2021-09-24 ***通信集团设计院有限公司 光纤熔存单元以及通信机房光纤连接结构
US20210341697A1 (en) * 2020-04-30 2021-11-04 Commscope Technologies Llc Fiber management system and method for a telecommunication terminal

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN207937667U (zh) * 2018-04-09 2018-10-02 国网福建省电力有限公司龙岩供电公司 一种光纤尾纤收集装置
NL2022743B1 (en) * 2019-03-14 2020-09-18 B V Twentsche Kabelfabriek Distribution frame, in particular an optical distribution frame, and a method for using said distribution frame
CN209311754U (zh) * 2019-07-25 2019-08-27 北京中创为南京量子通信技术有限公司 一种裸纤盘纤装置
CN210982841U (zh) * 2019-12-12 2020-07-10 云南电网有限责任公司昭通供电局 一种集成式尾纤配线盘

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104944225A (zh) * 2015-05-06 2015-09-30 武汉博激世纪科技有限公司 一种便携式盘光纤装置
CN208521041U (zh) * 2018-08-14 2019-02-19 濮阳光电产业技术研究院 一种光纤盘线盒
CN208780870U (zh) * 2018-09-03 2019-04-23 北京国正信安***控制技术有限公司 一种光缆配线装置
US20210341697A1 (en) * 2020-04-30 2021-11-04 Commscope Technologies Llc Fiber management system and method for a telecommunication terminal
CN112099162A (zh) * 2020-08-26 2020-12-18 江苏通鼎宽带有限公司 光纤配线架子框用尾纤存储盘及尾纤存储方法
CN214278472U (zh) * 2020-09-22 2021-09-24 ***通信集团设计院有限公司 光纤熔存单元以及通信机房光纤连接结构

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