WO2023202264A1 - 切片机 - Google Patents
切片机 Download PDFInfo
- Publication number
- WO2023202264A1 WO2023202264A1 PCT/CN2023/081188 CN2023081188W WO2023202264A1 WO 2023202264 A1 WO2023202264 A1 WO 2023202264A1 CN 2023081188 W CN2023081188 W CN 2023081188W WO 2023202264 A1 WO2023202264 A1 WO 2023202264A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- cutting
- liquid supply
- filter
- heat exchanger
- container
- Prior art date
Links
- 238000005520 cutting process Methods 0.000 claims abstract description 95
- 239000007788 liquid Substances 0.000 claims abstract description 74
- 238000001816 cooling Methods 0.000 claims abstract description 22
- 239000007921 spray Substances 0.000 claims abstract description 22
- 238000001914 filtration Methods 0.000 claims abstract description 6
- 239000002173 cutting fluid Substances 0.000 claims description 68
- 230000004308 accommodation Effects 0.000 claims description 10
- 238000011084 recovery Methods 0.000 claims description 6
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 239000012809 cooling fluid Substances 0.000 claims description 4
- 239000000110 cooling liquid Substances 0.000 claims 3
- 239000002826 coolant Substances 0.000 description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
- 229910052710 silicon Inorganic materials 0.000 description 16
- 239000010703 silicon Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 6
- 239000010432 diamond Substances 0.000 description 6
- 229910003460 diamond Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 239000000243 solution Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work
Definitions
- the present application relates to hard and brittle material cutting equipment technology, and in particular to a slicer.
- a slicing machine is a device that cuts hard and brittle material rods into thin slices.
- the slicing machine usually uses two parallel main rollers arranged horizontally, and a single diamond wire is wound around the two main rollers to form at least 2,000 wire saws.
- the silicon rod moves from top to bottom and passes between the two main rollers.
- the main roller rotates and drives the diamond wire to move at high speed to cut the silicon rod into thin slices.
- a slicer is provided in an embodiment of the present application.
- a slicer including: a frame, a cutting device provided on the frame, and a cutting line cooling system; the cooling system includes:
- Liquid supply container containing cutting fluid
- the filter container is connected to the liquid supply container through a pipeline, and a liquid supply pump is provided on the pipeline;
- the heat exchanger is connected to the filter container through pipelines, and the cutting fluid is cooled through the heat exchanger;
- a sprayer is connected to the heat exchanger through a pipeline; the sprayer sprays the cutting fluid to the cutting device.
- the heat exchanger is provided with an accommodation cavity for accommodating coolant, and the accommodation cavity is connected to the coolant supply container and the coolant recovery container through pipelines respectively; the heat exchanger is also provided with A cutting fluid channel for cutting fluid to flow through.
- the cutting fluid channel is disposed in the accommodation space so that the cooling fluid covers the cutting fluid channel; the temperature of the cooling fluid is lower than a preset value.
- the filter container includes:
- a filter barrel the upper part of the filter barrel is provided with a cutting fluid outlet, and the bottom of the filter barrel is provided with a cutting fluid inlet;
- a filter bag is installed in the filter barrel; the cutting fluid injected from the cutting fluid inlet is filtered by the filter bag and then discharged from the cutting fluid outlet.
- the flow meter is installed on the pipeline between the sprayer and the heat exchanger.
- the frame includes: two cutting frames and a connecting frame connected between the two cutting frames;
- Two sets of cutting devices are respectively arranged on the cutting frames at both ends; the cutting device includes: a main roller and a main roller driver for driving the main roller to rotate.
- the liquid supply container is arranged below the connecting frame; the lower part of the cutting frame is provided with a collection chamber for collecting cutting fluid; the collection chambers under the two cutting frames are respectively connected to the liquid supply container through pipelines; The liquid supply pump and the filter container are arranged below the connection frame.
- the number of the liquid supply containers is one, and the cutting liquid in the liquid supply container is pumped to two filter containers through a liquid supply pump, and one filter container is connected to a heat exchanger;
- the number of the liquid supply containers is two, and the cutting liquid in the liquid supply container is pumped to two filter containers respectively through a liquid supply pump, and one filter container is connected to a heat exchanger.
- the sprayer includes:
- the spray pipe extends along the length of the main roller; the spray pipe is located obliquely above the main roller;
- Sprinkler head multiple sprinkler heads are arranged on the spray pipe in sequence; the sprinkler head faces the main roller.
- the pipeline between the heat exchanger and the sprayer includes: a connecting pipe section and a spray pipe section;
- One end of the connecting pipe section is connected to the heat exchanger located at the lower part of the connecting frame, and the other end extends upward to the top of the cutting frame;
- One end of the spray pipe section is connected to the connecting pipe section, and the other end extends downward to be connected to the spray pipe;
- the flow meter is installed on the connecting pipe section or the injection pipe section and is located on the top of the cutting frame.
- a filter screen for filtering the cutting liquid in the collection chamber is provided at the inlet of the liquid supply container.
- the technical solution provided by the embodiment of the present application is to set up a cutting line cooling system on the frame of the slicer.
- the cooling system includes: a liquid supply container, a filter container, a heat exchanger and a sprayer connected in sequence through pipelines.
- a liquid supply pump which is used to provide power so that the cutting liquid in the liquid supply container is sprayed to the cutting device through the filter container, heat exchanger and sprayer in order to cool the cutting line and ensure the cutting quality.
- FIG. 1 is a schematic diagram of the cooling system in the slicer provided by the embodiment of the present application.
- Figure 2 is a schematic structural diagram of a slicer provided by an embodiment of the present application.
- FIG. 3 is a schematic structural diagram of another slicer provided by an embodiment of the present application.
- Figure 4 is a cross-sectional view of the microtome shown in Figure 3;
- Figure 5 is a rear side view of the microtome shown in Figure 3.
- This embodiment provides a slicer for cutting hard and brittle material rods into sheet structures.
- the hard and brittle material rods can be silicon rods, sapphire rods, etc. This embodiment only uses a silicon rod as an example to illustrate the microtome.
- Figure 1 is a schematic diagram of a cooling system in a slicer provided by an embodiment of the present application.
- the slicer provided in this embodiment includes: a frame, a cutting device arranged on the frame, and a cutting line cooling system.
- the cutting lines on the cutting device are used to cut the silicon rod into thin slice-like structures. Since the cutting wire generates heat during friction cutting with the silicon rod, excessive temperature will affect the cutting quality of the cutting wire. Therefore, the cutting wire is cooled through a cooling system to keep the temperature of the cutting wire within the normal operating temperature range. , to ensure cutting quality.
- the cutting wire is a diamond wire with multiple diamonds attached to it.
- the cooling system includes: liquid supply container 3, filter container 4, heat exchanger 5 and sprayer 6.
- the liquid supply container 3 is used to contain cutting fluid.
- the cutting fluid is a liquid used to cool the cutting wire. It does not produce chemical reactions on the cutting wire and the silicon rod, and will not damage the cutting wire or the silicon rod.
- Each container is connected by a pipeline, and a liquid supply pump is provided on the pipeline to provide power so that the cutting liquid in the liquid supply container 3 passes through the filter container 4, the heat exchanger 5 and the sprayer 6 in sequence and then is sprayed to the cutting machine.
- the device cools the cutting wire.
- a liquid supply pump 31 is provided on the pipeline between the liquid supply container 3 and the filter container 4 .
- the filter container 4 is used to filter the cutting fluid and remove impurities, solid particles, etc. therein.
- the cutting fluid is cooled down through the heat exchanger 5, and the cooled cutting fluid is sprayed to the cutting device through the sprinkler 6.
- the technical solution provided by this embodiment is to set up a cutting line cooling system on the frame of the slicer.
- the cooling system includes: a liquid supply container, a filter container, a heat exchanger and a sprayer connected in sequence through pipelines.
- the pipelines are provided with
- the liquid supply pump is used to provide power so that the cutting liquid in the liquid supply container is sprayed to the cutting device through the filter container, heat exchanger and sprayer in order to cool the cutting line and ensure cutting quality.
- the above-mentioned heat exchanger can cool the cutting fluid by air cooling, water cooling, or other cooling methods.
- coolant is used to achieve water cooling.
- the heat exchanger 5 is provided with a holding chamber for holding the coolant.
- the holding chamber is connected to the coolant supply container and the coolant recovery container through pipelines respectively.
- the coolant supply container The container provides coolant with a temperature lower than a preset value to the accommodation cavity.
- the coolant circulates between the coolant supply container, the heat exchanger 5 and the coolant recovery container, and continuously provides coolant with a lower temperature to the heat exchanger 5 .
- the temperature of the coolant can be 9°-14°, or it can be set according to the performance of the cutting wire or silicon rod.
- the heat exchanger 5 is also provided with a cutting fluid channel for the cutting fluid to flow through.
- the cutting fluid channel is disposed in the accommodation space so that the coolant covers the cutting fluid channel and heat exchange is performed between the coolant and the cutting fluid.
- the coolant absorbs the heat of the cutting fluid to lower the temperature of the cutting fluid.
- the heat exchanger 5 includes a box body, and a receiving cavity is formed in the box body.
- the box is provided with a coolant inlet and a coolant outlet that are connected to the accommodation cavity.
- the coolant inlet is connected to the coolant supply container 51 through a pipeline, and the coolant outlet is connected to the coolant recovery container 52 .
- the accommodating cavity is also provided with a cutting fluid channel
- the box body is provided with a cutting fluid inlet and a cutting fluid outlet connected to the cutting fluid channel.
- the cutting fluid inlet is connected to the filter container 4 through a pipeline
- the cutting fluid outlet is connected to the sprinkler 6 through a pipeline.
- the coolant in the accommodation cavity covers the outside of the cutting fluid channel, and the cutting fluid flowing through the cutting fluid channel exchanges heat with the coolant to achieve cooling.
- One implementation method the coolant inlet and the coolant outlet, the cutting fluid inlet and the cutting fluid outlet are arranged crosswise, so that the cutting fluid channel extends along the diagonal direction of the rectangular box, and the cutting fluid flows through the heat exchanger 5 time, thereby improving the cooling effect.
- An electric valve is provided on the flow pipeline of the coolant, and the flow rate of the coolant is adjusted by adjusting the opening of the electric valve.
- the filter container 4 includes a filter barrel, with a cutting fluid outlet provided at the upper part of the filter barrel and a cutting fluid inlet provided at the bottom. So that the cutting fluid enters the filter barrel from the cutting fluid inlet at the bottom and is discharged from the cutting fluid outlet at the top.
- a filter bag inside the filter barrel which is used to filter the cutting fluid and remove impurities, solid particles, etc.
- Filter bags can be made of rigid materials, such as stainless steel; they can also be made of soft materials.
- a flow meter 7 is also installed on the pipeline between the heat exchanger 5 and the sprayer 6 to detect the cutting fluid flow rate in the pipeline.
- this embodiment provides a specific implementation method:
- Figure 2 is a schematic structural diagram of a slicer provided by an embodiment of the present application.
- Figure 3 is a schematic structural diagram of another slicer provided by an embodiment of the present application.
- Figure 4 is a cross-sectional view of the slicer shown in Figure 3.
- Figure 5 shows a rear view of the microtome.
- the frame includes: two cutting frames 11 and a connecting frame 12 connected between the two cutting frames 11 .
- Two sets of cutting devices are respectively provided on the cutting frames 11 at both ends.
- the cutting device includes: a main roller and a main roller driver for driving the main roller to rotate.
- Each cutting device is installed on the cutting frame and serves as a cutting station for cutting silicon rods.
- the slicer has two cutting stations as a whole, which can cut two silicon rods at the same time, improving cutting efficiency.
- the liquid supply container 3 , the liquid supply pump 31 and the filter container 4 are arranged below the connection frame 12 .
- the lower part of the cutting frame 11 is provided with a collection chamber 13 for collecting cutting fluid.
- the collection chambers 13 below the two cutting frames 11 are respectively connected to the liquid supply container 3 through horizontally extending collection pipes 14 .
- the collection chamber 13 is located below the main roller and is used to collect the cutting fluid dripping from the silicon rod.
- the two collection chambers 13 return to the liquid supply container 3 through the collection pipeline 14 respectively.
- FIG. 4 shows the collection pipeline 14 , which extends generally in the horizontal direction from the cutting frame 11 to above the liquid supply container 3 below the connection frame 12 .
- the collection pipe 14 can also be inclined downward, with its portion located inside the cutting frame 11 being higher, prompting the cutting fluid to flow back to the liquid supply container 3 by its own gravity.
- the number of liquid supply containers 3 can be one, and two cutting stations share one liquid supply container 3 .
- the cutting fluid in the liquid supply container 3 is pumped to two filter containers 4 respectively through a liquid supply pump 31, and one filter container 4 is connected to a heat exchanger 5, as shown in Figure 2.
- the cutting fluid collected in the collection chamber 13 in the two cutting stations all flows back to the fluid supply container 3 .
- the number of liquid supply containers 3 is two, and one liquid supply container 3 is used for each cutting station.
- the cutting fluid in the liquid supply container 3 is pumped to two filter containers 4 respectively through the liquid supply pump 31, and one filter container 4 is connected to a heat exchanger 5, as shown in Figure 3.
- the cutting fluid collected in the collection chamber 13 of a cutting station flows back to the fluid supply container 3 accordingly.
- a filter screen is provided at the inlet of the liquid supply container 3 for filtering the cutting liquid flowing back from the collection chamber 13 and filtering out silicon slag, steel lint, broken silicon wafers, etc.
- the sprinkler 6 includes: a sprinkler pipe 61 and a sprinkler head 62 .
- the spray pipe 61 extends along the length direction of the main roller, and the spray pipe 61 is located obliquely above the main roller.
- a plurality of nozzles 62 are arranged on the spray pipe 61 in sequence. The nozzles 62 spray cutting fluid toward the main roller, and evenly spray the cutting fluid into the slit between the silicon rod and the cutting line. .
- the heat exchanger 5 is arranged below the connection frame 12 and on the opposite side of the liquid supply container 3, as shown in Figure 5.
- the pipeline connected to the liquid outlet of the heat exchanger 5 extends upward to the top of the cutting frame 11 and is then connected to the sprinkler 6 .
- the pipeline between the heat exchanger 5 and the sprayer 6 includes: a connecting pipe section and an injection pipe section.
- One end of the connecting pipe section is connected to the heat exchanger 5 located at the lower part of the connecting frame 12 , and the other end extends upward to the top of the cutting frame 11 .
- One end of the spray pipe section is connected to the connecting pipe section, and the other end extends downward to be connected to the spray pipe 61 .
- the flow meter 7 is arranged on the connecting pipe section or the injection pipe section and is located on the top of the cutting frame 11 .
- first and second are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Therefore, features defined as “first” and “second” may explicitly or implicitly include one or more of these features.
- “plurality” means at least two, such as two, three, etc., unless otherwise expressly and specifically limited.
- connection In this application, unless otherwise clearly stated and limited, the terms “installation”, “connection”, “connection”, “fixing” and other terms should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection. , or integrated; it can be mechanical connection, electrical connection or mutual communication; it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction between two elements.
- connection connection
- fixing and other terms should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection. , or integrated; it can be mechanical connection, electrical connection or mutual communication; it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction between two elements.
- the specific meanings of the above terms in this application can be understood according to specific circumstances.
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- Engineering & Computer Science (AREA)
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
一种切片机,包括框架及设置于框架上的切割装置和切割线冷却***;冷却***包括:供液容器(3),容纳有切割液;过滤容器(4),通过管路与供液容器(3)相连,管路上设置有供液泵(31);换热器(5),通过管路与过滤容器(4)相连,切割液经过换热器(5)得到降温;喷淋器(6),通过管路与换热器(5)相连;喷淋器(6)将切割液喷射至切割装置。
Description
本申请涉及硬脆材料切割设备技术,尤其涉及一种切片机。
切片机是一种将硬脆材料棒切割成薄片的设备,切片机通常采用两根平行的主辊水平布置,单根金刚线绕设在两根主辊上形成至少2000根线锯。硅棒自上向下移动从两根主辊之间穿过,主辊转动,带动金刚线高速移动将硅棒切成薄片状。
金刚线高速移动与硅棒之间摩擦切割的过程会产生一定的热量,过高的温度会影响金刚线的切割质量。
为了解决上述技术缺陷之一,本申请实施例中提供了一种切片机。
根据本申请实施例的第一个方面,提供了一种切片机,包括:框架及设置于框架上的切割装置和切割线冷却***;所述冷却***包括:
供液容器,容纳有切割液;
过滤容器,通过管路与供液容器相连,管路上设置有供液泵;
换热器,通过管路与过滤容器相连,切割液经过换热器得到降温;
喷淋器,通过管路与换热器相连;所述喷淋器将切割液喷射至切割装置。
如上所述的切片机,所述换热器内设有用于容纳冷却液的容纳腔,所述容纳腔分别通过管路与冷却液供给容器和冷却液回收容器相连;换热器内还设有供切割液流过的切割液通道,切割液通道穿设于容纳空间内,以使冷却液包覆切割液通道;所述冷却液的温度低于预设值。
如上所述的切片机,所述过滤容器包括:
过滤桶体;所述过滤桶体的上部设有切割液出口,过滤桶体的底部设有切割液入口;
过滤袋,设置于所述过滤桶体内;从切割液入口注入的切割液经过滤袋过滤后从切割液出口排出。
如上所述的切片机,还包括:
流量计,设置于喷淋器与换热器之间的管路上。
如上所述的切片机,所述框架包括:两个切割框架及连接在两个切割框架之间的连接框架;
两组切割装置;分别设置于两端的切割框架上;切割装置包括:主辊和用于驱动主辊转动的主辊驱动器。
如上所述的切片机,所述供液容器设置于连接框架的下方;切割框架下部设有用于收集切割液的收集腔;两个切割框架下方的收集腔分别通过管路与供液容器相连;供液泵和过滤容器设置于连接框架的下方。
如上所述的切片机,所述供液容器的数量为一个,通过一个供液泵将供液容器内的切割液分别泵送至两个过滤容器,一个过滤容器与一个换热器相连;
或者,所述供液容器的数量为两个,分别通过供液泵将供液容器内的切割液分别泵送至两个过滤容器,一个过滤容器与一个换热器相连。
如上所述的切片机,所述喷淋器包括:
喷淋管,沿主辊的长度方向延伸;所述喷淋管位于主辊的斜上方;
喷头;多个喷头依次设置于喷淋管上;喷头朝向主辊。
如上所述的切片机,所述换热器与喷淋器之间的管路包括:连接管段和喷射管段;
所述连接管段的一端与位于连接框架下部的换热器相连,另一端向上延伸至切割框架的顶部;
喷射管段的一端与连接管段相连,另一端向下延伸至与喷淋管相连;
所述流量计设置于连接管段或喷射管段上,位于切割框架的顶部。
如上所述的切片机,所述供液容器的入口处设置有用于对收集腔内的切割液进行过滤的过滤网。
本申请实施例提供的技术方案,通过在切片机的框架上设置切割线冷却***,冷却***包括:通过管路依次连接的供液容器、过滤容器、换热器和喷淋器,管路上设置有供液泵,用于提供动力,使供液容器中的切割液依次经过滤容器、换热器和喷淋器喷射至切割装置,以对切割线进行冷却,保障切割质量。
此处所说明的附图用来提供对本申请的进一步理解,构成本申请的一部分,本申请的示意性实施例及其说明用于解释本申请,并不构成对本申请的不当限定。在附图中:
图1为本申请实施例提供的切片机中冷却***的原理图;
图2为本申请实施例提供的一种切片机的结构示意图;
图3为本申请实施例提供的另一种切片机的结构示意图;
图4为图3所示切片机的剖视图;
图5为图3所示切片机的后侧视图。
附图标记:
11-切割框架;12-连接框架;13-收集腔;14-收集管路;
3-供液容器;31-供液泵;
4-过滤容器;
5-换热器;51-冷却液供给容器;52-冷却液回收容器;
6-喷淋器;61-喷淋管;62-喷头;
7-流量计。
为了使本申请实施例中的技术方案及优点更加清楚明白,以下结合附图对本申请的示例性实施例进行进一步详细的说明,显然,所描述的实施例仅是本申请的一部分实施例,而不是所有实施例的穷举。需要说明的是,在不冲突的情况下,本申请中的实施例及实施例中的特征可以相互组合。
本实施例提供一种切片机,用于将硬脆材料棒切割成片状结构。硬脆材料棒可以为硅棒、蓝宝石棒等。本实施例仅以硅棒为例对切片机进行说明。
图1为本申请实施例提供的切片机中冷却***的原理图。如图1所示,本实施例提供的切片机包括:框架及设置于框架上的切割装置和切割线冷却***。
切割装置上的切割线用于将硅棒切成薄片状结构。由于切割线在于硅棒摩擦切割的过程中会产生热量,过高温度将会影响切割线的切割质量,因此通过冷却***对切割线进行冷却,以使切割线的温度保持在正常的工作温度范围,保障切割质量。切割线为金刚线,其上附着有多个金刚石。
冷却***包括:供液容器3、过滤容器4、换热器5和喷淋器6。其中,供液容器3用于容纳切割液,切割液是一种用于对切割线进行冷却的液体,对切割线及硅棒不产生化学反应,进而不会损伤切割线或硅棒。各容器之间通过管路相连,管路上设置有供液泵,用于提供动力以使供液容器3中的切割液依次经过滤容器4、换热器5和喷淋器6后喷洒至切割装置对切割线进行冷却。
具体的,供液容器3与过滤容器4之间的管路上设置有供液泵31。过滤容器4用于对切割液进行过滤,滤除其中的杂质、固体颗粒等。切割液经过换热器5进行降温,降温后的切割液通过喷淋器6喷洒至切割装置。
本实施例提供的技术方案,通过在切片机的框架上设置切割线冷却***,冷却***包括:通过管路依次连接的供液容器、过滤容器、换热器和喷淋器,管路上设置有供液泵,用于提供动力,使供液容器中的切割液依次经过过滤容器、换热器和喷淋器喷射至切割装置,以对切割线进行冷却,保障切割质量。
上述换热器对切割液进行冷却的方式可以为风冷,也可以为水冷,或者为其他冷却方式。本实施例采用冷却液实现水冷的方式,例如:在换热器5内设有用于容纳冷却液的容纳腔,容纳腔分别通过管路与冷却液供给容器和冷却液回收容器相连,冷却液供给容器向容纳腔提供温度低于预设值的冷却液,冷却液在冷却液供给容器、换热器5及冷却液回收容器之间循环流动,不断向换热器5提供温度较低的冷却液。冷却液的温度可以为9°-14°,也可以根据切割线或硅棒的性能进行设定。
换热器5内还设有供切割液流过的切割液通道,切割液通道穿设于容纳空间内,以使冷却液包覆切割液通道,在冷却液与切割液之间进行热交换,冷却液吸收切割液的热量,以降低切割液的温度。
一种具体的实现方式:换热器5包括箱体,箱体内形成有容纳腔。箱体上开设有与容纳腔连通的冷却液入口和冷却液出口,冷却液入口通过管路与冷却液供给容器51相连,冷却液出口与冷却液回收容器52相连。
容纳腔内还设有切割液通道,且在箱体上设置有与切割液通道连通的切割液入口和切割液出口。切割液入口通过管路与过滤容器4相连,切割液出口通过管路与喷淋器6相连。
容纳腔内的冷却液包覆于切割液通道的外侧,流经切割液通道内的切割液与冷却液进行热交换实现冷却降温。
一种实现方式:冷却液入口和冷却液出口、切割液入口和切割液出***叉设置,以使切割液通道沿矩形箱体的对角线方向延伸,延长切割液在换热器5内流过的时间,进而提高冷却效果。
在冷却液的流动管路上设置有电动阀,通过调节电动阀的开度以调节冷却液的流量。
本实施例提供一种过滤容器4的实现方式:过滤容器4包括:过滤桶体,过滤桶体的上部设有切割液出口,底部设有切割液入口。以使切割液从底部的切割液入口进入过滤桶体,并从上部的切割液出口排出。过滤桶体内设置有过滤袋,用于对切割液进行过滤,滤除杂质、固体颗粒等。过滤袋可以采用刚性材料制成,例如:不锈钢材料;也可以采用软性材料制成。
进一步的,还采用流量计7设置在换热器5与喷淋器6之间的管路上,用于检测管路中的切割液流量。
基于上述冷却***,本实施例提供一种具体的实现方式:
图2为本申请实施例提供的一种切片机的结构示意图,图3为本申请实施例提供的另一种切片机的结构示意图,图4为图3所示切片机的剖视图,图5为图3所示切片机的后侧视图。
如图2至图5所示,框架包括:两个切割框架11及连接在两个切割框架11之间的连接框架12。两组切割装置分别设置于两端的切割框架11上。切割装置包括:主辊和用于驱动主辊转动的主辊驱动器。每一个切割装置设置于切割框架上,作为一个切割工位,用于对硅棒进行切割。切片机整体具有两个切割工位,能同时对两个硅棒进行切割,提高了切割效率。
供液容器3、供液泵31和过滤容器4设置于连接框架12的下方。切割框架11下部设有用于收集切割液的收集腔13。两个切割框架11下方的收集腔13分别通过沿水平延伸的收集管路14与供液容器3相连。
收集腔13位于主辊下方,用于收集从硅棒处滴落的切割液。两个收集腔13分别通过收集管路14回到供液容器3内。图4展示了收集管路14,收集管路14大致沿水平方向延伸,从切割框架11延伸至连接框架12下方的供液容器3上方。收集管路14还可以呈倾斜向下的趋势,其位于切割框架11内的部分较高,促使切割液依靠自身重力流回供液容器3。
供液容器3的数量可以为一个,两个切割工位共用一个供液容器3。通过一个供液泵31将供液容器3内的切割液分别泵送至两个过滤容器4,一个过滤容器4与一个换热器5相连,如图2所示。两个切割工位中收集腔13收集到的切割液均回流至供液容器3。
或者,供液容器3的数量为两个,每个切割工位用一个供液容器3。分别通过供液泵31将供液容器3内的切割液分别泵送至两个过滤容器4,一个过滤容器4与一个换热器5相连,如图3所示。一个切割工位中收集腔13收集到的切割液对应流回供液容器3。
进一步的,在供液容器3的入口处还设置有过滤网,用于对从收集腔13流回的切割液进行过滤,滤除硅渣、钢线头、碎硅片等。
对于喷淋器6,本实施例也提供一种实现方式,如图1所示,喷淋器6包括:喷淋管61和喷头62。其中,喷淋管61沿主辊的长度方向延伸,喷淋管61位于主辊的斜上方。多个喷头62依次设置于喷淋管61上,喷头62朝向主辊喷射切割液,将切割液均匀喷射至硅棒与切割线之间的切缝内。。
换热器5设置于连接框架12的下方,位于供液容器3的对侧,如图5所示。与换热器5的液体出口相连的管路向上延伸至切割框架11的顶部,再与喷淋器6相连。
具体的,换热器5与喷淋器6之间的管路包括:连接管段和喷射管段。其中,连接管段的一端与位于连接框架12下部的换热器5相连,另一端向上延伸至切割框架11的顶部。喷射管段的一端与连接管段相连,另一端向下延伸至与喷淋管61相连。流量计7设置于连接管段或喷射管段上,位于切割框架11的顶部。
在本申请的描述中,需要理解的是,术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本申请和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本申请的限制。
此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本申请的描述中,“多个”的含义是至少两个,例如两个,三个等,除非另有明确具体的限定。
在本申请中,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或成一体;可以是机械连接,也可以是电连接或可以互相通讯;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本申请中的具体含义。
尽管已描述了本申请的优选实施例,但本领域内的技术人员一旦得知了基本创造性概念,则可对这些实施例作出另外的变更和修改。所以,所附权利要求意欲解释为包括优选实施例以及落入本申请范围的所有变更和修改。
显然,本领域的技术人员可以对本申请进行各种改动和变型而不脱离本申请的精神和范围。这样,倘若本申请的这些修改和变型属于本申请权利要求及其等同技术的范围之内,则本申请也意图包含这些改动和变型在内。
Claims (10)
- 一种切片机,其特征在于,包括:框架及设置于框架上的切割装置和切割线冷却***;所述冷却***包括:供液容器,容纳有切割液;过滤容器,通过管路与供液容器相连,管路上设置有供液泵;换热器,通过管路与过滤容器相连,切割液经过换热器得到降温;喷淋器,通过管路与换热器相连;所述喷淋器将切割液喷射至切割装置。
- 根据权利要求1所述的切片机,其特征在于,所述换热器内设有用于容纳冷却液的容纳腔,所述容纳腔分别通过管路与冷却液供给容器和冷却液回收容器相连;换热器内还设有供切割液流过的切割液通道,切割液通道穿设于容纳空间内,以使冷却液包覆切割液通道;所述冷却液的温度低于预设值。
- 根据权利要求1所述的切片机,其特征在于,所述过滤容器包括:过滤桶体;所述过滤桶体的上部设有切割液出口,过滤桶体的底部设有切割液入口;过滤袋,设置于所述过滤桶体内;从切割液入口注入的切割液经过滤袋过滤后从切割液出口排出。
- 根据权利要求1所述的切片机,其特征在于,还包括:流量计,设置于喷淋器与换热器之间的管路上。
- 根据权利要求1-4任一项所述的切片机,其特征在于,所述框架包括:两个切割框架及连接在两个切割框架之间的连接框架;两组切割装置;分别设置于两端的切割框架上;切割装置包括:主辊和用于驱动主辊转动的主辊驱动器。
- 根据权利要求5所述的切片机,其特征在于,所述供液容器设置于连接框架的下方;切割框架下部设有用于收集切割液的收集腔;两个切割框架下方的收集腔分别通过管路与供液容器相连;供液泵和过滤容器设置于连接框架的下方。
- 根据权利要求5所述的切片机,其特征在于,所述供液容器的数量为一个,通过一个供液泵将供液容器内的切割液分别泵送至两个过滤容器,一个过滤容器与一个换热器相连;或者,所述供液容器的数量为两个,分别通过供液泵将供液容器内的切割液分别泵送至两个过滤容器,一个过滤容器与一个换热器相连。
- 根据权利要求5所述的切片机,其特征在于,所述喷淋器包括:喷淋管,沿主辊的长度方向延伸;所述喷淋管位于主辊的斜上方;喷头;多个喷头依次设置于喷淋管上;喷头朝向主辊。
- 根据权利要求8所述的切片机,其特征在于,所述换热器与喷淋器之间的管路包括:连接管段和喷射管段;所述连接管段的一端与位于连接框架下部的换热器相连,另一端向上延伸至切割框架的顶部;喷射管段的一端与连接管段相连,另一端向下延伸至与喷淋管相连;流量计设置于连接管段或喷射管段上,位于切割框架的顶部。
- 根据权利要求6所述的切片机,其特征在于,所述供液容器的入口处设置有用于对收集腔内的切割液进行过滤的过滤网。
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