WO2023201936A1 - 一种加速度计 - Google Patents

一种加速度计 Download PDF

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Publication number
WO2023201936A1
WO2023201936A1 PCT/CN2022/112213 CN2022112213W WO2023201936A1 WO 2023201936 A1 WO2023201936 A1 WO 2023201936A1 CN 2022112213 W CN2022112213 W CN 2022112213W WO 2023201936 A1 WO2023201936 A1 WO 2023201936A1
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mass block
interference
light
acceleration
collimator
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PCT/CN2022/112213
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English (en)
French (fr)
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范玉娇
常密生
杨月舳
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北京华卓精科科技股份有限公司
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Publication of WO2023201936A1 publication Critical patent/WO2023201936A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/03—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses by using non-electrical means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/30—Nuclear fission reactors

Definitions

  • the present disclosure relates to the technical field of inertial detection instruments, and in particular to an accelerometer.
  • Accelerometers are widely used in inertial guidance, robot posture measurement, automobile inertial positioning and other occasions. Since the measured acceleration is directly used to calculate the object's position, attitude, velocity and other state quantities, its measurement accuracy has become one of the most important indicators for measuring the technical level of the accelerometer.
  • accelerometers in related technologies include acceleration measurement solutions such as measuring elastomer strain based on strain gauges, measuring stress based on piezoelectric ceramics, measuring inertial mass displacement based on the capacitance principle, and measuring inertial mass displacement based on the electromagnetic induction principle.
  • acceleration measurement solutions such as measuring elastomer strain based on strain gauges, measuring stress based on piezoelectric ceramics, measuring inertial mass displacement based on the capacitance principle, and measuring inertial mass displacement based on the electromagnetic induction principle.
  • piezoelectric sensor nonlinearity, capacitance nonlinearity, magnetic field nonlinearity and other characteristics there are non-negligible nonlinear errors in the above solutions, which limits the measurement accuracy of the accelerometer.
  • acceleration solution also directly affects the measurement results.
  • the accuracy of acceleration calculation in related technologies depends on the accuracy of the installation position of the detection unit in the accelerometer, and processing and installation errors are difficult to be accurately compensated.
  • the present disclosure proposes an accelerometer, which can effectively reduce the nonlinear errors existing in the related technologies and obtain more accurate acceleration measurement results.
  • An embodiment of the present disclosure provides an accelerometer, including: a laser interferometer, a meter head and an acceleration calculation module;
  • the meter head includes: a housing, a mass block and Elastic support; the mass block is arranged inside the housing, and the mass block and the housing are connected through the elastic support; the housing is used to be fixedly connected to the object to be measured;
  • the laser interferometer is used to generate reference light and measurement light; measurement light It is transmitted to the inside of the housing through the optical fiber and emitted to the surface of the mass block; the surface of the mass block is used to reflect the measurement light to form reflected light;
  • the laser interferometer is also used to receive the reflected light and interfere with the reference light to form interference light ;
  • the laser interferometer is also used to convert the interference light into an interference signal and send it to the acceleration calculation module;
  • the acceleration calculation module is used to calculate the received interference signal and obtain the acceleration value of the object to be measured.
  • Figure 1 is a schematic diagram of the system structure of an embodiment of the present disclosure.
  • This disclosure proposes an accelerometer based on laser interference redundant measurement, which is suitable for high-precision measurement of low-frequency acceleration.
  • the accelerometer uses a laser interferometer to redundantly measure the displacement of the mass block in the meter head, and solves the optical path model equations containing redundant information according to a specific solution algorithm to achieve multi-axis acceleration decoupling and high-precision solution , thereby solving the problem of non-linear errors in the measurement results of accelerometers based on laser interference displacement measurement in related technologies, which is beneficial to improving the accuracy and resolution of acceleration measurement.
  • an accelerometer as shown in Figure 1, including: a laser interferometer, a meter head and an acceleration calculation module; the meter head includes: a housing 1, a mass block 2 and an elastic support member 3; The mass block 2 is arranged inside the housing 1, and the mass block 2 and the housing 1 are connected through an elastic support 3; the housing 1 is used to be fixedly connected to the object to be measured.
  • the housing 1 can Rigidly fixed on the surface of the object to be measured; the laser interferometer is used to generate reference light and measurement light; the measurement light is transmitted to the inside of the housing 1 through the optical fiber and emitted to the surface of the mass block 2; the surface of the mass block 2 is used to reflect the measurement light to form a reflection Light; the laser interferometer is also used to receive reflected light and interfere with the reference light to form interference light; the laser interferometer is also used to convert the interference light into an interference signal and send it to the acceleration calculation module; The acceleration calculation module is used to calculate the received interference signal and obtain the acceleration value of the object to be measured.
  • the mass 2 in a connection method between the housing 1, the mass 2, the elastic support 3 and the object to be measured, when the object to be measured has acceleration, the mass 2 can produce a six-dimensional rotation relative to the housing 1.
  • Degrees of freedom displacement; among them, the six degrees of freedom include: the movement degrees of freedom along the three rectangular coordinate axes of X, Y, and Z, and the rotational degrees of freedom around the three rectangular coordinate axes of X, Y, and Z respectively.
  • the accelerometer provided in this embodiment is a six-dimensional accelerometer that can realize simultaneous measurement of three-axis acceleration and three-axis angular acceleration.
  • the mass block 2 is in the shape of a regular hexahedron; each surface of the mass block 2 is connected to the inner wall of the housing 1 through the elastic support member 3 corresponding to that surface.
  • the mass block 2 can also be in other shapes such as a rectangular parallelepiped, a sphere, an ellipsoid, etc., which is not specifically limited in this embodiment.
  • the elastic support member 3 corresponds to each side of the mass block 2, and each side of the mass block 2 passes through an elastic support member. 3 is connected to the inner wall of the housing 1.
  • the mass 2 can produce a six-degree-of-freedom displacement relative to the housing 1. This displacement is detected by a laser interferometer. Afterwards, the acceleration value corresponding to the displacement can be calculated through the acceleration calculation module.
  • the mass block 2 can be used to carry the inertial force caused by the acceleration to be measured, thereby producing a tendency of six degrees of freedom displacement relative to the housing 1.
  • the mass block 2 is also used to reflect the force generated by the laser interferometer. of measuring light.
  • the surface of the mass block 2 is coated with a laser reflective film.
  • the elastic support 3 can be used to provide a restoring force that makes the mass 2 tend to return to the force equilibrium position when the mass 2 and the housing 1 are relatively displaced or the mass 2 deviates from the force equilibrium position.
  • the laser interferometer includes: a laser source, an interference lens group and a signal processing board;
  • the interference lens group includes: a polarizing beam splitter 4, a first quarter-wave plate 5, a second fourth Quarter-wave plate 6 and reflector 7;
  • the laser light generated by the laser source is divided into reference light and measurement light by polarizing beam splitter 4; after the reference light passes through the first quarter-wave plate 5, it is reflected by the reflector 7 Return along the original optical path; after the measurement light passes through the second quarter-wave plate 6, it enters the optical fiber 9 through the first collimator 8, is transmitted to the inside of the housing 1 through the optical fiber 9, and exits through the second collimator 10.
  • the reflected light enters the optical fiber 9 through the second collimator 10 and returns along the original optical path; the interference light enters the signal processing board through the third collimator 11, and is converted into an interference signal by the signal processing board and sent to the acceleration solution calculation module.
  • the mass block 2 is set in the shape of a regular hexahedron.
  • the measurement light generated by the laser interferometer is emitted through the second collimator 10 to at least two adjacent three surfaces of the mass block 2, so that more effective interference signals can be obtained later.
  • N interference lens groups where N>6; the laser generated by the laser source is transmitted to each interference lens group through N optical fibers to form N channels of interference light; the signal processing board is also used to N channels of interference light are converted into N channels of interference signals and then sent to the acceleration calculation module.
  • Figure 1 shows the situation where nine channels of measurement light are emitted to the surface of mass block 2.
  • the signal processing board can receive nine channels of interference light, and then convert it into nine channels of interference signals for the acceleration calculation module to solve. Calculate.
  • the laser light generated by the laser source is transmitted to N interference lens groups through N (N>6) optical fibers, and is divided into N channels of reference light and N channels of measurement through the polarizing beam splitter 4 Light; after each reference light passes through the first quarter-wave plate 5, it is reflected by the reflector 7 and then returns along the original optical path. It passes through the first quarter-wave plate 5 twice so that the polarization direction of the reference light is deflected by 90°. ; After each measurement light passes through the second quarter-wave plate 6, it enters the optical fiber 9 connected to the meter head through the first collimator 8, and passes through the second collimator 10 installed on the meter head housing 1.
  • N beams of interference light are formed, which are received by the signal processing board; after receiving the N beams of interference light, the signal processing board obtains N-channel interference signal digital quantities through photoelectric conversion and analog-to-digital conversion, which includes six freedoms of the coupled mass block relative to the shell. degree displacement information, that is, it includes coupled six-dimensional acceleration information to be measured.
  • the acceleration solution module After receiving the N-channel interference signal digital quantity generated by the signal processing board, the acceleration solution module processes it according to the corresponding acceleration decoupling algorithm to obtain the six-dimensional acceleration value.
  • the acceleration calculation module uses the following method to calculate the received interference signal to obtain the acceleration value of the object to be measured.
  • X is the six degrees of freedom displacement of the mass block relative to the coordinate origin, where the coordinate origin is the mass block without acceleration input The position of the center of mass;
  • P i is the position parameter of the second collimator corresponding to the i-th interference signal, obtained by pre-calibration;
  • ⁇ i is the noise signal of the i-th interference signal;
  • F i ( ⁇ ) is the i-th interference signal
  • the optical path model function, the output of this function is the optical path difference between the i-th measurement light and the i-th reference light.
  • each geometric quantity in this embodiment takes the housing 1 as the reference system, and the position of the center of mass of the mass block 2 when there is no acceleration input is the coordinate origin O;
  • X [u, v, w, ⁇ x , ⁇ y , ⁇ z ] T is the six-degree-of-freedom displacement of the mass block 2 relative to the coordinate origin O (the quantity to be solved);
  • P i [x i ,y i ,z i ,l i ] T is the relationship with the i-th
  • the position parameter (to be quantified) of the second collimator corresponding to the path interference signal may include: the coordinates of the second collimator, and the emitting laser direction vector of the second collimator.
  • Step 2 Use the least squares method to solve the first set of equations to obtain the six-degree-of-freedom displacement of the mass block relative to the coordinate origin.
  • the position parameter Pi of the second collimator obtained by self - calibration is substituted into the above-mentioned first system of equations, and a nonlinear system of equations solving algorithm based on least squares (i.e., the least squares method) is used to solve the above-mentioned first system of equations.
  • the system of equations is solved by minimizing
  • Step 3 Calculate the product of the six-degree-of-freedom displacement of the mass block relative to the coordinate origin and the pre-calibrated stiffness matrix to obtain the acceleration value of the object to be measured.
  • the least squares method is used to solve the first set of equations to obtain the six-degree-of-freedom displacement of the mass relative to the coordinate origin, which includes the following steps S1 to S4.
  • X k+1 X k +[J T (X k )J(X k )] -1 J T (X k )[VF(X k )]
  • the position parameters of the second collimator corresponding to the i-th interference signal include: the coordinates of the second collimator, and the outgoing laser direction vector of the second collimator; pre-calibrated in the following manner Obtain the position parameter of the second collimator corresponding to the i-th interference signal.
  • Step 1 Record the values of each interference signal when M times of different acceleration inputs are entered. Substitute the recorded values of each interference signal into the optical path model equations to obtain the following second set of equations, where M>5N/(N-6) , so that the number of equations in the system of equations is greater than the number of unknowns.
  • each parameter is the same as the meaning of each parameter in the above-mentioned first set of equations.
  • this second set of equations considering the six-degree-of-freedom displacement X of the mass block relative to the coordinate origin and the second collimator position parameter Pi as unknown quantities, a total of MN equations are included, (6M+5N) Unknown.
  • Step 2 Use the least squares method to solve the second set of equations to obtain the position parameters of the second collimator corresponding to the i-th interference signal.
  • the least squares method is used to solve the above second set of equations, that is, to minimize
  • the solution of the collimator parameter Pi when reaching the target is obtained, which is used as the self-calibration result to complete the self-calibration.
  • the least squares method is used to solve the second set of equations to obtain the position parameters of the second collimator corresponding to the i-th interference signal, which includes the following steps S1 to S4.
  • V F(Y)+e
  • F( ⁇ ) [F 1 ( ⁇ ),...,F N ( ⁇ )]
  • e [ ⁇ 1 , ⁇ 2 ,..., ⁇ MN ]
  • the noise signal of the N-channel interference signal is the six-degree-of-freedom displacement of the mass block relative to the coordinate origin, and the position parameter of the second collimator corresponding to the N-channel interference signal, which is the six-degree-of-freedom displacement of the M group of mass blocks relative to the coordinate origin and N sets of second collimator position parameters.
  • Y k+1 Y k +[J T (Y k )J(Y k )] -1 J T (Y k )[VF(Y k )]
  • An accelerometer provided by an embodiment of the present disclosure uses a laser interferometer to generate reference light and measurement light.
  • the measurement light is transmitted to the inside of the casing of the meter head through an optical fiber, emitted to the surface of the mass block, and then reflected by the surface of the mass block. It is received by the laser interferometer and interferes with the reference light to form interference light, which is then converted into an interference signal and the acceleration calculation module calculates the acceleration of the object to be measured. That is, the embodiment of the present disclosure uses a laser interferometer as the detection unit.
  • embodiments of the present disclosure Compared with accelerometers in the related art that use strain gauges, piezoelectric sensors, capacitive sensors, and electromagnetic induction sensors as detection units, embodiments of the present disclosure have better linearity, and therefore can effectively reduce nonlinear errors caused by the detection principle. , thereby improving the accuracy of acceleration measurement to obtain more accurate acceleration measurement results.
  • the accelerometer provided by the embodiment of the present disclosure is a new type of precision six-dimensional accelerometer, which has the advantages of high accuracy, large range, etc.; the accelerometer as a whole consists of a laser interferometer that can measure N (N>6) displacements, It consists of a meter head and an acceleration calculation module.
  • the meter head consists of a shell, an elastic support and a mass block.
  • the laser interferometer consists of a laser source, an interference lens group and a signal processing board. The measurement light of the laser interferometer enters through the collimator.
  • the head after reflection at different positions on the surface of the mass block, interferes with the reference light; when acceleration is input, the laser interferometer measures N interference signals containing coupled and redundant six-dimensional acceleration information, which are input to the acceleration solution
  • the acceleration value of each axis is obtained according to the acceleration decoupling algorithm and the detection unit parameter self-calibration algorithm.
  • the present disclosure can be applied to six-dimensional acceleration precision measurement.
  • the present disclosure Compared with six-dimensional accelerometers in related technologies, the present disclosure also has the following advantages: (1) Compared with six-dimensional accelerometers based on strain gauges, piezoelectric sensors, capacitive sensors, and electromagnetic induction sensors, the present disclosure adopts a linear accelerometer. A laser interferometer with better accuracy is used as the detection unit, which reduces the nonlinear error caused by the detection principle and improves the accuracy of acceleration measurement; (2) This disclosure adopts the principle of multi-channel signal redundancy measurement, by increasing the number of signal channels N, reducing the accidental measurement errors caused by signal noise and improving the accuracy of acceleration measurement; (3) This disclosure adopts the collimator parameter self-calibration method, which avoids the processing and installation errors of the manually calibrated detection unit, and improves the accuracy of the acceleration measurement. interference signal model accuracy, thereby improving acceleration measurement accuracy.
  • the disclosed devices and methods can be implemented in other ways.
  • the device embodiments described above are only illustrative.
  • the division of units is only a logical function division. In actual implementation, there may be other division methods.
  • multiple units or components may be combined or integrated. to another system, or some features can be ignored, or not implemented.
  • a unit described as a separate component may or may not be physically separate.
  • a component shown as a unit may or may not be a physical unit, that is, it may be located in one place, or it may be distributed to multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the present disclosure.
  • each functional unit in various embodiments of the present disclosure may be integrated into one processing unit, or each processing unit may exist physically alone, or two or more processing units may be integrated into one unit.
  • the above integrated units can be implemented in the form of hardware or software functional units.
  • Integrated units may be stored in a computer-readable storage medium if they are implemented in the form of software functional units and sold or used as independent products.
  • the technical solution of the present disclosure is essentially or contributes to the relevant technology, or all or part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a storage medium , including several instructions to cause an electronic device (which may be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods of various embodiments of the present disclosure.
  • the aforementioned storage media include: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), magnetic disk or optical disk and other media that can store program code. .

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Abstract

一种加速度计，涉及惯性检测仪表技术领域，包括：激光干涉仪、表头和加速度解算模块；表头包括：壳体（1）、质量块（2）和弹性支撑件（3）；质量块（2）设置于壳体（1）内部，质量块（2）与壳体（1）之间通过弹性支撑件（3）连接；壳体（1）用于与待测物体固定连接；激光干涉仪用于产生参考光和测量光；测量光经光纤（9）传输至壳体（1）内部，出射至质量块（2）表面；质量块（2）表面用于反射测量光，形成反射光；激光干涉仪还用于接收反射光，并使其与参考光发生干涉，形成干涉光；激光干涉仪还用于将干涉光转换为干涉信号，并将其发送给加速度解算模块进行解算，以获得待测物体的加速度值。

Description

一种加速度计
相关申请的交叉引用
本公开要求享有2022年04月18日提交的名称为“一种加速度计”的中国专利申请CN202210402846.2的优先权，其全部内容通过引用并入本公开中。
技术领域
本公开涉及惯性检测仪表技术领域，特别地涉及一种加速度计。
背景技术
加速度计广泛应用于惯性制导、机器人位姿测量、汽车惯性定位等场合。由于所测的加速度直接用于物***置、姿态、速度等状态量的计算，其测量精度成为衡量加速度计技术水平最重要的指标之一。
相关技术中的加速度计根据检测原理的不同，出现了基于应变片测弹性体应变、基于压电陶瓷测应力、基于电容原理测惯性质量位移、基于电磁感应原理测惯性质量位移等加速度测量方案。然而，由于电阻热效应、压电传感器非线性、电容非线性、磁场非线性等特性，上述方案中均存在不可忽略的非线性误差，限制了加速度计的测量精度。
此外，加速度解算方案也直接影响测量结果。而相关技术中的加速度解算精度依赖于加速度计中检测单元安装位置的精确程度，且加工、安装误差难以准确被补偿。
以上缺陷均导致相关技术中的加速度计的测量结果不够准确，无法满足对加速度计的测量精度要求。
发明内容
针对上述相关技术中的问题，本公开提出了一种加速度计，能够有效降低相关技术中存在的非线性误差，获得更加精确的加速度测量结果。
为达到上述目的，本公开的技术方案是这样实现的：本公开实施例提供了一种加速度计，包括：激光干涉仪、表头和加速度解算模块；表头包括：壳体、质量块和弹性支撑件；质量块设置于壳体内部，质量块与壳体之间通过弹性支撑件连接；壳体用于与待测物体固定连接；激光干涉仪用于产生参考光和测量光；测量光经光纤传输至壳体内部，出射至质量块表面；质量块表面用于反射测量光，形成反射光；激光干涉仪还用于接收反射光，并使反射光与参考光发生干涉，形成干涉光；激光干涉仪还用于将干涉光转换为干涉信号，并将其发送给加 速度解算模块；加速度解算模块用于对接收到的干涉信号进行解算，获得待测物体的加速度值。
附图说明
通过结合附图阅读下文示例性实施例的详细描述可更好地理解本公开的范围。其中所包括的附图是：
图1为本公开实施例的***结构原理图。
附图标记说明
1-壳体  2-质量块  3-弹性支撑件  4-偏振分光镜
5-第一四分之一波片  6-第二四分之一波片  7-反射镜
8-第一准直器  9-光纤  10-第二准直器  11-第三准直器
具体实施方式
为了使本公开的目的、技术方案和优点更加清楚，以下将结合附图及实施例来详细说明本公开的实施方法，借此本公开如何应用技术手段来解决技术问题，并达成技术效果的实现过程能充分被理解并据以被实施。
在下面的描述中阐述了很多具体细节以便于充分理解本公开，但是，本公开还可以采用不同于在此描述的其他方式来实施，因此，本公开的保护范围并不受下面公开的具体实施例的限制。
本公开提出了一种基于激光干涉冗余测量的加速度计，适用于低频加速度高精度测量。该加速度计采用激光干涉仪对表头中质量块的位移进行冗余测量，根据特定的求解算法对包含冗余信息的光路模型方程组进行解算，实现多轴加速度解耦与高精度解算，从而解决相关技术中的基于激光干涉位移测量加速度计的测量结果存在非线性误差的不足，有利于提高加速度测量精度与分辨率。
基于上述思路，本公开实施例提供了一种加速度计，如图1所示，包括：激光干涉仪、表头和加速度解算模块；表头包括：壳体1、质量块2和弹性支撑件3；质量块2设置于壳体1内部，质量块2与壳体1之间通过弹性支撑件3连接；壳体1用于与待测物体固定连接，在一实施方式中，壳体1可刚性固定于待测物体表面；激光干涉仪用于产生参考光和测量光；测量光经光纤传输至壳体1内部，出射至质量块2表面；质量块2表面用于反射测量光，形 成反射光；激光干涉仪还用于接收反射光，并使反射光与参考光发生干涉，形成干涉光；激光干涉仪还用于将干涉光转换为干涉信号，并将其发送给加速度解算模块；加速度解算模块用于对接收到的干涉信号进行解算，获得待测物体的加速度值。
在一实施方式中，在壳体1、质量块2、弹性支撑件3和待测物体的一种连接方式中，当待测物体具有加速度时，质量块2能够产生相对于壳体1的六自由度位移；其中，六自由度包括：分别沿X、Y、Z三个直角坐标轴方向的移动自由度，以及，分别绕X、Y、Z三个直角坐标轴的转动自由度。本实施例提供的加速度计是一种六维加速度计，能够实现三轴线加速度和三轴角加速度的同时测量。
本实施例中，弹性支撑件3至少为一个；质量块2为正六面体形状；质量块2的每个面通过与该面对应的弹性支撑件3与壳体1的内壁连接。当然，质量块2还可以为长方体、球体、椭球体等其它形状，本实施例对此不做具体限制。
在一实施方式中，如图1所示，当质量块2为正六面体形状时，弹性支撑件3与质量块2的每一面一一对应，质量块2的每个面均通过一个弹性支撑件3与壳体1的内壁连接，如此，当与壳体1固定连接的待测物体具有加速度时，质量块2能够产生相对于壳体1的六自由度位移，该位移量由激光干涉仪检测到，后续通过加速度解算模块即可解算出与该位移量对应的加速度值。
本实施例中，质量块2可以用于承载因待测加速度引起的惯性力，从而产生相对于壳体1发生六自由度位移的趋势，同时，质量块2还用于反射由激光干涉仪产生的测量光。为了更加有效地反射该测量光，本实施例中，质量块2表面镀有激光反射膜。弹性支撑件3可以用于在质量块2与壳体1发生相对位移或质量块2偏离力平衡位置时提供使质量块2趋向于回到力平衡位置的回复力。
本实施例中，如图1所示，激光干涉仪包括：激光源、干涉镜组和信号处理板；干涉镜组包括：偏振分光镜4、第一四分之一波片5、第二四分之一波片6和反射镜7；激光源产生的激光经偏振分光镜4分为参考光和测量光；参考光通过第一四分之一波片5后，再经反射镜7反射后沿原光路返回；测量光通过第二四分之一波片6后，经第一准直器8进入光纤9，并由光纤9传输至壳体1内部，经第二准直器10出射至质量块2表面；反射光经第二准直器10进入光纤9，沿原光路返回；干涉光经第三准直器11进入信号处理板，由信号处理板转换为干涉信号后发送给加速度解算模块。
为了更有效地对由激光干涉仪所获得的干涉信号进行解算，进而获得更准确的解算结果，本实施例将质量块2设置为正六面体形状。当质量块2为正六面体形状时，由激光干涉仪产 生的测量光经第二准直器10至少出射至质量块2两两相邻的三个面，以便后续获取更有效的干涉信号。
本实施例中，干涉镜组有N个，其中，N>6；激光源产生的激光分别经N路光纤传输至每个干涉镜组，以形成N路干涉光；信号处理板还用于将N路干涉光转换为N路干涉信号后发送给加速度解算模块。
图1示出了九路测量光出射至质量块2表面的情况，在该情形下，信号处理板相应地能够接收九路干涉光，进而将其转换获得九路干涉信号供加速度解算模块解算。
在一实施方式中，在激光干涉仪中，激光源产生的激光分别经N(N>6)路光纤传输至N个干涉镜组，经过偏振分光镜4分为N路参考光与N路测量光；每路参考光经过第一四分之一波片5后，再经反射镜7反射后沿原光路返回，两次经过第一四分之一波片5使得参考光偏振方向偏转90°；每路测量光经过第二四分之一波片6后，经第一准直器8进入与表头相连接的光纤9，从安装在表头壳体1上的第二准直器10射出，在质量块2表面的不同位置处反射后原路返回，两次经过第二四分之一波片6使得测量光偏振方向偏转90°；返回的参考光与返回的测量光发生干涉，形成N束干涉光，被信号处理板接收；信号处理板接收N束干涉光后通过光电转换与模数转换得到N路干涉信号数字量，其中包含有耦合的质量块相对于壳体的六自由度位移信息，也即包含有耦合的待测六维加速度信息。
加速度解算模块接收信号处理板产生的N路干涉信号数字量后，根据相应的加速度解耦算法处理得到六维加速度值。
本实施例中，加速度解算模块采用以下方式对接收到的干涉信号进行解算，获得待测物体的加速度值。
步骤1：将N路干涉信号V i(i＝1,2,...,N)代入光路模型方程组，获得第一方程组：
Figure PCTCN2022112213-appb-000001
其中，V i为第i路干涉信号，i＝1,2,3...,N；X为质量块相对于坐标原点的六自由度位移，其中，坐标原点为无加速度输入时质量块的质心所在的位置；P i为与第i路干涉信号对应的第二准直器的位置参数，由预先标定获得；ε i为第i路干涉信号的噪声信号；F i(·)为第i路光路模型函数，该函数的输出量为第i路测量光与第i路参考光的光程差。
在一实施方式中，本实施例中的各几何量以壳体1为参考系，无加速度输入时质量块2 的质心所处位置为坐标原点O；X＝[u,v,w,θ x,θ y,θ z] T为质量块2相对于坐标原点O的六自由度位移(待解算量)；P i＝[x i,y i,z i,l i] T为与第i路干涉信号对应的第二准直器的位置参数(待定量)，在一实施方式中，可以包括：该第二准直器的坐标，以及该第二准直器的出射激光方向向量。由于第二准直器固定安装在刚性壳体上，因此P i不随加速度输入的变化而变化；ε i为第i路干涉信号的噪声信号(待定量)；F i(·)为第i路光路模型函数，该函数输入量为[X,P i]，输出量为图1中第i路测量光与第i路参考光的光程差，由于不论是否有加速度输入，任一[X,P i]都唯一对应的一组质量块位置、第二准直器的坐标与第二准直器的出射激光方向向量，此时图1中的测量光光程也被唯一确定，又由参考光光程固定可知F i(·)能够根据几何关系唯一确定。
步骤2：采用最小二乘法对第一方程组进行求解，获得质量块相对于坐标原点的六自由度位移。
在一实施方式中，将自标定得到的第二准直器的位置参数P i代入上述第一方程组，采用基于最小二乘的非线性方程组求解算法(即最小二乘法)对上述第一方程组进行求解，即以最小化
Figure PCTCN2022112213-appb-000002
为优化目标，解得达到目标时的质量块相对于坐标原点的六自由度位移X＝[u,v,w,θ x,θ y,θ z] T的解。
步骤3：计算质量块相对于坐标原点的六自由度位移与预先标定的刚度矩阵的乘积，获得待测物体的加速度值。
在一实施方式中，将解得的质量块相对于坐标原点的六自由度位移X＝[u,v,w,θ x,θ y,θ z] T乘以刚度矩阵K得到六维加速度A＝[a x,a y,a z,β x,β y,β z]，即待测物体的加速度值。在一实施方式中，表达式可以为：A＝K·X，其中刚度矩阵K为一对角阵，其对角元素数值通过在可产生六维标准加速度的试验台对加速度计进行的标准加速度输入测试中，将六维标准加速度按顺序除以六自由度位移得到。
本实施例中，采用最小二乘法对第一方程组进行求解，获得质量块相对于坐标原点的六自由度位移，包括以下步骤S1至S4。
S1：将第一方程组改写为V＝F(X)+e；其中，V＝[V 1,...,V N] T，为N路干涉信号；F(·)＝[F 1(·)，...，F N(·)]，为光路模型函数，由于第二准直器位置参数P i的数值已被代入方程 组，因此F(·)为仅关于X的函数；e＝[ε 1,ε 2,...,ε n]，为N路干涉信号的噪声信号；X为质量块相对于坐标原点的六自由度位移，为待解算量。
S2：利用预设的参数标称值计算变量X的迭代初值X 0。
S3：选取最小化目标函数
Figure PCTCN2022112213-appb-000003
根据以下迭代公式对变量X进行迭代求解：
X k+1＝X k+[J T(X k)J(X k)] -1J T(X k)[V-F(X k)]
其中，
Figure PCTCN2022112213-appb-000004
为F(X k)的雅可比矩阵。
S4：给定误差预设值δ与最大迭代次数k max，若||X k+1-X k||≥δ且k<k max则回到S3继续迭代，若||X k+1-X k||<δ或k≥k max则结束迭代，得到接近真值的求解结果X k+1。
本实施例中，与第i路干涉信号对应的第二准直器的位置参数包括：该第二准直器的坐标，以及该第二准直器的出射激光方向向量；采用以下方式预先标定获得与第i路干涉信号对应的第二准直器的位置参数。
步骤1：记录M次不同加速度输入时各路干涉信号的数值，将记录的各路干涉信号的数值代入光路模型方程组，获得如下第二方程组，其中，M>5N/(N-6)，使得方程组中方程数目大于未知数数目。
Figure PCTCN2022112213-appb-000005
其中，各参数的含义与上述第一方程组中各参数的含义相同。在该第二方程组中，将质 量块相对于坐标原点的六自由度位移X、第二准直器位置参数P i均视为未知量，则共包含MN个方程，(6M+5N)个未知量。
步骤2：采用最小二乘法对第二方程组进行求解，获得与第i路干涉信号对应的第二准直器的位置参数。
在一实施方式中，采用最小二乘法对上述第二方程组进行求解，即以最小化
Figure PCTCN2022112213-appb-000006
为优化目标，解得达到目标时的准直器参数P i的解，作为自标定结果，完成自标定。
本实施例中，采用最小二乘法对第二方程组进行求解，获得与第i路干涉信号对应的第二准直器的位置参数，包括以下步骤S1至S4。
S1：将第二方程组改写为V＝F(Y)+e；其中，V＝[V 1,...,V MN] T，为MN路干涉信号；F(·)＝[F 1(·)，...，F N(·)]，为光路模型函数；e＝[ε 1,ε 2,...,ε MN]，为N路干涉信号的噪声信号；
Figure PCTCN2022112213-appb-000007
为质量块相对于坐标原点的六自由度位移，以及，N路干涉信号对应的第二准直器的位置参数，即为待解算的M组质量块相对于坐标原点的六自由度位移与N组第二准直器位置参数。
S2：利用预设的参数标称值计算变量Y的迭代初值Y 0。
S3：选取最小化目标函数
Figure PCTCN2022112213-appb-000008
根据以下迭代公式对变量Y进行迭代求解：
Y k+1＝Y k+[J T(Y k)J(Y k)] -1J T(Y k)[V-F(Y k)]
其中，
Figure PCTCN2022112213-appb-000009
为F(Y k)的雅可比矩阵。
S4：给定误差预设值δ与最大迭代次数k max，若||Y k+1-Y k||≥δ且k<k max则回到S3继续迭代，若||Y k+1-Y k||<δ或k≥k max则结束迭代，得到接近真值的求解结果Y k+1，Y k+1中的N组第二准直器位置参数数值即为P i的自标定结果。
本公开实施例提供的一种加速度计，由激光干涉仪产生参考光和测量光，其中，测量光经光纤传输至表头的壳体内部，出射至质量块表面，被质量块表面反射后再由激光干涉仪接收，并与参考光发生干涉，形成干涉光，之后转换为干涉信号由加速度解算模块解算出待测物体的加速度，即本公开实施例采用了激光干涉仪作为检测单元，相比于相关技术中的采用应变片、压电传感器、电容传感器、电磁感应传感器作为检测单元的加速度计，本公开实施 例的线性度更好，因此，能够有效降低因检测原理引起的非线性误差，进而提高加速度测量准确度，以获得更加精确的加速度测量结果。
本公开实施例提供的一种加速度计，是一种新型精密六维加速度计，具有高精度、大量程等优点；该加速度计整体由可测N(N>6)路位移的激光干涉仪、表头、加速度解算模块组成，表头由壳体、弹性支撑件与质量块组成，激光干涉仪由激光源、干涉镜组、信号处理板组成；激光干涉仪的测量光经过准直器进入表头，在质量块表面的不同位置处反射后与参考光发生干涉；当加速度输入时，激光干涉仪测得N路包含耦合、冗余的六维加速度信息的干涉信号，其输入至加速度解算模块后根据加速度解耦算法以及检测单元参数自标定算法得到各轴加速度值。本公开可应用于六维加速度精密测量。
相比于相关技术中的六维加速度计，本公开还具有以下优点：(1)相比于基于应变片、压电传感器、电容传感器、电磁感应传感器的六维加速度计，本公开采用了线性度更好的激光干涉仪作为检测单元，降低了因检测原理引起的非线性误差，提高了加速度测量准确度；(2)本公开采用了多路信号冗余测量的原理，通过增加信号路数N，降低了因信号噪声引起的测量偶然误差，提高了加速度测量精密度；(3)本公开采用了准直器参数自标定方法，避免了手动标定的检测单元的加工、安装误差，提高了干涉信号模型准确度，从而提高了加速度测量准确度。
在本申请所提供的几个实施例中，所揭露的装置和方法，可以通过其它的方式实现。例如，以上所描述的装置实施例仅仅是示意性的，例如，单元的划分，仅仅为一种逻辑功能划分，实际实现时可以有另外的划分方式，例如多个单元或组件可以结合或者可以集成到另一个***，或一些特征可以忽略，或不执行。
作为分离部件说明的单元可以是或者也可以不是物理上分开的，作为单元显示的部件可以是或者也可以不是物理单元，即可以位于一个地方，或者也可以分布到多个网络单元上。可以根据实际的需要选择其中的部分或者全部单元来实现本公开的目的。
另外，在本公开各个实施例中的各功能单元可以集成在一个处理单元中，也可以是各个处理单元单独物理存在，也可以是两个或两个以上处理单元集成在一个单元中。上述集成的单元既可以采用硬件的形式实现，也可以采用软件功能单元的形式实现。
集成的单元如果以软件功能单元的形式实现并作为独立的产品销售或使用时，可以存储在一个计算机可读取存储介质中。基于这样的理解，本公开的技术方案本质上或者说对相关技术做出贡献的部分，或者该技术方案的全部或部分可以以软件产品的形式体现出来，该计算机软件产品存储在一个存储介质中，包括若干指令用以使得一台电子设备(可以是个人计 算机，服务器，或者网络设备等)执行本公开各个实施例方法的全部或部分步骤。而前述的存储介质包括：U盘、移动硬盘、只读存储器(ROM，Read-Only Memory)、随机存取存储器(RAM，Random Access Memory)、磁碟或者光盘等各种可以存储程序代码的介质。
虽然本公开所公开的实施方式如上，但所述的内容只是为了便于理解本公开，并非用以限定本公开。任何本公开所属技术领域内的技术人员，在不脱离本公开的精神和范围的前提下，可以在实施的形式上及细节上作任何的修改与变化，但本公开的保护范围，仍须以所附的权利要求书所界定的范围为准。

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  1. 一种加速度计，其中，包括：激光干涉仪、表头和加速度解算模块；所述表头包括：壳体、质量块和弹性支撑件；所述质量块设置于所述壳体内部，所述质量块与所述壳体之间通过所述弹性支撑件连接；所述壳体用于与待测物体固定连接；所述激光干涉仪用于产生参考光和测量光；所述测量光经光纤传输至所述壳体内部，出射至所述质量块表面；所述质量块表面用于反射所述测量光，形成反射光；所述激光干涉仪还用于接收所述反射光，并使所述反射光与所述参考光发生干涉，形成干涉光；所述激光干涉仪还用于将所述干涉光转换为干涉信号，并将其发送给所述加速度解算模块；所述加速度解算模块用于对接收到的所述干涉信号进行解算，获得所述待测物体的加速度值。
  2. 根据权利要求1所述的加速度计，其中，当所述待测物体具有加速度时，所述质量块能够产生相对于所述壳体的六自由度位移；其中，所述六自由度包括：分别沿X、Y、Z三个直角坐标轴方向的移动自由度，以及，分别绕X、Y、Z三个直角坐标轴的转动自由度。
  3. 根据权利要求2所述的加速度计，其中，所述弹性支撑件至少为一个；所述质量块为正六面体形状；所述质量块的每个面通过与该面对应的所述弹性支撑件与所述壳体的内壁连接。
  4. 根据权利要求1所述的加速度计，其中，所述质量块表面镀有激光反射膜。
  5. 根据权利要求2所述的加速度计，其中，所述激光干涉仪包括：激光源、干涉镜组和信号处理板；所述干涉镜组包括：偏振分光镜、第一四分之一波片、第二四分之一波片和反射镜；所述激光源产生的激光经所述偏振分光镜分为所述参考光和所述测量光；所述参考光通过所述第一四分之一波片后，再经所述反射镜反射后沿原光路返回；所述测量光通过所述第二四分之一波片后，经第一准直器进入所述光纤，并由所述光纤传输至所述壳体内部，经第二准直器出射至所述质量块表面；所述反射光经所述第二准直器进入所述光纤，沿原光路返回；所述干涉光经第三准直器进入所述信号处理板，由所述信号处理板转换为所述干涉信号后发送给所述加速度解算模块。
  6. 根据权利要求5所述的加速度计，其中，当所述质量块为正六面体形状时，所述测量光经所述第二准直器至少出射至所述质量块两两相邻的三个面。
  7. 根据权利要求5所述的加速度计，其中，所述干涉镜组有N个，其中，N>6；所述激光源产生的激光分别经N路光纤传输至每个所述干涉镜组，以形成N路所述干涉光；所述信号处理板还用于将所述N路所述干涉光转换为N路所述干涉信号后发送给所述加速度解算模块。
  8. 根据权利要求7所述的加速度计，其中，所述加速度解算模块采用以下方式对接收到的所述干涉信号进行解算，获得所述待测物体的加速度值：
    将N路所述干涉信号代入光路模型方程组，获得第一方程组：
    Figure PCTCN2022112213-appb-100001
    其中，V i为第i路所述干涉信号，i＝1,2,3...,N；X为所述质量块相对于坐标原点的六自由度位移，其中，所述坐标原点为无加速度输入时所述质量块的质心所在的位置；P i为与第i路所述干涉信号对应的所述第二准直器的位置参数，由预先标定获得；ε i为第i路所述干涉信号的噪声信号；F i(·)为第i路光路模型函数，该函数的输出量为第i路所述测量光与第i路所述参考光的光程差；
    采用最小二乘法对所述第一方程组进行求解，获得所述质量块相对于所述坐标原点的六自由度位移；
    计算所述质量块相对于所述坐标原点的六自由度位移与预先标定的刚度矩阵的乘积，获得所述待测物体的加速度值。
  9. 根据权利要求8所述的加速度计，其中，所述采用最小二乘法对所述第一方程组进行求解，获得所述质量块相对于所述坐标原点的六自由度位移，包括：
    S1：将所述第一方程组改写为V＝F(X)+e；其中，V＝[V 1,...,V N] T，为N路所述干涉信号；F(·)＝[F 1(·)，...，F N(·)]，为所述光路模型函数；e＝[ε 1,ε 2,...,ε n]，为N路所述干涉信号的噪声信号；X为所述质量块相对于所述坐标原点的六自由度位移；
    S2：利用预设的参数标称值计算变量X的迭代初值；
    S3：选取最小化目标函数
    Figure PCTCN2022112213-appb-100002
    根据以下迭代公式对变量X进行迭代求解：
    X k+1＝X k+[J T(X k)J(X k)] -1J T(X k)[V-F(X k)]
    其中，
    Figure PCTCN2022112213-appb-100003
    为F(X k)的雅可比矩阵；
    S4：给定误差预设值δ与最大迭代次数k max，若||X k+1-X k||≥δ且k<k max则回到S3继续迭代，若||X k+1-X k||<δ或k≥k max则结束迭代，得到接近真值的求解结果X k+1。
  10. 根据权利要求8所述的加速度计，其中，所述与第i路所述干涉信号对应的所述第二准直器的位置参数包括：该第二准直器的坐标，以及该第二准直器的出射激光方向向量；采用以下方式预先标定获得所述与第i路所述干涉信号对应的所述第二准直器的位置参数：
    记录M次不同加速度输入时各路干涉信号的数值，将记录的各路干涉信号的数值代入所述光路模型方程组，获得如下第二方程组，其中，M>5N/(N-6)；
    Figure PCTCN2022112213-appb-100004
    采用最小二乘法对所述第二方程组进行求解，获得所述与第i路所述干涉信号对应的所述第二准直器的位置参数。
  11. 根据权利要求10所述的加速度计，其中，所述采用最小二乘法对所述第二方程组进 行求解，获得所述与第i路所述干涉信号对应的所述第二准直器的位置参数，包括：
    S1：将所述第二方程组改写为V＝F(Y)+e；其中，V＝[V 1,...,V MN] T，为MN路所述干涉信号；F(·)＝[F 1(·)，...，F N(·)]，为所述光路模型函数；e＝[ε 1,ε 2,...,ε MN]，为N路所述干涉信号的噪声信号；
    Figure PCTCN2022112213-appb-100005
    为所述质量块相对于所述坐标原点的六自由度位移，以及，N路所述干涉信号对应的所述第二准直器的位置参数；
    S2：利用预设的参数标称值计算变量Y的迭代初值；
    S3：选取最小化目标函数
    Figure PCTCN2022112213-appb-100006
    根据以下迭代公式对变量Y进行迭代求解：
    Y k+1＝Y k+[J T(Y k)J(Y k)] -1J T(Y k)[V-F(Y k)]
    其中，
    Figure PCTCN2022112213-appb-100007
    为F(Y k)的雅可比矩阵；
    S4：给定误差预设值δ与最大迭代次数k max，若||Y k+1-Y k||≥δ且k<k max则回到S3继续迭代，若||Y k+1-Y k||<δ或k≥k max则结束迭代，得到接近真值的求解结果Y k+1。
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