WO2023201936A1 - Accéléromètre - Google Patents

Accéléromètre Download PDF

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Publication number
WO2023201936A1
WO2023201936A1 PCT/CN2022/112213 CN2022112213W WO2023201936A1 WO 2023201936 A1 WO2023201936 A1 WO 2023201936A1 CN 2022112213 W CN2022112213 W CN 2022112213W WO 2023201936 A1 WO2023201936 A1 WO 2023201936A1
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WO
WIPO (PCT)
Prior art keywords
mass block
interference
light
acceleration
collimator
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PCT/CN2022/112213
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English (en)
Chinese (zh)
Inventor
范玉娇
常密生
杨月舳
Original Assignee
北京华卓精科科技股份有限公司
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Publication of WO2023201936A1 publication Critical patent/WO2023201936A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/03—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses by using non-electrical means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/30—Nuclear fission reactors

Definitions

  • the present disclosure relates to the technical field of inertial detection instruments, and in particular to an accelerometer.
  • Accelerometers are widely used in inertial guidance, robot posture measurement, automobile inertial positioning and other occasions. Since the measured acceleration is directly used to calculate the object's position, attitude, velocity and other state quantities, its measurement accuracy has become one of the most important indicators for measuring the technical level of the accelerometer.
  • accelerometers in related technologies include acceleration measurement solutions such as measuring elastomer strain based on strain gauges, measuring stress based on piezoelectric ceramics, measuring inertial mass displacement based on the capacitance principle, and measuring inertial mass displacement based on the electromagnetic induction principle.
  • acceleration measurement solutions such as measuring elastomer strain based on strain gauges, measuring stress based on piezoelectric ceramics, measuring inertial mass displacement based on the capacitance principle, and measuring inertial mass displacement based on the electromagnetic induction principle.
  • piezoelectric sensor nonlinearity, capacitance nonlinearity, magnetic field nonlinearity and other characteristics there are non-negligible nonlinear errors in the above solutions, which limits the measurement accuracy of the accelerometer.
  • acceleration solution also directly affects the measurement results.
  • the accuracy of acceleration calculation in related technologies depends on the accuracy of the installation position of the detection unit in the accelerometer, and processing and installation errors are difficult to be accurately compensated.
  • the present disclosure proposes an accelerometer, which can effectively reduce the nonlinear errors existing in the related technologies and obtain more accurate acceleration measurement results.
  • An embodiment of the present disclosure provides an accelerometer, including: a laser interferometer, a meter head and an acceleration calculation module;
  • the meter head includes: a housing, a mass block and Elastic support; the mass block is arranged inside the housing, and the mass block and the housing are connected through the elastic support; the housing is used to be fixedly connected to the object to be measured;
  • the laser interferometer is used to generate reference light and measurement light; measurement light It is transmitted to the inside of the housing through the optical fiber and emitted to the surface of the mass block; the surface of the mass block is used to reflect the measurement light to form reflected light;
  • the laser interferometer is also used to receive the reflected light and interfere with the reference light to form interference light ;
  • the laser interferometer is also used to convert the interference light into an interference signal and send it to the acceleration calculation module;
  • the acceleration calculation module is used to calculate the received interference signal and obtain the acceleration value of the object to be measured.
  • Figure 1 is a schematic diagram of the system structure of an embodiment of the present disclosure.
  • This disclosure proposes an accelerometer based on laser interference redundant measurement, which is suitable for high-precision measurement of low-frequency acceleration.
  • the accelerometer uses a laser interferometer to redundantly measure the displacement of the mass block in the meter head, and solves the optical path model equations containing redundant information according to a specific solution algorithm to achieve multi-axis acceleration decoupling and high-precision solution , thereby solving the problem of non-linear errors in the measurement results of accelerometers based on laser interference displacement measurement in related technologies, which is beneficial to improving the accuracy and resolution of acceleration measurement.
  • an accelerometer as shown in Figure 1, including: a laser interferometer, a meter head and an acceleration calculation module; the meter head includes: a housing 1, a mass block 2 and an elastic support member 3; The mass block 2 is arranged inside the housing 1, and the mass block 2 and the housing 1 are connected through an elastic support 3; the housing 1 is used to be fixedly connected to the object to be measured.
  • the housing 1 can Rigidly fixed on the surface of the object to be measured; the laser interferometer is used to generate reference light and measurement light; the measurement light is transmitted to the inside of the housing 1 through the optical fiber and emitted to the surface of the mass block 2; the surface of the mass block 2 is used to reflect the measurement light to form a reflection Light; the laser interferometer is also used to receive reflected light and interfere with the reference light to form interference light; the laser interferometer is also used to convert the interference light into an interference signal and send it to the acceleration calculation module; The acceleration calculation module is used to calculate the received interference signal and obtain the acceleration value of the object to be measured.
  • the mass 2 in a connection method between the housing 1, the mass 2, the elastic support 3 and the object to be measured, when the object to be measured has acceleration, the mass 2 can produce a six-dimensional rotation relative to the housing 1.
  • Degrees of freedom displacement; among them, the six degrees of freedom include: the movement degrees of freedom along the three rectangular coordinate axes of X, Y, and Z, and the rotational degrees of freedom around the three rectangular coordinate axes of X, Y, and Z respectively.
  • the accelerometer provided in this embodiment is a six-dimensional accelerometer that can realize simultaneous measurement of three-axis acceleration and three-axis angular acceleration.
  • the mass block 2 is in the shape of a regular hexahedron; each surface of the mass block 2 is connected to the inner wall of the housing 1 through the elastic support member 3 corresponding to that surface.
  • the mass block 2 can also be in other shapes such as a rectangular parallelepiped, a sphere, an ellipsoid, etc., which is not specifically limited in this embodiment.
  • the elastic support member 3 corresponds to each side of the mass block 2, and each side of the mass block 2 passes through an elastic support member. 3 is connected to the inner wall of the housing 1.
  • the mass 2 can produce a six-degree-of-freedom displacement relative to the housing 1. This displacement is detected by a laser interferometer. Afterwards, the acceleration value corresponding to the displacement can be calculated through the acceleration calculation module.
  • the mass block 2 can be used to carry the inertial force caused by the acceleration to be measured, thereby producing a tendency of six degrees of freedom displacement relative to the housing 1.
  • the mass block 2 is also used to reflect the force generated by the laser interferometer. of measuring light.
  • the surface of the mass block 2 is coated with a laser reflective film.
  • the elastic support 3 can be used to provide a restoring force that makes the mass 2 tend to return to the force equilibrium position when the mass 2 and the housing 1 are relatively displaced or the mass 2 deviates from the force equilibrium position.
  • the laser interferometer includes: a laser source, an interference lens group and a signal processing board;
  • the interference lens group includes: a polarizing beam splitter 4, a first quarter-wave plate 5, a second fourth Quarter-wave plate 6 and reflector 7;
  • the laser light generated by the laser source is divided into reference light and measurement light by polarizing beam splitter 4; after the reference light passes through the first quarter-wave plate 5, it is reflected by the reflector 7 Return along the original optical path; after the measurement light passes through the second quarter-wave plate 6, it enters the optical fiber 9 through the first collimator 8, is transmitted to the inside of the housing 1 through the optical fiber 9, and exits through the second collimator 10.
  • the reflected light enters the optical fiber 9 through the second collimator 10 and returns along the original optical path; the interference light enters the signal processing board through the third collimator 11, and is converted into an interference signal by the signal processing board and sent to the acceleration solution calculation module.
  • the mass block 2 is set in the shape of a regular hexahedron.
  • the measurement light generated by the laser interferometer is emitted through the second collimator 10 to at least two adjacent three surfaces of the mass block 2, so that more effective interference signals can be obtained later.
  • N interference lens groups where N>6; the laser generated by the laser source is transmitted to each interference lens group through N optical fibers to form N channels of interference light; the signal processing board is also used to N channels of interference light are converted into N channels of interference signals and then sent to the acceleration calculation module.
  • Figure 1 shows the situation where nine channels of measurement light are emitted to the surface of mass block 2.
  • the signal processing board can receive nine channels of interference light, and then convert it into nine channels of interference signals for the acceleration calculation module to solve. Calculate.
  • the laser light generated by the laser source is transmitted to N interference lens groups through N (N>6) optical fibers, and is divided into N channels of reference light and N channels of measurement through the polarizing beam splitter 4 Light; after each reference light passes through the first quarter-wave plate 5, it is reflected by the reflector 7 and then returns along the original optical path. It passes through the first quarter-wave plate 5 twice so that the polarization direction of the reference light is deflected by 90°. ; After each measurement light passes through the second quarter-wave plate 6, it enters the optical fiber 9 connected to the meter head through the first collimator 8, and passes through the second collimator 10 installed on the meter head housing 1.
  • N beams of interference light are formed, which are received by the signal processing board; after receiving the N beams of interference light, the signal processing board obtains N-channel interference signal digital quantities through photoelectric conversion and analog-to-digital conversion, which includes six freedoms of the coupled mass block relative to the shell. degree displacement information, that is, it includes coupled six-dimensional acceleration information to be measured.
  • the acceleration solution module After receiving the N-channel interference signal digital quantity generated by the signal processing board, the acceleration solution module processes it according to the corresponding acceleration decoupling algorithm to obtain the six-dimensional acceleration value.
  • the acceleration calculation module uses the following method to calculate the received interference signal to obtain the acceleration value of the object to be measured.
  • X is the six degrees of freedom displacement of the mass block relative to the coordinate origin, where the coordinate origin is the mass block without acceleration input The position of the center of mass;
  • P i is the position parameter of the second collimator corresponding to the i-th interference signal, obtained by pre-calibration;
  • ⁇ i is the noise signal of the i-th interference signal;
  • F i ( ⁇ ) is the i-th interference signal
  • the optical path model function, the output of this function is the optical path difference between the i-th measurement light and the i-th reference light.
  • each geometric quantity in this embodiment takes the housing 1 as the reference system, and the position of the center of mass of the mass block 2 when there is no acceleration input is the coordinate origin O;
  • X [u, v, w, ⁇ x , ⁇ y , ⁇ z ] T is the six-degree-of-freedom displacement of the mass block 2 relative to the coordinate origin O (the quantity to be solved);
  • P i [x i ,y i ,z i ,l i ] T is the relationship with the i-th
  • the position parameter (to be quantified) of the second collimator corresponding to the path interference signal may include: the coordinates of the second collimator, and the emitting laser direction vector of the second collimator.
  • Step 2 Use the least squares method to solve the first set of equations to obtain the six-degree-of-freedom displacement of the mass block relative to the coordinate origin.
  • the position parameter Pi of the second collimator obtained by self - calibration is substituted into the above-mentioned first system of equations, and a nonlinear system of equations solving algorithm based on least squares (i.e., the least squares method) is used to solve the above-mentioned first system of equations.
  • the system of equations is solved by minimizing
  • Step 3 Calculate the product of the six-degree-of-freedom displacement of the mass block relative to the coordinate origin and the pre-calibrated stiffness matrix to obtain the acceleration value of the object to be measured.
  • the least squares method is used to solve the first set of equations to obtain the six-degree-of-freedom displacement of the mass relative to the coordinate origin, which includes the following steps S1 to S4.
  • X k+1 X k +[J T (X k )J(X k )] -1 J T (X k )[VF(X k )]
  • the position parameters of the second collimator corresponding to the i-th interference signal include: the coordinates of the second collimator, and the outgoing laser direction vector of the second collimator; pre-calibrated in the following manner Obtain the position parameter of the second collimator corresponding to the i-th interference signal.
  • Step 1 Record the values of each interference signal when M times of different acceleration inputs are entered. Substitute the recorded values of each interference signal into the optical path model equations to obtain the following second set of equations, where M>5N/(N-6) , so that the number of equations in the system of equations is greater than the number of unknowns.
  • each parameter is the same as the meaning of each parameter in the above-mentioned first set of equations.
  • this second set of equations considering the six-degree-of-freedom displacement X of the mass block relative to the coordinate origin and the second collimator position parameter Pi as unknown quantities, a total of MN equations are included, (6M+5N) Unknown.
  • Step 2 Use the least squares method to solve the second set of equations to obtain the position parameters of the second collimator corresponding to the i-th interference signal.
  • the least squares method is used to solve the above second set of equations, that is, to minimize
  • the solution of the collimator parameter Pi when reaching the target is obtained, which is used as the self-calibration result to complete the self-calibration.
  • the least squares method is used to solve the second set of equations to obtain the position parameters of the second collimator corresponding to the i-th interference signal, which includes the following steps S1 to S4.
  • V F(Y)+e
  • F( ⁇ ) [F 1 ( ⁇ ),...,F N ( ⁇ )]
  • e [ ⁇ 1 , ⁇ 2 ,..., ⁇ MN ]
  • the noise signal of the N-channel interference signal is the six-degree-of-freedom displacement of the mass block relative to the coordinate origin, and the position parameter of the second collimator corresponding to the N-channel interference signal, which is the six-degree-of-freedom displacement of the M group of mass blocks relative to the coordinate origin and N sets of second collimator position parameters.
  • Y k+1 Y k +[J T (Y k )J(Y k )] -1 J T (Y k )[VF(Y k )]
  • An accelerometer provided by an embodiment of the present disclosure uses a laser interferometer to generate reference light and measurement light.
  • the measurement light is transmitted to the inside of the casing of the meter head through an optical fiber, emitted to the surface of the mass block, and then reflected by the surface of the mass block. It is received by the laser interferometer and interferes with the reference light to form interference light, which is then converted into an interference signal and the acceleration calculation module calculates the acceleration of the object to be measured. That is, the embodiment of the present disclosure uses a laser interferometer as the detection unit.
  • embodiments of the present disclosure Compared with accelerometers in the related art that use strain gauges, piezoelectric sensors, capacitive sensors, and electromagnetic induction sensors as detection units, embodiments of the present disclosure have better linearity, and therefore can effectively reduce nonlinear errors caused by the detection principle. , thereby improving the accuracy of acceleration measurement to obtain more accurate acceleration measurement results.
  • the accelerometer provided by the embodiment of the present disclosure is a new type of precision six-dimensional accelerometer, which has the advantages of high accuracy, large range, etc.; the accelerometer as a whole consists of a laser interferometer that can measure N (N>6) displacements, It consists of a meter head and an acceleration calculation module.
  • the meter head consists of a shell, an elastic support and a mass block.
  • the laser interferometer consists of a laser source, an interference lens group and a signal processing board. The measurement light of the laser interferometer enters through the collimator.
  • the head after reflection at different positions on the surface of the mass block, interferes with the reference light; when acceleration is input, the laser interferometer measures N interference signals containing coupled and redundant six-dimensional acceleration information, which are input to the acceleration solution
  • the acceleration value of each axis is obtained according to the acceleration decoupling algorithm and the detection unit parameter self-calibration algorithm.
  • the present disclosure can be applied to six-dimensional acceleration precision measurement.
  • the present disclosure Compared with six-dimensional accelerometers in related technologies, the present disclosure also has the following advantages: (1) Compared with six-dimensional accelerometers based on strain gauges, piezoelectric sensors, capacitive sensors, and electromagnetic induction sensors, the present disclosure adopts a linear accelerometer. A laser interferometer with better accuracy is used as the detection unit, which reduces the nonlinear error caused by the detection principle and improves the accuracy of acceleration measurement; (2) This disclosure adopts the principle of multi-channel signal redundancy measurement, by increasing the number of signal channels N, reducing the accidental measurement errors caused by signal noise and improving the accuracy of acceleration measurement; (3) This disclosure adopts the collimator parameter self-calibration method, which avoids the processing and installation errors of the manually calibrated detection unit, and improves the accuracy of the acceleration measurement. interference signal model accuracy, thereby improving acceleration measurement accuracy.
  • the disclosed devices and methods can be implemented in other ways.
  • the device embodiments described above are only illustrative.
  • the division of units is only a logical function division. In actual implementation, there may be other division methods.
  • multiple units or components may be combined or integrated. to another system, or some features can be ignored, or not implemented.
  • a unit described as a separate component may or may not be physically separate.
  • a component shown as a unit may or may not be a physical unit, that is, it may be located in one place, or it may be distributed to multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the present disclosure.
  • each functional unit in various embodiments of the present disclosure may be integrated into one processing unit, or each processing unit may exist physically alone, or two or more processing units may be integrated into one unit.
  • the above integrated units can be implemented in the form of hardware or software functional units.
  • Integrated units may be stored in a computer-readable storage medium if they are implemented in the form of software functional units and sold or used as independent products.
  • the technical solution of the present disclosure is essentially or contributes to the relevant technology, or all or part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a storage medium , including several instructions to cause an electronic device (which may be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods of various embodiments of the present disclosure.
  • the aforementioned storage media include: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), magnetic disk or optical disk and other media that can store program code. .

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un accéléromètre, se rapportant au domaine technique des instruments de mesure d'inertie, et comprenant : un interféromètre laser, une tête d'instrument et un module de résolution d'accélération. La tête d'instrument comprend : un logement (1), un bloc de masse (2) et un élément de support élastique (3); le bloc de masse (2) est disposé à l'intérieur du logement (1), et le bloc de masse (2) est relié au logement (1) au moyen de l'élément de support élastique (3); le logement (1) est relié de manière fixe à un objet à tester; l'interféromètre laser est utilisé pour générer une lumière de référence et une lumière de mesure; la lumière de mesure est transmise à l'intérieur du logement (1) au moyen d'une fibre optique (9), et est émise vers la surface du bloc de masse (2); la surface du bloc de masse (2) est utilisée pour réfléchir la lumière de mesure pour former une lumière réfléchie; l'interféromètre laser est en outre utilisé pour recevoir la lumière réfléchie et amener la lumière réfléchie à interférer avec la lumière de référence pour former une lumière d'interférence; l'interféromètre laser est en outre utilisé pour convertir la lumière d'interférence en un signal d'interférence et envoyer le signal d'interférence au module de résolution d'accélération pour une résolution de façon à obtenir une valeur d'accélération de l'objet.
PCT/CN2022/112213 2022-04-18 2022-08-12 Accéléromètre WO2023201936A1 (fr)

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CN202210402846.2A CN114966105B (zh) 2022-04-18 2022-04-18 一种加速度计
CN202210402846.2 2022-04-18

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US4893930A (en) * 1988-01-25 1990-01-16 The United States Of America As Represented By The Secretary Of The Navy Multiple axis, fiber optic interferometric seismic sensor
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