WO2023143124A1 - Électrode en graphite, dispositif de production de creuset et procédé de production de creuset - Google Patents

Électrode en graphite, dispositif de production de creuset et procédé de production de creuset Download PDF

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Publication number
WO2023143124A1
WO2023143124A1 PCT/CN2023/072087 CN2023072087W WO2023143124A1 WO 2023143124 A1 WO2023143124 A1 WO 2023143124A1 CN 2023072087 W CN2023072087 W CN 2023072087W WO 2023143124 A1 WO2023143124 A1 WO 2023143124A1
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WIPO (PCT)
Prior art keywords
arc
graphite
graphite electrode
crucible
graphite electrodes
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Application number
PCT/CN2023/072087
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English (en)
Chinese (zh)
Inventor
陈永康
李侨
郭华盈
刘阳
任伟康
张桥清
晏美仁
梅富然
李济和
段慧芳
Original Assignee
隆基绿能科技股份有限公司
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Publication date
Priority claimed from CN202220234261.XU external-priority patent/CN217378096U/zh
Priority claimed from CN202210104184.0A external-priority patent/CN116567876A/zh
Application filed by 隆基绿能科技股份有限公司 filed Critical 隆基绿能科技股份有限公司
Publication of WO2023143124A1 publication Critical patent/WO2023143124A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt

Definitions

  • the present application relates to the technical field of crystal pulling crucible preparation, in particular to a graphite electrode, a crucible production device and a crucible production method.
  • the crucible for pulling single crystal silicon is usually prepared by electric arc method. Specifically, the sand material is melted by generating a high-temperature electric arc between the graphite electrodes used in the production crucible. The core temperature of the electric arc often exceeds 5000°C. Due to the high temperature, the graphite electrode is easy to splash during the process of melting the sand material. The splashed graphite electrode will cause defects such as black spots, pits, and bubbles on the inner wall of the crucible, resulting in a decrease in the quality of the crucible or even discarding it.
  • the way to reduce the splashing of graphite electrodes is to directly remove the parts that are prone to splashing in the cylindrical graphite electrodes.
  • the application provides a graphite electrode, a crucible production device and a crucible production method, aiming to solve the problem of graphite electrode splashing during the process of melting sand.
  • the first aspect of the present application provides a graphite electrode, comprising:
  • a columnar body, a circular frustum connected to the end of the cylindrical main body, and a ball-arc-shaped end smoothly connected to the circular truncated end, the columnar body, the circular frustum, and the spherical-arc-shaped end are along the graphite electrode
  • the axis direction of the column is connected in turn; the diameter of the columnar body is ⁇ 1 ;
  • the arc-shaped end is formed by connecting at least two arc-shaped bodies; the frustum is inscribed with the first arc-shaped body close to the frustum, and the arc-shaped adjacent bodies are inscribed.
  • the circular frustum and the arc-shaped end of the ball are connected smoothly, and there is no protruding part at the joint between the two, which eliminates the concentration point of thermal stress, making the thermal stress more evenly distributed at the joint between the two, and then Can reduce the probability of splashing.
  • the arc-shaped ends are very smooth without protruding parts, which makes the distribution of thermal stress at the ends of the graphite electrodes more uniform, further reducing the probability of splashing.
  • the round table is located between the cylindrical main body and the spherical arc-shaped end, and the round table plays a good smooth transition between the cylindrical main body and the spherical arc-shaped end, reducing the concentration of thermal stress and further reducing the probability of splashing.
  • the arc-shaped end is formed by connecting at least two arc-shaped bodies, the circular table is inscribed with the first arc-shaped body close to the circular table, and the adjacent arc-shaped bodies are inscribed, so that the arc-shaped end is more smooth, further The concentrated point of thermal stress is eliminated, so that the thermal stress is distributed more evenly on the arc-shaped end of the ball, thereby reducing the probability of splashing.
  • the diameter of the first spherical arc is
  • the diameter of the second arc-shaped body away from the circular frustum is
  • the first spherical arc is symmetrical to the axis of the graphite electrode, and/or, the second spherical arc is symmetrical to the axis of the graphite electrode.
  • the second aspect of the present application provides a crucible production device, comprising: a set of graphite electrodes; each graphite electrode in a set is any one of the aforementioned graphite electrodes.
  • the angle between the two opposite busbars in the circular platform is ⁇ ;
  • the included angle between the columnar bodies of the two adjacent graphite electrodes is ⁇ , 2° ⁇ - ⁇ 5°.
  • the graphite electrode further includes: a connection part located at the end of the columnar body away from the circular platform, the connection part is a cylinder, and the diameter of the connection part is The length of the connecting portion is d 1 ,
  • L is the distance between the columnar bodies of the adjacent graphite electrodes near one end of the connecting part when the spherical arc-shaped ends of the adjacent graphite electrodes are in contact
  • D is a single graphite electrode.
  • the total length of the electrode; the direction of the length is parallel to the axis of the graphite electrode.
  • the distances between the columnar bodies of adjacent graphite electrodes at the end away from the circular frustum are equal.
  • the total number of graphite electrodes in the set of graphite electrodes is an integer multiple of 3.
  • the present application provides a crucible production device and a crucible production method, aiming to solve the problem that the graphite electrode in the crucible production device splashes during the process of melting sand.
  • the first aspect of the present application provides a crucible production device, including: a set of graphite electrodes; each of the graphite electrodes includes: a columnar body, a round platform connected to the end of the columnar body, and a round platform that is smooth with the round platform The connected arc-shaped ends, the columnar body, the truncated cone and the arc-shaped ends are sequentially connected along the axial direction of the graphite electrode;
  • the diameter of the columnar body is X is the maximum outer diameter value of the crucible produced, and U is the voltage value U of the three-phase electric voltage U that a group of described graphite electrodes are added in the process of producing the described crucible; J is the single described graphite electrode when producing the described crucible.
  • the average current density on the columnar body In the crucible process, the average current density on the columnar body; n is the quotient obtained by dividing the total number of graphite electrodes in a group of graphite electrodes by 3; the unit of X is inches, and the unit of U is v, The unit of is consistent with the unit corresponding to the area unit in the unit of J.
  • the circular frustum and the arc-shaped end of the ball are connected smoothly, and there is no protruding part at the joint between the two, which eliminates the concentration point of thermal stress, making the thermal stress more evenly distributed at the joint between the two, and then Can reduce the probability of splashing.
  • the arc-shaped ends are very smooth without protruding parts, which makes the distribution of thermal stress at the ends of the graphite electrodes more uniform, further reducing the probability of splashing.
  • the round table is located between the cylindrical main body and the spherical arc-shaped end, and the round table plays a good smooth transition between the cylindrical main body and the spherical arc-shaped end, reducing the concentration of thermal stress and further reducing the probability of splashing.
  • the diameter of the cylindrical body is within the above range, it is equivalent to setting the best power range and the best current density for the graphite electrode, the diameter of the columnar body
  • the thermal stress that the graphite electrode can carry during the production of the crucible is within the thermal stress load range of the graphite electrode , which can effectively control the graphite electrode from falling and splashing, and at the same time ensure sufficient current density for successful arcing, with strong adaptability and wide applicability.
  • the spherical arc-shaped end is formed by connecting at least two spherical arc bodies; Inscribed between arcs.
  • the angle between the two opposite busbars in the circular platform is ⁇ ;
  • the included angle between the columnar bodies of the two adjacent graphite electrodes is ⁇ , 2° ⁇ - ⁇ 5°.
  • the diameter of the first spherical arc is ⁇ 3 ,
  • the diameter of the second arc-shaped body away from the circular frustum is
  • the first spherical arc is symmetrical to the axis of the graphite electrode, and/or, the second spherical arc is symmetrical to the axis of the graphite electrode.
  • each of the graphite electrodes further includes: a connecting portion located at the end of the columnar body away from the circular platform, the connecting portion is a cylinder, and the diameter of the connecting portion is The length of the connecting portion is d 1 ,
  • L is the distance between the columnar bodies of the adjacent graphite electrodes near one end of the connecting part when the spherical arc-shaped ends of the adjacent graphite electrodes are in contact
  • D is a single graphite electrode.
  • the total length of the electrode; the direction of the length is parallel to the axis of the graphite electrode.
  • the distances between the columnar bodies of adjacent graphite electrodes at the end away from the circular frustum are equal.
  • the second aspect of the present application provides a method for producing a crucible, using a set of graphite electrodes in any of the aforementioned crucible production devices to produce a crucible by arcing.
  • Fig. 1 shows the structural representation of a kind of graphite electrode in the embodiment of the application
  • Fig. 2 shows a schematic diagram of dimensioning of a graphite electrode in the embodiment of the present application
  • Fig. 3 shows a schematic diagram of a partial structure of a crucible production device in an embodiment of the present application.
  • FIG. 1 shows a schematic structural view of a graphite electrode in an embodiment of the present application.
  • the inventor found that the reason why the graphite electrode still cannot prevent the splashing of the graphite electrode in the process of melting the sand is that there are still relatively protruding parts in the graphite electrode, and the relatively protruding parts It will become a concentration point of thermal stress, making the distribution of thermal stress uneven, and the uneven distribution of thermal stress, especially the concentrated position of thermal stress distribution, will easily splash.
  • the graphite electrode includes: a columnar main body 1, a round platform 2 connected to the end of the columnar main body 1, and a spherical arc-shaped end 3 smoothly connected to the round platform 2.
  • the round platform 2 and the arc-shaped end 3 are connected smoothly, and there is no protruding part at the connection between the two, and the protruding part is easy to become the concentration point of thermal stress, which is equivalent to eliminating the concentration point of thermal stress, so that the thermal stress is on both sides
  • the joints of the latter are more evenly distributed, which in turn reduces the probability of splashing.
  • the spherical arc-shaped end 3 is very smooth and has no protruding parts, so that the thermal stress is distributed more evenly at the end of the graphite electrode, further reducing the probability of splashing.
  • the dotted line Q shows the axis direction of the graphite electrode
  • the columnar body 1 , the truncated cone 2 and the arc-shaped end 3 are sequentially connected along the axis Q direction of the graphite electrode.
  • the round table 2 is located between the columnar body 1 and the arc-shaped end 3, and the round table 2 plays a good smooth transition between the columnar body 1 and the arc-shaped end 3, reducing the concentration of thermal stress and further reducing splashing The probability.
  • the arc-shaped end portion 3 is formed by connecting at least two arc-shaped bodies, and the round table 2 is inscribed with the first arc-shaped body 31 close to the round table 2, and the adjacent balls
  • the arcs are inscribed, and the arc-shaped end 3 is more rounded, which further eliminates the concentration point of thermal stress, making the thermal stress more evenly distributed on the arc-shaped end 3, thereby reducing the possibility of splashing. Rate.
  • the diameter of the columnar body 1 is optional, The diameter of the cylindrical body is Within this range, it can adapt to the melting of larger crucibles.
  • the above-mentioned crucible may be a quartz crucible or the like, which is not specifically limited in this embodiment of the present application.
  • the diameter of the first spherical arc body 31 is The diameter of the first spherical arc body 31 is within this range, when the spherical arc-shaped ends 3 of adjacent graphite electrodes are in contact, the contact area is more suitable, the current density is more suitable, the arc starting is more stable, the arc point position is not too far behind, and it is not easy to splash and drop. At the same time, the heating rate will not be too fast, the local stress is small, and the probability of splashing and falling blocks is reduced.
  • the diameter of the first spherical arc body 31 if less than When the spherical arc-shaped ends 3 of adjacent graphite electrodes are in contact with each other, the contact area is small, the current density is high, the temperature rises quickly, the local stress is too large, and the probability of splashing and block loss increases.
  • the diameter of the first spherical arc body 31 If greater than When the spherical arc-shaped ends 3 of adjacent graphite electrodes are in contact with each other, the contact area is large, the current density is low, the arc starting is unstable, and the arc starting point is too far behind, which is also easy to cause the end of the graphite electrode Spills or falls easily.
  • the diameter of the first spherical arc body 31 is In this case, when the spherical arc-shaped ends 3 of adjacent graphite electrodes are in contact, the contact area is more suitable, the current density is more suitable, the arc starting is more stable, the position of the arc point is suitable, and it is less likely to splash and fall off. At the same time, the heating rate will not be too fast, the local stress will be smaller, and the probability of splashing and falling blocks will be further reduced.
  • the diameter of the second arc-shaped body 32 away from the round platform 2 is The diameter of the second spherical arc body 32 within this range, when the spherical arc-shaped ends 3 of adjacent graphite electrodes are in contact, the contact area is more suitable, the current density is more suitable, the arc starting is more stable, the arc point position is not too far behind, and it is not easy to splash and drop. piece.
  • the diameter of the second spherical arc body 32 is if less than or greater than Both will cause the spherical arc-shaped ends 3 of adjacent graphite electrodes to be in contact with each other, and the starting point of the arc is too far behind, which will easily cause the ends of the graphite electrodes to splash or fall off easily.
  • the arc-shaped end portion 3 is formed by connecting two arc-shaped bodies, so that not only the arc-shaped end portion 3 It is relatively smooth, has few concentrated points of thermal stress, and the distribution of thermal stress on the spherical arc-shaped end 3 is relatively uniform, and the probability of splashing is small.
  • the processing complexity of the spherical arc-shaped end 3 is also relatively small, and it is easy to realize mass production .
  • the diameter of the second arc-shaped body 32 away from the round platform 2 is In this case, when the spherical arc-shaped ends 3 of adjacent graphite electrodes are in contact, the contact area is more suitable, the current density is more suitable, the arc starting is more stable, the arc point position is more suitable, and it is not easy to splash and fall off.
  • Fig. 3 shows a schematic diagram of a partial structure of a crucible production device in an embodiment of the present application.
  • the first spherical arc body 31 is symmetrical about the axis Q of the graphite electrode, and/or, the second spherical arc body 32 is symmetrical about the axis Q of the graphite electrode, symmetrical
  • the thermal stress is more evenly distributed on the first spherical arc body 31 and the second spherical arc body 32, the probability of splashing and falling blocks is further reduced, and processing is facilitated.
  • the embodiment of the present application also provides a crucible production device, the crucible production device comprises: a set of graphite electrodes; each graphite electrode in a set is any one of the aforementioned graphite electrodes.
  • the total number of graphite electrodes may be an integer multiple of 3.
  • a set of graphite electrodes may have 3 graphite electrodes.
  • a group of graphite electrodes may have 6 graphite electrodes, which is not specifically limited in this embodiment of the present application.
  • the value range can be: X is the maximum outer diameter of the crucible produced, and U is the voltage value U of the three-phase electricity applied by a group of graphite electrodes during the production of the crucible. J is the average current density on the columnar body 1 during the production of the crucible for a single graphite electrode. n is the quotient obtained by dividing the total number of graphite electrodes in a group of graphite electrodes by 3.
  • the unit of X can be inches, the unit of U can be v, and the voltage value U of the three-phase electricity can usually be 380v or 410v.
  • the units of are determined by the units corresponding to the area units in the units of J, or, The unit of is consistent with the unit corresponding to the area unit in the unit of J. For example, if the unit of J is ampere per square meter, then, The unit of J is meter, if the unit of J is ampere per square minute m, then, The unit of is decimeter, if the unit of J is ampere per square centimeter, then, The unit of is centimeter, if the unit of J is ampere per square millimeter, then, The unit is mm.
  • the calculation formula of the current I carried by a single graphite electrode is formula 2:
  • the calculation formula of the average current density J on the columnar body 1 of a single graphite electrode is Equation 3: Formula 1, Formula 2, Formula 3, and the three formulas are combined to obtain the diameter of the columnar body 1 of a single graphite electrode when the total number of graphite electrodes in a group of graphite electrodes is 3n
  • Graphite electrode splashes or falls off, mainly because the thermal stress of the graphite electrode exceeds the maximum limit of the thermal stress it can withstand.
  • the diameter of the cylindrical body is Within the above range, it is equivalent to setting the best power range and the best current density for the graphite electrode, and the diameter of the columnar body 1
  • the thermal stress that the graphite electrode can carry during the production of the crucible is within the thermal stress load range of the graphite electrode , which can effectively control the graphite electrode from falling and splashing, and at the same time ensure sufficient current density for successful arcing, with strong adaptability and wide applicability.
  • the average current density on the columnar body 1 is J, 50A/cm 2 ⁇ J ⁇ 100A/cm 2 .
  • the temperature rise rate is appropriate, the calorific value will not be too large, and the thermal stress of the spherical arc-shaped end 3 of the graphite electrode will not be too large, which can reduce the probability of splashing off blocks, and the current density is more appropriate. It is easy to start the arc successfully and the arc is stable.
  • the current density is less than 50A/ cm2 , it will be difficult to start the arc successfully, and the arc will be broken frequently after the arc is started successfully, which will not only affect the normal production, but also cause the graphite electrode to fail frequently.
  • the arc-shaped end 3 is easy to splash or fall off. If the current density is J greater than 100A/cm 2 will lead to As a result, when the arc is started, the graphite electrode heats up quickly and generates a lot of heat. The thermal stress of the spherical arc-shaped end 3 of the graphite electrode is too large, and it is easy to splash or fall off.
  • the heating rate of the graphite electrode is more suitable when arcing, the calorific value is small, and the thermal stress of the spherical arc-shaped end 3 of the graphite electrode is small, which can greatly reduce the probability of splashing off blocks, and the current density is more suitable. It is easier to start the arc successfully and the arc is stable.
  • the diameter of the columnar body 1 It is 66.3mm.
  • the thermal stress of the spherical arc-shaped end 3 of the graphite electrode is relatively appropriate, which can reduce the probability of splashing off blocks, and the current density is relatively appropriate, which is easy to successfully start the arc, and the arc start is stable.
  • Table 1 Different crucible sizes when the total number of graphite electrodes in a set of graphite electrodes is 3
  • the diameter of the columnar main body 1 is It is 42.6mm; when the crucible production device melts a 36-inch quartz crucible, the diameter of the columnar body 1 It is 46.9mm.
  • the thermal stress of the spherical arc-shaped end 3 of the graphite electrode is relatively appropriate, which can reduce the probability of splashing off blocks, and the current density is relatively appropriate, which is easy to successfully start the arc, and the arc start is stable.
  • Table 2 When the total number of graphite electrodes in a group of graphite electrodes is 6, different crucible sizes and corresponding diameters of the columnar body 1 value table for
  • the angle between two opposite busbars in the circular platform 2 is ⁇ , as shown in FIG. 3 .
  • the included angle between the columnar bodies 1 of the two adjacent graphite electrodes is ⁇ , 2° ⁇ - ⁇ 5°. If the difference between ⁇ and ⁇ is within this range, it can not only ensure that the spherical arc-shaped end 3 of the graphite electrode is always in contact first, which is easy to start the arc, but also can avoid the excessive length of the round table 2 and the excessive turning amount. waste.
  • the graphite electrodes also include: a connecting part 4 located at the end of the columnar body 1 away from the round table 2, the connecting part 4 is a cylinder, and the diameter of the connecting part 4 is The length of the connecting portion is d 1 , and the connecting portion 4 is usually threaded, and the connecting portion 4 passes through a graphite adapter (not shown in the accompanying drawings) and a copper electrode (not shown in the accompanying drawings) on the main frame (not shown in the accompanying drawings). not shown in ), and the copper electrode conducts or provides voltage for the graphite electrode.
  • L is the distance between the columnar bodies 1 of adjacent graphite electrodes near the end of the connecting portion 4 when the spherical arc-shaped ends 3 of adjacent graphite electrodes are in contact
  • D is the total distance of a single graphite electrode. Length, the direction of the length is parallel to the axis Q of the graphite electrode. The determined ⁇ can not only ensure that the graphite electrode is used The arc-shaped end portion 3 always contacts first when using, which is easy to successfully start the arc, and can avoid the excessive length of the round table 2 and the waste caused by excessive turning amount.
  • the distances between the columnar bodies of adjacent graphite electrodes at the end away from the conical table are equal, that is to say, whether it is the spherical arc-shaped ends of adjacent graphite electrodes Whether they are in contact or not, at the same time, in this group of graphite electrodes, the distance between the columnar bodies of adjacent graphite electrodes at the end away from the round platform is equal, and then the sand material at each position of the crucible during the production process of the crucible All are heated relatively uniformly, and the formed crucible has uniform texture and good crucible quality.
  • a group of graphite electrodes includes: No. 1 graphite electrode in the middle, No. 2 graphite electrode on the first side of No. 1 graphite electrode, and No. 1 graphite electrode
  • the No. 3 graphite electrode on the second side of the graphite electrode is that the No. 2 graphite electrode is adjacent to the No. 1 graphite electrode, and the No. 1 graphite electrode is adjacent to the No. 3 graphite electrode.
  • the first side and the second side may be oppositely located.
  • the distance between the columnar body of the No. graphite electrode and the columnar body of the No. 3 graphite electrode is equal to the distance away from the end of the circular platform.
  • the embodiment of the present application also provides a crucible production method, which mainly includes: using a set of graphite electrodes in any one of the aforementioned crucible production devices to produce a crucible by arcing.
  • a crucible production method which mainly includes: using a set of graphite electrodes in any one of the aforementioned crucible production devices to produce a crucible by arcing.
  • the above-mentioned crucible production method and the aforementioned crucible production device can achieve the same or similar beneficial effects, the relevant content of the two can be referred to each other, and in order to avoid repetition, it will not be repeated here.
  • the methods of the above embodiments can be implemented by means of software plus a necessary general-purpose hardware platform, and of course also by hardware, but in many cases the former is better implementation.
  • the technical solution of the present application can be embodied in the form of a software product in essence or the part that contributes to the prior art, and the computer software product is stored in a storage medium (such as ROM/RAM, disk, CD) contains several instructions to enable a terminal (which may be a mobile phone, a computer, a server, an air conditioner, or a network device, etc.) to execute the methods described in various embodiments of the present application.
  • a terminal which may be a mobile phone, a computer, a server, an air conditioner, or a network device, etc.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Discharge Heating (AREA)

Abstract

La présente demande se rapporte au domaine technique de la préparation de creusets à tirage de cristaux. La présente demande concerne une électrode en graphite, un dispositif de production de creuset et un procédé de production de creuset. L'électrode en graphite comprend : un corps cylindrique, un cône tronqué circulaire relié à une partie d'extrémité du corps cylindrique, et une partie d'extrémité en forme d'arc sphérique reliée de manière fluide au cône tronqué circulaire. Le corps cylindrique, le cône tronqué circulaire et la partie d'extrémité en forme d'arc sphérique sont reliés séquentiellement dans la direction d'axe de l'électrode en graphite. La partie d'extrémité en forme d'arc sphérique est formée en reliant mutuellement au moins deux corps d'arc sphérique ; le cône tronqué circulaire et le premier corps d'arc sphérique à proximité du cône tronqué circulaire sont tangents intérieurement, et les corps d'arc sphérique adjacents sont tangents intérieurement. La partie d'extrémité en forme d'arc sphérique est formée en reliant mutuellement au moins deux corps d'arc sphérique, le cône tronqué circulaire et le premier corps d'arc sphérique à proximité du cône tronqué circulaire étant tangents intérieurement, et les corps d'arc sphérique adjacents étant tangents intérieurement, de sorte que la partie d'extrémité en forme d'arc sphérique soit plus lisse et que le point de concentration de contrainte thermique soit en outre éliminé, permettant ainsi à une contrainte thermique d'être répartie de manière plus uniforme sur la partie d'extrémité en forme d'arc sphérique, et réduisant la probabilité de projections.
PCT/CN2023/072087 2022-01-27 2023-01-13 Électrode en graphite, dispositif de production de creuset et procédé de production de creuset WO2023143124A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CN202220234261.XU CN217378096U (zh) 2022-01-27 2022-01-27 石墨电极及坩埚生产装置
CN202210104184.0 2022-01-27
CN202210104184.0A CN116567876A (zh) 2022-01-27 2022-01-27 坩埚生产装置及坩埚生产方法
CN202220234261.X 2022-01-27

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US20100170298A1 (en) * 2009-01-08 2010-07-08 Japan Super Quartz Corporation Vitreous silica crucible manufacturing apparatus
CN202063822U (zh) * 2011-05-13 2011-12-07 宁波宝斯达坩埚保温制品有限公司 一种坩埚石墨电极
CN203112682U (zh) * 2012-11-18 2013-08-07 圣戈班研发（上海）有限公司 制造石英坩埚用石墨电极以及石英坩埚制造装置
CN105236390A (zh) * 2010-09-30 2016-01-13 株式会社Ihi 石墨化炉及制造石墨的方法
CN217378096U (zh) * 2022-01-27 2022-09-06 隆基绿能科技股份有限公司 石墨电极及坩埚生产装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101686584A (zh) * 2008-09-22 2010-03-31 日本超精石英株式会社 电弧放电方法及装置、石英玻璃坩埚制造方法及装置
US20100170298A1 (en) * 2009-01-08 2010-07-08 Japan Super Quartz Corporation Vitreous silica crucible manufacturing apparatus
CN105236390A (zh) * 2010-09-30 2016-01-13 株式会社Ihi 石墨化炉及制造石墨的方法
CN202063822U (zh) * 2011-05-13 2011-12-07 宁波宝斯达坩埚保温制品有限公司 一种坩埚石墨电极
CN203112682U (zh) * 2012-11-18 2013-08-07 圣戈班研发（上海）有限公司 制造石英坩埚用石墨电极以及石英坩埚制造装置
CN217378096U (zh) * 2022-01-27 2022-09-06 隆基绿能科技股份有限公司 石墨电极及坩埚生产装置

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