WO2023095994A1 - Wrinkle-smoothing unit, and graphene composite structure preparation apparatus comprising same - Google Patents

Wrinkle-smoothing unit, and graphene composite structure preparation apparatus comprising same Download PDF

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Publication number
WO2023095994A1
WO2023095994A1 PCT/KR2021/018334 KR2021018334W WO2023095994A1 WO 2023095994 A1 WO2023095994 A1 WO 2023095994A1 KR 2021018334 W KR2021018334 W KR 2021018334W WO 2023095994 A1 WO2023095994 A1 WO 2023095994A1
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unit
composite structure
graphene composite
graphene
substrate
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PCT/KR2021/018334
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French (fr)
Korean (ko)
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조승민
조민구
오홍기
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주식회사 엠씨케이테크
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/18—Handling of layers or the laminate
    • B32B38/1858—Handling of layers or the laminate using vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/18—Handling of layers or the laminate
    • B32B38/1875—Tensioning
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • C01B32/194—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges

Definitions

  • the multilayer structure including graphene (G) has a problem in that wrinkles are generated during the manufacturing process through deposition, stacking, etching, and exfoliation processes.
  • graphene (G) is synthesized through the deposition unit 10 in a state in which wrinkles are previously generated on the first substrate 1, a multilayer structure having wrinkles is obtained.
  • the deposition unit 10 performs the deposition of graphene (G) in a high-temperature environment. In the process, wrinkles are easily generated on the first substrate 1, and thus, a laminated structure with wrinkles is obtained. will lose
  • An object of the present invention to solve the above problems is a wrinkle flattening unit capable of producing a high-quality graphene composite structure by flattening wrinkles generated in the process of manufacturing the graphene composite structure, and a graphene composite structure including the same It is to provide a manufacturing device.
  • a wrinkle flattening unit for flattening wrinkles present in a graphene composite structure for solving the above problems is to contact and support one surface of the moving graphene composite structure, and to contact the graphene composite.
  • a roller unit adsorbing one surface of the structure and flattening wrinkles present in the graphene composite structure by adsorption force; and a pressing unit disposed on the other surface of the graphene composite structure and pressurizing the graphene composite structure in the direction of the roller unit.
  • the roller part is formed to extend in the width direction of the negative pressure generating part and the graphene composite structure, and communicates with the central hole through which the negative pressure generated in the negative pressure generating part is transmitted and extends to the outer surface.
  • an inner rotation unit having a branching passage, and an outer rotation unit disposed on an outer surface of the inside rotation unit, contacting and supporting one surface of the graphene composite structure, and having a plurality of suction holes communicating with the branch passage;
  • a cover may be provided to surround an area other than a contact area of the outer rotation unit contacting the graphene composite structure.
  • the pressing unit may include a squeegee or a support roller.
  • the branch passage is spaced apart from a radial passage disposed radially around the center hole so that the center hole and the suction hole communicate with each other along the width direction of the inner rotating portion. and a ring-shaped passage concavely formed on an outer surface of the inner rotation unit in a ring shape so that the negative pressure is evenly transmitted in a circumferential direction of the inside rotation unit.
  • the inner rotating part and the outer rotating part may be individually manufactured and then assembled to form an integral body.
  • the outer rotating part is provided with micropores to have the plurality of suction holes. It may include a porous material that
  • the wrinkle flattening unit In the wrinkle flattening unit according to the present embodiment, it is disposed on the inner surface of the cover part, adheres to the remaining area except for the contact area of the rotating body in contact with the graphene composite structure, and rotatably supports the rotating body At the same time, a sealing member for preventing loss of negative pressure through some suction holes of the rotating body may be further included.
  • the present invention may include a graphene composite structure manufacturing apparatus including the wrinkle flattening unit described above.
  • a graphene composite structure of excellent quality can be produced by flattening wrinkles generated in the graphene composite structure by vacuum adsorbing the graphene composite structure manufactured through the roller part and the pressurization part including graphene.
  • the wrinkle flattening unit can be easily applied to the continuous manufacturing process of the graphene composite structure manufactured in the roll-to-roll process through the roller part and the pressurization part, so that wrinkles generated in the graphene composite structure can be effectively flattened, It is possible to increase the production yield of the graphene composite structure.
  • FIG. 1 is an exemplary view for explaining a conventional graphene composite structure manufacturing apparatus.
  • FIG. 2 is an exemplary view for explaining an apparatus for manufacturing a graphene composite structure according to an embodiment of the present invention.
  • FIG. 4 is an enlarged view of the wrinkle flattening unit of FIG. 3 .
  • FIG. 6 is an exemplary diagram for explaining an apparatus for manufacturing a graphene composite structure according to another embodiment of the present invention.
  • FIG. 2 is an exemplary view for explaining an apparatus for manufacturing a graphene composite structure according to an embodiment of the present invention.
  • the graphene composite structure manufacturing apparatus includes a deposition unit 10, a first stacking unit 20, an etching unit 30, a second stacking unit 40, and a peeling unit 50. ) may be included.
  • the graphene composite structure manufacturing apparatus includes the deposition unit 10, the first stacking unit 20, the etching unit 30, the second stacking unit 40, and the exfoliation unit 50 through a roll-to-roll process. It can be carried out continuously by the manufacturing process by.
  • the deposition unit 10 is a portion where graphene (G) is synthesized on one surface of the first substrate 1 .
  • Graphene (G) may be synthesized by various transfer methods such as a chemical vapor deposition (CVD) method.
  • Graphene G may be synthesized on at least one surface of the first substrate 1 supplied from the first roll R1 while passing through the deposition unit 10 .
  • a catalyst material for synthesizing graphene is used, and a thin copper plate (copper foil) may be used.
  • the first substrate 1 in which graphene (G) is synthesized on one surface through the deposition unit 10 can be recovered to the second roll R2, and the graphene (G) recovered to the second roll R2 ) may be supplied to the first stacking unit 20 .
  • the first stacking part 20 is a part for stacking the second substrate 2 on the other surface of the first substrate 1 where graphene (G) is synthesized.
  • the first stacking unit 20 may include a first stacking roll 21 and a second stacking roll 22 . That is, the first substrate 1 synthesized with graphene G supplied from the second roll R2 and the second substrate 2 supplied from the third roll R3 are the first stacking roll 21 ) and the second stacking roll 22, the first structure GS1 in which the first substrate 1 and the second substrate 2 are laminated with graphene G interposed therebetween can be manufactured. .
  • the first structure GS1 manufactured in this way may be supplied to the etching unit 30 .
  • the etching portion 30 is a portion that is removed while the first substrate 1 is etched while the first structure GS1 is immersed in an etching solution. That is, the first substrate 1 is removed from the first structure GS1 through the etching unit 30, and the second substrate 2 having graphene G formed on one surface is transferred to the second stacking unit 40. can be supplied.
  • the second stacking unit 40 is a portion for stacking a third substrate 3 corresponding to a target substrate on the other surface of the second substrate 2 having graphene (G) formed on one surface thereof.
  • the second stacking unit 40 may include a third stacking roll 41 and a fourth stacking roll 42 . That is, the second substrate 2 on which graphene (G) is supplied from the etching unit 30 and the third substrate 3 supplied from the fourth roll R4 are formed by the third stacking roll 41 and
  • the second structure GS2 may be manufactured by stacking the second substrate 2 and the third substrate 3 with the graphene G interposed therebetween while passing between the fourth stacking rolls 42 .
  • the second structure GS2 manufactured in this way may be supplied to the peeling unit 50 .
  • the peeling part 50 is a part that peels and separates the second substrate 2 from the second structure GS2.
  • the peeling unit 50 may include a first peeling roll 51 and a second peeling roll 52 . That is, the second structure GS2 supplied from the second stacking unit 40 can be separated by peeling the second substrate 2 while passing between the first peeling roll 51 and the second peeling roll 52. there is.
  • the second substrate 2 separated through the exfoliation unit 50 may be recovered on the fifth roll R5, and the third substrate 3 having graphene G formed on one surface thereof may be collected on the sixth roll R6. ) can be recovered.
  • the manufacturing process can be completed by winding the target graphene composite structure around the sixth roll R6 while continuing the deposition, lamination, etching, lamination, and exfoliation processes based on roll-to-roll.
  • the apparatus for manufacturing a graphene composite structure according to the present embodiment is characterized by including a wrinkle flattening unit 100 .
  • the wrinkle flattening unit 100 may be disposed between the first stacking unit 20 and the etching unit 30 .
  • the wrinkle flattening unit 100 may include a roller unit 200 and a pressing unit 300 .
  • the roller unit 200 can contact and support one surface of the moving first structure GS1, and absorbs the surface of the first structure GS1 that is in contact with it, thereby reducing wrinkles existing in the first structure GS1 by the adsorption force. can be made flat.
  • the pressing unit 300 may be disposed on the opposite side of the roller unit 200 with the first structure GS1 interposed therebetween, and may press the other surface of the first structure GS1 in the direction of the roller unit 200 .
  • the pressing unit 300 may include a support roller or a squeegee.
  • the wrinkles existing in the first structure GS1 may be flattened while vacuum adsorbing the first structure GS1 while passing between the roller unit 200 and the pressing unit 300 . That is, a lost region in which a portion of the graphene (G) disposed between the first substrate 1 and the second substrate 2 is lost or an overlapping region in which the graphene (G) overlaps can be effectively removed. Accordingly, uniform flatness of the finally manufactured graphene composite structure can be maintained, and reliability of the device can be increased when applied to the device.
  • the roller unit 200 adsorbs the first substrate 1 while being in line contact with one surface of the first structure GS1, that is, one surface of the first substrate 1.
  • the first substrate 1 The adsorption force of the roller unit 200 acting on ) is preferably set smaller than the adhesive force between the first substrate 1 and the graphene G or the adhesive force between the first substrate 1 and the second substrate 2. . Therefore, while the first structure GS1 passes through the roller unit 200 in the roll-to-roll process, the first substrate 1 and the graphene (G) or the first substrate 1 are formed by the adsorption force of the roller unit 200. And the second substrate 2 may not be peeled off.
  • the roller unit 200 may generate intermittent adsorption force at predetermined time intervals instead of continuously generating adsorption force towards one surface of the first substrate 1 . Accordingly, it is possible to prevent a problem in which a portion of the first structure GS1 during roll-to-roll movement is separated due to excessive adsorption force of the roller unit 200 .
  • the deposition unit 10 may include an inspection unit for inspecting the synthesis state of graphene (G) with respect to the first substrate 1.
  • the first substrate 1 through the inspection unit that is, when inspecting whether there is a disappearing region or an overlapping region of graphene (G) for ), the wrinkle smoothing unit 100 according to the present embodiment is in the first structure GS1.
  • the adsorption force may be selectively generated in the roller unit 200 only in the corresponding section where the graphene (G) disappears or overlaps. Accordingly, it is possible to flatten wrinkles more effectively while suppressing separation of a part of the first structure GS1 due to the adsorption force of the roller unit 200 .
  • the outer rotation unit 245 may be disposed on an outer surface of the inner rotation unit 241 to contact and support one surface of the graphene composite structure.
  • the outer rotation unit 245 may have a plurality of suction holes communicating with the branch passage 243 .
  • the inner rotation unit 241 and the outer rotation unit 245 may be individually manufactured and then assembled and integrally manufactured, and the inner rotation unit 241 and the outer rotation unit 245 are made of different materials. It can be.
  • the outer rotating portion 245 may include a porous material having micropores.
  • the outer rotation unit 245 may transfer adsorption force to the graphene composite structure through micropores corresponding to the plurality of adsorption holes 236 (see FIG. 4).
  • various porous materials known in the art, such as ceramics having micropores, may be used.
  • the outer circumferential surface of the outer rotation unit 245 may be evenly transferred.
  • the wrinkle flattening unit according to the present invention has been described centering on being disposed between the first stacking unit 20 and the etching unit 30, but unlike this, the deposition unit 10 and the second roll ( R2), between the etching unit 30 and the second stacking unit 40, between the second stacking unit 40 and the peeling unit 50, or between the peeling unit 50 and the sixth roll R6. It may be arranged in one area or may be arranged in each area.
  • FIG. 6 is an exemplary diagram for explaining an apparatus for manufacturing a graphene composite structure according to another embodiment of the present invention.
  • the wrinkle flattening unit 100 by the graphene composite structure manufacturing apparatus according to the embodiment described above is additionally disposed between the first stacking unit 20 and the etching unit 30, as shown in FIG. 6, in this embodiment.
  • the wrinkle flattening unit 1000 according to the graphene composite structure manufacturing apparatus according to the example may be provided in the first stacking unit 20 (see FIG. 2).
  • the second substrate 2 after passing through the deposition unit 10, the second substrate 2 is laminated on the other surface of the first substrate 1 on which graphene (G) is synthesized.
  • a function of manufacturing the first structure GS1 and a function of flattening wrinkles existing in the first structure GS1 may be simultaneously performed.

Abstract

The objective of the present invention is to provide a wrinkle-smoothing unit and a graphene composite structure preparation apparatus comprising same, the unit enabling wrinkles, which occur during preparation of a graphene composite structure, to be smoothed out, and thus enables a graphene composite structure with excellent quality to be prepared. To this end, disclosed are a wrinkle-smoothing unit, and a graphene composite structure preparation apparatus comprising same, the unit comprising: a roller part, which comes in contact with and supports one surface of a moving graphene composite structure, suctions the contacted one surface of the graphene composite structure, and smooths out, by means of suction power, wrinkles present in the graphene composite structure; and a pressure part, which is arranged on the other surface of the graphene composite structure and presses the graphene composite structure toward the roller part.

Description

주름 평탄화유닛 및 이를 포함하는 그래핀 복합 구조체 제조장치Wrinkle flattening unit and graphene composite structure manufacturing apparatus including the same
본 발명은 주름 평탄화유닛 및 이를 포함하는 그래핀 복합 구조체 제조장치에 관한 것으로, 상세하게는 롤투롤 공정에 의해 그래핀 복합 구조체를 제조하는 과정에서 발생되는 주름을 평탄화하여 우수한 품질의 그래핀 복합 구조체를 제조할 수 있는 주름 평탄화유닛 및 이를 포함하는 그래핀 복합 구조체 제조장치에 관한 것이다.The present invention relates to a wrinkle flattening unit and a graphene composite structure manufacturing apparatus including the same, and more particularly, to a graphene composite structure of excellent quality by flattening wrinkles generated in the process of manufacturing a graphene composite structure by a roll-to-roll process. It relates to a wrinkle flattening unit capable of producing a graphene composite structure manufacturing apparatus including the same.
탄소 원자들로 구성된 물질로는 플러렌(Fullerene), 탄소 나노튜브(Carbon Nanotube), 그래핀(Graphene), 및 흑연(Graphite) 등이 있으며, 이 중 그래핀은 탄소 원자들이 2차원 상에서 벌집 모양의 배열을 이루고 있는 전도성 물질이다.Materials composed of carbon atoms include fullerene, carbon nanotube, graphene, and graphite. It is an array of conductive materials.
그래핀은 구조적 및 화학적으로 매우 안정할 뿐만 아니라, 우수한 전도성을 가지며, 투명하고 나노패턴으로의 가공이 용이한 장점을 가지는 이유로, 센서, 메모리 및 디스플레이 장치의 기초 소재로 꾸준히 연구되고 있다.Graphene is not only structurally and chemically very stable, but also has excellent conductivity, is transparent, and has the advantage of being easily processed into nanopatterns, and has been steadily studied as a basic material for sensors, memory, and display devices.
그래핀을 다양한 분야에 적용하기 위해서는 그래핀을 대량으로 합성하는 방법이 필요한데, 종래의 경우 흑연을 기계적으로 분쇄하여 용액 상에 분산시킨 후 자기조립 현상을 이용하여 박막의 그래핀층을 합성하는 방법이 있었다. 하지만, 이 경우 얻어진 그래핀층의 전기적 및 기계적 특성이 기대에 미치지 못하는 문제가 있다.In order to apply graphene to various fields, a method for synthesizing graphene in large quantities is required. In the conventional case, a method of synthesizing a graphene layer of a thin film by mechanically pulverizing graphite and dispersing it in a solution, and then using a self-assembly phenomenon is used. there was. However, in this case, there is a problem that the electrical and mechanical properties of the graphene layer obtained do not meet expectations.
최근 그래핀을 합성하는 방법으로는 화학기상증착(CVD: Chemical Vapor Deposition) 즉, 원료가스를 주입하고 인가되는 에너지(열, 플라즈마 등)에 의한 화학 반응을 통하여 촉매기판의 표면에 그래핀을 합성하여 얻는 방식이 있다.A recent method for synthesizing graphene is Chemical Vapor Deposition (CVD), that is, injecting raw material gas and synthesizing graphene on the surface of a catalyst substrate through a chemical reaction by applied energy (heat, plasma, etc.). There is a way to get it.
또한, 이러한 그래핀 합성 공정 뿐만 아니라, 합성되어 얻어진 그래핀을 포함한 복합 구조체는 롤투롤(Roll to roll) 공정을 통하여 다양한 구조의 그래핀 복합 구조체를 대량으로 제조할 수 있다.In addition to such a graphene synthesis process, graphene composite structures of various structures can be mass-produced through a roll-to-roll process of the composite structure including graphene obtained through the synthesis.
도 1은 종래 롤투롤 기반 그래핀 복합 구조체 제조장치를 나타낸 예시도이다.1 is an exemplary view showing a conventional roll-to-roll-based graphene composite structure manufacturing apparatus.
도 1을 참조하면, 롤투롤 기반 그래핀 복합 구조체 제조장치는 기본적으로 증착부(10), 제1적층부(20), 에칭부(30), 제2적층부(40) 및 박리부(50)를 포함할 수 있다.Referring to FIG. 1, the roll-to-roll based graphene composite structure manufacturing apparatus basically includes a deposition unit 10, a first stacking unit 20, an etching unit 30, a second stacking unit 40, and a peeling unit 50. ) may be included.
증착부(10)는 CVD 방법에 의해 제1기판(1)의 일면에 그래핀(G)을 합성할 수 있다. 즉, 제1롤(R1)로부터 공급되는 제1기판(1)은 증착부(10)를 통과하면서 적어도 일면에 그래핀(G)이 합성될 수 있다. 증착부(10)를 거치며 일면에 그래핀(G)이 합성된 제1기판(1)은 제2롤(R2)에 회수될 수 있고, 제2롤(R2)에 회수된 그래핀(G)이 합성된 제1기판(1)은 제1적층부(20)로 공급될 수 있다.The deposition unit 10 may synthesize graphene (G) on one surface of the first substrate 1 by a CVD method. That is, graphene (G) may be synthesized on at least one surface of the first substrate 1 supplied from the first roll R1 while passing through the deposition unit 10 . The first substrate 1 having graphene (G) synthesized on one side of the substrate 1 passing through the deposition unit 10 may be recovered to the second roll R2, and the recovered graphene (G) to the second roll R2 The synthesized first substrate 1 may be supplied to the first stacking unit 20 .
제1적층부(20)는 그래핀(G)이 합성된 제1기판(1)의 타면에 제2기판(2)을 적층할 수 있다. 이러한 제1적층부(20)는 제1적층롤(21) 및 제2적층롤(22)을 포함할 수 있다. 즉, 제2롤(R2)로부터 공급되는 그래핀(G)이 합성된 제1기판(1)과, 제3롤(R3)로부터 공급되는 제2기판(2)은, 제1적층롤(21) 및 제2적층롤(22) 사이를 함께 통과하면서 그래핀(G)을 사이에 두고 제1기판(1) 및 제2기판(2)이 적층될 수 있다. 이렇게 제조된 적층 구조체는 에칭부(30)로 공급될 수 있다.The first stacking unit 20 may stack the second substrate 2 on the other surface of the first substrate 1 on which graphene (G) is synthesized. The first stacking unit 20 may include a first stacking roll 21 and a second stacking roll 22 . That is, the first substrate 1 synthesized with graphene G supplied from the second roll R2 and the second substrate 2 supplied from the third roll R3 are the first stacking roll 21 ) and the second stacking roll 22, the first substrate 1 and the second substrate 2 may be stacked with the graphene G interposed therebetween. The laminated structure manufactured in this way may be supplied to the etching unit 30 .
에칭부(30)는 제조된 적층 구조체를 에칭 용액에 담근 상태에서 제1기판(1)이 에칭되면서 제거될 수 있다. 즉, 에칭부(30)를 거치며 적층 구조체로부터 제1기판(1)이 제거되고, 일면에 그래핀(G)이 형성된 제2기판(2)은 제2적층부(40)로 공급될 수 있다.The etching unit 30 may be removed while the first substrate 1 is etched while the manufactured multilayer structure is immersed in an etching solution. That is, the first substrate 1 is removed from the stacked structure through the etching unit 30, and the second substrate 2 having graphene (G) formed on one surface thereof may be supplied to the second stacking unit 40. .
제2적층부(40)는 일면에 그래핀(G)이 형성된 제2기판(2)의 타면에 타겟기판에 해당하는 제3기판(3)을 적층할 수 있다. 이러한 제2적층부(40)는 제3적층롤(41) 및 제4적층롤(42)을 포함할 수 있다. 즉, 에칭부(30)에서 공급되는 그래핀(G)이 형성된 제2기판(2)과, 제4롤(R4)로부터 공급되는 제3기판(3)은, 제3적층롤(41) 및 제4적층롤(42) 사이를 함께 통과하면서 그래핀(G)을 사이에 두고 제2기판(2) 및 제3기판(3)이 적층된 적층 구조체가 제조될 수 있다. 이렇게 제조된 적층 구조체는 박리부(50)로 공급될 수 있다.The second stacking unit 40 may stack a third substrate 3 corresponding to a target substrate on the other surface of the second substrate 2 on which graphene (G) is formed on one surface. The second stacking unit 40 may include a third stacking roll 41 and a fourth stacking roll 42 . That is, the second substrate 2 on which graphene (G) is supplied from the etching unit 30 and the third substrate 3 supplied from the fourth roll R4 are formed by the third stacking roll 41 and A multilayer structure in which the second substrate 2 and the third substrate 3 are stacked with the graphene G interposed therebetween while passing between the fourth stacking rolls 42 may be manufactured. The laminated structure manufactured in this way may be supplied to the peeling unit 50 .
박리부(50)는 적층 구조체로부터 제2기판(2)을 박리하여 분리할 수 있다. 이러한 박리부(50)는 제1박리롤(51) 및 제2박리롤(52)을 포함할 수 있다. 즉, 제2적층부(40)에서 공급되는 적층 구조체는 제1박리롤(51) 및 제2박리롤(52) 사이를 통과하면서 제2기판(2)이 박리되어 분리될 수 있다. 박리부(50)를 거치며 분리된 제2기판(2)은 제5롤(R5)에 회수될 수 있고, 일면에 그래핀(G)이 형성된 제3기판(3)은 제6롤(R6)에 회수될 수 있다.The peeling unit 50 may peel and separate the second substrate 2 from the laminated structure. The peeling unit 50 may include a first peeling roll 51 and a second peeling roll 52 . That is, while passing between the first peeling roll 51 and the second peeling roll 52, the laminated structure supplied from the second stacking unit 40 may be separated from the second substrate 2 by peeling. The second substrate 2 separated through the exfoliation unit 50 may be recovered to the fifth roll R5, and the third substrate 3 having graphene G formed on one surface may be returned to the sixth roll R6. can be recovered in
이와 같이, 롤투롤을 기반으로 하여, 증착, 적층, 에칭, 적층 및 박리 공정을 연속하면서 최종 그래핀 복합 구조체를 제6롤(R6)에 감아 회수함으로써 제조 공정이 완료될 수 있다.As such, the manufacturing process may be completed by winding the final graphene composite structure around the sixth roll R6 while continuing the deposition, lamination, etching, lamination, and exfoliation processes based on roll-to-roll.
하지만, 종래 롤투롤 기반 그래핀 제조 장치는 다음과 같은 문제가 있다.However, the conventional roll-to-roll based graphene manufacturing apparatus has the following problems.
그래핀(G)을 포함하는 적층 구조체는 증착, 적층, 에칭, 및 박리 공정을 거치는 제조 과정에서 주름이 발생하는 문제가 있다. 예를 들어, 제1기판(1)에 미리 주름이 발생한 상태에서 증착부(10)를 거치며 그래핀(G)을 합성하게 되면, 주름이 있는 적층 구조체가 얻어지게 된다. 특히, 증착부(10)는 고온 환경에서 그래핀(G)의 증착을 수행하게 되는데, 그 과정에서 제1기판(1)에 주름이 발생되기 용이하고, 이에 따라, 주름이 있는 적층 구조체가 얻어지게 된다.The multilayer structure including graphene (G) has a problem in that wrinkles are generated during the manufacturing process through deposition, stacking, etching, and exfoliation processes. For example, when graphene (G) is synthesized through the deposition unit 10 in a state in which wrinkles are previously generated on the first substrate 1, a multilayer structure having wrinkles is obtained. In particular, the deposition unit 10 performs the deposition of graphene (G) in a high-temperature environment. In the process, wrinkles are easily generated on the first substrate 1, and thus, a laminated structure with wrinkles is obtained. will lose
증착부(10)를 거치는 과정에서 적층 구조체에 주름이 발생되면, 에칭부(30)에서 제1기판(1)을 에칭하여 제거한 이후에도 그래핀(G)에는 주름이 잔존하게 된다. 즉, 그래핀(G)에는 일부 그래핀이 소실된 소실영역 및 일부 그래핀이 중첩된 중첩영역이 잔존하게 되면서 전체적으로 평탄하지 못한 저품질의 그래핀(G)이 획득된다.If wrinkles are generated in the laminated structure in the process of passing through the deposition unit 10, the wrinkles remain in the graphene (G) even after the first substrate 1 is etched and removed by the etching unit 30. That is, graphene (G) of low quality, which is not flat as a whole, is obtained as a lost region in which some graphene is lost and an overlapping region in which some graphene is overlapped remain in the graphene (G).
이처럼 평탄하지 못한 그래핀을 가지는 복합 구조체가 획득되면, 해당 그래핀 복합 구조체가 적용되는 소자의 면저항 특성이 저하되고 그래핀 소실영역 등 평탄도가 균일하지 못한 일부 영역으로 산소나 수분이 침투하여 소자의 신뢰성이 저하되는 문제가 있다.When a composite structure having such uneven graphene is obtained, the sheet resistance characteristic of the device to which the graphene composite structure is applied is lowered, and oxygen or moisture penetrates into some regions where the flatness is not uniform, such as the graphene disappearance region, so that the device There is a problem of deterioration of reliability.
선행문헌으로는 대한민국 공개특허공보 제2019-0014751호(2019.02.13.공개)가 있다.As prior literature, there is Korean Patent Publication No. 2019-0014751 (published on February 13, 2019).
상술한 문제점을 해결하기 위한 본 발명의 과제는 그래핀 복합 구조체를 제조하는 과정에서 발생되는 주름을 평탄화하여 우수한 품질의 그래핀 복합 구조를 제조할 수 있는 주름 평탄화유닛 및 이를 포함하는 그래핀 복합 구조체 제조장치를 제공함에 있다.An object of the present invention to solve the above problems is a wrinkle flattening unit capable of producing a high-quality graphene composite structure by flattening wrinkles generated in the process of manufacturing the graphene composite structure, and a graphene composite structure including the same It is to provide a manufacturing device.
본 발명이 해결하고자 하는 과제는 이상에서 언급한 과제로 제한되지 않으며, 언급되지 않은 또 다른 과제들은 아래의 기재로부터 본 발명이 속하는 기술 분야에서 통상의 지식을 가진 자에게 명확하게 이해될 수 있을 것이다.The problem to be solved by the present invention is not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below. .
상술한 과제를 해결하기 위한 본 발명의 실시예에 따른 그래핀 복합 구조체에 존재하는 주름을 평탄화하는 주름 평탄화유닛은, 이동하는 상기 그래핀 복합 구조체의 일면을 접촉 지지하고, 접촉된 상기 그래핀 복합 구조체의 일면을 흡착하며 흡착력에 의해 상기 그래핀 복합 구조체에 존재하는 주름이 평탄화되도록 하는 롤러부; 및 상기 그래핀 복합 구조체의 타면에 배치되며, 상기 롤러부 방향으로 상기 그래핀 복합 구조체를 가압하는 가압부;를 포함한다.A wrinkle flattening unit for flattening wrinkles present in a graphene composite structure according to an embodiment of the present invention for solving the above problems is to contact and support one surface of the moving graphene composite structure, and to contact the graphene composite. a roller unit adsorbing one surface of the structure and flattening wrinkles present in the graphene composite structure by adsorption force; and a pressing unit disposed on the other surface of the graphene composite structure and pressurizing the graphene composite structure in the direction of the roller unit.
이때, 상기 롤러부는, 부압발생부와, 상기 그래핀 복합 구조체의 폭방향으로 연장하여 형성되며, 상기 부압발생부에 발생된 부압이 전달되는 중심홀과 상기 중심홀에서 연통되어 외면으로 연장하여 형성되는 분기유로를 가지는 내측회전부와, 상기 내측회전부의 외면에 배치되며 상기 그래핀 복합 구조체의 일면을 접촉 지지하고 상기 분기유로와 연통되는 복수의 흡착홀을 가지는 외측회전부를 구비하는 회전체와, 상기 그래핀 복합 구조체에 접촉하는 상기 외측회전부의 접촉 영역을 제외한 나머지 영역을 감싸도록 마련되는 커버부를 포함할 수 있다.At this time, the roller part is formed to extend in the width direction of the negative pressure generating part and the graphene composite structure, and communicates with the central hole through which the negative pressure generated in the negative pressure generating part is transmitted and extends to the outer surface. an inner rotation unit having a branching passage, and an outer rotation unit disposed on an outer surface of the inside rotation unit, contacting and supporting one surface of the graphene composite structure, and having a plurality of suction holes communicating with the branch passage; A cover may be provided to surround an area other than a contact area of the outer rotation unit contacting the graphene composite structure.
본 실시예에 따른 주름 평탄화유닛에 있어서, 상기 가압부는 스퀴지 또는 지지롤러를 포함할 수 있다.In the wrinkle flattening unit according to the present embodiment, the pressing unit may include a squeegee or a support roller.
본 실시예에 따른 주름 평탄화유닛에 있어서, 상기 분기유로는, 상기 중심홀 및 상기 흡착홀이 연통되도록 상기 중심홀을 중심으로 방사형 배치되는 방사형 유로와, 상기 내측회전부의 폭방향을 따라 이격하여 배치되며, 상기 내측회전부의 외면에 링 형상으로 오목하게 형성되어 상기 내측회전부의 원주방향에 대해 부압이 고르게 전달되도록 하는 링형 유로를 포함할 수 있다.In the wrinkle flattening unit according to the present embodiment, the branch passage is spaced apart from a radial passage disposed radially around the center hole so that the center hole and the suction hole communicate with each other along the width direction of the inner rotating portion. and a ring-shaped passage concavely formed on an outer surface of the inner rotation unit in a ring shape so that the negative pressure is evenly transmitted in a circumferential direction of the inside rotation unit.
본 실시예에 따른 주름 평탄화유닛에 있어서, 상기 내측회전부 및 상기 외측회전부는 개별적으로 제작된 후 조립되어 일체를 이룰 수 있고, 이때, 상기 외측회전부는 상기 복수의 흡착홀을 가지도록 미세 기공을 구비하는 다공성 소재를 포함할 수 있다.In the wrinkle flattening unit according to the present embodiment, the inner rotating part and the outer rotating part may be individually manufactured and then assembled to form an integral body. At this time, the outer rotating part is provided with micropores to have the plurality of suction holes. It may include a porous material that
본 실시예에 따른 주름 평탄화유닛에 있어서, 상기 커버부의 내면에 배치되며, 상기 그래핀 복합 구조체에 접촉하는 상기 회전체의 접촉 영역을 제외한 나머지 영역에 밀착되고, 상기 회전체를 회전 가능하게 지지하는 동시에, 상기 회전체의 일부 흡착홀을 통하여 부압이 소실되는 것을 방지하는 실링부재를 더 포함할 수 있다.In the wrinkle flattening unit according to the present embodiment, it is disposed on the inner surface of the cover part, adheres to the remaining area except for the contact area of the rotating body in contact with the graphene composite structure, and rotatably supports the rotating body At the same time, a sealing member for preventing loss of negative pressure through some suction holes of the rotating body may be further included.
본 발명은 전술한 주름 평탄화유닛을 포함하는 그래핀 복합 구조체 제조장치를 포함할 수 있다.The present invention may include a graphene composite structure manufacturing apparatus including the wrinkle flattening unit described above.
본 발명에 따르면, 그래핀을 포함한 롤러부 및 가압부를 통하여 제조되는 그래핀 복합 구조체를 진공 흡착함으로써 그래핀 복합 구조체에 발생된 주름을 평탄화하여 우수한 품질의 그래핀 복합 구조체를 생산해낼 수 있다.According to the present invention, a graphene composite structure of excellent quality can be produced by flattening wrinkles generated in the graphene composite structure by vacuum adsorbing the graphene composite structure manufactured through the roller part and the pressurization part including graphene.
본 발명에 따르면, 롤러부 및 가압부를 통하여 롤투롤 공정으로 제조되는 그래핀 복합 구조체의 연속된 제조 과정에 주름 평탄화유닛이 용이하게 적용되어 그래핀 복합 구조체에 발생된 주름을 효과적으로 평탄화할 수 있고, 그래핀 복합 구조체의 생산 수율을 높일 수 있다.According to the present invention, the wrinkle flattening unit can be easily applied to the continuous manufacturing process of the graphene composite structure manufactured in the roll-to-roll process through the roller part and the pressurization part, so that wrinkles generated in the graphene composite structure can be effectively flattened, It is possible to increase the production yield of the graphene composite structure.
본 발명의 효과는 상기한 효과로 한정되는 것은 아니며, 본 발명의 상세한 설명 또는 청구범위에 기재된 발명의 구성으로부터 추론 가능한 모든 효과를 포함하는 것으로 이해되어야 한다.The effects of the present invention are not limited to the above effects, and should be understood to include all effects that can be inferred from the detailed description of the present invention or the configuration of the invention described in the claims.
도 1은 종래 그래핀 복합 구조체 제조 장치를 설명하기 위한 예시도이다.1 is an exemplary view for explaining a conventional graphene composite structure manufacturing apparatus.
도 2는 본 발명의 일실시예에 따른 그래핀 복합 구조체 제조장치를 설명하기 위한 예시도이다.2 is an exemplary view for explaining an apparatus for manufacturing a graphene composite structure according to an embodiment of the present invention.
도 3은 본 발명의 일실시예에 따른 주름 평탄화유닛을 설명하기 위한 예시도이다.3 is an exemplary view for explaining a wrinkle flattening unit according to an embodiment of the present invention.
도 4는 도 3의 주름 평탄화유닛을 확대하여 나타낸 예시도이다.FIG. 4 is an enlarged view of the wrinkle flattening unit of FIG. 3 .
도 5는 본 발명의 다른 실시예에 따른 주름 평탄화유닛을 설명하기 위한 예시도이다.5 is an exemplary view for explaining a wrinkle flattening unit according to another embodiment of the present invention.
도 6은 본 발명의 다른 실시예에 따른 그래핀 복합 구조체 제조장치를 설명하기 위한 예시도이다.6 is an exemplary diagram for explaining an apparatus for manufacturing a graphene composite structure according to another embodiment of the present invention.
이하에서는 첨부한 도면을 참조하여 본 발명을 설명하기로 한다. 그러나 본 발명은 여러 가지 상이한 형태로 구현될 수 있으며, 따라서 여기에서 설명하는 실시예로 한정되는 것은 아니다. 그리고 도면에서 본 발명을 명확하게 설명하기 위해서 설명과 관계없는 부분은 생략하였으며, 명세서 전체를 통하여 유사한 부분에 대해서는 유사한 도면 부호를 붙였다.Hereinafter, the present invention will be described with reference to the accompanying drawings. However, the present invention may be embodied in many different forms and, therefore, is not limited to the embodiments described herein. And in order to clearly explain the present invention in the drawings, parts irrelevant to the description are omitted, and similar reference numerals are attached to similar parts throughout the specification.
명세서 전체에서, 어떤 부분이 다른 부분과 "연결(접속, 접촉, 결합)"되어 있다고 할 때, 이는 "직접적으로 연결"되어 있는 경우뿐 아니라, 그 중간에 다른 부재를 사이에 두고 "간접적으로 연결"되어 있는 경우도 포함한다. 또한 어떤 부분이 어떤 구성요소를 "포함"한다고 할 때, 이는 특별히 반대되는 기재가 없는 한 다른 구성요소를 제외하는 것이 아니라 다른 구성요소를 더 구비할 수 있다는 것을 의미한다.Throughout the specification, when a part is said to be "connected (connected, contacted, combined)" with another part, this is not only "directly connected", but also "indirectly connected" with another member in between. "Including cases where In addition, when a part "includes" a certain component, it means that it may further include other components without excluding other components unless otherwise stated.
본 명세서에서 사용한 용어는 단지 특정한 실시예를 설명하기 위해 사용된 것으로, 본 발명을 한정하려는 의도가 아니다. 단수의 표현은 문맥상 명백하게 다르게 뜻하지 않는 한, 복수의 표현을 포함한다. 본 명세서에서, "포함하다" 또는 "가지다" 등의 용어는 명세서상에 기재된 특징, 숫자, 단계, 동작, 구성요소, 부품 또는 이들을 조합한 것이 존재함을 지정하려는 것이지, 하나 또는 그 이상의 다른 특징들이나 숫자, 단계, 동작, 구성요소, 부품 또는 이들을 조합한 것들의 존재 또는 부가 가능성을 미리 배제하지 않는 것으로 이해되어야 한다.Terms used in this specification are only used to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, terms such as "include" or "have" are intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, but one or more other features It should be understood that the presence or addition of numbers, steps, operations, components, parts, or combinations thereof is not precluded.
이하 첨부된 도면을 참고하여 본 발명의 실시예를 상세히 설명하기로 한다.Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 2는 본 발명의 일실시예에 따른 그래핀 복합 구조체 제조장치를 설명하기 위한 예시도이다.2 is an exemplary view for explaining an apparatus for manufacturing a graphene composite structure according to an embodiment of the present invention.
도 2를 참조하면, 본 실시예에 따른 그래핀 복합 구조체 제조장치는 증착부(10), 제1적층부(20), 에칭부(30), 제2적층부(40) 및 박리부(50)를 포함할 수 있다.Referring to FIG. 2 , the graphene composite structure manufacturing apparatus according to the present embodiment includes a deposition unit 10, a first stacking unit 20, an etching unit 30, a second stacking unit 40, and a peeling unit 50. ) may be included.
본 실시예에 따른 그래핀 복합 구조체 제조장치는 롤투롤 공정에 의해 증착부(10), 제1적층부(20), 에칭부(30), 제2적층부(40) 및 박리부(50)에 의한 제조 공정에 의해 연속 수행될 수 있다.The graphene composite structure manufacturing apparatus according to the present embodiment includes the deposition unit 10, the first stacking unit 20, the etching unit 30, the second stacking unit 40, and the exfoliation unit 50 through a roll-to-roll process. It can be carried out continuously by the manufacturing process by.
증착부(10)는 제1기판(1)의 일면에 그래핀(G)이 합성되는 부분이다. 그래핀(G)은 화학기상증착(Chemical Vapor Deposition: CVD) 방법 등 다양한 전사 방법으로 합성될 수 있다. 제1롤(R1)로부터 공급되는 제1기판(1)은 증착부(10)를 통과하면서 적어도 일면에 그래핀(G)이 합성될 수 있다. 제1기판(1)은 그래핀 합성을 위한 촉매 재료가 사용되는데, 구리 박판(동박)이 사용될 수 있다. 이렇게 증착부(10)를 거치며 일면에 그래핀(G)이 합성된 제1기판(1)은 제2롤(R2)에 회수될 수 있고, 제2롤(R2)에 회수된 그래핀(G)이 합성된 제1기판(1)은 제1적층부(20)로 공급될 수 있다.The deposition unit 10 is a portion where graphene (G) is synthesized on one surface of the first substrate 1 . Graphene (G) may be synthesized by various transfer methods such as a chemical vapor deposition (CVD) method. Graphene G may be synthesized on at least one surface of the first substrate 1 supplied from the first roll R1 while passing through the deposition unit 10 . As the first substrate 1, a catalyst material for synthesizing graphene is used, and a thin copper plate (copper foil) may be used. The first substrate 1 in which graphene (G) is synthesized on one surface through the deposition unit 10 can be recovered to the second roll R2, and the graphene (G) recovered to the second roll R2 ) may be supplied to the first stacking unit 20 .
제1적층부(20)는 그래핀(G)이 합성된 제1기판(1)의 타면에 제2기판(2)을 적층하는 부분이다. 이러한 제1적층부(20)는 제1적층롤(21) 및 제2적층롤(22)을 포함할 수 있다. 즉, 제2롤(R2)로부터 공급되는 그래핀(G)이 합성된 제1기판(1)과, 제3롤(R3)로부터 공급되는 제2기판(2)은, 제1적층롤(21) 및 제2적층롤(22) 사이를 함께 통과하면서 그래핀(G)을 사이에 두고 제1기판(1) 및 제2기판(2)이 적층된 제1구조체(GS1)가 제조될 수 있다. 이렇게 제조된 제1구조체(GS1)는 에칭부(30)로 공급될 수 있다.The first stacking part 20 is a part for stacking the second substrate 2 on the other surface of the first substrate 1 where graphene (G) is synthesized. The first stacking unit 20 may include a first stacking roll 21 and a second stacking roll 22 . That is, the first substrate 1 synthesized with graphene G supplied from the second roll R2 and the second substrate 2 supplied from the third roll R3 are the first stacking roll 21 ) and the second stacking roll 22, the first structure GS1 in which the first substrate 1 and the second substrate 2 are laminated with graphene G interposed therebetween can be manufactured. . The first structure GS1 manufactured in this way may be supplied to the etching unit 30 .
에칭부(30)는 제1구조체(GS1)를 에칭 용액에 담근 상태에서 제1기판(1)이 에칭되면서 제거되는 부분이다. 즉, 에칭부(30)를 거치며 제1구조체(GS1)로부터 제1기판(1)이 제거되고, 일면에 그래핀(G)이 형성된 제2기판(2)은 제2적층부(40)로 공급될 수 있다.The etching portion 30 is a portion that is removed while the first substrate 1 is etched while the first structure GS1 is immersed in an etching solution. That is, the first substrate 1 is removed from the first structure GS1 through the etching unit 30, and the second substrate 2 having graphene G formed on one surface is transferred to the second stacking unit 40. can be supplied.
제2적층부(40)는 일면에 그래핀(G)이 형성된 제2기판(2)의 타면에 타겟기판에 해당하는 제3기판(3)을 적층하는 부분이다. 이러한 제2적층부(40)는 제3적층롤(41) 및 제4적층롤(42)을 포함할 수 있다. 즉, 에칭부(30)에서 공급되는 그래핀(G)이 형성된 제2기판(2)과, 제4롤(R4)로부터 공급되는 제3기판(3)은, 제3적층롤(41) 및 제4적층롤(42) 사이를 함께 통과하면서 그래핀(G)을 사이에 두고 제2기판(2) 및 제3기판(3)이 적층된 제2구조체(GS2)가 제조될 수 있다. 이렇게 제조된 제2구조체(GS2)는 박리부(50)로 공급될 수 있다.The second stacking unit 40 is a portion for stacking a third substrate 3 corresponding to a target substrate on the other surface of the second substrate 2 having graphene (G) formed on one surface thereof. The second stacking unit 40 may include a third stacking roll 41 and a fourth stacking roll 42 . That is, the second substrate 2 on which graphene (G) is supplied from the etching unit 30 and the third substrate 3 supplied from the fourth roll R4 are formed by the third stacking roll 41 and The second structure GS2 may be manufactured by stacking the second substrate 2 and the third substrate 3 with the graphene G interposed therebetween while passing between the fourth stacking rolls 42 . The second structure GS2 manufactured in this way may be supplied to the peeling unit 50 .
박리부(50)는 제2구조체(GS2)로부터 제2기판(2)을 박리하여 분리하는 부분이다. 이러한 박리부(50)는 제1박리롤(51) 및 제2박리롤(52)을 포함할 수 있다. 즉, 제2적층부(40)에서 공급되는 제2구조체(GS2)는 제1박리롤(51) 및 제2박리롤(52) 사이를 통과하면서 제2기판(2)이 박리되어 분리될 수 있다. 이렇게 박리부(50)를 거치며 분리된 제2기판(2)은 제5롤(R5)에 회수될 수 있고, 일면에 그래핀(G)이 형성된 제3기판(3)은 제6롤(R6)에 회수될 수 있다.The peeling part 50 is a part that peels and separates the second substrate 2 from the second structure GS2. The peeling unit 50 may include a first peeling roll 51 and a second peeling roll 52 . That is, the second structure GS2 supplied from the second stacking unit 40 can be separated by peeling the second substrate 2 while passing between the first peeling roll 51 and the second peeling roll 52. there is. The second substrate 2 separated through the exfoliation unit 50 may be recovered on the fifth roll R5, and the third substrate 3 having graphene G formed on one surface thereof may be collected on the sixth roll R6. ) can be recovered.
이와 같이, 롤투롤을 기반으로 하여, 증착, 적층, 에칭, 적층 및 박리 공정을 연속하면서 목표로 하는 그래핀 복합 구조체를 제6롤(R6)에 감아 회수함으로써 제조 공정이 완료될 수 있다.In this way, the manufacturing process can be completed by winding the target graphene composite structure around the sixth roll R6 while continuing the deposition, lamination, etching, lamination, and exfoliation processes based on roll-to-roll.
본 실시예에 따른 그래핀 복합 구조체 제조장치는 주름 평탄화유닛(100)을 포함하는 것을 특징으로 한다.The apparatus for manufacturing a graphene composite structure according to the present embodiment is characterized by including a wrinkle flattening unit 100 .
본 실시예에 따른 주름 평탄화유닛(100)은 제1적층부(20) 및 에칭부(30) 사이에 배치될 수 있다.The wrinkle flattening unit 100 according to the present embodiment may be disposed between the first stacking unit 20 and the etching unit 30 .
주름 평탄화유닛(100)은 롤러부(200) 및 가압부(300)를 포함할 수 있다.The wrinkle flattening unit 100 may include a roller unit 200 and a pressing unit 300 .
롤러부(200)는 이동하는 제1구조체(GS1)의 일면을 접촉 지지할 수 있고, 접촉된 제1구조체(GS1)의 일면을 흡착하여 흡착력에 의해 제1구조체(GS1)에 존재하는 주름이 평탄화되도록 할 수 있다.The roller unit 200 can contact and support one surface of the moving first structure GS1, and absorbs the surface of the first structure GS1 that is in contact with it, thereby reducing wrinkles existing in the first structure GS1 by the adsorption force. can be made flat.
가압부(300)는 제1구조체(GS1)를 사이에 두고 롤러부(200)의 반대편에 배치될 수 있으며, 롤러부(200) 방향으로 제1구조체(GS1)의 타면을 가압할 수 있다. 이러한 가압부(300)는 지지롤러 또는 스퀴지를 포함할 수 있다.The pressing unit 300 may be disposed on the opposite side of the roller unit 200 with the first structure GS1 interposed therebetween, and may press the other surface of the first structure GS1 in the direction of the roller unit 200 . The pressing unit 300 may include a support roller or a squeegee.
이처럼 제1구조체(GS1)는 롤러부(200) 및 가압부(300) 사이를 통과하는 과정에서 진공 흡착되면서 제1구조체(GS1)에 존재하는 주름이 평탄화될 수 있다. 즉, 제1기판(1) 및 제2기판(2) 사이에 배치된 그래핀(G)의 일부가 소실된 소실영역이나 그래핀(G)이 중첩된 중첩영역이 효과적으로 제거될 수 있다. 이에 따라, 최종 제조되는 그래핀 복합 구조체의 균일한 평탄도를 유지할 수 있고, 이를 소자에 적용할 시 소자의 신뢰성을 높일 수 있다.As such, the wrinkles existing in the first structure GS1 may be flattened while vacuum adsorbing the first structure GS1 while passing between the roller unit 200 and the pressing unit 300 . That is, a lost region in which a portion of the graphene (G) disposed between the first substrate 1 and the second substrate 2 is lost or an overlapping region in which the graphene (G) overlaps can be effectively removed. Accordingly, uniform flatness of the finally manufactured graphene composite structure can be maintained, and reliability of the device can be increased when applied to the device.
한편, 롤러부(200)는 제1구조체(GS1)의 일면 즉, 제1기판(1)의 일면에 선 접촉된 상태에서 제1기판(1)을 흡착하게 되는데, 이때, 제1기판(1)에 작용하는 롤러부(200)의 흡착력은, 제1기판(1) 및 그래핀(G) 간의 점착력 또는 제1기판(1) 및 제2기판(2) 간의 점착력 보다 작게 설정됨이 바람직하다. 따라서, 롤투롤 과정에서 제1구조체(GS1)가 롤러부(200)를 통과하는 중 롤러부(200)의 흡착력에 의해 제1기판(1) 및 그래핀(G) 또는 제1기판(1) 및 제2기판(2)이 박리되지 않을 수 있다.Meanwhile, the roller unit 200 adsorbs the first substrate 1 while being in line contact with one surface of the first structure GS1, that is, one surface of the first substrate 1. At this time, the first substrate 1 The adsorption force of the roller unit 200 acting on ) is preferably set smaller than the adhesive force between the first substrate 1 and the graphene G or the adhesive force between the first substrate 1 and the second substrate 2. . Therefore, while the first structure GS1 passes through the roller unit 200 in the roll-to-roll process, the first substrate 1 and the graphene (G) or the first substrate 1 are formed by the adsorption force of the roller unit 200. And the second substrate 2 may not be peeled off.
그리고, 롤러부(200)는 제1기판(1)의 일면을 향해 지속적으로 흡착력을 발생시키지 않고 미리 설정된 시간차를 두고 간헐적인 흡착력을 발생시킬 수도 있다. 따라서, 롤투롤 이동 중인 제1구조체(GS1)의 일부가 롤러부(200)의 과도한 흡착력에 의해 박리되는 문제를 예방할 수 있다.In addition, the roller unit 200 may generate intermittent adsorption force at predetermined time intervals instead of continuously generating adsorption force towards one surface of the first substrate 1 . Accordingly, it is possible to prevent a problem in which a portion of the first structure GS1 during roll-to-roll movement is separated due to excessive adsorption force of the roller unit 200 .
또한, 도시되진 않았지만, 증착부(10)에는 제1기판(1)에 대한 그래핀(G)의 합성 상태를 검사하는 검사유닛이 구비될 수 있는데, 이와 같이 검사유닛을 통해 제1기판(1)에 대한 그래핀(G)의 합성 상태 즉, 그래핀(G)의 소실영역이나 중첩영역이 존재하는지를 검사할 경우, 본 실시예에 따른 주름 평탄화유닛(100)은 제1구조체(GS1)에서 그래핀(G)의 소실영역이나 중첩영역이 존재하는 해당 구간에서만 롤러부(200)에 흡착력을 선택적으로 발생시킬 수도 있다. 이에 따라, 롤러부(200)의 흡착력에 의한 제1구조체(GS1)의 일부가 박리되는 것을 억제해 주면서 주름을 보다 효과적으로 평탄화할 수 있다.In addition, although not shown, the deposition unit 10 may include an inspection unit for inspecting the synthesis state of graphene (G) with respect to the first substrate 1. As such, the first substrate 1 through the inspection unit ), that is, when inspecting whether there is a disappearing region or an overlapping region of graphene (G) for ), the wrinkle smoothing unit 100 according to the present embodiment is in the first structure GS1. The adsorption force may be selectively generated in the roller unit 200 only in the corresponding section where the graphene (G) disappears or overlaps. Accordingly, it is possible to flatten wrinkles more effectively while suppressing separation of a part of the first structure GS1 due to the adsorption force of the roller unit 200 .
도 3은 본 발명의 일실시예에 따른 주름 평탄화유닛을 설명하기 위한 예시도이고, 도 4는 도 3의 주름 평탄화유닛을 확대하여 나타낸 예시도이다.3 is an exemplary view for explaining a wrinkle flattening unit according to an embodiment of the present invention, and FIG. 4 is an exemplary view showing the wrinkle flattening unit of FIG. 3 in an enlarged manner.
도 3 및 도 4를 참조하면, 본 실시예에 따른 롤러부(200)는 부압발생부(210), 회전체(230) 및 커버부(250)를 포함할 수 있다.Referring to FIGS. 3 and 4 , the roller unit 200 according to the present embodiment may include a negative pressure generating unit 210 , a rotating body 230 and a cover unit 250 .
부압발생부(210)는 부압을 발생할 수 있으며, 진공 펌프가 사용될 수 있다.The negative pressure generator 210 may generate negative pressure, and a vacuum pump may be used.
회전체(230)는 제1구조체(GS1)의 폭방향으로 연장하여 구비될 수 있으며, 제1구조체(GS1)의 하부에 배치된 채 제1기판(1)의 일면에 접촉될 수 있다.The rotating body 230 may extend in the width direction of the first structure GS1 and may contact one surface of the first substrate 1 while being disposed under the first structure GS1.
회전체(230)를 원형의 단면 형상으로 구성할 경우 회전체(230)는 상부가 제1기판(1)의 일면에 선 또는 면 접촉될 수 있다.When the rotating body 230 is configured in a circular cross-sectional shape, the top of the rotating body 230 may be in line or surface contact with one surface of the first substrate 1 .
회전체(230)는 자유 회전이 가능한 상태로 구성될 수 있고, 외부 구동부에 의해 강제 회전이 가능한 상태로 구성될 수도 있다. 즉, 롤투롤 공정에 의해 이동되는 제1구조체(GS1)에 접촉되어 구름 회전될 수 있고, 외부 구동부에 의해 강제 회전되면서 제1구조체(GS1)를 강제 이동시킬 수도 있다.The rotating body 230 may be configured in a state capable of free rotation, or may be configured in a state capable of forced rotation by an external driving unit. That is, it may be rolled and rotated in contact with the first structure GS1 moved by the roll-to-roll process, and the first structure GS1 may be forcibly moved while being forcibly rotated by an external driving unit.
회전체(230)는 내측회전부(231) 및 외측회전부(235)를 포함할 수 있다.The rotating body 230 may include an inner rotating part 231 and an outer rotating part 235 .
내측회전부(231)는 회전체(230)의 중심부를 형성하며, 내부에는 부압발생부(210)에 발생된 부압이 전달되도록 폭방향으로 연장하여 형성되는 중심홀(232)을 가질 수 있다. 또한, 내측회전부(231)는 중심홀(232)에서 연통되어 외면으로 연장하여 형성되는 분기유로(233)를 가질 수 있다. 따라서, 부압발생부(210)에 발생된 부압은 중심홀(232) 및 분기유로(233)를 거쳐 내측회전부(231)의 외면으로 전달될 수 있다.The inner rotating part 231 forms the center of the rotating body 230 and may have a central hole 232 extending in the width direction so that the negative pressure generated by the negative pressure generating part 210 is transmitted therein. In addition, the inner rotating part 231 may have a branch passage 233 formed to communicate with the central hole 232 and extend to the outer surface. Accordingly, the negative pressure generated in the negative pressure generating unit 210 may be transferred to the outer surface of the inner rotation unit 231 via the central hole 232 and the branch passage 233 .
분기유로(233)는 방사형 유로(233a) 및 링형 유로(233b)를 포함할 수 있다.The branch passage 233 may include a radial passage 233a and a ring-shaped passage 233b.
방사형 유로(233a)는 중심홀(232)을 중심으로 외측으로 방사형으로 배치될 수 있다. 따라서, 중심홀(232)로부터 전달된 부압은 내측회전부(231)의 외주면 원주방향으로 고르게 전달될 수 있다.The radial passages 233a may be radially disposed outward from the center hole 232 . Therefore, the negative pressure transmitted from the center hole 232 can be evenly transmitted in the circumferential direction of the outer circumferential surface of the inner rotating part 231 .
링형 유로(233b)는 내측회전부(231)의 외면에 링 형상으로 오목하게 형성될 수 있다. 따라서, 방사형 유로(233a)로부터 전달된 부압은 링형 유로(233b)에 의해 내측회전부(231)의 원주방향에 대해 고르게 전달될 수 있다. 이러한 링형 유로(233b)는 내측회전부(231)의 폭방향을 따라 이격하여 배치될 수 있다.The ring-shaped passage 233b may be concavely formed in a ring shape on the outer surface of the inner rotating part 231 . Therefore, the negative pressure transmitted from the radial passage 233a can be evenly transmitted in the circumferential direction of the inner rotary part 231 by the ring-shaped passage 233b. These ring-shaped passages 233b may be spaced apart from each other along the width direction of the inner rotating part 231 .
외측회전부(235)는 회전체(230)의 외측을 형성하며, 내측회전부(231)의 외면에 배치될 수 있다. 외측회전부(235)는 그래핀 복합 구조체인 제1구조체(GS1)의 일면을 접촉 지지할 수 있다. 또한, 외측회전부(235)는 분기유로(233)와 연통되는 복수의 흡착홀(236)을 가질 수 있다.The outer rotation unit 235 forms an outer side of the rotating body 230 and may be disposed on an outer surface of the inner rotation unit 231 . The outer rotation unit 235 may contact and support one surface of the first structure GS1, which is a graphene composite structure. In addition, the outer rotation unit 235 may have a plurality of suction holes 236 communicating with the branch passage 233 .
이에 따라, 부압발생부(210)에 생성된 부압은 중심홀(232), 방사형 유로(233a), 링형 유로(233b) 및 흡착홀(236)을 거치면서 회전체(230)의 외주면 원주방향에 대해 전체적으로 고른 흡착력을 생성할 수 있다.Accordingly, the negative pressure generated in the negative pressure generator 210 is applied to the outer circumference of the rotating body 230 in the circumferential direction while passing through the central hole 232, the radial passage 233a, the ring-shaped passage 233b, and the suction hole 236. It is possible to create an even adsorption power for the whole.
커버부(250)는 제1구조체(GS1)에 접촉하는 회전체(230)의 접촉 영역을 제외한 회전체(230)의 나머지 영역을 감싸도록 마련될 수 있다.The cover part 250 may be provided to cover the remaining area of the rotating body 230 except for the contact area of the rotating body 230 contacting the first structure GS1.
이러한 커버부(250)는 회전체(230)를 회전 가능하게 지지하는 동시에, 제1구조체(GS1)에 접촉하는 회전체(230)의 접촉 영역을 제외한 회전체(230)의 나머지 영역에 존재하는 흡착홀(236)을 막아, 부압이 불필요하게 소실되는 것을 방지할 수 있다. 즉, 회전체(230)의 흡착홀(236)로 전달되는 부압은 제1구조체(GS1)에 접촉하는 접촉 영역에 집중될 수 있고, 이에 따라, 상대적으로 낮은 부압 조건에서도 제1구조체(GS1)의 주름을 보다 효과적으로 평탄화할 수 있다.The cover part 250 rotatably supports the rotating body 230 and at the same time exists in the remaining area of the rotating body 230 excluding the contact area of the rotating body 230 contacting the first structure GS1. By blocking the suction hole 236, it is possible to prevent unnecessary loss of negative pressure. That is, the negative pressure transmitted to the adsorption hole 236 of the rotating body 230 can be concentrated in the contact area in contact with the first structure GS1, and thus, the first structure GS1 can be generated even under a relatively low negative pressure condition. wrinkles can be more effectively flattened.
그리고, 주름 평탄화유닛(100)은 실링부재(260)를 더 포함할 수 있다.Also, the wrinkle flattening unit 100 may further include a sealing member 260 .
실링부재(260)는 커버부(250)의 내면에 배치될 수 있으며, 제1구조체(GS1)에 접촉하는 회전체(230)의 접촉 영역을 제외한 회전체(230)의 나머지 영역에 밀착될 수 있다. 이러한 실링부재(260)는 회전체(230)를 회전 가능하게 지지하는 동시에, 회전체(230)의 접촉 영역을 제외한 회전체(230)의 나머지 영역에 존재하는 흡착홀(236)을 막아, 부압이 불필요하게 소실되는 것을 방지할 수 있다. 실링부재(260)로는 마찰계수가 작은 시트, 슬리브, 볼(ball) 등이 사용될 수 있다.The sealing member 260 may be disposed on the inner surface of the cover part 250 and may be in close contact with the rest of the rotating body 230 except for the contact area of the rotating body 230 contacting the first structure GS1. there is. The sealing member 260 rotatably supports the rotating body 230 and at the same time blocks the suction hole 236 existing in the remaining area of the rotating body 230 except for the contact area of the rotating body 230, thereby providing negative pressure. This can be prevented from being lost unnecessarily. As the sealing member 260, a sheet, sleeve, ball, or the like having a small friction coefficient may be used.
도 5는 본 발명의 다른 실시예에 따른 주름 평탄화유닛을 설명하기 위한 예시도이다.5 is an exemplary view for explaining a wrinkle flattening unit according to another embodiment of the present invention.
도 5를 참조하면, 본 실시예에 따른 롤러부 역시 부압발생부, 회전체(240) 및 커버부(250)를 포함할 수 있다.Referring to FIG. 5 , the roller unit according to the present embodiment may also include a negative pressure generating unit, a rotating body 240 and a cover unit 250 .
본 실시예에 따른 롤러부는 회전체(240)의 구성에서 전술한 롤러부(200)의 회전체(230)와 차이점을 가지고, 나머지 다른 구성들은 전술한 롤러부(200)의 구성들과 동일하게 구성될 수 있다.The roller unit according to this embodiment has a difference from the rotating body 230 of the roller unit 200 described above in the configuration of the rotating body 240, and the other components are the same as those of the roller unit 200 described above. can be configured.
본 실시예에 따른 회전체(240) 역시 내측회전부(241) 및 외측회전부(245)를 포함할 수 있다.The rotating body 240 according to the present embodiment may also include an inner rotating portion 241 and an outer rotating portion 245 .
내측회전부(241)는 부압발생부에 발생된 부압이 전달되도록 폭방향으로 연장하여 형성되는 중심홀(242)을 가진다. 또한, 내측회전부(241)는 중심홀(242)에서 연통되어 외면으로 연장하여 형성되는 분기유로(243)를 가질 수 있다. 따라서, 부압발생부에 발생된 부압은 중심홀(242) 및 분기유로(243)를 거쳐 내측회전부(243)의 외주면으로 전달될 수 있다.The inner rotating part 241 has a central hole 242 extending in the width direction so that the negative pressure generated in the negative pressure generating part is transmitted. In addition, the inner rotating part 241 may have a branch passage 243 formed to communicate with the central hole 242 and extend to the outer surface. Accordingly, the negative pressure generated in the negative pressure generating unit may be transferred to the outer circumferential surface of the inner rotation unit 243 via the central hole 242 and the branch passage 243 .
본 실시예에 따른 분기유로(243)는 방사형 유로를 포함할 수 있다. 즉, 방사형 유로는 중심홀(242)을 중심으로 방사형 배치될 수 있고, 중심홀(242)로부터 전달된 부압은 내측회전부(241)의 외주면 원주방향으로 고르게 전달될 수 있다.The branch passage 243 according to the present embodiment may include a radial passage. That is, the radial passages may be radially arranged around the central hole 242 , and the negative pressure transmitted from the central hole 242 may be evenly transmitted in the circumferential direction of the outer circumferential surface of the inner rotation unit 241 .
외측회전부(245)는 내측회전부(241)의 외면에 배치되어 그래핀 복합 구조체의 일면을 접촉 지지할 수 있다. 또한, 외측회전부(245)는 분기유로(243)와 연통되는 복수의 흡착홀을 가질 수 있다.The outer rotation unit 245 may be disposed on an outer surface of the inner rotation unit 241 to contact and support one surface of the graphene composite structure. In addition, the outer rotation unit 245 may have a plurality of suction holes communicating with the branch passage 243 .
한편, 본 실시예에 따른 내측회전부(241) 및 외측회전부(245)는 개별적으로 제작된 후 조립되어 일체로 제작될 수 있고, 내측회전부(241) 및 외측회전부(245)는 서로 다른 소재로 구성될 수 있다.On the other hand, the inner rotation unit 241 and the outer rotation unit 245 according to the present embodiment may be individually manufactured and then assembled and integrally manufactured, and the inner rotation unit 241 and the outer rotation unit 245 are made of different materials. It can be.
또한, 외측회전부(245)는 미세 기공을 가지는 다공성 소재를 포함할 수 있다. 외측회전부(245)는 복수의 흡착홀(236: 도 4 참조)에 대응하는 미세 기공을 통하여 그래핀 복합 구조체에 흡착력을 전달할 수 있다. 외측회전부(245)로는 미세 기공을 가지는 세라믹과 같은 당업계에 공지된 다양한 다공성 소재를 이용할 수 있다.In addition, the outer rotating portion 245 may include a porous material having micropores. The outer rotation unit 245 may transfer adsorption force to the graphene composite structure through micropores corresponding to the plurality of adsorption holes 236 (see FIG. 4). As the outer rotation unit 245, various porous materials known in the art, such as ceramics having micropores, may be used.
또한, 외측회전부(245)로 다공성 소재를 사용함으로써 링형 유로(233b: 도 4 참조)가 배제된 방사형 분기유로(243)만을 구성하더라도 중심홀(242)에 형성된 부압은 방사형 분기유로(243) 및 외측회전부(245)의 다공성 흡착홀을 통과하는 과정에서 외측회전부(245)의 외주면 전체적으로 고르게 전달될 수 있다.In addition, even if only the radial branch passage 243 excluding the ring-shaped passage 233b (see FIG. 4) is configured by using a porous material as the outer rotating portion 245, the negative pressure formed in the center hole 242 is not applied to the radial branch passage 243 and In the process of passing through the porous adsorption hole of the outer rotation unit 245, the outer circumferential surface of the outer rotation unit 245 may be evenly transferred.
한편, 도시되진 않았지만, 본 발명에 따른 주름 평탄화유닛은 제1적층부(20) 및 에칭부(30) 사이에 배치되는 것을 중심으로 설명하였지만, 이와 달리, 증착부(10) 및 제2롤(R2) 사이, 에칭부(30) 및 제2적층부(40) 사이, 제2적층부(40) 및 박리부(50) 사이, 박리부(50) 및 제6롤(R6) 사이 영역 중 어느 한 영역에 배치될 수도 있고, 각 영역마다 배치될 수도 있다.On the other hand, although not shown, the wrinkle flattening unit according to the present invention has been described centering on being disposed between the first stacking unit 20 and the etching unit 30, but unlike this, the deposition unit 10 and the second roll ( R2), between the etching unit 30 and the second stacking unit 40, between the second stacking unit 40 and the peeling unit 50, or between the peeling unit 50 and the sixth roll R6. It may be arranged in one area or may be arranged in each area.
도 6은 본 발명의 다른 실시예에 따른 그래핀 복합 구조체 제조장치를 설명하기 위한 예시도이다.6 is an exemplary diagram for explaining an apparatus for manufacturing a graphene composite structure according to another embodiment of the present invention.
앞서 설명한 일실시예에 따른 그래핀 복합 구조체 제조장치에 의한 주름 평탄화유닛(100)은 제1적층부(20) 및 에칭부(30) 사이에 추가적으로 배치되는 것인데, 도 6에서와 같이, 본 실시예에 따른 그래핀 복합 구조체 제조장치에 의한 주름 평탄화유닛(1000)은 제1적층부(20: 도 2 참조)에 구비될 수도 있다.The wrinkle flattening unit 100 by the graphene composite structure manufacturing apparatus according to the embodiment described above is additionally disposed between the first stacking unit 20 and the etching unit 30, as shown in FIG. 6, in this embodiment. The wrinkle flattening unit 1000 according to the graphene composite structure manufacturing apparatus according to the example may be provided in the first stacking unit 20 (see FIG. 2).
즉, 본 실시예에 따른 주름 평탄화유닛(1000)은 증착부(10)를 거친 후, 그래핀(G)이 합성된 제1기판(1)의 타면에 제2기판(2)을 적층하여 제1구조체(GS1)를 제조하는 기능과, 제1구조체(GS1)에 존재하는 주름을 평탄화하는 기능을 동시에 수행할 수 있다.That is, in the wrinkle flattening unit 1000 according to the present embodiment, after passing through the deposition unit 10, the second substrate 2 is laminated on the other surface of the first substrate 1 on which graphene (G) is synthesized. A function of manufacturing the first structure GS1 and a function of flattening wrinkles existing in the first structure GS1 may be simultaneously performed.
본 실시예에 따른 주름 평탄화유닛(1000)은 앞서 설명한 주름 평탄화유닛(100)과 실질적으로 동일하게 수행될 수 있다.The wrinkle flattening unit 1000 according to the present embodiment may perform substantially the same as the wrinkle flattening unit 100 described above.
그리고, 주름 평탄화유닛(1000)은 제1구조체(GS1)에 존재하는 주름을 평탄화하는 것과 동시에, 그래핀(G)이 합성된 제1기판(1)의 타면에 제2기판(2)을 적층할 수 있도록, 롤러부(200)의 회전체(230)는 제1적층롤(21: 도 2 참조)과 동일한 소재 및 적층 기능성이 부여될 수 있고, 가압부(300)의 지지롤러는 제2적층롤(22)과 동일한 소재 및 적층 기능성이 부여될 수 있다.Further, the wrinkle flattening unit 1000 flattens the wrinkles existing in the first structure GS1 and at the same time laminates the second substrate 2 on the other surface of the first substrate 1 synthesized with graphene (G). In order to do this, the rotating body 230 of the roller unit 200 may be given the same material and laminating functionality as the first stacking roll 21 (see FIG. 2), and the support roller of the pressing unit 300 may be provided with the second stacking roll 21. The same material and laminating functionality as the laminating roll 22 may be provided.
상술한 바와 같이 도면을 참조하여 본 발명의 바람직한 실시예를 설명하였지만, 해당 기술 분야의 숙련된 당업자라면, 하기의 청구범위에 기재된 본 발명의 사상 및 영역으로부터 벗어나지 않는 범위 내에서 본 발명을 다양하게 수정 또는 변경시킬 수 있다.As described above, the preferred embodiments of the present invention have been described with reference to the drawings, but those skilled in the art can make various modifications to the present invention within the scope not departing from the spirit and scope of the present invention described in the claims below. may be modified or changed.
본 발명에 따른 주름 평탄화유닛 및 이를 포함하는 그래핀 복합 구조체 제조장치는 롤러부 및 가압부를 통하여 롤투롤 공정으로 제조되는 그래핀 복합 구조체의 연속된 제조 과정에 주름 평탄화유닛이 용이하게 적용되어 그래핀 복합 구조체에 발생된 주름을 효과적으로 평탄화할 수 있고, 그래핀 복합 구조체의 생산 수율을 높일 수 있기 때문에 산업상 널리 사용될 수 있다. According to the present invention, the wrinkle flattening unit and the graphene composite structure manufacturing apparatus including the same are easily applied to the continuous manufacturing process of the graphene composite structure manufactured by the roll-to-roll process through the roller part and the pressing part, so that the graphene flattening unit is easily applied. Since wrinkles generated in the composite structure can be effectively flattened and the production yield of the graphene composite structure can be increased, it can be widely used in industry.

Claims (6)

  1. 그래핀 복합 구조체에 존재하는 주름을 평탄화하는 주름 평탄화유닛으로서,A wrinkle flattening unit for flattening wrinkles existing in a graphene composite structure,
    이동하는 상기 그래핀 복합 구조체의 일면을 접촉 지지하고, 접촉된 상기 그래핀 복합 구조체의 일면을 흡착하며 흡착력에 의해 상기 그래핀 복합 구조체에 존재하는 주름이 평탄화되도록 하는 롤러부; 및a roller unit contacting and supporting one surface of the moving graphene composite structure, adsorbing the contact surface of the graphene composite structure, and flattening wrinkles existing in the graphene composite structure by an adsorption force; and
    상기 그래핀 복합 구조체의 타면에 배치되며, 상기 롤러부 방향으로 상기 그래핀 복합 구조체를 가압하는 가압부;를 포함하고,A pressing unit disposed on the other surface of the graphene composite structure and pressurizing the graphene composite structure in the direction of the roller unit;
    상기 롤러부는,The roller part,
    부압발생부와,a negative pressure generating unit;
    상기 그래핀 복합 구조체의 폭방향으로 연장하여 형성되며, 상기 부압발생부에 발생된 부압이 전달되는 중심홀과 상기 중심홀에서 연통되어 외면으로 연장하여 형성되는 분기유로를 가지는 내측회전부와, 상기 내측회전부의 외면에 배치되며 상기 그래핀 복합 구조체의 일면을 접촉 지지하고 상기 분기유로와 연통되는 복수의 흡착홀을 가지는 외측회전부를 구비하는 회전체와,an inner rotating part extending in the width direction of the graphene composite structure and having a central hole through which the negative pressure generated in the negative pressure generating part is transmitted and a branching passage extending from the central hole and extending to an outer surface; A rotating body disposed on an outer surface of the rotating unit, contacting and supporting one surface of the graphene composite structure, and having an external rotating unit having a plurality of suction holes communicating with the branch passage;
    상기 그래핀 복합 구조체에 접촉하는 상기 외측회전부의 접촉 영역을 제외한 나머지 영역을 감싸도록 마련되는 커버부를 포함하는 것을 특징으로 하는 주름 평탄화유닛.Wrinkle flattening unit characterized in that it comprises a cover portion provided to surround the remaining area except for the contact area of the outer rotation unit contacting the graphene composite structure.
  2. 제1항에 있어서,According to claim 1,
    상기 가압부는 스퀴지 또는 지지롤러를 포함하는 것을 특징으로 주름 평탄화유닛.The pressing unit wrinkle flattening unit, characterized in that it comprises a squeegee or a support roller.
  3. 제1항에 있어서,According to claim 1,
    상기 분기유로는,In the branch flow,
    상기 중심홀 및 상기 흡착홀이 연통되도록 상기 중심홀을 중심으로 방사형 배치되는 방사형 유로와,A radial passage disposed radially around the center hole so that the center hole and the suction hole communicate with each other;
    상기 내측회전부의 폭방향을 따라 이격하여 배치되며, 상기 내측회전부의 외면에 링 형상으로 오목하게 형성되어 상기 내측회전부의 원주방향에 대해 부압이 고르게 전달되도록 하는 링형 유로를 포함하는 것을 특징으로 하는 주름 평탄화 유닛.Corrugations characterized in that it comprises a ring-shaped passage spaced apart from each other along the width direction of the inner rotation unit and concavely formed in a ring shape on the outer surface of the inside rotation unit so that the negative pressure is evenly transmitted in the circumferential direction of the inside rotation unit. flattening unit.
  4. 제1항에 있어서,According to claim 1,
    상기 내측회전부 및 상기 외측회전부는 개별적으로 제작된 후 조립되어 일체를 이루며,The inner rotating part and the outer rotating part are individually manufactured and then assembled to form an integral body,
    상기 외측회전부는 상기 복수의 흡착홀을 가지도록 미세 기공을 구비하는 다공성 소재를 포함하는 것을 특징으로 하는 주름 평탄화 유닛.The wrinkle flattening unit, characterized in that the outer rotation unit comprises a porous material having micropores to have the plurality of suction holes.
  5. 제1항에 있어서,According to claim 1,
    상기 커버부의 내면에 배치되며, 상기 그래핀 복합 구조체에 접촉하는 상기 회전체의 접촉 영역을 제외한 나머지 영역에 밀착되고, 상기 회전체를 회전 가능하게 지지하는 동시에, 상기 회전체의 일부 흡착홀을 통하여 부압이 소실되는 것을 방지하는 실링부재를 더 포함하는 것을 특징으로 하는 주름 평탄화유닛.It is disposed on the inner surface of the cover unit, adheres to the rest of the area except for the contact area of the rotating body in contact with the graphene composite structure, rotatably supports the rotating body, and passes through a part of the suction hole of the rotating body. The wrinkle flattening unit further comprises a sealing member preventing loss of negative pressure.
  6. 제1항 내지 제5항 중 어느 한 항에 기재된 주름 평탄화유닛을 포함하는 것을 특징으로 하는 그래핀 복합 구조체 제조장치.A graphene composite structure manufacturing apparatus comprising the wrinkle flattening unit according to any one of claims 1 to 5.
PCT/KR2021/018334 2021-11-26 2021-12-06 Wrinkle-smoothing unit, and graphene composite structure preparation apparatus comprising same WO2023095994A1 (en)

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