WO2023019826A1 - 一种光学成像镜头的像差检测***及像差检测方法 - Google Patents

一种光学成像镜头的像差检测***及像差检测方法 Download PDF

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WO2023019826A1
WO2023019826A1 PCT/CN2021/138145 CN2021138145W WO2023019826A1 WO 2023019826 A1 WO2023019826 A1 WO 2023019826A1 CN 2021138145 W CN2021138145 W CN 2021138145W WO 2023019826 A1 WO2023019826 A1 WO 2023019826A1
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imaging
aberration
parallel plate
lens
axis
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PCT/CN2021/138145
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English (en)
French (fr)
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周志盛
刘鹏
章逸舟
陈良培
韩军
罗阿郁
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中国科学院深圳先进技术研究院
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties

Definitions

  • the invention relates to the field of optical imaging lens measurement, in particular to an aberration detection system and an aberration detection method of an optical imaging lens.
  • Optical imaging lens is an essential part of machine vision system, which directly affects the quality of optical imaging.
  • an object point through an optical imaging lens looks like a diffractive Airy disk. But in actual imaging, the shape and position of the image are different from the ideal calculation results. This difference between the actual image and the ideal image is called aberration.
  • Aberration is an inherent characteristic of optical imaging lenses. To detect and analyze the aberration of the lens is an important content to test whether the lens meets the design and use requirements. Traditionally, aberrations are evaluated by detecting the lens point spread function or modulation transfer function, but with the development of new optical imaging technology, people pay more and more attention to the individual aberrations.
  • the optical lens aberration detection device includes: a point light source, a lens fixing claw, a slit plate and a target paper, the lens fixing claw is located between the point light source and the target paper, and the slit plate is installed on the lens fixing claw facing the target paper
  • One side of the slit plate is provided with a strip-shaped slit, the width of the strip-shaped slit is d, the length is nd, n is a positive number, and the target paper is provided with several horizontal lines and vertical lines.
  • the formed grid also discloses an optical lens aberration detection method.
  • Invention Patent B proposes an imaging system aberration detection method and device. Specifically, the imaging system aberration detection method is applied to an aberration detector.
  • the aberration detector includes a microlens array and a CCD detector.
  • the microlens array is placed on the focal plane of the imaging system to be tested, and the CCD detector is placed on the On the focal plane of the microlens array, the microlens array is used to divide the complex amplitude of the light at the focal plane of the entrance pupil, so as to form a low-resolution image of the observation target at the CCD detector.
  • This scheme uses the focal plane Hartmann wavefront sensor to replace the traditional Hartmann wavefront sensor, which has the ability to obtain the aberration of the imaging system with a large field of view in a single measurement, but it needs to use a complex and expensive Hartmann sensor, and it does not The method of detecting single aberration is given.
  • the present invention provides an aberration detection system and an aberration detection method of an optical imaging lens.
  • the specific plan is as follows:
  • An aberration detection system for an optical imaging lens comprising a detection module and an analysis module, the detection module including a light source device, an imaging target, a collimating lens, an imaging lens to be tested, a detection camera, and at least three different parallel plates;
  • Each part of the detection module is arranged in sequence according to the order of the light source device, the imaging target, the collimating lens, the imaging lens to be tested, the parallel plate and the detection camera, and each part Align the center with the common optical axis;
  • the light source device is used to provide monochromatic or quasi-monochromatic uniform illumination and parallel outgoing light beams;
  • the imaging target is located at the front focal plane of the collimating lens, and the outgoing light beam illuminates the imaging target in a transmission manner;
  • the collimating lens is used to collimate the beam passing through the imaging target
  • the imaging lens to be tested is located at the rear side of the collimating lens, and is used for imaging the imaging target;
  • the parallel plate is located at the rear side of the imaging lens to be tested, and is used to adjust the axial position of the imaging surface of the imaging lens to be tested to obtain different defocus amounts;
  • the detection camera is located on the rear side of the parallel plate, and is used to acquire images under different defocus amounts;
  • the analysis module is used to solve the wave aberration of the imaging lens to be tested according to the collected image, decompose the wave aberration to obtain individual aberrations, and calculate a point spread function and a modulation transfer function.
  • the detection module further includes a lens clamping adjustment device
  • the lens clamping and adjusting device is used to clamp, adjust the position and fix the imaging lens to be tested, so that the imaging lens to be tested is coaxial with the common optical axis.
  • the light source device includes a point light source, a first collimating lens, a narrow-band filter, a converging lens, a pinhole and a second collimating lens, and each part of the light source device is in accordance with the point
  • the light source, the first collimating lens, the narrow-band filter, the converging lens, the pinhole and the second collimating lens are sequentially arranged, and the centers of each part are aligned with the common optical axis;
  • the point light source is located at the front focal point of the first collimating lens for providing divergent light beams
  • the first collimating lens is used to collimate the divergent light beam into a first parallel light
  • the narrow-band filter is used to filter out preset wavelength components in the first parallel light to obtain quasi-monochromatic light
  • the converging lens is used for converging the quasi-monochromatic light to obtain a converging light beam
  • the pinhole is located at the back focus of the converging lens for spatially filtering the converging light beam
  • the pinhole is located at the front focal point of the second collimator lens, the light beam passing through the pinhole propagates as a quasi-spherical wave, and the monochromatic or quasi-monochromatic light beam is obtained after passing through the second collimating lens. Uniform illumination with parallel exit beams.
  • the imaging target is provided with a target pattern
  • the target pattern includes on-axis object points and off-axis object points located in the horizontal and vertical directions;
  • the distance between any two adjacent object points in the horizontal and vertical directions satisfies the following conditions:
  • d is the distance between object points
  • ⁇ max is the maximum imaging wavelength
  • f is the focal length of the collimating lens.
  • the on-axis object point is a circular hole set in the target center of the target pattern
  • the off-axis object point is three circular holes arranged on the left, right, up, down, and left sides of the on-axis object point;
  • ⁇ d is the distance between two adjacent circular holes
  • f is the focal length of the collimating lens
  • the root mean square deviation of the wavefront of the collimating lens to the reference sphere centered on the diffraction focus does not exceed ⁇ /50, where ⁇ is the imaging wavelength.
  • the front and rear surfaces of the parallel plates are parallel to each other and perpendicular to the common optical axis;
  • the centers of the parallel plates are aligned with the common optical axis
  • the parallel plates have uniform refractive index and transmit light.
  • the detection module is provided with a first parallel plate, a second parallel plate and a third parallel plate, and the thickness of the first parallel plate, the second parallel plate and the third parallel plate is There is a difference in the refractive index;
  • the first parallel plate is used for clear imaging
  • the second parallel plate is used for front defocus imaging
  • the third parallel plate is used for post defocus imaging.
  • the thickness of the first parallel plate is d 1 and the refractive index is n 1 ; the thickness of the second parallel plate is d 2 and the refractive index is n 2 ; the thickness of the third parallel plate is Thickness d 3 , refractive index n 3 ;
  • the first parallel plate, the second parallel plate and the third parallel plate meet the following conditions:
  • is the imaging wavelength
  • F is the focal length of the imaging lens to be tested
  • D is the exit pupil diameter of the imaging lens to be tested.
  • the detection module is further provided with a turntable, the turntable is uniformly provided with openings along the circumference, and a plurality of parallel plates are fixedly connected to the turntable through the openings;
  • the analysis device specifically includes:
  • the wave aberration of the imaging lens to be tested is solved by using the optical imaging mathematical model and the optimization estimation algorithm, the wave aberration is decomposed to obtain each individual aberration, and the point spread function and the modulation transfer function are calculated;
  • the wave aberration includes on-axis aberration and off-axis aberration.
  • the detection module detects the monochromatic aberration of the imaging lens under test at different imaging wavelengths by adjusting the wavelength of the outgoing light beam.
  • the position of the detection camera on the detection module is fixed;
  • the detection camera is a high pixel resolution area array black and white camera.
  • An aberration detection method of an optical imaging lens suitable for the aberration detection system described in any one of the above, comprising the following:
  • Monochromatic or quasi-monochromatic uniform illumination parallel outgoing beams are emitted through the light source device;
  • the outgoing light beam illuminates the imaging target in a transmission manner
  • the wave aberration of the imaging lens to be tested is solved by the analysis module according to the collected image, the wave aberration is decomposed to obtain each individual aberration, and the point spread function and the modulation transfer function are calculated.
  • the aberration detection system further includes a lens clamping adjustment device
  • a monochromatic or quasi-monochromatic uniform illumination parallel exit beam is emitted by a light source device, it also includes:
  • the aberration detection system includes a first parallel plate, a second parallel plate and a third parallel plate, and the first parallel plate, the second parallel plate and the third parallel plate are There are differences in thickness and refractive index;
  • the second parallel plate is set to perform front defocus imaging, and N 2 front defocus images are obtained through the detection camera;
  • the third parallel plate is set to perform post-defocus imaging, and N 3 post-defocus images are acquired by the detection camera.
  • the thickness of the first parallel plate is d 1 and the refractive index is n 1 ; the thickness of the second parallel plate is d 2 and the refractive index is n 2 ; the thickness of the third parallel plate is Thickness d 3 , refractive index d 3 ;
  • the first parallel plate, the second parallel plate and the third parallel plate meet the following conditions:
  • is the imaging wavelength
  • F is the focal length of the imaging lens to be tested
  • D is the exit pupil diameter of the imaging lens to be tested.
  • the N 1 focal plane images are averaged to obtain the first image I 1 ;
  • the normalized focal plane image i 1 satisfies:
  • the third image I3 is normalized to obtain a normalized defocused image i3 , and the normalized defocused image i3 satisfies:
  • (m,n) is the image pixel position.
  • an on-axis object point is set at the target center of the imaging target, and a plurality of off-axis object points are set around the on-axis object point;
  • ⁇ 1 min -1 [E(i 1s ,i 2s ,i 3s ,d 1 ,n 1 ,d 2 ,n 2 , d 3 ,n 3 ,F,D, ⁇ )]
  • ⁇ 1 is the axial wave aberration
  • E is the objective function
  • is the imaging wavelength
  • F is the focal length of the imaging lens to be tested
  • D is the exit pupil diameter of the imaging lens to be tested
  • d 1 is the The thickness of the first parallel plate
  • n 1 is the refractive index of the first parallel plate
  • d 2 is the thickness of the second parallel plate
  • n 2 is the refractive index of the second parallel plate
  • d 3 is the The thickness of the third parallel plate
  • n 3 is the refractive index of the third parallel plate
  • On-axis point spread function and modulation transfer function are calculated according to the on-axis wave aberration.
  • the first off-axis sub-image i 1z of P ⁇ P pixels is intercepted from the second preset position in the normalized focal plane image i 1 , so that the image of the off-axis object point is located in the first off-axis sub-image
  • the center of the image i 1z , and the first off-axis sub-image i 1z does not include images of other object points;
  • ⁇ 2 min -1 [E(i 1z ,i 2z ,i 3z ,d 1 ,n 1 ,d 2 ,n 2 , d 3 ,n 3 ,F,D, ⁇ )]
  • ⁇ 2 is an off-axis wave aberration
  • E is an objective function
  • is an imaging wavelength
  • F is the focal length of the imaging lens to be tested
  • D is the exit pupil diameter of the imaging lens to be tested
  • d 1 is the The thickness of the first parallel plate
  • n 1 is the refractive index of the first parallel plate
  • d 2 is the thickness of the second parallel plate
  • n 2 is the refractive index of the second parallel plate
  • d 3 is the The thickness of the third parallel plate
  • n 3 is the refractive index of the third parallel plate
  • An off-axis point spread function and a modulation transfer function are calculated from the off-axis wave aberration.
  • the monochromatic aberration of the imaging lens under test at different imaging wavelengths is detected.
  • the invention provides an aberration detection system and an aberration detection method of an optical imaging lens, which solves the disadvantage that a single aberration detection cannot be performed in the prior art.
  • the detection accuracy of the aberration detection system is high, the operation is simple, and the detection cost is much lower than the traditional detection scheme.
  • Different parallel plates are used to change the defocus amount, the defocus amount is accurate and unique, and there is no wear and tear, and the maintenance cost is low.
  • the scheme provided by the present invention can not only realize the detection of traditional point spread function and modulation transfer function, but also can detect single aberration, realize the detection of on-axis aberration and off-axis aberration, and can also detect different wavelength imaging by adjusting the beam wavelength monochromatic aberration.
  • FIG. 1 is a schematic structural diagram of an aberration detection system according to an embodiment of the present invention.
  • Fig. 2 is a schematic diagram of components of a detection module according to an embodiment of the present invention.
  • FIG. 3 is a schematic structural diagram of a light source device according to an embodiment of the present invention.
  • Fig. 4 is a schematic diagram of a target pattern according to an embodiment of the present invention.
  • Fig. 5 is a schematic diagram of a light beam passing through a parallel plate according to an embodiment of the present invention.
  • Fig. 6 is a schematic diagram of the light beam passing through the parallel plate and falling on the detection camera according to the embodiment of the present invention.
  • Fig. 7 is a schematic diagram of a turntable according to an embodiment of the present invention.
  • Fig. 8 is a side view of the turntable of the embodiment of the present invention.
  • FIG. 9 is a flowchart of an aberration detection method according to an embodiment of the present invention.
  • This embodiment proposes an aberration detection system for an optical imaging lens, and the structural diagram of the aberration detection system is shown in Figure 1 of the specification.
  • the specific plan is as follows:
  • the aberration detection system includes a detection module 1 and an analysis module 2.
  • the analysis module 2 analyzes the image data collected by the detection module 1 to obtain the aberration of the imaging lens 6 to be tested.
  • the detection module 1 is mainly composed of a light source device 3 , an imaging target 4 , a collimator lens 5 , a detection camera 8 and at least three different parallel plates 7 .
  • the imaging lens 6 to be tested is located in the detection module 1 .
  • the detection module 1 also includes a lens clamping adjustment device 9 .
  • the components of the detection module 1 are shown in Figure 2 of the specification.
  • the light source device 3, the imaging target 4, the collimating lens 5, the imaging lens to be tested 6, the parallel plate 7, and the detection camera 8 are sequentially arranged centered on the common optical axis.
  • the target 4, the collimating lens 5, the imaging lens 6 to be tested, the parallel plate 7, and the detection camera 8 are arranged in sequence, and the centers of each part are aligned with the common optical axis.
  • the common optical axis in this embodiment is the optical axis of the detection module 1, which is arranged in the order of the light source device 3, the imaging target 4, the collimating lens 5, the imaging lens to be tested 6, the parallel plate 7, and the detection camera 8, and each composition The centers of the sections are traversed by a common optical axis.
  • the “sequentially arranged with the center aligned with the common optical axis” in this embodiment means that they are arranged in a specific order, and the central axes of the components are all passed through by the common optical axis.
  • the light source device 3 generates a monochromatic or quasi-monochromatic uniformly illuminating parallel outgoing light beam, and the parallel outgoing light beam illuminates the imaging target 4 in a transmission manner.
  • the imaging target 4 is located at the front focal plane of the collimating lens 5 , the parallel outgoing light beam emitted from the collimating lens 5 passes through the imaging lens 6 to be tested, the converging light beam passes through the parallel plate 7 , and finally is imaged by the detection camera 8 .
  • the variation of the defocus amount is realized by switching a variety of different parallel plates 7 .
  • the detection camera 8 takes pictures and collects images.
  • the wave aberration and individual aberrations are solved by using the optical imaging mathematical model and the optimal estimation algorithm, and the point spread function and modulation transfer function are calculated. Both on-axis and off-axis aberrations can be detected. .
  • the monochromatic aberration of imaging at different wavelengths can also be detected.
  • the light source device 3 is responsible for providing an imaging illumination source, and its main features include: (1) providing monochrome or quasi-monochrome uniform illumination and parallel exiting light source; (2) adjustable wavelength. By adjusting the wavelength of the outgoing light source, the monochromatic aberration of imaging at different wavelengths can be detected.
  • the light source device 3 includes a point light source 31 , a first collimator lens 32 , a narrow band filter 33 , a converging lens 34 , a pinhole 35 and a second collimator lens 36 .
  • Each part in the light source device 3 is arranged in sequence according to the order of the point light source 31, the first collimating lens 32, the narrow band filter 33, the converging lens 34, the pinhole 35 and the second collimating lens 36, and the point light source 31, the first The centers of a collimating lens 32 , a narrow band filter 33 , a converging lens 34 , a pinhole 35 and a second collimating lens 36 are aligned with a common optical axis.
  • the point light source 31 is a wide-spectrum point light source 31 located at the front focus of the first collimator lens 32 for providing divergent light beams.
  • the first collimating lens 32 collimates the diverging light beam into a first parallel light, and the first parallel light is approximately parallel light.
  • the first parallel light passes through the narrow-band filter 33, and the narrow-band filter 33 can filter out the preset wavelength components of the first parallel light, so that the first parallel light becomes quasi-monochromatic light.
  • the quasi-monochromatic light passes through the converging lens 34 and converges to obtain a converging light beam.
  • a pinhole 35 is placed at the back focus of the converging lens 34 to spatially filter the converging beam.
  • the pinhole 35 is located at the front focal point of the second collimating lens 36, and the light beam passing through the pinhole 35 propagates forward as a quasi-spherical wave, and obtains a uniformly illuminated parallel light source after passing through the collimating lens.
  • the imaging target 4 is located on the front focal plane of the collimating lens 5 and serves as the imaging target of the detection module 1 .
  • the imaging lens 6 to be tested images the target, and the aberration of the imaging lens 6 to be tested is analyzed according to the imaging result.
  • the imaging target 4 is provided with a target pattern.
  • the imaging target 4 is a transmission type, and the target pattern is provided with on-axis object points and off-axis object points in the horizontal and vertical directions.
  • the distance between any two object points satisfies the following conditions:
  • d is the distance between object points
  • ⁇ max is the maximum imaging wavelength
  • f is the focal length of the collimating lens 5 .
  • the target pattern of an imaging target 4 is as shown in Fig. 4 of the specification.
  • a circular hole set in the target center of the target pattern is used as the on-axis object point.
  • the three circular holes set at the left, right, top, bottom, and bottom of the on-axis object point are used as off-axis object points. There is only one on-axis object point, and 12 off-axis object points.
  • the collimating lens 5 is located at the rear side of the imaging target 4 and is used for collimating the light beam passing through the imaging target 4 .
  • the transmitted light from the center hole of the target is collimated into a parallel beam parallel to the optical axis, and the transmitted light from other circular holes is collimated into a parallel beam with a small angle relative to the optical axis, and then enters the imaging lens 6 to be tested.
  • the functional characteristics of the collimating lens 5 include: the aberration is fully corrected, and its wave aberration is negligible compared with the wave aberration of the lens to be tested.
  • the root mean square deviation of the wavefront of the collimating lens 5 to the reference sphere centered on the diffraction focus shall not exceed ⁇ /50, where ⁇ is the imaging wavelength.
  • the imaging lens 6 to be tested is located at the rear side of the collimator lens 5 , and its position is adjusted and fixed by the lens clamping adjustment device 9 .
  • the lens clamping and adjusting device 9 is used for clamping, adjusting the position and fixing the imaging lens 6 to be tested.
  • the functional characteristics of the lens clamping adjustment device 9 include: (1) can clamp and fix lenses with different outer diameters; (2) can make the imaging lens 6 to be tested coaxial with the common optical axis of the detection module 1; (3) ) can adjust the position of the lens along the radial direction and axial direction of the detection module 1, align the center of the imaging lens 6 to be tested with the common optical axis of the detection module 1 through radial adjustment, and make the imaging lens 6 to be tested form an image through axial adjustment
  • the image plane falls on the photosensitive surface of the detection camera 8 .
  • the parallel plate 7 is located at the rear side of the imaging lens 6 to be tested, and is used to adjust the axial position of the imaging plane of the imaging lens 6 to be tested.
  • the front and rear surfaces of the parallel plate 7 are perpendicular to the common optical axis, and the centers of the front and rear surfaces of the parallel plate 7 are aligned with the detection common optical axis.
  • the parallel plate 7 will not affect the image formed by the imaging lens 6 to be tested, but only moves the imaging image plane along the optical axis by an axial direction. displacement.
  • the axial displacement is related to the thickness of the plate.
  • the magnitude of the axial displacement ⁇ L can be changed.
  • the position of the detection camera 8 is fixed, and the axial position of the imaging plane is changed by changing the parallel plate 7, so that the images acquired by the detection camera 8 will have different defocus.
  • the photosensitive surface of the detection camera 8 is located at b, and for the parallel plate 7 shown in the figure, the imaging surface of the lens is also at b, at this time, the camera can obtain a clear focal plane image; when the parallel plate is removed After 7, the imaging image plane is at a, and what the camera acquires at this time is a rear defocused image; when the parallel plate 7 is replaced so that the imaging image plane is behind b, what the camera acquires at this time is a front defocused image.
  • the detection module 1 of this embodiment includes a series of parallel flat plates 7 to obtain in-focus images and out-of-focus blur images.
  • the functional characteristics of the parallel plate 7 include: (1) the parallelism of the front and rear surfaces of the plate is high; (2) the thickness of the plate is accurately known; (3) the thickness of the plate is as thin as possible; (4) the refractive index of the plate material is uniform and transparent, preferably, The material of the parallel plate 7 is optical glass; (5) At least three different parallel plates 7 are included, corresponding to clear imaging, front defocused imaging, and rear defocused imaging.
  • the multiple parallel flat plates 7 in this embodiment vary in thickness and refractive index, wherein air is equivalent to a flat plate with a thickness of 0 or a refractive index of 1.
  • These parallel plates 7 can be independent entities, and can also be a whole.
  • this embodiment proposes a structure for realizing plate replacement.
  • the structural connection relationship between the turntable and the parallel plate 7 is shown in Figure 7 of the specification, and the side view of the turntable is shown in Figure 8 of the specification.
  • the detection module 1 is provided with a turntable, and holes are evenly arranged on the turntable along the circumference, and different parallel flat plates 7 are covered on the holes and fixed; by rotating the turntable, the required flat plate enters the optical path to realize the freedom of the flat plate. switch.
  • phase difference wavefront detection is realized by collecting focal plane images and defocus images.
  • the parallel flat plate 7 is used to achieve defocusing, and the required amount of defocusing can be obtained by replacing the parallel flat plate 7 .
  • the defocus amount is accurate and unique, and there is no wear and tear, and the maintenance cost is low.
  • the traditional acquisition of the defocus amount is mainly realized by moving the detection camera 8 on a sliding rail or using multiple detection cameras 8 .
  • Using slide rails to move the detection camera 8 needs to achieve high-precision linear motion, and the defocus amount is often not accurate enough, and it is easy to wear and tear after long-term use, which affects the accuracy.
  • Using multiple detection cameras 8 requires precise registration of multi-camera images, which is difficult to operate and expensive.
  • the detection module 1 is provided with a first parallel plate, a second parallel plate and a third parallel plate, and the first parallel plate, the second parallel plate and the third parallel plate exist in thickness and refractive index. difference.
  • the first parallel plate is used for clear imaging
  • the second parallel plate is used for front defocused imaging
  • the third parallel plate is used for rear defocused imaging.
  • the thickness of the first parallel plate is d 1 and the refractive index is n 1 ; the thickness of the second parallel plate is d 2 and the refractive index is n 2 ; the thickness of the third parallel plate is d 3 and the refractive index is n 3 .
  • the first parallel plate, the second parallel plate and the third parallel plate meet the following conditions:
  • is the imaging wavelength
  • F is the focal length of the imaging lens 6 to be tested
  • D is the exit pupil diameter of the imaging lens 6 to be tested.
  • the detection camera 8 is located at the rear side of the parallel plate 7, and is used for shooting and collecting images.
  • the functional characteristics of the detection camera 8 include: (1) a high pixel resolution area array camera; (2) a high signal-to-noise ratio; (3) a black and white camera.
  • the detection camera 8 has a fixed position in the system. After the parallel plate 7 is replaced each time, the detection camera 8 takes pictures and collects images.
  • the analysis module 2 uses the optical imaging mathematical model and the optimal estimation algorithm to solve the wave aberration and each single wave aberration according to the series of images collected, and calculates the point spread function and the modulation transfer function.
  • This embodiment provides an aberration detection system of an optical imaging lens, which can satisfy the detection of traditional point spread function and modulation transfer function, and can also meet the detection of single aberration, realizing on-axis aberration and off-axis aberration
  • the monochromatic aberration of imaging at different wavelengths is detected by adjusting the wavelength of the exiting light source.
  • the detection accuracy of the aberration detection system is high, the operation is simple, and the detection cost is much lower than the traditional detection scheme.
  • Embodiment 1 is used to propose an aberration detection system for an optical imaging lens.
  • the flow chart of the aberration detection method is shown in the accompanying drawing. The specific plan is as follows:
  • the outgoing light beam illuminates the imaging target in a transmission manner
  • step 101 it also includes: installing the imaging lens to be tested on the lens clamping adjustment device; adjusting the position of the imaging lens to be tested in the radial direction through the lens clamping adjustment device, so that the center of the lens is aligned with the common optical axis;
  • the clamping adjustment device adjusts the position of the imaging lens to be tested in the axial position, so that the target image is clear; the imaging lens to be tested is locked and fixed.
  • the aberration detection system is provided with a first parallel plate, a second parallel plate and a third parallel plate, and the thickness and refractive index of the first parallel plate, the second parallel plate and the third parallel plate are different;
  • the thickness of the first parallel plate is d 1 and the refractive index is n 1 ; the thickness of the second parallel plate is d 2 and the refractive index is n 2 ; the thickness of the third parallel plate is d 3 and the refractive index is n 2 ;
  • the first parallel plate, the second parallel plate and the third parallel plate meet the following conditions:
  • is the imaging wavelength
  • F is the focal length of the imaging lens to be tested
  • D is the exit pupil diameter of the imaging lens to be tested.
  • I 1 is the first image
  • i 1 is the normalized focal plane image
  • (m, n) is the pixel position of the image.
  • I 2 is the second image
  • i 2 is the defocused image before normalization
  • (m,n) is the pixel position of the image.
  • I 3 is the third image
  • i 3 is the defocused image after normalization
  • (m, n) is the pixel position of the image.
  • An on-axis object point is set at the target center of the imaging target, and multiple off-axis object points are set around the on-axis object point;
  • ⁇ 1 min -1 [E(i 1s ,i 2s ,i 3s ,d 1 ,n 1 ,d 2 ,n 2 , d 3 ,n 3 ,F,D, ⁇ )]
  • ⁇ 1 is the axial wave aberration
  • E is the objective function
  • is the imaging wavelength
  • F is the focal length of the imaging lens to be tested
  • D is the exit pupil diameter of the imaging lens to be tested
  • d1 is the thickness of the first parallel plate
  • n 1 is the refractive index of the first parallel plate
  • d 2 is the thickness of the second parallel plate
  • n 2 is the refractive index of the second parallel plate
  • d 3 is the thickness of the third parallel plate
  • n 3 is the third parallel plate the refractive index
  • ⁇ 2 min -1 [E(i 1z ,i 2z ,i 3z ,d 1 ,n 1 ,d 2 ,n 2 , d 3 ,n 3 ,F,D, ⁇ )]
  • ⁇ 2 is the off-axis wave aberration
  • E is the objective function
  • is the imaging wavelength
  • F is the focal length of the imaging lens to be tested
  • D is the exit pupil diameter of the imaging lens to be tested
  • d1 is the thickness of the first parallel plate
  • n 1 is the refractive index of the first parallel plate
  • d 2 is the thickness of the second parallel plate
  • n 2 is the refractive index of the second parallel plate
  • d 3 is the thickness of the third parallel plate
  • n 3 is the third parallel plate the refractive index
  • This embodiment proposes an aberration detection method for an optical imaging lens, which is applicable to the aberration detection system in Embodiment 1, not only can realize the detection of traditional point spread function and modulation transfer function, but also can detect single aberration, The detection of on-axis aberration and off-axis aberration can be realized, and the monochromatic aberration of different wavelength imaging can also be detected by adjusting the beam wavelength.
  • the invention provides an aberration detection system and an aberration detection method of an optical imaging lens, which solves the disadvantage that a single aberration detection cannot be performed in the prior art.
  • the detection accuracy of the aberration detection system is high, the operation is simple, and the detection cost is much lower than the traditional detection scheme.
  • Different parallel plates are used to change the defocus amount, the defocus amount is accurate and unique, and there is no wear and tear, and the maintenance cost is low.
  • the scheme provided by the present invention can not only realize the detection of traditional point spread function and modulation transfer function, but also can detect single aberration, realize the detection of on-axis aberration and off-axis aberration, and can also detect different wavelength imaging by adjusting the beam wavelength monochromatic aberration.
  • each module or each step of the present invention described above can be realized by a general-purpose computing device, and they can be concentrated on a single computing device, or distributed on a network formed by multiple computing devices.
  • they can be implemented with executable program codes of computer devices, so that they can be stored in storage devices and executed by computing devices, or they can be made into individual integrated circuit modules, or a plurality of modules in them Or the steps are fabricated into a single integrated circuit module to realize.
  • the present invention is not limited to any specific combination of hardware and software.

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Abstract

一种光学成像镜头的像差检测***及像差检测方法,像差检测***包括检测模块(1)和分析模块(2),检测模块(1)包括光源装置(3)、成像靶标(4)、准直镜头(5)、待测成像镜头(6)、探测相机(8)和至少三种不同的平行平板(7)。光源装置(3)提供单色或准单色均匀照明平行出射光束;出射光束以透射的方式照亮成像靶标(4);准直镜头(5)对光束进行准直;待测成像镜头(6)对成像靶标(4)进行成像;通过平行平板(7)获取不同的离焦量;探测相机(8)采集图像;根据采集图像求解待测成像镜头(6)的波像差、点扩散函数和调制传递函数。既能够实现传统的点扩散函数和调制传递函数的检测,又可以检测单项像差,实现轴上像差和轴外像差的检测,还可检测不同波长成像的单色像差。

Description

一种光学成像镜头的像差检测***及像差检测方法 技术领域
本发明涉及光学成像镜头测量领域,具体而言,涉及一种光学成像镜头的像差检测***及像差检测方法。
背景技术
光学成像镜头是机器视觉***中必不可少的部件,直接影响光学成像质量的优劣。理想情况下,一个物点通过光学成像镜头得到的像是一个衍射艾里斑。但是在实际成像中,像的形状和位置都和理想计算结果不同。这种实际像与理想像之间的差异称为像差。
像差是光学成像镜头的内在特性,对镜头的像差进行检测和分析,是检验镜头是否满足设计和使用要求的重要内容。传统上通过检测镜头点扩散函数或者调制传递函数对像差进行评价,但是随着新型光学成像技术的发展,人们越来越关注各单项像差的情况。
发明专利A公开了一种光学镜头像差检测装置。具体地,光学镜头像差检测装置包括:点光源、镜头固定爪、狭缝板及靶纸,所述镜头固定爪位于点光源和靶纸之间,狭缝板安装在镜头固定爪面向靶纸的一侧,狭缝板上设有长条形狭缝,所述长条形狭缝的宽度为d,长度为nd,n为正数,所述靶纸上设有若干横线、纵线形成的网格,还公开了一种光学镜头像差检测方法。但在该方案中,认为nd毫米的口径内的像差小于λ/4,像差为可接受范围,λ为光的波长,因此该方案只能定性反映像差综合大小,无法给出定量结果,也无法对单项像差进行检测。
发明专利B提出了一种成像***像差检测方法及装置。具体地,所述成像***像差检测方法应用于像差检测仪,像差检测仪包括微透镜阵列及CCD探测器,微透镜阵列放置于待检测成像***的焦面上,CCD探测器放置在所述微透镜阵列的焦面上,微透镜阵列用于对入瞳焦平面处光的复振幅进行分割,以在CCD探测器处形成观测目标的低分辨图像。该方案利用焦面哈特曼波前传感器替代传统的哈特曼波前传感器,具有单次测量获得大视场成像***像差的能力,但是需要利用复杂昂贵的哈特曼传感器,而且并未给出对单项像差进行检测的方法。
因此,现有技术中普遍只能进行检测点扩散函数和调制传递函数的检测,缺乏能够进行单项像差检测的方案。
所以,亟需一种既能够检测点扩散函数和调制传递函数,又能检测单项像差的方案,能够解决上述问题。
发明内容
基于现有技术存在的问题,本发明提供了一种光学成像镜头的像差检测***及像差检测方法。具体方案如下:
一种光学成像镜头的像差检测***,包括检测模块和分析模块,所述检测模块包括光源装置、成像靶标、准直镜头、待测成像镜头、探测相机和至少三种不同的平行平板;
所述检测模块中的各部分按照所述光源装置、所述成像靶标、所述准直镜头、所述待测成像镜头、所述平行平板和所述探测相机的顺序依次设置,且各部分的中心对准公共光轴;
所述光源装置用于提供单色或准单色均匀照明平行出射光束;
所述成像靶标位于所述准直镜头的前焦面处,所述出射光束以透射的方式照亮所述成像靶标;
所述准直镜头用于对透过所述成像靶标的光束进行准直;
所述待测成像镜头位于所述准直镜头后侧,用于对所述成像靶标进行成像;
所述平行平板位于所述待测成像镜头后侧,用于调整所述待测成像镜头成像像面的轴向位置,获取不同的离焦量;
所述探测相机位于所述平行平板后侧,用于获取不同所述离焦量下的采集图像;
所述分析模块用于根据所述采集图像求解所述待测成像镜头的波像差,对波像差分解得到各单项像差,并计算点扩散函数和调制传递函数。
在一个具体实施例中,所述检测模块还包括镜头夹紧调整装置;
所述镜头夹紧调整装置用于对所述待测成像镜头进行夹紧、调整位置以及固定,使所述待测成像镜头与所述公共光轴同轴。
在一个具体实施例中,所述光源装置包括点光源、第一准直透镜、窄带滤光片、会聚透镜、针孔和第二准直透镜,所述光源装置中的各部分按照所述点光源、所述第一准直透镜、所述窄带滤光片、所述会聚透镜、所述针孔和所述第二准直透镜的顺序依次设置,且各部分的中心对准公共光轴;
所述点光源位于所述第一准直透镜的前焦点处,用于提供发散光束;
所述第一准直透镜用于将所述发散光束准直为第一平行光;
所述窄带滤光片用于滤除所述第一平行光中的预设波长成分,获取准单色光;
所述会聚透镜用于对所述准单色光进行会聚,得到会聚光束;
所述针孔位于所述会聚透镜的后焦点处,用于对所述会聚光束进行空间滤波;
所述针孔位于所述第二准直透镜的前焦点处,透过所述针孔的光束以准球面波传播,透过所述第二准直透镜后得到所述单色或准单色均匀照明平行出射光束。
在一个具体实施例中,所述成像靶标上设置有靶标图案;
所述靶标图案包括轴上物点和位于水平、垂直方向上的轴外物点;
在所述靶标图案中,位于水平、垂直方向上任意两个相邻物点的间距满足如下条件:
d≥10 4×λ maxf
其中,d为物点间距,λ max为最大成像波长,f为所述准直镜头的焦距。
在一个具体实施例中,所述轴上物点为所述靶标图案的靶标中心设置的1个圆孔;
所述轴外物点为所述轴上物点的左右上下各设置的3个圆孔;
在水平、垂直方向上的任意相邻两个所述圆孔之间的间距相等,间距满足如下条件:
Δd=0.0175×f
其中,Δd为相邻两个所述圆孔之间的间距,f为所述准直镜头的焦距。
在一个具体实施例中,所述准直镜头的波阵面对以衍射焦点为中心的参考球的方均根偏差不超过λ/50,λ为成像波长。
在一个具体实施例中,所述平行平板的前后表面互相平行,且与所述公共光轴垂直;
所述平行平板的中心对准所述公共光轴;
所述平行平板折射率均匀且透光。
在一个具体实施例中,所述检测模块设置有第一平行平板、第二平行平板和第三平行平板,所述第一平行平板、所述第二平行平板和所述第三平行平板在厚度和折射率上存在差异;
所述第一平行平板用于清晰成像;
所述第二平行平板用于前离焦成像;
所述第三平行平板用于后离焦成像。
在一个具体实施例中,所述第一平行平板的厚度为d 1,折射率为n 1;所述第二平行平板的厚度为d 2,折射率为n 2;所述第三平行平板的厚度为d 3,折射率为n 3
所述第一平行平板、所述第二平行平板和所述第三平行平板满足如下条件:
Figure PCTCN2021138145-appb-000001
Figure PCTCN2021138145-appb-000002
其中,λ为成像波长,F为所述待测成像镜头的焦距,D为所述待测成像镜头的出瞳直径。
在一个具体实施例中,所述检测模块上还设置有转盘,所述转盘上沿圆周均匀设置有开孔,多个所述平行平板通过所述开孔固定连接在所述转盘上;
通过旋转所述转盘,实现所述平行平板的自由切换。
在一个具体实施例中,所述分析装置具体包括:
根据所述采集图像,利用光学成像数学模型及最优化估计算法求解待测成像镜头的波像差,对波像差分解得到各单项像差,并计算点扩散函数及调制传递函数;
所述波像差包括轴上像差、轴外像差。
在一个具体实施例中,所述检测模块通过调整所述出射光束的波长,对所述待测成像镜头在不同成像波长的单色像差进行检测。
在一个具体实施例中,所述探测相机在所述检测模块上的位置固定;
和/或,所述探测相机为高像素分辨率面阵黑白相机。
一种光学成像镜头的像差检测方法,适用于上述任一项所述的像差检测***,包括如下:
通过光源装置发射出单色或准单色均匀照明平行出射光束;
所述出射光束以透射的方式照亮成像靶标;
通过准直镜头对透过所述成像靶标的光束进行准直;
通过待测成像镜头对所述成像靶标进行成像;
通过更换多个不同的平行平板调整所述待测成像镜头成像像面的轴向位置,获取不同的离焦量;
通过探测相机获取不同所述离焦量下的采集图像;
通过分析模块根据所述采集图像求解所述待测成像镜头的波像差,对波像差分解 得到各单项像差,并计算点扩散函数和调制传递函数。
在一个具体实施例中,所述像差检测***还包括镜头夹紧调整装置;
“通过光源装置发射出单色或准单色均匀照明平行出射光束”之前,还包括:
将所述待测成像镜头安装在所述镜头夹紧调整装置上;
通过所述镜头夹紧调整装置在径向方向调整所述待测成像镜头位置,使镜头中心与公共光轴对齐;
通过所述镜头夹紧调整装置在轴向位置调整所述待测成像镜头位置,使靶标图像清晰;
锁紧固定所述待测成像镜头。
在一个具体实施例中,所述像差检测***包括第一平行平板、第二平行平板和第三平行平板,所述第一平行平板、所述第二平行平板和所述第三平行平板在厚度和折射率上存在差异;
设置所述第一平行平板进行清晰成像,通过所述探测相机获取N 1幅焦面图像;
设置所述第二平行平板进行前离焦成像,通过所述探测相机获取N 2幅前离焦图像;
设置所述第三平行平板进行后离焦成像,通过所述探测相机获取N 3幅后离焦图像。
在一个具体实施例中,所述第一平行平板的厚度为d 1,折射率为n 1;所述第二平行平板的厚度为d 2,折射率为n 2;所述第三平行平板的厚度为d 3,折射率为d 3
所述第一平行平板、所述第二平行平板和所述第三平行平板满足如下条件:
Figure PCTCN2021138145-appb-000003
Figure PCTCN2021138145-appb-000004
其中,λ为成像波长,F为所述待测成像镜头的焦距,D为所述待测成像镜头的出瞳直径。
在一个具体实施例中,对N 1幅所述焦面图像求平均,得到第一图像I 1
对所述第一图像I 1进行归一化得到归一化焦面图像i 1,所述归一化焦面图像i 1满足:
Figure PCTCN2021138145-appb-000005
对N 2幅所述前离焦图像求平均,得到第二图像I 2
对所述第二图像I 2进行归一化得到归一化前离焦图像i 2,所述归一化前离焦图像i 2满足:
Figure PCTCN2021138145-appb-000006
对N 3幅所述后离焦图像求平均,得到第三图像I 3
对所述第三图像I 3进行归一化得到归一化后离焦图像i 3,所述归一化后离焦图像i 3满足:
Figure PCTCN2021138145-appb-000007
其中,(m,n)为图像像素位置。
在一个具体实施例中,所述成像靶标的靶标中心设置有轴上物点,所述轴上物点周围设置有多个轴外物点;
针对所述轴上物点:
从所述归一化焦面图像i 1中的第一预设位置截取P×P像素的第一轴上子图像i 1s,使所述轴上物点所成像位于所述第一轴上子图像i 1s中心,且所述第一轴上子图像i 1s上不包含其它物点所成像;
从所述归一化前离焦图像i 2中的所述第一预设位置截取P×P像素的第二轴上子图像i 2s
从所述归一化后离焦图像i 3中的所述第一预设位置截取P×P像素的第三轴上子图像i 3s
根据光学成像数学模型,构建所述待测成像镜头轴上波像差估计的数学模型:
φ 1=min -1[E(i 1s,i 2s,i 3s,d 1,n 1,d 2,n 2,d 3,n 3,F,D,λ)]
其中,φ 1为轴上波像差,E为目标函数,λ为成像波长,F为所述待测成像镜头的焦距,D为所述待测成像镜头的出瞳直径,d 1为所述第一平行平板的厚度,n 1为所述第一平行平板的折射率;d 2为所述第二平行平板的厚度,n 2为所述第二平行平板的折射率;d 3为所述第三平行平板的厚度,n 3为所述第三平行平板的折射率;
利用最优化估计方法求解所述轴上波像差φ 1,并对所述轴上波像差φ 1进行分解得到各单项波像差;
根据所述轴上波像差计算轴上点扩散函数和调制传递函数。
在一个具体实施例中,针对每个所述轴外物点:
从所述归一化焦面图像i 1中的第二预设位置截取P×P像素的第一轴外子图像i 1z,使所述轴外物点所成像位于所述第一轴外子图像i 1z的中心,且所述第一轴外子图像i 1z上不包含其它物点所成像;
从所述归一化前离焦图像i 2中的所述第二预设位置截取P×P像素的第二轴外子图像i 2z
从所述归一化后离焦图像i 3中的所述第二预设位置截取P×P像素的第三轴外子图像i 3z
根据光学成像数学模型,构建所述待测成像镜头轴外波像差估计的数学模型:
φ 2=min -1[E(i 1z,i 2z,i 3z,d 1,n 1,d 2,n 2,d 3,n 3,F,D,λ)]
其中,φ 2为轴外波像差,E为目标函数,λ为成像波长,F为所述待测成像镜头的焦距,D为所述待测成像镜头的出瞳直径,d 1为所述第一平行平板的厚度,n 1为所述第一平行平板的折射率;d 2为所述第二平行平板的厚度,n 2为所述第二平行平板的折射率;d 3为所述第三平行平板的厚度,n 3为所述第三平行平板的折射率;
利用最优化估计方法求解所述轴外波像差φ 2,并对所述轴外波像差φ 2进行分解得到各单项波像差;
根据所述轴外波像差计算轴外点扩散函数和调制传递函数。
在一个具体实施例中,还包括:
通过调整所述出射光束的波长,对所述待测成像镜头在不同成像波长的单色像差进行检测。
本发明具有如下有益效果:
本发明提供了一种光学成像镜头的像差检测***及像差检测方法,解决了现有技术中无法进行单项像差检测的弊端。像差检测***的检测精度高、操作简单,检测成本远低于传统的检测方案。利用不同的平行平板实现离焦量的改变,离焦量准确唯一,而且不会产生磨损,维护成本低。本发明提供的方案不仅能够实现传统的点扩散函数和调制传递函数的检测,而且可以检测单项像差,实现轴上像差和轴外像差的检测,还可通过调整光束波长检测不同波长成像的单色像差。
为使本发明的上述目的、特征和优点能更明显易懂,下文特举较佳实施例,并配合所附附图,作详细说明如下。
附图说明
为了更清楚地说明本发明实施例的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,应当理解,以下附图仅示出了本发明的某些实施例,因此不应被看作是对范围的限定,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他相关的附图。
图1是本发明实施例的像差检测***结构示意图;
图2是本发明实施例的检测模块各组成部分示意图;
图3是本发明实施例的光源装置结构示意图;
图4是本发明实施例的靶标图案示意图;
图5是本发明实施例的光束透过平行平板示意图;
图6是本发明实施例的光束透过平行平板落在探测相机示意图;
图7是本发明实施例的转盘示意图;
图8是本发明实施例的转盘的侧视图;
图9是本发明实施例的像差检测方法流程图。
附图标记:1-检测模块;2-分析模块;3-光源装置;4-成像靶标;5-准直镜头;6-待测成像镜头;7-平行平板;8-探测相机;9-镜头夹紧调整装置;31-点光源;32-第一准直透镜;33-窄带滤光片;34-会聚透镜;35-针孔;36-第二准直透镜。
具体实施方式
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅是本发明的一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所 有其他实施例,都属于本发明保护的范围。
实施例1
本实施例提出了一种光学成像镜头的像差检测***,像差检测***结构示意图如说明书附图1所示。具体方案如下:
像差检测***包括检测模块1和分析模块2,分析模块2根据检测模块1采集到的图像数据进行分析,得到待测成像镜头6的像差。
其中,检测模块1主要由光源装置3、成像靶标4、准直镜头5、探测相机8以及至少三块不同的平行平板7组成。待测成像镜头6位于检测模块1中。此外,检测模块1还包括镜头夹紧调整装置9。检测模块1的组成部分如说明书附图2所示。
光源装置3、成像靶标4、准直镜头5、待测成像镜头6、平行平板7、探测相机8依序中心对准公共光轴布置,即检测模块1中的各部分按照光源装置3、成像靶标4、准直镜头5、待测成像镜头6、平行平板7、探测相机8的顺序依次设置,且各部分的中心对准公共光轴。本实施例中的公共光轴为检测模块1的光轴,按照光源装置3、成像靶标4、准直镜头5、待测成像镜头6、平行平板7、探测相机8的顺序设置,且各组成部分的中心被公共光轴穿过。
需要说明的是,本实施例中的“依序中心对准公共光轴布置”,为按照特定顺序排列,且各组成部分的中心共轴,都被公共光轴穿过。
光源装置3产生单色或准单色均匀照明平行出射光束,平行出射光束以透射的方式照亮成像靶标4。成像靶标4位于准直镜头5的前焦面处,从准直镜头5出射的平行出射光束透过待测成像镜头6,会聚光束再透过平行平板7,最后被探测相机8接收成像。
本实施例通过切换多种不同的平行平板7,实现离焦量的变化。每次更换平行平板7后,探测相机8拍摄采集图像。根据采集的系列图像,利用光学成像数学模型及最优化估计算法求解波像差及各单项像差,并计算点扩散函数和调制传递函数。既可以检测轴上像差,也可以检测轴外像差。。通过调整光源***的出射光源波长,还可对不同波长成像的单色像差进行检测。
具体地,光源装置3负责提供成像照明光源,主要功能特点包括:(1)提供单色或准单色均匀照明平行出射光源;(2)波长可调。通过调整出射光源波长,可对不同波长成像的单色像差进行检测。
优选地,一种光源装置3结构如说明书附图3所示。光源装置3包括点光源31、第一准直透镜32、窄带滤光片33、会聚透镜34、针孔35和第二准直透镜36。光源装置3中的各部分按照点光源31、第一准直透镜32、窄带滤光片33、会聚透镜34、针孔35和第二准直透镜36的顺序依次设置,且点光源31、第一准直透镜32、窄带滤光片33、会聚透镜34、针孔35和第二准直透镜36的中心对准公共光轴。
点光源31为宽谱点光源31,位于第一准直透镜32的前焦点处,用于提供发散光束。第一准直透镜32将发散光束准直为第一平行光,第一平行光近似平行光。第一平行光透过窄带滤光片33,窄带滤光片33能滤除第一平行光的预设波长成分,使第一平行光变成准单色光。准单色光透过会聚透镜34,进行会聚,得到会聚光束。针孔35放 置在会聚透镜34的后焦点处,对会聚光束进行空间滤波。同时,针孔35位于第二准直透镜36的前焦点处,透过针孔35的光束以准球面波向前传播,透过准直透镜后得到均匀照明平行光源。
具体地,成像靶标4位于准直镜头5的前焦面,作为检测模块1的成像目标。待测成像镜头6对靶标进行成像,根据成像结果分析待测成像镜头6的像差。
其中,成像靶标4上设置有靶标图案。成像靶标4为透射式,靶标图案上设置有轴上物点和位于水平、垂直方向上的轴外物点。
在靶标图案中,任意两个物点间距满足如下条件:
d≥10 4×λ maxf
其中,d为物点间距,λ max为最大成像波长,f为准直镜头5的焦距。
优选地,一种成像靶标4的靶标图案如说明书附图4所示。将靶标图案的靶标中心设置的1个圆孔,作为轴上物点。将轴上物点的左右上下各设置的3个圆孔,作为轴外物点。轴上物点只有1个,轴外物点为12个。
准直镜头5位于成像靶标4后侧,用于对透过成像靶标4的光束进行准直。将靶标中心圆孔的透射光准直为平行光轴的平行光束,其它圆孔的透射光准直为相对光轴有微小角度的平行光束,然后进入待测成像镜头6。准直镜头5的功能特点包括:像差经过充分校正,其波像差相对于待测成镜头的波像差可以忽略。优选地,准直镜头5的波阵面对以衍射焦点为中心的参考球的方均根偏差不得超过λ/50,λ为成像波长。
待测成像镜头6位于准直镜头5后侧,通过镜头夹紧调整装置9调整位置并固定。镜头夹紧调整装置9用于对待测成像镜头6进行夹紧、调整位置并固定。镜头夹紧调整装置9的功能特点包括:(1)能够对不同外径的镜头进行夹紧、固定;(2)能够使待测成像镜头6与检测模块1的公共光轴同轴;(3)能够沿检测模块1的径向和轴向调整镜头的位置,通过径向调整使待测成像镜头6中心与检测模块1的公共光轴对准,通过轴向调整使待测成像镜头6成像像面落在探测相机8感光面上。
平行平板7位于待测成像镜头6后侧,用于调整待测成像镜头6成像像面的轴向位置。平行平板7的前后表面与公共光轴垂直,平行平板7的前后表面中心与检测公共光轴对准。当待测成像镜头6成像是在近轴区内以细光束成像时,平行平板7对待测成像镜头6所成的像将不会造成影响,只是将成像像面沿光轴方向移动一个轴向位移。轴向位移大小与平板厚度有关。
如说明书附图5所示,当不存在平行平板7时,平行光束经过镜头后会聚在a处,如图中虚线所示;当加入平行平板7后,经过平板的出射光线仍然平行于入射光线,但是会发生偏移,这种偏移最终导致光束会聚点b产生轴向位移,如图中实线所示。点a、b之间的距离即为轴向位移。对于近轴区内以细光束成像,轴向位移ΔL只与平板的厚度d和折射率n有关,ΔL=d(1-1/n)。
通过改变平行平板7的厚度d或者折射率n,就能改变轴向位移ΔL的大小。固定探测相机8的位置,通过更换平行平板7改变成像像面的轴向位置,探测相机8获取的图像就会产生不同离焦。如说明书附图6所示,探测相机8感光面位于b处,对于图中所示的平行平板7,镜头成像像面也在b处,此时相机能够获取清晰焦面图像;当去掉平行平板7后,成像像面在a处,此时相机获取的是后离焦图像;当更换平行平板7,使 成像像面在b后时,此时相机获取的是前离焦图像。
因此,本实施例的检测模块1包括一系列平行平板7,以获取焦面图像、离焦模糊图像。平行平板7的功能特点包括:(1)平板前后表面平行度高;(2)平板厚度准确知道;(3)平板厚度尽量薄;(4)平板材料折射率均匀,且透光,优选地,平行平板7的材料为光学玻璃;(5)至少包括3种不同的平行平板7,分别对应于清晰成像、前离焦成像、后离焦成像。
本实施例中的多个平行平板7在厚度、折射率上有变化,其中空气等效为厚度为0或者折射率为1的平板。这些平行平板7可以是独立的个体,也可以是整体。优选地,本实施例提出了一种实现平板更换的结构。转盘与平行平板7的结构连接关系如说明书附图7所示,转盘的侧视图如说明书附图8所示。检测模块1上设置有转盘,在转盘上沿着圆周均匀设置有开孔,将不同的平行平板7覆盖在开孔上并固定;通过旋转转盘使所需的平板进入光路中,实现平板的自由切换。
本实施例通过引入若干幅已知相位差异的图像,利用图像和光学成像模型构建目标函数,通过最优化算法找寻最符合目标函数的波前,作为探测波前。本实施例选用的相位差异为离焦,通过采集焦面图像和离焦图像实现相位差波前探测。
本实施例利用平行平板7实现离焦,通过更换平行平板7获得需要的离焦量。所有平行平板7标定一次后,以后不再需要标定,离焦量准确唯一,而且不会产生磨损,维护成本低。传统的离焦量获取主要通过滑轨移动探测相机8或采用多个探测相机8实现。利用滑轨移动探测相机8需要实现高精度直线运动,离焦量往往不够准确,而且长期使用容易磨损,影响精度。采用多个探测相机8,则需要多相机图像精确配准,不易操作且成本高昂。
以三个平行平板7为例,检测模块1设置有第一平行平板、第二平行平板和第三平行平板,第一平行平板、第二平行平板和第三平行平板在厚度和折射率上存在差异。其中,第一平行平板用于清晰成像,第二平行平板用于前离焦成像,第三平行平板用于后离焦成像。
假设,第一平行平板的厚度为d 1,折射率为n 1;第二平行平板的厚度为d 2,折射率为n 2;第三平行平板的厚度为d 3,折射率为n 3
第一平行平板、第二平行平板和第三平行平板满足如下条件:
Figure PCTCN2021138145-appb-000008
Figure PCTCN2021138145-appb-000009
其中,λ为成像波长,F为待测成像镜头6的焦距,D为待测成像镜头6的出瞳直径。
具体地,探测相机8位于平行平板7后侧,用于拍摄采集图像。探测相机8的功能特点包括:(1)高像素分辨率面阵相机;(2)高信噪比;(3)黑白相机。探测相机8在***中位置固定。每次更换平行平板7后,探测相机8拍摄采集图像。
分析模块2根据采集的系列图像,利用光学成像数学模型及最优化估计算法求解波像差及各单项波像差,并计算点扩散函数及调制传递函数。
本实施例提供了一种光学成像镜头的像差检测***,既可以满足传统的点扩散函数和调制传递函数的检测,也可以满足单项像差的检测,实现轴上像差和轴外像差的测量,通过调整出射光源的波长检测不同波长成像的单色像差。像差检测***的检测精度高、操作简单,检测成本远低于传统的检测方案。
实施例2
本实施例提出了一种光学成像镜头的像差检测方法,采用实施例1提出一种光学成像镜头的像差检测***,像差检测方法流程示意图如说明书附图所示。具体方案如下:
101、通过光源装置发射出单色或准单色均匀照明平行出射光束;
102、出射光束以透射的方式照亮成像靶标;
103、通过准直镜头对透过成像靶标的光束进行准直;
104、通过待测成像镜头对成像靶标进行成像;
105、通过更换多个不同的平行平板调整待测成像镜头成像像面的轴向位置,获取不同的离焦量;
106、通过探测相机获取不同离焦量下的采集图像;
107、通过分析模块根据采集图像求解待测成像镜头的像差。
在步骤101之前,还包括:将待测成像镜头安装在镜头夹紧调整装置上;通过镜头夹紧调整装置在径向方向调整待测成像镜头位置,使镜头中心与公共光轴对齐;通过镜头夹紧调整装置在轴向位置调整待测成像镜头位置,使靶标图像清晰;锁紧固定待测成像镜头。
示例性的,像差检测***设置有第一平行平板、第二平行平板和第三平行平板,第一平行平板、第二平行平板和第三平行平板在厚度和折射率上存在差异;
设置第一平行平板进行清晰成像,通过探测相机获取N 1幅焦面图像;
设置第二平行平板进行前离焦成像,通过探测相机获取N 2幅前离焦图像;
设置第三平行平板进行后离焦成像,通过探测相机获取N 3幅后离焦图像。
第一平行平板的厚度为d 1,折射率为n 1;第二平行平板的厚度为d 2,折射率为n 2;第三平行平板的厚度为d 3,折射率为n 2
第一平行平板、第二平行平板和第三平行平板满足如下条件:
Figure PCTCN2021138145-appb-000010
Figure PCTCN2021138145-appb-000011
其中,λ为成像波长,F为待测成像镜头的焦距,D为待测成像镜头的出瞳直径。
对N 1幅焦面图像求平均,得到第一图像I 1
对第一图像I 1进行归一化得到归一化焦面图像i 1,归一化焦面图像i 1满足:
Figure PCTCN2021138145-appb-000012
其中,I 1为第一图像,i 1为归一化焦面图像,(m,n)为图像像素位置。
对N 2幅前离焦图像求平均,得到第二图像I 2
对第二图像I 2进行归一化得到归一化前离焦图像i 2,归一化前离焦图像i 2满足:
Figure PCTCN2021138145-appb-000013
其中,I 2为第二图像,i 2为归一化前离焦图像,(m,n)为图像像素位置。
对N 3幅后离焦图像求平均,得到第三图像I 3
对第三图像I 3进行归一化得到归一化后离焦图像i 3,归一化后离焦图像i 3满足:
Figure PCTCN2021138145-appb-000014
其中,I 3为第三图像,i 3为归一化后离焦图像,(m,n)为图像像素位置。
成像靶标的靶标中心设置有轴上物点,轴上物点周围设置有多个轴外物点;
针对轴上物点:
从归一化焦面图像i 1中的第一预设位置截取P×P像素的第一轴上子图像i 1s,使轴上物点所成像位于第一轴上图像i 1s中心,且第一轴上子图像i 1s上不包含其它物点所成像;
从归一化前离焦图像i 2中的第一预设位置截取P×P像素的第二轴上子图像i 2s
从归一化后离焦图像i 3中的第一预设位置截取P×P像素的第三轴上子图像i 3s
根据光学成像数学模型,构建待测成像镜头轴上波像差估计的数学模型:
φ 1=min -1[E(i 1s,i 2s,i 3s,d 1,n 1,d 2,n 2,d 3,n 3,F,D,λ)]
其中,φ 1为轴上波像差,E为目标函数,λ为成像波长,F为待测成像镜头的焦距,D为待测成像镜头的出瞳直径,d 1为第一平行平板的厚度,n 1为第一平行平板的折射率;d 2为第二平行平板的厚度,n 2为第二平行平板的折射率;d 3为第三平行平板的厚度,n 3为第三平行平板的折射率;
利用最优化估计方法求解轴上波像差φ 1,并对轴上波像差φ 1进行分解得到各单项波像差;
根据轴上波像差计算轴上点扩散函数和调制传递函数。
针对每个轴外物点:
从归一化焦面图像i 1中的第二预设位置截取P×P像素的第一轴外子图像i 1z,使轴外物点所成像位于第一轴外子图像i 1z中心,且第一轴外子图像i 1z上不包含其它物点所成像;
从归一化前离焦图像i 2中的第二预设位置截取P×P像素的第二轴外子图像i 2z
从归一化后离焦图像i 3中的第二预设位置截取P×P像素的第三轴外子图像i 3z
根据光学成像数学模型,构建待测成像镜头轴外波像差估计的数学模型:
φ 2=min -1[E(i 1z,i 2z,i 3z,d 1,n 1,d 2,n 2,d 3,n 3,F,D,λ)]
其中,φ 2为轴外波像差,E为目标函数,λ为成像波长,F为待测成像镜头的焦距,D为待测成像镜头的出瞳直径,d 1为第一平行平板的厚度,n 1为第一平行平板的折射率;d 2为第二平行平板的厚度,n 2为第二平行平板的折射率;d 3为第三平行平板的厚度,n 3为第三平行平板的折射率;
利用最优化估计方法求解轴外波像差φ 2,并对轴外波像差φ 2进行分解得到各单项波像差;
根据轴外波像差计算轴外点扩散函数和调制传递函数。
对每个需要测量的成像波长,调整出射光源波长,重复上述步骤。通过调整出射光束的波长,对不同波长成像的单色像差进行检测。
本实施例提出了一种光学成像镜头的像差检测方法,适用于实施例1中的像差检测***,不仅能够实现传统的点扩散函数和调制传递函数的检测,而且可以检测单项像差,实现轴上像差和轴外像差的检测,还可通过调整光束波长检测不同波长成像的单色像差。
本发明提供了一种光学成像镜头的像差检测***及像差检测方法,解决了现有技术中无法进行单项像差检测的弊端。像差检测***的检测精度高、操作简单,检测成本远低于传统的检测方案。利用不同的平行平板实现离焦量的改变,离焦量准确唯一,而且不会产生磨损,维护成本低。本发明提供的方案不仅能够实现传统的点扩散函数和调制传递函数的检测,而且可以检测单项像差,实现轴上像差和轴外像差的检测,还可通过调整光束波长检测不同波长成像的单色像差。
本领域普通技术人员应该明白,上述的本发明的各模块或各步骤可以用通用的计算装置来实现,它们可以集中在单个计算装置上,或者分布在多个计算装置所组成的网络上,可选地,他们可以用计算机装置可执行的程序代码来实现,从而可以将它们存储在存储装置中由计算装置来执行,或者将它们分别制作成各个集成电路模块,或者将它们中的多个模块或步骤制作成单个集成电路模块来实现。这样,本发明不限制于任何特定的硬件和软件的结合。
注意,上述仅为本发明的较佳实施例及所运用技术原理。本领域技术人员会理解,本发明不限于这里的特定实施例,对本领域技术人员来说能够进行各种明显的变化、重新调整和替代而不会脱离本发明的保护范围。因此,虽然通过以上实施例对本发明进行了较为详细的说明,但是本发明不仅仅限于以上实施例,在不脱离本发明构思的情况下,还可以包括更多其他等效实施例,而本发明的范围由所附的权利要求范围决定。
以上公开的仅为本发明的几个具体实施场景,但是,本发明并非局限于此,任何本领域的技术人员能思之的变化都应落入本发明的保护范围。

Claims (21)

  1. 一种光学成像镜头的像差检测***,其特征在于,包括检测模块和分析模块,所述检测模块包括光源装置、成像靶标、准直镜头、待测成像镜头、探测相机和至少三种不同的平行平板;
    所述检测模块中的各部分按照所述光源装置、所述成像靶标、所述准直镜头、所述待测成像镜头、所述平行平板和所述探测相机的顺序依次设置,且各部分的中心对准公共光轴;
    所述光源装置用于提供单色或准单色均匀照明平行出射光束;
    所述成像靶标位于所述准直镜头的前焦面处,所述出射光束以透射的方式照亮所述成像靶标;
    所述准直镜头用于对透过所述成像靶标的光束进行准直;
    所述待测成像镜头位于所述准直镜头后侧,用于对所述成像靶标进行成像;
    所述平行平板位于所述待测成像镜头后侧,用于调整所述待测成像镜头成像像面的轴向位置,获取不同的离焦量;
    所述探测相机位于所述平行平板后侧,用于获取不同所述离焦量下的采集图像;
    所述分析模块用于根据所述采集图像求解所述待测成像镜头的波像差,对波像差分解得到各单项像差,并计算点扩散函数和调制传递函数。
  2. 根据权利要求1所述的像差检测***,其特征在于,所述检测模块还包括镜头夹紧调整装置;
    所述镜头夹紧调整装置用于对所述待测成像镜头进行夹紧、调整位置以及固定,使所述待测成像镜头与所述公共光轴同轴。
  3. 根据权利要求1所述的像差检测***,其特征在于,所述光源装置包括点光源、第一准直透镜、窄带滤光片、会聚透镜、针孔和第二准直透镜,所述光源装置中的各部分按照所述点光源、所述第一准直透镜、所述窄带滤光片、所述会聚透镜、所述针孔和所述第二准直透镜的顺序依次设置,且各部分的中心对准公共光轴;
    所述点光源位于所述第一准直透镜的前焦点处,用于提供发散光束;
    所述第一准直透镜用于将所述发散光束准直为第一平行光;
    所述窄带滤光片用于滤除所述第一平行光中的预设波长成分,获取准单色光;
    所述会聚透镜用于对所述准单色光进行会聚,得到会聚光束;
    所述针孔位于所述会聚透镜的后焦点处,用于对所述会聚光束进行空间滤波;
    所述针孔位于所述第二准直透镜的前焦点处,透过所述针孔的光束以准球面波传播,透过所述第二准直透镜后得到所述单色或准单色均匀照明平行出射光束。
  4. 根据权利要求1所述的像差检测***,其特征在于,所述成像靶标上设置有靶标图案;
    所述靶标图案包括轴上物点和位于水平、垂直方向上的轴外物点;
    在所述靶标图案中,位于水平、垂直方向上任意两个相邻物点的间距满足如下条件:
    d≥10 4×λ maxf
    其中,d为物点间距,λ max为最大成像波长,f为所述准直镜头的焦距。
  5. 根据权利要求4所述的像差检测***,其特征在于,所述轴上物点为所述靶标图案的靶标中心设置的1个圆孔;
    所述轴外物点为所述轴上物点的左右上下各设置的3个圆孔;
    在水平、垂直方向上的任意相邻两个所述圆孔之间的间距相等,间距满足如下条件:
    Δd=0.0175×f
    其中,Δd为相邻两个所述圆孔之间的间距,f为所述准直镜头的焦距。
  6. 根据权利要求1所述的像差检测***,其特征在于,所述准直镜头的波阵面对以衍射焦点为中心的参考球的方均根偏差不超过λ/50,λ为成像波长。
  7. 根据权利要求1所述的像差检测***,其特征在于,所述平行平板的前后表面互相平行,且与所述公共光轴垂直;
    所述平行平板的中心对准所述公共光轴;
    所述平行平板折射率均匀且透光。
  8. 根据权利要求7所述的像差检测***,其特征在于,所述检测模块设置有第一平行平板、第二平行平板和第三平行平板,所述第一平行平板、所述第二平行平板和所述第三平行平板在厚度和折射率上存在差异;
    所述第一平行平板用于清晰成像;
    所述第二平行平板用于前离焦成像;
    所述第三平行平板用于后离焦成像。
  9. 根据权利要求8所述的像差检测***,其特征在于,所述第一平行平板的厚度为 d 1,折射率为n 1;所述第二平行平板的厚度为d 2,折射率为n 2;所述第三平行平板的厚度为d 3,折射率为n 3
    所述第一平行平板、所述第二平行平板和所述第三平行平板满足如下条件:
    Figure PCTCN2021138145-appb-100001
    Figure PCTCN2021138145-appb-100002
    其中,λ为成像波长,F为所述待测成像镜头的焦距,D为所述待测成像镜头的出瞳直径。
  10. 根据权利要求7所述的像差检测***,其特征在于,所述检测模块上还设置有转盘,所述转盘上沿圆周均匀设置有开孔,多个所述平行平板通过所述开孔固定连接在所述转盘上;
    通过旋转所述转盘,实现所述平行平板的自由切换。
  11. 根据权利要求1所述的像差检测***,其特征在于,所述分析装置具体包括:
    根据所述采集图像,利用光学成像数学模型及最优化估计算法求解待测成像镜头的波像差,对波像差分解得到各单项像差,并计算点扩散函数及调制传递函数;
    所述波像差包括轴上像差、轴外像差。
  12. 根据权利要求1所述的像差检测***,其特征在于,所述检测模块通过调整所述出射光束的波长,对所述待测成像镜头在不同成像波长的单色像差进行检测。
  13. 根据权利要求1所述的像差检测***,其特征在于,所述探测相机在所述检测模块上的位置固定;
    和/或,所述探测相机为高像素分辨率面阵黑白相机。
  14. 一种光学成像镜头的像差检测方法,适用于权利要求1-13任一项所述的像差检测***,其特征在于,包括如下:
    通过光源装置发射出单色或准单色均匀照明平行出射光束;
    所述出射光束以透射的方式照亮成像靶标;
    通过准直镜头对透过所述成像靶标的光束进行准直;
    通过待测成像镜头对所述成像靶标进行成像;
    通过更换多个不同的平行平板调整所述待测成像镜头成像像面的轴向位置,获取 不同的离焦量;
    通过探测相机获取不同所述离焦量下的采集图像;
    通过分析模块根据所述采集图像求解所述待测成像镜头的波像差,对波像差分解得到各单项像差,并计算点扩散函数和调制传递函数。
  15. 根据权利要求14所述的像差检测方法,其特征在于,所述像差检测***还包括镜头夹紧调整装置;
    “通过光源装置发射出单色或准单色均匀照明平行出射光束”之前,还包括:
    将所述待测成像镜头安装在所述镜头夹紧调整装置上;
    通过所述镜头夹紧调整装置在径向方向调整所述待测成像镜头位置,使镜头中心与公共光轴对齐;
    通过所述镜头夹紧调整装置在轴向位置调整所述待测成像镜头位置,使靶标图像清晰;
    锁紧固定所述待测成像镜头。
  16. 根据权利要求14所述的像差检测方法,其特征在于,所述像差检测***包括第一平行平板、第二平行平板和第三平行平板,所述第一平行平板、所述第二平行平板和所述第三平行平板在厚度和折射率上存在差异;
    设置所述第一平行平板进行清晰成像,通过所述探测相机获取N 1幅焦面图像;
    设置所述第二平行平板进行前离焦成像,通过所述探测相机获取N 2幅前离焦图像;
    设置所述第三平行平板进行后离焦成像,通过所述探测相机获取N 3幅后离焦图像。
  17. 根据权利要求16所述的像差检测方法,其特征在于,所述第一平行平板的厚度为d 1,折射率为n 1;所述第二平行平板的厚度为d 2,折射率为n 2;所述第三平行平板的厚度为d 3,折射率为n 3
    所述第一平行平板、所述第二平行平板和所述第三平行平板满足如下条件:
    Figure PCTCN2021138145-appb-100003
    Figure PCTCN2021138145-appb-100004
    其中,λ为成像波长,F为所述待测成像镜头的焦距,D为所述待测成像镜头的出瞳直径。
  18. 根据权利要求17所述的像差检测方法,其特征在于,对N 1幅所述焦面图像求平均,得到第一图像I 1
    对所述第一图像I 1进行归一化得到归一化焦面图像i 1,所述归一化焦面图像i 1满足:
    Figure PCTCN2021138145-appb-100005
    对N 2幅所述前离焦图像求平均,得到第二图像I 2
    对所述第二图像I 2进行归一化得到归一化前离焦图像i 2,所述归一化前离焦图像i 2满足:
    Figure PCTCN2021138145-appb-100006
    对N 3幅所述后离焦图像求平均,得到第三图像I 3
    对所述第三图像I 3进行归一化得到归一化后离焦图像i 3,所述归一化后离焦图像i 3满足:
    Figure PCTCN2021138145-appb-100007
    其中,(m,n)为图像像素位置。
  19. 根据权利要求18所述的像差检测方法,其特征在于,所述成像靶标的靶标中心设置有轴上物点,所述轴上物点周围设置有多个轴外物点;
    针对所述轴上物点:
    从所述归一化焦面图像i 1中的第一预设位置截取P×P像素的第一轴上子图像i 1s,使所述轴上物点所成像位于所述第一轴上子图像i 1s中心,且所述第一轴上子图像i 1s上不包含其它物点所成像;
    从所述归一化前离焦图像i 2中的所述第一预设位置截取P×P像素的第二轴上子图像i 2s
    从所述归一化后离焦图像i 3中的所述第一预设位置截取P×P像素的第三轴上子图像i 3s
    根据光学成像数学模型,构建所述待测成像镜头轴上波像差估计的数学模型:
    φ 1=min -1[E(i 1s,i 2s,i 3s,d 1,n 1,d 2,n 2,d 3,n 3,F,D,λ)]
    其中,φ 1为轴上波像差,E为目标函数,λ为成像波长,F为所述待测成像镜头的焦距,D为所述待测成像镜头的出瞳直径,d 1为所述第一平行平板的厚度,n 1为所述第一平行平板的折射率;d 2为所述第二平行平板的厚度,n 2为所述第二平行平板的折射率; d 3为所述第三平行平板的厚度,n 3为所述第三平行平板的折射率;
    利用最优化估计方法求解所述轴上波像差φ 1,并对所述轴上波像差φ 1进行分解得到各单项波像差;
    根据所述轴上波像差计算轴上点扩散函数和调制传递函数。
  20. 根据权利要求19所述的像差检测方法,其特征在于,针对每个所述轴外物点:
    从所述归一化焦面图像i 1中的第二预设位置截取P×P像素的第一轴外子图像i 1z,使所述轴外物点所成像位于所述第一轴外子图像i 1z的中心,且所述第一轴外子图像i 1z上不包含其它物点所成像;
    从所述归一化前离焦图像i 2中的所述第二预设位置截取P×P像素的第二轴外子图像i 2z
    从所述归一化后离焦图像i 3中的所述第二预设位置截取P×P像素的第三轴外子图像i 3z
    根据光学成像数学模型,构建所述待测成像镜头轴外波像差估计的数学模型:
    φ 2=min -1[E(i 1z,i 2z,i 3z,d 1,n 1,d 2,n 2,d 3,n 3,F,D,λ)]
    其中,φ 2为轴外波像差,E为目标函数,λ为成像波长,F为所述待测成像镜头的焦距,D为所述待测成像镜头的出瞳直径,d 1为所述第一平行平板的厚度,n 1为所述第一平行平板的折射率;d 2为所述第二平行平板的厚度,n 2为所述第二平行平板的折射率;d 3为所述第三平行平板的厚度,n 3为所述第三平行平板的折射率;
    利用最优化估计方法求解所述轴外波像差φ 2,并对所述轴外波像差φ 2进行分解得到各单项波像差;
    根据所述轴外波像差计算轴外点扩散函数和调制传递函数。
  21. 根据权利要求14所述的像差检测方法,其特征在于,还包括:
    通过调整所述出射光束的波长,对所述待测成像镜头在不同成像波长的单色像差进行检测。
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