WO2023016274A1 - Miniature laser radar receiving apparatus - Google Patents

Miniature laser radar receiving apparatus Download PDF

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Publication number
WO2023016274A1
WO2023016274A1 PCT/CN2022/108774 CN2022108774W WO2023016274A1 WO 2023016274 A1 WO2023016274 A1 WO 2023016274A1 CN 2022108774 W CN2022108774 W CN 2022108774W WO 2023016274 A1 WO2023016274 A1 WO 2023016274A1
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micro
nano
receiving device
photoelectric detection
laser radar
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PCT/CN2022/108774
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French (fr)
Chinese (zh)
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黄海阳
赵瑛璇
盛振
甘甫烷
孙涛
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中国科学院上海微***与信息技术研究所
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Publication of WO2023016274A1 publication Critical patent/WO2023016274A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483—Details of pulse systems
    • G01S7/486—Receivers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers

Definitions

  • the invention relates to the technical field of laser radar, and more particularly relates to a miniature laser radar receiving device.
  • Lidar is an electronic device that uses infrared light or visible light to detect and locate targets. It is mainly composed of a transmitting device, a receiving device, and an information processing module. In recent years, lidar at home and abroad has evolved along the technical route of miniaturization and light weight as a whole. At present, the receiving devices of various laser radars (based on triangular ranging, time-of-flight, FMCW, etc.) can only detect the intensity of light, but cannot detect the direction and distance of light, and need to combine multi-point or multi-dimensional detection to detect and locate. Therefore, the volume, weight and computational complexity of the device are increased.
  • the present invention provides a micro-miniature laser radar receiving device, which can detect the direction of light, and the size reaches the order of microns, which can not only reduce the weight of the device, but also reduce the complexity of calculation.
  • the present invention provides a miniature lidar receiving device, which includes a spherical base, and the surface of the spherical base is provided with a micro-nano photoelectric detection array, and the micro-nano photoelectric detection array is composed of a number of evenly arranged micro-nano photoelectric detection units.
  • the micro-nano photodetection unit includes a substrate, and two optical micro-nano resonators with the same structure and parallel to each other are arranged on the substrate.
  • the radius of the spherical base is 4.5um.
  • the number of micro-nano photodetection units is 70, and the arrangement period is 400nm.
  • the distance between two optical micro-nano resonators is 150 nm.
  • the directional angle measurement of the two micro-nano photodetection units is 50°.
  • an array of micro-nano photoelectric detection units is arranged on the surface of the spherical base, so that the laser radar receiving device of the present invention can detect the direction and distance of light, and the calculation complexity is low, and at the same time, it has small size, light weight, easy integration, Advantages of measuring across scales.
  • Fig. 1 is a schematic structural diagram of a micro laser radar receiving device according to the present invention.
  • FIG. 2 is a schematic structural diagram of the micro-nano photodetection unit in FIG. 1 .
  • Fig. 3 is a principle diagram of long-distance detection of the miniature lidar receiving device of the present invention.
  • Fig. 4 is a schematic diagram of the application of the micro laser radar receiving device of the present invention in an aircraft.
  • the miniature lidar receiving device provided by the present invention includes a spherical base 1, and the surface of the spherical base 1 is provided with a micro-nano photoelectric detection array 2, and the micro-nano photoelectric detection array 2 is composed of several evenly arranged micro-nano photoelectric detection arrays. detection unit 21.
  • the radius of the spherical base 1 can be set according to the actual situation, for example, the radius of the spherical base 1 can be 4.5um.
  • the number and arrangement period of the micro-nano photodetection units 21 can also be set according to the actual situation, for example, the number of micro-nano photodetection units 21 can be 70, and the arrangement period can be 400nm.
  • the micro-nano photodetection unit 21 includes a substrate 211, on which two optical micro-nano resonators 212, 213 with the same structure and parallel to each other are arranged, the substrate 211 and two optical micro-nano resonators
  • the resonators 212, 213 can be processed by a CMOS process.
  • the micro-nano photoelectric detection unit 21 of the present invention has a directional detection function, and its principle is: when two optical micro-nano resonators 212, 213 satisfy a certain distance condition, the Mie scattering field generated by the light will be superimposed, and different light The incident azimuth will directly affect the phase of the scattered field, thus affecting the strength of the superimposed mode field.
  • the light incident angle ⁇ 0 is a certain value ( ⁇ 0 is the angle formed by the incident light 3 and the normal 4 in the plane where the optical micro-nano resonator 212, 213 is located)
  • the optical micro-nano resonator 212, 213 The mode field strength difference in reaches its maximum value.
  • the mode field intensity difference of the two resonators reaches a maximum at a certain incident angle ⁇ 0
  • the power-scanning angle obtains the maximum value of the optical mode field intensity difference
  • the incident orientation of the light at that place can be determined.
  • the value of ⁇ 0 is fixed and unique, so the micro-nano photodetection unit 21 has a precise directional detection function, and ⁇ 0 is also called directional angle measurement.
  • the distance between the optical micro-nano resonators 212 and 213 is selected as 150 nm, and at this time, the orientation angle ⁇ 0 is 50°.
  • the angle can be calculated:
  • ⁇ is the angle between the normal line of the plane where the micro-nano photodetection unit A is located (straight line OA) and the perpendicular line (straight line OS) connecting AB, and ⁇ is the direction of the incident light irradiated to the micro-nano photodetection unit A and the direction of AB. The angle of the line.
  • the distance from the light source S to the radar receiving device is M+H, and the direction from the light source S to the radar receiving device is the direction of the perpendicular line of the line AB.
  • the miniature lidar receiving device of the present invention has a cross-scale ranging function, which can not only measure the direction of the light source when the light source is close, but also measure the direction of the light source when the light source is far away.
  • ⁇ S 1 AB ⁇ S 2 BA ⁇ 90°, which is equivalent to parallel light.
  • the azimuth angle of point S relative to the receiving device can be calculated as ( ⁇ AOY+ ⁇ BOY)/2, where the azimuth of the Y axis is recorded as 0° and the clockwise direction is positive.
  • the lidar receiving device of the present invention has the advantages of small size, light weight, easy integration, cross-scale measurement, etc., and has broad application prospects in miniature lidar and small-scale measurement.
  • 5 is the laser emitting device
  • 6 is the emitted laser
  • 7 is the tracked target
  • 8 and 9 are two independent micro-aircrafts integrated with the micro-miniature laser radar receiving device of the present invention.
  • the laser emitting device 5 emits laser light in various directions, wherein the laser light 6 is irradiated to the tracked target 7, and the laser light is reflected and scattered on the surface of the tracked target 7. After the two micro-aircraft 8 and 9 detect the reflected light, they can follow the The above method calculates the azimuth and distance of the tracked target 7 .
  • the aircraft 8 and 9 can detect the coordinates of the tracked target 7 immediately. Moreover, according to the change of the instant coordinates with time, the instant speed of the tracked target 7 can be further calculated.

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  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

A miniature laser radar receiving apparatus. The apparatus comprises a spherical base (1), wherein a micro-nano photoelectric detection array (2) is provided on a surface of the spherical base (1), and the micro-nano photoelectric detection array (2) is composed of several micro-nano photoelectric detection units (21), which are uniformly arranged. The laser radar receiving apparatus can test the direction and distance of light, has low operation complexity, and also has the advantages of a small size, lightweight, ease of integration and cross-scale measurement.

Description

一种微小型激光雷达接收装置A micro laser radar receiving device 技术领域technical field
本发明涉及激光雷达技术领域，更具体地涉及一种微小型激光雷达接收装置。The invention relates to the technical field of laser radar, and more particularly relates to a miniature laser radar receiving device.
背景技术Background technique
激光雷达是一种利用红外光或可见光来对目标进行探测和定位的电子设备，主要由发射装置、接收装置、信息处理模块等部分构成。近年来，国内外激光雷达整体上沿着小型化、轻量化的技术路线演进。目前常见的各种激光雷达(基于三角测距、飞行时间、FMCW等)的接收装置只能检测光的强度，不能检测光的方向和距离，并且需要结合多点或多维度检测来探测定位，从而增大了装置的体积、重量和运算复杂程度。Lidar is an electronic device that uses infrared light or visible light to detect and locate targets. It is mainly composed of a transmitting device, a receiving device, and an information processing module. In recent years, lidar at home and abroad has evolved along the technical route of miniaturization and light weight as a whole. At present, the receiving devices of various laser radars (based on triangular ranging, time-of-flight, FMCW, etc.) can only detect the intensity of light, but cannot detect the direction and distance of light, and need to combine multi-point or multi-dimensional detection to detect and locate. Therefore, the volume, weight and computational complexity of the device are increased.
发明内容Contents of the invention
为解决上述现有技术中的问题，本发明提供一种微小型激光雷达接收装置，能够检测光的方向，且尺寸达到微米量级，不仅可以减轻装置重量，同时也可以降低运算复杂程度。In order to solve the above-mentioned problems in the prior art, the present invention provides a micro-miniature laser radar receiving device, which can detect the direction of light, and the size reaches the order of microns, which can not only reduce the weight of the device, but also reduce the complexity of calculation.
本发明提供的一种微小型激光雷达接收装置，包括球形基体，所述球形基体的表面设有微纳光电探测阵列，所述微纳光电探测阵列由若干均匀排列的微纳光电探测单元组成。The present invention provides a miniature lidar receiving device, which includes a spherical base, and the surface of the spherical base is provided with a micro-nano photoelectric detection array, and the micro-nano photoelectric detection array is composed of a number of evenly arranged micro-nano photoelectric detection units.
进一步地，所述微纳光电探测单元包括一衬底，所述衬底上设置有两个结构相同且相互平行的光学微纳米谐振器。Further, the micro-nano photodetection unit includes a substrate, and two optical micro-nano resonators with the same structure and parallel to each other are arranged on the substrate.
进一步地，所述球形基体的半径为4.5um。Further, the radius of the spherical base is 4.5um.
进一步地，所述微纳光电探测单元的个数为70，排列周期为400nm。Further, the number of micro-nano photodetection units is 70, and the arrangement period is 400nm.
进一步地，两个所述光学微纳米谐振器之间的距离为150nm。Further, the distance between two optical micro-nano resonators is 150 nm.
进一步地，两个所述微纳光电探测单元的定向测角为50°。Further, the directional angle measurement of the two micro-nano photodetection units is 50°.
本发明在球形基体的表面设置具有微纳光电探测单元的阵列，使得本发明的激光雷达接收装置能够检测光的方向和距离，且运算复杂程度低，同 时具有小尺寸、轻量化、易于集成、跨尺度测量的优势。In the present invention, an array of micro-nano photoelectric detection units is arranged on the surface of the spherical base, so that the laser radar receiving device of the present invention can detect the direction and distance of light, and the calculation complexity is low, and at the same time, it has small size, light weight, easy integration, Advantages of measuring across scales.
附图说明Description of drawings
图1是按照本发明的微小型激光雷达接收装置的结构示意图。Fig. 1 is a schematic structural diagram of a micro laser radar receiving device according to the present invention.
图2是图1中微纳光电探测单元的结构示意图。FIG. 2 is a schematic structural diagram of the micro-nano photodetection unit in FIG. 1 .
图3是本发明的微小型激光雷达接收装置远距离探测的原理图。Fig. 3 is a principle diagram of long-distance detection of the miniature lidar receiving device of the present invention.
图4是本发明的微小型激光雷达接收装置在飞行器中应用的原理图。Fig. 4 is a schematic diagram of the application of the micro laser radar receiving device of the present invention in an aircraft.
具体实施方式Detailed ways
下面结合附图，给出本发明的较佳实施例，并予以详细描述。Below in conjunction with the drawings, preferred embodiments of the present invention are given and described in detail.
如图1所示，本发明提供的微小型激光雷达接收装置，包括球形基体1，球形基体1的表面设有微纳光电探测阵列2，微纳光电探测阵列2由若干均匀排列的微纳光电探测单元21组成。球形基体1的半径可根据实际情况进行设置，例如，球形基体1的半径可为4.5um。微纳光电探测单元21的个数和排列周期也可根据实际情况进行设置，例如，微纳光电探测单元21的个数可为70，排列周期可为400nm。As shown in Figure 1, the miniature lidar receiving device provided by the present invention includes a spherical base 1, and the surface of the spherical base 1 is provided with a micro-nano photoelectric detection array 2, and the micro-nano photoelectric detection array 2 is composed of several evenly arranged micro-nano photoelectric detection arrays. detection unit 21. The radius of the spherical base 1 can be set according to the actual situation, for example, the radius of the spherical base 1 can be 4.5um. The number and arrangement period of the micro-nano photodetection units 21 can also be set according to the actual situation, for example, the number of micro-nano photodetection units 21 can be 70, and the arrangement period can be 400nm.
如图2所示，微纳光电探测单元21包括衬底211，在衬底211上设置有两个结构相同且相互平行的光学微纳米谐振器212、213，衬底211以及两个光学微纳米谐振器212、213可通过CMOS工艺加工。As shown in Figure 2, the micro-nano photodetection unit 21 includes a substrate 211, on which two optical micro-nano resonators 212, 213 with the same structure and parallel to each other are arranged, the substrate 211 and two optical micro-nano resonators The resonators 212, 213 can be processed by a CMOS process.
本发明的微纳光电探测单元21具有定向探测功能，其原理为：当两个光学微纳米谐振器212、213满足一定距离条件时，光照产生的米式散射场会发生叠加，而不同的光入射方位会直接影响散射场的相位，从而影响叠加后的模场强度。当光入射角度θ 0为某个特定值(θ 0为入射光线3与光学微纳米谐振器212、213所在平面内的法线4所成的夹角)时，光学微纳米谐振器212、213中的模场强度差达到最大值。由于两个谐振器的模场强度差值在某个特定的入射角度θ 0时达到最大，因此通电扫描角度得到光模场强度差最大值时，即可确定该处的光入射方位。对于特定的微纳光电探测单元和特定波长的入射光线，θ 0的数值固定不变且唯一，因此微纳光电探测单元21具有精确的定向探测功能，θ 0也称为定向测角。 The micro-nano photoelectric detection unit 21 of the present invention has a directional detection function, and its principle is: when two optical micro-nano resonators 212, 213 satisfy a certain distance condition, the Mie scattering field generated by the light will be superimposed, and different light The incident azimuth will directly affect the phase of the scattered field, thus affecting the strength of the superimposed mode field. When the light incident angle θ 0 is a certain value (θ 0 is the angle formed by the incident light 3 and the normal 4 in the plane where the optical micro-nano resonator 212, 213 is located), the optical micro-nano resonator 212, 213 The mode field strength difference in reaches its maximum value. Since the mode field intensity difference of the two resonators reaches a maximum at a certain incident angle θ 0 , when the power-scanning angle obtains the maximum value of the optical mode field intensity difference, the incident orientation of the light at that place can be determined. For a specific micro-nano photodetection unit and incident light of a specific wavelength, the value of θ 0 is fixed and unique, so the micro-nano photodetection unit 21 has a precise directional detection function, and θ 0 is also called directional angle measurement.
在本实施例中，选取光学微纳米谐振器212和213之间的距离为150nm，此时定向测角θ 0为50°。 In this embodiment, the distance between the optical micro-nano resonators 212 and 213 is selected as 150 nm, and at this time, the orientation angle θ 0 is 50°.
再次参考图1，本发明的微小型激光雷达接收装置测量光的距离和方向的原理为：在图1中，S为点光源，A、B分别为满足光入射角度为θ 0＝50°的微纳光电探测单元，即：在S发出的光照下，仅有A、B两组微纳光电探测单元满足定向测角为θ 0＝50°的条件，A、B两组纳米导线中的模场达到最大差值。假设球形基体1的半径为R，微纳光电探测单元A、B的直线距离为L(微纳光电探测单元的尺寸很小，忽略不计)，则可计算出角度： With reference to Fig. 1 again, the principle of the distance and direction of light measured by the miniature lidar receiving device of the present invention is as follows: in Fig. 1, S is a point light source, and A and B are respectively satisfying light incident angles that are θ 0 =50° The micro-nano photoelectric detection unit, that is, under the light emitted by S, only the two groups of micro-nano photoelectric detection units A and B meet the condition that the directional measurement angle is θ 0 =50°, and the modes in the two groups of nanowires A and B The field reaches the maximum difference. Assuming that the radius of the spherical base 1 is R, and the straight-line distance between the micro-nano photodetection units A and B is L (the size of the micro-nano photodetection units is very small and negligible), the angle can be calculated:
α＝arcsin(L/2R)α＝arcsin(L/2R)
β＝π/2+α-θ 0 β=π/2+α-θ 0
α为微纳光电探测单元A所在平面的法线(直线OA)与AB连线的中垂线(直线OS)的夹角，β为照射至微纳光电探测单元A的入射光方向与AB连线的夹角。α is the angle between the normal line of the plane where the micro-nano photodetection unit A is located (straight line OA) and the perpendicular line (straight line OS) connecting AB, and β is the direction of the incident light irradiated to the micro-nano photodetection unit A and the direction of AB. The angle of the line.
假设M是光源S到AB连线中点的距离，H是球形基体1的球心O到AB连线中点的距离，则可计算出：Assuming that M is the distance from the light source S to the midpoint of the line AB, and H is the distance from the center O of the spherical base 1 to the midpoint of the line AB, it can be calculated as follows:
M＝L/2*tan βM＝L/2*tan β
H＝L/2/tan αH＝L/2/tan α
光源S到雷达接收装置的距离即为M+H，光源S到雷达接收装置的方向即为AB连线的中垂线的方向。The distance from the light source S to the radar receiving device is M+H, and the direction from the light source S to the radar receiving device is the direction of the perpendicular line of the line AB.
另外，本发明的微小型激光雷达接收装置具有跨尺度测距功能，不仅可以测出光源较近时的光源方向，还可以测出光源较远时的光源方向。如图3所示，在直角坐标系YOZ下，当光源S距离较远时，此时有∠S 1AB＝∠S 2BA≈90°，即相当于平行光。根据几何知识，可计算S点相对于接收装置所在的方位角为(∠AOY+∠BOY)/2，其中Y轴的方位角被记为0°且顺时针方向为正。 In addition, the miniature lidar receiving device of the present invention has a cross-scale ranging function, which can not only measure the direction of the light source when the light source is close, but also measure the direction of the light source when the light source is far away. As shown in Figure 3, in the Cartesian coordinate system YOZ, when the light source S is far away, ∠S 1 AB = ∠S 2 BA≈90°, which is equivalent to parallel light. According to geometric knowledge, the azimuth angle of point S relative to the receiving device can be calculated as (∠AOY+∠BOY)/2, where the azimuth of the Y axis is recorded as 0° and the clockwise direction is positive.
如此，本发明的激光雷达接收装置具有小尺寸、轻量化、易于集成、跨尺度测量等优势，在微型激光雷达和小尺寸测量方面具有广泛应用前景。In this way, the lidar receiving device of the present invention has the advantages of small size, light weight, easy integration, cross-scale measurement, etc., and has broad application prospects in miniature lidar and small-scale measurement.
以下对本发明的一种应用场景进行说明。An application scenario of the present invention is described below.
如图4所示，5为激光发射装置，6为发射的激光，7为被跟踪目标，8 和9为两个独立的集成了本发明的微小型激光雷达接收装置的微小型飞行器。激光发射装置5向各个方向发出激光，其中激光6照射至被跟踪目标7，激光在被跟踪目标7的表面发生反射和散射，两个微小型飞行器8和9检测到反射光后，即可按照上述方法计算得被跟踪目标7的方位和距离。As shown in Figure 4, 5 is the laser emitting device, 6 is the emitted laser, 7 is the tracked target, 8 and 9 are two independent micro-aircrafts integrated with the micro-miniature laser radar receiving device of the present invention. The laser emitting device 5 emits laser light in various directions, wherein the laser light 6 is irradiated to the tracked target 7, and the laser light is reflected and scattered on the surface of the tracked target 7. After the two micro-aircraft 8 and 9 detect the reflected light, they can follow the The above method calculates the azimuth and distance of the tracked target 7 .
因此，无论被跟踪目标7以及两个微小型飞行器8和9如何移动，只要被跟踪目标7受到激光发射装置5的光照，飞行器8和9都能即时检测到被跟踪目标7的坐标。并且，根据即时坐标随时间的变化，还可以进一步计算出被跟踪目标7的即时速度。Therefore, no matter how the tracked target 7 and the two micro-aircraft 8 and 9 move, as long as the tracked target 7 is illuminated by the laser emitting device 5, the aircraft 8 and 9 can detect the coordinates of the tracked target 7 immediately. Moreover, according to the change of the instant coordinates with time, the instant speed of the tracked target 7 can be further calculated.
以上所述的，仅为本发明的较佳实施例，并非用以限定本发明的范围，本发明的上述实施例还可以做出各种变化。即凡是依据本发明申请的权利要求书及说明书内容所作的简单、等效变化与修饰，皆落入本发明专利的权利要求保护范围。本发明未详尽描述的均为常规技术内容。What is described above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Various changes can also be made to the above embodiments of the present invention. That is to say, all simple and equivalent changes and modifications made according to the claims and description of the application for the present invention fall within the protection scope of the claims of the patent of the present invention. What is not described in detail in the present invention is conventional technical contents.

Claims (6)

  1. 一种微小型激光雷达接收装置，其特征在于，包括球形基体，所述球形基体的表面设有微纳光电探测阵列，所述微纳光电探测阵列由若干均匀排列的微纳光电探测单元组成。A micro-miniature laser radar receiving device is characterized in that it includes a spherical base, and the surface of the spherical base is provided with a micro-nano photoelectric detection array, and the micro-nano photoelectric detection array is composed of a number of uniformly arranged micro-nano photoelectric detection units.
  2. 根据权利要求1所述的微小型激光雷达接收装置，其特征在于，所述微纳光电探测单元包括一衬底，所述衬底上设置有两个结构相同且相互平行的光学微纳米谐振器。The micro-miniature laser radar receiving device according to claim 1, wherein the micro-nano photodetection unit includes a substrate, and two optical micro-nano resonators with the same structure and parallel to each other are arranged on the substrate .
  3. 根据权利要求1所述的微小型激光雷达接收装置，其特征在于，所述球形基体的半径为4.5um。The miniature lidar receiving device according to claim 1, characterized in that the radius of the spherical base is 4.5um.
  4. 根据权利要求1所述的微小型激光雷达接收装置，其特征在于，所述微纳光电探测单元的个数为70，排列周期为400nm。The micro-miniature lidar receiving device according to claim 1, wherein the number of the micro-nano photoelectric detection units is 70, and the arrangement period is 400nm.
  5. 根据权利要求2所述的微小型激光雷达接收装置，其特征在于，两个所述光学微纳米谐振器之间的距离为150nm。The miniature lidar receiving device according to claim 2, characterized in that the distance between the two optical micro-nano resonators is 150 nm.
  6. 根据权利要求5所述的微小型激光雷达接收装置，其特征在于，两个所述微纳光电探测单元的定向测角为50°。The micro-miniature laser radar receiving device according to claim 5, wherein the directional angle measurement of the two micro-nano photoelectric detection units is 50°.
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