WO2022249454A1 - 光モニタデバイス - Google Patents
光モニタデバイス Download PDFInfo
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- WO2022249454A1 WO2022249454A1 PCT/JP2021/020450 JP2021020450W WO2022249454A1 WO 2022249454 A1 WO2022249454 A1 WO 2022249454A1 JP 2021020450 W JP2021020450 W JP 2021020450W WO 2022249454 A1 WO2022249454 A1 WO 2022249454A1
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- 230000003287 optical effect Effects 0.000 title claims abstract description 148
- 239000013307 optical fiber Substances 0.000 claims abstract description 66
- 239000002356 single layer Substances 0.000 claims abstract description 51
- 230000005540 biological transmission Effects 0.000 claims abstract description 12
- 230000001902 propagating effect Effects 0.000 claims abstract description 9
- 238000012806 monitoring device Methods 0.000 claims description 15
- 230000004907 flux Effects 0.000 claims description 9
- 239000010410 layer Substances 0.000 claims description 5
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims description 2
- 238000004891 communication Methods 0.000 description 12
- 239000000835 fiber Substances 0.000 description 7
- 238000012544 monitoring process Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
- G01M11/37—Testing of optical devices, constituted by fibre optics or optical waveguides in which light is projected perpendicularly to the axis of the fibre or waveguide for monitoring a section thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
Definitions
- the present disclosure relates to an optical monitor device, and more particularly to an optical monitor device for detecting the intensity of light and feeding back the detection result to other components in an optical transmission device or the like.
- Optical fiber communication often uses the detection of the intensity of light propagating through an optical fiber to control communication and confirm the soundness of equipment. For example, in an access network, test light is propagated through an optical fiber, and the optical intensity is detected to check the loss and soundness of the optical fiber, as well as the target and connection of the core wires.
- WDM Widelength Division Multiplexing
- Patent Literature 1 describes a technique for splitting light at a constant splitting ratio using two parallel waveguides, which makes it possible to measure the intensity and propagation loss of optical signals in an access network.
- Patent Document 2 describes a technique for simultaneously monitoring the intensity of optical signals of a plurality of optical fibers by combining one-dimensionally arranged optical fibers and a dielectric multilayer film.
- optical monitor device with the conventional arrangement configuration still has the following problems.
- Patent Document 2 uses a dielectric multilayer film for optical branching.
- the dielectric multilayer film generally has a high light reflectance, there is a problem that the loss of the signal transmitted through the optical monitor device increases.
- dielectric multilayer films generally reflect only a specific wavelength band, there is a problem that they are not suitable for monitoring communication using a wide wavelength band such as WDM transmission.
- Patent No. 3450104 (Furukawa Electric) Japanese Patent Application Laid-Open No. 2004-219523 (Fujitsu, withdrawn)
- An object of the present disclosure is to enable an optical monitor device for multi-core optical fibers to monitor optical signals in a wide wavelength range.
- the optical monitor device of the present disclosure includes: In an optical monitoring device that detects the intensity of light propagating through multiple optical fibers, an optical component that splits a portion of incident light in a first direction and the remainder in a second direction at a specific splitting ratio,
- the optical component is a monolayer film having a uniform thickness; an incident-side member provided on the incident side of the single-layer film and having a refractive index different from that of the single-layer film; an output-side member provided on the output side of the single-layer film and having the same refractive index as that of the incident-side member; with A first refractive index interface between the single layer film and the incident side member and a second refractive index interface between the single layer film and the exit side member are provided at specific angles with respect to the optical axis of the incident light.
- the first direction is a direction of transmission through the first refractive index interface and the second refractive index interface
- the second direction is the direction of reflection at the first refractive index interface and the second ref
- the optical monitor device of the present disclosure is an optical monitor device that detects the intensity of light propagating through a plurality of optical fibers, and splits incident light using a single-layer film having a uniform thickness. Since the optical monitoring device of the present disclosure uses a single-layer film to split incident light, it is possible to monitor optical signals in a wide wavelength range. Therefore, according to the present disclosure, it is possible to monitor optical signals in a wide wavelength range in an optical monitoring device for optical fibers with a large number of fibers.
- FIG. 1 illustrates an example embodiment of an optical monitoring device of the present disclosure
- An example of light propagating through a spatial optical system is shown.
- 1 illustrates an example embodiment of an optical monitoring device of the present disclosure
- An example of an optical path in a single layer film is shown.
- An example of a branching ratio in a spatial optical system is shown.
- An example of the relationship between the minimum branching ratio, the thickness of the single-layer film, and the luminous flux radius ratio is shown.
- the optical monitor device of this embodiment has the configuration illustrated in FIG.
- the optical monitoring device of this embodiment is an optical monitoring device that detects the intensity of light propagating through a plurality of incident-side optical fibers 11, For each incident light from the incident side optical fiber 11, most of the incident light 41 is branched in a specific first direction and the remainder is branched in another specific second direction at a constant branching ratio.
- a spatial optical system 30 for emitting light; an incident-side optical fiber 11 that propagates a plurality of lights and is arranged in a two-dimensional array so that the light enters the spatial optical system 30; an output-side optical fiber 12 that propagates a plurality of lights and is arranged to receive most of the output light 42 that is output from the spatial optical system 30 in a first direction; a light-receiving unit 5 arranged to receive a part of the emitted light 43 emitted from the spatial optical system 30 in the second direction; an incident-side optical lens 21 disposed between the spatial optical system 30 and the incident-side optical fiber 11 to convert each incident light from the incident-side optical fiber 11 to the spatial optical system 30 into parallel light; Output-side optics arranged between the spatial optical system 30 and the output-side optical fiber 12 for efficiently coupling each output light from the spatial optical system 30 to the output-side optical fiber 12 corresponding to the incident-side optical fiber 11 a lens 22; have
- the spatial optical system 30 is provided between the entrance-side member 30A and the exit-side member 30B made of a material with a uniform refractive index.
- the monolayer film 33 is provided at a specific angle (45 degrees in the figure) with respect to the optical axis of the incident light 41 .
- the first refractive index interface 33A between the single layer film 33 and the entrance side member 30A and the second refractive index interface 33B between the single layer film 33 and the exit side member 30B are specified as the optical axis of the incident light. is set at an angle of
- FIG. 1 shows an example in which the specific angle is 45 degrees and the direction of reflected light is 90 degrees
- the direction of reflected light is not fixed at 90 degrees and can be changed as necessary.
- the spatial optical system 30 is not limited to a spatial system, and any optical component having a branching surface capable of branching into two light beams in different directions can be used.
- the incident light 41 from the incident side optical fiber 11 becomes parallel light at the incident side optical lens 21, so loss due to diffusion can be prevented.
- the spatial optical system 30 guides most of the outgoing light 42 to the outgoing side optical lens 22 .
- the exit-side optical lens 22 collects the light that has passed through the spatial optical system 30 and couples it to the exit-side optical fiber 12 . In this way, most of the emitted light 42 emitted from the incident side optical fiber 11 can be guided to the emitted side optical fiber 12 with little loss.
- part of the emitted light 43 branched by the spatial optical system 30 is guided to the light receiving section 5 arranged in a direction different from that of the majority of the emitted light 42 .
- the optical monitoring device of the present embodiment can measure the intensity of part of the light propagating from the incident side optical fiber 11 to the emitting side optical fiber 12 .
- the intensity of the light measured by the light receiving unit 5 is L (unit: mW)
- the intensity of the light incident from the incident side optical fiber 11 is (N+1) ⁇ L
- the intensity of the light propagated to the exit side optical fiber 12 is N ⁇ L.
- the light-receiving unit 5 may be composed of a plurality of light-receiving elements arranged so as to match the two-dimensional array shape of the incident-side optical fibers 11. It may be composed of one light-receiving element capable of detecting light intensity for each position. In this case, the intensity of each emitted light 43 detected by the light receiving unit 5 is output for each incident side optical fiber 11 . As a result, the number of parts can be reduced, and the optical fibers 11 on the incident side of any two-dimensional arrangement can be used.
- the incident light is split by Fresnel reflection at the refractive index interfaces 33A and 33B. Since the Fresnel reflection does not depend on the wavelength but depends on the refractive index at the refractive index interfaces 33A and 33B, the light is split in a wide wavelength range.
- FIG. 2 illustrates the difference in the optical path depending on the wavelength of the incident light when the entrance side member 30A and the exit side member 30B have the same refractive index.
- the incident-side member 30A and the emitting-side member 30B have the same refractive index
- different wavelengths travel in different directions in the single-layer film 33 . Therefore, the incident position on the refractive index interface 33B differs depending on the wavelength.
- light incident from the refractive index interface 33B travels in the same direction as the incident side member 30A due to refraction between the single layer film 33 and the emitting side member 30B. Therefore, even if the optical axes of the incident end surfaces of the output-side optical fibers 12 are arranged in parallel, the transmitted light can be coupled to the output-side optical fibers 12 regardless of the wavelength.
- the single-layer film 33 causes a difference in the incident position to the refractive index interface 33B depending on the wavelength. Therefore, in the present disclosure, the position of the exit-side optical lens 22 is determined according to the central wavelength and refraction angle of the incident light 41 and the thickness S of the single layer film 33 .
- the width of the light reaching the output side optical lens 22 mainly depends on the wavelength width of the incident light 41 and the thickness S of the single layer film 33 . If the width of the light reaching the output-side optical lens 22 is small with respect to the diameter of the output-side optical lens 22, the light loss is small. Therefore, by setting the diameter of the exit-side optical lens 22 to a value equal to or larger than the value determined according to the wavelength width of the incident light 41 and the thickness S of the single-layer film 33, the optical loss can be reduced. On the other hand, if the diameter of the output-side optical lens 22 is greater than or equal to the installation interval of the incident-side fibers, it collides with the adjacent lens. .
- the incident-side optical fiber 11 and the output-side optical fiber 12 are two-dimensionally arranged, and the spatial optical system 30 splits the two-dimensionally arranged light flux.
- the size can be reduced more than using an optical monitor device for each single optical fiber or an optical monitor device in which optical fibers are arranged one-dimensionally.
- the number of constituent parts is small, there is an effect that the cost can be easily reduced.
- the optical monitoring device of the present disclosure can monitor optical signals in a wide wavelength range, and can realize a compact optical monitoring device for optical fibers with a large number of fibers, such as several tens of fibers, at low cost. can.
- FIG. 1 shows an example in which the incident-side optical fiber 11, the output-side optical fiber 12, the incident-side optical lens 21, and the output-side optical lens 22 are arranged in a two-dimensional arrangement of 3 ⁇ 3. Any number of combinations of two or more can be used.
- FIG. 3 shows a configuration example of an optical monitor device according to this embodiment.
- the entrance side member 30A and the exit side member 30B can be made of a transparent material such as quartz glass.
- the single-layer film 33 can utilize an air layer by arranging a spacer 34 having a predetermined thickness between the incident-side member 30A and the emitting-side member 30B to form a gap.
- the incident-side optical lens 21 and the output-side optical lens 22 can be realized by a collimator in which a GRIN (GRaded INdex) fiber is incorporated in a rectangular ferrule used in an optical connector or the like.
- GRIN GRaded INdex
- the incident-side optical fiber 11 and the output-side optical fiber 12 are also incorporated in the rectangular ferrules 23 and 24 similarly to the incident-side optical lens 21 and the output-side optical lens 22, and the guide pins 25 and the guide holes are used as in the optical connector.
- the optical axes of the incident-side optical fiber 11, the incident-side optical lens 21, the exit-side optical fiber 12, and the exit-side optical lens 22 can be aligned.
- the light receiving section 5 can be realized by a commercially available optical image sensor.
- the refractive indices of the incident side member 30A and the emitting side member 30B are equivalent to those of the optical fiber cores of the incident side optical fiber 11 and the emitting side optical fiber 12.
- the incident-side optical fiber 11 and the output-side optical fiber 12 are fiber cores made of silica glass used for communication optical fibers, it is desirable to use a refractive index matching material having a refractive index of 1.47. It can be said that using an air layer (refractive index 1) for the single layer film 33 is an inexpensive structure. Assuming that the incident angle to the single layer film 33 is 30 degrees, the Fresnel reflectance (p-polarized light) is 8.5%.
- FIG. 4 illustrates detailed states of transmitted light and reflected light in the single layer film 33 .
- the intensity of the incident light 41 entering the spatial optical system 30 from the incident-side optical fiber 11 is L 0
- the intensities of the primary reflected light, the secondary reflected light, and the tertiary reflected light are L R1 , L R2 , and L R3 . are represented by the following formulas.
- r1 is the Fresnel reflectance at the refractive index interface 33A
- r2 is the Fresnel reflectance at the refractive index interface 33B
- ⁇ is the phase of light advanced in the single layer film 33, which is 4 ⁇ nS cos ⁇ / ⁇ .
- n is the refractive index of the single layer film 33
- S is the thickness of the single layer film 33
- ⁇ is the angle of refraction
- ⁇ is the wavelength of light.
- FIG. 4 also shows the intensities L T1 , L T2 , and L T3 of the primary transmitted light, secondary transmitted light, and tertiary transmitted light.
- Equation 4 is represented by the following equation.
- FIG. 5 shows the relationship between the minimum branching ratio and the ratio of the thickness S of the single layer film 33 and the luminous flux radius R.
- the minimum optical signal strength of an optical communication device is internationally standardized by IEC 61753-1, for example, and is about -20 to -25 dB.
- the minimum photosensitivity of an optical sensor is generally -40 dB, a branching ratio of -15 dB or more is required for use in a wide range of devices.
- the thickness S of the single layer film 33 is required so that the S/R is 0.5 or more.
- the single layer film 33 may be glass having a lower refractive index than the incident side member 30A and the output side member 30B.
- the spatial optical system 30 is not limited to a cubic shape, and may have any shape such as a rectangular parallelepiped.
- the light receiving section 5 can be arranged at any position where the light branched by the spatial optical system 30 can be received.
- the light receiving section 5 may be embedded inside the spatial optical system 30 .
- the optical monitoring device of the present disclosure can be used for monitoring any light transmitted in an optical transmission system.
- the optical monitoring device of the present disclosure is installed in any device used in an optical transmission system, such as a transmitter, a receiver, or a relay device, and the measurement result at the light receiving unit 5 is measured at any part inside or outside the device.
- the optical monitor device of the present disclosure can be inserted in the middle of a transmission line in an optical transmission system to measure the intensity and propagation loss of an optical signal in the transmission line.
- This disclosure can be applied to the information and communications industry.
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Abstract
Description
複数の光ファイバを伝搬する光の強度を検出する光モニタデバイスにおいて、
入射光の一部を第1の方向へ、残りを第2の方向へ特定の分岐比で分岐し、出射する光学部品を備え、
前記光学部品が、
一様な厚さを有する単層膜と、
前記単層膜の入射側に設けられ、前記単層膜と異なる屈折率を有する入射側部材と、
前記単層膜の出射側に設けられ、前記入射側部材と同じ屈折率を有する出射側部材と、
を備え、
前記単層膜と前記入射側部材との第1の屈折率界面及び前記単層膜と前記出射側部材との第2の屈折率界面が、それぞれ入射光の光軸と特定の角度をもって設けられ、
前記第1の方向が前記第1の屈折率界面及び前記第2の屈折率界面を透過する方向であり、
前記第2の方向が前記第1の屈折率界面及び前記第2の屈折率界面で反射する方向である。
本実施形態の光モニタデバイスは、図1に例示する構成を備える。
本実施形態の光モニタデバイスは、複数の入射側光ファイバ11を伝搬する光の強度を検出する光モニタデバイスにおいて、
入射側光ファイバ11からの各入射光に対し、入射光41の大部分を特定の第1の方向へ、残りを別の特定の第2の方向へと一定の分岐比で分岐し、各分岐光を出射する空間光学系30と、
前記空間光学系30に光を入射するように2次元配列状に配置された、複数の光を伝搬する入射側光ファイバ11と、
前記空間光学系30から第1の方向へ出射される大部分の出射光42を受光するように配置された、複数の光を伝搬する出射側光ファイバ12と、
前記空間光学系30から第2の方向へ出射される一部の出射光43を受光するように配置された受光部5と、
前記空間光学系30と前記入射側光ファイバ11の間に配置され、入射側光ファイバ11から空間光学系30への各入射光を平行光とする入射側光学レンズ21と、
前記空間光学系30と前記出射側光ファイバ12の間に配置され、空間光学系30からの各出射光を、効率よく入射側光ファイバ11に対応する出射側光ファイバ12に結合する出射側光学レンズ22と、
を有する。
図1に例示する光モニタデバイスによれば、入射側光ファイバ11と出射側光ファイバ12は2次元に配列されており、空間光学系30によって2次元配列の光束を分岐する。これにより単心の光ファイバ毎の光モニタデバイスや光ファイバが1次元に配列された光モニタデバイスを用いるよりも小型化が可能という効果がある。また、構成する部品が少ないことから、低コスト化が容易という効果がある。加えて、広い波長域で光が分岐されるので、誘電体多層膜を用いた光モニタデバイスよりも広い波長域の光信号をモニタすることができる。したがって、本開示の光モニタデバイスは、広い波長域の光信号がモニタ可能であり、かつ数十心といった多心数の光ファイバ用の光モニタデバイスを小型かつ低コストに実現可能にすることができる。
図3に、本実施形態に係る光モニタデバイスの構成例を示す。入射側部材30A、出射側部材30Bは例えば石英ガラスなどの透明な材料で作ることができる。単層膜33は、入射側部材30A及び出射側部材30Bの間に所定の厚さのスペーサ34を配置し、隙間を開けることで空気層を利用することができる。入射側光学レンズ21及び出射側光学レンズ22は、光コネクタなどで使用される角形フェルールにGRIN(GRaded INdex)ファイバを内蔵したコリーメータで実現することができる。入射側光ファイバ11及び出射側光ファイバ12も、入射側光学レンズ21及び出射側光学レンズ22と同様に、角形のフェルール23及び24に内蔵し、光コネクタと同様ガイドピン25とガイド穴を用いて入射側光ファイバ11、入射側光学レンズ21、出射側光ファイバ12、出射側光学レンズ22の光軸を調心することができる。受光部5は市販の光イメージセンサで実現できる。単層膜33以外の接続部に屈折率整合材を充填することで、余計なフレネル反射を抑制できる。
11:入射側光ファイバ
12:出射側光ファイバ
21:入射側光学レンズ
22:出射側光学レンズ
23、24:フェルール
25:ガイドピン
30:空間光学系
30A:入射側部材
30B:出射側部材
33:単層膜
34:スペーサ
41:入射光
42:大部分の出射光
43:一部の出射光
Claims (7)
- 複数の光ファイバを伝搬する光の強度を検出する光モニタデバイスにおいて、
入射光の一部を第1の方向へ、残りを第2の方向へ特定の分岐比で分岐し、出射する光学部品を備え、
前記光学部品が、
一様な厚さを有する単層膜と、
前記単層膜の入射側に設けられ、前記単層膜と異なる屈折率を有する入射側部材と、
前記単層膜の出射側に設けられ、前記入射側部材と同じ屈折率を有する出射側部材と、
を備え、
前記単層膜と前記入射側部材との第1の屈折率界面及び前記単層膜と前記出射側部材との第2の屈折率界面が、それぞれ入射光の光軸と特定の角度をもって設けられ、
前記第1の方向が前記第1の屈折率界面及び前記第2の屈折率界面を透過する方向であり、
前記第2の方向が前記第1の屈折率界面及び前記第2の屈折率界面で反射する方向である、
光モニタデバイス。 - 前記入射側部材及び前記出射側部材が同じ屈折率である、
ことを特徴とする請求項1に記載の光モニタデバイス。 - 前記単層膜が、空気層である、
ことを特徴とする請求項1又は2に記載の光モニタデバイス。 - 前記光学部品に光を入射するように2次元配列状に配置されている複数の入射側光ファイバと、
前記光学部品からの前記第1の方向への各出射光をそれぞれ受光するように2次元配列状に配置されている複数の出射側光ファイバと、
前記光学部品からの前記第2の方向への出射光をそれぞれ受光するように配置されている受光部と、
前記光学部品と前記入射側光ファイバの間に配置され、前記光学部品への各入射光を平行光とする入射側光学レンズと、
前記光学部品と前記出射側光ファイバの間に配置され、前記光学部品からの各出射光を前記出射側光ファイバに結合させる出射側光学レンズと、
を備えることを特徴とする請求項1から3のいずれかに記載の光モニタデバイス。 - 前記単層膜の厚さSと前記入射側光学レンズから出射される平行光の光束半径Rの比が0.5以上となる前記単層膜の厚さSを有し、かつ
前記単層膜での干渉を避けられる前記光束半径を有する、
ことを特徴とする請求項4に記載の光モニタデバイス。 - 前記出射側光学レンズの位置が、各入射光の中心波長に応じて定められている、
ことを特徴とする請求項4又は5に記載の光モニタデバイス。 - 前記出射側光学レンズの径が、各入射光の波長幅に応じて定められる値以上であり、前記入射側光ファイバの設置間隔以下である、
ことを特徴とする請求項4から6のいずれかに記載の光モニタデバイス。
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PCT/JP2021/020450 WO2022249454A1 (ja) | 2021-05-28 | 2021-05-28 | 光モニタデバイス |
US18/288,988 US20240230464A1 (en) | 2021-05-28 | 2021-05-28 | Optical monitor device |
JP2023523913A JPWO2022249454A1 (ja) | 2021-05-28 | 2021-05-28 |
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PCT/JP2021/020450 WO2022249454A1 (ja) | 2021-05-28 | 2021-05-28 | 光モニタデバイス |
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Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004219523A (ja) * | 2003-01-10 | 2004-08-05 | Fujitsu Ltd | 光モニタデバイス |
JP2004226501A (ja) * | 2003-01-20 | 2004-08-12 | Fujitsu Ltd | 可変光減衰器 |
US6873760B2 (en) * | 2002-03-19 | 2005-03-29 | Opti Work, Inc. | Integrated optical fiber collimator |
WO2007026510A1 (ja) * | 2005-08-29 | 2007-03-08 | Matsushita Electric Industrial Co., Ltd. | ファイバレーザおよび光学装置 |
JP2007214189A (ja) * | 2006-02-07 | 2007-08-23 | Komatsu Ltd | レーザチャンバのウィンドウ劣化判定装置および方法 |
JP2010050299A (ja) * | 2008-08-22 | 2010-03-04 | Gigaphoton Inc | 偏光純度制御装置及びそれを備えたガスレーザ装置 |
JP2011064540A (ja) * | 2009-09-16 | 2011-03-31 | Nikon Corp | チューナブルフィルタ、および光源装置 |
CN104092493A (zh) * | 2014-07-30 | 2014-10-08 | 四川飞阳科技有限公司 | 一种单向光功率监测器 |
-
2021
- 2021-05-28 JP JP2023523913A patent/JPWO2022249454A1/ja active Pending
- 2021-05-28 WO PCT/JP2021/020450 patent/WO2022249454A1/ja active Application Filing
- 2021-05-28 US US18/288,988 patent/US20240230464A1/en active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6873760B2 (en) * | 2002-03-19 | 2005-03-29 | Opti Work, Inc. | Integrated optical fiber collimator |
JP2004219523A (ja) * | 2003-01-10 | 2004-08-05 | Fujitsu Ltd | 光モニタデバイス |
JP2004226501A (ja) * | 2003-01-20 | 2004-08-12 | Fujitsu Ltd | 可変光減衰器 |
WO2007026510A1 (ja) * | 2005-08-29 | 2007-03-08 | Matsushita Electric Industrial Co., Ltd. | ファイバレーザおよび光学装置 |
JP2007214189A (ja) * | 2006-02-07 | 2007-08-23 | Komatsu Ltd | レーザチャンバのウィンドウ劣化判定装置および方法 |
JP2010050299A (ja) * | 2008-08-22 | 2010-03-04 | Gigaphoton Inc | 偏光純度制御装置及びそれを備えたガスレーザ装置 |
JP2011064540A (ja) * | 2009-09-16 | 2011-03-31 | Nikon Corp | チューナブルフィルタ、および光源装置 |
CN104092493A (zh) * | 2014-07-30 | 2014-10-08 | 四川飞阳科技有限公司 | 一种单向光功率监测器 |
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US20240230464A1 (en) | 2024-07-11 |
JPWO2022249454A1 (ja) | 2022-12-01 |
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