WO2022246896A1 - Centering mechanism and scanning electron microscope having same - Google Patents

Centering mechanism and scanning electron microscope having same Download PDF

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Publication number
WO2022246896A1
WO2022246896A1 PCT/CN2021/098306 CN2021098306W WO2022246896A1 WO 2022246896 A1 WO2022246896 A1 WO 2022246896A1 CN 2021098306 W CN2021098306 W CN 2021098306W WO 2022246896 A1 WO2022246896 A1 WO 2022246896A1
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WO
WIPO (PCT)
Prior art keywords
installation
groove
cavity
hole
boss
Prior art date
Application number
PCT/CN2021/098306
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French (fr)
Chinese (zh)
Inventor
李帅辰
蒋磊
孙伟强
孟庆浪
蒋俊海
Original Assignee
中科晶源微电子技术（北京）有限公司
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Publication of WO2022246896A1 publication Critical patent/WO2022246896A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Definitions

  • the present application relates to the field of semiconductors, in particular to a centering mechanism and a scanning electron microscope having the same.
  • the core of the electron beam detection equipment is the scanning electron microscope.
  • the poor alignment of the electron beam in the scanning electron microscope will directly affect the performance of the electron microscope, and cannot achieve the ideal working state.
  • the present application proposes a centering mechanism and a scanning electron microscope with it, which realizes the centering adjustment of the electron beam, thereby achieving the best state of the scanning electron microscope and reducing the impact of optical axis offset on resolution rate, and the influence of the key parameters of the machine.
  • a centering mechanism which is used to be installed in a scanning electron microscope, and to perform centering and calibration on the electron beam in the scanning electron microscope, including an electron gun cavity and an installation cavity that are detachably connected in sequence body;
  • a first through hole is opened on the electron gun cavity, and a first boss is provided on a side of the electron gun cavity facing the installation cavity, and the first boss is arranged around the first through hole.
  • Ring structure
  • the side of the installation cavity facing the electron gun cavity is provided with an installation groove, the first boss is placed inside the installation groove, the outer side wall of the first boss and the inner side wall of the installation groove with a distance between;
  • a mounting hole suitable for mounting components aligned with the electron beam is opened at the bottom of the mounting groove, and the mounting hole is set through the mounting cavity;
  • a first adjustment member is installed on the side wall, the first adjustment member is arranged through the side wall of the installation cavity, and the first adjustment member is used to push the The first boss moves in the installation groove;
  • first adjusting members There are a plurality of first adjusting members, and the plurality of first adjusting members are distributed at intervals along the circumference of the installation groove.
  • the first boss includes an inclined portion, the side wall of the inclined portion is arranged on an inclined plane, the inclined portion is arranged adjacent to the groove bottom of the installation groove, and the inclined portion and the The distance between the inner side walls of the installation groove gradually decreases along the first direction;
  • the first direction is a direction in which the electron gun cavity points to the installation cavity
  • a plurality of the first adjustment members all abut against the inclined portion.
  • the first adjusting member is rod-shaped, and an external thread is provided on the rod of the first adjusting member;
  • the side wall of the installation cavity where the installation groove is opened is provided with a first internally threaded hole, the number of the first internally threaded hole is the same as the number of the first adjustment member, and the first adjustment member is the same as the first adjustment member.
  • the first internally threaded holes are screwed in one-to-one correspondence.
  • the first boss further includes a connecting portion arranged in a ring shape, the connecting portion is arranged circumferentially around the first through hole, and the bottom end surface of the connecting portion with external chamfers;
  • the inclined portion is fixed on one side of the bottom end face of the connecting portion, and the top end face of the inclined portion matches the bottom end face of the connecting portion;
  • the bottom of the connecting portion is a groove bottom side of the connecting portion adjacent to the installation groove.
  • a first sealing ring is also included;
  • the groove bottom of the installation groove is provided with a first sealing groove, the first sealing groove is arranged in an annular shape, the first sealing groove is arranged opposite to the first boss, and the first sealing groove surrounds the The circumferential setting of the first through hole;
  • the first sealing ring is installed in the first sealing groove for sealing the electron gun cavity and the installation cavity.
  • the first sealing ring abuts against the first boss.
  • it also includes an objective lens cavity, and the objective lens cavity is detachably mounted on a side of the installation cavity away from the electron gun cavity;
  • the objective lens cavity is provided with a second through hole coaxially arranged with the first through hole, and the objective lens cavity is provided with a placement groove toward one end of the installation cavity;
  • the installation cavity is provided with a second boss on the side facing the placement groove, the second boss is placed in the placement groove, the outer side wall of the second boss is connected to the inner side of the placement groove a distance is provided between the walls;
  • the objective lens cavity is provided with a second adjustment piece that is movably installed on the side wall of the place where the placement groove is located, and the second adjustment piece is provided with a plurality of the second adjustment pieces along the circumferential direction of the placement groove. interval distribution;
  • a plurality of the second adjusting members are all disposed through the side wall of the placing groove, and are used for pushing the second boss to move in the placing groove.
  • a second sealing ring is also included;
  • the second sealing groove is arranged in an annular shape, the second sealing groove is opposite to the second boss, and the second sealing groove surrounds the second boss.
  • the second sealing ring is installed in the second sealing groove for sealing the installation cavity and the objective lens cavity.
  • the installation holes include a first installation hole, a second installation hole and a third installation hole;
  • first installation hole, the second installation hole and the third installation hole are sequentially arranged along the circumferential direction of the installation cavity;
  • Both the diameter of the first installation hole and the diameter of the third installation hole are larger than the diameter of the second installation hole
  • the first mounting hole, the second mounting hole, and the third mounting hole are arranged coaxially.
  • the first sealing ring abuts against the first boss.
  • a scanning electron microscope including the centering mechanism described in any one of the above.
  • the centering mechanism in the embodiment of the present application is divided into two parts, the electron gun cavity and the installation cavity, wherein the installation cavity is detachably mounted on the bottom of the electron gun cavity, and the installation cavity is provided with a mounting hole for installing the detector.
  • the first boss at the bottom of the electron gun cavity is located in the installation groove.
  • the first adjusting member Since the first adjusting member is arranged in multiples along the circumferential direction of the installation groove, the first adjusting member can adjust the position of the electron gun cavity in all directions until the installation hole on the installation cavity is installed on the installation hole that is compatible with the electron beam. The correct part is aligned with the electron beam.
  • the centering mechanism in the embodiment of the present application drives the electron gun cavity to make fine adjustments in the installation groove by adjusting the first adjustment member, so that the electric field center of the components aligned with the electron beam installed on the installation hole is aligned with the electron beam center Overlapping, so as to realize the centering adjustment of the electron beam, thereby achieving the best state of the scanning electron microscope and reducing the impact of the optical axis offset on the resolution and key parameters of the machine.
  • Fig. 1 shows the main structural diagram of the centering mechanism of the embodiment of the present application
  • Fig. 2 shows the sectional view of the centering mechanism of the embodiment of the present application
  • Fig. 3 shows a partial enlarged view of the installation diagram of the electron gun cavity and the installation cavity of the centering mechanism of the embodiment of the present application;
  • Fig. 4 shows a partial enlarged view of the installation cavity of the centering mechanism and the objective lens cavity of the embodiment of the present application.
  • first and second are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as “first” and “second” may explicitly or implicitly include one or more of these features.
  • “plurality” means two or more, unless otherwise specifically defined.
  • Fig. 1 shows the main structure diagram of the centering mechanism of the embodiment of the present application.
  • Fig. 2 shows a cross-sectional view of the centering mechanism of the embodiment of the present application.
  • FIG. 3 shows a partially enlarged view of the installation diagram of the electron gun cavity 100 and the installation cavity 200 of the centering mechanism of the embodiment of the present application.
  • FIG. 4 shows a partially enlarged view of the installation diagram of the installation cavity 200 and the objective lens cavity 600 of the centering mechanism of the embodiment of the present application.
  • the centering mechanism is used to be installed in the scanning electron microscope to center and calibrate the electron beam in the scanning electron microscope.
  • the centering mechanism includes: The electron gun cavity 100 and the installation cavity 200 .
  • the electron gun cavity 100 is provided with a first through hole, and the side of the electron gun cavity 100 facing the installation cavity 200 is provided with a first boss 110 , and the first boss 110 is in a ring structure arranged around the first through hole.
  • the installation cavity 200 is provided with an installation groove on the side facing the electron gun cavity 100 , the first boss 110 is placed inside the installation groove, and a distance is set between the outer side wall of the first boss 110 and the inner side wall of the installation groove.
  • a mounting hole for mounting components aligned with the electron beam is provided at the bottom of the mounting groove, and the mounting hole is set through the mounting cavity 200 .
  • the first adjusting part 300 is installed on the side wall where the installation groove is opened in the installation cavity 200.
  • the first adjusting part 300 is arranged through the side wall of the installation cavity 200.
  • the first adjusting part 300 is used to push the first boss 110 on the side wall.
  • Moving in the installation groove there are multiple first adjusting members 300, and the plurality of first adjusting members 300 are distributed at intervals along the circumferential direction of the installation groove.
  • the centering mechanism of the embodiment of the present application is divided into two parts, the electron gun cavity 100 and the installation cavity 200, wherein the installation cavity 200 is detachably installed on the bottom of the electron gun cavity 100, and the installation cavity 200 is provided with a mounting for installing the detector 400. hole.
  • the first boss 110 at the bottom of the electron gun cavity 100 is located in the installation groove.
  • the movement of the first adjustment member 300 will push the first boss 110 to move in the installation groove, thereby driving the entire electron gun cavity 100 to perform movement adjustment. Since the first adjusting member 300 is provided in multiples along the circumferential direction of the installation groove, the first adjusting member 300 can adjust the position of the electron gun cavity 100 in all directions until the installation hole on the installation cavity 200 is installed The part aligned with the electron beam is centered with the electron beam. To sum up, the centering mechanism in the embodiment of the present application drives the electron gun cavity 100 to make fine adjustments in the installation groove by adjusting the first adjustment member 300, so that the electric field center of the components aligned with the electron beam installed on the installation hole is aligned with the electron beam. The center of the beam coincides to realize the centering adjustment of the electron beam, thereby achieving the best state of the scanning electron microscope and reducing the impact of the optical axis offset on the resolution and key parameters of the machine.
  • the electron beam alignment component mounted on the mounting hole is arranged coaxially with the mounting hole.
  • the component installed in the mounting hole and aligned with the electron beam may be the stigmator in the scanning electron microscope, or the detector 400 .
  • the detector 400 is taken as an example for description.
  • the centering mechanism of the embodiment of the present application can be used for centering and calibrating the center of the optical axis of the electron beam in the scanning electron microscope and the center of the stigmatizer, and can also be used for aligning the center of the electron beam in the scanning electron microscope.
  • the center of the optical axis is calibrated with the center of the detector 400 .
  • the electron gun cavity 100 is cylindrical, and the axis of the first through hole coincides with the axis of the electron gun cavity 100 .
  • the installation cavity 200 is cylindrical, and after the assembly of the installation cavity 200 and the electron gun cavity 100 is completed, the outer wall of the installation cavity 200 and the electron gun cavity The outer side wall of 100 is set flush.
  • the mounting groove is in the shape of a circular groove, and the axis of the mounting groove coincides with the axis of the first through hole, and the axis of the mounting hole coincides with the axis of the first through hole. As a result, it is easier and more accurate to center the electron beam mounted on the mounting hole.
  • the top end surface of the installation cavity 200 is arranged parallel to the bottom end surface of the electron gun cavity 100, and after the electron gun cavity 100 and the installation cavity 200 are assembled, The bottom flat end surface of the electron gun cavity 100 is arranged in abutment with the top end surface of the installation cavity 200 .
  • the mounting holes include a first hole and a second hole arranged sequentially in a stepped shape, wherein the first hole is arranged adjacent to the electron gun cavity 100 , and the bottom end surface of the first hole is parallel to the top end surface of the installation cavity 200 .
  • the parallelism of the contact surface of the electron gun cavity 100 and the installation cavity 200 is improved, and the parallelism of the contact surface of the installation cavity 200 and the detector 400 is also improved, the shape and position tolerance is reduced, and the deviation of the optical axis is prevented. shift, reducing installation errors.
  • the first boss 110 includes an inclined portion 112 , the side wall of the inclined portion 112 is arranged on an inclined plane, and the inclined portion 112 is adjacent to the groove bottom of the installation groove. It is provided that the distance between the inclined portion 112 and the inner side wall of the installation groove decreases gradually along the first direction.
  • the first direction is a direction in which the electron gun cavity points to the installation cavity 200 , and each first adjusting member 300 abuts against the inclined portion 112 .
  • first adjusting member 300 Since the first adjusting member 300 abuts against the first boss 110, and the force-receiving part of the first boss 110 is the inclined surface 112, when the first adjusting member 300 acts, it will exert a downward component force on the inclined surface 112, so that It will not tilt up during movement, which ensures the sealing effect.
  • the first boss 110 also includes a connecting portion 111, wherein the connecting portion 111 is arranged in a ring shape, and the connecting portion 111 is circumferentially arranged around the first through hole, and the bottom of the connecting portion 111 The end faces are provided with chamfers.
  • the inclined portion 112 is fixed on one side of the bottom end surface of the connecting portion 111 , and the top end surface of the inclined portion 112 matches the bottom end surface of the connecting portion 111 .
  • the bottom of the above-mentioned connecting portion 111 is a groove bottom side of the connecting portion 111 adjacent to the installation groove.
  • the connecting portion 111 , the inclined portion 112 and the electron gun cavity 100 may be integrally formed. This facilitates the manufacture of the electron gun cavity 100 .
  • a first sealing ring 500 is also included, and a first sealing groove is opened at the bottom of the installation groove, the first sealing groove is annular, and the first sealing groove is opposite to the first boss 110 It is provided that the first sealing groove is circumferentially arranged around the first through hole.
  • the first sealing ring 500 is installed in the first sealing groove, and the first sealing ring 500 is used to seal the electron gun cavity 100 and the installation cavity 200 .
  • the sealing performance of the electron gun cavity 100 and the installation cavity 200 is increased.
  • the first adjusting rod is rod-shaped, and an external thread is provided on the rod of the first adjusting member 300 .
  • the installation cavity 200 is provided with a first internally threaded hole on the side wall where the installation groove is opened, and the number of the first internally threaded hole is the same as the number of the first adjusting member 300, and the first adjusting member 300 is the same as the first internally threaded hole.
  • a corresponding screw connection Therefore, the position of the electron gun cavity 100 can be adjusted by rotating the first adjusting member 300, so that the centering of the components aligned with the electron beam and the electron beam is more convenient.
  • FIG. 1 Figure 2, Figure 3 or Figure 4, further, in a possible implementation, it also includes an objective lens cavity 600, and the objective lens cavity 600 is detachably installed in the installation cavity 200 away from the electron gun cavity one side of the body 100.
  • a second through hole coaxial with the first through hole is opened on the objective lens cavity 600 , and a placement slot is opened on the end of the objective lens cavity 600 facing the installation cavity 200 .
  • the installation cavity 200 is provided with a second boss 210 on the side facing the placement groove.
  • the second boss 210 is placed in the placement groove. There is a distance between the outer side wall of the second boss 210 and the inner side wall of the placement groove.
  • a second adjusting member 700 is movably installed on the side wall of the objective lens cavity 600 where the placement groove is opened.
  • the second adjusting members 700 There are multiple second adjusting members 700, and the plurality of second adjusting members 700 are distributed along the circumferential direction of the placement groove at intervals.
  • a plurality of second adjusting members 700 are arranged through the side wall of the placement groove, and one end of the plurality of second adjusting members 700 facing the second boss 210 is connected with the second boss 210 for pushing the installation cavity 200 into the placement groove. move within.
  • the second adjustment member 700 is adjusted so that the second adjustment member 700 drives the second boss 210 to move in the placement groove, thereby, the position of the installation cavity 200 can be adjusted, so that the position on the installation cavity 200 is consistent with the above-mentioned
  • the part where the electron beam is aligned is centered with the objective lens.
  • the second through hole is coaxially arranged with the first through hole
  • the objective lens cavity 600 is cylindrical
  • the outer wall of the objective lens cavity 600 is in line with the mounting cavity 200.
  • the outer wall is arranged flush, and the diameter of the second through hole is the same as that of the first through hole.
  • the side walls of the second boss 210 are arranged parallel to the side walls of the first boss 110 .
  • the top end surface of the objective lens cavity 600 is arranged parallel to the bottom end surface of the installation cavity 200, and after the objective lens cavity 600 and the installation cavity 200 are assembled, the top end surface of the objective lens cavity 600 is overlapped with the bottom end surface of the installation cavity 200.
  • the top end surface of the objective lens cavity 600 is arranged parallel to the bottom of the installation groove of the installation cavity 200 . This further eliminates the shape and position tolerance.
  • the electron gun cavity 100 is provided with a plurality of first bolt holes, and the plurality of first bolt holes are all set through the electron gun cavity 100, and the plurality of first bolt holes A bolt hole is distributed around the axis of the electron gun cavity 100 , and a plurality of first bolt holes are arranged adjacent to the edge of the electron gun cavity 100 .
  • the installation cavity 200 is provided with a plurality of second bolt holes, the number of the second bolt holes is the same as the number of the first bolt holes, and the second bolt holes are set in one-to-one correspondence with the first bolt holes, and the second bolt holes all penetrate The installation cavity 200 is provided.
  • the objective lens cavity 600 is provided with a plurality of third bolt holes, the number of the third bolt holes is the same as the number of the first bolt holes, and the third bolt holes correspond to the first bolt holes one by one.
  • the electronic cavity, the mounting cavity 200 and the objective lens cavity 600 are connected by bolts (the bolts are screwed into the first bolt hole, the second bolt hole and the third bolt hole in sequence). Therefore, after the electron gun cavity 100 and the installation cavity 200 are adjusted, they can be locked by bolts to prevent their movement and ensure that their relative positions will not change.
  • a second sealing ring 800 also includes a second sealing ring 800, a second sealing groove is provided at the bottom of the groove, the second sealing groove is arranged in an annular shape, the second sealing groove is arranged opposite to the second boss 210, and the second sealing groove The grooves are circumferentially arranged around the second through hole.
  • the second sealing ring 800 is installed in the second sealing groove for sealing the installation cavity 200 and the objective lens cavity 600 .
  • the installation holes include a first installation hole, a second installation hole and a third installation hole, wherein the first installation hole, the second installation hole and the third installation hole are along the periphery of the installation cavity 200 Set in sequence in the direction. Both the diameter of the first mounting hole and the diameter of the third mounting hole are larger than the diameter of the second mounting hole, and the first mounting hole, the second mounting hole, and the third mounting hole are coaxially arranged with the detector 400 . Thus, the centering of the detector 400 is made more precise.
  • the first boss 110 and the bottom of the installation groove are used as the contact surface, and the phenomenon that the tolerance of the sealing ring itself is uncertain is avoided, and the optical axis deviation is further placed. shift, reducing installation errors.
  • the fixing plate 900 is also included, wherein the detector 400 is provided with a central hole.
  • the detector 400 is fixedly installed on the fixing plate 900, and the edge of the fixing plate 900 is provided with bolt holes for bolting with the installation cavity 200, so that the fixing plate 900 is inside the first installation hole.
  • the detector 400 is arranged on the surface of the fixing plate 900 facing the second installation hole.
  • the fixed plate 900 is provided with a central hole, and the central hole on the fixed plate 900 is coaxially arranged with the central hole on the detector 400 .
  • the present disclosure also provides a scanning electron microscope.
  • the scanning electron microscope of the embodiment of the present disclosure includes the centering mechanism described above.
  • an electron gun and a condenser lens can be installed on the electron gun cavity 100
  • an objective diaphragm, a detector 400 , an objective lens and a deflector can be installed on the objective lens cavity 600 .

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  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

The present application relates to a centering mechanism and a scanning electron microscope having same. The centering mechanism is mounted in the scanning electron microscope and used for performing centering calibration on an electron beam in the scanning electron microscope. The centering mechanism comprises an electron gun cavity and a mounting cavity. The electron gun cavity is provided with a first through hole. A first boss is provided on the side of the electron gun cavity facing the mounting cavity, and the first boss is annular. A mounting recess is formed on the side of the mounting cavity facing the electron gun cavity, and the distance is configured between the outer side wall of the first boss and the inner side wall of the mounting recess. The recess bottom of the mounting recess is provided with a mounting hole suitable for mounting a component aligned with the electron beam. The mounting cavity is provided with first adjusting members movably mounted on side walls at the mounting recess, and the first adjusting member passes through the side wall of the mounting cavity. There are a plurality of first adjusting members, and the plurality of first adjusting members are distributed at intervals along the circumferential direction of the mounting recess. The present application realizes centering adjustment of an electron beam, achieves an optimal state of a scanning electron microscope, and reduces the influence of an optical axis offset on resolution and machine key parameter indexes.

Description

对中机构及具有其的扫描电镜Centering mechanism and scanning electron microscope with it 技术领域technical field
本申请涉及半导体领域，尤其涉及一种对中机构及具有其的扫描电镜。The present application relates to the field of semiconductors, in particular to a centering mechanism and a scanning electron microscope having the same.
背景技术Background technique
随着半导体技术的发展和工艺技术的进步，集成电路线宽愈来愈向细微化发展，对电路的生产工艺技术也提出了更高更难的要求，不但要刻蚀出亚微米线条，而且线路缺陷也要控制在一定范围内，以保证芯片的功能和成品率。研究表明，缺陷的尺寸在特征线宽的三分之一以上时，就成为致命的缺陷会导致器件失效。由于器件的尺寸不断缩小，致命缺陷的尺寸也变的越来越小，缺陷的检测变得更加困难，光学检测设备已不能满足需要，而电子束检测设备克服了光学波长的限制，使分辨率提高到纳米领域，可以检测到极微小的缺陷。With the development of semiconductor technology and the advancement of process technology, the line width of integrated circuits is becoming more and more miniaturized, and higher and more difficult requirements are put forward for the production process technology of circuits. Not only must sub-micron lines be etched, but also Line defects should also be controlled within a certain range to ensure the function and yield of the chip. Studies have shown that when the size of the defect is more than one-third of the characteristic line width, it becomes a fatal defect and causes device failure. As the size of the device continues to shrink, the size of the fatal defect becomes smaller and smaller, and the detection of the defect becomes more difficult. The optical inspection equipment can no longer meet the needs, and the electron beam inspection equipment overcomes the limitation of the optical wavelength, making the resolution Increased to the nanometer field, tiny defects can be detected.
电子束检测设备的核心是扫描电镜，在扫描电镜中的电子束对中不好会直接影响电镜的性能，无法达到理想的工作状态。The core of the electron beam detection equipment is the scanning electron microscope. The poor alignment of the electron beam in the scanning electron microscope will directly affect the performance of the electron microscope, and cannot achieve the ideal working state.
发明内容Contents of the invention
有鉴于此，本申请提出了一种对中机构及具有其的扫描电镜，其实现电子束的对中调节，由此，达到了扫描电镜的最佳状态，减小了光轴偏移对分辨率、机台关键参数指标的影响。In view of this, the present application proposes a centering mechanism and a scanning electron microscope with it, which realizes the centering adjustment of the electron beam, thereby achieving the best state of the scanning electron microscope and reducing the impact of optical axis offset on resolution rate, and the influence of the key parameters of the machine.
根据本申请的一方面，提供了一种对中机构，用于安装在扫描电镜中，对所述扫描电镜中的的电子束进行对中校准，包括依次可拆卸连接的电子枪腔体和安装腔体；According to one aspect of the present application, a centering mechanism is provided, which is used to be installed in a scanning electron microscope, and to perform centering and calibration on the electron beam in the scanning electron microscope, including an electron gun cavity and an installation cavity that are detachably connected in sequence body;
所述电子枪腔体上开设有第一通孔，所述电子枪腔体朝向所述安装腔体的一侧设有第一凸台，所述第一凸台呈绕所述第一通孔设置的环状结构；A first through hole is opened on the electron gun cavity, and a first boss is provided on a side of the electron gun cavity facing the installation cavity, and the first boss is arranged around the first through hole. Ring structure;
所述安装腔体朝向所述电子枪腔体的一侧开设有安装槽，所述第一凸台 放置在所述安装槽内部，所述第一凸台的外侧壁与所述安装槽的内侧壁之间设有距离；The side of the installation cavity facing the electron gun cavity is provided with an installation groove, the first boss is placed inside the installation groove, the outer side wall of the first boss and the inner side wall of the installation groove with a distance between;
所述安装槽的槽底处开设有适用于安装与所述电子束对准的部件的安装孔，所述安装孔贯穿所述安装腔体设置；A mounting hole suitable for mounting components aligned with the electron beam is opened at the bottom of the mounting groove, and the mounting hole is set through the mounting cavity;
所述安装腔体开设所述安装槽处的侧壁上移动安装有第一调节件，所述第一调节件贯穿所述安装腔体的侧壁设置，所述第一调节件用于推动所述第一凸台在所述安装槽内移动；On the side wall of the installation cavity where the installation groove is opened, a first adjustment member is installed on the side wall, the first adjustment member is arranged through the side wall of the installation cavity, and the first adjustment member is used to push the The first boss moves in the installation groove;
所述第一调节件设有多个，多个所述第一调节件沿所述安装槽的周向间隔分布。There are a plurality of first adjusting members, and the plurality of first adjusting members are distributed at intervals along the circumference of the installation groove.
在一种可能的实现方式中，所述第一凸台包括斜面部，所述斜面部的侧壁呈斜面设置，所述斜面部邻近所述安装槽的槽底设置，所述斜面部与所述安装槽的内侧壁之间的距离沿第一方向逐渐减小；In a possible implementation manner, the first boss includes an inclined portion, the side wall of the inclined portion is arranged on an inclined plane, the inclined portion is arranged adjacent to the groove bottom of the installation groove, and the inclined portion and the The distance between the inner side walls of the installation groove gradually decreases along the first direction;
其中，所述第一方向为所述电子枪腔体指向所述安装腔体的方向；Wherein, the first direction is a direction in which the electron gun cavity points to the installation cavity;
多个所述第一调节件均与所述斜面部抵接。A plurality of the first adjustment members all abut against the inclined portion.
在一种可能的实现方式中，所述第一调节件呈杆状，所述第一调节件的杆身上开设有外螺纹；In a possible implementation manner, the first adjusting member is rod-shaped, and an external thread is provided on the rod of the first adjusting member;
所述安装腔体开设所述安装槽处的侧壁上开设有第一内螺纹孔，所述第一内螺纹孔的数量与所述第一调节件的数量相同，所述第一调节件与所述第一内螺纹孔一一对应的旋接。The side wall of the installation cavity where the installation groove is opened is provided with a first internally threaded hole, the number of the first internally threaded hole is the same as the number of the first adjustment member, and the first adjustment member is the same as the first adjustment member. The first internally threaded holes are screwed in one-to-one correspondence.
在一种可能的实现方式中，所述第一凸台还包括连接部，所述连接部呈环形设置，所述连接部绕所述第一通孔周向设置，所述连接部的底部端面设有外倒角；In a possible implementation manner, the first boss further includes a connecting portion arranged in a ring shape, the connecting portion is arranged circumferentially around the first through hole, and the bottom end surface of the connecting portion with external chamfers;
所述斜面部固定在所述连接部的底部端面一侧，所述斜面部的顶部端面与所述连接部的底部端面相匹配；The inclined portion is fixed on one side of the bottom end face of the connecting portion, and the top end face of the inclined portion matches the bottom end face of the connecting portion;
其中，所述连接部的底部为所述连接部邻近所述安装槽的槽底一侧。Wherein, the bottom of the connecting portion is a groove bottom side of the connecting portion adjacent to the installation groove.
在一种可能的实现方式中，还包括第一密封圈；In a possible implementation manner, a first sealing ring is also included;
所述安装槽的槽底处开设有第一密封槽，所述第一密封槽呈环状设置， 所述第一密封槽与所述第一凸台相对设置，所述第一密封槽绕所述第一通孔周向设置；The groove bottom of the installation groove is provided with a first sealing groove, the first sealing groove is arranged in an annular shape, the first sealing groove is arranged opposite to the first boss, and the first sealing groove surrounds the The circumferential setting of the first through hole;
所述第一密封圈安装在所述第一密封槽内，用于密封所述电子枪腔体和所述安装腔体。The first sealing ring is installed in the first sealing groove for sealing the electron gun cavity and the installation cavity.
在一种可能的实现方式中，所述第一凸台朝向所述安装槽的槽底的一侧与所述安装槽的槽底之间设有间隙；In a possible implementation manner, there is a gap between the side of the first boss facing the bottom of the installation groove and the bottom of the installation groove;
所述第一密封圈与所述第一凸台抵接。The first sealing ring abuts against the first boss.
在一种可能的实现方式中，还包括物镜腔体，所述物镜腔体可拆卸安装在所述安装腔体背离所述电子枪腔体的一侧；In a possible implementation manner, it also includes an objective lens cavity, and the objective lens cavity is detachably mounted on a side of the installation cavity away from the electron gun cavity;
所述物镜腔体上开设有与所述第一通孔同轴设置的第二通孔，所述物镜腔体朝向所述安装腔体的一端开设有放置槽；The objective lens cavity is provided with a second through hole coaxially arranged with the first through hole, and the objective lens cavity is provided with a placement groove toward one end of the installation cavity;
所述安装腔体朝向所述放置槽的一侧设有第二凸台，所述第二凸台放置在所述放置槽内，所述第二凸台的外侧壁与所述放置槽的内侧壁之间设有距离；The installation cavity is provided with a second boss on the side facing the placement groove, the second boss is placed in the placement groove, the outer side wall of the second boss is connected to the inner side of the placement groove a distance is provided between the walls;
所述物镜腔体开设有放置槽处的侧壁上可移动安装有第二调节件，所述第二调节件设有多个，多个所述第二调节件沿所述放置槽的周向间隔分布；The objective lens cavity is provided with a second adjustment piece that is movably installed on the side wall of the place where the placement groove is located, and the second adjustment piece is provided with a plurality of the second adjustment pieces along the circumferential direction of the placement groove. interval distribution;
多个所述第二调节件均贯穿所述放置槽的侧壁设置，用于推动所述第二凸台在所述放置槽内移动。A plurality of the second adjusting members are all disposed through the side wall of the placing groove, and are used for pushing the second boss to move in the placing groove.
在一种可能的实现方式中，还包括第二密封圈；In a possible implementation manner, a second sealing ring is also included;
所述放置槽的槽底处开设有第二密封槽，所述第二密封槽呈环状设置，所述第二密封槽与所述第二凸台相对设置，所述第二密封槽绕所述第二通孔周向设置；There is a second sealing groove at the bottom of the placement groove, the second sealing groove is arranged in an annular shape, the second sealing groove is opposite to the second boss, and the second sealing groove surrounds the second boss. The circumferential setting of the second through hole;
所述第二密封圈安装在第二密封槽内，用于密封所述安装腔体和所述物镜腔体。The second sealing ring is installed in the second sealing groove for sealing the installation cavity and the objective lens cavity.
在一种可能的实现方式中，所述安装孔包括第一安装孔、第二安装孔和第三安装孔；In a possible implementation manner, the installation holes include a first installation hole, a second installation hole and a third installation hole;
其中，所述第一安装孔、所述第二安装孔和所述第三安装孔沿所述安装 腔体的周向方向依次设置；Wherein, the first installation hole, the second installation hole and the third installation hole are sequentially arranged along the circumferential direction of the installation cavity;
所述第一安装孔的孔径和所述第三安装孔的孔径均大于所述第二安装孔的孔径；Both the diameter of the first installation hole and the diameter of the third installation hole are larger than the diameter of the second installation hole;
所述第一安装孔、所述第二安装孔、所述第三安装孔同轴设置。The first mounting hole, the second mounting hole, and the third mounting hole are arranged coaxially.
在一种可能的实现方式中，所述第一凸台朝向所述安装槽的槽底的一侧与所述安装槽的槽底之间设有间隙；In a possible implementation manner, there is a gap between the side of the first boss facing the bottom of the installation groove and the bottom of the installation groove;
所述第一密封圈与所述第一凸台抵接。The first sealing ring abuts against the first boss.
根据本申请的另一方面，提供了一种扫描电镜，包括上述任一项所述的对中机构。According to another aspect of the present application, a scanning electron microscope is provided, including the centering mechanism described in any one of the above.
本申请实施例对中机构分为电子枪腔体和安装腔体两部分，其中安装腔体可拆卸安装在电子枪腔体的底部，安装腔体上设有安装探测器的安装孔。在电子枪腔体和安装腔体完成装配后，此时，电子枪腔体底部的第一凸台位于安装槽内。当安装孔上所安装的与电子束对准的部件与电子束进行对中时，调节安装腔体上的多个第一调节件，第一调节件伸入安装槽内的长度发生改变，所以第一调节件的移动会推动第一凸台在安装槽内移动，由此，带动整个电子枪腔体进行移动调节。由于第一调节件沿安装槽的周向设置多个，使得第一调节件可以在各个方向上对电子枪腔体的位置进行调节，直至安装腔体上的安装孔上所安装的与电子束对准的部件与电子束对中。综上所述，本申请实施例对中机构通过调节第一调节件带动电子枪腔体在安装槽内进行微调，使得安装孔上所安装的与电子束对准的部件的电场中心与电子束中心重合，从而实现电子束的对中调节，由此，达到了扫描电镜的最佳状态，减小了光轴偏移对分辨率、机台关键参数指标的影响。The centering mechanism in the embodiment of the present application is divided into two parts, the electron gun cavity and the installation cavity, wherein the installation cavity is detachably mounted on the bottom of the electron gun cavity, and the installation cavity is provided with a mounting hole for installing the detector. After the assembly of the electron gun cavity and the installation cavity is completed, at this time, the first boss at the bottom of the electron gun cavity is located in the installation groove. When the components aligned with the electron beam installed on the mounting hole are aligned with the electron beam, the multiple first adjustment members on the installation cavity are adjusted, and the length of the first adjustment members extending into the installation groove changes, so The movement of the first adjusting member will push the first boss to move in the installation groove, thereby driving the whole electron gun cavity to move and adjust. Since the first adjusting member is arranged in multiples along the circumferential direction of the installation groove, the first adjusting member can adjust the position of the electron gun cavity in all directions until the installation hole on the installation cavity is installed on the installation hole that is compatible with the electron beam. The correct part is aligned with the electron beam. To sum up, the centering mechanism in the embodiment of the present application drives the electron gun cavity to make fine adjustments in the installation groove by adjusting the first adjustment member, so that the electric field center of the components aligned with the electron beam installed on the installation hole is aligned with the electron beam center Overlapping, so as to realize the centering adjustment of the electron beam, thereby achieving the best state of the scanning electron microscope and reducing the impact of the optical axis offset on the resolution and key parameters of the machine.
根据下面参考附图对示例性实施例的详细说明，本申请的其它特征及方面将变得清楚。Other features and aspects of the present application will become apparent from the following detailed description of exemplary embodiments with reference to the accompanying drawings.
附图说明Description of drawings
包含在说明书中并且构成说明书的一部分的附图与说明书一起示出了 本申请的示例性实施例、特征和方面，并且用于解释本申请的原理。The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate exemplary embodiments, features, and aspects of the application and, together with the specification, serve to explain the principles of the application.
图1示出本申请实施例的对中机构的主体结构图；Fig. 1 shows the main structural diagram of the centering mechanism of the embodiment of the present application;
图2示出本申请实施例的对中机构的剖视图；Fig. 2 shows the sectional view of the centering mechanism of the embodiment of the present application;
图3示出本申请实施例的对中机构的电子枪腔体和安装腔体的安装图的局部放大图；Fig. 3 shows a partial enlarged view of the installation diagram of the electron gun cavity and the installation cavity of the centering mechanism of the embodiment of the present application;
图4示出本申请实施例的对中机构的安装腔体和物镜腔体的安装图的局部放大图。Fig. 4 shows a partial enlarged view of the installation cavity of the centering mechanism and the objective lens cavity of the embodiment of the present application.
具体实施方式Detailed ways
以下将参考附图详细说明本申请的各种示例性实施例、特征和方面。附图中相同的附图标记表示功能相同或相似的元件。尽管在附图中示出了实施例的各种方面，但是除非特别指出，不必按比例绘制附图。Various exemplary embodiments, features, and aspects of the present application will be described in detail below with reference to the accompanying drawings. The same reference numbers in the figures indicate functionally identical or similar elements. While various aspects of the embodiments are shown in drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
其中，需要理解的是，术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明或简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。Wherein, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "upper", "lower", "front", "rear", "left", "right" ", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial", "Radial", "Circumferential ” and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention or simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, with a specific configuration and operation, and therefore should not be construed as limiting the invention.
此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中，“多个”的含义是两个或两个以上，除非另有明确具体的限定。In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.
在这里专用的词“示例性”意为“用作例子、实施例或说明性”。这里作为“示例性”所说明的任何实施例不必解释为优于或好于其它实施例。The word "exemplary" is used exclusively herein to mean "serving as an example, embodiment, or illustration." Any embodiment described herein as "exemplary" is not necessarily to be construed as superior or better than other embodiments.
另外，为了更好的说明本申请，在下文的具体实施方式中给出了众多的具体细节。本领域技术人员应当理解，没有某些具体细节，本申请同样可以实施。在一些实例中，对于本领域技术人员熟知的方法、手段、元件和电路 未作详细描述，以便于凸显本申请的主旨。In addition, in order to better illustrate the present application, numerous specific details are given in the following specific implementation manners. It will be understood by those skilled in the art that the present application may be practiced without certain of the specific details. In some instances, methods, means, components and circuits well known to those skilled in the art have not been described in detail in order to highlight the gist of the present application.
图1示出本申请实施例的对中机构的主体结构图。图2示出本申请实施例的对中机构的剖视图。图3示出本申请实施例的对中机构的电子枪腔体100和安装腔体200的安装图的局部放大图。图4示出本申请实施例的对中机构的安装腔体200和物镜腔体600的安装图的局部放大图。如图1、图2、图3或图4所示，该对中机构用于安装在扫描电镜中，对扫描电镜中的电子束进行对中校准，该对中机构包括：依次可拆卸连接的电子枪腔体100和安装腔体200。电子枪腔体100上开设有第一通孔，电子枪腔体100朝向安装腔体200的一侧设有第一凸台110，第一凸台110呈绕第一通孔设置的环状结构。安装腔体200朝向电子枪腔体100的一侧开设有安装槽，第一凸台110放置在安装槽内部，第一凸台110的外侧壁与安装槽的内侧壁之间设有距离。安装槽的槽底处开设有用于安装与电子束对准的部件的安装孔，安装孔贯穿安装腔体200设置。安装腔体200开设安装槽处的侧壁上移动安装有第一调节件300，第一调节件300贯穿安装腔体200的侧壁设置，第一调节件300用于推动第一凸台110在安装槽内移动，第一调节件300设有多个，多个第一调节件300沿安装槽的周向间隔分布。Fig. 1 shows the main structure diagram of the centering mechanism of the embodiment of the present application. Fig. 2 shows a cross-sectional view of the centering mechanism of the embodiment of the present application. FIG. 3 shows a partially enlarged view of the installation diagram of the electron gun cavity 100 and the installation cavity 200 of the centering mechanism of the embodiment of the present application. FIG. 4 shows a partially enlarged view of the installation diagram of the installation cavity 200 and the objective lens cavity 600 of the centering mechanism of the embodiment of the present application. As shown in Fig. 1, Fig. 2, Fig. 3 or Fig. 4, the centering mechanism is used to be installed in the scanning electron microscope to center and calibrate the electron beam in the scanning electron microscope. The centering mechanism includes: The electron gun cavity 100 and the installation cavity 200 . The electron gun cavity 100 is provided with a first through hole, and the side of the electron gun cavity 100 facing the installation cavity 200 is provided with a first boss 110 , and the first boss 110 is in a ring structure arranged around the first through hole. The installation cavity 200 is provided with an installation groove on the side facing the electron gun cavity 100 , the first boss 110 is placed inside the installation groove, and a distance is set between the outer side wall of the first boss 110 and the inner side wall of the installation groove. A mounting hole for mounting components aligned with the electron beam is provided at the bottom of the mounting groove, and the mounting hole is set through the mounting cavity 200 . The first adjusting part 300 is installed on the side wall where the installation groove is opened in the installation cavity 200. The first adjusting part 300 is arranged through the side wall of the installation cavity 200. The first adjusting part 300 is used to push the first boss 110 on the side wall. Moving in the installation groove, there are multiple first adjusting members 300, and the plurality of first adjusting members 300 are distributed at intervals along the circumferential direction of the installation groove.
本申请实施例对中机构分为电子枪腔体100和安装腔体200两部分，其中安装腔体200可拆卸安装在电子枪腔体100的底部，安装腔体200上设有安装探测器400的安装孔。在电子枪腔体100和安装腔体200完成装配后，此时，电子枪腔体100底部的第一凸台110位于安装槽内。当安装孔上所安装的与电子束对准的部件与电子束进行对中时，调节安装腔体200上的多个第一调节件300，第一调节件300伸入安装槽内的长度发生改变，所以第一调节件300的移动会推动第一凸台110在安装槽内移动，由此，带动整个电子枪腔体100进行移动调节。由于第一调节件300沿安装槽的周向设置多个，使得第一调节件300可以在各个方向上对电子枪腔体100的位置进行调节，直至安装腔体200上的安装孔上所安装的与电子束对准的部件与电子束对中。综上所述，本申请实施例对中机构通过调节第一调节件300带动电子枪腔体100在安装 槽内进行微调，使得安装孔上所安装的与电子束对准的部件的电场中心与电子束中心重合，从而实现电子束的对中调节，由此，达到了扫描电镜的最佳状态，减小了光轴偏移对分辨率、机台关键参数指标的影响。The centering mechanism of the embodiment of the present application is divided into two parts, the electron gun cavity 100 and the installation cavity 200, wherein the installation cavity 200 is detachably installed on the bottom of the electron gun cavity 100, and the installation cavity 200 is provided with a mounting for installing the detector 400. hole. After the assembly of the electron gun cavity 100 and the installation cavity 200 is completed, at this time, the first boss 110 at the bottom of the electron gun cavity 100 is located in the installation groove. When the components aligned with the electron beam installed on the installation hole are aligned with the electron beam, adjust the plurality of first adjustment members 300 on the installation cavity 200, and the length of the first adjustment member 300 extending into the installation groove occurs. Therefore, the movement of the first adjustment member 300 will push the first boss 110 to move in the installation groove, thereby driving the entire electron gun cavity 100 to perform movement adjustment. Since the first adjusting member 300 is provided in multiples along the circumferential direction of the installation groove, the first adjusting member 300 can adjust the position of the electron gun cavity 100 in all directions until the installation hole on the installation cavity 200 is installed The part aligned with the electron beam is centered with the electron beam. To sum up, the centering mechanism in the embodiment of the present application drives the electron gun cavity 100 to make fine adjustments in the installation groove by adjusting the first adjustment member 300, so that the electric field center of the components aligned with the electron beam installed on the installation hole is aligned with the electron beam. The center of the beam coincides to realize the centering adjustment of the electron beam, thereby achieving the best state of the scanning electron microscope and reducing the impact of the optical axis offset on the resolution and key parameters of the machine.
此处，应当指出的是，安装孔上所安装的电子束对准的部件与安装孔同轴设置。其中，安装孔所安装的与电子束对准的部件可以为扫描电镜中的消像散器，也可以为探测器400。在本申请实施例中，均以探测器400为例进行说明。Here, it should be noted that the electron beam alignment component mounted on the mounting hole is arranged coaxially with the mounting hole. Wherein, the component installed in the mounting hole and aligned with the electron beam may be the stigmator in the scanning electron microscope, or the detector 400 . In the embodiments of the present application, the detector 400 is taken as an example for description.
也就是说，本申请实施例的对中机构，既可以用于对扫描电镜中电子束的光轴中心与消像散器的中心进行对中校准，也可以用于对扫描电镜中电子束的光轴中心与探测器400的中心进行对中校准。此处，还应当指出的是，在一种可能的实现方式中，电子枪腔体100呈圆柱状，且第一通孔的轴线与电子枪腔体100的轴线重合设置。由此，进一步的方便了安装孔上所安装的与电子束的对中，优化了本申请实施例的结构。That is to say, the centering mechanism of the embodiment of the present application can be used for centering and calibrating the center of the optical axis of the electron beam in the scanning electron microscope and the center of the stigmatizer, and can also be used for aligning the center of the electron beam in the scanning electron microscope. The center of the optical axis is calibrated with the center of the detector 400 . Here, it should also be noted that, in a possible implementation manner, the electron gun cavity 100 is cylindrical, and the axis of the first through hole coincides with the axis of the electron gun cavity 100 . As a result, the centering of the electron beam mounted on the mounting hole is further facilitated, and the structure of the embodiment of the present application is optimized.
此处，还应当指出的是，在一种可能的实现方式中，安装腔体200呈圆柱状，安装腔体200与电子枪腔体100完成装配后，安装腔体200的外侧壁与电子枪腔体100的外侧壁平齐设置。安装槽呈圆形槽状，且安装槽的轴线与第一通孔的轴线重合设置，安装孔的轴线与第一通孔的轴线重合设置。由此，使得安装孔上所安装的与电子束更加容易对中，且对中更加的准确。Here, it should also be pointed out that in a possible implementation manner, the installation cavity 200 is cylindrical, and after the assembly of the installation cavity 200 and the electron gun cavity 100 is completed, the outer wall of the installation cavity 200 and the electron gun cavity The outer side wall of 100 is set flush. The mounting groove is in the shape of a circular groove, and the axis of the mounting groove coincides with the axis of the first through hole, and the axis of the mounting hole coincides with the axis of the first through hole. As a result, it is easier and more accurate to center the electron beam mounted on the mounting hole.
此处，还应当指出的是，在一种可能的实现方式中，安装腔体200的顶部端面与电子枪腔体100的底部端面平行设置，且电子枪腔体100与安装腔体200完成装配后，电子枪腔体100的底部平端面与安装腔体200的顶部端面抵接设置。安装孔的包括呈阶梯孔状依次设置的第一孔和第二孔，其中，第一孔邻近电子枪腔体100设置，且第一孔的孔底端面与安装腔体200的顶部端面平行设置。由此，提高了电子枪腔体100和安装腔体200的接触面的平行度，也提高了安装腔体200与探测器400的接触面的平行度，减少了形位公差，防止了光轴偏移，减少了安装误差。Here, it should also be pointed out that in a possible implementation, the top end surface of the installation cavity 200 is arranged parallel to the bottom end surface of the electron gun cavity 100, and after the electron gun cavity 100 and the installation cavity 200 are assembled, The bottom flat end surface of the electron gun cavity 100 is arranged in abutment with the top end surface of the installation cavity 200 . The mounting holes include a first hole and a second hole arranged sequentially in a stepped shape, wherein the first hole is arranged adjacent to the electron gun cavity 100 , and the bottom end surface of the first hole is parallel to the top end surface of the installation cavity 200 . Thereby, the parallelism of the contact surface of the electron gun cavity 100 and the installation cavity 200 is improved, and the parallelism of the contact surface of the installation cavity 200 and the detector 400 is also improved, the shape and position tolerance is reduced, and the deviation of the optical axis is prevented. shift, reducing installation errors.
如图1、图2或图4所示，在一种可能的实现方式中，第一凸台110包括斜 面部112，斜面部112的侧壁呈斜面设置，斜面部112邻近安装槽的槽底设置，斜面部112与安装槽的内侧壁之间的距离沿第一方向逐渐减小。其中，第一方向为电子枪腔指向安装腔体200的方向，对各第一调节件300均与斜面部112抵接。由于第一调节件300与第一凸台110抵接，且第一凸台110的受力部为斜面部112，第一调节件300作用时会对斜面部112施加向下的分力，使其在运动时不会翘起，保证了密封效果。As shown in FIG. 1 , FIG. 2 or FIG. 4 , in a possible implementation, the first boss 110 includes an inclined portion 112 , the side wall of the inclined portion 112 is arranged on an inclined plane, and the inclined portion 112 is adjacent to the groove bottom of the installation groove. It is provided that the distance between the inclined portion 112 and the inner side wall of the installation groove decreases gradually along the first direction. Wherein, the first direction is a direction in which the electron gun cavity points to the installation cavity 200 , and each first adjusting member 300 abuts against the inclined portion 112 . Since the first adjusting member 300 abuts against the first boss 110, and the force-receiving part of the first boss 110 is the inclined surface 112, when the first adjusting member 300 acts, it will exert a downward component force on the inclined surface 112, so that It will not tilt up during movement, which ensures the sealing effect.
更进一步的，在一种可能的实现方式中，第一凸台110还包括连接部111，其中，连接部111呈环形设置，连接部111绕第一通孔周向设置，连接部111的底部端面设有外倒角。斜面部112固定在连接部111的底部端面一侧，斜面部112的顶部端面与连接部111的底部端面相匹配。其中，上述的连接部111的底部为连接部111邻近安装槽的槽底一侧。由此使得第一凸台110的结构与第一调节件300的结构更加的匹配，进一步的防止了第一凸台110在运动时的翘起。Furthermore, in a possible implementation manner, the first boss 110 also includes a connecting portion 111, wherein the connecting portion 111 is arranged in a ring shape, and the connecting portion 111 is circumferentially arranged around the first through hole, and the bottom of the connecting portion 111 The end faces are provided with chamfers. The inclined portion 112 is fixed on one side of the bottom end surface of the connecting portion 111 , and the top end surface of the inclined portion 112 matches the bottom end surface of the connecting portion 111 . Wherein, the bottom of the above-mentioned connecting portion 111 is a groove bottom side of the connecting portion 111 adjacent to the installation groove. As a result, the structure of the first boss 110 is more matched with the structure of the first adjustment member 300 , further preventing the first boss 110 from tilting during movement.
此处，应当指出的是，在一种可能的实现方式中，连接部111、斜面部112和电子枪腔体100可以为一体成型。由此方便了电子枪腔体100的制造。Here, it should be noted that, in a possible implementation manner, the connecting portion 111 , the inclined portion 112 and the electron gun cavity 100 may be integrally formed. This facilitates the manufacture of the electron gun cavity 100 .
在一种可能的实现方式中，还包括第一密封圈500，且安装槽的槽底处开设有第一密封槽，第一密封槽呈环形，且第一密封槽与第一凸台110相对设置，第一密封槽绕第一通孔周向设置。第一密封圈500安装在第一密封槽内，第一密封圈500用于密封电子枪腔体100和安装腔体200。由此，增加了电子枪腔体100和安装腔体200的密封性能。In a possible implementation, a first sealing ring 500 is also included, and a first sealing groove is opened at the bottom of the installation groove, the first sealing groove is annular, and the first sealing groove is opposite to the first boss 110 It is provided that the first sealing groove is circumferentially arranged around the first through hole. The first sealing ring 500 is installed in the first sealing groove, and the first sealing ring 500 is used to seal the electron gun cavity 100 and the installation cavity 200 . Thus, the sealing performance of the electron gun cavity 100 and the installation cavity 200 is increased.
在一种可能的实现方式中，第一调节杆件呈杆状，第一调节件300的杆身上开设有外螺纹。安装腔体200开设有安装槽处的侧壁上开设有第一内螺纹孔，第一内螺纹孔的数量与第一调节件300的数量相同，第一调节件300与第一内螺纹孔一一对应的旋接。由此，可以通过旋转第一调节件300来调节电子枪腔体100的位置，使得与所述电子束对准的部件与电子束的对中更加的方便。In a possible implementation manner, the first adjusting rod is rod-shaped, and an external thread is provided on the rod of the first adjusting member 300 . The installation cavity 200 is provided with a first internally threaded hole on the side wall where the installation groove is opened, and the number of the first internally threaded hole is the same as the number of the first adjusting member 300, and the first adjusting member 300 is the same as the first internally threaded hole. A corresponding screw connection. Therefore, the position of the electron gun cavity 100 can be adjusted by rotating the first adjusting member 300, so that the centering of the components aligned with the electron beam and the electron beam is more convenient.
如图1、图2、图3或图4所示，更进一步的，在一种可能的实现方式中， 还包括物镜腔体600，物镜腔体600可拆卸安装在安装腔体200背离电子枪腔体100的一侧。物镜腔体600上开设有与第一通孔同轴设置的第二通孔，物镜腔体600朝向安装腔体200的一端开设有放置槽。安装腔体200朝向放置槽的一侧设有第二凸台210，第二凸台210放置在放置槽内，第二凸台210的外侧壁与放置槽的内侧壁之间设有距离。物镜腔体600开设有放置槽处的侧壁上可移动安装有第二调节件700，第二调节件700设有多个，多个第二调节件700沿放置槽的周向间隔分布。多个第二调节件700均贯穿放置槽的侧壁设置，多个第二调节件700朝向第二凸台210的一端均与第二凸台210连接，用于推动安装腔体200在放置槽内移动。通过上述结构，调节第二调节件700使得第二调节件700带动第二凸台210在放置槽内移动，由此，可以调节安装腔体200的位置，使得安装腔体200上的与所述电子束对准的部件与物镜对中。As shown in Figure 1, Figure 2, Figure 3 or Figure 4, further, in a possible implementation, it also includes an objective lens cavity 600, and the objective lens cavity 600 is detachably installed in the installation cavity 200 away from the electron gun cavity one side of the body 100. A second through hole coaxial with the first through hole is opened on the objective lens cavity 600 , and a placement slot is opened on the end of the objective lens cavity 600 facing the installation cavity 200 . The installation cavity 200 is provided with a second boss 210 on the side facing the placement groove. The second boss 210 is placed in the placement groove. There is a distance between the outer side wall of the second boss 210 and the inner side wall of the placement groove. A second adjusting member 700 is movably installed on the side wall of the objective lens cavity 600 where the placement groove is opened. There are multiple second adjusting members 700, and the plurality of second adjusting members 700 are distributed along the circumferential direction of the placement groove at intervals. A plurality of second adjusting members 700 are arranged through the side wall of the placement groove, and one end of the plurality of second adjusting members 700 facing the second boss 210 is connected with the second boss 210 for pushing the installation cavity 200 into the placement groove. move within. Through the above-mentioned structure, the second adjustment member 700 is adjusted so that the second adjustment member 700 drives the second boss 210 to move in the placement groove, thereby, the position of the installation cavity 200 can be adjusted, so that the position on the installation cavity 200 is consistent with the above-mentioned The part where the electron beam is aligned is centered with the objective lens.
此处，应当指出的是，在一种可能的实现方式中，第二通孔与第一通孔同轴设置，物镜腔体600呈圆柱状，物镜腔体600的外壁与安装腔体200的外壁平齐设置，第二通孔的孔径与第一通孔的孔径相同。由此进一步的优化了本申请实施例的结构。Here, it should be noted that, in a possible implementation, the second through hole is coaxially arranged with the first through hole, the objective lens cavity 600 is cylindrical, and the outer wall of the objective lens cavity 600 is in line with the mounting cavity 200. The outer wall is arranged flush, and the diameter of the second through hole is the same as that of the first through hole. Thus, the structure of the embodiment of the present application is further optimized.
此处，还应当指出的是，在一种可能的实现方式中，第二凸台210的侧壁与第一凸台110的侧壁平行设置。物镜腔体600的顶部端面与安装腔体200的底部端面平行设置，且物镜腔体600与安装腔体200装配后，物镜腔体600的顶部端面与安装腔体200的底部端面重合设置。物镜腔体600的顶部端面与安装腔体200的安装槽的槽底平行设置。由此进一步的消除了形位公差。Here, it should also be noted that, in a possible implementation manner, the side walls of the second boss 210 are arranged parallel to the side walls of the first boss 110 . The top end surface of the objective lens cavity 600 is arranged parallel to the bottom end surface of the installation cavity 200, and after the objective lens cavity 600 and the installation cavity 200 are assembled, the top end surface of the objective lens cavity 600 is overlapped with the bottom end surface of the installation cavity 200. The top end surface of the objective lens cavity 600 is arranged parallel to the bottom of the installation groove of the installation cavity 200 . This further eliminates the shape and position tolerance.
此处，还应当指出的是，在一种可能的实现方式中，电子枪腔体100上开设有多个第一螺栓孔，多个第一螺栓孔均贯穿电子枪腔体100设置，且多个第一螺栓孔绕电子枪腔体100的轴线分布，多个第一螺栓孔均邻近电子枪腔体100的边缘位置设置。安装腔体200上开设有多个第二螺栓孔，第二螺栓孔的数量与第一螺栓孔的数量相同，且第二螺栓孔与第一螺栓孔一一对应设置，第二螺栓孔均贯穿安装腔体200设置。物镜腔体600上开设有多个第三螺栓孔，第三螺栓孔的数量与第一螺栓孔的数量相同，且第三螺栓孔与第螺栓 孔一一对应设置。电子腔体、安装腔体200和物镜腔体600通过螺栓连接(螺栓依次与第一螺栓孔、第二螺栓孔和第三螺栓孔旋接)。由此，可以在调节完电子枪腔体100和安装腔体200后可以通过螺栓进行锁紧，防止其运动，保证其相对位置不会改变。Here, it should also be noted that, in a possible implementation manner, the electron gun cavity 100 is provided with a plurality of first bolt holes, and the plurality of first bolt holes are all set through the electron gun cavity 100, and the plurality of first bolt holes A bolt hole is distributed around the axis of the electron gun cavity 100 , and a plurality of first bolt holes are arranged adjacent to the edge of the electron gun cavity 100 . The installation cavity 200 is provided with a plurality of second bolt holes, the number of the second bolt holes is the same as the number of the first bolt holes, and the second bolt holes are set in one-to-one correspondence with the first bolt holes, and the second bolt holes all penetrate The installation cavity 200 is provided. The objective lens cavity 600 is provided with a plurality of third bolt holes, the number of the third bolt holes is the same as the number of the first bolt holes, and the third bolt holes correspond to the first bolt holes one by one. The electronic cavity, the mounting cavity 200 and the objective lens cavity 600 are connected by bolts (the bolts are screwed into the first bolt hole, the second bolt hole and the third bolt hole in sequence). Therefore, after the electron gun cavity 100 and the installation cavity 200 are adjusted, they can be locked by bolts to prevent their movement and ensure that their relative positions will not change.
更进一步的，还包括第二密封圈800，放置槽的槽底处开设有第二密封槽，第二密封槽呈环状设置，第二密封槽与第二凸台210相对设置，第二密封槽绕第二通孔周向设置。第二密封圈800安装在第二密封槽内，用于密封安装腔体200和物镜腔体600。Furthermore, it also includes a second sealing ring 800, a second sealing groove is provided at the bottom of the groove, the second sealing groove is arranged in an annular shape, the second sealing groove is arranged opposite to the second boss 210, and the second sealing groove The grooves are circumferentially arranged around the second through hole. The second sealing ring 800 is installed in the second sealing groove for sealing the installation cavity 200 and the objective lens cavity 600 .
在一种可能的实现方法中，安装孔包括第一安装孔、第二安装孔和第三安装孔，其中，第一安装孔、第二安装孔和第三安装孔沿安装腔体200的周向方向依次设置。第一安装孔的孔径和第三安装孔的孔径均大于第二安装孔的孔径，第一安装孔、第二安装孔、第三安装孔均与探测器400同轴设置。由此，使得探测器400的对中更加的精确。In a possible implementation method, the installation holes include a first installation hole, a second installation hole and a third installation hole, wherein the first installation hole, the second installation hole and the third installation hole are along the periphery of the installation cavity 200 Set in sequence in the direction. Both the diameter of the first mounting hole and the diameter of the third mounting hole are larger than the diameter of the second mounting hole, and the first mounting hole, the second mounting hole, and the third mounting hole are coaxially arranged with the detector 400 . Thus, the centering of the detector 400 is made more precise.
更进一步的，在一种可能的实现方式中，在电子枪腔体100与安装腔体200装配后，第一凸台110与安装槽的槽底之间设有间隙，第一密封圈500与第一凸台110抵接。由此，在不影响密封效果的情况下，避免了将第一凸台110与安装槽的槽底作为了接触面，避免了密封圈本身的公差不确定的现象，进一步的放置了光轴偏移，减少了安装误差。Furthermore, in a possible implementation, after the electron gun cavity 100 and the installation cavity 200 are assembled, there is a gap between the first boss 110 and the bottom of the installation groove, and the first sealing ring 500 and the second A boss 110 abuts against it. Thus, without affecting the sealing effect, it is avoided that the first boss 110 and the groove bottom of the installation groove are used as the contact surface, and the phenomenon that the tolerance of the sealing ring itself is uncertain is avoided, and the optical axis deviation is further placed. shift, reducing installation errors.
此处，应当指出的是，当与电子束对中的部件为探测器400时，还包括固定板900，其中，探测器400上设有中心孔。探测器400固定安装在固定板900上，固定板900的边缘位置设有螺栓孔，用于与安装腔体200螺栓连接，以使固定板900处于第一安装孔内部。且在固定板900与安装腔体200螺栓连接后，探测器400设置在固定板900朝向第二安装孔的板面上。固定板900上设有中心孔，且固定板900上的中心孔与探测器400上的中心孔同轴设置。Here, it should be noted that when the component aligned with the electron beam is the detector 400 , the fixing plate 900 is also included, wherein the detector 400 is provided with a central hole. The detector 400 is fixedly installed on the fixing plate 900, and the edge of the fixing plate 900 is provided with bolt holes for bolting with the installation cavity 200, so that the fixing plate 900 is inside the first installation hole. And after the fixing plate 900 is bolted to the installation cavity 200 , the detector 400 is arranged on the surface of the fixing plate 900 facing the second installation hole. The fixed plate 900 is provided with a central hole, and the central hole on the fixed plate 900 is coaxially arranged with the central hole on the detector 400 .
在一种可能的实现方式中，第二凸台210朝向放置槽的一侧与放置槽之间设有间隙，第二密封圈800与第二凸台210抵接。第二凸条的结构与第一凸台110的结构相同。由此，可以防止第二凸台210(及物镜腔体600)在移动 的过程中翘起，使得密封性能得到了保证。In a possible implementation manner, there is a gap between the side of the second boss 210 facing the placement groove and the placement groove, and the second sealing ring 800 abuts against the second boss 210 . The structure of the second protrusion is the same as that of the first boss 110 . Thus, it is possible to prevent the second boss 210 (and the objective lens cavity 600) from warping during the movement, so that the sealing performance is guaranteed.
如图1或图5所示，基于上述任一项所述的对中机构，本公开还提供了一种扫描电镜。其中，本公开实施例的扫描电镜包括如上任一所述的对中机构。通过将前面任一所述的对中机构在安装在扫描电镜的上，由此，方便电子束的对中调节。其中，电子枪腔体100上可以安装电子枪和聚光镜，物镜腔体600上可以安装物镜光阑、探测器400、物镜和偏转器。As shown in FIG. 1 or FIG. 5 , based on the centering mechanism described in any one of the above, the present disclosure also provides a scanning electron microscope. Wherein, the scanning electron microscope of the embodiment of the present disclosure includes the centering mechanism described above. By installing any of the aforementioned centering mechanisms on the scanning electron microscope, the centering adjustment of the electron beam is facilitated. Wherein, an electron gun and a condenser lens can be installed on the electron gun cavity 100 , and an objective diaphragm, a detector 400 , an objective lens and a deflector can be installed on the objective lens cavity 600 .
以上已经描述了本申请的各实施例，上述说明是示例性的，并非穷尽性的，并且也不限于所披露的各实施例。在不偏离所说明的各实施例的范围和精神的情况下，对于本技术领域的普通技术人员来说许多修改和变更都是显而易见的。本文中所用术语的选择，旨在最好地解释各实施例的原理、实际应用或对市场中的技术的改进，或者使本技术领域的其它普通技术人员能理解本文披露的各实施例。Having described various embodiments of the present application above, the foregoing description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and alterations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen to best explain the principle of each embodiment, practical application or improvement of technology in the market, or to enable other ordinary skilled in the art to understand each embodiment disclosed herein.

Claims (11)

  1. 一种对中机构，其特征在于，用于安装在扫描电镜中，对所述扫描电镜中的的电子束进行对中校准，包括依次可拆卸连接的电子枪腔体和安装腔体；A centering mechanism, which is characterized in that it is installed in a scanning electron microscope, and performs centering calibration on the electron beam in the scanning electron microscope, including an electron gun cavity and an installation cavity that are detachably connected in sequence;
    所述电子枪腔体上开设有第一通孔，所述电子枪腔体朝向所述安装腔体的一侧设有第一凸台，所述第一凸台呈绕所述第一通孔设置的环状结构；A first through hole is opened on the electron gun cavity, and a first boss is provided on a side of the electron gun cavity facing the installation cavity, and the first boss is arranged around the first through hole. Ring structure;
    所述安装腔体朝向所述电子枪腔体的一侧开设有安装槽，所述第一凸台放置在所述安装槽内部，所述第一凸台的外侧壁与所述安装槽的内侧壁之间设有距离；The side of the installation cavity facing the electron gun cavity is provided with an installation groove, the first boss is placed inside the installation groove, the outer side wall of the first boss and the inner side wall of the installation groove with a distance between;
    所述安装槽的槽底处开设有适用于安装与所述电子束对准的部件的安装孔，所述安装孔贯穿所述安装腔体设置；A mounting hole suitable for mounting components aligned with the electron beam is opened at the bottom of the mounting groove, and the mounting hole is set through the mounting cavity;
    所述安装腔体开设所述安装槽处的侧壁上移动安装有第一调节件，所述第一调节件贯穿所述安装腔体的侧壁设置，所述第一调节件用于推动所述第一凸台在所述安装槽内移动；On the side wall of the installation cavity where the installation groove is opened, a first adjustment member is installed on the side wall, the first adjustment member is arranged through the side wall of the installation cavity, and the first adjustment member is used to push the The first boss moves in the installation groove;
    所述第一调节件设有多个，多个所述第一调节件沿所述安装槽的周向间隔分布。There are a plurality of first adjusting members, and the plurality of first adjusting members are distributed at intervals along the circumference of the installation groove.
  2. 根据权利要求1所述的对中机构，其特征在于，所述第一凸台包括斜面部，所述斜面部的侧壁呈斜面设置，所述斜面部邻近所述安装槽的槽底设置，所述斜面部与所述安装槽的内侧壁之间的距离沿第一方向逐渐减小；The centering mechanism according to claim 1, wherein the first boss includes a slope, the side wall of the slope is arranged on a slope, and the slope is arranged adjacent to the groove bottom of the installation groove, The distance between the inclined portion and the inner side wall of the installation groove gradually decreases along the first direction;
    其中，所述第一方向为所述电子枪腔体指向所述安装腔体的方向；Wherein, the first direction is a direction in which the electron gun cavity points to the installation cavity;
    多个所述第一调节件均与所述斜面部抵接。A plurality of the first adjustment members all abut against the inclined portion.
  3. 根据权利要求1所述的对中机构，其特征在于，所述第一调节件呈杆状，所述第一调节件的杆身上开设有外螺纹；The centering mechanism according to claim 1, wherein the first adjusting member is rod-shaped, and the rod of the first adjusting member is provided with external threads;
    所述安装腔体开设所述安装槽处的侧壁上开设有第一内螺纹孔，所述第一内螺纹孔的数量与所述第一调节件的数量相同，所述第一调节件与所述第一内螺纹孔一一对应的旋接。The side wall of the installation cavity where the installation groove is opened is provided with a first internally threaded hole, the number of the first internally threaded hole is the same as the number of the first adjustment member, and the first adjustment member is the same as the first adjustment member. The first internally threaded holes are screwed in one-to-one correspondence.
  4. 根据权利要求2所述的对中机构，其特征在于，所述第一凸台还包括连接部，所述连接部呈环形设置，所述连接部绕所述第一通孔周向设置，所 述连接部的底部端面设有外倒角；The centering mechanism according to claim 2, wherein the first boss further includes a connecting portion, the connecting portion is arranged in a ring, and the connecting portion is circumferentially arranged around the first through hole, so that The bottom end surface of the connecting part is provided with an outer chamfer;
    所述斜面部固定在所述连接部的底部端面一侧，所述斜面部的顶部端面与所述连接部的底部端面相匹配；The inclined portion is fixed on one side of the bottom end face of the connecting portion, and the top end face of the inclined portion matches the bottom end face of the connecting portion;
    其中，所述连接部的底部为所述连接部邻近所述安装槽的槽底一侧。Wherein, the bottom of the connecting portion is a groove bottom side of the connecting portion adjacent to the installation groove.
  5. 根据权利要求1所述的对中机构，其特征在于，还包括第一密封圈；The centering mechanism according to claim 1, further comprising a first sealing ring;
    所述安装槽的槽底处开设有第一密封槽，所述第一密封槽呈环状设置，所述第一密封槽与所述第一凸台相对设置，所述第一密封槽绕所述第一通孔周向设置；There is a first sealing groove at the groove bottom of the installation groove, the first sealing groove is arranged in an annular shape, the first sealing groove is opposite to the first boss, and the first sealing groove surrounds the The circumferential setting of the first through hole;
    所述第一密封圈安装在所述第一密封槽内，用于密封所述电子枪腔体和所述安装腔体。The first sealing ring is installed in the first sealing groove for sealing the electron gun cavity and the installation cavity.
  6. 根据权利要求5所述的对中机构，其特征在于，所述第一凸台朝向所述安装槽的槽底的一侧与所述安装槽的槽底之间设有间隙；The centering mechanism according to claim 5, wherein a gap is provided between the side of the first boss facing the bottom of the installation groove and the bottom of the installation groove;
    所述第一密封圈与所述第一凸台抵接。The first sealing ring abuts against the first boss.
  7. 根据权利要求1至6任一项所述的对中机构，其特征在于，还包括物镜腔体，所述物镜腔体可拆卸安装在所述安装腔体背离所述电子枪腔体的一侧；The centering mechanism according to any one of claims 1 to 6, further comprising an objective lens cavity, the objective lens cavity is detachably installed on the side of the installation cavity away from the electron gun cavity;
    所述物镜腔体上开设有与所述第一通孔同轴设置的第二通孔，所述物镜腔体朝向所述安装腔体的一端开设有放置槽；The objective lens cavity is provided with a second through hole coaxially arranged with the first through hole, and the objective lens cavity is provided with a placement groove toward one end of the installation cavity;
    所述安装腔体朝向所述放置槽的一侧设有第二凸台，所述第二凸台放置在所述放置槽内，所述第二凸台的外侧壁与所述放置槽的内侧壁之间设有距离；The installation cavity is provided with a second boss on the side facing the placement groove, the second boss is placed in the placement groove, the outer side wall of the second boss is connected to the inner side of the placement groove a distance is provided between the walls;
    所述物镜腔体开设有放置槽处的侧壁上可移动安装有第二调节件，所述第二调节件设有多个，多个所述第二调节件沿所述放置槽的周向间隔分布；The objective lens cavity is provided with a second adjustment piece that is movably installed on the side wall of the place where the placement groove is located, and the second adjustment piece is provided with a plurality of the second adjustment pieces along the circumferential direction of the placement groove. interval distribution;
    多个所述第二调节件均贯穿所述放置槽的侧壁设置，用于推动所述第二凸台在所述放置槽内移动。A plurality of the second adjusting members are all disposed through the side wall of the placing groove, and are used for pushing the second boss to move in the placing groove.
  8. 根据权利要求7所述的对中机构，其特征在于，还包括第二密封圈；The centering mechanism according to claim 7, further comprising a second sealing ring;
    所述放置槽的槽底处开设有第二密封槽，所述第二密封槽呈环状设置， 所述第二密封槽与所述第二凸台相对设置，所述第二密封槽绕所述第二通孔周向设置；A second sealing groove is provided at the groove bottom of the placement groove, the second sealing groove is arranged in an annular shape, the second sealing groove is arranged opposite to the second boss, and the second sealing groove surrounds the The circumferential setting of the second through hole;
    所述第二密封圈安装在第二密封槽内，用于密封所述安装腔体和所述物镜腔体。The second sealing ring is installed in the second sealing groove for sealing the installation cavity and the objective lens cavity.
  9. 根据权利要求1至7任一项所述的对中机构，其特征在于，所述安装孔包括第一安装孔、第二安装孔和第三安装孔；The centering mechanism according to any one of claims 1 to 7, wherein the installation holes include a first installation hole, a second installation hole and a third installation hole;
    其中，所述第一安装孔、所述第二安装孔和所述第三安装孔沿所述安装腔体的周向方向依次设置；Wherein, the first installation hole, the second installation hole and the third installation hole are sequentially arranged along the circumferential direction of the installation cavity;
    所述第一安装孔的孔径和所述第三安装孔的孔径均大于所述第二安装孔的孔径；Both the diameter of the first installation hole and the diameter of the third installation hole are larger than the diameter of the second installation hole;
    所述第一安装孔、所述第二安装孔、所述第三安装孔同轴设置。The first mounting hole, the second mounting hole, and the third mounting hole are arranged coaxially.
  10. 根据权利要求1至7任一项所述的对中机构，其特征在于，所述第一凸台朝向所述安装槽的槽底的一侧与所述安装槽的槽底之间设有间隙；The centering mechanism according to any one of claims 1 to 7, wherein a gap is provided between the side of the first boss facing the bottom of the installation groove and the bottom of the installation groove ;
    所述第一密封圈与所述第一凸台抵接。The first sealing ring abuts against the first boss.
  11. 一种扫描电镜，其特征在于，包括权利要求1至10任一项所述的对中机构。A scanning electron microscope, characterized by comprising the centering mechanism described in any one of claims 1 to 10.
PCT/CN2021/098306 2021-05-27 2021-06-04 Centering mechanism and scanning electron microscope having same WO2022246896A1 (en)

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CN103177922A (en) * 2013-02-19 2013-06-26 北京中科科仪股份有限公司 Centering device for electric microscope

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