WO2022246884A1 - Deflector mechanism capable of reducing phase difference, and scanning electron microscope - Google Patents

Deflector mechanism capable of reducing phase difference, and scanning electron microscope Download PDF

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Publication number
WO2022246884A1
WO2022246884A1 PCT/CN2021/097999 CN2021097999W WO2022246884A1 WO 2022246884 A1 WO2022246884 A1 WO 2022246884A1 CN 2021097999 W CN2021097999 W CN 2021097999W WO 2022246884 A1 WO2022246884 A1 WO 2022246884A1
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WIPO (PCT)
Prior art keywords
deflector
rotatable
phase difference
rotatable deflector
reducing phase
Prior art date
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PCT/CN2021/097999
Other languages
French (fr)
Chinese (zh)
Inventor
李帅辰
蒋磊
孙伟强
孟庆浪
蒋俊海
Original Assignee
中科晶源微电子技术（北京）有限公司
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Publication of WO2022246884A1 publication Critical patent/WO2022246884A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1477—Scanning means electrostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/02—Heads
    • F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/02—Heads
    • F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Definitions

  • the present application relates to the field of semiconductors, in particular to a deflector mechanism and a scanning electron microscope for reducing phase difference.
  • electrostatic deflector Compared with magnetic deflection, electrostatic deflector has the advantage of faster scanning speed; but compared with magnetic deflection, the electrostatic field is more uneven, and the deflector will cause greater phase difference when it works.
  • a deflector mechanism for reducing phase difference including a rotatable deflector, a connecting rod, a fixed deflector and a mounting part;
  • the central axis coincides with each other and is respectively mounted on the mounting part;
  • the rotatable deflector is rotatably connected to the mounting part;
  • one end of the connecting rod is connected to the rotatable deflector, which can drive the
  • the rotatable deflector rotates around the rotation axis;
  • the fixed deflector is fixedly connected with the installation part.
  • a disc spring is further included; the disc spring is arranged at a connection position between the connecting rod and the rotatable deflector, so as to reduce the longitudinal gap.
  • the connecting rod is provided with a first through hole; the connecting rod is sleeved on the connecting bolt on the rotatable deflector through the first through hole, and the The length of the first through hole in the direction from the rotation central axis of the rotatable deflector to the outer edge is greater than the diameter of the connecting bolt.
  • the connecting bolt is arranged at a position away from the central axis of rotation of the rotatable deflector.
  • it also includes an upper cover and a deflection compression spring; the upper cover is arranged on the rotatable deflector, and the lower part of one side is provided with a relief hole matching the connecting rod;
  • the deflection compression spring is arranged between the upper cover and the rotatable deflector, its upper end abuts against the inner top of the upper cover, and its lower end abuts against the rotatable deflector.
  • a friction ring is further included; the friction ring is arranged in the installation part, an outer wall is in contact with the installation part, and an inner wall is in contact with the rotatable deflector.
  • the upper part of the installation part extends outwards with an extension part; the installation part is provided with a first deflector installation position inward from the center of the top, and the rotatable deflector is arranged on the In the first deflector installation position; the installation part is provided with a second deflector installation position inward from the center of the bottom, and the fixed deflector is arranged in the second deflector installation position.
  • more than two fixing screw holes are opened on the rotatable deflector; upper cover bolts matching the fixing screw holes are installed on the upper cover, and the upper cover It is screwed with the rotatable deflector; the deflection compression spring is passed through the bolt of the upper cover.
  • the rotatable deflector is ring-shaped, and a pole plate is arranged inside the ring, and a second through hole matching the connecting bolt is opened on the rotatable deflector, and the first through hole matches the connecting bolt.
  • Two through holes are opened at a position close to the outer edge of the rotatable deflector.
  • both the rotatable deflector and the fixed deflector are electrostatic deflectors.
  • the number of the fixing screw holes is four, the distances from the fixing screw holes to the central axis of rotation of the rotatable deflector are equal, and the adjacent fixing screw holes are connected to each other.
  • the wires form a square structure; a washer is placed between the deflection compression spring and the rotatable deflector, and the washer is passed through the bolt of the upper cover.
  • the deflector mechanism for reducing the phase difference described in any of the foregoing possible implementation manners is included.
  • FIG. 1 shows an exploded view of a deflector mechanism for reducing phase difference according to an embodiment of the present application
  • Fig. 2 shows a schematic diagram of a connecting rod driving a rotatable deflector according to an embodiment of the present application
  • Figure 3 shows a cross-sectional view of a rotatable deflector according to an embodiment of the application
  • FIG. 4 shows a cross-sectional view of a deflector mechanism for reducing phase difference according to an embodiment of the present application.
  • first and second are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as “first” and “second” may explicitly or implicitly include one or more of these features.
  • “plurality” means two or more, unless otherwise specifically defined.
  • Figure 1 shows an exploded view of a deflector mechanism for reducing phase difference according to an embodiment of the application
  • Figure 2 shows a schematic diagram of a connecting rod driving a rotatable deflector according to an embodiment of the application
  • Figure 3 shows a schematic diagram of a rotating deflector according to an embodiment of the application
  • FIG. 4 shows a cross-sectional view of a deflector mechanism for reducing phase difference according to an embodiment of the present application.
  • the deflector mechanism for reducing the phase difference includes a rotatable deflector 1, a connecting rod 4, a fixed deflector 3 and a mounting part 2, and the rotation axis of the rotatable deflector 1 and the fixed deflector 3 are coincident with each other, and are respectively installed on the mounting part 2, the rotatable deflector 1 is rotatably connected to the mounting part 2, and one end of the connecting rod 4 is connected to the rotatable deflector 1, which can drive the rotatable deflector 1 to rotate The rotating axis rotates, and the fixed deflector 3 is fixedly connected with the installation part 2 .
  • the rotatable deflector 1 by moving the connecting rod 4, the rotatable deflector 1 is driven to rotate, and after adjustment, the designed angle between the rotatable deflector 1 and the fixed deflector 3 reaches a pre-designed angle, so that the deflector mechanism of this application can be used
  • the SEM obtains the best resolution and minimizes the phase difference.
  • the fine adjustment of the rotating deflector is compared with the mechanical installation, and the design angle between the rotatable deflector 1 and the fixed deflector 3 has higher precision, which effectively solves the problem. This solves the problem that the installation accuracy of the two deflectors cannot be guaranteed only by mechanical installation.
  • the direction of the axis of rotation in FIG. 1 is the longitudinal direction, and the rotation direction of the rotatable deflector 1 is in the horizontal plane and can be rotated laterally.
  • the deflector mechanism of the present application is arranged on the vacuum side of the scanning electron microscope, and only one end of the connecting rod 4 that is not connected with the rotatable deflector 1 protrudes from the vacuum cavity, and the moving scope is installed on it.
  • the intrusion device 10 and the motion peeping device 10 are prior art, which facilitates those skilled in the art to adjust the deflection angle of the deflector mechanism from the atmospheric side, and more details will not be described in this article.
  • the angle between the upper and lower deflector plates is generally between 1°-5°, and the accuracy requirement is ⁇ 0.01°.
  • the specific structure of the mounting part 2 is not limited here. It is only necessary to ensure that the rotatable deflector 1 and the fixed deflector 3 can be installed on the mounting part 2, and that the rotatable deflector 1 can be rotated. I won't go into details in this article.
  • a disc spring 11 is also included; the disc spring 11 is arranged at the connection position between the connecting rod 4 and the rotatable deflector 1 to reduce the longitudinal gap.
  • a disc spring 11 is also included, and the connecting rod 4 is hinged to the rotatable deflector 1; the disc spring 11 is threaded at the rotationally connected position to reduce the longitudinal gap.
  • the movement of the connecting rod 4 is transmitted to the rotatable deflector 1 in the lateral direction, so that the rotatable deflector 1 can rotate around the central axis of rotation.
  • the connecting rod 4 and the rotatable deflector 1 are fixed through the connecting bolt 9, and the disc spring 11 is threaded on the connecting bolt 9, which can compress the connecting rod 4 and reduce the distance between the connecting rod 4 and the rotatable deflector 1.
  • the rotatable deflector 1 rotates, it will not tilt up and move smoothly.
  • the connecting rod 4 is provided with a first through hole, and the connecting rod 4 is sleeved on the connecting bolt on the rotatable deflector 1 through the first through hole, and the first through hole is rotatable
  • the length in the direction from the rotation central axis of the deflector 1 to the outer edge is greater than the diameter of the connecting bolt.
  • the first through hole is an oblong hole, which is adapted to the connecting bolt 9.
  • the first through hole of the oblong structure has a certain displacement in the longitudinal direction when the rotatable deflector 1 rotates, and the oblong hole can offset this displacement. To ensure that the connecting rod 4 will not be stuck when transmitting the movement of the rotatable deflector 1 .
  • the connecting rod 4 is a straight rod, and the longitudinal centerline of the oblong hole is consistent with the connecting rod 4 .
  • the connecting bolt 9 is arranged at a position away from the central axis of rotation of the rotatable deflector 1 .
  • it also includes an upper cover 6 and a deflection spring 7.
  • the upper cover 6 is covered on the rotatable deflector 1, and the lower part of one side is provided with a relief hole that matches the connecting rod 4, and the deflection
  • the compression spring 7 is arranged between the upper cover 6 and the rotatable deflector 1 , the upper end abuts against the inner top of the upper cover 6 , and the lower end abuts against the rotatable deflector 1 .
  • the upper cover of the rotatable deflector 1 is provided with an upper cover 6.
  • the upper cover 6 can cooperate with the deflection spring 7 to press down on the deflector from the upper part of the rotatable deflector 1 to ensure that when rotating No longitudinal movement.
  • the relief hole of the upper cover 6 is used to make way for the connecting rod 4, and the connecting rod 4 can rotate a preset angle slightly in the relief hole.
  • the rotatable deflector 1 is covered with a sleeve, and the outer wall of the sleeve is in contact with the inner wall of the friction ring.
  • the size and specifications of the rotatable row deflector are fixed, and the lower part of the rotatable deflector 1 can be changed by connecting the sleeve outside the rotatable deflector 1.
  • the radial dimension is ensured to be compatible with the mounting part 2, providing more application scenarios for the deflector mechanism with reduced phase difference of the present application, and reasonably reducing costs.
  • the relief hole is opened on the far right side of Figure 3, specifically at the position where the connecting rod 4 passes through the upper cover 6, there is a gap between the upper cover 6 and the rotatable deflector 1, and the middle part is the light
  • the pole plate is arranged vertically in the longitudinal direction of the shaft hole and the rotatable deflector 1.
  • the lower cover of the fixed rotator 3 is provided with a lower cover 12. Unlike the upper cover 6, the lower cover 12 and the fixed rotator 3 are screwed and fixed.
  • a friction ring 13 is further included.
  • the friction ring 13 is arranged in the installation part 2 , the outer wall of which is in contact with the installation part 2 , and the inner wall is in contact with the rotatable deflector 1 .
  • the rotatable deflector 1 is not in direct contact with the mounting part 2, and a friction ring 13 is added between the two to reduce friction and effectively protect the mounting part 2 and the rotatable deflector 1 , improving the service life of the deflector mechanism for reducing the phase difference of the present application.
  • the friction ring 13 is made of peek material, which has the advantages of high temperature resistance, excellent mechanical properties, good self-lubrication, and easy processing.
  • the upper part of the installation part 2 has an extension extending outwards, and the installation part 2 is provided with a first deflector installation position inward from the center of the top, and the rotatable deflector 1 is arranged on the first deflector In the installation position, a second deflector installation position is opened inwardly from the center of the bottom, and the fixed deflector 3 is arranged in the second deflector installation position.
  • the mounting part 2 is a cylinder with a through hole on the longitudinal central axis, and the first deflector installation position is provided on the top toward the center, and the outer side of the bottom of the rotatable deflector 1 is sleeved with a friction ring 13. , is installed in the first deflector installation position as a whole, and the bottom of the installation part 2 is provided with a second deflector installation position toward the center.
  • the rotatable deflector 1 and the fixed deflector 3 only according to the installation position , one can be rotated, the other is fixed, and the relative deflection between the two can be realized.
  • the upper part of the installation part 2 is installed with a rotatable deflector 1.
  • This solution is not unique and is for reference only.
  • the connecting rod 4 is connected to the mounting part 2 through the central axis of rotation, specifically, the lower part of the connecting rod 4 close to the rotatable deflector 1 overlaps the outer edge of the rotatable deflector 1, and is screwed through the connecting bolt 9, and the connecting bolt 9 9 is provided with a disc spring 11, which is screwed under the action of the disc spring 11, there is pressure in the longitudinal direction, and there is no gap at the connection structure, and when adjustment is required, the connecting rod 4 can also complete the rotation in the horizontal direction to achieve rotatable Small angular trimming of deflector 1.
  • the upper cover of the rotatable deflector 1 is provided with an upper cover 6, the lower cover of the fixed deflector 3 is connected with a lower cover 12, and the deflector is screwed to the cover to protect the deflector and ensure the design of the deflector mechanism It is more reasonable and the structure is more complete.
  • the rotatable deflector 1 is provided with more than two fixing screw holes
  • the upper cover 6 is equipped with upper cover bolts 5 matching the fixing screw holes
  • the upper cover 6 is connected with the rotatable deflector.
  • the device 1 is screwed, and the deflection spring 7 is worn on the bolt 5 of the upper cover.
  • the upper cover 6 is screwed to the rotatable deflector 1, which increases the connection strength of the mechanism, and the deflection compression spring 7 is passed through the upper cover bolt 5, making it easy to install and fix the deflection compression spring 7.
  • the rotatable deflector 1 is ring-shaped, and a pole plate is arranged inside the ring, and a second through hole matching the connecting bolt 9 is opened on the rotatable deflector 1, and the second through hole is opened on The position of the rotatable deflector 1 is close to the outer edge.
  • the rotatable deflector 1 is ring-shaped, and the pole plates are arranged in the ring and evenly distributed in the ring in the shape of even-numbered lobes.
  • both the rotatable deflector 1 and the fixed deflector 3 are electrostatic deflectors.
  • the number of fixing screw holes is four, and the distances from the fixing screw holes to the center axis of rotation of the rotatable deflector 1 are equal, and the lines connecting adjacent fixing screw holes form a square structure, and the deflection pressure A washer 8 is placed between the spring 7 and the rotatable deflector 1 , and the washer 8 is passed through the upper cover bolt 5 .
  • the present application proposes a scanning electron microscope, including a deflector mechanism for reducing phase difference in any of the above possible implementation manners.

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Abstract

The present application relates to a deflector mechanism capable of reducing a phase difference, comprising a rotatable deflector, a connection rod, a fixed deflector, and a mounting portion. The central axis of rotation of the rotatable deflector coincides with the central axis of the fixed deflector, and the rotatable deflector and the fixed deflector are separately mounted on the mounting portion; the rotatable deflector is rotatably connected to the mounting portion; one end of the connection rod is rotatably connected to the rotatable deflector, and the connection rod can drive the rotatable deflector to rotate; the fixed deflector is fixedly connected to the mounting portion. The rotatable deflector is driven to rotate by moving the connection rod; after adjustment, a designed included angle between the rotatable deflector and the fixed deflector reaches a pre-designed angle such that a scanning electron microscope using the deflector mechanism of the present application achieves optimal resolution, and the phase difference is reduced as much as possible. In addition, compared with mechanical mounting, by means of fine-adjustment of the rotatable deflector, the designed included angle between the rotatable deflector and the fixed deflector has a higher precision, and thus, the problem that the mounting precision of the two deflectors cannot be ensured only by means of mechanical mounting is effectively solved.

Description

减小相差的偏转器机构及扫描电镜Deflector mechanism and scanning electron microscope for reducing phase difference 技术领域technical field
本申请涉及半导体领域，尤其涉及一种减小相差的偏转器机构及扫描电镜。The present application relates to the field of semiconductors, in particular to a deflector mechanism and a scanning electron microscope for reducing phase difference.
背景技术Background technique
随着半导体技术的发展和工艺技术的进步，集成电路线宽愈来愈向细微化发展，对电路的生产工艺技术也提出了更高更难的要求，不但要刻蚀出亚微米线条，而且线路缺陷也要控制在一定范围内，以保证芯片的功能和成品率。研究表明，缺陷的尺寸在特征线宽的三分之一以上时，就成为致命的缺陷会导致器件失效。由于器件的尺寸不断缩小，致命缺陷的尺寸也变的越来越小，缺陷的检测变得更加困难，光学检测设备已不能满足需要，而电子束检测设备克服了光学波长的限制，使分辨率提高到纳米领域，可以检测到极微小的缺陷。偏转器有静电偏转器与磁偏转器两种，静电偏转相比磁偏转具有扫描速度快的优点；但是对比磁偏转，静电场更不均匀，偏转器工作时会引起更大的相差。With the development of semiconductor technology and the advancement of process technology, the line width of integrated circuits is becoming more and more miniaturized, and higher and more difficult requirements are put forward for the production process technology of circuits. Not only must sub-micron lines be etched, but also Line defects should also be controlled within a certain range to ensure the function and yield of the chip. Studies have shown that when the size of the defect is more than one-third of the characteristic line width, it becomes a fatal defect and causes device failure. As the size of the device continues to shrink, the size of the fatal defect becomes smaller and smaller, and the detection of the defect becomes more difficult. The optical inspection equipment can no longer meet the needs, and the electron beam inspection equipment overcomes the limitation of the optical wavelength, making the resolution Improve to the nanometer field, can detect extremely small defects. There are two types of deflectors: electrostatic deflector and magnetic deflector. Compared with magnetic deflection, electrostatic deflector has the advantage of faster scanning speed; but compared with magnetic deflection, the electrostatic field is more uneven, and the deflector will cause greater phase difference when it works.
发明内容Contents of the invention
有鉴于此，本申请提出了一种减小相差的偏转器机构，包括可旋转偏转器、连接杆、固定偏转器及安装部；所述可旋转偏转器的旋转中轴与所述固定偏转器的中轴相重合，且分别安装到所述安装部上；所述可旋转偏转器与所述安装部可转动连接；所述连接杆的一端与所述可旋转偏转器连接，能够带动所述可旋转偏转器绕所述旋转中轴转动；所述固定偏转器与所述安装部固定连接。In view of this, the present application proposes a deflector mechanism for reducing phase difference, including a rotatable deflector, a connecting rod, a fixed deflector and a mounting part; The central axis coincides with each other and is respectively mounted on the mounting part; the rotatable deflector is rotatably connected to the mounting part; one end of the connecting rod is connected to the rotatable deflector, which can drive the The rotatable deflector rotates around the rotation axis; the fixed deflector is fixedly connected with the installation part.
在一种可能的实现方式中，还包括碟形弹簧；所述碟形弹簧设置在所述连接杆与所述可旋转偏转器的连接位置处，用以减小纵向间隙。In a possible implementation manner, a disc spring is further included; the disc spring is arranged at a connection position between the connecting rod and the rotatable deflector, so as to reduce the longitudinal gap.
在一种可能的实现方式中，所述连接杆上开设有第一通孔；所述连接杆通过所述第一通孔套设在所述可旋转偏转器上的连接螺栓上，且所述第一通孔在所述可旋转偏转器的旋转中轴到外侧边缘的方向上的长度大于所述连接螺栓的直径。In a possible implementation manner, the connecting rod is provided with a first through hole; the connecting rod is sleeved on the connecting bolt on the rotatable deflector through the first through hole, and the The length of the first through hole in the direction from the rotation central axis of the rotatable deflector to the outer edge is greater than the diameter of the connecting bolt.
在一种可能的实现方式中，所述连接螺栓设置在远离所述可旋转偏转器的旋转中轴的位置。In a possible implementation manner, the connecting bolt is arranged at a position away from the central axis of rotation of the rotatable deflector.
在一种可能的实现方式中，所述固定偏转器的数量为两个以上，且相邻的所述固定偏转器之间固定连接。In a possible implementation manner, there are more than two fixed deflectors, and adjacent fixed deflectors are fixedly connected.
在一种可能的实现方式中，还包括上盖及偏转压簧；所述上盖盖设在所述可旋转偏转器上，一侧下部开设有与所述连接杆相匹配的让位孔；所述偏转压簧设置在所述上盖与所述可旋转偏转器之间，上端与所述上盖内顶部相抵接，下端与所述可旋转偏转器相抵接。In a possible implementation manner, it also includes an upper cover and a deflection compression spring; the upper cover is arranged on the rotatable deflector, and the lower part of one side is provided with a relief hole matching the connecting rod; The deflection compression spring is arranged between the upper cover and the rotatable deflector, its upper end abuts against the inner top of the upper cover, and its lower end abuts against the rotatable deflector.
在一种可能的实现方式中，还包括摩擦环；所述摩擦环设置在所述安装部内，外壁与所述安装部相接触，内壁与所述可旋转偏转器相接触。In a possible implementation manner, a friction ring is further included; the friction ring is arranged in the installation part, an outer wall is in contact with the installation part, and an inner wall is in contact with the rotatable deflector.
在一种可能的实现方式中，所述安装部的上部向外延伸有延伸部；所述安装部从顶部中心处向内开设有第一偏转器安装位，所述可旋转偏转器设置在所述第一偏转器安装位内；所述安装部从底部中心处向内开设有第二偏转器安装位，所述固定偏转器设置在所述第二偏转器安装位内。In a possible implementation manner, the upper part of the installation part extends outwards with an extension part; the installation part is provided with a first deflector installation position inward from the center of the top, and the rotatable deflector is arranged on the In the first deflector installation position; the installation part is provided with a second deflector installation position inward from the center of the bottom, and the fixed deflector is arranged in the second deflector installation position.
在一种可能的实现方式中，所述可旋转偏转器上开设有两个以上的固定螺孔；所述上盖上安装有与所述固定螺孔相匹配的上盖螺栓，所述上盖与可旋转偏转器相螺接；所述偏转压簧穿设在所述上盖螺栓上。In a possible implementation manner, more than two fixing screw holes are opened on the rotatable deflector; upper cover bolts matching the fixing screw holes are installed on the upper cover, and the upper cover It is screwed with the rotatable deflector; the deflection compression spring is passed through the bolt of the upper cover.
在一种可能的实现方式中，所述可旋转偏转器为环形，环内设置有极板，所述可旋转偏转器上开设有与所述连接螺栓相匹配的第二通孔，所述第二通孔开设在所述可旋转偏转器靠近外边缘的位置处。In a possible implementation manner, the rotatable deflector is ring-shaped, and a pole plate is arranged inside the ring, and a second through hole matching the connecting bolt is opened on the rotatable deflector, and the first through hole matches the connecting bolt. Two through holes are opened at a position close to the outer edge of the rotatable deflector.
在一种可能的实现方式中，所述可旋转偏转器与所述固定偏转器均为静电偏转器。In a possible implementation manner, both the rotatable deflector and the fixed deflector are electrostatic deflectors.
在一种可能的实现方式中，所述固定螺孔的个数为四个，所述固定螺孔 到所述可旋转偏转器的旋转中轴距离相等，且相邻的所述固定螺孔连线构成正方形结构；所述偏转压簧与所述可旋转偏转器之间垫设有垫圈，所述垫圈穿设在所述上盖螺栓上。In a possible implementation manner, the number of the fixing screw holes is four, the distances from the fixing screw holes to the central axis of rotation of the rotatable deflector are equal, and the adjacent fixing screw holes are connected to each other. The wires form a square structure; a washer is placed between the deflection compression spring and the rotatable deflector, and the washer is passed through the bolt of the upper cover.
在一种可能的实现方式中，包括上述任一可能实现方式中所述的减小相差的偏转器机构。In a possible implementation manner, the deflector mechanism for reducing the phase difference described in any of the foregoing possible implementation manners is included.
本申请的有益效果：通过移动连接杆，带动可旋转偏转器旋转，调节后可旋转偏转器与固定偏转器的设计夹角达到预先设计角度，以使使用本申请偏转器机构的扫描电镜获得最佳分辨率，尽量减少相差，不仅如此，旋转偏转器进行微调相较于机械安装，可旋转偏转器与固定偏转器的设计夹角具有更高的精度，有效的解决了仅靠机械安装无法保证两个偏转器安装精度的问题。Beneficial effects of the application: by moving the connecting rod, the rotatable deflector is driven to rotate, and after adjustment, the designed angle between the rotatable deflector and the fixed deflector reaches a pre-designed angle, so that the scanning electron microscope using the deflector mechanism of the application can obtain the best Optimum resolution, minimizing the phase difference. Not only that, the fine-tuning of the rotating deflector compared with mechanical installation, the design angle between the rotatable deflector and the fixed deflector has higher accuracy, effectively solving the problem that cannot be guaranteed by mechanical installation alone. The problem of the installation accuracy of the two deflectors.
根据下面参考附图对示例性实施例的详细说明，本申请的其它特征及方面将变得清楚。Other features and aspects of the present application will become apparent from the following detailed description of exemplary embodiments with reference to the accompanying drawings.
附图说明Description of drawings
包含在说明书中并且构成说明书的一部分的附图与说明书一起示出了本申请的示例性实施例、特征和方面，并且用于解释本申请的原理。The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate exemplary embodiments, features, and aspects of the application and, together with the specification, serve to explain the principles of the application.
图1示出根据本申请一实施例的减小相差的偏转器机构的***图；FIG. 1 shows an exploded view of a deflector mechanism for reducing phase difference according to an embodiment of the present application;
图2示出根据本申请一实施例的连接杆带动可旋转偏转器的示意图；Fig. 2 shows a schematic diagram of a connecting rod driving a rotatable deflector according to an embodiment of the present application;
图3示出根据本申请一实施例的可旋转偏转器的剖视图；Figure 3 shows a cross-sectional view of a rotatable deflector according to an embodiment of the application;
图4示出根据本申请一实施例的减小相差的偏转器机构的剖视图。FIG. 4 shows a cross-sectional view of a deflector mechanism for reducing phase difference according to an embodiment of the present application.
具体实施方式Detailed ways
以下将参考附图详细说明本申请的各种示例性实施例、特征和方面。附图中相同的附图标记表示功能相同或相似的元件。尽管在附图中示出了实施例的各种方面，但是除非特别指出，不必按比例绘制附图。Various exemplary embodiments, features, and aspects of the present application will be described in detail below with reference to the accompanying drawings. The same reference numbers in the figures indicate functionally identical or similar elements. While various aspects of the embodiments are shown in drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
其中，需要理解的是，术语“中心”、“纵向”、“横向”、“长度”、“宽度”、 “上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请或简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。Wherein, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "upper", "lower", "front", "rear", "left", "right" ", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial", "Radial", "Circumferential ” and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the application or simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, with a specific configuration and operation, and therefore should not be construed as limiting the application.
此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本申请的描述中，“多个”的含义是两个或两个以上，除非另有明确具体的限定。In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present application, "plurality" means two or more, unless otherwise specifically defined.
在这里专用的词“示例性”意为“用作例子、实施例或说明性”。这里作为“示例性”所说明的任何实施例不必解释为优于或好于其它实施例。The word "exemplary" is used exclusively herein to mean "serving as an example, embodiment, or illustration." Any embodiment described herein as "exemplary" is not necessarily to be construed as superior or better than other embodiments.
另外，为了更好的说明本申请，在下文的具体实施方式中给出了众多的具体细节。本领域技术人员应当理解，没有某些具体细节，本申请同样可以实施。在一些实例中，对于本领域技术人员熟知的方法、手段、元件和电路未作详细描述，以便于凸显本申请的主旨。In addition, in order to better illustrate the present application, numerous specific details are given in the following specific implementation manners. It will be understood by those skilled in the art that the present application may be practiced without certain of the specific details. In some instances, methods, means, components and circuits well known to those skilled in the art have not been described in detail in order to highlight the gist of the present application.
图1示出根据本申请一实施例的减小相差的偏转器机构的***图；图2示出根据本申请一实施例的连接杆带动可旋转偏转器的示意图；图3示出根据本申请一实施例的可旋转偏转器的剖视图；图4示出根据本申请一实施例的减小相差的偏转器机构的剖视图。Figure 1 shows an exploded view of a deflector mechanism for reducing phase difference according to an embodiment of the application; Figure 2 shows a schematic diagram of a connecting rod driving a rotatable deflector according to an embodiment of the application; Figure 3 shows a schematic diagram of a rotating deflector according to an embodiment of the application A cross-sectional view of a rotatable deflector according to an embodiment; FIG. 4 shows a cross-sectional view of a deflector mechanism for reducing phase difference according to an embodiment of the present application.
如图1-4所示，该减小相差的偏转器机构，包括可旋转偏转器1、连接杆4、固定偏转器3及安装部2，可旋转偏转器1的旋转中轴与固定偏转器3的中轴相重合，且分别安装到安装部2上，可旋转偏转器1与安装部2可转动连接，连接杆4的一端与可旋转偏转器1连接，能够带动可旋转偏转器1绕旋转中轴转动，固定偏转器3与安装部2固定连接。As shown in Figures 1-4, the deflector mechanism for reducing the phase difference includes a rotatable deflector 1, a connecting rod 4, a fixed deflector 3 and a mounting part 2, and the rotation axis of the rotatable deflector 1 and the fixed deflector 3 are coincident with each other, and are respectively installed on the mounting part 2, the rotatable deflector 1 is rotatably connected to the mounting part 2, and one end of the connecting rod 4 is connected to the rotatable deflector 1, which can drive the rotatable deflector 1 to rotate The rotating axis rotates, and the fixed deflector 3 is fixedly connected with the installation part 2 .
在此种实现方式中，通过移动连接杆4，带动可旋转偏转器1旋转，调节后可旋转偏转器1与固定偏转器3的设计夹角达到预先设计角度，以使使用本 申请偏转器机构的扫描电镜获得最佳分辨率，尽量减少相差，不仅如此，旋转偏转器进行微调相较于机械安装，可旋转偏转器1与固定偏转器3的设计夹角具有更高的精度，有效的解决了仅靠机械安装无法保证两个偏转器安装精度的问题。In this implementation mode, by moving the connecting rod 4, the rotatable deflector 1 is driven to rotate, and after adjustment, the designed angle between the rotatable deflector 1 and the fixed deflector 3 reaches a pre-designed angle, so that the deflector mechanism of this application can be used The SEM obtains the best resolution and minimizes the phase difference. Not only that, the fine adjustment of the rotating deflector is compared with the mechanical installation, and the design angle between the rotatable deflector 1 and the fixed deflector 3 has higher precision, which effectively solves the problem. This solves the problem that the installation accuracy of the two deflectors cannot be guaranteed only by mechanical installation.
为便于描述，图1中旋转中轴方向为纵向，可旋转偏转器1的转动方向在水平面内和可横向转动。For ease of description, the direction of the axis of rotation in FIG. 1 is the longitudinal direction, and the rotation direction of the rotatable deflector 1 is in the horizontal plane and can be rotated laterally.
还需要特别强调的是，本申请的偏转器机构设置在扫描电镜的真空侧，并且仅连接杆4未与可旋转偏转器1相连接的一端从真空腔体内伸出，其上安装有运动窥入装置10，运动窥入装置10为现有技术，其起到便于本领域技术人员从大气侧对偏转器机构进行调节偏转角度的作用，其他更多在本文中不做赘述。还有，上下偏转器极板的夹角一般在1°-5°之间，精度要求为±0.01°。It should also be emphasized that the deflector mechanism of the present application is arranged on the vacuum side of the scanning electron microscope, and only one end of the connecting rod 4 that is not connected with the rotatable deflector 1 protrudes from the vacuum cavity, and the moving scope is installed on it. The intrusion device 10 and the motion peeping device 10 are prior art, which facilitates those skilled in the art to adjust the deflection angle of the deflector mechanism from the atmospheric side, and more details will not be described in this article. In addition, the angle between the upper and lower deflector plates is generally between 1°-5°, and the accuracy requirement is ±0.01°.
安装部2的具体结构在此并未做出更多限定，只需保证可旋转偏转器1及固定偏转器3可以安装在安装部2上，并且可旋转偏转器1能够实现旋转即可，在本文中不做赘述。The specific structure of the mounting part 2 is not limited here. It is only necessary to ensure that the rotatable deflector 1 and the fixed deflector 3 can be installed on the mounting part 2, and that the rotatable deflector 1 can be rotated. I won't go into details in this article.
在一种可能的实现方式中，还包括碟形弹簧11；碟形弹簧11设置在连接杆4与可旋转偏转器1的连接位置处，用以减小纵向间隙。In a possible implementation manner, a disc spring 11 is also included; the disc spring 11 is arranged at the connection position between the connecting rod 4 and the rotatable deflector 1 to reduce the longitudinal gap.
在一种可能的实现方式中，还包括碟形弹簧11，连接杆4与可旋转偏转器1相铰接；碟形弹簧11穿设在转动连接的位置处，用以减小纵向间隙。In a possible implementation manner, a disc spring 11 is also included, and the connecting rod 4 is hinged to the rotatable deflector 1; the disc spring 11 is threaded at the rotationally connected position to reduce the longitudinal gap.
在此种可能的实现方式中，通过连接杆4在横向传递运动至可旋转偏转器1，实现可旋转偏转器1绕旋转中轴转动。In this possible implementation manner, the movement of the connecting rod 4 is transmitted to the rotatable deflector 1 in the lateral direction, so that the rotatable deflector 1 can rotate around the central axis of rotation.
优选的，连接杆4与可旋转偏转器1通过连接螺栓9相固定，碟形弹簧11穿设在连接螺栓9上，能够压紧连接杆4，减小连接杆4与可旋转偏转器1之间纵向间隙，在可旋转偏转器1做旋转运动时，不会翘起，平稳运动。Preferably, the connecting rod 4 and the rotatable deflector 1 are fixed through the connecting bolt 9, and the disc spring 11 is threaded on the connecting bolt 9, which can compress the connecting rod 4 and reduce the distance between the connecting rod 4 and the rotatable deflector 1. When the rotatable deflector 1 rotates, it will not tilt up and move smoothly.
在一种可能的实现方式中，连接杆4上开设有第一通孔，连接杆4通过第一通孔套设在可旋转偏转器上1的连接螺栓上，且第一通孔在可旋转偏转器1的旋转中轴到外侧边缘的方向上的长度大于连接螺栓的直径。In a possible implementation, the connecting rod 4 is provided with a first through hole, and the connecting rod 4 is sleeved on the connecting bolt on the rotatable deflector 1 through the first through hole, and the first through hole is rotatable The length in the direction from the rotation central axis of the deflector 1 to the outer edge is greater than the diameter of the connecting bolt.
更具体的，第一通孔为长圆孔，与连接螺栓9相适配，长圆结构的第一通孔，当可旋转偏转器1旋转时，纵向具有一定的位移，长圆孔能够抵消此位移，以确保连接杆4传递可旋转偏转器1运动时不会被卡住。More specifically, the first through hole is an oblong hole, which is adapted to the connecting bolt 9. The first through hole of the oblong structure has a certain displacement in the longitudinal direction when the rotatable deflector 1 rotates, and the oblong hole can offset this displacement. To ensure that the connecting rod 4 will not be stuck when transmitting the movement of the rotatable deflector 1 .
优选的，连接杆4为直杆，长圆孔的长度方向的中线与连接杆4保持一致。Preferably, the connecting rod 4 is a straight rod, and the longitudinal centerline of the oblong hole is consistent with the connecting rod 4 .
在一种可能的实现方式中，连接螺栓9设置在远离可旋转偏转器1的旋转中轴的位置。In a possible implementation manner, the connecting bolt 9 is arranged at a position away from the central axis of rotation of the rotatable deflector 1 .
在一种可能的实现方式中，还包括上盖6及偏转压簧7，上盖6盖设在可旋转偏转器1上，一侧下部开设有与连接杆4相匹配的让位孔，偏转压簧7设置在上盖6与可旋转偏转器1之间，上端与上盖6内顶部相抵接，下端与可旋转偏转器1相抵接。In a possible implementation, it also includes an upper cover 6 and a deflection spring 7. The upper cover 6 is covered on the rotatable deflector 1, and the lower part of one side is provided with a relief hole that matches the connecting rod 4, and the deflection The compression spring 7 is arranged between the upper cover 6 and the rotatable deflector 1 , the upper end abuts against the inner top of the upper cover 6 , and the lower end abuts against the rotatable deflector 1 .
在此实现方式中，可旋转偏转器1上盖设有上盖6，在旋转时，上盖6能够配合偏转压簧7从可旋转偏转器1的上部下压偏转器，以确保在旋转时无纵向运动。上盖6的让位孔用以为连接杆4让位，连接杆4在让位孔内能够小幅转动预设角度。In this implementation, the upper cover of the rotatable deflector 1 is provided with an upper cover 6. When rotating, the upper cover 6 can cooperate with the deflection spring 7 to press down on the deflector from the upper part of the rotatable deflector 1 to ensure that when rotating No longitudinal movement. The relief hole of the upper cover 6 is used to make way for the connecting rod 4, and the connecting rod 4 can rotate a preset angle slightly in the relief hole.
更具体的，可旋转偏转器1外套接有套筒，套筒的外壁与摩擦环内壁相接触，可旋转排偏转器尺寸规格固定，通过在其外套接套筒以改变可旋转偏转器1下部的径向尺寸，确保与安装部2相适配，为本申请的减小相差的偏转器机构提供更多的使用场景，合理降低成本。More specifically, the rotatable deflector 1 is covered with a sleeve, and the outer wall of the sleeve is in contact with the inner wall of the friction ring. The size and specifications of the rotatable row deflector are fixed, and the lower part of the rotatable deflector 1 can be changed by connecting the sleeve outside the rotatable deflector 1. The radial dimension is ensured to be compatible with the mounting part 2, providing more application scenarios for the deflector mechanism with reduced phase difference of the present application, and reasonably reducing costs.
如图3所示，让位孔开设在图3的最右侧，具体在连接杆4穿过上盖6的位置处，上盖6内与可旋转偏转器1内留有间隙，中部为光轴孔且可旋转偏转器1的纵向竖直设置极板，固定旋转器3的下部盖设有下盖12，与上盖6不同，下盖12与固定旋转器3螺接固定即可。As shown in Figure 3, the relief hole is opened on the far right side of Figure 3, specifically at the position where the connecting rod 4 passes through the upper cover 6, there is a gap between the upper cover 6 and the rotatable deflector 1, and the middle part is the light The pole plate is arranged vertically in the longitudinal direction of the shaft hole and the rotatable deflector 1. The lower cover of the fixed rotator 3 is provided with a lower cover 12. Unlike the upper cover 6, the lower cover 12 and the fixed rotator 3 are screwed and fixed.
在一种可能的实现方式中，还包括摩擦环13，摩擦环13设置在安装部2内，外壁与安装部2相接触，内壁与可旋转偏转器1相接触。In a possible implementation manner, a friction ring 13 is further included. The friction ring 13 is arranged in the installation part 2 , the outer wall of which is in contact with the installation part 2 , and the inner wall is in contact with the rotatable deflector 1 .
在此种实现方式中，可旋转偏转器1不与安装部2直接接触，二者之间增设摩擦环13，用以减小摩擦，并且对安装部2和可旋转偏转器1起到有效保护，提高了本申请的减小相差的偏转器机构的使用寿命。In this implementation, the rotatable deflector 1 is not in direct contact with the mounting part 2, and a friction ring 13 is added between the two to reduce friction and effectively protect the mounting part 2 and the rotatable deflector 1 , improving the service life of the deflector mechanism for reducing the phase difference of the present application.
优选的，摩擦环13为peek材质，具有耐高温，机械性能优异，自润滑性好，易于加工的优势。Preferably, the friction ring 13 is made of peek material, which has the advantages of high temperature resistance, excellent mechanical properties, good self-lubrication, and easy processing.
在一种可能的实现方式中，安装部2的上部向外延伸有延伸部，安装部2从顶部中心处向内开设有第一偏转器安装位，可旋转偏转器1设置在第一偏转器安装位内，从底部中心处向内开设有第二偏转器安装位，固定偏转器3设置在第二偏转器安装位内。In a possible implementation, the upper part of the installation part 2 has an extension extending outwards, and the installation part 2 is provided with a first deflector installation position inward from the center of the top, and the rotatable deflector 1 is arranged on the first deflector In the installation position, a second deflector installation position is opened inwardly from the center of the bottom, and the fixed deflector 3 is arranged in the second deflector installation position.
如图1所示，安装部2为在纵向的中轴处开设有通孔的圆柱体，顶部向中心处开设有第一偏转器安装位，可旋转偏转器1底部外侧套设摩擦环13后，整体安装在第一偏转器安装位内，安装部2的底部向中心处开设有第二偏转器安装位，可旋转偏转器1与固定偏转器3在结构上并无区别，只根据安装位置，实现一个可转动，另一个固定，实现二者间的相对偏转即可，本申请实施例中的安装部2的上部安装可旋转偏转器1，此方案并不唯一，仅供参考。安装部2顶部向外边缘延伸的延长部，延长部的外延在真空腔体内兼顾结构强度的同时，固定安装在真空腔体内，保证偏转机构的稳定性。连接杆4与安装部2通过旋转中轴连接，具体为连接杆4靠近可旋转偏转器1的一端下部与可旋转偏转器1外延的边缘搭接，通过连接螺栓9螺接，并且在连接螺栓9上套设有碟形弹簧11，此螺接在碟形弹簧11的作用下，纵向具有压力，连接结构处没有缝隙，而需要调节时，连接杆4还可以在横向完成转动，实现可旋转偏转器1的小角度微调。可旋转偏转器1的上方盖设有上盖6，固定偏转器3的下方盖接有下盖12，偏转器与盖体相螺接，用以保护偏转器，还能确保偏转器机构的设计更加合理，结构更完整。As shown in Figure 1, the mounting part 2 is a cylinder with a through hole on the longitudinal central axis, and the first deflector installation position is provided on the top toward the center, and the outer side of the bottom of the rotatable deflector 1 is sleeved with a friction ring 13. , is installed in the first deflector installation position as a whole, and the bottom of the installation part 2 is provided with a second deflector installation position toward the center. There is no difference in structure between the rotatable deflector 1 and the fixed deflector 3, only according to the installation position , one can be rotated, the other is fixed, and the relative deflection between the two can be realized. In the embodiment of the present application, the upper part of the installation part 2 is installed with a rotatable deflector 1. This solution is not unique and is for reference only. The extension part extending from the top of the mounting part 2 to the outer edge, while the extension of the extension part takes into account the structural strength in the vacuum chamber, is fixedly installed in the vacuum chamber to ensure the stability of the deflection mechanism. The connecting rod 4 is connected to the mounting part 2 through the central axis of rotation, specifically, the lower part of the connecting rod 4 close to the rotatable deflector 1 overlaps the outer edge of the rotatable deflector 1, and is screwed through the connecting bolt 9, and the connecting bolt 9 9 is provided with a disc spring 11, which is screwed under the action of the disc spring 11, there is pressure in the longitudinal direction, and there is no gap at the connection structure, and when adjustment is required, the connecting rod 4 can also complete the rotation in the horizontal direction to achieve rotatable Small angular trimming of deflector 1. The upper cover of the rotatable deflector 1 is provided with an upper cover 6, the lower cover of the fixed deflector 3 is connected with a lower cover 12, and the deflector is screwed to the cover to protect the deflector and ensure the design of the deflector mechanism It is more reasonable and the structure is more complete.
在一种可能的实现方式中，可旋转偏转器1上开设有两个以上的固定螺孔，上盖6上安装有与固定螺孔相匹配的上盖螺栓5，上盖6与可旋转偏转器1相螺接，偏转压簧7穿设在上盖螺栓5上。In a possible implementation, the rotatable deflector 1 is provided with more than two fixing screw holes, the upper cover 6 is equipped with upper cover bolts 5 matching the fixing screw holes, and the upper cover 6 is connected with the rotatable deflector. The device 1 is screwed, and the deflection spring 7 is worn on the bolt 5 of the upper cover.
在此实现方式中，上盖6与可旋转偏转器1相螺接，增加了该机构的连接强度，偏转压簧7穿设在上盖螺栓5上，易于安装固定偏转压簧7。In this implementation, the upper cover 6 is screwed to the rotatable deflector 1, which increases the connection strength of the mechanism, and the deflection compression spring 7 is passed through the upper cover bolt 5, making it easy to install and fix the deflection compression spring 7.
在一种可能的实现方式中，可旋转偏转器1为环形，环内设置有极板， 可旋转偏转器1上开设有与连接螺栓9相匹配的第二通孔，第二通孔开设在可旋转偏转器1靠近外边缘的位置处。In a possible implementation manner, the rotatable deflector 1 is ring-shaped, and a pole plate is arranged inside the ring, and a second through hole matching the connecting bolt 9 is opened on the rotatable deflector 1, and the second through hole is opened on The position of the rotatable deflector 1 is close to the outer edge.
在此实现方式中，可旋转偏转器1为环形，极板设置在环内，呈偶数瓣状均匀分布在环内。In this implementation manner, the rotatable deflector 1 is ring-shaped, and the pole plates are arranged in the ring and evenly distributed in the ring in the shape of even-numbered lobes.
在一种可能的实现方式中，可旋转偏转器1与固定偏转器3均为静电偏转器。In a possible implementation manner, both the rotatable deflector 1 and the fixed deflector 3 are electrostatic deflectors.
在一种可能的实现方式中，固定螺孔的个数为四个，固定螺孔到可旋转偏转器1的旋转中轴距离相等，且相邻的固定螺孔连线构成正方形结构，偏转压簧7与可旋转偏转器1之间垫设有垫圈8，垫圈8穿设在上盖螺栓5上。In a possible implementation, the number of fixing screw holes is four, and the distances from the fixing screw holes to the center axis of rotation of the rotatable deflector 1 are equal, and the lines connecting adjacent fixing screw holes form a square structure, and the deflection pressure A washer 8 is placed between the spring 7 and the rotatable deflector 1 , and the washer 8 is passed through the upper cover bolt 5 .
另一方面，本申请提出了一种扫描电镜，包括上述任一种可能实现方式的减小相差的偏转器机构。On the other hand, the present application proposes a scanning electron microscope, including a deflector mechanism for reducing phase difference in any of the above possible implementation manners.
以上已经描述了本申请的各实施例，上述说明是示例性的，并非穷尽性的，并且也不限于所披露的各实施例。在不偏离所说明的各实施例的范围和精神的情况下，对于本技术领域的普通技术人员来说许多修改和变更都是显而易见的。本文中所用术语的选择，旨在最好地解释各实施例的原理、实际应用或对市场中的技术的改进，或者使本技术领域的其它普通技术人员能理解本文披露的各实施例。Having described various embodiments of the present application above, the foregoing description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and alterations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen to best explain the principle of each embodiment, practical application or improvement of technology in the market, or to enable other ordinary skilled in the art to understand each embodiment disclosed herein.

Claims (13)

  1. 一种减小相差的偏转器机构，其特征在于，包括可旋转偏转器、连接杆、固定偏转器及安装部；A deflector mechanism for reducing phase difference, characterized by comprising a rotatable deflector, a connecting rod, a fixed deflector and a mounting part;
    所述可旋转偏转器的旋转中轴与所述固定偏转器的中轴相重合，且分别安装到所述安装部上；The central axis of rotation of the rotatable deflector coincides with the central axis of the fixed deflector, and are installed on the mounting parts respectively;
    所述可旋转偏转器与所述安装部可转动连接；The rotatable deflector is rotatably connected to the mounting part;
    所述连接杆的一端与所述可旋转偏转器连接，能够带动所述可旋转偏转器绕所述旋转中轴转动；One end of the connecting rod is connected to the rotatable deflector, which can drive the rotatable deflector to rotate around the rotating axis;
    所述固定偏转器与所述安装部固定连接。The fixed deflector is fixedly connected with the installation part.
  2. 根据权利要求1所述的一种减小相差的偏转器机构，其特征在于，还包括碟形弹簧；A deflector mechanism for reducing phase difference according to claim 1, further comprising disc springs;
    所述碟形弹簧设置在所述连接杆与所述可旋转偏转器的连接位置处，用以减小纵向间隙。The belleville spring is arranged at the connecting position of the connecting rod and the rotatable deflector to reduce the longitudinal play.
  3. 根据权利要求1所述的减小相差的偏转器机构，其特征在于，所述连接杆上开设有第一通孔；The deflector mechanism for reducing phase difference according to claim 1, wherein a first through hole is opened on the connecting rod;
    所述连接杆通过所述第一通孔套设在所述可旋转偏转器上的连接螺栓上，且所述第一通孔在所述可旋转偏转器的旋转中轴到外侧边缘的方向上的长度大于所述连接螺栓的直径。The connecting rod is sleeved on the connecting bolt on the rotatable deflector through the first through hole, and the first through hole is in the direction from the rotation center axis of the rotatable deflector to the outer edge The length is greater than the diameter of the connecting bolt.
  4. 根据权利要求3所述的减小相差的偏转器机构，其特征在于，所述连接螺栓设置在远离所述可旋转偏转器的旋转中轴的位置。The deflector mechanism for reducing phase difference according to claim 3, characterized in that, the connecting bolt is arranged at a position away from the rotation center axis of the rotatable deflector.
  5. 根据权利要求1-4任一项所述的减小相差的偏转器机构，其特征在于，所述固定偏转器的数量为两个以上，且相邻的所述固定偏转器之间固定连接。The deflector mechanism for reducing phase difference according to any one of claims 1-4, characterized in that there are more than two fixed deflectors, and the adjacent fixed deflectors are fixedly connected.
  6. 根据权利要求1-4任一项所述的减小相差的偏转器机构，其特征在于，还包括上盖及偏转压簧；The deflector mechanism for reducing phase difference according to any one of claims 1-4, further comprising an upper cover and a deflection compression spring;
    所述上盖盖设在所述可旋转偏转器上，一侧下部开设有与所述连接杆相匹配的让位孔；The upper cover is arranged on the rotatable deflector, and the lower part of one side is provided with a relief hole matching the connecting rod;
    所述偏转压簧设置在所述上盖与所述可旋转偏转器之间，上端与所述上盖内顶部相抵接，下端与所述可旋转偏转器相抵接。The deflection compression spring is arranged between the upper cover and the rotatable deflector, its upper end abuts against the inner top of the upper cover, and its lower end abuts against the rotatable deflector.
  7. 根据权利要求1-4任一项所述的减小相差的偏转机构，其特征在于，还包括摩擦环；The deflection mechanism for reducing phase difference according to any one of claims 1-4, further comprising a friction ring;
    所述摩擦环设置在所述安装部内，外壁与所述安装部相接触，内壁与所述可旋转偏转器相接触。The friction ring is arranged in the installation part, the outer wall is in contact with the installation part, and the inner wall is in contact with the rotatable deflector.
  8. 根据权利要求1-4所述的减小相差的偏转器机构，其特征在于，所述安装部的上部向外延伸有延伸部；The deflector mechanism for reducing phase difference according to claims 1-4, characterized in that, an extension part extends outward from the upper part of the mounting part;
    所述安装部从顶部中心处向内开设有第一偏转器安装位，所述可旋转偏转器设置在所述第一偏转器安装位内；The installation part is provided with a first deflector installation position inwardly from the center of the top, and the rotatable deflector is arranged in the first deflector installation position;
    所述安装部从底部中心处向内开设有第二偏转器安装位，所述固定偏转器设置在所述第二偏转器安装位内。A second deflector installation position is opened inwardly from the center of the bottom of the installation part, and the fixed deflector is arranged in the second deflector installation position.
  9. 根据权利要求1-4所述的减小相差的偏转器机构，其特征在于，所述可旋转偏转器上开设有两个以上的固定螺孔；The deflector mechanism for reducing phase difference according to claims 1-4, characterized in that more than two fixing screw holes are opened on the rotatable deflector;
    所述上盖上安装有与所述固定螺孔相匹配的上盖螺栓，所述上盖与可旋转偏转器相螺接；The upper cover is equipped with upper cover bolts matching the fixing screw holes, and the upper cover is screwed to the rotatable deflector;
    所述偏转压簧穿设在所述上盖螺栓上。The deflection compression spring is threaded on the bolt of the upper cover.
  10. 根据权利要求3所述的减小相差的偏转器机构，其特征在于，所述可旋转偏转器为环形，环内设置有极板，所述可旋转偏转器上开设有与所述连接螺栓相匹配的第二通孔，所述第二通孔开设在所述可旋转偏转器靠近外边缘的位置处。The deflector mechanism for reducing phase difference according to claim 3, characterized in that, the rotatable deflector is ring-shaped, and a pole plate is arranged inside the ring, and there are holes on the rotatable deflector that are connected to the connecting bolts. A matching second through hole is opened at a position close to the outer edge of the rotatable deflector.
  11. 根据权利要求1-4任一项所述的减小相差的偏转器机构，其特征在于，所述可旋转偏转器与所述固定偏转器均为静电偏转器。The deflector mechanism for reducing phase difference according to any one of claims 1-4, characterized in that, both the rotatable deflector and the fixed deflector are electrostatic deflectors.
  12. 根据权利要求9所述的减小相差的偏转器机构，其特征在于，所述固定螺孔的个数为四个，所述固定螺孔到所述可旋转偏转器的旋转中轴距离相等，且相邻的所述固定螺孔连线构成正方形结构；The deflector mechanism for reducing phase difference according to claim 9, characterized in that, the number of said fixing screw holes is four, and the distances from said fixing screw holes to the rotation center axis of said rotatable deflector are equal, And the connection lines between the adjacent fixing screw holes form a square structure;
    所述偏转压簧与所述可旋转偏转器之间垫设有垫圈，所述垫圈穿设在所述上盖螺栓上。A washer is placed between the deflection compression spring and the rotatable deflector, and the washer is passed through the bolt of the upper cover.
  13. 一种扫描电镜，其特征在于，包括权利要求1-12任一项所述的减小 相差的偏转器机构。A scanning electron microscope is characterized in that it comprises the deflector mechanism for reducing phase difference according to any one of claims 1-12.
PCT/CN2021/097999 2021-05-27 2021-06-02 Deflector mechanism capable of reducing phase difference, and scanning electron microscope WO2022246884A1 (en)

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CN202110587261.8A CN116190185A (en) 2021-05-27 2021-05-27 Deflector mechanism for reducing phase difference and scanning electron microscope

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Citations (4)

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US6630668B1 (en) * 2001-10-04 2003-10-07 The United States Of America As Represented By The United States Department Of Energy Remote control of a scanning electron microscope aperture and gun alignment
CN103700562A (en) * 2013-12-25 2014-04-02 苏州新锐合金工具股份有限公司 Height adjustment type scanning electron microscope sampler holder
CN109300760A (en) * 2017-07-25 2019-02-01 东方晶源微电子科技（北京）有限公司 Beam control apparatus and method, electron beam imaging module, Electron-beam measuring equipment
CN215335289U (en) * 2021-04-13 2021-12-28 欧波同科技产业有限公司 Rotating mechanism for scanning electron microscope

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6630668B1 (en) * 2001-10-04 2003-10-07 The United States Of America As Represented By The United States Department Of Energy Remote control of a scanning electron microscope aperture and gun alignment
CN103700562A (en) * 2013-12-25 2014-04-02 苏州新锐合金工具股份有限公司 Height adjustment type scanning electron microscope sampler holder
CN109300760A (en) * 2017-07-25 2019-02-01 东方晶源微电子科技（北京）有限公司 Beam control apparatus and method, electron beam imaging module, Electron-beam measuring equipment
CN215335289U (en) * 2021-04-13 2021-12-28 欧波同科技产业有限公司 Rotating mechanism for scanning electron microscope

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