WO2022218018A1 - 一种带自屏蔽x射线管及其制作方法 - Google Patents

一种带自屏蔽x射线管及其制作方法 Download PDF

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WO2022218018A1
WO2022218018A1 PCT/CN2022/075922 CN2022075922W WO2022218018A1 WO 2022218018 A1 WO2022218018 A1 WO 2022218018A1 CN 2022075922 W CN2022075922 W CN 2022075922W WO 2022218018 A1 WO2022218018 A1 WO 2022218018A1
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cathode
anode
kovar
ray tube
self
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PCT/CN2022/075922
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English (en)
French (fr)
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唐志宏
阳恩会
王昌盛
郭宗艳
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上海超群检测科技股份有限公司
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Publication of WO2022218018A1 publication Critical patent/WO2022218018A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/18—Assembling together the component parts of electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1204—Cooling of the anode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels

Definitions

  • the invention relates to the technical field of X-ray tube manufacturing, in particular to a self-shielded X-ray tube and a manufacturing method thereof.
  • the X-ray tube is mainly composed of four parts: anode assembly, cathode assembly, sealed casing and radiator.
  • anode assembly During the working process, positive high voltage is applied to the anode, the cathode emitter emits electrons, and the electron beam is accelerated to bombard the anode target surface under the action of the high-voltage electric field to generate X-rays.
  • the cathode emitter While generating directional X-rays, a large number of scattered rays in different directions and secondary electron currents also appear during the working process of the ray tube, which increases the shielding work of the ray source manufacturing and reduces the clarity of X-ray imaging.
  • an anode cap is assembled in the anode assembly of the X-ray tube to block part of the scattered rays and secondary electrons, and the beam exit window is increased to filter the X-rays.
  • the anode cap is generally made of oxygen-free copper material. Due to the limited shielding effect of oxygen-free copper on scattered rays and secondary electrons, it is still difficult to avoid the use of a large number of lead plates in the manufacturing process of the radiation source. The part outside the ray tube window is shielded, which increases the weight of the ray source.
  • the anode cap in patent ZL 200420117780.X and patent CN 211788907U is made of tungsten copper, which can effectively shield scattered rays and secondary electrons and reduce the thickness of the shielding layer of the radiation source body, but because the tungsten copper material is made of powder metallurgy Manufacturing, the residual gas content is high, and due to the low melting point of copper, high saturated vapor pressure, and low vacuum high temperature degassing temperature of parts, it is difficult to completely degas in advance, causing hidden dangers to the reliability and service life of the ray tube.
  • the purpose of the present invention is to provide a self-shielding X-ray tube and a manufacturing method thereof, so as to solve the problems raised in the above-mentioned background art.
  • a self-shielded X-ray tube comprising an anode assembly, a cathode assembly, a sealed casing, and a radiator, wherein the anode assembly and the cathode assembly are respectively connected by anode kovar connectors and cathode Kovar connectors are fixedly installed at both ends of the sealed casing, the interior of the sealed casing is a high vacuum environment, the heat sink is tightly fitted and fixedly connected to the tail of the anode assembly, and the anode assembly is working The generated heat is conducted to the heat sink for heat dissipation.
  • the anode assembly includes a target material, an anode head, an anode cap, a window, and an anode Kovar connector
  • the target material is fixedly connected to the center of the inclined surface of the top of the anode head, and the target surface receives the high-speed impact electron flow Bombardment generates X-rays
  • the anode cap is welded on the front end of the anode head, and plays the role of blocking scattered rays, shielding scattered secondary electrons and heat dissipation
  • the window is fixed on the anode cap for filtering
  • the tail end of the anode head and the anode Kovar connecting piece are integrated by silver brazing.
  • the cathode assembly includes a focusing sleeve, an emitter, a cathode kovar connecting piece, a conductive rod, and a cathode shielding plate, and the focusing sleeve is riveted and assembled on the cathode kovar connecting piece, so that the emitter It is located in the center of its filament slot to guide the direction of electron flow, and the conductive rod is fixedly connected to the cathode Kovar connector through glass sintering, which plays the role of providing potential for the emitter, and the cathode can
  • the connecting piece plays the role of connecting the parts of the cathode and the sealed casing.
  • the cathode shielding plate is fixed on the electron beam reflection path, and the positions include but are not limited to the bottom of the focusing sleeve, the cathode can be
  • the position of the upper end face of the vale connecting piece or the lower end face of the cathode kovar connecting piece plays the role of shielding the scattered rays and part of the secondary electrons at the cathode end.
  • the heat sink includes an integrated heat sink and a separate heat sink, wherein the separate heat sink includes a tungsten ring and a base, and the tungsten ring is fixed inside the base through a tight fitting nest.
  • the target material includes but is not limited to tungsten, nickel, rhenium, molybdenum, silver, rhodium, palladium and alloys thereof.
  • the anode cap is made of high-attenuation, refractory metal alloys (such as tungsten, tantalum, etc.) as a substrate, and other metal materials with low saturated vapor pressure are added for composite processing, including but not limited to tungsten iron, tungsten iron nickel, etc.; Or the substrate is the above composite material, and the surface contains other coating materials; or the above composite material is nested with other materials.
  • refractory metal alloys such as tungsten, tantalum, etc.
  • other metal materials with low saturated vapor pressure are added for composite processing, including but not limited to tungsten iron, tungsten iron nickel, etc.
  • the substrate is the above composite material, and the surface contains other coating materials; or the above composite material is nested with other materials.
  • the window material is one of beryllium, pure titanium and titanium alloy.
  • the emitter is made of tungsten-based material, and the connection method between the emitter and the cathode kovar connector is not limited to spot welding, tight fitting, and screw fixing.
  • the focusing sleeve is made of carbon steel, alloy steel, nickel or nickel-based alloy.
  • the cathode shielding plate is made of high-attenuation, refractory metal alloys (such as tungsten, tantalum, etc.) as a base, and other low-saturated vapor pressure metal materials are added for composite processing, including but not limited to ferrotungsten, tungsten-iron-nickel, etc. ;
  • the substrate is the above composite material, and the surface contains other coating materials; or the above composite material is nested with other materials. .
  • the sealed shell is one of a glass shell, a ceramic shell, and a metal shell.
  • the materials of the integrated heat sink and the separate heat sink base include but are not limited to aluminum or aluminum alloy, copper or copper alloy, etc.
  • the materials of the separate heat sink tungsten ring include but are not limited to pure tungsten, tungsten Copper, tungsten iron nickel or other tungsten-based, tantalum-based metal materials.
  • the present invention provides a method for manufacturing a self-shielded X-ray tube, comprising the following steps:
  • the anode cap is fixed on the anode head by welding, and the welding materials include but are not limited to silver-copper solder, gold-copper solder, or other silver-based solder and gold-based solder added with active metals such as titanium, palladium, and nickel;
  • the window is fixed on the anode cap, and the fixing methods include but are not limited to mechanical, physical and chemical methods such as thread fixing, riveting, nailing, deformation extrusion, welding, etc.;
  • one end of the anode Kovar connector is fixed at the position of the anode head and tail by silver brazing, and the other end is fixed at one end of the sealed casing by welding or sintering;
  • the emitter is fixed on the cathode kovar connector by spot welding or screw assembly, and the cathode kovar connector is fixed on the other end of the sealed casing by welding or sintering;
  • the focusing sleeve is fixed on the cathode kovar connector by screw assembly, so that the emitter is located at the center of its filament slot;
  • the conductive rod is fixed on the cathode Kovar connector by glass sintering or vacuum fast connection;
  • the cathode shielding plate can be optionally added to the cathode area, and the position is on the electron beam reflection path, including but not limited to the bottom of the focusing sleeve, the upper end face of the cathode kovar connector, or the bottom of the cathode kovar connector
  • the position of the end face, the connection methods include but are not limited to mechanical, physical and chemical methods such as thread fixing, riveting, nailing, deformation extrusion, welding;
  • the radiator includes an integrated radiator and a separate radiator.
  • the integrated radiator is fixed on the anode head and tail handle by welding or tight fitting connection, and the tungsten ring of the separate radiator is fixed on the base by tight fitting and nesting. inside, and then fixed on the anode head and tail shank by welding or tight-fitting connection.
  • the self-shielded X-ray tube and the manufacturing method thereof by using high attenuation, refractory metal (tantalum, tungsten, etc.) as the substrate, adding high melting point, high attenuation, low saturated vapor pressure metal material (such as iron, nickel, etc.)
  • the anode cap is made of metal material.
  • the anode cap not only meets the purpose of shielding anode scattered rays and secondary electrons, but also the high melting point and low saturated vapor pressure characteristics of its material composition can make the anode cap complete in advance of vacuum and high temperature degassing, and the parts remain
  • the low gas content can improve the reliability and service life of the X-ray tube.
  • the anode cap used in the present invention includes two structures of a half-coated anode head and a fully-coated anode head, and the cathode area can be selected in the electron beam.
  • a cathode shielding plate is added to the position of the reflection path, and the radiator includes two structures of ordinary radiator and tungsten ring with shielding nested layer, which increases the inherent shielding layer area of the ray tube, which can effectively reduce the thickness of the shielding layer of the radiation source body and reduce radiation Source weight, reduce the difficulty of developing the same level of ray source to the portable direction.
  • Fig. 1 is the sectional structure schematic diagram of the present invention
  • FIG. 2 is a schematic structural diagram of the anode cap of the semi-coated structure of the present invention.
  • FIG. 3 is a schematic structural diagram of an anode cap with a full-covering structure of the present invention.
  • Fig. 4 is the shielding structure scheme 1 of the cathode assembly of the present invention.
  • Fig. 5 is the shielding structure scheme 2 of the cathode assembly of the present invention.
  • Fig. 6 is the shielding structure scheme 3 of the cathode assembly of the present invention.
  • FIG. 7 is a schematic structural diagram of a cathode assembly having a circular window according to the present invention.
  • FIG. 8 is a schematic structural diagram of an anode assembly having a rectangular window according to the present invention.
  • FIG. 9 is a schematic structural diagram of an anode assembly having an annular window according to the present invention.
  • FIG. 10 is a schematic structural diagram of a separate radiator according to the present invention.
  • FIG. 11 is a schematic structural diagram of the integrated structure heat sink of the present invention.
  • a self-shielding X-ray tube comprising an anode assembly 1, a cathode assembly 2, a sealed casing 3, a radiator 4, and specifically includes a part target 11, an anode head 12 , anode cap 13, window 14, anode Kovar connector 15, focusing sleeve 21, emitter 22, cathode Kovar connector 23, conductive rod 24, cathode shielding plate 25, tungsten ring 41, base 42, anode assembly 1
  • the cathode assembly 2 is fixedly installed at both ends of the sealed casing 3 through the anode Kovar connecting piece 15 and the cathode Kovar connecting piece 23 respectively.
  • the connection method is not limited to glass sintering, silver brazing, and welding.
  • the radiator 4 In a vacuum environment, the radiator 4 is tightly fitted and fixed at the tail of the anode assembly 1.
  • the connection between the radiator 4 and the anode assembly 1 is not limited to tight fitting, screw connection and welding.
  • the heat generated during the operation of the anode assembly 1 is conducted to the radiator. 4.
  • the anode assembly 1 includes a target 11, an anode head 12, an anode cap 13, a window 14, and an anode Kovar connector 15.
  • the target 11 is fixed at the central position of the top slope of the anode head 12, and the anode head 12 is connected to the target.
  • the material 11 is connected by an oxygen-free copper casting method or a welding method, wherein the welding process is not limited to fusion welding, pressure welding, and brazing.
  • the cathode assembly 2 includes a focusing sleeve 21, an emitter 22, a cathode kovar connecting piece 23, a conductive rod 24, and a cathode shielding plate 25.
  • the focusing sleeve 21 is screwed onto the cathode kovar connecting piece 23, so that the emitter 22 is located thereon.
  • the central position of the filament slot is used to guide the direction of electron flow.
  • the conductive rod 24 is fixed on the cathode kovar connector 23 by glass sintering, and plays the role of providing potential for the emitter 22.
  • the cathode kovar connector 23 serves as the cathode assembly 2 It plays the role of connecting the parts of the cathode and the sealing shell 3.
  • the cathode shielding plate 25 is added to the electron beam reflection path in the cathode area by welding or mechanical connection, and can be optionally added at the bottom of the focusing sleeve 21, and the cathode is connected to the Kovar.
  • the position of the upper end face of the piece 23 or the lower end face of the cathode kovar connecting piece 23 plays the role of shielding the scattered rays and part of the secondary electrons at the cathode end;
  • the separate heat sink 4 includes a tungsten ring 41 and a base 42.
  • the tungsten ring 41 is fixed to the inside of the base 42 by tight fitting and nesting.
  • Material; the target material 11 is made of one of tungsten, nickel, rhenium, molybdenum, silver, rhodium, palladium and its alloys, and the anode cap 13 is made of high attenuation, refractory metal alloys (tantalum, tungsten, etc.) as the base metal Materials, including but not limited to tungsten-iron-nickel materials, or tungsten and tantalum base materials composed of other high-attenuation, low-saturated vapor pressure metal elements, or tungsten-based materials with coating on the surface, or tungsten, tantalum-based base metals or alloys for shells
  • the material of the window 14 is one of beryllium, pure titanium and titanium alloy
  • the emitter 22 is made of tungsten base material
  • a method for manufacturing a self-shielding X-ray tube comprising the following steps:
  • the anode cap 13 is fixed on the anode head 12 by welding;
  • the window 14 is fixed on the anode cap 13 by mechanical, physical and chemical means such as thread fixing, riveting, nailing, deformation extrusion, welding, etc.;
  • One end of the anode Kovar connector 15 is fixed at the tail of the anode head 12 by silver brazing, and the other end is fixed at one end of the sealed casing 3 by welding or sintering;
  • the emitter 22 is fixed on the cathode kovar connecting piece 23 by spot welding or screw assembly, and the cathode kovar connecting piece 23 is fixed on the other end of the sealed casing 3 by welding or sintering;
  • the focusing sleeve 21 is fixed on the cathode kovar connector 23 by means of screw assembly, so that the emitter 22 is located at the center of its filament slot;
  • the conductive rod 24 is fixed on the cathode Kovar connector 23 by glass sintering or vacuum fast connection;
  • a cathode shielding plate 25 can be optionally added to the cathode area, and the position is on the electron beam reflection path, including but not limited to the bottom of the focusing sleeve 21, the upper end face of the cathode Kovar connector 23 or the lower end face of the cathode Kovar connector 23.
  • mechanical, physical and chemical methods such as thread fixing, riveting, nailing, deformation extrusion, welding, etc.;
  • the radiator 4 specifically includes an integrated radiator and a separate radiator.
  • the integrated radiator is fixed on the tail handle of the anode head 12 by welding or tight fitting, and the tungsten ring 41 of the separate radiator is nested by tight fitting. It is fixed inside the base 42 and then fixed on the tail handle of the anode head 12 by welding or tight fitting.
  • the target 11 is fixed at the center of the inclined surface of the top of the oxygen-free copper anode head 12 by casting or welding
  • the anode cap 13 is fixed on the anode head 12 by welding
  • the window 14 is fixed by threads, rivets, nails
  • the anode cap 13 is fixed on the anode cap 13 by mechanical, physical and chemical methods such as deformation, extrusion, welding
  • one end of the anode Kovar connector 15 is fixed at the tail of the anode head 12 by silver brazing, and the other end is fixed on the sealed casing by welding or sintering.
  • the emitter 22 is fixed on the cathode Kovar connector 23 by spot welding or screw assembly, and the cathode Kovar connector 23 is fixed on the other end of the sealed casing 3 by welding or sintering.
  • the focusing sleeve 21 It is fixed on the cathode Kovar connector 23 by means of screw assembly, so that the emitter 22 is located in the center of its filament slot, the conductive rod 24 is fixed on the cathode Kovar connector 23 by glass sintering or vacuum flying connection, and the radiator 4 It is not limited to the two structures of the integrated radiator 4 and the separate radiator 4.
  • the integrated radiator 4 is fixed on the tail handle of the anode head 12 by welding or tight fitting, and the tungsten ring 41 of the separate radiator 4 is tightly fitted.
  • the present invention adopts high attenuation, refractory metal alloy (tantalum, tungsten, etc.) Limited to tungsten-iron-nickel materials, or tungsten or tantalum base materials composed of other high attenuation, low saturated vapor pressure metal elements, or tungsten base materials with a coating on the surface, or nested materials containing tungsten, tantalum base metals or alloys in the shell
  • the anode cap 13 is prepared.
  • the anode cap 13 not only satisfies the purpose of shielding anode scattered rays and secondary electrons, but at the same time, the high melting point and low saturated vapor pressure characteristics of its material composition enable the anode cap 13 to be thoroughly degassed in advance under vacuum and at high temperature, and the parts remain The low gas content can improve the reliability and service life of the ray tube.
  • the anode cap 13 used in the present invention includes two structures of half-covered anode head and full-covered anode head, and the cathode area can be selected in the electron beam.
  • the cathode shielding plate 25 is added to the position of the reflection path, and the radiator 4 includes two structures of the ordinary radiator 4 and the tungsten ring 41 with shielding nested layer, which increases the inherent shielding layer area of the ray tube and can effectively reduce the shielding layer of the ray source body. Thickness, reduce the weight of the ray source, and reduce the difficulty of developing the same level of ray source to the portable direction.

Abstract

一种带自屏蔽X射线管及其制作方法，自屏蔽X射线管包括阳极组件（1）、阴极组件（2）、密封外壳（3）、散热器（4），阳极组件（1）与阴极组件（2）分别通过阳极可伐连接件（15）和阴极可伐连接件（23）固定安装在密封外壳（3）的两端，密封外壳（3）的内部为高真空环境。为优化屏蔽方式，阳极帽（13）包含半包覆和全包覆两种结构。阴极区域可选择在X射线路径位置添加与阳极帽类似材料的阴极屏蔽板（25），用于屏蔽阴极路径上的X射线。散热器（4）包含普通散热器和带屏蔽嵌套层钨环的两种结构，增加射线管阳极侧的屏蔽层面积和厚度。带以上自屏蔽的X射线管可以有效地减少射线源体屏蔽层厚度，减少射线源重量、降低同等级射线源向便携式方向发展的难度。

Description

一种带自屏蔽X射线管及其制作方法 技术领域
本发明涉及X射线管制造技术领域，具体为一种带自屏蔽X射线管及其制作方法。
背景技术
在X射线管制造工业中，X射线管主要由阳极组件、阴极组件、密封外壳、散热器四部分组成。工作过程中，阳极施加正高压，阴极发射体发射电子，电子束在高压电场作用下加速轰击阳极靶面，产生X射线。在产生定向X射线的同时，射线管工作过程中也会出现大量的不同方向的散射射线以及二次电子流，增加了射线源制造的屏蔽工作以及降低了X射线成像的清晰度。一般在X射线管阳极组件中装配阳极帽以阻挡部分散射射线和二次电子，增加出束窗口以过滤X射线。
传统的X射线管制造工艺中，阳极帽一般采用无氧铜材质制造，由于无氧铜对散射射线和二次电子的屏蔽效果有限，在射线源制造过程中仍难以避免采用大量的铅板对射线管窗口外的部分进行屏蔽，增加了射线源的重量。除了无氧铜外，专利ZL 200420117780.X和专利CN 211788907U中阳极帽采用钨铜材质，可以有效地屏蔽散射射线和二次电子，减少射线源体屏蔽层厚度，但由于钨铜材质采用粉末冶金制造，残气含量高，而由于铜的熔点低、饱和蒸气压较高，零件真空高温去气温度低，难以提前去气彻底，对射线管可靠性和使用寿命造成隐患。
鉴于此，寻找新的阳极帽材料，在确保提前真空高温去气彻底的前提下，提升对阳极头出束射线和二次电子的屏蔽以降低射线源制造中屏蔽材料的重量，对提高射线管的可靠性使用寿命、降低同等级下便携式射线源制造难度有重要意义。
发明内容
本发明的目的在于提供一种自屏蔽X射线管及其制作方法，以解决上述背景技术中提出的问题。
为实现上述目的，本发明提供如下技术方案：一种带自屏蔽X射线管，包括阳极组件、阴极组件、密封外壳、散热器，所述阳极组件与所述阴极组件分别通过阳极可伐连接件和阴极可伐连接件固定安装在所述密封外壳的两端，所述密封外壳的内部为高真空环境，所述散热器紧配固定连接在所述阳极组件的尾部，所述阳极组件工作中产生的热量传导给所述散热器进行散热。
优选的，所述阳极组件包括靶材、阳极头、阳极帽、窗口、阳极可伐连接件，所述靶材固定连接在所述阳极头顶部斜面的中心位置，靶面接受高速冲击的电子流轰击而产生X射线，所述阳极帽焊接在所述阳极头的前端，起到阻挡散射射线、屏蔽散射的二次电子及散热的作用，所述窗口固定在所述阳极帽上，用于过滤穿透的X射线中的二次电子，所述阳极头的尾端与所述阳极可伐连接件之间通过银钎焊接为一体。
优选的，所述阴极组件包括聚焦套筒、发射体、阴极可伐连接件、导电杆、阴极屏蔽板，所述聚焦套筒铆接装配在所述阴极可伐连接件上，使所述发射***于其灯丝槽的中心位置，用于引导电子流方向，所述导电杆通过玻璃烧结固定连接在所述阴极可伐连接件上，起到为所述发射体提供电位的作用，所述阴极可伐连接件作为所述阴极组件的基底，起到连接阴极各零件与所述密封外壳的作用，所述阴极屏蔽板固定在电子束反射路径上，位置包括但不限于聚焦套筒底部、阴极可伐连接件上端面或阴极可伐连接件下端面位置，起到屏蔽阴极端散射射线和部分二次电子的作用。
优选的，所述散热器包含一体式散热器和分离式散热器，其中分离式散热器包括钨环和底座，所述钨环通过紧配嵌套固定于所述底座的内部。
优选的，所述靶材材质包括但不限于钨、镍、铼、钼、银、铑、钯及其合金等。
优选的，所述阳极帽高衰减、难熔金属合金(如钨、钽等)作为基底，添加其它低饱和蒸汽压的金属材料复合处理而成，包括但不限于钨铁、钨铁镍等；或基底为以上复合材料，表面含其它镀层的材料；或为以上复合材料与其它材料嵌套的材料。
优选的，所述窗口材料采用铍、纯钛、钛合金中的一种。
优选的，所述发射体采用钨基材质，所述发射体与所述阴极可伐连接件的连接方式不限于点焊、紧配、螺纹固定。
优选的，所述聚焦套筒采用碳钢、合金钢、镍或镍基合金中的一种。
优选的，所述阴极屏蔽板高衰减、难熔金属合金(如钨、钽等)作为基底，添加其它低饱和蒸汽压的金属材料复合处理而成，包括但不限于钨铁、钨铁镍等；或基底为以上复合材料，表面含其它镀层的材料；或为以上复合材料与其它材料嵌套的材料。。
优选的，所述密封外壳采用玻璃壳、陶瓷壳、金属壳中的一种。
优选的，所述一体式散热器和分离式散热器底座的材质包括但不限于铝或铝合金、铜或铜合金等，所述分离式散热器钨环的材质包括但不限于纯钨、钨铜、钨铁镍或其他钨基、钽基的金属材料。
本发明提供一种带自屏蔽X射线管制作方法，包括如下步骤：
S1：通过铸造或者焊接的方式将所述靶材固定在所述无氧铜阳极头顶部斜面的中心位置；
S2、所述阳极帽通过焊接固定在所述阳极头上，焊接材料包括但不限于银铜焊料、金铜焊料或者其他添加活性金属钛、钯、镍等金属的银基焊料和金基焊料；
S3、所述窗口固定在阳极帽上，固定方式包括但不限于螺纹固定、铆、钉、变形挤压、焊接等机械物理化学方式；
S4、所述阳极可伐连接件一端通过银钎焊的方式固定在所述阳极头尾部 位置，另一端通过焊接或烧结的方式固定在所述密封外壳的一端；
S5、所述发射体通过点焊或螺纹装配的方式固定在所述阴极可伐连接件上，所述阴极可伐连接件通过焊接或烧结的方式固定在所述密封外壳的另一端；
S6、所述聚焦套筒通过螺纹装配的方式固定在所述阴极可伐连接件上，使所述发射***于其灯丝槽的中心位置；
S7、所述导电杆通过玻璃烧结或真空飞速连接固定在所述阴极可伐连接件上；
S8、阴极区域可选择添加所述阴极屏蔽板，位置为电子束反射路径上，包括但不限于所述聚焦套筒底部、所述阴极可伐连接件上端面或所述阴极可伐连接件下端面位置，连接方式包括但不限于螺纹固定、铆、钉、变形挤压、焊接等机械物理化学方式；
S9、散热器具体包括一体式散热器和分离式散热器，一体式散热器通过焊接或者紧配连接方式固定在阳极头尾部柄上，分离式散热器的钨环通过紧配嵌套固定在底座内部，然后通过焊接或者紧配连接方式固定在阳极头尾部柄上。
与现有技术相比，本发明的有益效果是：
该带自屏蔽X射线管及其制作方法，通过采用高衰减、难熔金属(钽、钨等)作为基底、添加高熔点、高衰减、低饱和蒸气压金属材料(如铁、镍等)的金属材质，制备阳极帽，该阳极帽不仅满足了屏蔽阳极散射射线和二次电子的目的，同时其材料成分的高熔点、低饱和蒸气压特性可使阳极帽提前真空高温去气彻底，零件残气含量低，可提升X射线管的可靠性和使用寿命，为优化屏蔽方式，本发明采用的阳极帽包含半包覆阳极头和全包覆阳极头两种结构，阴极区域可选择在电子束反射路径位置上添加阴极屏蔽板，散热器包含普通散热器和带屏蔽嵌套层钨环的两种结构，增加射线管固有的屏 蔽层面积，可以有效地减少射线源体屏蔽层厚度，减少射线源重量、降低同等级射线源向便携式方向发展的难度。
附图说明
图1为本发明剖视结构示意图；
图2为本发明半包覆结构阳极帽结构示意图；
图3为本发明全包覆结构阳极帽结构示意图；
图4为本发明阴极组件屏蔽结构方案1；
图5为本发明阴极组件屏蔽结构方案2；
图6为本发明阴极组件屏蔽结构方案3；
图7为本发明具有圆形窗口的阴极组件结构示意图；
图8为本发明具有矩形窗口的阳极组件结构示意图；
图9为本发明具有环形窗口的阳极组件结构示意图；
图10为本发明分离式散热器结构示意图；
图11为本发明一体式结构散热器结构示意图。
图中：1、阳极组件；2、阴极组件；3、密封外壳；4、散热器；11、靶材；12、阳极头；13、阳极帽；14、窗口；15、阳极可伐连接件；21、聚焦套筒；22、发射体；23、阴极可伐连接件；24、导电杆；25、阴极屏蔽板；41、钨环；42、底座。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
请参阅图1-11，本发明提供一种技术方案：一种自屏蔽X射线管，包括阳极组件1、阴极组件2、密封外壳3、散热器4，具体包括零件靶材11、阳 极头12、阳极帽13、窗口14、阳极可伐连接件15、聚焦套筒21、发射体22、阴极可伐连接件23、导电杆24、阴极屏蔽板25、钨环41、底座42，阳极组件1与阴极组件2分别通过阳极可伐连接件15和阴极可伐连接件23固定安装在密封外壳3的两端，连接方式不限于玻璃烧结、银钎焊、熔焊，密封外壳3的内部为高真空环境，散热器4紧配固定在阳极组件1的尾部，散热器4与阳极组件1之间的连接方式不限于紧配、螺纹连接、焊接，阳极组件1工作中产生的热量传导给散热器4进行散热，，阳极组件1包括靶材11、阳极头12、阳极帽13、窗口14、阳极可伐连接件15，靶材11固定在阳极头12顶部斜面的中心位置，阳极头12与靶材11采用无氧铜铸造方式或者焊接方式连接，其中，焊接工艺不限于熔焊、压力焊、钎焊，靶材11的靶面接受高速冲击的电子流轰击而产生X射线，阳极帽13固定在阳极头12的前端，阳极帽13起到阻挡散射射线、屏蔽散射的二次电子及散热的作用，窗口14固定在阳极帽13上，用于过滤穿透的X射线中的二次电子，阳极头12的尾端与阳极可伐连接件15之间通过银钎焊接为一体。阴极组件2包括聚焦套筒21、发射体22、阴极可伐连接件23、导电杆24、阴极屏蔽板25，聚焦套筒21螺纹装配在阴极可伐连接件23上，使发射体22位于其灯丝槽的中心位置，用于引导电子流方向，导电杆24通过玻璃烧结固定在阴极可伐连接件23上，起到为发射体22提供电位的作用，阴极可伐连接件23作为阴极组件2的基底，起到连接阴极各零部件与密封外壳3的作用，阴极屏蔽板25通过焊接或机械连接添加在阴极区域电子束反射路径上，可选择添加在聚焦套筒21底部、阴极可伐连接件23上端面或阴极可伐连接件23下端面位置，起到屏蔽阴极端散射射线和部分二次电子的作用；
分离式散热器4包括钨环41和底座42，钨环41通过紧配嵌套固定于底座42的内部，钨环41采用纯钨、钨铜、钨铁镍或其他钨基、钽基的金属材料；靶材11采用钨、镍、铼、钼、银、铑、钯及其合金等材质中的一种，阳 极帽13采用高衰减、难熔金属合金(钽、钨等)作为基底的金属材质，包括但不限于钨铁镍材质，或添加其他高衰减、低饱和蒸气压金属元素组成的钨、钽基底材质，或表面含镀层的钨基底材质，或外壳含钨、钽基底金属或合金的嵌套材料，窗口14材料采用铍、纯钛、钛合金中的一种，发射体22采用钨基材质，发射体22与阴极可伐连接件23的连接方式不限于点焊、紧配、螺纹固定，聚焦套筒21采用碳钢、合金钢、镍或镍基合金中的一种，密封外壳3采用玻璃壳、陶瓷壳、金属壳中的一种。
一种带自屏蔽X射线管制作方法，包括如下步骤：
S1：通过铸造或者焊接的方式将靶材11固定在无氧铜阳极头12顶部斜面的中心位置；
S2、阳极帽13通过焊接固定在阳极头12上；
S3、窗口14通过螺纹固定、铆、钉、变形挤压、焊接等机械物理化学方式固定在阳极帽13上；
S4、阳极可伐连接件15一端通过银钎焊的方式固定在阳极头12尾部位置，另一端通过焊接或烧结的方式固定在密封外壳3的一端；
S5、发射体22通过点焊或螺纹装配的方式固定在阴极可伐连接件23上，阴极可伐连接件23通过焊接或烧结的方式固定在密封外壳3的另一端；
S6、聚焦套筒21通过螺纹装配的方式固定在阴极可伐连接件23上，使发射体22位于其灯丝槽的中心位置；
S7、导电杆24通过玻璃烧结或真空飞速连接固定在阴极可伐连接件23上；
S8、阴极区域可选择添加阴极屏蔽板25，位置为电子束反射路径上，包括但不限于聚焦套筒21底部、阴极可伐连接件23上端面或阴极可伐连接件23下端面位置，可采用螺纹固定、铆、钉、变形挤压、焊接等机械物理化学方式；
S9、散热器4具体包括一体式散热器和分离式散热器，一体式散热器通过焊接或者紧配连接方式固定在阳极头12尾部柄上，分离式散热器的钨环41通过紧配嵌套固定在底座42内部，然后通过焊接或者紧配连接方式固定在阳极头12尾部柄上。
工作原理：首先通过铸造或者焊接的方式将靶材11固定在无氧铜阳极头12顶部斜面的中心位置，阳极帽13通过焊接固定在阳极头12上，窗口14通过螺纹固定、铆、钉、变形挤压、焊接等机械物理化学方式固定在阳极帽13上，阳极可伐连接件15一端通过银钎焊的方式固定在阳极头12尾部位置，另一端通过焊接或烧结的方式固定在密封外壳3的一端，发射体22通过点焊或螺纹装配的方式固定在阴极可伐连接件23上，阴极可伐连接件23通过焊接或烧结的方式固定在密封外壳3的另一端，聚焦套筒21通过螺纹装配的方式固定在阴极可伐连接件23上，使发射体22位于其灯丝槽的中心位置，导电杆24通过玻璃烧结或真空飞速连接固定在阴极可伐连接件23上，散热器4不限于一体式散热器4、分离式散热器4两种结构，一体式散热器4通过焊接或者紧配连接方式固定在阳极头12尾部柄上，分离式散热器4的钨环41通过紧配嵌套固定在底座42内部，然后通过焊接或者紧配连接方式固定在阳极头12尾部柄上，本发明采用高衰减、难熔金属合金(钽、钨等)作为基底的金属材质，包括但不限于钨铁镍材质，或添加其他高衰减、低饱和蒸气压金属元素组成的钨、钽基底材质，或表面含镀层的钨基底材质，或外壳含钨、钽基底金属或合金的嵌套材料来制备阳极帽13，该阳极帽13不仅满足了屏蔽阳极散射射线和二次电子的目的，同时其材料成分的高熔点、低饱和蒸气压特性可使阳极帽13提前真空高温去气彻底，零件残气含量低，可提升射线管的可靠性和使用寿命，为优化屏蔽方式，本发明采用的阳极帽13包含半包覆阳极头和全包覆阳极头两种结构，阴极区域可选择在电子束反射路径位置上添加阴极屏蔽板25，散热器4包含普通散热器4和带屏蔽嵌套层钨环41的两 种结构，增加射线管固有的屏蔽层面积，可以有效地减少射线源体屏蔽层厚度，减少射线源重量、降低同等级射线源向便携式方向发展的难度。
最后应当说明的是，以上内容仅用以说明本发明的技术方案，而非对本发明保护范围的限制，本领域的普通技术人员对本发明的技术方案进行的简单修改或者等同替换，均不脱离本发明技术方案的实质和范围。

Claims (13)

  1. 一种带自屏蔽X射线管，包括阳极组件(1)、阴极组件(2)、密封外壳(3)、散热器(4)，其特征在于：所述阳极组件(1)与所述阴极组件(2)分别通过阳极可伐连接件(15)和阴极可伐连接件(23)固定安装在所述密封外壳(3)的两端，所述密封外壳(3)的内部为高真空环境，所述散热器(4)紧配固定连接在所述阳极组件(1)的尾部，所述阳极组件(1)工作中产生的热量传导给所述散热器(4)进行散热。
  2. 根据权利要求1所述的一种带自屏蔽X射线管，其特征在于：所述阳极组件(1)包括靶材(11)、阳极头(12)、阳极帽(13)、窗口(14)、阳极可伐连接件(15)，所述靶材(11)固定连接在所述阳极头(12)顶部斜面的中心位置，靶材(11)的靶面接受高速冲击的电子流轰击产生X射线，所述阳极帽(13)焊接在在所述阳极头(12)的前端，起到阻挡散射射线、屏蔽散射的二次电子及散热的作用，所述窗口(14)固定在所述阳极帽(13)上，用于过滤穿透的X射线中的二次电子，所述阳极头(12)的尾端与所述阳极可伐连接件(15)之间通过银钎焊接为一体。
  3. 根据权利要求1所述的一种带自屏蔽X射线管，其特征在于：所述阴极组件(2)包括聚焦套筒(21)、发射体(22)、阴极可伐连接件(23)、导电杆(24)、阴极屏蔽板(25)，所述聚焦套筒(21)螺纹装配在所述阴极可伐连接件(23)上，且所述发射体(22)位于其灯丝槽的中心位置，所述导电杆(24)紧配固定连接在所述阴极可伐连接件(23)上，起到为所述发射体(22)提供电位的作用，所述阴极可伐连接件(23)作为所述阴极组件(2)的基底，起到连接阴极各零件与所述密封外壳(3)的作用，所述阴极屏蔽板(25)通过焊接或机械连接固定在电子束反射路径上，可选择添加在所述聚焦套筒(21)底部、所述阴极可伐连接件(23)上端面或所述阴极可伐连接件(23)下端面的位置，起到屏蔽阴极端散射射线和部分二次电子的作用。
  4. 根据权利要求1所述的一种带自屏蔽X射线管，其特征在于：所述散热器(4)包括钨环(41)和底座(42)，所述钨环(41)通过紧配嵌套固定于所述底座(42)的内部。
  5. 根据权利要求2所述的一种带自屏蔽X射线管，其特征在于：所述靶材(11)材质采用钨、镍、铼、钼、银、铑、钯中的一种；
  6. 根据权利要求2所述的一种带自屏蔽X射线管，其特征在于：所述阳极帽(13)采用高衰减、难熔金属合金作为基底。
  7. 根据权利要求2所述的一种带自屏蔽X射线管，其特征在于：所述窗口(14)材料采用铍、纯钛、钛合金中的一种。
  8. 根据权利要求3所述的一种带自屏蔽X射线管，其特征在于：所述发射体(22)采用钨基材质、储备式或冷高压发射材料。
  9. 根据权利要求3所述的一种带自屏蔽X射线管，其特征在于：所述聚焦套筒(21)采用碳钢、合金钢、镍或镍基合金中的一种。
  10. 根据权利要求3所述的一种带自屏蔽X射线管，其特征在于：所述阴极屏蔽板(25)采用高衰减、难熔金属合金(如钨、钽等)作为基底。
  11. 根据权利要求1所述的一种带自屏蔽X射线管，其特征在于：所述密封外壳(3)采用玻璃壳、陶瓷壳、金属壳中的一种。
  12. 根据权利要求4所述的一种带自屏蔽X射线管，其特征在于：所述散热器的材质采用铝或铝合金、铜或铜合金中的一种，所述分离式散热器钨环(42)的材质采用高衰减、难熔金属合金(如钨、钽等)作为基底。
  13. 根据权利要求1-12所述的一种带自屏蔽X射线管，其制作方法，包括如下步骤：
    S1：通过铸造或者焊接的方式将靶材(11)固定在无氧铜阳极头(12)顶部斜面的中心位置；
    S2、阳极帽(13)通过焊接固定在阳极头(12)上，焊接材料包括但不 限于银基、铜基、镍基和金基焊料或者其他添加活性金属钛、钯、镍等金属的银基、铜基、镍基和金基焊料；
    S3、窗口(14)固定在阳极帽(13)上，固定方式包括但不限于螺纹固定、铆、钉、变形挤压、焊接等机械物理化学方式；
    S4、阳极可伐连接件(15)一端通过银钎焊的方式固定在阳极头(12)尾部位置，另一端通过焊接或烧结的方式固定在密封外壳(3)的一端；
    S5、发射体(22)通过点焊或螺纹装配的方式固定在阴极可伐连接件(23)上，阴极可伐连接件(23)通过焊接或烧结的方式固定在密封外壳(3)的另一端；
    S6、聚焦套筒(21)通过螺纹装配的方式固定在阴极可伐连接件(23)上，使发射体(22)位于其发射体槽的中心位置；
    S7、导电杆(24)通过玻璃烧结或真空飞速连接固定在阴极可伐连接件(23)上；
    S8、阴极区域可选择添加阴极屏蔽板(25)，位置为电子束反射路径上，包括但不限于聚焦套筒(21)底部、阴极可伐连接件(23)上端面或阴极可伐连接件(23)下端面的位置，连接方式包括但不限于螺纹固定、铆、钉、变形挤压、焊接等机械物理化学方式；
    S9、散热器(4)具体包括一体式散热器和分离式散热器，一体式散热器通过焊接或者紧配连接方式固定在阳极头(12)尾部柄上，分离式散热器的钨环(41)通过紧配嵌套固定在底座(42)内部，然后通过焊接或者紧配连接方式固定在阳极头(12)尾部柄上。
PCT/CN2022/075922 2021-04-14 2022-02-10 一种带自屏蔽x射线管及其制作方法 WO2022218018A1 (zh)

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CN115985739B (zh) * 2023-03-22 2023-06-02 安徽科昂新材料科技有限公司 一种用于x射线管阳极的零滞后超导热体散热结构
CN116705578B (zh) * 2023-08-04 2023-10-31 上海超群检测科技股份有限公司 具有屏蔽耗散电子结构的阳极组件、x射线管及制造方法
CN116825594B (zh) * 2023-08-29 2023-11-17 上海超群检测科技股份有限公司 X射线管阳极和x射线管
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CN117596759B (zh) * 2024-01-19 2024-04-05 上海超群检测科技股份有限公司 X射线装置

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