WO2022201821A1 - トルクセンサ - Google Patents
トルクセンサ Download PDFInfo
- Publication number
- WO2022201821A1 WO2022201821A1 PCT/JP2022/002375 JP2022002375W WO2022201821A1 WO 2022201821 A1 WO2022201821 A1 WO 2022201821A1 JP 2022002375 W JP2022002375 W JP 2022002375W WO 2022201821 A1 WO2022201821 A1 WO 2022201821A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- strain
- contact
- torque sensor
- thin film
- generating body
- Prior art date
Links
- 239000010409 thin film Substances 0.000 claims description 74
- 239000000463 material Substances 0.000 claims description 7
- 230000000694 effects Effects 0.000 description 14
- 230000005540 biological transmission Effects 0.000 description 8
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 150000002739 metals Chemical class 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/02—Rotary-transmission dynamometers
- G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
- G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
- G01L3/108—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving resistance strain gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/02—Rotary-transmission dynamometers
- G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
- G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
Definitions
- Embodiments of the present invention relate to, for example, torque sensors provided at joints of a robot arm.
- the first structure and the second structure are connected by a plurality of third structures, and torque is detected by a thin film strain sensor provided between the first structure and the second structure (for example, see Patent Document 1).
- a thin-film strain sensor generally comprises an insulating film formed on a strain-generating body, and a thin-film resistor or thin-film electrode formed on the insulating film. The deformation of the strain generating body is detected as a change in the resistance value of the thin film resistor (see, for example, Patent Document 2).
- the strain-generating body of the thin-film strain sensor is fixed to the first structure and the second structure.
- a torque is applied between the first structure and the second structure, the first structure and the second structure move relative to each other, causing the first structure and the second structure of the strain generating body to move.
- Torque is detected by a plurality of thin film resistors arranged in the portion between. If the fixing force or rigidity of the strain body with respect to the first structure and the second structure is sufficiently large, even if the first structure and the second structure move relative to each other due to torque, the first strain body does not move. The torque does not affect the portions where the electrodes are arranged other than the portion located between the structure and the second structure.
- the embodiment of the present invention provides a torque sensor that can reduce the stress on the portion where the electrode of the strain generating body is arranged, and can prevent poor connection and disconnection.
- the torque sensor of this embodiment includes a first structure, a second structure arranged inside the first structure and concentrically with the first structure, the first structure and the second structure. a plurality of third structures connecting bodies; a first strain sensor and a second strain sensor fixed between the first structure and the second structure at positions other than the third structure; and each of the first strain sensor and the second strain sensor has a first end, a second end, and an intermediate portion between the first end and the second end , a rectangle having the first end fixed to the surface of the first structure, the middle part fixed to the surface of the second structure, and the second end positioned on the surface of the second structure.
- a shaped strain-generating body a thin-film resistor provided on a surface between the first end and the intermediate portion of the strain-generating body, and the second end and the intermediate portion of the strain-generating body.
- a thin film electrode provided on the surface of the strain body located between and electrically connected to the thin film resistor, provided on one of the second structure and the strain body, A contact portion that contacts a portion between the intermediate portion and the second end of the strain generating body or a contact portion that contacts a portion of the second structure.
- FIG. 2 is a plan view showing the torque sensor according to the first embodiment;
- FIG. The top view which shows an example of the strain sensor applied to 1st Embodiment.
- FIG. 4 is a perspective view showing a cross section taken along line IV-IV of FIG. 3; The figure which shows roughly the effect
- FIG. 7 is a perspective view showing a cross section along line VII-VII of FIG. 6; The perspective view which shows the principal part of the torque sensor which concerns on 3rd Embodiment.
- FIG. 9 is a perspective view showing a cross section along line IX-IX in FIG.
- FIG. 11 is a perspective view showing a cross section taken along line XI-XI of FIG. 10; The perspective view which shows the principal part of the torque sensor which concerns on 5th Embodiment.
- FIG. 13 is a perspective view showing a cross section along line XIII-XIII of FIG. 12; The perspective view which shows the principal part of the torque sensor which concerns on 6th Embodiment.
- FIG. 15 is a perspective view showing a cross section along line XV-XV of FIG. 14; The perspective view which shows the principal part of the torque sensor which concerns on 7th Embodiment.
- FIG. 17 is a perspective view showing a cross section along line XVII-XVII in FIG. 16;
- FIG. 1 shows a torque sensor 10 according to the first embodiment.
- the torque sensor 10 includes a first structure 11, a second structure 12, a plurality of third structures 13 as beams, a first strain sensor 14, a second strain sensor 15, a third strain sensor 16, and a fourth strain sensor. 17 are provided.
- An annular second structure 12 is concentrically arranged inside the annular first structure 11, and the first structure 11 and the second structure 12 are formed by a plurality of radially arranged third structures 13. Concatenated.
- the first structure 11 receives torque, for example, and the second structure 12 outputs torque, for example.
- the first structure 11, the second structure 12, and the plurality of third structures 13 are made of metal, for example. It is also possible to use other materials.
- a first strain sensor 14 , a second strain sensor 15 , a third strain sensor 16 and a fourth strain sensor 17 are connected between the first structure 11 and the second structure 12 . These sensors are arranged 90° apart from each other.
- the number of strain sensors is not limited to four, and may be two or three, for example. Since the configurations of the first strain sensor 14, the second strain sensor 15, the third strain sensor 16, and the fourth strain sensor 17 are the same, only the configuration of the first strain sensor 14 will be described.
- FIG. 2 shows the first strain sensor 14 in an enlarged manner.
- the first strain sensor 14 includes a strain generating body 14a, thin film resistors 14b and 14c, a plurality of thin film wirings 14d, 14e, 14f and 14g, and thin film electrodes 14h, 14i and 14j.
- the strain-generating body 14a is made of, for example, a rectangular elastic body (metal) such as stainless steel (SUS).
- metal such as stainless steel (SUS).
- the shape and material of the strain generating body 14a are not limited to this, and may be any material that can be welded or brazed, such as ceramics (for example, zirconia whose coefficient of linear expansion is close to that of SUS).
- the strain generating body 14a includes thin film resistors 14b and 14c, thin film wirings 14d, 14e and 14f, thin film electrodes 14h, 14i and 14j, first fixed portions C1 and C2, second fixed portions C3 and C4, a transmission portion 14k, and and an electrode placement region 14l.
- the number of thin film resistors is not limited to two, and may be four, for example. The number of thin film resistors and the number of strain sensors can be changed according to the configuration of the bridge circuit composed of resistors.
- the first fixing portions C1 and C2 are provided at both ends of the strain body 14a in the width direction at the first ends in the longitudinal direction of the strain body 14a.
- the second fixing portions C3 and C4 are provided at substantially the middle portion of the strain body 14a in the longitudinal direction and at both ends of the strain body 14a in the width direction.
- the transmission portion 14k is provided between the first fixing portions C1, C2 and the second fixing portions C3, C4. , C4.
- the first fixing portions C1 and C2 are portions that are fixed to the first structure 11 and transmit force between the first structure 11 and the strain generating body 14a.
- the second fixing portions C3 and C4 are portions that are fixed to the second structure 12 of the torque sensor and transmit force between the second structure 12 and the strain generating body 14a.
- the method of fixing the first fixing parts C1, C2 and the first structure 11 and the method of fixing the second fixing parts C3, C4 and the second structure 12 are welding or brazing, for example.
- the circle marks shown as the first fixing parts C1, C2 and the second fixing parts C3, C4 in FIGS. 1 and 2 indicate the joining positions (joining areas).
- a dashed line (straight line) connecting two circles indicates the range of the transmission portion 14k for convenience.
- the transmission portion 14k is a portion that transmits force between the first fixing portions C1, C2 and the second fixing portions C3, C4. It is a region that deforms according to the applied force.
- the thin-film resistors 14b, 14c are arranged in the vicinity of the first fixed parts C1, C2 within the transmission part 14k, and convert the deformation of the transmission part 14k into electrical signals.
- the thin-film electrodes 14h, 14i, 14j are arranged near the other end of the strain-generating body 14a in the electrode arrangement region 14l other than the first fixed portions C1, C2, the second fixed portions C3, C4, and the transmission portion 14k. .
- the thin film electrodes 14h and 14i are connected to the thin film resistor 14b by thin film wirings 14d and 14e, and the thin film electrodes 14i and 14j are connected to the thin film resistor 14c by thin film wirings 14f and 14g.
- the thin film electrode 14i is an electrode common to the thin film resistors 14b and 14c.
- the number of thin film resistors, the number of thin film electrodes, and the number of wirings connecting the thin film resistors and the thin film electrodes are not limited to these, and can be modified.
- the first structure 11 has a first recess 11a for housing the strain body 14a
- the second structure 12 has a second recess 12a for housing the strain body 14a.
- the first recess 11a has a first bottom surface 11b
- the second recess 12a has a second bottom surface 12b with the same height as the first bottom surface 11b.
- the 1st recessed part 11a and the 2nd recessed part 12a are not essential structures, and it is also possible to omit.
- the strain body 14a is joined to the first bottom surface 11b of the first structure 11 at the first fixing portions C1 and C2, and is joined to the second bottom surface 12b of the second structure 12 at the second fixing portions C3 and C4. be done.
- the second recess 12a of the second structure 12 has a third bottom surface 12c and a stepped portion 12d.
- the third bottom surface 12c is lower than the second bottom surface 12b and corresponds to the electrode placement region 14l of the strain generating body 14a.
- the stepped portion 12d is located between the second bottom surface 12b and the third bottom surface 12c as the contact portion with the strain generating body 14a, and this position is near the second fixing portions C3 and C4.
- the gap is, for example, 0.05 mm or less. Therefore, no frictional force is generated between the back surface of the electrode arrangement region 14l of the strain body 14a and the third bottom surface 12c.
- FIG. 5 shows the action of the first embodiment, and shows a case where force is transmitted between the first structure 11 and the second structure 12.
- the electrode placement region 14l is not deformed. Therefore, the force from the second structure 12 is not transmitted to the thin-film electrodes 14h, 14i, 14j arranged in the electrode arrangement region 14l and the wires bonded to the thin-film electrodes 14h, 14i, 14j, and damage to them is prevented. can be prevented.
- the entire back surface of the electrode arrangement region 14l is in contact with the surface of the second structure 12 as in the conventional art, the frictional force between the electrode arrangement region 14l and the second structure 12 causes the electrode arrangement region 14l to , receive forces from the second structure 12 . Therefore, when the fixing force or rigidity of the second fixing portions C3 and C4 is weak within the allowable range, the electrode arrangement area 14l is deformed as indicated by the broken line in FIG. Therefore, the thin film electrodes 14h, 14i, 14j arranged in the electrode arrangement region 14l and the wires bonded to the thin film electrodes 14h, 14i, 14j may receive force and be damaged.
- the gap between the rear surface of the strain-generating body 14a and the third bottom surface 12c is, for example, 0.05 mm or less, which is extremely narrow. Therefore, when wires (not shown) are bonded to the thin-film electrodes 14h, 14i, and 14j, the strain-generating body 14a can bend and come into contact with the third bottom surface 12c. Therefore, it is possible to bond the wires to the thin film electrodes 14h, 14i, 14j with sufficient strength.
- the second structural body 12 has the second bottom surface 12b as the contact portion, and the strain body 14a is the second bottom surface 12b between the second fixing portions C3, C4 and the step portion 12d.
- the strain body 14a is the second bottom surface 12b between the second fixing portions C3, C4 and the step portion 12d.
- (Second embodiment) 6 and 7 show a second embodiment.
- the second structure 12 has a step portion 12d as a boundary with the contact portion, and the electrode arrangement region 14l of the strain body 14a is separated from the third bottom surface 12c of the second structure 12.
- the second structure 12 further has a third recess 21 inside the second recess 12a, and the edge of the third recess 21 extends in the longitudinal direction of the strain body 14a.
- the two positioned second bottom surfaces 12b function as contact portions.
- the third concave portion 21 is arranged corresponding to the central portion of the electrode arrangement region 14l of the strain body 14a. Therefore, most of the electrode arrangement region 14l faces the third recess 21 and does not come into contact with the second bottom surface 12b.
- One of the two divided second bottom surfaces 12b is contacted, and the second end of the strain generating body 14a is brought into contact with the other of the two divided second bottom surfaces 12b.
- the strain generating body 14a moves to the second A slight frictional force is generated between the portion between the fixing portions C3, C4 and the third recess 21, the back surface of the second end portion of the strain body 14a, and the second bottom surface 12b.
- most of the electrode placement region 14l does not receive the force from the second structure 12 because no friction occurs, and the electrode placement region 14l hardly deforms.
- the force from the second structure 12 is not transmitted to the thin film electrodes 14h, 14i, 14j arranged in the electrode arrangement region 14l and the wires (not shown) bonded to the thin film electrodes 14h, 14i, 14j. damage can be prevented.
- the strain body 14a is sufficiently held when wires (not shown) are bonded to the thin film electrodes 14h, 14i, and 14j. can do. Therefore, it is possible to bond the wires to the thin film electrodes 14h, 14i, 14j with sufficient strength.
- FIG. 8 and 9 show a third embodiment.
- the strain body 14a has its second end arranged on the second bottom surface 12b of the second recess 12a.
- the second structure 12 has grooves 31 along the longitudinal direction of the strain body 14a, and both sides of the grooves 31 are in contact with both sides of the strain body 14a in the longitudinal direction. It functions as a contact part to
- a groove 31 is formed in the second bottom surface of the second structure 12 along the radial direction of the second structure 12 from the vicinity of the second fixing portions C3 and C4.
- the width of the groove 31 is narrower than the width of the strain generating body 14a. Therefore, both sides along the longitudinal direction of the strain-generating body 14a are in contact with the second bottom surfaces 12b on both sides of the groove 31, and most of the strain-generating body 14a faces the groove 31 and does not contact the second bottom surface 12b.
- the strain generating body 14a moves to the second A slight frictional force is generated between the portion between the fixed portions C3, C4 and the groove 31, the rear surfaces on both sides of the strain generating body 14a, and the second bottom surface 12b.
- most of the electrode placement region 14l does not receive the force from the second structure 12 because no friction occurs, and the electrode placement region 14l hardly deforms.
- the force from the second structure 12 is not transmitted to the thin-film electrodes 14h, 14i, 14j arranged in the electrode arrangement region 14l and the wires bonded to the thin-film electrodes 14h, 14i, 14j, and damage to them is prevented. can be prevented.
- the strain body 14a Since both sides of the strain body 14a are arranged on the second bottom surface 12b, the strain body 14a can be sufficiently held when wires (not shown) are bonded to the thin film electrodes 14h, 14i, and 14j. can. Therefore, it is possible to bond the wires to the thin film electrodes 14h, 14i, 14j with sufficient strength.
- (Fourth embodiment) 10 and 11 show a fourth embodiment.
- both sides of the strain body 14a are arranged on the second bottom surface 12b.
- the fourth embodiment is a modification of the first embodiment, and includes a first projection 41 as a contact portion that makes point contact in the vicinity of the second end of the strain body 14a. .
- the first projection 41 is provided on the third bottom surface 12c formed by the stepped portion 12d.
- the first protrusion 41 is, for example, a knock pin, but is not limited to this.
- a first end of the first protrusion 41 is inserted into the second structure 12, and the surface of the second end is, for example, processed into a spherical shape, and points to the back surface of the electrode arrangement region 14l of the strain body 14a. be contacted.
- the point contact position corresponds to, for example, the position where the thin film electrode 14i in the electrode arrangement region 14l is arranged.
- the strain generating body 14a moves to the second A slight frictional force is generated between the portion between the fixed portions C3, C4 and the stepped portion 12d and the first protrusion 41 that is in point contact with the rear surface of the strain generating body 14a.
- most of the electrode placement region 14l does not receive the force from the second structure 12 because no friction occurs, and the electrode placement region 14l hardly deforms.
- the force from the second structure 12 is not transmitted to the thin-film electrodes 14h, 14i, 14j arranged in the electrode arrangement region 14l and the wires bonded to the thin-film electrodes 14h, 14i, 14j, and damage to them is prevented. can be prevented.
- the strain body 14a since the strain body 14a is supported by the first protrusions 41, the strain body 14a can be sufficiently held when wires (not shown) are bonded to the thin film electrodes 14h, 14i, and 14j. Therefore, it is possible to bond the wires to the thin film electrodes 14h, 14i, 14j with sufficient strength.
- (Fifth embodiment) 12 and 13 show a fifth embodiment.
- the rear surface of the strain generating body 14a is in point contact with the first protrusion 41.
- the fifth embodiment has a second protrusion 51 as a contact portion that makes line contact with the vicinity of the second end of the strain body 14a.
- the second projection 51 is, for example, a cylinder.
- a third bottom surface 12c formed by the stepped portion 12d of the second structure 12 is provided with a groove 12e in a direction crossing the longitudinal direction of the strain generating body 14a.
- the second projection 51 is accommodated in the groove 12e in a direction in which the axis of the cylinder intersects the longitudinal direction of the strain body 14a.
- the depth of the groove 12e is approximately equal to the radius of the cylinder, and approximately half of the second projection 51 of the cylinder protrudes from the groove 12e and is in line contact with the back surface of the electrode arrangement region 14l of the strain generating body 14a.
- the line contact positions are along the positions where the thin film electrodes 14h, 14i and 14j of the electrode arrangement region 14l are arranged, for example.
- the strain generating body 14a moves to the second A slight frictional force is generated between the portion between the fixed portions C3, C4 and the stepped portion 12d and the second protrusion 51 that is in line contact with the back surface of the strain generating body 14a.
- most of the electrode placement region 14l does not receive the force from the second structure 12 because no friction occurs, and the electrode placement region 14l hardly deforms.
- the force from the second structure 12 is not transmitted to the thin-film electrodes 14h, 14i, 14j arranged in the electrode arrangement region 14l and the wires bonded to the thin-film electrodes 14h, 14i, 14j, and damage to them is prevented. can be prevented.
- the strain body 14a since the strain body 14a is supported by the second protrusions 51, the strain body 14a can be sufficiently held when wires (not shown) are bonded to the thin film electrodes 14h, 14i, and 14j. Therefore, it is possible to bond the wires to the thin film electrodes 14h, 14i, 14j with sufficient strength.
- (Sixth embodiment) 14 and 15 show a sixth embodiment.
- the shape of the second projection 51 was a cylinder.
- the sixth embodiment has a third projection 61 as a contact portion made of a material with a low coefficient of friction near the second end of the strain body 14a.
- the shape of the third protrusion 61 is, for example, a quadrangular prism.
- a quadrangular prismatic third projection 61 made of a material with a low coefficient of friction is accommodated in the groove 12e with its axis intersecting the longitudinal direction of the strain generating body 14a.
- the depth of the groove 12e is approximately half the length of one side of the quadrangular prism, and approximately half of the third projection 61 of the quadrangular prism protrudes from the groove 12e and faces the back surface of the electrode arrangement region 14l of the strain generating body 14a. be contacted.
- the surface contact positions are along the positions where the thin film electrodes 14h, 14i and 14j of the electrode arrangement region 14l are arranged, for example.
- Examples of materials with a low coefficient of friction include resins such as fluorine resin (polytetrafluoroethylene (PTFE)) and nylon resin (polyamide (PA)), metals plated with electroless nickel, and diamond-like carbon (DLC). ) It is possible to apply coated metals, oil-impregnated sintered metals.
- the oil-impregnated sintered metal is, for example, a porous sintered body made of a copper-based metal containing graphite fine powder and impregnated with oil.
- the strain generating body 14a moves to the second A slight frictional force is generated between the portion between the fixed portions C3, C4 and the groove 31 and the third projection 61 with a low friction coefficient that is in surface contact with the back surface of the strain generating body 14a.
- most of the electrode placement region 14l does not receive the force from the second structure 12 because no friction occurs, and the electrode placement region 14l hardly deforms.
- the force from the second structure 12 is not transmitted to the thin-film electrodes 14h, 14i, 14j arranged in the electrode arrangement region 14l and the wires bonded to the thin-film electrodes 14h, 14i, 14j, and damage to them is prevented. can be prevented.
- the strain body 14a since the strain body 14a is supported by the third projections 61 which are in surface contact with each other, the strain body 14a can be sufficiently held when wires (not shown) are bonded to the thin film electrodes 14h, 14i, and 14j. can be done. Therefore, it is possible to bond the wires to the thin film electrodes 14h, 14i, 14j with sufficient strength.
- the strain body 14a is supported by the third projections 61 that are in surface contact with the strain body 14a, so that the strain body 14a can be held more stably. be.
- (Seventh embodiment) 16 and 17 show the seventh embodiment.
- the configuration of the second structure 12 is improved in order to reduce the frictional force between the strain generating body 14a and the second structure 12.
- the structure of the strain generating body 14a is improved. Specifically, the electrode arrangement region 14l of the strain body 14a is arranged in contact with the flat second bottom surface 12b, and the strain body 14a has a constricted portion 71 in a part of the electrode arrangement region 14l. there is The constricted portions 71 are provided, for example, between the second fixed portions C3, C4 and the thin film electrodes 14h, 14i, 14j. The constricted portion 71 has a smaller area than the other portions of the electrode placement region 14l. Therefore, the contact area between the electrode arrangement region 14l and the second bottom surface 12b of the second structure 12 is reduced.
- the electrode arrangement region of the strain generating body 14a A slight frictional force is generated between 14 l and the second bottom surface 12 b of the second structure 12 .
- the constricted portion 71 reduces the frictional force compared to the case where the constricted portion 71 is not present.
- the width of the constricted portion 71 is narrower than the width of the other portion of the electrode arrangement region 14l, this portion can be deformed. Therefore, the constricted portion 71 is deformed by the frictional force, and deformation of the electrode arrangement region 14l is prevented.
- the force from the second structure 12 is not transmitted to the thin-film electrodes 14h, 14i, 14j arranged in the electrode arrangement region 14l and the wires bonded to the thin-film electrodes 14h, 14i, 14j, and damage to them is prevented. can be prevented.
- the electrode placement region 14l since the electrode placement region 14l is supported by the second bottom surface 12b, the electrode placement region 14l can be sufficiently held when bonding wires (not shown) to the thin film electrodes 14h, 14i, and 14j. Therefore, it is possible to bond the wires to the thin film electrodes 14h, 14i, 14j with sufficient strength.
- the present invention is not limited to the above-described embodiments as they are, and can be embodied by modifying the constituent elements without departing from the gist of the present invention at the implementation stage.
- various inventions can be formed by appropriate combinations of the plurality of constituent elements disclosed in the above embodiments. For example, some components may be omitted from all components shown in the embodiments. Furthermore, components across different embodiments may be combined as appropriate.
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Abstract
Description
図1は、第1実施形態に係るトルクセンサ10を示している。
トルクセンサ10は、第1構造体11、第2構造体12、梁としての複数の第3構造体13、第1歪センサ14、第2歪センサ15、第3歪センサ16、第4歪センサ17を具備している。
第1歪センサ14は、起歪体14a、薄膜抵抗体14b、14c、複数の薄膜配線14d、14e、14f、14g、薄膜電極14h、14i、14jを具備している。
第1構造体11は、起歪体14aを収容するための第1凹部11aを有し、第2構造体12は、起歪体14aを収容するための第2凹部12aを有している。第1凹部11aは第1底面11bを有し、第2凹部12aは、第1底面11bと同じ高さの第2底面12bを有している。第1凹部11a及び第2凹部12aは、必須の構成ではなく、省略することも可能である。
上記第1実施形態によれば、第2構造体12は、接触部としての第2底面12bを有し、起歪体14aは、第2固定部C3、C4と段部12dとの間の第2底面12bに接触され、起歪体14aの電極配置領域14lの裏面と第3底面12cとの間には隙間がある。このため、第1構造体11と第2構造体12との間に力が伝達された場合において、起歪体14aの電極配置領域14lは、第2構造体12からの力を受けない。したがって、第2固定部C3、C4の固定力又は剛性が許容範囲内で弱い場合においても、電極配置領域14lの変形を防止でき、電極配置領域14lに配置された薄膜電極14h、14i、14jの破損を防止できる。
図6、図7は、第2実施形態を示している。第1実施形態において、第2構造体12は、接触部との境界としての段部12dを有し、起歪体14aの電極配置領域14lは、第2構造体12の第3底面12cから離れていた。
第2実施形態によっても、第1実施形態と同様の効果を得ることができる。しかも、第2実施形態によれば、起歪体14aの第2端部が第2凹部12aの第2底面12b上に配置されているため、起歪体14aを安定に保持することが可能である。
図8、図9は、第3実施形態を示している。第2実施形態において、起歪体14aは、その第2端部が第2凹部12aの第2底面12bの上に配置されている。
これに対して、第3実施形態において、第2構造体12は、起歪体14aの長手方向に沿った溝31を有し、溝31の両側が起歪体14aの長手方向の両側に接触する接触部として機能する。
第3実施形態によっても、第1実施形態と同様の効果を得ることができる。しかも、第3実施形態によれば、起歪体14aの両側が第2底面12b上に配置されているため、起歪体14aを安定に保持することが可能である。
図10、図11は、第4実施形態を示している。第3実施形態は、起歪体14aの両側が第2底面12b上に配置されていた。
これに対して、第4実施形態は、第1実施形態を変形するものであり、起歪体14aの第2端部の近傍に点接触する接触部としての第1突起41を具備している。
第4実施形態によっても、第1実施形態と同様の効果を得ることができる。しかも、第4実施形態によれば、起歪体14aは、第1突起41により支えられているため、起歪体14aを安定に保持することが可能である。
図12、図13は、第5実施形態を示している。第4実施形態において、起歪体14aの裏面は、第1突起41に点接触されていた。
これに対して、第5実施形態は、起歪体14aの第2端部の近傍に線接触する接触部としての第2突起51を具備している。
第5実施形態によっても、第1実施形態と同様の効果を得ることができる。しかも、第5実施形態によれば、起歪体14aは、起歪体14aに線接触する第2突起51により支えられているため、起歪体14aをより安定に保持することが可能である。
図14、図15は、第6実施形態を示している。第5実施形態において、第2突起51の形状は円柱であった。
これに対して、第6実施形態は、起歪体14aの第2端部の近傍に低摩擦係数の材料により形成された接触部としての第3突起61を具備している。第3突起61の形状は、例えば四角柱である。
第6実施形態によっても、第1実施形態と同様の効果を得ることができる。しかも、第6実施形態によれば、起歪体14aは、起歪体14aに面接触する第3突起61により支えられているため、起歪体14aをより一層安定に保持することが可能である。
図16、図17は、第7実施形態を示している。上記第1乃至第6実施形態は、起歪体14aと第2構造体12との摩擦力を低減させるため、第2構造体12側の構成を改良した。
具体的には、起歪体14aの電極配置領域14lは、平坦な第2底面12bに接触して配置され、起歪体14aは、電極配置領域14lの一部にくびれ部71を有している。くびれ部71は、例えば第2固定部C3、C4と薄膜電極14h、14i、14jとの間に設けられる。くびれ部71は、電極配置領域14lの他の部分より狭い面積を有している。このため、電極配置領域14lと第2構造体12の第2底面12bとの接触面積が減少されている。
第7実施形態によっても、第1実施形態と同様の効果を得ることができる。しかも、第7実施形態によれば、くびれ部71が変形することにより、電極配置領域14lに配置された薄膜電極14h、14i、14jや、薄膜電極14h、14i、14jにボンディングされたワイヤへ第2構造体12からの力が伝達されることを防止できる。したがって、これらの破損をより一層防止することが可能である。
Claims (8)
- 第1構造体と、
前記第1構造体の内側に前記第1構造体と同心状に配置された第2構造体と、
前記第1構造体と前記第2構造体を連結する複数の第3構造体と、
前記第3構造体以外の位置で前記第1構造体と前記第2構造体との間に固定された第1歪みセンサ及び第2歪センサと、を具備し、
前記第1歪みセンサ及び第2歪センサのそれぞれは、
第1端部と、第2端部と、前記第1端部と前記第2端部との間の中間部とを有し、前記第1端部が前記第1構造体の表面に固定され、前記中間部が前記第2構造体の表面に固定され、前記第2端部が前記第2構造体の表面に位置する矩形状の起歪体と、
前記起歪体の前記第1端部と前記中間部との間の表面に設けられた薄膜抵抗体と、
前記起歪体の前記第2端部と前記中間部との間に位置する前記起歪体の表面に設けられ、前記薄膜抵抗体に電気的に接続された薄膜電極と、を具備し、
前記第2構造体と前記起歪体の一方に設けられ、前記起歪体の前記中間部と前記第2端部との間の一部分に接触する接触部、又は前記第2構造体の一部に接触する接触部を具備することを特徴とするトルクセンサ。 - 前記第2構造体は、前記起歪体の前記中間部の近傍に対応して設けられた前記接触部としての段部を具備することを特徴とする請求項1記載のトルクセンサ。
- 前記第2構造体は、前記起歪体の前記中間部と前記第2端部との間に対応して設けられた凹部を具備し、前記凹部の縁部が前記接触部であることを特徴とする請求項1記載のトルクセンサ。
- 前記第2構造体は、前記起歪体の長手方向に沿った溝を具備し、前記溝の長手方向に沿った両側が前記起歪体の長手方向の両側に接触する前記接触部であることを特徴とする請求項1記載のトルクセンサ。
- 前記第2構造体は、前記起歪体の前記第2端部の近傍と対応する位置に、前記起歪体に点接触する前記接触部としての第1突起を具備することを特徴とする請求項1記載のトルクセンサ。
- 前記第2構造体は、前記起歪体の前記第2端部の近傍と対応する位置に、前記起歪体に線接触する前記接触部としての第2突起を具備することを特徴とする請求項1記載のトルクセンサ。
- 前記第2構造体は、前記起歪体の前記第2端部の近傍と対応する位置に、前記起歪体に接触する低摩擦係数の材料により形成された接触部としての第3突起を具備することを特徴とする請求項1記載のトルクセンサ。
- 前記起歪体の前記中間部と前記第2端部は、前記第2構造体の平坦な面に接触して配置され、前記起歪体は、前記中間部と前記薄膜電極の間に幅の狭いくびれ部を有することを特徴とする請求項1記載のトルクセンサ。
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Citations (6)
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JPS63183526U (ja) * | 1987-05-18 | 1988-11-25 | ||
WO2009084539A1 (ja) * | 2007-12-27 | 2009-07-09 | Alps Electric Co., Ltd. | 荷重センサ |
WO2010088922A1 (en) * | 2009-02-06 | 2010-08-12 | Abb Ag | Set of multiaxial force and torque sensor and assembling method |
JP2018091813A (ja) | 2016-12-07 | 2018-06-14 | 日本電産コパル電子株式会社 | トルクセンサ |
JP2018132312A (ja) | 2017-02-13 | 2018-08-23 | 日本電産コパル電子株式会社 | 薄膜歪センサとそれを用いたトルクセンサ |
JP2018179945A (ja) * | 2017-04-21 | 2018-11-15 | 日本電産コパル電子株式会社 | トルクセンサ |
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Publication number | Priority date | Publication date | Assignee | Title |
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JPS63183526U (ja) * | 1987-05-18 | 1988-11-25 | ||
WO2009084539A1 (ja) * | 2007-12-27 | 2009-07-09 | Alps Electric Co., Ltd. | 荷重センサ |
WO2010088922A1 (en) * | 2009-02-06 | 2010-08-12 | Abb Ag | Set of multiaxial force and torque sensor and assembling method |
JP2018091813A (ja) | 2016-12-07 | 2018-06-14 | 日本電産コパル電子株式会社 | トルクセンサ |
JP2018132312A (ja) | 2017-02-13 | 2018-08-23 | 日本電産コパル電子株式会社 | 薄膜歪センサとそれを用いたトルクセンサ |
JP2018179945A (ja) * | 2017-04-21 | 2018-11-15 | 日本電産コパル電子株式会社 | トルクセンサ |
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