WO2022138674A1 - 感光性樹脂組成物、硬化物、層間絶縁膜、カバーコート層、表面保護膜及び電子部品 - Google Patents
感光性樹脂組成物、硬化物、層間絶縁膜、カバーコート層、表面保護膜及び電子部品 Download PDFInfo
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- WO2022138674A1 WO2022138674A1 PCT/JP2021/047425 JP2021047425W WO2022138674A1 WO 2022138674 A1 WO2022138674 A1 WO 2022138674A1 JP 2021047425 W JP2021047425 W JP 2021047425W WO 2022138674 A1 WO2022138674 A1 WO 2022138674A1
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- photosensitive resin
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- 125000000524 functional group Chemical group 0.000 description 4
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- KBJFYLLAMSZSOG-UHFFFAOYSA-N n-(3-trimethoxysilylpropyl)aniline Chemical compound CO[Si](OC)(OC)CCCNC1=CC=CC=C1 KBJFYLLAMSZSOG-UHFFFAOYSA-N 0.000 description 1
- 125000006606 n-butoxy group Chemical group 0.000 description 1
- 125000003506 n-propoxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 1
- OBKARQMATMRWQZ-UHFFFAOYSA-N naphthalene-1,2,5,6-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C=CC2=C(C(O)=O)C(C(=O)O)=CC=C21 OBKARQMATMRWQZ-UHFFFAOYSA-N 0.000 description 1
- YTVNOVQHSGMMOV-UHFFFAOYSA-N naphthalenetetracarboxylic dianhydride Chemical compound C1=CC(C(=O)OC2=O)=C3C2=CC=C2C(=O)OC(=O)C1=C32 YTVNOVQHSGMMOV-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- XKLJHFLUAHKGGU-UHFFFAOYSA-N nitrous amide Chemical class ON=N XKLJHFLUAHKGGU-UHFFFAOYSA-N 0.000 description 1
- SXJVFQLYZSNZBT-UHFFFAOYSA-N nonane-1,9-diamine Chemical compound NCCCCCCCCCN SXJVFQLYZSNZBT-UHFFFAOYSA-N 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- WKGDNXBDNLZSKC-UHFFFAOYSA-N oxido(phenyl)phosphanium Chemical compound O=[PH2]c1ccccc1 WKGDNXBDNLZSKC-UHFFFAOYSA-N 0.000 description 1
- 125000005740 oxycarbonyl group Chemical group [*:1]OC([*:2])=O 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- 125000004817 pentamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical group C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 1
- 229950000688 phenothiazine Drugs 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- CLYVDMAATCIVBF-UHFFFAOYSA-N pigment red 224 Chemical compound C=12C3=CC=C(C(OC4=O)=O)C2=C4C=CC=1C1=CC=C2C(=O)OC(=O)C4=CC=C3C1=C42 CLYVDMAATCIVBF-UHFFFAOYSA-N 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- QMYDVDBERNLWKB-UHFFFAOYSA-N propane-1,2-diol;hydrate Chemical compound O.CC(O)CO QMYDVDBERNLWKB-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- JRDBISOHUUQXHE-UHFFFAOYSA-N pyridine-2,3,5,6-tetracarboxylic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)N=C1C(O)=O JRDBISOHUUQXHE-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002516 radical scavenger Substances 0.000 description 1
- 238000004151 rapid thermal annealing Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229960001755 resorcinol Drugs 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- HXJUTPCZVOIRIF-UHFFFAOYSA-N sulfolane Chemical compound O=S1(=O)CCCC1 HXJUTPCZVOIRIF-UHFFFAOYSA-N 0.000 description 1
- 150000003457 sulfones Chemical class 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- LRBQNJMCXXYXIU-NRMVVENXSA-N tannic acid Chemical compound OC1=C(O)C(O)=CC(C(=O)OC=2C(=C(O)C=C(C=2)C(=O)OC[C@@H]2[C@H]([C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)O2)OC(=O)C=2C=C(OC(=O)C=3C=C(O)C(O)=C(O)C=3)C(O)=C(O)C=2)O)=C1 LRBQNJMCXXYXIU-NRMVVENXSA-N 0.000 description 1
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- 235000015523 tannic acid Nutrition 0.000 description 1
- 229920002258 tannic acid Polymers 0.000 description 1
- 150000000000 tetracarboxylic acids Chemical class 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- 150000003536 tetrazoles Chemical class 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- KLNPWTHGTVSSEU-UHFFFAOYSA-N undecane-1,11-diamine Chemical compound NCCCCCCCCCCCN KLNPWTHGTVSSEU-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
Definitions
- the present disclosure relates to a photosensitive resin composition, a cured product, an interlayer insulating film, a cover coat layer, a surface protective film, and electronic components.
- a protective film using such a cured film of polyimide resin is obtained by heating and curing a resin film formed by applying a polyimide precursor or a resin composition containing a polyimide precursor on a substrate and drying it. can get.
- NMP N-methyl-2-pyrrolidone
- the present disclosure has been made in view of the above-mentioned conventional circumstances, and one embodiment of the present disclosure includes a photosensitive resin composition containing an organic solvent other than NMP and having excellent photosensitive characteristics, and this photosensitive resin composition. It is an object of the present invention to provide a cured product, an interlayer insulating film, a cover coat layer, a surface protective film, and an electronic component using the above.
- a polyimide precursor having a polymerizable unsaturated bond, a photopolymerization initiator, and a solvent are contained.
- ⁇ 3> The photosensitive resin composition according to ⁇ 1>, wherein the proportion of N-ethyl-2-pyrrolidone in the solvent is 50% by mass or more.
- ⁇ 4> The photosensitive resin composition according to ⁇ 1>, wherein the ratio of 1,3-dimethyl-2-imidazolidinone to the solvent is 50% by mass or more.
- ⁇ 5> The photosensitive resin composition according to ⁇ 1>, wherein the proportion of tetramethylurea in the solvent is 50% by mass or more.
- ⁇ 6> The photosensitive resin composition according to any one of ⁇ 1> to ⁇ 5>, wherein the polyimide precursor has a structural unit represented by the following general formula (6).
- R 6 and R 7 are independently represented by hydrogen atoms and the following general formula (7). Is a group or an aliphatic hydrocarbon group having 1 to 4 carbon atoms, and at least one of R 6 and R 7 is a group represented by the following general formula (7).
- R 8 to R 10 each independently represent a hydrogen atom or an aliphatic hydrocarbon group having 1 to 3 carbon atoms, and q represents an integer of 1 to 10.
- the ratio of 1,3-dimethyl-2-imidazolidinone to the solvent is 50% by mass or more.
- R independently represents an alkyl group, an alkoxy group, an alkyl halide group, a carboxy group or a phenyl group, and n independently represents an integer of 0 to 4).
- ⁇ 11> The cured product according to ⁇ 9> or ⁇ 10>, which is used as an interlayer insulating film, a cover coat layer or a surface protective film.
- ⁇ 12> An interlayer insulating film containing the cured product according to ⁇ 9>.
- ⁇ 13> A cover coat layer containing the cured product according to ⁇ 9>.
- ⁇ 14> A surface protective film containing the cured product according to ⁇ 9>.
- ⁇ 15> An electronic component containing the cured product according to any one of ⁇ 9> to ⁇ 11>.
- a photosensitive resin composition containing an organic solvent other than NMP and having excellent photosensitive characteristics a cured product using this photosensitive resin composition, an interlayer insulating film, a cover coat layer, and the like.
- Surface protective films and electronic components can be provided.
- the term "process” includes, in addition to a process independent of other processes, the process as long as the purpose of the process is achieved even if it cannot be clearly distinguished from the other process. ..
- the numerical range indicated by using "-" includes the numerical values before and after "-" as the minimum value and the maximum value, respectively.
- the upper limit value or the lower limit value described in one numerical range may be replaced with the upper limit value or the lower limit value of the numerical range described in another stepwise description. ..
- the upper limit value or the lower limit value of the numerical range may be replaced with the value shown in the examples.
- each component may contain a plurality of applicable substances.
- the content or content of each component is the total content or content of the plurality of substances present in the composition unless otherwise specified. Means quantity.
- the term "layer” or “membrane” is used only in a part of the region, in addition to the case where the layer or the membrane is formed in the entire region when the region is observed. The case where it is formed is also included.
- the photosensitive resin composition of the present disclosure contains a polyimide precursor having a polymerizable unsaturated bond (hereinafter, may be referred to as an unsaturated polyimide precursor), a photopolymerization initiator, and a solvent.
- the solvent is N-ethyl-2-pyrrolidone (hereinafter, may be referred to as NEP), 1,3-dimethyl-2-imidazolidinone (hereinafter, may be referred to as DMI) and tetramethylurea. It contains at least one selected from the group consisting of (hereinafter, may be referred to as TMU) (hereinafter, these solvents may be referred to as "specific solvent").
- the present inventors have found that a photosensitive resin composition having excellent photosensitive characteristics can be obtained by using a specific solvent, and have completed the present invention. Further, since the unsaturated polyimide precursor exhibits the same solubility as NMP in a specific solvent, even if a specific solvent is used, the unsaturated polyimide precursor is not saturated in the photosensitive resin composition to the same extent as when NMP is used. It is possible to secure the polyimide precursor concentration.
- the photosensitive resin composition of the present disclosure is preferably a negative type photosensitive resin composition.
- each component contained in the photosensitive resin composition of the present disclosure will be described.
- the photosensitive resin composition of the present disclosure contains an unsaturated polyimide precursor.
- the polymerizable unsaturated bond include a carbon-carbon double bond.
- the unsaturated polyimide precursor may be, for example, a polyimide precursor having a structural unit represented by the following general formula (6). Since the unsaturated polyimide precursor has a structural unit represented by the general formula (6), the i-ray transmittance is high and there is a tendency that a good cured product can be formed even when cured at 380 ° C. or lower.
- the content of the structural units represented by the following general formula (6) in the unsaturated polyimide precursor is preferably 50 mol% or more with respect to all the structural units contained in the unsaturated polyimide precursor. 80 mol% or more is more preferable, and 90 mol% or more is further preferable.
- the upper limit is not particularly limited and may be 100 mol%.
- the unsaturated polyimide precursor may be synthesized by using a tetracarboxylic acid dianhydride and a diamine compound.
- X corresponds to a residue derived from tetracarboxylic acid dianhydride
- Y corresponds to a residue derived from a diamine compound.
- the unsaturated polyimide precursor may be synthesized by using tetracarboxylic acid instead of tetracarboxylic acid dianhydride.
- X represents a tetravalent organic group and Y represents a divalent organic group.
- R 6 and R 7 are each independently a hydrogen atom, a group represented by the following general formula (7), or an aliphatic hydrocarbon group having 1 to 4 carbon atoms, and at least one of R 6 and R 7 is a hydrogen atom.
- R 8 to R 10 each independently represent a hydrogen atom or an aliphatic hydrocarbon group having 1 to 3 carbon atoms, and q represents an integer of 1 to 10.
- the tetravalent organic group represented by X preferably has 3 to 20 carbon atoms, more preferably 5 to 15 carbon atoms, and further preferably 7 to 13 carbon atoms. ..
- the tetravalent organic group represented by X may contain an aromatic ring.
- examples of the aromatic ring include a benzene ring, a naphthalene ring, and a phenanthrene ring.
- a benzene ring is preferable from the viewpoint of improving the light transmission in the ultraviolet region of the unsaturated polyimide precursor.
- each aromatic ring may have a substituent or may be unsubstituted.
- substituent of the aromatic ring include an alkyl group, a fluorine atom, an alkyl halide group, a hydroxyl group, an amino group and the like.
- the tetravalent organic group represented by X contains a benzene ring
- the tetravalent organic group represented by X preferably contains 1 to 4 benzene rings, and 1 to 3 benzene rings. It is more preferable to contain one or two benzene rings.
- each benzene ring may be linked by a single bond, or may be an alkylene group, a halogenated alkylene group, a carbonyl group, or a sulfonyl group.
- RA independently represents a hydrogen atom, an alkyl group or a phenyl group), Siloxane bond (-O- (Si (RB) 2 - O-) n ;
- RB independently represents a hydrogen atom, an alkyl group or a phenyl group, and n represents an integer of 1 or 2 or more).
- Etc., or a composite linking group in which at least two of these linking groups are combined may be bonded.
- the two benzene rings may be bonded at two points by at least one of a single bond and a linking group to form a 5-membered ring or a 6-membered ring containing a linking group between the two benzene rings.
- the -COOR 6 group and the -CONH- group are in the ortho position with each other, and the -COOR 7 group and the -CO- group are in the ortho position. It is preferable that they are in the ortho position with each other.
- tetravalent organic group represented by X include groups represented by the following general formulas (A) to the following general formula (E), but the present disclosure is limited to the following specific examples. It's not something.
- a and B are independently single bond, methylene group, methylene halide group, carbonyl group, sulfonyl group, ether bond (—O—), sulfide bond (—S—) or silylene.
- C is a single bond, or an alkylene group, a halogenated alkylene group, a carbonyl group, a sulfonyl group, an ether bond (—O—), a sulfide bond (—S—), or a silylene bond (—Si).
- RA independently represents a hydrogen atom, an alkyl group or a phenyl group), a siloxane bond (-O- (Si (RB) 2 - O-) n ;
- RB is , Each independently represents a hydrogen atom, an alkyl group or a phenyl group, and n represents an integer of 1 or 2 or more) or a divalent group in which at least two of these are combined.
- C may have a structure represented by the following formula (C1).
- the alkylene group represented by C in the general formula (E) is preferably an alkylene group having 1 to 10 carbon atoms, more preferably an alkylene group having 1 to 5 carbon atoms, and has a carbon number of 1 to 5. It is more preferably 1 or 2 alkylene groups.
- Specific examples of the alkylene group represented by C in the general formula (E) include a linear alkylene group such as a methylene group, an ethylene group, a trimethylene group, a tetramethylene group, a pentamethylene group, and a hexamethylene group; a methylmethylene group.
- Examples thereof include a branched chain alkylene group such as a group, a 2,2-dimethyltetramethylene group, a 1,3-dimethyl
- the halogenated alkylene group represented by C in the general formula (E) is preferably a halogenated alkylene group having 1 to 10 carbon atoms, and preferably a halogenated alkylene group having 1 to 5 carbon atoms. More preferably, it is a halogenated alkylene group having 1 to 3 carbon atoms.
- at least one hydrogen atom contained in the alkylene group represented by C in the above general formula (E) is a fluorine atom or a chlorine atom. Examples thereof include an alkylene group substituted with a halogen atom such as. Among these, a fluoromethylene group, a difluoromethylene group, a hexafluorodimethylmethylene group and the like are preferable.
- the alkyl group represented by RA or RB contained in the silylene bond or the siloxane bond is preferably an alkyl group having 1 to 10 carbon atoms and preferably an alkyl group having 1 to 5 carbon atoms. Is more preferable, and an alkyl group having 1 or 2 carbon atoms is further preferable.
- Specific examples of the alkyl group represented by RA or RB include a methyl group, an ethyl group, an n - propyl group, an isopropyl group, an n-butyl group, an isobutyl group, an s-butyl group, a t-butyl group and the like. Can be mentioned.
- the combination of A and B in the general formula (D) is not particularly limited, and a combination of a methylene group and an ether bond, a combination of a methylene group and a sulfide bond, a combination of a carbonyl group and an ether bond, and the like are preferable.
- C in the general formula (E) a single bond, an ether bond, a carbonyl group and the like are preferable.
- the aliphatic hydrocarbon group represented by R 6 and R 7 in the general formula (6) has 1 to 4 carbon atoms, preferably 1 or 2 carbon atoms.
- Specific examples of the aliphatic hydrocarbon group represented by R 6 and R 7 include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group and the like.
- the aliphatic hydrocarbon group represented by R 8 to R 10 in the general formula (7) has 1 to 3 carbon atoms, preferably 1 or 2 carbon atoms.
- Specific examples of the aliphatic hydrocarbon group represented by R 8 to R 10 include a methyl group, an ethyl group, an n-propyl group, an isopropyl group and the like, and a methyl group is preferable.
- R 8 to R 10 in the general formula (7) a combination of R 8 and R 9 is a hydrogen atom, and R 10 is a hydrogen atom or a methyl group is preferable.
- Q in the general formula (7) is preferably an integer of 1 to 10, more preferably an integer of 2 to 5, and even more preferably 2 or 3.
- R 6 and R 7 are a group represented by the general formula (7), and both R 6 and R 7 are in the general formula (7). It is more preferable that it is a group represented.
- X corresponds to a residue derived from tetracarboxylic acid dianhydride
- specific examples of the tetracarboxylic acid dianhydride that is the source of the residue include pyromellitic acid dianhydride, 2, 3, 6, 7.
- the divalent organic group represented by Y preferably has 1 to 30 carbon atoms, more preferably 5 to 25 carbon atoms, and further preferably 10 to 20 carbon atoms. ..
- the divalent organic group represented by Y may be a divalent aliphatic group or a divalent aromatic group. From the viewpoint of heat resistance, the divalent organic group represented by Y is preferably a divalent aromatic group.
- divalent aromatic group represented by Y include the groups represented by the following general formula (F) and the following general formula (G).
- R independently represents an alkyl group, an alkoxy group, an alkyl halide group, a carboxy group or a phenyl group, and n independently represents 0 to 4, respectively. Represents an integer.
- D is a single bond, or an alkylene group, a halogenated alkylene group, a carbonyl group, a sulfonyl group, an ether bond (—O—), a sulfide bond (—S—), or a silylene bond (—Si).
- RA independently represents a hydrogen atom, an alkyl group or a phenyl group), a siloxane bond (-O- (Si (RB) 2 - O-) n ;
- RB is , Each independently represents a hydrogen atom, an alkyl group or a phenyl group, and n represents an integer of 1 or 2 or more) or a divalent group in which at least two of these are combined.
- D may have a structure represented by the above formula (C1).
- the alkyl group represented by R in the general formula (F) or the general formula (G) is preferably an alkyl group having 1 to 10 carbon atoms, and preferably an alkyl group having 1 to 5 carbon atoms. More preferably, it is an alkyl group having 1 or 4 carbon atoms.
- Specific examples of the alkyl group represented by R in the general formula (F) or the general formula (G) include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group and an s-butyl. Groups, t-butyl groups and the like can be mentioned.
- the alkoxy group represented by R in the general formula (F) or the general formula (G) is preferably an alkoxy group having 1 to 10 carbon atoms, and preferably an alkoxy group having 1 to 5 carbon atoms. More preferably, it is an alkoxy group having 1 or 4 carbon atoms.
- Specific examples of the alkoxy group represented by R in the general formula (F) or the general formula (G) include a methoxy group, an ethoxy group, an n-propoxy group, an isopropoxy group, an n-butoxy group, an isobutoxy group, and s-. Examples thereof include a butoxy group and a t-butoxy group.
- the alkyl halide group represented by R in the general formula (F) or the general formula (G) is preferably an alkyl halide group having 1 to 10 carbon atoms, and a halogenated group having 1 to 5 carbon atoms. It is more preferably an alkyl group, and even more preferably a halogenated alkyl group having 1 or 2 carbon atoms.
- Specific examples of the alkyl halide group represented by R in the general formula (F) or the general formula (G) include at least the alkyl group represented by R in the general formula (F) or the general formula (G). Examples thereof include an alkyl group in which one hydrogen atom is substituted with a halogen atom such as a fluorine atom and a chlorine atom. Among these, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group and the like are preferable.
- n in the general formula (F) or the general formula (G) is preferably 0 to 2, more preferably 0 or 1, and even more preferably 0.
- D may be a divalent group represented by the following formula (D1) or (D2).
- Ar represents a phenylene group or a naphthylene group which may have a substituent.
- Q is a single bond or an alkylene group, a halogenated alkylene group, a carbonyl group, a sulfonyl group, an ether bond (-O-), a sulfide bond (-S-), and a silylene bond (-Si ( RA )", respectively.
- RA independently represents a hydrogen atom, an alkyl group or a phenyl group), and a siloxane bond (-O- (Si (RB) 2 - O-) n ; RB are independent, respectively.
- the positional relationship between the two Qs bound to each Ar may be the ortho position, the meta position, or the para position.
- substituents that the phenylene group or naphthylene group represented by Ar may have are the same as the group represented by R in the general formula (F) or the general formula (G).
- the number of substituents that the phenylene group or naphthylene group represented by Ar may have is not particularly limited.
- D excluding the formulas (D1) and (D2) in the general formula (G) and the specific examples of Q in the formulas (D1) and (D2) are the same as the specific examples of C in the general formula (E). Is.
- D in the general formula (G) a single bond or an ether bond is preferable.
- divalent aliphatic group represented by Y examples include a linear or branched alkylene group, a cycloalkylene group, a divalent group having a polyalkylene oxide structure, and a divalent group having a polysiloxane structure. The basics of.
- the linear or branched alkylene group represented by Y is preferably an alkylene group having 1 to 15 carbon atoms, more preferably an alkylene group having 1 to 10 carbon atoms, and carbon. More preferably, it is an alkylene group having a number of 1 to 3.
- Specific examples of the alkylene group represented by Y include a tetramethylene group, a hexamethylene group, a heptamethylene group, an octamethylene group, a nonamethylene group, a decamethylene group, an undecamethylene group, a dodecamethylene group, and a 2-methylpentamethylene group. , 2-Methylhexamethylene group, 2-methylheptamethylene group, 2-methyloctamethylene group, 2-methylnonamethylene group, 2-methyldecamethylene group and the like.
- the cycloalkylene group represented by Y is preferably a cycloalkylene group having 3 to 20 carbon atoms, more preferably a cycloalkylene group having 3 to 10 carbon atoms, and 3 to 6 carbon atoms. It is more preferably the cycloalkylene group of.
- Specific examples of the cycloalkylene group represented by Y include a cyclopropylene group and a cyclohexylene group.
- the alkylene oxide structure having 1 to 10 carbon atoms is preferable, the alkylene oxide structure having 1 to 8 carbon atoms is more preferable, and the alkylene oxide structure having 1 to 8 carbon atoms is more preferable.
- the alkylene oxide structure of 1 to 4 is more preferable.
- the polyethylene oxide structure or the polypropylene oxide structure is preferable as the polyalkylene oxide structure.
- the alkylene group in the alkylene oxide structure may be linear or branched.
- the unit structure in the polyalkylene oxide structure may be one kind or two or more kinds.
- a silicon atom in the polysiloxane structure is bonded to a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, or an aryl group having 6 to 18 carbon atoms.
- Examples thereof include a divalent group having a polysiloxane structure.
- Specific examples of the alkyl group having 1 to 20 carbon atoms bonded to the silicon atom in the polysiloxane structure include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a t-butyl group and an n-.
- Examples thereof include an octyl group, a 2-ethylhexyl group and an n-dodecyl group. Among these, a methyl group is preferable.
- the aryl group having 6 to 18 carbon atoms bonded to the silicon atom in the polysiloxane structure may be unsubstituted or substituted with a substituent. Specific examples of the substituent when the aryl group has a substituent include a halogen atom, an alkoxy group, a hydroxy group and the like. Specific examples of the aryl group having 6 to 18 carbon atoms include a phenyl group, a naphthyl group, a benzyl group and the like.
- the alkyl group having 1 to 20 carbon atoms or the aryl group having 6 to 18 carbon atoms in the polysiloxane structure may be of one kind or two or more kinds.
- the silicon atom constituting the divalent group having a polysiloxane structure represented by Y is an NH group in the general formula (6) via an alkylene group such as a methylene group and an ethylene group and an arylene group such as a phenylene group. May be combined with.
- Y corresponds to a residue derived from a diamine compound
- specific examples of the diamine compound that is the source of the residue include 2,2'-bis (trifluoromethyl) -4,4'-diaminobiphenyl, 2, 2'-Difluoro-4,4'-diaminobiphenyl, 3,5-diaminobenzoic acid, p-phenylenediamine, m-phenylenediamine, p-xylylene diamine, m-xylylene diamine, 1,5-diaminonaphthalene, Benzidine, 4,4'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 3,3'-diaminodiphenyl ether, 2,4'-diaminodiphenyl ether, 2,2'-diaminodiphenyl ether, 4,4'-diaminodiphenyl sulfone , 3,4'
- the combination of the tetravalent organic group represented by X and the divalent organic group represented by Y in the general formula (6) is not particularly limited. In one embodiment, since the cyclization reaction of the polyimide proceeds at a low temperature, a tetravalent organic group represented by X and a divalent organic group represented by Y in the general formula (6) are exhibited from the viewpoint of low temperature curability.
- X is a group represented by the general formula (E)
- C in the general formula (E) is represented by a single bond or an ether bond
- Y is represented by the general formula (G).
- a combination of groups in which D in G) is represented by a single bond or an ether bond is preferable.
- the tetravalent organic group represented by X in the general formula (6) and the divalent represented by Y are represented from the viewpoint of transparency.
- X is a group represented by the general formula (E)
- C in the general formula (E) is represented by an ether bond
- Y is represented by the general formula (G).
- a combination of groups in which D in G) is represented by an ether bond is preferable.
- Y may include a group represented by the general formula (F).
- the general formula (F) occupying Y is used.
- the proportion of the represented groups is preferably 5 mol% to 30 mol%, more preferably 6 mol% to 15 mol%.
- the combination of the tetravalent organic group represented by X and the divalent organic group represented by Y in the general formula (6) is of X. At least a part thereof is a group represented by the general formula (A), and examples thereof include a combination of any divalent organic group in which Y is arbitrary.
- X may be a combination of a group represented by the general formula (A) and a group represented by the general formula (E).
- the ratio of the general formula (A) to X is 10 mol% to 80 mol%. It is preferably 30 mol% to 70 mol%, and more preferably 30 mol% to 70 mol%.
- the ratio of 1,3-dimethyl-2-imidazolidinone in the solvent is 50% by mass or more, 70% by mass or more, 90% by mass or more, or 100% by mass, the film thickness uniformity.
- the ratio of the group represented by the following general formula (G1) to the divalent organic group represented by Y in the general formula (6) is preferably less than 100 mol%, preferably 95 mol%. It is more preferably less than or equal to, more preferably 80 mol% or less, and particularly preferably 50 mol% or less.
- the ratio of the group represented by the following general formula (G1) to the divalent organic group represented by Y in the general formula (6) is less than 100 mol%, it is represented by Y in the general formula (6).
- the divalent organic group may contain at least one selected from the group consisting of a group represented by the general formula (F) and a group represented by the following general formula (G2).
- the total ratio of the group represented by the general formula (F) and the group represented by the following general formula (G2) to the divalent organic group represented by Y in the general formula (6) is 0. It is preferably more than mol%, more preferably 5 mol% or more, further preferably 20 mol% or more, particularly preferably 50 mol% or more, and extremely preferably 100 mol%. ..
- R independently represents an alkyl group, an alkoxy group, an alkyl halide group, a carboxy group or a phenyl group, and n independently represents 0 to 4, respectively. Represents an integer. Specific examples and preferable examples of R and n are the same as in the case of the general formula (G).
- the unsaturated polyimide precursor may have a structural unit other than the structural unit represented by the general formula (6).
- R 6 and R 7 in the general formula (6) are independently hydrogen atoms or aliphatic hydrocarbons having 1 to 4 carbon atoms. Examples thereof include structural units that are groups, that is, structural units in which neither R 6 nor R 7 in the general formula (6) is represented by the general formula (7).
- the unsaturated polyimide precursor reacts a tetracarboxylic acid dianhydride represented by the following general formula (8) with a compound represented by R-OH in an organic solvent such as N-methyl-2-pyrrolidone. It can be obtained by subjecting the diester derivative to a diester derivative and then subjecting the diester derivative to a condensation reaction with a diamine compound represented by H2NY—NH 2 .
- the unsaturated polyimide precursor is a polyamic by reacting a tetracarboxylic acid dianhydride represented by the following general formula (8) with a diamine compound represented by H2NY—NH 2 in an organic solvent.
- R in the diamine compound represented by H 2 N Y—NH 2 is the same as Y in the general formula (6), and specific examples and preferred examples are also the same.
- R in the compound represented by R—OH represents a group represented by the general formula (7) or an aliphatic hydrocarbon group having 1 to 4 carbon atoms, and specific examples and preferable examples are the general formula ( This is the same as the case of R 6 and R 7 in 6).
- the tetracarboxylic acid dianhydride represented by the formula (8), the diamine compound represented by H2NY — NH2 , and the compound represented by R—OH may be used alone. Two or more types may be combined. Further, the unsaturated polyimide precursor is obtained by reacting a tetracarboxylic acid dianhydride represented by the following general formula (8) with a compound represented by R-OH to form a diester derivative, and then chlorinating thionyl chloride or the like. It can be obtained by reacting an agent to convert it into an acid chloride, and then reacting the diamine compound represented by H2NY-NH 2 with the acid chloride.
- the unsaturated polyimide precursor is obtained by reacting a tetracarboxylic acid dianhydride represented by the following general formula (8) with a compound represented by R-OH to form a diester derivative, and then in the presence of a carbodiimide compound. It can be obtained by reacting a diamine compound represented by H2NY — NH2 with a diester derivative. Further, the unsaturated polyimide precursor is obtained by reacting a tetracarboxylic acid dianhydride represented by the following general formula (8) with a diamine compound represented by H2NY—NH 2 to obtain a polyamic acid.
- Trifluoroacetic acid can be obtained by isoimide the polyamic acid in the presence of anhydrate and then reacting with a compound represented by R-OH.
- a compound represented by R-OH is allowed to act on a part of the tetracarboxylic acid dianhydride in advance, and the partially esterified tetracarboxylic acid dianhydride and H2NY-NH 2 are used. It may be reacted with the represented diamine compound to obtain a polyamic acid.
- the unsaturated polyimide precursor obtained as described above may be purified according to a conventional method.
- X is the same as the X in the general formula (6), and the specific example and the preferable example are also the same.
- Examples of the compound represented by R-OH used for synthesizing the unsaturated polyimide precursor include methanol, ethanol, n-propanol, isopropanol, n-butanol, 2-hydroxyethyl methacrylate, 2-hydroxyethyl acrylate and the like. Can be mentioned.
- the molecular weight of the unsaturated polyimide precursor is not particularly limited, but the weight average molecular weight (Mw) is preferably 10,000 to 200,000.
- the weight average molecular weight can be measured, for example, by a gel permeation chromatography method and can be determined by conversion using a standard polystyrene calibration curve.
- the photosensitive resin composition of the present disclosure may contain a polymerizable monomer.
- the polymerizable monomer may be a compound containing at least one polymerizable unsaturated bond in the molecule, and is preferably a compound containing two or more polymerizable unsaturated bonds in the molecule.
- Examples of the group containing a polymerizable unsaturated bond include an allyl group, an acryloyloxy group, and a methacryloyloxy group. Among these, acryloyloxy group or methacryloyloxy group is preferable.
- the molecular weight of the polymerizable monomer is preferably 50 to 1000, more preferably 75 to 800, and even more preferably 100 to 500.
- a compound containing at least two of an acryloyloxy group and a methacryloyloxy group in the molecule is preferable, and the two acryloyloxy groups or methacryloyloxy groups contained in the molecule are linear 2 It is more preferably a compound linked with a valent organic group, and is a compound represented by the following general formula (4) or the following general formula (5) (hereinafter, may be referred to as a specific polymerizable monomer). Is even more preferable.
- R 3 independently represents a hydrogen atom or a methyl group
- R 4 represents an alkylene group having 1 to 8 carbon atoms
- R 5 represents 1 to 8 carbon atoms. It represents an alkylene group of 8 and p represents an integer of 2-5.
- the plurality of R3s may be the same or different.
- the plurality of R5s may be the same or different.
- a methyl group is preferable.
- the alkylene group having 1 to 8 carbon atoms represented by R4 in the general formula (4) include a methylene group, an ethylene group, a trimethylene group, a tetramethylene group, a hexamethylene group, an octamethylene group and the like. ..
- Specific examples of the alkylene group having 1 to 8 carbon atoms represented by R5 in the general formula ( 5 ) include a methylene group, an ethylene group, a trimethylene group, a methylethylene group, a dimethylmethylene group, a tetramethylene group and a hexamethylene group. , Octamethylene group and the like.
- the p in the general formula (5) is preferably an integer of 3 to 4.
- Specific examples of the specific polymerizable monomer include diethylene glycol diacrylate, triethylene glycol diacrylate, tetraethylene glycol diacrylate, diethylene glycol dimethacrylate, triethylene glycol dimethacrylate, tetraethylene glycol dimethacrylate, and 1,4-butanediol.
- Examples thereof include diacrylate, 1,6-hexanediol diacrylate, 1,4-butanediol dimethacrylate, and 1,6-hexanediol dimethacrylate.
- tetraethylene glycol dimethacrylate is preferable.
- polymerizable monomer other polymerizable monomers other than the specific polymerizable monomer may be used.
- specific examples of other polymerizable monomers include trimethylolpropane diacrylate, trimethylolpropane triacrylate, trimethylolpropane dimethacrylate, trimethylolpropane trimethacrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, and pentaerythritol triacrylate.
- the polymerizable monomer one type may be used alone or two or more types may be used in combination.
- the content of the polymerizable monomer is not particularly limited, and for example, 1 part by mass to 50 parts by mass is preferable with respect to 100 parts by mass of the unsaturated polyimide precursor. From the viewpoint of improving the hydrophobicity of the cured product, it is more preferably 3 parts by mass to 50 parts by mass, and further preferably 5 parts by mass to 35 parts by mass.
- the content of the polymerizable monomer is within the above range, a practical relief pattern can be easily obtained, and post-development residue in the unexposed portion can be easily suppressed.
- the content of the other polymerizable monomer is not particularly limited, and for example, 1 part by mass with respect to 100 parts by mass of the specific polymerizable monomer. It is preferably about 300 parts by mass, more preferably 10 parts by mass to 200 parts by mass, and further preferably 20 parts by mass to 150 parts by mass.
- the photosensitive resin composition of the present disclosure contains a photopolymerization initiator.
- a photopolymerization initiator By containing the photopolymerization initiator in the photosensitive resin composition, it is possible to impart photosensitivity to the resin composition containing the unsaturated polyimide precursor and the polymerizable monomer.
- the photopolymerization initiator is not particularly limited as long as it is a compound capable of generating radicals by irradiation with active light. Examples of the active ray include ultraviolet rays such as i-rays, visible rays, and radiation.
- photopolymerization initiator examples include benzophenone; N, N'-tetramethyl-4,4'-diaminobenzophenone (Michlerketone), N, N'-tetraethyl-4,4'-diaminobenzophenone, 4-methoxy-.
- the content of the photopolymerization initiator is preferably 0.1 part by mass to 20 parts by mass, more preferably 1 part by mass to 15 parts by mass, and further preferably 5 with respect to 100 parts by mass of the unsaturated polyimide precursor. It is a mass part to 12 parts by mass.
- the content of the photopolymerization initiator is within the above range, the photocrosslinking tends to be uniform in the film thickness direction, and a practical relief pattern can be easily obtained.
- the photosensitive resin composition of the present disclosure may contain a coupling agent.
- the coupling agent preferably contains an unsaturated polyimide precursor, a polyimide resin or a functional group capable of interacting with the substrate.
- the functional group that the coupling agent may contain include a hydroxy group, a glycidyl group, a phenyl group, a (meth) acrylic group, a carboxy group, and a group having a urea bond.
- the phenyl group may be substituted with a polar group such as a hydroxy group, a carboxy group or an amine group.
- the coupling agent is a silane coupling agent
- the coupling agent contains the above-mentioned functional groups, so that the functional group portion reacts with the unsaturated polyimide precursor and the siloxane portion is with the substrate in the heat treatment after development. react. Thereby, the adhesiveness between the obtained cured product and the substrate can be further improved.
- the coupling agent are not particularly limited.
- the coupling agent 3-aminopropyltrimethoxysilane, N- (2-aminoethyl) -3-aminopropylmethyldimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 3-mercaptopropylmethyldimethoxysilane, 3 -Methacryloxypropyldimethoxymethylsilane, 3-methacryloxypropyltrimethoxysilane, dimethoxymethyl-3-piperidinopropylsilane, diethoxy-3-glycidoxypropylmethylsilane, N- (3-diethoxymethylsilylpropyl) Succinimide, N- [3- (triethoxysilyl) propyl] phthalamide acid, benzophenone-3,3'-bis (N- [3-triethoxysilyl] propylamide) -4,4'-dicarboxylic acid, benzen
- the coupling agent may be used alone or in combination of two or more.
- the content of the coupling agent is preferably 0.1 part by mass to 20 parts by mass with respect to 100 parts by mass of the unsaturated polyimide precursor. By mass to 10 parts by mass is more preferable, and 3 parts by mass to 10 parts by mass is even more preferable.
- the photosensitive resin composition of the present disclosure contains a specific solvent.
- the total proportion of N-ethyl-2-pyrrolidone, 1,3-dimethyl-2-imidazolidinone and tetramethylurea in the solvent is preferably 50% by mass or more, preferably 70% by mass. The above is more preferable, and 90% by mass or more is further preferable.
- the upper limit is not particularly limited and may be 100% by mass.
- the proportion of N-ethyl-2-pyrrolidone in the solvent is preferably 50% by mass or more, more preferably 70% by mass or more, from the viewpoint of film thickness uniformity. It is more preferably 90% by mass or more.
- the upper limit is not particularly limited and may be 100% by mass.
- the proportion of 1,3-dimethyl-2-imidazolidinone in the solvent is preferably 50% by mass or more, more preferably 70% by mass or more, from the viewpoint of dissolution contrast. It is preferably 90% by mass or more, and more preferably 90% by mass or more.
- the upper limit is not particularly limited and may be 100% by mass.
- the proportion of tetramethylurea in the solvent is preferably 50% by mass or more, more preferably 70% by mass or more, and 90% by mass or more, from the viewpoint of film thickness uniformity. Is more preferable.
- the upper limit is not particularly limited and may be 100% by mass.
- the photosensitive resin composition of the present disclosure may contain other solvents other than N-ethyl-2-pyrrolidone, 1,3-dimethyl-2-imidazolidinone and tetramethylurea.
- Other solvents include N-methyl-2-pyrrolidone, ⁇ -butyrolactone, ethyl lactate, propylene glycol monomethyl ether acetate, benzyl acetate, n-butyl acetate, ethoxyethyl propionate, methyl 3-methoxypropionate, N.
- the solvent preferably contains at least one of NEP and TMU from the viewpoint of improving the viscosity of the photosensitive resin composition and improving the thick film forming property when the content of the unsaturated polyimide precursor is constant. ..
- the solvent may be used alone or in combination of two or more.
- the content of the solvent is not particularly limited, but is generally 50 parts by mass to 1000 parts by mass with respect to 100 parts by mass of the unsaturated polyimide precursor.
- the photosensitive resin composition of the present disclosure may further contain a thermal polymerization initiator from the viewpoint of accelerating the polymerization reaction.
- a thermal polymerization initiator it does not decompose under the condition of heating and drying to remove the solvent during film formation, but decomposes by heating during curing to generate radicals, and polymerizable monomers or unsaturated polyimides are used. Compounds that promote the polymerization reaction of the precursor and the polymerizable monomer are preferable.
- the thermal polymerization initiator is preferably a compound having a decomposition point of 110 ° C. to 200 ° C., and more preferably a compound having a decomposition point of 110 ° C. to 175 ° C. from the viewpoint of accelerating the polymerization reaction at a lower temperature.
- thermal polymerization initiator examples include ketone peroxides such as methyl ethyl ketone peroxide, 1,1-di (t-hexyl peroxide) -3,3,5-trimethylcyclohexane, and 1,1-di (t-hexyl peroxide).
- ketone peroxides such as methyl ethyl ketone peroxide, 1,1-di (t-hexyl peroxide) -3,3,5-trimethylcyclohexane, and 1,1-di (t-hexyl peroxide).
- Cyclohexane, peroxyketal such as 1,1-di (t-butylperoxy) cyclohexane, 1,1,3,3-tetramethylbutylhydroperoxide, cumenehydroperoxide, p-menthan hydroperoxide, diisopropylbenzenehydroperoxide Hydroperoxides such as, dicumyl peroxides, dialkyl peroxides such as di-t-butyl peroxides, diacyl peroxides such as dilauroyl peroxides and dibenzoyl peroxides, di (4-t-butylcyclohexyl) peroxydicarbonates, di (2-).
- peroxyketal such as 1,1-di (t-butylperoxy) cyclohexane, 1,1,3,3-tetramethylbutylhydroperoxide, cumenehydroperoxide, p-menthan hydroperoxide, diisopropylbenz
- Ethylhexyl Peroxydicarbonate such as peroxydicarbonate, t-butylperoxy-2-ethylhexanoate, t-hexylperoxyisopropylmonocarbonate, t-butylperoxybenzoate, 1,1,3,3- Examples thereof include peroxyesters such as tetramethylbutylperoxy-2-ethylhexanoate and bis (1-phenyl-1-methylethyl) peroxides.
- the content of the thermal polymerization initiator is preferably 0.1 part by mass to 20 parts by mass with respect to 100 parts by mass of the unsaturated polyimide precursor.
- 0.2 parts by mass to 20 parts by mass is more preferable, and from the viewpoint of suppressing deterioration of solubility due to decomposition during drying, 0.3 parts by mass to 10 parts by mass is further preferable.
- the photosensitive resin composition of the present disclosure may contain a sensitizer. Since the photosensitive resin composition contains a sensitizer, it is possible to achieve both maintenance of the residual film ratio and good resolution in a wide range of exposure amounts.
- sensitizer examples include Michler's ketone, benzoin, 2-methylbenzoin, benzoinmethyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin butyl ether, 2-t-butyl anthraquinone, 1,2-benzo-9,10-anthraquinone and anthraquinone.
- Methylanthraquinone 4,4'-bis- (diethylamino) benzophenone, acetophenone, benzophenone, thioxanthone, 1,5-acenaften, 2,2-dimethoxy-2-phenylacetophenone, 1-hydroxycyclohexylphenylketone, 2-methyl- [4- (Methylthio) phenyl] -2-morpholino-1-propanone, diacetylbenzyl, benzyldimethylketal, benzyldiethylketal, diphenyldisulfide, anthracene, phenanthrenequinone, riboflavintetrabutyrate, acridin orange, erythrosin, phenance Renquinone, 2-isopropylthioxanthone, 2,6-bis (p-diethylaminobenziliden) -4-methyl-4-azacyclohexanone, 6-bis (p-(p
- the sensitizer may be used alone or in combination of two or more.
- the blending amount of the sensitizer is preferably 0.1 part by mass to 1.0 part by mass with respect to 100 parts by mass of the unsaturated polyimide precursor. , 0.2 part by mass to 0.8 part by mass is more preferable.
- the photosensitive resin composition of the present disclosure may contain a stabilizer.
- the stabilizer include a radical scavenger and the like.
- the stability after standing can be improved.
- Stabilizers include p-methoxyphenol, diphenyl-p-benzoquinone, benzoquinone, hydroquinone, pyrogallol, phenothiazine, resorcinol, orthodinitrobenzene, paradinitrobenzene, metadinitrobenzene, phenanthraquinone, N-phenyl-2-naphthylamine, cuperone. , 2,5-Tulquinone, tannic acid, parabenzylaminophenol, nitrosoamines and the like.
- the stabilizer may be used alone or in combination of two or more.
- the content of the stabilizer is preferably 0.05 part by mass to 1.0 part by mass with respect to 100 parts by mass of the unsaturated polyimide precursor, and is 0. .1 part by mass to 0.8 part by mass is more preferable.
- the photosensitive resin composition of the present disclosure may contain at least one of a surfactant and a leveling agent.
- a surfactant and a leveling agent By containing at least one of the surfactant and the leveling agent in the photosensitive resin composition, the developability can be improved, and further, the unevenness of the film thickness such as striation can be suppressed to improve the coatability. Can be done.
- surfactant or leveling agent examples include polyoxyethylene uralyl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octylphenol ether and the like.
- the surfactant and the leveling agent may be used alone or in combination of two or more.
- the total content of the surfactant and the leveling agent is 0.01 with respect to 100 parts by mass of the unsaturated polyimide precursor. It is preferably 10 parts by mass to 10 parts by mass, more preferably 0.05 part by mass to 5 parts by mass, and further preferably 0.05 part by mass to 3 parts by mass.
- the photosensitive resin composition of the present disclosure may contain a rust preventive. Since the photosensitive resin composition contains a rust preventive, it is possible to suppress corrosion and prevent discoloration of copper and copper alloys.
- the rust preventive include a triazole derivative such as benzotriazole and a tetrazole derivative.
- the rust inhibitor may be used alone or in combination of two or more.
- the content of the rust preventive is preferably 0.01 part by mass to 10 parts by mass with respect to 100 parts by mass of the unsaturated polyimide precursor. 1 part by mass to 5 parts by mass is more preferable, and 0.5 part by mass to 3 parts by mass is further preferable.
- the photosensitive resin composition of the present disclosure includes an unsaturated polyimide precursor, a photopolymerization initiator and a solvent, and optional components such as a polymerizable monomer, a coupling agent, a thermal polymerization initiator, a sensitizer, a stabilizer, and a surfactant. It may contain an activator, a leveling agent, and a rust preventive, and may contain other components and unavoidable impurities as long as the effects of the present disclosure are not impaired. For example, 80% by mass or more, 90% by mass or more, 95% by mass or more, 98% by mass or more, or 100% by mass of the photosensitive resin composition of the present disclosure.
- the cured product of the present disclosure can be obtained by curing the photosensitive resin composition of the present disclosure.
- the cured product of the present disclosure may be a patterned cured product having a predetermined pattern, or may be a cured product having no pattern.
- the photosensitive resin compositions of the present disclosure the cured product of the present disclosure obtained by curing a photosensitive resin composition containing NEP or TMU as a solvent tends to have excellent film thickness uniformity.
- the photosensitive resin film before curing which is formed by using the photosensitive resin composition containing DMI as a solvent, tends to have a high residual film ratio.
- the cured product obtained by curing the photosensitive resin composition containing DMI as a solvent tends to form a thick film.
- the average thickness of the cured product of the present disclosure is preferably 5 ⁇ m to 20 ⁇ m.
- the interlayer insulating film of the present disclosure may contain the cured product of the present disclosure.
- the cover coat layer of the present disclosure may contain the cured product of the present disclosure.
- the surface protective film of the present disclosure may contain the cured product of the present disclosure.
- the method for producing a cured pattern of the present disclosure includes a step of applying the photosensitive resin composition of the present disclosure on a substrate and drying it to form a photosensitive resin film, and a pattern exposure of the photosensitive resin film to make a resin.
- the process includes a step of obtaining a film, a step of developing the resin film after pattern exposure with a developer to obtain a pattern resin film, and a step of heat-treating the pattern resin film. Thereby, a pattern cured product can be obtained.
- the method for producing a cured product without a pattern includes, for example, a step of forming the photosensitive resin film of the present disclosure and a step of heat treatment. Further, a step of exposing may be provided.
- the substrate examples include a glass substrate, a semiconductor substrate such as a Si substrate (silicon wafer), a metal oxide insulator substrate such as a TiO 2 substrate and a SiO 2 substrate, a silicon nitride substrate, a copper substrate, and a copper alloy substrate.
- a semiconductor substrate such as a Si substrate (silicon wafer)
- a metal oxide insulator substrate such as a TiO 2 substrate and a SiO 2 substrate
- silicon nitride substrate silicon nitride substrate
- copper substrate examples include a copper alloy substrate.
- the method for applying the photosensitive resin composition of the present disclosure is not particularly limited, and can be applied using a spinner or the like.
- Drying can be performed using a hot plate, an oven, or the like.
- the drying temperature is preferably 80 ° C. to 150 ° C., and more preferably 90 ° C. to 135 ° C. from the viewpoint of ensuring the dissolution contrast.
- the drying time is preferably 30 seconds to 5 minutes. Drying may be performed twice or more. When drying twice or more, it is preferable that the drying time per time is within the above range. When drying twice or more, the drying times may be the same or different. Further, the drying temperature may be the same or different. Thereby, a photosensitive resin film obtained by forming the photosensitive resin composition of the present disclosure in the form of a film can be obtained.
- the average thickness of the photosensitive resin film is preferably 3 ⁇ m to 30 ⁇ m, more preferably 5 ⁇ m to 20 ⁇ m, and even more preferably 5 ⁇ m to 15 ⁇ m.
- the pattern exposure exposes a predetermined pattern through, for example, a photomask.
- the activated light beam to be irradiated include ultraviolet rays such as i-rays, visible rays, and radiation, but i-rays are preferable.
- a parallel exposure machine, an aligner, a projection exposure machine, a stepper, a scanner exposure machine and the like can be used.
- a patterned resin film (patterned resin film) can be obtained.
- a good solvent of the photosensitive resin film can be used alone, or a good solvent and a poor solvent can be appropriately mixed and used.
- Good solvents include N-methyl-2-pyrrolidone, N-acetyl-2-pyrrolidone, N, N-dimethylacetamide, N, N-dimethylformamide, dimethyl sulfoxide, ⁇ -butyrolactone, ⁇ -acetyl- ⁇ -butyrolactone, Cyclopentanone, cyclohexanone and the like can be mentioned.
- the poor solvent include toluene, xylene, methanol, ethanol, isopropanol, propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, water and the like.
- a surfactant may be added to the developer.
- the amount to be added is preferably 0.01 part by mass to 10 parts by mass, more preferably 0.1 part by mass to 5 parts by mass with respect to 100 parts by mass of the developer.
- the development time can be, for example, twice the time required for the photosensitive resin film to be immersed and completely dissolved.
- the development time varies depending on the unsaturated polyimide precursor used, but is preferably 10 seconds to 15 minutes, more preferably 10 seconds to 5 minutes, and even more preferably 20 seconds to 5 minutes from the viewpoint of productivity.
- a rinsing solution distilled water, methanol, ethanol, isopropanol, toluene, xylene, propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether and the like may be used alone or in an appropriate mixture, or may be used in a stepwise combination. good.
- a cured pattern can be obtained by heat-treating the pattern resin film.
- the unsaturated polyimide precursor undergoes a dehydration ring closure reaction in the heat treatment step to become the corresponding polyimide resin.
- the temperature of the heat treatment is preferably 380 ° C. or lower, more preferably 250 ° C. to 350 ° C., and even more preferably 270 ° C. to 320 ° C.
- the temperature of the heat treatment is within the above range, damage to the substrate or the device can be suppressed to a small extent, the device can be produced at a high yield, and energy saving of the process can be realized.
- the heat treatment time is preferably 5 hours or less, more preferably 30 minutes to 3 hours. When the heat treatment time is within the above range, the crosslinking reaction or the dehydration ring closure reaction can be sufficiently proceeded.
- the atmosphere of the heat treatment may be in the atmosphere or in an inert atmosphere such as nitrogen, but a nitrogen atmosphere is preferable from the viewpoint of preventing oxidation of the pattern resin film.
- Examples of the device used for the heat treatment include a quartz tube furnace, a hot plate, a rapid thermal annealing, a vertical diffusion furnace, an infrared curing furnace, an electron beam curing furnace, a microwave curing furnace, and the like.
- the cured product of the present disclosure can be used as an interlayer insulating film, a cover coat layer or a surface protective film. Furthermore, the cured product of the present disclosure can be used as a passivation film, a buffer coat film, or the like. Highly reliable semiconductor devices, multilayer wiring boards, various electronic devices, and multis using one or more selected from the group consisting of the passivation film, buffer coat film, interlayer insulating film, cover coat layer, surface protective film, and the like. It is possible to manufacture electronic components such as laminated devices such as die fan out wafer level packages.
- the interlayer insulating film of the present disclosure includes the cured product of the present disclosure.
- the interlayer insulating film of the present disclosure containing the cured product of the present disclosure obtained by curing a photosensitive resin composition containing NEP or TMU as a solvent tends to have excellent film thickness uniformity.
- the interlayer insulating film of the present disclosure containing a cured product obtained by curing a photosensitive resin composition containing DMI as a solvent tends to be a thick film.
- the cover coat layer of the present disclosure contains the cured product of the present disclosure.
- the cover coat layer of the present disclosure containing the cured product of the present disclosure obtained by curing a photosensitive resin composition containing NEP or TMU as a solvent tends to have excellent film thickness uniformity.
- the cover coat layer of the present disclosure containing a cured product obtained by curing a photosensitive resin composition containing DMI as a solvent tends to be a thick film.
- the surface protective film of the present disclosure includes the cured product of the present disclosure.
- the surface protective film of the present disclosure containing the cured product of the present disclosure obtained by curing a photosensitive resin composition containing NEP or TMU as a solvent tends to have excellent film thickness uniformity.
- the surface protective film of the present disclosure containing a cured product obtained by curing a photosensitive resin composition containing DMI as a solvent tends to be a thick film.
- FIG. 1 is a manufacturing process diagram of a semiconductor device having a multilayer wiring structure, which is an electronic component according to an embodiment of the present disclosure.
- a semiconductor substrate 1 such as a Si substrate having a circuit element is covered with a protective film 2 such as a silicon oxide film except for a predetermined portion of the circuit element, and a first conductor layer 3 is formed on the exposed circuit element. It is formed. After that, the interlayer insulating film 4 is formed on the semiconductor substrate 1.
- a photosensitive resin layer 5 such as a rubber chloride type or a phenol novolac type is formed on the interlayer insulating film 4, and the window 6A is provided so that the interlayer insulating film 4 in a predetermined portion is exposed by a known photographic etching technique. It will be provided.
- the interlayer insulating film 4 exposed from the window 6A is selectively etched to provide the window 6B.
- the photosensitive resin layer 5 is removed by using an etching solution that corrodes the photosensitive resin layer 5 without corroding the first conductor layer 3 exposed from the window 6B.
- the second conductor layer 7 is formed and electrically connected to the first conductor layer 3.
- the above steps can be repeated to form each layer.
- the window 6C is opened by pattern exposure to form the surface protective film 8.
- the surface protective film 8 protects the second conductor layer 7 from external stress, ⁇ rays, and the like, and the obtained semiconductor device is excellent in reliability.
- the interlayer insulating film 4 can also be formed by using the photosensitive resin composition of the present disclosure.
- the obtained reaction solution was poured into 3 liters of ethyl alcohol to form a precipitate consisting of a crude polymer.
- the produced crude polymer was collected by filtration and dissolved in 1.5 liters of tetrahydrofuran to obtain a crude polymer solution.
- the obtained crude polymer solution was added dropwise to 28 liters of water to precipitate the polymer, and the obtained precipitate was collected by filtration and dried under reduced pressure to obtain an unsaturated polyimide precursor A3.
- the number average molecular weight of the unsaturated polyimide precursor A3 was determined in the same manner as the unsaturated polyimide precursor A1 and found to be 40,000.
- Film thickness uniformity [%] (maximum film thickness at 41 points after coating-minimum film thickness at 41 points after coating) / average film thickness at 41 points x 100 Criteria for selecting measurement points: 41 points set concentrically from the entire remaining area except for the area 10 mm from the outer peripheral edge of the wafer were set as measurement points. The average film thickness was the average value of each film thickness measured at 41 measurement points.
- the unsaturated polyimide precursor A1 exhibits the same solubility as NMP in a specific solvent. Further, when a specific solvent was used instead of NMP, the film thickness uniformity was improved. As is clear from Reference Example 2 and Example 4 in Table 1, it can be seen that the unsaturated polyimide precursor A2 exhibits solubility and film film uniformity equivalent to those of NMP with respect to a specific solvent.
- the high-viscosity coating liquid is excellent in thick film forming property. The high viscosity of the coating liquid adjusted with the minimum required amount of solvent indicates that a thicker film can be formed during film formation.
- Thin film formation can be achieved by adding a solvent to reduce the viscosity of the coating liquid. It can be said that the high viscosity of the coating liquid is excellent as a "material having a wide film thickness film forming margin". Since the solvent can be removed by heating during film formation and curing, this method of increasing the viscosity by a special combination of the solvent and the unsaturated polyimide precursor is applied using an additive such as a thickener. Unlike the method of improving the viscosity of the working liquid, additives are less likely to remain in the polyimide film, and there is an advantage that the characteristics of the polyimide film are not impaired.
- the spin coating for film formation can be performed at high rotation speed, it is possible to improve the film thickness uniformity, but if the viscosity of the coating liquid is low, it is at least necessary when the spin coating is performed at high rotation speed. It may be difficult to secure the film thickness of the coating film.
- the viscosity of the coating liquid is improved, so that the film thickness is less likely to be thinned even when the spin coating is performed at high rotation speed. Therefore, it is possible to perform spin coating at high rotation speed when forming a film, and it is presumed that the film thickness uniformity is improved.
- composition characteristics The characteristics of the photosensitive resin composition were evaluated as follows.
- the photosensitive resin composition was obtained by blending each component shown in Table 2 in the blending amount shown in Table 2.
- the blending amount of each component in Table 2 is based on parts by mass.
- the obtained photosensitive resin composition was spin-coated on a 6-inch silicon wafer using a coating device Act8 (manufactured by Tokyo Electron Limited), dried at 90 ° C. for 200 seconds, and then dried at 100 ° C. for 200 seconds (pre-baking). ) To form a photosensitive resin film.
- the rotation conditions of the spin coat the rotation time was fixed at 30 seconds, and the rotation speed was adjusted so that the dry film thickness was about 15 ⁇ m. In this evaluation, the range was 2000 rpm to 2500 rpm. Table 2 shows the measured values (film thickness) of the dry film thickness.
- a photosensitive resin film was prepared in the same manner as above, and the i-line stepper FPA-3000iW (manufactured by Canon Inc.) was applied to the entire surface of the obtained photosensitive resin film. It was exposed by irradiating with i-line of 700 mJ / cm 2 .
- the photosensitive resin film after exposure was paddle-developed with cyclopentanone using Act8 for the above-mentioned development time, and then rinse-washed with propylene glycol monomethyl ether acetate (PGMEA).
- the dissolution rate (DR2) of the exposed portion was calculated using the following formula.
- DR2 (Thickness after prebaking-Thickness after development) / Development time
- Dissolution rate of the unexposed part of the photosensitive resin film obtained as described above The dissolution rate of DR1 and the exposed part of the photosensitive resin film
- the dissolution contrast (DR1 / DR2) was calculated based on DR2. The results obtained are shown in Table 2.
- the obtained photosensitive resin composition was spin-coated on a 6-inch silicon wafer using a coating device Act8 (manufactured by Tokyo Electron Limited), dried at 90 ° C. for 200 seconds, and then dried at 100 ° C. for 200 seconds (pre-baking). ) To form a photosensitive resin film.
- the rotation time was fixed at 30 seconds, and the rotation speed was adjusted so that the dry film thickness was about 15 ⁇ m. In this evaluation, the range was 2000 rpm to 2500 rpm.
- the obtained photosensitive resin film was immersed in cyclopentanone, and twice the time until the photosensitive resin film was completely dissolved was set as the development time.
- a photosensitive resin film was prepared in the same manner as described above, and an i-line stepper FPA-3000iW (manufactured by Canon Inc.) was used on the obtained photosensitive resin film to obtain i of 100 mJ / cm 2 to 1100 mJ / cm 2 .
- the line was irradiated to a predetermined pattern with an exposure amount of 100 mJ / cm in 2 increments to perform exposure.
- the photosensitive resin film after exposure was paddle-developed with cyclopentanone using Act8 for the above-mentioned development time, and then rinse-washed with propylene glycol monomethyl ether acetate (PGMEA) to obtain a predetermined pattern resin film. ..
- the obtained photosensitive resin composition was spin-coated on a 6-inch silicon wafer using a coating device Act8 (manufactured by Tokyo Electron Limited), dried at 90 ° C. for 200 seconds, and then dried at 100 ° C. for 200 seconds (pre-baking). ) To form a photosensitive resin film.
- the rotation time was fixed at 30 seconds, and the rotation speed was adjusted so that the dry film thickness was about 15 ⁇ m. In this evaluation, the range was 2000 rpm to 2500 rpm.
- the obtained photosensitive resin film was immersed in cyclopentanone, and twice the time until the photosensitive resin film was completely dissolved was set as the development time.
- a photosensitive resin film was prepared in the same manner as described above, and an i-line stepper FPA-3000iW (manufactured by Canon Inc.) was used on the obtained photosensitive resin film to generate an i-line of 700 mJ / cm 2 (Example 3). Then, 800 mJ / cm 2 ) was applied to the photosensitive resin film via a photomask.
- the photosensitive resin film after exposure was paddle-developed with cyclopentanone using Act8 for the above-mentioned development time, and then rinse-washed with propylene glycol monomethyl ether acetate (PGMEA) to obtain a predetermined pattern resin film. ..
- the predetermined pattern was a hole pattern and a line-and-space pattern having a line width ratio of 1: 1.
- the diameter of the smallest hole that could be patterned without peeling and residue and the line width of the line were taken as the resolution and evaluated according to the following criteria.
- “resolution (L / S)” indicates the resolution of the line-and-space pattern
- “resolution (hole)” indicates the resolution of the hole pattern.
- B The diameter of the smallest hole or the line width of the line was in the range of more than 20 ⁇ m and 50 ⁇ m or less.
- C The diameter of the smallest hole or the line width of the line was in the range exceeding 50 ⁇ m.
- the photosensitive resin composition containing the specific solvent exhibits the same or better photosensitive characteristics as the photosensitive resin composition containing NMP. I understand.
- the residue derived from the diamine compound in the unsaturated polyimide precursor represented by the general formula (6) 2). It can be seen that the dissolution contrast improves as the ratio of the group represented by the general formula (G1) (residue derived from ODA) to the organic group of valence) decreases.
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Abstract
Description
このようなポリイミド樹脂の硬化膜を用いた保護膜は、ポリイミド前駆体又はポリイミド前駆体を含有する樹脂組成物を基板上に塗布及び乾燥して形成した樹脂膜を、加熱して硬化することで得られる。
一般に、ポリイミド前駆体等の耐熱性樹脂の前駆体を溶解するための有機溶剤としては、沸点及び引火点がともに高く、溶解能が大きいという利点から、N-メチル-2-ピロリドン(NMP)が使用されることが多い(例えば、特開2013-40249号公報参照)。
本開示は上記従来の事情に鑑みてなされたものであり、本開示の一形態は、NMP以外の有機溶剤を含有し、感光特性に優れる感光性樹脂組成物、並びに、この感光性樹脂組成物を用いた硬化物、層間絶縁膜、カバーコート層、表面保護膜及び電子部品を提供することを課題とする。
<1> 重合性の不飽和結合を有するポリイミド前駆体と、光重合開始剤と、溶剤と、を含有し、
前記溶剤が、N-エチル-2-ピロリドン、1,3-ジメチル-2-イミダゾリジノン及びテトラメチル尿素からなる群より選択される少なくとも1種を含有する感光性樹脂組成物。
<2> 前記溶剤に占める、N-エチル-2-ピロリドン、1,3-ジメチル-2-イミダゾリジノン及びテトラメチル尿素の合計の割合が、50質量%以上である<1>に記載の感光性樹脂組成物。
<3> 前記溶剤に占める、N-エチル-2-ピロリドンの割合が、50質量%以上である<1>に記載の感光性樹脂組成物。
<4> 前記溶剤に占める、1,3-ジメチル-2-イミダゾリジノンの割合が、50質量%以上である<1>に記載の感光性樹脂組成物。
<5> 前記溶剤に占める、テトラメチル尿素の割合が、50質量%以上である<1>に記載の感光性樹脂組成物。
<6> 前記ポリイミド前駆体が、下記一般式(6)で表される構造単位を有する<1>~<5>のいずれか1項に記載の感光性樹脂組成物。
<7> 前記溶剤に占める、1,3-ジメチル-2-イミダゾリジノンの割合が、50質量%以上であり、
前記一般式(6)におけるYで表される2価の有機基に占める下記一般式(G1)で表される基の割合が、100モル%未満である<6>に記載の感光性樹脂組成物。
<8> 前記光重合開始剤が、オキシム誘導体を含有する<1>~<7>のいずれか1項に記載の感光性樹脂組成物。
<9> <1>~<8>のいずれか1項に記載の感光性樹脂組成物を硬化した硬化物。
<10> パターン硬化物である<9>に記載の硬化物。
<11> 層間絶縁膜、カバーコート層又は表面保護膜として用いられる<9>又は<10>に記載の硬化物。
<12> <9>に記載の硬化物を含む層間絶縁膜。
<13> <9>に記載の硬化物を含むカバーコート層。
<14> <9>に記載の硬化物を含む表面保護膜。
<15> <9>~<11>のいずれか1項に記載の硬化物を含む電子部品。
本開示において「~」を用いて示された数値範囲には、「~」の前後に記載される数値がそれぞれ最小値及び最大値として含まれる。
本開示中に段階的に記載されている数値範囲において、一つの数値範囲で記載された上限値又は下限値は、他の段階的な記載の数値範囲の上限値又は下限値に置き換えてもよい。また、本開示中に記載されている数値範囲において、その数値範囲の上限値又は下限値は、実施例に示されている値に置き換えてもよい。
本開示において、各成分には、該当する物質が複数種含まれていてもよい。組成物中に各成分に該当する物質が複数種存在する場合、各成分の含有率又は含有量は、特に断らない限り、組成物中に存在する当該複数種の物質の合計の含有率又は含有量を意味する。
本開示において「層」又は「膜」との語には、当該層又は膜が存在する領域を観察したときに、当該領域の全体に形成されている場合に加え、当該領域の一部にのみ形成されている場合も含まれる。
本開示の感光性樹脂組成物は、重合性の不飽和結合を有するポリイミド前駆体(以下、不飽和ポリイミド前駆体と称することがある。)と、光重合開始剤と、溶剤と、を含有し、前記溶剤が、N-エチル-2-ピロリドン(以下、NEPと称することがある。)、1,3-ジメチル-2-イミダゾリジノン(以下、DMIと称することがある。)及びテトラメチル尿素(以下、TMUと称することがある。)からなる群より選択される少なくとも1種(以下、これら溶剤を「特定溶剤」と称することがある。)を含有する。
本発明者等は、鋭意検討の結果、特定溶剤を用いることで、感光特性に優れる感光性樹脂組成物が得られることを見出し、本発明を完成させた。また、不飽和ポリイミド前駆体は特定溶剤に対してNMPと同等の溶解性を示すことから、特定溶剤を用いたとしても、NMPを用いた場合と同程度に感光性樹脂組成物中の不飽和ポリイミド前駆体濃度を確保することが可能となる。
以下、本開示の感光性樹脂組成物に含有される各成分について説明する。
本開示の感光性樹脂組成物は、不飽和ポリイミド前駆体を含有する。
重合性の不飽和結合としては、炭素-炭素の二重結合等が挙げられる。
不飽和ポリイミド前駆体は、例えば、下記一般式(6)で表される構造単位を有するポリイミド前駆体であってもよい。不飽和ポリイミド前駆体が一般式(6)で表される構造単位を有することで、i線の透過率が高く、380℃以下の硬化時にも良好な硬化物を形成できる傾向にある。
不飽和ポリイミド前駆体に占める下記一般式(6)で表される構造単位の含有率は、不飽和ポリイミド前駆体に含有される全構造単位に対して、50モル%以上であることが好ましく、80モル%以上がより好ましく、90モル%以上がさらに好ましい。上限は特に限定されず、100モル%でもよい。
Xで表される4価の有機基は、芳香環を含んでもよい。Xで表される4価の有機基が芳香環を含む場合、芳香環としては、ベンゼン環、ナフタレン環、フェナントレン環等が挙げられる。これらの中でも、不飽和ポリイミド前駆体の紫外領域における光透過性を向上する観点から、ベンゼン環が好ましい。
Xで表される4価の有機基が芳香環を含む場合、各芳香環は、置換基を有していてもよいし、無置換であってもよい。芳香環の置換基としては、アルキル基、フッ素原子、ハロゲン化アルキル基、水酸基、アミノ基等が挙げられる。
Xで表される4価の有機基がベンゼン環を含む場合、Xで表される4価の有機基は1個~4個のベンゼン環を含むことが好ましく、1個~3個のベンゼン環を含むことがより好ましく、1個又は2個のベンゼン環を含むことがさらに好ましい。
Xで表される4価の有機基が2個以上のベンゼン環を含む場合、各ベンゼン環は、単結合により連結されていてもよいし、アルキレン基、ハロゲン化アルキレン基、カルボニル基、スルホニル基、エーテル結合(-O-)、スルフィド結合(-S-)、シリレン結合(-Si(RA)2-;RAは、それぞれ独立に、水素原子、アルキル基又はフェニル基を表す。)、シロキサン結合(-O-(Si(RB)2-O-)n;RBは、それぞれ独立に、水素原子、アルキル基又はフェニル基を表し、nは1又は2以上の整数を表す。)等の連結基、これら連結基を少なくとも2つ組み合わせた複合連結基などにより結合されていてもよい。また、2つのベンゼン環が単結合及び連結基の少なくとも一方により2箇所で結合されて、2つのベンゼン環の間に連結基を含む5員環又は6員環が形成されていてもよい。
一般式(E)におけるCで表されるアルキレン基の具体例としては、メチレン基、エチレン基、トリメチレン基、テトラメチレン基、ペンタメチレン基、ヘキサメチレン基等の直鎖状アルキレン基;メチルメチレン基、メチルエチレン基、エチルメチレン基、ジメチルメチレン基(イソプロピリデン基)、1,1-ジメチルエチレン基、1-メチルトリメチレン基、2-メチルトリメチレン基、エチルエチレン基、1-メチルテトラメチレン基、2-メチルテトラメチレン基、1-エチルトリメチレン基、2-エチルトリメチレン基、1,1-ジメチルトリメチレン基、1,2-ジメチルトリメチレン基、2,2-ジメチルトリメチレン基、1-メチルペンタメチレン基、2-メチルペンタメチレン基、3-メチルペンタメチレン基、1-エチルテトラメチレン基、2-エチルテトラメチレン基、1,1-ジメチルテトラメチレン基、1,2-ジメチルテトラメチレン基、2,2-ジメチルテトラメチレン基、1,3-ジメチルテトラメチレン基、2,3-ジメチルテトラメチレン基、1,4-ジメチルテトラメチレン基等の分岐鎖状アルキレン基;などが挙げられる。これらの中でも、メチレン基、エチレン基等が好ましい。
一般式(E)におけるCで表されるハロゲン化アルキレン基の具体例としては、上述の一般式(E)におけるCで表されるアルキレン基に含まれる少なくとも1つの水素原子がフッ素原子、塩素原子等のハロゲン原子で置換されたアルキレン基が挙げられる。これらの中でも、フルオロメチレン基、ジフルオロメチレン基、ヘキサフルオロジメチルメチレン基等が好ましい。
一般式(E)におけるCとしては、単結合、エーテル結合、カルボニル基等が好ましい。
Yで表される2価の有機基は、2価の脂肪族基であってもよく、2価の芳香族基であってもよい。耐熱性の観点から、Yで表される2価の有機基は、2価の芳香族基であることが好ましい。
一般式(G)において、Dは、単結合、又は、アルキレン基、ハロゲン化アルキレン基、カルボニル基、スルホニル基、エーテル結合(-O-)、スルフィド結合(-S-)、シリレン結合(-Si(RA)2-;RAは、それぞれ独立に、水素原子、アルキル基又はフェニル基を表す。)、シロキサン結合(-O-(Si(RB)2-O-)n;RBは、それぞれ独立に、水素原子、アルキル基又はフェニル基を表し、nは1又は2以上の整数を表す。)若しくはこれらを少なくとも2つ組み合わせた2価の基を表す。
また、Dは、上記式(C1)で表される構造であってもよい。
一般式(F)又は一般式(G)におけるRで表されるアルキル基の具体例としては、メチル基、エチル基、n-プロピル基、イソプロピル基、n-ブチル基、イソブチル基、s-ブチル基、t-ブチル基等が挙げられる。
一般式(F)又は一般式(G)におけるRで表されるアルコキシ基の具体例としては、メトキシ基、エトキシ基、n-プロポキシ基、イソプロポキシ基、n-ブトキシ基、イソブトキシ基、s-ブトキシ基、t-ブトキシ基等が挙げられる。
一般式(F)又は一般式(G)におけるRで表されるハロゲン化アルキル基の具体例としては、一般式(F)又は一般式(G)におけるRで表されるアルキル基に含まれる少なくとも1つの水素原子がフッ素原子、塩素原子等のハロゲン原子で置換されたアルキル基が挙げられる。これらの中でも、フルオロメチル基、ジフルオロメチル基、トリフルオロメチル基等が好ましい。
-Q-Ar-Q- (D1)
-Q-Ar-Q-Ar-Q- (D2)
式(D1)又は式(D2)において、Arは、置換基を有していてもよいフェニレン基又はナフチレン基を表す。Qは、各々独立に、単結合、又は、アルキレン基、ハロゲン化アルキレン基、カルボニル基、スルホニル基、エーテル結合(-O-)、スルフィド結合(-S-)、シリレン結合(-Si(RA)2-;RAは、それぞれ独立に、水素原子、アルキル基又はフェニル基を表す。)、シロキサン結合(-O-(Si(RB)2-O-)n;RBは、それぞれ独立に、水素原子、アルキル基又はフェニル基を表し、nは1又は2以上の整数を表す。)若しくはこれらを少なくとも2つ組み合わせた2価の基を表す。
式(D1)及び(D2)において、各Arに結合する2つのQの位置関係は、オルト位であってもメタ位であってもパラ位であってもよい。
Arで表されるフェニレン基又はナフチレン基が有してもよい置換基の具体例は、一般式(F)又は一般式(G)におけるRで表される基と同様である。Arで表されるフェニレン基又はナフチレン基が有してもよい置換基の数は、特に限定されない。
一般式(G)におけるDとしては、単結合又はエーテル結合が好ましい。
Yで表されるアルキレン基の具体例としては、テトラメチレン基、ヘキサメチレン基、ヘプタメチレン基、オクタメチレン基、ノナメチレン基、デカメチレン基、ウンデカメチレン基、ドデカメチレン基、2-メチルペンタメチレン基、2-メチルヘキサメチレン基、2-メチルヘプタメチレン基、2-メチルオクタメチレン基、2-メチルノナメチレン基、2-メチルデカメチレン基等が挙げられる。
Yで表されるシクロアルキレン基の具体例としては、シクロプロピレン基、シクロヘキシレン基等が挙げられる。
ポリシロキサン構造中のケイ素原子と結合する炭素数1~20のアルキル基の具体例としては、メチル基、エチル基、n-プロピル基、イソプロピル基、n-ブチル基、t-ブチル基、n-オクチル基、2-エチルヘキシル基、n-ドデシル基等が挙げられる。これらの中でも、メチル基が好ましい。
ポリシロキサン構造中のケイ素原子と結合する炭素数6~18のアリール基は、無置換でも置換基で置換されていてもよい。アリール基が置換基を有する場合の置換基の具体例としては、ハロゲン原子、アルコキシ基、ヒドロキシ基等が挙げられる。炭素数6~18のアリール基の具体例としては、フェニル基、ナフチル基、ベンジル基等が挙げられる。これらの中でも、フェニル基が好ましい。
ポリシロキサン構造中の炭素数1~20のアルキル基又は炭素数6~18のアリール基は、1種類でもよく、2種類以上であってもよい。
Yで表されるポリシロキサン構造を有する2価の基を構成するケイ素原子は、メチレン基、エチレン基等のアルキレン基、フェニレン基等のアリーレン基などを介して一般式(6)中のNH基と結合していてもよい。
ジアミン化合物は、1種を単独で用いても2種以上を併用してもよい。
ある態様では、ポリイミドの環化反応を低温で進行させるため、低温硬化性の観点から、一般式(6)におけるXで表される4価の有機基とYで表される2価の有機基との組み合わせとしては、Xが一般式(E)で表され一般式(E)におけるCが単結合又はエーテル結合で表される基であり、Yが一般式(G)で表され一般式(G)におけるDが単結合又はエーテル結合で表される基の組み合わせが好ましい。
また、ある態様では、露光の際に照射光を膜底部まで到達させるため、透過性の観点から、一般式(6)におけるXで表される4価の有機基とYで表される2価の有機基との組み合わせとしては、Xが一般式(E)で表され一般式(E)におけるCがエーテル結合で表される基であり、Yが一般式(G)で表され一般式(G)におけるDがエーテル結合で表される基の組み合わせが好ましい。この場合、Yが一般式(F)で表される基を含んでもよい。Yが一般式(G)で表され一般式(G)におけるDがエーテル結合で表される基及び一般式(F)で表される基を併用する場合、Yに占める一般式(F)で表される基の割合は、5モル%~30モル%であることが好ましく、6モル%~15モル%であることがより好ましい。
また、ある態様では、硬化膜の強靭性の観点から、一般式(6)におけるXで表される4価の有機基及びYで表される2価の有機基との組み合わせとしては、Xの少なくとも一部が一般式(A)で表される基であり、Yが任意の2価の有機基の組み合わせ等が挙げられる。低温硬化性、透過性及び強靭性の観点から、Xが一般式(A)で表される基及び一般式(E)で表される基の併用であってもよい。Xが一般式(A)で表される基及び一般式(E)で表される基の併用である場合、Xに占める一般式(A)の割合は、10モル%~80モル%であることが好ましく、30モル%~70モル%であることがより好ましい。
また、ある態様では、溶剤に占める1,3-ジメチル-2-イミダゾリジノンの割合が50質量%以上、70質量%以上、90質量%以上又は100質量%である場合に、膜厚均一性の観点から、一般式(6)におけるYで表される2価の有機基に占める下記一般式(G1)で表される基の割合は、100モル%未満であることが好ましく、95モル%以下であることがより好ましく、80モル%以下であることがさらに好ましく、50モル%以下であることが特に好ましい。
一般式(6)におけるYで表される2価の有機基に占める下記一般式(G1)で表される基の割合が100モル%未満である場合、一般式(6)におけるYで表される2価の有機基は、一般式(F)で表される基、及び、下記一般式(G2)で表される基からなる群より選択される少なくとも1種を含んでもよい。この場合、一般式(6)におけるYで表される2価の有機基に占める一般式(F)で表される基及び下記一般式(G2)で表される基の合計の割合は、0モル%を超えることが好ましく、5モル%以上であることがより好ましく、20モル%以上であることがさらに好ましく、50モル%以上であることが特に好ましく、100モル%であることが極めて好ましい。
ここで、H2N-Y-NH2で表されるジアミン化合物におけるYは、一般式(6)におけるYと同様であり、具体例及び好ましい例も同様である。また、R-OHで表される化合物におけるRは、一般式(7)で表される基、又は炭素数1~4の脂肪族炭化水素基を表し、具体例及び好ましい例は、一般式(6)におけるR6及びR7の場合と同様である。
式(8)で表されるテトラカルボン酸二無水物、H2N-Y-NH2で表されるジアミン化合物及びR-OHで表される化合物は、各々、1種単独で用いてもよく、2種以上を組み合わせてもよい。
また、不飽和ポリイミド前駆体は、下記一般式(8)で表されるテトラカルボン酸二無水物にR-OHで表される化合物を作用させてジエステル誘導体とした後、塩化チオニル等の塩素化剤を作用させて酸塩化物に変換し、次いで、H2N-Y-NH2で表されるジアミン化合物と酸塩化物とを反応させることで得ることができる。
さらに、不飽和ポリイミド前駆体は、下記一般式(8)で表されるテトラカルボン酸二無水物にR-OHで表される化合物を作用させてジエステル誘導体とした後、カルボジイミド化合物の存在下でH2N-Y-NH2で表されるジアミン化合物とジエステル誘導体とを反応させることで得ることができる。
さらに、不飽和ポリイミド前駆体は、下記一般式(8)で表されるテトラカルボン酸二無水物とH2N-Y-NH2で表されるジアミン化合物とを反応させてポリアミック酸とした後、トリフルオロ酢酸無水物の存在下でポリアミック酸をイソイミド化し、次いでR-OHで表される化合物を作用させて得ることができる。この場合、テトラカルボン酸二無水物の一部に予めR-OHで表される化合物を作用させて、部分的にエステル化されたテトラカルボン酸二無水物とH2N-Y-NH2で表されるジアミン化合物とを反応させてポリアミック酸としてもよい。
上述のようにして得られた不飽和ポリイミド前駆体は、定法に従って精製してもよい。
重量平均分子量は、例えば、ゲルパーミエーションクロマトグラフィー法によって測定することができ、標準ポリスチレン検量線を用いて換算することによって求めることができる。
本開示の感光性樹脂組成物は、重合性モノマーを含有してもよい。重合性モノマーとしては、重合性の不飽和結合を分子中に少なくとも1つ含む化合物であればよく、重合性の不飽和結合を分子中に2つ以上含む化合物であることが好ましい。
重合性の不飽和結合を含む基としては、アリル基、アクリロイルオキシ基、メタクリロイルオキシ基等が挙げられる。これらの中でも、アクリロイルオキシ基又はメタクリロイルオキシ基が好ましい。
一般式(4)におけるR4で表される炭素数1~8のアルキレン基の具体例としては、メチレン基、エチレン基、トリメチレン基、テトラメチレン基、ヘキサメチレン基、オクタメチレン基等が挙げられる。
一般式(5)におけるR5で表される炭素数1~8のアルキレン基の具体例としては、メチレン基、エチレン基、トリメチレン基、メチルエチレン基、ジメチルメチレン基、テトラメチレン基、ヘキサメチレン基、オクタメチレン基等が挙げられる。
一般式(5)におけるpとしては、3~4の整数であることが好ましい。
これらの中でも、テトラエチレングリコールジメタクリレートが好ましい。
その他の重合性モノマーとしては、具体的には、トリメチロールプロパンジアクリレート、トリメチロールプロパントリアクリレート、トリメチロールプロパンジメタクリレート、トリメチロールプロパントリメタクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールテトラアクリレート、ペンタエリスリトールトリメタクリレート、ペンタエリスリトールテトラメタクリレート、スチレン、ジビニルベンゼン、4-ビニルトルエン、4-ビニルピリジン、N-ビニルピロリドン、2-ヒドロキシエチルメタクリレート、2-ヒドロキシエチルアクリレート、1,3-ビス(アクリロイルオキシ)-2-ヒドロキシプロパン、1,3-ビス(メタクリロイルオキシ)-2-ヒドロキシプロパン、メチレンビスアクリルアミド、N,N-ジメチルアクリルアミド、N-メチロールアクリルアミド等が挙げられる。
重合性モノマーは、1種を単独で用いても2種以上を併用してもよい。
重合性モノマーの含有量が上記範囲内である場合、実用的なレリーフパターンが得られやすく、未露光部の現像後残滓を抑制しやすい。
本開示の感光性樹脂組成物は、光重合開始剤を含有する。感光性樹脂組成物が光重合開始剤を含有することで、不飽和ポリイミド前駆体及び重合性モノマーを含有する樹脂組成物に感光性を付与することができる。
光重合開始剤は、活性光線照射によりラジカルを発生しうる化合物であれば特に制限はない。活性光線は、i線等の紫外線、可視光線、放射線等が挙げられる。
光重合開始剤は、1種単独で用いてもよく、2種以上を組み合わせてもよい。
これらのなかでも、金属元素を含まず、かつ反応性が高く高感度の観点からオキシム誘導体が好ましい。
光重合開始剤の含有量が上記範囲内の場合、光架橋が膜厚方向で均一となりやすく、実用的なレリーフパターンを得やすくなる。
本開示の感光性樹脂組成物は、カップリング剤を含有してもよい。カップリング剤は、不飽和ポリイミド前駆体、ポリイミド樹脂又は基板と相互作用を起こすことが可能な官能基を含むことが好ましい。カップリング剤が含んでいてもよい官能基としては、ヒドロキシ基、グリシジル基、フェニル基、(メタ)アクリル基、カルボキシ基、ウレア結合を有する基等が挙げられる。また、フェニル基はヒドロキシ基、カルボキシ基、アミン基等の極性基で置換されていてもよい。
カップリング剤がシランカップリング剤の場合、カップリング剤が上述の官能基を含むことで、現像後の加熱処理において、官能基部分が不飽和ポリイミド前駆体と反応し、かつシロキサン部分が基板と反応する。これにより、得られる硬化物と基板との接着性をより向上させることができる。
本開示の感光性樹脂組成物は、特定溶剤を含む。
ある態様では、溶剤に占める、N-エチル-2-ピロリドン、1,3-ジメチル-2-イミダゾリジノン及びテトラメチル尿素の合計の割合は、50質量%以上であることが好ましく、70質量%以上であることがより好ましく、90質量%以上であることがさらに好ましい。上限は特に限定されず、100質量%でもよい。
また、ある態様では、膜厚均一性の観点から、溶剤に占める、N-エチル-2-ピロリドンの割合は、50質量%以上であることが好ましく、70質量%以上であることがより好ましく、90質量%以上であることがさらに好ましい。上限は特に限定されず、100質量%でもよい。
また、ある態様では、溶解コントラストの観点から、溶剤に占める、1,3-ジメチル-2-イミダゾリジノンの割合は、50質量%以上であることが好ましく、70質量%以上であることがより好ましく、90質量%以上であることがさらに好ましい。上限は特に限定されず、100質量%でもよい。
また、ある態様では、膜厚均一性の観点から、溶剤に占める、テトラメチル尿素の割合は、50質量%以上であることが好ましく、70質量%以上であることがより好ましく、90質量%以上であることがさらに好ましい。上限は特に限定されず、100質量%でもよい。
その他の溶剤としては、N-メチル-2-ピロリドン、γ-ブチロラクトン、乳酸エチル、プロピレングリコールモノメチルエーテルアセテート、酢酸ベンジル、n-ブチルアセテート、エトキシエチルプロピオネート、メチル3-メトキシプロピオネート、N,N-ジメチルホルムアミド、N,N-ジメチルアセトアミド、ジメチルスルホキシド、ヘキサメチルホスホリルアミド、テトラメチレンスルホン、シクロヘキサノン、シクロペンタノン、ジエチルケトン、ジイソブチルケトン、メチルアミルケトン、N-メチルモルホリン等が挙げられる。
不飽和ポリイミド前駆体の含有率を一定とした場合に感光性樹脂組成物の粘度が向上し、厚膜形成性が向上する観点から、溶剤は、NEP及びTMUの少なくとも一方を含有することが好ましい。
溶剤の含有量は、特に限定されないが、一般的に、不飽和ポリイミド前駆体100質量部に対して、50質量部~1000質量部である。
本開示の感光性樹脂組成物は、重合反応の促進の観点から、さらに、熱重合開始剤を含んでもよい。
熱重合開始剤としては、製膜の際、溶剤を除去するために加熱乾燥する条件では分解せず、硬化の際の加熱により分解してラジカルを発生し、重合性モノマー同士、又は不飽和ポリイミド前駆体及び重合性モノマーの重合反応を促進する化合物が好ましい。
熱重合開始剤は、分解点が110℃~200℃の化合物が好ましく、より低温で重合反応を促進する観点から、分解点が110℃~175℃の化合物がより好ましい。
本開示の感光性樹脂組成物は、増感剤を含有してもよい。感光性樹脂組成物が増感剤を含有することにより、広範囲の露光量において、残膜率の維持と良好な解像性とを両立できる。
本開示の感光性樹脂組成物は、安定剤を含有してもよい。安定剤としてラジカル捕捉剤等が挙げられる。感光性樹脂組成物が安定剤を含有することにより、放置安定性を良好にすることができる。
本開示の感光性樹脂組成物は、界面活性剤及びレベリング剤の少なくとも一方を含有してもよい。感光性樹脂組成物が界面活性剤及びレベリング剤の少なくとも一方を含有することにより、現像性を向上させることができ、さらにはストリエーション等の膜厚のムラを抑制して塗布性を向上させることができる。
本開示の感光性樹脂組成物は、防錆剤を含有してもよい。感光性樹脂組成物が防錆剤を含有することにより、銅及び銅合金の腐食の抑制及び変色の防止ができる。
防錆剤としては、ベンゾトリアゾール等のトリアゾール誘導体、テトラゾール誘導体などが挙げられる。
防錆剤は、1種単独で用いてもよく、2種以上を組み合わせてもよい。
本開示の感光性樹脂組成物の、例えば、80質量%以上、90質量%以上、95質量%以上、98質量%以上又は100質量%が、
不飽和ポリイミド前駆体、光重合開始剤及び溶剤、
不飽和ポリイミド前駆体、重合性モノマー、カップリング剤、光重合開始剤及び溶剤、
不飽和ポリイミド前駆体、重合性モノマー、カップリング剤、光重合開始剤、溶剤及び熱重合開始剤、又は、
不飽和ポリイミド前駆体、重合性モノマー、カップリング剤、光重合開始剤及び溶剤、並びに任意に熱重合開始剤、増感剤、安定剤、界面活性剤、レベリング剤、及び防錆剤からなっていてもよい。
本開示の硬化物は、本開示の感光性樹脂組成物を硬化することで得ることができる。
本開示の硬化物は、予め定められたパターンを有するパターン硬化物であってもよく、パターンがない硬化物であってもよい。
本開示の感光性樹脂組成物のうち、溶剤としてNEP又はTMUを含む感光性樹脂組成物を硬化して得られる本開示の硬化物は、膜厚均一性に優れる傾向にある。一方、本開示の感光性樹脂組成物のうち、溶剤としてDMIを含む感光性樹脂組成物を用いて形成される硬化前の感光性樹脂膜は残膜率が高い傾向にある。その結果、溶剤としてDMIを含む感光性樹脂組成物を硬化して得られる硬化物は、厚膜となりやすい傾向にある。
本開示の硬化物の平均厚みは、5μm~20μmが好ましい。
本開示の層間絶縁膜は、本開示の硬化物を含むものであってもよい。
本開示のカバーコート層は、本開示の硬化物を含むものであってもよい。
本開示の表面保護膜は、本開示の硬化物を含むものであってもよい。
これにより、パターン硬化物を得ることができる。
乾燥温度は80℃~150℃が好ましく、溶解コントラストを確保する観点から、90℃~135℃がより好ましい。
乾燥時間は、30秒間~5分間が好ましい。
乾燥は、2回以上行ってもよい。2回以上乾燥を行う場合、1回あたりの乾燥時間が上記範囲であることが好ましい。2回以上乾燥を行う場合、乾燥時間は同じであっても異なってもよい。また、乾燥温度は同じであっても異なってもよい。
これにより、本開示の感光性樹脂組成物を膜状に形成した感光性樹脂膜を得ることができる。
照射する活性光線は、i線等の紫外線、可視光線、放射線などが挙げられるが、i線であることが好ましい。
露光装置としては、平行露光機、アライナー、投影露光機、ステッパ、スキャナ露光機等を用いることができる。
現像剤としては、感光性樹脂膜の良溶媒を単独で、又は良溶媒と貧溶媒を適宜混合して用いることができる。
良溶媒としては、N-メチル-2-ピロリドン、N-アセチル-2-ピロリドン、N,N-ジメチルアセトアミド、N,N-ジメチルホルムアミド、ジメチルスルホキシド、γ-ブチロラクトン、α-アセチル-γ-ブチロラクトン、シクロペンタノン、シクロヘキサノン等が挙げられる。
貧溶媒としては、トルエン、キシレン、メタノール、エタノール、イソプロパノール、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノメチルエーテル、水等が挙げられる。
現像時間は、用いる不飽和ポリイミド前駆体によっても異なるが、10秒間~15分間が好ましく、10秒間~5分間より好ましく、生産性の観点からは、20秒間~5分間がさらに好ましい。
リンス液としては、蒸留水、メタノール、エタノール、イソプロパノール、トルエン、キシレン、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノメチルエーテル等を単独又は適宜混合して用いてもよく、また段階的に組み合わせて用いてもよい。
不飽和ポリイミド前駆体が、加熱処理工程によって脱水閉環反応を起こし、対応するポリイミド樹脂となる。
加熱処理の温度が上記範囲内であることにより、基板又はデバイスへのダメージを小さく抑えることができ、デバイスを歩留りよく生産することが可能となり、プロセスの省エネルギー化を実現することができる。
加熱処理の時間が上記範囲内であることにより、架橋反応又は脱水閉環反応を充分に進行することができる。
加熱処理の雰囲気は大気中であっても、窒素等の不活性雰囲気中であってもよいが、パターン樹脂膜の酸化を防ぐことができる観点から、窒素雰囲気下が好ましい。
上記パッシベーション膜、バッファーコート膜、層間絶縁膜、カバーコート層及び表面保護膜等からなる群より選択される1以上を用いて、信頼性の高い、半導体装置、多層配線板、各種電子デバイス、マルチダイファンアウトウエハレベルパッケージ等の積層デバイスなどの電子部品を製造することができる。
ここで、本開示の層間絶縁膜は、本開示の硬化物を含む。溶剤としてNEP又はTMUを含む感光性樹脂組成物を硬化して得られる本開示の硬化物を含む本開示の層間絶縁膜は、膜厚均一性に優れる傾向にある。溶剤としてDMIを含む感光性樹脂組成物を硬化して得られる硬化物を含む本開示の層間絶縁膜は、厚膜となりやすい傾向にある。
また、本開示のカバーコート層は、本開示の硬化物を含む。溶剤としてNEP又はTMUを含む感光性樹脂組成物を硬化して得られる本開示の硬化物を含む本開示のカバーコート層は、膜厚均一性に優れる傾向にある。溶剤としてDMIを含む感光性樹脂組成物を硬化して得られる硬化物を含む本開示のカバーコート層は、厚膜となりやすい傾向にある。
また、本開示の表面保護膜は、本開示の硬化物を含む。溶剤としてNEP又はTMUを含む感光性樹脂組成物を硬化して得られる本開示の硬化物を含む本開示の表面保護膜は、膜厚均一性に優れる傾向にある。溶剤としてDMIを含む感光性樹脂組成物を硬化して得られる硬化物を含む本開示の表面保護膜は、厚膜となりやすい傾向にある。
図1は、本開示の一実施形態に係る電子部品である多層配線構造の半導体装置の製造工程図である。
図1において、回路素子を有するSi基板等の半導体基板1は、回路素子の所定部分を除いてシリコン酸化膜等の保護膜2などで被覆され、露出した回路素子上に第1導体層3が形成される。その後、半導体基板1上に層間絶縁膜4が形成される。
次いで、窓6Bから露出した第1導体層3を腐食することなく、感光性樹脂層5を腐食するようなエッチング溶液を用いて感光性樹脂層5が除去される。
3層以上の多層配線構造を形成する場合には、上述の工程を繰り返して行い、各層を形成することができる。
尚、前記例において、層間絶縁膜4を本開示の感光性樹脂組成物を用いて形成することも可能である。
実施例で用いられた各種材料の詳細は、以下の通りである。
・重合性モノマー:テトラエチレングリコールジメタクリレート
・光重合開始剤:1-フェニル-1,2-プロパンジオン-2-(O-エトキシカルボニル)オキシム(PDO、Lambson社)
・防錆剤:ベンゾトリアゾール(BTA)
・下記方法により合成された不飽和ポリイミド前駆体A1
・下記方法により合成された不飽和ポリイミド前駆体A2
・下記方法により合成された不飽和ポリイミド前駆体A3
4,4’-オキシジフタル酸二無水物(ODPA)7.07gと4,4’-ジアミノジフェニルエーテル(ODA)3.6gとm-フェニレンジアミン0.2gとをN-メチル-2-ピロリドン(NMP)30gに溶解し、30℃で4時間、その後室温下で一晩撹拌し、ポリアミック酸を得た。そこに水冷下でトリフルオロ酢酸無水物を9.45g加え、45℃で3時間撹拌し、メタクリル酸2-ヒドロキシエチル(HEMA)7.08gを加えた後撹拌した。この反応液を蒸留水に滴下し、沈殿物をろ別して集め、減圧乾燥することによって不飽和ポリイミド前駆体A1を得た。
ゲルパーミエーションクロマトグラフ(GPC)法を用いて、標準ポリスチレン換算により、以下の条件で、不飽和ポリイミド前駆体A1の数平均分子量を求めた。不飽和ポリイミド前駆体A1の数平均分子量は25,000であった。不飽和ポリイミド前駆体A1におけるジアミン化合物由来の残基(一般式(6)で表される2価の有機基)に占める一般式(G1)で表される基(ODA由来の残基)の割合は、90.6モル%である。
ポンプ:株式会社島津製作所製 Prominence LC-20AD
標準単分散ポリスチレン:東ソー株式会社製 TSKgel standard Polystyrene Mw=2350, 10200, 37900, 190000, 706000
測定条件:カラム:Gelpack GL-8300 MDT-5 2本直列(昭和電工マテリアルズ・テクノサービス株式会社製)
溶離液:THF/DMF=1/1(容積比)
LiBr(0.03mol/L)、H3PO4(0.06mol/L)
流速:1.0mL/min
検出波長:270nm
注入量:5μL
測定温度:40℃
ODPA7.07gと2,2’-ジメチル-4,4’-ジアミノビフェニル(DMAP)4.12gとをNMP30gに溶解し、30℃で4時間、その後室温下で一晩撹拌し、ポリアミック酸を得た。そこに水冷下でトリフルオロ酢酸無水物を9.45g加え、45℃で3時間撹拌し、HEMA7.08gを加えた後撹拌した。この反応液を蒸留水に滴下し、沈殿物をろ別して集め、減圧乾燥することによって不飽和ポリイミド前駆体A2を得た。
不飽和ポリイミド前駆体A1と同様にして不飽和ポリイミド前駆体A2の数平均分子量を求めたところ、30,000であった。不飽和ポリイミド前駆体A2におけるジアミン化合物由来の残基(一般式(6)で表される2価の有機基)に占める一般式(G1)で表される基(ODA由来の残基)の割合は、0モル%である。
ODPA31.02gとHEMA26.24gとをγ-ブチロラクトン80mLに溶解し、室温下で撹拌しながらピリジン16.30gを加えて、反応混合物を得た。
この反応混合物につき、反応による発熱の終了後に室温まで放冷し、更に16時間静置した。次に、氷冷下において前記反応混合物に、ジシクロヘキシルカルボジイミド(DCC)41.26gをγ-ブチロラクトン36mLに溶解した溶液を撹拌しながら40分かけて加え、続いてODA18.60gをγ-ブチロラクトン70mLに懸濁したものを撹拌しながら60分かけて加えた。更に室温で2時間撹拌を継続し、エチルアルコール6mLを加えて1時間撹拌した後、γ-ブチロラクトン80mLを加えた。
この反応混合物に生じた沈殿物をろ過により取り除き、反応液を得た。
得られた反応液を3リットルのエチルアルコールに投入して、粗ポリマーからなる沈殿物を生成させた。生成した粗ポリマーを濾取し、テトラヒドロフラン1.5リットルに溶解して粗ポリマー溶液を得た。得られた粗ポリマー溶液を28リットルの水に滴下してポリマーを沈殿させ、得られた沈殿物を濾取し、減圧乾燥することによって不飽和ポリイミド前駆体A3を得た。
不飽和ポリイミド前駆体A1と同様にして不飽和ポリイミド前駆体A3の数平均分子量を求めたところ、40,000であった。不飽和ポリイミド前駆体A3におけるジアミン化合物由来の残基(一般式(6)で表される2価の有機基)に占める一般式(G1)で表される基(ODA由来の残基)の割合は、100モル%である。
特定溶剤に対する不飽和ポリイミド前駆体A1~A3の溶解性を下記方法により評価した。特定溶剤との対比のため、NMPについても合わせて評価した。
10gの不飽和ポリイミド前駆体A1~A3を、所定量の溶剤に投入し、23℃で撹拌した。撹拌開始から30分経過後に目視により不飽和ポリイミド前駆体A1~A3が溶解したか否かを確認した。溶剤量を0.5gずつ増加させながら上記操作を繰り返し、不飽和ポリイミド前駆体A1~A3を溶解するのに必要最小量の溶剤量を求めた。得られた結果を表1に示す。合わせて、必要最小量の溶剤量で不飽和ポリイミド前駆体A1~A3を溶解したときの溶液の25℃における粘度を、E型粘度計(DV-2+Pro, BROOKFIELD製)を用いて測定した。NMPを溶剤として用いた参考例1又は2の粘度を基準として、各実施例の粘度を下記基準に沿って評価した。なお、実施例1~3については、参考例1の粘度(基準1)を基準とした。実施例4については、参考例2の粘度(基準2)を基準とした。実施例5については、粘度の評価を行わなかった。
A:参考例1又は2の粘度と比較して、20%を超える粘度上昇があった。
B:参考例1又は2の粘度と比較して、粘度変化が、±20%以内であった。
必要最小量の溶剤量で不飽和ポリイミド前駆体A1~A3を溶解した溶液を、膜厚均一性評価用の塗工液とした。
得られた塗工液を、6インチシリコンウエハー上にスピン塗布した後、100℃において5分加熱して溶媒を除去することにより、表1に記載の平均膜厚を有する塗膜を形成した。次いで、この塗膜の膜厚を、ウェハー上から以下の基準で選んだ41点において測定した。膜厚測定は、光干渉式膜厚測定装置(VM-2200, SCREEN社製)を用いて行った。不飽和ポリイミド前駆体A1~A3の膜厚均一性は以下の式から見積もった。
膜厚均一性[%]=(塗布後の膜厚41点の最大膜厚-塗布後の膜厚41点の最小膜厚)/41点の平均膜厚×100
測定点の選定基準:ウェハーの外周端から10mmの領域を除き、残余の全領域から均等の間隔で同心円状に設定した41点を測定点とした。
平均膜厚は、41点の測定点で測定された各膜厚の平均値とした。
表1の参考例2及び実施例4から明らかなように、不飽和ポリイミド前駆体A2は特定溶剤に対してNMPと同等の溶解性及び膜厚均一性を示すことがわかる。
高粘度の塗工液は、厚膜形成性に優れる。必要最小量の溶剤で調整した塗工液の粘度が高いということは、製膜の際に、より厚膜を形成することができることを示す。薄膜形成は溶剤を追加して塗工液の粘度を低下させることで実現可能である。塗工液の粘度が高いことは「膜厚製膜マージンが広い材料」として優れているといえる。なお、溶剤は製膜及び硬化の際の加熱で除去できるため、溶剤と不飽和ポリイミド前駆体との特別な組み合わせによって粘度を増加させる本手法は、増粘剤等の添加物を使用して塗工液の粘度を向上させる手法と異なりポリイミド膜中に添加物が残りにくく、ポリイミド膜の特性を阻害しない利点がある。
製膜する際のスピンコートを高回転で実施できれば、膜厚均一性を向上させることが可能となるものの、塗工液の粘度が低いとスピンコートを高回転で実施した際に最低限必要な塗膜の膜厚を確保することが困難になる場合がある。本願実施例では、塗工液の粘度が向上したことでスピンコートを高回転で実施しても膜厚が薄くなりにくくなった。そのため、製膜する際のスピンコートを高回転で実施できるようになり、膜厚均一性が向上したものと推察される。
感光性樹脂組成物についての特性を、以下のようにして評価した。
なお、感光性樹脂組成物は、表2に記載の各成分を、表2に記載の配合量で配合して得た。表2の各成分の配合量は、質量部基準である。
得られた感光性樹脂組成物を、塗布装置Act8(東京エレクトロン株式会社製)を用いて、6インチシリコンウエハ上にスピンコートし、90℃で200秒間乾燥後、100℃で200秒間乾燥(プリベーク)して感光性樹脂膜を形成した。スピンコートの回転条件は回転時間を30秒に固定し、乾燥膜厚が約15μmになるよう回転数を調整した。今回の評価では2000回転/分~2500回転/分の範囲とした。表2に、乾燥膜厚の実測値(膜厚)を示す。
得られた感光性樹脂膜をシクロペンタノンに浸漬して、感光性樹脂膜が完全に溶解するまでの時間(現像時間)を測定することで、未露光部の溶解速度(DR1)を算出した。
DR1 = (プリベーク後の膜厚)/ 現像時間
また、上記と同様に感光性樹脂膜を作製し、得られた感光性樹脂膜の全面に、i線ステッパFPA-3000iW(キヤノン株式会社製)を用いて、700mJ/cm2のi線を照射して、露光を行った。
露光後の感光性樹脂膜を、Act8を用いて、シクロペンタノンにより上記の現像時間でパドル現像した後、プロピレングリコールモノメチルエーテルアセテート(PGMEA)でリンス洗浄を行った。下記式を用いて露光部の溶解速度(DR2)を算出した。
DR2=(プリベーク後の膜厚 ― 現像後の膜厚)/ 現像時間
上述のようにして求められた、感光性樹脂膜の未露光部の溶解速度DR1及び感光性樹脂膜の露光部の溶解速度DR2に基づいて溶解コントラスト(DR1/DR2)を算出した。得られた結果を表2に示す。
得られた感光性樹脂組成物を、塗布装置Act8(東京エレクトロン株式会社製)を用いて、6インチシリコンウエハ上にスピンコートし、90℃で200秒間乾燥後、100℃で200秒間乾燥(プリベーク)して感光性樹脂膜を形成した。スピンコートの回転条件は回転時間を30秒に固定し、乾燥膜厚が約15μmになるよう回転数を調整した。今回の評価では2000回転/分~2500回転/分の範囲とした。
得られた感光性樹脂膜をシクロペンタノンに浸漬して、感光性樹脂膜が完全に溶解するまでの時間の2倍を現像時間として設定した。
また、上記と同様に感光性樹脂膜を作製し、得られた感光性樹脂膜に、i線ステッパFPA-3000iW(キヤノン株式会社製)を用いて、100mJ/cm2~1100mJ/cm2のi線を、100mJ/cm2刻みの露光量で、所定のパターンに照射して、露光を行った。
露光後の感光性樹脂膜を、Act8を用いて、シクロペンタノンにより上記の現像時間でパドル現像した後、プロピレングリコールモノメチルエーテルアセテート(PGMEA)でリンス洗浄を行い、所定のパターン樹脂膜を得た。露光量が300mJ/cm2又は700mJ/cm2の時の残膜率を、下記計算式を用いて算出した。得られた結果を表2に示す。
残膜率(%) = 100 × (現像後の膜厚) / (プリベーク後の膜厚)
得られた感光性樹脂組成物を、塗布装置Act8(東京エレクトロン株式会社製)を用いて、6インチシリコンウエハ上にスピンコートし、90℃で200秒間乾燥後、100℃で200秒間乾燥(プリベーク)して感光性樹脂膜を形成した。スピンコートの回転条件は回転時間を30秒に固定し、乾燥膜厚が約15μmになるよう回転数を調整した。今回の評価では2000回転/分~2500回転/分の範囲とした。
得られた感光性樹脂膜をシクロペンタノンに浸漬して、感光性樹脂膜が完全に溶解するまでの時間の2倍を現像時間として設定した。
また、上記と同様に感光性樹脂膜を作製し、得られた感光性樹脂膜に、i線ステッパFPA-3000iW(キヤノン株式会社製)を用いて、700mJ/cm2のi線(実施例3では、800mJ/cm2)をフォトマスクを介して感光性樹脂膜に照射した。
露光後の感光性樹脂膜を、Act8を用いて、シクロペンタノンにより上記の現像時間でパドル現像した後、プロピレングリコールモノメチルエーテルアセテート(PGMEA)でリンス洗浄を行い、所定のパターン樹脂膜を得た。所定のパターンは、ホールパターン及び線幅比率が1:1のラインアンドスペースパターンとした。はがれ及び残渣がなく、パターニングできた最小のホールの直径及びラインの線幅を解像度とし、下記基準に沿って評価した。表2において、「解像度(L/S)」はラインアンドスペースパターンの解像度を、「解像度(hole)」はホールパターンの解像度を、各々示す。
A:最小のホールの直径又はラインの線幅が20μm以下の範囲であった。
B:最小のホールの直径又はラインの線幅が20μmを超え50μm以下の範囲であった。
C:最小のホールの直径又はラインの線幅が50μmを超える範囲であった。
表2の実施例2、4及び5の対比から明らかなように、DMIを溶剤として用いた場合に、不飽和ポリイミド前駆体におけるジアミン化合物由来の残基(一般式(6)で表される2価の有機基)に占める一般式(G1)で表される基(ODA由来の残基)の割合が低くなるにつれて、溶解コントラストが向上することがわかる。
本明細書に記載された全ての文献、特許出願、及び技術規格は、個々の文献、特許出願、及び技術規格が参照により取り込まれることが具体的かつ個々に記された場合と同程度に、本明細書中に参照により取り込まれる。
2 保護膜
3 第1導体層
4 層間絶縁膜
5 感光性樹脂層
6A、6B、6C 窓
7 第2導体層
8 表面保護膜
Claims (15)
- 重合性の不飽和結合を有するポリイミド前駆体と、光重合開始剤と、溶剤と、を含有し、
前記溶剤が、N-エチル-2-ピロリドン、1,3-ジメチル-2-イミダゾリジノン及びテトラメチル尿素からなる群より選択される少なくとも1種を含有する感光性樹脂組成物。 - 前記溶剤に占める、N-エチル-2-ピロリドン、1,3-ジメチル-2-イミダゾリジノン及びテトラメチル尿素の合計の割合が、50質量%以上である請求項1に記載の感光性樹脂組成物。
- 前記溶剤に占める、N-エチル-2-ピロリドンの割合が、50質量%以上である請求項1に記載の感光性樹脂組成物。
- 前記溶剤に占める、1,3-ジメチル-2-イミダゾリジノンの割合が、50質量%以上である請求項1に記載の感光性樹脂組成物。
- 前記溶剤に占める、テトラメチル尿素の割合が、50質量%以上である請求項1に記載の感光性樹脂組成物。
- 前記光重合開始剤が、オキシム誘導体を含有する請求項1~請求項7のいずれか1項に記載の感光性樹脂組成物。
- 請求項1~請求項8のいずれか1項に記載の感光性樹脂組成物を硬化した硬化物。
- パターン硬化物である請求項9に記載の硬化物。
- 層間絶縁膜、カバーコート層又は表面保護膜として用いられる請求項9又は請求項10に記載の硬化物。
- 請求項9に記載の硬化物を含む層間絶縁膜。
- 請求項9に記載の硬化物を含むカバーコート層。
- 請求項9に記載の硬化物を含む表面保護膜。
- 請求項9~請求項11のいずれか1項に記載の硬化物を含む電子部品。
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JP2015014705A (ja) * | 2013-07-05 | 2015-01-22 | 東京応化工業株式会社 | ネガ型感光性樹脂組成物 |
WO2018037997A1 (ja) * | 2016-08-22 | 2018-03-01 | 旭化成株式会社 | 感光性樹脂組成物及び硬化レリーフパターンの製造方法 |
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JP2015014705A (ja) * | 2013-07-05 | 2015-01-22 | 東京応化工業株式会社 | ネガ型感光性樹脂組成物 |
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