WO2022130689A1 - Élément de diffraction optique, système de calcul optique et procédé de fabrication d'élément de diffraction optique - Google Patents

Élément de diffraction optique, système de calcul optique et procédé de fabrication d'élément de diffraction optique Download PDF

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Publication number
WO2022130689A1
WO2022130689A1 PCT/JP2021/030193 JP2021030193W WO2022130689A1 WO 2022130689 A1 WO2022130689 A1 WO 2022130689A1 JP 2021030193 W JP2021030193 W JP 2021030193W WO 2022130689 A1 WO2022130689 A1 WO 2022130689A1
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light
optical
diffraction element
wavelength
calculation
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PCT/JP2021/030193
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English (en)
Japanese (ja)
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裕幸 日下
正浩 柏木
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株式会社フジクラ
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Publication of WO2022130689A1 publication Critical patent/WO2022130689A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F3/00—Optical logic elements; Optical bistable devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/02—Details of features involved during the holographic process; Replication of holograms without interference recording

Definitions

  • the present invention relates to an optical diffraction element that performs optical calculation. Further, the present invention relates to an optical calculation system provided with such an optical diffraction element. Further, the present invention relates to a method for manufacturing such an optical diffraction element.
  • Patent Document 1 discloses an optical neural network having an input layer, an intermediate layer, and an output layer. The above-mentioned optical diffraction element can be used, for example, as an intermediate layer of such an optical neural network.
  • the conventional optical diffractive element has a problem that it can only perform a specific optical calculation when light of a specific wavelength is input. Therefore, for example, when inputting multicolored light, it is not possible to perform different optical operations for each color.
  • One aspect of the present invention has been made in view of the above problems, and an object thereof is to realize an optical diffraction element capable of performing different optical operations for each wavelength of input light.
  • the optical diffraction element according to one aspect of the present invention is an optical diffraction element composed of a plurality of cells whose thicknesses or refractive indexes are set independently of each other, and n types (n) having different wavelength bands of transmitted light. Contains cells C1, C2, ..., Cn of 2 or more natural numbers).
  • an optical diffraction element capable of performing different optical calculations for each wavelength of input light. Further, according to one aspect of the present invention, it is possible to realize an optical calculation system including such an optical diffraction element.
  • FIG. 3 is a perspective view showing a configuration of a main part of a first optical calculation system including the optical diffraction element shown in FIG. 1.
  • FIG. 3 is a perspective view showing a configuration of a main part of a second optical calculation system including the optical diffraction element shown in FIG. 1.
  • FIG. 1 is a plan view of the light diffraction element 1.
  • FIG. 2 is an enlarged perspective view of a part of the optical diffraction element 1 (the portion surrounded by the broken line in FIG. 1).
  • the optical diffraction element 1 is a flat plate-shaped optical diffraction element, and is composed of a plurality of microcells (examples of "cells" in the claims) in which the thickness or the refractive index are set independently of each other.
  • the microcell refers to a cell having a cell size of less than 10 ⁇ m.
  • the cell size refers to the square root of the area of the cell. For example, when the plan view shape of the microcell is square, the cell size is the length of one side of the cell.
  • the lower limit of the cell size is not particularly limited, but is, for example, 1 nm.
  • the optical diffraction element 1 illustrated in FIG. 1 is composed of 12 ⁇ 12 microcells arranged in a matrix.
  • the plan view shape of each microcell is a square of 1 ⁇ m ⁇ 1 ⁇ m
  • the plan view shape of the light diffraction element 1 is a square of 12 ⁇ m ⁇ 12 ⁇ m.
  • the optical diffraction element 1 includes n types of microcells C1, C2, ..., Cn having different aperture sizes (n is a natural number of 2 or more).
  • the aperture refers to a region through which light is transmitted, for example, an unmasked region.
  • the opening size refers to the square root of the opening area. For example, when the shape of the opening is square, the opening size is the length of one side of the opening.
  • the optical diffraction element 1 illustrated in FIG. 1 includes four types of microcells C1, C2, C3, and C4.
  • the microcell C1 is a microcell having an opening size ⁇ 1.
  • a square opening having a side of ⁇ 1 is provided at the center of the microcell C1, and the periphery thereof (black-painted area in FIG. 1) is masked.
  • the microcell C2 is a microcell having an opening size ⁇ 2.
  • a square opening with a side of ⁇ 2 is provided at the center of the microcell C2, and the periphery thereof is masked.
  • the microcell C3 is a microcell having an opening size ⁇ 3.
  • a square opening with a side of ⁇ 3 is provided at the center of the microcell C3, and the periphery thereof is masked.
  • the microcell C4 is a microcell having an opening size ⁇ 4. The entire cell of the microcell C4 is open. Therefore, the opening size ⁇ 4 of the microcell C4 matches the cell size.
  • Each microcell Ci constituting the optical diffraction element 1 mainly acts on input light having a normalized wavelength of less than the aperture size ⁇ i.
  • the normalized wavelength refers to a value obtained by dividing the wavelength by the normalized constant ⁇ .
  • the optical diffraction element 1 exemplified in FIG. 1, it is possible to perform four types of optical calculations. That is, when light having a standardized wavelength of less than ⁇ 1 is incident on the optical diffraction element 1, the first optical calculation is mainly performed by the light transmitted through the microcells C1, C2, C3, and C4 interfering with each other. .. Further, when light having a normalized wavelength of ⁇ 1 or more and less than ⁇ 2 is incident on the optical diffraction element 1, the second optical calculation is mainly performed by the light transmitted through the microcells C2, C3, and C4 interfering with each other. ..
  • the third optical calculation is mainly performed by the light transmitted through the microcells C3 and C4 interfering with each other.
  • a fourth optical calculation is mainly performed by the light transmitted through the microcell C4 interfering with each other.
  • each microcell Cj is composed of a square columnar pillar having a square bottom surface having a side of ⁇ i.
  • the amount of phase change of the light transmitted through the microcell Ci is determined according to the height of the pillar. That is, the amount of phase change of the light transmitted through the microcell Ci composed of the pillars having a high height becomes large, and the amount of the phase change of the light transmitted through the microcell Ci composed of the pillars having a low height becomes small.
  • the design of the optical diffraction element 1 is performed as follows. First, when light having a normalized wavelength of ⁇ n-1 or more and less than ⁇ n is incident on the light diffractive element 1, the light transmitted through the microcell Cn interferes with each other so that the first optical calculation is performed. The thickness or refractive index of the cell Cn is set. Next, on the premise that the thickness or refractive index of the microcell Cn is set as described above, light having a standardized wavelength of ⁇ n-2 or more and less than ⁇ n-1 is incident on the optical diffraction element 1.
  • the thickness or refractive index of the microcells Cn-1 is set so that the second optical calculation is performed by the light transmitted through the microcells Cn-1 and Cn interfering with each other.
  • the standardized wavelength of the optical diffraction element 1 is ⁇ n-3 or more and less than ⁇ n-2.
  • the thickness or refractive index of the microcell Cn-2 is set so that the third optical calculation is performed by the light transmitted through the microcells Cn-2, Cn-1, and Cn interfering with each other when the light is incident.
  • the desired light can be input regardless of the wavelength of light. It is possible to realize the optical diffraction element 1 that performs the calculation.
  • the thickness or refractive index of each microcell Ci in each step can be set by using, for example, machine learning.
  • the model used in this machine learning is, for example, a model in which the intensity distribution of the input light to the optical diffraction element 1 is input and the intensity distribution of the output light from the optical diffraction element 1 is output, and each microcell is used.
  • a model including the thickness or refractive index of Ci as a parameter can be used.
  • the intensity distribution of the input light refers to, for example, the intensity of the input light input to each microcell Ci of the optical diffraction element 1.
  • the output light refers to light generated by mutual interference of light transmitted through each microcell Ci of the light diffractive element 1, and the intensity distribution of the output light is, for example, the subsequent stage of the light diffractive element 1. Refers to the intensity of the output light input to each microcell (or each cell of the image sensor) of the optical diffraction element arranged in.
  • FIG. 3 is a perspective view showing a configuration of a main part of an optical calculation system 10A that uses the light diffraction element 1 as such a calculation element.
  • the optical calculation system 10A includes a light emitting device 2A and a light receiving device 3A in addition to the light diffraction element 1.
  • the optical diffraction element 1 includes microcells C1, C2, C3, and C4 having an aperture size of ⁇ 1, ⁇ 2, ⁇ 3, and ⁇ 4, as shown in FIG.
  • the light emitting device 2A is a device for generating input light input to the light diffractive element 1.
  • the light emitting device 2A has a plurality of cells arranged in a matrix, and is composed of, for example, a two-dimensional display.
  • the cell of the light emitting device 2A and the microcell of the light diffractive element 1 have a one-to-one correspondence.
  • the light output from each cell of the light emitting device 2A is input to the corresponding microcell of the light diffractive element 1.
  • the light receiving device 3A is a device for detecting the output light output from the light diffraction element 1.
  • the light receiving device 3A has a plurality of cells arranged in a matrix, and is composed of, for example, a two-dimensional image sensor.
  • the cell of the light receiving device 3A and the microcell of the light diffractive element 1 have a one-to-one correspondence.
  • the light transmitted through each microcell of the light diffractive element 1 interferes with the light transmitted through the other microcells of the light diffracting element 1 and is input to each cell of the light receiving device 3A.
  • each cell of the light emitting device 2A, each cell of the optical diffraction element 1, and each cell of the light receiving device 3A operate as follows.
  • Each cell of the light emitting device 2A outputs multicolored light including all monochromatic light having standardized wavelengths ⁇ 1, ⁇ 2, ⁇ 3, ⁇ 4.
  • the normalized wavelengths ⁇ 1, ⁇ 2, ⁇ 3, ⁇ 4 satisfy ⁇ 1 ⁇ 1 ⁇ ⁇ 2 ⁇ 2 ⁇ ⁇ 3 ⁇ 3 ⁇ ⁇ 4 ⁇ 4.
  • the optical diffraction element 1 executes the first optical calculation, the second optical calculation, the third optical calculation, and the fourth optical calculation in parallel.
  • the first optical calculation is mainly an optical calculation realized by mutual interference of light having a normalized wavelength ⁇ 1 transmitted through microcells C1, C2, C3, and C4.
  • the second optical calculation is an optical calculation mainly realized by mutual interference of light having a normalized wavelength ⁇ 2 transmitted through the microcells C2, C3, and C4.
  • the third optical calculation is an optical calculation mainly realized by mutual interference of light having a normalized wavelength ⁇ 3 transmitted through the microcells C3 and C4.
  • the fourth optical operation is mainly an optical operation realized by mutual interference of light having a normalized wavelength ⁇ 4 transmitted through the microcell C4.
  • Each cell of the light receiving device 3A has (a) the intensity of light having a standardized wavelength ⁇ 1, (b) the intensity of light having a standardized wavelength ⁇ 2, (c) the intensity of light having a standardized wavelength ⁇ 3, and ( d) The intensity of light having the standardized wavelength ⁇ 4 is detected respectively.
  • (A) The intensity distribution of the light having the standardized wavelength ⁇ 1 detected by the light receiving device 3A (the set of the light intensity received by each cell) represents the result of the first optical calculation
  • the detected light intensity distribution having the standardized wavelength ⁇ 2 represents the result of the second optical calculation
  • (c) the light intensity distribution of the standardized wavelength ⁇ 3 detected by the light receiving device 3A is the result of the third light calculation.
  • the result is shown, and (d) the light intensity distribution of the standardized wavelength ⁇ 4 detected by the light receiving device 3A represents the calculation result of the fourth optical calculation.
  • the optical calculation system 10A can be suitably used for optical calculation using a color image as an input.
  • the pixel values corresponding to each pixel have a red component, a green component, and a blue component, but according to the optical calculation system 10A, different optical calculations are performed for each of these components. Is possible.
  • a single light diffractive element 1 is arranged on the optical path of the light output from the light emitting device 2A, and the light transmitted through the light diffractive element 1 is input to the light receiving device 3A.
  • the present invention is not limited to this.
  • a configuration may be adopted in which a plurality of light diffractive elements 1 are arranged on the optical path of the light output from the light emitting device 2A, and the light transmitted through these light diffractive elements 1 is input to the light receiving device 3A. This makes it possible to realize an optical calculation system 10A capable of sequentially executing a plurality of optical calculations.
  • the optical diffraction element 1 can also be used as an arithmetic element capable of switching the optical arithmetic to be executed.
  • FIG. 4 is a perspective view showing a configuration of a main part of an optical calculation system 10B that uses the light diffraction element 1 as such a calculation element.
  • the optical calculation system 10B includes a light emitting device 2B and a light receiving device 3B in addition to the light diffraction element 1.
  • the optical diffraction element 1 includes microcells C1, C2, C3, and C4 having aperture sizes of ⁇ 1, ⁇ 2, ⁇ 3, and ⁇ 4, as shown in FIG.
  • the light emitting device 2B is a device for generating input light input to the light diffractive element 1.
  • the light emitting device 2B has a plurality of cells arranged in a matrix, and is composed of, for example, a two-dimensional display. There is a one-to-one correspondence between the cell of the light emitting device 2B and the microcell of the light diffracting element 1. The light output from each cell of the light emitting device 2B is input to the corresponding microcell of the light diffractive element 1.
  • the light receiving device 3B is a device for detecting the output light output from the light diffraction element 1.
  • the light receiving device 3B has a plurality of cells arranged in a matrix, and is composed of, for example, a two-dimensional image sensor. There is a one-to-one correspondence between the cell of the light receiving device 3B and the microcell of the light diffractive element 1. The light transmitted through each microcell of the light diffractive element 1 interferes with the light transmitted through the other microcells of the light diffracting element 1 and is input to each cell of the light receiving device 3B.
  • each cell of the light emitting device 2B, each cell of the optical diffraction element 1, and each cell of the light receiving device 3B operate as follows.
  • Each cell of the light emitting device 2B outputs monochromatic light having a normalized wavelength selected from the normalized wavelengths ⁇ 1, ⁇ 2, ⁇ 3, and ⁇ 4.
  • the normalized wavelengths ⁇ 1, ⁇ 2, ⁇ 3, ⁇ 4 satisfy ⁇ 1 ⁇ 1 ⁇ ⁇ 2 ⁇ 2 ⁇ ⁇ 3 ⁇ 3 ⁇ ⁇ 4 ⁇ 4.
  • the light diffractive element 1 has either a first light calculation, a second light calculation, a third light calculation, or a fourth light calculation, depending on the wavelength of light output from each cell of the light emitting device 2B.
  • the first optical calculation is an optical calculation realized mainly by the mutual interference of the light transmitted through the microcells C1, C2, C3, and C4, and the standardized wavelength ⁇ 1 is selected by the light emitting device 2B.
  • the second optical calculation is an optical calculation mainly realized by mutual interference of light transmitted through the microcells C2, C3, and C4, and when the normalized wavelength ⁇ 2 is selected by the light emitting device 2B. Is executed.
  • the third optical calculation is an optical calculation realized mainly by the mutual interference of the light transmitted through the microcells C3 and C4, and is executed when the normalized wavelength ⁇ 3 is selected by the light emitting device 2B. Will be done.
  • the fourth optical calculation is mainly an optical calculation realized by mutual interference of light having a normalized wavelength ⁇ 4 transmitted through the microcell C4, and the normalized wavelength ⁇ 4 is selected by the light emitting device 2B. Will be executed when
  • Each cell of the light receiving device 3B detects the intensity of light having a normalized wavelength selected by the light emitting device 2B.
  • the standardized wavelength ⁇ 1 is selected by the light emitting device 2B
  • the light intensity distribution detected by the light receiving device 3B represents the result of the first optical calculation
  • (b) is standardized by the light emitting device 2B.
  • the wavelength ⁇ 2 is selected
  • the light intensity distribution detected by the light receiving device 3B represents the result of the second optical calculation
  • the standardized wavelength ⁇ 3 is selected by the light emitting device 2B, the light receiving device.
  • the light intensity distribution detected by 3B represents the calculation result of the third optical calculation, and (d) when the standardized wavelength ⁇ 4 is selected by the light emitting device 2B, the light intensity distribution detected by the light receiving device 3B is , Represents the result of the fourth optical calculation.
  • a single light diffractive element 1 is arranged on the optical path of the light output from the light emitting device 2B, and the light transmitted through the light diffractive element 1 is input to the light receiving device 3B.
  • the present invention is not limited to this.
  • a configuration may be adopted in which a plurality of light diffractive elements 1 are arranged on the optical path of the light output from the light emitting device 2B, and the light transmitted through these light diffractive elements 1 is input to the light receiving device 3B. This makes it possible to realize an optical calculation system 10B capable of sequentially executing a plurality of optical calculations.
  • the present invention in order to realize a microcell that selectively transmits light belonging to a specific wavelength band, a configuration in which an opening is provided in the microcell has been described, but the present invention is not limited thereto.
  • a configuration in which a wavelength filter is provided in the microcell can be adopted.
  • the wavelength filter may be of a type that selectively transmits light having a wavelength shorter than the upper limit threshold value, or may be of a type that selectively transmits light having a wavelength longer than the lower limit threshold value. ..
  • the wavelength filter may be of a type that selectively transmits light having a wavelength longer than the lower limit threshold value and shorter than the upper limit threshold value.
  • the optical diffraction element is composed of n types of microcells C1, C2, ..., Cn to which n types of wavelength filters having different wavelength bands of transmitted light are added.
  • Examples of wavelength filters that can be used for such purposes include metasurfaces.
  • a metasurface may be formed on the entrance surface or the exit surface of the pillars.
  • the light transmitted through each microcell can be limited to (1) light having a wavelength equal to or lower than a specific upper limit wavelength, and (2) specified. It can be limited to light having a wavelength equal to or higher than the lower limit wavelength of (3), or it can be limited to light having a wavelength equal to or higher than a specific lower limit wavelength and equal to or lower than a specific upper limit wavelength. Therefore, it is possible to realize an optical diffraction element that performs different optical operations depending on the wavelength of the input light, similar to the configuration in which the aperture is provided in the microcell.
  • the optical diffraction element according to the first aspect of the present invention is an optical diffraction element composed of a plurality of cells whose thicknesses or refractive indexes are set independently of each other, and n types (n) having different wavelength bands of transmitted light. Contains cells C1, C2, ..., Cn of 2 or more natural numbers).
  • the cells C1, C2, ..., Cn are n types of cells having different aperture sizes.
  • the opening sizes ⁇ 1, ⁇ 2, ..., ⁇ n of the cells C1, C2, ..., Cn satisfy ⁇ 1 ⁇ 2 ⁇ ... ⁇ n.
  • optical calculation is performed by interfering the light transmitted through cells C1, C2, ..., Cn with each other, and the standardized wavelength is ⁇ j-1 or more and less than ⁇ j (.
  • the optical calculation is performed by interfering the light transmitted through the cells Cj, Cj + 1, ..., Cn with each other.
  • multicolored light including monochromatic light having standardized wavelengths ⁇ 1, ⁇ 2, ..., ⁇ n satisfying ⁇ 1 ⁇ 1 ⁇ ⁇ 2 ⁇ 2 ⁇ ... ⁇ n-1 ⁇ ⁇ n ⁇ n is input to the optical diffractive element.
  • n kinds of optical operations can be executed in parallel by using the optical diffraction element.
  • monochromatic light having a standardized wavelength selected from standardized wavelengths ⁇ 1, ⁇ 2, ..., ⁇ n satisfying ⁇ 1 ⁇ 1 ⁇ ⁇ 2 ⁇ 2 ⁇ ... ⁇ n-1 ⁇ ⁇ n ⁇ n is described above.
  • n kinds of optical operations can be selectively executed.
  • each of the plurality of optical cells is configured by pillars whose heights are set independently of each other. The configuration is adopted.
  • the above optical diffraction element can be easily manufactured by using nanoimprint technology or the like.
  • the optical calculation system includes the optical diffraction element according to the third aspect and a light emitting device that outputs multicolored light including a plurality of monochromatic lights as input light to the optical diffraction element.
  • the standardized wavelengths ⁇ 1, ⁇ 2, ..., ⁇ n of the plurality of monochromatic lights satisfy ⁇ 1 ⁇ 1 ⁇ ⁇ 2 ⁇ 2 ⁇ ... ⁇ n-1 ⁇ ⁇ n ⁇ n.
  • n kinds of optical operations can be executed in parallel using the above optical diffraction element.
  • the optical calculation system includes the optical diffraction element according to the third aspect and a light emitting device that outputs monochromatic light as input light to the optical diffractive element, and is a standard for the monochromatic light.
  • the diffraction wavelength is configured to be selected from the standardized wavelengths ⁇ 1, ⁇ 2, ..., ⁇ n satisfying ⁇ 1 ⁇ 1 ⁇ ⁇ 2 ⁇ 2 ⁇ ... ⁇ n-1 ⁇ ⁇ n ⁇ n.
  • n kinds of optical operations can be selectively executed by using the above optical diffraction element.
  • the manufacturing method according to the seventh aspect of the present invention is the manufacturing method of the optical diffraction element according to the third aspect, and when light having a standardized wavelength of less than ⁇ 1 is input to the optical diffraction element, the optical diffraction element becomes the first.
  • the optical diffractive element performs the jth optical calculation. As done, it comprises the step of setting the thickness or refractive index of the plurality of cells using machine learning.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

La présente invention réalise un élément de diffraction optique avec lequel différents calculs optiques peuvent être exécutés pour chaque longueur d'onde de lumière d'entrée. Un élément de diffraction optique (1) est constitué d'une pluralité de microcellules dont les épaisseurs ou indices de réfraction sont réglés de manière à être indépendants l'un de l'autre. L'élément de diffraction optique comprend n-types (n étant un nombre naturel d'au moins 2) de microcellules (C1, C2, … Cn) ayant des tailles d'ouvertures différentes.
PCT/JP2021/030193 2020-12-18 2021-08-18 Élément de diffraction optique, système de calcul optique et procédé de fabrication d'élément de diffraction optique WO2022130689A1 (fr)

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JP2020-210652 2020-12-18

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JP2007057622A (ja) * 2005-08-22 2007-03-08 Ricoh Co Ltd 光学素子及びその製造方法、光学素子用形状転写型の製造方法及び光学素子用転写型
JP2009534700A (ja) * 2006-04-19 2009-09-24 コミツサリア タ レネルジー アトミーク マイクロ−構造スペクトルフィルター及び画像センサー
JP2008250054A (ja) * 2007-03-30 2008-10-16 Dainippon Printing Co Ltd ホログラム作製方法及びその方法により作製されたホログラム
JP2009015305A (ja) * 2007-06-07 2009-01-22 Seiko Epson Corp 光学素子及び投写型表示装置
US20120266935A1 (en) * 2011-04-20 2012-10-25 International Business Machines Corporation Homogenizing light-pipe for solar concentrators
US20130076581A1 (en) * 2011-09-26 2013-03-28 Thales Antenna lens comprising a dielectric component diffractive suitable shaping a wavefront microwave
US20160131808A1 (en) * 2013-06-04 2016-05-12 Nil Technology Aps An optical device capable of providing a structural color, and a corresponding method of manufacturing such a device
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