WO2022088784A1 - 刚柔耦合超精双轴转台 - Google Patents
刚柔耦合超精双轴转台 Download PDFInfo
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- WO2022088784A1 WO2022088784A1 PCT/CN2021/108025 CN2021108025W WO2022088784A1 WO 2022088784 A1 WO2022088784 A1 WO 2022088784A1 CN 2021108025 W CN2021108025 W CN 2021108025W WO 2022088784 A1 WO2022088784 A1 WO 2022088784A1
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- rigid
- flexible
- flexible coupling
- bracket
- worktable
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- 230000008878 coupling Effects 0.000 title claims abstract description 94
- 238000010168 coupling process Methods 0.000 title claims abstract description 94
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 94
- 230000005489 elastic deformation Effects 0.000 claims abstract description 34
- 238000001514 detection method Methods 0.000 claims description 25
- 238000005259 measurement Methods 0.000 claims description 4
- 230000008859 change Effects 0.000 abstract description 13
- 238000000034 method Methods 0.000 abstract description 9
- 230000008569 process Effects 0.000 abstract description 5
- 230000003068 static effect Effects 0.000 description 12
- 230000009193 crawling Effects 0.000 description 8
- 238000013461 design Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000001133 acceleration Effects 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/20—Undercarriages with or without wheels
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/20—Undercarriages with or without wheels
- F16M11/2007—Undercarriages with or without wheels comprising means allowing pivoting adjustment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/20—Undercarriages with or without wheels
- F16M11/2007—Undercarriages with or without wheels comprising means allowing pivoting adjustment
- F16M11/2014—Undercarriages with or without wheels comprising means allowing pivoting adjustment around a vertical axis
Definitions
- the invention relates to the technical field of turntables, in particular to a rigid-flexible coupling ultra-precision double-axis turntable.
- Two-axis turntables are widely used as tracking or aiming devices in photoelectric radar, laser weapons, and laser satellite communications. Uncertain changes in surface roughness between kinematic pairs in a two-axis turntable can lead to uncertain changes in the magnitude of frictional resistance.
- the speed of the dual-axis turntable is relatively low, and the amplitude fluctuation of the above-mentioned frictional resistance easily leads to the phenomenon of "crawling" of the dual-axis turntable.
- the driver Under the action of the closed-loop control system, the driver will overcome the frictional resistance by increasing the driving force and compensate the positioning error of the dual-axis turntable.
- the dual-axis turntable will experience frequent “static ⁇ moving” state switching.
- the frictional resistance between the motion pairs will experience the state switching of "static friction ⁇ dynamic friction”
- the difference between the static friction coefficient and the dynamic friction coefficient will lead to the sudden change of acceleration at the moment of the above state switching, resulting in
- the "jitter" of the two-axis turntable near the final positioning position affects the angular positioning accuracy.
- the angular positioning error of the dual-axis turntable will be infinitely amplified, and it will be missed by a tiny bit and a thousand miles away.
- the general positioning accuracy of the existing dual-axis turntable is 5 arcseconds, and an error of 1m occurs at 20km. Therefore, how to reduce the influence of the angular positioning error caused by the switching of friction states during the process of starting, stopping and micro-rotation is an important issue that affects the execution accuracy of the dual-axis turntable.
- the existing technology mainly relies on two aspects to reduce its influence on the angular positioning accuracy: on the one hand, an accurate friction force model is established for rotational control driving force compensation; on the other hand, a frictionless or low friction kinematic pair design is adopted.
- an accurate friction force model is established for rotational control driving force compensation; on the other hand, a frictionless or low friction kinematic pair design is adopted.
- due to factors such as the difference in the microscopic characteristics of the contact surfaces between the kinematic pairs and manufacturing errors it is difficult to establish a highly accurate friction force model, which leads to the need for complex compensation control methods in the rotation control system.
- the implementation cost of low-friction motion pairs such as air bearing or magnetic bearing is relatively high, which limits its application range.
- foreign high-precision turntables such as Aerotech
- the positioning accuracy is about 2arc sec. Most of the air-bearing bearings without mechanical contact are used, which are very expensive, and most high-precision turntables cannot be sold in China. .
- the present invention provides a rigid-flexible coupled ultra-precision biaxial turntable.
- the present invention provides the following technical solutions:
- the main body includes a first rigid-flexible coupling rotary platform, a second rigid-flexible coupling rotary platform, a third rigid-flexible coupling shaft and a stage connected by a U-shaped connecting frame or a Y-shaped connecting frame;
- the first rigid-flexible coupling rotating platform includes a first support, a first rotating shaft, a first flexible hinge and a first worktable, the first rotating shaft is arranged on the first support through a bearing, and the first worktable passes through the first support.
- a flexible hinge is connected to the first rotating shaft to form the first rotating shaft of the rigid-flexible coupling ultra-precision double-axis turntable.
- the second rigid-flexible coupling rotating platform includes a second bracket, a second rotating shaft, a second flexible hinge, and a second worktable;
- the second bracket is arranged on one side of the U-shaped connecting frame or the Y-shaped connecting frame, and the first
- the two rotating shafts are arranged on the second bracket through the bearing, and the second worktable is arranged on the second rotating shaft through the second flexible hinge;
- the third rigid-flexible coupling shaft includes a third bracket, a third rotating shaft, a third flexible hinge and a third worktable; the third bracket is arranged on the other side of the U-shaped connecting frame or the Y-shaped connecting frame, and the third The rotating shaft is arranged on the third bracket through the bearing, and the third working platform is arranged on the third rotating shaft through the third flexible hinge; the object platform is connected with the second working platform and the third working platform in any combination.
- the second axis of the rigid-flexible coupling ultra-precision dual-axis turntable rotation is integrally formed.
- the second bracket and the third bracket and the U-shaped connection frame or the Y-shaped connection frame are integrally formed structures.
- the second worktable, the third worktable and the carrier are integrally formed structures.
- first worktable and the first flexible hinge are directly processed and formed on the base of the U-shaped connecting frame or the Y-shaped connecting frame.
- the first main detection element composed of a first main encoder disk and a first main reading head, used for real-time measurement of the rotation angle of the first rotating shaft under any circumstances, and a first auxiliary encoder disk and a first main detection element.
- the first sub-reading head constitutes a first sub-detecting element for indirectly measuring the elastic deformation of the first flexible hinge.
- the first main encoder disc is arranged on the first shaft; the first main reading head is arranged on the first bracket;
- the first sub-encoding disk is connected with the first worktable, and the first sub-reading head is fixedly arranged on the first bracket through a first sub-reading head bracket.
- a second main detection element which is composed of a second main reading head and a second main encoder disk, and is used to measure the rotation angle of the second shaft in real time under any circumstances, and includes a second auxiliary encoder disk and a second main detection element.
- the second sub-reading head is composed of a second sub-detecting element for indirectly measuring the elastic deformation of the second flexible hinge.
- the second main encoder disk is fixed on the second shaft, and the second main reading head is installed on the second bracket;
- the second sub-encoding disk is connected with the second worktable or the object platform, and the second sub-reading head is fixedly arranged on the second bracket through a second sub-reading head bracket.
- the first flexible hinge, the second flexible hinge and the third flexible hinge are all flexible hinge pieces arranged radially symmetrically.
- the drive provided on the first worktable and the second worktable can be That is, the driving element can be divided into a first driving element and a second driving element, wherein the first driving element acts on the first table; the second driving element acts on the second table; the specific structure of the driving element A motor drive structure based on the principle of electromagnetic force can be used.
- the frictionless flexible hinge structure motion pair is used to achieve high-precision continuous changing rotation, which avoids the rotational "jitter” caused by the sudden acceleration of acceleration caused by the switching of the friction state of the motion pair under low-speed conditions.
- the dual-axis turntable design with rigid-flexible coupling is adopted.
- the first flexible hinge, the second flexible hinge and the third flexible hinge can actively adapt to the friction change of the kinematic pair by relying on their own elastic deformation, avoiding the friction state of the kinematic pair.
- the effect of "crawling" caused by switching on continuous rotation positioning is conducive to achieving higher positioning accuracy.
- Both axes are designed with dual detection elements, which converts the unmeasurable friction force into the elasticity of the first flexible hinge and the second flexible hinge in the first rigid-flexible coupling rotating platform and the second rigid-flexible coupling rotating platform.
- the amount of deformation, the obtained data feedback can achieve more precise control compensation.
- the first flexible hinge, the second flexible hinge and the third flexible hinge are designed as a whole with the first rigid-flexible coupling rotating platform, the second rigid-flexible coupling rotating platform and the third rigid-flexible coupling shaft as rotating parts,
- the core rotating part itself has a flexible hinge sheet structure, and the elastic deformation of the flexible hinge is used to compensate the rotation, thereby reducing the "crawl” caused by the friction change during the start, stop and micro-rotation of the dual-axis turntable. Accuracy of rotation and angular positioning Impact.
- Figure 1 is a schematic diagram of the overall structure of a rigid-flexible coupled ultra-precision dual-axis turntable
- Figure 2 is a front view of a rigid-flexible coupled ultra-precision biaxial turntable
- Figure 3 is a front cross-sectional view of a rigid-flexible coupled ultra-precision biaxial turntable
- Fig. 4 is the overall schematic diagram of the first rigid-flexible coupling rotating platform
- Fig. 5 is the front sectional view of the first rigid-flexible coupling rotating platform
- Fig. 6 is the overall schematic diagram of the second rigid-flexible coupling rotating platform
- Fig. 7 is the top view of the second rigid-flexible coupling rotating platform
- Fig. 8 is the front sectional view of the second rigid-flexible coupling rotating platform
- Fig. 9 is the structural sectional view of the third rigid-flexible coupling rotating platform part
- Figure 10 is a schematic structural diagram of the first flexible hinge part
- FIG. 11 is a schematic structural diagram of the second flexible hinge part
- FIG. 12 is a schematic structural diagram of the third flexible hinge part.
- the rigid-flexible coupling ultra-precision dual-axis turntable includes a first rigid-flexible coupling rotary platform 1, a second rigid-flexible coupling rotary platform 2, a first rigid-flexible coupling rotary platform 2, Three rigid-flexible coupling shafts 3 and stage 4;
- the first rigid-flexible coupled rotating platform 1 includes a first bracket 101, a first rotating shaft 102, a first flexible hinge 103 and a first worktable 104.
- the first rotating shaft 102 is arranged on the first support 101 through a bearing, and the first workbench passes through
- the first flexible hinge 103 is connected to the first rotating shaft 102 to form the first rotating shaft of the rigid-flexible coupled ultra-precision biaxial turntable.
- the second rigid-flexible coupling rotating platform 2 includes a second bracket 201, a second rotating shaft 202, a second flexible hinge 203, and a second worktable 204;
- the second bracket 201 is arranged on one of the U-shaped connecting frame 5 or the Y-shaped connecting frame
- the second shaft 202 is arranged on the second bracket 201 through a bearing
- the second table 204 is arranged on the second shaft 202 through a second flexible hinge 203;
- the third rigid-flexible coupling shaft 3 includes a third bracket 301, a third rotating shaft 302, a third flexible hinge 303 and a third worktable 304;
- the third bracket 301 is arranged on the other side of the U-shaped connecting frame 5 or the Y-shaped connecting frame
- the third rotating shaft 302 is set on the third bracket 301 through a bearing
- the third worktable 304 is set on the third rotating shaft 302 through the third flexible hinge 303;
- the stations 304 can be connected in any combination, including active connection methods such as plug-in. Alternatively, the setting of the stage is cancelled, and the second worktable and the third worktable are directly integrally formed.
- the second rigid-flexible coupling rotating platform 2 , the third rigid-flexible coupling shaft 3 and the stage 4 constitute the second axis of rotation of the rigid-flexible coupling ultra-precision double-axis turntable as a whole.
- the elastic deformation reaction force of the first flexible hinge 103 can be used to overcome the friction force between the motion pairs connected to the first rigid-flexible coupling rotating platform 1.
- the elastic deformation reaction force of the first flexible hinge 103 is greater than the first
- there is resistance such as static friction between the kinematic pairs connected to the rigid-flexible coupling rotating platform 1
- the first rigid-flexible coupling rotating platform 1 will change from a static state to a moving state.
- the rotation of the first rigid-flexible coupling rotating platform 1 can be divided into two situations:
- the rotation amount of the first rigid-flexible coupling rotating platform 1 is the elastic deformation amount of the first flexible hinge 103;
- the rotation amount of the first rigid-flexible coupling rotating platform 1 is the elastic deformation amount of the first flexible hinge 103 and the rotation amount of the first rotating shaft 102 superposition.
- the motion state of the kinematic pair connected to the first rigid-flexible coupling rotary platform 1 is switched between the above-mentioned situations A and B, the difference between the static friction coefficient and the kinetic friction coefficient of the kinematic pair connected to the first rigid-flexible coupling rotary platform 1 It leads to a sudden change in resistance, produces a rigid impact on the double-axis turntable, and causes the frictional "crawling" of the kinematic pair.
- the biaxial turntable can actively adapt to the sudden change of frictional resistance caused by the switching of the friction state of the kinematic pair by the elastic deformation of the first flexible hinge 103 , so as to alleviate the rigid impact of the sudden change of frictional resistance on the first rigid-flexible coupled rotating platform 1 .
- the first rigid-flexible coupled rotary platform 1 can rely on the elastic deformation of the first flexible hinge 103 to achieve continuous rotational changes, avoiding the influence of frictional "crawling" on the rotational positioning accuracy.
- the rotation amount of the second rigid-flexible coupling rotating platform 2 is the elasticity of the second flexible hinge 203 deformation
- the rotation amount of the second rigid-flexible coupling rotating platform 2 is the elasticity of the second flexible hinge 203 The superposition of the deformation amount and the rotation amount of the second shaft 202 .
- the second rigid-flexible coupled rotating platform 2 can actively adapt to the above-mentioned sudden change in frictional resistance caused by the switching of the friction state of the kinematic pair by virtue of the elastic deformation of its own second flexible hinge 203, so as to alleviate the rigidity of the second rigid-flexible coupled rotating platform 2 caused by the sudden change in frictional resistance. shock.
- the second rigid-flexible coupled rotating platform 2 can rely on the elastic deformation of its own second flexible hinge 203 to achieve continuous rotational changes, avoiding the influence of frictional "crawling" on the rotational positioning accuracy.
- the driving element can be divided into a first driving element and a second driving element, wherein the first driving element acts on the first table 104; the second driving element acts on the second table 204;
- the specific structure of the parts can be driven by a motor based on the principle of electromagnetic force.
- the carrier 4 is connected to the second workbench 204 and the third workbench 304 in any combination, including active connection such as external hanging. Or the setting of the stage 4 is cancelled, and the second table 204 and the third table 304 are directly integrally formed.
- the second bracket 201 and the third bracket 301 and the U-shaped connecting frame are integrally formed structures.
- the second worktable 204, the third worktable 304 and the stage 4 are integrally formed structures.
- the first worktable and the first flexible hinge 103 are directly processed and formed on the base of the U-shaped connecting frame 5 or the Y-shaped connecting frame.
- first main detection element 6 (a grating) composed of a first main detection element 602 and a first main reading head 601 and used to measure the rotation angle of the first shaft 102 in real time under any circumstances
- first sub-detection element 7 (grating) which is composed of a first sub-encoding disc 702 and a first sub-reading head 701 and is used to indirectly measure the elastic deformation of the first flexible hinge 103 .
- the first main detection element 602 is arranged on the first rotating shaft 102; the first main reading head 601 is arranged on the first bracket 101;
- the first sub-code disc 702 is connected to the first worktable 104 , and the first sub-reading head 701 is fixedly arranged on the first bracket 101 through a first sub-reading head bracket 703 .
- the rotation angle of the first rigid-flexible coupling rotating platform 1 can be measured under any circumstances.
- the amount of elastic deformation of the first flexible hinge 103 is indirectly measured, and the unmeasurable frictional force is converted into a measurable amount of elastic deformation of the first flexible hinge 103 .
- the rotation angle data measured by the rotation angle of the first main detection element 6 and the first auxiliary detection element 7 can be used as a feedback link to form a closed-loop control system with a rotary driver, etc., to achieve high-precision rotational positioning of the first rigid-flexible coupled rotary platform 1 .
- it also includes a second main detection element 8 composed of a second main reading head 802 and a second main encoder disk 801 for measuring the rotation angle of the second shaft 202 in real time under any circumstances, and a second main detection element 8 composed of The second sub-encoding disc 902 and the second sub-reading head 901 are formed, and are used to indirectly measure the second sub-detecting element 9 of the elastic deformation of the second flexible hinge 203 .
- the second main encoder disk 801 is fixed on the second shaft 202, and the second main reading head 802 is installed on the second bracket 201;
- the second main code disc is fixed on the second shaft, and the second main reading head is installed on the second bracket;
- the second sub-code disk 902 is connected to the second worktable 204 or the stage 4 , and the second sub-reading head 901 is fixedly arranged on the second bracket 21 through a second sub-reading head bracket 903 .
- the rotation angle of the second rigid-flexible coupling rotating platform 2 can be measured under any circumstances.
- the amount of elastic deformation of the second flexible hinge 203 is indirectly measured, and the unmeasurable friction force is converted into a measurable amount of elastic deformation of the second flexible hinge 203 .
- the rotation angle data of the rotation angle measurement of the second main detection element 8 and the second auxiliary detection element 9 can be used as a feedback link to form a closed-loop control system with a rotary driver, etc., to realize the high-precision rotation positioning of the second rigid-flexible coupled rotary platform 2.
- the stage 4 can rotate with the third rigid-flexible coupling shaft 3 and form a kinematic pair.
- the third rigid-flexible coupling shaft 3 can also rely on the elastic deformation of the third flexible hinge 303 to achieve continuous rotation changes, so as to avoid the influence of frictional "crawling" on the rotational positioning accuracy.
- the first flexible hinge 103 , the second flexible hinge 203 and the third flexible hinge 303 are all flexible hinge pieces arranged radially symmetrically.
- the first rigid-flexible coupling rotating platform 1 and the second rigid-flexible coupling rotating platform 2 brake first and drive the first rotating shaft 102 to brake through their own first flexible hinge 103 and second flexible hinge 203 to damp vibrational energy.
- the frictionless flexible hinge structure motion pair is used to achieve high-precision continuous changing rotation, which avoids the rotational "jitter” caused by the sudden acceleration of acceleration caused by the switching of the friction state of the motion pair under low-speed conditions.
- the dual-axis turntable design with rigid-flexible coupling is adopted.
- the first flexible hinge 103, the second flexible hinge 203 and the third flexible hinge 303 can actively adapt to the change of the friction force of the kinematic pair by relying on their own elastic deformation, avoiding the movement
- the influence of "crawling" caused by the switching of the auxiliary friction state on the continuous rotation positioning is beneficial to achieve higher positioning accuracy.
- Both axes adopt the design of dual detection elements, which converts the friction force that cannot be measured into the first flexible hinge 103 and the second flexible hinge 103 in the first rigid-flexible coupling rotating platform 1 and the second rigid-flexible coupling rotating platform 2 that can be measured.
- the elastic deformation amount of the hinge 203 and the obtained data feedback can realize more precise control compensation.
- the shaft 3 is designed as a whole, so that the core rotating part itself has a flexible hinge sheet structure, and the elastic deformation of the flexible hinge is used to compensate the rotation, thereby reducing the "crawl" caused by the friction change during the start, stop and micro-rotation of the dual-axis turntable. Effects on rotational and angular positioning accuracy.
- Flexible hinge (or flexible pivot, flexible bearing, cross spring bearing) is a kind of elastic support with simple structure and relatively regular shape. Work with limited deformation. Under a torsional load, a rotational motion occurs within a limited angular range around its center of rotation.
- a frictionless motion pair formed by the first flexible hinge 103 , the second flexible hinge 203 and the third flexible hinge 303 can rely on elastic deformation to achieve continuous and high-precision rotation.
- the structure of the flexible hinge is often used in conjunction with a friction motion pair (including a rotor and a stator) to achieve high-precision rotation by compensating for rotation.
- the elastic deformation of the flexible hinge is used to overcome the friction dead zone, and there is no need to use a highly accurate friction force model; the elastic deformation of the flexible hinge is used to compensate the rotation, which simplifies the compensation control method, the structure design is simple, and the use cost is low; rigid
- the positioning accuracy of the flexible coupling ultra-precision dual-axis turntable is higher.
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Abstract
Description
Claims (10)
- 刚柔耦合超精双轴转台,其特征在于:包括由U型连接架或Y型连接架连接的第一刚柔耦合旋转平台、第二刚柔耦合旋转平台、第三刚柔耦合轴和载物台;所述第一刚柔耦合旋转平台包括第一支架、第一转轴、第一柔性铰链和第一工作台,所述第一转轴通过轴承设置在第一支架上,所述第一工作台通过第一柔性铰链连接到第一转轴上;所述第二刚柔耦合旋转平台包括第二支架、第二转轴、第二柔性铰链、和第二工作台;所述第二支架设置在U型连接架或Y型连接架的一侧,第二转轴通过轴承设置在第二支架上,所述第二工作台通过第二柔性铰链设置在第二转轴上;所述第三刚柔耦合轴包含第三支架、第三转轴、第三柔性铰链和第三工作台;所述第三支架设置于U型连接架或Y型连接架的另一侧,第三转轴通过轴承设置在第三支架上,第三工作台通过第三柔性铰链设置在第三转轴上;所述载物台与第二工作台和第三工作台之间以任意方式组合连接。
- 根据权利要求1所述的刚柔耦合超精双轴转台,其特征在于:所述载物台取消设置,第二工作台与第三工作台直接一体化成型。
- 根据权利要求1所述的刚柔耦合超精双轴转台,其特征在于:所述第二支架和第三支架与U型连接架为一体化成型结构。
- 根据权利要求1所述的刚柔耦合超精双轴转台,其特征在于:所述第二工作台和第三工作台与载物台为一体化成型结构。
- 根据权利要求1所述的刚柔耦合超精双轴转台,其特征在于:所述第一工作台与第一柔性铰链直接在U型连接架或Y型连接架的底座加工成型。
- 根据权利要求1所述的刚柔耦合超精双轴转台,其特征在于:还包括由第一主编码盘和第一主读数头构成,用于实时测量第一转轴在任意情况下的旋转角度的第一主检测元件,及包括由第一副编码盘和第一副读数头构成,用于间接测出第一柔性铰链弹性变形量的第一副检测元件。
- 根据权利要求6所述的刚柔耦合超精双轴转台,其特征在于:所述第一主编码盘设置在第一转轴上;所述第一主读数头设置在第一支架上;所述第一副编码盘与第一工作台相连接,所述第一副读数头通过一第一副读数头支架固定设置在所述第一支架上。
- 根据权利要求1所述的刚柔耦合超精双轴转台,其特征在于:还包括由第二主读数头和第二主编码盘构成,用于实时测量第二转轴在任意情况下的旋转角度的第二主检测元件,及包括由第二副编码盘和第二副读数头构成,用于间接测出第二柔性铰链弹性变形量的第二副检测元件。
- 根据权利要求8所述的刚柔耦合超精双轴转台,其特征在于:所述第二主编码盘固定在第二转轴上,所述第二主读数头安装设置在第二支架上;所述第二副编码盘与第二工作台或载物台相连接,所述第二副读数头通过一第二副读数头支架固定设置在第二支架上。
- 根据权利要求1-9任意一项所述的刚柔耦合超精双轴转台,其特征在于:所述的第一柔性铰链、第二柔性铰链和第三柔性铰链均为辐射对称布置的柔性铰链片。
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CN202011164205.5A CN112483832A (zh) | 2020-10-27 | 2020-10-27 | 刚柔耦合超精双轴转台 |
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