WO2021167216A1 - Probe positioner for semiconductor measurement device - Google Patents

Probe positioner for semiconductor measurement device Download PDF

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Publication number
WO2021167216A1
WO2021167216A1 PCT/KR2020/018118 KR2020018118W WO2021167216A1 WO 2021167216 A1 WO2021167216 A1 WO 2021167216A1 KR 2020018118 W KR2020018118 W KR 2020018118W WO 2021167216 A1 WO2021167216 A1 WO 2021167216A1
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WO
WIPO (PCT)
Prior art keywords
support
probe card
shaft
probe
tilt
Prior art date
Application number
PCT/KR2020/018118
Other languages
French (fr)
Korean (ko)
Inventor
황태성
Original Assignee
황태성
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Publication date
Application filed by 황태성 filed Critical 황태성
Priority to KR1020227004335A priority Critical patent/KR20220041107A/en
Publication of WO2021167216A1 publication Critical patent/WO2021167216A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G08—SIGNALLING
    • G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C17/00—Arrangements for transmitting signals characterised by the use of a wireless electrical link
    • G08C17/02—Arrangements for transmitting signals characterised by the use of a wireless electrical link using a radio link

Definitions

  • the present invention relates to a probe positioner for a semiconductor measuring device.
  • the semiconductor measuring device is a measuring device that measures whether a manufactured semiconductor device electrically operates normally.
  • a semiconductor measuring device generally determines whether the semiconductor device is normal by measuring an electrical signal of the semiconductor device using two or more probes. At this time, the probe positioner performs the function of moving the probe to the correct position.
  • Circuits of semiconductor devices are becoming increasingly complex, and are developing in the direction of low power consumption. Accordingly, a semiconductor measuring device used for testing a semiconductor device is also required to operate more precisely and to sense a minute electrical signal.
  • a probe positioner includes: a probe card support disposed to support a probe card; a first shaft portion reciprocating the probe card support in a first axis direction; a second shaft part reciprocating the probe card support in a second shaft direction; a third shaft unit reciprocating the probe card support in a third axis direction; and a first tilt unit for rotationally moving the probe card supporter based on at least one axis.
  • the probe positioner has high measurement efficiency by rotating the probe card clockwise or counterclockwise based on at least one axis.
  • FIG. 1 and 2 illustrate a probe positioner according to an embodiment of the present invention.
  • FIG 5 is a view showing the support part of the first tilt part and the first tilt adjustment member.
  • FIG. 6 illustrates a rotating part of the first tilt unit.
  • FIG. 1 and 2 show a probe positioner 100 according to an embodiment of the present invention.
  • the probe positioner 100 includes a probe card support 140 disposed to support the probe card 170; a first shaft portion 110 reciprocating the probe card support 140 in a first axis direction; a second shaft unit 120 reciprocating the probe card support 140 in a second axis direction; a third shaft portion 130 reciprocating the probe card support 140 in a third axis direction; and a first tilt unit 150 for rotationally moving the probe card support 140 based on at least one axis.
  • the first to third shaft portions 110 , 120 , and 130 are not particularly limited as long as they are used to control the position of the probe in the probe positioner 100 .
  • a method of driving each of the shafts may be manual or automatic.
  • the first to third shaft portions 110 , 120 , and 130 perform a function of moving the probe card support 140 in the first to third axis directions, respectively.
  • the first to third axes may be in a vertical direction.
  • the first axis may be the x axis
  • the second axis may be the y axis
  • the third axis may be the z axis.
  • the first to third shaft portions 110 , 120 , and 130 may include a fixed body and a movable body moving along the first axis to the third axis corresponding to the respective bodies, respectively.
  • Rails or guide members formed along respective axes may be disposed between the stationary body and the movable body, and the movable body may reciprocally move on the stationary body along the rails or guide members.
  • Each of the movable bodies may be arranged to be fixed to the fixed body of the other shaft portion.
  • the fixed body of the second shaft part 120 is fixed to the moving body of the first shaft part 110
  • the fixed body of the third shaft part 130 is fixed to the moving body of the second shaft part 120 .
  • first shaft portion to the third shaft portion may include a first shaft adjustment member 111 to the third shaft adjustment member 131, respectively, and the user can use the first shaft adjustment member ( 111) to the third axis adjustment member 131 may be operated to allow the movable body to move.
  • the first axis adjusting member 111 to the third axis adjusting member 131 may have a dial shape, and can be precisely controlled through this.
  • the first tilt unit 150 rotates the probe card support 140 based on at least one axis.
  • the first tilt part 150 is disposed between the first shaft part 110 and the second shaft part 120 so that the second shaft part 120 is rotationally moved in at least one direction with respect to the first shaft part 110 .
  • This is possible, or it is disposed between the second shaft part 120 and the third shaft part 130 so that the third shaft part 130 is rotationally movable in at least one direction with respect to the second shaft part 120, or It may be disposed between the third shaft portion 130 and the probe card supporter 140 to enable the probe card supporter 140 to rotate in at least one direction with respect to the third shaft portion 130 .
  • the first tilt unit 150 may be disposed at any position in order to rotate the probe card support 140 , and a first shaft portion ( 110), the second shaft portion 120, and other components such as the third shaft portion 130 may be disposed. Referring to FIG. 1 , the first tilt unit 150 is fixedly disposed on the moving body of the third shaft unit 130 .
  • the first tilt part 150 may include a support part 151 and a rotation part 152 that rotates relative to the support part 151 .
  • the support part 151 may be disposed by being fixed to any one of the moving body of the first to third shaft parts 110 , 120 , and 130 .
  • the support part 151 of the first tilt part 150 further includes an intermediate member for fixing the first tilt part 150 to the moving body of the third shaft part 130 .
  • the rotation part 152 may be disposed such that at least a part thereof is in contact with the surface of the support part 151 . 5 and 6 , the support part 151 and the rotation part 152 may each have curved surfaces having shapes corresponding to each other.
  • the support part 151 is a support part body 151a for fixing the support part 151 to any one of the first shaft part to the third shaft part 110, 120, 130, and on the support part body 151a. It may include a first rotation guide 151b, which is disposed to provide a path for the rotation part 152 to move (see FIG. 5).
  • the rotating part 152 is a rotating part body (152a), and a second rotation guide (152b) arranged in connection with the rotation part body (152a) and moving along a path provided by the first rotation guide (151b), may include.
  • the first rotation guide 151b and the second rotation guide 152b are arranged so that the curved surfaces contact each other, so that the probe card support 140 can be rotated.
  • the first tilt unit 150 may include a first tilt adjustment member 153 that allows the rotation unit 152 to move relative to the support unit 151 .
  • the first tilt adjustment member 153 may be applied in a dial manner, so that more precise control may be possible.
  • the first tilt adjustment member 153 may include a handle portion and a first screw thread portion 153a disposed to extend to the handle portion.
  • the first screw thread portion 153a may have a cylindrical shape having a screw thread (see FIG. 5 ).
  • the rotating part 152 may include a second screw thread part 152c disposed on at least a partial surface of the second rotation guide 152b.
  • the second screw line portion 152c may include a screw line having a shape corresponding to the screw line shape of the first screw line portion 153a.
  • the first tilt adjustment member 153 may be disposed to be inserted into the support portion 151 , and the support portion 151 includes the second screw thread portion 152c and the first tilt adjustment member 153 .
  • a rotation guide groove 151c through which the first tilt adjustment member 153 is exposed toward the rotation part 152 may be included in order to abut. Referring to FIG. 4 , the first tilt adjustment member 153 rotates about a first axis, and accordingly, the probe card support 140 rotates about a third axis.
  • the first tilt unit 150 may further include a fixing member 154 for fixing the rotating unit 152 .
  • the fixing member 154 may have a screw shape that is inserted into a thread formed in the rotating unit 152 to prevent rotation of the rotating unit 152 .
  • the first tilt unit 150 rotates the probe card support 140 on the basis of an axis perpendicular to the axis of rotation of the probe card support 140 . It may further include a moving second tilt unit 160 .
  • the second tilt unit 160 may be disposed on one surface of the rotation unit 152 or the support unit 151 of the first tilt unit 150 . Referring to FIG. 3 , the second tilt unit 160 is It is disposed on one surface of the rotating part 152 .
  • the second tilt unit 160 may include a second tilt adjustment member 161 and an operation member 162 .
  • the operation member 162 is not particularly limited as long as it is used to transmit force in one direction to the other direction.
  • the operation member 162 may include various gears, shafts and gimbal units, through which the force operating the second tilt adjustment member 161 is converted to rotate the probe card shafts 141a and b. can Referring to FIG. 3 , the probe card support 140 may be operated to rotate about the second axis by operating the second tilt adjustment member 161 .
  • the probe card support 140 is rotated about the third axis by the first tilt unit 150 , and referring to FIG. 3 , the probe card support 140 is rotated by the second tilt unit 160 by the second tilt unit 160 . ) rotates about the second axis.
  • the probe card support 140 can be rotated about two different axes, so that various positions can be precisely measured.
  • the probe card support 140 performs a function of fixing and supporting the probe card.
  • the probe card support 140 is a probe card shaft 141a, which is an axis for transmitting power of the first to third shaft portions 110, 120, 130 and the first tilt portion 150 to the second tilt portion 160; b) may be included.
  • the probe card support 140 may be commonly used in this field and is not particularly limited.
  • 100 probe positioner, 110: first shaft portion, 111: first shaft adjustment member, 120: second shaft portion, 121: second shaft adjustment member, 130: third shaft portion, 131: third axis adjustment member, 140: probe Card support, 141a, b: probe card shaft, 150: first tilt part, 151: support part, 151a: support body, 151b: first rotation guide, 151c: rotation guide groove, 152: rotation part, 152a: rotation part body, 152b : second rotation guide, 152c: second screw wire portion, 153: first tilt adjustment member, 153a: first screw wire portion, 154: fixing member, 160: second tilt portion, 161: second tilt adjustment member, 162: Operating member, 170: probe card, 171: probe

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

The present invention relates to a probe positioner. A probe positioner according to an embodiment of the present invention comprises: a probe card support arranged to support a probe card; a first shaft portion for reciprocating the probe card support in a first shaft direction; a second shaft portion for reciprocating the probe card support in a second shaft direction; a third shaft portion for reciprocating the probe card support in a third shaft direction; and a first tilting portion for rotating the probe card support about at least one shaft.

Description

반도체 계측장치용 프로브 포지셔너Probe Positioner for Semiconductor Measuring Equipment
본 발명은 반도체 계측장치용 프로브 포지셔너에 관한 것이다. The present invention relates to a probe positioner for a semiconductor measuring device.
반도체 계측장치는 제조된 반도체 소자가 전기적으로 정상적인 동작을 하는지 여부를 측정하는 계측장치이다. 반도체 계측장치는 일반적으로 2개 이상의 프로브(probe)를 이용하여 반도체 소자의 전기적 신호를 측정하여 반도체 소자가 정상인지 여부를 판별한다. 이 때, 상기 프로브를 정확한 위치로 이동하는 기능을 수행하는 것이 프로브 포지셔너이다. The semiconductor measuring device is a measuring device that measures whether a manufactured semiconductor device electrically operates normally. A semiconductor measuring device generally determines whether the semiconductor device is normal by measuring an electrical signal of the semiconductor device using two or more probes. At this time, the probe positioner performs the function of moving the probe to the correct position.
반도체 소자의 회로는 점점 복잡해지고 있으며, 저전력화 방향으로 발전하고 있다. 이에 따라 반도체 소자의 테스트를 위해 사용되는 반도체 계측장치도 보다 세밀한 작동이 요구되고, 미세한 전기적 신호를 감지할 것이 요구된다. Circuits of semiconductor devices are becoming increasingly complex, and are developing in the direction of low power consumption. Accordingly, a semiconductor measuring device used for testing a semiconductor device is also required to operate more precisely and to sense a minute electrical signal.
관련 선행기술문헌으로는 한국실용신안등록공보 제20-0194113호가 있다. As a related prior art document, there is Korean Utility Model Registration Publication No. 20-0194113.
본 발명의 목적은 프로브 카드를 적어도 하나의 축을 기준으로 시계 또는 반시계 방향으로 회전하여 측정 효율을 높인 프로브 포지셔너를 제공하는 것이다.SUMMARY OF THE INVENTION It is an object of the present invention to provide a probe positioner that increases measurement efficiency by rotating a probe card clockwise or counterclockwise about at least one axis.
또한, 정밀한 측정이 가능하다. In addition, precise measurement is possible.
본 발명의 실시 예를 따르는 프로브 포지셔너는, 프로브 카드를 지지하는 배치된 프로브 카드 지지대; 상기 프로브 카드 지지대를 제1축 방향으로 왕복 이동하는 제1축부; 상기 프로브 카드 지지대를 제2축 방향으로 왕복 이동하는 제2축부; 상기 프로브 카드 지지대를 제3축 방향으로 왕복 이동하는 제3축부; 및 상기 프로브 카드 지지대를 적어도 하나의 축을 기준으로 회전 이동하는 제1틸트부;를 포함한다. A probe positioner according to an embodiment of the present invention includes: a probe card support disposed to support a probe card; a first shaft portion reciprocating the probe card support in a first axis direction; a second shaft part reciprocating the probe card support in a second shaft direction; a third shaft unit reciprocating the probe card support in a third axis direction; and a first tilt unit for rotationally moving the probe card supporter based on at least one axis.
본 발명의 실시 예를 따르는 프로브 포지셔너는, 적어도 하나의 축을 기준으로 프로브 카드를 시계 또는 반시계 방향으로 회전하여 측정 효율이 높다. The probe positioner according to an embodiment of the present invention has high measurement efficiency by rotating the probe card clockwise or counterclockwise based on at least one axis.
또한, 정밀한 측정이 가능하다. In addition, precise measurement is possible.
도 1 및 도 2는 본 발명의 실시 예를 따르는 프로브 포지셔너를 도시한 것이다. 1 and 2 illustrate a probe positioner according to an embodiment of the present invention.
도 3은 틸트부를 도시한 것이다. 3 illustrates a tilt unit.
도 4는 제1틸트부를 도시한 것이다. 4 illustrates a first tilt unit.
도 5는 제1틸트부의 지지부 및 제1틸트조정부재를 도시한 것이다. 5 is a view showing the support part of the first tilt part and the first tilt adjustment member.
도 6은 제1틸트부의 회전부를 도시한 것이다. 6 illustrates a rotating part of the first tilt unit.
이하, 첨부된 도면을 참조하여 본 발명의 바람직한 실시 형태들을 다음과 같이 설명한다. 그러나, 본 발명의 실시 형태는 여러 가지 다른 형태로 변형될 수 있으며, 본 발명의 범위가 이하 설명하는 실시 형태로 한정되는 것은 아니다.　 또한, 본 발명의 실시 형태는 당해 기술분야에서 평균적인 지식을 가진 자에게 본 발명을 더욱 완전하게 설명하기 위해서 제공되는 것이다.　 따라서, 도면에서의 요소들의 형상 및 크기 등은 보다 명확한 설명을 위해 과장될 수 있으며, 도면 상의 동일한 부호로 표시되는 요소는 동일한 요소이다. 또한, 유사한 기능 및 작용을 하는 부분에 대해서는 도면 전체에 걸쳐 동일한 부호를 사용한다. 덧붙여, 명세서 전체에서 어떤 구성요소를 "포함"한다는 것은 특별히 반대되는 기재가 없는 한 다른 구성요소를 제외하는 것이 아니라 다른 구성요소를 더 포함할 수 있다는 것을 의미한다. Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. However, the embodiment of the present invention may be modified in various other forms, and the scope of the present invention is not limited to the embodiments described below. In addition, the embodiments of the present invention are provided in order to more completely explain the present invention to those of ordinary skill in the art. Accordingly, the shapes and sizes of elements in the drawings may be exaggerated for clearer description, and elements indicated by the same reference numerals in the drawings are the same elements. In addition, the same reference numerals are used throughout the drawings for parts having similar functions and functions. In addition, "including" a certain element throughout the specification means that other elements may be further included, rather than excluding other elements, unless otherwise stated.
도 1 및 도 2는 본 발명의 실시 예를 따르는 프로브 포지셔너(100)를 도시한 것이다. 1 and 2 show a probe positioner 100 according to an embodiment of the present invention.
도 1 및 도 2를 참조하면, 본 발명의 실시 예를 따르는 프로브 포지셔너(100)는, 프로브 카드(170)를 지지하는 배치된 프로브 카드 지지대(140); 상기 프로브 카드 지지대(140)를 제1축 방향으로 왕복 이동하는 제1축부(110); 상기 프로브 카드 지지대(140)를 제2축 방향으로 왕복 이동하는 제2축부(120); 상기 프로브 카드 지지대(140)를 제3축 방향으로 왕복 이동하는 제3축부(130); 및 상기 프로브 카드 지지대(140)를 적어도 하나의 축을 기준으로 회전 이동하는 제1틸트부(150);를 포함한다. 1 and 2 , the probe positioner 100 according to an embodiment of the present invention includes a probe card support 140 disposed to support the probe card 170; a first shaft portion 110 reciprocating the probe card support 140 in a first axis direction; a second shaft unit 120 reciprocating the probe card support 140 in a second axis direction; a third shaft portion 130 reciprocating the probe card support 140 in a third axis direction; and a first tilt unit 150 for rotationally moving the probe card support 140 based on at least one axis.
상기 제1축부 내지 제3축부(110, 120, 130)는 프로브 포지셔너(100)에서 프로브의 위치를 제어하는 데 사용하는 것이면 특별히 제한하지 않는다. 또한, 상기 각각의 축부를 구동하는 방식은 수동 또는 자동식일 수 있다. The first to third shaft portions 110 , 120 , and 130 are not particularly limited as long as they are used to control the position of the probe in the probe positioner 100 . In addition, a method of driving each of the shafts may be manual or automatic.
일 실시 예에서, 상기 제1축부 내지 제3축부(110, 120, 130)는 각각 제1축 내지 제3축 방향으로 프로브 카드 지지대(140)를 이동하는 기능을 수행한다. 상기 제1축 내지 제3축은 수직한 방향일 수 있다. 일 예로, 도 1에 도시된 xyz축을 참고로 살펴보면, 제1축은 x축, 제2축은 y축, 제3축은 z축일 수 있다. 상기 제1축부 내지 제3축부(110, 120, 130)는 각각 고정몸체 및 상기 각각의 몸체에 대응하여 제1축 내지 제3축으로 이동하는 이동몸체를 포함할 수 있다. 상기 고정몸체 및 이동몸체 사이에는 각각의 축을 따라 형성된 레일 또는 가이드 부재가 배치될 수 있으며, 상기 이동몸체는 상기 레일 또는 가이드 부재를 따라 상기 고정몸체 상을 왕복으로 이동할 수 있다. 상기 각각의 이동몸체는 다른 축부의 고정몸체에 고정하여 배치될 수 있다. 도 1에서는 제2축부(120)의 고정몸체가 제1축부(110)의 이동몸체에 고정되고, 제3축부(130)의 고정몸체가 제2축부(120)의 이동몸체에 고정되어 있다. 또한, 제1축부 내지 제3축부(110, 120, 130)는 각각 제1축조정부재(111) 내지 제3축조정부재(131)를 포함할 수 있으며, 사용자가 상기 제1축조정부재(111) 내지 제3축조정부재(131)를 작동함으로써 상기 이동몸체가 이동하도록 할 수 있다. 상기 제1축조정부재(111) 내지 제3축조정부재(131)는 다이얼 형상일 수 있으며, 이를 통해 정밀하게 제어할 수 있다. In one embodiment, the first to third shaft portions 110 , 120 , and 130 perform a function of moving the probe card support 140 in the first to third axis directions, respectively. The first to third axes may be in a vertical direction. As an example, referring to the xyz axis illustrated in FIG. 1 , the first axis may be the x axis, the second axis may be the y axis, and the third axis may be the z axis. The first to third shaft portions 110 , 120 , and 130 may include a fixed body and a movable body moving along the first axis to the third axis corresponding to the respective bodies, respectively. Rails or guide members formed along respective axes may be disposed between the stationary body and the movable body, and the movable body may reciprocally move on the stationary body along the rails or guide members. Each of the movable bodies may be arranged to be fixed to the fixed body of the other shaft portion. In FIG. 1 , the fixed body of the second shaft part 120 is fixed to the moving body of the first shaft part 110 , and the fixed body of the third shaft part 130 is fixed to the moving body of the second shaft part 120 . In addition, the first shaft portion to the third shaft portion (110, 120, 130) may include a first shaft adjustment member 111 to the third shaft adjustment member 131, respectively, and the user can use the first shaft adjustment member ( 111) to the third axis adjustment member 131 may be operated to allow the movable body to move. The first axis adjusting member 111 to the third axis adjusting member 131 may have a dial shape, and can be precisely controlled through this.
제1틸트부(150)는 프로브 카드 지지대(140)를 적어도 하나의 축을 기준으로 회전 이동한다. The first tilt unit 150 rotates the probe card support 140 based on at least one axis.
상기 제1틸트부(150)는, 상기 제1축부(110) 및 제2축부(120) 사이에 배치되어 상기 제2축부(120)가 상기 제1축부(110)에 대하여 적어도 일방향으로 회전이동이 가능하도록 하거나, 상기 제2축부(120) 및 제3축부(130) 사이에 배치되어 상기 제3축부(130)가 상기 제2축부(120)에 대하여 적어도 일방향으로 회전이동이 가능하도록 하거나, 상기 제3축부(130) 및 프로브 카드 지지대(140) 사이에 배치되어 상기 프로브 카드 지지대(140)가 상기 제3축부(130)에 대하여 적어도 일방향으로 회전이동이 가능하도록 할 수 있다. 즉, 상기 제1틸트부(150)는 프로브 카드 지지대(140)를 회전 이동하기 위해 어느 위치라도 배치될 수 있으며, 제1틸트부(150) 및 프로브 카드 지지대(140) 사이에 제1축부(110), 제2축부(120), 제3축부(130) 등의 다른 구성요가 배치될 수 있다. 도 1을 참조하면, 상기 제1틸트부(150)는 상기 제3축부(130)의 이동몸체 상에 고정되어 배치되어 있다. The first tilt part 150 is disposed between the first shaft part 110 and the second shaft part 120 so that the second shaft part 120 is rotationally moved in at least one direction with respect to the first shaft part 110 . This is possible, or it is disposed between the second shaft part 120 and the third shaft part 130 so that the third shaft part 130 is rotationally movable in at least one direction with respect to the second shaft part 120, or It may be disposed between the third shaft portion 130 and the probe card supporter 140 to enable the probe card supporter 140 to rotate in at least one direction with respect to the third shaft portion 130 . That is, the first tilt unit 150 may be disposed at any position in order to rotate the probe card support 140 , and a first shaft portion ( 110), the second shaft portion 120, and other components such as the third shaft portion 130 may be disposed. Referring to FIG. 1 , the first tilt unit 150 is fixedly disposed on the moving body of the third shaft unit 130 .
도 3을 참조하면, 상기 제1틸트부(150)는, 지지부(151) 및 상기 지지부(151)에 대하여 상대적으로 회전 이동하는 회전부(152)를 포함할 수 있다. 상기 지지부(151)는 제1축부 내지 제3축부(110, 120, 130) 중 어느 하나의 이동몸체에 고정하여 배치할 수 있다. 도 3에서는 상기 제1틸트부(150)의 지지부(151)는 제1틸트부(150)를 제3축부(130)의 이동몸체에 고정하기 위한 중간부재를 더 포함하고 있다. 상기 회전부(152)는 상기 지지부(151)에 대해 상대적으로 회전이동하기 위해, 적어도 일부가 상기 지지부(151)의 면을 따라 접하도록 배치될 수 있다. 도 5 및 도 6을 참조하면, 상기 지지부(151) 및 회전부(152)는 각각 서로 대응하는 형상을 가진 곡면을 가질 수 있다. 보다 구체적으로, 상기 지지부(151)는 지지부(151)를 제1축부 내지 제3축부(110, 120, 130) 중 어느 하나에 고정하는 지지부몸체(151a), 및 상기 지지부몸체(151a) 상에 배치되어 상기 회전부(152)가 이동하는 경로를 제공하는 제1회전가이드(151b),를 포함할 수 있다(도 5 참조). 또한, 상기 회전부(152)는 회전부몸체(152a), 및 상기 회전부몸체(152a)와 연결되어 배치되고 상기 제1회전가이드(151b)가 제공하는 경로를 따라 이동하는 제2회전가이드(152b),를 포함할 수 있다. 상기 제1회전가이드(151b) 및 제2회전가이드(152b)는 곡면을 서로 맞닿도록 배치됨으로써 프로브 카드 지지대(140)가 회전 이동하도록 할 수 있다. Referring to FIG. 3 , the first tilt part 150 may include a support part 151 and a rotation part 152 that rotates relative to the support part 151 . The support part 151 may be disposed by being fixed to any one of the moving body of the first to third shaft parts 110 , 120 , and 130 . In FIG. 3 , the support part 151 of the first tilt part 150 further includes an intermediate member for fixing the first tilt part 150 to the moving body of the third shaft part 130 . In order to rotate relative to the support part 151 , the rotation part 152 may be disposed such that at least a part thereof is in contact with the surface of the support part 151 . 5 and 6 , the support part 151 and the rotation part 152 may each have curved surfaces having shapes corresponding to each other. More specifically, the support part 151 is a support part body 151a for fixing the support part 151 to any one of the first shaft part to the third shaft part 110, 120, 130, and on the support part body 151a. It may include a first rotation guide 151b, which is disposed to provide a path for the rotation part 152 to move (see FIG. 5). In addition, the rotating part 152 is a rotating part body (152a), and a second rotation guide (152b) arranged in connection with the rotation part body (152a) and moving along a path provided by the first rotation guide (151b), may include. The first rotation guide 151b and the second rotation guide 152b are arranged so that the curved surfaces contact each other, so that the probe card support 140 can be rotated.
도 4를 참조하면, 상기 제1틸트부(150)는, 상기 회전부(152)가 상기 지지부(151)에 대하여 상대적으로 이동하도록 하는 제1틸트조정부재(153)를 포함할 수 있다. 상기 제1틸트조정부재(153)는 다이얼 방식으로 적용됨으로써 보다 정밀한 제어가 가능할 수 있다. 상기 제1틸트조정부재(153)는 손잡이부 및 상기 손잡이부에 연장하여 배치된 제1나사선부(153a)를 포함할 수 있다. 상기 제1나사선부(153a)는 나사선을 가진 원기둥 형상일 수 있다(도 5 참조). 이 때, 상기 회전부(152)는 제2회전가이드(152b)의 적어도 일부 면 상에 배치된 제2나사선부(152c)를 포함할 수 있다. 상기 제2나사선부(152c)는 상기 제1나사선부(153a)의 나사선 형상에 대응하는 형상의 나사선을 포함할 수 있다. 이를 통해, 상기 제1틸트조정부재(153)가 회전함에 따라 상기 제1나사선부(153a) 및 제2나사선부(152c)가 맞물림으로써 상기 회전부(152)가 상기 지지부(151)에 대하여 회전 이동할 수 있다. 상기 제1틸트조정부재(153)는 상기 지지부(151)의 내부로 삽입되도록 배치될 수 있고, 상기 지지부(151)는 상기 제2나사선부(152c)와 상기 제1틸트조정부재(153)가 맞닿도록 하기 위해 상기 제1틸트조정부재(153)가 상기 회전부(152) 쪽으로 노출되도록 하는 회전가이드홈(151c)을 포함할 수 있다. 도 4를 참조하면, 상기 제1틸트조정부재(153)는 제1축을 중심으로 회전하고, 이에 따라 상기 프로브 카드 지지대(140)는 제3축을 중심으로 회전한다. Referring to FIG. 4 , the first tilt unit 150 may include a first tilt adjustment member 153 that allows the rotation unit 152 to move relative to the support unit 151 . The first tilt adjustment member 153 may be applied in a dial manner, so that more precise control may be possible. The first tilt adjustment member 153 may include a handle portion and a first screw thread portion 153a disposed to extend to the handle portion. The first screw thread portion 153a may have a cylindrical shape having a screw thread (see FIG. 5 ). In this case, the rotating part 152 may include a second screw thread part 152c disposed on at least a partial surface of the second rotation guide 152b. The second screw line portion 152c may include a screw line having a shape corresponding to the screw line shape of the first screw line portion 153a. Through this, as the first tilt adjustment member 153 rotates, the first screw thread part 153a and the second screw thread part 152c engage, so that the rotation part 152 is rotated with respect to the support part 151. can The first tilt adjustment member 153 may be disposed to be inserted into the support portion 151 , and the support portion 151 includes the second screw thread portion 152c and the first tilt adjustment member 153 . A rotation guide groove 151c through which the first tilt adjustment member 153 is exposed toward the rotation part 152 may be included in order to abut. Referring to FIG. 4 , the first tilt adjustment member 153 rotates about a first axis, and accordingly, the probe card support 140 rotates about a third axis.
상기 제1틸트부(150)는 회전부(152)를 고정하는 고정부재(154)를 더 포함할 수 있다. 상기 고정부재(154)는 회전부(152)에 형성된 나사선에 삽입되어 회전부(152)의 회전을 방지하는 나사 형상일 수 있다. The first tilt unit 150 may further include a fixing member 154 for fixing the rotating unit 152 . The fixing member 154 may have a screw shape that is inserted into a thread formed in the rotating unit 152 to prevent rotation of the rotating unit 152 .
도 1 내지 도 3을 참조하면, 일 실시 예는, 상기 제1틸트부(150)가 상기 프로브 카드 지지대(140)를 회전하는 회전축에 대하여 수직인 축을 기준으로 상기 프로브 카드 지지대(140)를 회전 이동하는 제2틸트부(160)를 더 포함할 수 있다. 상기 제2틸트부(160)는 상기 제1틸트부(150)의 회전부(152) 또는 지지부(151)의 일면에 배치될 수 있으며, 도 3을 참조하면, 상기 제2틸트부(160)는 상기 회전부(152)의 일면에 배치되어 있다. 상기 제2틸트부(160)는 제2틸트조정부재(161) 및 작동부재(162)를 포함할 수 있다. 상기 작동부재(162)는 일방향의 힘을 타방향으로 전달하는데 사용하는 것이면 특별히 제한하지 않는다. 구체적으로 상기 작동부재(162)는 다양한 기어, 축 및 짐벌 유닛을 포함할 수 있으며, 이를 통해 제2틸트조정부재(161)를 작동한 힘이 프로브 카드 축(141a, b)을 회전하도록 변환할 수 있다. 도 3을 참조하면, 제2틸트조정부재(161)를 작동함으로써 프로브 카드 지지대(140)가 제2축을 중심으로 회전하도록 작동할 수 있다. 1 to 3 , in one embodiment, the first tilt unit 150 rotates the probe card support 140 on the basis of an axis perpendicular to the axis of rotation of the probe card support 140 . It may further include a moving second tilt unit 160 . The second tilt unit 160 may be disposed on one surface of the rotation unit 152 or the support unit 151 of the first tilt unit 150 . Referring to FIG. 3 , the second tilt unit 160 is It is disposed on one surface of the rotating part 152 . The second tilt unit 160 may include a second tilt adjustment member 161 and an operation member 162 . The operation member 162 is not particularly limited as long as it is used to transmit force in one direction to the other direction. Specifically, the operation member 162 may include various gears, shafts and gimbal units, through which the force operating the second tilt adjustment member 161 is converted to rotate the probe card shafts 141a and b. can Referring to FIG. 3 , the probe card support 140 may be operated to rotate about the second axis by operating the second tilt adjustment member 161 .
도 4를 참조하면, 제1틸트부(150)에 의해 프로브 카드 지지대(140)가 제3축을 중심으로 회전하고, 도 3을 참조하면, 제2틸트부(160)에 의해 프로브 카드 지지대(140)가 제2축을 중심으로 회전함을 알 수 있다. 이와 같이 복수의 틸트부를 배치함으로써 프로브 카드 지지대(140)를 2개의 서로 다른 축을 중심으로 회전할 수 있는 바, 다양한 위치를 정밀하게 측정할 수 있다. Referring to FIG. 4 , the probe card support 140 is rotated about the third axis by the first tilt unit 150 , and referring to FIG. 3 , the probe card support 140 is rotated by the second tilt unit 160 by the second tilt unit 160 . ) rotates about the second axis. By disposing the plurality of tilt units in this way, the probe card support 140 can be rotated about two different axes, so that various positions can be precisely measured.
상기 프로브 카드 지지대(140)는 프로브 카드를 고정 및 지지하는 기능을 수행한다. 상기 프로브 카드 지지대(140)는 제1축부 내지 제3축부(110, 120, 130) 및 제1틸트부(150) 내지 제2틸트부(160)의 동력을 전달하는 축인 프로브 카드 축(141a, b)을 포함할 수 있다. 상기 프로브 카드 지지대(140)는 본 분야에서 통상적으로 사용하는 것일 수 있으며 특별히 제한하지 않는다. The probe card support 140 performs a function of fixing and supporting the probe card. The probe card support 140 is a probe card shaft 141a, which is an axis for transmitting power of the first to third shaft portions 110, 120, 130 and the first tilt portion 150 to the second tilt portion 160; b) may be included. The probe card support 140 may be commonly used in this field and is not particularly limited.
본 발명은 상술한 실시 형태 및 첨부된 도면에 의해 한정되는 것이 아니며 첨부된 청구범위에 의해 한정하고자 한다. 따라서, 청구범위에 기재된 본 발명의 기술적 사상을 벗어나지 않는 범위 내에서 당 기술분야의 통상의 지식을 가진 자에 의해 다양한 형태의 치환, 변형 및 변경이 가능할 것이며, 이 또한 본 발명의 범위에 속한다고 할 것이다.The present invention is not limited by the above-described embodiments and the accompanying drawings, but is intended to be limited by the appended claims. Therefore, various types of substitution, modification and change will be possible by those skilled in the art within the scope not departing from the technical spirit of the present invention described in the claims, and it is also said that it falls within the scope of the present invention. something to do.
[부호의 설명][Explanation of code]
100: 프로브 포지셔너, 110: 제1축부, 111: 제1축조정부재, 120: 제2축부, 121: 제2축조정부재, 130: 제3축부, 131: 제3축조정부재, 140: 프로브 카드 지지대, 141a, b: 프로브 카드 축, 150: 제1틸트부, 151: 지지부, 151a: 지지부몸체, 151b: 제1회전가이드, 151c: 회전가이드홈, 152: 회전부, 152a: 회전부몸체, 152b: 제2회전가이드, 152c: 제2나사선부, 153: 제1틸트조정부재, 153a: 제1나사선부, 154: 고정부재, 160: 제2틸트부, 161: 제2틸트조정부재, 162: 작동부재, 170: 프로브 카드, 171: 프로브100: probe positioner, 110: first shaft portion, 111: first shaft adjustment member, 120: second shaft portion, 121: second shaft adjustment member, 130: third shaft portion, 131: third axis adjustment member, 140: probe Card support, 141a, b: probe card shaft, 150: first tilt part, 151: support part, 151a: support body, 151b: first rotation guide, 151c: rotation guide groove, 152: rotation part, 152a: rotation part body, 152b : second rotation guide, 152c: second screw wire portion, 153: first tilt adjustment member, 153a: first screw wire portion, 154: fixing member, 160: second tilt portion, 161: second tilt adjustment member, 162: Operating member, 170: probe card, 171: probe

Claims (8)

  1. 프로브 카드를 지지하는 배치된 프로브 카드 지지대;a probe card support disposed to support the probe card;
    상기 프로브 카드 지지대를 제1축 방향으로 왕복 이동하는 제1축부;a first shaft portion reciprocating the probe card support in a first axis direction;
    상기 프로브 카드 지지대를 제2축 방향으로 왕복 이동하는 제2축부;a second shaft part reciprocating the probe card support in a second shaft direction;
    상기 프로브 카드 지지대를 제3축 방향으로 왕복 이동하는 제3축부; 및 a third shaft unit reciprocating the probe card support in a third axis direction; and
    상기 프로브 카드 지지대를 적어도 하나의 축을 기준으로 회전 이동하는 제1틸트부;를 포함하는,A first tilt unit for rotationally moving the probe card supporter based on at least one axis; including,
    반도체 계측장치용 프로브 포지셔너. Probe positioners for semiconductor measuring devices.
  2. 제1항에 있어서,According to claim 1,
    상기 제1틸트부는,The first tilt unit,
    상기 제1축부 및 제2축부 사이에 배치되어 상기 제2축부가 상기 제1축부에 대하여 적어도 일방향으로 회전이동이 가능하도록 하거나, 상기 제2축부 및 제3축부 사이에 배치되어 상기 제3축부가 상기 제2축부에 대하여 적어도 일방향으로 회전이동이 가능하도록 하거나, 상기 제3축부 및 프로브 카드 지지대 사이에 배치되어 상기 프로브 카드 지지대가 상기 제3축부에 대하여 적어도 일방향으로 회전이동이 가능하도록 하는 것인,It is disposed between the first shaft part and the second shaft part so that the second shaft part is rotationally movable in at least one direction with respect to the first shaft part, or is disposed between the second shaft part and the third shaft part so that the third shaft part is To enable rotational movement in at least one direction with respect to the second shaft portion, or to be disposed between the third shaft portion and the probe card support so that the probe card support is rotationally movable in at least one direction with respect to the third shaft portion ,
    반도체 계측장치용 프로브 포지셔너. Probe positioners for semiconductor measuring devices.
  3. 제1항에 있어서,According to claim 1,
    상기 제1틸트부는,The first tilt unit,
    지지부 및 상기 지지부에 대하여 상대적으로 회전 이동하는 회전부를 포함하는,Comprising a support and a rotating part that rotates relative to the support,
    반도체 계측장치용 프로브 포지셔너. Probe positioners for semiconductor measuring devices.
  4. 제3항에 있어서,4. The method of claim 3,
    상기 제1틸트부는,The first tilt unit,
    상기 회전부가 상기 지지부에 대하여 상대적으로 이동하도록 하는 제1틸트조정부재를 포함하는,Containing a first tilt adjustment member for moving the rotating portion relative to the support portion,
    반도체 계측장치용 프로브 포지셔너. Probe positioners for semiconductor measuring devices.
  5. 제4항에 있어서,5. The method of claim 4,
    상기 제1틸트조정부재는 제1나사선부를 포함하고, 상기 회전부는 제2나산선부를 포함고, 상기 제1틸트조정부재가 회전함에 따라 상기 제1나사선부 및 제2나사선부가 맞물림으로써 상기 회전부가 상기 지지부에 대하여 회전 이동하는 것인,The first tilt adjustment member includes a first screw thread portion, the rotating portion includes a second screw wire portion, and as the first tilt adjustment member rotates, the first screw wire portion and the second screw wire portion engage so that the rotating portion is The rotational movement with respect to the support,
    반도체 계측장치용 프로브 포지셔너. Probe positioners for semiconductor measuring devices.
  6. 제4항에 있어서,5. The method of claim 4,
    상기 지지부는 상기 제1틸트조정부재가 노출되어 상기 회전부의 일면과 상기 제1틸트조정부재가 맞닿도록 하는 회전가이드홈을 포함하는,The support portion includes a rotation guide groove through which the first tilt adjustment member is exposed so that one surface of the rotation unit and the first tilt adjustment member come into contact with each other,
    반도체 계측장치용 프로브 포지셔너. Probe positioners for semiconductor measuring devices.
  7. 제1항에 있어서,According to claim 1,
    상기 제1틸트부가 상기 프로브 카드 지지대를 회전하는 회전축에 대하여 수직인 축을 기준으로 상기 프로브 카드 지지대를 회전 이동하는 제2틸트부를 더 포함하는,Further comprising a second tilt portion for rotating the probe card support with respect to an axis perpendicular to the axis of rotation of the first tilt portion for rotating the probe card support,
    반도체 계측장치용 프로브 포지셔너. Probe positioners for semiconductor measuring devices.
  8. 제7항에 있어서,8. The method of claim 7,
    상기 제2틸트부는,The second tilt unit,
    작동부재를 포함하는,comprising an operating member,
    반도체 계측장치용 프로브 포지셔너. Probe positioners for semiconductor measuring devices.
PCT/KR2020/018118 2020-02-20 2020-12-11 Probe positioner for semiconductor measurement device WO2021167216A1 (en)

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JP2008311313A (en) * 2007-06-12 2008-12-25 Santo Technology Kk Semiconductor testing device
JP5277827B2 (en) * 2008-09-22 2013-08-28 東京エレクトロン株式会社 Probe device
JP2018124256A (en) * 2017-07-04 2018-08-09 株式会社ミツトヨ Shape measurement device control method
KR101945629B1 (en) * 2016-09-30 2019-02-08 아주대학교산학협력단 Apparatus for cable inspection
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JP2008311313A (en) * 2007-06-12 2008-12-25 Santo Technology Kk Semiconductor testing device
JP5277827B2 (en) * 2008-09-22 2013-08-28 東京エレクトロン株式会社 Probe device
KR101945629B1 (en) * 2016-09-30 2019-02-08 아주대학교산학협력단 Apparatus for cable inspection
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KR101971525B1 (en) * 2017-12-13 2019-04-23 주식회사 만도 Energy active regeneration device for suspension

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