WO2021087743A1 - Magnetic gravity compensator for cylindrical voice coil actuator, voice coil actuator, and voice coil actuator assembly - Google Patents

Magnetic gravity compensator for cylindrical voice coil actuator, voice coil actuator, and voice coil actuator assembly Download PDF

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Publication number
WO2021087743A1
WO2021087743A1 PCT/CN2019/115713 CN2019115713W WO2021087743A1 WO 2021087743 A1 WO2021087743 A1 WO 2021087743A1 CN 2019115713 W CN2019115713 W CN 2019115713W WO 2021087743 A1 WO2021087743 A1 WO 2021087743A1
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WIPO (PCT)
Prior art keywords
stator
voice coil
mover
coil motor
magnetic
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PCT/CN2019/115713
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French (fr)
Chinese (zh)
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印欣
孙亚雷
姚艺华
林浩元
吴彩鸣
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雅科贝思精密机电(上海)有限公司
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Priority to SG11202102311YA priority Critical patent/SG11202102311YA/en
Priority to PCT/CN2019/115713 priority patent/WO2021087743A1/en
Publication of WO2021087743A1 publication Critical patent/WO2021087743A1/en

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for

Definitions

  • the present invention relates to the related technical field of voice coil motors, in particular to a cylindrical voice coil motor magnetic gravity compensator, voice coil motor and components thereof.
  • Cylindrical voice coil motor is a linear motion actuator that converts electrical energy into mechanical energy. Unlike the traditional system in which the servo motor is matched with the ball screw, the voice coil motor can directly drive the load. Therefore, the cylindrical voice coil motor has the advantages of simple structure, maintenance-free, high response and high precision, and is widely used in semiconductor and industrial automation.
  • the cylindrical voice coil motor in the prior art generally has a problem, that is, when the motor is fixed, it needs to be energized at all times to overcome the gravity of the motor itself and the load, which will cause energy loss. This part of the lost electrical energy will be converted into heat and radiated to the surrounding environment. This additional heat generation will be due to the thermal expansion effect in the equipment, and this thermal expansion effect will produce technical defects that are difficult to overcome for high-precision equipment, such as lithography machines and other high-precision applications. Allowed.
  • the industry has proposed a technical solution of using a magnetic gravity compensator to counteract gravity.
  • the magnetic field force generated by the permanent magnet material is used to offset the gravity of the load, and no additional power supply is required.
  • magnetic coupling has lower rigidity, so it can be used as a vibration isolator.
  • HEIDENHAIN proposed a negative stiffness magnetic gravity compensator structure in patent WO2011/131462.
  • the main part of the structure is composed of two sets of axially magnetized annular permanent magnets and a set of axially magnetized conical permanent magnets.
  • ORACLE company proposed a classic cylindrical voice coil motor structure in patent US6194796, but it does not have the function of gravity compensation.
  • ETEL proposed a cylindrical voice coil motor with a magnetic gravity compensator function, the coil of which is wound on a tapered iron core.
  • ASML Company proposed a voice coil motor with integrated magnetic gravity compensation function in patent US6791443, which has two forms of plane and cylinder. In the cylindrical structure, there are several sets of radially magnetized permanent magnets.
  • SMEE company proposed two cylindrical voice coil motors with magnetic gravity compensator compensation function in patent CN105281530 and patent CN103034065.
  • the prior art magnetic gravity compensator still has a compact design that is difficult to combine with the voice coil motor; it requires a radially magnetized permanent magnet ring and has a complicated structure. , High cost and other technical issues.
  • the present invention provides a cylindrical voice coil motor with magnetic gravity Compensator and voice coil motor and its components.
  • a cylindrical voice coil motor magnetic gravity compensator includes a mover and a stator; the mover includes a mover bracket and a mover permanent magnet, the longitudinal section of the mover bracket is U-shaped, and the mover is permanent The magnet is arranged at the opening of the U-shape; the stator includes a stator iron core, a stator magnet assembly and a stator shaft; the longitudinal section of the stator is an E-shape, and the stator iron core is arranged on two outer sides of the E-shape.
  • the stator shaft is arranged on the shaft at the center of the E-shape, the stator magnet assembly includes stator permanent magnets and stator magnetic blocks arranged overlapping each other, and the stator magnet assembly is sleeved on the axis of the E-shaped center.
  • the stator permanent magnets are located between the stator flux-permeable block and the bottom of the E-shape; two parallel sides of the U-shape and three parallel sides of the E-shape form two The gap is adapted.
  • the mover further includes a cable and a coil winding, the coil winding is arranged on the permanent magnet of the mover and On the outer wall between the U-shaped bottoms, the coil winding is connected to the outside through the cable.
  • the number of the stator magnet assembly is equal to the sum of the number of the mover permanent magnets and the coil windings.
  • the material of the mover permanent magnet and/or the stator permanent magnet is a rare earth permanent magnet with a high magnetic energy level.
  • the rare earth permanent magnets with high magnetic energy levels are neodymium iron boron permanent magnets, samarium cobalt permanent magnets, alnico permanent magnets or ferrite permanent magnets.
  • the material of the stator core and/or the stator magnetic block is a high magnetic permeability material.
  • the material of the mover support and/or the stator shaft is a polymer material or surface-insulated aluminum or non-magnetic stainless steel.
  • a magnetic gravity-compensated cylindrical voice coil motor assembly comprising a base, a linear guide, a spring, and the magnetic gravity-compensated cylindrical voice coil motor as described in any one of the foregoing, wherein the stator is fixedly connected to the base
  • the mover is connected to the linear guide rail through a sliding block, and one end of the spring is fixedly connected to the mover and the other end is fixedly connected to the linear guide rail.
  • the magnetizing direction of the permanent magnet in the technical solution of the present invention is axial magnetization, and a whole piece of permanent magnet can be easily used, and the structure and assembly are simpler. Reduce production costs;
  • the gravity compensator structure disclosed in the present invention can be seamlessly connected with the cylindrical voice coil motor structure to form a voice coil motor with a gravity compensation module;
  • the gravity compensator has a low stiffness coefficient and is suitable for use as a vibration isolator; in addition, the stiffness characteristics of the compensator are negative, which can have the same absolute stiffness coefficient.
  • the combined use of springs can realize gravity compensation with approximately zero stiffness.
  • Figure 1 is a schematic diagram of the overall three-dimensional structure of the voice coil motor in the present invention.
  • FIG. 2 is a schematic diagram of the longitudinal cross-sectional structure of the cylindrical voice coil motor magnetic gravity compensator in Embodiment 1;
  • FIG. 3 is a schematic diagram of a longitudinal cross-sectional structure of a cylindrical voice coil motor magnetic gravity compensator in Embodiment 2;
  • FIG. 4 is a schematic diagram of a longitudinal cross-sectional structure of the voice coil motor in Embodiment 3;
  • Fig. 5 is a schematic view of the longitudinal cross-sectional structure of the voice coil motor in embodiments 4 and 5;
  • FIG. 6 is a schematic diagram of the three-dimensional structure of the mover of the voice coil motor in Embodiment 4.
  • Fig. 8 is a magnetic field distribution diagram of the mover of the voice coil motor in the embodiment 4 at different positions;
  • Figure 9 is the relationship between the levitation force of the magnetic gravity compensator and the position of the mover in the fourth embodiment
  • Figure 10 is the relationship between the ampere force of the voice coil motor part and the position of the mover in the fourth embodiment
  • FIG. 11 is a schematic diagram of the structure of a magnetic gravity compensation type cylindrical voice coil motor assembly in Embodiment 7;
  • connection can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, or It can be an electrical connection; it can be directly connected, or indirectly connected through an intermediary, or it can be a connection between two structures.
  • connection can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, or It can be an electrical connection; it can be directly connected, or indirectly connected through an intermediary, or it can be a connection between two structures.
  • a cylindrical voice coil motor magnetic gravity compensator includes a mover 1 and a stator 2.
  • the mover 1 includes a mover bracket 4 and a permanent magnet 6 of the mover.
  • the longitudinal section is U-shaped, and the permanent magnet 6 of the mover is arranged at the opening of the U-shape, that is, the three-dimensional structure of the mover bracket 4 is a cylindrical structure with a bottom, and the permanent magnet 6 of the mover is arranged in the opening of the cylindrical structure.
  • the edge of one end or the side wall of the entire cylindrical structure is composed of a mover permanent magnet 6, or the periphery of the barrel side wall is wrapped with the mover permanent magnet 6;
  • the stator 2 includes a stator core 7 and a stator magnet assembly And the stator shaft 10;
  • the longitudinal section of the stator 2 is E-shaped, that is, the three-dimensional structure of the stator 2 is a cylindrical structure with a bottom and a column in the middle, and the stator core 7 is arranged on the outer side of the E-shaped two parallel
  • the stator shaft 10 is arranged on the shaft of the E-shaped center, that is, the position of the stator core 7 is located on the side wall of the cylindrical structure with the column, and the stator shaft 10 is arranged at the position of the middle column, wherein,
  • the stator shaft 10 can be a solid cylindrical shaft or a hollow cylindrical structure;
  • the stator magnet assembly includes a stator permanent magnet 8 and a stator magnetic block 9 arranged overlapping each other, and
  • the mover 1 and the stator 2 are matched together. That is, the inner diameter of the cylindrical structure of the mover 1 is equivalent to the diameter of the cylindrical structure of the stator 2.
  • the outer diameter of the cylindrical wall of the cylindrical structure is equivalent to the inner diameter of the cylindrical structure of the stator 2, and the depth of the two cylindrical structures is equivalent, so that the mover 1 and the stator 2 can achieve clearance fit.
  • the mover 1 and the stator 2 are assembled concentrically.
  • the mover 1 can move relative to the stator 2 in a vertical direction.
  • the permanent magnet 6 of the mover and the stator magnet assembly have the same magnetic pole direction.
  • Same sex repulsion realizes magnetic gravity compensation, avoids heat generation when energized, and can be used in high-precision instruments.
  • the mover 1 further includes a cable 3 and a coil winding 5, and the coil winding 5 is arranged on the permanent magnet 6 of the mover and the U-shaped bottom
  • the coil winding 5 is arranged on the outer wall of the lower middle of the mover bracket 4, and the coil winding 5 is connected to the outside through a cable 3 ;
  • the coil winding 5 is usually made of copper core or aluminum core enameled wire, and the coil winding 5 is fixed on the mover support 4 by means of gluing.
  • the mover 1 has a set of coil windings 5 and a set of permanent magnets 6 of the mover.
  • the feature is that the length of the mover 1 is short, and the weight of the mover 1 is lighter, but the ampere force is small.
  • the mover 1 has two sets of coil windings 5 and a set of mover permanent magnets 6.
  • the two sets of coil windings 5 and the stator permanent magnets 8 form a voice coil motor, which can realize the movement Dynamic adjustment.
  • the magnetic field of the permanent magnet 6 of the mover interacts with the magnetic field of the permanent magnet 8 of the stator to form a magnetic gravity compensator, which provides a levitation force opposite to the direction of gravity of the load 13.
  • a magnetic gravity compensator which provides a levitation force opposite to the direction of gravity of the load 13.
  • the relationship between the levitation force and the position of the mover 1 is shown in Figure 9. It can be seen from the figure that within a stroke range of 3 mm, the gravity compensator provides a characteristic similar to a "negative spring".
  • Fig. 10 shows the working characteristics of the voice coil motor part of the preferred embodiment.
  • the stator 1 is in motion.
  • the output is related to the position, and when the position is fixed, the motor output It is proportional to the magnitude of the current, so the dynamic adjustment of the movement state of the workpiece can be achieved by adjusting the magnitude of the current.
  • Figures 9 and 10 respectively show the working characteristics of the decoupling analysis of the magnetic gravity compensation and the voice coil motor. Combining the two can realize the movement adjustment of the load 13 workpiece with gravity compensation.
  • the number of stator magnet assemblies is equal to the sum of the number of permanent magnets 6 and coil windings 5 of the mover.
  • the mover permanent magnets 6 and/or the stator permanent magnets 8 are made of rare earth permanent magnets with high magnetic energy levels.
  • the rare earth permanent magnets with high magnetic energy levels are neodymium iron boron permanent magnets.
  • stator permanent magnet 8 is a rare earth permanent magnet with high magnetic energy level, or the materials of the mover permanent magnet 6 and the stator permanent magnet 8 are both rare earth permanent magnets with high magnetic energy level, and the other uses "and/or" The place is the same as this, so I won’t repeat it here.
  • the material of the stator core 7 and/or the stator magnetic block 9 is a high magnetic permeability material.
  • the material of the mover bracket 4 and/or the stator shaft 10 is a non-magnetic material, for example, a polymer material or aluminum with an insulating surface or a non-magnetic stainless steel with an insulating surface.
  • a magnetic gravity-compensated cylindrical voice coil motor assembly includes a base 14, a linear guide 11, a spring 12, and the voice coil motor in any one of the above embodiments, wherein the stator 2 and the base 14 Fixed connection, mover 1 is connected to linear guide 11 through a slider, one end of spring 12 is fixedly connected to mover 1 and the other end is fixedly connected to linear guide 11; concentric installation is ensured by linear guide 11, spring 12 is used to provide magnetic
  • the opposite stiffness characteristics of the gravity compensator are used to obtain approximately zero stiffness gravity compensation, and jointly compensate the gravity of the load 13.
  • multiple modules as shown in FIG. 11 can also be used in parallel to control the heavier load 13 synchronously.

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  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)

Abstract

A magnetic gravity compensator for a cylindrical voice coil actuator, a voice coil actuator, and a voice coil actuator assembly. The magnetic gravity compensator comprises a rotor (1) and a stator (2); the rotor (1) comprises a rotor support (4) and a rotor permanent magnet (6); the longitudinal section of the rotor support (4) is U-shaped; the rotor permanent magnet (6) is provided at the opening of the U shape; the stator (2) comprises a stator iron core (7), a stator magnet assembly, and a stator shaft (10); the longitudinal section of the stator (2) is E-shaped; the stator iron core (7) is disposed on two parallel edges at the outer side of the E shape; the stator shaft (10) is disposed on the axis at the center of the E shape; the stator magnet assembly comprises a stator permanent magnet (8) and a stator magnetic permeable block (9) stacked together; the stator magnet assembly is sleeved on the stator shaft (10); the stator permanent magnet (8) is located between the stator magnetic permeable block (9) and the bottom of the E shape; the two parallel edges of the U shape fit the two gaps formed by the three parallel edges of the E shape. The invention has the characteristics of being simple to manufacture and easy to combine with a voice coil actuator, good stiffness properties, and low temperature rise.

Description

一种圆筒型音圈电机磁性重力补偿器及音圈电机及其组件Magnetic gravity compensator of cylindrical voice coil motor, voice coil motor and components thereof 技术领域Technical field
本发明涉及音圈电机相关技术领域，特别涉及一种圆筒型音圈电机磁性重力补偿器及音圈电机及其组件。The present invention relates to the related technical field of voice coil motors, in particular to a cylindrical voice coil motor magnetic gravity compensator, voice coil motor and components thereof.
背景技术Background technique
圆筒型音圈电机是一种将电能转化为机械能的直线运动执行器。跟传统的伺服电机与滚珠丝杆配合的传统***不同，音圈电机可以直接驱动负载。因此，圆筒型音圈电机具有结构简单、免维护、高响应和高精度等优点，被广泛应用在半导体和工业自动化等场合。Cylindrical voice coil motor is a linear motion actuator that converts electrical energy into mechanical energy. Unlike the traditional system in which the servo motor is matched with the ball screw, the voice coil motor can directly drive the load. Therefore, the cylindrical voice coil motor has the advantages of simple structure, maintenance-free, high response and high precision, and is widely used in semiconductor and industrial automation.
但是，现有技术中的圆筒型音圈电机普遍存在一个问题，这就是当电机固定不动时，需要时刻通电，才能克服电机本身和负载的重力，这就会造成能量损耗。这部分损耗的电能会转化为热量散发到周围环境中。这种额外的热量产生，会因在设备中产生热膨胀效应，而这种热膨胀效应对于高精度设备而言会产生难以克服的技术缺陷，例如在光刻机等高精度的应用场合中则是不被允许的。However, the cylindrical voice coil motor in the prior art generally has a problem, that is, when the motor is fixed, it needs to be energized at all times to overcome the gravity of the motor itself and the load, which will cause energy loss. This part of the lost electrical energy will be converted into heat and radiated to the surrounding environment. This additional heat generation will be due to the thermal expansion effect in the equipment, and this thermal expansion effect will produce technical defects that are difficult to overcome for high-precision equipment, such as lithography machines and other high-precision applications. Allowed.
为了解决上述问题，行业中提出了利用磁性重力补偿器抵消重力的技术方案。利用永磁材料产生的磁场力抵消负载的重力，不需要再额外供电。除此之外，与机械耦合相比，磁性耦合具有更低的刚性，从而可以作为隔振器使用。In order to solve the above-mentioned problems, the industry has proposed a technical solution of using a magnetic gravity compensator to counteract gravity. The magnetic field force generated by the permanent magnet material is used to offset the gravity of the load, and no additional power supply is required. In addition, compared with mechanical coupling, magnetic coupling has lower rigidity, so it can be used as a vibration isolator.
HEIDENHAIN公司在专利WO2011/131462中提出了一种负刚度的磁性重力补偿器结构，该结构的主要部分由两组轴向充磁的环形永磁体和一组轴向充磁的锥形永磁体构成。ORACLE公司在专利US6194796中提出了一种经典的圆筒型音圈电机结构，但不具备重力补偿功能。ETEL公司在专利US9172291中提出了一种具有磁性重力补偿器功能的圆筒型音圈电机，其线圈绕在一个锥形铁芯上。ASML公司在专利US6791443中提出了一种集成磁性重力补偿功能的音圈电机，具有平面和圆筒两种形式。在圆筒型结构中，具有若干组径向充磁的永磁体。SMEE公司在专利CN105281530和专利CN103034065中提出了两种具有磁性重力补偿器补偿功能的圆筒型音圈电机。HEIDENHAIN proposed a negative stiffness magnetic gravity compensator structure in patent WO2011/131462. The main part of the structure is composed of two sets of axially magnetized annular permanent magnets and a set of axially magnetized conical permanent magnets. . ORACLE company proposed a classic cylindrical voice coil motor structure in patent US6194796, but it does not have the function of gravity compensation. In patent US9172291, ETEL proposed a cylindrical voice coil motor with a magnetic gravity compensator function, the coil of which is wound on a tapered iron core. ASML Company proposed a voice coil motor with integrated magnetic gravity compensation function in patent US6791443, which has two forms of plane and cylinder. In the cylindrical structure, there are several sets of radially magnetized permanent magnets. SMEE company proposed two cylindrical voice coil motors with magnetic gravity compensator compensation function in patent CN105281530 and patent CN103034065.
然而，虽然这一技术问题已受到现有技术的广泛关注，但是现有技术的磁性重力补偿器仍然存在难以与音圈电机进行结合行程紧凑设计；需要径向充磁的永磁环，结构复杂，成本较高等技术问题。However, although this technical problem has received extensive attention from the prior art, the prior art magnetic gravity compensator still has a compact design that is difficult to combine with the voice coil motor; it requires a radially magnetized permanent magnet ring and has a complicated structure. , High cost and other technical issues.
发明内容Summary of the invention
针对现有技术存在的难以与音圈电机进行结合行程紧凑设计；需要径向充磁的永磁环，结构复杂，成本较高的技术问题，本发明提供一种圆筒型音圈电机磁性重力补偿器及音圈电机及其组件。Aiming at the technical problems that it is difficult to combine with the voice coil motor in the prior art, the stroke is compact; the permanent magnet ring needs radial magnetization, the structure is complicated, and the cost is relatively high. The present invention provides a cylindrical voice coil motor with magnetic gravity Compensator and voice coil motor and its components.
为实现上述目的，本发明的技术方案为：In order to achieve the above objective, the technical solution of the present invention is:
一种圆筒型音圈电机磁性重力补偿器，包括动子和定子；所述动子包括动子支架和动子永磁体，所述动子支架的纵截面为U字形，所述动子永磁体设置于所述U字形的开口处；所 述定子包括定子铁芯、定子磁体组件和定子轴；所述定子的纵截面为E字形，所述定子铁芯设置于所述E字形外侧的两条相互平行的边上，所述定子轴设置于所述E字形中心的轴上，所述定子磁体组件包括相互重叠设置的定子永磁体与定子导磁块，所述定子磁体组件套接于所述定子轴的***，所述定子永磁***于所述定子导磁块与所述E字形底部之间；所述U字形的两条平行的边与所述E字形三条平行的边形成的两个间隙相适配。A cylindrical voice coil motor magnetic gravity compensator includes a mover and a stator; the mover includes a mover bracket and a mover permanent magnet, the longitudinal section of the mover bracket is U-shaped, and the mover is permanent The magnet is arranged at the opening of the U-shape; the stator includes a stator iron core, a stator magnet assembly and a stator shaft; the longitudinal section of the stator is an E-shape, and the stator iron core is arranged on two outer sides of the E-shape. On the mutually parallel sides, the stator shaft is arranged on the shaft at the center of the E-shape, the stator magnet assembly includes stator permanent magnets and stator magnetic blocks arranged overlapping each other, and the stator magnet assembly is sleeved on the axis of the E-shaped center. On the periphery of the stator shaft, the stator permanent magnets are located between the stator flux-permeable block and the bottom of the E-shape; two parallel sides of the U-shape and three parallel sides of the E-shape form two The gap is adapted.
进一步的，所述动子永磁体有若干组。Further, there are several groups of the mover permanent magnets.
一种音圈电机，在上述任一项圆筒型音圈电机磁性重力补偿器的基础上，所述动子还包括线缆和线圈绕组，所述线圈绕组设置于所述动子永磁体与所述U字形底部之间的外壁上，所述线圈绕组通过所述线缆与外部连接。A voice coil motor, on the basis of any one of the above cylindrical voice coil motor magnetic gravity compensator, the mover further includes a cable and a coil winding, the coil winding is arranged on the permanent magnet of the mover and On the outer wall between the U-shaped bottoms, the coil winding is connected to the outside through the cable.
进一步的，所述线圈绕组有若干组。Further, there are several groups of the coil windings.
进一步的，所述定子磁体组件的数量与所述动子永磁体与所述线圈绕组的数量之和相等。Further, the number of the stator magnet assembly is equal to the sum of the number of the mover permanent magnets and the coil windings.
进一步的，所述动子永磁体和/或所述定子永磁体的材质为高磁能级的稀土永磁体。Further, the material of the mover permanent magnet and/or the stator permanent magnet is a rare earth permanent magnet with a high magnetic energy level.
优选的，所述高磁能级的稀土永磁体为钕铁硼永磁体、钐钴永磁体、铝镍钴永磁体或铁氧体永磁体。Preferably, the rare earth permanent magnets with high magnetic energy levels are neodymium iron boron permanent magnets, samarium cobalt permanent magnets, alnico permanent magnets or ferrite permanent magnets.
优选的，所述定子铁芯和/或所述定子导磁块的材质为高导磁材料。Preferably, the material of the stator core and/or the stator magnetic block is a high magnetic permeability material.
优选的，所述动子支架和/或所述定子轴的材质为高分子材料或者表面绝缘的铝或非导磁不锈钢。Preferably, the material of the mover support and/or the stator shaft is a polymer material or surface-insulated aluminum or non-magnetic stainless steel.
一种磁性重力补偿式圆筒型音圈电机组件，包括底座、直线导轨、弹簧以及如前述任一项所述的磁性重力补偿式圆筒型音圈电机，所述定子与所述底座固定连接，所述动子通过滑块与所述直线导轨连接，所述弹簧的一端与所述动子固定连接另一端与所述直线导轨固定连接。A magnetic gravity-compensated cylindrical voice coil motor assembly, comprising a base, a linear guide, a spring, and the magnetic gravity-compensated cylindrical voice coil motor as described in any one of the foregoing, wherein the stator is fixedly connected to the base The mover is connected to the linear guide rail through a sliding block, and one end of the spring is fixedly connected to the mover and the other end is fixedly connected to the linear guide rail.
本发明的突出优点和有益效果如下：The outstanding advantages and beneficial effects of the present invention are as follows:
1.制造简单：与现有的技术方案相比，本发明的技术方案中的永磁体充磁方向均为轴向充磁，可以很容易地使用一整块永磁体，结构和装配更加简单，降低了生产成本；1. Simple manufacturing: Compared with the existing technical solution, the magnetizing direction of the permanent magnet in the technical solution of the present invention is axial magnetization, and a whole piece of permanent magnet can be easily used, and the structure and assembly are simpler. Reduce production costs;
2.易于与音圈电机结合：本发明公布的重力补偿器结构可以与圆筒型音圈电机结构实现无缝衔接，构成具有重力补偿模块的音圈电机；2. Easy to combine with voice coil motor: The gravity compensator structure disclosed in the present invention can be seamlessly connected with the cylindrical voice coil motor structure to form a voice coil motor with a gravity compensation module;
3.刚度特性好：与同体积的弹簧相比，该重力补偿器的刚度系数很低，适合作为隔振器使用；此外，该补偿器的刚度特性为负，可以与具有相同绝对值刚度系数的弹簧结合使用，实现近似零刚度的重力补偿。3. Good stiffness characteristics: Compared with springs of the same volume, the gravity compensator has a low stiffness coefficient and is suitable for use as a vibration isolator; in addition, the stiffness characteristics of the compensator are negative, which can have the same absolute stiffness coefficient. The combined use of springs can realize gravity compensation with approximately zero stiffness.
4.温升低：由于重力补偿结构抵消了重力，安培力只需要提供动态调整所需要的力，因此大大降低了电流和发热，避免受热膨胀带来的精度误差，非常适合于半导体等高精度应用场合。4. Low temperature rise: Because the gravity compensation structure offsets the gravity, the ampere force only needs to provide the force required for dynamic adjustment, thus greatly reducing the current and heating, avoiding the accuracy error caused by thermal expansion, and it is very suitable for high precision such as semiconductors. Application occasions.
附图说明Description of the drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些 附图获得其他的附图。In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only These are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative work.
图1为本发明中的音圈电机的总体立体结构示意图；Figure 1 is a schematic diagram of the overall three-dimensional structure of the voice coil motor in the present invention;
图2为实施例1中的圆筒型音圈电机磁性重力补偿器的纵截面结构示意图；2 is a schematic diagram of the longitudinal cross-sectional structure of the cylindrical voice coil motor magnetic gravity compensator in Embodiment 1;
图3为实施例2中的圆筒型音圈电机磁性重力补偿器的纵截面结构示意图；3 is a schematic diagram of a longitudinal cross-sectional structure of a cylindrical voice coil motor magnetic gravity compensator in Embodiment 2;
图4为实施例3中的音圈电机的纵截面结构示意图；4 is a schematic diagram of a longitudinal cross-sectional structure of the voice coil motor in Embodiment 3;
图5为实施例4和5中的音圈电机的纵截面结构示意图；Fig. 5 is a schematic view of the longitudinal cross-sectional structure of the voice coil motor in embodiments 4 and 5;
图6为实施例4中的音圈电机的动子立体结构示意图；6 is a schematic diagram of the three-dimensional structure of the mover of the voice coil motor in Embodiment 4;
图7为实施例5中的音圈电机的定子的***视图；7 is an exploded view of the stator of the voice coil motor in Embodiment 5;
图8为实施例4中的音圈电机的动子在不同位置时的磁场分布图；Fig. 8 is a magnetic field distribution diagram of the mover of the voice coil motor in the embodiment 4 at different positions;
图9为实施例4中的磁性重力补偿器的悬浮力与动子位置的关系；Figure 9 is the relationship between the levitation force of the magnetic gravity compensator and the position of the mover in the fourth embodiment;
图10为实施例4中的音圈电机部分的安培力与动子位置的关系；Figure 10 is the relationship between the ampere force of the voice coil motor part and the position of the mover in the fourth embodiment;
图11为实施例7中磁性重力补偿式圆筒型音圈电机组件的结构示意图；11 is a schematic diagram of the structure of a magnetic gravity compensation type cylindrical voice coil motor assembly in Embodiment 7;
图中：1-动子；2-定子；3-线缆；4-动子支架；5-线圈绕组；6-动子永磁体；7-定子铁芯；8-定子永磁体；9-定子导磁块；10-定子轴；11-直线导轨；12-弹簧；13-负载；14-底座。In the picture: 1-mover; 2-stator; 3-cable; 4-mover bracket; 5-coil winding; 6-mover permanent magnet; 7-stator core; 8-stator permanent magnet; 9-stator Magnetic conductive block; 10-stator shaft; 11-linear guide rail; 12-spring; 13-load; 14-base.
具体实施方式Detailed ways
下面结合附图对本发明的具体实施方式作进一步说明。在此需要说明的是，对于这些实施方式的说明用于帮助理解本发明，但并不构成对本发明的限定。此外，下面所描述的本发明各个实施方式中所涉及的技术特征只要彼此之间未构成冲突就可以相互组合。The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings. It should be noted here that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation to the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
需要说明的是，在本发明的描述中，术语“上”、“下”等指示的方位或位置关系为基于附图所示对本发明结构的说明，仅是为了便于描述本发明的简便，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制；具体实施时，附图中的结构的上下位置关系可以对调。It should be noted that in the description of the present invention, the orientation or positional relationship indicated by the terms "upper", "lower", etc. are based on the description of the structure of the present invention shown in the drawings, and are only for the convenience of describing the present invention. It does not indicate or imply that the pointed device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention; in specific implementation, the upper and lower positions of the structures in the drawings can be reversed.
另外，除非另有明确的规定和限定，术语“安装”、“连接”应做广义理解，例如，连接可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个结构内部的连通。对于本领域的普通技术人员而言，可以根据本发明的总体思路，联系本方案上下文具体情况理解上述术语在本发明中的具体含义。In addition, unless otherwise clearly specified and limited, the terms "installation" and "connection" should be interpreted broadly. For example, the connection can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, or It can be an electrical connection; it can be directly connected, or indirectly connected through an intermediary, or it can be a connection between two structures. For those of ordinary skill in the art, the specific meaning of the above terms in the present invention can be understood according to the general idea of the present invention and the specific circumstances of the context of this solution.
实施例1Example 1
如图1和图2所示，一种圆筒型音圈电机磁性重力补偿器，包括动子1和定子2；动子1包括动子支架4和动子永磁体6，动子支架4的纵截面为U字形，动子永磁体6设置于U字形的开口处，也就是动子支架4的立体结构为一个带底部的筒状结构，动子永磁体6设置于这一筒状结构开口一端的边沿，或者整个筒状结构的筒体侧壁均有动子永磁体6构成，或者筒体侧壁的***包裹着这一动子永磁体6；定子2包括定子铁芯7、定子磁体组件和定子轴10；定子2的纵截面为E字形，也就是定子2的立体结构为一个带底部的中间设有立柱的筒状结构，定子铁芯7设置于E字形外侧的两条相互平行的边上，定子轴10设置于E字形中心的轴上，也就是定子铁芯7的位置位于设有立柱的筒状结构的筒体侧壁，而定子轴10设置于 中间立柱的位置，其中，定子轴10可以为实心圆柱体的轴，也可以是空心的圆筒结构；定子磁体组件包括相互重叠设置的定子永磁体8与定子导磁块9，定子磁体组件套接于定子轴10的***，具体实施时，也可以仅有定子磁体组件，中间不设置定子轴10，定子永磁体8位于定子导磁块9与E字形底部之间；U字形的两条平行的边与E字形三条平行的边形成的两个间隙相适配，用立体结构来表述，也就是动子1总体上是一个带底部的筒状结构，而定子2总体上也是一个带底部的筒状结构，只不过定子2的筒状结构中心设置有一个立柱状结构，动子1与定子2配合在一起就是，动子1的筒状结构的筒壁内径与定子2中立柱状结构的直径相当，动子1的筒状结构的筒壁外径与定子2筒状结构的筒壁内径相当，并且两个筒状结构的深度相当，这样动子1与定子2能够实现间隙配合。As shown in Figure 1 and Figure 2, a cylindrical voice coil motor magnetic gravity compensator includes a mover 1 and a stator 2. The mover 1 includes a mover bracket 4 and a permanent magnet 6 of the mover. The longitudinal section is U-shaped, and the permanent magnet 6 of the mover is arranged at the opening of the U-shape, that is, the three-dimensional structure of the mover bracket 4 is a cylindrical structure with a bottom, and the permanent magnet 6 of the mover is arranged in the opening of the cylindrical structure. The edge of one end or the side wall of the entire cylindrical structure is composed of a mover permanent magnet 6, or the periphery of the barrel side wall is wrapped with the mover permanent magnet 6; the stator 2 includes a stator core 7 and a stator magnet assembly And the stator shaft 10; the longitudinal section of the stator 2 is E-shaped, that is, the three-dimensional structure of the stator 2 is a cylindrical structure with a bottom and a column in the middle, and the stator core 7 is arranged on the outer side of the E-shaped two parallel On the other hand, the stator shaft 10 is arranged on the shaft of the E-shaped center, that is, the position of the stator core 7 is located on the side wall of the cylindrical structure with the column, and the stator shaft 10 is arranged at the position of the middle column, wherein, The stator shaft 10 can be a solid cylindrical shaft or a hollow cylindrical structure; the stator magnet assembly includes a stator permanent magnet 8 and a stator magnetic block 9 arranged overlapping each other, and the stator magnet assembly is sleeved on the periphery of the stator shaft 10 In the specific implementation, it is also possible to have only the stator magnet assembly without the stator shaft 10 in the middle, and the stator permanent magnet 8 is located between the stator flux block 9 and the bottom of the E-shape; the two parallel sides of the U-shape are parallel to the three E-shapes The two gaps formed by the edges of the two are matched and expressed in a three-dimensional structure, that is, the mover 1 is generally a cylindrical structure with a bottom, and the stator 2 is also a cylindrical structure with a bottom as a whole, except for the stator The center of the cylindrical structure of 2 is provided with a column-shaped structure. The mover 1 and the stator 2 are matched together. That is, the inner diameter of the cylindrical structure of the mover 1 is equivalent to the diameter of the cylindrical structure of the stator 2. The outer diameter of the cylindrical wall of the cylindrical structure is equivalent to the inner diameter of the cylindrical structure of the stator 2, and the depth of the two cylindrical structures is equivalent, so that the mover 1 and the stator 2 can achieve clearance fit.
动子1和定子2同心装配，动子1可以相对定子2做垂直方向的相对运动，毋庸多言，动子永磁体6与定子磁体组件的磁极方向相同，这两个磁体的磁极之间通过同性相斥实现磁性重力补偿，避免通电产生热量，可应用于高精密仪器中。The mover 1 and the stator 2 are assembled concentrically. The mover 1 can move relative to the stator 2 in a vertical direction. Needless to say, the permanent magnet 6 of the mover and the stator magnet assembly have the same magnetic pole direction. Same sex repulsion realizes magnetic gravity compensation, avoids heat generation when energized, and can be used in high-precision instruments.
以上为本发明实施例的基本型，为了改进技术效果，还可对本实施的基本型做如下改进，以下改进没有矛盾的地方均可相互结合，该结构可以单独作为重力补偿器使用，或者与外置音圈电机配合使用。The above is the basic type of the embodiment of the present invention. In order to improve the technical effect, the basic type of this implementation can be improved as follows. The following improvements can be combined with each other where there is no contradiction. This structure can be used as a gravity compensator alone, or with external Used in conjunction with a voice coil motor.
实施例2Example 2
如图3所示，本圆筒型音圈电机磁性重力补偿器中，动子永磁体6有若干组，这若干组动子永磁体6设置方式相同，能够提供的悬浮力更大，适合负载更重的应用场合。As shown in Figure 3, in this cylindrical voice coil motor magnetic gravity compensator, there are several sets of mover permanent magnets 6, which are arranged in the same way, which can provide greater levitation force and are suitable for loads. Heavier applications.
实施例3Example 3
一种音圈电机，在上述圆筒型音圈电机磁性重力补偿器的实施例中，动子1还包括线缆3和线圈绕组5，线圈绕组5设置于动子永磁体6与U字形底部之间的外壁上，也就是动子永磁体6设置于动子支架4中下部的外壁上，线圈绕组5设置于动子支架4中上部的外壁上，线圈绕组5通过线缆3与外部连接；其中线圈绕组5通常由铜芯或铝芯漆包线环绕制成，线圈绕组5通过胶粘等方式固定在动子支架4上。A voice coil motor. In the embodiment of the magnetic gravity compensator of the cylindrical voice coil motor, the mover 1 further includes a cable 3 and a coil winding 5, and the coil winding 5 is arranged on the permanent magnet 6 of the mover and the U-shaped bottom On the outer wall between, that is, the permanent magnet 6 of the mover is arranged on the outer wall of the lower middle of the mover bracket 4, the coil winding 5 is arranged on the outer wall of the upper middle of the mover bracket 4, and the coil winding 5 is connected to the outside through a cable 3 ; Among them, the coil winding 5 is usually made of copper core or aluminum core enameled wire, and the coil winding 5 is fixed on the mover support 4 by means of gluing.
如图4所示，动子1中有一组线圈绕组5和一组动子永磁体6，其特点是动子1的长度较短，动子1的质量较轻，但安培力较小。As shown in Fig. 4, the mover 1 has a set of coil windings 5 and a set of permanent magnets 6 of the mover. The feature is that the length of the mover 1 is short, and the weight of the mover 1 is lighter, but the ampere force is small.
实施例4Example 4
如图5和图6所示，本音圈电机中，线圈绕组5有若干组，提供较大的安培力。As shown in Figs. 5 and 6, in the voice coil motor, there are several sets of coil windings 5 to provide a larger ampere force.
如图5所示，动子1具有两组线圈绕组5和一组动子永磁体6，在实际应用过程中，两组线圈绕组5与定子永磁体8构成音圈电机，可以实现对运动的动态调节。As shown in Figure 5, the mover 1 has two sets of coil windings 5 and a set of mover permanent magnets 6. In actual application, the two sets of coil windings 5 and the stator permanent magnets 8 form a voice coil motor, which can realize the movement Dynamic adjustment.
动子永磁体6的磁场与定子永磁体8的磁场相互作用，构成磁性重力补偿器，提供一个与负载13重力方向相反的悬浮力。当线圈绕组5未通电时，悬浮力与动子1位置的关系如图9所示，由图可知，在3mm的行程范围内，该重力补偿器提供一个近似“负弹簧”的特性。在该优选的实施例中，悬浮力F与动子1位置x的关系可以表示为：F＝k·x+F0。The magnetic field of the permanent magnet 6 of the mover interacts with the magnetic field of the permanent magnet 8 of the stator to form a magnetic gravity compensator, which provides a levitation force opposite to the direction of gravity of the load 13. When the coil winding 5 is not energized, the relationship between the levitation force and the position of the mover 1 is shown in Figure 9. It can be seen from the figure that within a stroke range of 3 mm, the gravity compensator provides a characteristic similar to a "negative spring". In this preferred embodiment, the relationship between the levitation force F and the position x of the mover 1 can be expressed as: F=k·x+F0.
当与刚度系数与之匹配的弹簧12相配合，可以实现零刚度的重力补偿，因此非常适合应用在需要隔振的场合。When matched with the spring 12 with matching stiffness coefficient, gravity compensation with zero stiffness can be realized, so it is very suitable for applications where vibration isolation is required.
图10是该优选实施例中音圈电机部分的工作特性，当线圈绕组5通以适当的直流电时， 如图8所示，按图8中的a、b、c的顺序，定子1在动子2中的深度越浅，动子在不同位置时的磁场分布，将在定子永磁体8的磁场中产生安培力，当电流恒定时，该出力与位置相关，当位置固定时，该电机出力与电流大小成正比，因此可以通过调节电流的大小实现对工件运动状态的动态调整。Fig. 10 shows the working characteristics of the voice coil motor part of the preferred embodiment. When the coil winding 5 is supplied with appropriate direct current, as shown in Fig. 8, in the order of a, b, and c in Fig. 8, the stator 1 is in motion. The shallower the depth in sub 2 is, the magnetic field distribution of the mover at different positions will generate ampere force in the magnetic field of the stator permanent magnet 8. When the current is constant, the output is related to the position, and when the position is fixed, the motor output It is proportional to the magnitude of the current, so the dynamic adjustment of the movement state of the workpiece can be achieved by adjusting the magnitude of the current.
图9和图10分别表示了将磁性重力补偿和音圈电机两个部分解耦分析的工作特性，将两者结合起来可以实现对负载13工件带重力补偿的运动调整。Figures 9 and 10 respectively show the working characteristics of the decoupling analysis of the magnetic gravity compensation and the voice coil motor. Combining the two can realize the movement adjustment of the load 13 workpiece with gravity compensation.
实施例5Example 5
如图5和图7所示，本音圈电机中，定子磁体组件的数量与动子永磁体6与线圈绕组5的数量之和相等。As shown in Figs. 5 and 7, in the voice coil motor, the number of stator magnet assemblies is equal to the sum of the number of permanent magnets 6 and coil windings 5 of the mover.
实施例6Example 6
本实施例中的音圈电机中，动子永磁体6和/或定子永磁体8的材质为高磁能级的稀土永磁体，具体实施时，高磁能级的稀土永磁体为钕铁硼永磁体、钐钴永磁体、铝镍钴永磁体或铁氧体永磁体；需要解释的是，本技术方案中用“和/或”连接的，表示的情况包括这一连接词中任意一个是这一属性，也包括任意几个是这一属性，还包括所有都是这一属性，以本段中的为例，就包括了仅有动子永磁体6的材质为高磁能级的稀土永磁体，或者仅有定子永磁体8的材质为高磁能级的稀土永磁体，或者动子永磁体6以及定子永磁体8的材质均为高磁能级的稀土永磁体的情形，其他用“和/或”的地方与此相同，不再赘述。In the voice coil motor in this embodiment, the mover permanent magnets 6 and/or the stator permanent magnets 8 are made of rare earth permanent magnets with high magnetic energy levels. In specific implementation, the rare earth permanent magnets with high magnetic energy levels are neodymium iron boron permanent magnets. , Samarium-cobalt permanent magnets, alnico permanent magnets or ferrite permanent magnets; what needs to be explained is that in this technical scheme, the connection with "and/or" means that any one of the connecting words is this The attribute, including any number of which is this attribute, and all of them are this attribute. Taking the example in this paragraph, it includes the rare-earth permanent magnets with high magnetic energy level only for the permanent magnet 6 of the mover. Or only the material of the stator permanent magnet 8 is a rare earth permanent magnet with high magnetic energy level, or the materials of the mover permanent magnet 6 and the stator permanent magnet 8 are both rare earth permanent magnets with high magnetic energy level, and the other uses "and/or" The place is the same as this, so I won’t repeat it here.
此外，定子铁芯7和/或定子导磁块9的材质为高导磁材料。In addition, the material of the stator core 7 and/or the stator magnetic block 9 is a high magnetic permeability material.
此外，动子支架4和/或定子轴10的材质为不导磁的材料，例如可以是高分子材料或者表面绝缘的铝或表面做过绝缘处理的非导磁不锈钢。In addition, the material of the mover bracket 4 and/or the stator shaft 10 is a non-magnetic material, for example, a polymer material or aluminum with an insulating surface or a non-magnetic stainless steel with an insulating surface.
实施例7Example 7
如图11所示，一种磁性重力补偿式圆筒型音圈电机组件，包括底座14、直线导轨11、弹簧12以及上述所有实施例任一项中的音圈电机，其中，定子2与底座14固定连接，动子1通过滑块与直线导轨11连接，弹簧12的一端与动子1固定连接另一端与直线导轨11固定连接；通过直线导轨11保证同心安装，弹簧12用来提供与磁性重力补偿器相反的刚度特性，以获得近似零刚度的重力补偿，共同补偿负载13的重力。在实际应用中，还可以采用多个如图11所示的模块并联使用，同步控制更重的负载13。As shown in Figure 11, a magnetic gravity-compensated cylindrical voice coil motor assembly includes a base 14, a linear guide 11, a spring 12, and the voice coil motor in any one of the above embodiments, wherein the stator 2 and the base 14 Fixed connection, mover 1 is connected to linear guide 11 through a slider, one end of spring 12 is fixedly connected to mover 1 and the other end is fixedly connected to linear guide 11; concentric installation is ensured by linear guide 11, spring 12 is used to provide magnetic The opposite stiffness characteristics of the gravity compensator are used to obtain approximately zero stiffness gravity compensation, and jointly compensate the gravity of the load 13. In practical applications, multiple modules as shown in FIG. 11 can also be used in parallel to control the heavier load 13 synchronously.
以上结合附图对本发明的实施方式作了详细说明，但本发明不限于所描述的实施方式。对于本领域的技术人员而言，在不脱离本发明原理和精神的情况下，在没有做出创造性劳动前提下，对这些实施方式进行多种变化、修改、替换和变型，仍落入本发明的保护范围内。The embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. For those skilled in the art, without departing from the principle and spirit of the present invention, without making any creative work, various changes, modifications, substitutions and modifications to these embodiments will still fall into the present invention. Within the scope of protection.

Claims (10)

  1. 一种圆筒型音圈电机磁性重力补偿器，其特征在于：包括动子和定子；所述动子包括动子支架和动子永磁体，所述动子支架的纵截面为U字形，所述动子永磁体设置于所述U字形的开口处；所述定子包括定子铁芯、定子磁体组件和定子轴；所述定子的纵截面为E字形，所述定子铁芯设置于所述E字形外侧的两条相互平行的边上，所述定子轴设置于所述E字形中心的轴上，所述定子磁体组件包括相互重叠设置的定子永磁体与定子导磁块，所述定子磁体组件套接于所述定子轴的***，所述定子永磁***于所述定子导磁块与所述E字形底部之间；所述U字形的两条平行的边与所述E字形三条平行的边形成的两个间隙相适配。A cylindrical voice coil motor magnetic gravity compensator, which is characterized in that it includes a mover and a stator; the mover includes a mover support and a mover permanent magnet, and the longitudinal section of the mover support is U-shaped, so The mover permanent magnet is arranged at the U-shaped opening; the stator includes a stator iron core, a stator magnet assembly and a stator shaft; the longitudinal section of the stator is E-shaped, and the stator iron core is arranged at the E The stator shaft is arranged on the shaft at the center of the E-shape, and the stator magnet assembly includes stator permanent magnets and stator magnetic blocks that are overlapped with each other. The stator magnet assembly Socketed on the periphery of the stator shaft, the stator permanent magnet is located between the stator flux block and the bottom of the E-shape; two parallel sides of the U-shape and three parallel sides of the E-shape The two gaps formed are matched.
  2. 根据权利要求1所述的圆筒型音圈电机磁性重力补偿器，其特征在于：所述动子永磁体有若干组。The cylindrical voice coil motor magnetic gravity compensator according to claim 1, wherein there are several sets of the permanent magnets of the mover.
  3. 一种音圈电机，其特征在于：包括如权利要求1或2所述的圆筒型音圈电机磁性重力补偿器，所述动子还包括线缆和线圈绕组，所述线圈绕组设置于所述动子永磁体与所述U字形底部之间的外壁上，所述线圈绕组通过所述线缆与外部连接。A voice coil motor, characterized in that it comprises the cylindrical voice coil motor magnetic gravity compensator according to claim 1 or 2, and the mover further comprises a cable and a coil winding, and the coil winding is arranged at the On the outer wall between the permanent magnet of the mover and the U-shaped bottom, the coil winding is connected to the outside through the cable.
  4. 根据权利要求3所述的音圈电机，其特征在于：所述线圈绕组有若干组。The voice coil motor according to claim 3, wherein the coil winding has several groups.
  5. 根据权利要求3或4所述的音圈电机，其特征在于：所述定子磁体组件的数量与所述动子永磁体与所述线圈绕组的数量之和相等。The voice coil motor according to claim 3 or 4, wherein the number of the stator magnet assembly is equal to the sum of the number of the mover permanent magnets and the coil windings.
  6. 根据权利要求5所述的音圈电机，其特征在于：所述动子永磁体和/或所述定子永磁体的材质为高磁能级的稀土永磁体。The voice coil motor according to claim 5, wherein the material of the mover permanent magnet and/or the stator permanent magnet is a rare earth permanent magnet with a high magnetic energy level.
  7. 根据权利要求6所述的音圈电机，其特征在于：所述高磁能级的稀土永磁体为钕铁硼永磁体、钐钴永磁体、铝镍钴永磁体或铁氧体永磁体。The voice coil motor of claim 6, wherein the rare earth permanent magnets with high magnetic energy levels are neodymium iron boron permanent magnets, samarium cobalt permanent magnets, alnico permanent magnets or ferrite permanent magnets.
  8. 根据权利要求5所述的音圈电机，其特征在于：所述定子铁芯和/或所述定子导磁块的材质为高导磁材料。The voice coil motor according to claim 5, wherein the material of the stator core and/or the stator magnetic block is a high magnetic permeability material.
  9. 根据权利要求5所述的音圈电机，其特征在于：所述动子支架和/或所述定子轴的材质为高分子材料或者表面绝缘的铝或非导磁不锈钢。The voice coil motor according to claim 5, wherein the material of the mover support and/or the stator shaft is a polymer material or aluminum or non-magnetic stainless steel with an insulating surface.
  10. 一种磁性重力补偿式圆筒型音圈电机组件，其特征在于：包括底座、直线导轨、弹簧以及如权利要求3～9任一项所述的音圈电机，所述定子与所述底座固定连接，所述动子通过滑块与所述直线导轨连接，所述弹簧的一端与所述动子固定连接另一端与所述直线导轨固定连接。A magnetic gravity-compensated cylindrical voice coil motor assembly, characterized in that it comprises a base, a linear guide, a spring, and the voice coil motor according to any one of claims 3-9, and the stator is fixed to the base In connection, the mover is connected to the linear guide rail through a sliding block, and one end of the spring is fixedly connected to the mover and the other end is fixedly connected to the linear guide rail.
PCT/CN2019/115713 2019-11-05 2019-11-05 Magnetic gravity compensator for cylindrical voice coil actuator, voice coil actuator, and voice coil actuator assembly WO2021087743A1 (en)

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SG11202102311YA SG11202102311YA (en) 2019-11-05 2019-11-05 Cylindrical VCM Magnetic Gravity Compensator, VCM and Assembly Thereof
PCT/CN2019/115713 WO2021087743A1 (en) 2019-11-05 2019-11-05 Magnetic gravity compensator for cylindrical voice coil actuator, voice coil actuator, and voice coil actuator assembly

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CN114413134B (en) * 2022-02-23 2022-07-08 上海隐冠半导体技术有限公司 Gravity compensation device and motion platform

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