WO2021056697A1 - Multi-reflector laser dynamic focusing system based on variable optical path - Google Patents

Multi-reflector laser dynamic focusing system based on variable optical path Download PDF

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Publication number
WO2021056697A1
WO2021056697A1 PCT/CN2019/115890 CN2019115890W WO2021056697A1 WO 2021056697 A1 WO2021056697 A1 WO 2021056697A1 CN 2019115890 W CN2019115890 W CN 2019115890W WO 2021056697 A1 WO2021056697 A1 WO 2021056697A1
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mirror
laser
reflector
lens
focusing system
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PCT/CN2019/115890
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French (fr)
Chinese (zh)
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张震
余良
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清华大学
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment

Definitions

  • This application relates to a novel laser dynamic focusing principle and system, which changes the optical path structure through multi-mirror deflection to achieve dynamic focusing, and belongs to the field of opto-mechanical and electrical integration and laser processing.
  • Laser scanning technology is widely used in various fields such as material surface processing, rapid prototyping, medical imaging, welding and so on.
  • Traditional laser scanning technology mainly combines galvanometer scanning and field lens to achieve planar scanning in a certain area. This technology is limited by the size, cost and principle of field lens, and it is difficult to apply to large area processing and three-dimensional area processing.
  • the three-axis galvanometer scanning system using dynamic focus technology can realize large-format laser processing with uniform spot, and can realize three-dimensional area processing.
  • patent CN208391288U discloses a large-scale complex curved surface dynamic focusing laser processing system. Its dynamic focusing module consists of a dynamic focusing lens, a first focusing lens and a second focusing lens. The dynamic focusing lens is driven by a voice coil motor or piezoelectric ceramics. Realize its linear reciprocating motion.
  • Patent CN205899130U discloses a high-speed dynamic focusing laser galvanometer module. The dynamic focusing module is composed of a zoom lens and a focusing lens group.
  • the zoom lens is driven by a rotating motor.
  • the drive is transmitted to a zoom through a transmission mechanism composed of a hinge rod, a slider and a guide rail.
  • Linear movement of the lens Patent CN201783759U discloses a fiber laser or disc laser dynamic focus scanning point trajectory processing system. Its dynamic focus module is composed of a hollow shaft servo linear motor, a concave lens and a convex lens group. The concave lens is driven by a servo linear motor to move linearly to achieve dynamic zoom.
  • the existing dynamic focus technology mostly uses the movement of the lens to achieve dynamic zoom, but this will change the structure of the laser focusing optical system, resulting in changes in the size of the focus spot, thereby affecting the consistency of laser processing quality.
  • the focusing optical path used in the existing dynamic focusing technology often incorporates an optical lever, that is, a smaller lens displacement is used to produce a larger focus position change, which will further enlarge the error of the lens movement.
  • this application provides a new type of multi-mirror laser dynamic focusing system based on variable optical length, which has good spot size consistency, high precision and adjustable processing range.
  • a multi-mirror laser dynamic focusing system based on a variable optical path includes an adjustable laser focusing system (10), a multi-mirror dynamic focusing system (20) and a mounting base (30).
  • the mounting base (30) has features such as a multi-mirror dynamic focusing system mounting hole (301), a laser divergent lens moving device mounting hole (302) along the optical axis, and a focusing lens group long mounting hole (303).
  • the adjustable laser focusing system includes a laser divergent lens and its moving device (101) along the optical axis and a focusing lens group (102); wherein, the focusing lens group (102) consists of one or more convex lenses or flat lenses. Convex lens composition; the laser divergent lens and its moving device along the optical axis (101) coincide with the lens optical axis of the focusing lens group (102), and the laser divergent lens (101C) moves along its optical axis in the process , Always keep coincident with the optical axis of the lens in the focusing lens group (102).
  • the laser divergent lens and its moving device (101) along the optical axis include a rotating motor (101A), a lead screw (101B) and a divergent lens (101C); the rotating motor (101A) and the lead screw (101C) 101B) are connected, and the rotation motion of the divergent lens (101C) mounted on the screw nut is converted into linear motion along the optical axis through the screw (101B); the divergent lens (101C) can be a concave lens Or convex lens.
  • the focusing lens assembly (102) is composed of two plano-convex lenses with overlapping optical axes, and the two plano-convex lenses are arranged according to the feature of convex surfaces facing each other.
  • the divergent lens (101C) is a plano-convex lens.
  • the screw (101B) is a ball screw.
  • the multi-mirror-based dynamic focusing system (20) includes a plane mirror group (201), a rotating motor (202) and a transmission mechanism (203).
  • the reflecting mirror group (201) includes a first reflecting mirror (201A), a second reflecting mirror (201B), a third reflecting mirror (201C), and a fourth reflecting mirror (201D); wherein, the first reflecting mirror (201A) and the second reflector (201B), and the third reflector (201C) and the fourth reflector (201D) are always kept parallel; the laser passes through the adjustable laser focusing system (10), and then enters the first The center of a mirror (201A) is reflected by the second mirror (201B), the third mirror (201C), and the fourth mirror (201D) and then emitted along the initial optical axis; the first reflection The rotating shafts of the mirror (201A), the second mirror (201B), the third mirror (201C) and the fourth mirror (201D) are parallel to each other in an inverted isosceles trapezoid distribution; the first mirror (201A) and The second mirror (201B) is mirror-symmetrically distributed with the third mirror (201C) and the fourth mirror (201D). The mirror relationship is maintained when
  • the transmission structure (203) includes a centrally symmetric flexible torsion spring (203A) and a crank (203B); the flexible torsion spring (203A) is installed on the shaft of the rotating motor (202) and rotates with the rotating motor (202) The flexible torsion spring deforms and cooperates with the crank (203B) to convert the rotation of the rotating motor into the rotation of the regular reflector (201A, 201C) and the polarizer (201B, 201D), and they remain parallel.
  • the flexible torsion spring (203A) is installed on the shaft of the rotating motor (202) and rotates with the rotating motor (202)
  • the flexible torsion spring deforms and cooperates with the crank (203B) to convert the rotation of the rotating motor into the rotation of the regular reflector (201A, 201C) and the polarizer (201B, 201D), and they remain parallel.
  • the dynamic focusing system of the present application can realize that the spot diameter obtained by focusing the laser beam is basically the same during the dynamic zooming process of the system, and therefore can effectively keep the spot size stable during the processing to obtain consistent and stable processing quality.
  • the accuracy of the rotating motor that drives the mirror to rotate in the dynamic focus system of the present application directly determines the accuracy of the zoom range, and there is no problem of error amplification, so higher positioning accuracy can be achieved within the zoom range.
  • the adjustable laser focus system can change the focusing characteristics of the overall system by changing the relative position between the lenses, and can adjust the performance of the system from multiple aspects such as working focal length, spot size, and coordinated zooming. Therefore, the zoom system It has the characteristics of adjustable processing range.
  • Figure 1 is a schematic diagram of the overall structure of an example of the application.
  • Figure 2 is a schematic diagram of the optical path of the zoom principle of the application.
  • FIG. 3 is a schematic diagram of the installation base structure in this application.
  • FIG. 4 is a schematic diagram of the structure of the adjustable laser focusing system installed on the base in this application.
  • FIG. 5 is a schematic diagram of the structure of the multi-mirror dynamic focusing system in this application.
  • the described multi-mirror laser dynamic focusing system based on variable optical path includes an adjustable laser focusing system (10), a multi-mirror dynamic focusing system (20) and a mounting base (30). );
  • the adjustable laser focusing system (10) and the multi-mirror dynamic focusing system (20) are all installed on the mounting base (30);
  • the mounting base (30) is designed according to The principle size is to process the mounting holes to ensure that the relative positions of the optical elements meet the requirements of zooming.
  • the mounting base (30) has a multi-mirror dynamic focusing system mounting hole (301), a laser divergent lens moving device mounting hole (302) along the optical axis, and a focusing lens group long mounting hole (303). ) And other features; the focusing lens assembly long mounting hole (303) cooperates with the pre-processed mounting position calibration feature on the mounting base (30) to adjust the focusing lens mounting position to achieve different focusing effects.
  • the adjustable laser focusing system includes a laser divergent lens and its moving device along the optical axis (101) and a focusing lens group (102); wherein, the focusing lens group (102) consists of a Or a plurality of convex lenses or plano-convex lenses; the laser divergent lens and its moving device along the optical axis (101) coincide with the lens optical axis of the focusing lens group (102), and the laser divergence lens (101C) During the movement of the optical axis, it always keeps coincident with the optical axis of the lens in the focusing lens group (102).
  • the laser diverging lens and its moving device (101) along the optical axis include a rotating motor (101A), a lead screw (101B) and a diverging lens (101C); the rotating motor (101A) and The screw (101B) is connected, and the rotation motion of the screw (101B) is converted into the linear movement of the divergent lens (101C) mounted on the screw nut along the optical axis direction; the divergent lens (101C) is a concave lens or a convex lens.
  • the focusing lens assembly (102) is composed of two plano-convex lenses with overlapping optical axes, and the two plano-convex lenses are arranged according to the feature of opposite convex surfaces, as shown in FIG. 1.
  • the divergent lens (101C) is a plano-convex lens arranged as shown in FIG. 1.
  • the screw (101B) is a ball screw.
  • the multi-mirror-based dynamic focusing system (20) includes a plane mirror group (201), a rotating motor (202) and a transmission mechanism (203).
  • the reflector group (201) includes a first reflector (201A), a second reflector (201B), a third reflector (201C), and a fourth reflector (201D);
  • the first reflector (201A) and the second reflector (201B), the third reflector (201C) and the fourth reflector (201D) are always kept parallel; after the laser passes through the adjustable laser focusing system, it is incident on the The center of the first reflector (201A) is reflected by the second reflector (201B), the third reflector (201C), and the fourth reflector (201D) and then exits along the initial optical axis; as shown in Figure 2
  • the rotation axes of the first reflector (201A), second reflector (201B), third reflector (201C), and fourth reflector (201D) are parallel to each other in an inverted isosceles trapezoid distribution, and the second The rotation axis of the mirror (201B) is at the upper left position of the front regular reflector (201A), and the
  • the transmission structure (203) includes a centrally symmetric flexible torsion spring (203A) and a crank (203B); the flexible torsion spring (203A) is installed on the shaft of the rotating motor (202), with The rotating motor (202) rotates the flexible torsion spring to deform, and cooperates with the crank (203B) to convert the rotation of the rotating motor into the rotation of the regular reflector (201A, 201C) and the polarizer (201B, 201D), and they are kept parallel.
  • the working principle of the multi-mirror laser dynamic focusing system based on variable optical path is: the adjustable laser focusing system (10) expands and focuses the incident laser beam; multi-mirror The dynamic focus system (20) reflects the focused laser beam within the focal length through a four-sided mirror arranged in parallel mirror images, and causes the laser beam to exit along the incident optical axis; change the multi-mirror dynamic focus system (20) mirror
  • the deflection angle can change the total optical path length of the laser beam in the multi-mirror dynamic focusing system (20), thereby changing the focus position of the outgoing laser beam.
  • three different mirror deflection angles can correspond to Obtain different focus positions.
  • the dynamic focus system does not involve changing the parameters of the focusing optical system, the spot diameter obtained after the laser beam is focused remains basically the same during the dynamic zooming process of the system, and the shape of the spot does not change with the focus position. It can ensure the consistency and stability of processing quality.
  • the accuracy of the rotating motor that drives the mirror to rotate in the dynamic focus system directly determines the accuracy of the zoom range.
  • the adjustable laser focus system in this dynamic focus system can change the focus characteristics of the overall system by changing the relative position between the lenses, and can adjust the performance of the system from multiple aspects such as working focal length, spot size, and coordinated zoom. Therefore, the overall zoom system has Functional diversity.
  • first and second are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined as “first” and “second” may explicitly or implicitly include at least one of the features. In the description of the present application, "a plurality of" means at least two, such as two, three, etc., unless specifically defined otherwise.
  • the terms “installed”, “connected”, “connected”, “fixed” and other terms should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , Or integrated; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, it can be the internal connection of two components or the interaction relationship between two components, unless otherwise specified The limit.
  • installed can be a fixed connection or a detachable connection , Or integrated; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, it can be the internal connection of two components or the interaction relationship between two components, unless otherwise specified The limit.
  • the first feature “on” or “under” the second feature may be in direct contact with the first and second features, or the first and second features may be indirectly through an intermediary. contact.
  • the "above”, “above” and “above” of the first feature on the second feature may mean that the first feature is directly above or diagonally above the second feature, or it simply means that the level of the first feature is higher than the second feature.
  • the “below”, “below” and “below” of the second feature of the first feature may be that the first feature is directly below or obliquely below the second feature, or it simply means that the level of the first feature is smaller than the second feature.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
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Abstract

Disclosed is a multi-reflector laser dynamic focusing system based on a variable optical path, the system being composed of an adjustable laser focusing system (10), a multi-reflector dynamic focusing system (20), and a mounting base (30). The multi-reflector dynamic focusing system (20) uses a variable optical path system formed of a planar reflector set (201) comprising four reflectors (201A-201D), such that the function of zooming the light spot position of a light beam emitted from the multi-reflector dynamic focusing system (20) is realized, and the consistency of a light spot size is maintained in the process of dynamic zooming. The adjustable laser focusing system (10) comprises a laser diverging lens and a moving device (101) in an optical axis thereof, and a focusing lens set (102), the functions of expanding and focusing incident laser beams are achieved, and the relative positions of the lenses are adjustable, such that the performance of the system can be adjusted in terms of working focal length, spot size, collaborative zooming, etc.

Description

一种基于光程可变的多反射镜激光动态聚焦***A multi-mirror laser dynamic focusing system based on variable optical path 技术领域Technical field
本申请涉及一种新型激光动态聚焦原理及***，通过多反射镜偏转改变光路结构以实现动态聚焦，属于光机电一体化、激光加工领域。This application relates to a novel laser dynamic focusing principle and system, which changes the optical path structure through multi-mirror deflection to achieve dynamic focusing, and belongs to the field of opto-mechanical and electrical integration and laser processing.
背景技术Background technique
激光扫描技术广泛应用于材料表面加工、快速成形、医疗成像、焊接等各种领域。传统的激光扫描技术主要结合振镜扫描和场镜，可以实现一定区域内的平面扫描，这种技术受到场镜尺寸、成本以及原理的限制，很难应用于大面积区域加工以及三维区域加工。随着技术发展，采用动态聚焦技术的三轴振镜扫描***可以实现大幅面均匀光斑激光加工，并可以实现三维区域加工。Laser scanning technology is widely used in various fields such as material surface processing, rapid prototyping, medical imaging, welding and so on. Traditional laser scanning technology mainly combines galvanometer scanning and field lens to achieve planar scanning in a certain area. This technology is limited by the size, cost and principle of field lens, and it is difficult to apply to large area processing and three-dimensional area processing. With the development of technology, the three-axis galvanometer scanning system using dynamic focus technology can realize large-format laser processing with uniform spot, and can realize three-dimensional area processing.
现有动态聚焦技术的核心原理在于，激光聚焦光学***中的透镜元件间的距离可以动态改变，进而动态改变激光聚焦位置，其不同之处多在于所选的驱动方式与传动方式。例如，专利CN208391288U公开的一种大型复杂曲面动态聚焦激光加工***，其动态聚焦模块由动态聚焦镜、第一聚焦透镜和第二聚焦透镜组成，动态聚焦镜由音圈电机或压电陶瓷驱动以实现其进行直线往返运动。专利CN205899130U公开的高速动态聚焦激光振镜模组，其动态聚焦模块由变焦透镜、聚焦透镜组组成，变焦透镜由旋转电机驱动，通过由铰接杆、滑块以及导轨组成传动机构将驱动传递为变焦透镜的直线运动。专利CN201783759U公开的光纤激光或碟片激光动态聚焦扫描点轨迹加 工***，其动态聚焦模块由轴空心伺服直线电机、凹透镜和凸透镜组组成，通过伺服直线电机驱动凹透镜直线移动实现动态变焦。The core principle of the existing dynamic focusing technology is that the distance between the lens elements in the laser focusing optical system can be dynamically changed, and then the laser focusing position can be dynamically changed. The difference lies in the selected driving mode and transmission mode. For example, patent CN208391288U discloses a large-scale complex curved surface dynamic focusing laser processing system. Its dynamic focusing module consists of a dynamic focusing lens, a first focusing lens and a second focusing lens. The dynamic focusing lens is driven by a voice coil motor or piezoelectric ceramics. Realize its linear reciprocating motion. Patent CN205899130U discloses a high-speed dynamic focusing laser galvanometer module. The dynamic focusing module is composed of a zoom lens and a focusing lens group. The zoom lens is driven by a rotating motor. The drive is transmitted to a zoom through a transmission mechanism composed of a hinge rod, a slider and a guide rail. Linear movement of the lens. Patent CN201783759U discloses a fiber laser or disc laser dynamic focus scanning point trajectory processing system. Its dynamic focus module is composed of a hollow shaft servo linear motor, a concave lens and a convex lens group. The concave lens is driven by a servo linear motor to move linearly to achieve dynamic zoom.
综上所述，现有的动态聚焦技术多采用透镜的移动以实现动态变焦，但这将改变激光聚焦光学***的结构，造成聚焦光斑尺寸的变化，进而影响激光加工质量的一致性。此外，现有动态聚焦技术所采用的聚焦光路多会加入光学杠杆，即用较小的透镜位移产生较大的聚焦位置变化，这将使透镜移动的误差进一步扩大。To sum up, the existing dynamic focus technology mostly uses the movement of the lens to achieve dynamic zoom, but this will change the structure of the laser focusing optical system, resulting in changes in the size of the focus spot, thereby affecting the consistency of laser processing quality. In addition, the focusing optical path used in the existing dynamic focusing technology often incorporates an optical lever, that is, a smaller lens displacement is used to produce a larger focus position change, which will further enlarge the error of the lens movement.
发明内容Summary of the invention
为解决已有技术的不足，本申请提供一种新型的基于光程可变的多反射镜激光动态聚焦***，该动态变焦***光斑尺寸一致性好、精度高且加工范围可调。In order to solve the shortcomings of the existing technology, this application provides a new type of multi-mirror laser dynamic focusing system based on variable optical length, which has good spot size consistency, high precision and adjustable processing range.
本申请的技术方案是：The technical solution of this application is:
一种基于光程可变的多反射镜激光动态聚焦***，包括可调激光聚焦***(10)、多反射镜动态聚焦***(20)以及安装基座(30)。A multi-mirror laser dynamic focusing system based on a variable optical path includes an adjustable laser focusing system (10), a multi-mirror dynamic focusing system (20) and a mounting base (30).
所述的安装基座(30)具有多反射镜动态聚焦***安装孔(301)，激光发散透镜沿光轴移动装置安装孔(302)以及聚焦透镜组长安装孔(303)等特征。The mounting base (30) has features such as a multi-mirror dynamic focusing system mounting hole (301), a laser divergent lens moving device mounting hole (302) along the optical axis, and a focusing lens group long mounting hole (303).
所述的可调节激光聚焦***，包括激光发散透镜及其沿光轴移动装置(101)和聚焦透镜组(102)；其中，所述的聚焦透镜组(102)由一或多个凸透镜或平凸透镜构成；所述的激光发散透镜及其沿光轴移动装置(101)与聚焦透镜组(102)中透镜光轴重合，且在所述的 激光发散透镜(101C)沿其光轴移动的过程中，始终保持与所述的聚焦透镜组(102)中透镜的光轴重合。The adjustable laser focusing system includes a laser divergent lens and its moving device (101) along the optical axis and a focusing lens group (102); wherein, the focusing lens group (102) consists of one or more convex lenses or flat lenses. Convex lens composition; the laser divergent lens and its moving device along the optical axis (101) coincide with the lens optical axis of the focusing lens group (102), and the laser divergent lens (101C) moves along its optical axis in the process , Always keep coincident with the optical axis of the lens in the focusing lens group (102).
所述激光发散透镜及其沿光轴移动装置(101)，包括旋转电机(101A)、丝杠(101B)和发散透镜(101C)；所述的旋转电机(101A)与所述的丝杠(101B)相连接，通过丝杠(101B)将其旋转运动转换为安装在丝杠螺母上的所述发散透镜(101C)沿光轴方向的直线运动；所述的发散透镜(101C)可为凹透镜或凸透镜。The laser divergent lens and its moving device (101) along the optical axis include a rotating motor (101A), a lead screw (101B) and a divergent lens (101C); the rotating motor (101A) and the lead screw (101C) 101B) are connected, and the rotation motion of the divergent lens (101C) mounted on the screw nut is converted into linear motion along the optical axis through the screw (101B); the divergent lens (101C) can be a concave lens Or convex lens.
根据本申请的一个实施例，所述聚焦透镜组位(102)由光轴重合的两个平凸透镜组成，两平凸透镜按照凸面相对的特征布置。According to an embodiment of the present application, the focusing lens assembly (102) is composed of two plano-convex lenses with overlapping optical axes, and the two plano-convex lenses are arranged according to the feature of convex surfaces facing each other.
根据本申请的一个实施例，所述发散透镜(101C)是一个平凸透镜。According to an embodiment of the present application, the divergent lens (101C) is a plano-convex lens.
根据本申请的一个实施例，所述丝杠(101B)是滚珠丝杠。According to an embodiment of the present application, the screw (101B) is a ball screw.
所述基于多反射镜动态聚焦***(20)包括平面反射镜组(201)、旋转电机(202)以及传动机构(203)。The multi-mirror-based dynamic focusing system (20) includes a plane mirror group (201), a rotating motor (202) and a transmission mechanism (203).
所述反射镜组(201)包括第一反射镜(201A)、第二反射镜(201B)、第三反射镜(201C)以及第四反射镜(201D)；其中，所述的第一反射镜(201A)和第二反射镜(201B)以及第三反射镜(201C)和第四反射镜(201D)分别始终保持平行；激光通过可调激光聚焦***(10)后，入射到所述的第一反射镜(201A)中心，后经所述的第二反射镜(201B)、第三反射镜(201C)以及第四反射镜(201D)反射后沿初始光轴射出；所述的第一反射镜(201A)、第二反射镜(201B)、第三反射镜(201C)以及第四反射镜(201D)转轴相互 平行呈倒等腰梯形的分布；所述的第一反射镜(201A)和第二反射镜(201B)与第三反射镜(201C)和第四反射镜(201D)呈镜像对称分布，在***工作时保持所述的镜像关系，并同时偏转一定角度后实现聚焦位置的动态变化。The reflecting mirror group (201) includes a first reflecting mirror (201A), a second reflecting mirror (201B), a third reflecting mirror (201C), and a fourth reflecting mirror (201D); wherein, the first reflecting mirror (201A) and the second reflector (201B), and the third reflector (201C) and the fourth reflector (201D) are always kept parallel; the laser passes through the adjustable laser focusing system (10), and then enters the first The center of a mirror (201A) is reflected by the second mirror (201B), the third mirror (201C), and the fourth mirror (201D) and then emitted along the initial optical axis; the first reflection The rotating shafts of the mirror (201A), the second mirror (201B), the third mirror (201C) and the fourth mirror (201D) are parallel to each other in an inverted isosceles trapezoid distribution; the first mirror (201A) and The second mirror (201B) is mirror-symmetrically distributed with the third mirror (201C) and the fourth mirror (201D). The mirror relationship is maintained when the system is working, and the dynamic focus position is achieved after deflection at a certain angle at the same time Variety.
所述传动结构(203)包括中心对称的柔性扭簧(203A)和曲柄(203B)；所述的柔性扭簧(203A)安装在旋转电机(202)转轴上，随着旋转电机(202)转动柔性扭簧变形，配合曲柄(203B)将旋转电机的转动转换为正反射镜(201A、201C)和偏反射镜(201B、201D)的转动，且保持平行。The transmission structure (203) includes a centrally symmetric flexible torsion spring (203A) and a crank (203B); the flexible torsion spring (203A) is installed on the shaft of the rotating motor (202) and rotates with the rotating motor (202) The flexible torsion spring deforms and cooperates with the crank (203B) to convert the rotation of the rotating motor into the rotation of the regular reflector (201A, 201C) and the polarizer (201B, 201D), and they remain parallel.
本申请的有益效果：The beneficial effects of this application:
本申请的动态聚焦***可以实现激光光束经聚焦后得到的光斑直径在整过***动态变焦的过程中基本上保持一致，因此可以有效保持加工过程光斑尺寸稳定以获得一致稳定的加工质量。The dynamic focusing system of the present application can realize that the spot diameter obtained by focusing the laser beam is basically the same during the dynamic zooming process of the system, and therefore can effectively keep the spot size stable during the processing to obtain consistent and stable processing quality.
本申请的动态聚焦***中驱动反射镜转动的旋转电机的精度直接决定变焦范围的精度，不存在误差放大的问题，因此在变焦范围内可以实现较高的定位精度。The accuracy of the rotating motor that drives the mirror to rotate in the dynamic focus system of the present application directly determines the accuracy of the zoom range, and there is no problem of error amplification, so higher positioning accuracy can be achieved within the zoom range.
本申请的动态聚焦***中可调激光聚焦***可以通过改变透镜间相对位置来改变整体***的聚焦特性，可以从工作焦距、光斑尺寸、协同变焦等多个方面对***进行性能调节，因此变焦***具有加工范围可调的特性。In the dynamic focus system of the present application, the adjustable laser focus system can change the focusing characteristics of the overall system by changing the relative position between the lenses, and can adjust the performance of the system from multiple aspects such as working focal length, spot size, and coordinated zooming. Therefore, the zoom system It has the characteristics of adjustable processing range.
附图说明Description of the drawings
图1为本申请实例整体结构示意图。Figure 1 is a schematic diagram of the overall structure of an example of the application.
图2为本申请变焦原理光路示意图。Figure 2 is a schematic diagram of the optical path of the zoom principle of the application.
图3为本申请中安装基座结构示意图。Figure 3 is a schematic diagram of the installation base structure in this application.
图4为本申请中安装在基座上的可调激光聚焦***结构示意图。FIG. 4 is a schematic diagram of the structure of the adjustable laser focusing system installed on the base in this application.
图5为本申请中多反射镜动态聚焦***结构示意图。FIG. 5 is a schematic diagram of the structure of the multi-mirror dynamic focusing system in this application.
具体实施方式detailed description
下面结合附图对本申请进一步详细介绍具体结构实例、工作原理的内容：In the following, specific structural examples and working principles of the application will be further introduced in detail with reference to the accompanying drawings:
如图1所示，所述的一种基于光程可变的多反射镜激光动态聚焦***，包括可调激光聚焦***(10)、多反射镜动态聚焦***(20)以及安装基座(30)；所述的可调激光聚焦***(10)、多反射镜动态聚焦***(20)均安装在所述的安装基座(30)上；所述的安装基座(30)按照所设计的原理尺寸加工安装孔，以保证各光学元件相对位置符合变焦需求。As shown in Figure 1, the described multi-mirror laser dynamic focusing system based on variable optical path includes an adjustable laser focusing system (10), a multi-mirror dynamic focusing system (20) and a mounting base (30). ); The adjustable laser focusing system (10) and the multi-mirror dynamic focusing system (20) are all installed on the mounting base (30); the mounting base (30) is designed according to The principle size is to process the mounting holes to ensure that the relative positions of the optical elements meet the requirements of zooming.
如图3所示，所述的安装基座(30)具有多反射镜动态聚焦***安装孔(301)，激光发散透镜沿光轴移动装置安装孔(302)以及聚焦透镜组长安装孔(303)等特征；所述的聚焦透镜组长安装孔(303)配合安装基座(30)上预先加工安装位置标定特征可以调节聚焦透镜安装位置以实现不同的聚焦效果。As shown in Figure 3, the mounting base (30) has a multi-mirror dynamic focusing system mounting hole (301), a laser divergent lens moving device mounting hole (302) along the optical axis, and a focusing lens group long mounting hole (303). ) And other features; the focusing lens assembly long mounting hole (303) cooperates with the pre-processed mounting position calibration feature on the mounting base (30) to adjust the focusing lens mounting position to achieve different focusing effects.
如图4所示，所述的可调节激光聚焦***，包括激光发散透镜及 其沿光轴移动装置(101)和聚焦透镜组(102)；其中，所述的聚焦透镜组(102)由一或多个凸透镜或平凸透镜构成；所述的激光发散透镜及其沿光轴移动装置(101)与聚焦透镜组(102)中透镜光轴重合，且在所述的激光发散透镜(101C)沿其光轴移动的过程中，始终保持与所述的聚焦透镜组(102)中透镜的光轴重合。As shown in Figure 4, the adjustable laser focusing system includes a laser divergent lens and its moving device along the optical axis (101) and a focusing lens group (102); wherein, the focusing lens group (102) consists of a Or a plurality of convex lenses or plano-convex lenses; the laser divergent lens and its moving device along the optical axis (101) coincide with the lens optical axis of the focusing lens group (102), and the laser divergence lens (101C) During the movement of the optical axis, it always keeps coincident with the optical axis of the lens in the focusing lens group (102).
如图4所示，所述激光发散透镜及其沿光轴移动装置(101)，包括旋转电机(101A)、丝杠(101B)和发散透镜(101C)；所述的旋转电机(101A)与所述的丝杠(101B)相连接，通过丝杠(101B)将其旋转运动转换为安装在丝杠螺母上的所述发散透镜(101C)沿光轴方向的直线运动；所述的发散透镜(101C)是凹透镜或者凸透镜。As shown in Figure 4, the laser diverging lens and its moving device (101) along the optical axis include a rotating motor (101A), a lead screw (101B) and a diverging lens (101C); the rotating motor (101A) and The screw (101B) is connected, and the rotation motion of the screw (101B) is converted into the linear movement of the divergent lens (101C) mounted on the screw nut along the optical axis direction; the divergent lens (101C) is a concave lens or a convex lens.
根据本申请的一个实施例，所述聚焦透镜组位(102)由光轴重合的两个平凸透镜组成，两平凸透镜按照凸面相对的特征布置，如图1所示布置。According to an embodiment of the present application, the focusing lens assembly (102) is composed of two plano-convex lenses with overlapping optical axes, and the two plano-convex lenses are arranged according to the feature of opposite convex surfaces, as shown in FIG. 1.
根据本申请的一个实施例，所述发散透镜(101C)是一个平凸透镜，如图1所示布置。According to an embodiment of the present application, the divergent lens (101C) is a plano-convex lens arranged as shown in FIG. 1.
根据本申请的一个实施例，所述丝杠(101B)是滚珠丝杠。According to an embodiment of the present application, the screw (101B) is a ball screw.
如图5所示，所述基于多反射镜动态聚焦***(20)包括平面反射镜组(201)、旋转电机(202)以及传动机构(203)。As shown in Fig. 5, the multi-mirror-based dynamic focusing system (20) includes a plane mirror group (201), a rotating motor (202) and a transmission mechanism (203).
如图5所示，所述反射镜组(201)包括第一反射镜(201A)、第二反射镜(201B)、第三反射镜(201C)以及第四反射镜(201D)；其中，所述的第一反射镜(201A)和第二反射镜(201B)以及第三 反射镜(201C)和第四反射镜(201D)分别始终保持平行；激光通过可调激光聚焦***后，入射到所述的第一反射镜(201A)中心，后经所述的第二反射镜(201B)、第三反射镜(201C)以及第四反射镜(201D)反射后沿初始光轴射出；如图2所示，所述的第一反射镜(201A)、第二反射镜(201B)、第三反射镜(201C)以及第四反射镜(201D)转轴相互平行呈倒等腰梯形的分布，第二反射镜(201B)转轴在前正反射镜(201A)左上位置，第四反射镜(201D)转轴在第三反射镜(201C)右上位置；所设计得到的各反射镜的镜面尺寸以及安装的相对位置等特征实现***在有效调焦范围内稳定工作；如图2所示，所述的第一反射镜(201A)和第二反射镜(201B)与第三反射镜(201C)和第四反射镜(201D)呈镜像对称分布，在***工作时保持所述的镜像关系，并同时偏转一定角度后实现聚焦位置的动态变化。As shown in Figure 5, the reflector group (201) includes a first reflector (201A), a second reflector (201B), a third reflector (201C), and a fourth reflector (201D); The first reflector (201A) and the second reflector (201B), the third reflector (201C) and the fourth reflector (201D) are always kept parallel; after the laser passes through the adjustable laser focusing system, it is incident on the The center of the first reflector (201A) is reflected by the second reflector (201B), the third reflector (201C), and the fourth reflector (201D) and then exits along the initial optical axis; as shown in Figure 2 As shown, the rotation axes of the first reflector (201A), second reflector (201B), third reflector (201C), and fourth reflector (201D) are parallel to each other in an inverted isosceles trapezoid distribution, and the second The rotation axis of the mirror (201B) is at the upper left position of the front regular reflector (201A), and the rotation axis of the fourth mirror (201D) is at the upper right position of the third mirror (201C); the mirror size of each mirror designed and the relative installation Features such as position enable the system to work stably within the effective focusing range; as shown in Figure 2, the first reflector (201A) and the second reflector (201B), the third reflector (201C) and the fourth reflector The mirrors (201D) are distributed in mirror symmetry, maintain the mirror relationship when the system is working, and realize dynamic changes of the focus position after deflection at a certain angle at the same time.
如图5所示，所述传动结构(203)包括中心对称的柔性扭簧(203A)和曲柄(203B)；所述的柔性扭簧(203A)安装在旋转电机(202)转轴上，随着旋转电机(202)转动柔性扭簧变形，配合曲柄(203B)将旋转电机的转动转换为正反射镜(201A、201C)和偏反射镜(201B、201D)的转动，且保持平行。As shown in Figure 5, the transmission structure (203) includes a centrally symmetric flexible torsion spring (203A) and a crank (203B); the flexible torsion spring (203A) is installed on the shaft of the rotating motor (202), with The rotating motor (202) rotates the flexible torsion spring to deform, and cooperates with the crank (203B) to convert the rotation of the rotating motor into the rotation of the regular reflector (201A, 201C) and the polarizer (201B, 201D), and they are kept parallel.
如图2所示，所述的一种基于光程可变的多反射镜激光动态聚焦***的工作原理在于：可调激光聚焦***(10)对入射激光束进行扩束与聚焦；多反射镜动态聚焦***(20)通过平行镜像布置的四面反射镜在焦距内对聚焦后的激光束进行反射，并使激光束沿入射光轴方 向出射；改变多反射镜动态聚焦***(20)反射镜的偏角，可以改变激光束在多反射镜动态聚焦***(20)中的总光程长度，进而改变出射激光束的聚焦位置，如图2中所示，三种不同的反射镜偏角可以对应获得不同聚焦焦点位置。As shown in Figure 2, the working principle of the multi-mirror laser dynamic focusing system based on variable optical path is: the adjustable laser focusing system (10) expands and focuses the incident laser beam; multi-mirror The dynamic focus system (20) reflects the focused laser beam within the focal length through a four-sided mirror arranged in parallel mirror images, and causes the laser beam to exit along the incident optical axis; change the multi-mirror dynamic focus system (20) mirror The deflection angle can change the total optical path length of the laser beam in the multi-mirror dynamic focusing system (20), thereby changing the focus position of the outgoing laser beam. As shown in Figure 2, three different mirror deflection angles can correspond to Obtain different focus positions.
本动态聚焦***由于不涉及改变聚焦光学***部分的参数，因此，激光光束经聚焦后得到的光斑直径在整过***动态变焦的过程中基本上保持一致，光斑的形貌不会随着聚焦位置的变化而变化，可以保证加工质量的一致稳定。此外，由于没有采用透镜构成的动态变焦***，不存在光学杠杆作用放大误差的现象，本动态聚焦***中驱动反射镜转动的旋转电机的精度直接决定变焦范围的精度。本动态聚焦***中可调激光聚焦***可以通过改变透镜间相对位置来改变整体***的聚焦特性，可以从工作焦距、光斑尺寸、协同变焦等多个方面对***进行性能调节，因此整体变焦***具有功能多样性。Since the dynamic focus system does not involve changing the parameters of the focusing optical system, the spot diameter obtained after the laser beam is focused remains basically the same during the dynamic zooming process of the system, and the shape of the spot does not change with the focus position. It can ensure the consistency and stability of processing quality. In addition, since there is no dynamic zoom system composed of lenses, there is no phenomenon of optical leverage magnification errors. The accuracy of the rotating motor that drives the mirror to rotate in the dynamic focus system directly determines the accuracy of the zoom range. The adjustable laser focus system in this dynamic focus system can change the focus characteristics of the overall system by changing the relative position between the lenses, and can adjust the performance of the system from multiple aspects such as working focal length, spot size, and coordinated zoom. Therefore, the overall zoom system has Functional diversity.
在本申请的描述中，需要理解的是，术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。In the description of this application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial", The orientation or positional relationship indicated by "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the application and simplifying the description, and does not indicate or imply the pointed device or element It must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation to this application.
此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限 定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本申请的描述中，“多个”的含义是至少两个，例如两个，三个等，除非另有明确具体的限定。In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined as “first” and “second” may explicitly or implicitly include at least one of the features. In the description of the present application, "a plurality of" means at least two, such as two, three, etc., unless specifically defined otherwise.
在本申请中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系，除非另有明确的限定。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本申请中的具体含义。In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and other terms should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , Or integrated; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, it can be the internal connection of two components or the interaction relationship between two components, unless otherwise specified The limit. For those of ordinary skill in the art, the specific meanings of the above-mentioned terms in this application can be understood according to specific circumstances.
在本申请中，除非另有明确的规定和限定，第一特征在第二特征“上”或“下”可以是第一和第二特征直接接触，或第一和第二特征通过中间媒介间接接触。而且，第一特征在第二特征“之上”、“上方”和“上面”可是第一特征在第二特征正上方或斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”可以是第一特征在第二特征正下方或斜下方，或仅仅表示第一特征水平高度小于第二特征。In this application, unless expressly stipulated and defined otherwise, the first feature “on” or “under” the second feature may be in direct contact with the first and second features, or the first and second features may be indirectly through an intermediary. contact. Moreover, the "above", "above" and "above" of the first feature on the second feature may mean that the first feature is directly above or diagonally above the second feature, or it simply means that the level of the first feature is higher than the second feature. The “below”, “below” and “below” of the second feature of the first feature may be that the first feature is directly below or obliquely below the second feature, or it simply means that the level of the first feature is smaller than the second feature.
在本说明书的描述中，参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本申请的至少一个实施例或示例中。在本说明书中，对上述术语的示意性表述不必须针对的是相同的实施例或示例。而且，描述的具体特征、结构、材料或者 特点可以在任一个或多个实施例或示例中以合适的方式结合。此外，在不相互矛盾的情况下，本领域的技术人员可以将本说明书中描述的不同实施例或示例以及不同实施例或示例的特征进行结合和组合。In the description of this specification, descriptions with reference to the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" etc. mean specific features described in conjunction with the embodiment or example , The structure, materials, or characteristics are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine the different embodiments or examples and the features of the different embodiments or examples described in this specification without contradicting each other.
尽管上面已经示出和描述了本申请的实施例，可以理解的是，上述实施例是示例性的，不能理解为对本申请的限制，本领域的普通技术人员在本申请的范围内可以对上述实施例进行变化、修改、替换和变。Although the embodiments of the present application have been shown and described above, it can be understood that the above-mentioned embodiments are exemplary and should not be construed as limiting the present application. A person of ordinary skill in the art can comment on the foregoing within the scope of the present application. The embodiment undergoes changes, modifications, replacements and changes.

Claims (7)

  1. 一种基于光程可变的多反射镜激光动态聚焦***，其特征在于，包括可调激光聚焦***(10)、多反射镜动态聚焦***(20)以及安装基座(30)。A multi-mirror laser dynamic focusing system based on a variable optical path is characterized in that it comprises an adjustable laser focusing system (10), a multi-mirror dynamic focusing system (20) and a mounting base (30).
  2. 根据权利要求1所述的基于光程可变的多反射镜激光动态聚焦***，其特征在于，包括激光发散透镜及其沿光轴移动装置(101)和聚焦透镜组(102)；其中，所述的聚焦透镜组(102)由一或多个凸透镜或平凸透镜构成；所述的激光发散透镜及其沿光轴移动装置(101)与聚焦透镜组(102)中透镜光轴重合。The multi-mirror laser dynamic focusing system based on variable optical path according to claim 1, characterized in that it comprises a laser divergent lens and its moving device (101) along the optical axis and a focusing lens group (102); wherein The focusing lens group (102) is composed of one or more convex lenses or plano-convex lenses; the laser diverging lens and its moving device along the optical axis (101) coincide with the lens optical axis of the focusing lens group (102).
  3. 根据权利要求1所述的基于光程可变的多反射镜激光动态聚焦***，其特征在于，包括平面反射镜组(201)、旋转电机(202)以及传动机构(203)。The multi-mirror laser dynamic focusing system based on variable optical path according to claim 1, characterized in that it comprises a flat mirror group (201), a rotating motor (202) and a transmission mechanism (203).
  4. 根据权利要求1所述的基于光程可变的多反射镜激光动态聚焦***，其特征在于，分布着多反射镜动态聚焦***安装孔(301)，激光发散透镜沿光轴移动装置安装孔(302)以及聚焦透镜组长安装孔(303)；所述的聚焦透镜组长安装孔可以调节聚焦透镜安装位置以实现不同的聚焦效果。The multi-mirror laser dynamic focusing system based on variable optical path according to claim 1, characterized in that the mounting holes (301) of the multi-mirror dynamic focusing system are distributed, and the laser diverging lens moves along the optical axis to move the device mounting holes ( 302) and a mounting hole (303) for the long focusing lens group; the mounting hole for the long focusing lens group can adjust the mounting position of the focusing lens to achieve different focusing effects.
  5. 根据权利要求2所述的基于光程可变的多反射镜激光动态聚焦***，其特征在于，包括旋转电机(101A)、丝杠(101B)和发散透镜(101C)；所述的旋转电机(101A)通过所述的丝杠(101B)传动将旋转运动转换为所述的发散透镜(101C)沿光轴方向的直线运动；所述的发散透镜(101C)可为凹透镜或凸透镜。The multi-mirror laser dynamic focusing system based on variable optical path according to claim 2, characterized in that it comprises a rotating motor (101A), a lead screw (101B) and a divergent lens (101C); the rotating motor (101A), a lead screw (101B) and a divergent lens (101C); 101A) The rotary motion is converted into the linear motion of the divergent lens (101C) along the optical axis through the transmission of the screw (101B); the divergent lens (101C) can be a concave lens or a convex lens.
  6. 根据权利要求3所述的基于光程可变的多反射镜激光动态聚焦系 统，其特征在于，包括第一反射镜(201A)、第二反射镜(201B)、第三反射镜(201C)以及第四反射镜(201D)；其中，所述的第一反射镜(201A)和第二反射镜(201B)以及第三反射镜(201C)和第四反射镜(201D)分别始终保持平行；激光通过可调激光聚焦***(10)后，入射到所述的第一反射镜(201A)中心，后经所述的第二反射镜(201B)、第三反射镜(201C)以及第四反射镜(201D)反射后沿初始光轴射出；所述的第一反射镜(201A)、第二反射镜(201B)、第三反射镜(201C)以及第四反射镜(201D)转轴相互平行呈倒等腰梯形的分布；所述的第一反射镜(201A)和第二反射镜(201B)与第三反射镜(201C)和第四反射镜(201D)呈镜像对称分布，保持镜像同时偏转一定角度后实现聚焦位置的改变。The multi-mirror laser dynamic focusing system based on variable optical path according to claim 3, characterized in that it comprises a first mirror (201A), a second mirror (201B), a third mirror (201C) and The fourth reflector (201D); wherein the first reflector (201A) and the second reflector (201B), the third reflector (201C) and the fourth reflector (201D) are always kept parallel, respectively; laser After passing through the adjustable laser focusing system (10), it is incident on the center of the first reflector (201A), and then passes through the second reflector (201B), the third reflector (201C), and the fourth reflector (201D) After reflection, it is emitted along the initial optical axis; the rotation axes of the first mirror (201A), the second mirror (201B), the third mirror (201C) and the fourth mirror (201D) are parallel to each other and are inverted. Isosceles trapezoid distribution; the first mirror (201A) and the second mirror (201B) and the third mirror (201C) and the fourth mirror (201D) are distributed in mirror symmetry, maintaining the mirror image while deflecting a certain amount After the angle, the focus position is changed.
  7. 根据权利要求3所述的基于光程可变的多反射镜激光动态聚焦***，其特征在于，包括中心对称的柔性扭簧(203A)和曲柄(203B)；所述的柔性扭簧(203A)随旋转电机(202)转动而变形，配合曲柄(203B)将旋转电机的转动转换为正反射镜(201A、201C)和偏反射镜(201B、201D)的转动，且保持平行。The multi-mirror laser dynamic focusing system based on variable optical path according to claim 3, characterized in that it comprises a centrally symmetric flexible torsion spring (203A) and a crank (203B); the flexible torsion spring (203A) As the rotating electric machine (202) rotates and deforms, the rotation of the rotating electric machine is converted into the rotation of the specular reflector (201A, 201C) and the polarizing mirror (201B, 201D) in cooperation with the crank (203B), and they are kept parallel.
PCT/CN2019/115890 2019-09-25 2019-11-06 Multi-reflector laser dynamic focusing system based on variable optical path WO2021056697A1 (en)

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