TWM253133U - Structure improvement of laser scan unit - Google Patents

Description

M253133 四、創作說明（1) 【技術領域】 4 本創作係提供一種雷射掃目g裝置（L S U，L a s e r S c a η n i n g U η i t )之改良結構，尤指一種在準直鏡及f (9 -鏡片之間，利 用一可簡諳性運動（harmonic motion)之微機電（MEMS ， Micro Electronic Mechanical System)擺動式反射鏡 (MEMS oscillatory mirror)來控制雷射光束之投射方向， 使雷射掃瞄裝置（LSU )中可免除柱面鏡之設置，並簡化組裝 構件及增進掃目苗效率者。 【先前技術】 按’目前雷射光束掃瞒器LBP(Laser Beam Printer)之® 應用技術中，已包括有：美國US 5, 128, 795、US5, 162, 938 、US 5,329,399 、US 5,710,654 、US 5,757,533 、US 5,619 362 、US 5,721,631 、US 5,553,729 、US 5,111,219 、US 5, 995, 131，及日本4-50908、日本5-45580等多件專利，其 中’所使用之雷射掃瞒裝置LSU (Laser Scanning Unit)模 組大都是利用一高速旋轉（如4〇〇〇〇/min)之多面鏡 (polygon mirror )(如四或六面）以操控雷射光束之掃瞄 動作（laser beam scanning)，玆以一習用之雷射掃瞄裝置 (LSU ) 1說明一般LSU之結構型態及光學路徑如下：如第1、 1 A、1 B圖所示，以一半導體雷射丨〇作光源而發出雷射光束 翁 (laser beam) ’該雷射光束可先經一細孔（aper^ure) 11 再經過一準直鏡（collimator) 12，而準直鏡12可使雷射光 束形成平行光束，平行光束再經過一柱面鏡（cyl indr i calM253133 IV. Creation Instructions (1) [Technical Field] 4 This creation is to provide an improved structure of laser sweeping g device (LSU, Laser S ca η ning U η it), especially a collimator lens and f (9-Between lenses, a MEMS (Micro Electronic Mechanical System) MEMS oscillatory mirror capable of harmonic motion is used to control the projection direction of the laser beam to make the laser The scanning device (LSU) can eliminate the installation of cylindrical mirrors, simplify assembly components and improve the efficiency of scanning eyes. [Previous technology] Press' Current laser beam concealer LBP (Laser Beam Printer) ® application technology Included in the US: US 5, 128, 795, US 5, 162, 938, US 5,329,399, US 5,710,654, US 5,757,533, US 5,619 362, US 5,721,631, US 5,553,729, US 5,111,219, US 5, 995, 131, and Japan 4-50908, Japan 5-45580 and many other patents. Among them, most of the laser scanning unit LSU (Laser Scanning Unit) modules used make use of a high-speed rotation (such as 40,000 / min). Mirror or) (such as four or six sides) to control the laser beam scanning (laser beam scanning). A conventional laser scanning device (LSU) 1 is used to explain the general structure and optical path of the LSU as follows: As shown in Figures 1, 1 A, and 1 B, a semiconductor laser is used as a light source to emit a laser beam. 'The laser beam may pass through an aperture 11 first. After passing through a collimator 12, the collimator 12 can make the laser beam form a parallel beam, and the parallel beam passes through a cylindrical mirror (cyl indr i cal

第6頁 M253133 四、創作說明（2)Page 6 M253133 IV. Creative Instructions (2)

lens ) 13，而該柱面鏡1 3主要作用係使前述平行光束在副掃 瞄方向（sub-major scanning direction)Y軸上之寬度能沿 著主掃瞄方向（major scanning direction)X軸（如箭頭所 示）之平行方向聚焦而形成一線狀成像（1 i n e i m a g e )(在 第1 B圖中聚焦成一點）；又利用一可高速旋轉之多面鏡 (polygonal mirror) 14，使其上均勻連續佈設之多面反射 面15恰位於或接近於上述線狀成像（iine image)之焦點位 置；而多面鏡1 4係用以控制雷射光束之投射方向，其上連續 之複數反射面1 5在高速旋轉時可將入射至反射面1 5上之雷射 光束沿著主掃瞄方向（X軸）之平行方向以同一轉角速度 (angular velocity )偏斜反射至一 f0鏡片16上；而該f<9 鏡片1 6係設置於多面鏡1 4旁側，可為單件式鏡片結構 (single— element scanning lens)如第1 圖所示，或為兩件 式鏡片結構（如US 5, 995，131專利圖所示），而藉f 0鏡片16 通常是使經由多面鏡1 4上反射面1 5而射入之雷射光束能聚焦 成一圓形光點並投射在一光接收面（photoreceptor drum) 17上，以達成線性掃瞄（scanning linearity)之要求；然 上述之習用雷射掃瞄裝置（L S U )在使用上會有下列問題： (1) 、習用LSU所使用之旋轉式多面鏡14 (polygon m i r r 〇 r )，製作難度高而價格不低，相對增加L S U之成本。lens) 13, and the main function of the cylindrical mirror 1 3 is to make the width of the parallel beam in the sub-major scanning direction (Y-axis) along the main scanning direction (X-axis) Focus as shown in the arrow) in parallel to form a linear image (1 ineimage) (focused to a point in Figure 1B); and a polygon mirror 14 that can rotate at high speed is used to make it uniform and continuous. The polyhedral reflecting surface 15 is located at or close to the focal position of the above-mentioned iine image; and the polyhedral mirror 14 is used to control the projection direction of the laser beam, and the continuous multiple reflecting surfaces 15 on it are at high speed When rotating, the laser beam incident on the reflecting surface 15 can be reflected obliquely to a f0 lens 16 along the parallel direction of the main scanning direction (X axis) at the same angular velocity (angular velocity); and the f < 9 The lens 1 6 is located beside the polygon mirror 1 4 and can be a single-element lens structure (single-element scanning lens) as shown in Figure 1, or a two-piece lens structure (such as US 5,995,131 Patent picture) and borrow f 0 mirror 16 Generally, the laser beam incident through the reflecting surface 15 on the polygon mirror 14 can be focused into a circular light spot and projected on a photoreceptor drum 17 to achieve scanning linearity. ); However, the conventional laser scanning device (LSU) mentioned above will have the following problems in use: (1) Rotary polygon mirror 14 (polygon mirr 〇r) used by conventional LSU, which is difficult to make and the price is high. Not low, relatively increasing the cost of LSU.

(2) 、由於習用多面鏡14須具高度旋轉（如4〇〇〇〇/min )功能，精密度要求又高，致一般多面鏡14上反射面15之之 鏡面Y轴寬度極薄，使習用LSU中均須增設一柱面鏡 (c y 1 i n d r i c a 1 1 e n s ) 1 3以使雷射光束經過該柱面鏡1 3能聚(2) As the conventional polygonal mirror 14 must have the function of high rotation (such as 40,000 / min), and the precision is high, the width of the Y-axis of the mirror surface of the reflecting surface 15 on the general polygonal mirror 14 is extremely thin, so that A cylindrical lens (cy 1 indrica 1 1 ens) 1 3 must be added to the conventional LSU so that the laser beam can be focused by the cylindrical lens 1 3

第7頁 M253133Page 7 M253133

t 線（Y轴上成一點）而再投射在多面鏡1 4之鏡面1 5上， 致^加構件及組裝作業。 。） 驾用夕面鏡14須高度旋轉（如40000/min)，致旋 f =音相對提高，而且多面鏡1 4從啟動至工作轉速須耗費較 長日π間’增加開機後之等待時間。 ^4)"、習用LSU之組裝結構中，投射至多面鏡14反射面15 之雷射光束中心軸並非正對多面鏡丨4之中心轉軸，致在設計 相配合之f 6» -鏡片時，須同時考慮多面鏡丨4之離軸偏差問題 (deviation )，增加f 0 _鏡片之設計及製作上麻煩。 【内容】 故本創作主要目的乃在於提供一種雷射掃瞄裝置（LSU ，Laser Scanning Uni t )之改良結構，其係利用一微機電 (Micro Electronic Mechanic System)擺動式反射鏡 (MEMS oscillatory mirror)，以取代習用之旋轉式多面鏡 (polygon mirror)，使LSU模組中可免設置一使雷射光束能 在Y轴聚焦之柱面鏡，藉以簡化組裝構件，並避免旋轉噪音 及減少啟動時耗者。 本創作再一要目的乃在於提供一種雷射掃瞄裝置（LSU， L a s e r S c a η n i n g U n i t)之改良結構，其係利用該微機電擺動 式反射鏡（MEMS oscillatory mirror)之簡譜（harmonic) 運動方式，使掃瞄方向（scan direction)可雙向來回進行 ，使同一運轉速度之下，微機電擺動式反射鏡之雙向掃幅速 度可兩倍於多面鏡之單向掃幅速度，相對增加掃瞄頻率而增The t-line (one point on the Y axis) is then projected on the mirror surface 15 of the polygon mirror 14 to cause component addition and assembly operations. . ) The driving mirror 14 must be rotated at a high level (such as 40000 / min), the rotation f = sound is relatively increased, and the polygon mirror 14 needs a long period of time π from the start to the working speed to increase the waiting time after booting. ^ 4) In the assembly structure of the conventional LSU, the center axis of the laser beam projected onto the reflecting surface 15 of the polygon mirror 14 is not directly facing the center rotation axis of the polygon mirror 丨 4, so when designing the matching f 6 »-lens It is necessary to consider the off-axis deviation of the polygon mirror 丨 4 at the same time, and increase the f 0 _ lens design and manufacturing trouble. [Content] Therefore, the main purpose of this creation is to provide an improved structure of laser scanning device (LSU, Laser Scanning Unit), which uses a Micro Electronic Mechanic System (MEMS oscillatory mirror) In order to replace the conventional rotating polygon mirror, the LSU module can be provided without a cylindrical mirror that enables the laser beam to focus on the Y axis, thereby simplifying assembly components, avoiding rotation noise and reducing startup time. Consumer. Another main purpose of this creation is to provide an improved structure of laser scanning device (LSU, Laser S ca ning nit), which uses the harmonic spectrum of the MEMS oscillatory mirror ) The movement mode enables the scanning direction to go back and forth in both directions. Under the same operating speed, the two-way scanning speed of the micro-electromechanical swinging mirror can be twice that of the polygonal mirror. Increased scanning frequency

M253133 沒、創作說明（4) 進掃瞄效率者。 本創作又一要目的乃在於提供一種雷射掃瞄裝置（LSU ，Laser Scanning Uni t )之改良結構，其中，可使雷射光 束中心軸正對該微機電反射鏡（Μ E M S m i r r 〇 r )之機械中心 (即反射鏡之擺動中心），藉以消除習用者多面鏡之離軸偏 差（deviation )，俾可簡化f 0 —鏡片之設計及製作。 為使本創作更加明確詳實，茲配合下列圖示將本創作之 結構及其技術特徵詳述如後： 【實施方式】 參考第2、2A、2B、2C圖所示，本創作雷射掃瞄裝置 (LSU，Laser Scanning Unit) 2，主要包括一半導體雷射 20、一準直鏡21、一微機電擺動式反射鏡（MEMS oscillatory mirror) 22、及一 f<9 鏡片 23，而其特徵在於 :利用該微機電擺動式反射鏡2 2以取代習用雷射掃瞄裝置 (LSU )中所使用之旋轉式多面鏡（polygon mirror)，使 半導體雷射20所發出之雷射光束可經過準直鏡21以形成平行 光束，而平行光束並不必再經過一枉面鏡（cylindrical lens )，而可直接投射至微機電擺動式反射鏡（MEMS oscillatory mirror)22上，而微機電擺動式反射鏡（MEMS oscillatory mirror) 22在某一擺動幅度下可進行簡諧運 動，藉以可控制該入射雷射光束之反射方向，使雷射光束反 射至位於旁側之f 6»鏡片23，而達成一雷射掃瞄裝置（LSU， Laser Scanning Unit)所要求之線性掃瞄（scanningM253133 No, creation instructions (4) Scanning efficiency. Another main purpose of this creation is to provide an improved structure of a laser scanning device (LSU, Laser Scanning Uni), in which the center axis of the laser beam can be directed to the micro-electromechanical mirror (Μ EMS mirr 〇) The mechanical center (that is, the swing center of the mirror) is used to eliminate off-axis deviation of the user's polygonal mirror, which can simplify the design and manufacturing of f 0-lens. In order to make this creation more clear and detailed, the structure and technical features of this creation are detailed below with the following illustrations: [Embodiment] Referring to Figures 2, 2A, 2B, and 2C, the laser scanning of this creation The device (LSU, Laser Scanning Unit) 2 mainly includes a semiconductor laser 20, a collimator 21, a MEMS oscillatory mirror 22, and an f < 9 lens 23, which is characterized by : Use the micro-electromechanical swing mirror 22 to replace the rotating polygon mirror used in the conventional laser scanning device (LSU), so that the laser beam emitted by the semiconductor laser 20 can be collimated The mirror 21 forms a parallel light beam, and the parallel light beam can be directly projected onto a MEMS oscillatory mirror 22 without passing through a cylindrical lens, and the MEMS oscillatory mirror ( MEMS oscillatory mirror) 22 can perform a simple harmonic motion under a certain swing amplitude, so that the reflection direction of the incident laser beam can be controlled, so that the laser beam is reflected to the f 6 »lens 23 on the side to achieve a lightning. Linear scanning (scanning) required by a laser scanning unit (LSU, Laser Scanning Unit)

第9頁 M253133 四、創作說明（5) 1 inearity )功效。 . 症十對本創作雷射掃目苗裝置（LSU，Laser Scanning Uni七）2模組中該微機電擺動式反射鏡（MEMS osci 1 latory mirr〇r) 22所形成之簡諧（harmonic)運動方式，可利用兩 種方法來達成線性掃猫（s c a n n丨n g 1丨n e a『丨t y )之要求： (a) 、電子方面調整（electricai modulation):即 調整雷射之輸入訊號（input signal )，使其與該微機電擺 動式反射鏡（MEMS oscillatory mirror)22之簡諧運動 (harmonic motion )同步。 (b) 、光學方面調整（0ptiCal modulation):即針對 f 6» -鏡片予以改變設計（改變參數，將參數6»變為參數s i η 0 )，使f 0 -鏡片改變成一種” f s i η <9 -鏡片π ，以能配合該微 機電擺動式反射鏡（MEMS oscillatory mirror)22之簡諧運 動(harmonic motion ) 〇 而依目前電子技術或f 0 -鏡片之模造技術而言，上述 (a ) 、 （ b )兩種調整方法均能達成。 而本創作在一雷射掃瞄裝置（L SU )結構中利用一微機電 擺動式反射鏡（MEMS oscillatory mirror)22來取代習用之 旋轉式多面鏡（polygon mirror)，至少可達成下列優點： (1 )、在雷射掃瞄裝置（LSU )模組中不須再設置一柱 面鏡（cylindrical lens) ’可使f /9 -鏡片之光學設§十將更 堅固（more robust)且更高公差（higher tolerance) ° (2 )、雷射光束中心軸與微機電擺動式反射鏡之機械' 心不再有習用多面鏡（polygon mirror)之離軸偏差問題Page 9 M253133 Fourth, creative instructions (5) 1 inearity). . Ten pairs of simple and harmonious movements formed by the micro-electromechanical oscillating mirror (MEMS osci 1 latory mirr〇r) 22 in the two modules of the laser scanning unit (LSU, Laser Scanning Uni 7). There are two methods that can be used to achieve the requirements of linear scan cat (scann 丨 ng 1 丨 nea 『丨 ty): (a), electricai modulation (electricai modulation): that is, adjust the laser input signal (input signal), so that It is synchronized with the harmonic motion of the MEMS oscillatory mirror 22. (b) Optical adjustment (0ptiCal modulation): change the design for f 6 »-lens (change the parameter, change parameter 6» to parameter si η 0), and make f 0-lens into a kind of "fsi η & lt 9-lens π to match the harmonic motion of the MEMS oscillatory mirror 22 MEMS, and according to the current electronic technology or f 0 -mold molding technology, the above (a ), (B) Both adjustment methods can be achieved. And this creation uses a micro-electromechanical oscillating mirror (MEMS oscillatory mirror) 22 in a laser scanning device (L SU) structure to replace the conventional rotating multi-faceted Polygon mirror can achieve at least the following advantages: (1), there is no need to set a cylindrical lens in the laser scanning unit (LSU) module 'can make f / 9-lens optics It is assumed that §10 will be more robust and higher tolerance ° (2), the central axis of the laser beam and the mechanical mechanism of the micro-electromechanical swing mirror will no longer have the traditional polygon mirror Off-axis deviation problem

第10頁 M253133 四、創作說明（6) ^ (deviation)，因此在設計f 0 —鏡片時，可只考慮對稱性光 學區域（symmetric optical field)，而可簡化-鏡片之 設計及製作。 (3 )、微機電擺動式反射鏡之簡諧運動（harm〇nic mot ion )啟動後可馬上達成工作轉速，幾乎沒有待機時間， 而且叮具較南運轉速度，甚至比多面鏡馬達m〇t〇r )使用氣式軸承馬達（a i r — b e a r i n g m 〇 t 〇 r )還高，故微機電 擺動式反射鏡微機電反射鏡之掃幅效率較佳。 (4 ) /微機電擺動式反射鏡之簡諧運動（harm〇nic motion )係在某一定擺動幅度丁之正反向擺動，使掃瞄方向 (scan direction)可雙向來回進行，致同一運轉速度之下 ，微機電擺動式反射鏡之雙向掃幅速度可兩 向掃幅速度、，相對增進掃幅效率。 夕面鏡之早 綜上所述，本創作的確能藉由上述所揭露之結構達到所 ” ί ί Ϊ:i本創作申請前未見於刊物亦未公開使用，誠 已付合專幻之新穎、進步等要件。Page 10 M253133 Fourth, the creation instructions (6) ^ (deviation), so when designing f 0-lens, you can only consider the symmetric optical field, and can simplify-lens design and production. (3) The simple harmonic motion of the micro-electromechanical swing mirror (harmonic mot ion) can reach the working speed immediately after starting, there is almost no standby time, and the operating speed of the bell is relatively south, even faster than the polygon mirror motor m0t 〇r) The use of an air bearing motor (air — bearingm 〇t 〇r) is still high, so the micro-electro-mechanical swing mirror MEMS micro-electro-mechanical mirror sweep efficiency is better. (4) / Harmonic motion of the micro-electromechanical swinging mirror is swinging forward and backward in a certain swinging amplitude, so that the scanning direction can be carried out in both directions to and from the same speed. Below, the two-way sweep speed of the micro-electromechanical oscillating mirror can increase the sweep speed in both directions and relatively increase the sweep efficiency. To sum up, as early as the evening mirror, this creation can indeed be achieved by the above-disclosed structure "ί ί: i This creative creation has not been seen in publications or publicly used before, and it has been submitted to the novel, Progress and other elements.

惟’ ί ΐ f揭之圖式及說明，僅為本創作之實施例而已 ，非為限疋本創作之實施例；大凡熟悉該項技藝之人士，JL 戶二本m ΐ徵範疇’所作之其它等效變化；修飾，皆^ 涵盍在以下本案之申請專利範圍内。However, the illustrations and descriptions of the 'ΐ ΐ f are only examples of this creation, and are not intended to limit the examples of this creation. Anyone who is familiar with the skill, JL households, two books, and category Other equivalent changes; modifications are within the scope of the following patent applications.

第11頁 M253133 圖式簡單說明 【圖式簡單說明】 第1圖：係習知一雷射掃瞄裝置模組之立體示意圖。 第1 A圖：係第1圖光學路徑之上視示意圖。 第1 B圖：係第1圖光學路徑之一侧視示意圖。 (第1A圖之垂直向視圖） 第2圖 ··係本創作雷射掃瞄裝置模組之立體示意圖。 第2 A圖：係第2圖光學路徑之上視示意圖。 第2 B圖：係第2圖光學路徑之一側視示意圖。 (第2A圖之垂直向視圖）。Page 11 M253133 Brief description of the drawings [Simple description of the drawings] Figure 1: This is a three-dimensional schematic diagram of a conventional laser scanning device module. Fig. 1A is a schematic top view of the optical path of Fig. 1. FIG. 1B is a schematic side view of one of the optical paths in FIG. 1. (Vertical view of Fig. 1A) Fig. 2 is a three-dimensional schematic diagram of the laser scanning device module of this creation. Figure 2A: A schematic top view of the optical path of Figure 2. FIG. 2B is a schematic side view of one of the optical paths in FIG. 2. (Figure 2A is a vertical view).

第2 C圖：係本創作微機電擺動式反射鏡一實施之立體示意圖 【圖號簡單說明】 2 雷射掃目苗裝置（LSU，Laser Scanning Unit) 20 半導體雷射 2 1 準直鏡 22 微機電擺動式反射鏡（MEMS oscillatory mirror) 23 f 0鏡片Figure 2C: This is a three-dimensional schematic diagram of the implementation of this creative micro-electromechanical swing mirror. [Simplified description of the drawing number] 2 Laser scanning unit (LSU, Laser Scanning Unit) 20 Semiconductor laser 2 1 Collimator 22 micro MEMS oscillatory mirror 23 f 0 lens

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Claims (1)

M253133 五、申請專利範圍 1 、一種雷射掃瞄裝置（LSU，Laser Scanning Unit)之改 良結構，主要包括一半導體雷射、一準直鏡、一微機電 擺動式反射鏡（MEMS oscillatory mirror)、及一f 0 -鏡片lens)，其係於準直鏡及ί0 -鏡片之間設置 一微機電擺動式反射鏡，藉以使半導體雷射所發出之雷 射光束經準直鏡鏡形成平行光束後，可直接投射至該微 機電擺動式反射鏡上，而藉該微機電擺動式反射鏡在某 一擺動幅度下進行簡諧運動，以控制該雷射光束之反射 方向而反射至f(9鏡片，而達成雷射掃瞄裝置所要求之 線性掃瞄效果者。 2、如申請專利範圍第1項所述雷射掃瞄裝置之改良結構，譬 其中於該準直鏡及該微機電擺動式反射鏡之間可免設置 一柱面鏡。 3 、如申請專利範圍第1項所述雷射掃瞄裝置之改良結構， 其中該雷射光束中心軸可對準該微機電擺動式反射鏡之 機械中心。 4、如申請專利範圍第1項所述雷射掃瞄裝置之改良結構， 其中該半導體雷射之輸入訊號（input signal)可作調 整，使其與該微機電擺動式反射鏡之簡諧運動同步者。 5 、如申請專利範圍第1項所述雷射掃瞄裝置之改良結構， 其中該f0 -鏡片可由一 fsin<9-鏡片取代，以配合該微籲 機電擺動式反射鏡之簡諧運動。 6 、如申請專利範圍第1項所述雷射掃瞄裝置之改良結構， 其中該f 0 -鏡片可為單件式鏡片結構（single-elementM253133 5. Scope of patent application 1. An improved structure of a laser scanning unit (LSU, Laser Scanning Unit), which mainly includes a semiconductor laser, a collimator, a MEMS oscillatory mirror, And an f 0 -lens), which is located between the collimator and ί0 -lens, and a micro-electromechanical swinging mirror is arranged, so that the laser beam emitted by the semiconductor laser is formed into a parallel beam by the collimator lens Can be directly projected onto the micro-electromechanical oscillating mirror, and the micro-electromechanical oscillating mirror is used to perform a simple harmonic motion at a certain swing amplitude to control the reflection direction of the laser beam and reflect to f (9 lens To achieve the linear scanning effect required by the laser scanning device. 2. The improved structure of the laser scanning device as described in item 1 of the patent application scope, such as the collimator lens and the micro-electromechanical swing type A cylindrical mirror can be omitted between the reflectors. 3. The improved structure of the laser scanning device as described in item 1 of the patent application scope, wherein the central axis of the laser beam can be aligned with the micro-electromechanical swinging mirror. machine 4. The improved structure of the laser scanning device as described in item 1 of the scope of the patent application, wherein the input signal of the semiconductor laser can be adjusted to match the micro-electromechanical swing mirror Simple harmonic motion synchronizer 5. The improved structure of the laser scanning device as described in the first item of the patent application scope, wherein the f0-lens can be replaced by a fsin < 9-lens to match the micro-electromechanical swing mirror 6. The improved structure of the laser scanning device as described in item 1 of the scope of patent application, wherein the f 0-lens may be a single-element lens structure (single-element 第13頁 M253133 五、申請專利範圍 scanning lens)或為兩件式鏡片結構。 HIMPage 13 M253133 V. Patent application scope (scanning lens) or two-piece lens structure. HIM