WO2021035971A1 - Dispositif de couplage électromagnétique, dispositif de polissage le comprenant, et dispositif de mesure de propriété rhéologique électromagnétique - Google Patents

Dispositif de couplage électromagnétique, dispositif de polissage le comprenant, et dispositif de mesure de propriété rhéologique électromagnétique Download PDF

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Publication number
WO2021035971A1
WO2021035971A1 PCT/CN2019/117610 CN2019117610W WO2021035971A1 WO 2021035971 A1 WO2021035971 A1 WO 2021035971A1 CN 2019117610 W CN2019117610 W CN 2019117610W WO 2021035971 A1 WO2021035971 A1 WO 2021035971A1
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Prior art keywords
electrode
carbon brush
magnetic pole
electromagnetic
rotating
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PCT/CN2019/117610
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English (en)
Chinese (zh)
Inventor
阎秋生
黄展亮
潘继生
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广东工业大学
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Publication of WO2021035971A1 publication Critical patent/WO2021035971A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
    • G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
    • G01N11/14—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by using rotary bodies, e.g. vane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/02—Permanent magnets [PM]
    • H01F7/0231—Magnetic circuits with PM for power or force generation
    • H01F7/0242—Magnetic drives, magnetic coupling devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
    • G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
    • G01N11/14—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by using rotary bodies, e.g. vane
    • G01N2011/147—Magnetic coupling

Definitions

  • the present invention relates to the technical field of precision optical processing, and more specifically, to an electromagnetic coupling device, a polishing device having the same, and an electromagnetic rheological property measuring device.
  • the existing domestic and foreign processing equipment for large-size semiconductor wafers are mainly high-efficiency grinding, ultra-precision polishing, chemical mechanical polishing, magnetorheological polishing and grinding and polishing processing based on end grinders.
  • the magnetorheological polishing technology is a method of polishing with a semi-fixed flexible polishing head that uses the magnetorheological effect to produce a semi-fixed flexible polishing head. It is widely used because the relative polishing technology can effectively reduce the fine cracks and residual stress on the workpiece surface.
  • Chinese patent CN103192297B discloses a chemical cluster magnetorheological coupling processing method for single crystal silicon carbide wafers, which is based on Fenton reaction corrosion Single crystal SiC reaction, magnetorheological polishing principle, cluster action mechanism, proposed a chemical reaction and mechanical processing coupling polishing method, which effectively improves the processing efficiency of a certain size of single crystal SiC, but the processing method has weak adaptability and cannot be widely applied to other wafers The material is polished and the degree of magnetic pole clustering is low;
  • Chinese patent CN 103317413 B discloses an electromagnetic self-excited vibration electrorheological coupling polishing method and device, which introduces electromagnetic self-excited vibration to realize the high-speed longitudinal reciprocating movement of the electric field generating device, thereby It has a longitudinal effect on the flexible grinding head produced by the electrorheological effect and improves the processing efficiency.
  • the purpose of the present invention is to overcome the shortcomings of the prior art, and provide an electromagnetic coupling device, a polishing device having the same, and an electromagnetic rheological property measuring device, which can realize different forms of electromagnetic coupling fields, and aim at different forms of electromagnetic coupling fields.
  • the measurement of electromagnetic rheological properties provides a basis for the study of electromagnetic rheological chain control methods and electromagnetic rheological polishing methods.
  • An electromagnetic coupling device which includes a base, an electric field generating component, a magnetic field generating component, a first rotating component that drives the electric field generating component to rotate, a second rotating component that drives the magnetic field generating component to rotate, and an insulating rib arranged above the electric field generating component ,
  • the first rotating component is connected to the electric field generating component
  • the second rotating component is connected to the magnetic field generating component
  • the electric field generating component and the magnetic field generating component are both connected to the base
  • the electric field generating component is distributed inside the insulating rib The generated electric field and the magnetic field generated by the magnetic field generating component.
  • the electric field generating component and the electromagnetic generating component are matched in the insulating rib to form an electromagnetic coupling field.
  • the structure of differently formed permanent magnetic fields, different electric fields and different magnetic fields provide the equipment foundation for the research of electromagnetic rheological chain control methods and electromagnetic rheological polishing methods.
  • the electric field generating component includes an electrode group, an electrode chassis, an electrode disk shaft cylinder, a first carbon brush, a first carbon brush holder, a second carbon brush, a second carbon brush holder, a first conductive ring, and a second conductive ring.
  • ring :
  • the first carbon brush holder is fixedly installed on the electrode disk shaft cylinder, the first carbon brush is fixed to the first carbon brush holder, and a first conductive sheet is provided between the first carbon brush and the first carbon brush holder.
  • the first carbon brush is attached to the bottom of the electrode chassis and the first conductive ring is arranged between the first carbon brush and the electrode chassis;
  • the second carbon brush holder is fixedly installed on the electrode disk shaft cylinder, the second carbon brush is fixed to the second carbon brush holder, and a second conductive sheet is provided between the second carbon brush and the second carbon brush holder.
  • the second carbon brush is attached to the bottom of the electrode chassis and the second conductive ring is provided between the second carbon brush and the electrode chassis;
  • the first conductive ring is electrically connected to the positive electrode of the electrode group, the second conductive ring is electrically connected to the negative electrode of the electrode group, and the first conductive sheet and the second conductive sheet are connected to a DC high voltage power supply ;
  • the electrode group is embedded in the electrode chassis and the upper surface of the electrode chassis is provided with a wear-resistant insulating layer.
  • the electrical energy of the DC high voltage power supply is transferred to the positive electrode of the electrode group through the first conductive sheet, the first carbon brush, and the first conductive ring, and is transferred to the negative electrode of the electrode group through the second conductive sheet, the second carbon brush, and the second conductive ring.
  • an electric field is formed between the positive and negative electrodes of the electrode, and the form and intensity of the electric field are changed by changing the type of electrode group, the voltage and frequency of the DC high-voltage power supply.
  • the electrode chassis is mounted on the electrode disk shaft, the electrode disk shaft is arranged on the outer circumference of the electrode disk shaft cylinder, and a first bearing is provided between the electrode disk shaft and the electrode disk shaft cylinder, and the electrode disk shaft is connected to the outer circumference of the first bearing.
  • the first belt wheel is provided between the electrode disk shaft and the electrode disk shaft cylinder, and the electrode disk shaft is connected to the outer circumference of the first bearing.
  • the first rotating assembly includes a first motor and a first synchronous belt, the first motor is installed on the base, and the first synchronous belt is connected between the first motor and the first pulley.
  • the first motor works through the first synchronous belt to drive the first pulley to rotate, and the first pulley drives the rotating shaft of the electrode disk to rotate. Since there is a first bearing between the rotating shaft of the electrode disk and the shaft of the electrode disk, the rotating shaft of the electrode disk can be opposed to the electrode disk.
  • the shaft barrel rotates.
  • the magnetic field generating assembly includes a magnetic pole, a magnetic pole fixed shaft, a magnetic pole slider, and a magnetic pole guide.
  • the magnetic pole slider is mounted on one end of the magnetic pole fixed shaft, and the other end of the magnetic pole fixed shaft is provided with an inner hole for mounting the magnetic pole.
  • the magnetic pole slider is connected with the magnetic pole guide rail.
  • the magnetic pole guide is installed on the magnetic pole rotating cylinder, the outer periphery of the magnetic pole rotating cylinder is connected with a magnetic pole fixed shaft cylinder, the magnetic pole fixed shaft cylinder is connected with the base, and the magnetic pole rotating cylinder is connected with the magnetic pole fixed shaft cylinder.
  • the outer circumference of the second bearing and the magnetic pole rotating cylinder is connected with a second pulley.
  • the second rotating assembly includes a second motor and a second timing belt, the second motor is mounted on the base, and the second timing belt is connected between the second motor and the second pulley.
  • the second motor works through the second synchronous belt to drive the second pulley to rotate, and the second pulley drives the magnetic pole rotating drum to rotate. Since the magnetic pole rotating drum and the magnetic pole fixing shaft drum are connected with a second bearing, the magnetic pole rotating drum can be positioned relative to the magnetic poles.
  • the shaft barrel rotates; the present invention can adjust the relative position between the magnetic pole slider and the magnetic pole guide, so that the magnetic pole rotates with a certain eccentricity, so as to realize the conversion of the static magnetic field of the electrode chassis disk surface to the dynamic magnetic field.
  • the present invention also provides a polishing device, including a polishing rotating shaft, a clamp for clamping a workpiece, and the electromagnetic coupling device as described above.
  • the clamp is connected to the bottom of the polishing rotating shaft, and the insulating rib contains an electromagnetic current. Changing the polishing liquid, the bottom surface of the workpiece is arranged in contact with the electromagnetic rheological polishing liquid.
  • the clamp clamps the workpiece and rotates under the drive of the polishing rotating shaft, and relative movement occurs between the surface of the workpiece and the electro-magnetic rheological polishing liquid, thereby realizing high-efficiency and ultra-smooth processing of the surface of the workpiece.
  • the present invention also provides an electromagnetic rheological property measuring device, which includes the polishing device, a rotating force sensor and a signal transmitter as described above, the rotating force sensor is connected to one end of the polishing shaft, and the signal The transmitter is signal-connected with the rotation force measuring sensor, and the insulating rib outer cover is provided with an energy shielding cover.
  • the clamp clamps the workpiece and rotates under the driving of the polishing shaft, and the relative movement between the surface of the workpiece and the electromagnetic rheological polishing liquid can realize the high-efficiency and ultra-smooth processing of the surface of the workpiece.
  • the force sensor tests the polishing force, which is easy to monitor the polishing force during the polishing process and study the influence of the polishing force on the polishing effect.
  • the present invention also provides an electromagnetic rheological performance measuring device, which includes a measuring rotor, a torque meter and the electromagnetic coupling device as described above.
  • the measuring rotor is connected with the torque meter, and the insulating rib contains an electromagnetic rheological polishing liquid.
  • the end of the measuring rotor extends into the electro-magnetic rheological polishing liquid, and the outer cover of the insulating rib is provided with an energy shielding cover.
  • the electromagnetic rheological performance measuring device of the present invention measures the rotor protruding into the magnetorheological fluid, the torque of the rotor is measured by a torque meter, and the shear stress and viscosity of the electromagnetic rheological fluid are obtained by conversion.
  • the invention can be used to study the rheological properties of electromagnetic rheological fluids under the coupling action of different electric fields and different magnetic fields, and provides a data basis for the study of electromagnetic rheological chain control methods and electromagnetic rheological polishing methods.
  • the electromagnetic coupling device of the present invention can realize different forms of electric and magnetic coupling fields by changing the structure of the electric field generating part and the magnetic pole structure, and provides the equipment foundation for the research of the electromagnetic rheological chain control mode and the electromagnetic rheological polishing method; the electromagnetic of the present invention
  • the coupling device can be used for electromagnetic rheological polishing test, polishing force measurement of electromagnetic rheological polishing, and electromagnetic rheological fluid performance test. It establishes test conditions for studying the influence factors of electromagnetic rheological polishing, and promotes electromagnetic rheological polishing in the field of optical precision processing. The wide range of applications.
  • Figure 1 is a cross-sectional view of an electromagnetic coupling device according to the first embodiment
  • Figure 2 is a perspective view of the electromagnetic coupling device of the first embodiment
  • Fig. 3 is a partial detailed view of the electric field generating component of the electromagnetic coupling device of the first embodiment
  • FIG. 4 is an A-A cross-sectional view of the electric field generating component of the electromagnetic coupling device in FIG. 3;
  • Fig. 5 is an enlarged view of a part B of the electric field generating component of the electromagnetic coupling device in Fig. 4;
  • FIG. 6 is a schematic diagram of the structure of the concentric ring group electrode group of the electromagnetic coupling device according to the first embodiment
  • FIG. 7 is a schematic diagram of the structure of the strip electrode group of the electromagnetic coupling device according to the first embodiment
  • FIG. 8 is a schematic diagram of the structure of the dot matrix electrode group of the electromagnetic coupling device according to the first embodiment
  • FIG. 9 is a schematic diagram of the structure of the polishing device of the second embodiment.
  • FIG. 10 is a schematic diagram of the structure of the electromagnetic rheological property measuring device of the third embodiment.
  • FIG. 11 is a schematic diagram of the structure of the electromagnetic rheological property measurement device of the fourth embodiment.
  • Figures 1 to 8 show an embodiment of the electromagnetic coupling device of the present invention, which includes a base 100, an electric field generating component 200, a magnetic field generating component 300, a first rotating component 400 that drives the electric field generating component 200 to rotate, and a driving magnetic field generating component
  • the second rotating component 500 rotated by 300 and the insulating rib 600 arranged above the electric field generating component 200, the first rotating component 400 is connected to the electric field generating component 200, the second rotating component 500 is connected to the magnetic field generating component 300, and the electric field generating component 200 ,
  • the magnetic field generating component 300 is connected to the base 100, and the electric field generated by the electric field generating component 200 and the magnetic field generated by the magnetic field generating component 300 are distributed inside the insulating rib 600.
  • the base 100 of this embodiment can be configured as a door-shaped structure, and a plurality of mounting holes 101 are provided at the bottom of the door-shaped structure for installation.
  • the electric field generating component 200 and the electromagnetic generating component cooperate to form an electromagnetic coupling field in the insulating rib 600.
  • the parameters of 300 generate differently formed permanent magnet dynamic fields, thereby forming different forms of electromagnetic coupling fields.
  • the electric field generating assembly 200 includes an electrode group 201, an electrode chassis 202, an electrode disk shaft cylinder 203, a first carbon brush 204, a first carbon brush holder 205, a second carbon brush 206, and a second carbon brush.
  • the first carbon brush holder 205 is fixedly installed on the electrode disk shaft cylinder 203, the first carbon brush 204 is fixed on the first carbon brush holder 205, and a first conductive sheet is provided between the first carbon brush 204 and the first carbon brush holder 205, The first carbon brush 204 is attached to the bottom of the electrode chassis 202 and the first conductive ring 208 is provided between the first carbon brush 204 and the electrode chassis 202;
  • the second carbon brush holder 207 is fixedly installed on the electrode disc shaft cylinder 203, the second carbon brush 206 is fixed on the second carbon brush holder 207, and a second conductive sheet is provided between the second carbon brush 206 and the second carbon brush holder 207, The second carbon brush 206 is attached to the bottom of the electrode chassis 202 and the second conductive ring 209 is provided between the second carbon brush 206 and the electrode chassis 202;
  • the first conductive ring 208 is electrically connected to the positive electrode 210 of the electrode group 201, and the second conductive ring 209 is electrically connected to the negative electrode 211 of the electrode group 201.
  • the first conductive sheet and the second conductive sheet are connected to a direct AC high voltage power supply;
  • the voltage range of the AC high-voltage power supply is 0-10kV, and the frequency range is 0Hz-50Hz.
  • the electrode group 201 is embedded in the electrode chassis 202 and the upper surface of the electrode chassis 202 is provided with a wear-resistant insulating layer 212, which prevents the electrode chassis 202 from being worn and prolongs the service life of the electrode chassis 202; wherein the thickness of the wear-resistant insulating layer 212 can be 0.3 It can be adjusted within the range of mm-1 mm, and the wear-resistant insulating layer 212 of this embodiment may be an alumina ceramic coating.
  • the electrode group 201 can be arranged in a variety of shapes according to the simulation needs of different coupled electromagnetic fields: like the heart ring group electrode group 201, the strip electrode group 201, and the dot matrix electrode group 201, respectively, as shown in the figure 6. As shown in Figure 7, Figure 8. However, it should be noted that the electrode group 201 of the present invention is not limited to the above-mentioned shape arrangement. In actual application, the position and number of the electrode group 201 can be adjusted according to requirements.
  • a long groove 213 is opened on the lower surface of the electrode chassis 202 at a position corresponding to the electrode group 201, and a wire is set in the long groove 213 to be welded to the electrode group 201, and adjacent electrodes are connected to opposite wires.
  • the ends are respectively welded to the first conductive ring 208 and the second conductive ring 209.
  • the lead wires of the first conductive sheet and the second conductive sheet are connected to the DC high-voltage power supply. This configuration can direct the voltage generated by the DC high-voltage power supply to the electrodes.
  • the positive and negative poles of group 201 can direct the voltage generated by the DC high-voltage power supply to the electrodes.
  • a shielding copper sheet 214 is arranged between the electrode assembly 201 and the magnetic field generating assembly 300 in this embodiment.
  • the bottom surface of the electrode chassis 202 can be respectively provided with the first conductive ring 208, the second conductive ring 209, and the shielding copper.
  • the piece 214 matches the positioning notch.
  • the first carbon brush 204 and the second carbon brush 206 of this embodiment are not symmetrical about the center line of the electrode chassis 202, and the first conductive ring 208 and the second conductive ring 208 are not symmetrical about the center line of the electrode chassis 202.
  • the two conductive rings 209 will not overlap.
  • the electrode chassis 202, the insulating rib 600, and the switching disk 210 of this embodiment are arranged concentrically.
  • the electrode chassis 202 can be made of alumina ceramics or zirconia ceramics, but not as a restriction, the electrode chassis 202 can also be made of other insulating materials; the electrode assembly 201 in this embodiment is made of pure It is made of copper, aluminum or stainless steel, but not as a restriction.
  • the electrode group 201 material can also be made of other conductive and non-magnetic materials.
  • the electrode chassis 202 of this embodiment is installed on the electrode disk shaft 215, and the electrode disk shaft 215 is provided on the electrode disk shaft cylinder.
  • a first bearing 216 is provided on the outer periphery of 203 and between the electrode disk rotating shaft 215 and the electrode disk shaft cylinder 203.
  • a first pulley 401 is connected to the outer periphery of the electrode disk rotating shaft 215; the first rotating assembly 400 includes a first motor 402 and a first timing belt 403.
  • the first motor 402 is installed on the base 100, and the first timing belt 403 is connected between the first motor 402 and the first pulley 401, as shown in FIG. 2.
  • the first pulley 401 can be driven to rotate by the transmission of the first pulley 401, and the electrode disk rotating shaft 215 drives the electrode disk to rotate.
  • the first carbon brush 204 is in the first conductive ring. 208.
  • the second carbon brush 206 slides on the second conductive ring 209.
  • the electrode disk shaft 215 is concentrically mounted on the outer circumference of the electrode disk shaft cylinder 203 through the first bearing 216, but the relative position of the electrode disk shaft 215 and the electrode disk shaft cylinder 203 is set in order to obtain a stable motion effect.
  • the preference is not as a restrictive provision.
  • the transmission between the first motor 402 and the electrode disk shaft 215 in this embodiment adopts a belt pulley transmission mode, but the present invention should not be limited to this, and a chain sprocket, gear transmission, etc. can also be used to drive
  • the first motor 402 drives the rotation form of the pole plate rotating shaft is not limited to a complete 360° rotation.
  • the working mode of the first rotation stopper 404 and the first motor 402 can be set to make the pole plate rotating shaft at a preset angle. Rotate within the range.
  • the magnetic field generating assembly 300 includes a magnetic pole 301, a magnetic pole fixed shaft 302, a magnetic pole slider 303, and a magnetic pole guide 304.
  • the magnetic pole slider 303 is mounted on one end of the magnetic pole fixed shaft 302, and the other end of the magnetic pole fixed shaft 302 is provided with The inner hole of the magnetic pole 301 is installed, and the magnetic pole slider 303 is connected to the magnetic pole guide 304.
  • the magnetic pole guide 304 is installed on the magnetic pole rotating cylinder 305, the outer periphery of the magnetic pole rotating cylinder 305 is connected with a magnetic pole fixing shaft cylinder 306, the magnetic pole fixing shaft cylinder 306 is connected with the base 100, and the magnetic pole rotating cylinder 305 and the magnetic pole fixing shaft cylinder 306 are connected with a first There are two bearings 307 and the outer circumference of the magnetic pole rotating cylinder 305 is connected with a second pulley 501; the second rotating assembly 500 includes a second motor 502 and a second timing belt 503, the second motor 502 is installed on the base 100, and the second timing belt 503 is connected Between the second motor 502 and the second pulley 501, as shown in FIG. 2.
  • the second pulley 501 can be driven to rotate by the transmission of the second pulley 501.
  • the magnetic pole rotating cylinder 305 rotates with the second pulley 501, and the magnetic pole 301 rotates, continuously changing the magnetic field to the insulation.
  • the action direction of the electromagnetic rheological fluid inside the rib 600 forces the structure chain in the formed electromagnetic rheological polishing pad to be continuously reorganized and updated, thereby achieving the purpose of uniform polishing.
  • the magnetic pole slider 303 and the magnetic pole guide 304 are provided, and the relative position between the magnetic pole slider 303 and the magnetic pole guide 304 can be adjusted to make the magnetic pole 301 rotate at a certain eccentricity to realize the static magnetic field of the electrode chassis 202 to the dynamic magnetic field. Transformation; the magnetic pole fixed shaft 302 is a hollow structure, and the wires connected to the direct AC high-voltage power supply in the electric field generating assembly 200 can be drawn from the inside of the hollow structure.
  • the transmission between the second motor 502 and the electrode disk shaft 215 in this embodiment adopts a belt pulley transmission mode, but the present invention should not be limited to this, and a chain sprocket, gear transmission, etc. can also be used to drive
  • the rotation form of the second motor 502 driving the pole plate shaft is not limited to a complete 360° rotation.
  • the working mode of the second rotation limiter 505 and the first motor 402 can be set to make the pole plate shaft at a preset angle. Rotate within the range.
  • the material of the magnetic pole 301 is neodymium iron boron
  • the magnetic field strength range is 1000GS-3000GS
  • the materials of the parts contacting or adjacent to the magnetic pole 301 are all non-magnetic materials, such as aluminum alloy, stainless steel, plastic, etc. .
  • This embodiment is an embodiment used as a polishing device 700 in the first embodiment, and includes a polishing shaft 701, a clamp 702 for clamping a workpiece, and the electromagnetic coupling device as before.
  • the clamp 702 is connected to the bottom of the polishing shaft 701, and the insulating rib 600
  • the electromagnetic rheological polishing liquid is contained inside, and the bottom surface of the workpiece is arranged in contact with the electromagnetic rheological polishing liquid, as shown in FIG. 9.
  • the fixture 702 is mounted on the lower part of the polishing shaft 701, the upper part of the polishing shaft 701 is connected with the milling machine spindle, the lower surface of the workpiece and the wear-resistant insulating layer 212 are kept level, and the lower surface of the workpiece is adjusted by the milling machine Z-axis up and down movement system
  • the distance between it and the wear-resistant insulating layer 212 is 0.5mm-3mm;
  • the electromagnetic rheological polishing liquid is configured according to the processing object.
  • the electromagnetic rheological polishing liquid includes 70wt% ⁇ 85wt% silicone oil with a viscosity of 50CS ⁇ 500CS, 10wt% ⁇ 30wt% micron Fe3O4 particles, 1wt% ⁇ 5wt% dispersant, 2wt% ⁇ 10wt% of micron-level polishing abrasive particles and a small amount of stabilized additives are mixed and fully stirred and then vibrated by ultrasonic for 10-30 minutes to form an electromagnetic rheological polishing liquid.
  • the electromagnetic rheological polishing liquid evenly on the insulating rib 600 of the polishing equipment, the electrode chassis 202 and the cavity of the wear-resistant insulating layer 212, and start the second motor 502.
  • the magnetic pole 301 is on the second belt and the second pulley 501. Driven by a certain eccentricity to rotate, the static magnetic field of the electrode chassis 202 is transformed into a dynamic magnetic field. Under the action of the dynamic magnetic field, the electro-magnetic rheological polishing liquid forms a flexible polishing pad with real-time abrasive renewal and self-sharpening and shape recovery;
  • the electrode group 201 is provided with AC and DC power of appropriate voltage and frequency through a direct AC high voltage power supply.
  • the adjacent electrodes form a high voltage electric field of 1000kV/mm ⁇ 5000kV/mm on the electrode chassis 202.
  • the electric field and magnetic field are flexible.
  • the coupling effect of the polishing pad further increases the shear stress and viscosity of the flexible polishing pad.
  • the shape of the different electrode groups 20121 can change the removal rate of the polishing pad at different positions, and then can achieve flattening polishing by optimizing the trajectory movement;
  • the speed is 60rpm ⁇ 1000rpm
  • the workpiece and the electromagnetic coupling flexible polishing head form a relative movement, and the surface of the workpiece can be processed efficiently and super smoothly.
  • this embodiment can perform precision optical processing through electromagnetic coupling fields, and can obtain a better polishing effect and a wide range of applications.
  • This embodiment is an electromagnetic rheological performance measuring device 800 using the polishing device 700 of the second embodiment for testing the mechanical properties of the electromagnetic coupling polishing device 700, as shown in FIG. 10, including the polishing device 700 of the second embodiment, rotating The force sensor 801 and the signal transmitter 802, the rotary force sensor 801 is connected to one end of the polished shaft 701, the signal transmitter 802 is connected to the rotary force sensor 801 for signals, the insulating rib 600 is covered with an energy shield 803 .
  • the electromagnetic rheological property measuring device 800 is installed on a precision vertical CNC milling machine, and the workpiece is installed on a fixture 702, which is installed on the lower section of the polishing shaft 701.
  • the upper section of the polishing shaft 701 is connected to the milling machine spindle.
  • the milling machine spindle is rotated to measure the force
  • the sensor 801 is connected, the signal transmitter 802 is fixed on the milling machine, the lower surface of the workpiece and the wear-resistant insulating layer 212 keep the end face level, the energy shielding cover 803 is concentric with the insulating rib 600 and is fixed on the energy shielding cover 803. Between the electric field generating component and the dynamometer;
  • the electromagnetic rheological polishing liquid is configured according to the processing object.
  • the electromagnetic rheological polishing liquid includes 70wt% ⁇ 85wt% silicone oil with a viscosity of 50CS ⁇ 500CS, 10wt% ⁇ 30wt% micron Fe3O4 particles, 1wt% ⁇ 5wt% dispersant, 2wt% ⁇ 10wt% micron-grade polishing abrasive particles and a small amount of stabilized additives, the components are mixed and fully stirred and then ultrasonically vibrated for 10-30 minutes to form an electromagnetic rheological polishing liquid, and the electromagnetic rheological polishing liquid is evenly poured on the insulating block of the polishing equipment Inside the cavity of the edge 600, the electrode chassis 202, and the wear-resistant insulating layer 212;
  • Adjust the magnetic field structure and parameters, electric field structure and parameters, and processing parameters of the milling machine start the milling machine spindle, start the rotating force sensor 801, set the collection time to 30s, 60s, 120s for the positive pressure signal and torque signal, force measurement process
  • the distance between the lower surface of the workpiece and the wear-resistant insulating layer 212 is adjusted to 0.1 mm to 3 mm through the Z-axis up and down movement system of the milling machine.
  • this embodiment can study the influence of the rotation speed of the polishing device 700 on the polishing effect, and provide a research basis for obtaining better surface processing effects of precision optical materials.
  • the electromagnetic rheological performance measuring device 800 using the electromagnetic coupling device of the first embodiment is used to test the rheological performance of the electromagnetic rheological polishing liquid. It includes measuring the rotor 804, the torque meter 805, and as in the first embodiment.
  • the measuring rotor 804 is connected with the torque meter 805.
  • the insulating rib 600 contains electromagnetic rheological polishing liquid. The end of the measuring rotor 804 extends into the electromagnetic rheological polishing liquid.
  • the insulating rib 600 is covered with Energy shield 803.
  • the test device is installed on a precision vertical CNC milling machine.
  • An insulating rib 600 is installed on the upper surface of the electrode chassis 202.
  • the measuring rotor 804 is concentrically arranged in the inner hole of the insulating rib 600.
  • the measuring rotor 804 is connected to the main shaft of the machine tool through a torque meter 805.
  • the shield is concentric with the insulating rib 600 and is fixed between the electric field generating assembly 200 and the torque meter 805, and the first rotation limiter 404 and the second rotation limiter 505 are not installed;
  • the two speeds are the same, it is a static magnetic field.
  • the electromagnetic rheological fluid is subjected to a dynamic magnetic field;
  • the rheological properties of electrorheological polishing liquids of different compositions in electromagnetic coupling fields of different magnetic fields and electric fields can be studied, which provides a research foundation for obtaining better surface processing effects of precision optical materials.

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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

La présente invention concerne le domaine technique du traitement optique précis, et plus particulièrement un dispositif de couplage électromagnétique, un dispositif de polissage le comprenant, et un dispositif de mesure de propriété rhéologique électromagnétique. Le dispositif de couplage électromagnétique comprend une base, un ensemble de génération de champ électrique, un ensemble de génération de champ magnétique, un premier ensemble rotatif, un second ensemble rotatif et une bride isolante disposée au-dessus de l'ensemble de génération de champ électrique, le premier ensemble rotatif étant connecté à l'ensemble de génération de champ électrique ; le second ensemble rotatif étant connecté à l'ensemble de génération de champ magnétique ; l'ensemble de génération de champ électrique et l'ensemble de génération de champ magnétique étant tous deux connectés à la base ; et un champ électrique généré par l'ensemble de génération de champ électrique et un champ magnétique généré par l'ensemble de génération de champ magnétique étant répartis dans la bride isolante. Selon la présente invention, en changeant la structure d'une partie de génération de champ électrique et la structure d'un pôle magnétique, différentes formes de champs de couplage électrique et magnétique sont obtenues, et une base de dispositif est prévue pour la recherche sur un moyen de commande de chaîne rhéologique électromagnétique et un moyen de polissage rhéologique électromagnétique ; et le dispositif est appliqué à une expérience de polissage rhéologique électromagnétique et à un test de propriété rhéologique électromagnétique, de telle sorte que de larges applications pour le polissage rhéologique électromagnétique sont favorisées dans le domaine du traitement de précision optique.
PCT/CN2019/117610 2019-08-29 2019-11-12 Dispositif de couplage électromagnétique, dispositif de polissage le comprenant, et dispositif de mesure de propriété rhéologique électromagnétique WO2021035971A1 (fr)

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