WO2020248245A1 - Monoatomic material, preparation method and use thereof - Google Patents
Monoatomic material, preparation method and use thereof Download PDFInfo
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- WO2020248245A1 WO2020248245A1 PCT/CN2019/091353 CN2019091353W WO2020248245A1 WO 2020248245 A1 WO2020248245 A1 WO 2020248245A1 CN 2019091353 W CN2019091353 W CN 2019091353W WO 2020248245 A1 WO2020248245 A1 WO 2020248245A1
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- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J35/00—Catalysts, in general, characterised by their form or physical properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
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- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
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- C25B1/04—Hydrogen or oxygen by electrolysis of water
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/36—Hydrogen production from non-carbon containing sources, e.g. by water electrolysis
Definitions
- This application belongs to the technical field of monoatomic materials, and relates to a monoatomic material, its preparation method and application.
- monoatomic materials are mainly achieved by thermal diffusion, in-situ pyrolysis, template synthesis or ion exchange methods. These monoatomic materials are limited to the form of powder or mesoporous materials, which limits their application in some fields.
- CN109225257A discloses a supported single-atom catalyst and its preparation method.
- the catalyst is composed of monodisperse metal atoms uniformly supported on the surface of the nano-substrate material.
- the preparation method includes: adopting a three-electrode system for electrochemical deposition in an electrolyte solution containing metal salts, using a glassy carbon electrode loaded with nano-substrate material as a working electrode, a graphite rod as a counter electrode, and a silver/silver chloride electrode As a reference electrode, linear voltammetric scanning is performed to make metal atoms monodisperse and uniformly deposit on the nano-substrate material to obtain the supported single-atom catalyst.
- CN109126774A discloses an ultra-highly dispersed supported monoatom noble metal catalyst and a preparation method thereof.
- the preparation method includes: dissolving the metal precursor in water or ethanol, immersing the obtained solution on the carrier, evaporating the solvent in a water bath, drying in an oven, roasting under N protection, or reduction in an H atmosphere; CO and pumped
- the halogenated alkane is preheated, vaporized and mixed, and then enters the tubular reactor equipped with the roasted or reduced granular or powdered catalyst.
- the catalyst is first raised to the treatment temperature under the protection of the N atmosphere, and then switched to a mixed gas of CO and halogenated alkane After the treatment, the N protection is reduced to room temperature to obtain a supported monoatomic noble metal catalyst.
- This application prepares monoatomic materials by applying plasma treatment to the precursors.
- the method is efficient and universal. It can realize the controllable preparation of monoatomic materials and the high-load preparation of monoatoms, showing good application prospects.
- One of the objectives of this application is to provide a method for preparing monoatomic materials, the method comprising the following steps:
- the precursor is processed by plasma to obtain a monoatomic material, and the elements in the monoatomic material include metal elements.
- This application creatively proposes the use of plasma to prepare monoatomic materials containing metal elements, which is suitable for different forms of load substrates and has universal applicability to different metal elements.
- the method of this application is applicable to the preparation of monoatomic materials of all metal elements. , Especially can be used to realize the preparation of two or more different metal element monoatomic materials. In addition, this method has the advantage of being fast and simple.
- This application realizes the controllable preparation of a series of monoatomic materials by controlling the gas flow rate, reaction time and temperature of the protective atmosphere introduced.
- the precursor includes any one or a combination of at least two of metal oxides, metal chalcogenides, metal phosphides, metal halides, and metal carbides.
- the metal element in the precursor includes any one or a combination of at least two of molybdenum, tungsten, platinum, indium, iron, niobium, gold, cobalt, nickel, manganese, chromium and bismuth.
- the metal elements in the precursors described in this application include all main group metal elements and sub-group metal elements, including but not limited to molybdenum, tungsten, platinum, indium, iron, niobium, gold, cobalt, nickel, manganese, chromium and bismuth Any one or a combination of at least two of them.
- the morphology of the precursor includes any one or a combination of at least two of bulk material, powder material, thin film material and mesoporous material.
- the process, the plasma processing of the precursor, the degree of vacuum of the reaction chamber is 10 -9 mbar ⁇ 10 2 mbar, optionally 10 -2 ⁇ 10 2 mbar, for example 10 -8 mbar, 10 - 7 mbar, 10 -6 mbar, 10 -5 mbar, 10 -4 mbar, 10 -3 mbar, 10 -2 mbar, 10 -1 mbar, 10 0 mbar, 1.5mbar or the like 10mbar.
- the reaction temperature is -100°C to 1500°C, for example -80°C, -60°C, -50°C, -20°C, 0°C, 20°C, 30°C , 50°C, 60°C, 80°C, 100°C, 200°C, 300°C, 400°C, 500°C, 600°C, 700°C, 800°C, 1000°C or 1200°C etc.
- the metal element in the precursor includes molybdenum and/or tungsten
- the reaction temperature is ⁇ 200°C, such as -80°C, -60°C, -50°C, -20°C, 0°C, 20°C, 30°C, 50°C, 60°C, 80°C, 100°C, 120°C, 130°C, 150°C, 160°C or 180°C etc.
- the reaction temperature is ⁇ 200°C, and if the temperature is greater than 200°C, agglomeration of single atoms will result.
- the metal element in the precursor includes iron and/or bismuth
- the reaction temperature is ⁇ 150°C, for example -80°C, -60°C, -50°C, -20°C, 0°C, 20°C, 30°C, 50°C, 60°C, 80°C, 100°C, 120°C or 130°C etc.
- the reaction temperature is less than or equal to 150°C, and if the temperature is greater than 150°C, agglomeration of single atoms will result.
- the reaction time is 2s-20h, optionally 5s-60min, optionally 40s-240s, such as 5s, 10s, 20s, 50s, 60s, 80s, 100s , 120s, 150s, 180s, 200s, 220s, 240s, 280s, 300s, 400s, 500s, 600s, 800s, 1000s, 1500s, 2000s, 3000s, 1h, 2h, 5h, 6h, 8h, 10h, 12h, 15h or 18h Wait.
- 5s, 10s, 20s, 50s, 60s, 80s 100s , 120s, 150s, 180s, 200s, 220s, 240s, 280s, 300s, 400s, 500s, 600s, 800s, 1000s, 1500s, 2000s, 3000s, 1h, 2h, 5h, 6h, 8h, 10h, 12h, 15h or 18h Wait.
- the preparation process of the plasma includes: exciting gas to generate plasma.
- the vacuum degree of the reaction chamber is 10 -9 mbar to 10 2 mbar, optionally 10 -2 to 10 2 mbar, such as 10 -8 mbar, 10 -7 mbar, 10 -6 mbar, 10 -5 mbar, 10 -4 mbar, 10 -3 mbar, 10 -2 mbar, 10 -1 mbar, 10 0 mbar, 1.5mbar or the like 10mbar.
- the gas used includes any one or a combination of at least two of air, oxygen, hydrogen, argon, methane, nitrogen, and ammonia.
- the gas flow rate is 5 sccm to 1000 sccm, for example, 10 sccm, 20 sccm, 50 sccm, 80 sccm, 100 sccm, 200 sccm, 300 sccm, 400 sccm, 500 sccm, 600 sccm, 700 sccm, 800 sccm, 900 sccm, etc.
- the time for introducing the gas is 1 min to 60 min, for example, 5 min, 8 min, 10 min, 15 min, 20 min, 25 min, 30 min, 35 min, 40 min, 50 min or 55 min.
- the AC power frequency used to excite the plasma is 50 Hz to 100 MHz, optionally 10 kHz to 200 kHz, such as 100 Hz, 200 Hz, 500 Hz, 1 kHz, 2 kHz, 5 kHz, 10 kHz, 20 kHz, 50 kHz, 80 kHz, 100 kHz, 150 kHz , 200kHz, 500kHz, 1MHz, 5MHz, 10MHz, 20MHz, 50MHz, 70MHz or 80MHz etc.
- the DC discharge voltage used to excite the plasma is 1V-1000V, for example, 5V, 10V, 20V, 50V, 80V, 100V, 200V, 400V, 500V, 600V or 800V.
- the preparation method of a monoatomic material described in this application includes the following steps:
- the plasma is excited by an AC power source with a frequency of 10 kHz to 200 kHz, the precursor is treated by plasma, and the reaction temperature is controlled to be -100° C. to 1500° C., and the processing time is 40 s to 240 s to obtain monoatomic materials.
- the second objective of this application is to provide a monoatomic material, which is obtained by the preparation method described in one of the objectives.
- the element type in the monoatomic material is ⁇ 1, may be 1-10, may be 1-5, and may be 1-3, such as 2, 3, 4, 5, 6, 7, 8 , 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19 or 20 etc.
- the preparation method of the present application can realize the preparation of a single atom of a single element and a single atom of multiple elements.
- the monoatomic material includes a supported type and/or a lattice embedded type.
- the supported monoatomic material of the present application is a metal single atom supported on a carrier; the lattice embedded monoatomic material of the present application is a metal single atom embedded in the carrier.
- the third object of the application is to provide a use of the monoatomic material as described in the second object, which is used for any one or a combination of at least two of the hydrogen evolution electrocatalyst, photodetector and electronic device .
- the fourth object of the present application is to provide a hydrogen evolution electrocatalyst, which includes the monoatomic material described in the second object.
- the hydrogen evolution electrocatalyst prepared in this application can be used to catalyze the hydrogen evolution of acidic and alkaline electrolysis of water at the same time, and the current density during hydrogen production can reach 2A/cm 2 , so that it can better adapt to the industrial level of high current density electrolysis of water to produce hydrogen.
- the hydrogen evolution electrocatalyst catalyzes the hydrogen evolution of acidic electrolyzed water, and the hydrogen production current density is 0.001A/cm 2 ⁇ 2A/cm 2 , for example, 0.01A/cm 2 , 0.05A/cm 2 , 0.1A/cm 2 , 0.2A/cm 2 , 0.3A/cm 2 , 0.4A/cm 2 , 0.5A/cm 2 , 0.6A/cm 2 , 0.7A/cm 2 , 0.8A/cm 2 or 0.9A/cm 2, etc.
- the hydrogen evolution electrocatalyst catalyzes the hydrogen evolution of acidic electrolyzed water
- the acidic solution used is 0.5-1 mol/L sulfuric acid
- the hydrogen evolution electrocatalyst has a hydrogen production current density of 0.001 A/cm 2 to 0.4 A/cm 2 .
- the potential is 200mV ⁇ 270mV; the sulfuric acid concentration is 0.6mol/L, 0.7mol/L, 0.8mol/L or 0.9mol/L, etc.; the hydrogen production current density is, for example, 0.01A/cm 2 , 0.05A/cm 2 , 0.1A/cm 2 , 0.15A/cm 2 , 0.2A/cm 2 , 0.25A/cm 2 , 0.3A/cm 2 or 0.35A/cm 2, etc.; the overpotential is for example 210mV, 220mV, 230mV, 240mV , 250mV or 260mV, etc.
- the hydrogen evolution electrocatalyst catalyzes the hydrogen evolution of alkaline water electrolysis, and the hydrogen production current density is 0.001A/cm 2 ⁇ 2A/cm 2 , for example, 0.01A/cm 2 , 0.05A/cm 2 , 0.1A/cm 2 , 0.2A/cm 2 , 0.3A/cm 2 , 0.4A/cm 2 , 0.5A/cm 2 , 0.6A/cm 2 , 0.7A/cm 2 , 0.8A/cm 2 or 0.9A/cm 2, etc.
- the hydrogen evolution electrocatalyst catalyzes the hydrogen evolution of alkaline electrolyzed water
- the adopted alkaline solution includes potassium hydroxide and/or sodium hydroxide.
- the alkaline solution is 0.5 to 1 mol/L potassium hydroxide aqueous solution
- the hydrogen production current density is 0.001 A/cm 2 to 0.4 A/cm 2
- the overpotential is 200 mV to 300 mV.
- the concentration of the alkaline solution is 0.6 mol/L, 0.7 mol/L, 0.8 mol/L or 0.9 mol/L, etc.
- the hydrogen production current density is, for example, 0.01 A/cm 2 , 0.05 A/cm 2 , 0.1 A/ cm 2 , 0.15A/cm 2 , 0.2A/cm 2 , 0.25A/cm 2 , 0.3A/cm 2 or 0.35A/cm 2, etc.
- the overpotential is for example 210mV, 220mV, 230mV, 240mV, 250mV, 260mV , 270mV, 280mV or 290mV, etc.
- This application creatively proposes the use of plasma to prepare metal element-containing monoatomic materials, which is suitable for different forms of load substrates and has universal applicability to different metal elements.
- the method of this application can be applied to all metal elements.
- the preparation of atomic materials is particularly applicable to the preparation of two or more different metal element monoatomic materials.
- the method has the advantages of rapidness and simplicity.
- This application realizes the controllable preparation of a series of monoatomic materials by controlling the gas type and flow rate, reaction time and temperature of the introduced reaction atmosphere.
- the hydrogen evolution electrocatalyst prepared in this application can be used to catalyze the hydrogen evolution of acidic and alkaline electrolysis of water at the same time, and the current density during hydrogen production can reach 2A/cm 2 , so as to better adapt to the industrial level of high current density electrolysis of aquatic products hydrogen.
- FIG. 1 is a schematic diagram of a method for preparing monoatomic materials using plasma technology in this application;
- Example 2 is a transmission electron microscope image of the molybdenum monoatomic material prepared in Example 1 of this application;
- FIG. 3 is a transmission electron microscope image of a type-molybdenum monoatomic material prepared in Example 1 of this application;
- Fig. 4 is a simulation diagram of a type-molybdenum monoatomic material prepared in Example 1 of this application;
- Fig. 5 is a plan view of the intensity of a single molybdenum atom of type 1 prepared in Example 1 of the application;
- Fig. 6 is a transmission electron microscope image of the type di-molybdenum monoatomic material prepared in Example 1 of the application;
- Fig. 7 is a simulation diagram of the type di-molybdenum monoatomic material prepared in Example 1 of the application;
- Fig. 8 is a plan view of the strength of the type di-molybdenum single atom prepared in Example 1 of the application;
- Example 10 is a transmission electron microscope image of Type 1 and Type 2 tungsten monoatomic materials prepared in Example 4 of this application;
- Example 11 is a simulation diagram of Type 1 and Type 2 tungsten single-atom materials prepared in Example 4 of this application;
- Example 13 is a plan view of the strength of a single atom of type two tungsten prepared in Example 4 of the application;
- Fig. 14 is a current density-overpotential curve diagram of the hydrogen evolution reaction of the monoatomic material prepared in Example 1 of the application in a 0.5 mol/L sulfuric acid aqueous solution;
- FIG. 15 is a current density-overpotential curve diagram of the hydrogen evolution reaction of the monoatomic material prepared in Example 1 of the application in a 1.0 mol/L potassium hydroxide aqueous solution.
- FIG. 1 The schematic diagram of the method for preparing monoatomic materials by plasma technology in the examples of this application is shown in FIG. 1, and the precursor in the figure is the precursor described in this application. It should be understood by those skilled in the art that the described embodiments are only to help understand the application and should not be regarded as specific limitations to the application.
- a preparation method of monoatomic material includes the following steps:
- Figure 2 is an atomically resolved transmission electron microscope image of the molybdenum monoatomic material.
- Figures 3 and 4 are respectively a transmission electron microscope image of the molybdenum monoatomic material of type one and its simulation diagram. It can be seen from the figure that the obtained molybdenum The single-atom load is high and the distribution is uniform;
- Figure 5 is a plan view of the intensity of a single molybdenum atom of type one;
- the transmission electron microscope image of a single-atom molybdenum atom of type two and its simulation are shown in Figure 6 and Figure 7, respectively, and
- Figure 8 It is a plan view of the strength of a type of molybdenum monoatom. It can be seen from Figures 2-8 that the prepared monoatomic material is a molybdenum monoatomic material supported on a molybdenum disulfide precursor.
- the molybdenum monoatomic material obtained in this example was used as a catalyst for the hydrogen evolution reaction of electrolyzed water.
- the current density of the molybdenum monoatomic material in the 0.5mol/L sulfuric acid aqueous solution and 1.0mol/L potassium hydroxide aqueous solution respectively The overpotential curves are shown in Figure 14 and Figure 15, respectively.
- the molybdenum single atom/molybdenum disulfide composite system in the figure is the molybdenum single atom supported on the molybdenum disulfide precursor as a catalyst in this example.
- the platinum in the figure is commercial platinum
- the catalyst, molybdenum disulfide is a commercial molybdenum disulfide catalyst. It can be seen from Figure 14 and Figure 15 that the obtained monoatomic material has good activity when used as an electrocatalyst for hydrogen evolution in acidic or alkaline solutions.
- the difference from Embodiment 1 is that the plasma treatment time in step (3) is 160s.
- step (3) an AC power source with a frequency of 20 kHz is used to excite the plasma, the precursor is treated with plasma, the reaction temperature is controlled to 200° C., and the treatment time is 240 s to obtain a molybdenum monoatomic material.
- step (1) the monoatomic layer molybdenum disulfide precursor is replaced with a monoatomic layer tungsten disulfide precursor to obtain a tungsten monoatomic material.
- Figure 9 is an atomically resolved transmission electron microscope image of the tungsten single-atom material. It can be seen from the figure that the prepared tungsten single-atom has a high loading and uniform distribution; Figures 10 and 11 are type one (the figure is Tungsten single atom 1) and type 2 (tungsten single atom 2 in the figure) of tungsten single atom transmission electron microscope images and their simulation images; Figures 12 and 13 are type 1 (tungsten single atom 1 in the figure) and type 2 respectively (The figure shows the tungsten single atom 2) the plan view of the tungsten single-atom strength; comprehensively shown in Figures 9-13, the prepared single-atom material is a tungsten single-atom material supported on a tungsten disulfide precursor, and There are two types of location: Type One and Type Two.
- a preparation method of monoatomic material includes the following steps:
- a preparation method of monoatomic material includes the following steps:
- the plasma is excited by an AC power source with a frequency of 22 kHz, the precursor is treated by plasma, the reaction temperature is controlled to 50° C., and the treatment time is 240 s to obtain a molybdenum monoatomic material.
- a preparation method of monoatomic material includes the following steps:
- a preparation method of monoatomic material includes the following steps:
- V 0.1 Mo 0.9 S 2 vanadium disulfide-molybdenum alloy
- the plasma is excited by an AC power source with a frequency of 100kHz, the precursor is treated by plasma, the reaction temperature is controlled at 100°C, and the treatment time is 160s, to obtain a monoatomic material of molybdenum and vanadium, namely molybdenum monoatom and Vanadium single atom.
- the plasma is excited by an AC power source with a frequency of 22kHz, and the precursor is treated by plasma.
- the reaction temperature is controlled to 120°C and the treatment time is 80s to obtain monoatomic materials of tungsten and niobium. Niobium single atom.
- a preparation method of monoatomic material includes the following steps:
- the indium selenide precursor in the reaction chamber, the reaction chamber is evacuated to a vacuum of the reaction chamber is 10 0 mbar;
- a preparation method of monoatomic material includes the following steps:
- Example 1 To Load (wt%) Example 1 2 Example 2 5 Example 3 1 Example 4 2 Example 5 4 Example 6 2 Example 7 2 Example 8 4 Example 9 3 Example 10 5 Example 11 5 Example 12 4
- the monoatomic material obtained in this application has a relatively high loading of 1 to 5 wt%, and the preparation of two or more different metal element monoatomic materials can be achieved.
Abstract
Description
To | 载量(wt%)Load (wt%) |
实施例1Example 1 | 22 |
实施例2Example 2 | 55 |
实施例3Example 3 | 11 |
实施例4Example 4 | 22 |
实施例5Example 5 | 44 |
实施例6Example 6 | 22 |
实施例7Example 7 | 22 |
实施例8Example 8 | 44 |
实施例9Example 9 | 33 |
实施例10Example 10 | 55 |
实施例11Example 11 | 55 |
实施例12Example 12 | 44 |
Claims (12)
- 一种单原子材料的制备方法,其中,所述方法包括如下步骤:A method for preparing monoatomic materials, wherein the method includes the following steps:采用等离子体处理前驱物,得到单原子材料,所述单原子材料中的元素包含金属元素。The precursor is processed by plasma to obtain a monoatomic material, and the elements in the monoatomic material include metal elements.
- 如权利要求1所述的制备方法,其中,所述前驱物包括金属氧化物、金属硫族化合物、金属磷化物、金属卤化物和金属碳化物中的任意一种或至少两种的组合;The preparation method according to claim 1, wherein the precursor comprises any one or a combination of at least two of metal oxides, metal chalcogenides, metal phosphides, metal halides and metal carbides;可选地,所述前驱物中的金属元素包括钼、钨、铂、铟、铁、铌、金、钴、镍、锰、铬和铋中的任意一种或至少两种的组合;Optionally, the metal element in the precursor includes any one or a combination of at least two of molybdenum, tungsten, platinum, indium, iron, niobium, gold, cobalt, nickel, manganese, chromium and bismuth;可选地,所述前驱物的形貌包括块体材料、粉末材料、薄膜材料和介孔材料中的任意一种或至少两种的组合。Optionally, the morphology of the precursor includes any one or a combination of at least two of bulk material, powder material, thin film material and mesoporous material.
- 如权利要求1或2所述的制备方法,其中,所述等离子体处理前驱物的过程中,反应腔室的真空度为10 -9mbar~10 2mbar,可选为10 -2~10 2mbar; The preparation method according to claim 1 or 2, wherein, during the plasma treatment of the precursor, the vacuum degree of the reaction chamber is 10 -9 mbar to 10 2 mbar, optionally 10 -2 to 10 2 mbar;可选地,所述等离子体处理前驱物的过程中,反应温度为-100℃~1500℃;Optionally, during the plasma treatment of the precursor, the reaction temperature is -100°C to 1500°C;可选地,所述前驱物中的金属元素包括钼和/或钨,所述反应温度≤200℃;Optionally, the metal element in the precursor includes molybdenum and/or tungsten, and the reaction temperature is ≤200°C;可选地,所述前驱物中的金属元素包括铁和/或铋,所述反应温度≤150℃;Optionally, the metal element in the precursor includes iron and/or bismuth, and the reaction temperature is ≤150°C;可选地,所述等离子体处理前驱物的过程中,反应时间为2s~20h,可选为5s~60min,可选为40s~240s。Optionally, during the plasma treatment of the precursor, the reaction time is 2 s to 20 h, optionally 5 s to 60 min, and optionally 40 s to 240 s.
- 权利要求1-3之一所述的制备方法,其中,所述等离子体的制备过程包括:激发气体,生成等离子体;The preparation method according to any one of claims 1 to 3, wherein the preparation process of the plasma comprises: exciting gas to generate plasma;可选地,所述等离子体制备过程中,反应腔室的真空度为10 -9mbar~10 2mbar,可选为10 -2~10 2mbar; Optionally, during the plasma preparation process, the vacuum degree of the reaction chamber is 10 -9 mbar to 10 2 mbar, and may be 10 -2 to 10 2 mbar;可选地,所述等离子体制备过程中,采用的气体包括空气、氧气、氢气、 氩气、甲烷、氮气和氨气中的任意一种或至少两种的组合;Optionally, in the plasma preparation process, the gas used includes any one or a combination of at least two of air, oxygen, hydrogen, argon, methane, nitrogen, and ammonia;可选地,所述等离子体的制备过程中,通入气体流速为5sccm~1000sccm;Optionally, during the preparation of the plasma, the flow rate of the introduced gas is 5 sccm to 1000 sccm;可选地,所述通入气体的时间为1min~60min;Optionally, the time for introducing the gas is 1 min to 60 min;可选地,所述激发等离子体采用的交流电源频率为50Hz~100MHz,可选为10kHz~200kHz;Optionally, the AC power frequency used to excite the plasma is 50 Hz-100 MHz, and may be 10 kHz-200 kHz;可选地,所述激发等离子体采用的直流放电电压为1V~1000V。Optionally, the DC discharge voltage used to excite the plasma is 1V˜1000V.
- 权利要求1-4之一所述的制备方法,其中,所述制备方法包括如下步骤:The preparation method of any one of claims 1-4, wherein the preparation method comprises the following steps:(1)将前驱物放在反应室内,将反应室抽真空至反应腔室的真空度为10 -2~10 2mbar; (1) Put the precursor in the reaction chamber, and evacuate the reaction chamber until the vacuum degree of the reaction chamber is 10 -2 ~10 2 mbar;(2)以5sccm~1000sccm流速通入气体1min~60min;(2) Inject gas at a flow rate of 5sccm~1000sccm for 1min~60min;(3)采用频率为10kHz~200kHz的交流电源激发等离子体,采用等离子体处理前驱物,控制反应温度为-100℃~1500℃,处理时间为40s~240s,得到单原子材料。(3) The plasma is excited by an AC power source with a frequency of 10 kHz to 200 kHz, the precursor is treated by plasma, and the reaction temperature is controlled to be -100° C. to 1500° C., and the processing time is 40 s to 240 s to obtain monoatomic materials.
- 一种单原子材料,其中,所述单原子材料通过权利要求1~5之一所述制备方法得到。A monoatomic material, wherein the monoatomic material is obtained by the preparation method of any one of claims 1 to 5.
- 如权利要求6所述的单原子材料,其中,所述单原子材料中元素种类≥1,可选为1~10,可选为1~5,可选为1~3。7. The monoatomic material of claim 6, wherein the element type in the monoatomic material is ≥1, optionally 1-10, optionally 1-5, and optionally 1-3.
- 如权利要求6或7所述的单原子材料,其中,所述单原子材料包括负载型和/或晶格嵌入型。The monoatomic material according to claim 6 or 7, wherein the monoatomic material includes a supported type and/or a lattice embedded type.
- 一种如权利要求6-8任一项所述单原子材料的用途,其中,所述单原子材料用于析氢电催化剂、光探测器和电子器件中的任意一种或至少两种的组合。A use of the monoatomic material according to any one of claims 6-8, wherein the monoatomic material is used for any one or a combination of at least two of hydrogen evolution electrocatalysts, photodetectors and electronic devices.
- 一种析氢电催化剂,其中,所述析氢电催化剂包括权利要求6-8任一项 所述的单原子材料。A hydrogen evolution electrocatalyst, wherein the hydrogen evolution electrocatalyst comprises the monoatomic material according to any one of claims 6-8.
- 如权利要求10所述的析氢电催化剂,其中,所述析氢电催化剂催化酸性电解水析氢,产氢电流密度为0.001A/cm 2~2A/cm 2; 10. The hydrogen evolution electrocatalyst according to claim 10, wherein the hydrogen evolution electrocatalyst catalyzes the hydrogen evolution of acidic electrolyzed water, and the hydrogen production current density is 0.001 A/cm 2 -2A/cm 2 ;可选地,所述析氢电催化剂催化酸性电解水析氢,采用的酸性溶液为0.5~1mol/L硫酸,所述析氢电催化剂产氢电流密度为0.001A/cm 2~0.4A/cm 2,过电位为200mV~270mV。 Optionally, the hydrogen evolution electrocatalyst catalyzes the hydrogen evolution of acidic electrolyzed water, the acidic solution used is 0.5-1 mol/L sulfuric acid, and the hydrogen evolution electrocatalyst has a hydrogen production current density of 0.001 A/cm 2 to 0.4 A/cm 2 . The potential is 200mV~270mV.
- 如权利要求10所述的析氢电催化剂,其中,所述析氢电催化剂催化碱性电解水析氢,产氢电流密度为0.001A/cm 2~2A/cm 2; 10. The hydrogen evolution electrocatalyst according to claim 10, wherein the hydrogen evolution electrocatalyst catalyzes the hydrogen evolution of alkaline water electrolysis, and the hydrogen production current density is 0.001 A/cm 2 ~2A/cm 2 ;可选地,所述析氢电催化剂催化碱性电解水析氢,采用的碱性溶液包括氢氧化钾和/或氢氧化钠;Optionally, the hydrogen evolution electrocatalyst catalyzes the alkaline electrolysis of water for hydrogen evolution, and the used alkaline solution includes potassium hydroxide and/or sodium hydroxide;可选地,所述碱性溶液为0.5~1mol/L氢氧化钾水溶液,产氢电流密度为0.001A/cm 2~0.4A/cm 2,过电位为200mV~300mV。 Optionally, the alkaline solution is 0.5 to 1 mol/L potassium hydroxide aqueous solution, the hydrogen production current density is 0.001 A/cm 2 to 0.4 A/cm 2 , and the overpotential is 200 mV to 300 mV.
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