WO2020224166A1 - Electrical double-layer capacitive flexible tactile sensor and manufacturing method therefor - Google Patents
Electrical double-layer capacitive flexible tactile sensor and manufacturing method therefor Download PDFInfo
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- WO2020224166A1 WO2020224166A1 PCT/CN2019/107461 CN2019107461W WO2020224166A1 WO 2020224166 A1 WO2020224166 A1 WO 2020224166A1 CN 2019107461 W CN2019107461 W CN 2019107461W WO 2020224166 A1 WO2020224166 A1 WO 2020224166A1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/13—Energy storage using capacitors
Definitions
- This application relates to the technical field of array sensors, for example, to an electric double layer capacitive flexible tactile sensor and a manufacturing method thereof.
- the pressure sensor in the related technology has the characteristics of rigidity and cannot be folded, and is not suitable for measurement in flexible occasions; while the pressure sensor that has developed rapidly in recent years has solved the flexibility problem to a certain extent, but the processing is complicated and cannot be applied in a large area; such as patent CN 105738011 A discloses a flexible tactile sensor.
- the sensor has the characteristics of good stability, high sensitivity, and static and dynamic signal detection capabilities, it conducts pressure transmission through hydraulic pressure, and the internal pressure is evenly distributed, but it cannot be compared. High resolution, at the same time, its processing technology is complex, it cannot be processed in large quantities and large areas, and the sensor has a large thickness, which is not light and easy to fold.
- Xiaofeng Yang [2] et al. proposed a microfluidic supercapacitance pressure sensor, which contains a filter paper filled with ionic liquid.
- the top and bottom are coated with two layers of indium tin oxide polyethylene terephthalate (ITO- PET) film, when pressure is applied, the deformation of the top ITO-PET film causes the capacitance between them to change.
- the sensor does not contact the upper electrode with the middle layer when no external force is applied. When an external force is applied, the upper electrode layer is in contact with the middle layer.
- the classic film bending theory is applied, and the bending of the upper electrode is used.
- This method requires strict control of the distance between the upper electrode and the intermediate layer, which requires higher processing requirements.
- this method uses liquid substances, which are not easy to encapsulate, easy to leak, and cannot be handled in a large area.
- This application provides an electric double layer capacitive flexible tactile sensor.
- the sensor adopts the principle of an array electric double layer, which can realize a high-density array of capacitor units while ensuring flexibility, thereby obtaining higher resolution and signal-to-noise ratio.
- the embodiment of the application provides an electric double layer capacitive flexible tactile sensor.
- the sensor is an array sensor and includes an upper electrode layer, a lower electrode layer, and an ionic fiber layer arranged between the upper electrode layer and the lower electrode layer.
- the ion fiber layer is a micro fiber membrane coated with ion gel, and the upper surface and the lower surface of the ion fiber layer are respectively close to the lower surface of the upper electrode layer and the upper surface of the lower electrode layer.
- the embodiment of the application also provides a manufacturing method of an electric double layer capacitive flexible tactile sensor, including:
- ionic gel liquid It is made into ionic gel liquid.
- the flexible polymer fiber is soaked in the ionic gel mixture and drained to form a solid ionic fiber, and there are pores in the fiber;
- the screen printing of the electrode gap pattern is made by screen printing Print the sticker on the gap between every two parallel electrodes in the upper electrode layer and the lower electrode layer, and place the parallel electrodes of the upper electrode layer and the parallel electrodes of the lower electrode layer perpendicular to each other, and the upper electrode layer and the lower electrode layer Attach them to both sides of the ion fiber layer, so that the parallel electrodes of the upper electrode layer and the parallel electrodes of the lower electrode layer are in contact with the ion fibers to complete the package;
- each parallel electrode on the upper electrode layer and each parallel electrode on the lower electrode layer out of the electrode terminal, and fixedly connect a flexible flat cable with the same width as the electrode terminal to the corresponding electrode terminal of the flexible flat cable.
- FIG. 1 is a schematic structural diagram of a sensor provided by an embodiment of the present application.
- Figure 2 is a schematic structural diagram of another sensor provided by an embodiment of the present application.
- FIG. 3 is a schematic diagram of an electrode layer of a sensor provided by an embodiment of the present application.
- FIG. 4 is a schematic diagram of the principle of an electric double layer capacitive flexible tactile sensor provided by an embodiment of the present application.
- FIG. 5 is the pressure-volume relationship of two thin ion-gel microfiber sheets under a small range pressure (0kPa-50kPa) of the sensor provided in the embodiment of the present application;
- Fig. 6 is the pressure-volume relationship of two-layer thick ion-gel microfiber sheets under a large range pressure (0kPa-1200kPa) of the sensor provided by the embodiment of the present application;
- FIG. 7 is a flowchart of a manufacturing method of an electric double layer capacitive flexible tactile sensor provided by an embodiment of the present application.
- the present application is an electric double layer capacitive flexible tactile sensor.
- the sensor includes an upper electrode layer, a lower electrode layer, and an ionic fiber layer arranged between the upper electrode layer and the lower electrode layer.
- the ionic fiber layer is an ionic gel package.
- the upper surface and the lower surface of the ion fiber layer are respectively close to the lower surface of the upper electrode layer and the upper surface of the lower electrode layer.
- m strip-shaped parallel electrodes 6 and electrode terminals 7 are provided on the upper electrode layer, and n strip-shaped parallel electrodes 6 and electrode terminals 7 are provided on the lower electrode layer. Both m and n are positive. Integer, the number of parallel electrodes in the upper electrode layer and the lower electrode layer can have different values, that is, the values of m and n can be different, and the specific values can be designed and changed according to requirements, and the parallel electrodes on the upper electrode and the lower electrode layer are spatially Intersect perpendicularly; each part where the parallel electrodes of the upper electrode layer and the lower electrode layer intersect constitutes a capacitor unit, that is, the flexible pressure sensor is formed by an array of m*n capacitor units, and each capacitor unit is a small Sensor unit; each parallel electrode leads out the electrode terminal 7 on the corresponding electrode layer, the electrode terminal 7 is connected to the flexible flat wire with the same width as the electrode terminal 7, and each flexible flat wire corresponds to the electrode The terminal 7 is fixedly connected, for example, all the flexible
- the ionic gel-coated microfiber membrane uses a non-woven fabric as a matrix, and a layer of ionic gel is coated on the surface of the non-woven fabric.
- the ionic gel is H 3 PO 4 -PVA or 1-butyl-3- Methylimidazole bis(trifluoromethyl)imine (if it is imine, it also needs to be drained after soaking the non-woven fabric), the conductivity of the ionic fiber layer is relatively high, the resistance is low, and the ion concentration is relatively high High, and when pressure is applied, the fiber structure of the non-woven fabric itself can change the contact area between the upper and lower electrode layers and the microfiber membrane by the increase in the internal contact area caused by the pressing, which does not require the manufacture of air Cavity, simplify the structure and processing technology.
- the principle of the electric double layer is when the electrode material is in contact with the two ends of the solid electrolyte. Under the action of an external power source, the internal surface charge of the electrode will adsorb ions from the electrolyte. These ions form an interface on the electrolyte side of the electrode/electrolyte interface with the same amount of charge and the opposite sign of the charge on the inner surface of the electrode. Due to the potential difference at the electrode/electrolyte interface, the charges of the two layers cannot cross the boundary and neutralize each other, thus forming a structured stable electric double layer, resulting in an electric double layer capacitance.
- an ionic gel mixture such as polyvinyl alcohol-phosphate ion gel
- high polymer flexible fibers such as non-woven fabrics
- solid ionic fibers that is, ionic gel wrapped fibers.
- the ionic fiber layer is sandwiched between the two electrode materials. Under the action of external pressure, the ionic fiber layer is compressed and deformed.
- the contact area between the nanofiber layer and the conductive fabric (upper and lower electrode layers) will be due to the classic fiber assembly compression model
- the predicted structural deformation increases, causing an increase in capacitance.
- the change in capacitance can be converted into an electrical signal and transmitted to the subsequent processing circuit to obtain the magnitude of the pressure.
- a microelectrode layer (upper electrode layer or lower electrode layer) is prepared on a flexible polyurethane (PU) film using a screen-printed conductive ink containing nano-silver, and the ion gel (such as H 3 PO 4 -PVA) is coated
- An intermediate layer is prepared on a microfiber sheet (e.g. polypropylene).
- the upper and lower electrodes are assembled into a sandwich ion gel membrane to form an electrostatic double layer capacitor (EDLCs) (a kind of super capacitor).
- EDLCs electrostatic double layer capacitor
- the assembled pressure sensor is connected to the capacitance measuring circuit to realize high-density pressure mapping.
- the screen printing in this application can be manual printing or machine printing.
- the pressure tactile sensor is manufactured by the screen printing process, which can realize the large-area mass reference of the sensor and a higher resolution.
- the sensor includes upper The buffer layer (not shown), the upper electrode layer 2, the ion fiber layer 4, the lower electrode layer 5 and the lower buffer layer (not shown), the upper electrode layer 2 and the lower electrode layer 5 are provided with m strips parallel The electrodes and terminals, and the parallel electrodes on the upper electrode layer 2 and the lower electrode layer 5 intersect vertically in space; in this way, the intersection of the parallel electrodes of each upper electrode layer 2 and the lower electrode layer 5 constitutes a capacitor unit, That is, the flexible pressure sensor is formed by an array of m*m capacitor units, each capacitor unit is a small sensor unit.
- the electrode material on the upper electrode layer 2 and the lower electrode layer 5 is silver
- the ionic fiber layer 4 is obtained by impregnating non-woven fabric with ionic gel prepared from polyvinyl alcohol-phosphoric acid.
- the lower buffer layer and the upper buffer layer are both flexible polyurethane (PU) film buffer layer 1.
- the embodiment of the present application also provides a method for manufacturing an electric double layer capacitive flexible tactile sensor, as shown in FIG. 7, including:
- the conductive ink contains nano silver.
- the preparation of the ionic fiber layer is made into an ionic gel mixture, the high polymer flexible fibers are soaked in the ionic gel mixture and drained to form solid ionic fibers, that is, the ionic gel wraps the fibers, and there are inside the fibers Pores.
- polyvinyl alcohol (PVA), water and phosphoric acid (H 3 PO 4 ) are mixed in a mass ratio of 1:9:1, heated to 90°C, and magnetically stirred for half an hour to two hours, Until the mixture becomes clear and transparent, cool to room temperature naturally to obtain an ionic gel mixture.
- the polymer flexible fiber (such as non-woven fabric) is fully immersed in the ionic gel mixture and then taken out and drained. The immersion time is In 30 seconds, ionic fiber is obtained.
- S30 the packaging of the sensor.
- the parallel electrodes are placed perpendicular to each other, and the upper electrode layer and the lower electrode layer are respectively attached to the two sides of the ion fiber layer, so that the parallel electrodes of the upper electrode layer and the parallel electrodes of the lower electrode layer are in contact with the ion fibers to complete the package.
- S40 sensor wiring. Lead each parallel electrode on the upper electrode layer and each parallel electrode on the lower electrode layer out of the electrode terminal, and connect the flexible flat cable with the same width as the electrode terminal to the corresponding electrode terminal of the flexible flat cable, namely Can be directly connected to the circuit.
- fixing the flexible flat cable with the same width as the electrode terminal to the electrode terminal corresponding to the flexible flat cable includes: connecting the flexible flat cable with the same width as the electrode terminal to the Z-axis
- the double-sided adhesive overlay is fixedly connected to the electrode terminal corresponding to the flexible flat cable.
- Electrodes on the upper electrode layer There are m electrodes on the upper electrode layer and m electrodes on the lower electrode layer.
- the upper and lower electrodes are vertically distributed in space, forming a total of m*m capacitor units; the principle of each capacitor unit is shown in Figure 6, when the pressure is applied Bottom, there is physical contact between the ionic fiber and the opposite electrode, and the contact area increases as the load increases.
- Figure 5 shows the pressure-volume relationship of two thin ionic gel microfiber sheets in a smaller pressure range (0kPa-50kPa).
- the ionic fiber layer of the pressure sensor in Figure 5 has a non-woven fabric weight of 25 per square meter.
- Figure 6 shows the data when testing the sensor with two layers of ionic gel-coated microfiber sheets in a large pressure range (0kPa-1200kPa).
- the square meter of the non-woven fabric in the ionic fiber layer of the pressure sensor in Figure 6 The gram weight is 40. From the data, a linear relationship between applied pressure and total capacitance can be inferred.
- the static pressure test data has high sensitivity, 0.84nF/kPa, and a wide pressure range of 1200kPa. The repeatability is not affected during the test. Compared with previous reports, 1200kPa is the widest range of flexible capacitive pressure sensor pressure measurement.
- the sensor sampling circuit obtains the capacitance value of each capacitance unit by scanning.
- the capacitance value of the capacitance unit on the sensor can reflect the change of the pressure in the corresponding area.
- Distributed can be realized by collecting the capacitance value of the capacitance unit on the sensor. Pressure detection.
- the electric double layer capacitor is at least 1000 times higher than the traditional parallel plate equipment. It improves the signal-to-noise ratio and has high anti-interference. Its characteristics will effectively improve the sensitivity of the sensor, convert the pressure into a capacitance to the maximum, and measure the capacitance. Accurate, improve the accuracy of pressure detection.
- the measured pressure distribution map has high resolution.
- the sensor is designed as an array type, and the screen printing process can be used to obtain 0.5mm to 15mm wide electrodes, which can obtain small array sensing units, improve the distribution density of sensing units, and make the sensor have higher resolution .
- the advantages of array sensors over non-array sensors are higher resolution and accuracy, and more comprehensive information collection.
- the screen printing process makes the thickness of the electrode layer very small, and the material selected for the buffer layer is a flexible high polymer film, and a polyurethane film with a thickness of 0.05 mm to 0.3 mm can be used to achieve a small thickness and high flexibility.
- the process is simple and can be produced in a large area.
- the electrode material is made of conductive paint, such as silver paste/graphene composite ink, which has low resistance.
- the conductive ink is directly printed on the buffer layer, and then a sticker is printed to encapsulate the upper electrode layer and the ion fiber layer.
- the process is simple and can be produced and applied in a large area.
- This application proposes an electrode structure design method, which uses a flexible cable lead-out method, so that the design method of the terminal eliminates the complexity of wiring one by one, and simplifies the wiring process and technology.
Abstract
An electrical double-layer capacitive flexible tactile sensor and a manufacturing method therefor. The sensor is an array sensor and comprises an upper electrode layer (2), a lower electrode layer (5), and an ion fiber layer (4) arranged between the upper electrode layer (2) and the lower electrode layer (5), wherein the ion fiber layer (4) is a micro-fiber film coated with ion gel, and the upper surface and the lower surface of the ion fiber layer (4) are tightly attached to the lower surface of the upper electrode layer (2) and the upper surface of the lower electrode layer (5), respectively.
Description
本申请要求在2019年5月7日提交中国专利局、申请号为201910375238.5的中国专利申请的优先权，该申请的全部内容通过引用结合在本申请中。This application claims the priority of a Chinese patent application filed with the Chinese Patent Office with an application number of 201910375238.5 on May 7, 2019. The entire content of this application is incorporated into this application by reference.
本申请涉及阵列式传感器技术领域，例如涉及一种双电层电容式柔性触觉传感器及其制作方法。This application relates to the technical field of array sensors, for example, to an electric double layer capacitive flexible tactile sensor and a manufacturing method thereof.
柔性传感器的触觉感知对人机交互的安全性、准确性和鲁棒性至关重要，而人工智能的交互式机器人要求在操作时能够快速准确地感知受力情况，对柔韧性、低成本和与大面积处理技术的兼容性等有着特殊的要求，并且需要达到可伸缩、可折叠，能够适应结构实时变化的传感要求。The tactile perception of flexible sensors is essential to the safety, accuracy and robustness of human-computer interaction, while artificial intelligence interactive robots require the ability to quickly and accurately sense the force during operation. Compatibility with large-area processing technology has special requirements, and needs to be scalable, foldable, and capable of adapting to the sensing requirements of real-time structural changes.
相关技术中的压力传感器具有僵硬、不能折叠等特点，不适合柔性场合的测量；而近年来发展迅速的压力传感器虽然在一定程度上解决了柔性问题但加工复杂，不能大面积应用；如专利CN 105738011 A中公开了一种柔性触觉传感器，该传感器虽然具有稳定性好、灵敏度高、静动态信号检测能力的特点，但是其通过液压力的方式进行压力传导，内部压力均匀分布，却不能有较高的分辨率，同时，其加工工艺复杂，不能大批量大面积加工，且传感器有较大的厚度，不轻便，不易折叠。The pressure sensor in the related technology has the characteristics of rigidity and cannot be folded, and is not suitable for measurement in flexible occasions; while the pressure sensor that has developed rapidly in recent years has solved the flexibility problem to a certain extent, but the processing is complicated and cannot be applied in a large area; such as patent CN 105738011 A discloses a flexible tactile sensor. Although the sensor has the characteristics of good stability, high sensitivity, and static and dynamic signal detection capabilities, it conducts pressure transmission through hydraulic pressure, and the internal pressure is evenly distributed, but it cannot be compared. High resolution, at the same time, its processing technology is complex, it cannot be processed in large quantities and large areas, and the sensor has a large thickness, which is not light and easy to fold.
近年来双电层电容式传感器也有了一定研究成果。BaoqingNie
[1]等提出一种离子微滴阵列，由纳米微滴夹在两种带有图案的透明电极的聚合物膜之间，形成具有单位面积电容的双电层，在外加载荷作用下，膜的变形导致了高弹性垂向电极接触处的周向膨胀，实现超高机械灵敏度和精细的压力分辨率。但是这种方法需要制作一系列完全一样的离子微滴，对加工精度要求很高，加工难度较大。
In recent years, electric double layer capacitive sensors have also made certain research results. BaoqingNie [1] proposed an ion droplet array. Nano droplets are sandwiched between two polymer films with patterned transparent electrodes to form an electric double layer with a capacitance per unit area. Under the action of an external load, The deformation of the membrane results in the circumferential expansion of the highly elastic vertical electrode contact, achieving ultra-high mechanical sensitivity and fine pressure resolution. However, this method requires the production of a series of identical ion droplets, which requires high processing precision and is difficult to process.
Xiaofeng Yang
[2]等提出了一种微流体超级电容压力传感器，包含一个填充有离子液体的滤纸，顶部和底部分别为涂有两层氧化铟锡聚对苯二甲酸乙二醇酯 (ITO-PET)薄膜，施加压力时，顶部ITO-PET膜变形引起之间的电容改变。该传感器在没有外力施加的时候，上层电极与中间层不接触，在施加外力时，上电极层与中间层接触，应用经典的薄膜弯曲理论，利用的是上电极的弯曲。这种方法需要严格控制上电极与中间层的距离，对加工的要求较高。且这种方法使用的是液体物质，不易封装，易泄露，而且不能做到大面积处理。
Xiaofeng Yang [2] et al. proposed a microfluidic supercapacitance pressure sensor, which contains a filter paper filled with ionic liquid. The top and bottom are coated with two layers of indium tin oxide polyethylene terephthalate (ITO- PET) film, when pressure is applied, the deformation of the top ITO-PET film causes the capacitance between them to change. The sensor does not contact the upper electrode with the middle layer when no external force is applied. When an external force is applied, the upper electrode layer is in contact with the middle layer. The classic film bending theory is applied, and the bending of the upper electrode is used. This method requires strict control of the distance between the upper electrode and the intermediate layer, which requires higher processing requirements. Moreover, this method uses liquid substances, which are not easy to encapsulate, easy to leak, and cannot be handled in a large area.
因此提供具有柔性化、高分辨率、低成本和与大面积处理技术兼容的柔性压力传感器，成为相关技术中亟待解决的问题。Therefore, providing a flexible pressure sensor with flexibility, high resolution, low cost, and compatibility with large-area processing technology has become an urgent problem to be solved in related technologies.
[1]Nie,Baoqing,et al."Iontronicmicrodroplet array for flexible ultrasensitive tactile sensing."Lab on a Chip 14.6(2014):1107-1116.[1]Nie,Baoqing,et al."Iontronic microdroplet array for flexible ultrasensitive tactile sensing."Lab on a Chip 14.6(2014):1107-1116.
[2]Yang,Xiaofeng,Yishou Wang,and Xinlin Qing."A Flexible Capacitive Pressure Sensor Based on Ionic Liquid."Sensors 18.7(2018):2395.[2]Yang, Xiaofeng, Yishou Wang, and Xinlin Qing. "A Flexible Capacitive Pressure Sensor Based on Ionic Liquid."Sensors 18.7(2018): 2395.
发明内容Summary of the invention
本申请提供一种双电层电容式柔性触觉传感器。该传感器采用阵列双电层原理，在保证柔性的同时可实现电容单元的高密度阵列，进而获得更高的分辨率与信噪比。This application provides an electric double layer capacitive flexible tactile sensor. The sensor adopts the principle of an array electric double layer, which can realize a high-density array of capacitor units while ensuring flexibility, thereby obtaining higher resolution and signal-to-noise ratio.
本申请实施例提供一种双电层电容式柔性触觉传感器，该传感器为阵列式传感器，包括上电极层、下电极层及设置在上电极层和下电极层之间的离子纤维层，所述离子纤维层为离子凝胶包覆的微纤维膜，离子纤维层的上表面和下表面分别紧贴上电极层的下表面和下电极层的上表面。The embodiment of the application provides an electric double layer capacitive flexible tactile sensor. The sensor is an array sensor and includes an upper electrode layer, a lower electrode layer, and an ionic fiber layer arranged between the upper electrode layer and the lower electrode layer. The ion fiber layer is a micro fiber membrane coated with ion gel, and the upper surface and the lower surface of the ion fiber layer are respectively close to the lower surface of the upper electrode layer and the upper surface of the lower electrode layer.
本申请实施例还提供一种双电层电容式柔性触觉传感器的制作方法，包括：The embodiment of the application also provides a manufacturing method of an electric double layer capacitive flexible tactile sensor, including:
制作电极图案的网版，采用丝网印刷的方式将导电油墨印刷到缓冲层上，形成上电极层和下电极层，上电极层和下电极层的尺寸和结构相同；Make the screen plate of the electrode pattern, and print the conductive ink on the buffer layer by screen printing to form the upper electrode layer and the lower electrode layer, the size and structure of the upper electrode layer and the lower electrode layer are the same;
制成离子凝胶液体，将高聚物柔性纤维在离子凝胶混合液中浸泡后沥干，形成固体离子纤维，且纤维内部存在孔隙；制作电极间隙图案的网版，用丝网印刷的方式将不干胶印刷到上电极层和下电极层中的每两条平行电极的间隙上，将上电极层的平行电极和下电极层的平行电极相互垂直放置，且上电极层和下电极层分别贴于离子纤维层的两面，使上电极层的平行电极和下电极层的平行电极均与离子纤维接触，完成封装；It is made into ionic gel liquid. The flexible polymer fiber is soaked in the ionic gel mixture and drained to form a solid ionic fiber, and there are pores in the fiber; the screen printing of the electrode gap pattern is made by screen printing Print the sticker on the gap between every two parallel electrodes in the upper electrode layer and the lower electrode layer, and place the parallel electrodes of the upper electrode layer and the parallel electrodes of the lower electrode layer perpendicular to each other, and the upper electrode layer and the lower electrode layer Attach them to both sides of the ion fiber layer, so that the parallel electrodes of the upper electrode layer and the parallel electrodes of the lower electrode layer are in contact with the ion fibers to complete the package;
将上电极层上的每个平行电极和下电极层上的每个平行电极引出电极接线端，将与电极接线端宽度相同的软排线与该软排线对应的电极接线端固定连接。Lead each parallel electrode on the upper electrode layer and each parallel electrode on the lower electrode layer out of the electrode terminal, and fixedly connect a flexible flat cable with the same width as the electrode terminal to the corresponding electrode terminal of the flexible flat cable.
图1是本申请实施例提供的一种传感器的结构示意图；FIG. 1 is a schematic structural diagram of a sensor provided by an embodiment of the present application;
图2是本申请实施例提供的另一种传感器的结构示意图；Figure 2 is a schematic structural diagram of another sensor provided by an embodiment of the present application;
图3是本申请实施例提供的传感器的电极层示意图；FIG. 3 is a schematic diagram of an electrode layer of a sensor provided by an embodiment of the present application;
图4是本申请实施例提供的双电层电容式柔性触觉传感器的原理示意图；4 is a schematic diagram of the principle of an electric double layer capacitive flexible tactile sensor provided by an embodiment of the present application;
图5是本申请实施例提供的传感器在小量程压力(0kPa-50kPa)下两层薄的离子-凝胶微纤维薄片的压容关系；FIG. 5 is the pressure-volume relationship of two thin ion-gel microfiber sheets under a small range pressure (0kPa-50kPa) of the sensor provided in the embodiment of the present application;
图6是本申请实施例提供的传感器在大量程压力(0kPa-1200kPa)下两层厚的离子-凝胶微纤维薄片的压容关系；Fig. 6 is the pressure-volume relationship of two-layer thick ion-gel microfiber sheets under a large range pressure (0kPa-1200kPa) of the sensor provided by the embodiment of the present application;
图7是本申请实施例提供的一种双电层电容式柔性触觉传感器的制作方法的流程图。FIG. 7 is a flowchart of a manufacturing method of an electric double layer capacitive flexible tactile sensor provided by an embodiment of the present application.
附图标记：1、PU膜缓冲层；2、上电极层；3、不干胶；4、离子纤维层；5、下电极层；6、平行电极；7、电极接线端。Reference signs: 1. PU membrane buffer layer; 2. upper electrode layer; 3. sticker; 4. ionic fiber layer; 5. lower electrode layer; 6. parallel electrode; 7. electrode terminal.
下面给出本申请的具体实施例。具体实施例仅用于进一步详细说明本申请，不限制本申请的保护范围。Specific examples of the application are given below. The specific embodiments are only used to further describe the application in detail, and do not limit the protection scope of the application.
本申请一种双电层电容式柔性触觉传感器，该传感器包括上电极层、下电极层及设置在上电极层和下电极层之间的离子纤维层，所述离子纤维层为离子凝胶包覆的微纤维膜，离子纤维层的上表面和下表面分别紧贴上电极层的下表面和下电极层的上表面。The present application is an electric double layer capacitive flexible tactile sensor. The sensor includes an upper electrode layer, a lower electrode layer, and an ionic fiber layer arranged between the upper electrode layer and the lower electrode layer. The ionic fiber layer is an ionic gel package. For the coated microfiber membrane, the upper surface and the lower surface of the ion fiber layer are respectively close to the lower surface of the upper electrode layer and the upper surface of the lower electrode layer.
如图3所示，上电极层上设有m条带状平行电极6及电极接线端7，下电极层上设有n条带状平行电极6及电极接线端7，m、n均为正整数，上电极层和下电极层中平行电极的数量可以取值不同，即m和n数值可以不同，具体取值可以根据需求设计改变，且上电极和下电极层上的平行电极在空间上垂直相 交；上电极层和下电极层的平行电极交叉的每个部分构成了一个电容单元，即该柔性压力传感器是由m*n个电容单元阵列而成，每一个电容单元都是一个小的传感器单元；每个平行电极在相应的电极层上引出电极接线端7，电极接线端7连接与该电极接线端7宽度相同的软排线，每个软排线与该软排线对应的电极接线端7固定连接，例如，所有软排线用Z轴导通的双面胶重合贴与电极接线端7固定连接。As shown in Figure 3, m strip-shaped parallel electrodes 6 and electrode terminals 7 are provided on the upper electrode layer, and n strip-shaped parallel electrodes 6 and electrode terminals 7 are provided on the lower electrode layer. Both m and n are positive. Integer, the number of parallel electrodes in the upper electrode layer and the lower electrode layer can have different values, that is, the values of m and n can be different, and the specific values can be designed and changed according to requirements, and the parallel electrodes on the upper electrode and the lower electrode layer are spatially Intersect perpendicularly; each part where the parallel electrodes of the upper electrode layer and the lower electrode layer intersect constitutes a capacitor unit, that is, the flexible pressure sensor is formed by an array of m*n capacitor units, and each capacitor unit is a small Sensor unit; each parallel electrode leads out the electrode terminal 7 on the corresponding electrode layer, the electrode terminal 7 is connected to the flexible flat wire with the same width as the electrode terminal 7, and each flexible flat wire corresponds to the electrode The terminal 7 is fixedly connected, for example, all the flexible flat cables are fixedly connected to the electrode terminal 7 with the double-sided adhesive tape with Z-axis conduction.
离子凝胶包覆的微纤维膜以无纺布为基体，在无纺布表面包覆一层离子凝胶，所述离子凝胶为H
3PO
4-PVA或者为1-丁基-3-甲基咪唑双(三氟甲基)亚胺(若为亚胺，浸泡无纺布后也需要进行沥干处理)，离子纤维层的电导率相对较高、电阻较低，以及离子浓度相对较高，且在施加压力时，无纺布本身的纤维结构可以由按压带来的内部接触面积的增加来改变上下电极层与微纤维膜之间的接触面积，相比于相关技术不需要制造空腔，简化结构和加工工艺。
The ionic gel-coated microfiber membrane uses a non-woven fabric as a matrix, and a layer of ionic gel is coated on the surface of the non-woven fabric. The ionic gel is H 3 PO 4 -PVA or 1-butyl-3- Methylimidazole bis(trifluoromethyl)imine (if it is imine, it also needs to be drained after soaking the non-woven fabric), the conductivity of the ionic fiber layer is relatively high, the resistance is low, and the ion concentration is relatively high High, and when pressure is applied, the fiber structure of the non-woven fabric itself can change the contact area between the upper and lower electrode layers and the microfiber membrane by the increase in the internal contact area caused by the pressing, which does not require the manufacture of air Cavity, simplify the structure and processing technology.
如图4所示，本申请提供的传感器的基本工作原理：As shown in Figure 4, the basic working principle of the sensor provided in this application:
上电极层和下电极层中的导电电极(即平行电极)和离子纤维层中的固体电解质之间形成的电极/电解质界面，双电层原理是当电极材料与固体电解质的两端分别接触时，在外界电源的作用下，电极内部表面电荷会从电解质中吸附离子，这些离子在电极/电解质界面的电解质一侧形成一个电荷数量与电极内表面荷电电荷数量相等，且符号与其相反的界面层，由于电极/电解质界面上存在着电位差，使得两层电荷都不能越界而彼此中和，因此形成了结构稳定的双电层，产生了双电层电容。The electrode/electrolyte interface formed between the conductive electrodes (ie parallel electrodes) in the upper electrode layer and the lower electrode layer and the solid electrolyte in the ionic fiber layer. The principle of the electric double layer is when the electrode material is in contact with the two ends of the solid electrolyte. Under the action of an external power source, the internal surface charge of the electrode will adsorb ions from the electrolyte. These ions form an interface on the electrolyte side of the electrode/electrolyte interface with the same amount of charge and the opposite sign of the charge on the inner surface of the electrode. Due to the potential difference at the electrode/electrolyte interface, the charges of the two layers cannot cross the boundary and neutralize each other, thus forming a structured stable electric double layer, resulting in an electric double layer capacitance.
制成离子凝胶混合液(例如聚乙烯醇-磷酸离子凝胶)，将高聚物柔性纤维(例如无纺布)浸泡混合液后沥干，形成固体离子纤维，即离子凝胶包裹纤维，且纤维内部存在一定的孔隙。离子纤维层夹在两层电极材料中间，外部压力作用下，离子纤维层被压缩产生形变，纳米纤维层和导电织物(上、下电极层)之间的接触面积将由于经典纤维集合体压缩模型所预测的结构变形而增加，从而引起电容的增加。电容的变化即可转化为电信号传输给后续处理电路，从而得到压力的大小。To make an ionic gel mixture (such as polyvinyl alcohol-phosphate ion gel), soak high polymer flexible fibers (such as non-woven fabrics) in the mixture and drain to form solid ionic fibers, that is, ionic gel wrapped fibers. And there are certain pores inside the fiber. The ionic fiber layer is sandwiched between the two electrode materials. Under the action of external pressure, the ionic fiber layer is compressed and deformed. The contact area between the nanofiber layer and the conductive fabric (upper and lower electrode layers) will be due to the classic fiber assembly compression model The predicted structural deformation increases, causing an increase in capacitance. The change in capacitance can be converted into an electrical signal and transmitted to the subsequent processing circuit to obtain the magnitude of the pressure.
采用含有纳米银的丝网印刷导电油墨在柔性聚氨酯(Polyurethane，PU)膜上制备了微电极层(上电极层或下电极层)，将离子凝胶(例如H
3PO
4-PVA)包覆 在微纤维片(例如聚丙烯)上制备中间层。上下电极组装成夹层离子凝胶膜，形成静电双层电容器(Electric Double Layer Capacitors，EDLCs)(一种超级电容器)。组装好的压力传感器连接到电容测量电路，实现高密度压力映射。本申请中丝网印刷可以采用手动印刷，也可以采用机器印刷。
A microelectrode layer (upper electrode layer or lower electrode layer) is prepared on a flexible polyurethane (PU) film using a screen-printed conductive ink containing nano-silver, and the ion gel (such as H 3 PO 4 -PVA) is coated An intermediate layer is prepared on a microfiber sheet (e.g. polypropylene). The upper and lower electrodes are assembled into a sandwich ion gel membrane to form an electrostatic double layer capacitor (EDLCs) (a kind of super capacitor). The assembled pressure sensor is connected to the capacitance measuring circuit to realize high-density pressure mapping. The screen printing in this application can be manual printing or machine printing.
本申请通过丝网印刷工艺制得压力触觉传感器，可以实现传感器大面积大批量引用以及更高的分辨率。In this application, the pressure tactile sensor is manufactured by the screen printing process, which can realize the large-area mass reference of the sensor and a higher resolution.
实施例1Example 1
本实施例提供了一种双电层电容式柔性触觉传感器(简称传感器)，应用于机器人手臂部分，且设置为测量正压力的大小，如图2所示，该传感器由上至下依次包括上缓冲层(图未示)、上电极层2、离子纤维层4、下电极层5和下缓冲层(图未示)，上电极层2和下电极层5上均设有m条带状平行电极及接线端，且上电极层2和下电极层5上的平行电极在空间上垂直相交；这样每个上电极层2和下电极层5的平行电极交叉的部分则构成了一个电容单元，即该柔性压力传感器是由m*m个电容单元阵列而成，每一个电容单元都是一个小的传感器单元.在一实施例中，上电极层2和下电极层5上的电极材料为银浆，离子纤维层4由无纺布浸泡由聚乙烯醇-磷酸所制得离子凝胶得到。This embodiment provides an electric double-layer capacitive flexible tactile sensor (sensor for short), which is applied to the robot arm and is set to measure the magnitude of the positive pressure. As shown in FIG. 2, the sensor includes upper The buffer layer (not shown), the upper electrode layer 2, the ion fiber layer 4, the lower electrode layer 5 and the lower buffer layer (not shown), the upper electrode layer 2 and the lower electrode layer 5 are provided with m strips parallel The electrodes and terminals, and the parallel electrodes on the upper electrode layer 2 and the lower electrode layer 5 intersect vertically in space; in this way, the intersection of the parallel electrodes of each upper electrode layer 2 and the lower electrode layer 5 constitutes a capacitor unit, That is, the flexible pressure sensor is formed by an array of m*m capacitor units, each capacitor unit is a small sensor unit. In an embodiment, the electrode material on the upper electrode layer 2 and the lower electrode layer 5 is silver The ionic fiber layer 4 is obtained by impregnating non-woven fabric with ionic gel prepared from polyvinyl alcohol-phosphoric acid.
下缓冲层和上缓冲层均为柔性聚氨酯(PU)膜缓冲层1，柔性PU膜缓冲层厚度是0.1mm；本身的长度可以根据需求设计，例如电极宽1mm，间隙1mm，长度20mm；本实施例中传感器厚0.6mm，上、下电极层的厚度均是0.1mm左右；m＝20。The lower buffer layer and the upper buffer layer are both flexible polyurethane (PU) film buffer layer 1. The thickness of the flexible PU film buffer layer is 0.1mm; the length of itself can be designed according to requirements, for example, the electrode width is 1mm, the gap is 1mm, and the length is 20mm; this implementation In the example, the sensor is 0.6mm thick, and the thickness of the upper and lower electrode layers is about 0.1mm; m=20.
本申请实施例还提供一种双电层电容式柔性触觉传感器的制作方法，如图7所示，包括：The embodiment of the present application also provides a method for manufacturing an electric double layer capacitive flexible tactile sensor, as shown in FIG. 7, including:
S10、电极层的制作，制作电极图案的网版，采用丝网印刷的方式将导电油墨印刷到上缓冲层的下表面或下缓冲层的上表面上，分别形成上电极层或下电极层，上电极层和下电极层的尺寸结构完全相同。在一实施例中，所述导电油墨含有纳米银。S10. Fabrication of the electrode layer. The screen plate of the electrode pattern is made, and the conductive ink is printed on the lower surface of the upper buffer layer or the upper surface of the lower buffer layer by screen printing to form the upper electrode layer or the lower electrode layer, respectively. The size structure of the upper electrode layer and the lower electrode layer are exactly the same. In one embodiment, the conductive ink contains nano silver.
S20、离子纤维层的制备，制成离子凝胶混合液，将高聚物柔性纤维在离子凝胶混合液中浸泡后沥干，形成固体离子纤维，即离子凝胶包裹纤维，且纤维内部存在孔隙。在一实施例中，将聚乙烯醇(PVA)、水和磷酸(H
3PO
4)按照 质量比为1:9:1的比例进行混合，加热至90℃，磁力搅拌半小时至两小时，直至混合液变得清澈透明，自然冷却至室温，即得到离子凝胶混合液，将高聚物柔性纤维(例如无纺布)在离子凝胶混合液中充分浸泡后取出沥干，浸泡时间为30秒，即得到离子纤维。
S20. The preparation of the ionic fiber layer is made into an ionic gel mixture, the high polymer flexible fibers are soaked in the ionic gel mixture and drained to form solid ionic fibers, that is, the ionic gel wraps the fibers, and there are inside the fibers Pores. In one embodiment, polyvinyl alcohol (PVA), water and phosphoric acid (H 3 PO 4 ) are mixed in a mass ratio of 1:9:1, heated to 90°C, and magnetically stirred for half an hour to two hours, Until the mixture becomes clear and transparent, cool to room temperature naturally to obtain an ionic gel mixture. The polymer flexible fiber (such as non-woven fabric) is fully immersed in the ionic gel mixture and then taken out and drained. The immersion time is In 30 seconds, ionic fiber is obtained.
S30、传感器的封装。制作电极间隙图案的网版，用丝网印刷的方式将不干胶3印刷到上电极层和下电极层的每两条平行电极的间隙上，将上电极层的平行电极和下电极层的平行电极相互垂直放置，上电极层和下电极层分别贴于离子纤维层的两面，使上电极层的平行电极和下电极层的平行电极均与离子纤维接触，完成封装。S30, the packaging of the sensor. Make the screen plate of the electrode gap pattern, and print the sticker 3 on the gap between each two parallel electrodes of the upper electrode layer and the lower electrode layer by screen printing, and connect the parallel electrodes of the upper electrode layer and the lower electrode layer. The parallel electrodes are placed perpendicular to each other, and the upper electrode layer and the lower electrode layer are respectively attached to the two sides of the ion fiber layer, so that the parallel electrodes of the upper electrode layer and the parallel electrodes of the lower electrode layer are in contact with the ion fibers to complete the package.
S40、传感器接线。将上电极层上的每个平行电极和下电极层上的每个平行电极引出电极接线端，将与电极接线端宽度相同的软排线与该软排线对应的电极接线端固定连接，即可直接接到电路中。S40, sensor wiring. Lead each parallel electrode on the upper electrode layer and each parallel electrode on the lower electrode layer out of the electrode terminal, and connect the flexible flat cable with the same width as the electrode terminal to the corresponding electrode terminal of the flexible flat cable, namely Can be directly connected to the circuit.
在一实施例中，将与电极接线端宽度相同的软排线与该软排线对应的电极接线端固定连接，包括：将与电极接线端宽度相同的软排线，用Z轴导通的双面胶重合贴与该软排线对应的电极接线端固定连接。In one embodiment, fixing the flexible flat cable with the same width as the electrode terminal to the electrode terminal corresponding to the flexible flat cable includes: connecting the flexible flat cable with the same width as the electrode terminal to the Z-axis The double-sided adhesive overlay is fixedly connected to the electrode terminal corresponding to the flexible flat cable.
上电极层有m条电极，下电极层有m条电极，上下两层电极在空间上呈垂直分布，共形成m*m个电容单元；每个电容单元原理如图6所示，在压力作用下，离子纤维和相对电极之间产生物理接触，并且接触面积随着负载的增加而增加。There are m electrodes on the upper electrode layer and m electrodes on the lower electrode layer. The upper and lower electrodes are vertically distributed in space, forming a total of m*m capacitor units; the principle of each capacitor unit is shown in Figure 6, when the pressure is applied Bottom, there is physical contact between the ionic fiber and the opposite electrode, and the contact area increases as the load increases.
为验证压力传感器的静态特性，利用压力机和LCR表对传感器电容和压力之间的关系进行测量。图5为在较小的压力范围(0kPa-50kPa)下，两层薄的离子凝胶微纤维薄片的压容关系，图5的压力传感器的离子纤维层中无纺布的平米克重为25。图6为在大压力范围(0kPa-1200kPa)下，用两层厚的离子凝胶涂层微纤维片对传感器进行测试时的数据，图6的压力传感器的离子纤维层中无纺布的平米克重为40。从数据中可以推断出施加压力与总电容之间的线性关系。这两个图数据都基于多个测试。静压试验数据灵敏度高，为0.84nF/kPa，压力范围宽，为1200kPa，试验过程中不影响重复性。与之前报道的相比，1200kPa是柔性电容式压力传感器压力测量的最广泛的范围。In order to verify the static characteristics of the pressure sensor, the relationship between the sensor capacitance and pressure is measured by a press and an LCR meter. Figure 5 shows the pressure-volume relationship of two thin ionic gel microfiber sheets in a smaller pressure range (0kPa-50kPa). The ionic fiber layer of the pressure sensor in Figure 5 has a non-woven fabric weight of 25 per square meter. . Figure 6 shows the data when testing the sensor with two layers of ionic gel-coated microfiber sheets in a large pressure range (0kPa-1200kPa). The square meter of the non-woven fabric in the ionic fiber layer of the pressure sensor in Figure 6 The gram weight is 40. From the data, a linear relationship between applied pressure and total capacitance can be inferred. Both graph data are based on multiple tests. The static pressure test data has high sensitivity, 0.84nF/kPa, and a wide pressure range of 1200kPa. The repeatability is not affected during the test. Compared with previous reports, 1200kPa is the widest range of flexible capacitive pressure sensor pressure measurement.
传感器采样电路通过扫描方式获取每个电容单元的容值，传感器上电容单 元的容值大小可反应出相应区域所受压力的变化情况，通过对传感器上电容单元的容值采集即可实现分布式压力检测。The sensor sampling circuit obtains the capacitance value of each capacitance unit by scanning. The capacitance value of the capacitance unit on the sensor can reflect the change of the pressure in the corresponding area. Distributed can be realized by collecting the capacitance value of the capacitance unit on the sensor. Pressure detection.
与相关技术相比，本申请的有益效果是：Compared with related technologies, the beneficial effects of this application are:
1、灵敏度更高。双电层电容比传统平行板设备高出至少1000倍的电容，提高信噪比，有高抗干扰性，其特性会有效提高传感器的灵敏度，使压力最大限度的转换成电容，测量电容量更准确，提高了压力检测精度。1. Higher sensitivity. The electric double layer capacitor is at least 1000 times higher than the traditional parallel plate equipment. It improves the signal-to-noise ratio and has high anti-interference. Its characteristics will effectively improve the sensitivity of the sensor, convert the pressure into a capacitance to the maximum, and measure the capacitance. Accurate, improve the accuracy of pressure detection.
2、测得的压力分布图分辨率高。设计该传感器为阵列式，利用丝网印刷的工艺分别可以得到0.5mm到15mm宽的电极，可以得到很小的阵列传感单元，提高传感单元的分布密度，使得传感器具有更高的分辨率。阵列传感器相对非阵列传感器的优点是分辨率和准确性更高，可以更为全面的收集信息。2. The measured pressure distribution map has high resolution. The sensor is designed as an array type, and the screen printing process can be used to obtain 0.5mm to 15mm wide electrodes, which can obtain small array sensing units, improve the distribution density of sensing units, and make the sensor have higher resolution . The advantages of array sensors over non-array sensors are higher resolution and accuracy, and more comprehensive information collection.
3、柔性更好，厚度更薄。选用丝网印刷的工艺使得电极层厚度很小，缓冲层选择的材料选用柔性高聚物薄膜，可选用0.05mm到0.3mm厚的聚氨酯膜，可以达到小厚度和高柔性。3. Better flexibility and thinner thickness. The screen printing process makes the thickness of the electrode layer very small, and the material selected for the buffer layer is a flexible high polymer film, and a polyurethane film with a thickness of 0.05 mm to 0.3 mm can be used to achieve a small thickness and high flexibility.
4、工艺简单，可大面积制作。电极材料选用导电涂料，例如银浆/石墨烯复合油墨，电阻较小，导电油墨直接印刷在缓冲层上，再印刷不干胶将上电极层与离子纤维层封装。工艺简单，可大面积制作和应用。4. The process is simple and can be produced in a large area. The electrode material is made of conductive paint, such as silver paste/graphene composite ink, which has low resistance. The conductive ink is directly printed on the buffer layer, and then a sticker is printed to encapsulate the upper electrode layer and the ion fiber layer. The process is simple and can be produced and applied in a large area.
5、本申请提出了一种电极结构设计方式，利用软排线引出方式，使接线端的设计方式省去了一条一条接线的复杂程度，简化了接线过程和工艺。5. This application proposes an electrode structure design method, which uses a flexible cable lead-out method, so that the design method of the terminal eliminates the complexity of wiring one by one, and simplifies the wiring process and technology.
Claims (11)
- 一种双电层电容式柔性触觉传感器，所述传感器为阵列式传感器，包括上电极层、下电极层及设置在所述上电极层和所述下电极层之间的离子纤维层，所述离子纤维层为离子凝胶包覆的微纤维膜，所述离子纤维层的上表面和下表面分别紧贴所述上电极层的下表面和所述下电极层的上表面。An electric double layer capacitive flexible tactile sensor. The sensor is an array sensor and includes an upper electrode layer, a lower electrode layer, and an ionic fiber layer arranged between the upper electrode layer and the lower electrode layer. The ionic fiber layer is a microfiber membrane coated with ionic gel, and the upper surface and the lower surface of the ionic fiber layer are respectively close to the lower surface of the upper electrode layer and the upper surface of the lower electrode layer.
- 根据权利要求1所述的传感器，其中，所述上电极层上设有m条带状平行电极及电极接线端，所述下电极层上设有n条所述带状平行电极及所述电极接线端，且所述上电极层上的平行电极和所述下电极层上的平行电极在空间上垂直相交；所述上电极层的平行电极和所述下电极层的平行电极交叉的每个部分构成一个电容单元，每个电容单元为一个传感器单元；其中，所述m和所述n均为正整数。The sensor according to claim 1, wherein m strip-shaped parallel electrodes and electrode terminals are provided on the upper electrode layer, and n strip-shaped parallel electrodes and the electrodes are provided on the lower electrode layer. Terminal, and the parallel electrodes on the upper electrode layer and the parallel electrodes on the lower electrode layer intersect vertically in space; each of the parallel electrodes of the upper electrode layer and the parallel electrodes of the lower electrode layer intersect Part of the capacitor unit constitutes a capacitor unit, and each capacitor unit is a sensor unit; wherein the m and the n are both positive integers.
- 根据权利要求2所述的传感器，其中，所述上电极层和所述下电极层上的每个平行电极引出所述电极接线端，每个电极接线端连接与所述电极接线端宽度相同的软排线，每个软排线与所述软排线对应的所述电极接线端固定连接。The sensor according to claim 2, wherein each parallel electrode on the upper electrode layer and the lower electrode layer leads out the electrode terminal, and each electrode terminal is connected to the same width as the electrode terminal. A flexible flat cable, each flexible flat cable is fixedly connected to the electrode terminal corresponding to the flexible flat cable.
- 根据权利要求1所述的触觉传感器，其中，所述离子纤维层以无纺布为基体，在无纺布表面包覆一层离子凝胶，所述离子凝胶为H 3PO 4-PVA或者1-丁基-3-甲基咪唑双(三氟甲基)亚胺。 The tactile sensor according to claim 1, wherein the ionic fiber layer uses a non-woven fabric as a matrix, and a layer of ionic gel is coated on the surface of the non-woven fabric, and the ionic gel is H 3 PO 4 -PVA or 1-Butyl-3-methylimidazole bis(trifluoromethyl)imine.
- 根据权利要求3所述的传感器，其中，每个软排线利用Z轴导通的双面胶重合贴与所述软排线对应的所述电极接线端固定连接。3. The sensor according to claim 3, wherein each flexible flat cable is fixedly connected to the electrode terminal corresponding to the flexible flat cable by overlaying the double-sided tape with Z-axis conduction.
- 一种双电层电容式柔性触觉传感器的制作方法，包括：A manufacturing method of an electric double layer capacitive flexible tactile sensor includes:制作电极图案的网版，采用丝网印刷的方式将导电油墨印刷到缓冲层上，形成上电极层和下电极层，所述上电极层和所述下电极层的尺寸和结构相同；Making a screen of the electrode pattern, printing conductive ink on the buffer layer by screen printing to form an upper electrode layer and a lower electrode layer, the upper electrode layer and the lower electrode layer have the same size and structure;制成离子凝胶混合液，将高聚物柔性纤维在所述离子凝胶混合液中浸泡后沥干，形成固体离子纤维，且纤维内部存在孔隙；Preparing an ionic gel mixture, soaking high polymer flexible fibers in the ionic gel mixture and draining to form solid ionic fibers, and there are pores in the fibers;制作电极间隙图案的网版，用丝网印刷的方式将不干胶印刷到所述上电极层和所述下电极层中的每两条平行电极的间隙上，将所述上电极层的平行电极和所述下电极层的平行电极相互垂直放置，且所述上电极层和所述下电极层分别贴于离子纤维层的两面，使所述上电极层的平行电极和所述下电极层的平行电极均与离子纤维接触，完成封装；Make a screen plate of the electrode gap pattern, and print a sticker on the gap between each two parallel electrodes in the upper electrode layer and the lower electrode layer by screen printing, and make the upper electrode layer parallel The electrodes and the parallel electrodes of the lower electrode layer are placed perpendicular to each other, and the upper electrode layer and the lower electrode layer are respectively attached to both sides of the ion fiber layer, so that the parallel electrodes of the upper electrode layer and the lower electrode layer All the parallel electrodes are in contact with the ion fiber to complete the package;将所述上电极层上的每个平行电极和所述下电极层上的每个平行电极引出电极接线端，将与所述电极接线端宽度相同的软排线与所述软排线对应的所述电极接线端固定连接。Lead each parallel electrode on the upper electrode layer and each parallel electrode on the lower electrode layer out of the electrode terminal, and connect a flexible flat wire with the same width as the electrode terminal to the flexible flat wire The electrode terminals are fixedly connected.
- 根据权利要求6所述的方法，其中，所述离子凝胶为H 3PO 4-PVA。 The method according to claim 6, wherein the ionic gel is H 3 PO 4 -PVA.
- 根据权利要求7所述的方法，其中，所述制成离子凝胶混合液，包括：将聚乙烯醇、水和磷酸按照质量比为1:9:1的比例进行混合，加热至90℃，磁力搅拌至混合液变得清澈透明，自然冷却至室温，得到所述离子凝胶混合液。The method according to claim 7, wherein the preparing the ionic gel mixture comprises: mixing polyvinyl alcohol, water and phosphoric acid in a mass ratio of 1:9:1, and heating to 90°C, Magnetically stirred until the mixed liquid becomes clear and transparent, and is naturally cooled to room temperature to obtain the ionic gel mixed liquid.
- 根据权利要求6所述的方法，其中，所述导电油墨包含纳米银。The method of claim 6, wherein the conductive ink contains nano silver.
- 根据权利要求6所述的方法，其中，所述缓冲层的厚度在0.05mm～0.3mm之间。The method according to claim 6, wherein the thickness of the buffer layer is between 0.05 mm and 0.3 mm.
- 根据权利要求6所述的方法，其中，所述将与所述电极接线端宽度相同的软排线与所述软排线对应的所述电极接线端固定连接，包括：将与所述电极接线端宽度相同的软排线，用Z轴导通的双面胶重合贴与所述软排线对应的所述电极接线端固定连接。The method according to claim 6, wherein the fixedly connecting a flexible flat cable with the same width as the electrode terminal to the electrode terminal corresponding to the flexible flat cable comprises: connecting a flexible flat cable with the electrode terminal Flexible flat cables with the same end width are overlapped and pasted with the electrode terminals corresponding to the flexible flat cables with a Z-axis conductive double-sided adhesive and fixedly connected.
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