WO2020164360A1 - 一种直立少层石墨烯-金属纳米粒子复合催化电极 - Google Patents
一种直立少层石墨烯-金属纳米粒子复合催化电极 Download PDFInfo
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- B81—MICROSTRUCTURAL TECHNOLOGY
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- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
- B81C1/00373—Selective deposition, e.g. printing or microcontact printing
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- the invention belongs to the field of electrochemistry, and in particular relates to a vertical few-layer graphene-metal nanoparticle composite catalytic electrode with catalytic activity.
- One of the objectives of the present invention is to provide an upright small-layer graphene-metal nanoparticle composite catalytic electrode in view of the shortcomings of the prior art, which can compound a variety of metals according to requirements, has simple preparation steps, and can provide metal particle size and morphology. At the same time, it reduces the cost of raw materials and conforms to the concept of environmental protection, which is conducive to large-scale practical applications.
- the invention provides an upright few-layer graphene-metal nanoparticle composite catalytic electrode, which includes a conductive substrate, an upright few-layer graphene layer, and metal nanoparticle.
- the conductive substrate is carbon paper, carbon cloth, graphite paper, nickel foil, nickel mesh, titanium foil, titanium mesh, platinum foil, and gold foil , At least one of the gold net.
- the vertical few-layer graphene layer is prepared by a plasma-assisted chemical vapor deposition method under low pressure, and its structure includes planar graphene close to the substrate There are two parts: an upright graphene layer that supports metal nanoparticles.
- the thickness of the planar graphene layer is 2nm-30nm, the height of the vertical graphene layer is 10nm-20 ⁇ m, and 7-layer graphene [v1], the average thickness is less than 2.5nm, the edge thickness is less than 1nm, the specific surface area is between 1000-2600m 2 /g, and other morphological features such as density and curvature can be adjusted.
- the metal nanoparticle is used as a catalyst and an active ingredient and is composed of at least one metal such as platinum, gold, palladium, nickel, and ruthenium.
- the diameter is between 0.5 and 100 nanometers, and the size difference is less than 10%.
- the metal nanoparticles are uniformly loaded on the surface and edge of the vertical few-layer graphene, and the surface coverage can be controlled at 0-100%.
- Another object of the present invention is to provide a method for preparing the metal nanoparticle composite catalytic electrode [v2] of the present invention, which includes at least the following steps:
- Step S1 putting the conductive substrate into the vacuum chamber of the plasma chemical vapor deposition device, and introducing reducing gas, and maintaining the low pressure state in the device through flow adjustment, and performing plasma etching reaction on the substrate;
- Step S2 after the etching reaction is completed, pass in the protective gas, pass in the carbon source and buffer gas after the temperature rises, and maintain the low pressure state in the device through flow adjustment;
- step S3 a plasma chemical vapor deposition reaction is performed on the etched substrate. After the reaction is completed, when the temperature of the device drops to room temperature, a conductive substrate on which a few layers of upright graphene are grown can be obtained;
- Step S4 select a metal target, place the conductive substrate on which the upright few layers of graphene are grown in a physical vapor deposition device, pass inert gas into the device, and maintain the low pressure state in the device through flow adjustment, and perform magnetron sputtering Composite nanoparticles
- Step S5 after the magnetron sputtering is finished, the inert gas is flushed to normal pressure, and the temperature is increased for a certain period of annealing treatment [v3]
- step S6 after the annealing reaction is completed, the graphene-metal nano-particle composite catalytic electrode can be obtained after the temperature of the device is reduced to room temperature.
- the reducing gas is at least one of hydrogen and argon, and the low pressure state is that the vacuum degree is stable at 5Pa-30Pa.
- the protective gas is at least one of nitrogen and argon
- the carbon source in question is methane, ethane, ethylene, propylene, acetylene, methanol, ethanol, acetone, benzene, toluene, At least one of xylene and benzoic acid
- the buffer gas in question is at least one of hydrogen and argon.
- the ion source of the plasma is at least one of radio frequency plasma, microwave plasma or DC high voltage plasma, and the power density provided by the plasma equipment is 1-50 watts per square centimeter .
- the reaction temperature of the plasma chemical vapor deposition reaction is 400°C to 1500°C, preferably 690°C to 950°C, and the heating rate is 1°C/min to 100°C/min.
- the etching reaction time is 1-30 min, and the plasma chemical vapor deposition reaction time is 15-120 min.
- the metal target material is at least one of platinum, gold, palladium, rhodium, nickel, and ruthenium.
- the vacuum degree during the magnetron sputtering is controlled at 5Pa-30Pa, the power is 0.5-5W/cm 2 , and the time is 1-500s.
- the inert gas is at least one of hydrogen, nitrogen and argon.
- the annealing temperature is 200-800° C., and the time is 0-1 h.
- the present invention has at least the following beneficial effects:
- the composite catalytic electrode provided by the present invention has the characteristics of high conductivity, high specific surface area, high structural strength, high chemical stability, etc., and has good and stable physical and chemical properties. A large number of graphene edges and active sites are conducive to the composite of metal nanoparticles.
- the composite catalytic electrode provided by the invention exhibits high sensitivity and selectivity for the electrochemical detection of non-enzymatic hydrogen peroxide.
- the composite catalytic electrode provided by the present invention has a high effective surface area and metal utilization rate, which greatly reduces the amount of precious metals and industrial costs.
- the present invention composites nanoparticles by magnetron sputtering, with simple preparation steps, controllable metal particle size and morphology, high purity, no pollution, and at the same time avoiding pollution in the production process. It is conducive to high-efficiency, fast and cheap mass production, and can be widely used in electrochemistry, analytical chemistry, biochemical, medical, environmental and energy-related industries, and has broad commercialization prospects.
- Figure 1 is a scanning electron microscope photo of upright few-layer graphene.
- Figure 2A is a scanning electron microscopy (SEM) photo of upright few-layer graphene; B) is a high-resolution projection electron microscopy photo.
- SEM scanning electron microscopy
- Figure 3 is a transmission electron microscope photograph of a platinum nanoparticle modified upright few-layer graphene nanoelectrode.
- the vertical few-layer graphene has a unique morphology: carbon nanosheets grow vertically and have a large surface area.
- Figure 2 reveals that the edge thickness ranges from 0.34 to 0.37 nanometers, with one to two layers of graphene structure.
- Figure 3 shows that the platinum particles are uniform in size and morphology, with an average diameter of about 2 nanometers.
- a method for preparing an upright few-layer graphene-metal nanoparticle composite catalytic electrode includes at least the following steps:
- the highly conductive carbon paper is put into the vacuum chamber of the plasma chemical vapor deposition device, and the reducing gas hydrogen and argon are introduced 1:1, and the low pressure state in the device is maintained through flow adjustment to stabilize the vacuum degree.
- 15Pa plasma etching reaction on the substrate, the reaction time is 10min, the power density of the plasma equipment is 10 watts per square centimeter;
- argon gas is introduced, and the temperature is heated to 700°C at a heating rate of 20°C/min. After the temperature rises, hydrogen and methane are introduced 1:1, and the low pressure in the device is maintained through flow adjustment and the vacuum is maintained. The degree is 15Pa;
- the third step is to perform plasma chemical vapor deposition reaction on the substrate, the reaction time is 15 minutes, the power density provided by the plasma equipment is 10 watts per square centimeter, and the temperature of the equipment is reduced to room temperature after the reaction is completed;
- the fourth step select the platinum target material and place the obtained material in a physical meteorological deposition device, evacuate to 2x10 -3 pa, fill in argon gas to stabilize the pressure at 5pa, and start magnetron sputtering with a power of 5W/cm 2 , Time 70s;
- argon gas is blown in to 1x10 5 Pa, and the temperature is raised to 300°C for 30 minutes for annealing treatment;
- the temperature of the equipment is lowered to room temperature to obtain the desired electrode.
- the average thickness of the upright few graphene layers on the electrode surface prepared in this embodiment is 2 ⁇ m
- the average thickness of planar graphene is 2 nm
- the average specific surface area is 1300 m 2 /g.
- This material is used as an upright small-layer graphene-metal nanoparticle composite catalytic electrode, and a pH 7.0 PBS buffer solution is selected as the supporting electrolyte.
- the concentration of NO 2- is in the range of 3.0 ⁇ 10 -5 to 6.0 ⁇ 10 -4 mol ⁇ L -1 , the peak current and concentration show a good linear relationship.
- the electrochemical oxidation reaction has good catalytic performance and can be used in the detection of NO 2- .
- Example 1 The difference from Example 1 is the preparation method and application of gold nanoparticles on the vertical graphene surface.
- the method at least includes the following steps:
- the gold target is selected and the materials prepared in the first to third steps in Example 1 are placed in a physical meteorological deposition device, vacuumed to 3x10 -3 pa, and filled with argon to stabilize the pressure at 5 pa. Start magnetron sputtering with power of 5W/cm 2 and time of 300s;
- argon gas is blown in to 1x10 5 Pa, and the temperature is increased to 450°C for 40 minutes for annealing treatment;
- the temperature in the equipment is lowered to room temperature, and the sample is taken out;
- the vertical graphene in this embodiment supports nano-gold particles with a particle size of about 13 nm.
- Differential pulse voltammograms of different concentrations of catechol and different concentrations of hydroquinone with PBS as the base solution at pH 7.0.
- concentration range of 4 ⁇ 10 -6 ⁇ 1 ⁇ 10 -4 mol/L for catechol and hydroquinone the reduction peak current and concentration of catechol and hydroquinone show a good linear relationship.
- the detection limit is 4.0 ⁇ 10 -6 mol/L.
- the 2.0 ⁇ 10 -4 mol/L catechol and hydroquinone solutions were tested in parallel for 5 times.
- the redox peak current was basically stable with a relative standard deviation of 2.1%. After placing the electrode for 1, 3, and 15 days, In the determination of catechol and hydroquinone, the reduction peak current did not change significantly, indicating that the electrode stability and reproducibility are good.
- the results show that 150 times the K + , Na + , Ca 2+ , Pb 2+ , Cu 2+ , Mg 2+ and 20 times the concentration of dopamine, citric acid, uric acid, ascorbic acid and glucose do not interfere with the measurement, indicating that this electrode The anti-interference ability is strong. .
- the difference from Examples 1 and 2 is the preparation method and application of the silver nanoparticles on the vertical graphene surface.
- the method at least includes the following steps:
- the silver target is selected and the materials prepared in the first to third steps in Example 1 are placed in a physical meteorological deposition device, vacuumed to 2x10 -3 pa, and filled with argon gas to stabilize the pressure at 5.2 pa , Start magnetron sputtering, power 4W/cm 2 , time 240s;
- argon gas is blown in to 1x10 5 Pa, and the temperature is raised to 250°C for 30 minutes for annealing treatment;
- the temperature in the equipment is lowered to room temperature, and the sample is taken out.
- the vertical graphene in this example carried nano silver particles with a particle size of about 5 nm.
- the method has high sensitivity, accurate and reliable determination results, and can be used for the determination of hydrogen peroxide in serum.
Abstract
Description
Claims (14)
- 一种直立少层石墨烯金属纳米粒子复合催化电极,包括:导电基底、直立少层石墨烯层、金属纳米粒子。
- 根据权利要求1所述的一种直立少层石墨烯-金属纳米粒子复合催化电极,其特征在于,所述导电基底为碳纸、碳布、石墨纸、镍箔、镍网、钛箔、钛网、铂箔、金箔、金网中的至少一种。
- 根据权利要求1所述的一种直立少层石墨烯-金属纳米粒子复合催化电极,其特征在于,所述直立少层石墨烯层由低压下的等离子辅助的化学气相沉积法制备,其结构包括靠近基底的平面石墨烯层和承载金属纳米粒子的直立石墨烯层两部分,其中平面石墨烯层的厚度为2nm~30nm,所述直立石墨烯层的高度为10nm~20μm,直立型少层石墨烯包含少于7层石墨烯,平均厚度少于2.5nm,边缘厚度少于1nm,比表面积介于1000~2600m 2/g,其他形貌特征如密度、弯曲度可调制。
- 根据权利要求1所述的一种直立少层石墨烯-金属纳米粒子复合催化电极,其特征在于,所述金属纳米颗粒作为催化剂和活性成分,其由铂、金、钯、镍、钌等金属的至少一种构成,其平均直径介于0.5到100纳米之间,尺寸差异小于10%,金属纳米颗粒均匀负载于直立型少层石墨烯表面和边缘,表面覆盖率可控制在0-100%。
- 一种使用权利要求1-4任意一项所述的一种直立少层石墨烯-金属纳米粒子复合催化电极的制备方法,其特征在于,至少包括如下步骤:步骤S1,将导电衬底放入等离子体化学气相沉积装置的真空腔中,并通入还原性气体,通过流量调节维持装置内的低压状态,对衬底进行等离子体刻蚀反应;步骤S2,刻蚀反应结束后通入保护气体,升温后通入碳源和缓冲气体,通过流量调节维持装置内的低压状态;步骤S3,对刻蚀好的衬底进行等离子体化学气相沉积反应,反应结束后待设备温度降至室温,即可获得生长有直立少层石墨烯的导电基底;步骤S4,选择金属靶材,将生长有直立少层石墨烯的导电基底置于物理气相沉积装置中,往装置中通入惰性气体,通过流量调节维持装置内的低压状态,进行磁控溅射复合纳米粒子;步骤S5,磁控溅射结束后,冲入惰性气体至常压,升高温度进行一定时间的退火处理;步骤S6,退火反应结束后待设备温度降至室温,即可获得石墨烯-金属纳米粒子复合催化电极。
- 根据权利要求5所述的方法,其特征在于,所述还原性气体为氢气和氩气中的至少一种,所述低压状态为真空度稳定在5Pa~30Pa。
- 根据权利要求5所述的方法,其特征在于,所述保护气体为氮气和氩气中的至少一种,所诉碳源为甲烷、乙烷、乙烯、丙烯、乙炔、甲醇、乙醇、丙酮、苯、甲苯,二甲苯和苯甲酸中的至少一种,所诉缓冲气体为氢气、氩气中的至少一种。
- 根据权利要求5所述的方法,其特征在于,所述等离子体的离子源为射频等离子体、微波等离子体或直流高压等离子体中的至少一种,等离子体设备提供的功率密度为1-50瓦每平方厘米。
- 根据权利要求5所述的方法,其特征在于,所述等离子体化学气相沉积反应的反应温度为400℃~1500℃,优选690℃~950℃,升温速率为1℃/min~100℃/min。
- 根据权利要求5所述的方法,其特征在于,所述刻蚀反应的时间为1-30min,所诉等离子体化学气相沉积反应的时间为15-120min。
- 根据权利要求5所述的方法,其特征在于,所述金属靶材为铂、金、钯、铑、镍、钌中的至少一种。
- 根据权利要求5所述的方法,其特征在于,所述磁控溅射时真空度控制在5pa~30Pa,功率0.5-5W/cm2,时间1-500s。
- 根据权利要求5所述的方法,其特征在于,所述惰性气体为氢气、氮气和氩气中至少一种。
- 根据权利要求5所述的方法,其特征在于,所述退火温度为200~800℃,时间0~1h。
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