WO2020090930A1 - 半導体基板の製造方法、ダマシン配線構造の製造方法、半導体基板、及びダマシン配線構造 - Google Patents
半導体基板の製造方法、ダマシン配線構造の製造方法、半導体基板、及びダマシン配線構造 Download PDFInfo
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- WO2020090930A1 WO2020090930A1 PCT/JP2019/042668 JP2019042668W WO2020090930A1 WO 2020090930 A1 WO2020090930 A1 WO 2020090930A1 JP 2019042668 W JP2019042668 W JP 2019042668W WO 2020090930 A1 WO2020090930 A1 WO 2020090930A1
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- insulating layer
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- wiring structure
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Definitions
- the present disclosure relates to a semiconductor substrate manufacturing method, a damascene wiring structure manufacturing method, a semiconductor substrate, and a damascene wiring structure.
- a highly reliable concave portion for example, a narrow pitch and a high aspect ratio
- a highly reliable concave portion for example, a narrow pitch and a high aspect ratio
- a recess having a scallop removed There is a case where it is desired to form a recess having a scallop removed).
- dry etching for removing the scallop formed on the side surface of the recess in the above-described case has the following problems. Specifically, when isotropic dry etching is used, the width of the recess on the opening side is widened, and a narrow pitch wiring (wiring embedded in the recess) cannot be realized.
- An object of one aspect of the present disclosure is to provide a semiconductor substrate having a highly reliable recess and a manufacturing method thereof, and a damascene wiring structure using the semiconductor substrate and a manufacturing method thereof.
- a method of manufacturing a semiconductor substrate includes a first step of forming a recess having a bottom surface and a side surface having a scallop by performing a process including isotropic etching on a main surface of the semiconductor substrate. And a second step of performing at least one of a hydrophilic treatment on the side surface of the concave portion and a degassing treatment on the concave portion, and anisotropic wet etching in the state where the bottom surface of the concave portion is present to form on the side surface of the concave portion. A third step of removing the scallops formed and flattening the side surfaces.
- etching solution for the side surface of the recess is formed.
- the wettability can be improved.
- anisotropic wet etching in the state where the bottom surface of the concave portion exists, the concave portion can be effectively filled with the etching liquid (etchant).
- the entire side surface of the recess can be wetted with the etching solution, and the scallop formed on the side surface can be effectively removed.
- the etching rate of the side surface can be made substantially uniform between the opening side and the bottom side of the recess.
- the etching rate of the side surface can be made substantially uniform between the opening side and the bottom side of the recess.
- the groove portion extending along the main surface of the semiconductor substrate is formed as a concave portion.
- a sixth step a seventh step of removing the metal layer and the wiring portion on the second part so that the second part of the insulating layer is exposed, and a second part of the insulating layer and the metal layer after the seventh step And an eighth step of forming a cap layer so as to cover an end portion of the wiring layer and the wiring portion.
- a void may be generated between the insulating layer and the metal layer, or a crack in the insulating layer ( There is a risk of rupture.
- the voids can be structural weak points.
- the cracks may cause a current flowing through the wiring portion to leak to the semiconductor substrate. That is, the metal (metal layer and wiring portion) formed on the insulating layer may come into contact with part of the semiconductor substrate via the crack.
- the insulating layer and the metal layer are formed on the inner surface of the recess in which the scallop is appropriately removed. As a result, it is possible to suppress the occurrence of the voids or cracks described above, and thus it is possible to obtain a highly reliable damascene wiring structure.
- the main surface of the semiconductor substrate is along the (100) plane, and in the first step, a groove portion extending in the direction along the (110) plane may be formed.
- the bottom surface along the (100) plane and the side surface along the (110) plane are formed. Furthermore, by utilizing the difference in etching rate depending on the plane orientation, it is possible to form an inclined surface along the (111) plane between the bottom surface and the side surface and that is inclined with respect to the bottom surface and the side surface.
- the angle of the corner between the bottom surface and the side surface (that is, the angle formed by the bottom surface and the inclined surface or the angle formed by the side surface and the inclined surface) is Is larger than the angle of the corner portion of (i.e., the angle formed by the bottom surface and the side surface). That is, by forming the inclined surface, a rounded corner portion (that is, a corner portion that gently bends gradually) is formed as compared with the case where the inclined surface is not formed. With such corners, cracks in the insulating layer can be less likely to occur at the corners. Therefore, according to the above structure, a more reliable damascene wiring structure can be obtained.
- a semiconductor substrate includes a main surface provided with a recess, the recess having a bottom surface, a side surface, and an inclined surface, and the inclined surface includes a bottom surface and a bottom surface between the bottom surface and the side surface. It is connected to the side surface and is inclined with respect to the bottom surface and the side surface so as to form an obtuse angle with the bottom surface and the side surface, and the plane orientation of the bottom surface, the plane orientation of the side surface, and the plane orientation of the inclined surface are different from each other.
- the angle of the corner between the bottom surface and the side surface is the angle of the corner portion when the inclined surface is not provided. It is larger than the angle (that is, the angle formed by the bottom surface and the side surface). That is, the rounded corner portion (that is, the corner portion that gently bends in stages) is formed by the inclined surface as compared with the case where the inclined surface is not formed.
- the concave portion having such a corner portion for example, when a predetermined material layer is provided on the inner surface of the concave portion, generation of cracks in the material layer at the corner portion is suppressed.
- the reliability is enhanced by the recesses described above.
- the semiconductor substrate can be obtained relatively easily by utilizing the difference in etching rate depending on the plane orientation.
- a damascene wiring structure includes the semiconductor substrate, an insulating layer, a metal layer, a wiring portion, and a cap layer, and the concave portion is a groove portion extending along the main surface.
- the insulating layer has a first portion provided on the inner surface of the groove and a second portion integrally formed with the first portion and provided on the main surface, and the metal layer is the insulating layer. Is provided on the first portion of the wiring layer, the wiring portion is formed on the metal layer embedded in the groove portion, and the cap layer is the second portion of the insulating layer, the end portion of the metal layer, and the wiring portion. It is provided so as to cover.
- the above damascene wiring structure is formed by embedding a wiring portion and the like in the recess having the bottom surface, the side surface, and the inclined surface as described above. Therefore, cracks in the insulating layer are suppressed at the corners of the recess. Therefore, in the above damascene wiring structure, the recess improves reliability.
- the bottom surface may be a surface along the (100) plane
- the side surface may be a surface along the (110) plane
- the inclined surface may be a surface along the (111) plane.
- the recess has a first groove portion extending in the first direction along the main surface, and a second groove portion sharing the bottom surface with the first groove portion and extending in the second direction along the main surface intersecting the first direction.
- the first groove portion includes a first side surface, a first inclined surface that is connected to the bottom surface and the first side surface between the bottom surface and the first side surface, and that is inclined with respect to the bottom surface and the first side surface.
- the second groove portion has a second side surface and a second inclined surface connected to the bottom surface and the second side surface between the bottom surface and the second side surface and inclined with respect to the bottom surface and the second side surface.
- an intermediate surface is formed between the first side surface and the second side surface and between the first inclined surface and the second inclined surface, and the intermediate surface is the first side surface, the second side surface, and the second side surface.
- the angle formed by the first inclined surface, the second inclined surface, and the bottom surface, and the intermediate surface and each of the first side surface and the second side surface may be an obtuse angle.
- the angle of the corner (the corner when viewed from the direction perpendicular to the main surface) where the first groove and the second groove intersect (that is, the angle formed by the intermediate surface and the first side surface or The angle formed by the intermediate surface and the second side surface is larger than the angle of the corner when the intermediate surface is not formed (that is, the angle formed by the first side surface and the second side surface). That is, by forming the intermediate surface, a rounded corner (that is, a corner that gradually bends) is formed as compared with the case where the intermediate surface is not formed. With such a corner portion, it is possible to effectively reduce the stress acting on the wiring portion at the corner portion when vibration is applied to the semiconductor substrate. Therefore, according to the above configuration, it is possible to obtain a damascene wiring structure with further improved reliability.
- a semiconductor substrate having a highly reliable concave portion a manufacturing method thereof, a damascene wiring structure using the semiconductor substrate, and a manufacturing method thereof.
- FIG. 1 is a plan view of a mirror device including a damascene wiring structure according to an embodiment.
- 2 is a sectional view taken along line II-II of FIG.
- FIG. 3 is an enlarged view of FIG.
- FIG. 4 is an enlarged view of FIG.
- FIG. 5 is a plan view of an SOI wafer used for manufacturing a damascene wiring structure.
- FIG. 6A is a diagram schematically showing the structure of the substrate before the groove is formed
- FIG. 6B is a diagram showing a cross-sectional shape of the groove formed in the first step.
- FIG. 6C is a diagram showing the cross-sectional shape of the groove formed in the second step.
- 7A is an SEM image of the bottom of the groove formed in the first step
- FIG. 7B is an SEM image of the bottom of the groove formed in the third step.
- FIG. 8A and FIG. 8B are cross-sectional views for explaining the method of manufacturing the damascene wiring structure.
- 9A and 9B are cross-sectional views for explaining the method of manufacturing the damascene wiring structure.
- 10A and 10B are cross-sectional views for explaining the method of manufacturing the damascene wiring structure.
- FIG. 11 is a perspective view schematically showing a corner of a damascene wiring structure.
- FIG. 12 is a sectional view of a damascene wiring structure according to the first modification.
- FIG. 13 is a sectional view of a damascene wiring structure according to the second modification.
- FIG. 14A is a sectional view of a damascene wiring structure according to the third modification
- FIG. 14B is a sectional view of a damascene wiring structure according to the fourth modification.
- FIG. 1 is a plan view of a mirror device 1 (actuator device) including a damascene wiring structure 100 (see FIG. 2) according to an embodiment.
- the mirror device 1 includes a support portion 2, a first movable portion 3, a second movable portion 4, a pair of first connecting portions 5 and 6, and a pair of second connecting portions 7. , 8 and a magnetic field generator 9.
- the support part 2, the first movable part 3, the second movable part 4, the first connecting parts 5, 6 and the second connecting parts 7, 8 are integrally formed by, for example, a semiconductor substrate (substrate 30). That is, the mirror device 1 is configured as a MEMS (Micro Electro Mechanical Systems) device.
- MEMS Micro Electro Mechanical Systems
- the first movable portion 3 having the mirror surface 10 is swung around the first axis X1 and the second axis X2 which are orthogonal to each other.
- the mirror device 1 can be used, for example, in an optical switch for optical communication, an optical scanner, or the like.
- the magnetic field generator 9 is composed of, for example, a permanent magnet having a Halbach array. The magnetic field generator 9 generates a magnetic field that acts on coils 21 and 22 described later.
- the support portion 2 has, for example, a quadrangular outer shape in a plan view and is formed in a frame shape.
- the support portion 2 is arranged on one side in the direction perpendicular to the mirror surface 10 with respect to the magnetic field generation portion 9.
- the first movable portion 3 is arranged inside the support portion 2 in a state of being separated from the magnetic field generation portion 9.
- the “plan view” means the case viewed from the direction perpendicular to the mirror surface 10, in other words, the case viewed from the direction perpendicular to the main surface 31 of the substrate 30 described later.
- the first movable portion 3 includes an arrangement portion 3a, a frame portion 3b surrounding the arrangement portion 3a, and a plurality of (four in this example) connecting portions 3c that connect the arrangement portion 3a and the frame portion 3b to each other. is doing.
- the placement portion 3a is formed, for example, in a circular shape in a plan view.
- a circular mirror surface 10 is provided on the surface of the arrangement portion 3a opposite to the magnetic field generation portion 9.
- the mirror surface 10 is made of, for example, a reflective film made of aluminum, an aluminum alloy, silver, a silver alloy, gold, a dielectric multilayer film, or the like.
- the frame portion 3b has, for example, a quadrangular outer shape in a plan view and is formed in a frame shape.
- the plurality of connecting portions 3c are arranged on both sides of the arrangement portion 3a on the first axis X1 and on both sides of the arrangement portion 3a on the second axis X2, and the arrangement portion 3a on the first axis X1 or the second axis X2. And the frame portion 3b are connected to each other.
- the second movable portion 4 has, for example, a quadrangular outer shape in a plan view and is formed in a frame shape.
- the second movable portion 4 is arranged inside the support portion 2 so as to surround the first movable portion 3 while being separated from the magnetic field generation portion 9.
- the first connecting portions 5 and 6 are arranged on both sides of the first movable portion 3 on the first axis X1. Each of the first connecting portions 5 and 6 connects the first movable portion 3 and the second movable portion 4 to each other on the first axis X1 so that the first movable portion 3 can swing around the first axis X1. It is connected. Each of the first connecting portions 5 and 6 extends, for example, in a straight line along the first axis X1.
- the second connecting portions 7 and 8 are arranged on both sides of the second movable portion 4 on the first axis X1. Each of the second connecting portions 7 and 8 connects the second movable portion 4 and the support portion 2 with each other on the second axis X2 so that the second movable portion 4 can swing around the second axis X2. ing. Each of the second connecting portions 7 and 8 extends, for example, in a straight line along the second axis X2.
- the mirror device 1 further includes coils 21 and 22, a plurality of wirings 12, 13, 14 and 15, and a plurality of electrode pads 25, 26, 27 and 28.
- the coil 21 is, for example, embedded in the frame portion 3b of the first movable portion 3 and extends spirally in a plan view.
- the coil 22 is, for example, embedded in the second movable portion 4 and extends spirally in a plan view.
- Each coil 21, 22 is made of a metal material such as copper.
- the plurality of electrode pads 25, 26, 27, 28 are provided on the support portion 2.
- the wiring 12 electrically connects one end of the coil 21 and the electrode pad 25.
- the wiring 12 extends from one end of the coil 21 to the electrode pad 25 via the first connecting portion 5, the second movable portion 4, and the second connecting portion 7.
- the wiring 13 electrically connects the other end of the coil 21 and the electrode pad 26.
- the wiring 13 extends from the other end of the coil 21 to the electrode pad 26 via the first connecting portion 6, the second movable portion 4 and the second connecting portion 8.
- the wiring 14 electrically connects one end of the coil 22 and the electrode pad 27.
- the wiring 14 extends from one end of the coil 22 to the electrode pad 27 via the second connecting portion 8.
- the wiring 15 electrically connects the other end of the coil 22 and the electrode pad 28.
- the wiring 15 extends from the other end of the coil 22 to the electrode pad 28 via the second connecting portion 7.
- the mirror device 1 configured as described above, when a drive signal for linear operation is input to the coil 22 via the electrode pads 27 and 28 and the wirings 14 and 15, the magnetic field generated by the magnetic field generation unit 9 is changed. A Lorentz force acts on the coil 22 by the interaction. By using the balance between the Lorentz force and the elastic force of the second connecting portions 7 and 8, the mirror surface 10 (first movable portion 3) is linearly operated together with the second movable portion 4 around the second axis X2. You can
- the second movable portion 4 is composed of, for example, the first silicon layer 81 of the substrate 30.
- the substrate 30 is a semiconductor substrate such as an SOI (Silicon on Insulator) substrate.
- the substrate 30 has, for example, a first silicon layer 81 and a second silicon layer 82, and an insulating layer 83 disposed between the first silicon layer 81 and the second silicon layer 82 (FIG. 6 and (See FIGS. 8 to 10).
- the support part 2 is composed of a first silicon layer 81, a second silicon layer 82 and an insulating layer 83, and has a first movable part 3, a second movable part 4, first connecting parts 5, 6 and a second connecting part. 7, 8 are composed of the first silicon layer 81.
- the substrate 30 has a main surface 31. In this example, the main surface 31 is the surface of the first silicon layer 81 opposite to the insulating layer 83.
- the main surface 31 is provided with a groove 33 (recess).
- the groove 33 has a shape corresponding to the coil 21, and in this example, extends in a spiral shape in a plan view. In a cross section perpendicular to the extending direction of the groove 33, the groove 33 has, for example, a rectangular shape.
- the inner surface of the groove portion 33 is composed of a bottom surface 33a, a side surface 33b, and an inclined surface 33c connected to the bottom surface 33a and the side surface 33b.
- the inclined surface 33c is inclined between the bottom surface 33a and the side surface 33b so as to form an obtuse angle (approximately 135 degrees in this embodiment) with the bottom surface 33a and the side surface 33b.
- the damascene wiring structure 100 is configured uniformly in the extending direction of the groove 33 and is perpendicular to the extending direction of the groove 33.
- the configuration is the same in any cross section.
- the damascene wiring structure 100 does not necessarily have to be uniformly configured in the extending direction of the groove 33.
- the damascene wiring structure 100 includes an insulating layer 40, a metal layer 50, a wiring portion 60, and a cap layer 70 in addition to the substrate 30 as a base.
- the insulating layer 40 is provided on the main surface 31 and the inner surfaces of the groove portion 33 (the bottom surface 33a, the side surface 33b, and the inclined surface 33c. The same applies hereinafter). More specifically, the insulating layer 40 includes a first portion 41 provided on the inner surface of the groove 33 and a second portion 42 integrally formed with the first portion 41 and provided on the main surface 31. ,have. A boundary portion 43 of the insulating layer 40 between the first portion 41 and the second portion 42 is located on a boundary portion between the main surface 31 and the groove portion 33 of the substrate 30.
- the insulating layer 40 is composed of a first layer 44 and a second layer 45.
- the first layer 44 is made of an oxide film and is provided on the inner surfaces of the main surface 31 and the groove 33.
- the oxide film forming the first layer 44 is, for example, a silicon oxide film (SiO 2 ) formed by thermally oxidizing silicon.
- the second layer 45 is made of a nitride film and is provided on the first layer 44.
- the nitride film forming the second layer 45 is, for example, a silicon nitride film (SiN) or the like.
- the first portion 41 and the boundary portion 43 are composed of the first layer 44 and the second layer 45, and the second portion 42 is composed of the first layer 44.
- the metal layer 50 is provided on the first portion 41 of the insulating layer 40. That is, the metal layer 50 is provided on the inner surface of the groove 33 via the first portion 41.
- the metal layer 50 is made of, for example, a metal material such as titanium (Ti).
- the metal layer 50 is, for example, a seed layer for stably forming the wiring portion 60 on the semiconductor substrate, and a barrier for preventing diffusion of a metal element contained in the wiring portion 60 into the first silicon layer 81. It can function as a layer.
- the wiring portion 60 is formed on the metal layer 50 embedded in the groove portion 33. That is, the wiring portion 60 is provided in the groove portion 33 via the first portion 41 of the insulating layer 40 and the metal layer 50.
- the wiring portion 60 is made of, for example, a metal material such as copper (Cu).
- the shape of the metal layer 50 in a cross section perpendicular to the extending direction of the wiring portion 60 corresponds to the sectional shape of the groove portion 33, and in this example, a substantially rectangular shape is used. Presents.
- the wiring portion 60 extends in a spiral shape in a plan view, and the wiring portion 60 extends in a direction parallel to the first axis X1 and the second axis.
- the extending direction of the wiring portion 60 is the direction parallel to the first axis X1 in the first portion and the second portion in the second portion. It is a direction parallel to the two-axis X2.
- the wiring portion 60 extends in a curved shape or a curved shape, the extending direction of a certain portion of the wiring portion 60 may be the tangential direction of that portion.
- the cap layer 70 is provided so as to cover the second portion 42 of the insulating layer 40, the end portion 51 of the metal layer 50, and the wiring portion 60.
- the cap layer 70 extends in a plane parallel to the main surface 31.
- the thickness T1 of the cap layer 70 is thicker than the thickness T2 of the insulating layer 40.
- the cap layer 70 is made of, for example, a silicon nitride film and has an insulating property. That is, the cap layer 70 is made of the same material as the second layer 45 of the insulating layer 40.
- a surface 41 a of the first portion 41 of the insulating layer 40 opposite to the substrate 30 is, for example, a flat surface perpendicular to the main surface 31.
- a surface 42a of the second portion 42 of the insulating layer 40 opposite to the substrate 30 is, for example, a flat surface parallel to the main surface 31.
- the surface 42a is in contact with the cap layer 70.
- the surface 43a of the boundary portion 43 on the side opposite to the substrate 30 is an inclined surface inclined with respect to the direction A1 perpendicular to the main surface 31 when viewed from the extending direction of the wiring portion 60. 43b is included.
- the inclined surface 43b is inclined outward with respect to the surface 41a of the first portion 41 (so as to be farther from the center of the groove 33 as it is farther from the bottom surface 33a of the groove 33).
- the inclined surface 43b is convexly curved toward the side opposite to the substrate 30.
- the end 51 of the metal layer 50 is inserted between the cap layer 70 and the inclined surface 43b. More specifically, the end portion 51 has a portion arranged in the space formed between the cap layer 70 and the inclined surface 43b in the direction A1 perpendicular to the main surface 31.
- the end portion 51 has a first surface 51a, a second surface 51b continuous with the first surface 51a, and a third surface 51c continuous with the first surface 51a on the side opposite to the second surface 51b. There is.
- the first surface 51 a extends along the cap layer 70 and is joined to the cap layer 70.
- the first surface 51a is a flat surface, and is located on the same plane as the surface 42a of the second portion 42 of the insulating layer 40 and the surface 60a of the wiring part 60 described later.
- the second surface 51b is along the inclined surface 43b and is joined to the inclined surface 43b.
- the second surface 51b is inclined outward with respect to the direction A1 perpendicular to the main surface 31, similarly to the inclined surface 43b.
- the second surface 51b is curved in a concave shape toward the side opposite to the substrate 30.
- the second surface 51b is in contact with the second layer 45 forming the boundary portion 43 of the insulating layer 40. That is, the portion of the insulating layer 40 that contacts the second surface 51b (in this example, the second layer 45 that forms the boundary portion 43) is made of the same material as the portion of the cap layer 70 that contacts the first surface 51a. (Silicon nitride film). As described above, in this example, the entire cap layer 70 is made of the silicon nitride film. Thereby, the bonding strength between the insulating layer 40 and the cap layer 70 can be increased.
- the third surface 51c is a surface of the end portion 51 opposite to the second surface 51b.
- the third surface 51c is inclined outward with respect to the direction A1 when viewed from the extending direction of the wiring portion 60.
- the degree of inclination of the third surface 51c with respect to the direction A1 is gentler than the degree of inclination of the second surface 51b with respect to the direction A1.
- the thickness of the end portion 51 in the direction A2 parallel to the main surface 31 gradually increases toward the tip of the end portion 51.
- a portion 61 of the wiring portion 60 located at the boundary between the metal layer 50 and the cap layer 70 is inserted between the cap layer 70 and the third surface 51c. More specifically, the part 61 of the wiring portion 60 is arranged in the space formed between the cap layer 70 and the third surface 51c in the direction A1.
- the first surface 51a and the second surface 51b form an acute angle.
- the angle ⁇ formed by the first surface 51a and the second surface 51b is smaller than 90 degrees. That is, the thickness of the end portion 51 in the direction A1 perpendicular to the main surface 31 gradually decreases as it approaches the tip of the end portion 51 (for example, the apex formed by the first surface 51a and the second surface 51b).
- the angle ⁇ may be, for example, 15 degrees to 88 degrees.
- the end 51 of the metal layer 50 is not provided on the second portion 42 of the insulating layer 40.
- the thickness (minimum thickness) of the end portion 51 in the direction A2 parallel to the main surface 31 is the portion of the metal layer 50 other than the end portion 51 (for example, in the direction A1 of the metal layer 50 perpendicular to the main surface 31).
- the thickness is larger than the thickness of the intermediate portion or the portion of the metal layer 50 located on the first portion 41 of the insulating layer 40).
- the thickness (maximum thickness) of the tip portion of the metal layer 50 in the direction A1 is smaller than the thickness T2 of the insulating layer 40.
- the “tip portion of the metal layer 50” means a portion of the metal layer 50 in which the thickness in the direction A2 parallel to the principal surface 31 is larger than the thickness in the direction A1 perpendicular to the principal surface 31.
- the surface 60a of the wiring portion 60 that contacts the cap layer 70 is located on the same plane as the surface 42a of the second portion 42 of the insulating layer 40.
- the surface 42a is a surface of the insulating layer 40 that contacts the cap layer 70.
- the surface 70a of the cap layer 70 on the substrate 30 side is a flat surface.
- the groove portion 33 extends in a spiral shape in plan view.
- the groove portion 33 has a plurality of portions 34 adjacent to each other.
- the interval B between the portions 34 is smaller than the width W of the groove 33.
- the width W of the groove 33 is smaller than the depth D of the groove 33.
- the depth D of the groove 33 is, for example, the distance between the main surface 31 and the bottom surface 33a in the direction A1 perpendicular to the main surface 31.
- the distance L between the bottom surface 33a of the groove 33 in the direction A1 perpendicular to the main surface 31 and the opposite surface of the substrate 30 opposite to the main surface 31 is larger than the depth D of the groove 33.
- the opposite surface is the surface 81a of the first silicon layer 81 on the insulating layer 83 side (the side opposite to the main surface 31).
- the method of manufacturing the damascene wiring structure 100 includes a method of manufacturing a semiconductor substrate (substrate 30) having the groove 33 (first step to third step). 6 and 8 to 10, each part is schematically shown.
- the substrate 30 having the groove 33 is manufactured from the SOI wafer SW as shown in FIG. That is, the plurality of substrates 30 are obtained by cutting the SOI wafer SW into an appropriate shape.
- the substrate 30 included in the SOI wafer SW has a first silicon layer 81, a second silicon layer 82, and an insulating layer 83.
- the first silicon layer 81 has a thickness of, for example, about 30 to 150 ⁇ m
- the second silicon layer 82 has a thickness of, for example, about 625 ⁇ m.
- the SOI wafer SW has an orientation flat OF that is a (110) plane and a main surface 31 that is a (100) plane.
- the Z-axis direction is the direction perpendicular to the main surface 31
- the X-axis direction is the direction along the orientation flat OF when viewed from the Z-axis direction
- the Y-axis direction is the Z-axis direction and the X-axis direction.
- the silicon crystal contained in the SOI wafer SW is a cubic system. Therefore, in the example of FIG.
- the plane parallel to the plane orthogonal to the Y-axis direction (XZ plane) and the plane orthogonal to the X-axis direction (YZ plane) are both equivalent crystal planes (that is, (110 ) Surface). Further, the planes inclined by 45 degrees with respect to the (100) plane as viewed from the Z-axis direction all constitute equivalent crystal planes (that is, the (100) plane).
- the X-axis direction corresponds to a direction parallel to one of the first axis X1 and the second axis X2 shown in FIG. 1, and the Y-axis direction corresponds to the first axis X1 and the second axis X2. Corresponds to the direction parallel to the other. Note that the crystal orientation of the orientation flat OF may not exactly match (110) depending on the processing accuracy when manufacturing the SOI wafer SW. That is, the crystal orientations of the above-mentioned surfaces do not necessarily have to match perfectly, and may include some deviations.
- the “treatment including isotropic etching” is, for example, the Bosch process.
- a groove is formed by isotropic dry etching, and a protective film is formed on the inner wall of the groove.
- only the protective film on the bottom of the groove is removed by anisotropic dry etching, and then the groove is formed again by isotropic dry etching.
- the groove is dug by repeating such processing. As a result, as shown in FIGS. 6B and 7A, the groove 32 having the bottom surface 32a and the side surface 32b on which the scallop S is formed is formed.
- FIG. 6B shows one cross section perpendicular to the extending direction of the groove 32.
- FIG. 7A is an SEM image of the bottom of the groove 32 (a portion including the bottom surface 32a).
- the groove 32 is formed so as to extend in a direction parallel to the X-axis direction or the Y-axis direction.
- the scallop S is a fine concavo-convex structure formed on the side surface 32b.
- the bottom surface 33a, the side surface 33b, and the inclined surface 33c are integrally (continuously) formed. Further, in the cross section perpendicular to the extending direction of the groove 33, the length of the bottom surface 33a is longer than the length of the inclined surface 33c. Further, a boundary line that divides the side surface 33b and the inclined surface 33c is formed between the side surface 33b and the inclined surface 33c. That is, the boundary between the side surface 33b and the inclined surface 33c is clear, and the corner portion between the side surface 33b and the inclined surface 33c is not a gentle curve (curved surface).
- the difference between the first angle formed by the bottom surface 33a and the inclined surface 33c and the second angle formed by the side surface 33b and the inclined surface 33c is 30 degrees or less.
- the first angle is an angle formed by the (100) plane and the (111) plane and is approximately 125.3.
- the second angle is an angle formed by the (110) plane and the (111) plane and is approximately 144.7 degrees. Therefore, the angle formed by the first angle and the second angle is approximately 19.4 degrees.
- the inclined surface 33c is a flat surface. As a result, at the predetermined height position, the thickness t1 of the substrate 30 increased by the formation of the inclined surface 33c is such that the inclined surface is a curved surface C (a curved surface that is concave with respect to the space inside the groove).
- the thickness t2 of the substrate 30 increases due to the formation of the inclined surface, which is larger than the thickness t2. Therefore, according to the inclined surface 33c that is a flat surface, the thickness of the substrate 30 in the vicinity of the bottom surface 33a of the groove portion 33 can be appropriately increased, so that the groove portion 33 can be structurally stabilized.
- the bottom surface 33a has a shape that is curved at least as compared with the inclined surface 33c so as to be convex on the side opposite to the opening side of the groove 33. Since the bottom surface 33a has such a curved shape, the bottom surface 33a and the inclined surface 33c are gently connected. As a result, it is possible to preferably prevent the stress from being concentrated on the corner between the bottom surface 33a and the inclined surface 33c.
- the scallop S inevitably occurs due to the property that the groove is formed by alternately repeating the isotropic dry etching, the protective film formation, and the anisotropic dry etching described above. Then, when the treatments of the fourth step and thereafter are carried out with the scallop S remaining, voids (voids) are generated between the insulating layer 40 (second layer 45) and the metal layer 50, or the insulating layer 40 There is a risk that cracks (fractures) may occur.
- the voids may be structural weak points in the damascene wiring structure 100. Further, the cracks may cause the current flowing through the wiring portion 60 to leak to the substrate 30. That is, the metal (the metal layer 50 and the wiring portion 60) formed on the insulating layer 40 may come into contact with part of the substrate 30 via the crack.
- a hydrophilic treatment is performed on the side surface 32b of the groove 32 (second step).
- the hydrophilic treatment is, for example, a treatment of performing O2 ashing on the side surface 32b, a treatment of immersing the side surface 32b in a surfactant, alcohol, or the like.
- the groove portion 32 may be degassed.
- a degassing process of degassing the solution existing in the groove 32 may be performed.
- the degassing process is a process for facilitating filling of the groove 32 with the etching liquid, and is also a kind of hydrophilic treatment.
- etching liquid for example, TMAH (tetramethylammonium hydroxide), KOH (potassium hydroxide), or the like is used.
- TMAH tetramethylammonium hydroxide
- KOH potassium hydroxide
- the "state in which the bottom surface 32a of the groove portion 32 exists” means a state in which the groove portion 32 is a non-through hole (groove).
- the “state in which the bottom surface 32 a of the groove portion 32 exists” means that the bottom portion of the groove portion 32 is removed (that is, the groove portion 32 is a surface opposite to the insulating layer 83 of the second silicon layer 82 from the main surface 31). It is a state other than a state in which the through hole penetrates through to).
- FIGS. 6C and 7B show one cross section perpendicular to the extending direction of the groove 33.
- FIG. 7B is an SEM image of the bottom portion (the portion including the bottom surface 33a) of the groove portion 33.
- a first groove portion 133 extending along the Y-axis direction (first direction) and a second groove portion 233 extending along the X-axis direction (second direction). And are obtained as the groove portion 33.
- the bottom surface is formed by the plane along the (100) plane (that is, the plane substantially parallel to the (100) plane).
- 33a is formed
- the side surface 33b is formed by the plane along the (110) plane (that is, the plane substantially parallel to the (110) plane).
- the inclined surface 33c is formed by a surface along the (111) surface that is inclined 54.7 degrees with respect to each of the (100) surface and the (110) surface (that is, a surface substantially parallel to the (111) surface). It That is, the plane orientation of the bottom surface 33a, the plane orientation of the side surface 33b, and the plane orientation of the inclined surface 33c are different from each other.
- the groove portion 33 is different from the groove portion 32 not only in that the scallop S is removed but also in the shape of the corner portion of the bottom portion (that is, the region where the bottom surface and the side surface are connected).
- the shape of the inner surface of the groove 33 as described above is formed by the difference in etching rate depending on the plane orientation. Specifically, at the corner of the bottom of the groove 33, the etching rate in the direction perpendicular to the (111) plane is the etching rate in the direction perpendicular to the (100) plane (that is, the depth direction of the groove 33) and ( The etching rate in the direction perpendicular to the (110) plane (that is, the width direction of the groove 33) is slower. As a result, the inclined surface 33c is formed along the (111) plane.
- the degassing treatment (second step) for the groove 32 may be performed simultaneously with the wet etching in the third step.
- the degassing process for the groove 32 is performed, for example, by using ultrasonic waves, and the reactive gas (for example, hydrogen) generated in the groove 32 due to the reaction between the substrate 30 and the etching solution during the wet etching, or the inside of the groove 32. This is a process of removing gas (for example, carbon dioxide, oxygen, nitrogen, etc.) dissolved in the etching liquid.
- a chemical solution that affects the anisotropy of the etching rate with respect to the etching solution for example, a surfactant NCW, IPA (isopropyl alcohol) or the like may be added.
- a surfactant NCW, IPA (isopropyl alcohol) or the like may be added.
- the substrate 30 having the groove 33 formed in the main surface 31 is obtained.
- the depth of the groove 33 is, for example, about 5 to 30 ⁇ m.
- the first portion 41 provided on the inner surface of the groove 33 and the first portion 41 are formed integrally with each other.
- An insulating layer 40 having a second portion 42 provided on the surface 31 is formed. More specifically, after the first layer 44 made of a silicon oxide film (thermal oxide film) is formed on the main surface 31 and the inner surface of the groove 33, the second layer 45 made of a silicon nitride film (LP-SiN) is formed. It is formed on the first layer 44.
- the thickness of the first layer 44 and the second layer 45 is, for example, about 100 to 1000 nm.
- the surface 43a of the boundary portion 43 of the insulating layer 40 between the first portion 41 and the second portion 42 opposite to the substrate 30 is viewed from the extending direction of the wiring portion 60.
- the insulating layer 40 including the inclined surface 43b inclined with respect to the direction A1 perpendicular to the main surface 31 is formed (see FIG. 4).
- the inclined surface 43b is formed on the surface 43a of the boundary portion 43. To be done. This is because an inclined shape is easily formed in the first layer 44 made of a silicon oxide film.
- the metal layer 50 is formed on the first portion 41 and the second portion 42 of the insulating layer 40.
- the metal layer 55 is formed on the metal layer 50.
- the metal layer 55 is made of, for example, a metal material such as copper.
- the metal layer 55 functions as a seed layer together with the metal layer 50.
- the metal layer 50 and the metal layer 55 are formed by, for example, sputtering, but may be formed by atomic layer deposition (ALD), chemical growth (CVD), ion plating or electroless plating.
- the total thickness of the metal layer 50 and the metal layer 55 is, for example, about 10 nm to 3000 nm.
- the wiring portion 60 is formed on the metal layer 50 embedded in the groove portion 33.
- the wiring part 60 is formed by plating, for example.
- the wiring portion 60 is formed, for example, so that the average thickness of the wiring portion 60 on the main surface 31 is 1 ⁇ m or more.
- the metal layer 55 is made of the same material as the wiring portion 60, the wiring portion 60 and the metal layer 55 are integrated when the wiring portion 60 is formed, and the wiring portion 60 and the metal layer 55 are integrated. The interface between them may disappear. In this case, it can be considered that the metal layer 55 constitutes the wiring part 60.
- the metal layer 50 and the metal layer 55 on the second portion 42 are exposed by, for example, chemical mechanical polishing (CMP) so that the second portion 42 of the insulating layer 40 is exposed. And the wiring part 60 is removed.
- CMP chemical mechanical polishing
- chemical mechanical polishing is performed on the insulating layer 40, the metal layer 50, the metal layer 55, and the wiring portion 60 from the side opposite to the substrate 30.
- a part of the insulating layer 40 opposite to the main surface 31 or the bottom surface 33a in the direction A1 perpendicular to the main surface 31 is removed, so that the insulating layer 40, the metal layer 50, the metal layer 55, and the wiring part 60 are planarized.
- the portion forming the second portion 42 is removed.
- a cap layer 70 is formed so as to cover the second portion 42 of the insulating layer 40, the end portion 51 of the metal layer 50, and the wiring portion 60.
- the cap layer 70 is made of, for example, a silicon nitride film (PE-SiN) and has a thickness of about 200 to 3000 nm.
- PE-SiN silicon nitride film
- the second silicon layer 82 and the insulating layer 83 are removed by etching or the like.
- the entire side surface 32b of the groove 32 can be wet with the etching liquid, and the scallop S formed on the side surface 32b can be effectively removed. That is, the groove portion 33 from which the scallop S is removed is obtained. By removing the scallop S, it is possible to eliminate the structural weak point in the groove.
- the etching rate of the side surface 32b can be made substantially uniform between the opening side and the bottom side of the groove 32.
- the substrate 30 having the groove portion 33 with high reliability can be manufactured. That is, in the main surface 31 of the substrate 30, it is possible to form the groove portion 33 in which an appropriate shape is maintained and the scallop S is appropriately removed.
- the insulating layer 40 and the metal layer 50 are formed on the inner surface of the groove 33 from which the scallop S has been appropriately removed.
- the insulating layer 40 and the metal layer 50 are formed on the inner surface of the groove 33 from which the scallop S has been appropriately removed.
- the main surface 31 of the substrate 30 is along the (100) plane, and in the first step, the direction along the (110) plane (main
- the groove portion 33 (the first groove portion 133 or the second groove portion 233) extending in the X axis direction or the Y axis direction is formed.
- the bottom surface 33a along the (100) plane and the side surface 33b along the (110) plane are formed.
- an inclined surface 33c can be formed between the bottom surface 33a and the side surface 33b along the (111) plane and inclined with respect to the bottom surface 33a and the side surface 33b. It will be possible.
- the angle of the corner between the bottom surface 33a and the side surface 33b when the inclined surface 33c is formed (that is, the angle formed by the bottom surface 33a and the inclined surface 33c or the angle formed by the side surface 33b and the inclined surface 33c) is The angle is larger than the angle of the corner when the inclined surface 33c is not formed (that is, the angle formed by the bottom surface 33a and the side surface 33b).
- the angle formed by the bottom surface 33a and the inclined surface 33c is approximately 125.3 degrees
- the angle formed by the side surface 33b and the inclined surface 33c is approximately 144.7 degrees.
- the angle of the corner (that is, the angle formed by the bottom surface and the side surface) when the inclined surface 33c is not formed is approximately 90 degrees.
- a rounded corner portion that is, a corner portion that gradually bends gradually
- the reliability of the damascene wiring structure 100 formed in the groove portion 33 can be further improved.
- the angle of the corner between the bottom surface 33a and the side surface 33b is not provided with the inclined surface 33c, as described above. It is larger than the angle of the corner part. That is, the inclined surface 33c forms a rounded corner (that is, a corner that gently bends in stages) more than when the inclined surface 33c is not formed.
- the groove portion 33 having such a corner portion for example, when a predetermined material layer (the insulating layer 40 in the present embodiment) is provided on the inner surface of the groove portion 33, the occurrence of cracks in the material layer at the corner portion. Is suppressed.
- the reliability of the substrate 30 is enhanced by the groove 33 described above. Further, the substrate 30 can be obtained relatively easily by utilizing the difference in etching rate depending on the plane orientation.
- the damascene wiring structure 100 described above is formed by embedding the wiring portion 60 and the like in the groove portion 33 having the bottom surface 33a, the side surface 33b, and the inclined surface 33c as described above. Therefore, cracks in the insulating layer 40 are suppressed at the corners of the groove 33. Therefore, in the damascene wiring structure 100, the groove portion 33 improves the reliability.
- the bottom surface 33a is a surface along the (100) plane
- the side surface 33b is a surface along the (110) plane
- the inclined surface 33c is a surface along the (111) plane. .. According to the above configuration, it is possible to easily obtain the damascene wiring structure 100 having the above-described effects by utilizing the difference in etching rate depending on the plane orientation.
- FIG. 11 is a perspective view schematically showing a corner portion of the damascene wiring structure 100 (that is, an outer corner portion where the first groove portion 133 and the second groove portion 233 intersect).
- FIG. 11 illustrates a state before the damascene wiring structure 100 is formed (that is, a state before the wiring portion 60 and the like are embedded in the first groove portion 133 and the second groove portion 233).
- the first groove 133 and the second groove 233 share the bottom surface 33a. That is, the bottom surface 33a of the first groove portion 133 and the bottom surface 33a of the second groove portion 233 are continuous at the corner.
- the first groove 133 has a first side surface 133b and a first inclined surface 133c.
- the first inclined surface 133c is connected to the bottom surface 33a and the first side surface 133b between the bottom surface 33a and the first side surface 133b, and is inclined with respect to the bottom surface 33a and the first side surface 133b.
- the bottom surface 33a is along the (100) plane
- the first side surface 133b is along the (110) plane
- the first inclined surface 133c is along the (111) plane. .. Therefore, the angle formed by the bottom surface 33a and the first inclined surface 133c is approximately 125.3 degrees, and the angle formed by the first side surface 133b and the first inclined surface 133c is approximately 144.7 degrees.
- the second groove portion 233 has a second side surface 233b and a second inclined surface 233c.
- the second inclined surface 233c is connected to the bottom surface 33a and the second side surface 233b between the bottom surface 33a and the second side surface 233b, and is inclined with respect to the bottom surface 33a and the second side surface 233b.
- the bottom surface 33a is along the (100) plane
- the second side surface 233b is along the (110) plane
- the second inclined surface 233c is along the (111) plane. .. Therefore, the angle formed by the bottom surface 33a and the second inclined surface 233c is approximately 125.3 degrees, and the angle formed by the second side surface 233b and the second inclined surface 233c is approximately 144.7 degrees.
- An intermediate surface 35 is formed between the first side surface 133b and the second side surface 233b and between the first inclined surface 133c and the second inclined surface 233c.
- the intermediate surface 35 is connected to the first side surface 133b, the second side surface 233b, the first inclined surface 133c, the second inclined surface 233c, and the bottom surface 33a.
- the intermediate surface 35 is along the (100) plane parallel to the direction (X-axis direction) perpendicular to the main surface 31 (see FIG. 5).
- the intermediate surface 35 is formed by the difference in etching rate depending on the plane orientation. Specifically, since the etching rate of the (100) plane is slower than that of the (110) plane, the intermediate surface 35 that is the (100) plane is exposed.
- the angle formed by the intermediate surface 35 and the first side surface 133b and the angle formed by the intermediate surface 35 and the second side surface 233b are both obtuse angles. Specifically, each of the above angles is approximately 135 degrees.
- the intermediate surface 35 may be a flat surface as shown in FIG. 11, or the portion of the intermediate surface 35 between the first side surface 133b and the second side surface 233b may have the first slope of the intermediate surface 35. It may be inclined with respect to the portion between the surface 133c and the second inclined surface 233c. Further, the intermediate surface 35 does not necessarily have to be formed at a right angle to the bottom surface 33a, and the intermediate surface 35 may be inclined with respect to the bottom surface 33a.
- the angle (that is, the corner when viewed from the direction perpendicular to the main surface 31 (the X-axis direction in FIG. 5)) where the first groove 133 and the second groove 233 intersect each other (that is, The angle formed by the intermediate surface 35 and the first side surface 133b or the angle formed by the intermediate surface 35 and the second side surface 233b is the angle of the corner when the intermediate surface 35 is not formed (that is, the first side surface 133b and the first side surface 133b). Angle formed by the two side surfaces 233b).
- the angle of the corner when the intermediate surface 35 is formed is Is approximately 135 degrees
- the angle of the corner portion when the intermediate surface 35 is not formed is approximately 90 degrees. That is, by forming the intermediate surface 35, a rounded corner portion (that is, a corner portion that is gradually bent) is formed as compared with the case where the intermediate surface 35 is not formed. With such a corner portion, it is possible to effectively reduce the stress acting on the wiring portion 60 at the corner portion when the substrate 30 is vibrated or the like. Therefore, according to the above configuration, it is possible to obtain the damascene wiring structure 100 with further improved reliability.
- the substrate 30 is frequently vibrated due to the swing of the first movable portion 3 or the second movable portion 4. Therefore, the above-described configuration of the corner portion (that is, the configuration in which the intermediate surface 35 is formed) is particularly effective.
- the insulating layer 40 is provided with the first portion 41 provided on the inner surface of the groove portion 33, and the second portion 42 provided integrally with the first portion 41 and provided on the main surface 31.
- the cap layer 70 is provided so as to cover the second portion 42 of the insulating layer 40, the end portion 51 of the metal layer 50, and the wiring portion 60.
- the end portion of the insulating layer 40 is located near the boundary portion between the main surface 31 and the groove portion 33, and the main surface 31 and the cap layer 70 are separated from each other. Contact.
- the substrate 30, the end portion of the insulating layer 40, the end portion 51 of the metal layer 50, the wiring portion 60, and the cap layer 70 come into contact with each other at positions close to each other. Stress is likely to be concentrated at such places.
- the damascene wiring structure 100 since the end portion of the insulating layer 40 does not exist in the vicinity of the boundary portion between the main surface 31 and the groove portion 33, the location where stress is concentrated can be reduced.
- the end portion 51 of the metal layer 50 extends so as to contact the cap layer 70. If the end portion 51 does not reach the cap layer 70 and remains at a position lower than the surface 60a of the wiring portion 60, a void may occur in a portion of the wiring portion 60 exposed from the metal layer 50. There is. On the other hand, in the damascene wiring structure 100, generation of such voids can be suppressed, and peeling of the cap layer 70 or the like due to the voids can be suppressed. Further, the surface 43a of the insulating layer 40 at the boundary portion 43 between the first portion 41 and the second portion 42 opposite to the substrate 30 includes the inclined surface 43b, and the end portion 51 of the metal layer 50 is the cap layer.
- the damascene wiring structure 100 has improved reliability.
- the thickness T1 of the cap layer 70 is thicker than the thickness T2 of the insulating layer 40. Thereby, the strength of the cap layer 70 can be increased and the reliability can be further improved.
- a portion of the cap layer 70 that contacts the first surface 51 a of the end portion 51 and a portion of the insulating layer 40 that contacts the second surface 51 b of the end portion 51 are made of the same material. Thereby, the bonding strength between the cap layer 70 and the insulating layer 40 can be increased in the vicinity of the contact portion between the cap layer 70 and the end portion 51 of the metal layer 50, and the reliability can be further improved.
- the insulating layer 40 has a first layer 44 made of an oxide film and a second layer 45 made of a nitride film and provided on the first layer 44.
- a first layer 44 made of an oxide film and a second layer 45 made of a nitride film and provided on the first layer 44.
- the inclined surface 43b is curved in a convex shape. As a result, it is possible to more reliably suppress the concentrated action of stress on the cap layer 70.
- the third surface 51c of the end portion 51 of the metal layer 50 on the opposite side of the second surface 51b is inclined, and the part 61 of the wiring portion 60 includes the cap layer 70 and the third surface 51c. It's in between.
- the end portion 51 of the metal layer 50 can be pressed by the wiring portion 60, and the stress acting on the cap layer 70 from the metal layer 50 can be reduced.
- the thickness of the portion 61 of the wiring portion 60 in the direction A1 perpendicular to the main surface 31 is reduced, the stress acting on the cap layer 70 from the wiring portion 60 can be reduced.
- the thickness of the end 51 of the metal layer 50 in the direction A2 parallel to the main surface 31 is thicker than the thickness of the part of the metal layer 50 other than the end 51. Thereby, the contact area between the end portion 51 of the metal layer 50 and the cap layer 70 can be increased, and the stress acting on the cap layer 70 from the metal layer 50 can be more favorably dispersed.
- the thickness of the end portion 51 of the metal layer 50 in the direction A2 parallel to the main surface 31 gradually increases toward the tip of the end portion 51. Thereby, the contact area between the end portion 51 of the metal layer 50 and the cap layer 70 can be further increased, and the stress acting on the cap layer 70 from the metal layer 50 can be more preferably dispersed.
- the groove portion 33 extends in a spiral shape. Even when the groove 33 extends spirally in this way, high reliability can be obtained.
- the interval B between the adjacent portions 34 of the groove 33 may be smaller than the width W of the groove 33. Thereby, the pitch (interval) of the wiring can be narrowed, and the space can be saved.
- the width W of the groove 33 is smaller than the depth D of the groove 33. As a result, it is possible to save space and reduce the resistance of the wiring.
- the distance L between the bottom surface 33a of the groove 33 in the direction A1 perpendicular to the main surface 31 and the opposite surface (the surface 81a of the first silicon layer 81) opposite to the main surface 31 of the substrate 30. Is larger than the depth D of the groove 33.
- the damascene wiring structure 100 applied to the mirror device 1 has been described in the above embodiment, the damascene wiring structure 100 may be applied to devices other than the mirror device 1. Further, in the above-described embodiment, the biaxial type mirror device 1 that is rotatable about two axes (the first axis X1 and the second axis X2) is illustrated, but the damascene wiring structure 100 rotates about one axis. It may be applied to a movable single-axis type mirror device.
- the trench-shaped groove portions 32 and 33 extending in the direction along the main surface 31 are formed for the purpose of manufacturing the damascene wiring structure 100.
- a via-shaped recess having a circular cross section may be formed.
- the scallop formed on the side surface of the recess in the first step can be appropriately removed by the wet etching in the third step.
- the bottom surface of the recess may be removed after the third step is performed.
- the bottom surface of the recess may be removed by polishing the surface of the second silicon layer 82 opposite to the surface opposite to the insulating layer 83 to form the through hole.
- Such a through hole can be used, for example, to embed a through electrode (metal).
- the inclined surface formed in the third step can be removed by polishing, and a through hole that has a uniform width and extends straight and does not have a scallop can be obtained. it can.
- the SOI wafer SW whose orientation flat OF is the (110) plane is used. Therefore, in order to align the side surface 33b of the groove 33 with the (110) plane, the groove 33 was formed along the X-axis direction along the orientation flat OF or the Y-axis direction perpendicular to the orientation flat OF.
- the SOI wafer used for manufacturing the substrate 30 is not limited to the SOI wafer SW.
- the plane orientation of the SOI wafer is opposite to the plane orientation shown in FIG. That is, the (100) plane shown in FIG. 5 becomes the (110) plane, and the (110) plane shown in FIG. 5 becomes the (100) plane.
- the groove having the side surface along the (110) plane can be formed. That is, even when an SOI wafer having a plane orientation different from that of the SOI wafer SW is used, a groove having the same structure as the groove 33 described above is formed by adjusting the design (extending direction) of the groove. You can Further, in the SOI wafer SW, the crystal orientation of the first silicon layer 81 and the crystal orientation of the second silicon layer 82 do not necessarily have to match.
- the damascene wiring structure 100 may be configured as in the first modified example shown in FIG.
- the boundary portion between the main surface 31 and the groove portion 33 of the substrate 30 is inclined outward with respect to the direction A1 perpendicular to the main surface 31 when viewed from the extending direction of the wiring portion 60.
- a boundary surface 36 is provided.
- the boundary surface 36 is, for example, a flat surface. Since the boundary portion 43 of the insulating layer 40 is provided on the boundary surface 36, the boundary portion 43 extends along the boundary surface 36 and is inclined outward with respect to the direction A1 perpendicular to the main surface 31.
- the inclined surface 43b of the boundary portion 43 and the second surface 51b of the end portion 51 of the metal layer 50 are flat surfaces parallel to the boundary surface 36.
- the third surface 51c of the end portion 51 is also a flat surface inclined outward with respect to the direction A1.
- the inclination angle of the third surface 51c with respect to the direction A1 is gentler than the inclination angle of the second surface 51b with respect to the direction A1.
- the thickness of the end portion 51 in the direction A2 parallel to the main surface 31 gradually increases toward the tip of the end portion 51.
- the groove 33 is formed by reactive ion etching using a non-Bosch process and a Bosch process, for example.
- the boundary surface 36 is formed at the boundary portion between the main surface 31 and the groove portion 33 of the substrate 30.
- the reliability can be improved by combining the non-Bosch process and the Bosch process.
- the reliability can be enhanced as in the above embodiment. Further, since the boundary surface 36 is provided at the boundary portion between the main surface 31 and the groove portion 33 of the substrate 30, the formation of the inclined surface 43b can be facilitated. Also in the first modification, the interval B between the plurality of portions 34 included in the groove 33 may be smaller than the width W of the groove 33. In the case of the first modification, the interval B extends between the inner surfaces of the plurality of portions 34 other than the boundary surfaces 36 (in other words, the inner surface of the groove 33 extends along the direction A1 perpendicular to the main surface 31. The distance between the parts).
- the damascene wiring structure 100 may be configured as in the second modified example shown in FIG.
- the surface 60a of the wiring portion 60 is located closer to the bottom surface 33a of the groove 33 than the surface 42a of the second portion 42 of the insulating layer 40.
- the third surface 51c of the end portion 51 of the metal layer 50 is covered with a boundary portion 71 between a portion of the cap layer 70 on the surface 60a and a portion of the cap layer 70 on the surface 42a.
- the boundary portion 71 extends along the third surface 51c and is inclined outward with respect to the direction A1 perpendicular to the main surface 31.
- the dishing amount of the wiring portion 60 (the amount by which the wiring portion 60 is removed) is increased by adjusting the slurry in the chemical mechanical polishing in the seventh step. As a result, the wiring portion 60 having the shape shown in FIG. 13 can be formed.
- the reliability can be enhanced as in the above embodiment.
- the surface 60a is located on the bottom surface 33a side of the groove 33 with respect to the surface 42a. This can further reduce the number of places where stress is likely to concentrate.
- the boundary portion 71 covers the third surface 51c of the end portion 51, the contact area between the end portion 51 of the metal layer 50 and the cap layer 70 can be further increased, and the metal layer 50 changes to the cap layer 70.
- the acting stress can be dispersed more preferably.
- the damascene wiring structure 100 may be configured as in the third modified example shown in FIG.
- the surface 60a of the wiring part 60 is located closer to the bottom surface 33a of the groove 33 than the surface 42a of the second part 42 of the insulating layer 40 is, as in the second modification.
- the third surface 51 c of the end portion 51 of the metal layer 50 is covered with the boundary portion 71 of the cap layer 70.
- the thickness T1 of the cap layer 70 is larger than the distance H between the surface 60a and the surface 42a in the direction A1 perpendicular to the main surface 31.
- the reliability can be enhanced as in the above embodiment.
- the strength of the cap layer 70 can be further increased.
- the damascene wiring structure 100 may be configured as in the fourth modified example shown in FIG.
- the surface 60a of the wiring portion 60 is located closer to the bottom surface 33a of the groove 33 than the surface 42a of the second portion 42 of the insulating layer 40.
- the third surface 51 c of the end portion 51 of the metal layer 50 is covered with the boundary portion 71 of the cap layer 70.
- the thickness T1 of the cap layer 70 is smaller than the distance H between the surface 60a and the surface 42a in the direction A1 perpendicular to the main surface 31. According to the fourth modified example as well, the reliability can be enhanced as in the above embodiment.
- the thickness T1 of the cap layer 70 is smaller than the distance H between the surface 60a and the surface 42a in the direction A1 perpendicular to the main surface 31, the thickness of the wiring portion 60 in the direction A1 can be reduced. As a result, the stress acting on the cap layer from the wiring portion 60 can be further reduced.
- the third surface 51c of the end portion 51 of the metal layer 50 may extend along the second surface 51b.
- the degree of inclination (tilt angle) of the third surface 51c may be the same as the degree of inclination (tilt angle) of the second surface 51b.
- the third surface 51c and the second surface 51b may extend parallel to each other.
- the second portion 42 may be composed of the first layer 44 and the second layer 45. In this case, it is possible to further reduce the number of places where stress is likely to concentrate.
- the cap layer 70 is made of the same material as the second layer 45 of the insulating layer 40, the area of the portion where the same materials are joined is large, and thus the adhesion can be improved.
- the insulating layer 40 may be composed of a single layer.
- the insulating layer 40 may be composed of, for example, a single layer made of an oxide film.
- the cap layer 70 may be made of an oxide film.
- the first surface 51a and the second surface 51b may be connected so that their curvatures are continuous.
- the damascene wiring structure 100 may be applied to configurations other than the actuator device.
- Substrate semiconductor substrate
- 31 Main surface
- 32, 33 ... Groove portion 32a, 33a ... Bottom surface
- 32b, 33b ... Side surface 33 ... Groove portion (recessed portion)
- 33c ... Inclined surface, 35 ... Intermediate surface
- 40 Insulating layer, 41 ... First part, 42 ... Second part, 50 ... Metal layer, 51 ... End part, 60 ... Wiring part, 70 ... Cap layer, 100 ... Damascene wiring structure, 133 ... First groove part, 133b ... 1 side surface, 133c ... 1st inclined surface, 233 ... 2nd groove part, 233b ... 2nd side surface, 233c ... 2nd inclined surface, S ... scallop.
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Abstract
Description
図1は、一実施形態に係るダマシン配線構造100(図2参照)を含んで構成されたミラー装置1(アクチュエータ装置)の平面図である。図1に示されるように、ミラー装置1は、支持部2と、第1可動部3と、第2可動部4と、一対の第1連結部5,6と、一対の第2連結部7,8と、磁界発生部9と、を備えている。支持部2、第1可動部3、第2可動部4、第1連結部5,6及び第2連結部7,8は、例えば、半導体基板(基板30)によって一体的に形成されている。つまり、ミラー装置1は、MEMS(Micro Electro Mechanical Systems)デバイスとして構成されている。
図2~図4を参照しつつ、コイル21,22が有するダマシン配線構造100について説明する。コイル21,22の構成は互いに同一であるので、以下ではコイル22について説明し、コイル21についての説明を省略する。
続いて、図5~図10を参照しつつ、ダマシン配線構造100の製造方法(第1工程~第8工程)について説明する。ダマシン配線構造100の製造方法は、溝部33を有する半導体基板(基板30)の製造方法(第1工程~第3工程)を含む。なお、図6、及び図8~図10では、各部が模式的に示されている。特に、図8(b)、図9(a)、図9(b)、図10(a)、及び図10(b)では、傾斜面33cの図示が省略されており、溝部33が簡略化されている。
まず、基板30の主面31に対して、等方性エッチングを含む処理が施される。「等方性エッチングを含む処理」は、例えばボッシュプロセスである。ボッシュプロセスでは、等方性のドライエッチングによって溝部が形成され、当該溝部の内壁に保護膜が形成される。そして、当該溝部の底部の保護膜のみが異方性のドライエッチングによって除去された後、再度、等方性のドライエッチングによって溝部が形成される。ボッシュプロセスでは、このような処理が繰り返されることにより、溝部が掘り進められる。これにより、図6(b)及び図7(a)に示されるように、底面32aとスキャロップSが形成された側面32bとを有する溝部32が形成される。図6(b)は、溝部32の延在方向に垂直な一の断面を示している。図7(a)は、溝部32の底部(底面32aを含む部分)のSEM画像である。溝部32は、X軸方向又はY軸方向に平行な方向に延在するように形成される。スキャロップSは、側面32bに形成される微小な凹凸構造である。
上述したようなスキャロップSに起因する不具合(すなわち、ボイド又はクラック等の発生)を回避するために、第2工程及び第3工程が実施される。まず、溝部32の側面32bに対して親水化処理が行われる(第2工程)。親水化処理は、例えば、側面32bに対してO2アッシングを行う処理、又は側面32bを界面活性剤、アルコール等に浸す処理等である。なお、上記の親水化処理に代えて(或いは上記の親水化処理と併用して)、溝部32に対する脱気処理を行ってもよい。例えば、溝部32内に存在する溶液を脱気する脱気処理が行われてもよい。当該脱気処理は、溝部32内にエッチング液を充填され易くするための処理であり、親水化処理の一種でもある。
続いて、図8(b)に示されるように、基板30の主面31上に、溝部33の内面上に設けられた第1部分41と、第1部分41と一体的に形成され、主面31上に設けられた第2部分42と、を有する絶縁層40が形成される。より具体的には、シリコン酸化膜(熱酸化膜)からなる第1層44を主面31及び溝部33の内面上に形成した後に、シリコン窒化膜(LP-SiN)からなる第2層45を第1層44上に形成する。第1層44及び第2層45の厚さは、例えば100~1000nm程度である。
続いて、図9(a)に示されるように、絶縁層40の第1部分41及び第2部分42上に金属層50が形成される。第5工程では、金属層50上に金属層55が形成される。金属層55は、例えば、銅等の金属材料によって構成されている。金属層55は、金属層50と共にシード層として機能する。金属層50及び金属層55は、例えば、スパッタリングにより形成されるが、原子層堆積法(ALD)、化学成長法(CVD)、イオンプレーティング又は無電解メッキにより形成されてもよい。金属層50及び金属層55の総厚は、例えば10nm~3000nm程度である。
続いて、図9(b)に示されるように、溝部33内に埋め込まれた金属層50上に、配線部60が形成される。配線部60は、例えば、メッキにより形成される。配線部60は、例えば、主面31上における配線部60の厚さの平均が1μm以上となるように形成される。なお、この例では金属層55が配線部60と同一の材料により構成されているため、配線部60の形成時に配線部60と金属層55とが一体化され、配線部60と金属層55の間の界面が無くなる場合がある。この場合、金属層55は配線部60を構成するとみなすことができる。
続いて、図10(a)に示されるように、絶縁層40の第2部分42が露出するように、例えば化学機械研磨(CMP)により、第2部分42上の金属層50、金属層55及び配線部60が除去される。第7工程では、絶縁層40、金属層50、金属層55及び配線部60に対して、基板30とは反対側から化学機械研磨が実施される。絶縁層40、金属層50、金属層55及び配線部60の各々について、主面31に垂直な方向A1における主面31又は底面33aとは反対側の一部が除去されることにより、絶縁層40、金属層50、金属層55及び配線部60が平坦化される。このとき、この例では、絶縁層40の第2層45のうち第2部分42を構成する部分が除去される。
続いて、図10(b)に示されるように、絶縁層40の第2部分42、金属層50の端部51、及び配線部60を覆うように、キャップ層70が形成される。キャップ層70は、例えばシリコン窒化膜(PE-SiN)からなり、200~3000nm程度の厚さに形成される。続いて、第2シリコン層82及び絶縁層83が、エッチング等により除去される。以上の工程により、上述したダマシン配線構造100が得られる。
上述した半導体基板の製造方法(第1工程~第3工程)では、第1工程において底面33aとスキャロップSが形成された側面33bとを有する溝部32を形成した後に、第2工程において溝部32の側面32bに対する親水化処理又は溝部32に対する脱気処理を行うことにより、溝部32の側面32bに対するエッチング液の濡れ性を向上させることができる。また、溝部32の底面32aが存在する状態で異方性のウェットエッチングを行うことにより、溝部32内にエッチング液を効果的に充填させることができる。これにより、エッチング液で溝部32の側面32bの全体を濡らすことができ、側面32bに形成されたスキャロップSを効果的に除去することができる。すなわち、スキャロップSが除去された溝部33が得られる。スキャロップSが除去されることにより、溝部における構造上のウィークポイントを解消することができる。
以上、本開示の好適な実施形態について詳細に説明されたが、本開示は上記実施形態に限定されない。各構成の材料及び形状は、上述した例に限られない。上記実施形態では、ミラー装置1に適用されるダマシン配線構造100について説明したが、ダマシン配線構造100は、ミラー装置1以外の装置に適用されてもよい。また、上記実施形態では、二軸(第1軸線X1及び第2軸線X2)の周りに回動可能な二軸タイプのミラー装置1を例示したが、ダマシン配線構造100は、一軸の周りに回動可能な一軸タイプのミラー装置に適用されてもよい。
Claims (7)
- 等方性エッチングを含む処理を半導体基板の主面に施すことにより、底面とスキャロップが形成された側面とを有する凹部を形成する第1工程と、
前記凹部の前記側面に対する親水化処理及び前記凹部に対する脱気処理の少なくとも一方を行う第2工程と、
前記凹部の前記底面が存在する状態で、異方性のウェットエッチングを行うことにより、前記凹部の前記側面に形成された前記スキャロップを除去し、前記側面を平坦化する第3工程と、を含む半導体基板の製造方法。 - 前記第1工程では、前記半導体基板の前記主面に沿って延在する溝部が前記凹部として形成される、請求項1に記載の半導体基板の製造方法における前記第1工程、前記第2工程、及び前記第3工程と、
前記第3工程の後に、前記溝部の内面上に設けられた第1部分と、前記第1部分と一体的に形成され、前記主面上に設けられた第2部分と、を有する絶縁層を形成する第4工程と、
前記絶縁層の前記第1部分及び前記第2部分上に金属層を形成する第5工程と、
前記溝部内に埋め込まれた前記金属層上に配線部を形成する第6工程と、
前記絶縁層の前記第2部分が露出するように、前記第2部分上の前記金属層及び前記配線部を除去する第7工程と、
前記第7工程の後に、前記絶縁層の前記第2部分、前記金属層の端部、及び前記配線部を覆うようにキャップ層を形成する第8工程と、を含む、ダマシン配線構造の製造方法。 - 前記半導体基板の前記主面が(100)面に沿っており、
前記第1工程では、(110)面に沿った方向に延在する前記溝部を形成する、請求項2に記載のダマシン配線構造の製造方法。 - 凹部が設けられた主面を備え、
前記凹部は、底面と、側面と、傾斜面と、を有し、
前記傾斜面は、前記底面及び前記側面の間において前記底面及び前記側面に接続されると共に、前記底面及び前記側面と鈍角を成すように前記底面及び前記側面に対して傾斜しており、
前記底面の面方位と前記側面の面方位と前記傾斜面の面方位とが互いに異なる、半導体基板。 - 請求項4に記載の半導体基板と、絶縁層と、金属層と、配線部と、キャップ層と、を備え、
前記凹部は、前記主面に沿って延在する溝部であり、
前記絶縁層は、前記溝部の内面上に設けられた第1部分と、前記第1部分と一体的に形成され、前記主面上に設けられた第2部分と、を有し、
前記金属層は、前記絶縁層の前記第1部分上に設けられており、
前記配線部は、前記溝部内に埋め込まれた前記金属層上に形成されており、
前記キャップ層は、前記絶縁層の前記第2部分、前記金属層の端部、及び前記配線部を覆うように設けられている、ダマシン配線構造。 - 前記底面は(100)面に沿った面であり、
前記側面は(110)面に沿った面であり、
前記傾斜面は(111)面に沿った面である、請求項5に記載のダマシン配線構造。 - 前記凹部は、前記主面に沿った第1方向に延在する第1溝部と、前記第1溝部と前記底面を共有し、前記第1方向に交差する前記主面に沿った第2方向に延在する第2溝部と、を有し、
前記第1溝部は、第1側面と、前記底面及び前記第1側面の間において前記底面及び前記第1側面に接続されると共に前記底面及び前記第1側面に対して傾斜する第1傾斜面と、を有し、
前記第2溝部は、第2側面と、前記底面及び前記第2側面の間において前記底面及び前記第2側面に接続されると共に前記底面及び前記第2側面に対して傾斜する第2傾斜面と、を有し、
前記第1側面と前記第2側面との間、及び前記第1傾斜面と前記第2傾斜面との間には、中間面が形成されており、
前記中間面は、前記第1側面、前記第2側面、前記第1傾斜面、前記第2傾斜面、及び前記底面に接続されており、
前記中間面と前記第1側面及び前記第2側面の各々とが成す角度は、鈍角である、請求項5又は6に記載のダマシン配線構造。
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