WO2020029237A1 - Detection method and system - Google Patents

Detection method and system Download PDF

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Publication number
WO2020029237A1
WO2020029237A1 PCT/CN2018/099921 CN2018099921W WO2020029237A1 WO 2020029237 A1 WO2020029237 A1 WO 2020029237A1 CN 2018099921 W CN2018099921 W CN 2018099921W WO 2020029237 A1 WO2020029237 A1 WO 2020029237A1
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Prior art keywords
coherent light
measured
speckle image
multiple beams
glass
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PCT/CN2018/099921
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French (fr)
Chinese (zh)
Inventor
王星泽
舒远
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合刃科技(深圳)有限公司
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Priority to CN201880067184.XA priority Critical patent/CN111226110A/en
Priority to PCT/CN2018/099921 priority patent/WO2020029237A1/en
Publication of WO2020029237A1 publication Critical patent/WO2020029237A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination

Definitions

  • the present application relates to the field of electronics, and in particular, to a detection method and system.
  • glass defect detection systems mainly use manual online detection, laser detection, Moore interference principle, and machine vision methods. Manual inspection is susceptible to subjective factors of inspectors, and it is easy to miss inspections of glass defects, especially missing inspections of inclusion defects with small deformation and small distortion. Laser detection is susceptible to external interference, which affects the accuracy of the detection.
  • the Moore interference principle requires relatively high light and dark contrast of the grating due to the thin Moiré fringes in the grating, otherwise the error is large; and the machine vision-based method uses CCD imaging technology and backlight In type lighting, a light source is placed on the back of the glass. The light passes through the glass to be inspected and is transmitted to the camera. When the glass contains impurities, the emitted light will change, so the light detected on the target surface of the CCD camera will change accordingly.
  • the present application provides a detection method and system, which can quickly detect curved glass.
  • a detection system including:
  • Coherent light source for generating coherent light
  • Reflector for adjusting the irradiation angle of part or all of the coherent light
  • a collection detector configured to collect a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light being reflected by the object to be measured, and determine according to the speckle image Whether the glass is defective.
  • the collection detector is specifically configured to collect a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light being reflected by the object to be measured and formed in a non-imaging manner .
  • the acquisition detector is further configured to determine whether there is a defect in the object to be measured according to the speckle image and a neural network of deep learning.
  • the de-coherent light includes a first de-coherent light and a second de-coherent light
  • the curved portion includes a first curved portion and a second curved portion, wherein the first de-coherent light is used to illuminate the light.
  • the first curved portion, and the second divided coherent light is used to irradiate the second curved portion.
  • the reflecting mirror includes a first reflecting mirror and a second reflecting mirror, wherein the first reflecting mirror is used to adjust an angle at which the first divided coherent light illuminates the first curved portion, and the first The two reflecting mirrors are used to adjust an angle at which the second divided coherent light illuminates the second bending portion.
  • the system further includes a first concave lens and a second concave lens, the first concave lens is used for diffusing the first divided coherent light, and the second concave lens is used for diffusing the second divided coherent light For diffusion.
  • the system further includes a beam expander, which is configured to diffuse the coherent light that irradiates the flat portion of the object to be measured.
  • a beam expander which is configured to diffuse the coherent light that irradiates the flat portion of the object to be measured.
  • the system further includes a prism mirror, which is configured to expand an irradiation area of the coherent light that irradiates the straight portion of the object to be measured.
  • a prism mirror which is configured to expand an irradiation area of the coherent light that irradiates the straight portion of the object to be measured.
  • the spectrum of the coherent light ranges from 215 to 2000 nanometers.
  • a detection method including:
  • Coherent light source produces coherent light
  • a beam splitter divides the coherent light into multiple beams of coherent light, wherein the multiple beams of coherent light are used to illuminate an object to be measured;
  • the reflector adjusts the irradiation angle of part or all of the coherent light
  • a collection detector collects a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light are reflected by the object to be measured, and determines the glass according to the speckle image Whether there are defects.
  • a speckle image formed by transmitting the multiple beams of coherent light through the object to be measured or the multiple beams of coherent light being reflected by the object to be measured and formed in a non-imaging manner is collected.
  • the method further comprises: the acquisition detector determines whether there is a defect in the object to be measured according to the speckle image and a deep learning neural network; wherein the neural network uses a large sample of speckles Images for training and learning.
  • the de-coherent light includes a first de-coherent light and a second de-coherent light
  • the curved portion includes a first curved portion and a second curved portion, wherein the first de-coherent light is used to illuminate the light.
  • the first curved portion, and the second divided coherent light is used to irradiate the second curved portion.
  • the reflecting mirror includes a first reflecting mirror and a second reflecting mirror, wherein the first reflecting mirror is used to adjust an angle at which the first divided coherent light illuminates the first curved portion, and the first The two reflecting mirrors are used to adjust an angle at which the second divided coherent light illuminates the second bending portion.
  • the system further includes a first concave lens and a second concave lens, the first concave lens is used for diffusing the first divided coherent light, and the second concave lens is used for diffusing the second divided coherent light For diffusion.
  • the method further includes: diffusing the coherent light that irradiates the straight portion of the object to be measured through a beam expander.
  • the method further includes: expanding the irradiation area of the coherent light that irradiates the straight portion of the object to be measured by a prism mirror.
  • the spectrum of the coherent light ranges from 215 to 2000 nanometers.
  • coherent light is generated by a coherent light source, and then the coherent light is divided into a plurality of beams of coherent light by a beam splitter, and the angle of the beam of coherent light that irradiates the curved part of the object to be measured is collected by a reflector,
  • the detector collects a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light are reflected by the object to be measured.
  • the acquisition detector determines the speckle image based on the speckle image. Whether there is a defect in the object to be tested. It is not difficult to see that the above solution can quickly detect curved glass.
  • FIG. 1 is a schematic diagram of changes in light transmission through a curved glass in the prior art
  • FIG. 2 is a schematic structural diagram of a detection system proposed in the present application.
  • FIG. 3 is a comparison diagram of light intensity when there are no air bubbles and when there are air bubbles in the present application;
  • FIG. 4 is a schematic diagram of a neural network proposed by the present application.
  • FIG. 5 is a schematic flowchart of an inspection method proposed in the present application.
  • 3D glass is flat in the middle and gradually curved on both sides.
  • the curved part of 3D glass is caused by heating and bending of flat glass, which is prone to various damages, such as scratches, surface residues, depressions, etc. Therefore, the probability of problems in the curved part is much higher than the probability of problems in the straight part. Need to focus on testing to avoid a large number of bad products.
  • Figure 1 is a comparison between 2D glass and 3D glass after parallel backlight detection.
  • the C (scratch) of 3D glass in a curved place cannot be detected because the backlight penetrates too much glass and the light intensity is attenuated. .
  • the present application proposes a detection system and method, which can quickly detect curved glass, and improve the accuracy of detection of curved glass.
  • the present application provides a schematic structural diagram of a detection system.
  • the detection system of the present application includes a coherent light source 110, a beam splitter 120, a reflector 130, and a collection detector 140.
  • the coherent light source 110 generates coherent light and sends the coherent light to the beam splitter 120.
  • the beam splitter 120 divides the coherent light into a plurality of beams of coherent light, wherein the plurality of beams of coherent light is used to illuminate an object to be measured.
  • the reflecting mirror 130 adjusts the irradiation angle of part or all of the coherent light.
  • the acquisition detector 140 collects a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light are reflected by the object to be measured, and determines the speckle image according to the speckle image Whether the object to be tested is defective.
  • the object to be measured is described as glass.
  • the coherent light generated by the coherent light source 110 is linearly polarized light having the same frequency and the same vibration direction. Because the non-imaging speckle image is used for monitoring, there is no dispersion problem of the lens of the imaging system in different spectral bands. In this way, the value range of the coherent light spectrum can be relatively large.
  • the value range of the coherent light spectrum can be 215-2000 nm. That is, the spectrum of coherent light can extend from ultraviolet to near-infrared light. It can be understood that the value range of the above-mentioned coherent light spectrum is merely an example, and should not constitute a specific limitation.
  • Coherent speckle defect detection is used to obtain more defect information on the surface of the inspected item, such as intensity information, phase information, and incident angle information after the defect is reflected, so as to identify more defects that cannot be detected by traditional methods, such as fine scratching. Injuries, chipping, internal bubbles, etc.
  • the beam splitter 120 may include one or more beam splitters.
  • the beam splitter When the beam splitter splits the coherent light, it will distribute multiple beams of the coherent light according to the proportion of the optical power.
  • the optical power of each beam of coherent light can be determined by the area of the glass irradiated by each beam of coherent light. For example, if the ratio of the area of the glass illuminated by the first decoherent light and the area of the glass illuminated by the second decoherent light is 2: 1, then the optical power of the first decoherent light and the optical power of the second decoherent light The ratio is also 2: 1. It can be understood that the first and second coherent lights are obtained from the same coherent light. Therefore, it is strictly guaranteed that the frequencies and vibration directions of the first and second coherent lights are consistent.
  • the beam splitter 120 includes a first beam splitter 121 and a second beam splitter 122. It should be understood that the above-mentioned beam splitter 120 is merely an example. In other embodiments, the number of beam splitters 120 may be less or more, which is not specifically limited herein.
  • the reflecting mirror 130 includes a first reflecting mirror 131 and a second reflecting mirror 132. It should be understood that the above-mentioned reflecting mirror 130 is merely an example. In other embodiments, the number of reflecting mirrors 130 may be less or more, which is not specifically limited herein.
  • the detection system further includes a concave lens, wherein the concave lens is used to diffuse the coherent light.
  • the concave lens includes a first concave lens 151 and a second concave lens 152. It should be understood that the foregoing concave lens is merely an example. In other embodiments, the number of the concave lens may be less or more, which is not specifically limited herein.
  • the detection system further includes a beam expander 160, wherein the beam expander 160 is configured to diffuse the coherent light that irradiates the flat portion of the object to be measured.
  • the detection system further includes a prism mirror for expanding an irradiation area of the coherent light that irradiates the flat portion of the object to be measured.
  • the coherent light generated by the coherent light source 110 is incident on the first beam splitter 121.
  • the first beam splitter 121 separates the first divided coherent light from the coherent light.
  • the first concave lens 151 is disposed on the optical path of the first divided coherent light, and the first divided coherent light passes through the axis of the first concave lens 151.
  • the first concave lens 151 diffuses the first divided coherent light to obtain the diffused first divided coherent light.
  • the first reflecting mirror 131 is disposed on the optical path of the diffused first divided coherent light, and the first reflecting mirror 131 reflects the diffused first divided coherent light so that the reflected first divided coherent light is illuminated The first bend (the left wing portion of the 3D glass).
  • the second beam splitter 122 After passing through the first beam splitter 121, the remaining coherent light is incident on the second beam splitter 122.
  • the second beam splitter 122 separates the second divided coherent light from the remaining coherent light.
  • the second concave lens 152 is disposed on the optical path of the second divided coherent light, and the second divided coherent light passes through the axis of the second concave lens 152.
  • the second concave lens 152 diffuses the second divided coherent light to obtain the diffused second divided coherent light.
  • the second reflector 132 is disposed on the optical path of the diffused second divided coherent light, and the second reflector 132 reflects the diffused second divided coherent light so that the reflected second divided coherent light is irradiated
  • the second curved portion (the right wing portion of the 3D glass).
  • the remaining split coherent light After passing through the second beam splitter 122, the remaining split coherent light enters the beam expander 160.
  • the beam expander 160 is configured to diffuse the remaining split coherent light to obtain the diffused split coherent light, and irradiate the flat portion (the middle portion of the 3D glass).
  • the first concave lens, the second concave lens, and the beam expander diffuse the first, second, and remaining split coherent light, respectively, so that the light can be more uniformly irradiated on the first The bent portion, the second bent portion, and the straight portion.
  • the above detection system is only a specific embodiment. In other embodiments, it may further include more reflecting mirrors, concave lenses, beam expanders, and the like. Only the first split coherent light and the second The decoherent light and the remaining decoherent light perform transillumination on the glass of the curved part and the straight part in a vertical manner as much as possible, which is not specifically limited here.
  • the acquisition detector 140 includes one or more photoelectric sensors, wherein the photoelectric sensors are used to acquire speckle images.
  • the positions and numbers of the photoelectric sensors can be set according to actual needs, and are not specifically limited here.
  • the collection detector 140 is specifically configured to collect the multiple beams of coherent light through the object to be measured or the multiple beams of coherent light are reflected by the object to be measured and in a non-imaging manner Speckle image formed.
  • the non-imaging method means that it is not necessary to perform a restoration calculation on the 3D glass according to the speckle image to determine whether there is a defect, but to directly determine whether a defect exists based on the speckle image calculation. It can be understood that when the speckle image is formed in a non-imaging form, the defect information is reflected in the speckle image.
  • Resolving and reconstructing the real image of the object such as phase solving, directly discriminates and detects defects on the speckle image, which can effectively reduce the amount of data calculation and increase the speed of recognition.
  • the speckle image is an image formed when light passes through the optically rough surface of the vibrating object or light is reflected by the optically rough surface of the vibrating object.
  • optically rough surfaces or transmission plates with optically rough transmission
  • the wavelets scattered by irregularly distributed surfaces on these surfaces are superimposed on each other.
  • make the reflected light field (or transmitted light field) have a random spatial light intensity distribution and present a granular structure, which is speckle. For example, as shown in FIG. 3, when a bubble appears inside the curved surface of the glass, the speckle distribution on the image collector changes.
  • the light intensity in the area where bubbles are present in the glass will increase significantly.
  • surface scratches, residues, pits, etc. can cause changes in light intensity.
  • these defects are generally in the range of 10 micrometers to 5 millimeters.
  • the detection accuracy can reach more than 5 micrometers, so it is sufficient to check most defects.
  • the shape of glass defects is complex and changeable. These features cannot well represent the defect target. If the speckle image with a glass defect structure is directly subjected to phase inversion to obtain an image restoration image, the restored image will be greatly distorted, and it is almost impossible to identify whether there is a defect in the glass. Therefore, in this application, the speckle image can be input into a neural network to determine whether a defect exists in the glass.
  • the speckle image initially collected by the acquisition detector 140 is a speckle image full of noise.
  • the useful information in the speckle image is submerged in a large amount of noise. Therefore, the acquisition detector 140 needs to process the speckle image collected initially to obtain a processed speckle image to remove speckle noise and improve fringe contrast.
  • methods for processing an image include a phase shift method, a fringe grayscale method, a fringe centerline method, a Fourier transform method, a sub-pixel search method, and so on. It should be understood that the foregoing processing methods are merely examples, and should not constitute a specific limitation.
  • the speckle image may include a straight speckle image and a curved speckle image, which are not specifically limited herein.
  • the flat speckle image may be one or more.
  • the number of straight speckle images can be one; when the area of the straight portion is relatively small, the number of straight speckle images can be multiple, and different straight speckles The image corresponds to different areas of the straight portion.
  • the number of straight speckle images can be set according to the area of the flat portion of the glass, which is not specifically limited this time.
  • the curved speckle image may be one or more.
  • the number of curved speckle images when the curved portions are concentrated in the same area, the number of curved speckle images may be one; when the curved portions are scattered in multiple regions, the number of curved speckle images may be multiple, and different curved speckle images correspond to Different areas of the bend.
  • the number of curved speckle images can be set according to the area where the curved portion of the glass is scattered, which is not specifically limited this time.
  • the acquisition detector 140 is configured to determine whether the glass has a defect according to the speckle image and a deep learning neural network.
  • the input of the deep learning neural network includes a first curved speckle image, a second curved speckle image, a first flat speckle image, and a second flat speckle image.
  • the example of the input of the neural network is merely an example. In actual applications, the speckle image input by the neural network may be more or less, which is not specifically limited herein.
  • the output results of the deep learning neural network may include: no defects, scratches, bubbles, dirt, etc.
  • the output results may also be expressed using fewer or more levels. . It can be understood that the above-mentioned level division is only used as an example, and the more the level division is, the more accurate the output result is represented.
  • the deep learning neural network includes multiple training models.
  • the training model may include a defect-free training model, a bubble model, a dirty model, and so on.
  • the above training model is merely an example, and in actual applications, more or less training models may be included, which is not specifically limited herein.
  • the neural network can be BP neural network, Hopfield network, ART network, Kohonen network, Long Short-Term Memory (LSTM), Residual Network (ResNet), Recurrent Neural Networks , RNN), etc., are not specifically limited here.
  • the output when the input includes a first curved speckle image, a second curved speckle image, a first flat speckle image, and a second flat speckle image, the output includes no defects, scratches, and bubbles.
  • the dirty, deep learning neural network can be shown in Figure 4.
  • the deep learning neural network may be trained and learned using a large sample of speckle images. For example, a large number of speckle images are collected according to different defect samples in advance, and the deep neural network is used to classify and train these speckle images that can indirectly reflect the fine structure of glass to obtain the correct neural network. During recognition, the collected speckle images are input to the trained neural network to obtain the recognition results.
  • coherent light is generated by a coherent light source, and then the coherent light is divided into multiple beams of coherent light by a beam splitter, and the irradiation angle of part or all of the coherent light is adjusted by a mirror, and the acquisition detector collects the multi A beam of decoherent light passes through the object to be measured or a speckle image formed by the reflection of the multi-beam of decoherent light by the object to be measured, and finally, the acquisition detector determines whether the object to be measured is based on the speckle image Flawed. It is not difficult to see that the above solution can quickly detect curved glass.
  • FIG. 5 is a schematic flowchart of a detection method provided by the present application.
  • the object to be measured is described as glass.
  • the detection method in this embodiment includes the following steps:
  • the coherent light source generates coherent light.
  • the coherent light generated by the coherent light source is linearly polarized light having the same frequency and the same vibration direction. Because the non-imaging speckle image is used for monitoring, there is no dispersion problem of the lens of the imaging system in different spectral bands. In this way, the value range of the coherent light spectrum can be relatively large. 215-2000 nm. That is, the spectrum of coherent light can extend from ultraviolet to near-infrared light. It can be understood that the value range of the above-mentioned coherent light spectrum is merely an example, and should not constitute a specific limitation.
  • Coherent speckle defect detection is used to obtain more defect information on the surface of the inspected item, such as intensity information, phase information, and incident angle information after the defect is reflected, so as to identify more defects that cannot be detected by traditional methods, such as fine scratching. Injuries, chipping, internal bubbles, etc.
  • a beam splitter divides the coherent light into multiple beams of coherent light, wherein the multiple beams of coherent light are used to illuminate an object to be measured.
  • the beam splitter may include one or more beam splitters.
  • the optical splitter splits coherent light, it will distribute multiple beams of split coherent light according to the proportion of the optical power.
  • the optical power of each beam of coherent light can be determined by the area of the glass irradiated by each beam of coherent light. For example, if the ratio of the area of the glass illuminated by the first decoherent light and the area of the glass illuminated by the second decoherent light is 2: 1, then the optical power of the first decoherent light and the optical power of the second decoherent light The ratio is also 2: 1. It can be understood that the first and second coherent lights are obtained from the same coherent light. Therefore, it is strictly guaranteed that the frequencies and vibration directions of the first and second coherent lights are consistent.
  • the beam splitter includes a first beam splitter and a second beam splitter. It should be understood that the above-mentioned beam splitter is merely an example. In other embodiments, the number of beam splitters may be less or more, which is not specifically limited herein.
  • the reflector adjusts the irradiation angle of part or all of the coherent light.
  • the reflecting mirror includes a first reflecting mirror and a second reflecting mirror. It should be understood that the above-mentioned reflecting mirror is merely an example, and in other embodiments, the number of reflecting mirrors may be less or more, which is not specifically limited herein.
  • the detection system further includes a concave lens, wherein the concave lens is used to diffuse the coherent light.
  • the concave lens includes a first concave lens and a second concave lens. It should be understood that the foregoing concave lens is merely an example. In other embodiments, the number of the concave lens may be less or more, which is not specifically limited herein.
  • the detection system further includes a beam expander, wherein the beam expander is configured to diffuse the coherent light that irradiates the flat portion of the object to be measured.
  • the detection system further includes a prism mirror for expanding an irradiation area of the coherent light that irradiates the flat portion of the object to be measured.
  • the coherent light generated by the coherent light source is incident on the first beam splitter.
  • the first beam splitter separates the first divided coherent light from the coherent light.
  • the first concave lens is disposed on the optical path of the first divided coherent light, and the first divided coherent light passes through the axis of the first concave lens.
  • the first concave lens diffuses the first divided coherent light to obtain the diffused first divided coherent light.
  • the first reflector is disposed on the optical path of the diffused first divided coherent light, and the first reflector reflects the diffused first divided coherent light so that the reflected first divided coherent light irradiates the first Bend (left wing part of 3D glass). After passing through the first beam splitter, the remaining coherent light is incident on the second beam splitter.
  • the second beam splitter separates the second coherent light from the remaining coherent light.
  • the second concave lens is disposed on the optical path of the second divided coherent light, and the second divided coherent light passes through the axis of the second concave lens.
  • the second concave lens diffuses the second divided coherent light to obtain a diffused second divided coherent light.
  • the second reflector is disposed on the optical path of the diffused second divided coherent light, and the second reflector reflects the diffused second divided coherent light so that the reflected second divided coherent light irradiates the second Bend (right wing part of 3D glass). After passing through the second beam splitter, the remaining split coherent light enters the beam expander.
  • the beam expander is configured to diffuse the remaining split coherent light to obtain the diffused split coherent light, and irradiate the flat portion (the middle portion of the 3D glass).
  • the first concave lens, the second concave lens, and the beam expander diffuse the first, second, and remaining split coherent light, respectively, so that the light can be more uniformly irradiated on the first The bent portion, the second bent portion, and the straight portion.
  • the above detection system is only a specific embodiment. In other embodiments, it may further include more reflecting mirrors, concave lenses, beam expanders, and the like. Only the first split coherent light and the second The decoherent light and the remaining decoherent light perform transillumination on the glass of the curved part and the straight part in a vertical manner as much as possible, which is not specifically limited here.
  • a collection detector collects a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light are reflected by the object to be measured, and determines the speckle image based on the speckle image. Describes whether the glass is defective.
  • the acquisition detector includes one or more photoelectric sensors, wherein the photoelectric sensors are used to acquire speckle images.
  • the positions and numbers of the photoelectric sensors can be set according to actual needs, and are not specifically limited here.
  • the acquisition detector collects the speckles that are transmitted by the multi-beam decoherent light through the object or the multi-beam decoherent light is reflected by the object and is formed in a non-imaging manner. image.
  • the non-imaging method means that it is not necessary to perform a restoration calculation on the 3D glass according to the speckle image to determine whether there is a defect, but to directly determine whether a defect exists based on the speckle image calculation. It can be understood that when the speckle image is formed in a non-imaging form, the defect information is reflected in the speckle image.
  • Resolving and reconstructing the real image of the object such as phase solving, directly discriminates and detects defects on the speckle image, which can effectively reduce the amount of data calculation and increase the speed of recognition.
  • the speckle image is an image formed when light passes through the optically rough surface of the vibrating object or light is reflected by the optically rough surface of the vibrating object.
  • optically rough surfaces or transmission plates with optically rough transmission
  • the wavelets scattered by irregularly distributed surfaces on these surfaces are superimposed on each other.
  • make the reflected light field (or transmitted light field) have a random spatial light intensity distribution and present a granular structure, which is speckle. For example, as shown in FIG. 3, when a bubble appears inside the curved surface of the glass, the speckle distribution on the image collector changes.
  • the light intensity in the area where bubbles are present in the glass will increase significantly.
  • surface scratches, residues, pits, etc. can cause changes in light intensity.
  • these defects are generally in the range of 10 micrometers to 5 millimeters.
  • the detection accuracy can reach more than 5 micrometers, so it is sufficient to check most defects.
  • the shape of glass defects is complex and changeable. These features cannot well represent the defect target. If the speckle image with a glass defect structure is directly subjected to phase inversion to obtain an image restoration image, the restored image will be greatly distorted, and it is almost impossible to identify whether there is a defect in the glass. Therefore, in this application, the speckle image can be input into a neural network to determine whether a defect exists in the glass.
  • the speckle image initially collected by the acquisition detector is a speckle image full of noise.
  • the useful information in the speckle image is drowned in a lot of noise. Therefore, the acquisition detector needs to process the speckle image originally collected to obtain a processed speckle image in order to remove speckle noise and improve fringe contrast.
  • methods for processing an image include a phase shift method, a fringe grayscale method, a fringe centerline method, a Fourier transform method, a sub-pixel search method, and so on. It should be understood that the foregoing processing methods are merely examples, and should not constitute a specific limitation.
  • the speckle image may include a straight speckle image and a curved speckle image, which are not specifically limited herein.
  • the flat speckle image may be one or more.
  • the number of straight speckle images can be one; when the area of the straight portion is relatively small, the number of straight speckle images can be multiple, and different straight speckles The image corresponds to different areas of the straight portion.
  • the number of straight speckle images can be set according to the area of the flat portion of the glass, which is not specifically limited this time.
  • the curved speckle image may be one or more.
  • the number of curved speckle images when the curved portions are concentrated in the same area, the number of curved speckle images may be one; when the curved portions are scattered in multiple regions, the number of curved speckle images may be multiple, and different curved speckle images correspond to Different areas of the bend.
  • the number of curved speckle images can be set according to the area where the curved portion of the glass is scattered, which is not specifically limited this time.
  • an acquisition detector is used to determine whether the glass has a defect according to the speckle image and a deep learning neural network.
  • the input of the deep learning neural network includes a first curved speckle image, a second curved speckle image, a first flat speckle image, and a second flat speckle image.
  • the example of the input of the neural network is merely an example. In actual applications, the speckle image input by the neural network may be more or less, which is not specifically limited herein.
  • the output results of the deep learning neural network may include: no defects, scratches, bubbles, dirt, etc.
  • the output results may also be expressed using fewer or more levels. . It can be understood that the above-mentioned level division is only used as an example, and the more the level division is, the more accurate the output result is represented.
  • the deep learning neural network includes multiple training models.
  • the training model may include a defect-free training model, a bubble model, a dirty model, and so on.
  • the foregoing training model is merely an example, and in actual applications, more or fewer training models may be included, which is not specifically limited herein.
  • the neural network can be BP neural network, Hopfield network, ART network, Kohonen network, Long Short-Term Memory (LSTM), Residual Network (ResNet), Recurrent Neural Networks , RNN), etc., are not specifically limited here.
  • the output when the input includes a first curved speckle image, a second curved speckle image, a first flat speckle image, and a second flat speckle image, the output includes no defects, scratches, and bubbles.
  • the dirty, deep learning neural network can be shown in Figure 4.
  • the deep learning neural network may be trained and learned using a large sample of speckle images. For example, a large number of speckle images are collected according to different defect samples in advance, and the deep neural network is used to classify and train these speckle images that can indirectly reflect the fine structure of glass to obtain the correct neural network. During recognition, the collected speckle images are input to the trained neural network to obtain the recognition results.
  • coherent light is generated by a coherent light source, and then the coherent light is divided into a plurality of beams of coherent light by a beam splitter, and the angle of the beam of coherent light that irradiates the curved portion of the object to be measured is collected by a reflector to collect
  • the detector collects a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light are reflected by the object to be measured.
  • the acquisition detector determines the speckle image based on the speckle image. Whether there is a defect in the object to be tested. It is not difficult to see that the above solution can quickly detect curved glass.
  • the above detection method can also be applied to other curved glass surfaces, semi-transparent plastic, frosted glass, etc., and even other objects that are not transparent, etc. It is not specifically limited here. The following is a description with reference to several specific embodiments.
  • the detection system of this embodiment is used to implement defect detection on the appearance of curved glass. Place the curved glass in the inspection system, and then adjust the mirror so that the reflected coherent light illuminates the curved portion of the curved glass vertically. Defects such as scratches, dirt, and bubbles inside the curved glass will cause corresponding defects. The speckle image changes and is identified.
  • the detection system of this embodiment is used to implement defect detection of large-format flat glass, such as display screens of tablet computers and liquid crystal displays, and television glass. Place the large-format flat glass in the detection system, and then adjust the angle of the reflector to ensure that coherent light can cover the large-format flat glass.
  • the large-format glass is scratched, dirty, and air bubbles inside the large-format glass. Such defects will cause the corresponding speckle image to change and be identified.
  • the detection system of this embodiment is used to implement defect detection of a complex curved surface having an arbitrary curved surface shape. Change the illumination angle of the mirror of the inspection system and the position and angle distribution of the photoelectric sensor, so as to realize the defect detection of the complex curved surface with any curved surface shape.
  • the detection system of this embodiment is used to implement defect detection of opaque objects. Changing the position of the photoelectric sensor of the inspection system enables the photoelectric sensor to collect coherent light reflected by opaque objects, thereby achieving defect detection of opaque objects.
  • the detection system of this embodiment is used to implement continuous online detection.
  • a plurality of objects to be tested are placed on the electric platform, and the plurality of objects to be tested are dragged by the electric platform through the detection system, and the detection system performs defect detection on the plurality of objects to be tested in turn, thereby achieving continuous online detection.
  • the disclosed system, terminal, and method may be implemented in other ways.
  • the device embodiments described above are only schematic.
  • the division of the unit is only a logical function division.
  • multiple units or components may be combined or Can be integrated into another system, or some features can be ignored or not implemented.
  • the displayed or discussed mutual coupling or direct coupling or communication connection may be indirect coupling or communication connection through some interfaces, devices or units, and may also be electrical, mechanical or other forms of connection.
  • the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, may be located in one place, or may be distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the objectives of the solutions of the embodiments of the present invention.
  • each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist separately physically, or two or more units may be integrated into one unit.
  • the above integrated unit may be implemented in the form of hardware or in the form of software functional unit.
  • the integrated unit When the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it may be stored in a computer-readable storage medium.
  • the technical solution of the present invention is essentially a part that contributes to the existing technology, or all or part of the technical solution may be embodied in the form of a software product, which is stored in a storage medium
  • Included are several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in the embodiments of the present invention.
  • the foregoing storage media include: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), magnetic disks or optical disks and other media that can store program codes .

Abstract

The present application provides a detection system and method. The system comprises: a coherent light source for generating coherent light; a beam splitter for splitting the coherent light into a plurality of split coherent light beams, wherein the plurality of split coherent light beams is used for radiating an object to be detected; a reflective mirror for adjusting angles of some or all of the split coherent light beams; and an acquisition detector for acquiring a speckle image formed due to that the plurality of split coherent light beams passes through the object to be detected or the plurality of split coherent light beams is reflected by the object to be detected, and determining, according to the speckle image, whether there is a fault in a glass panel. The solution can quickly detect a bent glass panel.

Description

检测方法和***Detection method and system 技术领域Technical field
本申请涉及电子领域,尤其涉及一种检测方法和***。The present application relates to the field of electronics, and in particular, to a detection method and system.
背景技术Background technique
玻璃在生产过程中,会产生各种各样的缺陷,比如气泡条纹和结石,这些缺陷都会影响玻璃的外观质量,降低玻璃的透光性机械强度和热稳定性,造成大量的废品和次品。玻璃缺陷检测***目前主要是利用人工在线检测、激光检测、摩尔干涉原理以及机器视觉的方法。人工检测易受检测人员主观因素的影响,容易对玻璃缺陷造成漏检,尤其是变形较小、畸变不大的夹杂缺陷漏检。激光检测易受到外界干扰,影响检测精度;摩尔干涉原理由于光栅内的莫尔条纹比较细,要求光栅有很高的明暗对比度,否则误差较大;而基于机器视觉方法是采用CCD成像技术和背光式照明,在玻璃的背面放置光源,光线经待检玻璃,透射进入摄像头,当玻璃中含有杂质时,出射的光线会发生变化,因而CCD摄像机的靶面上探测到的光也存在相应变化。During the production process of glass, various defects, such as bubble streaks and stones, will be produced. These defects will affect the appearance quality of the glass, reduce the light transmission mechanical strength and thermal stability of the glass, resulting in a large number of waste products and defective products. . At present, glass defect detection systems mainly use manual online detection, laser detection, Moore interference principle, and machine vision methods. Manual inspection is susceptible to subjective factors of inspectors, and it is easy to miss inspections of glass defects, especially missing inspections of inclusion defects with small deformation and small distortion. Laser detection is susceptible to external interference, which affects the accuracy of the detection. The Moore interference principle requires relatively high light and dark contrast of the grating due to the thin Moiré fringes in the grating, otherwise the error is large; and the machine vision-based method uses CCD imaging technology and backlight In type lighting, a light source is placed on the back of the glass. The light passes through the glass to be inspected and is transmitted to the camera. When the glass contains impurities, the emitted light will change, so the light detected on the target surface of the CCD camera will change accordingly.
但是,上述检测方法,不能对弯曲的玻璃进行检测,或者,对弯曲的玻璃的检测效率不高。However, the above detection methods cannot detect curved glass, or the detection efficiency of curved glass is not high.
发明内容Summary of the invention
本申请提供了一种检测方法和***,能够快速地对弯曲的玻璃进行检测。The present application provides a detection method and system, which can quickly detect curved glass.
第一方面,提供了一种检测***,包括:In a first aspect, a detection system is provided, including:
相干光源,用于产生相干光;Coherent light source for generating coherent light;
分光镜,用于将所述相干光分成多束分相干光,其中,所述多束分相干光用于照射待测物体;A spectroscope for dividing the coherent light into multiple beams of coherent light, wherein the multiple beams of coherent light are used to illuminate an object to be measured;
反射镜,用于调整部分或者全部分相干光的照射角度;Reflector for adjusting the irradiation angle of part or all of the coherent light;
采集检测器,用于采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射形成的散斑图像,并根据所述散斑图像确定所述玻璃是否存在缺陷。A collection detector, configured to collect a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light being reflected by the object to be measured, and determine according to the speckle image Whether the glass is defective.
可选地,采集检测器具体用于采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射并以非成像方式形成的散斑图像。Optionally, the collection detector is specifically configured to collect a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light being reflected by the object to be measured and formed in a non-imaging manner .
可选地,所述采集检测器还用于根据所述散斑图像并通过深度学习的神经网络确定所述待测物体是否存在缺陷。Optionally, the acquisition detector is further configured to determine whether there is a defect in the object to be measured according to the speckle image and a neural network of deep learning.
可选地,所述分相干光包括第一分相干光和第二分相干光,所述弯曲部包括第一弯曲部和第二弯曲部,其中,所述第一分相干光用于照射所述第一弯曲部,所述第二分相干光用于照射所述第二弯曲部。Optionally, the de-coherent light includes a first de-coherent light and a second de-coherent light, and the curved portion includes a first curved portion and a second curved portion, wherein the first de-coherent light is used to illuminate the light. The first curved portion, and the second divided coherent light is used to irradiate the second curved portion.
可选地,所述反射镜包括第一反射镜和第二反射镜,其中,所述第一反射镜用于调整所述第一分相干光照射所述第一弯曲部的角度,所述第二反射镜用于调整所述第二分相干光照射所述第二弯曲部的角度。Optionally, the reflecting mirror includes a first reflecting mirror and a second reflecting mirror, wherein the first reflecting mirror is used to adjust an angle at which the first divided coherent light illuminates the first curved portion, and the first The two reflecting mirrors are used to adjust an angle at which the second divided coherent light illuminates the second bending portion.
可选地,所述***还包括第一凹透镜和第二凹透镜,所述第一凹透镜用于将所述第一分相干光进行扩散,所述第二凹透镜用于将所述第二分相干光进行扩散。Optionally, the system further includes a first concave lens and a second concave lens, the first concave lens is used for diffusing the first divided coherent light, and the second concave lens is used for diffusing the second divided coherent light For diffusion.
可选地,所述***还包括扩束镜,所述扩束镜用于将照射所述待测物体的平直部的分相干光进行扩散。Optionally, the system further includes a beam expander, which is configured to diffuse the coherent light that irradiates the flat portion of the object to be measured.
可选地,所述***还包括棱面镜,所述棱面镜用于将照射所述待测物体的平直部的分相干光的照射区域扩大。Optionally, the system further includes a prism mirror, which is configured to expand an irradiation area of the coherent light that irradiates the straight portion of the object to be measured.
可选地,所述相干光的光谱的范围为215-2000纳米。Optionally, the spectrum of the coherent light ranges from 215 to 2000 nanometers.
第二方面,提供了一种检测方法,包括:In a second aspect, a detection method is provided, including:
相干光源产生相干光;Coherent light source produces coherent light;
分光镜将所述相干光分成多束分相干光,其中,所述多束分相干光用于照射待测物体;A beam splitter divides the coherent light into multiple beams of coherent light, wherein the multiple beams of coherent light are used to illuminate an object to be measured;
反射镜调整部分或者全部分相干光的照射角度;The reflector adjusts the irradiation angle of part or all of the coherent light;
采集检测器采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射形成的散斑图像,并根据所述散斑图像确定所述玻璃是否存在缺陷。A collection detector collects a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light are reflected by the object to be measured, and determines the glass according to the speckle image Whether there are defects.
可选地,采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射形成的散斑图像:Optionally, collect a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light being reflected by the object to be measured:
采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射并以非成像方式形成的散斑图像。A speckle image formed by transmitting the multiple beams of coherent light through the object to be measured or the multiple beams of coherent light being reflected by the object to be measured and formed in a non-imaging manner is collected.
可选地,所述方法还包括:所述采集检测器根据所述散斑图像并通过深度学习的神经网络确定所述待测物体是否存在缺陷;其中,所述神经网络使用大样本的散斑图像进行训练和学习。Optionally, the method further comprises: the acquisition detector determines whether there is a defect in the object to be measured according to the speckle image and a deep learning neural network; wherein the neural network uses a large sample of speckles Images for training and learning.
可选地,所述分相干光包括第一分相干光和第二分相干光,所述弯曲部包括第一弯曲部和第二弯曲部,其中,所述第一分相干光用于照射所述第一弯曲部,所述第二分相干光用于照射所述第二弯曲部。Optionally, the de-coherent light includes a first de-coherent light and a second de-coherent light, and the curved portion includes a first curved portion and a second curved portion, wherein the first de-coherent light is used to illuminate the light. The first curved portion, and the second divided coherent light is used to irradiate the second curved portion.
可选地,所述反射镜包括第一反射镜和第二反射镜,其中,所述第一反射镜用于调整所述第一分相干光照射所述第一弯曲部的角度,所述第二反射镜用于调整所述第二分相干光照射所述第二弯曲部的角度。Optionally, the reflecting mirror includes a first reflecting mirror and a second reflecting mirror, wherein the first reflecting mirror is used to adjust an angle at which the first divided coherent light illuminates the first curved portion, and the first The two reflecting mirrors are used to adjust an angle at which the second divided coherent light illuminates the second bending portion.
可选地,所述***还包括第一凹透镜和第二凹透镜,所述第一凹透镜用于将所述第一分相干光进行扩散,所述第二凹透镜用于将所述第二分相干光进行扩散。Optionally, the system further includes a first concave lens and a second concave lens, the first concave lens is used for diffusing the first divided coherent light, and the second concave lens is used for diffusing the second divided coherent light For diffusion.
可选地,所述方法还包括:通过扩束镜将照射所述待测物体的平直部的分相干光进行扩散。Optionally, the method further includes: diffusing the coherent light that irradiates the straight portion of the object to be measured through a beam expander.
可选地,所述方法还包括:通过棱面镜将照射所述待测物体的平直部的分相干光的照射区域扩大。Optionally, the method further includes: expanding the irradiation area of the coherent light that irradiates the straight portion of the object to be measured by a prism mirror.
可选地,所述相干光的光谱的范围为215-2000纳米。Optionally, the spectrum of the coherent light ranges from 215 to 2000 nanometers.
上述方案中,通过相干光源产生相干光,然后,通过分光镜将所述相干光分成多束分相干光,并通过反射镜调整照射所述待测物体的弯曲部的分相干光的角度,采集检测器采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射形成的散斑图像,最后,采集检测器根据所述散斑图像确定所述待测物体是否存在缺陷。不难看出,上述方案可以快速地对弯曲的玻璃进行检测。In the above solution, coherent light is generated by a coherent light source, and then the coherent light is divided into a plurality of beams of coherent light by a beam splitter, and the angle of the beam of coherent light that irradiates the curved part of the object to be measured is collected by a reflector, The detector collects a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light are reflected by the object to be measured. Finally, the acquisition detector determines the speckle image based on the speckle image. Whether there is a defect in the object to be tested. It is not difficult to see that the above solution can quickly detect curved glass.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是现有技术中光线透过弯曲玻璃的变化示意图;FIG. 1 is a schematic diagram of changes in light transmission through a curved glass in the prior art; FIG.
图2是本申请提出了一种检测***的结构示意图;2 is a schematic structural diagram of a detection system proposed in the present application;
图3是本申请中没有气泡和有气泡时的光强对比图;FIG. 3 is a comparison diagram of light intensity when there are no air bubbles and when there are air bubbles in the present application; FIG.
图4是本申请提出的一种神经网络的示意图;4 is a schematic diagram of a neural network proposed by the present application;
图5是本申请提出的一种检查方法的流程示意图。FIG. 5 is a schematic flowchart of an inspection method proposed in the present application.
具体实施例Specific embodiment
随着技术的快速发展,生产的玻璃慢慢由平直的玻璃演变为弯曲的玻璃,例如,3D玻璃等等。3D玻璃是中间平直,两边逐渐弯曲的玻璃。3D玻璃的弯曲部是由平面玻璃进行加热弯曲后造成的,容易出现各种损伤,比如碰刮伤,表面残留,凹陷等,因此,弯曲部出现问题的概率远远高于平直部出现问题的概率,需要重点进行检测,以避免出现大量的不良产品。With the rapid development of technology, the produced glass has gradually evolved from straight glass to curved glass, such as 3D glass and so on. 3D glass is flat in the middle and gradually curved on both sides. The curved part of 3D glass is caused by heating and bending of flat glass, which is prone to various damages, such as scratches, surface residues, depressions, etc. Therefore, the probability of problems in the curved part is much higher than the probability of problems in the straight part. Need to focus on testing to avoid a large number of bad products.
与普通玻璃相比,由于背光源穿透3D玻璃的弯曲边缘端时经过了一个弯曲变形的区域,这样造成该区域的成像对焦差,图像灰度极大的降低,另外该区域存在光场变形而出现白色斑条,这些特征都让传统的激光测量、视觉测量的方法失效,所以,传统的激光测量和视觉测量都无法对弯曲区域进行测量。目前仅有的解决办法是通过对3D玻璃的弯曲部进行多次旋转角度的拍照,并对多幅图像的部分区域进行识别,但这种方法极大的延长了检测时间,并且, 弯曲部的准确性明显低于平直部的准确性,导致3D玻璃的弯曲区域出现大量的误检和过检。如图1所示,图1是2D玻璃和3D玻璃经过平行背光后检测对比,3D玻璃在弯曲地方的C(划伤)由于背光源穿透了太多的玻璃而光强衰减从而无法检测出。Compared with ordinary glass, because the backlight passes through a curved deformation area when penetrating the curved edge end of 3D glass, this causes poor imaging focus in this area, and the grayscale of the image is greatly reduced. In addition, there is light field deformation in this area. The appearance of white streaks makes these traditional laser measurement and visual measurement methods ineffective. Therefore, neither traditional laser measurement nor visual measurement can measure the curved area. At present, the only solution is to take pictures of the curved part of the 3D glass at multiple rotation angles and identify parts of multiple images. However, this method greatly prolongs the detection time, and the curved part The accuracy is significantly lower than the accuracy of the straight portion, resulting in a large number of false detections and over-inspections in the curved area of the 3D glass. As shown in Figure 1, Figure 1 is a comparison between 2D glass and 3D glass after parallel backlight detection. The C (scratch) of 3D glass in a curved place cannot be detected because the backlight penetrates too much glass and the light intensity is attenuated. .
为了解决上述问题,本申请提出了一种检测***和方法,能够快速地对弯曲的玻璃进行检测,并且,提高弯曲的玻璃的检测的准确性。In order to solve the above problems, the present application proposes a detection system and method, which can quickly detect curved glass, and improve the accuracy of detection of curved glass.
如图2所示,本申请提出了一种检测***的结构示意图。如图2所示,本申请的检测***包括:相干光源110、分光镜120、反射镜130以及采集检测器140。As shown in FIG. 2, the present application provides a schematic structural diagram of a detection system. As shown in FIG. 2, the detection system of the present application includes a coherent light source 110, a beam splitter 120, a reflector 130, and a collection detector 140.
相干光源110产生相干光,并将相干光发送给分光镜120。分光镜120将所述相干光分成多束分相干光,其中,所述多束分相干光用于照射待测物体。反射镜130调整部分或者全部分相干光的照射角度。采集检测器140采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射形成的散斑图像,并根据所述散斑图像确定所述待测物体是否存在缺陷。为了陈述简便,下面的例子中均以所述待测物体为玻璃进行说明。The coherent light source 110 generates coherent light and sends the coherent light to the beam splitter 120. The beam splitter 120 divides the coherent light into a plurality of beams of coherent light, wherein the plurality of beams of coherent light is used to illuminate an object to be measured. The reflecting mirror 130 adjusts the irradiation angle of part or all of the coherent light. The acquisition detector 140 collects a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light are reflected by the object to be measured, and determines the speckle image according to the speckle image Whether the object to be tested is defective. For simplicity of description, in the following examples, the object to be measured is described as glass.
在一具体的实施例中,相干光源110产生的相干光是频率相同,且,振动方向相同的线性偏振光。由于采用了非成像的散斑图像进行监测,没有成像***的镜头在不同光谱波段的色散问题,这样相干光的光谱的取值范围可以比较大,例如,相干光的光谱的取值范围可以为215-2000纳米。也就是说,相干光的光谱的范围可以从紫外光延伸至近红外光。可以理解,上述相干光的光谱的取值范围仅仅是作为一种举例,不应构成具体限定。采用相干光散斑的缺陷检测,获取更多被检测物品表面的缺陷信息,如缺陷反射后的强度信息、相位信息、入射角度信息等从而实现识别更多传统方法无法检测的缺陷,比如微细划伤,崩边,内部气泡等。In a specific embodiment, the coherent light generated by the coherent light source 110 is linearly polarized light having the same frequency and the same vibration direction. Because the non-imaging speckle image is used for monitoring, there is no dispersion problem of the lens of the imaging system in different spectral bands. In this way, the value range of the coherent light spectrum can be relatively large. For example, the value range of the coherent light spectrum can be 215-2000 nm. That is, the spectrum of coherent light can extend from ultraviolet to near-infrared light. It can be understood that the value range of the above-mentioned coherent light spectrum is merely an example, and should not constitute a specific limitation. Coherent speckle defect detection is used to obtain more defect information on the surface of the inspected item, such as intensity information, phase information, and incident angle information after the defect is reflected, so as to identify more defects that cannot be detected by traditional methods, such as fine scratching. Injuries, chipping, internal bubbles, etc.
在一具体的实施例中,分光镜120中可以包括一个或者多个分光器。分光 器在对相干光进行分光时,会按照光功率相对应的比例分配多束分相干光。其中,每束分相干光的光功率可以由每束相干光照射的玻璃的面积确定的。例如,第一分相干光照射的玻璃的面积为和第二分相干光照射的玻璃的面积之比为2:1,则第一分相干光的光功率和第二分相干光的光功率之比也为2:1。可以理解,第一分相干光和第二分相干光是从同一个相干光分光得到的,因此,严格保证了第一分相干光和第二分相干光的频率和振动方向是一致的。In a specific embodiment, the beam splitter 120 may include one or more beam splitters. When the beam splitter splits the coherent light, it will distribute multiple beams of the coherent light according to the proportion of the optical power. The optical power of each beam of coherent light can be determined by the area of the glass irradiated by each beam of coherent light. For example, if the ratio of the area of the glass illuminated by the first decoherent light and the area of the glass illuminated by the second decoherent light is 2: 1, then the optical power of the first decoherent light and the optical power of the second decoherent light The ratio is also 2: 1. It can be understood that the first and second coherent lights are obtained from the same coherent light. Therefore, it is strictly guaranteed that the frequencies and vibration directions of the first and second coherent lights are consistent.
在一具体的实施例中,分光镜120包括第一分光器121以及第二分光器122。应理解,上述分光镜120仅仅是作为一种举例,在其他的实施例中,分光镜120的数量可以更少或者更多,此处不作具体限定。In a specific embodiment, the beam splitter 120 includes a first beam splitter 121 and a second beam splitter 122. It should be understood that the above-mentioned beam splitter 120 is merely an example. In other embodiments, the number of beam splitters 120 may be less or more, which is not specifically limited herein.
在一具体的实施例中,反射镜130包括第一反射镜131以及第二反射镜132。应理解,上述反射镜130仅仅是作为一种举例,在其他的实施例中,反射镜130的数量可以更少或者更多,此处不作具体限定。In a specific embodiment, the reflecting mirror 130 includes a first reflecting mirror 131 and a second reflecting mirror 132. It should be understood that the above-mentioned reflecting mirror 130 is merely an example. In other embodiments, the number of reflecting mirrors 130 may be less or more, which is not specifically limited herein.
在一具体的实施例中,检测***还包括凹透镜,其中,所述凹透镜用于将所述分相干光进行扩散。凹透镜包括第一凹透镜151以及第二凹透镜152。应理解,上述凹透镜仅仅是作为一种举例,在其他的实施例中,凹透镜的数量可以更少或者更多,此处不作具体限定。In a specific embodiment, the detection system further includes a concave lens, wherein the concave lens is used to diffuse the coherent light. The concave lens includes a first concave lens 151 and a second concave lens 152. It should be understood that the foregoing concave lens is merely an example. In other embodiments, the number of the concave lens may be less or more, which is not specifically limited herein.
在一具体的实施例中,检测***还包括扩束镜160,其中,所述扩束镜160用于将照射所述待测物体的平直部的分相干光进行扩散。具体地,检测***还包括棱面镜,所述棱面镜用于将照射所述待测物体的平直部的分相干光的照射区域扩大。In a specific embodiment, the detection system further includes a beam expander 160, wherein the beam expander 160 is configured to diffuse the coherent light that irradiates the flat portion of the object to be measured. Specifically, the detection system further includes a prism mirror for expanding an irradiation area of the coherent light that irradiates the flat portion of the object to be measured.
相干光源110产生的相干光入射到第一分光器121上。第一分光器121从相干光中分离出第一分相干光。第一凹透镜151设置在第一分相干光的光路上,并且,第一分相干光经过第一凹透镜151的轴心。第一凹透镜151将所述第一分相干光进行扩散以得到扩散后的第一分相干光。第一反射镜131设置在扩散后的第一分相干光的光路上,并且,第一反射镜131将所述扩散后的第一 分相干光进行反射以使得反射后的第一分相干光照射第一弯曲部(3D玻璃的左翼部分)。经过第一分光器121之后,剩余的相干光照入射到第二分光器122上。第二分光器122从剩余的相干光中分离出第二分相干光。第二凹透镜152设置在第二分相干光的光路上,并且,第二分相干光经过第二凹透镜152的轴心。第二凹透镜152将所述第二分相干光进行扩散以得到扩散后的第二分相干光。第二反射镜132设置在扩散后的第二分相干光的光路上,并且,第二反射镜132将所述扩散后的第二分相干光进行反射以使得反射后的第二分相干光照射第二弯曲部(3D玻璃的右翼部分)。经过第二分光器122之后,剩下的分相干光入射扩束镜160。所述扩束镜160用于将所述剩下的分相干光扩散以得到扩散后的分相干光,并照射在平直部(3D玻璃的中间部分)。上述实施例中,第一凹透镜、第二凹透镜和扩束镜分别将第一分相干光、第二分相干光和剩下的分相干光进行扩散,以使得光线能够更加均匀地照射在第一弯曲部、第二弯曲部和平直部。The coherent light generated by the coherent light source 110 is incident on the first beam splitter 121. The first beam splitter 121 separates the first divided coherent light from the coherent light. The first concave lens 151 is disposed on the optical path of the first divided coherent light, and the first divided coherent light passes through the axis of the first concave lens 151. The first concave lens 151 diffuses the first divided coherent light to obtain the diffused first divided coherent light. The first reflecting mirror 131 is disposed on the optical path of the diffused first divided coherent light, and the first reflecting mirror 131 reflects the diffused first divided coherent light so that the reflected first divided coherent light is illuminated The first bend (the left wing portion of the 3D glass). After passing through the first beam splitter 121, the remaining coherent light is incident on the second beam splitter 122. The second beam splitter 122 separates the second divided coherent light from the remaining coherent light. The second concave lens 152 is disposed on the optical path of the second divided coherent light, and the second divided coherent light passes through the axis of the second concave lens 152. The second concave lens 152 diffuses the second divided coherent light to obtain the diffused second divided coherent light. The second reflector 132 is disposed on the optical path of the diffused second divided coherent light, and the second reflector 132 reflects the diffused second divided coherent light so that the reflected second divided coherent light is irradiated The second curved portion (the right wing portion of the 3D glass). After passing through the second beam splitter 122, the remaining split coherent light enters the beam expander 160. The beam expander 160 is configured to diffuse the remaining split coherent light to obtain the diffused split coherent light, and irradiate the flat portion (the middle portion of the 3D glass). In the above embodiment, the first concave lens, the second concave lens, and the beam expander diffuse the first, second, and remaining split coherent light, respectively, so that the light can be more uniformly irradiated on the first The bent portion, the second bent portion, and the straight portion.
可以理解,上述检测***仅仅是一个具体的实施例,在其他的实施例中,还可以包括更多的反射镜、凹透镜和扩束镜等等,只需要出射的第一分相干光、第二分相干光和剩下的分相干光以尽量垂直的方式对弯曲部和平直部的玻璃进行透射式照明,此处不作具体限定。It can be understood that the above detection system is only a specific embodiment. In other embodiments, it may further include more reflecting mirrors, concave lenses, beam expanders, and the like. Only the first split coherent light and the second The decoherent light and the remaining decoherent light perform transillumination on the glass of the curved part and the straight part in a vertical manner as much as possible, which is not specifically limited here.
在一具体的实施例中,采集检测器140包括一个或者多个光电传感器,其中,所述光电传感器用于采集散斑图像。在实际应用中,光电传感器的位置和数量都可以根据实际需要进行设置,此处不作具体限定。In a specific embodiment, the acquisition detector 140 includes one or more photoelectric sensors, wherein the photoelectric sensors are used to acquire speckle images. In practical applications, the positions and numbers of the photoelectric sensors can be set according to actual needs, and are not specifically limited here.
在一具体的实施例中,采集检测器140具体用于采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射并以非成像方式形成的散斑图像。其中,非成像的方式是指不需要根据散斑图像对3D玻璃进行复原计算就能确定是否存在缺陷,而是,直接根据散斑图像计算确定是否存在缺陷。可以理解,通过非成像形式形成散斑图像时,缺陷信息体现在散斑图 像内,和传统的光学成像检测方法比,不需要设计非常复杂的照明和成像光学,并且不需要对散斑图像进行相位求解重构等还原物体的真实图像,而是直接在散斑图像上直接进行判别检测缺陷,能够有效减少数据的计算量,提高识别的速度。In a specific embodiment, the collection detector 140 is specifically configured to collect the multiple beams of coherent light through the object to be measured or the multiple beams of coherent light are reflected by the object to be measured and in a non-imaging manner Speckle image formed. Among them, the non-imaging method means that it is not necessary to perform a restoration calculation on the 3D glass according to the speckle image to determine whether there is a defect, but to directly determine whether a defect exists based on the speckle image calculation. It can be understood that when the speckle image is formed in a non-imaging form, the defect information is reflected in the speckle image. Compared with the traditional optical imaging detection method, it does not need to design very complicated lighting and imaging optics, and it is not necessary to perform speckle images. Resolving and reconstructing the real image of the object, such as phase solving, directly discriminates and detects defects on the speckle image, which can effectively reduce the amount of data calculation and increase the speed of recognition.
在一具体的实施例中,散斑图像是光通过振动物体的光学粗糙表面或者光被振动物体的光学粗糙表面反射时形成图像。可以理解,当光照射在墙壁、纸张、毛玻璃等这些平均起伏大于波长数量级的光学粗糙表面(或透过光学粗糙的透射板)上时,这些表面上不规分布的面散射的子波相互叠加使反射光场(或透射光场)具有随机的空间光强分布,呈现出颗粒状的结构,这就是散斑。例如,如图3所示,当玻璃曲面内部出现的一个气泡时,会引起图像采集器上的散斑分布发生改变。明显地,玻璃中存在气泡的区域的光强会明显增大。除了气泡之外,表面划伤、残留物和凹坑等等都会导致光强发生变化。通常而言,这些缺陷一般都是从10微米至5毫米范围内,对于波长小于1微米的相干光而言,能检测到的精度可以达到5微米以上,因此,足够检查出大部分的缺陷。In a specific embodiment, the speckle image is an image formed when light passes through the optically rough surface of the vibrating object or light is reflected by the optically rough surface of the vibrating object. It can be understood that when light is irradiated on optically rough surfaces (or transmission plates with optically rough transmission) with average fluctuations greater than the order of wavelength, such as walls, paper, and frosted glass, the wavelets scattered by irregularly distributed surfaces on these surfaces are superimposed on each other. Make the reflected light field (or transmitted light field) have a random spatial light intensity distribution and present a granular structure, which is speckle. For example, as shown in FIG. 3, when a bubble appears inside the curved surface of the glass, the speckle distribution on the image collector changes. Obviously, the light intensity in the area where bubbles are present in the glass will increase significantly. In addition to bubbles, surface scratches, residues, pits, etc. can cause changes in light intensity. Generally speaking, these defects are generally in the range of 10 micrometers to 5 millimeters. For coherent light with a wavelength of less than 1 micrometer, the detection accuracy can reach more than 5 micrometers, so it is sufficient to check most defects.
由于几何形状和纹理等特征仅仅是对图像中低级别的边缘信息进行描述,玻璃缺陷形态复杂多变,这些特征并不能很好地表征缺陷目标。如果对带有玻璃缺陷结构的散斑图像直接进行相位反演得到图像的复原图,会导致复原后的图像失真很大,几乎无法进行图像识别玻璃中是不是存在缺陷。于是,本申请可以采用将所述散斑图像输入神经网络,从而确定玻璃中是不是存在缺陷。Because features such as geometric shapes and textures only describe the low-level edge information in the image, the shape of glass defects is complex and changeable. These features cannot well represent the defect target. If the speckle image with a glass defect structure is directly subjected to phase inversion to obtain an image restoration image, the restored image will be greatly distorted, and it is almost impossible to identify whether there is a defect in the glass. Therefore, in this application, the speckle image can be input into a neural network to determine whether a defect exists in the glass.
在一具体的实施例中,采集检测器140初始采集到的所述散斑图像是充满噪声的散斑图像。散斑图像中的有用信息被淹没在大量的噪声中,因此,采集检测器140需要对初始采集到的散斑图像进行处理以得到处理后的散斑图像,以去除散斑噪声、提高条纹对比度。其中,对图像进行处理的方法包括相移法、条纹灰度法、条纹中心线法、傅氏变换法和亚像素搜索法等等。应理解,上述处理方法仅仅是用于举例,不应构成具体限定。In a specific embodiment, the speckle image initially collected by the acquisition detector 140 is a speckle image full of noise. The useful information in the speckle image is submerged in a large amount of noise. Therefore, the acquisition detector 140 needs to process the speckle image collected initially to obtain a processed speckle image to remove speckle noise and improve fringe contrast. . Among them, methods for processing an image include a phase shift method, a fringe grayscale method, a fringe centerline method, a Fourier transform method, a sub-pixel search method, and so on. It should be understood that the foregoing processing methods are merely examples, and should not constitute a specific limitation.
在一具体的实施例中,散斑图像可以包括平直散斑图像和弯曲散斑图像,此处不作具体限定。In a specific embodiment, the speckle image may include a straight speckle image and a curved speckle image, which are not specifically limited herein.
在一具体的实施例中,平直散斑图像可以是一幅或者多幅。其中,当平直部的面积比较小时,平直散斑图像的数量可以是一幅;当平直部的面积比较小时,平直散斑图像的数量可以是多幅,不同的平直散斑图像对应平直部的不同区域。在实际应用中,平直散斑图像的数量可以根据玻璃的平直部的面积进行设置,此次不作具体限定。In a specific embodiment, the flat speckle image may be one or more. Among them, when the area of the straight portion is relatively small, the number of straight speckle images can be one; when the area of the straight portion is relatively small, the number of straight speckle images can be multiple, and different straight speckles The image corresponds to different areas of the straight portion. In practical applications, the number of straight speckle images can be set according to the area of the flat portion of the glass, which is not specifically limited this time.
在一具体的实施例中,弯曲散斑图像可以是一幅或者多幅。其中,当弯曲部集中在同一个区域时,弯曲散斑图像的数量可以是一幅;当弯曲部分散在多个区域时,弯曲散斑图像的数量可以是多幅,不同的弯曲散斑图像对应弯曲部的不同区域。在实际应用中,弯曲散斑图像的数量可以根据玻璃的弯曲部分散的区域进行设置,此次不作具体限定。In a specific embodiment, the curved speckle image may be one or more. Among them, when the curved portions are concentrated in the same area, the number of curved speckle images may be one; when the curved portions are scattered in multiple regions, the number of curved speckle images may be multiple, and different curved speckle images correspond to Different areas of the bend. In practical applications, the number of curved speckle images can be set according to the area where the curved portion of the glass is scattered, which is not specifically limited this time.
在一具体的实施例中,采集检测器140用于根据所述散斑图像以及深度学习的神经网络确定所述玻璃是否存在缺陷。In a specific embodiment, the acquisition detector 140 is configured to determine whether the glass has a defect according to the speckle image and a deep learning neural network.
在一具体的实施例中,深度学***直散斑图像、第二平直散斑图像。应理解,上述神经网络的输入的示例仅仅是作为一种举例,在实际应用中,神经网络输入的散斑图像可以是更多或者更少,此处不作具体限定。In a specific embodiment, the input of the deep learning neural network includes a first curved speckle image, a second curved speckle image, a first flat speckle image, and a second flat speckle image. It should be understood that the example of the input of the neural network is merely an example. In actual applications, the speckle image input by the neural network may be more or less, which is not specifically limited herein.
在一具体的实施例中,深度学习的神经网络的输出结果可以是包括:无缺陷、划伤、气泡以及脏污等等,当然,输出结果也可以采用更少或者更多的级别来进行表示。可以理解,上述的级别划分仅仅是用作示例,当级别划分得越多时,输出结果表示得越准确。In a specific embodiment, the output results of the deep learning neural network may include: no defects, scratches, bubbles, dirt, etc. Of course, the output results may also be expressed using fewer or more levels. . It can be understood that the above-mentioned level division is only used as an example, and the more the level division is, the more accurate the output result is represented.
在一具体的实施例中,深度学习的神经网络包括多个训练模型,例如训练模型可以包括无缺陷训练模型、气泡模型以及脏污模型等等。应理解,上述训练模型仅仅是作为一种举例,在实际应用中,还可以包括更多或者更少的训练 模型,此处不作具体限定。其中,神经网络可以是BP神经网络、Hopfield网络,ART网络、Kohonen网络、长短期记忆网络(Long Short-Term Memory,LSTM),残差网络(Residential Networking,ResNet),循环神经网络(Recurrent Neural Networks,RNN)等等,此处不作具体限定。In a specific embodiment, the deep learning neural network includes multiple training models. For example, the training model may include a defect-free training model, a bubble model, a dirty model, and so on. It should be understood that the above training model is merely an example, and in actual applications, more or less training models may be included, which is not specifically limited herein. Among them, the neural network can be BP neural network, Hopfield network, ART network, Kohonen network, Long Short-Term Memory (LSTM), Residual Network (ResNet), Recurrent Neural Networks , RNN), etc., are not specifically limited here.
在一具体的实施例中,当输入包括第一弯曲散斑图像、第二弯曲散斑图像、第一平直散斑图像、第二平直散斑图像,输出包括无缺陷、划伤、气泡以及脏污,深度学习的神经网络可以如图4所示。In a specific embodiment, when the input includes a first curved speckle image, a second curved speckle image, a first flat speckle image, and a second flat speckle image, the output includes no defects, scratches, and bubbles. And the dirty, deep learning neural network can be shown in Figure 4.
应理解,可以利用大样本散斑图像对所述深度学习的神经网络进行训练和学习。比如,事先按照不同的缺陷样品分别采集大量的散斑图像,利用深度学习的神经网络,对这些能够间接反映玻璃微细结构的散斑图像进行分类训练,得到正确的神经网络。在识别时,将采集到的散斑图像输入训练得到的神经网络就可以得到识别结果。It should be understood that the deep learning neural network may be trained and learned using a large sample of speckle images. For example, a large number of speckle images are collected according to different defect samples in advance, and the deep neural network is used to classify and train these speckle images that can indirectly reflect the fine structure of glass to obtain the correct neural network. During recognition, the collected speckle images are input to the trained neural network to obtain the recognition results.
上述方案中,通过相干光源产生相干光,然后,通过分光镜将所述相干光分成多束分相干光,并通过反射镜调整部分或者全部分相干光的照射角度,采集检测器采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射形成的散斑图像,最后,采集检测器根据所述散斑图像确定所述待测物体是否存在缺陷。不难看出,上述方案可以快速地对弯曲的玻璃进行检测。In the above solution, coherent light is generated by a coherent light source, and then the coherent light is divided into multiple beams of coherent light by a beam splitter, and the irradiation angle of part or all of the coherent light is adjusted by a mirror, and the acquisition detector collects the multi A beam of decoherent light passes through the object to be measured or a speckle image formed by the reflection of the multi-beam of decoherent light by the object to be measured, and finally, the acquisition detector determines whether the object to be measured is based on the speckle image Flawed. It is not difficult to see that the above solution can quickly detect curved glass.
参阅图5,图5是本申请提供了一种检测方法的流程示意图。为了陈述简便,下面的例子中均以所述待测物体为玻璃进行说明。如图5所示,本实施例的检测方法包括如下步骤:Referring to FIG. 5, FIG. 5 is a schematic flowchart of a detection method provided by the present application. For simplicity of description, in the following examples, the object to be measured is described as glass. As shown in FIG. 5, the detection method in this embodiment includes the following steps:
S101:相干光源产生相干光。S101: The coherent light source generates coherent light.
在一具体的实施例中,相干光源产生的相干光是频率相同,且,振动方向相同的线性偏振光。由于采用了非成像的散斑图像进行监测,没有成像***的镜头在不同光谱波段的色散问题,这样相干光的光谱的取值范围可以比较大, 例如,相干光的光谱的取值范围可以为215-2000纳米。也就是说,相干光的光谱的范围可以从紫外光延伸至近红外光。可以理解,上述相干光的光谱的取值范围仅仅是作为一种举例,不应构成具体限定。采用相干光散斑的缺陷检测,获取更多被检测物品表面的缺陷信息,如缺陷反射后的强度信息、相位信息、入射角度信息等从而实现识别更多传统方法无法检测的缺陷,比如微细划伤,崩边,内部气泡等。In a specific embodiment, the coherent light generated by the coherent light source is linearly polarized light having the same frequency and the same vibration direction. Because the non-imaging speckle image is used for monitoring, there is no dispersion problem of the lens of the imaging system in different spectral bands. In this way, the value range of the coherent light spectrum can be relatively large. 215-2000 nm. That is, the spectrum of coherent light can extend from ultraviolet to near-infrared light. It can be understood that the value range of the above-mentioned coherent light spectrum is merely an example, and should not constitute a specific limitation. Coherent speckle defect detection is used to obtain more defect information on the surface of the inspected item, such as intensity information, phase information, and incident angle information after the defect is reflected, so as to identify more defects that cannot be detected by traditional methods, such as fine scratching. Injuries, chipping, internal bubbles, etc.
S102:分光镜将所述相干光分成多束分相干光,其中,所述多束分相干光用于照射待测物体。S102: a beam splitter divides the coherent light into multiple beams of coherent light, wherein the multiple beams of coherent light are used to illuminate an object to be measured.
在一具体的实施例中,分光镜中可以包括一个或者多个分光器。分光器在对相干光进行分光时,会按照光功率相对应的比例分配多束分相干光。其中,每束分相干光的光功率可以由每束相干光照射的玻璃的面积确定的。例如,第一分相干光照射的玻璃的面积为和第二分相干光照射的玻璃的面积之比为2:1,则第一分相干光的光功率和第二分相干光的光功率之比也为2:1。可以理解,第一分相干光和第二分相干光是从同一个相干光分光得到的,因此,严格保证了第一分相干光和第二分相干光的频率和振动方向是一致的。In a specific embodiment, the beam splitter may include one or more beam splitters. When the optical splitter splits coherent light, it will distribute multiple beams of split coherent light according to the proportion of the optical power. The optical power of each beam of coherent light can be determined by the area of the glass irradiated by each beam of coherent light. For example, if the ratio of the area of the glass illuminated by the first decoherent light and the area of the glass illuminated by the second decoherent light is 2: 1, then the optical power of the first decoherent light and the optical power of the second decoherent light The ratio is also 2: 1. It can be understood that the first and second coherent lights are obtained from the same coherent light. Therefore, it is strictly guaranteed that the frequencies and vibration directions of the first and second coherent lights are consistent.
在一具体的实施例中,分光镜包括第一分光器以及第二分光器。应理解,上述分光镜仅仅是作为一种举例,在其他的实施例中,分光镜的数量可以更少或者更多,此处不作具体限定。In a specific embodiment, the beam splitter includes a first beam splitter and a second beam splitter. It should be understood that the above-mentioned beam splitter is merely an example. In other embodiments, the number of beam splitters may be less or more, which is not specifically limited herein.
S103:反射镜调整部分或者全部分相干光的照射角度。S103: The reflector adjusts the irradiation angle of part or all of the coherent light.
在一具体的实施例中,反射镜包括第一反射镜以及第二反射镜。应理解,上述反射镜仅仅是作为一种举例,在其他的实施例中,反射镜的数量可以更少或者更多,此处不作具体限定。In a specific embodiment, the reflecting mirror includes a first reflecting mirror and a second reflecting mirror. It should be understood that the above-mentioned reflecting mirror is merely an example, and in other embodiments, the number of reflecting mirrors may be less or more, which is not specifically limited herein.
在一具体的实施例中,检测***还包括凹透镜,其中,所述凹透镜用于将所述分相干光进行扩散。凹透镜包括第一凹透镜以及第二凹透镜。应理解,上述凹透镜仅仅是作为一种举例,在其他的实施例中,凹透镜的数量可以更少或 者更多,此处不作具体限定。In a specific embodiment, the detection system further includes a concave lens, wherein the concave lens is used to diffuse the coherent light. The concave lens includes a first concave lens and a second concave lens. It should be understood that the foregoing concave lens is merely an example. In other embodiments, the number of the concave lens may be less or more, which is not specifically limited herein.
在一具体的实施例中,检测***还包括扩束镜,其中,所述扩束镜用于将照射所述待测物体的平直部的分相干光进行扩散。具体地,检测***还包括棱面镜,所述棱面镜用于将照射所述待测物体的平直部的分相干光的照射区域扩大。In a specific embodiment, the detection system further includes a beam expander, wherein the beam expander is configured to diffuse the coherent light that irradiates the flat portion of the object to be measured. Specifically, the detection system further includes a prism mirror for expanding an irradiation area of the coherent light that irradiates the flat portion of the object to be measured.
相干光源产生的相干光入射到第一分光器上。第一分光器从相干光中分离出第一分相干光。第一凹透镜设置在第一分相干光的光路上,并且,第一分相干光经过第一凹透镜的轴心。第一凹透镜将所述第一分相干光进行扩散以得到扩散后的第一分相干光。第一反射镜设置在扩散后的第一分相干光的光路上,并且,第一反射镜将所述扩散后的第一分相干光进行反射以使得反射后的第一分相干光照射第一弯曲部(3D玻璃的左翼部分)。经过第一分光器之后,剩余的相干光照入射到第二分光器上。第二分光器从剩余的相干光中分离出第二分相干光。第二凹透镜设置在第二分相干光的光路上,并且,第二分相干光经过第二凹透镜的轴心。第二凹透镜将所述第二分相干光进行扩散以得到扩散后的第二分相干光。第二反射镜设置在扩散后的第二分相干光的光路上,并且,第二反射镜将所述扩散后的第二分相干光进行反射以使得反射后的第二分相干光照射第二弯曲部(3D玻璃的右翼部分)。经过第二分光器之后,剩下的分相干光入射扩束镜。所述扩束镜用于将所述剩下的分相干光扩散以得到扩散后的分相干光,并照射在平直部(3D玻璃的中间部分)。上述实施例中,第一凹透镜、第二凹透镜和扩束镜分别将第一分相干光、第二分相干光和剩下的分相干光进行扩散,以使得光线能够更加均匀地照射在第一弯曲部、第二弯曲部和平直部。The coherent light generated by the coherent light source is incident on the first beam splitter. The first beam splitter separates the first divided coherent light from the coherent light. The first concave lens is disposed on the optical path of the first divided coherent light, and the first divided coherent light passes through the axis of the first concave lens. The first concave lens diffuses the first divided coherent light to obtain the diffused first divided coherent light. The first reflector is disposed on the optical path of the diffused first divided coherent light, and the first reflector reflects the diffused first divided coherent light so that the reflected first divided coherent light irradiates the first Bend (left wing part of 3D glass). After passing through the first beam splitter, the remaining coherent light is incident on the second beam splitter. The second beam splitter separates the second coherent light from the remaining coherent light. The second concave lens is disposed on the optical path of the second divided coherent light, and the second divided coherent light passes through the axis of the second concave lens. The second concave lens diffuses the second divided coherent light to obtain a diffused second divided coherent light. The second reflector is disposed on the optical path of the diffused second divided coherent light, and the second reflector reflects the diffused second divided coherent light so that the reflected second divided coherent light irradiates the second Bend (right wing part of 3D glass). After passing through the second beam splitter, the remaining split coherent light enters the beam expander. The beam expander is configured to diffuse the remaining split coherent light to obtain the diffused split coherent light, and irradiate the flat portion (the middle portion of the 3D glass). In the above embodiment, the first concave lens, the second concave lens, and the beam expander diffuse the first, second, and remaining split coherent light, respectively, so that the light can be more uniformly irradiated on the first The bent portion, the second bent portion, and the straight portion.
可以理解,上述检测***仅仅是一个具体的实施例,在其他的实施例中,还可以包括更多的反射镜、凹透镜和扩束镜等等,只需要出射的第一分相干光、第二分相干光和剩下的分相干光以尽量垂直的方式对弯曲部和平直部的玻璃 进行透射式照明,此处不作具体限定。It can be understood that the above detection system is only a specific embodiment. In other embodiments, it may further include more reflecting mirrors, concave lenses, beam expanders, and the like. Only the first split coherent light and the second The decoherent light and the remaining decoherent light perform transillumination on the glass of the curved part and the straight part in a vertical manner as much as possible, which is not specifically limited here.
S104:采集检测器采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射形成的散斑图像,并根据所述散斑图像确定所述玻璃是否存在缺陷。S104: A collection detector collects a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light are reflected by the object to be measured, and determines the speckle image based on the speckle image. Describes whether the glass is defective.
在一具体的实施例中,采集检测器包括一个或者多个光电传感器,其中,所述光电传感器用于采集散斑图像。在实际应用中,光电传感器的位置和数量都可以根据实际需要进行设置,此处不作具体限定。In a specific embodiment, the acquisition detector includes one or more photoelectric sensors, wherein the photoelectric sensors are used to acquire speckle images. In practical applications, the positions and numbers of the photoelectric sensors can be set according to actual needs, and are not specifically limited here.
在一具体的实施例中,采集检测器采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射并以非成像方式形成的散斑图像。其中,非成像的方式是指不需要根据散斑图像对3D玻璃进行复原计算就能确定是否存在缺陷,而是,直接根据散斑图像计算确定是否存在缺陷。可以理解,通过非成像形式形成散斑图像时,缺陷信息体现在散斑图像内,和传统的光学成像检测方法比,不需要设计非常复杂的照明和成像光学,并且不需要对散斑图像进行相位求解重构等还原物体的真实图像,而是直接在散斑图像上直接进行判别检测缺陷,能够有效减少数据的计算量,提高识别的速度。In a specific embodiment, the acquisition detector collects the speckles that are transmitted by the multi-beam decoherent light through the object or the multi-beam decoherent light is reflected by the object and is formed in a non-imaging manner. image. Among them, the non-imaging method means that it is not necessary to perform a restoration calculation on the 3D glass according to the speckle image to determine whether there is a defect, but to directly determine whether a defect exists based on the speckle image calculation. It can be understood that when the speckle image is formed in a non-imaging form, the defect information is reflected in the speckle image. Compared with the traditional optical imaging detection method, it does not need to design very complicated lighting and imaging optics, and it is not necessary to perform speckle images. Resolving and reconstructing the real image of the object, such as phase solving, directly discriminates and detects defects on the speckle image, which can effectively reduce the amount of data calculation and increase the speed of recognition.
在一具体的实施例中,散斑图像是光通过振动物体的光学粗糙表面或者光被振动物体的光学粗糙表面反射时形成图像。可以理解,当光照射在墙壁、纸张、毛玻璃等这些平均起伏大于波长数量级的光学粗糙表面(或透过光学粗糙的透射板)上时,这些表面上不规分布的面散射的子波相互叠加使反射光场(或透射光场)具有随机的空间光强分布,呈现出颗粒状的结构,这就是散斑。例如,如图3所示,当玻璃曲面内部出现的一个气泡时,会引起图像采集器上的散斑分布发生改变。明显地,玻璃中存在气泡的区域的光强会明显增大。除了气泡之外,表面划伤、残留物和凹坑等等都会导致光强发生变化。通常而言,这些缺陷一般都是从10微米至5毫米范围内,对于波长小于1微米的相干光而言,能检测到的精度可以达到5微米以上,因此,足够检查出大部分的缺陷。In a specific embodiment, the speckle image is an image formed when light passes through the optically rough surface of the vibrating object or light is reflected by the optically rough surface of the vibrating object. It can be understood that when light is irradiated on optically rough surfaces (or transmission plates with optically rough transmission) with average fluctuations greater than the order of wavelength, such as walls, paper, and frosted glass, the wavelets scattered by irregularly distributed surfaces on these surfaces are superimposed on each other. Make the reflected light field (or transmitted light field) have a random spatial light intensity distribution and present a granular structure, which is speckle. For example, as shown in FIG. 3, when a bubble appears inside the curved surface of the glass, the speckle distribution on the image collector changes. Obviously, the light intensity in the area where bubbles are present in the glass will increase significantly. In addition to bubbles, surface scratches, residues, pits, etc. can cause changes in light intensity. Generally speaking, these defects are generally in the range of 10 micrometers to 5 millimeters. For coherent light with a wavelength of less than 1 micrometer, the detection accuracy can reach more than 5 micrometers, so it is sufficient to check most defects.
由于几何形状和纹理等特征仅仅是对图像中低级别的边缘信息进行描述,玻璃缺陷形态复杂多变,这些特征并不能很好地表征缺陷目标。如果对带有玻璃缺陷结构的散斑图像直接进行相位反演得到图像的复原图,会导致复原后的图像失真很大,几乎无法进行图像识别玻璃中是不是存在缺陷。于是,本申请可以采用将所述散斑图像输入神经网络,从而确定玻璃中是不是存在缺陷。Because features such as geometric shapes and textures only describe the low-level edge information in the image, the shape of glass defects is complex and changeable. These features cannot well represent the defect target. If the speckle image with a glass defect structure is directly subjected to phase inversion to obtain an image restoration image, the restored image will be greatly distorted, and it is almost impossible to identify whether there is a defect in the glass. Therefore, in this application, the speckle image can be input into a neural network to determine whether a defect exists in the glass.
在一具体的实施例中,采集检测器初始采集到的所述散斑图像是充满噪声的散斑图像。散斑图像中的有用信息被淹没在大量的噪声中,因此,采集检测器需要对初始采集到的散斑图像进行处理以得到处理后的散斑图像,以去除散斑噪声、提高条纹对比度。其中,对图像进行处理的方法包括相移法、条纹灰度法、条纹中心线法、傅氏变换法和亚像素搜索法等等。应理解,上述处理方法仅仅是用于举例,不应构成具体限定。In a specific embodiment, the speckle image initially collected by the acquisition detector is a speckle image full of noise. The useful information in the speckle image is drowned in a lot of noise. Therefore, the acquisition detector needs to process the speckle image originally collected to obtain a processed speckle image in order to remove speckle noise and improve fringe contrast. Among them, methods for processing an image include a phase shift method, a fringe grayscale method, a fringe centerline method, a Fourier transform method, a sub-pixel search method, and so on. It should be understood that the foregoing processing methods are merely examples, and should not constitute a specific limitation.
在一具体的实施例中,散斑图像可以包括平直散斑图像和弯曲散斑图像,此处不作具体限定。In a specific embodiment, the speckle image may include a straight speckle image and a curved speckle image, which are not specifically limited herein.
在一具体的实施例中,平直散斑图像可以是一幅或者多幅。其中,当平直部的面积比较小时,平直散斑图像的数量可以是一幅;当平直部的面积比较小时,平直散斑图像的数量可以是多幅,不同的平直散斑图像对应平直部的不同区域。在实际应用中,平直散斑图像的数量可以根据玻璃的平直部的面积进行设置,此次不作具体限定。In a specific embodiment, the flat speckle image may be one or more. Among them, when the area of the straight portion is relatively small, the number of straight speckle images can be one; when the area of the straight portion is relatively small, the number of straight speckle images can be multiple, and different straight speckles The image corresponds to different areas of the straight portion. In practical applications, the number of straight speckle images can be set according to the area of the flat portion of the glass, which is not specifically limited this time.
在一具体的实施例中,弯曲散斑图像可以是一幅或者多幅。其中,当弯曲部集中在同一个区域时,弯曲散斑图像的数量可以是一幅;当弯曲部分散在多个区域时,弯曲散斑图像的数量可以是多幅,不同的弯曲散斑图像对应弯曲部的不同区域。在实际应用中,弯曲散斑图像的数量可以根据玻璃的弯曲部分散的区域进行设置,此次不作具体限定。In a specific embodiment, the curved speckle image may be one or more. Among them, when the curved portions are concentrated in the same area, the number of curved speckle images may be one; when the curved portions are scattered in multiple regions, the number of curved speckle images may be multiple, and different curved speckle images correspond to Different areas of the bend. In practical applications, the number of curved speckle images can be set according to the area where the curved portion of the glass is scattered, which is not specifically limited this time.
在一具体的实施例中,采集检测器用于根据所述散斑图像以及深度学习的神经网络确定所述玻璃是否存在缺陷。In a specific embodiment, an acquisition detector is used to determine whether the glass has a defect according to the speckle image and a deep learning neural network.
在一具体的实施例中,深度学***直散斑图像、第二平直散斑图像。应理解,上述神经网络的输入的示例仅仅是作为一种举例,在实际应用中,神经网络输入的散斑图像可以是更多或者更少,此处不作具体限定。In a specific embodiment, the input of the deep learning neural network includes a first curved speckle image, a second curved speckle image, a first flat speckle image, and a second flat speckle image. It should be understood that the example of the input of the neural network is merely an example. In actual applications, the speckle image input by the neural network may be more or less, which is not specifically limited herein.
在一具体的实施例中,深度学习的神经网络的输出结果可以是包括:无缺陷、划伤、气泡以及脏污等等,当然,输出结果也可以采用更少或者更多的级别来进行表示。可以理解,上述的级别划分仅仅是用作示例,当级别划分得越多时,输出结果表示得越准确。In a specific embodiment, the output results of the deep learning neural network may include: no defects, scratches, bubbles, dirt, etc. Of course, the output results may also be expressed using fewer or more levels. . It can be understood that the above-mentioned level division is only used as an example, and the more the level division is, the more accurate the output result is represented.
在一具体的实施例中,深度学习的神经网络包括多个训练模型,例如训练模型可以包括无缺陷训练模型、气泡模型以及脏污模型等等。应理解,上述训练模型仅仅是作为一种举例,在实际应用中,还可以包括更多或者更少的训练模型,此处不作具体限定。其中,神经网络可以是BP神经网络、Hopfield网络,ART网络、Kohonen网络、长短期记忆网络(Long Short-Term Memory,LSTM),残差网络(Residential Networking,ResNet),循环神经网络(Recurrent Neural Networks,RNN)等等,此处不作具体限定。In a specific embodiment, the deep learning neural network includes multiple training models. For example, the training model may include a defect-free training model, a bubble model, a dirty model, and so on. It should be understood that the foregoing training model is merely an example, and in actual applications, more or fewer training models may be included, which is not specifically limited herein. Among them, the neural network can be BP neural network, Hopfield network, ART network, Kohonen network, Long Short-Term Memory (LSTM), Residual Network (ResNet), Recurrent Neural Networks , RNN), etc., are not specifically limited here.
在一具体的实施例中,当输入包括第一弯曲散斑图像、第二弯曲散斑图像、第一平直散斑图像、第二平直散斑图像,输出包括无缺陷、划伤、气泡以及脏污,深度学习的神经网络可以如图4所示。In a specific embodiment, when the input includes a first curved speckle image, a second curved speckle image, a first flat speckle image, and a second flat speckle image, the output includes no defects, scratches, and bubbles. And the dirty, deep learning neural network can be shown in Figure 4.
应理解,可以利用大样本散斑图像对所述深度学习的神经网络进行训练和学习。比如,事先按照不同的缺陷样品分别采集大量的散斑图像,利用深度学习的神经网络,对这些能够间接反映玻璃微细结构的散斑图像进行分类训练,得到正确的神经网络。在识别时,将采集到的散斑图像输入训练得到的神经网络就可以得到识别结果。It should be understood that the deep learning neural network may be trained and learned using a large sample of speckle images. For example, a large number of speckle images are collected according to different defect samples in advance, and the deep neural network is used to classify and train these speckle images that can indirectly reflect the fine structure of glass to obtain the correct neural network. During recognition, the collected speckle images are input to the trained neural network to obtain the recognition results.
上述方案中,通过相干光源产生相干光,然后,通过分光镜将所述相干光分成多束分相干光,并通过反射镜调整照射所述待测物体的弯曲部的分相干光 的角度,采集检测器采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射形成的散斑图像,最后,采集检测器根据所述散斑图像确定所述待测物体是否存在缺陷。不难看出,上述方案可以快速地对弯曲的玻璃进行检测。In the above solution, coherent light is generated by a coherent light source, and then the coherent light is divided into a plurality of beams of coherent light by a beam splitter, and the angle of the beam of coherent light that irradiates the curved portion of the object to be measured is collected by a reflector to collect The detector collects a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light are reflected by the object to be measured. Finally, the acquisition detector determines the speckle image based on the speckle image. Whether there is a defect in the object to be tested. It is not difficult to see that the above solution can quickly detect curved glass.
尽管上述实施例以3D玻璃为例进行说明,但是,在实际应用中,上述检测方法也可以应用在其他任意曲面形状曲面玻璃,或者半透明的塑料、毛玻璃等等,甚至是不透明的其他物体等等,此处不作具体限定。下面结合几个具体的实施例进行说明。Although the above embodiments take 3D glass as an example for description, in practical applications, the above detection method can also be applied to other curved glass surfaces, semi-transparent plastic, frosted glass, etc., and even other objects that are not transparent, etc. It is not specifically limited here. The following is a description with reference to several specific embodiments.
实施例一Example one
本实施例的检测***用于实现曲面玻璃外观的缺陷检测。将曲面玻璃放置在检测***中,然后调整反射镜,使得被反射的相干光垂直照射曲面玻璃的弯曲部,则曲面玻璃的划伤、脏污,以及曲面玻璃内部的气泡等缺陷会引起对应的散斑图像改变从而被判别出来。The detection system of this embodiment is used to implement defect detection on the appearance of curved glass. Place the curved glass in the inspection system, and then adjust the mirror so that the reflected coherent light illuminates the curved portion of the curved glass vertically. Defects such as scratches, dirt, and bubbles inside the curved glass will cause corresponding defects. The speckle image changes and is identified.
实施例二Example two
本实施例的检测***用于实现大幅面的平面玻璃的缺陷检测,比如平板电脑和液晶显示器的显示屏以及电视玻璃等等。将大幅面的平面玻璃放置在检测***中,然后,调整反射器的角度,从而保证相干光能够覆盖大幅面的平面玻璃,则大幅面玻璃的划伤、脏污,以及大幅面玻璃内部的气泡等缺陷会引起对应的散斑图像改变从而被判别出来。The detection system of this embodiment is used to implement defect detection of large-format flat glass, such as display screens of tablet computers and liquid crystal displays, and television glass. Place the large-format flat glass in the detection system, and then adjust the angle of the reflector to ensure that coherent light can cover the large-format flat glass. The large-format glass is scratched, dirty, and air bubbles inside the large-format glass. Such defects will cause the corresponding speckle image to change and be identified.
实施例三Example three
本实施例的检测***用于实现任意曲面形状的复杂曲面的缺陷检测。改变检测***的反射镜的照射角度和光电传感器的位置和角度的分布,从而实现任意曲面形状的复杂曲面的缺陷检测。The detection system of this embodiment is used to implement defect detection of a complex curved surface having an arbitrary curved surface shape. Change the illumination angle of the mirror of the inspection system and the position and angle distribution of the photoelectric sensor, so as to realize the defect detection of the complex curved surface with any curved surface shape.
实施例四Embodiment 4
本实施例的检测***用于实现不透明物体的缺陷检测。改变检测***的光 电传感器的位置,使得光电传感器能够采集不透明物体反射的相干光,从而实现不透明物体的缺陷检测。The detection system of this embodiment is used to implement defect detection of opaque objects. Changing the position of the photoelectric sensor of the inspection system enables the photoelectric sensor to collect coherent light reflected by opaque objects, thereby achieving defect detection of opaque objects.
实施例五Example 5
本实施例的检测***用于实现连续在线检测。将多个待测物体放置在电动平台上,由电动平台拖动多个待测物体经过检测***,检测***轮流对所述多个待测物体进行缺陷检测,从而实现连续在线检测。The detection system of this embodiment is used to implement continuous online detection. A plurality of objects to be tested are placed on the electric platform, and the plurality of objects to be tested are dragged by the electric platform through the detection system, and the detection system performs defect detection on the plurality of objects to be tested in turn, thereby achieving continuous online detection.
在本申请所提供的几个实施例中,应该理解到,所揭露的***、终端和方法,可以通过其它的方式实现。例如,以上所描述的装置实施例仅仅是示意性的,例如,所述单元的划分,仅仅为一种逻辑功能划分,实际实现时可以有另外的划分方式,例如多个单元或组件可以结合或者可以集成到另一个***,或一些特征可以忽略,或不执行。另外,所显示或讨论的相互之间的耦合或直接耦合或通信连接可以是通过一些接口、装置或单元的间接耦合或通信连接,也可以是电的,机械的或其它的形式连接。In the several embodiments provided in this application, it should be understood that the disclosed system, terminal, and method may be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the unit is only a logical function division. In actual implementation, there may be another division manner. For example, multiple units or components may be combined or Can be integrated into another system, or some features can be ignored or not implemented. In addition, the displayed or discussed mutual coupling or direct coupling or communication connection may be indirect coupling or communication connection through some interfaces, devices or units, and may also be electrical, mechanical or other forms of connection.
所述作为分离部件说明的单元可以是或者也可以不是物理上分开的,作为单元显示的部件可以是或者也可以不是物理单元,即可以位于一个地方,或者也可以分布到多个网络单元上。可以根据实际的需要选择其中的部分或者全部单元来实现本发明实施例方案的目的。The units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, may be located in one place, or may be distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the objectives of the solutions of the embodiments of the present invention.
另外,在本发明各个实施例中的各功能单元可以集成在一个处理单元中,也可以是各个单元单独物理存在,也可以是两个或两个以上单元集成在一个单元中。上述集成的单元既可以采用硬件的形式实现,也可以采用软件功能单元的形式实现。In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist separately physically, or two or more units may be integrated into one unit. The above integrated unit may be implemented in the form of hardware or in the form of software functional unit.
所述集成的单元如果以软件功能单元的形式实现并作为独立的产品销售或使用时,可以存储在一个计算机可读取存储介质中。基于这样的理解,本发明的技术方案本质上或者说对现有技术做出贡献的部分,或者该技术方案的全 部或部分可以以软件产品的形式体现出来,该计算机软件产品存储在一个存储介质中,包括若干指令用以使得一台计算机设备(可以是个人计算机,服务器,或者网络设备等)执行本发明各个实施例所述方法的全部或部分步骤。而前述的存储介质包括:U盘、移动硬盘、只读存储器(ROM,Read-Only Memory)、随机存取存储器(RAM,Random Access Memory)、磁碟或者光盘等各种可以存储程序代码的介质。When the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it may be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention is essentially a part that contributes to the existing technology, or all or part of the technical solution may be embodied in the form of a software product, which is stored in a storage medium Included are several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in the embodiments of the present invention. The foregoing storage media include: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), magnetic disks or optical disks and other media that can store program codes .
以上所述,仅为本发明的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到各种等效的修改或替换,这些修改或替换都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应以权利要求的保护范围为准。The above are only specific embodiments of the present invention, but the scope of protection of the present invention is not limited to this. Any person skilled in the art can easily think of various equivalents within the technical scope disclosed by the present invention. Modifications or replacements should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

  1. 一种检测***,其特征在于,包括:A detection system, comprising:
    相干光源,用于产生相干光;Coherent light source for generating coherent light;
    分光镜,用于将所述相干光分成多束分相干光,其中,所述多束分相干光用于照射待测物体;A spectroscope for dividing the coherent light into multiple beams of coherent light, wherein the multiple beams of coherent light are used to illuminate an object to be measured;
    反射镜,用于调整部分或者全部分相干光的照射角度;Reflector for adjusting the irradiation angle of part or all of the coherent light;
    采集检测器,用于采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射形成的散斑图像,并根据所述散斑图像确定所述玻璃是否存在缺陷。A collection detector, configured to collect a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light being reflected by the object to be measured, and determine according to the speckle image Whether the glass is defective.
  2. 根据权利要求1所述的***,其特征在于,采集检测器具体用于采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射并以非成像方式形成的散斑图像。The system according to claim 1, wherein the collection detector is specifically configured to collect the multiple beams of coherent light transmitted through the object to be measured or the multiple beams of coherent light are reflected by the object to be measured and Speckle image formed in a non-imaging manner.
  3. 根据权利要求1所述的***,其特征在于,所述采集检测器还用于根据所述散斑图像并通过深度学习的神经网络确定所述待测物体是否存在缺陷。The system according to claim 1, wherein the acquisition detector is further configured to determine whether there is a defect in the object to be measured according to the speckle image and a neural network of deep learning.
  4. 根据权利要求1至3任一权利所述的***,其特征在于,所述***还包括扩束镜,所述扩束镜用于将照射所述待测物体的平直部的分相干光进行扩散。The system according to any one of claims 1 to 3, wherein the system further comprises a beam expander, and the beam expander is configured to perform split coherent light that irradiates a straight portion of the object to be measured diffusion.
  5. 根据权利要求4所述的***,其特征在于,所述***还包括棱面镜,所述棱面镜用于将照射所述待测物体的平直部的分相干光的照射区域扩大。The system according to claim 4, characterized in that the system further comprises a prism mirror for expanding an irradiation area of the coherent light that irradiates the straight portion of the object to be measured.
  6. 一种检测方法,其特征在于,包括:A detection method, comprising:
    相干光源产生相干光;Coherent light source produces coherent light;
    分光镜将所述相干光分成多束分相干光,其中,所述多束分相干光用于照射待测物体;A beam splitter divides the coherent light into multiple beams of coherent light, wherein the multiple beams of coherent light are used to illuminate an object to be measured;
    反射镜调整部分或者全部分相干光的照射角度;The reflector adjusts the irradiation angle of part or all of the coherent light;
    采集检测器采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射形成的散斑图像,并根据所述散斑图像确定所述玻璃是否存在缺陷。A collection detector collects a speckle image formed by the multiple beams of coherent light passing through the object to be measured or the multiple beams of coherent light are reflected by the object to be measured, and determines the glass according to the speckle image Whether there are defects.
  7. 根据权利要求6所述的方法,其特征在于,采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射形成的散斑图像:The method according to claim 6, wherein a speckle image formed by transmitting the multiple beams of coherent light through the object to be measured or the multiple beams of coherent light being reflected by the object to be measured is collected:
    采集所述多束分相干光透过所述待测物体或者所述多束分相干光被所述待测物体反射并以非成像方式形成的散斑图像。A speckle image formed by transmitting the multiple beams of coherent light through the object to be measured or the multiple beams of coherent light being reflected by the object to be measured and formed in a non-imaging manner is collected.
  8. 根据权利要求6所述的方法,其特征在于,所述方法还包括:The method according to claim 6, further comprising:
    所述采集检测器根据所述散斑图像并通过深度学习的神经网络确定所述待测物体是否存在缺陷;其中,所述神经网络使用大样本的散斑图像进行训练和学习。The acquisition detector determines whether there is a defect in the object to be tested according to the speckle image and a deep learning neural network; wherein the neural network uses a large sample of speckle images for training and learning.
  9. 根据权利要求6至8任一权利要求所述的方法,其特征在于,所述方法还包括:The method according to any one of claims 6 to 8, wherein the method further comprises:
    通过扩束镜将照射所述待测物体的平直部的分相干光进行扩散。The beam expander is used to diffuse the coherent light that irradiates the straight portion of the object to be measured.
  10. 根据权利要求9所述的方法,其特征在于,所述方法还包括:The method according to claim 9, further comprising:
    通过棱面镜将照射所述待测物体的平直部的分相干光的照射区域扩大。An irradiation area of the coherent light that irradiates the straight portion of the object to be measured is enlarged by a prism mirror.
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