CN110057841A - A kind of defect inspection method based on transmittance structure light - Google Patents
A kind of defect inspection method based on transmittance structure light Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G01N21/88—Investigating the presence of flaws or contamination
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Abstract
A kind of defect inspection method based on transmittance structure light, for detecting the defect of high-transmission rate testee.Fringe structure light is generated first and projects testee surface, and fringe structure light is deformed fringe structure light after being transmitted through testee；Deforming stripe structure light is acquired, and collected plot of light intensity is converted into modulation degree figure using modulation degree technology；The surface defect information of testee can be obtained in conjunction with subsequent algorithm.The method is particularly suitable for the defects detection of large scale deep camber glass cover-plate.Compared with reflecting system, transmissive system proposed by the present invention eliminates the influence of parasitic striped, improves the fringe contrast of acquisition image, improves the signal-to-noise ratio of original image, improve measurement result.In entire testing process, complicated calibration process is not needed, the elevation information that Integration reconstructions go out object is not needed yet, avoids integral algorithm bring error, have the characteristics that quick, easy to operate, simple and practical.
Description
Technical field
The invention belongs to defects detections to identify field, be related to a kind of defect inspection method based on transmittance structure light, especially
It is related to a kind of transmittance structure optical illumination method to detect, identify the surface defect of high-transmission rate testee, is particularly suitable for big
Defect on size deep camber 3D electronic display glass cover-plate.
Background technique
Increasingly mature with glass production technology, glass has become indispensable one in our clothing, food, lodging and transportion -- basic necessities of life lives
Part.Glass due to being allowed to scratch resistance with very high hardness (Mohs' hardness 8H) there is preferable surface strength to be allowed to anti-
Resistance to compression is fallen, and there is splendid light transmission, fabulous surface smoothness, fabulous metal-like.Glass panel is in electronic display
In display screen using more and more extensive, as the substrate or TV of liquid crystal display, laptop, pad, mobile phone protection glass
Glass etc..Now with being announced to the world splendidly for Curved screen, the glass cover-plate on electronic instrument has more polymorphic selection.
In the production of glass cover-plate, due to material, manufacture craft etc., a certain proportion of defect glass cover can be generated
Plate.For glass cover-plate producer, product quality is its important link to be considered.The direct shadow of glass cover plate surfaces defect
Product quality is rung, quality reaches a standard, which can just capture the bigger market share.How to be transported in glass cover-plate production process
Glass cover-plate quality is improved with high-tech means, the effect of detection system directly decides glass cover-plate quality.Detection system energy
It avoids substandard products from entering in finishing operations, reduces cost, improve quality, stablize non-contacting detection system at a high speed to glass cover-plate
It is indispensable for producer.According to the defect characteristic analyzing defect detected introduced by which step, glass can be improved
Cover board production technology reduces the defects of production process, improves glass cover-plate performance and yield rate.
Currently, electronic display glass cover-plate is more in the production line to rely on human eye detection, human eye detects under strong light to be lacked
It is sunken not only time-consuming, but also influenced by subjective factor, the result of people's detection of different eyesights has larger difference, lacks unified judge
Standard.Human eye is for a long time by strong light stimulus in dark room conditions, and eyesight will decline to a great extent in a short time, electronical display panel glass
Cover board manufacturing enterprise will replace a collection of worker usual some months.Human eye detection had both been unfavorable for the health of worker, was also unfavorable for looking forward to
The interests of industry.It is therefore proposed that a kind of detection, the recognition methods of new electronic console glass cover-plate dust and defect very must
It wants.
Summary of the invention
For the testees of the high-transmission rates such as glass cover-plate, when defects detection identifies, existing error is big, it is accurate to be difficult to
In place of the deficiencies of measurement, the invention proposes a kind of contactless defect inspection method based on transmittance structure light, Neng Goujian
Defect that is single, quickly and accurately detecting high-transmission rate testee, is particularly suitable for the 3D glass cover of large scale deep camber
Plate.
The technical solution of the present invention is as follows:
A kind of defect inspection method based on transmittance structure light, the defect inspection method are tested for detecting high-transmission rate
The surface defect of object, includes the following steps:
Step 1: generating fringe structure light projects testee, after the fringe structure light is transmitted through testee
It is deformed fringe structure light；
Step 2: acquiring the deforming stripe structure light；
Step 3: the plot of light intensity of collected deforming stripe structure light is converted to modulation degree figure；
Step 4: obtaining the surface defect information of testee according to the modulation degree figure.
Specifically, it includes: based on phase that plot of light intensity, which is converted to the modulation degree method that modulation degree figure uses, in the step 3
The intensity modulation analysis method of shifting, the intensity modulation analysis method based on Fourier transformation, the intensity modulation analysis based on time Fourier transformation
The plot of light intensity of collected deforming stripe structure light can be converted to modulation degree figure by method etc., these methods.
Specifically, generating phase shift item by the step 1 when step 3 uses the intensity modulation analysis method based on phase shift
Line project structured light is to testee surface, the light intensity of phase shift fringe structure light are as follows:
Wherein δnFor phase shift size,For initial phase distribution, A (x, y) is background light intensity, and B (x, y) indicates striped
Contrast；
The light intensity of the deforming stripe structure light of the step 2 acquisition are as follows:
WhereinFor the additive phase introduced by testee refraction；
The step 3 is according to the intensity modulation analysis method based on N step phase shift by the light intensity of collected deforming stripe structure light
Figure is converted to modulation degree figure, modulation degree
According to the light intensity I' of deforming stripe structure lightn(x, y) obtains modulation degreeWhereinImax(x, y) be the light intensity of phase shift fringe structure light that is generated in the step 1 most
Big value, Imin(x, y) is the light intensity minimum value of the phase shift fringe structure light generated in the step 1；
The transmissivity for enabling testee is β, and in conjunction with the formula of front two, obtaining modulation degree in the case where transmission is
Specifically, generating the Structured Illumination module of fringe structure light, testee and acquisition deforming stripe structure light
Image capture module is arranged on same optical axis.
In order to more clearly illustrate the principle and advantage of transmittance structure degree of light modulation detection technique, below from many aspects point
Analysis compares the similarities and differences of the modulation degree detection technique based on catoptric arrangement light and transmittance structure light.
One, defects detection principle
When light is irradiated on object, effect because of object to light beam, light will be there are three outlet: absorbed by object,
It is reflected by the object, is transmitted through object.The testee of high-transmission rate is very little to the absorption of light beam, therefore herein
The light absorption amount of testee is similar to zero, the light being irradiated on testee is described as only reflecting and transmiting.
And the reflection and transmission of light, according to the material of irradiated object and the difference of pattern, and there are some differences.It only discusses herein
The testee of high-transmission rate, no matter therefore can only discuss the effect that pattern reflects light and transmits with material.
From microcosmic, the defect on testee will lead to reflected light and transmitted light deviates their original directions, make
At if by original Image Acquisition direction acquisition picture, the luminous intensity of fault location can be weakened, the situation such as Fig. 3
It is shown.
Either reflection or transmittance structure light, the relationship of modulation degree M (x, y) and fringe contrast B (x, y) are as follows:
And the relationship of fringe contrast and light intensity are as follows:
The reflectivity for enabling testee is α, transmissivity β.In conjunction with two above formula it is found that in the feelings for reflecting and transmiting
Under condition, there is modulation degree formula respectively:
Imax(x,y)、Imin(x, y) is the light intensity maximum value and light intensity minimum of the structure light of Structured Illumination module projects
Value.
From the modulation degree formula of reflection and transmission it is found that modulating angle value under conditions of incidence structure light image is given
It is directly proportional to reflectivity α and transmissivity β.The presence of defect results in the deviation of reflection light and refracted light, then in its institute
On ground, if acquiring light by original direction, overall light intensity be can decrease, this situation is also equal to reflectivity and thoroughly
The reduction of rate is penetrated, this modulation angle value for having eventually led to fault location is lower than the modulation angle value of the intact part in periphery.
Either in reflecting system or transmissive system, the decrease that defect can all cause shooting image glazing strong, defect
The reflectivity and transmissivity at place reduces, and modulation angle value is lower than the modulation angle value on periphery.When testee surface existing defects
When, can cause fault location modulation angle value be lower than surrounding normal region modulation angle value, therefore utilize defect modulation degree characteristic and
Some subsequent image processing algorithms, the two-dimensional defect distribution map of available object testee.
Two, detection method proposed by the present invention is more suitable for transparent substance (such as glass cover-plate) detection of large scale deep camber
With the emergence and development of Curved screen, the demand for carrying out quality testing to deep camber glass cover-plate is come into being.Electricity
The glass cover-plate of sub- display screen is substantially in the form of corresponding points front and rear surfaces are parallel to each other, and this part is as supposed premise pair
The glass cover-plate of large scale deep camber is analyzed.
The index path for looking first at reflecting system, as shown in Fig. 4 (a), Fig. 4 (b).In structure reflective optical assembly, commonly
It is inclined shaft reflecting system.The reflected light path figure of Fig. 4 (a) expression convex outward screen, it can be seen that light deviates from the image of script
Direction is acquired, and in the trend dissipated outward.The reflected light path figure of Fig. 4 (b) expression inner sunken face screen, it can be seen that light
The Image Acquisition direction of script is also offset from, and in the trend inwardly gathered.The either Curved screen of evagination or indent, by
In the change of its surface curvature, the light path for being suitable for flat glass cover board originally is caused to be difficult to acquire these deep camber ranges
Catoptric arrangement light, do not know where to begin more to the detection of defect.Therefore the problem of reflected light path, causes deep camber glass cover-plate
Detection difficult.
Shown in the optical path of transmissive system such as Fig. 5 (a), Fig. 5 (b), because the thickness of glass cover-plate is partially thin, therefore by same light
The curvature on front and rear surfaces position that line passes through is approximately consistent.Fig. 5 (a) indicates the transmitted light path figure of convex outward screen, can be with
Light is found out without departing from the Image Acquisition direction of script, but light beam closeness is in the trend increased.Fig. 5 (b) indicates inner sunken face
The transmitted light path figure of screen, it can be seen that light is also without departing from the Image Acquisition direction of script, but light beam closeness becomes in what is reduced
Gesture.Therefore either the Curved screen of evagination or indent, the change of surface curvature all will not influence its radiation direction, only can
Translation on one faint position is generated to light, the light path of script still can these collected deep camber models
The transmitted light enclosed, and then defects detection is carried out to these parts.Therefore transmission method proposed by the present invention is more suitable for large scale
The transparent substance (such as glass cover-plate) of deep camber detects, and if needing in reflecting system to the survey of large scale deep camber glass cover-plate
Rotating mechanism is cooperated to carry out time shooting.
Three, parasitic striped
In inclined shaft reflecting system, parasitism striped caused by transparent substance rear surface reflects is always a troubling asks
Topic, as shown in Figure 6.It can be seen from the figure that after the premenstrual surface refraction of light, then reflect through rear surface, is formed anti-with front surface
Similar reflected light is penetrated, in structure reflective optical assembly, this is referred to as parasitic striped.The characteristic of this front and rear surfaces reflection,
It will lead to the striped aliasing occurred in acquired image in reflecting system to a certain extent.And the appearance of parasitic striped, also can
Cause the defect of front surface in final modulation degree result in dual picture.
But by the transmission of observation light it can be found that there is no parasitic stripeds in transmitted light.This is primarily due to highly transmissive
The reflectivity of the testee of rate is lower, the luminous intensity for occurring secondary reflection can almost disregard (reflected by rear surface,
Again by front surface reflection, testee is transmitted later), transmittance structure photosystem, which has well solved in reflecting system, to be occurred
Parasitic stripes problem.
Four, the signal-to-noise ratio of original image
Asked in this step of modulation degree by collected deforming stripe structure light image, be substantially by plot of light intensity come
Modulation degree figure is sought, can be known according to the formula relationship of the two, the camera noise being added in plot of light intensity will affect final modulation
Spend result.
Assuming that the structure light light intensity of Structured Illumination system projects are as follows:
The reflectivity of testee is α, and transmissivity β, the noise of camera is σ, it is known that the testee of high-transmission rate
Transmissivity is much larger than reflectivity, i.e. β > > α.
So available catoptric arrangement light light intensity are as follows: I1(x, y)=α I (x, y)+σ
Transmittance structure light light intensity are as follows: I2(x, y)=β I (x, y)+σ
The ratio relation of light intensity and noise are as follows:I.e. the signal-to-noise ratio of transmissive system is remote high
In the signal-to-noise ratio of reflecting system, it can thus be appreciated that the fringe quality for the image that transmissive system is shot is better than reflecting system
Fringe quality.And fringe quality and modulation degree result are positively correlated.It can be seen that the modulation degree figure result that transmissive system obtains is wanted
Better than the modulation degree result of reflecting system.
Compared to reflecting system, comparatively transmissive system inhibits the influence of camera noise due to the increase of light intensity, letter
It makes an uproar than getting a promotion, improves the quality of the bar graph of shooting, optimize modulation degree as a result, finally obtaining better defect inspection
Survey result.
Five, modulation degree interpretation of result
In reflecting system, because testee has the characteristic transparent, reflectivity is low, reflectivity should be selected to the greatest extent may be used
The low placement background of energy, because high reflectance background bring bias light can flood the reflection strip of testee.Modulation degree knot
Fruit is closely bound up with fringe contrast, and in the visual field of image capture module, the lower part of reflectivity, fringe contrast is got over
Small, modulation degree result is also smaller.That is, the lower part of reflectivity in image, modulation angle value is lower.
Transmissive system is similar therewith, and only conclusion is the lower place of transmissivity, and modulation angle value is lower.And transmissive system
The reason of because of system setting, background is mostly air, and air transmissivity is higher than testee.
So from conclusions:
There is modulation degree figure result in reflecting system: the intact part > testee defect part > background of testee.
There is modulation degree figure result in transmissive system: the intact part > testee defect part of air > testee.
Using contrast stretching algorithm, final modulation degree result is stretched in the intensity value ranges of 0-255 and is shown
Show, it can be seen that the gray value of testee defect will be lower than the gray scale of testee defect in reflecting system in transmissive system
Value, from the point of view of vision and image procossing, the defect that transmissive system measures becomes apparent from than the defect that reflecting system measures,
Also it is more conducive to subsequent processing.
Six, reflecting system and transmissive system comparison
In the detection of transparent deep camber object, due to the difference of optical path, reflecting system needs multi collect picture ability
Realize detection completely, transmissive system then only needs the acquisition of few number can complete detection object.And the signal-to-noise ratio of transmissive system is high
In reflecting system, and parasitic striped is eliminated, because of background difference, modulation degree final result also can be more preferable.
When being detected using structure light to the large-sized testee of deep camber, transmissive system is in addition to can be with less
Image Acquisition number carries out outside testee detection, and the size of the Structured Illumination module in system is generally also less than reflection
Size in system, this is also to be determined by their optical path relationship.
Therefore, in transmissive system, relative to reflecting system, with less Image Acquisition number, smaller size of structure
Optical illumination module, so that it may realize the detection to deep camber large scale testee.
But the advantage of transmissive system is mainly reflected in the detection of the high object of transmissivity, for high reflectance low transmission
The object or reflecting system of rate are more excellent.For opaque object, then can only be detected with reflecting system.
In conclusion the invention proposes a kind of new transmission-type structure light defect detecting system, which can make structure
Light transmission passes through the testee of high-transmission rate, by acquiring the deforming stripe transmitted through testee, utilizes modulation degree point
Analysis technology obtains modulation degree distribution map, and handles in conjunction with certain algorithm modulation degree result, and testee can be obtained
On defect distribution.
The invention has the benefit that the present invention utilizes tune by the deforming stripe structure light of acquisition testee transmission
Institutional analysis technology obtains the modulation degree figure of deforming stripe structure light, can be non-contact, simply and rapidly according to system figure
The distribution of testee surface defect is obtained, the defects detection of large scale deep camber testee is particularly suitable for, can not only detect
The planar section of testee, since transmitted light is not turned back the characteristic of light so that greatly in curvature range testee it is non-
Planar section can also be caught in transmittance structure light, to realize the defects detection of large scale deep camber testee.
Relative to structure reflective optical assembly, optical path has also been straightened in transmissive system proposed by the present invention, eliminates parasitic striped
Influence；The fringe contrast of acquisition image is improved simultaneously, is improved the signal-to-noise ratio of original image, is improved measurement result；
And the change due to detecting background, transmissive system proposed by the present invention can obtain defects detection knot more preferably than reflecting system
Fruit.In entire testing process, complicated calibration process is not needed, the elevation information that Integration reconstructions go out object is not needed yet, avoids
Integral algorithm bring error, has the characteristics that quick, easy to operate, simple and practical.
Detailed description of the invention
Fig. 1 (a), Fig. 1 (b) are in embodiment using a kind of defects detection side based on transmittance structure light proposed by the present invention
The structure chart of the transmission-type glass cover-plate defect detecting system of method design, Fig. 1 (c) is the index path of detection system.
Fig. 2 is a kind of flow diagram of defect inspection method based on transmittance structure light proposed by the present invention.
Fig. 3 is influence schematic diagram of the defect to reflection, transmission-type structure light.
Fig. 4 (a), Fig. 4 (b) are influence schematic diagram of the deep camber face shape to reflecting system optical path.
Fig. 5 (a), Fig. 5 (b) are influence schematic diagram of the deep camber face shape to transmissive system optical path.
Fig. 6 is parasitic striped production principle figure.
Specific embodiment
The technical schemes of the invention are described in detail in the following with reference to the drawings and specific embodiments.
The present invention proposes a kind of defect inspection method based on transmittance structure light, for detecting high-transmission rate testee
Surface defect, can non-contact, simple, quickly realize that defects detection identifies, design detection system by this method, can be straight
The defect information on detection testee is connect, large scale deep camber testee can be suitable for.Such as Fig. 1 (a), Fig. 1 (b) institute
Show be detection system structure chart, be index path as shown in Fig. 1 (c), detection system includes that Structured Illumination module, image are adopted
Collect module, system control and data processing module.Structured Illumination module is made of LCD liquid crystal display screen, and display screen generates one
Series of stripes structure light, is projected to testee, and structure light will transmit through testee.Image capture module is by single or more
A camera composition, captures the deforming stripe structure light for being transmitted through testee.System control is with data processing module for controlling
Structured Illumination module illumination processed, and handle by the image data of image capturing system acquisition output.
Testee is the transparent and translucent object of high-transmission rate, below using glass cover-plate as testee for it is detailed
Describe the bright course of work of the invention in detail.
It is overhaul flow chart as shown in Figure 2, the defect inspection method of the present embodiment includes the following steps:
Step 1 builds transmission-type glass cover-plate detection system, and system is mainly by Structured Illumination module, Image Acquisition mould
Block and system control are formed with data processing module, and image capturing system is focused in glass cover plate surfaces clearly to be schemed
Picture.For the Structured Illumination system used in the present embodiment for LCD liquid crystal display screen, image capture module is CCD camera, CCD phase
Machine is Allied Vision Technologies MG-505B, and camera lens are the tight shot that focal length is 25mm
(ComputarM2514-MP2).Start to detect after the completion of building.
Step 2 generates fringe structure light in Structured Illumination module, and control structure optical illumination module is by striated structure
Light projection is to glass cover-plate.
Step 3, fringe structure light are transmitted through glass cover-plate, because light is reflected through glass cover-plate front and rear surfaces, structure light
Have a degree of deformation.
Step 4 is captured the deforming stripe structure light for being transmitted through glass cover-plate by image capturing system, and the present embodiment utilizes
The deforming stripe transmitted on CCD camera shooting glass cover-plate, the modulation degree of glass cover-plate is obtained using intensity modulation analysis technology
Figure.
Step 5 carries out Data Management Analysis to the modulation degree figure of glass cover-plate, finally obtains the surface defect of glass cover-plate
Information.
The detection method is insensitive to environment light, does not need to demarcate, does not also need Integration reconstructions, simple and practical, can be fast
The defects detection of glass cover-plate is realized fastly.Due to detecting glass cover-plate defect, and structure light in the way of transmittance structure light
Glass cover-plate is again to by cameras capture, entire optical path not turning back by wide-angle, therefore structure light photograph from illuminating to being transmitted through
Bright module, glass cover-plate, camera three position are in one line feature of multiple spot, they can be arranged on same optical axis.Such as
Shown in Fig. 1 (a), Fig. 1 (b), Structured Illumination module is placed vertically, and glass cover-plate is equally placed vertically, and camera is horizontal positioned,
Multiple cameras can be set in different angle, Structured Illumination system generates project structured light on glass cover-plate, and light transmission is passed through
Enter image capturing system after glass cover-plate.
When step 4 obtains the modulation degree figure of glass cover-plate using intensity modulation analysis technology, there are many intensity modulation analysis technologies
Kind: the intensity modulation analysis method based on phase shift, the intensity modulation analysis method based on Fourier transformation, based on time Fourier transformation
Intensity modulation analysis method etc., it is numerous.
When using the intensity modulation analysis method for walking phase shift based on N, needs to generate phase shift fringe structure light in step 2, utilize
Computer control structure lighting system projects a series of this sine streak figure, and sine streak figure images on glass cover-plate, so
After be transmitted through glass cover-plate, the deforming stripe modulated by object is received by image capturing system, utilizes phase shift modulated degree formula
Solve modulation degree.Detailed analysis is as follows:
The light intensity for the phase shift fringe structure light that Structured Illumination system is generated and projected in step 2 in above-mentioned technical proposal can
It indicates are as follows:
WhereinFor phase shift size,For initial phase distribution, f is spatial frequency, A (x,
It y) is background light intensity, B (x, y) indicates fringe contrast.
The light intensity for the deforming stripe structure light that image capturing system in step 3 takes indicates are as follows:
WhereinIt is the additive phase introduced by glass cover-plate refraction.
Modulation degree formula in step 4 are as follows:
Merge striped formula to obtain with modulation degree formula:
Illustrate that modulation degree and background light intensity A (x, y) are unrelated, it is only related with fringe contrast B (x, y).By
Imax(x, y)=A (x, y)+B (x, y)
Imin(x, y)=A (x, y)-B (x, y)
It obtainsIllustrate modulation degree only by the light intensity of the fringe structure light generated
The difference of maximum value and light intensity minimum value determines that bias light is on modulation degree without influence.
The transmissivity for enabling glass cover-plate is β.It is obtained in conjunction with two above formula, modulation degree formula in the case where transmission:
Imax(x,y)、Imin(x, y) is the light intensity maximum value and light intensity minimum of the structure light of Structured Illumination module projects
Value.Fault location transmissivity is lower than the intact part in periphery, learns that it modulates angle value also below the intact part in periphery according to formula.
Detection system of the invention overcomes the limitation that a large amount of artificial detections are needed in the detection of traditional glass cover board, and examines
Result is surveyed to be better than detecting the reflecting system of defect using similar formula system.
Modulation degree technology is conventionally used in phase measurement deviation art, and phase measurement deviation art is a kind of utilization catoptric arrangement light
The technology of mirror article 3 d shape is measured, modulation degree technical application has been arrived in transmissive system and detected glass cover by the present invention
Defect on plate has obtained good detection effect.
Detection, identifying system and the method for this non-contact, simple, quick dust and defect provided by the invention, no
It is only capable of the planar section of detection glass cover-plate, since transmitted light is not turned back the characteristic of light, so that glass greatly in curvature range
The non-flat portion of cover board can also be caught in transmittance structure light, to realize the defect of large scale deep camber glass cover-plate
Detection.Relative to structure reflective optical assembly, optical path has also been straightened in this transmissive system, eliminates the influence of parasitic striped.Simultaneously should
The fringe contrast of system improving acquisition image, this improves the signal-to-noise ratio of original image to a certain extent, improve measurement
As a result.And the change due to detecting background, the system have obtained defects detection result more preferably than reflecting system.
In entire testing process, complicated calibration process is not needed, the elevation information that Integration reconstructions go out object is not needed yet,
Integral algorithm bring error is avoided, is had the characteristics that quick, easy to operate, simple and practical.The use scope of this method is not
It is limited to the detection of glass cover-plate open defect, it is equally applicable to other transparent and translucent object defects detections.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Belong to those skilled in the art in the technical scope disclosed by the present invention, any changes or substitutions that can be easily thought of, all answers
It is included within the scope of the present invention.
Claims (4)
1. a kind of defect inspection method based on transmittance structure light, which is characterized in that the defect inspection method is for detecting height
The surface defect of transmissivity testee, includes the following steps:
Step 1: generating fringe structure light projects testee surface, after the fringe structure light is transmitted through testee
It is deformed fringe structure light；
Step 2: acquiring the deforming stripe structure light；
Step 3: the plot of light intensity of collected deforming stripe structure light is converted to modulation degree figure；
Step 4: obtaining the surface defect information of testee according to the modulation degree figure.
2. the defect inspection method according to claim 1 based on transmittance structure light, which is characterized in that the step 1 produces
Raw phase shift fringe structure light projects testee surface, the light intensity of phase shift fringe structure light are as follows:
Wherein δnFor phase shift size,For initial phase distribution, A (x, y) is background light intensity, and B (x, y) indicates fringe contrast
Degree；
The light intensity of the deforming stripe structure light of the step 2 acquisition are as follows:
WhereinFor the additive phase introduced by testee refraction；
The step 3 turns the plot of light intensity of collected deforming stripe structure light according to the intensity modulation analysis method based on N step phase shift
It is changed to modulation degree figure, modulation degree
According to the light intensity I' of deforming stripe structure lightn(x, y) obtains transmission case and lowers system are as follows:
Wherein β is the transmissivity of testee, Imax(x, y) is the light intensity of the phase shift fringe structure light generated in the step 1
Maximum value, Imin(x, y) is the light intensity minimum value of the phase shift fringe structure light generated in the step 1.
3. the defect inspection method according to claim 1 based on transmittance structure light, which is characterized in that in the step 3
It further includes intensity modulation analysis method and base based on Fourier transformation that plot of light intensity, which is converted to the modulation degree method that modulation degree figure uses,
In the intensity modulation analysis method of time Fourier transformation.
4. the defect inspection method according to any one of claims 1 to 3 based on transmittance structure light, which is characterized in that produce
The image capture module setting of the Structured Illumination module, testee and acquisition deforming stripe structure light of raw fringe structure light exists
On same optical axis.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN113533206A (en) * | 2021-07-26 | 2021-10-22 | 上海图也信息技术有限公司 | Industrial detection system and method for industrial Internet |
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| CN110514144A (en) * | 2019-09-11 | 2019-11-29 | 四川大学 | The smooth three-dimensional surface shape measuring system of object and its measurement method |
| CN110514144B (en) * | 2019-09-11 | 2020-10-09 | 四川大学 | Measuring method based on object smooth surface three-dimensional topography measuring system |
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| CN111351795A (en) * | 2020-02-27 | 2020-06-30 | 杨孝兰 | Mirror surface object and transparent object detection method based on special structured light |
| CN111337517A (en) * | 2020-03-09 | 2020-06-26 | 广西师范大学 | Cylindrical lens defect detection device and cylindrical lens defect detection method |
| CN111323434A (en) * | 2020-03-16 | 2020-06-23 | 征图新视(江苏)科技股份有限公司 | Application of phase deflection technology in glass defect detection |
| JP2021189044A (en) * | 2020-05-29 | 2021-12-13 | 株式会社リコー | Surface inspection device and surface inspection method |
| CN113533206A (en) * | 2021-07-26 | 2021-10-22 | 上海图也信息技术有限公司 | Industrial detection system and method for industrial Internet |
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