WO2019233063A1 - Oxidizing furnace - Google Patents

Oxidizing furnace Download PDF

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Publication number
WO2019233063A1
WO2019233063A1 PCT/CN2018/119549 CN2018119549W WO2019233063A1 WO 2019233063 A1 WO2019233063 A1 WO 2019233063A1 CN 2018119549 W CN2018119549 W CN 2018119549W WO 2019233063 A1 WO2019233063 A1 WO 2019233063A1
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Prior art keywords
furnace
furnace body
air inlet
pipe
area
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PCT/CN2018/119549
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French (fr)
Chinese (zh)
Inventor
陈志兵
李旭刚
刘�东
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北京北方华创微电子装备有限公司
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Publication of WO2019233063A1 publication Critical patent/WO2019233063A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere

Definitions

  • the invention relates to the field of semiconductor manufacturing, and in particular, to an oxidation furnace.
  • SiC material has outstanding advantages such as wide band gap, high saturation drift speed, high thermal conductivity, and high critical breakdown electric field. It belongs to the third generation of semiconductor materials and is suitable for preparing high-power, high-frequency, high-voltage, high-temperature, and radiation-resistant electronic devices. Moreover, SiC material is the only wide band gap semiconductor that can directly oxidize and grow SiO 2 films. The most common method is to use high temperature dry or wet oxygen thermal oxidation methods to grow SiO 2 films, and use thermal oxidation methods to obtain SiO 2 films. And the quality of the interface characteristics is the best.
  • FIG. 1 is a sectional view of a conventional oxidation furnace.
  • the oxidation furnace includes an explosion-proof cover 1, an ignition chamber 2, a heater 3, a hydrogen tube 4, an oxygen tube 5, and a temperature sensor 6.
  • the wet oxygen oxidation process usually uses high-purity hydrogen and oxygen to ignite and synthesize water vapor outside the process chamber.
  • the high-purity hydrogen and oxygen enter the ignition chamber 2 through the hydrogen pipe 4 and the oxygen pipe 5, respectively, and the heater 3 Under the heating, the hydrogen reaches the ignition point and burns to generate water vapor.
  • the water vapor enters the process chamber (not shown in the figure) from the ignition bubble outlet 7.
  • the explosion-proof cover 1 is insulated by water to protect external equipment and components.
  • the temperature sensor 6 is used to monitor the combustion temperature in the ignition chamber 2 to ensure that the hydrogen can be reliably burned when it passes into the fire chamber 2.
  • the ignition chamber 2 needs to be separately set to ignite hydrogen, this way of igniting outside the process chamber needs to occupy a large space of the equipment.
  • the ignition chamber 2 transports water vapor into the process chamber in a gaseous state, which requires higher airtightness and heat insulation of the water vapor transmission pipeline, resulting in higher equipment costs.
  • the heat insulation layer of the high-temperature vacuum reactor ie, the process chamber
  • the water vapor transportation distance is long, and the airflow transportation process is unstable.
  • the present invention aims to solve at least one of the technical problems existing in the prior art, and proposes an oxidation furnace, which can save equipment space, reduce equipment costs, and improve the stability of airflow.
  • an oxidation furnace including:
  • a furnace cavity which includes a process area, a heat insulation area, a combustion area, and a heat insulation area divided in sequence from top to bottom;
  • a process boat which is arranged in the process area and is used for carrying a workpiece to be processed
  • An air inlet pipe for conveying a process gas, and an air outlet of the air inlet pipe is located in the combustion zone, and the air inlet of the air inlet pipe extends from the bottom of the furnace cavity;
  • a heat-insulating structure provided in the heat-insulating area, and the heat-insulating structure forming the heat-insulating area to form an air intake channel for conveying the gas in the combustion area to the process area;
  • a thermal insulation structure is disposed in the thermal insulation area and surrounds the outer periphery of the air intake pipe.
  • the intake pipe includes a hydrogen pipe and an oxygen pipe sleeved on the outer periphery of the hydrogen pipe, wherein the hydrogen pipe and the oxygen pipe are respectively used to transport hydrogen and oxygen, so that the hydrogen and Part of the oxygen reacts in the combustion zone to generate water vapor to provide a wet oxygen stream to the process zone.
  • the air outlet of the oxygen pipe is lower than the air outlet of the hydrogen pipe.
  • a stopper is provided at the upper end of the hydrogen tube, the stopper is dome-shaped, and a center of the stopper is provided with a first through hole, and an upper end of the first through hole is used as the outlet. Mouth
  • a diameter of the first through hole is smaller than an inner diameter of the hydrogen tube.
  • the intake pipe further includes a thermocouple protection tube disposed inside the oxygen pipe, and an upper end of the thermocouple protection tube is closed and is located in the combustion zone.
  • the lower end extends from the bottom of the furnace cavity; and, a thermocouple is provided in the thermocouple protective tube, and a detection end of the thermocouple is in contact with an upper end of the thermocouple protective tube for detecting the combustion Zone temperature.
  • the thermal insulation structure includes a plurality of first thermal insulation plates spaced apart in a vertical direction, and an annular channel is formed between an outer peripheral wall of the plurality of first thermal insulation plates and an inner peripheral wall of the furnace cavity. ;
  • a center hole is provided in the center of each of the first heat insulation plates, and the annular channel and the center hole are used as the air inlet channel.
  • the heat insulation structure includes a plurality of second heat insulation plates spaced apart in a vertical direction, and a heat insulation cavity provided in the heat insulation area and located below the second heat insulation plate at the lowest level;
  • the heat preservation cavity is filled with a heat preservation medium.
  • the oxidation furnace further includes: an inner layer hose and an outer layer hose sleeved on the outer periphery of the inner layer hose, wherein,
  • the air outlet of the inner hose is sealedly connected to the air inlet of the air inlet pipe, and the air inlet of the inner hose is used to connect with an air source;
  • a vacuum space is formed between the outer hose and the inner hose.
  • the furnace cavity is composed of an inner furnace body, and an outer furnace body is sleeved on the outer periphery of the inner furnace body;
  • the bottom of the outer furnace body has an opening through which the inner furnace body can rise or fall relative to the outer furnace body.
  • the oxidation furnace further includes: a first flange, the first flange is disposed at a lower end of the inner furnace body;
  • a second through hole is provided in the first flange, and an air inlet of the air inlet pipe extends out through the second through hole; a space is provided between the air inlet pipe and the second through hole
  • the first sealing ring is used to seal the gap between the two.
  • the oxidation furnace further includes: a second flange, the second flange is disposed at a lower end of the outer furnace body, and the second flange is located in the outer furnace body in the outer furnace body When it is in the body, it is in sealing butt joint with the first flange.
  • the inner furnace body has an upper end opening
  • the second flange is provided with an exhaust port communicating with the outside;
  • the exhaust port, the gap, and the upper end opening constitute an exhaust passage communicating with the inside of the inner furnace body.
  • the oxidation furnace provided by the present invention adopts an ignition structure in the furnace, that is, the process area and the combustion area are both located in the furnace cavity, thereby saving equipment space.
  • the heat insulation structure is used to block the high temperature radiation in the process area, and the heat insulation structure can also form an air intake channel in the heat insulation area for the gas in the combustion area to pass through and flow into the process area, thereby achieving the Water vapor transmission eliminates the need for water vapor transmission pipelines, thereby reducing equipment costs.
  • the water vapor transmission distance in the furnace is relatively short, and it is easy to form a stable airflow, which can improve the airflow stability in the process area.
  • Figure 1 is a sectional view of a conventional oxidation furnace
  • FIG. 2 is a cross-sectional view of an oxidizing furnace according to an embodiment of the present invention.
  • FIG. 3 is an enlarged view of an area I in FIG. 2; FIG.
  • FIG. 4 is an enlarged view of a region II in FIG. 2;
  • FIG. 5 is a schematic view of an air flow path of an oxidation furnace according to an embodiment of the present invention.
  • the oxidation furnace provided by the embodiment of the present invention includes a furnace cavity 8, a process boat 9, an air inlet pipe, a heat insulation structure 10 and a heat insulation structure 14.
  • the furnace cavity 8 includes a process area A, a heat insulation area B, a combustion area C, and a heat insulation area D, which are sequentially divided from top to bottom.
  • the process boat 9 is disposed in the process area A and is used to carry the workpiece to be processed.
  • the workpiece to be processed is a SiC wafer.
  • the craft boat 9 includes a bracket, and the bracket is provided with fixing grooves (not shown in the figure) arranged at intervals in the vertical direction, and each fixing groove is used to carry a workpiece to be processed.
  • fixing grooves not shown in the figure
  • the air inlet pipe is used to convey the process gas, and the air outlet of the air inlet pipe is located in the combustion zone C, and the air inlet of the air inlet pipe extends out from the bottom of the furnace cavity.
  • the oxidation furnace is used to perform a wet oxygen oxidation process, and the process is performed by a method of synthesizing water vapor with high-purity hydrogen and oxygen ignition.
  • the intake pipe includes a hydrogen pipe 11 and an oxygen pipe 12 sleeved on the outer periphery of the hydrogen pipe 11, wherein the hydrogen pipe 11 is used for transporting hydrogen; the oxygen pipe 12 is used for transporting oxygen; the hydrogen entering the combustion zone C and part of the oxygen
  • the reaction generates water vapor to provide a wet oxygen stream to process zone A, that is, an oxygen gas stream containing water vapor.
  • the hydrogen tube 11 and the oxygen tube 12 are both quartz tubes, preferably high-purity quartz tubes, to improve high-temperature resistance.
  • the heat insulation structure 10 is disposed in the heat insulation area B and is used to block high temperature radiation in the process area A.
  • the heat-insulating structure 10 forms an air-intake passage in the heat-shielding zone B for the gas in the combustion zone C to flow into the process zone A after passing through.
  • the heat-insulating structure 14 is arranged in the heat-preserving area and surrounds the outer periphery of the above-mentioned air intake pipe, and is used for the functions of heat preservation and heat insulation.
  • the process of forming a wet oxygen flow is specifically: hydrogen and oxygen meet in the combustion zone C, and react to generate water vapor.
  • An oxygen gas flow containing water vapor (that is, a wet oxygen flow) is formed in the insulation zone B through the insulation structure 10
  • the air inlet channel enters the process area A.
  • the ambient temperature in the furnace cavity 8 has a temperature gradient in the vertical direction, that is, the temperature gradually decreases from top to bottom.
  • the ambient temperature in the furnace cavity 8 is gradually heated above the ignition point, that is, the process gas reaches the combustion zone C It is preheated before, which can increase heating efficiency.
  • an appropriate vertical distance between the combustion zone C and the furnace cavity 8 can be designed, so as to achieve the aforementioned preheating effect.
  • the oxidation furnace provided by the embodiment of the present invention adopts an in-furnace ignition structure, that is, the process area A and the combustion area C are both located in the furnace cavity 8, thereby saving equipment space.
  • the thermal insulation structure 10 is used to block high-temperature radiation in the process area A, and the heat insulation structure 10 can also form an air intake channel in the heat insulation area B for the gas in the combustion area C to pass and flow into the process area A Therefore, the water vapor transmission in the furnace is realized, and the water vapor transmission pipeline is omitted, thereby reducing the equipment cost.
  • the water vapor transmission distance in the furnace is relatively short, and it is easy to form a stable airflow, thereby improving the airflow stability in the process area A.
  • the upper end of the hydrogen pipe 11 is provided with a blocking portion 111, which is dome-shaped, and a center of the blocking portion 111 is provided with a first through hole 112, the first through hole
  • the upper end of 112 is used as an air outlet of the hydrogen pipe 11.
  • the diameter of the first through hole 112 is smaller than the inner diameter of the hydrogen tube 11. Since the diameter of the first through hole 112 as the gas outlet of the hydrogen pipe 11 is much smaller than the diameter of the gas outlet 121 of the oxygen pipe 12, this can make the amount of hydrogen entering the combustion zone C much smaller than the amount of oxygen, which is beneficial to the hydrogen combustion.
  • the baffle portion 111 of the hydrogen tube 11 dome-shaped, the smoothness of the air flow in the combustion zone C can be improved, which is beneficial to forming a stable wet oxygen flow.
  • the air outlet 121 of the oxygen pipe 12 is lower than the air outlet of the hydrogen pipe 11, that is, the first through hole 112. In this way, oxygen can enter combustion zone C before hydrogen, and an oxygen atmosphere can be formed, which is beneficial to the combustion of hydrogen.
  • the intake pipe further includes a thermocouple protection tube 13 disposed inside the oxygen pipe 12, as shown in FIG. 3, the upper end of the thermocouple protection tube 13 is closed and located in the combustion zone C.
  • the thermocouple The lower end of the protective tube 13 extends from the bottom of the furnace cavity 7; and, a thermocouple 15 is provided in the thermocouple protective tube 13, and the detection end of the thermocouple 15 is in contact with the upper end of the thermocouple protective tube 13 for detecting the combustion zone C temperature.
  • the detection end of the thermocouple protection tube 13 is lower than the air outlet of the hydrogen tube 11. Since the combustion zone C may have a temperature gradient in the vertical direction, that is, the temperature gradually increases from bottom to top. In this case, because the position of the detection end of the thermocouple protection tube 13 is low, the temperature at the position of the gas outlet of the hydrogen tube 11 must be higher than the temperature of the position of the detection end of the thermocouple protection tube 13, As long as the temperature at the position of the combustion zone C where the detection end is located can meet the requirements, the temperature of the gas outlet of the hydrogen tube 11 must meet the requirements.
  • the heat insulation structure 10 includes a plurality of first heat insulation plates 101 spaced apart in a vertical direction. Since two adjacent first heat insulation plates 101 are spaced apart from each other, heat insulation is performed. The effect is better.
  • the first heat insulation plate 101 is made of quartz material.
  • a vertical distance between two adjacent first heat insulation plates 101 ranges from 2-3 mm. Within this range, the thermal insulation effect is better.
  • annular channel 103 is formed between the outer peripheral wall of the plurality of first heat insulation plates 101 and the inner peripheral wall of the furnace cavity 8 to convey the gas in the combustion zone C to the process zone A.
  • a center hole 102 is provided in the center of each first heat insulation plate 101, and the center holes 102 of the plurality of first heat insulation plates 101 collectively form a central passage, which is also used to transport the gas in the combustion zone C to the process. Area A.
  • both the above-mentioned annular channel 103 and the center hole 102 are used as the above-mentioned intake channel, so that the wet oxygen flow (mainly H 2 O + O 2 ) in the combustion zone C can be simultaneously passed from the above-mentioned annular channel 103 and the center hole.
  • 102 flows into the surrounding area and the central area of the process area A, respectively, so as to increase the air flow into the process area A, and at the same time to improve the uniformity of the air flow distribution in the process area A, thereby improving the process uniformity.
  • the hydrogen pipe 11 and the oxygen pipe 12 respectively deliver hydrogen (H 2 ) and oxygen (O 2 ) to the combustion zone C, and the hydrogen entering the combustion zone C and part of the oxygen react to generate water vapor (H 2 O ), That is, a wet oxygen stream (mainly H 2 O + O 2) is formed.
  • the wet oxygen stream flows into the surrounding area and the central area of the process area A from the annular channel 103 and the central hole 102, respectively.
  • the heat insulation structure 14 includes a plurality of second heat insulation plates 141 spaced apart in the vertical direction, and a heat insulation cavity 142 disposed in the heat insulation area D and located below the second heat insulation plate 141 at the lowest level.
  • the thermal insulation cavity 142 is filled with a thermal insulation medium.
  • the furnace cavity 8 is composed of an inner furnace body 81, and an outer furnace body 82 is sleeved on the outer periphery of the inner furnace body 81; and, the bottom of the outer furnace body 82 has an opening, and the inner furnace body 81 can pass through the The opening is raised or lowered relative to the outer furnace body 82.
  • the inner furnace body 81 can be moved out of the outer furnace body 82 as a whole by lowering the inner furnace body 81.
  • the inner furnace body 81 is raised until the entire inner furnace body 81 is moved into the outer furnace body 82.
  • the outer furnace body 82 can also be raised or lowered according to specific needs.
  • the inner furnace body 81 may be lifted and lowered simultaneously with the outer furnace body 82, or may be fixed while the outer furnace body 82 is lifted.
  • the oxidizing furnace further includes an inner hose 19 and an outer hose 18 sleeved on the outer periphery of the inner hose 19, wherein the air outlet of the inner hose 19 and the inlet
  • the air inlets of the gas pipelines are hermetically connected.
  • a metal surface seal joint (VCR joint) 17 can be used to achieve a sealed connection between the inner hose 19 and the air inlet.
  • the air inlet of the inner hose 19 is used to connect with an air source (not shown in the figure), and the process gas enters the air inlet pipeline through the inner hose 19.
  • a vacuum space is formed between the outer tube 18 and the inner tube 19. In this way, the leakage of the process gas can be monitored at the vacuum space, so that it can play a safety protection role.
  • the outer hose 18 may be installed on the pipeline by using a butt welding flange 16 and the installation position is above the sealed connection between the inner hose 19 and the air inlet to accommodate the connection therein.
  • the intake pipe can be allowed to rise and fall synchronously with the inner furnace body 81.
  • bellows can also be used instead of hoses.
  • the oxidizing furnace further includes a first flange 23 provided at the lower end of the inner furnace body 81. Specifically, the first flange 23 closes the lower end opening of the inner furnace body 81.
  • a second through hole is provided in the first flange 23, and the air inlet of the air inlet pipe extends out through the second through hole; a first seal ring is provided between the air inlet pipe and the second through hole, It is used to seal the gap between the two, so as to ensure that the interior of the inner furnace body 81 is maintained in a vacuum state.
  • the upper diameter of the second through hole is adapted to the outer diameter of the oxygen pipe 12, and a sealing ring 20 is provided between the oxygen pipe 12 and the upper portion of the second through hole, for Seal the gap between the two.
  • the air inlet of the hydrogen pipe 11 is lower than the air inlet of the oxygen pipe 12, and the lower diameter of the second through hole is adapted to the outer diameter of the hydrogen pipe 11 and is between the hydrogen pipe 11 and the lower portion of the second through hole
  • a sealing ring 21 is provided for sealing the gap between the two.
  • the seal ring 20 and the seal ring 21 are both the above-mentioned first seal ring, and the first seal ring is preferably made of a high-temperature resistant material such as fluorine rubber.
  • the oxidizing furnace further includes a second flange 84 disposed at the lower end of the outer furnace body 82, and when the second flange 84 is located in the outer furnace body 82 in the inner furnace body 81, and The first flange 23 is hermetically docked.
  • the inner furnace body 81 has an upper end opening.
  • a gap 83 is provided between the outer peripheral wall of the inner furnace body 81 and the inner peripheral wall of the outer furnace body 82.
  • An exhaust port 841 is provided in the second flange 84 to communicate with the outside.
  • the exhaust port 841, the gap 83, and the upper end opening of the inner furnace body 81 constitute an exhaust passage communicating with the inside of the inner furnace body 81.
  • This exhaust passage is used to exhaust the gas in the process area A. It is easy to understand that the upper end of the inner furnace body 81 is slightly lower than the top of the outer furnace body 82 so that the upper end opening of the inner furnace body 81 can communicate with the gap 83.
  • the oxidation furnace provided by the present invention adopts an in-furnace ignition structure, that is, the process area and the combustion area are both located in the furnace cavity, thereby saving equipment space.
  • the heat insulation structure is used to block the high temperature radiation in the process area, and the heat insulation structure can also form an air intake channel in the heat insulation area for the gas in the combustion area to pass through and flow into the process area, thereby achieving the Water vapor transmission eliminates the need for water vapor transmission pipelines, thereby reducing equipment costs.
  • the water vapor transport distance in the furnace is relatively short, and it is easy to form a stable airflow, which can improve the airflow stability in the process area.

Abstract

An oxidizing furnace, comprising: a furnace cavity (8), wherein the furnace cavity (8) comprises a process zone (A), a thermal insulation zone (B), a burning zone (C) and a heat preservation zone (D) from top to bottom; a process boat (9) arranged in the process zone (A) and used for bearing a workpiece to be processed; a gas inlet pipeline for transferring a process gas, wherein a gas outlet (121) of the gas inlet pipeline is located in the burning zone (C), and a gas inlet of the gas inlet pipeline extends out from the bottom of the furnace cavity (8); a thermal insulation structure (10) arranged in the thermal insulation zone (B), wherein the thermal insulation structure (10) enables the thermal insulation zone (B) to form a gas inlet channel so as to transfer the gas in the burning zone (C) to the process zone (A); and a heat preservation structure (14) arranged in the heat preservation zone (D) and surrounding the outer periphery of the gas inlet pipeline. The oxidizing furnace can save on equipment space, reduce equipment cost, and also improve the stability of airflow.

Description

氧化炉Oxidation furnace 技术领域Technical field
本发明涉及半导体制造领域，具体地，涉及一种氧化炉。The invention relates to the field of semiconductor manufacturing, and in particular, to an oxidation furnace.
背景技术Background technique
SiC材料具有宽带隙、高饱和漂移速度、高热导率、高临界击穿电场等突出优点，属于第三代半导体材料，适合制备高功率、高频、高压、高温、抗辐照的电子器件。而且，SiC材料是唯一可以直接氧化生长SiO 2薄膜的宽禁带半导体，最常用的方法是采用高温干氧或湿氧的热氧化方法来生长SiO 2薄膜，并且采用热氧化方法获得SiO 2薄膜和界面特性的质量是最好的。 SiC material has outstanding advantages such as wide band gap, high saturation drift speed, high thermal conductivity, and high critical breakdown electric field. It belongs to the third generation of semiconductor materials and is suitable for preparing high-power, high-frequency, high-voltage, high-temperature, and radiation-resistant electronic devices. Moreover, SiC material is the only wide band gap semiconductor that can directly oxidize and grow SiO 2 films. The most common method is to use high temperature dry or wet oxygen thermal oxidation methods to grow SiO 2 films, and use thermal oxidation methods to obtain SiO 2 films. And the quality of the interface characteristics is the best.
SiC高温氧化工艺的温度高达1500℃，常规高温设备无法满足工艺要求。目前业内利用高温氧化炉进行SiC片的高温氧化工艺。图1为现有的氧化炉的剖视图。请参阅图1，氧化炉包括防爆罩体1、点火腔室2、加热器3、氢气管4、氧气管5和温度传感器6。湿氧氧化工艺通常采用高纯氢气和氧气在工艺腔外点火合成水蒸气的方法，具体地，高纯氢气和氧气分别通过氢气管4和氧气管5进入点火腔室2，并在加热器3的加热下，氢气达到燃点发生燃烧生成水蒸气，水蒸气从点火泡出口7进入工艺腔(图中未示出)内。防爆罩体1通水隔热，以保护外界设备器件。温度传感器6用于监测点火腔室2中的燃烧温度，以保证氢气通入火腔室2时能可靠燃烧。The temperature of the SiC high-temperature oxidation process is as high as 1500 ° C, and conventional high-temperature equipment cannot meet the process requirements. At present, high-temperature oxidation furnaces are used in the industry for high-temperature oxidation processes of SiC wafers. FIG. 1 is a sectional view of a conventional oxidation furnace. Referring to FIG. 1, the oxidation furnace includes an explosion-proof cover 1, an ignition chamber 2, a heater 3, a hydrogen tube 4, an oxygen tube 5, and a temperature sensor 6. The wet oxygen oxidation process usually uses high-purity hydrogen and oxygen to ignite and synthesize water vapor outside the process chamber. Specifically, the high-purity hydrogen and oxygen enter the ignition chamber 2 through the hydrogen pipe 4 and the oxygen pipe 5, respectively, and the heater 3 Under the heating, the hydrogen reaches the ignition point and burns to generate water vapor. The water vapor enters the process chamber (not shown in the figure) from the ignition bubble outlet 7. The explosion-proof cover 1 is insulated by water to protect external equipment and components. The temperature sensor 6 is used to monitor the combustion temperature in the ignition chamber 2 to ensure that the hydrogen can be reliably burned when it passes into the fire chamber 2.
但是，现有的氧化炉在实际应用中不可避免地存在以下问题：However, the existing oxidation furnaces inevitably have the following problems in practical applications:
其一，由于需要单独设置点火腔室2点燃氢气，这种在工艺腔外点火的方式需要占用设备较大空间。First, since the ignition chamber 2 needs to be separately set to ignite hydrogen, this way of igniting outside the process chamber needs to occupy a large space of the equipment.
其二，点火腔室2将水蒸气在气态下输送到工艺腔内，对水蒸气输送管路的气密性和保温性要求较高，导致设备成本较高。Second, the ignition chamber 2 transports water vapor into the process chamber in a gaseous state, which requires higher airtightness and heat insulation of the water vapor transmission pipeline, resulting in higher equipment costs.
其三，由于高温真空反应炉(即，工艺腔)的隔热层较厚，导致水蒸气输送距离较长，气流输送过程不稳定。Third, because the heat insulation layer of the high-temperature vacuum reactor (ie, the process chamber) is thick, the water vapor transportation distance is long, and the airflow transportation process is unstable.
发明内容Summary of the Invention
本发明旨在至少解决现有技术中存在的技术问题之一，提出了一种氧化炉，其可以节省设备空间、降低设备成本，以及可以提高气流的稳定性。The present invention aims to solve at least one of the technical problems existing in the prior art, and proposes an oxidation furnace, which can save equipment space, reduce equipment costs, and improve the stability of airflow.
为实现本发明的目的而提供一种氧化炉，包括：To achieve the purpose of the present invention, an oxidation furnace is provided, including:
炉腔，所述炉腔包括由上而下依次划分的工艺区、隔热区、燃烧区和保温区；A furnace cavity, which includes a process area, a heat insulation area, a combustion area, and a heat insulation area divided in sequence from top to bottom;
工艺舟，设置在所述工艺区，用于承载被加工工件；A process boat, which is arranged in the process area and is used for carrying a workpiece to be processed;
进气管路，用于输送工艺气体，且所述进气管路的出气口位于所述燃烧区，所述进气管路的进气口自所述炉腔的底部延伸出去；An air inlet pipe for conveying a process gas, and an air outlet of the air inlet pipe is located in the combustion zone, and the air inlet of the air inlet pipe extends from the bottom of the furnace cavity;
隔热结构，设置在所述隔热区，且所述隔热结构使所述隔热区形成进气通道，用以将所述燃烧区中的气体输送至所述工艺区；A heat-insulating structure provided in the heat-insulating area, and the heat-insulating structure forming the heat-insulating area to form an air intake channel for conveying the gas in the combustion area to the process area;
保温结构，设置在所述保温区，且环绕在所述进气管路外周。A thermal insulation structure is disposed in the thermal insulation area and surrounds the outer periphery of the air intake pipe.
可选的，所述进气管路包括氢气管和套置在所述氢气管外周的氧气管，其中，所述氢气管和所述氧气管分别用于输送氢气和氧气，以使所述氢气和部分所述氧气在所述燃烧区反应生成水蒸气，以向所述工艺区提供湿氧气流。Optionally, the intake pipe includes a hydrogen pipe and an oxygen pipe sleeved on the outer periphery of the hydrogen pipe, wherein the hydrogen pipe and the oxygen pipe are respectively used to transport hydrogen and oxygen, so that the hydrogen and Part of the oxygen reacts in the combustion zone to generate water vapor to provide a wet oxygen stream to the process zone.
可选的，所述氧气管的出气口低于所述氢气管的出气口。Optionally, the air outlet of the oxygen pipe is lower than the air outlet of the hydrogen pipe.
可选的，所述氢气管的上端设有挡部，所述挡部呈穹顶状，且所述挡部的中心设置有第一通孔，所述第一通孔的上端用作所述出气口；Optionally, a stopper is provided at the upper end of the hydrogen tube, the stopper is dome-shaped, and a center of the stopper is provided with a first through hole, and an upper end of the first through hole is used as the outlet. Mouth
所述第一通孔的直径小于所述氢气管的内径。A diameter of the first through hole is smaller than an inner diameter of the hydrogen tube.
可选的，所述进气管路还包括设置在所述氧气管内侧的热偶护管，所述热偶护管的上端是封闭的，且位于所述燃烧区，所述热偶护管的下端自所述炉腔的底部延伸出去；并且，在所述热偶护管中设置有热电偶，所述热电偶 的检测端与所述热偶护管的上端接触，用于检测所述燃烧区的温度。Optionally, the intake pipe further includes a thermocouple protection tube disposed inside the oxygen pipe, and an upper end of the thermocouple protection tube is closed and is located in the combustion zone. The lower end extends from the bottom of the furnace cavity; and, a thermocouple is provided in the thermocouple protective tube, and a detection end of the thermocouple is in contact with an upper end of the thermocouple protective tube for detecting the combustion Zone temperature.
可选的，所述隔热结构包括沿竖直方向间隔设置的多个第一隔热板，多个所述第一隔热板的外周壁与所述炉腔的内周壁之间形成环形通道；Optionally, the thermal insulation structure includes a plurality of first thermal insulation plates spaced apart in a vertical direction, and an annular channel is formed between an outer peripheral wall of the plurality of first thermal insulation plates and an inner peripheral wall of the furnace cavity. ;
每个所述第一隔热板的中心设置有中心孔，所述环形通道和所述中心孔均用作所述进气通道。A center hole is provided in the center of each of the first heat insulation plates, and the annular channel and the center hole are used as the air inlet channel.
可选的，所述保温结构包括沿竖直方向间隔设置的多个第二隔热板，以及设置在所述保温区且位于最下层的所述第二隔热板下方的保温腔体；Optionally, the heat insulation structure includes a plurality of second heat insulation plates spaced apart in a vertical direction, and a heat insulation cavity provided in the heat insulation area and located below the second heat insulation plate at the lowest level;
所述保温腔体内填充有保温介质。The heat preservation cavity is filled with a heat preservation medium.
可选的，所述氧化炉还包括：内层软管和套置在所述内层软管外周的外层软管，其中，Optionally, the oxidation furnace further includes: an inner layer hose and an outer layer hose sleeved on the outer periphery of the inner layer hose, wherein,
所述内层软管的出气口与所述进气管路的进气口密封连接，所述内层软管的进气口用于与气源连接；The air outlet of the inner hose is sealedly connected to the air inlet of the air inlet pipe, and the air inlet of the inner hose is used to connect with an air source;
在所述外层软管与所述内层软管之间形成真空空间。A vacuum space is formed between the outer hose and the inner hose.
可选的，所述炉腔由内炉体构成，且在所述内炉体的外周套置有外炉体；Optionally, the furnace cavity is composed of an inner furnace body, and an outer furnace body is sleeved on the outer periphery of the inner furnace body;
所述外炉体的底部具有开口，所述内炉体能够通过所述开口相对于所述外炉体上升或下降。The bottom of the outer furnace body has an opening through which the inner furnace body can rise or fall relative to the outer furnace body.
可选的，所述氧化炉还包括：第一法兰，所述第一法兰设置在所述内炉体的下端；Optionally, the oxidation furnace further includes: a first flange, the first flange is disposed at a lower end of the inner furnace body;
所述第一法兰中设置有第二通孔，所述进气管路的进气口经由所述第二通孔延伸出去；在所述进气管路与所述第二通孔之间设置有第一密封圈，用于对二者之间的间隙进行密封。A second through hole is provided in the first flange, and an air inlet of the air inlet pipe extends out through the second through hole; a space is provided between the air inlet pipe and the second through hole The first sealing ring is used to seal the gap between the two.
可选的，所述氧化炉还包括：第二法兰，所述第二法兰设置在所述外炉体的下端，并且所述第二法兰在所述内炉***于所述外炉体中时，与所述第一法兰密封对接。Optionally, the oxidation furnace further includes: a second flange, the second flange is disposed at a lower end of the outer furnace body, and the second flange is located in the outer furnace body in the outer furnace body When it is in the body, it is in sealing butt joint with the first flange.
可选的，所述内炉体具有上端开口；Optionally, the inner furnace body has an upper end opening;
所述内炉体的外周壁与所述外炉体的内周壁之间具有间隙；There is a gap between the outer peripheral wall of the inner furnace body and the inner peripheral wall of the outer furnace body;
所述第二法兰中设置有与外界连通的排气口；The second flange is provided with an exhaust port communicating with the outside;
所述排气口、所述间隙和所述上端开口构成与所述内炉体的内部连通的排气通道。The exhaust port, the gap, and the upper end opening constitute an exhaust passage communicating with the inside of the inner furnace body.
本发明具有以下有益效果：The invention has the following beneficial effects:
本发明提供的氧化炉，其采用炉内点火结构，即，工艺区和燃烧区均位于炉腔内，从而可以节省设备空间。同时，借助隔热结构来阻隔工艺区内的高温辐射，并且隔热结构还能够使隔热区形成进气通道，用于供燃烧区中的气体通过，并流入工艺区，从而实现炉内的水蒸气输送，省去了水蒸气输送管路，进而降低了设备成本。另外，炉内的水蒸气输送距离较短，很容易形成稳定的气流，从而可以提高工艺区内的气流稳定性。The oxidation furnace provided by the present invention adopts an ignition structure in the furnace, that is, the process area and the combustion area are both located in the furnace cavity, thereby saving equipment space. At the same time, the heat insulation structure is used to block the high temperature radiation in the process area, and the heat insulation structure can also form an air intake channel in the heat insulation area for the gas in the combustion area to pass through and flow into the process area, thereby achieving the Water vapor transmission eliminates the need for water vapor transmission pipelines, thereby reducing equipment costs. In addition, the water vapor transmission distance in the furnace is relatively short, and it is easy to form a stable airflow, which can improve the airflow stability in the process area.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为现有的氧化炉的剖视图；Figure 1 is a sectional view of a conventional oxidation furnace;
图2为本发明实施例提供的氧化炉的剖视图；2 is a cross-sectional view of an oxidizing furnace according to an embodiment of the present invention;
图3为图2中I区域的放大图；FIG. 3 is an enlarged view of an area I in FIG. 2; FIG.
图4为图2中II区域的放大图；4 is an enlarged view of a region II in FIG. 2;
图5为本发明实施例提供的氧化炉的气流路径示意图。FIG. 5 is a schematic view of an air flow path of an oxidation furnace according to an embodiment of the present invention.
具体实施方式Detailed ways
为使本领域的技术人员更好地理解本发明的技术方案，下面结合附图来对本发明提供的氧化炉进行详细描述。In order to enable those skilled in the art to better understand the technical solution of the present invention, the oxidation furnace provided by the present invention will be described in detail below with reference to the accompanying drawings.
请一并参阅图2至图5，本发明实施例提供的氧化炉，其包括炉腔8、工艺舟9、进气管路、隔热结构10和保温结构14。其中，炉腔8包括由上而下依次划分的工艺区A、隔热区B、燃烧区C和保温区D。Please refer to FIGS. 2 to 5 together. The oxidation furnace provided by the embodiment of the present invention includes a furnace cavity 8, a process boat 9, an air inlet pipe, a heat insulation structure 10 and a heat insulation structure 14. The furnace cavity 8 includes a process area A, a heat insulation area B, a combustion area C, and a heat insulation area D, which are sequentially divided from top to bottom.
工艺舟9设置在工艺区A，用于承载被加工工件。例如，被加工工件为 SiC片。可选的，工艺舟9包括支架，在该支架上设置有沿竖直方向间隔排布的固定槽(图中未示出)，每个固定槽用于承载一个被加工工件。由此，一次工艺可以同时对多个被加工工件进行加工，从而可以提高产能。The process boat 9 is disposed in the process area A and is used to carry the workpiece to be processed. For example, the workpiece to be processed is a SiC wafer. Optionally, the craft boat 9 includes a bracket, and the bracket is provided with fixing grooves (not shown in the figure) arranged at intervals in the vertical direction, and each fixing groove is used to carry a workpiece to be processed. As a result, multiple workpieces can be processed at the same time in one process, which can increase productivity.
进气管路用于输送工艺气体，且该进气管路的出气口位于燃烧区C，进气管路的进气口自炉腔的底部延伸出去。在本实施例中，氧化炉用于进行湿氧氧化工艺，采用高纯氢气和氧气点火合成水蒸气的方法进行工艺。具体地，进气管路包括氢气管11和套置在氢气管11外周的氧气管12，其中，氢气管11用于输送氢气；氧气管12用于输送氧气；进入燃烧区C的氢气和部分氧气反应生成水蒸气，以向工艺区A提供湿氧气流，即，含有水蒸气的氧气气流。可选的，氢气管11和氧气管12均为石英管，优选为高纯石英管，以提高耐高温性能。The air inlet pipe is used to convey the process gas, and the air outlet of the air inlet pipe is located in the combustion zone C, and the air inlet of the air inlet pipe extends out from the bottom of the furnace cavity. In this embodiment, the oxidation furnace is used to perform a wet oxygen oxidation process, and the process is performed by a method of synthesizing water vapor with high-purity hydrogen and oxygen ignition. Specifically, the intake pipe includes a hydrogen pipe 11 and an oxygen pipe 12 sleeved on the outer periphery of the hydrogen pipe 11, wherein the hydrogen pipe 11 is used for transporting hydrogen; the oxygen pipe 12 is used for transporting oxygen; the hydrogen entering the combustion zone C and part of the oxygen The reaction generates water vapor to provide a wet oxygen stream to process zone A, that is, an oxygen gas stream containing water vapor. Optionally, the hydrogen tube 11 and the oxygen tube 12 are both quartz tubes, preferably high-purity quartz tubes, to improve high-temperature resistance.
隔热结构10设置在隔热区B，用于阻隔工艺区A内的高温辐射。并且该隔热结构10使隔热区B形成进气通道，以供燃烧区C中的气体通过后流入工艺区A。The heat insulation structure 10 is disposed in the heat insulation area B and is used to block high temperature radiation in the process area A. In addition, the heat-insulating structure 10 forms an air-intake passage in the heat-shielding zone B for the gas in the combustion zone C to flow into the process zone A after passing through.
保温结构14设置在保温区，且环绕在上述进气管路外周，用于起到保温和隔热的作用。The heat-insulating structure 14 is arranged in the heat-preserving area and surrounds the outer periphery of the above-mentioned air intake pipe, and is used for the functions of heat preservation and heat insulation.
形成湿氧气流的过程具体为：氢气和氧气在燃烧区C中相遇，并反应生成水蒸气，含有水蒸气的氧气气流(即，湿氧气流)通过隔热结构10在隔热区B形成的进气通道进入工艺区A中。The process of forming a wet oxygen flow is specifically: hydrogen and oxygen meet in the combustion zone C, and react to generate water vapor. An oxygen gas flow containing water vapor (that is, a wet oxygen flow) is formed in the insulation zone B through the insulation structure 10 The air inlet channel enters the process area A.
需要说明的是，炉腔8内的环境温度在竖直方向上具有温度梯度，即，温度由上而下逐渐降低。在这种情况下，进入进气管路中的工艺气体在由下而上流入燃烧区C的过程中，被炉腔8内的环境温度逐渐加热至燃点以上，即，工艺气体在到达燃烧区C之前会被预热，从而可以提高加热效率。在实际应用中，可以设计合适的燃烧区C与炉腔8之间的竖直间距，从而达到上述预热效果。It should be noted that the ambient temperature in the furnace cavity 8 has a temperature gradient in the vertical direction, that is, the temperature gradually decreases from top to bottom. In this case, during the process of the process gas entering the intake line flowing from bottom to top in the combustion zone C, the ambient temperature in the furnace cavity 8 is gradually heated above the ignition point, that is, the process gas reaches the combustion zone C It is preheated before, which can increase heating efficiency. In practical applications, an appropriate vertical distance between the combustion zone C and the furnace cavity 8 can be designed, so as to achieve the aforementioned preheating effect.
本发明实施例提供的氧化炉，其采用炉内点火结构，即，工艺区A和燃烧区C均位于炉腔8内，从而可以节省设备空间。同时，借助隔热结构10来阻隔工艺区A内的高温辐射，并且隔热结构10还能够使隔热区B形成进气通道，用于供燃烧区C中的气体通过，并流入工艺区A，从而实现炉内的水蒸气输送，省去了水蒸气输送管路，进而降低了设备成本。另外，炉内的水蒸气输送距离较短，很容易形成稳定的气流，从而可以提高工艺区A内的气流稳定性。The oxidation furnace provided by the embodiment of the present invention adopts an in-furnace ignition structure, that is, the process area A and the combustion area C are both located in the furnace cavity 8, thereby saving equipment space. At the same time, the thermal insulation structure 10 is used to block high-temperature radiation in the process area A, and the heat insulation structure 10 can also form an air intake channel in the heat insulation area B for the gas in the combustion area C to pass and flow into the process area A Therefore, the water vapor transmission in the furnace is realized, and the water vapor transmission pipeline is omitted, thereby reducing the equipment cost. In addition, the water vapor transmission distance in the furnace is relatively short, and it is easy to form a stable airflow, thereby improving the airflow stability in the process area A.
在本实施例中，如图3所示，氢气管11的上端设有挡部111，该挡部111呈穹顶状，且挡部111的中心设置有第一通孔112，该第一通孔112的上端用作氢气管11的出气口。并且，第一通孔112的直径小于氢气管11的内径。由于第一通孔112作为氢气管11的出气口的直径远远小于氧气管12的出气口121的直径，这可以使进入燃烧区C中的氢气量远远小于氧气量，从而有利于氢气的燃烧。另外，通过使氢气管11的挡部111呈穹顶状，可以提高燃烧区C中的气流平稳性，从而有利于形成稳定的湿氧气流。In this embodiment, as shown in FIG. 3, the upper end of the hydrogen pipe 11 is provided with a blocking portion 111, which is dome-shaped, and a center of the blocking portion 111 is provided with a first through hole 112, the first through hole The upper end of 112 is used as an air outlet of the hydrogen pipe 11. The diameter of the first through hole 112 is smaller than the inner diameter of the hydrogen tube 11. Since the diameter of the first through hole 112 as the gas outlet of the hydrogen pipe 11 is much smaller than the diameter of the gas outlet 121 of the oxygen pipe 12, this can make the amount of hydrogen entering the combustion zone C much smaller than the amount of oxygen, which is beneficial to the hydrogen combustion. In addition, by making the baffle portion 111 of the hydrogen tube 11 dome-shaped, the smoothness of the air flow in the combustion zone C can be improved, which is beneficial to forming a stable wet oxygen flow.
在本实施例中，如图3所示，氧气管12的出气口121低于氢气管11的出气口，即，第一通孔112。这样，可以使氧气比氢气先进入燃烧区C，形成氧气氛围，从而有利于氢气的燃烧。In this embodiment, as shown in FIG. 3, the air outlet 121 of the oxygen pipe 12 is lower than the air outlet of the hydrogen pipe 11, that is, the first through hole 112. In this way, oxygen can enter combustion zone C before hydrogen, and an oxygen atmosphere can be formed, which is beneficial to the combustion of hydrogen.
在本实施例中，进气管路还包括设置在氧气管12内侧的热偶护管13，如图3所示，热偶护管13的上端是封闭的，且位于燃烧区C，该热偶护管13的下端自炉腔7的底部延伸出去；并且，在热偶护管13中设置有热电偶15，热电偶15的检测端与热偶护管13的上端接触，用于检测燃烧区C的温度。In this embodiment, the intake pipe further includes a thermocouple protection tube 13 disposed inside the oxygen pipe 12, as shown in FIG. 3, the upper end of the thermocouple protection tube 13 is closed and located in the combustion zone C. The thermocouple The lower end of the protective tube 13 extends from the bottom of the furnace cavity 7; and, a thermocouple 15 is provided in the thermocouple protective tube 13, and the detection end of the thermocouple 15 is in contact with the upper end of the thermocouple protective tube 13 for detecting the combustion zone C temperature.
可选的，热偶护管13的检测端低于氢气管11的出气口。由于燃烧区C在竖直方向上可能存在温度梯度，即，温度由下而上逐渐升高。在这种情况下，由于热偶护管13的检测端所在的位置较低，氢气管11的出气口所在位 置的温度必然高于热偶护管13的检测端所在的位置的温度，因此，只要检测端所在的燃烧区C的位置的温度能够满足要求，氢气管11的出气口的温度必然满足要求。Optionally, the detection end of the thermocouple protection tube 13 is lower than the air outlet of the hydrogen tube 11. Since the combustion zone C may have a temperature gradient in the vertical direction, that is, the temperature gradually increases from bottom to top. In this case, because the position of the detection end of the thermocouple protection tube 13 is low, the temperature at the position of the gas outlet of the hydrogen tube 11 must be higher than the temperature of the position of the detection end of the thermocouple protection tube 13, As long as the temperature at the position of the combustion zone C where the detection end is located can meet the requirements, the temperature of the gas outlet of the hydrogen tube 11 must meet the requirements.
在本实施例中，如图5所示，隔热结构10包括沿竖直方向间隔设置的多个第一隔热板101，由于相邻的两个第一隔热板101彼此间隔，隔热效果较好。可选的，第一隔热板101采用石英材料制作。In this embodiment, as shown in FIG. 5, the heat insulation structure 10 includes a plurality of first heat insulation plates 101 spaced apart in a vertical direction. Since two adjacent first heat insulation plates 101 are spaced apart from each other, heat insulation is performed. The effect is better. Optionally, the first heat insulation plate 101 is made of quartz material.
可选的，相邻的两个第一隔热板101之间的竖直间距的取值范围在2-3mm。在该范围内，隔热效果较佳。Optionally, a vertical distance between two adjacent first heat insulation plates 101 ranges from 2-3 mm. Within this range, the thermal insulation effect is better.
而且，多个第一隔热板101的外周壁与炉腔8的内周壁之间形成环形通道103，以将燃烧区C中的气体输送至工艺区A。并且，每个第一隔热板101的中心设置有中心孔102，多个第一隔热板101的中心孔102共同构成了一中心通道，同样用于将燃烧区C中的气体输送至工艺区A。也就是说，上述环形通道103和中心孔102均用作上述进气通道，这样，燃烧区C中的湿氧气流(主要为H 2O+O 2)可以同时从上述环形通道103和中心孔102分别流入工艺区A的四周区域和中心区域，从而可以增加进入工艺区A中的气流量，同时提高工艺区A中的气流分布均匀性，从而可以提高工艺均匀性。 Moreover, an annular channel 103 is formed between the outer peripheral wall of the plurality of first heat insulation plates 101 and the inner peripheral wall of the furnace cavity 8 to convey the gas in the combustion zone C to the process zone A. In addition, a center hole 102 is provided in the center of each first heat insulation plate 101, and the center holes 102 of the plurality of first heat insulation plates 101 collectively form a central passage, which is also used to transport the gas in the combustion zone C to the process. Area A. That is, both the above-mentioned annular channel 103 and the center hole 102 are used as the above-mentioned intake channel, so that the wet oxygen flow (mainly H 2 O + O 2 ) in the combustion zone C can be simultaneously passed from the above-mentioned annular channel 103 and the center hole. 102 flows into the surrounding area and the central area of the process area A, respectively, so as to increase the air flow into the process area A, and at the same time to improve the uniformity of the air flow distribution in the process area A, thereby improving the process uniformity.
如图5所示，氢气管11和氧气管12分别将氢气(H 2)和氧气(O 2)输送至燃烧区C中，进入燃烧区C的氢气和部分氧气反应生成水蒸气(H 2O)，即，形成湿氧气流(主要为H 2O+O2)。湿氧气流同时从上述环形通道103和中心孔102分别流入工艺区A的四周区域和中心区域。 As shown in FIG. 5, the hydrogen pipe 11 and the oxygen pipe 12 respectively deliver hydrogen (H 2 ) and oxygen (O 2 ) to the combustion zone C, and the hydrogen entering the combustion zone C and part of the oxygen react to generate water vapor (H 2 O ), That is, a wet oxygen stream (mainly H 2 O + O 2) is formed. The wet oxygen stream flows into the surrounding area and the central area of the process area A from the annular channel 103 and the central hole 102, respectively.
在本实施例中，保温结构14包括沿竖直方向间隔设置的多个第二隔热板141，以及设置在保温区D且位于最下层的第二隔热板141下方的保温腔体142，该保温腔体142内填充有保温介质。借助多个第二隔热板141和保温腔体142，可以达到较好的保温和隔热的效果。当然，在实际应用中，保温结构还可以采用其他任意结构，只要能够对外界隔热，同时对进气管路中 的工艺气体进行预热即可。In this embodiment, the heat insulation structure 14 includes a plurality of second heat insulation plates 141 spaced apart in the vertical direction, and a heat insulation cavity 142 disposed in the heat insulation area D and located below the second heat insulation plate 141 at the lowest level. The thermal insulation cavity 142 is filled with a thermal insulation medium. With the plurality of second heat insulation plates 141 and the heat insulation cavity 142, better heat insulation and heat insulation effects can be achieved. Of course, in practical applications, the insulation structure can also adopt any other structure, as long as it can insulate the outside world and preheat the process gas in the air inlet pipeline at the same time.
在本实施例中，炉腔8由内炉体81构成，且在内炉体81的外周套置有外炉体82；并且，外炉体82的底部具有开口，内炉体81能够通过该开口相对于外炉体82上升或下降。在需要装卸被加工工件或者维护内炉体81中的零件时，通过使内炉体81下降，可以使内炉体81整体移出外炉体82。在需要进行工艺时，使内炉体81上升，直至使内炉体81整体移入外炉体82。In this embodiment, the furnace cavity 8 is composed of an inner furnace body 81, and an outer furnace body 82 is sleeved on the outer periphery of the inner furnace body 81; and, the bottom of the outer furnace body 82 has an opening, and the inner furnace body 81 can pass through the The opening is raised or lowered relative to the outer furnace body 82. When the workpiece to be processed or the parts in the inner furnace body 81 need to be loaded and unloaded, the inner furnace body 81 can be moved out of the outer furnace body 82 as a whole by lowering the inner furnace body 81. When the process needs to be performed, the inner furnace body 81 is raised until the entire inner furnace body 81 is moved into the outer furnace body 82.
当然，在实际应用中，也可以根据具体需要使外炉体82能够上升或下降。在这种情况下，内炉体81可以随外炉体82同步升降，或者也可以在外炉体82升降时固定不动。Of course, in practical applications, the outer furnace body 82 can also be raised or lowered according to specific needs. In this case, the inner furnace body 81 may be lifted and lowered simultaneously with the outer furnace body 82, or may be fixed while the outer furnace body 82 is lifted.
在本实施例中，如图2所示，氧化炉还包括内层软管19和套置在内层软管19外周的外层软管18，其中，内层软管19的出气口与进气管路的进气口密封连接，具体地，内层软管19为两根，分别与氢气管11的进气口112和氧气管12的进气口122密封连接，并且每根内层软管19的外周套置一根外层软管18。在实际应用中，可以采用金属面密封接头(VCR接头)17实现内层软管19与进气口的密封连接。In this embodiment, as shown in FIG. 2, the oxidizing furnace further includes an inner hose 19 and an outer hose 18 sleeved on the outer periphery of the inner hose 19, wherein the air outlet of the inner hose 19 and the inlet The air inlets of the gas pipelines are hermetically connected. Specifically, there are two inner hoses 19, which are respectively sealedly connected to the air inlet 112 of the hydrogen pipe 11 and the air inlet 122 of the oxygen pipe 12, and each inner hose An outer tube 18 is sleeved on the outer periphery of 19. In practical applications, a metal surface seal joint (VCR joint) 17 can be used to achieve a sealed connection between the inner hose 19 and the air inlet.
其中，内层软管19的进气口用于与气源(图中未示出)连接，工艺气体经由内层软管19进入进气管路。The air inlet of the inner hose 19 is used to connect with an air source (not shown in the figure), and the process gas enters the air inlet pipeline through the inner hose 19.
而且，在外层软管18与内层软管19之间形成真空空间。这样，可以在该真空空间处监测工艺气体的泄漏情况，从而可以起到安全保护作用。另外，外层软管18可以采用对焊法兰16安装在管路上，且安装位置位于内层软管19与进气口的密封连接处的上方，以将该连接处容纳在其中。A vacuum space is formed between the outer tube 18 and the inner tube 19. In this way, the leakage of the process gas can be monitored at the vacuum space, so that it can play a safety protection role. In addition, the outer hose 18 may be installed on the pipeline by using a butt welding flange 16 and the installation position is above the sealed connection between the inner hose 19 and the air inlet to accommodate the connection therein.
在内炉体81升降的过程中，由于内层软管19和外层软管18能够弯曲，可以允许进气管路随内炉体81同步升降。当然，在实际应用中，也可以采用波纹管代替软管。During the lifting process of the inner furnace body 81, since the inner hose 19 and the outer hose 18 can be bent, the intake pipe can be allowed to rise and fall synchronously with the inner furnace body 81. Of course, in practical applications, bellows can also be used instead of hoses.
在本实施例中，氧化炉还包括第一法兰23，该第一法兰23设置在内炉 体81的下端。具体地，第一法兰23封闭内炉体81的下端开口。并且，在第一法兰23中设置有第二通孔，进气管路的进气口经由该第二通孔延伸出去；在进气管路与第二通孔之间设置有第一密封圈，用于对二者之间的间隙进行密封，从而保证内炉体81的内部保持真空状态。In this embodiment, the oxidizing furnace further includes a first flange 23 provided at the lower end of the inner furnace body 81. Specifically, the first flange 23 closes the lower end opening of the inner furnace body 81. In addition, a second through hole is provided in the first flange 23, and the air inlet of the air inlet pipe extends out through the second through hole; a first seal ring is provided between the air inlet pipe and the second through hole, It is used to seal the gap between the two, so as to ensure that the interior of the inner furnace body 81 is maintained in a vacuum state.
具体地，如图4所示，上述第二通孔的上部直径与氧气管12的外径相适配，且在氧气管12与第二通孔的上部之间设置有密封圈20，用于对二者之间的间隙进行密封。氢气管11的进气口低于氧气管12的进气口，且第二通孔的下部直径与氢气管11的外径相适配，并且在氢气管11与第二通孔的下部之间设置有密封圈21，用于对二者之间的间隙进行密封。密封圈20和密封圈21均为上述第一密封圈，该第一密封圈优选采用诸如氟橡胶等的耐高温材料制作。Specifically, as shown in FIG. 4, the upper diameter of the second through hole is adapted to the outer diameter of the oxygen pipe 12, and a sealing ring 20 is provided between the oxygen pipe 12 and the upper portion of the second through hole, for Seal the gap between the two. The air inlet of the hydrogen pipe 11 is lower than the air inlet of the oxygen pipe 12, and the lower diameter of the second through hole is adapted to the outer diameter of the hydrogen pipe 11 and is between the hydrogen pipe 11 and the lower portion of the second through hole A sealing ring 21 is provided for sealing the gap between the two. The seal ring 20 and the seal ring 21 are both the above-mentioned first seal ring, and the first seal ring is preferably made of a high-temperature resistant material such as fluorine rubber.
在本实施例中，氧化炉还包括第二法兰84，该第二法兰84设置在外炉体82的下端，且第二法兰84在内炉体81位于外炉体82中时，与第一法兰23密封对接。In this embodiment, the oxidizing furnace further includes a second flange 84 disposed at the lower end of the outer furnace body 82, and when the second flange 84 is located in the outer furnace body 82 in the inner furnace body 81, and The first flange 23 is hermetically docked.
在本实施例中，如图2所示，内炉体81具有上端开口。内炉体81的外周壁与外炉体82的内周壁之间具有间隙83。第二法兰84中设置有与外界连通的排气口841。该排气口841、间隙83和内炉体81的上端开口构成与内炉体81的内部连通的排气通道。该排气通道用于排出工艺区A中的气体。容易理解，内炉体81的上端略低于外炉体82的顶部，以使内炉体81的上端开口能够与间隙83连通。In this embodiment, as shown in FIG. 2, the inner furnace body 81 has an upper end opening. A gap 83 is provided between the outer peripheral wall of the inner furnace body 81 and the inner peripheral wall of the outer furnace body 82. An exhaust port 841 is provided in the second flange 84 to communicate with the outside. The exhaust port 841, the gap 83, and the upper end opening of the inner furnace body 81 constitute an exhaust passage communicating with the inside of the inner furnace body 81. This exhaust passage is used to exhaust the gas in the process area A. It is easy to understand that the upper end of the inner furnace body 81 is slightly lower than the top of the outer furnace body 82 so that the upper end opening of the inner furnace body 81 can communicate with the gap 83.
综上所述，本发明提供的氧化炉，其采用炉内点火结构，即，工艺区和燃烧区均位于炉腔内，从而可以节省设备空间。同时，借助隔热结构来阻隔工艺区内的高温辐射，并且隔热结构还能够使隔热区形成进气通道，用于供燃烧区中的气体通过，并流入工艺区，从而实现炉内的水蒸气输送，省去了水蒸气输送管路，进而降低了设备成本。另外，炉内的水蒸气输送距离较短， 很容易形成稳定的气流，从而可以提高工艺区内的气流稳定性。To sum up, the oxidation furnace provided by the present invention adopts an in-furnace ignition structure, that is, the process area and the combustion area are both located in the furnace cavity, thereby saving equipment space. At the same time, the heat insulation structure is used to block the high temperature radiation in the process area, and the heat insulation structure can also form an air intake channel in the heat insulation area for the gas in the combustion area to pass through and flow into the process area, thereby achieving the Water vapor transmission eliminates the need for water vapor transmission pipelines, thereby reducing equipment costs. In addition, the water vapor transport distance in the furnace is relatively short, and it is easy to form a stable airflow, which can improve the airflow stability in the process area.
可以理解的是，以上实施方式仅仅是为了说明本发明的原理而采用的示例性实施方式，然而本发明并不局限于此。对于本领域内的普通技术人员而言，在不脱离本发明的精神和实质的情况下，可以做出各种变型和改进，这些变型和改进也视为本发明的保护范围。It can be understood that the above embodiments are merely exemplary embodiments adopted for explaining the principle of the present invention, but the present invention is not limited thereto. For those skilled in the art, various variations and improvements can be made without departing from the spirit and essence of the present invention, and these variations and improvements are also considered to be within the protection scope of the present invention.

Claims (12)

  1. 一种氧化炉，其特征在于，包括：An oxidizing furnace, comprising:
    炉腔，所述炉腔包括由上而下依次划分的工艺区、隔热区、燃烧区和保温区；A furnace cavity, which includes a process area, a heat insulation area, a combustion area, and a heat insulation area divided in sequence from top to bottom;
    工艺舟，设置在所述工艺区，用于承载被加工工件；A process boat, which is arranged in the process area and is used for carrying a workpiece to be processed;
    进气管路，用于输送工艺气体，且所述进气管路的出气口位于所述燃烧区，所述进气管路的进气口自所述炉腔的底部延伸出去；An air inlet pipe for conveying a process gas, and an air outlet of the air inlet pipe is located in the combustion zone, and the air inlet of the air inlet pipe extends from the bottom of the furnace cavity;
    隔热结构，设置在所述隔热区，且所述隔热结构使所述隔热区形成进气通道，用以将所述燃烧区中的气体输送至所述工艺区；A heat-insulating structure provided in the heat-insulating area, and the heat-insulating structure forming the heat-insulating area to form an air intake channel for conveying the gas in the combustion area to the process area;
    保温结构，设置在所述保温区，且环绕在所述进气管路外周。A thermal insulation structure is disposed in the thermal insulation area and surrounds the outer periphery of the air intake pipe.
  2. 根据权利要求1所述的氧化炉，其特征在于，所述进气管路包括氢气管和套置在所述氢气管外周的氧气管，其中，所述氢气管和所述氧气管分别用于输送氢气和氧气，以使所述氢气和部分所述氧气在所述燃烧区反应生成水蒸气，以向所述工艺区提供湿氧气流。The oxidizing furnace according to claim 1, wherein the intake pipe includes a hydrogen pipe and an oxygen pipe sleeved on the outer periphery of the hydrogen pipe, wherein the hydrogen pipe and the oxygen pipe are respectively used for conveying Hydrogen and oxygen, so that the hydrogen and a portion of the oxygen react in the combustion zone to generate water vapor to provide a wet oxygen stream to the process zone.
  3. 根据权利要求2所述的氧化炉，其特征在于，所述氧气管的出气口低于所述氢气管的出气口。The oxidizing furnace according to claim 2, wherein an air outlet of the oxygen pipe is lower than an air outlet of the hydrogen pipe.
  4. 根据权利要求2所述的氧化炉，其特征在于，所述氢气管的上端设有挡部，所述挡部呈穹顶状，且所述挡部的中心设置有第一通孔，所述第一通孔的上端用作所述出气口；The oxidizing furnace according to claim 2, wherein a stopper is provided at an upper end of the hydrogen tube, the stopper is dome-shaped, and a first through hole is provided in the center of the stopper, and the first An upper end of a through hole is used as the air outlet;
    所述第一通孔的直径小于所述氢气管的内径。A diameter of the first through hole is smaller than an inner diameter of the hydrogen tube.
  5. 根据权利要求2所述的氧化炉，其特征在于，所述进气管路还包括设置在所述氧气管内侧的热偶护管，所述热偶护管的上端是封闭的，且位于所 述燃烧区，所述热偶护管的下端自所述炉腔的底部延伸出去；并且，在所述热偶护管中设置有热电偶，所述热电偶的检测端与所述热偶护管的上端接触，用于检测所述燃烧区的温度。The oxidizing furnace according to claim 2, wherein the air inlet pipe further comprises a thermocouple protection tube provided inside the oxygen tube, and an upper end of the thermocouple protection tube is closed and is located in the In the combustion zone, the lower end of the thermocouple protective tube extends from the bottom of the furnace cavity; and, a thermocouple is provided in the thermocouple protective tube, and the detection end of the thermocouple and the thermocouple protective tube The upper end of the contact is used to detect the temperature of the combustion zone.
  6. 根据权利要求1-5任意一项所述的氧化炉，其特征在于，所述隔热结构包括沿竖直方向间隔设置的多个第一隔热板，多个所述第一隔热板的外周壁与所述炉腔的内周壁之间形成环形通道；The oxidizing furnace according to any one of claims 1 to 5, wherein the heat insulation structure comprises a plurality of first heat insulation plates spaced apart in a vertical direction, and a plurality of the first heat insulation plates Forming an annular channel between the outer peripheral wall and the inner peripheral wall of the furnace cavity;
    每个所述第一隔热板的中心设置有中心孔，所述环形通道和所述中心孔均用作所述进气通道。A center hole is provided in the center of each of the first heat insulation plates, and the annular channel and the center hole are used as the air inlet channel.
  7. 根据权利要求1-5任意一项所述的氧化炉，其特征在于，所述保温结构包括沿竖直方向间隔设置的多个第二隔热板，以及设置在所述保温区且位于最下层的所述第二隔热板下方的保温腔体；The oxidizing furnace according to any one of claims 1 to 5, wherein the thermal insulation structure comprises a plurality of second thermal insulation plates spaced apart in a vertical direction, and the thermal insulation area is located at the lowermost layer. A thermal insulation cavity below the second heat insulation plate;
    所述保温腔体内填充有保温介质。The heat preservation cavity is filled with a heat preservation medium.
  8. 根据权利要求1-5任意一项所述的氧化炉，其特征在于，所述氧化炉还包括：内层软管和套置在所述内层软管外周的外层软管，其中，The oxidation furnace according to any one of claims 1 to 5, characterized in that the oxidation furnace further comprises: an inner hose and an outer hose sleeved on the outer periphery of the inner hose, wherein,
    所述内层软管的出气口与所述进气管路的进气口密封连接，所述内层软管的进气口用于与气源连接；The air outlet of the inner hose is sealedly connected to the air inlet of the air inlet pipe, and the air inlet of the inner hose is used to connect with an air source;
    在所述外层软管与所述内层软管之间形成真空空间。A vacuum space is formed between the outer hose and the inner hose.
  9. 根据权利要求1-5任意一项所述的氧化炉，其特征在于，所述炉腔由内炉体构成，且在所述内炉体的外周套置有外炉体；The oxidation furnace according to any one of claims 1 to 5, wherein the furnace cavity is composed of an inner furnace body, and an outer furnace body is sleeved on the outer periphery of the inner furnace body;
    所述外炉体的底部具有开口，所述内炉体能够通过所述开口相对于所述外炉体上升或下降。The bottom of the outer furnace body has an opening through which the inner furnace body can rise or fall relative to the outer furnace body.
  10. 根据权利要求9所述的氧化炉，其特征在于，所述氧化炉还包括： 第一法兰，所述第一法兰设置在所述内炉体的下端；The oxidation furnace according to claim 9, further comprising: a first flange, the first flange being disposed at a lower end of the inner furnace body;
    所述第一法兰中设置有第二通孔，所述进气管路的进气口经由所述第二通孔延伸出去；在所述进气管路与所述第二通孔之间设置有第一密封圈，用于对二者之间的间隙进行密封。A second through hole is provided in the first flange, and the air inlet of the air inlet pipe extends out through the second through hole; The first sealing ring is used to seal the gap between the two.
  11. 根据权利要求10所述的氧化炉，其特征在于，所述氧化炉还包括：第二法兰，所述第二法兰设置在所述外炉体的下端，并且所述第二法兰在所述内炉***于所述外炉体中时，与所述第一法兰密封对接。The oxidizing furnace according to claim 10, further comprising: a second flange, the second flange being provided at a lower end of the outer furnace body, and the second flange being When the inner furnace body is located in the outer furnace body, it is hermetically connected to the first flange.
  12. 根据权利要求11所述的氧化炉，其特征在于，所述内炉体具有上端开口；The oxidation furnace according to claim 11, wherein the inner furnace body has an upper end opening;
    所述内炉体的外周壁与所述外炉体的内周壁之间具有间隙；There is a gap between the outer peripheral wall of the inner furnace body and the inner peripheral wall of the outer furnace body;
    所述第二法兰中设置有与外界连通的排气口；The second flange is provided with an exhaust port communicating with the outside;
    所述排气口、所述间隙和所述上端开口构成与所述内炉体的内部连通的排气通道。The exhaust port, the gap, and the upper end opening constitute an exhaust passage communicating with the inside of the inner furnace body.
PCT/CN2018/119549 2018-06-08 2018-12-06 Oxidizing furnace WO2019233063A1 (en)

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