WO2019058642A1 - パターニングシートおよびエッチング構造物の製造方法 - Google Patents
パターニングシートおよびエッチング構造物の製造方法 Download PDFInfo
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- WO2019058642A1 WO2019058642A1 PCT/JP2018/020055 JP2018020055W WO2019058642A1 WO 2019058642 A1 WO2019058642 A1 WO 2019058642A1 JP 2018020055 W JP2018020055 W JP 2018020055W WO 2019058642 A1 WO2019058642 A1 WO 2019058642A1
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- etching
- polymer
- sheet
- patterning
- etching solution
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B05D3/10—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by other chemical means
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
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- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
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- C—CHEMISTRY; METALLURGY
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/18—Acidic compositions for etching copper or alloys thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/20—Resistors
- H01L28/26—Resistors with an active material comprising an organic conducting material, e.g. conducting polymers
Definitions
- the present invention relates to a method of manufacturing a patterning sheet and an etching structure.
- FIG. 7 there is also a method of bringing the substrate 120B having a three-dimensional structure into contact with the etching solution 113.
- the surface tension of the etching solution 113 spreads the etching solution 113 not only to the convex top but also to the bottom of the recess (see black arrows), and the etching solution 113 may penetrate to the inside of the substrate 120B. .
- the etching solution 113 when the etching solution 113 has volatility, the etching solution 113 may penetrate to the inside of the substrate 120B as described above by the volatile component. In addition, it is necessary to maintain the quietness of the liquid surface, which is unsuitable for continuous etching processing, and the productivity is poor.
- the present invention has been made to solve the above-mentioned problems.
- the object of the present invention is to provide a patterning sheet or the like suitable for easily etching a complicated etching object to produce an etching structure.
- the patterning sheet according to the present invention is formed of (A) a base sheet formed of a first polymer that transmits etching solution, and (B) a second polymer that absorbs and holds the etching solution, and is dispersed in the base sheet And particles.
- the step of contacting the surface side of the patterning sheet with respect to the etching scheduled surface of the etching object, and the etching schedule of the surface side And (d) separating from the surface.
- a complex etching target is easily etched to manufacture an etching structure.
- FIG. 1 is a cross-sectional view for explaining the inside of a patterning sheet.
- FIG. 2 is a perspective view of a patterning sheet.
- FIG. 3 is a perspective view of an etching object to be etched using a patterning sheet.
- FIG. 4 is a perspective view of an etching structure manufactured by etching an object to be etched.
- FIG. 5A is a cross-sectional view showing a process of manufacturing an etching structure from an etching target.
- FIG. 5B is a cross-sectional view showing a process of manufacturing an etching structure from an etching target.
- FIG. 5C is a cross-sectional view showing a process of manufacturing an etching structure from an etching target.
- FIG. 6 is a cross-sectional view of a mold used for producing an etching object.
- FIG. 7 is a perspective view showing conventional etching of an object to be etched.
- FIG. 1 is a cross-sectional view for explaining the inside of the patterning sheet 10
- FIG. 2 is a perspective view of the patterning sheet 10.
- FIG. 3 is a perspective view of an etching target 20B etched using the patterning sheet 10
- FIG. 4 is a perspective view of an etching structure 20A manufactured by etching the etching target 20B.
- the etching target 20B is an object having irregularities in the surface direction of the surface formed in two dimensions in the X direction and the Y direction, that is, in the Z direction (hereinafter such an object Is sometimes called a three-dimensional structure). Then, an etching target 20B in which a predetermined portion is etched with respect to a portion (the etching planned surface 20S) in which a large number of the concavities and convexities are arranged is taken as an etching structure 20A. In addition, a resin molding or a semiconductor substrate is mentioned as an example of such etching target object 20B.
- the height difference between the top and the bottom of the unevenness on the two-dimensional surface (XY plane) is 10 ⁇ m or more. Further, it is preferable that the elevation difference be substantially the same over the entire two-dimensional surface, and it is preferable that the unevenness has periodicity in the in-plane direction of the two-dimensional surface. With such an etching target 20B, uniform etching can be performed on the planned etching surface 20S.
- corrugation is not specifically limited, For example, a line and space pattern, a dot pattern, a lattice pattern, or an arabesque pattern is mentioned.
- the method of providing the asperities is not particularly limited.
- printing on the base 21 may be performed, or cutting using a laser or an electron beam may be performed.
- asperities may be provided from the initial state of the base 21 by molding.
- the molding method is preferable from the viewpoint of the uniformity of the uneven shape and the productivity of the etching target 20B.
- An imprint method is mentioned as an example of a molding method.
- a mold in which a reverse structure of a three-dimensional structure is inscribed is used.
- a film material such as a thermoplastic resin or an ultraviolet curable material is applied to the base material, and the applied surface is pressed against the mold to give unevenness.
- the substrate is released from the mold to complete the etching object 20B which is a three-dimensional structure.
- corrugation is not limited to a film material
- base material 21 itself is a thermoplastic film
- the material of base material 21 itself will become unevenness. That is, it is also possible to directly apply unevenness to the film (note that FIG. 3 is an example in which the base 21 is provided with unevenness).
- thermoplastic resin for example, an acrylic resin such as polymethyl methacrylate, or an ABS resin, and further, a polyolefin resin such as polypropylene or polycycloolefin, or an elastomer Can be mentioned.
- silicon compounds such as hydrogenated silsesquioxane
- optical characteristics or mechanical strength may be imparted by adding an oxide of a metal such as titanium, silicon, aluminum, yttrium, or zirconium to the silicon compound.
- a functional thin film 22 which imparts electrical, optical or magnetic characteristics to the etching object 20B is formed. .
- Materials that impart electrical properties include not only metals such as copper, silver, nickel, or tungsten, or alloys thereof, but also transparent conductive oxides such as indium oxide or zinc oxide.
- silicon oxide, niobium oxide, silicon nitride or the like can be mentioned.
- a material imparting magnetic properties a magnetic material formed of an alloy such as neodymium, cobalt, iron, or boron, a strongly correlated compound formed of an oxide, and the like can be mentioned.
- the thickness of the functional thin film 22 does not fill the height difference of the concavities and convexities It is preferable that the thickness be a certain degree, and 1/10 or less with respect to the height difference.
- a film (adhesion improvement film) for securing adhesion may be formed on the uneven surface after etching, and another functional thin film may be formed on the adhesion improvement film. That is, the adhesion between the uneven surface and another functional thin film may be ensured by the adhesion improving film.
- the above functional thin films are not limited to dry film forming methods such as physical vapor deposition (PVD) such as chemical vapor deposition (CVD), sputtering, or evaporation, but also wet methods such as printing methods.
- PVD physical vapor deposition
- CVD chemical vapor deposition
- sputtering sputtering
- evaporation evaporation
- wet methods evaporation
- the patterning sheet 10 is a planar sheet as shown in FIG. Then, as shown in FIG. 1, the patterning sheet 10 includes (A) a base sheet 11 and (B) particles 12 dispersed in the base sheet 11. By including the components (A) and (B), the surface of the patterning sheet 10 is formed by the etching solution absorbed and held by the particles 12 (C) being exposed to the main surface 11S of the base sheet 11 13 are formed.
- the position where the surface film 13 is formed may be at least one of the two main surfaces 11S and 11S of the base sheet 11.
- the surface film 13 is formed only on one surface 11S of the two main surfaces 11S and 11S, and the other surface 11S has a coating (not shown) for suppressing the exposure of the etching solution. This will be described using the example given.
- the base sheet 11 is formed of a resin that easily transmits the treatment liquid such as the etching solution (hereinafter, the fact that the treatment liquid easily permeates the resin is referred to as having high liquid permeability). Further, from the viewpoint of dispersion of the particles 12, the resin forming the base sheet 11 (hereinafter sometimes referred to as a matrix resin) is preferably a modified polymer in which the particles are easily dispersed, and in particular, a silicone-modified polyether is mainly used. Polymers that are components are preferred.
- having a substance as the main component means that the content of the substance is 51% by weight or more, preferably 70% by weight or more, and more preferably 90% by weight. Moreover, as long as the function of the present invention is not lost, substances other than the main component may be contained.
- silicone modified polyether contained as a main component in the material [first polymer] of the base sheet 11 will be described in detail.
- Such silicone modified polyethers include (1) polymers, (2) crosslinkable compounds, and (3) catalysts. Then, the base sheet 11 is formed by curing such a composition.
- the polymer (1) is a polyether polymer having an alkenyl group in the molecule. More specifically, it is a polyether polymer having at least one terminal alkenyl group.
- the alkenyl group is not particularly limited as long as it is a group containing a carbon-carbon double bond which is active to the hydrosilylation reaction.
- the alkenyl group is preferably an aliphatic unsaturated hydrocarbon group having preferably 2 to 20, more preferably 2 to 4 carbon atoms (eg, vinyl group, allyl group, methyl vinyl group, propenyl group, butenyl group, pentenyl group) Group, hexenyl group), cyclic unsaturated hydrocarbon group having preferably 3 to 20, more preferably 3 to 6 carbon atoms (eg, cyclopropenyl group, cyclobutenyl group, cyclopentenyl group, cyclohexenyl group, etc.) And or methacryl groups.
- aliphatic unsaturated hydrocarbon group having preferably 2 to 20, more preferably 2 to 4 carbon atoms (eg, vinyl group, allyl group, methyl vinyl group, propenyl group, butenyl group, pentenyl group) Group, hexenyl group), cyclic unsaturated hydrocarbon group having preferably 3 to 20, more preferably 3 to 6 carbon atoms
- alkenyl group examples include the following ( ⁇ ) and ( ⁇ ) from the viewpoint of ease of synthesis reaction.
- R 1 is a hydrogen atom or a hydrocarbon group having 1 to 10 carbon atoms, preferably a hydrogen atom or a methyl group.
- the polymer (1) has an average of at least 1, preferably 1 to 5, and more preferably 1 to 3 alkenyl groups in one molecule. If the number of alkenyl groups in one molecule of the polymer (1) is less than one on average, the curability tends to be insufficient.
- polyether-based polymer which is a basic skeleton of the polymer (1)
- a polyoxyalkylene-based polymer composed of a repeating unit represented by a general formula (-R 2 -O-) can be mentioned.
- -R 2 - is a divalent alkylene group.
- the main chain of the preferred polymer (1) is polyoxypropylene (that is, the -R 2 -is -CH 2 CH (CH 3 )-).
- the polyether polymer may be composed of one type of repeating unit or may be composed of a plurality of repeating units.
- the polyether polymer may be a linear polymer or a branched polymer.
- the total of polyether skeletons occupied in the polymer (1) is preferably 80% by weight or more, more preferably 90% by weight or more.
- the molecular weight of the polymer (1) is preferably 3,000 to 50,000, more preferably 6,000 to 50,000, and more preferably 10,000 to 30, in number average. 000 is particularly preferred.
- the number average molecular weight is less than 3,000, the resulting cured product tends to be brittle, and conversely, when the number average molecular weight exceeds 50,000, the viscosity tends to be high and the workability may be reduced.
- the said molecular weight is a polystyrene conversion number average molecular weight measured by size exclusion chromatography.
- bonding method to the polyether type polymer of an alkenyl group does not have limitation in particular, For example, the direct bond of an alkenyl group, an ether bond, an ester bond, a carbonate bond, a urethane bond, or a urea bond is mentioned.
- the manufacturing method of a polymer (1) is not specifically limited, For example, the method of introduce
- a method of copolymerizing a monomer having an alkenyl group for example, allyl glycidyl ether
- a monomer for synthesizing a polyether polymer or a functional group (for example, a hydroxyl group or an alkoxide group) in a desired portion
- a functional group for example, a hydroxyl group or an alkoxide group
- an alkenyl group for example, acrylic acid, methacrylic acid, acetic acid
- the crosslinkable compound (2) is an organohydrosiloxane compound having a hydrosilyl group in the molecule. Specifically, the crosslinkable compound (2) is an organohydrosiloxane compound having 1 to 10 hydrosilyl groups in the molecule.
- the hydrosilyl group means a group having a Si-H bond.
- the chemical structure of the crosslinkable compound (2) other than the hydrosilyl group is not particularly limited.
- the number average molecular weight of the crosslinkable compound (2) calculated from the SiH group value obtained by titration is preferably 400 to 3,000, and more preferably 500 to 1,000. If the number average molecular weight is too low, it tends to volatilize during heat curing, making it difficult to obtain a sufficiently cured product, and if too high it tends to slow the curing speed.
- the number of hydrosilyl groups contained in one molecule of the crosslinkable compound (2) is 1 to 10, and preferably 2 to 8. If there are two or more hydrosilyl groups, multiple polymer (1) molecules can be crosslinked during curing. However, if the number of hydrosilyl groups is too large, the stability of the crosslinkable compound (2) may deteriorate, and furthermore, a large amount of hydrosilyl groups may remain in the cured product after curing, which may adversely affect the etching characteristics. is there.
- the coarseness of crosslinking affects the coarseness between the polyether parts which are the main chains of polymer (1), and also influences the liquid permeability. Therefore, the number of hydrosilyl groups in the crosslinkable compound (2) should be selected in consideration of the balance with liquid permeability.
- the crosslinkable compounds (2) may be used alone or in combination of two or more.
- the crosslinkable compound (2) is preferably one which is well compatible with the polymer (1).
- an organohydrogensiloxane modified with an organic group is exemplified as a suitable crosslinkable compound (2).
- a typical example of the organohydrogensiloxane is a compound represented by the following ( ⁇ ).
- a in ( ⁇ ) corresponds to the number of hydrosilyl groups in the molecule.
- the value of a + b is not particularly limited, but is preferably 2 to 50.
- R is a hydrocarbon group having 2 to 20 carbon atoms in its main chain.
- the compound ( ⁇ ) can be obtained by modifying unmodified methyl hydrogen silicone to introduce R.
- Unmodified methyl hydrogen silicone corresponds to a compound in which all Rs are H in the above ( ⁇ ), and issued by CMC Co., Ltd. (1990.1.31) “Market prospect of silicone-manufacturer strategy and application development As described in "-", it is used as a raw material of various modified silicones.
- Examples of the organic compound for introducing R include ⁇ -olefin, styrene, ⁇ -methylstyrene, allyl alkyl ether, allyl alkyl ester, allyl phenyl ether, allyl phenyl ester and the like.
- the number of hydrosilyl groups in the molecule after modification can be adjusted by the amount of the above-mentioned organic compound added for modification.
- the ratio of the amount of the polymer (1) to the crosslinkable compound (2) is expressed by the total amount of hydrosilyl groups derived from the crosslinkable compound (2) to the total amount of alkenyl groups derived from the polymer (1). Be done. Depending on the magnitude of the total amount of hydrosilyl groups per mole of the total amount of alkenyl groups in the pressure-sensitive adhesive composition, the level of crosslinking density after curing is determined. In view of appropriate liquid permeability, the total amount of hydrosilyl groups per mole of total alkenyl groups is preferably 0.3 to 0.8 mol, more preferably 0.4 to 0.7 mol.
- the hydrosilylation catalyst that is the catalyst (3) is not particularly limited, and any catalyst that promotes the hydrosilylation reaction can be used.
- the catalyst (3) includes a platinum-vinylsiloxane catalyst.
- a platinum-vinylsiloxane catalyst Specifically, chloroplatinic acid, platinum-vinylsiloxane complex (eg, platinum-1,3-divinyl-1,1,3,3-tetramethyldisiloxane complex, or platinum-1,3,5, 7-tetravinyl-1,3,5,7-tetramethylcyclotetrasiloxane complex), platinum-olefin complex (eg, Pt x (ViMe 2 SiOSiMe 2 Vi) y , Pt [(MeViSiO) 4 ] z (wherein x, y and z are positive integers)) and the like.
- platinum-vinylsiloxane complex eg, platinum-1,3-divinyl-1,1,3,3-tetramethyldisiloxane complex, or platinum-1,3,5, 7-tetravinyl-1,3,5,7
- a platinum complex catalyst not containing a conjugate base of a strong acid as a ligand is preferred, a platinum-vinylsiloxane complex is more preferred, and platinum-1,3-divinyl-1,1.
- Particular preference is given to 2,3,3-tetramethyldisiloxane complexes or platinum-1,3,5,7-tetravinyl-1,3,5,7-tetramethylcyclotetrasiloxane complexes.
- the amount of the catalyst (3) is not particularly limited, it is preferably 10 -8 to 10 -1 mole, more preferably 10 -6 to 10, with respect to 1 mole of the total of the alkenyl groups in the polymer (1). -3 moles. Within this range, it is easy to achieve appropriate curing speed, stable curability, necessary pot life, and the like.
- the particles 12 are formed of a liquid retaining polymer. Then, such particles 12 hold the etching solution inside, and after being dispersed in the matrix resin, release the etching solution in the matrix resin. Then, the released etching solution becomes the surface film 13 on the main surface 11S of the base sheet 11.
- the functional thin film 22 of the etching object 20B is obtained as shown in FIG. 5B with respect to the patterning sheet 10 in which the surface film 13 is formed on the base sheet 11 in which the particles 12 are dispersed.
- the uneven surface (the etching planned surface 20S) on which the two layers are stacked comes into contact with each other [contacting step]
- the etching solution of the surface film 13 adheres to the functional thin film 22 formed on the top of the convex.
- the surface film 13 and the etching target surface 20S are separated, as shown in FIG. 5C, only the attached portion is dissolved and the etching structure 20A is completed.
- the rinse process which removes and cleans the etching plan surface 20S is performed after this.
- the particles 12 are preferably formed of a porous material in order to perform the function of holding and releasing such etching solution.
- Specific porosity can be expressed by density (bulk specific gravity), and the density is preferably 0.1 or more and 0.9 or less, more preferably 0.3 or more and 0.8 or less, and 0.5 It is particularly preferable that it is ⁇ 0.8.
- the release is more dominant than the holding of the etching solution, the surface film (etching solution layer) on the patterning sheet is increased, and local etching becomes difficult.
- the specific gravity is too small, the retention of the etching solution becomes more dominant than the release, and in the continuous etching process, the surface film on the patterning sheet disappears and the etching solution is depleted.
- the etching solution is allowed to be present only on the surface 11S of the base sheet 11, and the surface film 13 comes into contact with the etching target 20B, thereby the etching target 20B side (Ie, the etching solution is lost from the main surface 11S of the base sheet 11), the loss of the processing solution is newly diffused from the inside of the base sheet 11 toward the main surface 11S, Over time, the surface film 13 formed of the etching solution is maintained in the patterning sheet 10. Therefore, the patterning sheet 10 is suitable for continuous etching.
- cellulose or a derivative thereof for example, ethyl cellulose, hydroxyethyl cellulose, hydroxypropyl methyl cellulose, carboxymethyl cellulose
- porous silica for example, hydroxypropyl methylcellulose or carboxymethylcellulose is preferable from the viewpoint of swelling by an etching solution or ease of handling.
- the particles 12 are mixed with the matrix resin, and the amount thereof added is preferably 5 to 50 parts by weight, more preferably 10 to 25 parts by weight, based on 100 parts by weight of the matrix resin. It is below a weight part.
- the thickness of the base sheet 11 is determined by the balance with the average particle diameter of the particles 12. Specifically, the thickness of the base sheet 11 is preferably about 3 to 5 times the average particle diameter of the particles 12.
- the thickness of the base sheet 11 is preferably 60 ⁇ m or more and 100 ⁇ m or less. Such setting of the thickness of the base sheet 11 is determined from the viewpoint of preventing exposure of the particles 12 and suppressing tack of the matrix resin.
- the etching solution is not particularly limited as long as it is a solution that dissolves the functional thin film 22 if the etching target 20B is described in detail.
- the etching solution is preferably a mixed solution of nitric acid and hydrochloric acid.
- an iron (III) oxide aqueous solution is preferable as the etching solution in the case of nickel, and nitric acid is preferable.
- the concentration is preferably low, preferably 20 wt% or less, and more preferably 10 wt% or less from the viewpoint of suppressing the hydrolysis reaction of the matrix resin. It may be an aqueous solution.
- grains 12 is not specifically limited.
- the sheet of matrix resin in which particles 12 are dispersed may be dipped in an etching solution.
- the temperature of the etching process may be set arbitrarily while considering the volatilization of the etching solution from the particles 12, the thermal decomposition of the matrix resin, the heat resistance of the three-dimensional structure, and the like.
- the temperature is preferably 60 ° C. or less, more preferably 45 ° C. or less.
- the contact between the patterning sheet 10 and the etching target 20B for example, the weight in the case of pressing the etching target 20B against the patterning sheet 10 is arbitrary while considering the elastic modulus of the patterning sheet 10 and the etching target 20B. It should be set to For example, the weights, preferably 0.2 N / m 2 or more 10.0 N / m 2 or less, more preferably is 0.8N / m 2 or more 5.0 N / m 2 or less.
- the etching target that is, the functional thin film 22 at the top of the convex on the planned etching surface 20S
- the etching target is etched with certainty, and the etching of the portion other than the target is suppressed.
- the etching solution to be impregnated is a self-assembled compound (Self-Assembled Monolayer)
- the etching solution is formed only on, for example, the convex tops of the planned etching surface 20S and etched using this as a mask. You may etch places other than a part.
- the patterning sheet 10 is formed of (A) the base sheet 11 formed of the first polymer that transmits the etching solution, and (B) the second polymer that absorbs and holds the etching solution. And particles 12 dispersed therein. And if it is such patterning sheet 10, the surface film 13 produced by (C) exposure of the etching solution to the main surface 11S of the base sheet 11 is formed.
- the surface side (the surface film 13) of the patterning sheet 10 with respect to the etching planned surface 20S of the etching target 20B is The method includes a contacting step of contacting, and a separating step of separating the surface side from the surface to be etched 20S.
- the surface film 13 formed of the etching solution on the surface side of the patterning sheet 10 is not easily exhausted since it is appropriately replenished from the particles 12 holding the etching solution, and for example, a large number of patterning sheets 10 Etching can be continuously performed on the etching target 20B. Therefore, the productivity of the etching structure 20A is enhanced.
- the film thickness of the bottom of the [1] concave is maintained 90% or more before and after etching, and the film thickness of the top of the [2] convex is 7% or less compared to the film thickness of the bottom Those satisfying the two points were taken as pass ( ⁇ ), and the others as fail ( ⁇ ) (see Table 1 below).
- etching object ⁇ Production of etching object> (A) Formation of asperities Polymethyl methacrylate (PMAA, manufactured by Sigma Aldrich) is dissolved in toluene at a concentration of 20% by weight, and spin-coated on a polyethylene terephthalate (PET) film (Lumirror U48 manufactured by Toray Industries, Inc .; thickness 100 ⁇ m) Coated. Thereafter, it was dried in an oven at 85 ° C. to form a 50 ⁇ m thick PMMA layer.
- PMAA Polymethyl methacrylate
- PET polyethylene terephthalate
- a mold 40 as shown in FIG. 6 is made of copper ⁇ (La): 100 ⁇ m, (Lb): 50 ⁇ m, (Lc): 100 ⁇ m) ⁇ , and after heating this mold to 170 ° C., 10 kN of While being loaded, the PMMA layer was slowly pressed to a depth of 50 ⁇ m. The temperature of the mold 40 was lowered to 25 ° C. by holding for 20 minutes in this state. After that, the mold was slowly removed to give unevenness to the PMMA layer.
- (B-2) The concavo-convex shaped PMMA layer (substrate) produced in (A) was introduced into a vacuum chamber, and copper (Cu) was deposited to a thickness of 400 nm by magnetron sputtering. The film thickness was measured at the top of the uneven surface.
- argon gas was introduced, a power density of 0.5 W / cm 2 was made at a pressure of 0.6 Pa, and a film was formed at a substrate temperature of 25 ° C.
- composition containing the above (1) to (4) was coated with a bar coater to a thickness of 2 mm and heat treated at 120 ° C. for 60 minutes to produce a base sheet containing particles.
- the above base sheet was impregnated with the etching solution.
- a material (5) of the etching solution either (5-1) or (5-2) below was used.
- An etching solution was prepared by diluting a transparent conductive film etching solution (trade name ITO-02, manufactured by Kanto Chemical Co., Ltd.) with water five times. The base sheet containing the particles was immersed in this solution and left for 15 minutes. Then, after taking out the base sheet, the patterning sheet was completed by lightly wiping the etching solution excessively accumulated on the surface.
- a transparent conductive film etching solution (trade name ITO-02, manufactured by Kanto Chemical Co., Ltd.)
- etching target having a functional thin film was pressed against the produced patterning sheet, and a load of 1.0 N / m 2 was applied for treatment for 30 seconds. After the object to be etched was removed from the patterning sheet, it was thoroughly washed with water and dried in an oven at 80 ° C. to complete the etched structure.
- one etching sheet is etched using one patterning sheet to produce an etching structure, and for the 20th etching structure, I made an evaluation.
- Examples 1 to 4 As shown in Table 1, as the functional thin film in the etching structure (object to be etched), ITO (the above B-1) is used in Examples 1 and 3, and copper (the above B-1 in Examples 2 and 4). )It was used.
- hydroxypropyl methylcellulose HPMC, above (4-1)
- CMC carboxymethylcellulose
- an etching solution suitable for dissolving ITO (the above-mentioned 5-1) is used as an etching solution in the patterning sheet, and in Examples 2 and 4, an etching solution suitable for dissolving copper (the above-mentioned 5 -2) was used.
- Comparative Example 1 In Comparative Example 1, a patterned sheet was produced only with the above (1) to (3) without adding particles. In addition, ITO (the above B-1) was used as a functional thin film, and an etching solution (the above 5-1) suitable for dissolving ITO was used.
- the retention of the etching solution in the patterning sheet was sufficient, and in the example examined in this example, the patterning sheet was not chemically decomposed by the etching solution, and showed a good etching property.
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Abstract
Description
図3に示すように、エッチング対象物20Bは、X方向およびY方向の2次元で形成される面の面上方向、すなわちZ方向に、凹凸を有した物体である(以降、このような物体を3次元構造物と称することもある)。そして、この凹凸を多数配置させた部分(エッチング予定面20S)に対して所定部分がエッチングされたエッチング対象物20Bを、エッチング構造物20Aとする。なお、このようなエッチング対象物20Bの一例としては、樹脂成型体または半導体基板が挙げられる。
ここで、以上のエッチング対象物20Bをエッチングさせるためのパターニングシート10について説明する。
ベースシート11は、エッチング溶液等の処理液を透過させやすい樹脂で形成される(以下、樹脂に対して、処理液が透過しやすいことを、透液性が高い、と称する)。また、ベースシート11を形成する樹脂(以下、マトリックス樹脂と称することもある)には、粒子12が分散する観点から、粒子を分散させやすい変性ポリマー類が好ましく、特に、シリコーン変性ポリエーテルを主成分とするポリマーが好適である。
(α)H2C=C(R1)-
(β)HC(R1)=CH-
次に、粒子12および表面膜13について説明する。粒子12は、保液性のポリマーで形成される。そして、このような粒子12は、エッチング溶液を内部に保持するとともに、マトリックス樹脂中に分散された後には、そのエッチング溶液をマトリックス樹脂において放出する。そして、放出されたエッチング溶液は、ベースシート11の主面11Sにおいて、表面膜13となる。
[エッチング性]
パターニングシートを繰り返し使用し、20回目のエッチングにて製造されたエッチング構造物の断面をSEMで観察し、凹凸面における凸の頂上と凹の底との膜厚を比較した。各層の膜厚または粒子の粒径は、SEM(フィールドエミッション型走査型電子顕微鏡S4800、日立ハイテクノロジーズ社製)を用い、10万倍の倍率で観察し、測定した。
(A)凹凸の形成
ポリメタクリル酸メチル(PMAA、シグマアルドリッチ製)をトルエンに20重量%の濃度で溶解し、ポリエチレンテレフタレート(PET)フィルム(東レ製 ルミラーU48、厚み100μm)上にスピンコート法でコーティングした。その後、85℃のオーブンで乾燥し、50μm厚のPMMA層を形成した。
(B-1)
(A)で作製した凹凸付きPMMA層(基板)を真空チャンバーに投入し、マグネトロンスパッタリング法でインジウム錫複合酸化物(ITO、酸化錫10重量%)を100nmの膜厚で製膜した。膜厚は、凹凸面における頂上で測定した。製膜条件は、アルゴンガスに対して、酸素ガスを抵抗値が最小となる流量(いわゆるボトム流量)導入し、0.6Paの圧力で0.7W/cm2のパワー密度とし、25℃の基板温度で製膜した。その後、135℃のオーブンに入れて、2時間熱処理を実施することで、ITOを結晶化した。
(A)で作製した凹凸形状付きPMMA層(基板)を真空チャンバーに投入し、マグネトロンスパッタリング法で銅(Cu)を400nmの膜厚で製膜した。膜厚は凹凸面における頂上で測定した。製膜条件は、アルゴンガスを導入し、0.6Paの圧力で0.5W/cm2のパワー密度とし、25℃の基板温度で製膜した。
以下の(1)~(4)を混合し、減圧脱泡(0.01MPa以下、10分間)し、組成物を作製した。
(1)アリル末端ポリオキシプロピレン
:500g(商品名カネカサイリルACS003、カネカ製)
(2)ポリオルガノハイドロジェンシロキサン
:33g(商品名CR100、カネカ製)
(3)ビス(1,3-ジビニル-1,1,3,3-テトラメチルジシロキサン)白金錯体触媒(白金含有率3wt%、キシレン溶液)
:0.30g
(4-1)ヒドロキシプロピルメチルセルロース
:50g(商品名TC-5、信越化学工業性)
(4-2)カルボキシメチルセルロース
:50g(ダイセルファインケム製)
作製したパターニングシートに、機能性薄膜を有するエッチング対象物を押し当て、1.0N/m2の荷重をかけて30秒間処理した。エッチング対象物をパターニングシートからはずした後に、水で十分に洗浄し、80℃のオーブンで乾燥させることでエッチング構造物を完成させた。なお、以下の各実施例および比較例において、1枚のパターニングシートを用いて、20個のエッチング対象物をエッチングして、エッチング構造物を作製し、20個目のエッチング構造物に対して、評価を行った。
表1に示すように、エッチング構造物(エッチング対象物)における機能性薄膜として、実施例1、3ではITO(前記B-1)を使用し、実施例2、4では銅(前記B-1)を使用した。
比較例1では、粒子を添加せずに、前記(1)~(3)のみでパターニングシートを作製した。また、ITO(前記B-1)を機能性薄膜として使用し、ITOの溶解に好適なエッチング溶液(前記5-1)を使用した。
11 ベースシート
11S ベースシートの主面
12 粒子
13 表面膜
20B エッチング対象物
20S エッチング予定面
20A エッチング構造物
21 基材
22 機能性薄膜
Claims (6)
- (A)エッチング溶液を透過させる第1ポリマーで形成されるベースシートと、
(B)前記エッチング溶液を吸収かつ保持する第2ポリマーで形成され、前記ベースシートに分散される粒子と、
を含むパターニングシート。 - (C)前記エッチング溶液の前記ベースシートの表面への表出により生じる表面膜を含む、請求項1に記載のパターニングシート。
- 前記第1ポリマーは、シリコーン変成ポリエーテルを主成分として含む請求項1または2に記載のパターニングシート。
- 前記第1ポリマーは、以下の(1)~(3)を含有する請求項1~3のいずれか1項に記載のパターニングシート。
(1)分子中にアルケニル基を有するポリエーテル系重合体
(2)分子中にヒドロシリル基を有するオルガノハイドロシロキサン化合物
(3)白金-ビニルシロキサン触媒 - 前記第2ポリマーは、セルロースまたはその誘導体を主材として含む請求項1~4のいずれか1項に記載のパターニングシート。
- エッチング対象物をエッチングすることで製造されるエッチング構造物の製造方法にあって、
前記エッチング対象物におけるエッチング予定面に対して、請求項1~5のいずれか1項に記載のパターニングシートの表面側を接触させる接触工程と、
前記表面側を前記エッチング予定面から乖離させる乖離工程と、
を含むエッチング構造物の製造方法。
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