WO2019050148A1 - Leak-detecting sensor assembly - Google Patents
Leak-detecting sensor assembly Download PDFInfo
- Publication number
- WO2019050148A1 WO2019050148A1 PCT/KR2018/007987 KR2018007987W WO2019050148A1 WO 2019050148 A1 WO2019050148 A1 WO 2019050148A1 KR 2018007987 W KR2018007987 W KR 2018007987W WO 2019050148 A1 WO2019050148 A1 WO 2019050148A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sensor body
- contact portion
- leak
- valve
- communication hole
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/24—Housings ; Casings for instruments
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/24—Housings ; Casings for instruments
- G01D11/245—Housings for sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
Definitions
- the present invention relates to a sensor assembly configured to detect leaks such as piping clamps and valves.
- the clamping device for piping is a component that connects piping and piping. There are various types according to the shape and structure of piping to be connected. If there is a flange on the pipe, the clamping device is designed so that the flange of the pipe to be connected to the flange can be biased in the direction of mutual close contact.
- an o-ring or a gasket is installed between the flange and the flange to prevent fluid leakage or vacuum leakage.
- These parts may also be aged or corroded depending on the passage of time or conditions of use, . Leakage in piping used in vacuum systems can make it difficult to control the vacuum required for the process, cause product failure, waste energy or raise costs.
- the clamping device for piping is capable of minimizing the enlargement loss by stably maintaining the closed state, and by easily replacing or repairing the aged o-ring or the coupling structure in advance.
- an isolation valve is a piping component that blocks or flows a vacuum to the system, and is used to control the inside of the valve, that is, the o-ring or the sealing element, in the process of evacuating fumes or corrosive gases inside the chamber by vacuum. Foreign matter tends to adhere.
- the bellows included in the isolation valve may be damaged or ruptured due to repetitive valve opening and closing, attachment of corrosive gas, or the like, and may cause leakage.
- An object of the present invention is to simplify the structure of a device while enhancing convenience by being installed directly on a clamp device or a valve, which is an object of leak detection, and being integrated with a clamp or a valve so as to be managed or handled.
- Another object of the present invention is to detect a pressure change due to a leak occurring in a clamp device, a valve, or the like, and to confirm the pressure change.
- a leak detection sensor assembly comprises: a sensor body portion formed to be able to be fastened to the communication hole of a piping component having a communication hole for detection of a leak; A valve membrane formed to be able to close the communication hole and deformable or displaceable when pressure of the communication hole changes due to leakage; A conductive moving contact part coupled to an outer side of the valve film and moving according to deformation or displacement of the valve film; And a fixed contact portion provided on the sensor body portion so that the movable contact portion can be contacted when there is a deformation or a displacement of the valve film due to occurrence of leakage due to leakage, .
- the leak sensing sensor assembly may further include a connection port formed at one side of the sensor body portion so that an external terminal can be connected to the fixed contact portion.
- the sensor body includes: a first sensor body in contact with the communication hole; And a second sensor body coupled to the first sensor body and to which the stationary contact part is fixed, the valve film being disposed between the first sensor body and the second sensor body.
- the sensor body may further include a third sensor body laminated on the second sensor body and configured to simultaneously press the second sensor body.
- the first sensor body may include an undercut for blocking heat transfer at a portion in contact with the piping component.
- the valve film may include: a membrane body; A ring-shaped portion formed along an edge of the membrane body; And a coupling protrusion formed to protrude outward from an intermediate portion of the membrane body, the coupling protrusion being formed such that the moving contact portion can be engaged with the coupling protrusion.
- a through hole may be formed in the moving contact portion, and a separation preventing jaw may be formed in the coupling protrusion such that the moving contact portion can be engaged after being inserted through the through hole.
- a through hole may be formed in the moving contact portion, and the through hole may be fixed by adhesion after being inserted into the coupling protrusion.
- valve membrane may be formed of rubber or silicone rubber.
- the movable contact portion may be formed in a plate shape.
- the fixed contact portions may be formed in a shape such that a pair of the fixed contact portions are spaced apart in parallel.
- the movable contact portion may be formed in a rectangular shape or an elliptical shape.
- the stationary contact portion may include: a first fin portion located at one side of the movable contact portion; A second fin portion located on the other side of the moving contact portion; And a connecting portion for integrally connecting the first fin portion and the second fin portion.
- the piping component may be a clamp or an isolation valve.
- the leakage sensing sensor assembly relating to the present invention, when the valve membrane that closes the communication hole is deformed or displaced by the leak, the conductive moving contact portion that is caught by the valve membrane moves and contacts the stationary contact portion, It is easy to use directly on piping parts, and it is simple and compact, and it can accurately detect leakage.
- the conductive moving contact part is constrained to the outside of the plate film and includes a conductive moving contact part formed to be movable in accordance with deformation or displacement of the plate film, Regardless of the position or angle of the piping component, which is the main component of the piping, and is excellent in terms of maintenance and durability.
- the movable contact portion is fixed to the elastic plate film, and the position and state of the movable contact portion can be stably managed by the elastic action of the plate film.
- the leak detection sensor assembly according to the present invention can be applied to various fields requiring a leak detection and maintenance such as a clamp or an isolation valve having a communication hole.
- FIG. 1 is a perspective view of a clamping device for a pipe equipped with a leak detection sensor assembly 200 according to an embodiment of the present invention.
- Fig. 2 is a cross-sectional view of the clamping device for piping of Fig. 1
- FIG. 3 is an exploded cross-sectional view for explaining a method of assembling a leak detection ring assembly 150 that can be mounted inside a clamp 110 in connection with the present invention
- Figure 4 is a cross-sectional view of the leak detection ring assembly 150 of Figure 3
- FIG. 5 is a perspective view showing an assembled state of the leak sensing sensor assembly 200 according to the first embodiment of the present invention.
- FIG. 6 is an exploded perspective view of the leak sensing sensor assembly 200 of FIG.
- FIG. 7 is a view conceptually showing a method of assembling the valve film 230 and the moving contact portion 240 according to the present invention
- FIG. 8 is a cross-sectional view of a leak sensing sensor assembly 200 in accordance with the present invention.
- FIG. 9 is a sectional view taken along the line IX-IX in Fig. 8
- FIG. 10 is a cross-sectional view for explaining the operating state of the leak sensing sensor assembly 200 according to the present invention, in which (a) is a state without leakage, (b) is a state in which vacuum leakage is present, c) indicates a state in which there is a positive pressure leak inside
- FIG. 11 is a perspective view showing an assembled state of the leak sensing sensor assembly 300 according to another embodiment of the present invention.
- FIG. 12 is an exploded perspective view of the leak detection sensor assembly 300 of FIG.
- FIG. 13 is a cross-sectional view of the leak detection sensor assembly 300 of FIG.
- the leak sensing sensor assembly associated with the present invention can be applied to various piping components.
- Such piping components may be clamps, isolation valves, gate valves, piping, pumps, valves or clamps for high pressure, valves or clamps for liquids, and the like. 1 shows the application to the clamping device.
- the piping clamp device may include a clamp body 110, a loosening prevention unit 120, a leak sensing sensor assembly 200, and the like. It is also possible that the release preventing unit 120 is configured or omitted in a manner different from the present embodiment.
- the clamping body 110 is formed so as to be able to be fastened around the outer periphery of the flanges F1 and F2 so as to press the pair of flanges F1 and F2 (see Fig. 2) against each other.
- the clamp body 110 includes a first clamp body 111 formed so as to cover one semicircle of a pair of flanges F1 and F2, and a second clamp body 111 surrounding a second semicircle of the pair of flanges F1 and F2
- a hinge portion 113 for connecting the first clamp body 111 and the second clamp body 112 and a second clamp body 112 formed on the opposite side of the hinge portion 113, And a threaded portion 125 configured to fasten the second clamp body 112 to the second clamp body 112.
- first clamp body 111 and the hinge portion 113 of the second clamp body 112 may be configured to be openable so as to be completely separated from the pair of open flanges F1 and F2.
- the first clamp body 111 and the second clamp body 112 may have a locking groove 115 for receiving a threaded portion 125 at an end thereof.
- the unlocking prevention unit 120 includes a yoke portion 121 for supporting the screw portion 125 in a hinge form, a corrugation portion 126 formed in the circumferential direction on the side surface of the screw portion 125, And an elastic engagement portion 124 formed to be able to be elastically hooked to the shape portion 126 according to the engagement angle of the screw portion 125.
- the yoke portion 121 is connected to the second clamp body 112 by a hinge and a yoke head 122 for passing the screw portion 125 is provided at an end thereof.
- the resilient latching portion 124 may include a spring and a ball (not shown) therein. When the ball is caught in the concave portion of the eugenizing feature 126, it functions as a locking device to prevent the threaded portion 125 that has been fastened from being loosened.
- FIG. 2 is a cross-sectional view of the clamping device for piping in FIG. 1
- FIG. 3 is an exploded cross-sectional view for explaining a method of assembling the leak detection ring assembly 150 that can be mounted inside the clamp 110
- 4 is a cross-sectional view of the leak detection ring assembly 150 of FIG.
- a first O-ring 151 may be provided between the first flange F1 and the second flange F2.
- the first O-ring 151 performs substantial airtightness on a connection portion between the first pipe P1 and the second pipe P2. Leaks due to aging or breakage thereof are detected by the leak detection sensor assembly 200.
- a support ring 152 for supporting the first O-ring 151 may be provided on the inner circumferential surface of the first O-ring 151.
- the support ring 152 may have an outer circumferential groove 152a through which the first O-ring 151 is caught.
- the support ring 152 maintains the shape and position of the first O-ring 151.
- the leak detection ring assembly 150 is provided inside the clamp body 110.
- the leak detection ring assembly 150 includes a leak detection ring 153 (see FIG. 3) having a communication hole 154 formed at one position so as to surround the first O-ring 151 inside the clamp body 110
- the outer peripheral surface of the first flange F 1 and the inner peripheral surface of the leak detection ring 153 are sealed in the leak detection ring 153 and the communication hole 154 and the first o- A pair of second O-rings 161 and 163 arranged so as to communicate the outer space of the first O-rings 151 and 163 and a second O-ring 161 And 163, respectively, as shown in FIG.
- the leak detection ring 153 may be formed in the form of a metal ring having a plurality of grooves formed on its inner surface.
- the communication hole 154 is a passage that connects the space around the first O-ring 151 that is sealed by the second O-rings 161 and 163 to the outside.
- the leak detection sensor assembly 200 is mounted in the communication hole 154.
- a screw hole 159 for detachment of the leak detection sensor assembly 200 may be formed around the communication hole 154.
- the machining surface 155 may be formed on one side of the leak detection ring 153 for the machining of the communication hole 154 and the screw hole 159 and the installation space of the leak detection sensor assembly 200.
- the through hole 117 (see FIG. 1) may be formed in the first clamp body 111 so that the leak sensing sensor assembly 200 can be passed through and connected to the communication hole 154.
- a plurality of grooves formed on the inner surface of the leak detection ring 153 are formed by a first groove 156 formed so that the first O-ring 151 can be fitted and seated, And a pair of second grooves 157 respectively formed on both sides of the first and second O-rings 161 and 163 to receive the O-rings 161 and 163, respectively.
- a jaw-like portion 158 may be formed on the outer side of the second groove 157 so that the release limiting rings 162 and 164 may be engaged.
- the release restricting rings 162 and 164 are integrally formed with the vertical protrusion 162a and the vertical protrusion 162a which are formed to be able to be hooked on the jaw-shaped portion 158 when seen in a sectional view, And a horizontal ring portion 162b.
- the release limiting rings 162 and 164 may be formed in a 'C' shape with one side open. 3, in order to install the second O-rings 161 and 163, the second O-rings 161 and 163 are inserted into the second grooves 157 and then the release limiting rings 162 and 164
- the vertical protrusions 162a are slightly protruded to allow the vertical protrusions 162a to enter the inside of the jaw portion 158.
- release limiting rings 162 and 164 are elements for maintaining the precise position and shape for the airtightness of the second O-rings 161 and 163 and the tightening action of the first clamp body 111 and the second clamp body 112
- the release limiting rings 162 and 164 are also moved by the first clamp body 111 and the second clamp body 112, ).
- the protrusion 156a between the first groove 156 and the second groove 157 of the leak detection ring 153 is provided with a plurality of protrusions 156a, A flow passage groove 165 may be formed. Even if leakage occurs at an arbitrary position around the first O-ring 151, the flow of the pressure due to the leakage is transmitted to the communication hole 154 of the leak detection ring 153, It can be used for immediate detection.
- FIG. 5 is a perspective view showing an assembled state of the leak sensing sensor assembly 200 according to the first embodiment of the present invention
- FIG. 6 is an exploded perspective view of the leak sensing sensor assembly 200 of FIG.
- the leak sensing sensor assembly 200 according to the present invention may include sensor body parts 210 and 220, a plate film 230, a moving contact part 240, a stationary contact part 260, and the like.
- the leak sensing sensor assembly 200 may include a connection port 280 formed at one side of the sensor body units 210 and 220 so that an external terminal can be connected thereto.
- connection port 280 formed at one side of the sensor body units 210 and 220 so that an external terminal can be connected thereto.
- the sensor body portions 210 and 220 are formed so as to be fastened to the communication hole 154 of the piping component having the communication hole 154 for detection of the above-described leak.
- the sensor body portion may have a first sensor body 210 contacting the communication hole 154 and a second sensor body 220 having the fixed contact portion 260 installed thereon.
- the plate 230 is disposed between the first sensor body 210 and the second sensor body 220.
- the valve plate 230 is formed so as to seal the communication hole 154 of the piping component and is formed to be capable of deformation or displacement in accordance with the change of the pressure of the communication hole 154.
- the plate film 230 may be made of rubber, silicone rubber, synthetic resin, or the like. As such a specific example, the valve film 230 may contain a fluororesin having excellent hermetic characteristics and durability.
- This valve film 230 is fixed to the sensor body portions 210 and 220 so that the pressure change due to the leakage acting on the communication hole 154 (vacuum pressure (negative pressure) when the piping component is used in a vacuum system, (Or positive pressure when the pressure above atmospheric pressure is used) is deformed toward the inside of the communication hole 154 or vice versa, thereby inducing movement of the moving contact portion 240 attached to the plate 230 .
- the first sensor body 210 may have a valve seat 211 for seating the valve 230 therein.
- the plate 230 has a membrane body 231 formed in the form of a thin film, a ring shaped portion 232 formed along the edge of the membrane body 231, And an engaging protrusion 233 protruding from the outer side of the engaging protrusion 233.
- the movable contact portion 240 is engaged with the engaging projection 233.
- the membrane body 231 is deformed in the direction opposite to the communication hole 154 (expanded in the outward direction) so that the engaging projection 233 and the moving contact portion 240 are in contact with the communication hole 154 To be displaced in the opposite direction.
- the membrane body 231 is tightly held by the protruding support wheel 212 formed on the first sensor body 210 or the second sensor body 220 do. That is, the ring-shaped upper part 232 is an element sealing between the first sensor body 210 and the second sensor body 220, and the membrane body 231 blocks the inner space and the outer space toward the communication hole 154 It is necessary to keep the film main body 231 in a normal position in the case where there is no leakage. To this end, the film main body 231 is hooked on the protruding support wheel 212, so that the film main body 231 is tightened.
- the movable contact portion 240 has conductivity and is constrained to the coupling protrusion 233 so that the movable contact portion 240 can move according to the deformation or displacement of the film body 231.
- the movable contact portion 240 may be formed in a plate shape, and a through hole 241 may be formed in the middle of the movable contact portion 240.
- a separation protrusion 233a may be formed on the coupling protrusion 233 so that the movable contact portion 240 can be caught and fixed to the coupling protrusion 233.
- the diameter of the through hole 241 is smaller than the diameter of the separation preventing jaw 233a. It can be formed small.
- the upper end of the engaging projection 233 has a diameter larger than the diameter of the through hole 241 so as to be easily inserted into the through hole 241.
- a small tip portion 234 can be formed. 7 (a), when the through-hole 241 of the movable contact portion 240 is inserted through the tip portion 234, the tip portion 234 is slightly pulled. In this way, the separation preventing bust 233a is contracted and can pass through the through hole 241, and the moving bending portion 240 is again caught by the separation preventing bust 233a.
- the moving contact portion 240 may be fixed by a bonding (a method of adhering by adhesive, fusion, or the like) after being inserted into the coupling protrusion 233.
- the movable contact portion 240 When the movable contact portion 240 is coupled to the coupling protrusion 233 as described above, the movable contact portion 240 moves in the protruding direction of the coupling protrusion 233 in accordance with deformation or displacement of the film main body 231 of the plate film 230 .
- the stationary contact portion 260 is spaced apart from the movable contact portion 240 when there is no leakage in the communication hole 154.
- the plate 230 is deformed or displaced due to leakage, And is fixed to the sensor body portion so that the sensor body 240 can be contacted.
- the stationary contact portion 260 includes a first fin portion 262 located at one side of the movable contact portion 240, a second fin portion 263 located at the other side of the movable contact portion 240, 262 and the second fin 263 integrally with each other. Accordingly, in the shape, the fixed contact portion 260 may have an 'F' shape as shown in FIG.
- the fixed contact portions 260A and 260B may be fixed to the second sensor body 220 in a state where a pair of the fixed contact portions 260A and 260B are spaced apart from each other in parallel.
- the second sensor body 220 may be formed with a through hole 223 through which the stationary contact portions 260A and 260B are installed.
- a narrow space portion 265 is formed between the both fixed contact portions 260A and 260B. When the piping part is a clamp, the width is narrow and accordingly, installation space is limited. Accordingly, the space portion 265 may also be narrow.
- the movable contact portion 240 may be formed in a rectangular or elliptical shape such that a short width portion is inserted between the fixed contact portions 260A and 260B formed in the form of a pair of pins, and then rotated and assembled.
- 7A when the movable contact portion 240 is fixed to the plate 230, the movable contact portion 240 is rotated by 90 degrees so that the short width portion of the movable contact portion 240 contacts the both fixed contact portions 260A , And 260B, and turn it 90 degrees again to align the arrangement as shown in (c). Both ends of the movable contact portion 240 are positioned between the first fin portion 262 and the second fin portion 263 of the fixed contact portion 260. Finally, the first sensor body 210 is aligned with the second sensor body 220 and fixed to the piping component to be the object by the fastener such as the screw 215.
- FIG. 9 is a cross-sectional view taken along the line IX-IX in FIG. 8, and FIG. 10 is a sectional view taken along line IX-IX in FIG. 8, illustrating the operation state of the leak sensing sensor assembly 200 related to the present invention
- (A) is a state in which there is no leak in the interior
- (b) is a state in which there is a vacuum leak inside
- (c) is a state in which there is a positive pressure leak in the interior.
- the lower space and the upper space are shielded by the plate film 230 in a state of being assembled to the piping part.
- the movable contact portion 240 is fixed to the coupling protrusion 233 formed in the middle of the film main body 231 and both ends of the movable contact portion 240 are fixed to the first pin portion 262 of the fixed contact portion 260 and the movable contact portion 240, Two-pin portion 263. 10A, both ends of the movable contact portion 240 are in contact with the first fin portion 262 and the second fin portion 263 of the fixed contact portion 260 when there is no leak in the piping component Do not.
- the membrane body 231 is also deformed inward and the moving contact part 240 is also displaced downward. Both ends of the movable contact portion 240 are brought into contact with the both second pin portions 263 of the fixed contact portion 260 so that the first fixed contact portion 260A and the second fixed contact portion 260B are electrically connected do.
- An external device or a server connected through an external terminal senses such an electrical change and can recognize the leak.
- both ends of the movable contact portion 240 are in contact with the first pin portions 262 of the fixed contact portion 260, respectively, so that the first fixed contact portion 260A
- the second fixed contact portion 260B is electrically connected to allow the outside to know whether a leak has occurred.
- the leak sensing sensor assembly 200 can stably implement the sensing function irrespective of the position or angle of the piping component to be subjected, and is excellent in terms of maintenance and durability.
- FIG. 11 is a perspective view showing an assembled state of the leak sensing sensor assembly 300 according to another embodiment of the present invention
- FIG. 12 is an exploded perspective view of the leak sensing sensor assembly 300 of FIG. 11
- 11 is a cross-sectional view of the leak detection sensor assembly 300 of FIG.
- the leak detection sensor assembly 300 of this embodiment has a third sensor body 322 in addition to the first sensor body 310 and the second sensor body 321.
- the first sensor body 310 is an element which is fastened to the leak detection ring 153 and a plate film 330 and a moving contact portion 340 are formed between the first sensor body 310 and the second sensor body 321, And a fixed contact portion 360 are provided.
- a third sensor body 322 is formed on the second sensor body 321 and is formed on the second sensor body 321 to press the second sensor body 321 at the same time.
- the second sensor body 322 is formed of the same material as the resin for insulation, there is a possibility of deformation or denaturation, which may hinder the stable functioning of the movable contact portion 340 and the fixed contact portion 360 Therefore, this problem can be solved by firmly pressing the second sensor body 321 through the third sensor body 322.
- the surface of the first sensor body 310 in contact with the leak detection ring 153 may deteriorate the plate 330 due to internal fluid or heat generated from the pipe,
- An undercut 314 for blocking heat transfer may be formed.
- the undercut 314 can minimize heat conduction by forming an air gap between the leak detection ring 153 and the first sensor body 310.
- the fixed contact portion 360 of this embodiment also includes a first fin portion 362 located on one side of the movable contact portion 340, a second fin portion 363 located on the other side of the movable contact portion 340, And a connection portion 361 for integrally connecting the fin portion 362 and the second fin portion 363.
- the connection portions 361 are formed as a pair, so that the first fin portion 362 and the second fin portion 363 are fixed at both sides. 6 in which the first fin portion 262 and the second fin portion 263 are cantilevered with respect to the connection portion 361, the first fin portion 362 and the second fin portion 363, Can be kept constant.
- the leak detection sensor assembly described above is not limitedly applied to the configuration and method of the illustrated embodiments.
- the embodiments may be configured so that all or some of the embodiments may be selectively combined so that various modifications may be made.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
A leak-detecting sensor assembly related to the present invention may comprise: a sensor body part formed to be fastenable to a communication hole provided in a pipe component to detect a leak; a valve formed to be able to seal the communication hole and to be deformed or displaced with the change of pressure in the communication hole due to a leak; a conductive movable contact part coupled to the outside of the valve and moving depending on the deformation or displacement of the valve; and a fixed contact part installed at the sensor body part such that the same can be spaced apart from the movable contact part in the absence of a leak and can be contacted by the movable contact part when the valve is deformed or displaced by the occurrence of a leak.
Description
본 발명은 배관용 클램프나 밸브 등의 리크를 감지할 수 있게 구성된 센서 어셈블리에 관한 것이다.The present invention relates to a sensor assembly configured to detect leaks such as piping clamps and valves.
배관용 클램프 장치는 배관과 배관을 연결하는 요소로서, 연결할 대상인 배관의 형상이나 구조에 따라 다양한 타입이 있다. 배관에 플랜지가 있는 경우, 클램프 장치는 플랜지와 연결할 배관의 플랜지가 맞대어져 상호 밀착되는 방향으로 힘을 가할 수 있게 설계된다.The clamping device for piping is a component that connects piping and piping. There are various types according to the shape and structure of piping to be connected. If there is a flange on the pipe, the clamping device is designed so that the flange of the pipe to be connected to the flange can be biased in the direction of mutual close contact.
이때, 플랜지와 플랜지의 사이에는 유체의 누설 또는 진공의 누설을 방지하기 위해 오링이나 가스켓이 설치되는데, 이들 부품도 시간의 경과 또는 사용조건에 따라 노후화 또는 부식되기도 하며, 이로 인해 누설(leak)이 발생하기도 한다. 진공시스템에 사용되는 배관에서의 누설은 공정을 위하여 요구된 진공의 제어를 어렵게 하거나, 제품의 불량을 야기하기도 하며 에너지를 낭비하거나 비용을 상승시키기도 한다. 이러한 점에서 배관용 클램프 장치는 밀폐상태를 안정적으로 유지하면서도 노후된 오링이나 이음 구조를 용이하게 교체하거나 사전에 수리하도록 함으로써 확대손실을 최소화시킬 수 있게 할 필요가 있다.At this time, an o-ring or a gasket is installed between the flange and the flange to prevent fluid leakage or vacuum leakage. These parts may also be aged or corroded depending on the passage of time or conditions of use, . Leakage in piping used in vacuum systems can make it difficult to control the vacuum required for the process, cause product failure, waste energy or raise costs. In this respect, it is necessary that the clamping device for piping is capable of minimizing the enlargement loss by stably maintaining the closed state, and by easily replacing or repairing the aged o-ring or the coupling structure in advance.
이외에도 반도체 소자의 제조 공정을 진행하기 위해서는 많은 진공 시스템이 사용되며, 진공의 누설 감지 및 그에 따른 유지 관리 기술이 요구된다. 예를 들어, 아이솔레이션 밸브는 시스템에 진공을 차단하거나 흐르게 하는 배관 부품으로써, 챔버 내부의 흄(fume)이나 부식성(corrosive) 가스를 진공에 의해 배기하는 과정에서 밸브 내부, 즉 오링이나 밀봉요소에 이러한 이물질이 부착되기 쉽다. 아이솔레이션 밸브에 포함된 벨로우즈는 반복적인 밸브의 개폐 및 부식성 가스의 부착 등에 의해 손상되거나 파열되어 리크를 발생시킬 수 있다. 리크가 있는 경우, 장비나 챔버 내에 치명적인 문제를 줄 수 있으므로, 발생 즉시 조치되는 것이 바람직하나, 배관계의 어느 부위인지 바로 알기 어렵고, 그에 따라 적시에 유지 보수가 되지 못하는 문제가 있다.In addition, many vacuum systems are used in order to carry out the manufacturing process of semiconductor devices, and there is a need for vacuum leakage detection and maintenance techniques. For example, an isolation valve is a piping component that blocks or flows a vacuum to the system, and is used to control the inside of the valve, that is, the o-ring or the sealing element, in the process of evacuating fumes or corrosive gases inside the chamber by vacuum. Foreign matter tends to adhere. The bellows included in the isolation valve may be damaged or ruptured due to repetitive valve opening and closing, attachment of corrosive gas, or the like, and may cause leakage. When there is a leak, it is desirable to take measures immediately after occurrence of a fatal problem in the equipment or the chamber. However, it is difficult to immediately know which part of the piping system, and accordingly, there is a problem that the maintenance can not be performed in a timely manner.
오링, 벨로우즈 등의 노후화나 클램프의 이완 등에 따른 누설 등을 감지하기 위한 기술들도 소개되고 있다. 그럼에도, 선행기술들은 리크의 감지를 위한 기구적 구성이 복잡하거나, 리크감지요소를 클램프 등에 별도로 연결함에 따른 관리 및 취급의 불편성이 문제된다.O-rings, bellows, etc., as well as leakage due to the relaxation of the clamp. Nevertheless, the prior arts have a complicated mechanical structure for detection of leaks, and inconvenience of management and handling due to separately connecting leak detection elements to clamps or the like is a problem.
본 발명의 목적은 리크의 감지 대상인 클램프 장치나 밸브 등에 직접 설치하여 클램프 또는 밸브와 일체화되어 관리되거나 취급되도록 함으로써 편의성을 높이면서도 장치의 구성을 단순화시키는 데 있다.SUMMARY OF THE INVENTION An object of the present invention is to simplify the structure of a device while enhancing convenience by being installed directly on a clamp device or a valve, which is an object of leak detection, and being integrated with a clamp or a valve so as to be managed or handled.
본 발명과 관련된 다른 일 목적은 클램프 장치나 밸브 등에서 발생하는 리크에 따른 압력의 변화를 감지하여 이를 확인할 수 있도록 하는 데 있다.Another object of the present invention is to detect a pressure change due to a leak occurring in a clamp device, a valve, or the like, and to confirm the pressure change.
본 발명과 관련된 리크감지 센서 어셈블리는, 리크의 검출을 위한 연통홀을 갖는 배관 부품의 상기 연통홀에 체결될 수 있게 형성된 센서바디부; 상기 연통홀을 밀폐시킬 수 있게 형성되며, 리크에 의하여 상기 연통홀의 압력의 변화가 있는 경우 변형 또는 변위 가능하게 형성된, 판막; 상기 판막의 외측에 결합되며, 상기 판막의 변형 또는 변위에 따라 이동되는 도전성의 이동 접점부; 및 리크가 없는 경우 상기 이동 접점부에 대하여 이격되게 위치되고, 리크가 발생함으로써 상기 판막의 변형 또는 변위가 있는 경우 상기 이동 접점부가 접촉할 수 있도록, 상기 센서바디부에 설치되는 고정 접점부를 포함할 수 있다.A leak detection sensor assembly according to the present invention comprises: a sensor body portion formed to be able to be fastened to the communication hole of a piping component having a communication hole for detection of a leak; A valve membrane formed to be able to close the communication hole and deformable or displaceable when pressure of the communication hole changes due to leakage; A conductive moving contact part coupled to an outer side of the valve film and moving according to deformation or displacement of the valve film; And a fixed contact portion provided on the sensor body portion so that the movable contact portion can be contacted when there is a deformation or a displacement of the valve film due to occurrence of leakage due to leakage, .
본 발명과 관련된 일 예로서, 상기 리크감지 센서 어셈블리는, 외부 단자가 상기 고정 접점부에 접속 가능하도록 상기 센서바디부의 일측에 형성된 연결포트를 더 포함할 수 있다.In an embodiment of the present invention, the leak sensing sensor assembly may further include a connection port formed at one side of the sensor body portion so that an external terminal can be connected to the fixed contact portion.
본 발명과 관련된 일 예로서, 상기 센서바디부는, 상기 연통홀에 접하는 제1센서바디; 및 상기 제1센서바디에 결합되며 상기 고정접점부가 고정되는 제2센서바디를 포함하고, 상기 판막은 상기 제1센서바디와 상기 제2센서바디 사이에 배치될 수 있다.In one embodiment of the present invention, the sensor body includes: a first sensor body in contact with the communication hole; And a second sensor body coupled to the first sensor body and to which the stationary contact part is fixed, the valve film being disposed between the first sensor body and the second sensor body.
본 발명과 관련된 일 예로서, 상기 센서바디부는, 상기 제2센서바디에 적층되어 상기 제2센서바디를 동시 가압할 수 있게 형성된 제3센서바디를 더 포함할 수 있다.In one embodiment of the present invention, the sensor body may further include a third sensor body laminated on the second sensor body and configured to simultaneously press the second sensor body.
본 발명과 관련된 일 예로서, 상기 제1센서바디부는 상기 배관 부품에 접하는 부위에 열전달 차단을 위한 언더컷을 포함할 수 있다.According to an embodiment of the present invention, the first sensor body may include an undercut for blocking heat transfer at a portion in contact with the piping component.
본 발명과 관련된 일 예로서, 상기 판막은, 막본체; 상기 막본체의 가장자리를 따라 형성된 링(ring) 형상부; 및 상기 막본체의 중간 부분의 외측에 돌출되게 형성되며, 상기 이동 접점부가 결합될 수 있게 형성된 결합돌기를 포함할 수 있다.As an example related to the present invention, the valve film may include: a membrane body; A ring-shaped portion formed along an edge of the membrane body; And a coupling protrusion formed to protrude outward from an intermediate portion of the membrane body, the coupling protrusion being formed such that the moving contact portion can be engaged with the coupling protrusion.
본 발명과 관련된 일 예로서, 상기 이동 접점부에 관통홀이 형성되고, 상기 결합돌기에 상기 이동 접점부가 상기 관통홀을 통하여 삽입된 후 걸려질 수 있게 이탈방지턱이 형성될 수 있다.As an example related to the present invention, a through hole may be formed in the moving contact portion, and a separation preventing jaw may be formed in the coupling protrusion such that the moving contact portion can be engaged after being inserted through the through hole.
본 발명과 관련된 일 예로서, 상기 이동 접점부에 관통홀이 형성되고, 상기 관통홀이 상기 결합돌기에 삽입된 후 접착에 의하여 고정될 수 있다.As an example related to the present invention, a through hole may be formed in the moving contact portion, and the through hole may be fixed by adhesion after being inserted into the coupling protrusion.
본 발명과 관련된 일 예로서, 상기 판막은 고무 또는 실리콘 고무에 의해 형성될 수 있다.As an example related to the present invention, the valve membrane may be formed of rubber or silicone rubber.
본 발명과 관련된 일 예로서, 상기 이동 접점부는 플레이트 형태로 형성될 수 있다.In one embodiment of the present invention, the movable contact portion may be formed in a plate shape.
본 발명과 관련된 일 예로서, 상기 고정 접점부는 한 쌍이 평행하게 이격된 형태로 형성될 수 있다.As an example related to the present invention, the fixed contact portions may be formed in a shape such that a pair of the fixed contact portions are spaced apart in parallel.
본 발명과 관련된 일 예로서, 상기 이동 접점부는 장방형 또는 타원형으로 형성될 수 있다.As an example related to the present invention, the movable contact portion may be formed in a rectangular shape or an elliptical shape.
본 발명과 관련된 일 예로서, 상기 고정 접점부는, 상기 이동 접점부의 일측에 위치되는 제1핀부; 상기 이동 접점부의 타측에 위치되는 제2핀부; 및 상기 제1핀부와 상기 제2핀부를 일체로 연결하는 연결부를 포함할 수 있다.According to an embodiment of the present invention, the stationary contact portion may include: a first fin portion located at one side of the movable contact portion; A second fin portion located on the other side of the moving contact portion; And a connecting portion for integrally connecting the first fin portion and the second fin portion.
본 발명과 관련된 일 예로서, 상기 배관 부품은 클램프 또는 아이솔레이션밸브일 수 있다.As an example relating to the present invention, the piping component may be a clamp or an isolation valve.
본 발명과 관련된 리크감지 센서 어셈블리에 의하면, 연통홀을 밀폐시키는 판막이 리크에 의하여 변형 또는 변위되면, 판막에 걸려지는 도전성 이동 접점부가 이동하여 고정 접점부에 접촉하게 되고 그에 의해 리크 여부를 전기적으로 알려줄 수 있는 것으로, 배관 부품에 직접 사용이 용이하며 간단하고 소형이면서도 리크 여부를 정확히 검출할 수 있다.According to the leakage sensing sensor assembly relating to the present invention, when the valve membrane that closes the communication hole is deformed or displaced by the leak, the conductive moving contact portion that is caught by the valve membrane moves and contacts the stationary contact portion, It is easy to use directly on piping parts, and it is simple and compact, and it can accurately detect leakage.
본 발명과 관련된 일 예에 의하면, 도전성의 이동 접점부는 판막의 외측에 구속되게 결합되며, 판막의 변형 또는 변위에 따라 이동 가능하게 형성되는 도전성의 이동 접점부를 포함하는 것으로, 리크감지 센서 어셈블리가 대상이 되는 배관부품의 어느 위치 또는 각도로 설치되어 있는지와 관계없이 안정적으로 감지 기능을 구현할 수 있으며, 유지 및 내구성 면에서도 우수하다.According to an embodiment of the present invention, the conductive moving contact part is constrained to the outside of the plate film and includes a conductive moving contact part formed to be movable in accordance with deformation or displacement of the plate film, Regardless of the position or angle of the piping component, which is the main component of the piping, and is excellent in terms of maintenance and durability.
본 발명과 관련된 일 예에 의하면, 신축성이 있는 판막에 이동 접점부를 고정 설치시킨 것으로, 판막이 갖는 탄성작용에 의해 이동 접점부의 위치 및 상태가 안정적으로 관리될 수 있다.According to the embodiment of the present invention, the movable contact portion is fixed to the elastic plate film, and the position and state of the movable contact portion can be stably managed by the elastic action of the plate film.
본 발명과 관련된 리크감지 센서 어셈블리는 연통홀이 형성된 클램프 또는 아이솔레이션 밸브 등 리크감지 및 유지관리가 필요한 다양한 분야에 응용될 수 있다.The leak detection sensor assembly according to the present invention can be applied to various fields requiring a leak detection and maintenance such as a clamp or an isolation valve having a communication hole.
도 1은 본 발명과 관련된 일 예에 따른 리크감지 센서 어셈블리(200)가 장착된 배관용 클램프 장치의 사시도FIG. 1 is a perspective view of a clamping device for a pipe equipped with a leak detection sensor assembly 200 according to an embodiment of the present invention.
도 2는 도 1의 배관용 클램프 장치의 단면도Fig. 2 is a cross-sectional view of the clamping device for piping of Fig. 1
도 3은 본 발명과 관련되어 클램프(110) 내부에 장착될 수 있는 리크검출링 조립체(150)의 조립 방법을 설명하기 위한 분해 단면도3 is an exploded cross-sectional view for explaining a method of assembling a leak detection ring assembly 150 that can be mounted inside a clamp 110 in connection with the present invention
도 4는 도 3의 리크검출링 조립체(150)의 단면도Figure 4 is a cross-sectional view of the leak detection ring assembly 150 of Figure 3
도 5는 본 발명과 관련된 제1실시예에 따른 리크감지 센서 어셈블리(200)의 조립된 상태를 보인 사시도5 is a perspective view showing an assembled state of the leak sensing sensor assembly 200 according to the first embodiment of the present invention.
도 6은 도 5의 리크감지 센서 어셈블리(200)의 분해 사시도FIG. 6 is an exploded perspective view of the leak sensing sensor assembly 200 of FIG.
도 7은 본 발명과 관련된 판막(230) 및 이동 접점부(240)의 조립방법을 개념적으로 도시한 도면7 is a view conceptually showing a method of assembling the valve film 230 and the moving contact portion 240 according to the present invention
도 8은 본 발명과 관련된 리크감지 센서 어셈블리(200)의 단면도8 is a cross-sectional view of a leak sensing sensor assembly 200 in accordance with the present invention.
도 9는 도 8의 IX-IX선에 따른 단면도9 is a sectional view taken along the line IX-IX in Fig. 8
도 10은 본 발명과 관련된 리크감지 센서 어셈블리(200)의 작동상태를 설명하기 위한 단면도들로서, (a)는 내부에서 리크가 없는 상태이고, (b)는 내부에서 진공 리크가 있는 상태이며, (c)는 내부에서 양압 리크가 있는 상태를 각각 나타냄10 is a cross-sectional view for explaining the operating state of the leak sensing sensor assembly 200 according to the present invention, in which (a) is a state without leakage, (b) is a state in which vacuum leakage is present, c) indicates a state in which there is a positive pressure leak inside
도 11은 본 발명과 관련된 다른 실시예에 따른 리크감지 센서 어셈블리(300)의 조립된 상태를 보인 사시도11 is a perspective view showing an assembled state of the leak sensing sensor assembly 300 according to another embodiment of the present invention.
도 12는 도 11의 리크감지 센서 어셈블리(300)의 분해 사시도12 is an exploded perspective view of the leak detection sensor assembly 300 of FIG.
도 13은 도 11의 리크감지 센서 어셈블리(300)의 단면도13 is a cross-sectional view of the leak detection sensor assembly 300 of FIG.
이하, 본 발명과 관련된 리크감지 센서 어셈블리를 첨부된 도면을 참조로 하여 상세히 설명한다.Hereinafter, a leak detection sensor assembly according to the present invention will be described in detail with reference to the accompanying drawings.
본 발명과 관련된 리크감지 센서 어셈블리는 다양한 배관 부품에 적용될 수 있다. 그러한 배관 부품은 클램프, 아이솔레이션 밸브, 게이트 밸브, 배관, 펌프, 고압용 밸브나 클램프, 액체용 밸브나 클램프 등일 수 있다. 이중 도 1은 클램프 장치에 응용된 것을 보인다.The leak sensing sensor assembly associated with the present invention can be applied to various piping components. Such piping components may be clamps, isolation valves, gate valves, piping, pumps, valves or clamps for high pressure, valves or clamps for liquids, and the like. 1 shows the application to the clamping device.
도 1에 의하면, 배관용 클램프 장치는 크게 클램프 바디(110)와, 풀림방지유닛(120) 및 리크감지 센서 어셈블리(200) 등을 구비할 수 있다. 풀림방지유닛(120)이 본 실시예와 다른 형태로 구성되거나 생략되는 것도 가능하다.Referring to FIG. 1, the piping clamp device may include a clamp body 110, a loosening prevention unit 120, a leak sensing sensor assembly 200, and the like. It is also possible that the release preventing unit 120 is configured or omitted in a manner different from the present embodiment.
클램프 바디(110)는 맞대어지는 한 쌍의 플랜지(F1, F2; 도 2 참조)를 상호 가압하도록 플랜지(F1, F2)의 외주를 둘러싼 상태로 체결될 수 있게 형성된다. 구체적으로, 클램프 바디(110)는 한 쌍의 플랜지(F1, F2)의 일측 반원을 감쌀 수 있게 형성된 제1클램프 바디(111)와, 한 쌍의 플랜지(F1, F2)의 타측 반원을 감쌀 수 있게 형성된 제2클램프 바디(112)와, 제1클램프 바디(111)와 제2클램프 바디(112)를 연결하는 힌지부(113) 및, 힌지부(113)의 반대쪽에서 제1클램프 바디(111)와 제2클램프 바디(112)를 체결시킬 수 있게 구성된 나사부(125)를 포함할 수 있다.The clamping body 110 is formed so as to be able to be fastened around the outer periphery of the flanges F1 and F2 so as to press the pair of flanges F1 and F2 (see Fig. 2) against each other. Specifically, the clamp body 110 includes a first clamp body 111 formed so as to cover one semicircle of a pair of flanges F1 and F2, and a second clamp body 111 surrounding a second semicircle of the pair of flanges F1 and F2 A hinge portion 113 for connecting the first clamp body 111 and the second clamp body 112 and a second clamp body 112 formed on the opposite side of the hinge portion 113, And a threaded portion 125 configured to fasten the second clamp body 112 to the second clamp body 112. [
제1클램프 바디(111) 및 제2클램프 바디(112)의 힌지부(113)의 반대쪽은 개방된 한 쌍의 플랜지(F1, F2)로부터 완전히 분리될 수 있도록 개방 가능한 형태로 구성될 수 있다. 제1클램프 바디(111) 및 제2클램프 바디(112)의 단부에는 나사부(125)가 걸려지기 위한 잠금홈(115)을 가질 수 있다.The opposite sides of the first clamp body 111 and the hinge portion 113 of the second clamp body 112 may be configured to be openable so as to be completely separated from the pair of open flanges F1 and F2. The first clamp body 111 and the second clamp body 112 may have a locking groove 115 for receiving a threaded portion 125 at an end thereof.
풀림방지유닛(120)은, 나사부(125)를 힌지 형태로 지지하는 요크부(121)와, 나사부(125)의 측면에 원주방향으로 형성된 코류게이션(corrugation) 형상부(126) 및, 코류게이션 형상부(126)에 나사부(125)의 체결 각도에 따라 탄성적으로 걸림될 수 있게 형성된 탄성걸림부(124)를 포함할 수 있다. 요크부(121)는 제2클램프 바디(112)에 힌지에 의해 연결되어 있으며, 그 단부에는 나사부(125)가 통과되기 위한 요크 헤드(122)가 구비된다. 탄성걸림부(124)는 그 내부에 스프링과 볼(도시되지 않음)을 포함할 수 있다. 볼이 코류게이션 형상부(126)의 오목한 부분에 걸려있을 때는, 체결이 완료된 나사부(125)의 풀림을 방지하기 위한 잠금장치로서 작용한다.The unlocking prevention unit 120 includes a yoke portion 121 for supporting the screw portion 125 in a hinge form, a corrugation portion 126 formed in the circumferential direction on the side surface of the screw portion 125, And an elastic engagement portion 124 formed to be able to be elastically hooked to the shape portion 126 according to the engagement angle of the screw portion 125. The yoke portion 121 is connected to the second clamp body 112 by a hinge and a yoke head 122 for passing the screw portion 125 is provided at an end thereof. The resilient latching portion 124 may include a spring and a ball (not shown) therein. When the ball is caught in the concave portion of the eugenizing feature 126, it functions as a locking device to prevent the threaded portion 125 that has been fastened from being loosened.
도 2는 도 1의 배관용 클램프 장치의 단면도이고, 도 3은 본 발명과 관련되어 클램프(110) 내부에 장착될 수 있는 리크검출링 조립체(150)의 조립 방법을 설명하기 위한 분해 단면도이며, 도 4는 도 3의 리크검출링 조립체(150)의 단면도이다.FIG. 2 is a cross-sectional view of the clamping device for piping in FIG. 1, and FIG. 3 is an exploded cross-sectional view for explaining a method of assembling the leak detection ring assembly 150 that can be mounted inside the clamp 110, 4 is a cross-sectional view of the leak detection ring assembly 150 of FIG.
제1플랜지(F1)와 제2플랜지(F2)의 사이에는 제1오링(151)이 구비될 수 있다. 제1오링(151)은 제1배관(P1)과 제2배관(P2) 사이의 연결부위에서 실질적인 기밀을 담당하며, 이의 노후화 또는 파손 등에 의한 누설은 리크감지 센서 어셈블리(200)에 의하여 검출한다. 제1오링(151)의 내주면에는 제1오링(151)을 지지하기 위한 지지링(152)이 구비될 수 있다. 지지링(152)은 제1오링(151)이 걸려지기 위한 외주홈(152a)을 가질 수 있다. 이에 의하여, 지지링(152)은 제1오링(151)의 형태 및 위치를 유지시킨다.A first O-ring 151 may be provided between the first flange F1 and the second flange F2. The first O-ring 151 performs substantial airtightness on a connection portion between the first pipe P1 and the second pipe P2. Leaks due to aging or breakage thereof are detected by the leak detection sensor assembly 200. A support ring 152 for supporting the first O-ring 151 may be provided on the inner circumferential surface of the first O-ring 151. The support ring 152 may have an outer circumferential groove 152a through which the first O-ring 151 is caught. Thus, the support ring 152 maintains the shape and position of the first O-ring 151.
리크검출링 조립체(150)는 클램프바디(110)의 내부에 구비된다. 도 3에 의하면, 리크검출링 조립체(150)는, 클램프 바디(110)의 내부에서 제1오링(151)을 둘러쌀 수 있게 형성되며 일 위치에 연통홀(154)이 형성된 리크검출링(153)과, 리크검출링(153)의 내측에서 제1플랜지(F1)와 제2플랜지(F2)의 외주면과 리크검출링(153)의 내측면을 각각 기밀시키면서 연통홀(154)과 제1오링(151)의 외측공간을 연통시킬 수 있게 배치된 한 쌍의 제2오링(161, 163) 및, 제2오링(161, 163)이 리크검출링(153)에 끼워진 상태에서 제2오링(161, 163)의 이탈을 제한할 수 있게 형성된 이탈제한링(162, 164)을 포함할 수 있다.The leak detection ring assembly 150 is provided inside the clamp body 110. 3, the leak detection ring assembly 150 includes a leak detection ring 153 (see FIG. 3) having a communication hole 154 formed at one position so as to surround the first O-ring 151 inside the clamp body 110 The outer peripheral surface of the first flange F 1 and the inner peripheral surface of the leak detection ring 153 are sealed in the leak detection ring 153 and the communication hole 154 and the first o- A pair of second O- rings 161 and 163 arranged so as to communicate the outer space of the first O- rings 151 and 163 and a second O-ring 161 And 163, respectively, as shown in FIG.
도 4와 같이, 리크검출링(153)은 내측면에 복수의 그루브가 형성된 금속링의 형태로 형성될 수 있다. 연통홀(154)은 실질적으로 제2오링(161, 163)에 의해 밀폐된 제1오링(151)의 주위의 공간을 외부로 연결하는 통로이다. 연통홀(154)에는 리크감지 센서 어셈블리(200)가 장착된다. 연통홀(154)의 주위에는 리크감지 센서 어셈블리(200)의 탈착을 위한 나사홀(159)이 형성될 수 있다. 연통홀(154) 및 나사홀(159)의 가공 및 리크감지 센서 어셈블리(200)의 설치공간을 위하여 리크검출링(153)의 일측에는 가공면(155)이 형성될 수 있다. 리크감지 센서 어셈블리(200)가 통과되어 연통홀(154)에 장착될 수 있도록, 제1클램프바디(111)에는 통과홀(117, 도 1 참조)이 형성될 수 있다. 4, the leak detection ring 153 may be formed in the form of a metal ring having a plurality of grooves formed on its inner surface. The communication hole 154 is a passage that connects the space around the first O-ring 151 that is sealed by the second O- rings 161 and 163 to the outside. The leak detection sensor assembly 200 is mounted in the communication hole 154. A screw hole 159 for detachment of the leak detection sensor assembly 200 may be formed around the communication hole 154. The machining surface 155 may be formed on one side of the leak detection ring 153 for the machining of the communication hole 154 and the screw hole 159 and the installation space of the leak detection sensor assembly 200. The through hole 117 (see FIG. 1) may be formed in the first clamp body 111 so that the leak sensing sensor assembly 200 can be passed through and connected to the communication hole 154.
도 3과 같이, 리크검출링(153)의 내측면에 형성되는 복수의 그루브는, 제1오링(151)이 끼워져 안착될 수 있게 형성된 제1그루브(156)와, 제1그루브(156)의 양측에 각각 형성되며 제2오링(161, 163)이 각각 안착될 수 있게 형성된 한 쌍의 제2그루브(157)를 포함할 수 있다. 제2그루브(157)의 외측에는 이탈제한링(162, 164)이 걸려질 수 있도록 턱형상부(158)가 각각 형성될 수 있다.3, a plurality of grooves formed on the inner surface of the leak detection ring 153 are formed by a first groove 156 formed so that the first O-ring 151 can be fitted and seated, And a pair of second grooves 157 respectively formed on both sides of the first and second O- rings 161 and 163 to receive the O- rings 161 and 163, respectively. A jaw-like portion 158 may be formed on the outer side of the second groove 157 so that the release limiting rings 162 and 164 may be engaged.
이탈제한링(162, 164)은 탄성 변형이 가능한 금속링의 형태로서, 단면도로 보았을 때 턱형상부(158)에 걸려질 수 있게 형성된 수직돌출부(162a)와 수직돌출부(162a)와 일체로 형성되는 수평링부(162b)를 포함할 수 있다. 이탈제한링(162,164)은 일측이 개방된 'C'자 형태로 형성될 수 있다. 이에 따라, 도 3과 같이, 제2오링(161, 163)을 설치하기 위해서는, 제2오링(161, 163)을 제2그루브(157)에 삽입한 후, 이탈제한링(162, 164)을 살짝 오므려 수직돌출부(162a)가 턱형상부(158)의 내측으로 진입되도록 하고, 오므렸던 이탈제한링(162, 164)을 놓으면 탄성에 의해 이탈제한링(162, 164)이 벌려져 수직돌출부(162a)가 턱형상부(158)에 걸려진다. 이러한 이탈제한링(162, 164)은 제2오링(161, 163)의 기밀을 위한 정확한 위치와 형상을 유지시키는 요소이며, 제1클램프 바디(111)와 제2클램프 바디(112)의 조임 작용에 의하여 배관(P1, P2)의 축방향으로 힘이 작용하면 이탈제한링(162, 164)도 함께 제1클램프 바디(111)와 제2클램프 바디(112)에 의하여 이동되어 제2오링(161,163)의 기밀작용을 돕는다.The release restricting rings 162 and 164 are integrally formed with the vertical protrusion 162a and the vertical protrusion 162a which are formed to be able to be hooked on the jaw-shaped portion 158 when seen in a sectional view, And a horizontal ring portion 162b. The release limiting rings 162 and 164 may be formed in a 'C' shape with one side open. 3, in order to install the second O- rings 161 and 163, the second O- rings 161 and 163 are inserted into the second grooves 157 and then the release limiting rings 162 and 164 The vertical protrusions 162a are slightly protruded to allow the vertical protrusions 162a to enter the inside of the jaw portion 158. When the cleaved release limiting rings 162 and 164 are released, the release limiting rings 162 and 164 are opened by elasticity, (162a) is caught by the jaw (158). These release limiting rings 162 and 164 are elements for maintaining the precise position and shape for the airtightness of the second O- rings 161 and 163 and the tightening action of the first clamp body 111 and the second clamp body 112 When the force acts in the axial direction of the pipes P1 and P2 by the first clamp body 111 and the second clamp body 112, the release limiting rings 162 and 164 are also moved by the first clamp body 111 and the second clamp body 112, ).
도 4와 같이, 리크검출링(153)의 제1그루브(156)와 제2그루브(157)의 사이의 돌출 부위(156a)에는 내부면 방향을 따라 복수의 위치에 누설 기체가 통과될 수 있도록 월류홈(165)이 형성될 수 있다. 이러한 월류홈(165)은 제1오링(151)의 주위의 임의의 위치에서 누설이 발생하더라도 누설에 의한 압력의 변화가 리크검출링(153)의 연통홀(154)에 전달되도록 하여 외부에서 이를 즉각적으로 감지할 수 있도록 하는 역할을 한다.4, the protrusion 156a between the first groove 156 and the second groove 157 of the leak detection ring 153 is provided with a plurality of protrusions 156a, A flow passage groove 165 may be formed. Even if leakage occurs at an arbitrary position around the first O-ring 151, the flow of the pressure due to the leakage is transmitted to the communication hole 154 of the leak detection ring 153, It can be used for immediate detection.
도 5는 본 발명과 관련된 제1실시예에 따른 리크감지 센서 어셈블리(200)의 조립된 상태를 보인 사시도이고, 도 6은 도 5의 리크감지 센서 어셈블리(200)의 분해 사시도이다. 본 발명과 관련된 리크감지 센서 어셈블리(200)는, 센서바디부(210, 220), 판막(230), 이동 접점부(240), 고정 접점부(260) 등을 구비할 수 있다. 또한, 리크감지 센서 어셈블리(200)에는 외부단자가 접속 가능하도록 센서바디부(210, 220)의 일측에 형성된 연결포트(280)가 구비될 수 있다. 이하, 이들의 구성 및 작용에 대하여 구체적으로 설명한다.FIG. 5 is a perspective view showing an assembled state of the leak sensing sensor assembly 200 according to the first embodiment of the present invention, and FIG. 6 is an exploded perspective view of the leak sensing sensor assembly 200 of FIG. The leak sensing sensor assembly 200 according to the present invention may include sensor body parts 210 and 220, a plate film 230, a moving contact part 240, a stationary contact part 260, and the like. In addition, the leak sensing sensor assembly 200 may include a connection port 280 formed at one side of the sensor body units 210 and 220 so that an external terminal can be connected thereto. Hereinafter, the configuration and operation thereof will be described in detail.
센서바디부(210, 220)는 앞서 설명된 리크의 검출을 위한 연통홀(154)을 갖는 배관 부품의 연통홀(154)에 체결될 수 있게 형성된다. 센서바디부는 연통홀(154)에 접하는 제1센서바디(210)와, 고정 접점부(260)가 설치되는 제2센서바디(220)를 가질 수 있다. 판막(230)은 제1센서바디(210)와 제2센서바디(220)의 사이에 배치된다.The sensor body portions 210 and 220 are formed so as to be fastened to the communication hole 154 of the piping component having the communication hole 154 for detection of the above-described leak. The sensor body portion may have a first sensor body 210 contacting the communication hole 154 and a second sensor body 220 having the fixed contact portion 260 installed thereon. The plate 230 is disposed between the first sensor body 210 and the second sensor body 220.
판막(230)은 배관 부품의 연통홀(154)을 밀폐시킬 수 있게 형성되어 있으며, 연통홀(154)의 압력의 변화에 따라 변형(deformation) 또는 변위(displacement) 가능하게 형성된다. 판막(230)은 고무, 실리콘 고무나 합성 수지 등에 의해 제조될 수 있다. 그러한 구체적인 예로서, 판막(230)은 기밀 특성 및 내구성이 우수한 불소 수지를 함유할 수 있다. 이러한 판막(230)은 센서바디부(210, 220)에 고정되어 연통홀(154)에 작용된 리크에 따른 압력의 변화(배관 부품이 진공시스템에 사용되는 경우 진공 압력(음압)을, 배관 부품이 대기압 이상의 압력을 사용하는 경우 양압을 말한다)에 따라 연통홀(154) 내부 방향으로 변형되거나 그 반대인 외부 방향으로 변형됨으로써 판막(230)에 부착된 이동 접점부(240)의 이동을 유도한다. 제1센서바디(210)에는 판막(230)의 안착을 위하여 판막 안착홈(211)이 형성될 수 있다.The valve plate 230 is formed so as to seal the communication hole 154 of the piping component and is formed to be capable of deformation or displacement in accordance with the change of the pressure of the communication hole 154. The plate film 230 may be made of rubber, silicone rubber, synthetic resin, or the like. As such a specific example, the valve film 230 may contain a fluororesin having excellent hermetic characteristics and durability. This valve film 230 is fixed to the sensor body portions 210 and 220 so that the pressure change due to the leakage acting on the communication hole 154 (vacuum pressure (negative pressure) when the piping component is used in a vacuum system, (Or positive pressure when the pressure above atmospheric pressure is used) is deformed toward the inside of the communication hole 154 or vice versa, thereby inducing movement of the moving contact portion 240 attached to the plate 230 . The first sensor body 210 may have a valve seat 211 for seating the valve 230 therein.
형상 면에서, 판막(230)은 얇은 막 형태로 형성된 막본체(231)와, 막본체(231)의 가장자리를 따라 형성된 링(ring) 형상부(232) 및, 막본체(231)의 중간부분의 외측에 돌출되게 형성된 결합돌기(233)를 포함할 수 있다. 결합돌기(233)에 이동 접점부(240)가 결합된다. 막본체(231)는 리크가 없는 상태에서는 탄성에 의하여 평평한 상태를 유지하고 진공 리크가 있는 경우 연통홀(154) 쪽으로 중심부분이 빨려 들어가듯이 변형되어 결합돌기(233) 및 이동 접점부(240)가 연통홀(154) 쪽으로 변위되도록 한다. 반대로 양압의 리크가 있는 경우 막본체(231)는 연통홀(154)의 반대 방향으로 변형되어(외측 방향으로 팽창하여) 결합돌기(233) 및 이동 접점부(240)가 연통홀(154)의 반대 쪽으로 변위되도록 한다.The plate 230 has a membrane body 231 formed in the form of a thin film, a ring shaped portion 232 formed along the edge of the membrane body 231, And an engaging protrusion 233 protruding from the outer side of the engaging protrusion 233. The movable contact portion 240 is engaged with the engaging projection 233. [ The membrane body 231 maintains a flat state due to elasticity in the absence of leakage and is deformed as the central portion is sucked toward the communication hole 154 when there is a vacuum leak so that the coupling protrusions 233 and the moving contact portion 240 are deformed, To be displaced toward the communication hole (154). Conversely, in the case of a positive pressure leak, the membrane body 231 is deformed in the direction opposite to the communication hole 154 (expanded in the outward direction) so that the engaging projection 233 and the moving contact portion 240 are in contact with the communication hole 154 To be displaced in the opposite direction.
링형상부(232)가 판막 안착홈(211)에 안착되면, 제1센서바디(210) 또는 제2센서바디(220)에 형성된 돌출 지지륜(212)에 의하여 막본체(231)가 팽팽하게 유지된다. 즉, 링형상부(232)는 제1센서바디(210)와 제2센서바디(220) 사이를 기밀하는 요소이고, 막본체(231)는 연통홀(154)을 향하는 내측 공간과 외측 공간을 차단하는 요소이나, 리크가 없는 경우 막본체(231)가 정상적인 위치를 계속해서 유지할 수 있도록 하는 것이 필요하며, 이를 위하여 돌출 지지륜(212)에 막본체(231)가 걸려짐으로써 팽팽하게 하는 것이다.When the ring-shaped upper part 232 is seated in the valve seat groove 211, the membrane body 231 is tightly held by the protruding support wheel 212 formed on the first sensor body 210 or the second sensor body 220 do. That is, the ring-shaped upper part 232 is an element sealing between the first sensor body 210 and the second sensor body 220, and the membrane body 231 blocks the inner space and the outer space toward the communication hole 154 It is necessary to keep the film main body 231 in a normal position in the case where there is no leakage. To this end, the film main body 231 is hooked on the protruding support wheel 212, so that the film main body 231 is tightened.
이동 접점부(240)는 도전성을 가지며, 결합돌기(233)에 구속되게 결합됨으로써 막본체(231)의 변형 또는 변위에 따라 이동이 가능하게 된다. 이동 접점부(240)는 판상으로 형성될 수 있으며, 이동 접점부(240)의 중간에는 관통홀(241)이 형성될 수 있다. 이동 접점부(240)가 결합돌기(233)에 걸려져 고정될 수 있도록, 결합돌기(233)에는 이탈방지턱(233a)이 형성될 수 있다. 관통홀(241)의 직경은 이탈방지턱(233a)의 직경보다. 작게 형성될 수 있다. 결합돌기(233)의 상단에는 관통홀(241)에 대한 삽입이 용이하도록 관통홀(241)의 직경보다. 작은 첨단부(234)가 형성될 수 있다. 이에 따라, 도 7의 (a)와 같이, 첨단부(234)를 통하여 이동 접점부(240)의 관통홀(241)이 삽입되면, 첨단부(234)를 약간 당긴다. 이렇게 하면 이탈방지턱(233a)이 수축되면서 관통홀(241)을 통과할 수 있게 되고 이탈방지턱(233a)에 의하여 이동 접점부(240)가 다시 걸려지게 된다. 이와 달리, 이동 접점부(240)는 결합돌기(233)에 삽입된 후 접착(접착제 또는 융착 등에 의하여 부착하는 방법을 말한다)에 의해 고정되는 것도 가능하다. 이와 같이, 이동 접점부(240)가 결합돌기(233)에 결합되면, 이동 접점부(240)는 판막(230)의 막본체(231)의 변형 또는 변위에 따라 결합돌기(233)의 돌출방향으로 이동하게 된다.The movable contact portion 240 has conductivity and is constrained to the coupling protrusion 233 so that the movable contact portion 240 can move according to the deformation or displacement of the film body 231. The movable contact portion 240 may be formed in a plate shape, and a through hole 241 may be formed in the middle of the movable contact portion 240. A separation protrusion 233a may be formed on the coupling protrusion 233 so that the movable contact portion 240 can be caught and fixed to the coupling protrusion 233. [ The diameter of the through hole 241 is smaller than the diameter of the separation preventing jaw 233a. It can be formed small. The upper end of the engaging projection 233 has a diameter larger than the diameter of the through hole 241 so as to be easily inserted into the through hole 241. A small tip portion 234 can be formed. 7 (a), when the through-hole 241 of the movable contact portion 240 is inserted through the tip portion 234, the tip portion 234 is slightly pulled. In this way, the separation preventing bust 233a is contracted and can pass through the through hole 241, and the moving bending portion 240 is again caught by the separation preventing bust 233a. Alternatively, the moving contact portion 240 may be fixed by a bonding (a method of adhering by adhesive, fusion, or the like) after being inserted into the coupling protrusion 233. When the movable contact portion 240 is coupled to the coupling protrusion 233 as described above, the movable contact portion 240 moves in the protruding direction of the coupling protrusion 233 in accordance with deformation or displacement of the film main body 231 of the plate film 230 .
고정 접점부(260)는 연통홀(154)에 리크가 없는 경우 이동 접점부(240)에 대하여 이격된 상태로 위치되고, 리크가 발생함으로써 판막(230)의 변형 또는 변위가 있는 경우 이동 접점부(240)가 접촉할 수 있도록 센서바디부에 고정되게 설치된다.The stationary contact portion 260 is spaced apart from the movable contact portion 240 when there is no leakage in the communication hole 154. When the plate 230 is deformed or displaced due to leakage, And is fixed to the sensor body portion so that the sensor body 240 can be contacted.
고정 접점부(260)는, 이동 접점부(240)의 일측에 위치되는 제1핀부(262)와, 이동 접점부(240)의 타측에 위치되는 제2핀부(263) 및, 제1핀부(262)와 제2핀부(263)를 일체로 연결하는 연결부(261)를 포함할 수 있다. 그에 따라 형상 면에서, 도 6과 같이, 고정 접점부(260)는 'F' 모양을 가질 수 있다.The stationary contact portion 260 includes a first fin portion 262 located at one side of the movable contact portion 240, a second fin portion 263 located at the other side of the movable contact portion 240, 262 and the second fin 263 integrally with each other. Accordingly, in the shape, the fixed contact portion 260 may have an 'F' shape as shown in FIG.
도 6 및 도 7과 같이, 고정 접점부(260A, 260B)는 한 쌍이 상호 평행하게 이격된 상태로 제2센서바디(220)에 고정될 수 있다. 제2센서바디(220)에는 고정 접점부(260A, 260B)가 설치되기 위한 통과홀(223)이 형성될 수 있다. 양 고정 접점부(260A, 260B)의 사이에는 좁은 공간부(265)가 형성된다. 배관 부품이 클램프인 경우, 폭이 좁고 그에 따라 설치공간의 제약을 많이 받는다. 그에 따라, 공간부(265) 역시 폭이 좁을 수 있다. 이를 위하여, 이동 접점부(240)는 한 쌍의 핀 형태로 형성된 고정 접접부(260A, 260B)의 사이에 짧은 폭 부분이 삽입된 후 돌려져 조립될 수 있게 장방형 또는 타원형으로 형성될 수 있다. 즉, 도 7의 (a)와 같이 판막(230)에 이동 접점부(240)를 고정한 상태에서 90도 돌려 (b)와 같이 이동 접점부(240)의 짧은 폭 부분이 양 고정 접점부(260A, 260B) 사이에 삽입되도록 하고, 다시 90도 돌려 (c)와 같이 배치를 정렬시킨다. 그에 따라 이동 접점부(240)의 양단은 고정 접점부(260)의 제1핀부(262)과 제2핀부(263) 사이에 위치된다. 마지막으로 제1센서바디(210)를 제2센서바디(220)에 맞추고 스크류(215)와 같은 화스너에 의해 대상이 되는 배관 부품에 고정시킨다.As shown in FIGS. 6 and 7, the fixed contact portions 260A and 260B may be fixed to the second sensor body 220 in a state where a pair of the fixed contact portions 260A and 260B are spaced apart from each other in parallel. The second sensor body 220 may be formed with a through hole 223 through which the stationary contact portions 260A and 260B are installed. A narrow space portion 265 is formed between the both fixed contact portions 260A and 260B. When the piping part is a clamp, the width is narrow and accordingly, installation space is limited. Accordingly, the space portion 265 may also be narrow. For this, the movable contact portion 240 may be formed in a rectangular or elliptical shape such that a short width portion is inserted between the fixed contact portions 260A and 260B formed in the form of a pair of pins, and then rotated and assembled. 7A, when the movable contact portion 240 is fixed to the plate 230, the movable contact portion 240 is rotated by 90 degrees so that the short width portion of the movable contact portion 240 contacts the both fixed contact portions 260A , And 260B, and turn it 90 degrees again to align the arrangement as shown in (c). Both ends of the movable contact portion 240 are positioned between the first fin portion 262 and the second fin portion 263 of the fixed contact portion 260. Finally, the first sensor body 210 is aligned with the second sensor body 220 and fixed to the piping component to be the object by the fastener such as the screw 215.
도 8은 본 발명과 관련된 리크감지 센서 어셈블리(200)의 단면도이고, 도 9는 도 8의 IX-IX선에 따른 단면도이며, 도 10은 본 발명과 관련된 리크감지 센서 어셈블리(200)의 작동상태를 설명하기 위한 단면도들로서, (a)는 내부에서 리크가 없는 상태이고, (b)는 내부에서 진공 리크가 있는 상태이며, (c)는 내부에서 양압 리크가 있는 상태를 각각 나타낸다.9 is a cross-sectional view taken along the line IX-IX in FIG. 8, and FIG. 10 is a sectional view taken along line IX-IX in FIG. 8, illustrating the operation state of the leak sensing sensor assembly 200 related to the present invention (A) is a state in which there is no leak in the interior, (b) is a state in which there is a vacuum leak inside, and (c) is a state in which there is a positive pressure leak in the interior.
이들 도면에 도시된 것과 같이, 배관 부품에 조립이 된 상태에서 판막(230)에 의해 그 하부 공간과 상부 공간이 차폐된다. 막본체(231)의 중간에 형성된 결합돌기(233)에 이동 접점부(240)가 고정되어 있으며, 이동 접점부(240)의 양단은 고정 접점부(260)의 제1핀부(262)과 제2핀부(263)의 사이에 위치된다. 도 10의 (a)와 같이, 배관 부품의 내부에서 리크가 없는 경우 이동 접점부(240)의 양단은 고정 접점부(260)의 제1핀부(262) 및 제2핀부(263)에 접촉되지 않는다. 만약, (b)와 같이 내부에서 진공 리크가 있는 경우 막본체(231)도 내부 방향으로 변형되고 그에 따라 이동 접점부(240)도 하방으로 변위된다. 그에 의해 이동 접점부(240)의 양단이 고정 접점부(260)의 양 제2핀부(263)에 각각 접촉하여 제1고정 접점부(260A)와 제2고정 접점부(260B)가 전기적으로 연결된다. 외부 단자를 통하여 접속한 외부의 장치 또는 서버에서 이와 같은 전기적 변화를 감지하여 리크를 알 수 있게 된다. 반대로, (c)와 같이 양압의 리크가 있는 경우, 이동 접점부(240)의 양단이 고정 접점부(260)의 양 제1핀부(262)에 각각 접촉하여 제1고정 접점부(260A)와 제2고정 접점부(260B)가 전기적으로 연결되어 리크 발생 여부를 외부에서 알 수 있게 된다.As shown in these drawings, the lower space and the upper space are shielded by the plate film 230 in a state of being assembled to the piping part. The movable contact portion 240 is fixed to the coupling protrusion 233 formed in the middle of the film main body 231 and both ends of the movable contact portion 240 are fixed to the first pin portion 262 of the fixed contact portion 260 and the movable contact portion 240, Two-pin portion 263. 10A, both ends of the movable contact portion 240 are in contact with the first fin portion 262 and the second fin portion 263 of the fixed contact portion 260 when there is no leak in the piping component Do not. If there is a vacuum leak from the inside as shown in (b), the membrane body 231 is also deformed inward and the moving contact part 240 is also displaced downward. Both ends of the movable contact portion 240 are brought into contact with the both second pin portions 263 of the fixed contact portion 260 so that the first fixed contact portion 260A and the second fixed contact portion 260B are electrically connected do. An external device or a server connected through an external terminal senses such an electrical change and can recognize the leak. Conversely, when there is a positive pressure leak as shown in (c), both ends of the movable contact portion 240 are in contact with the first pin portions 262 of the fixed contact portion 260, respectively, so that the first fixed contact portion 260A The second fixed contact portion 260B is electrically connected to allow the outside to know whether a leak has occurred.
이와 같이, 판막의 결합돌기(233)에 이동 접점부(240)를 고정한 상태로 두고 막본체(231)의 변위 또는 변형 작용에 의해 이동 접점부(240)가 이동되도록 함으로써 고정되어 있는 고정 접점부(260)를 통하여 배관 부품에서 발생하는 리크를 감지하는 것이다. 따라서, 리크감지 센서 어셈블리(200)가 대상이 되는 배관 부품의 어느 위치 또는 각도인지와 관계없이 안정적으로 감지 기능을 구현할 수 있으며, 유지 및 내구성 면에서도 우수하다.In this way, the movable contact portion 240 is fixed to the coupling projection 233 of the plate film, and the movable contact portion 240 is moved by the displacement or deformation of the film body 231, (Not shown). Accordingly, the leak sensing sensor assembly 200 can stably implement the sensing function irrespective of the position or angle of the piping component to be subjected, and is excellent in terms of maintenance and durability.
도 11은 본 발명과 관련된 다른 실시예에 따른 리크감지 센서 어셈블리(300)의 조립된 상태를 보인 사시도이고, 도 12는 도 11의 리크감지 센서 어셈블리(300)의 분해 사시도이며, 도 13은 도 11의 리크감지 센서 어셈블리(300)의 단면도이다.FIG. 11 is a perspective view showing an assembled state of the leak sensing sensor assembly 300 according to another embodiment of the present invention, FIG. 12 is an exploded perspective view of the leak sensing sensor assembly 300 of FIG. 11, 11 is a cross-sectional view of the leak detection sensor assembly 300 of FIG.
이들 도면에 도시된 것과 같이, 본 예의 리크감지 센서 어셈블리(300)는 제1센서바디(310)와 제2센서바디(321) 외에, 제3센서바디(322)를 갖는다. 제1센서바디(310)는 리크검출링(153)에 체결되는 요소이며, 제1센서바디(310)와 제2센서바디(321)의 사이에는 판막(330)과, 이동 접점부(340) 및 고정 접점부(360)가 설치된다. 제2센서바디(321)의 상부에는 제2센서바디(321)에 적층되어 제2센서바디(321)를 동시 가압할 수 있게 형성된 제3센서바디(322)가 설치된다. 절연을 위하여 제2센서바디(322)가 레진과 같은 재질로 형성될 경우 변형이나 변성의 여지가 있고, 그에 따라 이동 접점부(340)와 고정 접점부(360)의 안정적인 기능 구현을 저해할 수 있으므로, 제3센서바디(322)를 통하여 제2센서바디(321)를 견고하게 가압함으로써 이와 같은 문제를 해결할 수 있다.As shown in these drawings, the leak detection sensor assembly 300 of this embodiment has a third sensor body 322 in addition to the first sensor body 310 and the second sensor body 321. The first sensor body 310 is an element which is fastened to the leak detection ring 153 and a plate film 330 and a moving contact portion 340 are formed between the first sensor body 310 and the second sensor body 321, And a fixed contact portion 360 are provided. A third sensor body 322 is formed on the second sensor body 321 and is formed on the second sensor body 321 to press the second sensor body 321 at the same time. When the second sensor body 322 is formed of the same material as the resin for insulation, there is a possibility of deformation or denaturation, which may hinder the stable functioning of the movable contact portion 340 and the fixed contact portion 360 Therefore, this problem can be solved by firmly pressing the second sensor body 321 through the third sensor body 322.
또한, 제1센서바디(310)의 리크검출링(153)에 접하는 면은 내부의 유체 또는 배관으로부터 발생되는 열에 의하여 판막(330) 등이 열화될 수 있으므로, 리크검출링(153)에 접하는 부위에 열전달(heat transfer) 차단을 위한 언더컷(314)이 형성될 수 있다. 언더컷(314)은 리크검출링(153)과 제1센서바디(310)의 사이에 에어갭을 형성함으로써 열전도(heat conduction)를 최소화할 수 있다.The surface of the first sensor body 310 in contact with the leak detection ring 153 may deteriorate the plate 330 due to internal fluid or heat generated from the pipe, An undercut 314 for blocking heat transfer may be formed. The undercut 314 can minimize heat conduction by forming an air gap between the leak detection ring 153 and the first sensor body 310.
본 예의 고정 접점부(360)도, 이동 접점부(340)의 일측에 위치되는 제1핀부(362)와, 이동 접점부(340)의 타측에 위치되는 제2핀부(363) 및, 제1핀부(362)와 제2핀부(363)를 일체로 연결하는 연결부(361)를 포함할 수 있다. 다만, 도 13과 같이, 연결부(361)가 한 쌍으로 형성됨으로써 제1핀부(362)와 제2핀부(363)를 양쪽에서 고정하고 있는 형태이다. 그에 따라, 제1핀부(262)와 제2핀부(263)가 연결부(361)에 대하여 자유단(cantilever) 형태인 도 6의 예와 달리, 제1핀부(362)와 제2핀부(363) 사이의 간격을 일정하게 유지시킬 수 있다.The fixed contact portion 360 of this embodiment also includes a first fin portion 362 located on one side of the movable contact portion 340, a second fin portion 363 located on the other side of the movable contact portion 340, And a connection portion 361 for integrally connecting the fin portion 362 and the second fin portion 363. However, as shown in FIG. 13, the connection portions 361 are formed as a pair, so that the first fin portion 362 and the second fin portion 363 are fixed at both sides. 6 in which the first fin portion 262 and the second fin portion 263 are cantilevered with respect to the connection portion 361, the first fin portion 362 and the second fin portion 363, Can be kept constant.
상기와 같이 설명된 리크감지 센서 어셈블리는 설명된 실시예들의 구성과 방법이 한정되게 적용되지 않는다. 상기 실시예들은 다양한 변형이 이루어질 수 있도록 각 실시예들의 전부 또는 일부가 선택적으로 조합되어 구성될 수도 있다.The leak detection sensor assembly described above is not limitedly applied to the configuration and method of the illustrated embodiments. The embodiments may be configured so that all or some of the embodiments may be selectively combined so that various modifications may be made.
Claims (14)
- 리크의 검출을 위한 연통홀을 갖는 배관 부품의 상기 연통홀에 체결될 수 있게 형성된 센서바디부;A sensor body portion formed to be able to be fastened to the communication hole of a piping component having a communication hole for detecting a leak;상기 연통홀을 밀폐시킬 수 있게 형성되며, 리크에 의하여 상기 연통홀의 압력의 변화가 있는 경우 변형 또는 변위 가능하게 형성된, 판막;A valve membrane formed to be able to close the communication hole and deformable or displaceable when pressure of the communication hole changes due to leakage;상기 판막의 외측에 결합되며, 상기 판막의 변형 또는 변위에 따라 이동되는 도전성의 이동 접점부; 및A conductive moving contact part coupled to an outer side of the valve film and moving according to deformation or displacement of the valve film; And리크가 없는 경우 상기 이동 접점부에 대하여 이격되게 위치되고, 리크가 발생함으로써 상기 판막의 변형 또는 변위가 있는 경우 상기 이동 접점부가 접촉할 수 있도록, 상기 센서바디부에 설치되는 고정 접점부를 포함하는, 리크감지 센서 어셈블리.And a fixed contact portion provided on the sensor body portion so that the movable contact portion can be contacted when there is a deformation or a displacement of the valve film due to leakage, Leak detection sensor assembly.
- 제1항에 있어서,The method according to claim 1,외부 단자가 상기 고정 접점부에 접속 가능하도록 상기 센서바디부의 일측에 형성된 연결포트를 더 포함하는, 리크감지 센서 어셈블리.And a connection port formed on one side of the sensor body portion so that an external terminal can be connected to the fixed contact portion.
- 제1항에 있어서,The method according to claim 1,상기 센서바디부는,The sensor body may include:상기 연통홀에 접하는 제1센서바디; 및A first sensor body in contact with the communication hole; And상기 제1센서바디에 결합되며 상기 고정접점부가 고정되는 제2센서바디를 포함하고,And a second sensor body coupled to the first sensor body and to which the stationary contact portion is fixed,상기 판막은 상기 제1센서바디와 상기 제2센서바디 사이에 배치된, 리크감지 센서 어셈블리.Wherein the valve membrane is disposed between the first sensor body and the second sensor body.
- 제3항에 있어서,The method of claim 3,상기 센서바디부는,The sensor body may include:상기 제2센서바디에 적층되어 상기 제2센서바디를 동시 가압할 수 있게 형성된 제3센서바디를 더 포함하는, 리크감지 센서 어셈블리.And a third sensor body laminated on the second sensor body and configured to simultaneously pressurize the second sensor body.
- 제3항에 있어서,The method of claim 3,상기 제1센서바디부는 상기 배관 부품에 접하는 부위에 열전달 차단을 위한 언더컷을 포함하는, 리크감지 센서 어셈블리.Wherein the first sensor body portion includes an undercut for blocking heat transfer at a site in contact with the piping component.
- 제1항에 있어서,The method according to claim 1,상기 판막은,The valve plate may be formed,막본체;A membrane body;상기 막본체의 가장자리를 따라 형성된 링(ring) 형상부; 및A ring-shaped portion formed along an edge of the membrane body; And상기 막본체의 중간 부분의 외측에 돌출되게 형성되며, 상기 이동 접점부가 결합될 수 있게 형성된 결합돌기를 포함하는, 리크감지 센서 어셈블리.And a coupling protrusion formed to protrude outward from an intermediate portion of the membrane body, the coupling protrusion being formed such that the moving contact portion can be engaged.
- 제6항에 있어서,The method according to claim 6,상기 이동 접점부에 관통홀이 형성되고,A through hole is formed in the moving contact portion,상기 결합돌기에 상기 이동 접점부가 상기 관통홀을 통하여 삽입된 후 걸려질 수 있게 이탈방지턱이 형성된, 리크감지 센서 어셈블리.And a separation protrusion is formed on the coupling protrusion such that the moving contact portion can be engaged after the insertion through the through hole.
- 제6항에 있어서,The method according to claim 6,상기 이동 접점부에 관통홀이 형성되고,A through hole is formed in the moving contact portion,상기 관통홀이 상기 결합돌기에 삽입된 후 접착에 의하여 고정된, 리크감지 센서 어셈블리.And the through hole is inserted into the coupling protrusion and is fixed by adhesion.
- 제1항에 있어서,The method according to claim 1,상기 판막은 고무 또는 실리콘 고무에 의해 형성된, 리크감지 센서 어셈블리.Wherein the valve membrane is formed by rubber or silicone rubber.
- 제1항에 있어서,The method according to claim 1,상기 이동 접점부는 플레이트 형태로 형성된, 리크감지 센서 어셈블리.Wherein the movable contact portion is formed in a plate shape.
- 제1항에 있어서,The method according to claim 1,상기 고정 접점부는 한 쌍이 평행하게 이격된 형태로 형성된, 리크감지 센서 어셈블리.Wherein the fixed contact portions are formed in a shape such that a pair of the fixed contact portions are spaced apart in parallel.
- 제11항에 있어서,12. The method of claim 11,상기 이동 접점부는 장방형 또는 타원형으로 형성된, 리크감지 센서 어셈블리.Wherein the movable contact portion is formed into a rectangular shape or an elliptical shape.
- 제11항에 있어서,12. The method of claim 11,상기 고정 접점부는,Wherein the fixed contact portion includes:상기 이동 접점부의 일측에 위치되는 제1핀부;A first fin portion located on one side of the moving contact portion;상기 이동 접점부의 타측에 위치되는 제2핀부; 및A second fin portion located on the other side of the moving contact portion; And상기 제1핀부와 상기 제2핀부를 일체로 연결하는 연결부를 포함하는, 리크감지 센서 어셈블리.And a connecting portion integrally connecting the first fin portion and the second fin portion.
- 제1항에 있어서,The method according to claim 1,상기 배관 부품은 클램프 또는 아이솔레이션 밸브인, 리크감지 센서 어셈블리.Wherein said piping component is a clamp or isolation valve.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2017-0113211 | 2017-09-05 | ||
KR1020170113211A KR102062747B1 (en) | 2017-09-05 | 2017-09-05 | Leak sensor assembly |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2019050148A1 true WO2019050148A1 (en) | 2019-03-14 |
Family
ID=65634330
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2018/007987 WO2019050148A1 (en) | 2017-09-05 | 2018-07-13 | Leak-detecting sensor assembly |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR102062747B1 (en) |
WO (1) | WO2019050148A1 (en) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08145153A (en) * | 1994-11-18 | 1996-06-04 | Hino Motors Ltd | Transmission |
JP2002250668A (en) * | 2001-02-26 | 2002-09-06 | Hajime:Kk | Liquid leak detector |
KR20030010292A (en) * | 2001-07-26 | 2003-02-05 | 린나이코리아 주식회사 | Blast switch |
KR20090020064A (en) * | 2007-08-22 | 2009-02-26 | 윤영수 | Device for sensing flow of fluid |
KR20140018239A (en) * | 2011-01-21 | 2014-02-12 | 이턴 코포레이션 | Isolation valve with integrated sensor |
KR20180097862A (en) * | 2017-02-24 | 2018-09-03 | 이동민 | Leak sensor assembly |
-
2017
- 2017-09-05 KR KR1020170113211A patent/KR102062747B1/en active IP Right Grant
-
2018
- 2018-07-13 WO PCT/KR2018/007987 patent/WO2019050148A1/en active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08145153A (en) * | 1994-11-18 | 1996-06-04 | Hino Motors Ltd | Transmission |
JP2002250668A (en) * | 2001-02-26 | 2002-09-06 | Hajime:Kk | Liquid leak detector |
KR20030010292A (en) * | 2001-07-26 | 2003-02-05 | 린나이코리아 주식회사 | Blast switch |
KR20090020064A (en) * | 2007-08-22 | 2009-02-26 | 윤영수 | Device for sensing flow of fluid |
KR20140018239A (en) * | 2011-01-21 | 2014-02-12 | 이턴 코포레이션 | Isolation valve with integrated sensor |
KR20180097862A (en) * | 2017-02-24 | 2018-09-03 | 이동민 | Leak sensor assembly |
Also Published As
Publication number | Publication date |
---|---|
KR102062747B1 (en) | 2020-01-06 |
KR20190026386A (en) | 2019-03-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2013048039A2 (en) | Pipe connector assembly and method for connecting a pipe using same | |
US7650055B2 (en) | Terminal with internal environmental seal | |
WO2019027082A1 (en) | Union | |
KR101955606B1 (en) | Pipe clamp | |
KR20070026878A (en) | Connecting arrangement and contact fin | |
US5000491A (en) | Means for hose clamp replacement | |
WO2018105877A1 (en) | One-touch pipe connecting apparatus | |
WO2013019009A2 (en) | Pipe connection apparatus | |
WO2009145487A2 (en) | Connector for piping | |
WO2017126813A1 (en) | Pipe connecting assembly | |
KR101955607B1 (en) | Leak sensor assembly | |
WO2019050148A1 (en) | Leak-detecting sensor assembly | |
WO2017160000A1 (en) | Gasket | |
KR101997107B1 (en) | Leak detectable isolation valve for vacuum process | |
WO2022025513A1 (en) | Plug valve hard seal on cylindrical wall | |
KR20100130946A (en) | Tight seal construction | |
US5942691A (en) | Differential pressure transducer assembly | |
WO2023167451A1 (en) | Screw-type vent | |
WO2020242001A1 (en) | Joint pipe having one-touch coupling structure and release prevention structure | |
WO2019151627A1 (en) | Venting device for a battery system | |
KR20240047673A (en) | Leak detection sensor that electrically detects whether leak occurs by contact of conductive moving contact part in vacuum system for semiconductor manufacturing | |
EP2273174A2 (en) | Compression seal | |
WO2020077754A1 (en) | System for introducing gas into vacuum chamber | |
WO2020179991A1 (en) | Electrode terminal assembly for liquid quality meter apparatus and liquid quality meter apparatus comprising same | |
US20210190612A1 (en) | Sealing device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 18855071 Country of ref document: EP Kind code of ref document: A1 |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 18855071 Country of ref document: EP Kind code of ref document: A1 |