WO2018211635A1 - 半導体パッケージ - Google Patents

半導体パッケージ Download PDF

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Publication number
WO2018211635A1
WO2018211635A1 PCT/JP2017/018567 JP2017018567W WO2018211635A1 WO 2018211635 A1 WO2018211635 A1 WO 2018211635A1 JP 2017018567 W JP2017018567 W JP 2017018567W WO 2018211635 A1 WO2018211635 A1 WO 2018211635A1
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Prior art keywords
line
frequency signal
signal line
semiconductor package
stem
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PCT/JP2017/018567
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English (en)
French (fr)
Inventor
和久 高木
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三菱電機株式会社
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Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to CN201780090706.3A priority Critical patent/CN110612645B/zh
Priority to JP2019518676A priority patent/JP6708306B2/ja
Priority to PCT/JP2017/018567 priority patent/WO2018211635A1/ja
Priority to US16/474,753 priority patent/US10903619B2/en
Publication of WO2018211635A1 publication Critical patent/WO2018211635A1/ja

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    • H—ELECTRICITY
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    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
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    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
    • H01S5/06226—Modulation at ultra-high frequencies
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    • G—PHYSICS
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Definitions

  • the present invention relates to a semiconductor package.
  • a monolithically integrated semiconductor element In a monolithically integrated semiconductor element, four distributed feedback semiconductor lasers and four electroabsorption optical modulators having different wavelengths are integrated on an n-type InP substrate.
  • the optical output from each modulator passes through a curved waveguide, is multiplexed by an MMI (Multi Mode Interferometer) multiplexer, and is output from the end face of the single waveguide.
  • MMI Multi Mode Interferometer
  • a waveguide type monitor PD is integrated behind the laser.
  • the size can be reduced as compared with the structure in which four existing single channel elements are arranged.
  • the number of optical components such as an optical multiplexer can be reduced. For this reason, the optical axis adjustment in the manufacturing process is simplified, and a product can be provided at a low cost.
  • the present invention has been made to solve the above-described problems, and its object is to supply a high-frequency signal to a plurality of modulators in a state where crosstalk is small, and to suppress an increase in the number of lead pins.
  • the semiconductor package which can be obtained is obtained.
  • a semiconductor package includes a stem, a multi-wavelength integrated element that is mounted on the stem, includes a plurality of semiconductor lasers, and a plurality of modulators that respectively modulate output light of the plurality of semiconductor lasers, and the stem And a plurality of leads respectively connected to the plurality of semiconductor lasers and the plurality of modulators, and each lead is a coaxial line in which a plurality of layers are concentrically overlapped, A high-frequency signal line that transmits a high-frequency signal to the modulator; a GND line; and a power supply line that feeds a direct current to the semiconductor laser, wherein the high-frequency signal line is disposed in the center of the coaxial line, and the GND line The power supply line is disposed outside the high-frequency signal line.
  • each lead is a coaxial line in which a plurality of layers are concentrically overlapped.
  • the high frequency signal line is arranged at the center of the coaxial line, and the GND line is arranged outside the high frequency signal line.
  • the high frequency signal can be supplied to a plurality of modulators with a small crosstalk.
  • FIG. 1 is a side view showing a semiconductor package according to Embodiment 1 of the present invention.
  • FIG. 2 is a top view showing the semiconductor package according to the first embodiment of the present invention.
  • This semiconductor package is a TO-CAN package on which a multi-wavelength integrated EML used for a light source for 100 Gb / s CWDM transmission is mounted.
  • a Peltier element 2 is provided on a stem body 1 of a circular flat plate.
  • a submount mounting portion 3 is provided on the Peltier element 2.
  • a submount 4 is mounted on the submount mounting portion 3.
  • the multi-wavelength integrated element 5 is mounted on the submount 4.
  • the Peltier device 2 controls the temperature of the multi-wavelength integrated device 5.
  • the multi-wavelength integrated element 5 includes four semiconductor lasers 6, four modulators 7 that respectively modulate the output lights of the four semiconductor lasers 6, and a multiplexer 8 that combines the output lights of the four modulators 7. It has four monitor photodiodes 9 for monitoring the four semiconductor lasers 6 respectively.
  • Four leads 10 penetrate the stem body 1 and are wire-connected to the four semiconductor lasers 6, the modulator 7, and the monitor photodiode 9, respectively.
  • a termination resistor 11 is connected to the modulator 7.
  • FIG. 3 is a cross-sectional view showing the lead according to Embodiment 1 of the present invention.
  • FIG. 4 is a longitudinal sectional view showing the lead according to Embodiment 1 of the present invention.
  • Each lead 10 is a coaxial line in which a plurality of layers are concentrically overlapped. As the coaxial line, the high-frequency signal line 12, the insulator 13, the GND line 14, the insulator 15, the feeder line 16, the insulator 17, the feeder line 18, and the insulator 19 are sequentially arranged from the center toward the outside. .
  • the high frequency signal line 12 transmits a high frequency signal to the modulator 7.
  • the power supply line 16 supplies a direct current to the semiconductor laser 6.
  • the power supply line 18 supplies a direct current to the monitor photodiode 9.
  • the high frequency signal line 12 is disposed at the center of the coaxial line.
  • the GND line 14 and the power supply lines 16 and 18 are disposed outside the high-frequency signal line 12.
  • the DC GND line 14 and the power supply lines 16 and 18 are in no particular order.
  • the insulators 15, 17, and 19 have a high dielectric constant so that high-frequency signals do not overlap the DC GND line 14 and the power supply lines 16 and 18.
  • the relative dielectric constant of the insulator 13 needs to be 3.7.
  • SiO 2 having a relative dielectric constant of 3.9, alumina having a relative dielectric constant of 3.8, or the like is used as the insulator 13 .
  • the values of d, D, and ⁇ and the selection of the material of the insulator 13 are design matters and do not limit the scope of the present invention.
  • each lead 10 is a coaxial line in which a plurality of layers are concentrically overlapped.
  • the high frequency signal line 12 is disposed at the center of the coaxial line, and the GND line 14 is disposed outside the high frequency signal line 12. Thereby, since the high frequency signal line 12 is shielded by the GND line 14, the high frequency signal can be supplied to the plurality of modulators 7 with a small crosstalk.
  • the insulators 13, 15, and 17 that insulate the high-frequency signal line 12, the GND line 14, and the power supply lines 16 and 18 from each other are plastic materials such as polyethylene. Thereby, each lead 10 is easy to handle such as bending.
  • the insulator 19 of the part joined with the stem main body 1 of a coaxial line is insulating glass. Thereby, a problem does not arise in the airtightness when CAN is connected to the stem body 1.
  • a conductor other than the high-frequency signal line 12 of the coaxial line may be a spirally wound metal plate having a width of 1 mm or less. This increases the flexibility of the coaxial lead and facilitates handling such as bending.
  • FIG. FIG. 5 is a side view showing a semiconductor package according to Embodiment 2 of the present invention.
  • FIG. 6 is a top view showing a semiconductor package according to the second embodiment of the present invention.
  • FIG. 7 is a cross-sectional view showing a lead according to Embodiment 2 of the present invention.
  • FIG. 8 is a longitudinal sectional view showing a lead according to Embodiment 2 of the present invention.
  • a coaxial line of each lead 10 As a coaxial line of each lead 10, a high-frequency signal line 12, an insulator 13, a power supply line 16, an insulator 17, a power supply line 18, an insulator 15, and a GND line 14 are sequentially arranged from the center toward the outside. .
  • Other configurations are the same as those of the first embodiment, and the same effects as those of the first embodiment can be obtained.
  • the DC power supply lines 16 and 18 are in no particular order.
  • the GND line 14 is disposed on the outermost periphery of the coaxial line. Since the stem body 1 is also GND, it is not necessary to interpose an insulating film between the lead 10 and the stem body 1, and the airtightness of the CAN package is improved.
  • the four-wavelength EML elements are integrated in the first and second embodiments, it is sufficient that two or more EML elements are integrated, and the same effects as in the first and second embodiments are obtained regardless of the number of elements to be integrated. Is obtained.

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Abstract

ステム（１）に、複数の半導体レーザ（６）と、複数の半導体レーザ（６）の出力光をそれぞれ変調する複数の変調器（７）とを有する多波長集積素子（５）が実装されている。複数のリード（１０）がステム（１）を貫通し、複数の半導体レーザ（６）及び複数の変調器（７）にそれぞれ接続されている。各リード（１０）は、複数層が同心円状に重なった同軸線路である。同軸線路は、変調器（７）に高周波信号を伝送する高周波信号ライン（１２）と、ＧＮＤライン（１４）と、半導体レーザ（６）に直流電流を給電する給電ライン（１６）とを有する。高周波信号ライン（１２）は同軸線路の中央に配置されている。ＧＮＤライン（１４）及び給電ライン（１６）は高周波信号ライン（１２）の外側に配置されている。

Description

半導体パッケージ
　本発明は、半導体パッケージに関する。
　モノリシック集積化半導体素子では、ｎ型ＩｎＰ基板上に、波長の互いに異なる４つの分布帰還型半導体レーザと４つの電界吸収型光変調器が集積されている。各変調器からの光出力は曲がり導波路を経てＭＭＩ（Multi Mode Interferometer）合波器により合波され、単一導波路の端面から出力される。レーザの背後には、導波路型のモニタＰＤが集積されている。
　このように複数の機能素子を集積することで、既存のシングルチャネルの素子を４個配列した構造よりも小型化できる。また、光合波器などの光学部品の数を削減できる。このため、製造工程における光軸調整が簡易になり、安価に製品を提供できる。
　従来の多波長集積ＥＭＬ(Electro-absorption Modulated Laser diode)は、箱型のパッケージに搭載されており、シングルチャネルのＥＭＬパッケージと比較し大型である（例えば、非特許文献１参照）。このため、多波長のＥＭＬを集積したモノリシック形素子の小型化の利点を得られないという問題があった。一方で、シングルチャネル用のＥＭＬでは、箱形から、サイズの小さいＣＡＮパッケージへの移行が進んでいる（例えば、特許文献１）。
特許第５１８８６７５号公報
ＮＴＴ技術ジャーナル　２０１２－１０　ｐ５３
　多波長ＥＭＬ素子をＣＡＮパッケージに実装する場合、複数のＥＭＬに高周波信号をクロストークが小さい状態で供給するには、各変調器に対して単一のリードピンを使用することができなかった。ＤＣ電圧／電流を複数のＥＭＬに供給するためには、現状のＬＤ電流源、モニタＰＤへの電圧源、ペルチェ素子への電流源のリード線３本に加えて、集積数分のＬＤ電流源、モニタＰＤへの電圧源用リードピンが必要であった。従って、ＣＡＮパッケージがリードピン数の増加により肥大化するため、小型化が困難であるという問題があった。
　本発明は、上述のような課題を解決するためになされたもので、その目的は複数の変調器に高周波信号をクロストークが小さい状態で供給することができ、リードピン数の増加を抑制することができる半導体パッケージを得るものである。
　本発明に係る半導体パッケージは、ステムと、前記ステムに実装され、複数の半導体レーザと、前記複数の半導体レーザの出力光をそれぞれ変調する複数の変調器とを有する多波長集積素子と、前記ステムを貫通し、前記複数の半導体レーザ及び前記複数の変調器にそれぞれ接続された複数のリードとを備え、各リードは、複数層が同心円状に重なった同軸線路であり、前記同軸線路は、前記変調器に高周波信号を伝送する高周波信号ラインと、ＧＮＤラインと、前記半導体レーザに直流電流を給電する給電ラインとを有し、前記高周波信号ラインは前記同軸線路の中央に配置され、前記ＧＮＤライン及び前記給電ラインは前記高周波信号ラインの外側に配置されていることを特徴とする。
　本発明では、各リードは複数層が同心円状に重なった同軸線路である。これにより、信号ライン、ＧＮＤライン、給電ラインごとに別個のリードピンを設ける必要が無いため、リードピン数の増加を抑制することができる。また、高周波信号ラインは同軸線路の中央に配置され、ＧＮＤラインは高周波信号ラインの外側に配置されている。これにより、高周波信号ラインはＧＮＤラインによりシールドされるため、複数の変調器に高周波信号をクロストークが小さい状態で供給することができる。
本発明の実施の形態１に係る半導体パッケージを示す側面図である。 本発明の実施の形態１に係る半導体パッケージを示す上面図である。 本発明の実施の形態１に係るリードを示す横断面図である。 本発明の実施の形態１に係るリードを示す縦断面図である。 本発明の実施の形態２に係る半導体パッケージを示す側面図である。 本発明の実施の形態２に係る半導体パッケージを示す上面図である。 本発明の実施の形態２に係るリードを示す横断面図である。 本発明の実施の形態２に係るリードを示す縦断面図である。
　本発明の実施の形態に係る半導体パッケージについて図面を参照して説明する。同じ又は対応する構成要素には同じ符号を付し、説明の繰り返しを省略する場合がある。
実施の形態１．
　図１は、本発明の実施の形態１に係る半導体パッケージを示す側面図である。図２は、本発明の実施の形態１に係る半導体パッケージを示す上面図である。この半導体パッケージは、１００Ｇｂ／ｓのＣＷＤＭ伝送用光源などに使用される多波長集積ＥＭＬを実装したＴＯ－ＣＡＮパッケージである。
　円形平板のステム本体１の上にペルチェ素子２が設けられている。ペルチェ素子２の上にサブマウント搭載部３が設けられている。サブマウント搭載部３にサブマウント４が搭載されている。
　サブマウント４に多波長集積素子５が実装されている。ペルチェ素子２は多波長集積素子５の温度を制御する。多波長集積素子５は、４つの半導体レーザ６と、４つの半導体レーザ６の出力光をそれぞれ変調する４つの変調器７と、４つの変調器７の出力光を合波する合波器８と、４つの半導体レーザ６をそれぞれモニタする４つのモニタフォトダイオード９とを有する。４つのリード１０がステム本体１を貫通し、４つの半導体レーザ６、変調器７及びモニタフォトダイオード９にそれぞれワイヤ接続されている。変調器７に終端抵抗１１が接続されている。
　図３は、本発明の実施の形態１に係るリードを示す横断面図である。図４は、本発明の実施の形態１に係るリードを示す縦断面図である。各リード１０は、複数層が同心円状に重なった同軸線路である。同軸線路として、中央から外側に向かって、高周波信号ライン１２、絶縁体１３、ＧＮＤライン１４、絶縁体１５、給電ライン１６、絶縁体１７、給電ライン１８、及び絶縁体１９が順に配置されている。
　高周波信号ライン１２は変調器７に高周波信号を伝送する。給電ライン１６は半導体レーザ６に直流電流を給電する。給電ライン１８はモニタフォトダイオード９に直流電流を給電する。高周波信号ライン１２は同軸線路の中央に配置されている。ＧＮＤライン１４及び給電ライン１６，１８は高周波信号ライン１２の外側に配置されている。ＤＣのＧＮＤライン１４及び給電ライン１６，１８は順不同である。
　同軸線路のインピーダンスを所望の値にするためには、絶縁体１３の誘電率を適切に選択する必要があるが、絶縁体１５，１７，１９の誘電率に制約は無い。ただし、高周波信号がＤＣのＧＮＤライン１４及び給電ライン１６，１８に重畳しないようにするためには、絶縁体１５，１７，１９は高誘電率であることが好ましい。
　例えば高周波信号ライン１２のインピーダンスが５０Ωになるように、高周波信号ライン１２の直径ｄ、絶縁体１３の外周径Ｄ、比誘電率εの値を設計する必要が有る。同軸線路のインピーダンスＺは近似的にＺ＝１３８／√ε＊ｌｏｇ１０（Ｄ／ｄ）で表される。例えばｄを１００μｍ、Ｄを５００μｍとすると、絶縁体１３の比誘電率は３．７である必要がある。この場合、絶縁体１３として、比誘電率３．９のＳｉＯ２、比誘電率３．８のアルミナなどを用いる。なお、ｄ、Ｄ、εの値及び絶縁体１３の材料の選定は設計事項であり、本発明の範囲を限定するものではない。
　以上説明したように、本実施の形態では、各リード１０は複数層が同心円状に重なった同軸線路である。これにより、信号ライン、ＧＮＤライン、給電ラインごとに別個のリードピンを設ける必要が無いため、リードピン数の増加を抑制することができる。また、高周波信号ライン１２は同軸線路の中央に配置され、ＧＮＤライン１４は高周波信号ライン１２の外側に配置されている。これにより、高周波信号ライン１２はＧＮＤライン１４によりシールドされるため、複数の変調器７に高周波信号をクロストークが小さい状態で供給することができる。
　また、高周波信号ライン１２とＧＮＤライン１４と給電ライン１６，１８を互いに絶縁する絶縁体１３，１５，１７は、ポリエチレンなどの可塑性材料である。これにより、各リード１０は曲げるなどの取扱いが容易である。また、同軸線路のステム本体１と接合される部分の絶縁体１９は絶縁ガラスである。これにより、ステム本体１にＣＡＮを接続した場合の気密性に問題は生じない。
　また、同軸線路の高周波信号ライン１２以外の導体を、幅１ｍｍ以下の金属板をらせん状に巻きつけたものとしてもよい。これにより、同軸リードの柔軟性が増し、曲げるなどの取扱いが容易となる。
実施の形態２．
　図５は、本発明の実施の形態２に係る半導体パッケージを示す側面図である。図６は、本発明の実施の形態２に係る半導体パッケージを示す上面図である。図７は、本発明の実施の形態２に係るリードを示す横断面図である。図８は、本発明の実施の形態２に係るリードを示す縦断面図である。
　各リード１０の同軸線路として、中央から外側に向かって、高周波信号ライン１２、絶縁体１３、給電ライン１６、絶縁体１７、給電ライン１８、絶縁体１５、及びＧＮＤライン１４が順に配置されている。その他の構成は実施の形態１と同様であり、実施の形態１と同様の効果が得られる。ＤＣの給電ライン１６，１８は順不同である。
　本実施の形態では、ＧＮＤライン１４が同軸線路の最外周に配置されている。ステム本体１もＧＮＤであるため、リード１０とステム本体１の間に絶縁膜を介在させる必要が無くなり、ＣＡＮパッケージの気密性が向上する。
　なお、実施の形態１、２では４波長のＥＭＬ素子を集積したが、２個以上のＥＭＬ素子を集積すればよく、集積される素子数に依らず、実施の形態１、２と同等の効果が得られる。
１　ステム、５　多波長集積素子、６　半導体レーザ、７　変調器、９　モニタフォトダイオード、１０　リード、１２　高周波信号ライン、１３，１５，１７，１９　絶縁体、１４　ＧＮＤライン、１６，１８　給電ライン

Claims (5)

  1. 　ステムと、
    　前記ステムに実装され、複数の半導体レーザと、前記複数の半導体レーザの出力光をそれぞれ変調する複数の変調器とを有する多波長集積素子と、
    　前記ステムを貫通し、前記複数の半導体レーザ及び前記複数の変調器にそれぞれ接続された複数のリードとを備え、
    　各リードは、複数層が同心円状に重なった同軸線路であり、
    　前記同軸線路は、前記変調器に高周波信号を伝送する高周波信号ラインと、ＧＮＤラインと、前記半導体レーザに直流電流を給電する給電ラインとを有し、
    　前記高周波信号ラインは前記同軸線路の中央に配置され、
    　前記ＧＮＤライン及び前記給電ラインは前記高周波信号ラインの外側に配置されていることを特徴とする半導体パッケージ。
  2. 　前記同軸線路は、前記高周波信号ラインと前記ＧＮＤラインと前記給電ラインを互いに絶縁する可塑性材料と、前記ステムと接合される絶縁ガラスとを更に有することを特徴とする請求項１に記載の半導体パッケージ。
  3. 　前記ＧＮＤラインは、前記同軸線路の最外周に配置されていることを特徴とする請求項１に記載の半導体パッケージ。
  4. 　前記半導体レーザをモニタするモニタフォトダイオードを更に備え、
    　前記同軸線路は、前記高周波信号ラインの外側に配置され前記モニタフォトダイオードに直流電流を給電する給電ラインを更に有することを特徴とする請求項１～３の何れか１項に記載の半導体パッケージ。
  5. 　前記同軸線路の前記高周波信号ライン以外の導体は、金属板をらせん状に巻きつけたものであることを特徴とする請求項１～４の何れか１項に記載の半導体パッケージ。
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