WO2018209611A1 - Replacement device - Google Patents
Replacement device Download PDFInfo
- Publication number
- WO2018209611A1 WO2018209611A1 PCT/CN2017/084765 CN2017084765W WO2018209611A1 WO 2018209611 A1 WO2018209611 A1 WO 2018209611A1 CN 2017084765 W CN2017084765 W CN 2017084765W WO 2018209611 A1 WO2018209611 A1 WO 2018209611A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- reticle
- carrying
- gripping
- detecting unit
- replacement
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J5/00—Manipulators mounted on wheels or on carriages
- B25J5/02—Manipulators mounted on wheels or on carriages travelling along a guideway
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
Definitions
- the present invention relates to automation technology, and more particularly to a replacement device.
- FIG. 9 is a schematic block diagram of a grasping device according to an embodiment of the present invention.
- the reticle 800 refers to a graphic master used in a lithography process in the field of microelectronics fabrication, which is obtained by forming a mask pattern on a transparent substrate through an opaque light-shielding film.
- reticle 800 may also be referred to as a photomask.
- the replacement device 100 includes an information recognition device 40.
- the information recognition device 40 is used to identify the reticle 800 and obtain information of the reticle 800, and the information of the reticle 800 is used to assist the grasping device 30 in grasping the reticle 800.
- the gripping device 30 includes a grip detection unit 36 for acquiring the position of the gripping member 34 .
- the grip detecting unit 36 can acquire the position of the gripping member 34, in combination with the position of the housing device acquired by the other detecting unit, so that the replacing device 100 can control the gripping member 34 to move to the position where it is normally operated.
- portions of the invention may be implemented in hardware, software, firmware or a combination thereof.
- multiple steps or methods may be performed by software or firmware stored in a memory and executed by a suitable instruction execution system.
- a suitable instruction execution system For example, if executed in hardware, as in another embodiment, it can be performed by any one of the following techniques or combinations thereof known in the art: having logic gates for performing logic functions on data signals Discrete logic circuits, application specific integrated circuits with suitable combinational logic gates, programmable gate arrays (PGAs), field programmable gate arrays (FPGAs), etc.
- the above mentioned storage medium may be a read only memory, a magnetic disk or an optical disk or the like.
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
A replacement device (100) used for replacing a photomask (800) from a first accommodation device (920) to a second accommodation device (940). The replacement device (100) comprises a first carrying device (10), a second carrying device (20), and a gripping device (30). The first carrying device (10) is used for carrying the first accommodation device (920), and the photomask (800) is accommodated in the first accommodation device (920). The second carrying device (20) is used for carrying th second accommodation device (940). The gripping device (30) is used for gripping the photomask (800) in the first accommodation device (920) and is used for placing the photomask (800) into the second accommodation device (940).
Description
本发明涉及自动化技术，特别涉及一种更换装置。The present invention relates to automation technology, and more particularly to a replacement device.
在相关技术中，光罩的更换和清洁需要人工来完成，从而消耗人力资源并且工作效率低。此外，人工更换光罩容易对光罩造成损坏或污染。In the related art, replacement and cleaning of the reticle need to be done manually, thereby consuming human resources and being inefficient. In addition, manual replacement of the reticle is likely to cause damage or contamination to the reticle.
发明内容Summary of the invention
本发明的实施方式提供一种更换装置，其用于更换光罩。Embodiments of the present invention provide a replacement device for replacing a reticle.
本发明实施方式提供的一种更换装置，用于将光罩从第一收纳装置更换到第二收纳装置，所述更换装置包括：The embodiment of the present invention provides a replacement device for replacing a photomask from a first storage device to a second storage device, the replacement device comprising:
第一承载装置，所述第一承载装置用于承载所述第一收纳装置，所述第一收纳装置收纳有所述光罩；a first carrying device, the first carrying device is configured to carry the first receiving device, and the first receiving device houses the photomask;
第二承载装置，所述第二承载装置用于承载所述第二收纳装置；和a second carrying device for carrying the second receiving device; and
抓取装置，所述抓取装置用于抓取所述第一收纳装置中的所述光罩并用于将所述光罩放置到所述第二收纳装置中。A gripping device for gripping the reticle in the first accommodating device and for placing the reticle into the second accommodating device.
本发明实施方式的更换装置可自动更换光罩的收纳装置，从而减少不必要的人力消耗，并且可以避免或减少光罩受到人为损坏或污染。The replacing device of the embodiment of the present invention can automatically replace the accommodating device of the reticle, thereby reducing unnecessary human consumption, and can avoid or reduce the hood from being damaged or contaminated by humans.
本发明的实施方式的附加方面和优点将在下面的描述中部分给出，部分将从下面的描述中变得明显，或通过本发明的实施方式的实践了解到。The additional aspects and advantages of the embodiments of the present invention will be set forth in part in the description which follows.
本发明的上述和/或附加的方面和优点从结合下面附图对实施方式的描述中将变得明显和容易理解，其中：The above and/or additional aspects and advantages of the present invention will become apparent and readily understood from
图1是本发明实施方式的更换装置的立体示意图；1 is a perspective view of a replacement device according to an embodiment of the present invention;
图2是本发明实施方式的第一收纳装置、第二收纳装置和光罩的模块示意图；2 is a schematic block diagram of a first storage device, a second storage device, and a reticle according to an embodiment of the present invention;
图3是本发明实施方式的更换装置的模块示意图；3 is a schematic block diagram of a replacement device according to an embodiment of the present invention;
图4是本发明实施方式的更换装置的主视图；Figure 4 is a front elevational view of the exchange device of the embodiment of the present invention;
图5是本发明实施方式的更换装置的俯视图；Figure 5 is a plan view of a replacement device according to an embodiment of the present invention;
图6是本发明实施方式的承载部件的模块示意图；
6 is a schematic block diagram of a carrier member according to an embodiment of the present invention;
图7是本发明实施方式的第一承载装置的模块示意图；7 is a schematic block diagram of a first carrying device according to an embodiment of the present invention;
图8是本发明实施方式的更换装置的另一个模块示意图；8 is another schematic diagram of a module of a replacement device according to an embodiment of the present invention;
图9是本发明实施方式的抓取装置的模块示意图；9 is a schematic block diagram of a grasping device according to an embodiment of the present invention;
图10是本发明实施方式的更换装置的再一个模块示意图；Figure 10 is a block diagram showing still another module of the replacing device according to the embodiment of the present invention;
图11是本发明实施方式的更换装置的又一个模块示意图。Fig. 11 is a block diagram showing still another module of the replacing device according to the embodiment of the present invention.
主要元件符号附图说明：The main component symbol drawing description:
更换装置100、第一承载装置10、支架12、承载部件14、固定件142、固定检测单元144、翻转检测单元16、第二承载装置20、抓取装置30、导轨32、抓取部件34、抓取检测单元36、信息识别装置40、第一位置检测单元50、第二位置检测单元60、清洁装置70、光罩800、第一收纳装置920、第二收纳装置940。The replacing device 100, the first carrying device 10, the bracket 12, the bearing member 14, the fixing member 142, the fixing detecting unit 144, the inversion detecting unit 16, the second carrying device 20, the gripping device 30, the guide rail 32, the gripping member 34, The grip detecting unit 36, the information recognizing device 40, the first position detecting unit 50, the second position detecting unit 60, the cleaning device 70, the mask 800, the first housing device 920, and the second housing device 940.
下面详细描述本发明的实施方式，所述实施方式的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施方式是示例性的，仅用于解释本发明，而不能理解为对本发明的限制。The embodiments of the present invention are described in detail below, and the examples of the embodiments are illustrated in the drawings, wherein the same or similar reference numerals indicate the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the drawings are intended to be illustrative of the invention and are not to be construed as limiting.
在本发明的描述中，需要理解的是，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个所述特征。在本发明的描述中，“多个”的含义是两个或两个以上，除非另有明确具体的限定。In the description of the present invention, it is to be understood that the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, features defining "first" or "second" may include one or more of the described features either explicitly or implicitly. In the description of the present invention, the meaning of "a plurality" is two or more unless specifically and specifically defined otherwise.
在本发明的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接或可以相互通信；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, it should be noted that the terms "installation", "connected", and "connected" are to be understood broadly, and may be fixed or detachable, for example, unless otherwise explicitly defined and defined. Connected, or integrally connected; may be mechanically connected, or may be electrically connected or may communicate with each other; may be directly connected or indirectly connected through an intermediate medium, may be internal communication of two elements or interaction of two elements relationship. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood on a case-by-case basis.
下文的公开提供了许多不同的实施方式或例子用来实现本发明的不同结构。为了简化本发明的公开，下文中对特定例子的部件和设置进行描述。当然，它们仅仅为示例，并且目的不在于限制本发明。此外，本发明可以在不同例子中重复参考数字和/或参考字母，这种重复是为了简化和清楚的目的，其本身不指示所讨论各种实施方式和/或设置之间的关系。此外，本发明提供了的各种特定的工艺和材料的例子，但是本领域普通技术人员可以意识到其他工艺的应用和/或其他材料的使用。The following disclosure provides many different embodiments or examples for implementing different structures of the present invention. In order to simplify the disclosure of the present invention, the components and arrangements of the specific examples are described below. Of course, they are merely examples and are not intended to limit the invention. In addition, the present invention may be repeated with reference to the numerals and/or reference numerals in the various examples, which are for the purpose of simplicity and clarity, and do not indicate the relationship between the various embodiments and/or arrangements discussed. Moreover, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the use of other processes and/or the use of other materials.
下面详细描述本发明的实施方式，所述实施方式的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附
图描述的实施方式是示例性的，仅用于解释本发明，而不能理解为对本发明的限制。The embodiments of the present invention are described in detail below, and the examples of the embodiments are illustrated in the drawings, wherein the same or similar reference numerals indicate the same or similar elements or elements having the same or similar functions. The following is attached by reference
The embodiments described are illustrative and are not to be construed as limiting the invention.
请一并参阅图1和图2，本发明实施方式的更换装置100可以用于将光罩800从第一收纳装置920更换到第二收纳装置940。更换装置100包括第一承载装置10、第二承载装置20和抓取装置30。第一承载装置10用于承载第一收纳装置920，第一收纳装置920收纳有光罩800。第二承载装置20用于承载第二收纳装置940。抓取装置30用于抓取第一收纳装置920中的光罩800并用于将光罩800放置到第二收纳装置940中。Referring to FIGS. 1 and 2 together, the replacement device 100 of the embodiment of the present invention can be used to replace the reticle 800 from the first storage device 920 to the second storage device 940. The replacement device 100 includes a first carrier device 10, a second carrier device 20, and a gripping device 30. The first carrying device 10 is configured to carry the first storage device 920, and the first storage device 920 houses the photomask 800. The second carrying device 20 is configured to carry the second receiving device 940. The gripping device 30 is used to grasp the reticle 800 in the first accommodating device 920 and to place the reticle 800 into the second accommodating device 940.
本发明实施方式的更换装置100可自动更换光罩800的收纳装置，从而减少不必要的人力消耗，并且可以避免或减少光罩800受到人为损坏或污染。The changing device 100 of the embodiment of the present invention can automatically replace the receiving device of the reticle 800, thereby reducing unnecessary labor consumption, and can avoid or reduce the hood 600 from being damaged or contaminated by humans.
在本发明实施方式中，第一收纳装置920和第二收纳装置940统称为收纳装置。In the embodiment of the present invention, the first storage device 920 and the second storage device 940 are collectively referred to as a storage device.
在某些实施方式中，光罩800是指微电子制造领域中光刻工艺所使用的图形母版，是通过不透光的遮光薄膜在透明基板上形成掩膜图形获得。在一个实施例中，光罩800也可被称为光掩膜。In some embodiments, the reticle 800 refers to a graphic master used in a lithography process in the field of microelectronics fabrication, which is obtained by forming a mask pattern on a transparent substrate through an opaque light-shielding film. In one embodiment, reticle 800 may also be referred to as a photomask.
请参阅图3，在一个实施方式中，更换装置100包括信息识别装置40。信息识别装置40用于识别光罩800并获得光罩800的信息，光罩800的信息用于辅助抓取装置30抓取光罩800。Referring to FIG. 3, in one embodiment, the replacement device 100 includes an information recognition device 40. The information recognition device 40 is used to identify the reticle 800 and obtain information of the reticle 800, and the information of the reticle 800 is used to assist the grasping device 30 in grasping the reticle 800.
如此，更换装置100能够识别不同光罩800并利用不同光罩800的信息辅助更换装置100工作。As such, the replacement device 100 can identify the different masks 800 and assist the replacement device 100 with information from the different masks 800.
可以理解，不同的生产商或者供应商提供的光罩800可能不同，光罩800的大小、形状、重量等属性可能都具有一定的差异，为了实现更换装置100的高效工作，更换装置100上设置有信息识别装置40，利用信息识别装置40识别光罩800的信息，从而方便后续的光罩800抓取工作。It can be understood that the reticle 800 provided by different manufacturers or suppliers may be different, and the size, shape, weight and the like of the reticle 800 may have certain differences. In order to achieve efficient operation of the replacement device 100, the replacement device 100 is provided. The information recognition device 40 recognizes the information of the reticle 800 by the information recognition device 40, thereby facilitating the subsequent reticle 800 grasping work.
在一个实施方式中，信息识别装置40包括条形码识别传感器。In one embodiment, the information recognition device 40 includes a barcode recognition sensor.
如此，可以快速地获得光罩800的信息。In this way, the information of the reticle 800 can be obtained quickly.
具体地，条形码是将宽度不等的多个黑条和空白按照一定的编码规则排列，用于表达信息的图形标识符。通过条形码识别传感器可以快速地获取光罩800上条形码对应的信息，例如生产日期、规格(大小、形状)、类型等。Specifically, the barcode is a graphical identifier for expressing information by arranging a plurality of black bars and spaces of unequal widths according to a certain encoding rule. The bar code recognition sensor can quickly acquire information corresponding to the barcode on the reticle 800, such as production date, size (size, shape), type, and the like.
请参阅图4，在一个实施方式中，第一承载装置10包括支架12和承载部件14，承载部件14用于承载第一收纳装置920，支架12承载承载部件14和用于移动承载部件14。Referring to FIG. 4, in one embodiment, the first carrier device 10 includes a bracket 12 and a carrier member 14 for carrying a first storage device 920 that carries the carrier member 14 and for moving the carrier member 14.
如此，第一承载装置10可以利用承载部件14承载第一收纳装置920并利用支架12移动承载部件14和第一收纳装置920。As such, the first carrier device 10 can carry the first container device 920 with the carrier member 14 and move the carrier member 14 and the first container device 920 with the bracket 12.
具体地，将装载有光罩800的第一收纳装置920放置于承载部件14上，更换装置100通过支架12将承载部件14移动到抓取装置30下方以方便抓取装置30抓取第一收纳装置
920中的光罩800，从而实现光罩800的自动抓取工作。需要说明的是，第一收纳装置920为了保证光罩800的清洁度，一般具有盖子，在抓取装置30进行光罩800的抓取前，需要人工或者利用其他自动化装置将盖子移除，从而使得更换装置100能够正常抓取光罩800。Specifically, the first storage device 920 loaded with the reticle 800 is placed on the carrier member 14, and the replacement device 100 moves the carrier member 14 under the grasping device 30 through the bracket 12 to facilitate the grasping device 30 to grasp the first storage. Device
The reticle 800 in 920, thereby achieving automatic grasping of the reticle 800. It should be noted that, in order to ensure the cleanliness of the reticle 800, the first accommodating device 920 generally has a cover, and before the grasping device 30 performs the squeegee 800, the cover needs to be removed manually or by using other automated devices. The replacement device 100 is enabled to normally grasp the reticle 800.
请一并参阅图5和图6，在一个实施方式中，承载部件14包括固定件142和固定检测单元144，固定件142用于固定第一收纳装置920，固定检测单元144用于确定第一收纳装置920是否被固定。Referring to FIG. 5 and FIG. 6 together, in one embodiment, the carrier member 14 includes a fixing member 142 for fixing the first receiving device 920, and a fixing detecting unit 144 for determining the first Whether or not the storage device 920 is fixed.
如此，承载部件14可以确保将第一收纳装置920固定住。As such, the carrier member 14 can ensure that the first storage device 920 is secured.
可以理解，为了方便后续的工作，如抓取第一收纳装置920中的光罩800，需要利用固定件142将第一收纳装置920固定住，避免第一收纳装置920掉落或发生位移，从而避免光罩800损坏和确保抓取装置30抓取光罩800的准确度。通过固定检测单元144可以确定第一收纳装置920是否被固定。在一个实施方式中，固定检测单元144可以通过判断固定件142是否锁紧来确定第一收纳装置920是否被固定住。固定检测单元144可以是压力传感器、距离传感器等。在一个实施例中，固定检测单元144是压力传感器并设置在承载部件14上，固定件142固定住第一收纳装置920时，压力传感器可以检测到固定件142提供的压力大于预设压力值，从而确定第一收纳装置920被固定。在第一收纳装置920被固定后，支架12再移动承载部件14至抓取装置30的下方，保证第一收纳装置920在移动过程中不跌落。It can be understood that, in order to facilitate the subsequent work, such as grasping the reticle 800 in the first accommodating device 920, the first accommodating device 920 needs to be fixed by the fixing member 142 to prevent the first accommodating device 920 from falling or being displaced. The reticle 800 is prevented from being damaged and the accuracy of the gripping device 30 to grasp the reticle 800 is ensured. Whether or not the first storage device 920 is fixed can be determined by the fixed detecting unit 144. In one embodiment, the fixed detecting unit 144 may determine whether the first receiving device 920 is fixed by determining whether the fixing member 142 is locked. The fixed detecting unit 144 may be a pressure sensor, a distance sensor, or the like. In one embodiment, the fixed detecting unit 144 is a pressure sensor and is disposed on the carrying member 14. When the fixing member 142 is fixed to the first receiving device 920, the pressure sensor can detect that the pressure provided by the fixing member 142 is greater than a preset pressure value. It is thus determined that the first storage device 920 is fixed. After the first storage device 920 is secured, the bracket 12 moves the carrier member 14 to the underside of the gripping device 30 to ensure that the first storage device 920 does not fall during the movement.
请参阅图7，在一个实施方式中，承载部件14可翻转，第一承载装置10包括翻转检测单元16，翻转检测单元16用于确定承载部件14是否完成翻转。Referring to Figure 7, in one embodiment, the carrier member 14 is reversible, the first carrier device 10 includes a flip detection unit 16 for determining whether the carrier member 14 has completed flipping.
如此，可以对承载部件14进行翻转并根据翻转检测单元16确定翻转是否完成，从而使得承载部件14上的第一收纳装置920处于合适姿态。As such, the carrier member 14 can be flipped and it is determined whether the flipping is complete based on the flip detection unit 16, such that the first receiving device 920 on the carrier member 14 is in the proper position.
在某些实施方式中，第一收纳装置920由于运输时可能处于不同姿态，例如由于运输通道比较窄，但是高度足够，或者为了避免对运输通道上的其他东西造成损坏，可以在运输第一收纳装置920时，将第一收纳装置920竖立起来，在第一收纳装置920放置在承载部件14后，需要对承载部件14进行翻转以使得第一收纳装置920平放，从而方便抓取装置30抓取第一收纳装置920中的光罩800。第一承载装置10包括翻转检测单元16，通过翻转检测单元16可以确定承载部件14是否完成翻转。翻转检测单元16可以包括距离传感器或角度传感器等。在一个实施例中，翻转检测单元16是角度传感器并且用于检测承载部件14翻转的角度，通过角度传感器可获取承载部件14翻转的角度是否符合预定角度，进而确定承载部件14是否完成翻转。在承载部件14完成翻转后，支架12再移动承载部件14至抓取装置30的下方，以方便抓取装置30抓取光罩800。In some embodiments, the first storage device 920 may be in a different posture due to transportation, for example, because the transportation passage is relatively narrow, but the height is sufficient, or in order to avoid damage to other things on the transportation passage, the first storage may be in the transportation. At the time of the device 920, the first storage device 920 is erected. After the first storage device 920 is placed on the carrier member 14, the carrier member 14 needs to be turned over so that the first storage device 920 is laid flat, thereby facilitating the grasping device 30 to grasp. The reticle 800 in the first storage device 920 is taken. The first carrier device 10 includes a flip detection unit 16 by which it can be determined whether the carrier member 14 has completed flipping. The flip detection unit 16 may include a distance sensor or an angle sensor or the like. In one embodiment, the flip detection unit 16 is an angle sensor and is used to detect the angle at which the carrier member 14 is flipped. The angle sensor can obtain whether the angle at which the carrier member 14 is flipped conforms to a predetermined angle, thereby determining whether the carrier member 14 has completed flipping. After the carrier member 14 has been turned over, the bracket 12 moves the carrier member 14 to the underside of the gripping device 30 to facilitate the grasping device 30 to grasp the mask 800.
请参阅图8，在一个实施方式中，更换装置100包括第一位置检测单元50，第一位置
检测单元50用于检测承载部件14的位置。Referring to FIG. 8 , in one embodiment, the replacing device 100 includes a first position detecting unit 50, a first position.
The detecting unit 50 is for detecting the position of the carrier member 14.
如此，更换装置100可以获取承载部件14的位置，从而确定承载部件14是否处于合适位置和确保承载部件14的安全。As such, the replacement device 100 can acquire the position of the carrier member 14 to determine if the carrier member 14 is in place and to secure the carrier member 14.
可以理解，为了方便抓取装置30高效、准确地进行工作，可以将承载部件14移动到适合抓取装置30抓取的第一预定位置(如抓取装置30的正下方)，因此可以利用第一位置检测单元50检测承载部件14的位置，再调整承载部件14的位置使得承载部件14位于第一预定位置。此外，第一位置检测单元50检测承载部件14的位置可以避免承载部件14碰撞到其他部件或装置。第一位置检测单元50可以是距离传感器或者霍尔传感器。在一个实施例中，第一位置检测单元50为霍尔传感器并设置在用于移动承载部件14的电机中，通过霍尔传感器检测到的磁场强度判断电机的状态(如转动角度)，从而确定承载部件14的位置。It can be understood that, in order to facilitate the efficient and accurate operation of the gripping device 30, the carrier member 14 can be moved to a first predetermined position suitable for grasping by the gripping device 30 (such as directly under the gripping device 30), so that the first A position detecting unit 50 detects the position of the carrier member 14, and then adjusts the position of the carrier member 14 such that the carrier member 14 is at the first predetermined position. Furthermore, the detection of the position of the carrier member 14 by the first position detecting unit 50 can prevent the carrier member 14 from colliding with other components or devices. The first position detecting unit 50 may be a distance sensor or a Hall sensor. In one embodiment, the first position detecting unit 50 is a Hall sensor and is disposed in a motor for moving the carrier member 14, and determines the state of the motor (eg, the angle of rotation) by the intensity of the magnetic field detected by the Hall sensor, thereby determining The position of the carrier member 14.
请再次参阅图4，在一个实施方式中，抓取装置30包括导轨32和抓取部件34。抓取部件34用于抓取光罩800，抓取部件34可移动地设置在导轨32上。Referring again to FIG. 4, in one embodiment, the gripping device 30 includes a rail 32 and a gripping member 34. The gripping member 34 is adapted to grip the reticle 800, and the gripping member 34 is movably disposed on the guide rail 32.
如此，抓取部件34可通过导轨32上下移动以靠近或远离收纳装置并抓取第一收纳装置920中的光罩800和将光罩800放置到第二收纳装置940中。As such, the gripping member 34 can be moved up and down by the rails 32 to approach or move away from the receiving device and grab the reticle 800 in the first receiving device 920 and place the reticle 800 into the second receiving device 940.
具体地，在第一收纳装置920处于合适位置后，抓取部件34通过导轨32向第一收纳装置920移动并抓取光罩800，然后带有光罩800的抓取部件34通过导轨32远离第一收纳装置920，接着等到第二收纳装置940处于合适位置后，抓取部件34通过导轨32向第二收纳装置940移动并将抓取的光罩800放置于第二收纳装置940中，从而实现光罩800的更换。Specifically, after the first receiving device 920 is in the proper position, the gripping member 34 moves toward the first receiving device 920 through the guide rail 32 and grabs the reticle 800, and then the gripping member 34 with the reticle 800 is moved away from the guide rail 32. After the first storage device 920 waits until the second storage device 940 is in the proper position, the gripping member 34 moves to the second storage device 940 through the guide rail 32 and places the grasped photomask 800 in the second storage device 940, thereby The replacement of the reticle 800 is achieved.
请参阅图9，在一个实施方式中，抓取装置30包括抓取检测单元36，抓取检测单元36用于获取抓取部件34的位置。Referring to FIG. 9 , in one embodiment, the gripping device 30 includes a grip detection unit 36 for acquiring the position of the gripping member 34 .
如此，通过抓取检测单元36可以获取抓取部件34的位置，从而判断抓取部件34是否处于合适位置。As such, the position of the gripping member 34 can be acquired by the grip detecting unit 36, thereby judging whether or not the gripping member 34 is in the proper position.
具体地，为了保证抓取部件34能够正常工作，需要确定抓取部件34和收纳装置的相对位置，在抓取部件34与收纳装置过于靠近而碰撞在一起时，可能会导致抓取部件34或收纳装置的损坏；在抓取部件34远离收纳装置时，抓取部件34无法正常抓取或放置光罩800。因此，抓取检测单元36可以获取抓取部件34的位置，结合其他检测单元获取的收纳装置的位置，即可使得更换装置100能够控制抓取部件34移动到正常工作的位置。Specifically, in order to ensure that the gripping member 34 can work normally, it is necessary to determine the relative positions of the gripping member 34 and the accommodating device, which may cause the gripping member 34 or when the gripping member 34 and the accommodating device are too close to collide with each other. Damage to the storage device; when the grasping member 34 is away from the storage device, the grasping member 34 cannot properly grasp or place the reticle 800. Therefore, the grip detecting unit 36 can acquire the position of the gripping member 34, in combination with the position of the housing device acquired by the other detecting unit, so that the replacing device 100 can control the gripping member 34 to move to the position where it is normally operated.
在一个实施方式中，抓取装置30根据光罩800的信息调整抓取部件34抓取光罩800的位置。In one embodiment, the gripping device 30 adjusts the position of the gripping member 34 to grasp the reticle 800 based on the information of the reticle 800.
如此，抓取装置30能够快速、准确地抓取光罩800。
As such, the gripping device 30 can grasp the reticle 800 quickly and accurately.
可以理解，不同型号的光罩800的大小和形状可能不同，从而使得不同型号的光罩800适合抓取的位置可能不同，因此可以根据光罩800的大小调整抓取部件34张开的程度，以及根据光罩800的形状调整抓取部件34抓取光罩800的位置，例如，光罩800的形状是三棱柱时，光罩800的适合抓取位置是侧面，在抓取部件30抓取光罩800的侧棱时，容易抓取不稳并且导致光罩800的损坏。It can be understood that different sizes of reticle 800 may be different in size and shape, so that the positions of different types of reticle 800 suitable for grasping may be different, so that the degree of opening of the gripping member 34 may be adjusted according to the size of the reticle 800. And adjusting the position of the squeegee 800 by the gripping member 34 according to the shape of the reticle 800. For example, when the shape of the reticle 800 is a triangular prism, the suitable gripping position of the reticle 800 is a side surface, and is grasped by the gripping member 30. When the side edges of the reticle 800 are worn, it is easy to grasp and cause damage to the reticle 800.
请参阅图10，在一个实施方式中，更换装置100包括第二位置检测单元60，第二位置检测单元60用于检测第二承载装置20的位置。Referring to FIG. 10, in one embodiment, the changing device 100 includes a second position detecting unit 60 for detecting the position of the second carrying device 20.
如此，更换装置100可以获取第二承载装置20的位置，从而确定第二承载装置20是否处于合适位置和确保第二承载装置20的安全。As such, the replacement device 100 can acquire the position of the second carrier device 20 to determine if the second carrier device 20 is in place and to ensure the safety of the second carrier device 20.
可以理解，为了方便抓取装置30高效、准确地进行工作，可以将第二承载装置20移动到适合抓取装置30放置光罩800的第二预定位置(如抓取装置30的正下方)，因此可以利用第二位置检测单元60检测第二承载装置20的位置，再调整第二承载装置20的位置使得第二承载装置20位于第二预定位置。此外，第二位置检测单元60检测第二承载装置20的位置可以避免第二承载装置20碰撞到其他部件或装置。第二位置检测单元60可以是距离传感器或者霍尔传感器。在一个实施例中，第二位置检测单元60为距离传感器并设置在更换装置100上，通过距离传感器检测到的距离值确定第二承载装置20的位置。It can be understood that, in order to facilitate the efficient and accurate operation of the gripping device 30, the second carrier device 20 can be moved to a second predetermined position (such as directly below the gripping device 30) suitable for the gripping device 30 to place the reticle 800. Therefore, the position of the second carrier device 20 can be detected by the second position detecting unit 60, and the position of the second carrier device 20 can be adjusted so that the second carrier device 20 is at the second predetermined position. Furthermore, the second position detecting unit 60 detecting the position of the second carrying device 20 can prevent the second carrying device 20 from colliding with other components or devices. The second position detecting unit 60 may be a distance sensor or a Hall sensor. In one embodiment, the second position detecting unit 60 is a distance sensor and is disposed on the changing device 100, and the position of the second carrying device 20 is determined by the distance value detected by the distance sensor.
在一个实施方式中，第二承载装置20包括用于承载第二收纳装置940的台车。In one embodiment, the second carrier device 20 includes a trolley for carrying the second storage device 940.
如此，台车可以用于承载第二收纳装置940并用于将第二收纳装置940移动到适合抓取装置30放置光罩800的位置。As such, the trolley can be used to carry the second storage device 940 and to move the second storage device 940 to a position suitable for the capture device 30 to place the reticle 800.
需要说明的是，第二承载装置20的结构可与第一承载装置10的结构相同，第一承载装置10也可以包括台车或者其他可承载收纳装置的装置。此外，台车的移动可以是通过人工或者自动完成，在此不做具体限定。It should be noted that the structure of the second carrying device 20 may be the same as that of the first carrying device 10, and the first carrying device 10 may also include a trolley or other device that can carry the receiving device. In addition, the movement of the trolley may be done manually or automatically, and is not specifically limited herein.
请参阅图11，在一个实施方式中，更换装置100包括清洁装置70，清洁装置70用于清洁光罩800。Referring to FIG. 11 , in one embodiment, the replacement device 100 includes a cleaning device 70 for cleaning the reticle 800 .
如此，实现了更换装置100清洁光罩800的功能。In this way, the function of the replacement device 100 to clean the reticle 800 is achieved.
具体地，由于光罩800可能存在灰尘等影响光罩800正常工作的物质，因此在抓取装置30从第一收纳装置920中抓取光罩800后，可以利用清洁装置10对光罩800进行清洁，再将清洁后的光罩800放置于第二收纳装置940中，从而保证第二收纳装置940中的光罩800的清洁度。Specifically, since the reticle 800 may have substances such as dust and the like that affect the normal operation of the reticle 800, after the squeegee device 30 grabs the reticle 800 from the first accommodating device 920, the reticle 800 may be performed by the cleaning device 10. After cleaning, the cleaned mask 800 is placed in the second storage device 940 to ensure the cleanliness of the mask 800 in the second storage device 940.
在某些实施方式中，第一收纳装置920可以是生产商存放光罩800的光罩盒，第二收纳装置940可以是曝光机内的光罩盒，在此不做具体限定。In some embodiments, the first storage device 920 may be a photomask case in which the manufacturer stores the photomask 800, and the second storage device 940 may be a photomask case in the exposure machine, which is not specifically limited herein.
需要说明的是，上述实施方式中所提到的部件、装置、支架等的运动、移动、翻转，
以及位置、角度的检测均由控制装置来统一控制相应的驱动部件和检测部件来完成，驱动部件包括电机、齿轮、传输皮带等，检测部件包括检测所需参数的各种传感器。控制装置包括但不限于个人计算机、嵌入式***等具有数据处理能力的装置、电路等。It should be noted that the movement, movement, and turning of the components, devices, brackets, and the like mentioned in the above embodiments,
The detection of the position and the angle is performed by the control device to uniformly control the corresponding driving component and the detecting component. The driving component includes a motor, a gear, a transmission belt, and the like, and the detecting component includes various sensors for detecting the required parameters. Control devices include, but are not limited to, personal computer, embedded systems, and the like, data processing capabilities, devices, and the like.
在本说明书的描述中，参考术语“一个实施方式”、“一些实施方式”、“示意性实施方式”、“示例”、“具体示例”、或“一些示例”等的描述意指结合所述实施方式或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施方式或示例中。在本说明书中，对上述术语的示意性表述不一定指的是相同的实施方式或示例。而且，描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施方式或示例中以合适的方式结合。In the description of the present specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiment", "example", "specific example", or "some examples", etc. Particular features, structures, materials or features described in the embodiments or examples are included in at least one embodiment or example of the invention. In the present specification, the schematic representation of the above terms does not necessarily mean the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples.
流程图中或在此以其他方式描述的任何过程或方法描述可以被理解为，表示包括一个或更多个用于执行特定逻辑功能或过程的步骤的可执行指令的代码的模块、片段或部分，并且本发明的优选实施方式的范围包括另外的执行，其中可以不按所示出或讨论的顺序，包括根据所涉及的功能按基本同时的方式或按相反的顺序，来执行功能，这应被本发明的实施例所属技术领域的技术人员所理解。Any process or method description in the flowcharts or otherwise described herein may be understood to represent a module, segment or portion of code that includes one or more executable instructions for performing the steps of a particular logical function or process. And the scope of the preferred embodiments of the invention includes additional implementations, which may be performed in a substantially simultaneous manner or in the reverse order, depending on the functions involved, in the order shown or discussed, which should It will be understood by those skilled in the art to which the embodiments of the present invention pertain.
在流程图中表示或在此以其他方式描述的逻辑和/或步骤，例如，可以被认为是用于执行逻辑功能的可执行指令的定序列表，可以具体执行在任何计算机可读介质中，以供指令执行***、装置或设备(如基于计算机的***、包括处理器的***或其他可以从指令执行***、装置或设备取指令并执行指令的***)使用，或结合这些指令执行***、装置或设备而使用。就本说明书而言，"计算机可读介质"可以是任何可以包含、存储、通信、传播或传输程序以供指令执行***、装置或设备或结合这些指令执行***、装置或设备而使用的装置。计算机可读介质的更具体的示例(非穷尽性列表)包括以下：具有一个或多个布线的电连接部(电子装置)，便携式计算机盘盒(磁装置)，随机存取存储器(RAM)，只读存储器(ROM)，可擦除可编辑只读存储器(EPROM或闪速存储器)，光纤装置，以及便携式光盘只读存储器(CDROM)。另外，计算机可读介质甚至可以是可在其上打印所述程序的纸或其他合适的介质，因为可以例如通过对纸或其他介质进行光学扫描，接着进行编辑、解译或必要时以其他合适方式进行处理来以电子方式获得所述程序，然后将其存储在计算机存储器中。The logic and/or steps represented in the flowchart or otherwise described herein, for example, may be considered as an ordered list of executable instructions for performing logical functions, and may be embodied in any computer readable medium, Used in conjunction with, or in conjunction with, an instruction execution system, apparatus, or device (eg, a computer-based system, a system including a processor, or other system that can fetch instructions and execute instructions from an instruction execution system, apparatus, or device) Or use with equipment. For the purposes of this specification, a "computer-readable medium" can be any apparatus that can contain, store, communicate, propagate, or transport a program for use in an instruction execution system, apparatus, or device, or in conjunction with the instruction execution system, apparatus, or device. More specific examples (non-exhaustive list) of computer readable media include the following: electrical connections (electronic devices) having one or more wires, portable computer disk cartridges (magnetic devices), random access memory (RAM), Read only memory (ROM), erasable editable read only memory (EPROM or flash memory), fiber optic devices, and portable compact disk read only memory (CDROM). In addition, the computer readable medium may even be a paper or other suitable medium on which the program can be printed, as it may be optically scanned, for example by paper or other medium, followed by editing, interpretation or, if appropriate, other suitable The method is processed to obtain the program electronically and then stored in computer memory.
应当理解，本发明的各部分可以用硬件、软件、固件或它们的组合来执行。在上述实施方式中，多个步骤或方法可以用存储在存储器中且由合适的指令执行***执行的软件或固件来执行。例如，如果用硬件来执行，和在另一实施方式中一样，可用本领域公知的下列技术中的任一项或他们的组合来执行：具有用于对数据信号执行逻辑功能的逻辑门电路的离散逻辑电路，具有合适的组合逻辑门电路的专用集成电路，可编程门阵列(PGA)，现场可编程门阵列(FPGA)等。It should be understood that portions of the invention may be implemented in hardware, software, firmware or a combination thereof. In the above-described embodiments, multiple steps or methods may be performed by software or firmware stored in a memory and executed by a suitable instruction execution system. For example, if executed in hardware, as in another embodiment, it can be performed by any one of the following techniques or combinations thereof known in the art: having logic gates for performing logic functions on data signals Discrete logic circuits, application specific integrated circuits with suitable combinational logic gates, programmable gate arrays (PGAs), field programmable gate arrays (FPGAs), etc.
本技术领域的普通技术人员可以理解执行上述实施方法携带的全部或部分步骤是可以
通过程序来指令相关的硬件完成，所述的程序可以存储于一种计算机可读存储介质中，该程序在执行时，包括方法实施例的步骤之一或其组合。One of ordinary skill in the art can understand that all or part of the steps carried out by performing the above implementation method can be
The related hardware is instructed by a program, which may be stored in a computer readable storage medium, which when executed includes one or a combination of the steps of the method embodiments.
此外，在本发明各个实施例中的各功能单元可以集成在一个处理模块中，也可以是各个单元单独物理存在，也可以两个或两个以上单元集成在一个模块中。上述集成的模块既可以采用硬件的形式执行，也可以采用软件功能模块的形式执行。所述集成的模块如果以软件功能模块的形式执行并作为独立的产品销售或使用时，也可以存储在一个计算机可读取存储介质中。In addition, each functional unit in each embodiment of the present invention may be integrated into one processing module, or each unit may exist physically separately, or two or more units may be integrated into one module. The above integrated modules can be executed in the form of hardware or in the form of software functional modules. The integrated modules, if executed in the form of software functional modules and sold or used as separate products, may also be stored in a computer readable storage medium.
上述提到的存储介质可以是只读存储器，磁盘或光盘等。尽管上面已经示出和描述了本发明的实施例，可以理解的是，上述实施例是示例性的，不能理解为对本发明的限制，本领域的普通技术人员在本发明的范围内可以对上述实施例进行变化、修改、替换和变型。
The above mentioned storage medium may be a read only memory, a magnetic disk or an optical disk or the like. Although the embodiments of the present invention have been shown and described, it is understood that the above-described embodiments are illustrative and are not to be construed as limiting the scope of the invention. The embodiments are subject to variations, modifications, substitutions and variations.
Claims (13)
- 一种更换装置，用于将光罩从第一收纳装置更换到第二收纳装置，其特征在于，所述更换装置包括：A replacement device for replacing a photomask from a first storage device to a second storage device, wherein the replacement device comprises:第一承载装置，所述第一承载装置用于承载所述第一收纳装置，所述第一收纳装置收纳有所述光罩；a first carrying device, the first carrying device is configured to carry the first receiving device, and the first receiving device houses the photomask;第二承载装置，所述第二承载装置用于承载所述第二收纳装置；和a second carrying device for carrying the second receiving device; and抓取装置，所述抓取装置用于抓取所述第一收纳装置中的所述光罩并用于将所述光罩放置到所述第二收纳装置中。A gripping device for gripping the reticle in the first accommodating device and for placing the reticle into the second accommodating device.
- 如权利要求1所述的更换装置，其特征在于，所述更换装置包括信息识别装置，所述信息识别装置用于识别所述光罩并获得所述光罩的信息，所述光罩的信息用于辅助所述抓取装置抓取所述光罩。A replacement device according to claim 1, wherein said replacing means includes information identifying means for identifying said reticle and obtaining information of said reticle, said reticle information And is used to assist the grasping device to grasp the reticle.
- 如权利要求2所述的更换装置，其特征在于，所述信息识别装置包括条形码识别传感器。The changing device according to claim 2, wherein said information identifying means comprises a bar code recognition sensor.
- 如权利要求1所述的更换装置，其特征在于，所述第一承载装置包括支架和承载部件，所述承载部件用于承载所述第一收纳装置，所述支架承载所述承载部件和用于移动所述承载部件。The changing device according to claim 1, wherein said first carrying device comprises a bracket and a carrying member, said carrying member for carrying said first receiving device, said bracket carrying said carrying member and The moving bearing member is moved.
- 如权利要求4所述的更换装置，其特征在于，所述承载部件包括固定件和固定检测单元，所述固定件用于固定所述第一收纳装置，所述固定检测单元用于确定所述第一收纳装置是否被固定。A changing device according to claim 4, wherein said carrier member comprises a fixing member for fixing said first housing means, and said fixing detecting unit for determining said Whether the first storage device is fixed.
- 如权利要求4所述的更换装置，其特征在于，所述承载部件可翻转，所述第一承载装置包括翻转检测单元，所述翻转检测单元用于确定所述承载部件是否完成翻转。The changing device according to claim 4, wherein said carrying member is reversible, said first carrying means comprising a flip detecting unit, said flip detecting unit for determining whether said carrying member has completed flipping.
- 如权利要求4所述的更换装置，其特征在于，所述更换装置包括第一位置检测单元，所述第一位置检测单元用于检测所述承载部件的位置。The changing device according to claim 4, wherein said changing device comprises a first position detecting unit for detecting a position of said carrier member.
- 如权利要求1所述的更换装置，其特征在于，所述抓取装置包括导轨和抓取部件，所述抓取部件用于抓取所述光罩，所述抓取部件可移动地设置在所述导轨上。A changing device according to claim 1, wherein said gripping means comprises a guide rail for gripping said reticle and a gripping member, said gripping member being movably disposed at On the guide rail.
- 如权利要求8所述的更换装置，其特征在于，所述抓取装置包括抓取检测单元，所述抓取检测单元用于获取所述抓取部件的位置。The changing device according to claim 8, wherein said gripping means comprises a grip detecting unit for acquiring a position of said gripping member.
- 如权利要求8所述的更换装置，其特征在于，所述抓取装置根据所述光罩的信息调整所述抓取部件抓取所述光罩的位置。The changing device according to claim 8, wherein said gripping means adjusts a position at which said gripping member grips said reticle according to information of said reticle.
- 如权利要求1所述的更换装置，其特征在于，所述更换装置包括第二位置检测单元，所述第二位置检测单元用于检测所述第二承载装置的位置。The changing device according to claim 1, wherein said changing device comprises a second position detecting unit, and said second position detecting unit is configured to detect a position of said second carrying device.
- 如权利要求1所述的更换装置，其特征在于，所述第二承载装置包括用于承载所 述第二收纳装置的台车。The replacement device of claim 1 wherein said second carrier device comprises a carrier The trolley of the second storage device is described.
- 如权利要求1所述的更换装置，其特征在于，所述更换装置包括清洁装置，所述清洁装置用于清洁所述光罩。 A replacement device according to claim 1 wherein said changing device comprises a cleaning device for cleaning said reticle.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201780002909.2A CN108124469B (en) | 2017-05-17 | 2017-05-17 | Replacing device |
| PCT/CN2017/084765 WO2018209611A1 (en) | 2017-05-17 | 2017-05-17 | Replacement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2017/084765 WO2018209611A1 (en) | 2017-05-17 | 2017-05-17 | Replacement device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2018209611A1 true WO2018209611A1 (en) | 2018-11-22 |
Family
ID=62233570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/CN2017/084765 WO2018209611A1 (en) | 2017-05-17 | 2017-05-17 | Replacement device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN108124469B (en) |
| WO (1) | WO2018209611A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109298603A (en) * | 2018-11-20 | 2019-02-01 | 深圳市华星光电半导体显示技术有限公司 | A kind of integration of exposure light shield unpacks and cleaning systems |
| CN110127375B (en) * | 2019-04-28 | 2021-09-03 | 武汉华星光电技术有限公司 | Light shield taking and placing device |
| CN110262185A (en) * | 2019-06-12 | 2019-09-20 | 北海惠科光电技术有限公司 | It is etched by light the control method and photoetch equipment of equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005262325A (en) * | 2004-03-16 | 2005-09-29 | Central Glass Co Ltd | Suction hand and method of following target position by suction hand |
| CN101244887A (en) * | 2007-02-13 | 2008-08-20 | Sfa工程股份有限公司 | Glass input system |
| KR20130005720U (en) * | 2012-03-22 | 2013-10-02 | 쌩-고벵 글래스 프랑스 | Injection discharger of glass panel manufacture correction |
| CN204777651U (en) * | 2015-06-19 | 2015-11-18 | 深圳市世纪方舟自动化设备有限公司 | Automatic revolving rack device of glass piece |
| CN205855378U (en) * | 2016-08-05 | 2017-01-04 | 京东方科技集团股份有限公司 | A kind of Handling device |
-
2017
- 2017-05-17 WO PCT/CN2017/084765 patent/WO2018209611A1/en active Application Filing
- 2017-05-17 CN CN201780002909.2A patent/CN108124469B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005262325A (en) * | 2004-03-16 | 2005-09-29 | Central Glass Co Ltd | Suction hand and method of following target position by suction hand |
| CN101244887A (en) * | 2007-02-13 | 2008-08-20 | Sfa工程股份有限公司 | Glass input system |
| KR20130005720U (en) * | 2012-03-22 | 2013-10-02 | 쌩-고벵 글래스 프랑스 | Injection discharger of glass panel manufacture correction |
| CN204777651U (en) * | 2015-06-19 | 2015-11-18 | 深圳市世纪方舟自动化设备有限公司 | Automatic revolving rack device of glass piece |
| CN205855378U (en) * | 2016-08-05 | 2017-01-04 | 京东方科技集团股份有限公司 | A kind of Handling device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108124469B (en) | 2020-06-02 |
| CN108124469A (en) | 2018-06-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2018209611A1 (en) | Replacement device | |
| TWI603427B (en) | Substrate processing apparatus and substrate processing method | |
| JP5566265B2 (en) | Substrate processing apparatus, program, computer storage medium, and substrate transfer method | |
| KR19990023653A (en) | Semiconductor Wafer Processing Method and Semiconductor Wafer Processing Tool | |
| US9440265B2 (en) | Conveying controlling apparatus, conveying controlling method and program | |
| JP2000223401A (en) | Applying and developing apparatus and substrate recycling system in applying and developing process | |
| US8941809B2 (en) | Substrate processing apparatus and substrate processing method | |
| US11609502B2 (en) | Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium | |
| JP5837649B2 (en) | Substrate processing apparatus, abnormality processing unit determination method, program, and computer storage medium | |
| CN104391427B (en) | Mask board checking device and method, mask plate cleaning device | |
| CN106429144A (en) | Glass clamping box treatment method, device and system | |
| US20050000051A1 (en) | Machine and method for inspecting input shaft of power steering system | |
| TWI696826B (en) | Inspection apparatus and substrate processing apparatus | |
| JPH10311806A (en) | Photographing device for welded part at end of large diameter steel pipe | |
| KR101432493B1 (en) | Sorter system | |
| US20220384222A1 (en) | Systems and methods for die transfer | |
| WO2016199224A1 (en) | Substrate transfer method and substrate transfer device | |
| JP2001117064A (en) | Alignment mechanism and alignment method for transporting device as well as substrate treating device | |
| JP2013205340A (en) | Disk surface inspection method and device thereof | |
| TW201135212A (en) | Inspection method and device for cracks on rectangular sheet-like object | |
| TWI578111B (en) | Pattern exposure device and pattern exposure method | |
| JP5546786B2 (en) | Inspection object inspection apparatus, inspection method, and program | |
| KR102169025B1 (en) | An apparatus for calculating the location of the tray groove and detecting misplaced status in the tray with a line laser and a method thereof | |
| JP5705698B2 (en) | X-ray inspection method and apparatus | |
| JP2017092306A (en) | Substrate processing apparatus and substrate processing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 17909704 Country of ref document: EP Kind code of ref document: A1 |
|
| NENP | Non-entry into the national phase |
Ref country code: DE |
|
| 122 | Ep: pct application non-entry in european phase |
Ref document number: 17909704 Country of ref document: EP Kind code of ref document: A1 |