CN108124469B

CN108124469B - Replacing device

Info

Publication number: CN108124469B
Application number: CN201780002909.2A
Authority: CN
Inventors: 黃顺宏
Original assignee: Shenzhen Royole Technologies Co Ltd
Current assignee: Shenzhen Royole Technologies Co Ltd
Priority date: 2017-05-17
Filing date: 2017-05-17
Publication date: 2020-06-02
Anticipated expiration: 2037-05-17
Also published as: WO2018209611A1; CN108124469A

Abstract

A changing device (100) for changing a reticle (800) from a first storage device (920) to a second storage device (940), the changing device (100) comprising a first carrier device (10), a second carrier device (20) and a gripping device (30). The first bearing device (10) is used for bearing the first receiving device (920), the first receiving device (920) receives the photomask (800), the second bearing device (20) is used for bearing the second receiving device (940), and the grabbing device (30) is used for grabbing the photomask (800) in the first receiving device (920) and placing the photomask (800) into the second receiving device (940).

Description

Replacing device

Technical Field

The invention relates to an automation technology, in particular to a replacing device.

Background

In the related art, replacement and cleaning of the reticle are manually performed, which consumes human resources and is inefficient. In addition, manual replacement of the mask is prone to damage or contamination of the mask.

Disclosure of Invention

Embodiments of the present invention provide a replacement device for replacing a mask.

An exchange device according to an embodiment of the present invention is a device for exchanging a mask from a first storage device to a second storage device, the exchange device including:

the first bearing device is used for bearing the first accommodating device, and the first accommodating device accommodates the photomask;

the second bearing device is used for bearing the second accommodating device; and

a gripping device for gripping the reticle in the first receiving device and for placing the reticle into the second receiving device.

The replacing device of the embodiment of the invention can automatically replace the containing device of the photomask, thereby reducing unnecessary labor consumption and avoiding or reducing the artificial damage or pollution of the photomask.

Additional aspects and advantages of embodiments of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of embodiments of the invention.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic perspective view of a changing apparatus according to an embodiment of the present invention;

FIG. 2 is a schematic block diagram of a first receiving device, a second receiving device and a mask according to an embodiment of the present invention;

FIG. 3 is a block schematic diagram of a changing device according to an embodiment of the present invention;

FIG. 4 is a front view of a changing device according to an embodiment of the present invention;

FIG. 5 is a top view of a replacement device according to an embodiment of the present invention;

FIG. 6 is a schematic block diagram of a load bearing member according to an embodiment of the present invention;

FIG. 7 is a block diagram of a first carrier according to an embodiment of the present invention;

FIG. 8 is another block diagram of a replacement device in accordance with an embodiment of the present invention;

FIG. 9 is a block schematic view of a grasping device according to an embodiment of the present invention;

FIG. 10 is a schematic view of yet another module of a changing apparatus according to an embodiment of the present invention;

fig. 11 is a further block diagram of a replacement device in accordance with an embodiment of the present invention.

Description of the drawings with the main elements symbols:

the device includes a replacing apparatus 100, a first carriage 10, a bracket 12, a carriage 14, a fixing member 142, a fixing detection unit 144, a turning detection unit 16, a second carriage 20, a grasping apparatus 30, a guide rail 32, a grasping member 34, a grasping detection unit 36, an information recognition apparatus 40, a first position detection unit 50, a second position detection unit 60, a cleaning apparatus 70, a mask 800, a first storage apparatus 920, and a second storage apparatus 940.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "first", "second" and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

The following disclosure provides many different embodiments or examples for implementing different features of the invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize applications of other processes and/or uses of other materials.

Referring to fig. 1 and fig. 2, the replacing apparatus 100 according to the embodiment of the invention may be used to replace the mask 800 from the first receiving apparatus 920 to the second receiving apparatus 940. The exchanging device 100 includes a first carrier 10, a second carrier 20 and a gripping device 30. The first carrier 10 is used for carrying the first receiving device 920, and the first receiving device 920 receives the mask 800. The second carrying device 20 is used for carrying the second receiving device 940. The grasping device 30 is used to grasp the reticle 800 in the first receiving device 920 and to place the reticle 800 into the second receiving device 940.

The replacing device 100 of the embodiment of the invention can automatically replace the accommodating device of the mask 800, thereby reducing unnecessary labor consumption and avoiding or reducing the artificial damage or pollution to the mask 800.

In the embodiment of the present invention, the first receiving device 920 and the second receiving device 940 are collectively referred to as a receiving device.

In some embodiments, the mask 800 refers to a pattern master used in photolithography in the field of microelectronics manufacturing, and is obtained by forming a mask pattern on a transparent substrate through an opaque light-shielding film. In one embodiment, reticle 800 may also be referred to as a photomask.

Referring to fig. 3, in one embodiment, the replacing device 100 includes an information recognizing device 40. The information recognition device 40 is used to recognize the mask 800 and obtain information of the mask 800, and the information of the mask 800 is used to assist the grasping device 30 in grasping the mask 800.

In this way, the exchange apparatus 100 can recognize the different masks 800 and assist the exchange apparatus 100 in operating with the information of the different masks 800.

It can be understood that the masks 800 provided by different manufacturers or suppliers may be different, and the attributes such as the size, shape, weight, etc. of the masks 800 may all have certain differences, in order to achieve efficient operation of the replacing apparatus 100, the information identifying apparatus 40 is disposed on the replacing apparatus 100, and the information identifying apparatus 40 is used to identify the information of the masks 800, so as to facilitate subsequent capturing operation of the masks 800.

In one embodiment, information recognition device 40 includes a bar code recognition sensor.

Thus, information of the mask 800 can be obtained quickly.

Specifically, a barcode is a graphic identifier in which a plurality of black bars and spaces having different widths are arranged according to a certain encoding rule to express information. Information corresponding to the barcode on the mask 800, such as the date of manufacture, the specification (size, shape), the type, etc., can be quickly acquired by the barcode recognition sensor.

Referring to fig. 4, in one embodiment, the first carrier 10 includes a support 12 and a carrier 14, the carrier 14 is used for carrying the first receiving device 920, and the support 12 carries the carrier 14 and is used for moving the carrier 14.

In this way, the first carrier device 10 can carry the first storage device 920 by using the carrier member 14 and move the carrier member 14 and the first storage device 920 by using the support 12.

Specifically, the first receiving device 920 loaded with the mask 800 is placed on the carrier 14, and the replacing device 100 moves the carrier 14 to the position below the gripping device 30 through the bracket 12 so that the gripping device 30 can conveniently grip the mask 800 in the first receiving device 920, thereby realizing the automatic gripping work of the mask 800. It should be noted that, in order to ensure the cleanliness of the mask 800, the first receiving device 920 generally has a cover, and before the grabbing device 30 grabs the mask 800, the cover needs to be removed manually or by other automated devices, so that the replacing device 100 can normally grab the mask 800.

Referring to fig. 5 and fig. 6, in one embodiment, the bearing component 14 includes a fixing member 142 and a fixing detection unit 144, the fixing member 142 is used for fixing the first accommodating device 920, and the fixing detection unit 144 is used for determining whether the first accommodating device 920 is fixed.

In this way, the carrier 14 can secure the first receiving device 920.

It can be understood that, for facilitating subsequent operations, such as grabbing the mask 800 in the first receiving device 920, the fixing member 142 is required to fix the first receiving device 920, so as to prevent the first receiving device 920 from dropping or shifting, thereby preventing the mask 800 from being damaged and ensuring the accuracy of grabbing the mask 800 by the grabbing device 30. Whether the first receiving apparatus 920 is fixed may be determined by the fixing detection unit 144. In one embodiment, the fixing detection unit 144 may determine whether the first receiving device 920 is fixed by determining whether the fixing member 142 is locked. The fixed sensing unit 144 may be a pressure sensor, a distance sensor, or the like. In one embodiment, the fixing detection unit 144 is a pressure sensor and is disposed on the bearing member 14, and when the fixing member 142 fixes the first accommodating device 920, the pressure sensor may detect that the pressure provided by the fixing member 142 is greater than a preset pressure value, so as to determine that the first accommodating device 920 is fixed. After the first storage device 920 is fixed, the support 12 moves the carrying component 14 to the position below the gripping device 30, so as to ensure that the first storage device 920 does not fall off during the moving process.

Referring to fig. 7, in one embodiment, the carrier 14 can be flipped, and the first carrier 10 includes a flipping detection unit 16, and the flipping detection unit 16 is used to determine whether the carrier 14 is flipped.

In this way, it is possible to turn the carrier member 14 and determine whether the turning is completed according to the turning detection unit 16, so that the first storage device 920 on the carrier member 14 is in a proper posture.

In some embodiments, the first storage device 920 may be in different postures due to transportation, for example, the transportation channel is narrow but high enough, or to avoid damage to other objects on the transportation channel, the first storage device 920 may be erected during transportation of the first storage device 920, and after the first storage device 920 is placed on the carrier 14, the carrier 14 needs to be turned over to make the first storage device 920 lie flat, so as to facilitate the grasping device 30 to grasp the light cover 800 in the first storage device 920. The first carriage 10 includes a rollover detection unit 16, and whether the carriage 14 has completed rollover can be determined by the rollover detection unit 16. The roll detection unit 16 may include a distance sensor or an angle sensor, etc. In one embodiment, the turnover detecting unit 16 is an angle sensor and is used for detecting the turnover angle of the carrier 14, and the angle sensor can acquire whether the turnover angle of the carrier 14 meets a predetermined angle, so as to determine whether the carrier 14 is completely turned over. After the carrier 14 is completely flipped over, the frame 12 moves the carrier 14 to a position below the gripping device 30, so that the gripping device 30 can grip the mask 800.

Referring to fig. 8, in one embodiment, the replacing apparatus 100 includes a first position detecting unit 50, and the first position detecting unit 50 is used for detecting the position of the bearing member 14.

In this manner, the exchange device 100 may obtain the position of the carrier 14 to determine whether the carrier 14 is in place and to ensure the safety of the carrier 14.

It will be appreciated that in order to facilitate efficient and accurate operation of the gripping device 30, the carrier member 14 may be moved to a first predetermined position suitable for gripping by the gripping device 30 (e.g., directly below the gripping device 30), such that the position of the carrier member 14 may be detected by the first position detecting unit 50, and the position of the carrier member 14 may be adjusted such that the carrier member 14 is located at the first predetermined position. Further, the first position detecting unit 50 detecting the position of the carrier member 14 can prevent the carrier member 14 from colliding with other members or devices. The first position detecting unit 50 may be a distance sensor or a hall sensor. In one embodiment, the first position detecting unit 50 is a hall sensor and is provided in a motor for moving the bearing member 14, and determines a state (e.g., a rotation angle) of the motor by a magnetic field intensity detected by the hall sensor, thereby determining the position of the bearing member 14.

Referring again to fig. 4, in one embodiment, the gripping device 30 includes a rail 32 and a gripping member 34. The gripping member 34 is used for gripping the light cover 800, and the gripping member 34 is movably disposed on the guide rail 32.

As such, the grasping member 34 may move up and down through the guide rail 32 to approach or move away from the receiving devices and grasp the reticle 800 in the first receiving device 920 and place the reticle 800 into the second receiving device 940.

Specifically, after the first storage device 920 is in a proper position, the gripping member 34 moves to the first storage device 920 through the guide rail 32 and grips the mask 800, then the gripping member 34 with the mask 800 moves away from the first storage device 920 through the guide rail 32, and then after the second storage device 940 is in a proper position, the gripping member 34 moves to the second storage device 940 through the guide rail 32 and places the gripped mask 800 in the second storage device 940, thereby realizing replacement of the mask 800.

Referring to fig. 9, in one embodiment, the grasping apparatus 30 includes a grasping detection unit 36, and the grasping detection unit 36 is configured to acquire the position of the grasping element 34.

In this manner, the position of the grasping member 34 can be acquired by the grasping detection unit 36, thereby determining whether the grasping member 34 is in the proper position.

Specifically, in order to ensure that the grabbing part 34 can work normally, the relative positions of the grabbing part 34 and the receiving device need to be determined, and when the grabbing part 34 and the receiving device are too close to collide together, damage to the grabbing part 34 or the receiving device may be caused; when the grasping member 34 is far away from the receiving device, the grasping member 34 cannot normally grasp or place the mask 800. Therefore, the grasping detection unit 36 can acquire the position of the grasping member 34, in combination with the positions of the storage devices acquired by the other detection units, that is, the replacement device 100 can control the grasping member 34 to move to the position of normal operation.

In one embodiment, the grasping device 30 adjusts the position at which the grasping member 34 grasps the mask 800 according to the information of the mask 800.

Thus, the grasping device 30 can grasp the mask 800 quickly and accurately.

It is understood that the sizes and shapes of different models of masks 800 may be different, so that the positions where different models of masks 800 are suitable for gripping may be different, and thus the degree of opening of the gripping members 34 may be adjusted according to the size of the mask 800, and the positions where the gripping members 34 grip the mask 800 may be adjusted according to the shape of the mask 800, for example, when the shape of the mask 800 is a triangular prism, the suitable gripping positions of the mask 800 are side surfaces, and when the gripping members 30 grip the side edges of the mask 800, the gripping may be unstable and damage to the mask 800 may be caused.

Referring to fig. 10, in one embodiment, the replacing device 100 includes a second position detecting unit 60, and the second position detecting unit 60 is used for detecting the position of the second carrier device 20.

In this manner, the exchange device 100 may acquire the position of the second carrier device 20 to determine whether the second carrier device 20 is in a proper position and to ensure the safety of the second carrier device 20.

It is understood that, in order to facilitate the efficient and accurate operation of the gripping device 30, the second carrier 20 can be moved to a second predetermined position (e.g. directly under the gripping device 30) suitable for the gripping device 30 to place the mask 800, so that the position of the second carrier 20 can be detected by the second position detecting unit 60, and then the position of the second carrier 20 can be adjusted to make the second carrier 20 located at the second predetermined position. In addition, the second position detecting unit 60 detecting the position of the second carriage 20 may prevent the second carriage 20 from colliding with other parts or devices. The second position detecting unit 60 may be a distance sensor or a hall sensor. In one embodiment, the second position detecting unit 60 is a distance sensor and is disposed on the exchanging apparatus 100, and the position of the second carrier 20 is determined by a distance value detected by the distance sensor.

In one embodiment, the second carrier device 20 includes a trolley for carrying the second receiving device 940.

As such, a trolley may be used to carry the second storage device 940 and to move the second storage device 940 to a position suitable for the grasping device 30 to place the reticle 800.

The second carriage device 20 may have the same structure as the first carriage device 10, and the first carriage device 10 may include a carriage or other device capable of carrying a storage device. Further, the movement of the dolly may be performed manually or automatically, and is not particularly limited herein.

Referring to FIG. 11, in one embodiment, the exchange apparatus 100 includes a cleaning apparatus 70, and the cleaning apparatus 70 is used for cleaning the mask 800.

Thus, the function of the exchange apparatus 100 to clean the mask 800 is realized.

Specifically, since there may be substances such as dust that may affect the normal operation of the mask 800 in the mask 800, after the pick-up device 30 picks up the mask 800 from the first storage device 920, the cleaning device 10 may be used to clean the mask 800, and then the cleaned mask 800 is placed in the second storage device 940, so as to ensure the cleanliness of the mask 800 in the second storage device 940.

In some embodiments, the first receiving device 920 may be a mask box for storing the mask 800 by a manufacturer, and the second receiving device 940 may be a mask box in an exposure machine, which is not limited herein.

It should be noted that, in the above embodiments, the movement, and turning of the components, devices, brackets, etc., and the detection of the position and angle are all completed by the control device controlling the corresponding driving components and detecting components in a unified manner, where the driving components include motors, gears, transmission belts, etc., and the detecting components include various sensors for detecting required parameters. The control device includes, but is not limited to, a device, a circuit, etc. having data processing capability such as a personal computer, an embedded system, etc.

In the description herein, references to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps in the process, and alternate implementations are included within the scope of the preferred embodiment of the present invention in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the present invention.

The logic and/or steps represented in the flowcharts or otherwise described herein, such as an ordered listing of executable instructions for implementing logical functions, can be embodied in any computer-readable medium for use by or in connection with an instruction execution system, apparatus, or device, such as a computer-based system, processor-containing system, or other system that can fetch the instructions from the instruction execution system, apparatus, or device and execute the instructions. For the purposes of this description, a "computer-readable medium" can be any means that can contain, store, communicate, propagate, or transport the program for use by or in connection with the instruction execution system, apparatus, or device. More specific examples (a non-exhaustive list) of the computer-readable medium would include the following: an electrical connection (electronic device) having one or more wires, a portable computer diskette (magnetic device), a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber device, and a portable compact disc read-only memory (CDROM). Additionally, the computer-readable medium could even be paper or another suitable medium upon which the program is printed, as the program can be electronically captured, via for instance optical scanning of the paper or other medium, then compiled, interpreted or otherwise processed in a suitable manner if necessary, and then stored in a computer memory.

It should be understood that portions of the present invention may be implemented in hardware, software, firmware, or a combination thereof. In the above embodiments, various steps or methods may be performed by software or firmware stored in a memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, any one or combination of the following techniques, which are known in the art, may be used: a discrete logic circuit having a logic gate circuit for performing a logic function on a data signal, an application specific integrated circuit having an appropriate combinational logic gate circuit, a Programmable Gate Array (PGA), a Field Programmable Gate Array (FPGA), or the like.

It will be understood by those skilled in the art that all or part of the steps carried out in the above method may be implemented by hardware related to instructions of a program, which may be stored in a computer readable storage medium, and the program, when executed, includes one or a combination of the steps of the method embodiments.

In addition, functional units in the embodiments of the present invention may be integrated into one processing module, or each unit may exist alone physically, or two or more units are integrated into one module. The integrated module can be executed in the form of hardware or in the form of a software functional module. The integrated module, if executed in the form of a software functional module and sold or used as a stand-alone product, may also be stored in a computer readable storage medium.

The storage medium mentioned above may be a read-only memory, a magnetic or optical disk, etc. Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.

Claims

1. A changing device for changing a reticle from a first storage device to a second storage device, the changing device comprising:

a gripping device for gripping the reticle in the first receiving device and for placing the reticle into the second receiving device;

the first bearing device comprises a support and a bearing part, the bearing part is used for bearing the first containing device, the support bears the bearing part and is used for moving the bearing part, the bearing part comprises a fixing part and a fixing detection unit, the fixing part is used for fixing the first containing device, and the fixing detection unit is used for determining whether the first containing device is fixed or not.

2. The exchange apparatus according to claim 1, wherein the exchange apparatus includes an information recognition apparatus for recognizing the reticle and obtaining information of the reticle for assisting the grasping apparatus in grasping the reticle.

3. The changing apparatus according to claim 2, wherein the information recognition means includes a bar code recognition sensor.

4. The changing device of claim 1, wherein the carrier is reversible, and the first carrier includes a roll-over detection unit for determining whether the carrier is completely rolled over.

5. The changing apparatus according to claim 1, wherein the changing apparatus includes a first position detecting unit for detecting a position of the carrier.

6. The changing apparatus according to claim 1, wherein the gripping device comprises a guide rail and a gripping member for gripping the mask, the gripping member being movably disposed on the guide rail.

7. The changing apparatus according to claim 6, wherein the grasping means includes a grasping detection unit for acquiring a position of the grasping member.

8. The changing apparatus according to claim 6, wherein the gripping means adjusts a position where the gripping member grips the mask based on the information of the mask.

9. The exchanging apparatus according to claim 1, wherein the exchanging apparatus includes a second position detecting unit for detecting a position of the second carrying apparatus.

10. The changing apparatus according to claim 1, wherein the second carrying means includes a cart for carrying the second storage means.

11. The exchange device of claim 1, wherein the exchange device comprises a cleaning device for cleaning the reticle.