WO2018207492A1 - Appareil de traitement d'eau de chaudière et procédé de traitement - Google Patents

Appareil de traitement d'eau de chaudière et procédé de traitement Download PDF

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Publication number
WO2018207492A1
WO2018207492A1 PCT/JP2018/013228 JP2018013228W WO2018207492A1 WO 2018207492 A1 WO2018207492 A1 WO 2018207492A1 JP 2018013228 W JP2018013228 W JP 2018013228W WO 2018207492 A1 WO2018207492 A1 WO 2018207492A1
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WO
WIPO (PCT)
Prior art keywords
boiler
water
pure water
toc
supply line
Prior art date
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PCT/JP2018/013228
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English (en)
Japanese (ja)
Inventor
隆史 仲本
和巳 塚本
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栗田工業株式会社
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Filing date
Publication date
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Publication of WO2018207492A1 publication Critical patent/WO2018207492A1/fr

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    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/30Treatment of water, waste water, or sewage by irradiation
    • C02F1/32Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/42Treatment of water, waste water, or sewage by ion-exchange
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/44Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F22STEAM GENERATION
    • F22BMETHODS OF STEAM GENERATION; STEAM BOILERS
    • F22B37/00Component parts or details of steam boilers
    • F22B37/02Component parts or details of steam boilers applicable to more than one kind or type of steam boiler
    • F22B37/48Devices for removing water, salt, or sludge from boilers; Arrangements of cleaning apparatus in boilers; Combinations thereof with boilers
    • F22B37/52Washing-out devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F22STEAM GENERATION
    • F22DPREHEATING, OR ACCUMULATING PREHEATED, FEED-WATER FOR STEAM GENERATION; FEED-WATER SUPPLY FOR STEAM GENERATION; CONTROLLING WATER LEVEL FOR STEAM GENERATION; AUXILIARY DEVICES FOR PROMOTING WATER CIRCULATION WITHIN STEAM BOILERS
    • F22D11/00Feed-water supply not provided for in other main groups
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A20/00Water conservation; Efficient water supply; Efficient water use
    • Y02A20/124Water desalination
    • Y02A20/131Reverse-osmosis

Definitions

  • the present invention relates to an apparatus and method for treating boiler water of power generation equipment such as commercial thermal power, IPP power generation equipment or industrial thermal power generation equipment.
  • IPP power generation independent power generation business
  • pure water is produced from industrial water or the like by pretreatment (such as agglomeration solid-liquid separation and desalination treatment), and steam is generated from the pure water using a high pressure boiler to generate power.
  • pretreatment such as agglomeration solid-liquid separation and desalination treatment
  • steam is generated from the pure water using a high pressure boiler to generate power.
  • boiler blow water is collected, desalted, and reused as pure water for power generation (Patent Documents 1 to 3).
  • the boiler water quality is managed in the power generation facility.
  • the electrical conductivity of boiler water after being treated with an ion exchange resin is managed.
  • raw water contains TOC more than expected (for example, TOC 200 ppb or more), or when organic substances are excessively eluted from ion-exchange resin in pre-treatment pure water production, the electrical conductivity of boiler water exceeds the control value. Resulting in.
  • An object of the present invention is to provide a boiler water treatment apparatus and a treatment method capable of stably supplying high-quality pure water to a boiler even when the TOC of raw water or pretreatment water is high in concentration.
  • the boiler water treatment device of the present invention is a boiler water treatment device having a pretreatment device for producing pure water by treating raw water, and a pure water supply line for supplying pure water from the pretreatment device to the boiler.
  • the take-out unit is provided in a pure water tank of a pure water supply line.
  • the TOC removing unit includes an RO device or a UV oxidation device and an ion exchange device.
  • the boiler water treatment apparatus includes a measuring unit for measuring the TOC concentration of pure water in the pure water take-out unit or the upstream side of the pure water supply line, and a measured value of the measuring unit is a predetermined value.
  • the TOC removal unit starts the TOC removal, or the pure water supply amount control unit increases the pure water supply amount to the TOC removal unit.
  • a boiler water treatment apparatus includes condensate demineralization means for desalinating boiler blow water discharged from the boiler after exhaust steam from the boiler is condensed, and boiler blow water from the boiler A boiler blow water introduction line to be introduced into the condensate demineralization means, and a condensate for returning the condensate demineralized water desalted by the condensate demineralization means to the take-out section or a pure water supply line upstream of the extraction section. And a desalted water return line.
  • the boiler water treatment apparatus includes an RO device as the TOC removing unit, and a heat exchanger for exchanging heat between the RO concentrated water and the boiler blow water of the RO device is provided in the boiler blow water introduction line. Prepare.
  • the boiler water treatment method of the present invention is a boiler water treatment method in which raw water is treated with a pretreatment device to produce pure water, and pure water from the pretreatment device is supplied to the boiler via a pure water supply line. , Removing a part of the pure water from the pure water supply line from the take-out part, and removing the TOC by the TOC removing means, and returning the treated water to the take-out part or the pure water supply line on the upstream side thereof. It is a feature.
  • the TOC removing unit includes an RO device or a UV oxidation device and an ion exchange device.
  • the TOC concentration of pure water in the pure water supply line on the upstream side with respect to the take-out part is measured, and the TOC removal is performed when the measured value is a predetermined value or more.
  • the TOC removal by the means is started, or the amount of pure water supplied to the TOC removal means is increased.
  • the boiler blow water discharged from the boiler after the exhaust steam from the boiler is condensed is desalted by the condensate demineralization means, and dehydrated by the condensate demineralization means.
  • the salt-treated condensate demineralized water is returned to the extraction section or the pure water supply line upstream of the extraction section.
  • the TOC removing unit includes an RO device, and heat exchange is performed between the RO concentrated water of the RO device and the boiler blow water supplied to the condensate demineralization unit. Then, the boiler blow water is cooled.
  • the TOC removal means is not provided in the pure water supply line (main line) for supplying pure water from the pretreatment device to the boiler, but the TOC removal line (offline) branched from the pure water supply line. Removal means are provided. Therefore, the TOC removing unit can be controlled separately from the pure water supply control in the pure water supply line (main line).
  • the TOC removal operation when the TOC load of raw water is low, the TOC removal operation can be temporarily suspended. Further, even when the pure water supply line is in a pure water supply operation, the maintenance of the TOC removing means can be performed.
  • the RO concentrated water in the TOC removal line is used as cooling water for boiler blow water.
  • FIG. 1 is a flowchart of a boiler water treatment apparatus according to an embodiment of the present invention.
  • FIG. 2 is a flowchart of a boiler water treatment apparatus according to another embodiment.
  • FIG. 3 is a flowchart of the boiler water treatment apparatus according to the comparative example.
  • FIG. 1 is a flowchart of the boiler water treatment apparatus according to the first embodiment.
  • Industrial water industrial water
  • pure water tank 3 corresponding to a takeout portion
  • Pure water in the pure water tank 3 is supplied to a boiler of a power generator 6 such as an IPP power generator via a pipe 5 having a pump 4.
  • the pure water supply line has a pipe 2, a pure water tank 3, a pump 4 and a pipe 5.
  • Boiler blow water generated in the boiler of the power generation device 6 is introduced into the condensate demineralizer 10 through the introduction line having the pipe 7, the first heat exchanger 8B, the cooling means 8A, and the pipe 9, and is desalted.
  • the condensate desalination apparatus 10 includes reverse osmosis membrane separation apparatuses (RO apparatuses) 11 and 12 arranged in a plurality of stages (two stages in this embodiment), and an electric desalination apparatus 13. Have.
  • the boiler blow water is desalted by RO treatment and electric desalination treatment to become pure water, and is returned to the pure water tank 3 via the pipe 14.
  • a TOC removal line is provided in order to take out a part of pure water in the pure water tank 3 and perform TOC removal treatment and desalination treatment.
  • Pure water in the pure water tank 3 is supplied to the RO device 18 via the pipe 15, the second heat exchanger 16, and the pump 17, and RO permeated water is returned to the pure water tank 3 via the pipe 19.
  • the RO concentrated water is supplied to the first heat exchanger 8B via the pipe 20, and after heat exchange with the boiler blow water, the pre-treatment device 1 or upstream of the raw water pipe or the raw water tank is supplied via the pipe 21. Returned or discharged out of the system.
  • the second heat exchanger 16 heats pure water supplied from the pure water tank 3 to the RO device 18.
  • the first heat exchanger 8B cools and lowers the temperature of the boiler blow water sent to the condensate demineralizer 10.
  • the concentrated water from the RO device 18 is passed through the first heat exchanger 8B to the low temperature fluid side.
  • the pump 17 is operated when necessary, and the pure water in the pure water tank 3 is subjected to RO treatment by the RO device 18, whereby the quality of pure water in the pure water tank 3 is predetermined. Can be kept in range.
  • the RO treatment efficiency can be increased by heating the pure water supplied to the RO device 18 with the second heat exchanger 16.
  • the water temperature in the pure water tank 3 increases.
  • the pipe 15 is connected to the pure water tank 3 as a take-out portion, but the pipe 15 may be connected to the pipe 5 on the downstream side of the pure water tank 3. In this case, the branch point becomes the takeout part.
  • FIG. 2 is a flowchart of the boiler water treatment apparatus according to the second embodiment.
  • a TOC removing device for maintaining the quality of pure water in the pure water tank 3 a UV (ultraviolet) oxidation device 25 and an ion exchange device 26 are installed instead of the RO device 18 in FIG.
  • the ion exchange resin is preferably an anion exchange resin or a mixed bed resin.
  • UV oxidation apparatus e.g., a low-pressure UV oxidation apparatus
  • the organic material by irradiating the (pure water from the pure water tank 3) the UV treated water and organic acids to CO 2.
  • the organic acid, CO 2 and the like generated by the decomposition are removed by the ion exchange device 26 at the subsequent stage. Pure water having a low organic matter concentration that has passed through the ion exchange device 26 is returned from the pipe 19 to the pure water tank 3.
  • the pipes 20 and 21 for supplying the RO concentrated water to the first heat exchanger 8B are not installed. Cooling water introduced from outside the system is passed through the first heat exchanger 8B on the low temperature fluid side.
  • Boiler blow water from the boiler of the power generation device 6 is sent to the condensate demineralizer 10 through an introduction line having the pipe 7, the first heat exchanger 8B, the cooling means 8A, and the pipe 9.
  • Other configurations are the same as those in FIG. 1, and the same reference numerals indicate the same parts.
  • Pretreatment device 1 removes the raw water such as industrial water (city water, groundwater, etc.) after performing coagulation treatment, solid-liquid separation (precipitation separation, pressurized flotation separation, etc.) and two-layer filtration sequentially. Pure water is produced by performing a salt treatment (treatment with a cation exchange resin tower, a decarboxylation tower, an anion exchange resin tower, a mixed bed resin tower, an electric desalination apparatus, or the like).
  • a salt treatment treatment with a cation exchange resin tower, a decarboxylation tower, an anion exchange resin tower, a mixed bed resin tower, an electric desalination apparatus, or the like.
  • Pure water tank 3 In the pure water tank 3, pure water produced by the pretreatment is stored, and the water quality and the amount of water are adjusted.
  • TOC removal means When the TOC concentration contained in raw water such as industrial water is high, it may be difficult to reduce the TOC concentration to a predetermined value or less (for example, less than 100 ppb) by pretreatment. When the TOC concentration is 100 ppb or more, there is a concern that a burden on the boiler becomes large and a failure may occur in the future.
  • the water temperature varies depending on the season and climate (for example, 5 to 35 ° C). When the water temperature is 15 ° C. or less, the load on the power generation boiler increases and the amount of fuel used increases.
  • the pure water collected from the pure water tank 3 constituting the pure water supply line is supplied to the RO device 18 so that the TOC of pure water in the pure water tank 3 is always maintained at a predetermined value or less (for example, 100 ppb or less).
  • the TOC removal process is performed by the TOC removal means comprising the UV oxidation device 25 and the ion exchange device 26.
  • the TOC removing means By using a physicochemical means as the TOC removing means, it is possible to prevent impurities from remaining in the treated water.
  • the TOC removal means By installing the TOC removal means in the TOC removal line branched from the pure water supply line, for example, control and maintenance different from the pure water supply line are possible, such as being unaffected by the stoppage of water flow due to the membrane backwashing.
  • the TOC removing means can be easily installed in an existing boiler water supply device by additional work.
  • the TOC concentration measuring means and the pump 17 are interlocked, and when the measured value of the TOC concentration measuring means exceeds a predetermined value, the pump 17 is operated to supply water to the TOC removing means, and the TOC.
  • a removal process may be performed.
  • An on-off valve is provided in the pipe 15, and this on-off valve is interlocked with the TOC concentration measuring means to open the on-off valve when the measured value of the TOC concentration measuring means is a predetermined value or more and supply pure water to the TOC removing means. You may make it perform a TOC removal process.
  • the pump 17 is stopped or the on-off valve is closed to stop the supply of pure water to the TOC removing means.
  • the amount of pure water supplied to the TOC removing means may be controlled. For example, by interlocking the TOC concentration measuring means and the pump 17, when the measured value of the TOC concentration measuring means exceeds a predetermined value, the rotational speed of the pump 17 is increased to increase the amount of pure water supplied to the TOC removing means. The amount of pure water to be subjected to the TOC removal process may be increased.
  • a flow rate adjusting valve is provided in the pipe 15, and this flow rate adjusting valve is linked to the TOC concentration measuring means.
  • the opening of the flow adjusting valve is increased to remove the TOC.
  • the amount of pure water supplied to the means may be increased to increase the amount of pure water subjected to the TOC removal process.
  • the pure water supply amount to the TOC removing means is reduced by reducing the rotational speed of the pump 17 or reducing the opening of the flow rate adjusting valve.
  • the required amount of pure water can be processed by the TOC removing means by controlling the presence or the amount of pure water supplied to the TOC removing means. Costs related to the TOC removal process can be reduced.
  • the control of whether or not the pure water is supplied to the TOC removing means or the increase / decrease in the supply amount is performed by inputting the measured value of the TOC concentration of the TOC concentration measuring means and outputting a control signal to the pump or valve based on the measured value. It can be performed automatically by the control device.
  • the power generation device 6 there are various types such as an IPP power generation device equipped with a high-pressure boiler.
  • Boiler blow water discharge line to condensate demineralization means to condensate return line The boiler steam condensate is generally at a high temperature (for example, 70 to 97 ° C), and after being discharged from the boiler as boiler blow water, cooling means 8A (sealed) After cooling to about 20 to 40 ° C. by a cooling tower, a heat exchanger, etc., it is supplied to the condensate demineralizer 10.
  • First heat exchanger 8B As shown in FIG. 1, when the RO device 18 is used as the TOC removing means, the RO concentrated water at a room temperature (5 to 35 ° C.) is discharged, so this RO concentrated water is provided in the first stage of the cooling means 8A. 1 Water is passed through the heat exchanger 8B to exchange heat with the boiler blow water, and the boiler blow water is precooled to about 50 to 70 ° C. Thereby, the load of the cooling means 8A provided in the front stage of the condensate demineralizer 10 is reduced.
  • Second heat exchanger 16 When the water temperature of the pure water tank 3 is likely to drop to a predetermined value or lower (for example, 15 ° C. or lower), the water supplied from the TOC removing unit is heated by exchanging heat with hot water in the second heat exchanger 16. Thereby, it is possible to remove the TOC efficiently by the TOC removing means. If the water temperature of the pure water tank 3 is maintained at 20 to 35 ° C., for example, the burden on the high-pressure boiler of the IPP power generation facility can be reduced.
  • a predetermined value or lower for example, 15 ° C. or lower
  • the valve may be switched so as to supply hot water to the second heat exchanger 16 and the temperature may be controlled by this mechanism.
  • the flow rate may be controlled so as to adjust the supply flow rate to the second heat exchanger 16 based on the measured water temperature.
  • Example 1 Chiba Prefecture industrial water (TOC concentration 2 to 3 ppm; water temperature 10 ° C.) was treated by the boiler water treatment device shown in FIG. 1 and supplied to the boiler of the IPP power generation device 6, and boiler blow water was collected.
  • the pretreatment apparatus 1 pure water was produced by performing agglomeration treatment, pressurized flotation separation, two-layer filtration, two-bed three-column ion exchange (cation exchange, decarboxylation, anion exchange). The main conditions are shown below and in Table 1. The results are shown in Table 1.
  • Average supply amount of industrial water (average flow rate in pipe 2): 35 m 3 / hr Pure water tank 3 volume: 400m 3 Average amount of water supply to the IPP power generation boiler (average flow rate in the pipe 5): 35 m 3 / hr Boiler blow water average flow rate (average flow rate in pipe 7): 10 to 12 m 3 / hr RO device 18 average water supply amount (average flow rate in pipe 15): 34 m 3 / hr RO device 18 average permeate flow rate (average flow rate in pipe 19): 30 m 3 / hr 1st heat exchanger 8B feed water average flow rate: 10-12m 3 / hr Cooling means 8A water supply average flow rate: 10-12 m 3 / hr Second heat exchanger 16 average feed water flow rate: 34 m 3 / hr
  • Example 2 The operation was performed under the same conditions as in Example 1 except that the boiler water treatment apparatus shown in FIG. The results are shown in Table 1.
  • Example 3 In Example 1, the 2nd heat exchanger 16 was abbreviate
  • FIG. The results are shown in Table 1.
  • Example 4 In Example 1, the operation was performed under the same conditions as in Example 1 except that the pipes 20 and 21 and the first heat exchanger 8B were omitted and the boiler blow water was not preliminarily cooled with the RO concentrated water. The results are shown in Table 1.
  • Example 1 In Example 1, the piping 15 for removing the TOC, the second heat exchanger 16, the pump 17, the RO device 18, the piping 19, the piping 20, 21 and the first heat exchanger 8B are omitted, and the flow of FIG. The operation was performed under the same conditions as in Example 1 except that. The results are shown in Table 1.
  • the TOC concentration of boiler feed water is lower than that in Comparative Example 1, and the load on the boiler is reduced.
  • the TOC removal rate in the same RO apparatus is higher in Examples 1 and 4 in which the TOC removal line was not preheated than in Example 3 in which the TOC removal line was not preliminarily performed.
  • the load on the subsequent boiler is reduced.
  • the load on the subsequent cooling means is reduced in the first to third embodiments in which the boiler blow water was not preliminarily cooled in the first to third embodiments.

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  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Hydrology & Water Resources (AREA)
  • Organic Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Water Treatments (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

De l'eau industrielle est fournie par l'intermédiaire d'un dispositif de prétraitement (1) et d'un réservoir d'eau pure (3) à une chaudière d'un appareil de production d'énergie électrique (6). L'eau de purge de chaudière est déminéralisée par un appareil de déminéralisation de condensat (10) puis renvoyée au réservoir d'eau pure (3). Une partie de l'eau pure dans le réservoir d'eau pure (3) est fournie à un dispositif RO (18) et le perméat RO est renvoyé au réservoir d'eau pure (3). Le concentré RO est transporté par l'intermédiaire d'une tuyauterie (20) jusqu'à un premier échangeur de chaleur (8B).
PCT/JP2018/013228 2017-05-12 2018-03-29 Appareil de traitement d'eau de chaudière et procédé de traitement WO2018207492A1 (fr)

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JP2017-095835 2017-05-12
JP2017095835A JP6447663B2 (ja) 2017-05-12 2017-05-12 ボイラ水処理装置および処理方法

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7497650B2 (ja) 2020-08-26 2024-06-11 栗田工業株式会社 ボイラ水処理装置および処理方法

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02298395A (ja) * 1989-05-15 1990-12-10 Tokyo Organ Chem Ind Ltd イオン交換樹脂組成物を用いた超純水の製造法
JPH0671256A (ja) * 1992-08-31 1994-03-15 Nomura Micro Sci Kk 純水化方法
JPH09239362A (ja) * 1996-03-06 1997-09-16 Kurita Water Ind Ltd 復水器への補給水供給装置
JPH10309575A (ja) * 1997-05-09 1998-11-24 Kurita Water Ind Ltd 純水製造装置
JPH11207340A (ja) * 1998-01-26 1999-08-03 Kurita Water Ind Ltd 復水の補給装置
JP2003117548A (ja) * 2001-10-16 2003-04-22 Japan Organo Co Ltd 発電所用補給水処理システムおよび処理方法
JP2003275743A (ja) * 2002-03-25 2003-09-30 Nomura Micro Sci Co Ltd バッファタンク
JP2008261317A (ja) * 2007-04-13 2008-10-30 Chugoku Electric Power Co Inc:The 発電設備の運用方法
JP2013202581A (ja) * 2012-03-29 2013-10-07 Kurita Water Ind Ltd 超純水製造装置
JP2013245833A (ja) * 2012-05-23 2013-12-09 Kurita Water Ind Ltd 発電プラント
WO2015050125A1 (fr) * 2013-10-04 2015-04-09 栗田工業株式会社 Dispositif de production d'eau ultrapure

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02298395A (ja) * 1989-05-15 1990-12-10 Tokyo Organ Chem Ind Ltd イオン交換樹脂組成物を用いた超純水の製造法
JPH0671256A (ja) * 1992-08-31 1994-03-15 Nomura Micro Sci Kk 純水化方法
JPH09239362A (ja) * 1996-03-06 1997-09-16 Kurita Water Ind Ltd 復水器への補給水供給装置
JPH10309575A (ja) * 1997-05-09 1998-11-24 Kurita Water Ind Ltd 純水製造装置
JPH11207340A (ja) * 1998-01-26 1999-08-03 Kurita Water Ind Ltd 復水の補給装置
JP2003117548A (ja) * 2001-10-16 2003-04-22 Japan Organo Co Ltd 発電所用補給水処理システムおよび処理方法
JP2003275743A (ja) * 2002-03-25 2003-09-30 Nomura Micro Sci Co Ltd バッファタンク
JP2008261317A (ja) * 2007-04-13 2008-10-30 Chugoku Electric Power Co Inc:The 発電設備の運用方法
JP2013202581A (ja) * 2012-03-29 2013-10-07 Kurita Water Ind Ltd 超純水製造装置
JP2013245833A (ja) * 2012-05-23 2013-12-09 Kurita Water Ind Ltd 発電プラント
WO2015050125A1 (fr) * 2013-10-04 2015-04-09 栗田工業株式会社 Dispositif de production d'eau ultrapure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7497650B2 (ja) 2020-08-26 2024-06-11 栗田工業株式会社 ボイラ水処理装置および処理方法

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