WO2018198350A1 - Vapor chamber - Google Patents

Vapor chamber Download PDF

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Publication number
WO2018198350A1
WO2018198350A1 PCT/JP2017/017035 JP2017017035W WO2018198350A1 WO 2018198350 A1 WO2018198350 A1 WO 2018198350A1 JP 2017017035 W JP2017017035 W JP 2017017035W WO 2018198350 A1 WO2018198350 A1 WO 2018198350A1
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WO
WIPO (PCT)
Prior art keywords
sheet
vapor chamber
formula
distance
less
Prior art date
Application number
PCT/JP2017/017035
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French (fr)
Japanese (ja)
Inventor
岸本　敦司
宗一 久米
池田　治彦
拓生 若岡
近川　修
Original Assignee
株式会社村田製作所
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Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to PCT/JP2017/017035 priority Critical patent/WO2018198350A1/en
Priority to CN201880005148.0A priority patent/CN110088556B/en
Priority to PCT/JP2018/016936 priority patent/WO2018199215A1/en
Priority to JP2019506538A priority patent/JP6741142B2/en
Publication of WO2018198350A1 publication Critical patent/WO2018198350A1/en
Priority to US16/414,802 priority patent/US11150030B2/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes

Definitions

  • the present invention relates to a vapor chamber.
  • the vapor chamber has a structure in which a wick that transports hydraulic fluid by capillary force is provided inside the casing, and the hydraulic fluid is enclosed.
  • the hydraulic fluid absorbs heat from the heating element in the evaporation section that absorbs heat from the heating element, evaporates in the vapor chamber, moves to the condensation section, is cooled, and returns to the liquid phase.
  • the working fluid that has returned to the liquid phase is moved again to the heating element side (evaporating part) by the capillary force of the wick, and cools the heating element.
  • the vapor chamber operates independently without external power, and heat can be diffused at a high speed two-dimensionally using the latent heat of vaporization and the latent heat of condensation of the working fluid.
  • Patent Document 1 includes a casing in which a convex portion having a hollow portion formed by two opposing plate-like bodies is formed in the central portion, and a working fluid sealed in the hollow portion, A vapor chamber is disclosed in which the hollow portion is provided with a wick structure and the outer peripheral portion of the convex portion is sealed by laser welding.
  • Patent Document 2 discloses a vapor chamber in which two or more etched metal sheets are stacked to form a container in which at least a part of the outer peripheral portion is sealed by bonding. The vapor chamber is characterized in that the outer peripheral portion of the metal sheet is formed by diffusion bonding the side wall of the metal sheet, and the width of the side wall is 0.3 mm or more.
  • the vapor chambers described in Patent Documents 1 and 2 are pre-processed such as forming a metal sheet constituting the casing in a convex shape in advance or forming a groove in the sheet in order to form an internal space of the casing. Is required.
  • the present inventors do not perform the pre-processing of the metal sheet for forming such an internal space of the housing, but provide a column between two sheets constituting the housing, thereby providing the interior of the housing. Tried to secure space.
  • the vapor chamber thus obtained may be inferior in reliability.
  • An object of the present invention is to provide a highly reliable vapor chamber using a casing in which a column is provided between two sheets.
  • the present inventors have determined the distance between the two sheets and the two sheets.
  • the present invention has found that a highly reliable vapor chamber can be obtained by adjusting the width of the joining portion according to the distance from the location where the two sheets start approaching to join the sheets to the joining portion. It came to.
  • a housing composed of a first sheet and a second sheet facing each other, the outer edges of which are joined; A pillar provided between the first sheet and the second sheet so as to support them from the inside; A hydraulic fluid enclosed in the housing, The first sheet and the second sheet do not have a corner portion whose angle is 90 ° or less between the joint portion and the column closest to the joint portion, Vapor chamber satisfying the following formula 1, formula 2, and formula 3 Formula 1: c ⁇ 1.8 ⁇ b / a + 0.270 Formula 2: 0.016 ⁇ b / a ⁇ 0.125 Formula 3: b ⁇ 0.500 [Where: a is the distance (mm) from the position where the sheet starts to deform to the end of the joint, b is the distance (mm) between the first sheet and the second sheet at the position where the sheet starts to deform, c is the width (mm) of the joint. ] Is provided.
  • a heat dissipation device having the above-described vapor chamber.
  • an electronic apparatus comprising the vapor chamber or the heat dissipation device.
  • the distance between the inner end of the joint and the pillar closest to the joint, and the joint can be improved by adjusting the width of the joint portion according to the distance between the first sheet and the second sheet at the position where the closest column exists.
  • a highly reliable vapor chamber can be easily manufactured.
  • FIG. 1 is a cross-sectional view schematically showing a cross section of a vapor chamber 1 in one embodiment of the present invention.
  • FIG. 2 is a plan view schematically showing the vapor chamber 1 according to one embodiment of the present invention as viewed from the first sheet side.
  • the vapor chamber 1 of the present embodiment includes a housing 4 composed of a first sheet 2 and a second sheet 3 facing each other, and a working fluid sealed in the casing (FIG. 1). Not shown).
  • a plurality of pillars 5 are provided between the first sheet 2 and the second sheet 3 to support them from the inside.
  • the first sheet 2 and the second sheet 3 are supported by the pillar 5 in the inner region 11 (hereinafter also referred to as “central region”) connecting the pillars 5 existing on the edge side, and are separated by a predetermined distance. .
  • the first sheet 2 and the second sheet 3 are close to each other in the region 12 outside the central region 11 (hereinafter, also referred to as “terminal region”), contact at the outer edge portion, and are bonded and sealed.
  • the portion 6 where the first sheet and the second sheet are joined is also referred to as a “joint portion”.
  • the first sheet 2 and the second sheet 3 typically begin to approach each other from the end of the column 5 closest to the edge of the sheet and are joined to each other at the joint 6 located at the outer edge of the sheet. Is sealed.
  • seat 3 has the some convex part 7 in the inner surface (namely, main surface by the side of the internal space of a housing
  • a wick 8 is provided on the second sheet 3. That is, in the vapor chamber 1 of the present embodiment, the wick 8 is positioned on the second sheet 3, the column 5 is positioned on the wick 8, and the first sheet 2 is positioned on the column 5.
  • the casing 4 includes a first sheet 2 and a second sheet 3 that face each other.
  • the size of the casing 4 is not particularly limited.
  • the thickness of the housing 4 (indicated by T in FIG. 1) is preferably 100 ⁇ m or more and 600 ⁇ m or less, more preferably 200 ⁇ m or more and 500 ⁇ m or less.
  • the length (indicated by L in FIG. 1) and the width (indicated by W in FIG. 2) of the housing 4 can be appropriately set according to the application to be used, for example, 5 mm to 500 mm, 20 mm or more. It may be 300 mm or less, or 50 mm or more and 200 mm or less.
  • the shape of the casing 4 is not particularly limited.
  • the planar shape of the housing 4 (the shape shown in FIG. 2, that is, the shape seen from the upper side in FIG. 1) is a polygon such as a triangle or a rectangle, a circle, an ellipse, a combination of these, etc. It can be.
  • the material for forming the first sheet 2 and the second sheet 3 is not particularly limited as long as it has characteristics suitable for use as a vapor chamber, such as thermal conductivity, strength, flexibility, and the like.
  • the material constituting the first sheet 2 and the second sheet 3 is preferably a metal, such as copper, nickel, aluminum, magnesium, titanium, iron, or an alloy containing them as a main component, particularly preferably. It can be copper.
  • the materials constituting the first sheet 2 and the second sheet 3 may be the same or different, but are preferably the same.
  • the thickness (indicated by t in FIG. 1) of the first sheet 2 and the second sheet 3 is not particularly limited, but is preferably 10 ⁇ m to 200 ⁇ m, more preferably 30 ⁇ m to 100 ⁇ m, for example, preferably 40 ⁇ m to 60 ⁇ m. It can be:
  • the second sheet 3 has a plurality of convex portions 7 on the main surface on the inner space side.
  • the hydraulic fluid can be held between the convex portions, and the transmittance of the vapor chamber of the present invention can be increased.
  • the transmittance By increasing the transmittance, the heat transport capability of the vapor chamber is improved.
  • the convex portion refers to a portion having a relatively higher height than the surroundings, and in addition to the portion protruding from the main surface, the height is relatively high due to a concave portion formed on the main surface, such as a groove. The part which becomes.
  • the height of the convex portion 7 is not particularly limited, but may be preferably 1 ⁇ m or more and 100 ⁇ m or less, more preferably 5 ⁇ m or more and 50 ⁇ m or less, and further preferably 15 ⁇ m or more and 30 ⁇ m or less.
  • the distance between the convex portions 7 is not particularly limited, but may be preferably 1 ⁇ m or more and 500 ⁇ m or less, more preferably 5 ⁇ m or more and 300 ⁇ m or less, and further preferably 15 ⁇ m or more and 150 ⁇ m or less.
  • the capillary force can be further increased.
  • the transmittance can be further increased by increasing the distance between the convex portions.
  • the shape of the convex portion 7 is not particularly limited, but may be a cylindrical shape, a prism shape, a truncated cone shape, a truncated pyramid shape, or the like. Further, the shape of the convex portion 7 may be a wall shape, that is, a shape in which a groove is formed between adjacent convex portions.
  • the convex portion 7 is not an essential component and may not exist.
  • the first sheet 2 and the second sheet 3 are joined to each other at their outer edge portions.
  • the joining method is not particularly limited.
  • laser welding, resistance welding, diffusion joining, brazing, TIG welding (tungsten-inert gas welding), ultrasonic joining, or resin sealing can be used.
  • Laser welding, resistance welding or brazing can be used.
  • the pillar 5 supports the first sheet 2 and the second sheet 3 from the inside so that the distance between the first sheet and the second sheet is a predetermined distance.
  • the pillar 5 may be in direct contact with each sheet, or may be supported via another member such as a wick.
  • the material which forms the said pillar 5 is not specifically limited, For example, it is a metal, for example, they are copper, nickel, aluminum, magnesium, titanium, iron, or an alloy which has them as a main component, Especially preferably, it is copper. obtain.
  • the material forming the pillar is the same material as either or both of the first sheet and the second sheet.
  • the height of the pillar 5 can be appropriately set according to the desired thickness of the vapor chamber, preferably 50 ⁇ m or more and 500 ⁇ m or less, more preferably 100 ⁇ m or more and 400 ⁇ m or less, and further preferably 100 ⁇ m or more and 200 ⁇ m or less, for example 125 ⁇ m or more. 150 ⁇ m or less.
  • the height of the column means the height in the thickness direction of the vapor chamber (the height in the vertical direction in FIG. 1).
  • the shape of the column 5 is not particularly limited, but may be a columnar shape, a prismatic shape, a truncated cone shape, a truncated pyramid shape, or the like.
  • the thickness of the column 5 is not particularly limited as long as it gives strength capable of suppressing deformation of the casing of the vapor chamber.
  • the equivalent circle diameter of a cross section perpendicular to the column height direction is 100 ⁇ m or more and 2000 ⁇ m or less.
  • the thickness may be preferably 300 ⁇ m or more and 1000 ⁇ m or less.
  • the arrangement of the pillars 5 is not particularly limited, but is preferably arranged evenly, for example, in the form of lattice points so that the distance between the pillars is constant. By arranging the columns evenly, a uniform strength can be ensured throughout the vapor chamber.
  • the number and interval of the pillars 5 are not particularly limited, but are preferably 0.125 or more and 0.5 or less, more preferably 0.125 or more, more preferably 1 or less per 1 mm 2 of the main surface area of one sheet that defines the internal space of the vapor chamber. It may be 0.2 or more and 0.3 or less.
  • the pillar 5 may be formed integrally with the first sheet, or may be manufactured separately from the first sheet and then fixed to a predetermined portion of the first sheet.
  • the wick 8 is not particularly limited as long as it has a structure capable of moving the hydraulic fluid by capillary force.
  • the capillary structure that exhibits the capillary force for moving the working fluid is not particularly limited, and may be a known structure used in a conventional vapor chamber.
  • examples of the capillary structure include fine structures having irregularities such as pores, grooves, and protrusions, such as a fiber structure, a groove structure, and a network structure.
  • the thickness of the wick 8 is not particularly limited, but may be, for example, 5 ⁇ m to 200 ⁇ m, preferably 10 ⁇ m to 80 ⁇ m, and more preferably 30 ⁇ m to 50 ⁇ m.
  • the size and shape of the wick 8 are not particularly limited.
  • the wick 8 has a size and shape that can be continuously installed from the evaporation section to the condensation section inside the housing.
  • the wick 8 is not an essential component and may not exist.
  • irregularities, grooves, or the like may be formed on the surface of one or both of the first sheet and the second sheet, and the sheet itself may function as a wick.
  • the pillar 5 can directly contact both the first sheet and the second sheet.
  • the hydraulic fluid is not particularly limited as long as it can cause a gas-liquid phase change under the environment in the casing, and for example, water, alcohols, alternative chlorofluorocarbon, or the like can be used.
  • the hydraulic fluid is an aqueous compound, preferably water.
  • the first sheet 2, the second sheet 3, the pillar 5, and the wick 8 described above are stacked in the order of the second sheet 3, the wick 8, the pillar 5, and the first sheet 2. It is in the state that was done.
  • the first sheet 2 and the second sheet 3 approach in the end region 12 as they approach the edge of the sheet, contact at the outer edge, and are joined and sealed.
  • the portion where the first sheet and the second sheet are joined is also referred to as a “joint portion”.
  • At least one of the first sheet and the second sheet is deformed (curved or refracted) in the terminal region to approach the other sheet, but is 90 ° or less, preferably 100 ° or less, more preferably 110 ° or less. Does not deform at an angle.
  • the distance (mm) from the position where the sheet starts to be deformed to the end of the joint is “a”, and the position between the first sheet and the second sheet at the position where the sheet starts to deform is
  • the distance (mm) is “b” and the joint width (mm) is “c”
  • the following formulas 1 to 3 are satisfied.
  • the vapor chamber of the present invention satisfies the following formulas 1 ′, 2 ′ and 3 ′.
  • Formula 1 ′ c ⁇ 1.8 ⁇ b / a + 0.470
  • Formula 2 ′ 0.030 ⁇ b / a ⁇ 0.100
  • Formula 3 ′ b ⁇ 0.400
  • the width of the joint can be preferably 1.000 mm or less, more preferably 0.800 mm or less. That is, c can be preferably 1.000 or less, more preferably 0.800 or less.
  • the distance between the first sheet and the second sheet at the position where the sheet starts to deform may be preferably 0.060 mm or more, more preferably 0.100 or more. That is, b can be preferably 0.060 or more, more preferably 0.100 or more.
  • the “position where the sheet starts to deform” means a position where one or both of the first sheet and the second sheet starts deformation toward the other sheet for bonding.
  • the “position where the sheet begins to deform” may be the boundary between the central region 11 and the end region 12.
  • the “distance (mm) from the position where the sheet starts to deform to the end of the joint” means the distance from the position where the sheet starts to deform to the end of the nearest joint.
  • distance (mm) between the first sheet and the second sheet at the position where the sheet starts to deform refers to the inner main surface of the first sheet and the second sheet at the position where the sheet starts to deform. This means the distance between the inner main surfaces.
  • the distance between the inner main surfaces of a 1st sheet and a 2nd sheet is based on the surface at the time of assuming that this convex part or a recessed part does not exist.
  • the height direction position (position in the vertical direction in FIG. 1) where the joint portion 6 of the first sheet and the second sheet exists is the height (first position) between the first sheet and the second sheet in the central region 11. As long as it is the same height as the sheet or the second sheet).
  • the position in the height direction where the joint portion 6 exists is an intermediate portion between the first sheet and the second sheet, that is, the height direction from the joint portion to the inner main surface of the first sheet in the central region 11. The distance and the distance in the height direction from the joint portion to the inner main surface of the second sheet in the central region 11 are equal.
  • the vapor chamber of this invention was demonstrated by the said embodiment, the vapor chamber of this invention is not limited to the aspect shown in figure, Various modifications are possible.
  • the vapor chamber in another aspect may further have a convex portion on the inner main surface of the first sheet 2.
  • a concave portion may be present instead of the convex portion on one or both inner main surfaces of the first sheet 2 or the second sheet 3.
  • the vapor chamber in another aspect may further have a wick on the first sheet 2.
  • the pillar 5 may support the first sheet 2 via the wick without directly contacting the first sheet 2.
  • the vapor chamber of the present invention has a high heat transport capability and a high thermal diffusion capability as described above, it is preferably used for a heat dissipation device.
  • the present invention also provides a heat dissipation device comprising the vapor chamber of the present invention.
  • the vapor chamber of the present invention is advantageous for downsizing (particularly thinning), and is suitable for use in equipment that requires downsizing, such as electronic equipment.
  • the present invention also provides an electronic apparatus comprising the vapor chamber of the present invention or the heat dissipation device of the present invention.
  • Example 1 A 70 mm ⁇ 120 mm Cu sheet was prepared as the first sheet.
  • the size of the central region was 50 mm ⁇ 100 mm.
  • a column was formed by etching.
  • the columns were placed in the central region at 1.3 mm intervals.
  • the thickness t of the first sheet was 0.05 mm.
  • a 70 mm ⁇ 120 mm Cu sheet was prepared.
  • the size of the central region was 50 mm ⁇ 100 mm.
  • a convex portion was formed by etching.
  • the convex portion was a quadrangular prism having a bottom surface of 0.15 mm ⁇ 0.15 mm and a height of 0.03 mm.
  • the convex portions were arranged in the central region at intervals of 0.15 mm.
  • the thickness t of the second sheet was 0.05 mm.
  • a vapor chamber was prepared according to the following procedure.
  • the second sheet, the wick, and the first sheet were laminated in this order from the bottom, and the outer periphery 4 sides were welded by resistance welding to produce a vapor chamber body.
  • the pillars formed on the first sheet were disposed inward, and the convex portions formed on the second sheet were disposed inward.
  • a Cu pipe was inserted therein, and the vapor chamber main body and the Cu pipe were fixed with solder.
  • This Cu pipe was connected to a syringe containing a vacuum pump and working fluid via a switching valve.
  • the switching valve was connected to the inside of the vapor chamber and the vacuum pump, and the inside of the vapor chamber body was depressurized. Thereafter, the valve was switched, the inside of the vapor chamber was connected to the syringe containing the working fluid, and after a predetermined amount of working fluid was injected into the vapor chamber, the Cu pipe was caulked and sealed to obtain the vapor chamber of Example 1. .
  • Example 2 A vapor chamber of Example 2 was produced in the same manner as Example 1 except that a was 2.000 mm, b was 0.250 mm, and c was 0.500 mm.
  • Comparative Example 1 A vapor chamber of Comparative Example 1 was produced in the same manner as in Example 1 except that a was 2.000 mm, b was 0.250 mm, and c was 0.300 mm.
  • the vapor chamber of the present invention Since the vapor chamber of the present invention has high reliability, it can be used for a wide range of applications. In particular, it can be used as a cooling device for electronic devices or the like in applications where small and efficient heat transport is required.

Abstract

This vapor chamber (1) has a casing comprising a first sheet (2) and a second sheet (3) facing one another, with the outer edges thereof bonded to one another, a column (5) provided between the first sheet (2) and the second sheet (3) to support the same from the inside, and operating fluid sealed within the casing (4). The first sheet (2) and the second sheet (3) do not have corners with angles less than 90°C between the junction (6) and the closest column (5) to the junction (6), and satisfy formulae 1 to 3 below. Formula 1: c≥1.8×b/a+0.270, Formula 2: 0.016≤b/a≤0.125, Formula 3: b≤0.500 [In the formulae, a is the distance (in mm) from the position at which deformation of the sheet starts to the end of the junction, b is the distance (in mm) between the first sheet and the second sheet at the position at which deformation of the sheet starts, and c is the width (in mm) of the junction.]

Description

ベーパーチャンバーVapor chamber
　本発明は、ベーパーチャンバーに関する。 The present invention relates to a vapor chamber.
　近年、素子の高集積化、高性能化による発熱量が増加している。また、製品の小型化が進むことで、発熱密度が増加するため、放熱対策が重要となってきた。この状況はスマートフォンやタブレットなどのモバイル端末の分野において特に顕著である。近年、熱対策部材としては、グラファイトシートなどが用いられることが多いが、その熱輸送量は十分ではないため、様々な熱対策部材の使用が検討されている。なかでも、非常に効果的に熱を輸送することが可能であるとして、面状のヒートパイプであるベーパーチャンバーの使用の検討が進んでいる。 In recent years, the amount of heat generated due to higher integration and higher performance of elements has increased. Moreover, since the heat generation density increases with the miniaturization of products, heat dissipation measures have become important. This situation is particularly remarkable in the field of mobile terminals such as smartphones and tablets. In recent years, a graphite sheet or the like is often used as a heat countermeasure member, but since the amount of heat transport is not sufficient, use of various heat countermeasure members has been studied. In particular, the use of a vapor chamber, which is a planar heat pipe, has been studied because it is possible to transport heat very effectively.
　ベーパーチャンバーは、筐体の内部に、毛細管力によって作動液を輸送するウィックが設けられ、作動液が封入された構造を有する。上記作動液は、発熱素子からの熱を吸収する蒸発部において発熱素子からの熱を吸収し、ベーパーチャンバー内で蒸発し、凝縮部に移動し、冷却されて液相に戻る。液相に戻った作動液は、ウィックの毛細管力によって再び発熱素子側（蒸発部）に移動し、発熱素子を冷却する。これを繰り返すことにより、ベーパーチャンバーは外部動力を有することなく自立的に作動し、作動液の蒸発潜熱および凝縮潜熱を利用して、二次元的に高速で熱を拡散することができる。 The vapor chamber has a structure in which a wick that transports hydraulic fluid by capillary force is provided inside the casing, and the hydraulic fluid is enclosed. The hydraulic fluid absorbs heat from the heating element in the evaporation section that absorbs heat from the heating element, evaporates in the vapor chamber, moves to the condensation section, is cooled, and returns to the liquid phase. The working fluid that has returned to the liquid phase is moved again to the heating element side (evaporating part) by the capillary force of the wick, and cools the heating element. By repeating this, the vapor chamber operates independently without external power, and heat can be diffused at a high speed two-dimensionally using the latent heat of vaporization and the latent heat of condensation of the working fluid.
　ベーパーチャンバーとして、特許文献１には、対向する２枚の板状体により空洞部を有する凸部が中央部に形成された筐体と、当該空洞部に封入された作動液とを有し、前記空洞部にウィック構造が備えられ、前記凸部の外周部がレーザー溶接にて封止されたベーパーチャンバーが開示されている。また、特許文献２には、エッチング加工された金属シートを２枚以上積み重ねて、少なくとも外周部の一部が接合により密閉された容器を形成したことを特徴とするベーパーチャンバーであって、上記容器の外周部が、上記金属シートの側壁を拡散接合して形成され、側壁の幅が０．３ｍｍ以上であることを特徴とするベーパーチャンバーが開示されている。 As a vapor chamber, Patent Document 1 includes a casing in which a convex portion having a hollow portion formed by two opposing plate-like bodies is formed in the central portion, and a working fluid sealed in the hollow portion, A vapor chamber is disclosed in which the hollow portion is provided with a wick structure and the outer peripheral portion of the convex portion is sealed by laser welding. Patent Document 2 discloses a vapor chamber in which two or more etched metal sheets are stacked to form a container in which at least a part of the outer peripheral portion is sealed by bonding. The vapor chamber is characterized in that the outer peripheral portion of the metal sheet is formed by diffusion bonding the side wall of the metal sheet, and the width of the side wall is 0.3 mm or more.
特開２０１６－３５３４８号公報Japanese Patent Laid-Open No. 2016-35348 特開２０１５－５９６９３号公報JP2015-59693A
　特許文献１および２に記載のベーパーチャンバーは、筐体の内部空間を形成するために、筐体を構成する金属シートを予め凸状に形成する、あるいは、シートに溝を形成する等の前加工が必要となる。本発明者らは、このような筐体の内部空間を形成するための金属シートの前加工を行わず、筐体を構成する２枚のシートの間に柱を設けることにより、筐体の内部空間を確保することを試みた。しかしながら、このようにして得られたベーパーチャンバーは、信頼性に劣る場合があることがわかった。 The vapor chambers described in Patent Documents 1 and 2 are pre-processed such as forming a metal sheet constituting the casing in a convex shape in advance or forming a groove in the sheet in order to form an internal space of the casing. Is required. The present inventors do not perform the pre-processing of the metal sheet for forming such an internal space of the housing, but provide a column between two sheets constituting the housing, thereby providing the interior of the housing. Tried to secure space. However, it has been found that the vapor chamber thus obtained may be inferior in reliability.
　本発明は、信頼性の高い、２枚のシートの間に柱を設けた筐体を用いたベーパーチャンバーを提供することを目的とする。 An object of the present invention is to provide a highly reliable vapor chamber using a casing in which a column is provided between two sheets.
　本発明者らは、上記の２枚のシートの間に柱を設けた筐体を用いたベーパーチャンバーの信頼性を高めるために鋭意検討した結果、２枚のシート間の距離、および２枚のシートを接合するために２枚のシートが近づき始める箇所から接合部までの距離に応じて、接合部の幅を調整することにより、信頼性の高いベーパーチャンバーを得ることができることを見出し、本発明に至った。 As a result of intensive studies to improve the reliability of the vapor chamber using a casing in which a column is provided between the two sheets, the present inventors have determined the distance between the two sheets and the two sheets. The present invention has found that a highly reliable vapor chamber can be obtained by adjusting the width of the joining portion according to the distance from the location where the two sheets start approaching to join the sheets to the joining portion. It came to.
　本発明の第１の要旨によれば、
　外縁部が接合された対向する第１シートおよび第２シートから成る筐体と、
　前記第１シートおよび第２シートの間にこれらを内側から支持するように設けられた柱と、
　前記筐体内に封入された作動液とを有し、
　前記第１シートおよび第２シートは、接合部と、接合部から最も近い前記柱間において、角度が９０°以下である角部を有しておらず、
　下記式１、式２、および式３を満たす、ベーパーチャンバー
　式１：　　　ｃ≧１．８×ｂ／ａ＋０．２７０
　式２：　　　０．０１６≦ｂ／ａ≦０．１２５
　式３：　　　ｂ≦０．５００
［式中：
　ａは、上記シートが変形を開始する位置から接合部の末端までの距離（ｍｍ）であり、
　ｂは、前記シートが変形を開始する位置における、第１シートと第２シート間の距離（ｍｍ）であり、
　ｃは、前記接合部の幅（ｍｍ）である。］
が提供される。 According to the first aspect of the present invention,
A housing composed of a first sheet and a second sheet facing each other, the outer edges of which are joined;
A pillar provided between the first sheet and the second sheet so as to support them from the inside;
A hydraulic fluid enclosed in the housing,
The first sheet and the second sheet do not have a corner portion whose angle is 90 ° or less between the joint portion and the column closest to the joint portion,
Vapor chamber satisfying the following formula 1, formula 2, and formula 3 Formula 1: c ≧ 1.8 × b / a + 0.270
Formula 2: 0.016 ≦ b / a ≦ 0.125
Formula 3: b ≦ 0.500
[Where:
a is the distance (mm) from the position where the sheet starts to deform to the end of the joint,
b is the distance (mm) between the first sheet and the second sheet at the position where the sheet starts to deform,
c is the width (mm) of the joint. ]
Is provided.
　本発明の第２の要旨によれば、上記のベーパーチャンバーを有して成る放熱デバイスが提供される。 According to the second aspect of the present invention, there is provided a heat dissipation device having the above-described vapor chamber.
　本発明の第３の要旨によれば、上記のベーパーチャンバーまたは上記放熱デバイスを有して成る電子機器が提供される。 According to the third aspect of the present invention, there is provided an electronic apparatus comprising the vapor chamber or the heat dissipation device.
　本発明によれば、上記の２枚のシートの間に柱を設けた筐体を用いたベーパーチャンバーにおいて、接合部の内部側の端と接合部から最も近い柱間の距離、および、接合部から最も近い柱が存在する位置における、第１シートと第２シート間の距離に応じて、接合部の幅を調整することにより、ベーパーチャンバーの信頼性を高めることができる。また、本発明の構成とすることにより、信頼性の高いベーパーチャンバーを容易に製造することができる。 According to the present invention, in the vapor chamber using the casing provided with the pillar between the two sheets, the distance between the inner end of the joint and the pillar closest to the joint, and the joint The reliability of the vapor chamber can be improved by adjusting the width of the joint portion according to the distance between the first sheet and the second sheet at the position where the closest column exists. In addition, with the configuration of the present invention, a highly reliable vapor chamber can be easily manufactured.
図１は、本発明の一の実施形態におけるベーパーチャンバー１の断面を模式的に示す断面図である。FIG. 1 is a cross-sectional view schematically showing a cross section of a vapor chamber 1 in one embodiment of the present invention. 図２は、本発明の一の実施形態におけるベーパーチャンバー１を模式的に示す第１シート側からみた平面図である。FIG. 2 is a plan view schematically showing the vapor chamber 1 according to one embodiment of the present invention as viewed from the first sheet side.
　以下、本発明のベーパーチャンバーについて、図面を参照しながら詳細に説明する。 Hereinafter, the vapor chamber of the present invention will be described in detail with reference to the drawings.
　図１および図２に示されるように、本実施形態のベーパーチャンバー１は、対向する第１シート２および第２シート３から構成される筐体４と、その内部に封入された作動液（図示していない）を有して成る。上記筐体４において内部空間を確保するために、第１シート２および第２シート３の間には、これらを内側から支持する複数の柱５が設けられている。第１シート２および第２シート３は、縁側に存在する柱５を結んだ内側の領域１１（以下、「中央領域」ともいう）において、柱５により支持され、所定の距離で離隔している。第１シート２および第２シート３は、中央領域１１の外側の領域１２（以下、「末端領域」ともいう）において、互いに接近し、外縁部において接触し、接合され、封止されている。第１シートおよび第２シートが接合されている部分６を、以下、「接合部」とも称する。換言すれば、上記第１シート２および第２シート３は、典型的にはシートの縁から最も近い柱５の端から互いに接近し始め、シートの外縁部に位置する接合部６において互いに接合され、封止されている。第２シート３は、その内側表面（即ち、筐体の内部空間側の主面）に、複数の凸部７を有する。第２シート３上には、ウィック８が設けられている。即ち、本実施形態のベーパーチャンバー１においては、第２シート３上にウィック８が位置し、ウィック８上に柱５が位置し、柱５上に第１シート２が位置している。 As shown in FIGS. 1 and 2, the vapor chamber 1 of the present embodiment includes a housing 4 composed of a first sheet 2 and a second sheet 3 facing each other, and a working fluid sealed in the casing (FIG. 1). Not shown). In order to secure an internal space in the housing 4, a plurality of pillars 5 are provided between the first sheet 2 and the second sheet 3 to support them from the inside. The first sheet 2 and the second sheet 3 are supported by the pillar 5 in the inner region 11 (hereinafter also referred to as “central region”) connecting the pillars 5 existing on the edge side, and are separated by a predetermined distance. . The first sheet 2 and the second sheet 3 are close to each other in the region 12 outside the central region 11 (hereinafter, also referred to as “terminal region”), contact at the outer edge portion, and are bonded and sealed. Hereinafter, the portion 6 where the first sheet and the second sheet are joined is also referred to as a “joint portion”. In other words, the first sheet 2 and the second sheet 3 typically begin to approach each other from the end of the column 5 closest to the edge of the sheet and are joined to each other at the joint 6 located at the outer edge of the sheet. Is sealed. The 2nd sheet | seat 3 has the some convex part 7 in the inner surface (namely, main surface by the side of the internal space of a housing | casing). A wick 8 is provided on the second sheet 3. That is, in the vapor chamber 1 of the present embodiment, the wick 8 is positioned on the second sheet 3, the column 5 is positioned on the wick 8, and the first sheet 2 is positioned on the column 5.
　上記筐体４は、対向する第１シート２および第２シート３から構成される。 The casing 4 includes a first sheet 2 and a second sheet 3 that face each other.
　上記筐体４の大きさは、特に限定されない。筐体４の厚さ（図１においてＴで示される）は、好ましくは１００μｍ以上６００μｍ以下であり、より好ましくは２００μｍ以上５００μｍ以下であり得る。筐体４の長さ（図１においてＬで示される）および幅（図２においてＷで表される）は、用いる用途に応じて適宜設定することができ、例えば、５ｍｍ以上５００ｍｍ以下、２０ｍｍ以上３００ｍｍ以下または５０ｍｍ以上２００ｍｍ以下であり得る。 The size of the casing 4 is not particularly limited. The thickness of the housing 4 (indicated by T in FIG. 1) is preferably 100 μm or more and 600 μm or less, more preferably 200 μm or more and 500 μm or less. The length (indicated by L in FIG. 1) and the width (indicated by W in FIG. 2) of the housing 4 can be appropriately set according to the application to be used, for example, 5 mm to 500 mm, 20 mm or more. It may be 300 mm or less, or 50 mm or more and 200 mm or less.
　上記筐体４の形状は、特に限定されない。例えば、上記筐体４の平面形状（図２に示される形状、即ち、図１において図面上側から見た形状）は、三角形または矩形等の多角形、円形、楕円形、これらを組み合わせた形状などであり得る。 The shape of the casing 4 is not particularly limited. For example, the planar shape of the housing 4 (the shape shown in FIG. 2, that is, the shape seen from the upper side in FIG. 1) is a polygon such as a triangle or a rectangle, a circle, an ellipse, a combination of these, etc. It can be.
　上記第１シート２および第２シート３を形成する材料は、ベーパーチャンバーとして用いるのに適した特性、例えば熱伝導性、強度、柔軟性等を有するものであれば、特に限定されない。上記第１シート２および第２シート３を構成する材料は、好ましくは金属であり、例えば銅、ニッケル、アルミニウム、マグネシウム、チタン、鉄、またはそれらを主成分とする合金等であり、特に好ましくは銅であり得る。第１シート２および第２シート３を構成する材料は、同じであっても、異なっていてもよいが、好ましくは同じである。 The material for forming the first sheet 2 and the second sheet 3 is not particularly limited as long as it has characteristics suitable for use as a vapor chamber, such as thermal conductivity, strength, flexibility, and the like. The material constituting the first sheet 2 and the second sheet 3 is preferably a metal, such as copper, nickel, aluminum, magnesium, titanium, iron, or an alloy containing them as a main component, particularly preferably. It can be copper. The materials constituting the first sheet 2 and the second sheet 3 may be the same or different, but are preferably the same.
　上記第１シート２および第２シート３の厚さ（図１においてｔで示される）は、特に限定されないが、好ましくは１０μｍ以上２００μｍ以下、より好ましくは３０μｍ以上１００μｍ以下、例えば好ましくは４０μｍ以上６０μｍ以下であり得る。 The thickness (indicated by t in FIG. 1) of the first sheet 2 and the second sheet 3 is not particularly limited, but is preferably 10 μm to 200 μm, more preferably 30 μm to 100 μm, for example, preferably 40 μm to 60 μm. It can be:
　本実施形態において、第２シート３は、内部空間側の主面に複数の凸部７を有している。シートがかかる複数の凸部を有することにより、凸部間に作動液を保持することができ、本発明のベーパーチャンバーの透過率を上げることが可能になる。透過率を上げることにより、ベーパーチャンバーの熱輸送能力が向上する。ここに、凸部とは、周囲よりも相対的に高さが高い部分をいい、主面から突出した部分に加え、主面に形成された凹部、例えば溝などにより相対的に高さが高くなっている部分も含む。 In the present embodiment, the second sheet 3 has a plurality of convex portions 7 on the main surface on the inner space side. When the sheet has a plurality of convex portions, the hydraulic fluid can be held between the convex portions, and the transmittance of the vapor chamber of the present invention can be increased. By increasing the transmittance, the heat transport capability of the vapor chamber is improved. Here, the convex portion refers to a portion having a relatively higher height than the surroundings, and in addition to the portion protruding from the main surface, the height is relatively high due to a concave portion formed on the main surface, such as a groove. The part which becomes.
　上記凸部７の高さは、特に限定されないが、好ましくは１μｍ以上１００μｍ以下、より好ましくは５μｍ以上５０μｍ以下、さらに好ましくは１５μｍ以上３０μｍ以下であり得る。凸部の高さをより高くすることにより、作動液の保持量をより多くすることができる。また、凸部の高さをより低くすることにより、作動液の蒸気が移動するための空間をより広く確保することができる。従って、凸部の高さを調整することにより、ベーパーチャンバーの熱輸送能力および熱拡散能力を調整することができる。 The height of the convex portion 7 is not particularly limited, but may be preferably 1 μm or more and 100 μm or less, more preferably 5 μm or more and 50 μm or less, and further preferably 15 μm or more and 30 μm or less. By increasing the height of the convex portion, the amount of hydraulic fluid retained can be increased. Further, by lowering the height of the convex portion, a wider space for moving the working fluid vapor can be secured. Therefore, by adjusting the height of the convex portion, the heat transport capability and the thermal diffusion capability of the vapor chamber can be adjusted.
　上記凸部７間の距離は、特に限定されないが、好ましくは１μｍ以上５００μｍ以下、より好ましくは５μｍ以上３００μｍ以下、さらに好ましくは１５μｍ以上１５０μｍ以下であり得る。凸部間の距離を小さくすることにより、より毛細管力を大きくすることができる。また、凸部間の距離を大きくすることにより、透過率をより高くすることができる。 The distance between the convex portions 7 is not particularly limited, but may be preferably 1 μm or more and 500 μm or less, more preferably 5 μm or more and 300 μm or less, and further preferably 15 μm or more and 150 μm or less. By reducing the distance between the convex portions, the capillary force can be further increased. Further, the transmittance can be further increased by increasing the distance between the convex portions.
　上記凸部７の形状は、特に限定されないが、円柱形状、角柱形状、円錐台形状、角錐台形状等であり得る。また、上記凸部７の形状は、壁状であってもよく、即ち、隣接する凸部の間に溝が形成されるような形状であってもよい。 The shape of the convex portion 7 is not particularly limited, but may be a cylindrical shape, a prism shape, a truncated cone shape, a truncated pyramid shape, or the like. Further, the shape of the convex portion 7 may be a wall shape, that is, a shape in which a groove is formed between adjacent convex portions.
　尚、本発明のベーパーチャンバーにおいて、上記凸部７は必須の構成ではなく、存在してなくてもよい。 In the vapor chamber of the present invention, the convex portion 7 is not an essential component and may not exist.
　上記第１シート２および第２シート３は、これらの外縁部において互いに接合されている。かかる接合の方法は、特に限定されないが、例えばレーザー溶接、抵抗溶接、拡散接合、ロウ接、ＴＩＧ溶接（タングステン－不活性ガス溶接）、超音波接合または樹脂封止を用いることができ、好ましくはレーザー溶接、抵抗溶接またはロウ接を用いることができる。 The first sheet 2 and the second sheet 3 are joined to each other at their outer edge portions. The joining method is not particularly limited. For example, laser welding, resistance welding, diffusion joining, brazing, TIG welding (tungsten-inert gas welding), ultrasonic joining, or resin sealing can be used. Laser welding, resistance welding or brazing can be used.
　上記柱５は、第１シートと第２シート間の距離が所定の距離となるように、第１シート２および第２シート３を内側から支持している。柱５を筐体４の内部に設置することにより、筐体の内部が減圧された場合、筐体外部からの外圧が加えられた場合等に筐体が変形することを抑制することができる。尚、柱が第１シートおよび第２シートを支持する際は、柱が直接各シートに接して支持してもよく、他の部材、例えばウィック等を介して支持してもよい。 The pillar 5 supports the first sheet 2 and the second sheet 3 from the inside so that the distance between the first sheet and the second sheet is a predetermined distance. By installing the pillar 5 inside the housing 4, it is possible to prevent the housing from being deformed when the inside of the housing is decompressed or when external pressure is applied from outside the housing. When the pillar supports the first sheet and the second sheet, the pillar may be in direct contact with each sheet, or may be supported via another member such as a wick.
　上記柱５を形成する材料は、特に限定されないが、例えば金属であり、例えば銅、ニッケル、アルミニウム、マグネシウム、チタン、鉄、またはそれらを主成分とする合金等であり、特に好ましくは銅であり得る。好ましい態様において、柱を形成する材料は、第１シートおよび第２シートのいずれかまたは両方と同じ材料である。 Although the material which forms the said pillar 5 is not specifically limited, For example, it is a metal, for example, they are copper, nickel, aluminum, magnesium, titanium, iron, or an alloy which has them as a main component, Especially preferably, it is copper. obtain. In a preferred embodiment, the material forming the pillar is the same material as either or both of the first sheet and the second sheet.
　上記柱５の高さは、所望のベーパーチャンバーの厚みに応じて適宜設定することができ、好ましくは５０μｍ以上５００μｍ以下、より好ましくは１００μｍ以上４００μｍ以下、さらに好ましくは１００μｍ以上２００μｍ以下、例えば１２５μｍ以上１５０μｍ以下である。ここに、柱の高さとは、ベーパーチャンバーの厚み方向の高さ（図１において上下方向の高さ）をいう。 The height of the pillar 5 can be appropriately set according to the desired thickness of the vapor chamber, preferably 50 μm or more and 500 μm or less, more preferably 100 μm or more and 400 μm or less, and further preferably 100 μm or more and 200 μm or less, for example 125 μm or more. 150 μm or less. Here, the height of the column means the height in the thickness direction of the vapor chamber (the height in the vertical direction in FIG. 1).
　上記柱５の形状は、特に限定されないが、円柱形状、角柱形状、円錐台形状、角錐台形状等であり得る。 The shape of the column 5 is not particularly limited, but may be a columnar shape, a prismatic shape, a truncated cone shape, a truncated pyramid shape, or the like.
　上記柱５の太さは、ベーパーチャンバーの筐体の変形を抑制できる強度を与えるものであれば特に限定されないが、例えば柱の高さ方向に垂直な断面の円相当径は、１００μｍ以上２０００μｍ以下、好ましくは３００μｍ以上１０００μｍ以下であり得る。上記柱の円相当径を大きくすることにより、ベーパーチャンバーの筐体の変形をより抑制することができる。また、上記柱の円相当径を小さくすることにより、作動液の蒸気が移動するための空間をより広く確保することができる。 The thickness of the column 5 is not particularly limited as long as it gives strength capable of suppressing deformation of the casing of the vapor chamber. For example, the equivalent circle diameter of a cross section perpendicular to the column height direction is 100 μm or more and 2000 μm or less. The thickness may be preferably 300 μm or more and 1000 μm or less. By increasing the equivalent circle diameter of the column, deformation of the casing of the vapor chamber can be further suppressed. Further, by reducing the equivalent circle diameter of the column, it is possible to secure a wider space for moving the working fluid vapor.
　上記柱５の配置は、特に限定されないが、好ましくは均等に、例えば柱間の距離が一定となるように格子点状に配置される。柱を均等に配置することにより、ベーパーチャンバー全体にわたって均一な強度を確保することができる。 The arrangement of the pillars 5 is not particularly limited, but is preferably arranged evenly, for example, in the form of lattice points so that the distance between the pillars is constant. By arranging the columns evenly, a uniform strength can be ensured throughout the vapor chamber.
　上記柱５の数および間隔は、特に限定されないが、ベーパーチャンバーの内部空間を規定する一のシートの主面の面積１ｍｍ２あたり、好ましくは０．１２５本以上０．５本以下、より好ましくは０．２本以上０．３本以下であり得る。上記柱の数を多くすることにより、ベーパーチャンバー（または筐体）の変形をより抑制することができる。また、上記柱の数をより少なくすることにより、作動液の蒸気が移動するための空間をより広く確保することができる。 The number and interval of the pillars 5 are not particularly limited, but are preferably 0.125 or more and 0.5 or less, more preferably 0.125 or more, more preferably 1 or less per 1 mm 2 of the main surface area of one sheet that defines the internal space of the vapor chamber. It may be 0.2 or more and 0.3 or less. By increasing the number of the columns, deformation of the vapor chamber (or housing) can be further suppressed. Further, by reducing the number of the columns, it is possible to secure a wider space for the working fluid vapor to move.
　上記柱５は、第１シートと一体に形成されていてもよく、また、第１シートと別個に製造し、その後、第１シートの所定の箇所に固定してもよい。 The pillar 5 may be formed integrally with the first sheet, or may be manufactured separately from the first sheet and then fixed to a predetermined portion of the first sheet.
　上記ウィック８は、毛細管力により作動液を移動させることができる構造を有するものであれば特に限定されない。作動液を移動させる毛細管力を発揮する毛細管構造は、特に限定されず、従来のベーパーチャンバーにおいて用いられている公知の構造であってもよい。例えば、上記毛細管構造は、細孔、溝、突起などの凹凸を有する微細構造、例えば、繊維構造、溝構造、網目構造等が挙げられる。 The wick 8 is not particularly limited as long as it has a structure capable of moving the hydraulic fluid by capillary force. The capillary structure that exhibits the capillary force for moving the working fluid is not particularly limited, and may be a known structure used in a conventional vapor chamber. For example, examples of the capillary structure include fine structures having irregularities such as pores, grooves, and protrusions, such as a fiber structure, a groove structure, and a network structure.
　上記ウィック８の厚みは、特に限定されないが、例えば５μｍ以上２００μｍ以下、好ましくは１０μｍ以上８０μｍ以下、より好ましくは３０μｍ以上５０μｍ以下であり得る。 The thickness of the wick 8 is not particularly limited, but may be, for example, 5 μm to 200 μm, preferably 10 μm to 80 μm, and more preferably 30 μm to 50 μm.
　上記ウィック８の大きさおよび形状は、特に限定されないが、例えば、筐体の内部において蒸発部から凝縮部まで連続して設置できる大きさおよび形状を有することが好ましい。 The size and shape of the wick 8 are not particularly limited. For example, it is preferable that the wick 8 has a size and shape that can be continuously installed from the evaporation section to the condensation section inside the housing.
　尚、本発明のベーパーチャンバーにおいて、上記ウィック８は必須の構成ではなく、存在してなくてもよい。この場合、第１シートおよび第２シートのいずれかまたは両方の表面に、凹凸、溝等を形成し、かかるシート自体をウィックとして機能させてもよい。また、ウィックが存在しない箇所においては、上記柱５は、第１シートおよび第２シートの両方に直接接し得る。 In the vapor chamber of the present invention, the wick 8 is not an essential component and may not exist. In this case, irregularities, grooves, or the like may be formed on the surface of one or both of the first sheet and the second sheet, and the sheet itself may function as a wick. Further, in a place where no wick exists, the pillar 5 can directly contact both the first sheet and the second sheet.
　上記作動液は、筐体内の環境下において気－液の相変化を生じ得るものであれば特に限定されず、例えば水、アルコール類、代替フロン等を用いることができる。一の態様において、作動液は水性化合物であり、好ましくは水である。 The hydraulic fluid is not particularly limited as long as it can cause a gas-liquid phase change under the environment in the casing, and for example, water, alcohols, alternative chlorofluorocarbon, or the like can be used. In one embodiment, the hydraulic fluid is an aqueous compound, preferably water.
　本実施形態のベーパーチャンバー１では、上記で説明した、第１シート２、第２シート３、柱５、ウィック８が、第２シート３、ウィック８、柱５および第１シート２の順で積層された状態にある。第１シート２および第２シート３は、末端領域１２において、シートの縁に近づくに従って接近し、外縁部において接触し、接合され、封止されている。第１シートおよび第２シートが接合されている部分を、以下、「接合部」とも称する。第１シートおよび第２シートの少なくとも一方は、末端領域において、他方のシートに接近するために変形（湾曲または屈折）するが、９０°以下、好ましくは１００°以下、より好ましくは１１０°以下の角度では変形しない。 In the vapor chamber 1 of the present embodiment, the first sheet 2, the second sheet 3, the pillar 5, and the wick 8 described above are stacked in the order of the second sheet 3, the wick 8, the pillar 5, and the first sheet 2. It is in the state that was done. The first sheet 2 and the second sheet 3 approach in the end region 12 as they approach the edge of the sheet, contact at the outer edge, and are joined and sealed. Hereinafter, the portion where the first sheet and the second sheet are joined is also referred to as a “joint portion”. At least one of the first sheet and the second sheet is deformed (curved or refracted) in the terminal region to approach the other sheet, but is 90 ° or less, preferably 100 ° or less, more preferably 110 ° or less. Does not deform at an angle.
　本発明のベーパーチャンバーは、シートが変形を開始する位置から、接合部の末端までの距離（ｍｍ）を「ａ」、上記シートが変形を開始する位置における、第１シートと第２シート間の距離（ｍｍ）を「ｂ」、接合部の幅（ｍｍ）を「ｃ」とした場合、下記式１～３を満たす。
　式１：　　　ｃ≧１．８×ｂ／ａ＋０．２７０
　式２：　　　０．０１６≦ｂ／ａ≦０．１２５
　式３：　　　ｂ≦０．５００ In the vapor chamber of the present invention, the distance (mm) from the position where the sheet starts to be deformed to the end of the joint is “a”, and the position between the first sheet and the second sheet at the position where the sheet starts to deform is When the distance (mm) is “b” and the joint width (mm) is “c”, the following formulas 1 to 3 are satisfied.
Formula 1: c ≧ 1.8 × b / a + 0.270
Formula 2: 0.016 ≦ b / a ≦ 0.125
Formula 3: b ≦ 0.500
　上記の式１～３を満たすことにより、信頼性の高いベーパーチャンバーを得ることができる。 By satisfying the above formulas 1 to 3, a highly reliable vapor chamber can be obtained.
　好ましい態様において、本発明のベーパーチャンバーは、下記式１’、２’および３’を満たす。
　式１’：　　　ｃ≧１．８×ｂ／ａ＋０．４７０
　式２’：　　　０．０３０≦ｂ／ａ≦０．１００
　式３’：　　　ｂ≦０．４００ In a preferred embodiment, the vapor chamber of the present invention satisfies the following formulas 1 ′, 2 ′ and 3 ′.
Formula 1 ′: c ≧ 1.8 × b / a + 0.470
Formula 2 ′: 0.030 ≦ b / a ≦ 0.100
Formula 3 ′: b ≦ 0.400
　一の態様において、接合部の幅は、好ましくは１．０００ｍｍ以下、より好ましくは０．８００ｍｍ以下であり得る。即ち、ｃは、好ましくは１．０００以下、より好ましくは０．８００以下であり得る。 In one embodiment, the width of the joint can be preferably 1.000 mm or less, more preferably 0.800 mm or less. That is, c can be preferably 1.000 or less, more preferably 0.800 or less.
　一の態様において、シートが変形を開始する位置における第１シートと第２シート間の距離は、好ましくは０．０６０ｍｍ以上、より好ましくは０．１００以上であり得る。即ち、ｂは、好ましくは０．０６０以上、より好ましくは０．１００以上であり得る。 In one embodiment, the distance between the first sheet and the second sheet at the position where the sheet starts to deform may be preferably 0.060 mm or more, more preferably 0.100 or more. That is, b can be preferably 0.060 or more, more preferably 0.100 or more.
　ここに、上記「シートが変形を開始する位置」とは、第１シートおよび第２シートのいずれかまたは両方が、接合のために他方のシートに向かって変形を開始する位置を意味する。典型的には、「シートが変形を開始する位置」とは、中央領域１１と末端領域１２の境界であり得る。「シートが変形を開始する位置から接合部の末端までの距離（ｍｍ）」とは、上記シートが変形を開始する位置から、最も近い接合部の末端までの距離を意味する。 Here, the “position where the sheet starts to deform” means a position where one or both of the first sheet and the second sheet starts deformation toward the other sheet for bonding. Typically, the “position where the sheet begins to deform” may be the boundary between the central region 11 and the end region 12. The “distance (mm) from the position where the sheet starts to deform to the end of the joint” means the distance from the position where the sheet starts to deform to the end of the nearest joint.
　上記「シートが変形を開始する位置における、第１シートと第２シート間の距離（ｍｍ）」とは、上記シートが変形を開始する位置における、第１シートの内側主面と第２シートの内側主面間の距離を意味する。また、内側主面に凸部または凹部が存在する場合、第１シートおよび第２シートの内側主面間の距離は、かかる凸部または凹部が存在しないと仮定した場合の面を基準とする。 The above-mentioned “distance (mm) between the first sheet and the second sheet at the position where the sheet starts to deform” refers to the inner main surface of the first sheet and the second sheet at the position where the sheet starts to deform. This means the distance between the inner main surfaces. Moreover, when a convex part or a recessed part exists in an inner side main surface, the distance between the inner main surfaces of a 1st sheet and a 2nd sheet is based on the surface at the time of assuming that this convex part or a recessed part does not exist.
　上記第１シートと第２シートの接合部６が存在する高さ方向の位置（図１において上下方向における位置）は、中央領域１１における第１シートおよび第２シートの間の高さ（第１シートまたは第２シートと同じ高さである場合を含む）であれば、特に限定されない。好ましい態様において、接合部６が存在する高さ方向の位置は、第１シートと第２シートの中間部分、即ち、接合部から中央領域１１における第１シートの内側主面までの高さ方向の距離と、接合部から中央領域１１における第２シートの内側主面までの高さ方向の距離とが等しい。 The height direction position (position in the vertical direction in FIG. 1) where the joint portion 6 of the first sheet and the second sheet exists is the height (first position) between the first sheet and the second sheet in the central region 11. As long as it is the same height as the sheet or the second sheet). In a preferred embodiment, the position in the height direction where the joint portion 6 exists is an intermediate portion between the first sheet and the second sheet, that is, the height direction from the joint portion to the inner main surface of the first sheet in the central region 11. The distance and the distance in the height direction from the joint portion to the inner main surface of the second sheet in the central region 11 are equal.
　以上、本発明のベーパーチャンバーについて、上記実施形態により説明したが、本発明のベーパーチャンバーは、図示した態様に限定されず、種々の改変が可能である。 As mentioned above, although the vapor chamber of this invention was demonstrated by the said embodiment, the vapor chamber of this invention is not limited to the aspect shown in figure, Various modifications are possible.
　例えば、別の態様におけるベーパーチャンバーは、さらに第１シート２の内側主面上に凸部が存在してもよい。 For example, the vapor chamber in another aspect may further have a convex portion on the inner main surface of the first sheet 2.
　別の態様におけるベーパーチャンバーは、第１シート２または第２シート３の一方または両方の内側主面上に、凸部の代わりに凹部が存在してもよい。 In the vapor chamber according to another aspect, a concave portion may be present instead of the convex portion on one or both inner main surfaces of the first sheet 2 or the second sheet 3.
　別の態様におけるベーパーチャンバーは、第１シート２上にさらにウィックを有していてもよい。この場合、柱５は、第１シート２に直接接触せずに、上記ウィックを介して第１シート２を支持してもよい。 The vapor chamber in another aspect may further have a wick on the first sheet 2. In this case, the pillar 5 may support the first sheet 2 via the wick without directly contacting the first sheet 2.
　本発明のベーパーチャンバーは、上記のように熱輸送能力および熱拡散能力が高いので、放熱デバイスに好適に用いられる。 Since the vapor chamber of the present invention has a high heat transport capability and a high thermal diffusion capability as described above, it is preferably used for a heat dissipation device.
　従って、本発明は、本発明のベーパーチャンバーを有して成る放熱デバイスをも提供する。 Therefore, the present invention also provides a heat dissipation device comprising the vapor chamber of the present invention.
　本発明のベーパーチャンバーは、小型化（特に薄型化）に有利であり、小型化が要求される機器、例えば電子機器における利用に適している。 The vapor chamber of the present invention is advantageous for downsizing (particularly thinning), and is suitable for use in equipment that requires downsizing, such as electronic equipment.
　従って、本発明は、本発明のベーパーチャンバーまたは本発明の放熱デバイスを有して成る電子機器をも提供する。 Therefore, the present invention also provides an electronic apparatus comprising the vapor chamber of the present invention or the heat dissipation device of the present invention.
　実施例１
　第１シートとして、７０ｍｍ×１２０ｍｍサイズのＣｕ製のシートを準備した。中央領域のサイズは、５０ｍｍ×１００ｍｍとした。この中央領域には、エッチングにて柱を形成した。柱は、直径０．６ｍｍの円柱形で、第１シートと第２シート間の距離（ｂ）が所定の値（ｂ＝０．２００ｍｍ）となるように調整した。具体的には、柱の高さは０．１３０ｍｍとした。柱は、１．３ｍｍ間隔で中央領域に配置した。第１シートの厚みｔは、０．０５ｍｍとした。 Example 1
A 70 mm × 120 mm Cu sheet was prepared as the first sheet. The size of the central region was 50 mm × 100 mm. In this central region, a column was formed by etching. The column was a cylinder with a diameter of 0.6 mm, and the distance (b) between the first sheet and the second sheet was adjusted to a predetermined value (b = 0.200 mm). Specifically, the height of the column was 0.130 mm. The columns were placed in the central region at 1.3 mm intervals. The thickness t of the first sheet was 0.05 mm.
　第２シートとして、７０ｍｍ×１２０ｍｍサイズのＣｕ製のシートを準備した。中央領域のサイズは、５０ｍｍ×１００ｍｍとした。この中央領域には、エッチングにて凸部を形成した。凸部は、底面が０．１５ｍｍ×０．１５ｍｍである四角柱形で、高さ０．０３ｍｍとした。凸部は、０．１５ｍｍ間隔で中央領域に配置した。第２シートの厚みｔは、０．０５ｍｍとした。 As the second sheet, a 70 mm × 120 mm Cu sheet was prepared. The size of the central region was 50 mm × 100 mm. In this central region, a convex portion was formed by etching. The convex portion was a quadrangular prism having a bottom surface of 0.15 mm × 0.15 mm and a height of 0.03 mm. The convex portions were arranged in the central region at intervals of 0.15 mm. The thickness t of the second sheet was 0.05 mm.
　ウィックとして、厚み０．０４ｍｍのメッシュを用いた。 As a wick, a 0.04 mm thick mesh was used.
　作動液として、水を用いた。 Water was used as the working fluid.
　上記の第１シート、第２シート、ウィック、作動液を用い、以下の手順でベーパーチャンバーを作製した。 Using the first sheet, the second sheet, the wick, and the hydraulic fluid, a vapor chamber was prepared according to the following procedure.
　まず、下から第２シート、ウィック、第１シートの順に積層し、外周部４辺を抵抗溶接により溶接し、ベーパーチャンバー本体を作製した。この時、第１シートに形成した柱は内向きに配置し、第２シートに形成した凸部は内向きに配置した。接合部の幅ｃは、溶接時の電極幅で所定の値（ｃ＝０．３００ｍｍ）に調整した。また、シートが変形を開始する位置から接合部の末端までの距離ａが所定の値（ａ＝８．０００ｍｍ）となるように接合位置を調整した。 First, the second sheet, the wick, and the first sheet were laminated in this order from the bottom, and the outer periphery 4 sides were welded by resistance welding to produce a vapor chamber body. At this time, the pillars formed on the first sheet were disposed inward, and the convex portions formed on the second sheet were disposed inward. The width c of the joint was adjusted to a predetermined value (c = 0.300 mm) by the electrode width during welding. Further, the joining position was adjusted so that the distance a from the position where the sheet started to deform to the end of the joining portion was a predetermined value (a = 8.0000 mm).
　次に、得られたベーパーチャンバー本体の４角のうちの１角を切り取り、そこにＣｕパイプを差し込んだあと、ベーパーチャンバー本体とＣｕパイプをハンダにより固定した。このＣｕパイプを、切り替えバルブを介して真空ポンプと作動液の入った注射器につないだ。始めに切り替えバルブをベーパーチャンバー内部と真空ポンプをつないだ状態にし、ベーパーチャンバー本体内部を減圧した。その後、バルブを切り替え、ベーパーチャンバー内部と作動液の入った注射器をつなぎ、所定量の作動液をベーパーチャンバー内部に注入した後、Ｃｕパイプをかしめて封止し、実施例１のベーパーチャンバーとした。 Next, one of the four corners of the obtained vapor chamber main body was cut out, a Cu pipe was inserted therein, and the vapor chamber main body and the Cu pipe were fixed with solder. This Cu pipe was connected to a syringe containing a vacuum pump and working fluid via a switching valve. First, the switching valve was connected to the inside of the vapor chamber and the vacuum pump, and the inside of the vapor chamber body was depressurized. Thereafter, the valve was switched, the inside of the vapor chamber was connected to the syringe containing the working fluid, and after a predetermined amount of working fluid was injected into the vapor chamber, the Cu pipe was caulked and sealed to obtain the vapor chamber of Example 1. .
　実施例２
　ａを２．０００ｍｍ、ｂを０．２５０ｍｍ、ｃを０．５００ｍｍとしたこと以外は実施例１と同じようにして、実施例２のベーパーチャンバーを作製した。 Example 2
A vapor chamber of Example 2 was produced in the same manner as Example 1 except that a was 2.000 mm, b was 0.250 mm, and c was 0.500 mm.
　比較例１
　ａを２．０００ｍｍ、ｂを０．２５０ｍｍ、ｃを０．３００ｍｍとしたこと以外は実施例１と同じようにして、比較例１のベーパーチャンバーを作製した。 Comparative Example 1
A vapor chamber of Comparative Example 1 was produced in the same manner as in Example 1 except that a was 2.000 mm, b was 0.250 mm, and c was 0.300 mm.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
（評価）
・信頼性試験
　上記で作製したベーパーチャンバーについて、１０５℃に１００時間放置する高温放置試験により、ベーパーチャンバーの信頼性を評価した。評価は、１０個のベーパーチャンバーについて、高温放置前後で温度差特性を測定することにより行った。温度差特性は、ベーパーチャンバーの一方の短辺部中央に１．５ｃｍ×１．５ｃｍのセラミックヒーターを設置し、３Ｗの熱量を投入した時に、セラミックヒーターが設置された面の反対側の面のベーパーチャンバーの温度と、もう一方の短辺部のベーパーチャンバーの温度差を比較して行った。高温放置前後で、この温度差が２倍以上になったものをＮＧとした。この試験の結果を表２に示す。実施例１、２では、ＮＧは０個であったが、比較例では、ＮＧが２個発生した。 (Evaluation)
-Reliability test About the vapor chamber produced above, the reliability of the vapor chamber was evaluated by the high temperature standing test which is left to stand at 105 degreeC for 100 hours. The evaluation was performed by measuring temperature difference characteristics before and after being left at a high temperature for 10 vapor chambers. The temperature difference characteristic is that when a 1.5 cm × 1.5 cm ceramic heater is installed in the center of one short side of the vapor chamber and a heat amount of 3 W is applied, the surface on the opposite side of the surface on which the ceramic heater is installed. The temperature difference of the vapor chamber was compared with the temperature difference of the vapor chamber on the other short side. A sample having this temperature difference more than double before and after being left at high temperature was defined as NG. The results of this test are shown in Table 2. In Examples 1 and 2, NG was 0, but in the comparative example, 2 NG was generated.
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
　本発明のベーパーチャンバーは、信頼性が高いので、幅広い用途に用いることができる。特に、電子機器等の冷却デバイス等として、小型で効率的な熱輸送が求められる用途に用いることができる。 Since the vapor chamber of the present invention has high reliability, it can be used for a wide range of applications. In particular, it can be used as a cooling device for electronic devices or the like in applications where small and efficient heat transport is required.
　　１　ベーパーチャンバー
　　２　第１シート
　　３　第２シート
　　４　筐体
　　５　柱
　　６　接合部
　　７　凸部
　　８　ウィック
　　１１　中央領域
　　１２　末端領域 DESCRIPTION OF SYMBOLS 1 Vapor chamber 2 1st sheet | seat 3 2nd sheet | seat 4 Housing | casing 5 Pillar 6 Joint part 7 Convex part 8 Wick 11 Central area | region 12 Terminal area | region

Claims (8)

  1. 　外縁部が接合された対向する第１シートおよび第２シートから成る筐体と、
    　前記第１シートおよび第２シートの間にこれらを内側から支持するように設けられた柱と、
    　前記筐体内に封入された作動液とを有し、
    　前記第１シートおよび第２シートは、接合部と、接合部から最も近い前記柱間において、角度が９０°以下である角部を有しておらず、
    　下記式１、式２、および式３を満たす、ベーパーチャンバー。
    　式１：　　　ｃ≧１．８×ｂ／ａ＋０．２７０
    　式２：　　　０．０１６≦ｂ／ａ≦０．１２５
    　式３：　　　ｂ≦０．５００
    ［式中：
    　ａは、上記シートが変形を開始する位置から接合部の末端までの距離（ｍｍ）であり、
    　ｂは、前記シートが変形を開始する位置における、第１シートと第２シート間の距離（ｍｍ）であり、
    　ｃは、前記接合部の幅（ｍｍ）である。］     A housing composed of a first sheet and a second sheet facing each other, the outer edges of which are joined;
    A pillar provided between the first sheet and the second sheet so as to support them from the inside;
    A hydraulic fluid enclosed in the housing,
    The first sheet and the second sheet do not have a corner portion whose angle is 90 ° or less between the joint portion and the column closest to the joint portion,
    A vapor chamber that satisfies the following formula 1, formula 2, and formula 3.
    Formula 1: c ≧ 1.8 × b / a + 0.270
    Formula 2: 0.016 ≦ b / a ≦ 0.125
    Formula 3: b ≦ 0.500
    [Where:
    a is the distance (mm) from the position where the sheet starts to deform to the end of the joint,
    b is the distance (mm) between the first sheet and the second sheet at the position where the sheet starts to deform,
    c is the width (mm) of the joint. ]
  2. 　第１シートおよび第２シートの厚みが、１０μｍ以上２００μｍ以下である、請求項１に記載のベーパーチャンバー。 The vapor chamber according to claim 1, wherein the thickness of the first sheet and the second sheet is 10 μm or more and 200 μm or less.
  3. 　ｃが１．０００以下である、請求項１または２項に記載のベーパーチャンバー。 The vapor chamber according to claim 1 or 2, wherein c is 1.000 or less.
  4. 　前記第１シートおよび第２シートが、銅のシートである、請求項１～３のいずれか１項に記載のベーパーチャンバー。 The vapor chamber according to any one of claims 1 to 3, wherein the first sheet and the second sheet are copper sheets.
  5. 　さらに、ウィックを有する請求項１～４のいずれか１項に記載のベーパーチャンバー。 The vapor chamber according to any one of claims 1 to 4, further comprising a wick.
  6. 　前記第１シートおよび第２シートの少なくとも一方が、その内面の少なくとも一部に凸部を備える、請求項１～５のいずれか１項に記載のベーパーチャンバー。 The vapor chamber according to any one of claims 1 to 5, wherein at least one of the first sheet and the second sheet includes a protrusion on at least a part of an inner surface thereof.
  7. 　請求項１～６のいずれか１項に記載のベーパーチャンバーを有して成る放熱デバイス。 A heat dissipation device comprising the vapor chamber according to any one of claims 1 to 6.
  8. 　請求項１～６のいずれか１項に記載のベーパーチャンバーまたは請求項７に記載の放熱デバイスを有して成る電子機器。 An electronic apparatus comprising the vapor chamber according to any one of claims 1 to 6 or the heat dissipation device according to claim 7.
PCT/JP2017/017035 2017-04-28 2017-04-28 Vapor chamber WO2018198350A1 (en)

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PCT/JP2017/017035 WO2018198350A1 (en) 2017-04-28 2017-04-28 Vapor chamber
CN201880005148.0A CN110088556B (en) 2017-04-28 2018-04-26 Vapor chamber
PCT/JP2018/016936 WO2018199215A1 (en) 2017-04-28 2018-04-26 Vapor chamber
JP2019506538A JP6741142B2 (en) 2017-04-28 2018-04-26 Vapor chamber
US16/414,802 US11150030B2 (en) 2017-04-28 2019-05-17 Vapor chamber

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JP7434066B2 (en) 2020-06-04 2024-02-20 古河電気工業株式会社 Parts for electrical/electronic equipment
JP7470575B2 (en) 2020-06-04 2024-04-18 古河電気工業株式会社 Electrical and electronic equipment parts

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WO2021246494A1 (en) * 2020-06-04 2021-12-09 古河電気工業株式会社 Component for electrical/electronic equipment
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JP7470575B2 (en) 2020-06-04 2024-04-18 古河電気工業株式会社 Electrical and electronic equipment parts

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