WO2018157614A1 - 膜厚检测装置及方法 - Google Patents

膜厚检测装置及方法 Download PDF

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Publication number
WO2018157614A1
WO2018157614A1 PCT/CN2017/108087 CN2017108087W WO2018157614A1 WO 2018157614 A1 WO2018157614 A1 WO 2018157614A1 CN 2017108087 W CN2017108087 W CN 2017108087W WO 2018157614 A1 WO2018157614 A1 WO 2018157614A1
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WO
WIPO (PCT)
Prior art keywords
electrode
detecting
voltage
common electrode
common
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PCT/CN2017/108087
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English (en)
French (fr)
Inventor
姜利
林永辉
祁秀梅
孙明丰
Original Assignee
威海华菱光电股份有限公司
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Application filed by 威海华菱光电股份有限公司 filed Critical 威海华菱光电股份有限公司
Priority to US16/300,965 priority Critical patent/US20200318941A1/en
Priority to KR1020187030865A priority patent/KR102079147B1/ko
Priority to JP2018563809A priority patent/JP2019522792A/ja
Publication of WO2018157614A1 publication Critical patent/WO2018157614A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
    • G01B7/087—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means for measuring of objects while moving
    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07D—HANDLING OF COINS OR VALUABLE PAPERS, e.g. TESTING, SORTING BY DENOMINATIONS, COUNTING, DISPENSING, CHANGING OR DEPOSITING
    • G07D7/00—Testing specially adapted to determine the identity or genuineness of valuable papers or for segregating those which are unacceptable, e.g. banknotes that are alien to a currency
    • G07D7/02—Testing electrical properties of the materials thereof
    • G07D7/026—Testing electrical properties of the materials thereof using capacitive sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
    • G01B7/085—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means for measuring thickness of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/0084—Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring voltage only
    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07D—HANDLING OF COINS OR VALUABLE PAPERS, e.g. TESTING, SORTING BY DENOMINATIONS, COUNTING, DISPENSING, CHANGING OR DEPOSITING
    • G07D7/00—Testing specially adapted to determine the identity or genuineness of valuable papers or for segregating those which are unacceptable, e.g. banknotes that are alien to a currency
    • G07D7/16—Testing the dimensions
    • G07D7/164—Thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/22—Modifications for ensuring a predetermined initial state when the supply voltage has been applied

Definitions

  • the present invention relates to the field of digital detection, and in particular to a film thickness detecting device and method.
  • a capacitive paper thickness sensor in the related art mainly converts a change in capacity of a capacitor into a change in an oscillation frequency. The frequency change is then converted to a change in voltage by a frequency-to-voltage conversion module.
  • a method for detecting the thickness of a material in the related art mainly uses a plate of a plate capacitor as a sensitive device for thickness detection, and a displacement of the movable plate of the capacitor caused by a thickness variation of the measured object causes a capacity of the plate capacitor to occur. Variety.
  • the detecting electrode is formed by using the opposite common electrode and the detecting electrode. When the object to be tested passes through the detecting channel, the dielectric constant of the medium between the common electrode and the detecting electrode is changed, and the induced charge on the detecting electrode is correspondingly detected. The quantity changes accordingly, and the output voltage on the detecting electrode also changes.
  • the thickness of the detecting object is different, the dielectric constant between the common electrode and the detecting electrode is also different, and the amount of charge induced on the detecting electrode is not detected. Similarly, the output voltage on the detection electrode is also different. Therefore, by measuring the magnitude of the voltage signal of the electrode and performing analysis processing, the thickness of the object to be detected can be calculated.
  • the film thickness detecting device when the film thickness detecting device is interfered by the external environment (such as temperature, noise, humidity, and electromagnetic) during the film thickness detecting process, the signal is distorted, thereby affecting the accuracy of the thickness detecting. .
  • Embodiments of the present invention provide a film thickness detecting device and method to at least solve the technical problem that a film thickness detecting device in the related art is susceptible to environmental interference.
  • a film thickness detecting device comprising: a common electrode, and detecting a measuring electrode, a common electrode voltage generating circuit, a detecting electrode signal processing circuit, the common electrode and the detecting electrode are opposite and spaced apart in a first direction, and the first common surface of the common electrode is opposite to the first detecting surface of the detecting electrode, the first common Forming a detection channel of the film to be tested between the surface and the first detecting surface, wherein the common electrode voltage generating circuit is configured to generate a voltage on the common electrode such that an effective signal voltage is induced on the detecting electrode; and the detecting electrode signal processing circuit comprises: Reset voltage timing control circuit, detecting electrode effective signal voltage transfer timing control circuit and differential amplifier, wherein reset voltage timing control circuit is used for controlling detection electrode to perform voltage reset; detection electrode effective signal voltage transfer timing control circuit is used for transfer detection An effective signal voltage on the electrode; a differential amplifier for differentially amplifying the reset voltage and the effective signal voltage on the detecting electrode to output
  • the apparatus further includes: a common electrode voltage timing control circuit, wherein the common electrode voltage timing control circuit is configured to generate a control signal for controlling a voltage amplitude and a width of the common electrode voltage generating circuit applied to the common electrode Suitable for the detection of predetermined signals.
  • a common electrode voltage timing control circuit configured to generate a control signal for controlling a voltage amplitude and a width of the common electrode voltage generating circuit applied to the common electrode Suitable for the detection of predetermined signals.
  • the detection electrode signal processing circuit further includes: a detection electrode reset voltage transfer timing control circuit, configured to transfer the reset voltage on the detection electrode after the detection electrode performs voltage reset.
  • the detecting electrode signal processing circuit further comprises: a shift timing control circuit for transmitting the reset voltage and the effective signal voltage on the detecting electrode to the two inputs of the differential amplifier.
  • the device further includes: a common electrode substrate and a detecting electrode substrate, wherein the common electrode is disposed on the first surface of the common electrode substrate, the first surface of the common electrode substrate is perpendicular to the first direction, and the common electrode voltage generating circuit is disposed a second surface of the common electrode substrate; the detecting electrode substrate and the common electrode substrate are spaced apart in a first direction, the first surface of the detecting electrode substrate faces the first surface of the common electrode substrate, and is parallel to the first surface of the common electrode substrate The detecting electrode is disposed on the first surface of the detecting electrode substrate, and the detecting electrode signal processing circuit is disposed on the second surface of the detecting electrode substrate.
  • the device further includes: a common electrode frame and a detecting electrode frame, wherein the common electrode substrate is disposed on the common electrode frame; the detecting electrode frame and the common electrode frame are spaced apart in the first direction, and the detecting electrode The substrate is disposed on the detection electrode frame.
  • the device further includes: a common electrode protection layer and a detection electrode protection layer, wherein the common electrode protection layer is disposed on the common electrode surface; and the detection electrode protection layer is disposed on the detection electrode surface.
  • the device further includes: a common electrode conductive film and a detecting electrode conductive film, wherein the common electrode conductive film is disposed between the common electrode and the common electrode protective layer; and the detecting electrode conductive film is disposed on the detecting electrode and the detecting electrode protective layer between.
  • the detecting electrodes are multiple, and the plurality of detecting electrodes are spaced apart along the second direction, wherein the second direction It is perpendicular to the moving direction of the film to be tested and perpendicular to the first direction.
  • the detecting electrode is an electrode chip, or the detecting electrode is a sensor that induces electric charge.
  • a film thickness detecting method comprising: a common electrode voltage generating circuit generating a voltage on a common electrode such that an effective signal voltage is induced on the detecting electrode, wherein the common electrode and the detecting The electrodes are opposite and spaced apart in the first direction, the first common surface of the common electrode is opposite to the first detecting surface of the detecting electrode, and the detecting channel of the film to be tested is formed between the first common surface and the first detecting surface; the detecting electrode signal
  • the reset voltage timing control circuit in the processing circuit controls the detection electrode to perform voltage reset; the detection electrode effective signal voltage transfer timing control circuit in the detection electrode signal processing circuit transfers the effective signal voltage on the detection electrode; and detects the difference in the electrode signal processing circuit
  • the amplifier is configured to differentially amplify the reset voltage and the effective signal voltage on the detecting electrode to output an effective signal for detecting the film to be tested.
  • the reset voltage timing control circuit controls the reset voltage to reset each detecting electrode.
  • the control signal of the common electrode voltage timing control circuit controls the common electrode voltage generating circuit to apply a voltage to the common electrode when the effective signal voltage of each detecting electrode is transmitted at the falling edge of the detecting electrode effective signal voltage transfer timing.
  • the film thickness detecting device comprises: a common electrode, a detecting electrode, a common electrode voltage generating circuit, a detecting electrode signal processing circuit, and the common electrode and the detecting electrode are opposite and spaced apart in the first direction, and the common electrode is a common surface is opposite to the first detecting surface of the detecting electrode, and a detecting channel of the film to be tested is formed between the first common surface and the first detecting surface, wherein the common electrode voltage generating circuit is configured to generate a voltage on the common electrode, so that The detecting electrode detects an effective signal voltage; the detecting electrode signal processing circuit comprises: a reset voltage timing control circuit, a detecting electrode effective signal voltage transfer timing control circuit and a differential amplifier, wherein the reset voltage timing control circuit is configured to control the detecting electrode to perform voltage Reset; detecting electrode effective signal voltage transfer timing control circuit for transferring the effective signal voltage on the detecting electrode; differential amplifier for differentially amplifying the reset voltage and the effective signal voltage on the detecting electrode and outputting for detecting
  • FIG. 1 is a schematic view of a film thickness detecting device according to an embodiment of the present invention.
  • FIG. 2 is a schematic view showing the configuration of a common electrode and a detecting electrode of a film thickness detecting device according to an embodiment of the present invention
  • FIG. 3 is a flow chart of a film thickness detecting method according to an embodiment of the present invention.
  • FIG. 4 is a flow chart showing signal processing of a film thickness detecting device according to an embodiment of the present invention.
  • Figure 5 is a signal processing diagram of a film thickness detecting device according to an embodiment of the present invention.
  • Fig. 6 is a timing chart of various signals of a film thickness detecting device according to an embodiment of the present invention.
  • a film thickness detecting apparatus includes: a common electrode, a detecting electrode, a common electrode voltage generating circuit, and a detecting electrode signal processing circuit, wherein the common electrode and the detecting electrode are opposite in the first direction and Interval, the first common surface of the common electrode is opposite to the first detecting surface of the detecting electrode, and the detecting channel of the film to be tested is formed between the first common surface and the first detecting surface, wherein the common electrode voltage generating circuit is used in common A voltage is generated on the electrode to induce an effective signal voltage on the detecting electrode; the detecting electrode signal processing circuit comprises: a reset voltage timing control circuit, a detecting electrode effective signal voltage transfer timing control circuit and a differential amplifier, wherein the reset voltage timing control circuit is used for Controlling the detection electrode for voltage reset; detecting electrode effective signal voltage transfer timing control circuit for transferring the effective signal voltage on the detection electrode; differential amplifier for differentially amplifying the reset voltage and the effective signal voltage on the detection electrode and outputting for detection The film to
  • the reset voltage and the effective signal voltage on the detecting electrode are performed by using a differential amplifier.
  • the differential amplification output is used to detect the effective signal of the film to be tested. Since the initial output (ie, the output at reset) of the acquisition film thickness detecting device is differentially amplified with the true effective signal output, the environmental factors are effectively eliminated.
  • the effect of the film thickness detecting device in the related art is easily affected by environmental interference, and the technical effect that the film thickness detecting method can avoid environmental interference is realized.
  • the method further includes: a common electrode voltage timing control circuit, wherein the common electrode voltage timing control circuit is used In generating a control signal, the control signal is used to control the amplitude and width of the voltage applied to the common electrode by the common electrode voltage generating circuit to be suitable for the detection of the predetermined signal.
  • the detecting electrode signal processing circuit further includes: a detecting electrode reset voltage transfer timing control circuit, configured to perform voltage on the detecting electrode After reset, the reset voltage on the detection electrode is transferred.
  • the processing circuit further includes: a shift timing control circuit for transmitting the reset voltage and the effective signal voltage on the detecting electrode to the two inputs of the differential amplifier.
  • the film thickness detecting device further includes: a common electrode substrate and a detecting electrode substrate, wherein the common electrode is disposed in the common On the first surface of the electrode substrate, the first surface of the common electrode substrate is perpendicular to the first direction, the common electrode voltage generating circuit is disposed on the second surface of the common electrode substrate; and the detecting electrode substrate and the common electrode substrate are spaced apart in the first direction a first surface of the detecting electrode substrate facing the first surface of the common electrode substrate, and parallel to the first surface of the common electrode substrate, the detecting electrode is disposed on the first surface of the detecting electrode substrate, and the detecting electrode signal processing circuit is disposed at the detecting electrode On the second surface of the substrate.
  • the film thickness detecting device further includes: a common electrode frame body and a detecting electrode frame body, wherein the common electrode The substrate is disposed on the common electrode frame; the detecting electrode frame and the common electrode frame are spaced apart from each other in the first direction, and the detecting electrode substrate is disposed on the detecting electrode frame.
  • the film thickness detecting device further includes: a common electrode protective layer and detection The electrode protection layer, wherein the common electrode protection layer is disposed on the surface of the common electrode; and the detection electrode protection layer is disposed on the surface of the detection electrode.
  • a film thickness detecting device in the embodiment of the present invention
  • the film thickness detecting device further includes: a common electrode conductive film and a detecting electrode conductive film, wherein the common electrode conductive film is disposed between the common electrode and the common electrode protective layer; and the detecting electrode conductive film is disposed on the detecting electrode and the detecting electrode protective layer between.
  • the plurality of detecting electrodes may be plural, and the plurality of detecting electrodes are spaced apart in the second direction, wherein the second direction is perpendicular to the moving direction of the film to be tested and perpendicular to the first direction.
  • the detecting electrode may be an electrode chip, or the detecting electrode is a sensor that induces electric charge.
  • the film thickness detecting device includes: a common electrode 13 and a detecting electrode 23, a common electrode voltage generating circuit 17, and a common electrode voltage timing control.
  • the circuit 18 and the detection electrode signal processing circuit 27 are disposed on one side of the common electrode substrate 12, and the common electrode voltage generating circuit 17 and the common electrode voltage timing control circuit 18 are disposed on the other side of the common electrode substrate 12.
  • the detecting electrode 23 is disposed on one side of the detecting electrode substrate 22, and the detecting electrode signal processing circuit 27 is disposed on the other side of the detecting electrode substrate 22.
  • the detection electrode signal processing circuit 27 is composed of a reset voltage, a reset voltage timing control circuit, a detection electrode reset voltage transfer timing, a detection electrode effective signal voltage transfer timing, a shift timing control circuit, and a differential amplifier circuit.
  • the common electrode substrate 12 and the detecting electrode substrate 22 are again disposed on the common electrode frame 11 and the detecting electrode frame 21, respectively.
  • the differential voltage and the effective signal voltage on each electrode are differentially amplified and outputted by a differential amplifier circuit, and the output voltage can eliminate the environmental noise impact of each electrode, thereby achieving accurate scanning of each electrode. .
  • the detecting electrode 23 and the common electrode 13 are opposite and spaced apart in the first direction, and the first common surface of the common electrode 13 is opposite to the first detecting surface of each of the detecting electrodes, the first common surface and each of the first A detection channel for forming a film to be tested is formed between the surfaces.
  • the detecting electrode in the detecting device may actually include a plurality of detecting electrodes, and the plurality of detecting electrodes are spaced apart in the second direction, such as 5DPI, 10DPI, 50DPI, 100DPI, etc., and the detecting electrode may also use a special electrode. chip.
  • the second direction is perpendicular to the moving direction of the film to be tested and perpendicular to the first direction.
  • FIG. 2 is a composition of a common electrode and a detecting electrode of the film thickness detecting device according to an embodiment of the present invention.
  • conductive films 14 and 24 are respectively disposed on the common electrode 13 and the detecting electrode 23.
  • the conductive film is a film formed of a highly conductive material, and may be a conductive film such as gold or silver.
  • a suitable conductive film is selected; in order to ensure high wear resistance and corrosion resistance of the common electrode and the detecting electrode, it is required to apply a protective layer 15, a detecting electrode and a conductive film thereof on the surface of the common electrode and the conductive film thereof.
  • the surface is coated with the protective layer 25.
  • the material of the protective layer preferably has significant electrical conductivity, wear resistance and corrosion resistance, and the sensitivity of the common electrode and the detecting electrode is still high after the electrode is coated with the protective layer.
  • Technology Personnel can choose the appropriate protective layer material according to the actual situation.
  • a method embodiment of a film thickness detecting method there is also provided a method embodiment of a film thickness detecting method, and it is to be noted that the steps shown in the flowchart of the drawing may be in a computer system such as a set of computer executable instructions. Executing, and although the logical order is shown in the flowchart, in some cases, the steps shown or described may be performed in an order different from that herein, and the film thickness detecting method of the embodiment of the present invention may be used.
  • the film thickness detecting device provided by the embodiment of the present invention is executed.
  • the film thickness detecting method provided by the embodiment of the present invention will be described below.
  • FIG. 3 is a flowchart of a film thickness detecting method according to an embodiment of the present invention. As shown in FIG. 3, the method includes the following steps:
  • Step S302 the common electrode voltage generating circuit generates a voltage on the common electrode, so that the effective signal voltage is induced on the detecting electrode, wherein the common electrode and the detecting electrode are opposite and spaced apart in the first direction, and the first common surface of the common electrode is The first detecting surface of the detecting electrode is opposite to each other, and a detecting channel of the film to be tested is formed between the first common surface and the first detecting surface.
  • Step S304 the reset voltage timing control circuit in the detection electrode signal processing circuit controls the detection electrode to perform voltage reset.
  • Step S306 detecting a detection electrode effective signal voltage transfer timing control circuit in the electrode signal processing circuit, and transferring the effective signal voltage on the detection electrode.
  • Step S308 detecting a differential amplifier in the electrode signal processing circuit for differentially amplifying the reset voltage and the effective signal voltage on the detecting electrode, and outputting an effective signal for detecting the film to be tested.
  • a differential amplifier is used to differentially amplify the reset voltage and the effective signal voltage on the detecting electrode, and then output a method for detecting an effective signal of the film to be tested, which is adopted as an initial output of the film thickness detecting device. (that is, the output at the time of reset) is differentially amplified with the true effective signal output, effectively eliminating the influence of environmental factors, solving the problem that the film thickness detecting device in the related art is susceptible to environmental interference, and realizing the film thickness detection.
  • the method can avoid the technical effects of environmental interference.
  • the reset voltage timing control circuit controls the reset voltage to reset each detecting electrode.
  • the reset voltage on each detection electrode is reset when the falling edge of the detection electrode reset voltage transfer timing is transmitted, but it is also possible to add a reset voltage for a certain time before the falling edge comes to avoid insufficient reset;
  • the control signal of the common electrode voltage timing control circuit controls the common electrode voltage generating circuit to the common The voltage is applied to the electrodes.
  • the common electrode voltage is applied when the effective signal voltage of each detecting electrode is transmitted on the falling edge of the detecting electrode effective signal voltage transfer timing, but it is also possible to add a certain time before the falling edge comes.
  • the electrode voltage, for how long, can be determined according to the material of the object to be inspected.
  • FIG. 4 is a signal processing flowchart of a film thickness detecting device according to an embodiment of the present invention. As shown in FIG. 4, the flow includes the following steps:
  • step S402 each line scans the start signal SI.
  • step S404 the reset voltage timing control circuit RESET controls the reset voltage to reset each electrode.
  • step S406 the detection electrode reset voltage transfer timing RESET_T transfers the reset voltage signals VE_1RESET...VE_nRESET on the detection electrodes.
  • step S408 the control signal COM of the common electrode voltage timing control circuit controls the common electrode voltage generating circuit to apply the pulse voltage amplitude and width applied to the common electrode to the detection of the specific signal.
  • step S410 the detection electrode effective signal voltage transfer timing COM_T transfers the valid signals VE_1com...VE_ncom on the detection electrodes.
  • step S412 the shift timing control circuit SEL controls the effective signal voltage Vcom and the reset voltage VRESET of each electrode to be sequentially transmitted in pairs to the two input terminals of the differential amplifier.
  • step S414 the differential amplifier AMP sequentially differentially amplifies the effective signal voltage and the reset voltage on each of the electrodes, and outputs the signal as SIG.
  • the reset voltage timing control circuit RESET controls the reset voltage to reset each electrode; then the detecting electrode reset voltage transfer
  • the timing RESET_T transfers the reset voltage signal VE_1RESET...VE_nRESET on the detecting electrode.
  • FIG. 5 is a signal processing diagram in a film thickness detecting apparatus according to an embodiment of the present invention.
  • a control signal COM of a common electrode voltage timing control circuit controls a common electrode voltage generating circuit to apply a pulse voltage to a common electrode.
  • the amplitude and width are suitable for the detection of a particular signal.
  • the effective signal voltage Vcom and the reset voltage VRESET are sequentially transmitted in pairs to the two input terminals of the differential amplifier, and then the differential amplifier AMP sequentially differentially amplifies the effective signal voltage and the reset voltage on each electrode and outputs the same.
  • the signal is SIG, and the obtained SIG signal has eliminated the environmental noise impact on each detecting electrode, solving the problem that the film thickness detecting device in the related art is susceptible to environmental interference, and realizing the film thickness detecting method to avoid environmental interference. Technical effect.
  • FIG. 6 is a timing chart of various signals of the film thickness detecting device according to the embodiment of the present invention.
  • the voltage is reset after each row of the scanning enable signal SI (first clock).
  • the timing control circuit RESET controls the reset voltage to reset each electrode.
  • the detection electrode reset voltage transfer timing RESET_T (hth clock) transfers the reset voltage signals VE_1RESET...VE_nRESET on the detection electrodes.
  • the control signal COM of the common electrode voltage timing control circuit (the first clock starts, the time for applying the voltage to the common electrode is appropriately controlled according to the detection target, that is, the pulse width of the control COM) is controlled to control the common electrode voltage generating circuit.
  • the amplitude and width of the pulse voltage applied to the common electrode are suitable for detection of the detected object. Detecting an effective original thickness voltage signal on the detecting electrode, and transmitting the effective voltage signal VE_1com...VE_ncom on the detecting electrode through the detecting electrode effective signal voltage transfer timing COM_T in the detecting electrode signal processing circuit, and then shifting the timing control circuit SEL (k1, K2...k+n-1, k+n clocks) The effective signal voltage Vcom and the reset voltage VRESET that control each electrode are sequentially transmitted in pairs to the two inputs of the differential amplifier.
  • the differential amplifier AMP differentially amplifies the effective signal voltage and the reset voltage on each electrode in turn, and outputs the signals as SIG (VE1, VE2, ..., VEn-1, VEn), and the obtained SIG signal has been applied to each of the detecting electrodes.
  • SIG SIG
  • the environmental noise impact on the upper side is eliminated.
  • the falling edge of the detection electrode reset voltage transfer timing RESET_T transmits the reset voltage on each electrode, so the falling edge of the RESET_T must ensure that the reset voltage timing control circuit RESET controls the reset voltage for each electrode.
  • the falling edge of the detection electrode effective signal voltage transfer timing COM_T transmits the effective voltage signal of each electrode, so the falling edge of COM_T must ensure that the control signal COM of the common electrode voltage timing control circuit controls the common electrode voltage.
  • the generating circuit applies a voltage to the common electrode; in the embodiment of the invention, the detecting electrode is a sensor for inductive charge, so when the detecting electrode does not sense the effective thickness signal, it should be ensured that each detecting electrode is in a reset state as much as possible, even if the reset voltage timing control circuit RESET In the region other than the detection electrode effective signal voltage transfer timing COM_T and the control signal COM of the common electrode voltage timing control circuit, it is ensured that the reset voltage is reset for each electrode for the longest time; the film thickness detecting device provided by the embodiment of the present invention Detection Electrode, the detection electrode is not limited to a row, two rows of row sensing electrodes and is also applicable.
  • the disclosed technical contents may be implemented in other manners.
  • the device embodiments described above are merely illustrative, such as the division of the units, It can be divided into one logical function, and the actual implementation can have another division manner. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed.
  • the mutual coupling or direct coupling or communication connection shown or discussed may be an indirect coupling or communication connection through some interface, unit or module, and may be electrical or otherwise.
  • the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, may be located in one place, or may be distributed to multiple units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of the embodiment.
  • each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.
  • the above integrated unit can be implemented in the form of hardware or in the form of a software functional unit.
  • the integrated unit if implemented in the form of a software functional unit and sold or used as a standalone product, may be stored in a computer readable storage medium.
  • the medium includes a number of instructions for causing a computer device (which may be a personal computer, server or network device, etc.) to perform all or part of the steps of the methods described in various embodiments of the present invention.
  • the foregoing storage medium includes: a U disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a removable hard disk, a magnetic disk, or an optical disk, and the like. .

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  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

一种膜厚检测装置及方法。其中，该装置包括：公共电极（13），检测电极（23），公共电极电压产生电路（17），检测电极信号处理电路（27），第一公共面与第一检测表面之间形成待测膜的检测通道，其中，公共电极电压产生电路（17），用于在公共电极（13）上产生电压，使得检测电极（23）上感应出有效信号电压；检测电极信号处理电路（27）包括：复位电压时序控制电路，检测电极有效信号电压转送时序控制电路和差分放大器，其中，复位电压时序控制电路，用于控制检测电极（23）进行电压复位；检测电极有效信号电压转送时序控制电路，用于转送检测电极（23）上的有效信号电压；差分放大器，用于对检测电极（13）上的复位电压和有效信号电压进行差分放大后输出用于检测待测膜的有效信号（SIG）。

Description

膜厚检测装置及方法 技术领域
本发明涉及数字检测领域，具体而言，涉及一种膜厚检测装置及方法。
背景技术
众所周知，薄片状物品，例如纸张、票据、塑料薄膜以及纺织物品等的在线连续厚度测量，在其相对应的产品的生产、检测、处理、回收等过程中的地位越来越重要。近年来，通过电极间的静电感应进行薄膜厚度的检测技术在不断研究探索之中，例如在相关技术中的一种电容式纸厚传感器，主要是通过将电容器的容量变化转化成振荡频率的变化，再通过频压转换模块将频率的变化转换成电压的变化。另外，相关技术中的一种材料厚度的检测方法，主要是通过利用平板电容的极板作为厚度检测的敏感器件，实测对象的厚度变化引起的电容活动极板产生位移，导致平板电容器的容量发生变化。另外，相关技术中也有采用相对的公共电极和检测电极形成检测通道，当待测对象经过检测通道时，改变了公共电极和检测电极间的介质的介电常数，相应的检测电极上感应的电荷数量随之发生变化，而且检测电极上的输出电压大小也发生变化，通过检测对象的厚度不同，公共电极和检出电极间的介电常数也不相同，进而检测电极上感应的电荷数量也不相同，检测电极上的输出电压大小也不同。因此通过对检测电极电压信号的大小并进行分析处理，可以计算出检测对象的厚度。
然而，上述的几种检测方式，在膜厚检测过程中，当膜厚检测装置受到外界环境(例如温度、噪音、湿度以及电磁)的干扰时，信号都会失真，从而会影响厚度检测的准确性。
针对上述相关技术中的膜厚检测装置容易受到环境干扰的问题，目前尚未提出有效的解决方案。
发明内容
本发明实施例提供了一种膜厚检测装置及方法，以至少解决相关技术中的膜厚检测装置容易受到环境干扰的技术问题。
根据本发明实施例的一个方面，提供了一种膜厚检测装置，包括：公共电极，检 测电极，公共电极电压产生电路，检测电极信号处理电路，公共电极与检测电极在第一方向上相对且间隔设置，公共电极的第一公共面与检测电极的第一检测表面相对，第一公共面与第一检测表面之间形成待测膜的检测通道，其中，公共电极电压产生电路，用于在公共电极上产生电压，使得检测电极上感应出有效信号电压；检测电极信号处理电路包括：复位电压时序控制电路，检测电极有效信号电压转送时序控制电路和差分放大器，其中，复位电压时序控制电路，用于控制检测电极进行电压复位；检测电极有效信号电压转送时序控制电路，用于转送检测电极上的有效信号电压；差分放大器，用于对检测电极上的复位电压和有效信号电压进行差分放大后输出用于检测待测膜的有效信号。
可选地，装置还包括：公共电极电压时序控制电路，其中，公共电极电压时序控制电路，用于产生控制信号，控制信号用于控制公共电极电压产生电路加到公共电极上的电压幅度和宽度适合预定信号的检测。
可选地，检测电极信号处理电路还包括：检测电极复位电压转送时序控制电路，用于在检测电极进行电压复位后，转送检测电极上的复位电压。
可选地，检测电极信号处理电路还包括：移位时序控制电路，用于将检测电极上的复位电压和有效信号电压传输到差分放大器的两个输入端。
可选地，装置还包括：公共电极基板和检测电极基板，其中，公共电极设置在公共电极基板的第一表面上，公共电极基板的第一表面与第一方向垂直，公共电极电压产生电路设置在公共电极基板的第二表面；检测电极基板与公共电极基板在第一方向上间隔设置，检测电极基板的第一表面朝向公共电极基板的第一表面，并且与公共电极基板的第一表面平行，检测电极设置在检测电极基板的第一表面上，检测电极信号处理电路设置在检测电极基板的第二表面上。
可选地，装置还包括：公共电极框体和检测电极框体，其中，公共电极基板设置在公共电极框体上；检测电极框体与公共电极框体在第一方向上间隔设置，检测电极基板设置在检测电极框体上。
可选地，装置还包括：公共电极保护层和检测电极保护层，其中，公共电极保护层设置在公共电极表面上；检测电极保护层设置在检测电极表面上。
可选地，装置还包括：公共电极导电薄膜与检测电极导电薄膜，其中，公共电极导电薄膜设置在公共电极与公共电极保护层之间；检测电极导电薄膜设置在检测电极与检测电极保护层之间。
可选地，检测电极为多个，多个检测电极沿第二方向间隔设置，其中，第二方向 与待测膜的移动方向垂直，与第一方向垂直。
可选地，检测电极为电极芯片，或者，检测电极为感应电荷的传感器。
根据本发明实施例的另一方面，还提供了一种膜厚检测方法，包括：公共电极电压产生电路在公共电极上产生电压，使得检测电极上感应出有效信号电压，其中，公共电极与检测电极在第一方向上相对且间隔设置，公共电极的第一公共面与检测电极的第一检测表面相对，第一公共面与第一检测表面之间形成待测膜的检测通道；检测电极信号处理电路中的复位电压时序控制电路控制检测电极进行电压复位；检测电极信号处理电路中的检测电极有效信号电压转送时序控制电路，转送检测电极上的有效信号电压；检测电极信号处理电路中的差分放大器，用于对检测电极上的复位电压和有效信号电压进行差分放大后输出用于检测待测膜的有效信号。
可选地，在检测电极为多个的情况下，在检测电极复位电压转送时序的下降沿传输每个检测电极上的复位电压时，复位电压时序控制电路控制复位电压对每个检测电极进行复位；在检测电极有效信号电压转送时序的下降沿传输每个检测电极的有效信号电压时，公共电极电压时序控制电路的控制信号控制公共电极电压产生电路对公共电极上施加电压。
采用本发明实施例的膜厚检测装置，包括：公共电极，检测电极，公共电极电压产生电路，检测电极信号处理电路，公共电极与检测电极在第一方向上相对且间隔设置，公共电极的第一公共面与检测电极的第一检测表面相对，第一公共面与第一检测表面之间形成待测膜的检测通道，其中，公共电极电压产生电路，用于在公共电极上产生电压，使得检测电极上感应出有效信号电压；检测电极信号处理电路包括：复位电压时序控制电路，检测电极有效信号电压转送时序控制电路和差分放大器，其中，复位电压时序控制电路，用于控制检测电极进行电压复位；检测电极有效信号电压转送时序控制电路，用于转送检测电极上的有效信号电压；差分放大器，用于对检测电极上的复位电压和有效信号电压进行差分放大后输出用于检测待测膜的有效信号，解决了相关技术中的膜厚检测装置容易受到环境干扰的问题，实现了膜厚检测方法能够避免环境干扰的技术效果。
附图说明
此处所说明的附图用来提供对本发明的进一步理解，构成本申请的一部分，本发明的示意性实施例及其说明用于解释本发明，并不构成对本发明的不当限定。在附图中：
图1是根据本发明实施例的膜厚检测装置的示意图；
图2是根据本发明实施例的膜厚检测装置的公共电极和检测电极的构成示意图；
图3根据本发明实施例的膜厚检测方法的流程图；
图4根据本发明实施例的膜厚检测装置的信号处理流程图；
图5根据本发明实施例的膜厚检测装置的信号处理图；以及
图6根据本发明实施例的膜厚检测装置各种信号的时序图。
具体实施方式
为了使本技术领域的人员更好地理解本发明方案，下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分的实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都应当属于本发明保护的范围。
需要说明的是，本发明的说明书和权利要求书及上述附图中的术语“第一”、“第二”等是用于区别类似的对象，而不必用于描述特定的顺序或先后次序。应该理解这样使用的数据在适当情况下可以互换，以便这里描述的本发明的实施例能够以除了在这里图示或描述的那些以外的顺序实施。此外，术语“包括”和“具有”以及他们的任何变形，意图在于覆盖不排他的包含，例如，包含了一系列步骤或单元的过程、方法、***、产品或设备不必限于清楚地列出的那些步骤或单元，而是可包括没有清楚地列出的或对于这些过程、方法、产品或设备固有的其它步骤或单元。
实施例1
根据本发明实施例的一个方面，提供了一种膜厚检测装置，包括：公共电极，检测电极，公共电极电压产生电路，检测电极信号处理电路，公共电极与检测电极在第一方向上相对且间隔设置，公共电极的第一公共面与检测电极的第一检测表面相对，第一公共面与第一检测表面之间形成待测膜的检测通道，其中，公共电极电压产生电路用于在公共电极上产生电压，使得检测电极上感应出有效信号电压；检测电极信号处理电路包括：复位电压时序控制电路，检测电极有效信号电压转送时序控制电路和差分放大器，其中，复位电压时序控制电路用于控制检测电极进行电压复位；检测电极有效信号电压转送时序控制电路用于转送检测电极上的有效信号电压；差分放大器用于对检测电极上的复位电压和有效信号电压进行差分放大后输出用于检测待测膜的有效信号。
通过上述实施例，采用差分放大器对检测电极上的复位电压和有效信号电压进行 差分放大后输出用于检测待测膜的有效信号，由于采用在采集膜厚检测装置的初期输出(也即，复位时的输出)与真正的有效信号输出进行差分放大，有效地消除了环境因素的影响,解决了相关技术中的膜厚检测装置容易受到环境干扰的问题，实现了膜厚检测方法能够避免环境干扰的技术效果。
可选地，为使得公共电极电压产生电路产生的电压准确,在本发明实施例的一种膜厚检测装置中，还包括：公共电极电压时序控制电路，其中，公共电极电压时序控制电路，用于产生控制信号，控制信号用于控制公共电极电压产生电路加到公共电极上的电压幅度和宽度适合预定信号的检测。
为有效实现复位电压的控制,可选地，在本发明实施例的一种膜厚检测装置中，检测电极信号处理电路还包括：检测电极复位电压转送时序控制电路，用于在检测电极进行电压复位后，转送检测电极上的复位电压。
在将检测电极上的复位电压和有效信号电压传输到差分放大器的两个输入端时,可以采用多种方式,可选地，在本发明实施例的一种膜厚检测装置中，检测电极信号处理电路还包括：移位时序控制电路，用于将检测电极上的复位电压和有效信号电压传输到差分放大器的两个输入端。
为增加膜厚检测装置的牢固性,可选地，在本发明实施例的一种膜厚检测装置中，膜厚检测装置还包括：公共电极基板和检测电极基板，其中，公共电极设置在公共电极基板的第一表面上，公共电极基板的第一表面与第一方向垂直，公共电极电压产生电路设置在公共电极基板的第二表面；检测电极基板与公共电极基板在第一方向上间隔设置，检测电极基板的第一表面朝向公共电极基板的第一表面，并且与公共电极基板的第一表面平行，检测电极设置在检测电极基板的第一表面上，检测电极信号处理电路设置在检测电极基板的第二表面上。
较佳地，为进一步加强膜厚检测装置的牢固性,在本发明实施例的一种膜厚检测装置中，膜厚检测装置还包括：公共电极框体和检测电极框体，其中，公共电极基板设置在公共电极框体上；检测电极框体与公共电极框体在第一方向上间隔设置，检测电极基板设置在检测电极框体上。
为保证公共电极和检测电极具有很高的耐磨性和防腐蚀性,可选地，在本发明实施例的一种膜厚检测装置中，膜厚检测装置还包括：公共电极保护层和检测电极保护层，其中，公共电极保护层设置在公共电极表面上；检测电极保护层设置在检测电极表面上。
为了增加检测电极的电荷感应强度,可选地，在本发明实施例的一种膜厚检测装置 中，膜厚检测装置还包括：公共电极导电薄膜与检测电极导电薄膜，其中，公共电极导电薄膜设置在公共电极与公共电极保护层之间；检测电极导电薄膜设置在检测电极与检测电极保护层之间。
需要说明的是，上述检测电极可以为多个，该多个检测电极沿第二方向间隔设置，其中，第二方向与待测膜的移动方向垂直，与第一方向垂直。
可选地，检测电极可以为电极芯片，或者，检测电极为感应电荷的传感器。
下面结合附图对本发明的一个可选的实施例进行说明。
图1是根据本发明实施例的膜厚检测装置的示意图,如图1所示，该膜厚检测装置包括：包括公共电极13和检测电极23，公共电极电压产生电路17、公共电极电压时序控制电路18和检测电极信号处理电路27。公共电极13设置在公共电极基板12的一侧，公共电极电压产生电路17、公共电极电压时序控制电路18设置在公共电极基板12上另一侧。检测电极23设置在检测电极基板22的一侧，检测电极信号处理电路27设置在检测电极基板22的另一侧。检测电极信号处理电路27是由复位电压、复位电压时序控制电路、检测电极复位电压转送时序、检测电极有效信号电压转送时序、移位时序控制电路和差分放大电路组成。公共电极基板12和检测电极基板22又分别设置在公共电极框体11和检测电极框体21上。其中,通过差分放大电路对每个电极上的的复位电压和有效信号电压成对依次差分放大后进行输出，输出电压可以将每个电极受到的环境噪音影响消除掉，实现每个电极的精确扫描。检测电极23与上述公共电极13在第一方向上相对且间隔设置，且上述公共电极13的第一公共表面与各上述检测电极的第一检测表面相对，上述第一公共表面与各上述第一检测表面之间形成待测膜的检测通道。上述检测装置中的检测电极实际上可以包括多个检测电极，且上述多个检测电极为沿第二方向间隔设置，如设置成5DPI、10DPI、50DPI、100DPI等，检测电极也可以使用专门的电极芯片。上述第二方向与上述待测膜的移动方向垂直，且与上述第一方向垂直。
为了增加检测电极的电荷感应强度，在本发明优选实施例中,还提供了一种优选的膜厚检测装置,图2是根据本发明实施例的膜厚检测装置的公共电极和检测电极的构成示意图,如图2所示，在公共电极13和检测电极23上分别设置导电薄膜14和24，导电薄膜为高导电性材料形成的薄膜，可以为金或银等导电薄膜，本领域技术人员可以根据实际情况选择合适的导电薄膜；为了保证公共电极和检测电极具有很高的耐磨性和防腐蚀性，需要在公共电极和其导电薄膜的表面涂覆保护层15、检测电极和其导电薄膜的表面涂覆保护层25，保护层的材料最好具有显著的导电性能、耐磨性和防腐蚀性，保证电极在涂覆保护层后，公共电极与检测电极的感度依然很高，本领域技术 人员可以根据实际情况选择合适的保护层材料。
实施例2
根据本发明另一个实施例，还提供了一种膜厚检测方法的方法实施例，需要说明的是，在附图的流程图示出的步骤可以在诸如一组计算机可执行指令的计算机***中执行，并且，虽然在流程图中示出了逻辑顺序，但是在某些情况下，可以以不同于此处的顺序执行所示出或描述的步骤，本发明实施例的膜厚检测方法可以用于执行本发明实施例所提供的膜厚检测装置。以下对本发明实施例提供的膜厚检测方法进行介绍。
在本实施例中，提供了一种膜厚检测方法，图3根据本发明实施例的膜厚检测方法的流程图，如图3所示，该方法包括如下步骤：
步骤S302，公共电极电压产生电路在公共电极上产生电压，使得检测电极上感应出有效信号电压，其中，公共电极与检测电极在第一方向上相对且间隔设置，公共电极的第一公共面与检测电极的第一检测表面相对，第一公共面与第一检测表面之间形成待测膜的检测通道。
步骤S304，检测电极信号处理电路中的复位电压时序控制电路控制检测电极进行电压复位。
步骤S306，检测电极信号处理电路中的检测电极有效信号电压转送时序控制电路，转送检测电极上的有效信号电压。
步骤S308，检测电极信号处理电路中的差分放大器，用于对检测电极上的复位电压和有效信号电压进行差分放大后输出用于检测待测膜的有效信号。
通过上述步骤S302至步骤S308，采用差分放大器对检测电极上的复位电压和有效信号电压进行差分放大后输出用于检测待测膜的有效信号的方法，由于采用在采集膜厚检测装置的初期输出(也即，复位时的输出)与真正的有效信号输出进行差分放大，有效地消除了环境因素的影响,解决了相关技术中的膜厚检测装置容易受到环境干扰的问题，实现了膜厚检测方法能够避免环境干扰的技术效果。
可选地，在检测电极为多个的情况下，在检测电极复位电压转送时序的下降沿传输每个检测电极上的复位电压时，复位电压时序控制电路控制复位电压对每个检测电极进行复位，需要说明的是，在检测电极复位电压转送时序的下降沿传输每个检测电极上的复位电压时复位，但也可以在下降沿到来之前加一定时间的复位电压，避免复位不够充分；在检测电极有效信号电压转送时序的下降沿传输每个检测电极的有效信号电压时，公共电极电压时序控制电路的控制信号控制公共电极电压产生电路对公共 电极上施加电压，需要指出的是，在检测电极有效信号电压转送时序的下降沿传输每个检测电极的有效信号电压时施加公共电极电压，但也可以在在下降沿到来之前加一定时间的公共电极电压，具体加多长时间，可以根据被检测对象的材质来决定。
下面结合附图,对膜厚检测方法的信号处理,以及信号处理的时序进行说明。
图4根据本发明实施例的膜厚检测装置的信号处理流程图，如图4所示，该流程包括如下步骤：
步骤S402，每一行扫描启动信号SI。
步骤S404，复位电压时序控制电路RESET控制复位电压，使每个电极进行复位。
步骤S406，检测电极复位电压转送时序RESET_T转送检测电极上的复位电压信号VE_1RESET…VE_nRESET。
步骤S408，公共电极电压时序控制电路的控制信号COM控制公共电极电压产生电路，使其加到公共电极上的脉冲电压幅度和宽度适合特定信号的检测。
步骤S410，检测电极有效信号电压转送时序COM_T转送检测电极上的有效信号VE_1com…VE_ncom。
步骤S412，移位时序控制电路SEL控制每个电极的有效信号电压Vcom和复位电压VRESET成对依次传输到差分放大器的两个输入端。
步骤S414，差分放大器AMP将每个电极上的有效信号电压和复位电压成对依次差分放大后进行输出，信号为SIG。
在上述步骤S402至步骤S414中，在膜厚检测装置工作时，首先经过每一行扫描启动信号SI后，复位电压时序控制电路RESET控制复位电压，使每个电极进行复位；然后检测电极复位电压转送时序RESET_T转送检测电极上的复位电压信号VE_1RESET…VE_nRESET。
图5根据本发明实施例的膜厚检测装置中信号处理图，如图5所示，公共电极电压时序控制电路的控制信号COM控制公共电极电压产生电路，使其加到公共电极上的脉冲电压幅度和宽度适合特定信号的检测。检测电极上感应有效的原稿厚度电荷信号，经过检测电极信号处理电路中的检测电极有效信号电压转送时序COM_T转送检测电极上的有效信号VE_1com…VE_ncom，然后移位时序控制电路SEL控制每个电极的有效信号电压Vcom和复位电压VRESET成对依次传输到差分放大器的两个输入端，接下来差分放大器AMP将每个电极上的有效信号电压和复位电压成对依次差分放大后进行输出， 信号为SIG，得到的SIG信号已将每个检测电极上受到的环境噪音影响消除掉，解决了相关技术中的膜厚检测装置容易受到环境干扰的问题，实现了膜厚检测方法能够避免环境干扰的技术效果。
图6根据本发明实施例的膜厚检测装置各种信号的时序图，如图6所示，膜厚检测装置工作时，经每一行的扫描启动信号SI(第1个时钟)后，复位电压时序控制电路RESET控制复位电压，使每个电极进行复位。然后检测电极复位电压转送时序RESET_T(第h个时钟)转送检测电极上的复位电压信号VE_1RESET…VE_nRESET。然后公共电极电压时序控制电路的控制信号COM(第i个时钟开始，根据检测对象的不同，合理控制公共电极加电压的时间，即为控制COM的脉冲宽度)控制共通电极电压产生电路，使其加到公共电极上的脉冲电压幅度和宽度适合检测对象的检测。检测电极上感应有效的原稿厚度电压信号，经过检测电极信号处理电路中的检测电极有效信号电压转送时序COM_T转送检测电极上的有效电压信号VE_1com…VE_ncom，然后移位时序控制电路SEL(第k1、k2…k+n-1、k+n个时钟)控制每个电极的有效信号电压Vcom和复位电压VRESET成对依次传输到差分放大器的两个输入端。差分放大器AMP将每个电极上的的有效信号电压和复位电压成对依次差分放大后进行输出，信号为SIG(VE1、VE2…VEn-1、VEn)，得到的SIG信号已将每个检测电极上受到的环境噪音影响消除掉。
需要说明的是，本发明实施例中检测电极复位电压转送时序RESET_T的下降沿传输每个电极上的复位电压，因此RESET_T的下降沿时必须保证复位电压时序控制电路RESET控制复位电压对每个电极进行复位；本发明实施例中检测电极有效信号电压转送时序COM_T的下降沿传输每个电极的有效电压信号，因此COM_T的下降沿时必须保证公共电极电压时序控制电路的控制信号COM控制公共电极电压产生电路对公共电极上施加电压；本发明实施例中检测电极为感应电荷的传感器，因此在检测电极不感应有效厚度信号时，应保证各检测电极尽量处于复位状态，即使复位电压时序控制电路RESET在检测电极有效信号电压转送时序COM_T和公共电极电压时序控制电路的控制信号COM以外的区域，保证最长时间地控制复位电压对每个电极进行复位；本发明实施例提供的膜厚检测装置的检测电极，不局限于一排检测电极，二排及多排检测电极也同样适用。
上述本发明实施例序号仅仅为了描述，不代表实施例的优劣。
在本发明的上述实施例中，对各个实施例的描述都各有侧重，某个实施例中没有详述的部分，可以参见其他实施例的相关描述。
在本申请所提供的几个实施例中，应该理解到，所揭露的技术内容，可通过其它的方式实现。其中，以上所描述的装置实施例仅仅是示意性的，例如所述单元的划分， 可以为一种逻辑功能划分，实际实现时可以有另外的划分方式，例如多个单元或组件可以结合或者可以集成到另一个***，或一些特征可以忽略，或不执行。另一点，所显示或讨论的相互之间的耦合或直接耦合或通信连接可以是通过一些接口，单元或模块的间接耦合或通信连接，可以是电性或其它的形式。
所述作为分离部件说明的单元可以是或者也可以不是物理上分开的，作为单元显示的部件可以是或者也可以不是物理单元，即可以位于一个地方，或者也可以分布到多个单元上。可以根据实际的需要选择其中的部分或者全部单元来实现本实施例方案的目的。
另外，在本发明各个实施例中的各功能单元可以集成在一个处理单元中，也可以是各个单元单独物理存在，也可以两个或两个以上单元集成在一个单元中。上述集成的单元既可以采用硬件的形式实现，也可以采用软件功能单元的形式实现。
所述集成的单元如果以软件功能单元的形式实现并作为独立的产品销售或使用时，可以存储在一个计算机可读取存储介质中。基于这样的理解，本发明实施例的技术方案本质上或者说对现有技术做出贡献的部分或者该技术方案的全部或部分可以以软件产品的形式体现出来，该计算机软件产品存储在一个存储介质中，包括若干指令用以使得一台计算机设备(可为个人计算机、服务器或者网络设备等)执行本发明各个实施例所述方法的全部或部分步骤。而前述的存储介质包括：U盘、只读存储器(ROM，Read-Only Memory)、随机存取存储器(RAM，Random Access Memory)、移动硬盘、磁碟或者光盘等各种可以存储程序代码的介质。
以上所述仅是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。

Claims (12)

  1. 一种膜厚检测装置，包括：公共电极，检测电极，公共电极电压产生电路，检测电极信号处理电路，所述公共电极与所述检测电极在第一方向上相对且间隔设置，所述公共电极的第一公共面与所述检测电极的第一检测表面相对，所述第一公共面与所述第一检测表面之间形成待测膜的检测通道，其中，
    公共电极电压产生电路，用于在所述公共电极上产生电压，使得所述检测电极上感应出有效信号电压；
    检测电极信号处理电路包括：复位电压时序控制电路，检测电极有效信号电压转送时序控制电路和差分放大器，其中，所述复位电压时序控制电路，用于控制所述检测电极进行电压复位；所述检测电极有效信号电压转送时序控制电路，用于转送所述检测电极上的有效信号电压；所述差分放大器，用于对所述检测电极上的复位电压和所述有效信号电压进行差分放大后输出用于检测所述待测膜的有效信号。
  2. 根据权利要求1所述的装置，其中，所述装置还包括：公共电极电压时序控制电路，其中，所述公共电极电压时序控制电路，用于产生控制信号，所述控制信号用于控制所述公共电极电压产生电路加到所述公共电极上的电压幅度和宽度适合预定信号的检测。
  3. 根据权利要求1所述的装置，其中，所述检测电极信号处理电路还包括：检测电极复位电压转送时序控制电路，用于在所述检测电极进行电压复位后，转送所述检测电极上的复位电压。
  4. 根据权利要求1所述的装置，其中，所述检测电极信号处理电路还包括：移位时序控制电路，用于将检测电极上的所述复位电压和所述有效信号电压传输到所述差分放大器的两个输入端。
  5. 根据权利要求1所述的装置，其中，所述装置还包括：公共电极基板和检测电极基板，其中，
    所述公共电极设置在所述公共电极基板的第一表面上，所述公共电极基板的第一表面与所述第一方向垂直，所述公共电极电压产生电路设置在所述公共电极基板的第二表面；
    所述检测电极基板与所述公共电极基板在所述第一方向上间隔设置，所述检 测电极基板的第一表面朝向所述公共电极基板的第一表面，并且与所述公共电极基板的第一表面平行，所述检测电极设置在所述检测电极基板的第一表面上，所述检测电极信号处理电路设置在所述检测电极基板的第二表面上。
  6. 根据权利要求5所述的装置，其中，所述装置还包括：公共电极框体和检测电极框体，其中，所述公共电极基板设置在所述公共电极框体上；所述检测电极框体与所述公共电极框体在所述第一方向上间隔设置，所述检测电极基板设置在所述检测电极框体上。
  7. 根据权利要求1所述的装置，其中，所述装置还包括：公共电极保护层和检测电极保护层，其中，所述公共电极保护层设置在所述公共电极表面上；所述检测电极保护层设置在所述检测电极表面上。
  8. 根据权利要求7所述的装置，其中，所述装置还包括：公共电极导电薄膜与检测电极导电薄膜，其中，所述公共电极导电薄膜设置在所述公共电极与所述公共电极保护层之间；所述检测电极导电薄膜设置在所述检测电极与所述检测电极保护层之间。
  9. 根据权利要求1至8所述的装置，其中，所述检测电极为多个，所述多个检测电极沿第二方向间隔设置，其中，所述第二方向与所述待测膜的移动方向垂直，与所述第一方向垂直。
  10. 根据权利要求9所述的装置，其中，所述检测电极为电极芯片，或者，所述检测电极为感应电荷的传感器。
  11. 一种膜厚检测方法，包括：
    公共电极电压产生电路在公共电极上产生电压，使得检测电极上感应出有效信号电压，其中，所述公共电极与所述检测电极在第一方向上相对且间隔设置，所述公共电极的第一公共面与所述检测电极的第一检测表面相对，所述第一公共面与所述第一检测表面之间形成待测膜的检测通道；
    检测电极信号处理电路中的所述复位电压时序控制电路控制所述检测电极进行电压复位；
    所述检测电极信号处理电路中的所述检测电极有效信号电压转送时序控制电路，转送所述检测电极上的有效信号电压；
    所述检测电极信号处理电路中的所述差分放大器，用于对所述检测电极上的复位电压和所述有效信号电压进行差分放大后输出用于检测所述待测膜的有效信 号。
  12. 根据权利要求11所述的方法，其中，在所述检测电极为多个的情况下，
    在检测电极复位电压转送时序的下降沿传输每个检测电极上的复位电压时，复位电压时序控制电路控制复位电压对每个检测电极进行复位；
    在检测电极有效信号电压转送时序的下降沿传输每个检测电极的有效信号电压时，公共电极电压时序控制电路的控制信号控制公共电极电压产生电路对所述公共电极上施加电压。
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