WO2018035957A1 - 一种非球面补偿镜、非球面光学检测***及方法 - Google Patents

一种非球面补偿镜、非球面光学检测***及方法 Download PDF

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WO2018035957A1
WO2018035957A1 PCT/CN2016/103514 CN2016103514W WO2018035957A1 WO 2018035957 A1 WO2018035957 A1 WO 2018035957A1 CN 2016103514 W CN2016103514 W CN 2016103514W WO 2018035957 A1 WO2018035957 A1 WO 2018035957A1
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aspherical
lens
mirror
aspheric
light
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PCT/CN2016/103514
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English (en)
French (fr)
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高松涛
苗二龙
武东城
隋永新
杨怀江
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中国科学院长春光学精密机械与物理研究所
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Publication of WO2018035957A1 publication Critical patent/WO2018035957A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00

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  • the invention belongs to the technical field of optical design, and in particular relates to an aspherical compensation mirror, an aspheric optical detection system and a method.
  • the present invention provides an aspherical compensation mirror, an aspherical optical detection system and method.
  • an aspherical optical detection system comprising:
  • An aspherical compensating mirror comprising a reference surface and at least one compensating surface; the reference surface is configured to reflect light incident along a normal to the reference plane and return the original path to form reference light; and pass the reference surface And the light of the at least one compensation surface forms an aspheric wave matching the aspheric surface to be tested, and the light in the aspheric wave is incident along an aspheric normal line, and is reflected along the original optical path after the aspheric surface to be tested Return to form the light to be measured;
  • the interferometer is configured to generate a plane wave and exit to the aspherical compensation mirror, and simultaneously detect the interference fringes formed by the reference light and the to-be-measured light to detect the aspheric surface to be tested.
  • the aspherical compensating mirror further comprises an etalon interface matched with the interferometer for mounting on a corresponding interface of the interferometer.
  • the aspherical compensation mirror comprises a plurality of lenses, one of the mirrors of the lens serves as a reference surface, and the remaining mirrors are compensation surfaces.
  • the reference surface and the compensation surface are plane or spherical.
  • the aspherical compensation mirror comprises a planar lens and a concave lens; the planar lens and the concave lens are sequentially disposed along the optical path, and the second plane of the planar lens is a reference surface, the first mirror surface and the concave lens of the planar lens The two mirrors are the compensation surfaces.
  • the aspherical compensation mirror includes a first lens, a second lens, and a third lens.
  • the first lens, the second lens, and the third lens are sequentially disposed along a direction of the optical path, and the front and rear mirrors of the first lens and the second lens And the second mirror surface of the third lens is a compensation surface, and the first mirror surface of the third lens is a reference surface.
  • the aspherical compensating mirror is mounted on the interferometer via an etalon interface.
  • an aspherical compensating mirror for use in an aspheric optical detecting system, comprising:
  • the reference surface is configured to reflect light incident along a normal to the reference surface and return the original path to form reference light; and transmit the reference surface and the at least one compensation surface
  • the light forms an aspherical wave that matches the aspherical surface to be measured.
  • the light in the aspherical wave is incident along the aspheric normal and is reflected along the original optical path after the aspherical surface to be measured to form a light to be measured.
  • the aspherical compensating mirror further comprises an etalon interface matched with the interferometer for mounting on a corresponding interface of the interferometer.
  • the aspherical compensation mirror comprises a plurality of lenses, one of the mirrors of the lens serves as a reference surface, and the remaining mirrors are compensation surfaces.
  • the reference surface and the compensation surface are plane or spherical.
  • the aspherical compensation mirror comprises a planar lens and a concave lens; the planar lens and the concave lens are sequentially disposed along the optical path, and the second mirror surface of the planar lens is a reference surface, the first mirror surface and the concave lens of the planar lens The two mirrors are the compensation surfaces.
  • the aspherical compensation mirror comprises a first lens, a second lens and a third lens
  • the first lens, the second lens, and the third lens are sequentially disposed along the direction of the optical path
  • the front and rear mirror surfaces of the first lens and the second lens, and the second mirror surface of the third lens are compensation surfaces
  • the first mirror surface of the third lens is Reference surface.
  • the aspherical compensation mirror is mounted on the interferometer through an etalon interface.
  • an aspherical optical detection method comprising:
  • Step 201 The interferometer emits a plane wave
  • Step 202 A plane wave emitted by the interferometer is incident on an aspherical compensation mirror, the aspherical compensation mirror includes a reference surface and at least one compensation surface; and a portion of the light incident along a normal to the reference surface is reflected by the reference surface Returning from the original path to form reference light; light passing through the reference surface and the at least one compensation surface forms an aspherical wave matching the aspheric surface to be tested; the light in the aspherical wave is incident along an aspheric normal, and After being returned by the aspherical surface to be tested, returning along the original optical path to form a light to be measured;
  • Step 203 The interferometer detects interference fringes formed after the reference light and the light to be measured interfere to realize zero position detection of the aspheric surface to be tested.
  • the technical effect obtained by the above technical solution is that the reference surface is disposed inside the aspherical compensation mirror, and the aspherical compensation mirror can be directly mounted on the interferometer through the etalon interface, without using the spherical wave emitted by the interferometer It is transformed into an aspherical wave matching the aspherical surface to be tested, thereby simplifying the detection optical path structure of the aspherical surface, and realizing the convenient and quick detection of the aspherical surface.
  • FIG. 1 is a block diagram of an aspherical optical detection system in accordance with an embodiment of the present invention
  • Embodiment 2 is a schematic diagram showing optical design results of Embodiment 1 in an aspherical optical detecting system according to an embodiment of the present invention
  • FIG. 3 is a schematic view showing the assembly result of Embodiment 1 in the aspherical optical detecting system provided in an embodiment of the present invention
  • FIG. 4 is a schematic diagram showing optical design results of Embodiment 2 in an aspheric optical detecting system according to an embodiment of the present invention
  • FIG. 5 is a schematic diagram showing the assembly result of Embodiment 2 in the aspherical optical detecting system provided in an embodiment of the present invention
  • Figure 6 is a flow chart of the aspherical optical detection method of the present invention.
  • the present invention provides an aspherical optical detection system including:
  • the aspherical compensation mirror S1 includes a reference surface S2 and at least one compensation surface; the reference surface is configured to reflect the light incident along the normal of the reference surface and return the original path to form reference light;
  • the reference surface and the light of the at least one compensation surface form an aspherical wave matching the aspherical surface to be tested, the light in the aspherical wave is incident along an aspheric normal, and the aspherical reflection is detected by the aspherical surface to be tested
  • the original light path returns to form the light to be measured;
  • the interferometer is configured to generate a plane wave and exit to the aspherical compensation mirror S1, and detect interference fringes formed by the reference light and the light to be detected to detect the aspheric surface to be tested.
  • the aspherical wave matching the aspherical surface to be tested means that all of the rays incident on the aspherical surface to be tested in the aspherical wave are incident along a normal line of the aspherical surface to be tested.
  • the reference surface is mounted on the interferometer in a separate standard mirror form, and in the present invention, the reference surface S2 is disposed inside the aspherical compensation mirror S1, and the aspheric surface.
  • the compensation mirror S1 is formed as a whole, and the reference plane S2 and the aspherical compensation mirror S1 need not be separately adjusted when the optical path is adjusted, thereby saving the detection time, and the reference plane S2 may be one of the surfaces of the aspherical compensation mirror S1. This saves costs.
  • the aspherical compensation mirror S1 has an etalon interface that matches the interferometer, and the aspherical compensation mirror S1 is connected to the interferometer through the etalon interface; In this way, the aspherical compensation mirror with a reference surface The S1 can be mounted directly on the interferometer without the need to provide separate mounting equipment.
  • the plane wave emitted by the interferometer is converted into an aspheric wave matching the aspheric surface S3 to be tested after passing through the aspherical compensation mirror S1, so that all the rays entering the aspheric surface to be tested are along
  • the normal incidence of the aspheric surface to be tested is returned along the original optical path after the aspherical surface to be measured, and the formed light to be measured interferes with the reference light to form an interference fringe, and the interferometer detects the Interference fringes enable zero detection of aspheric surfaces.
  • the structure and parameters of the aspherical compensation mirror S1 are determined by the aspherical surface to be tested, and specifically need to be designed according to the structure of the aspherical surface to be tested, which needs to include a reference surface, and can pass through the aspherical compensation mirror.
  • the light emitted by S1 is incident on the aspheric surface to be tested along a normal line on the aspheric surface to be tested.
  • the aspherical compensation mirror S1 includes a reference surface and a plurality of compensation surfaces, and the reference surface and the plurality of compensation surfaces are planar or spherical.
  • a part of the light wave emitted by the interferometer is incident on the reference surface along the normal line of the reference surface, and then returns to the original path to form reflected light;
  • the plane wave emitted by the interferometer transmits the reference surface and the
  • the light rays after the plurality of compensation surfaces form an aspherical wave, and the light rays in the aspherical wave are incident on the aspheric surface to be tested along a normal line of the aspherical surface to be tested, and the aspherical surface reflection is performed
  • the rear original path returns to form a light to be measured and interferes with the reference light.
  • the aspherical compensation mirror S1 includes a planar lens and a concave lens, wherein the second mirror surface (ie, the light exit surface) of the planar lens serves as a reference surface (in other implementations)
  • the first mirror surface of the planar lens can serve as a reference surface), and a portion of the light incident perpendicularly to the second mirror surface is returned to form a reference light; and light passing through the planar lens enters the concave lens;
  • the two spherical surfaces of the concave lens serve as compensation surfaces such that light passing through the planar lens forms an aspherical wave and is incident on the aspheric surface to be tested along a normal line of the aspheric surface S3 to be measured.
  • Fig. 3 is a view showing the configuration of the aspherical compensating mirror in the above embodiment.
  • the aspherical compensation mirror includes a first portion P1 and a second portion P2, wherein the first portion is the The etalon interface of the aspherical compensating mirror can be directly mounted on the interferometer; the second portion P2 is a mirror group portion including a planar lens and a concave lens; and P3 is directed to the aspherical compensated reference surface.
  • the aspherical compensation mirror S1 includes three lenses, along the direction of the optical path, the front and rear mirrors of the first and second lenses, and the second of the third lens.
  • the mirror surface ie, the light exit surface
  • the mirror surface is a compensation surface, wherein the first surface of the third lens (ie, the light incident surface) serves as the reference surface S2, and the plane wave emitted by the interferometer passes through the first lens and the second lens and is incident on the third surface.
  • the reference surface of the lens the light is incident along the normal of the reference surface, and is reflected by the reference surface to form reference light; and the light passing through the third lens passes through the compensation mirror to form an aspheric wave, and along the normal of the aspheric surface to be tested After incident, after the aspherical reflection to be measured, the original path returns to form a light to be measured.
  • Fig. 5 is a view showing the configuration of the aspherical compensating mirror in the above embodiment.
  • the aspherical compensation mirror includes a first portion P1 and a second portion P2, wherein the first portion is an etalon interface of the aspherical compensation mirror, and can be directly mounted on the interferometer;
  • P2 is a mirror portion including three lenses;
  • P3 points to the aspherically compensated reference plane.
  • the interferometer of the present invention may be an interferometer of ZYGO Corporation.
  • the present invention also provides an aspheric optical detection method, which includes:
  • Step 201 The interferometer emits a plane wave
  • Step 202 A plane wave emitted by the interferometer is incident on an aspherical compensation mirror, the aspherical compensation mirror includes a reference surface and at least one compensation surface; and a portion of the plane wave incident along a normal to the reference plane is After the reference surface is reflected, the original path returns to form reference light; and the light passing through the reference surface and the at least one compensation surface is converted into an aspheric wave matching the aspheric surface to be tested, so that the aspheric wave is All the light rays are incident along a normal line of the aspheric surface to be measured, and are reflected by the aspheric surface to be tested to form a light to be measured;
  • Step 203 The interferometer detects interference fringes formed after the reference light and the light to be measured interfere to realize zero position detection of the aspheric surface to be tested.
  • Table 1 is an aspherical equation parameter in Example 1.
  • the aspherical compensation mirror can be obtained by the optical design software optimization using the design method of the present invention. The result is shown in FIG. 2, and FIG. 2 is an aspherical compensation mirror provided by the present invention. Schematic diagram of the optical design results of Example 1 of the design method design.
  • Fig. 2 For the aspherical equation parameters shown in Table 1, the optical design results of the design method using the aspherical compensation mirror provided by the present invention are shown in Fig. 2.
  • S1 is an aspherical compensation mirror
  • S2 is a reference plane
  • S3 is the aspherical surface to be tested.
  • the reference surface is placed inside the aspherical compensation mirror S1
  • the aspherical compensation mirror S1 is directly mounted on the etalon interface of the interferometer through the etalon interface. The position realizes convenient and quick detection of the aspherical surface S3 to be tested.
  • Table 2 is the specific parameters of the aspherical compensating mirror designed in Embodiment 1, the parameter K is a quadratic constant, and the aspherical equation is as shown in the formula (1), wherein the surface number is from near the light incident.
  • the directions are from 1 to 4, i.e., the first and second mirrors of the planar lens are numbered 1 and 2, and the first and second mirrors of the lens are numbered 3 and 4.
  • FIG. 3 is a schematic diagram showing the assembly result of Embodiment 1 of the design method of the aspherical compensation mirror provided by the present invention.
  • P1 is the etalon interface of the aspherical compensation mirror
  • P2 is the mirror set in the aspherical compensation mirror
  • P3 points to the reference plane.
  • z is the aspherical vector height and ⁇ is the radial coordinate of the aspherical surface.
  • Table 3 is the aspherical equation parameter in Embodiment 2.
  • the aspherical compensation mirror can be obtained by optical design software optimization. The result is shown in FIG. 4, and FIG. 4 is an aspherical compensation mirror provided by the present invention.
  • a schematic diagram of the optical design result of the second embodiment of the design method design is the same as that of the first embodiment.
  • Fig. 4 For the aspherical equation parameters shown in Table 3, the optical design results of the design method using the aspherical compensation mirror provided by the present invention are shown in Fig. 4.
  • S1 is an aspherical compensation mirror
  • S2 is an interferometer.
  • the reference surface, S3 is the aspheric surface to be tested
  • the interferometer reference surface S2 is first set inside the aspherical compensation mirror S1
  • the aspherical compensation mirror S1 is directly installed on the etalon interface position of the interferometer through the etalon interface, thereby realizing treatment It is convenient and quick to test the aspherical surface S3.
  • Table 4 is the specific parameters of the aspherical compensation mirror designed in Embodiment 2, where K is a quadratic constant, A4 is a 4th term coefficient, A6 is a 6th term coefficient, and A8 is a 8th term.
  • the coefficient, aspherical equation is shown in equation (2).
  • Fig. 5 is a schematic view showing the assembly result of the embodiment 2 designed by the design method of the aspherical compensation mirror provided by the present invention.
  • P1 is the etalon interface of the aspherical compensation mirror
  • P2 is the mirror of the aspherical compensation mirror
  • P3 points to the reference plane.
  • z is the aspherical vector height and ⁇ is the radial coordinate of the aspherical surface.
  • the design method of the aspherical compensating mirror provided by the invention provides that the reference surface is disposed inside the aspherical compensating mirror, and the aspherical compensating mirror can be directly mounted on the interferometer through the etalon interface, without converting the spherical wave emitted by the interferometer
  • the aspherical wave matching the aspherical surface to be tested simplifies the aspherical detection optical path structure, and realizes convenient and quick detection of the aspherical surface.

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
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Abstract

一种非球面补偿镜(S1)、非球面光学检测***及方法。非球面光学检测***包括：非球面补偿镜(S1)，其包括参考面(S2)以及至少一个补偿面；参考面(S2)用于将沿着参考面(S2)法线入射的光线反射后原路返回，形成参考光；而透过参考面(S2)以及至少一个补偿面的光线形成与待测非球面(S3)相匹配的非球面波，非球面波中的光线沿非球面法线入射，并经待测非球面(S3)反射后沿原光路返回，形成待测光；干涉仪，用于产生平面波，并出射至非球面补偿镜(S1)，同时检测参考光和待测光形成的干涉条纹，以对待测非球面(S3)进行检测。通过将参考面(S2)设置于非球面补偿镜(S1)的内部简化了非球面的检测光路结构。

Description

一种非球面补偿镜、非球面光学检测***及方法 技术领域
本发明属于光学设计技术领域，尤其涉及一种非球面补偿镜、非球面光学检测***及方法。
背景技术
已有技术中对高精度非球面进行检测时，往往需要利用补偿镜或计算全息图将干涉仪发出的球面波转化为与待测非球面相匹配的非球面波，从而实现零位检测。在这种情况下，往往需要将补偿镜或者计算全息图***检测光路中，造成光路结构比较复杂，使用调节非常不便。
基于此，有必要提供一种非球面光学检测方法和***，实现对非球面方便、快捷的检测。
发明内容
为实现上述目的，本发明提供了一种非球面补偿镜、非球面光学检测***及方法。
根据本发明第一方面，提供了一种非球面光学检测***，包括：
非球面补偿镜，其包括参考面以及至少一个补偿面；所述参考面用于将沿着所述参考面法线入射的光线反射后原路返回，形成参考光；而透过所述参考面以及所述至少一个补偿面的光线形成与待测非球面相匹配的非球面波，所述非球面波中的光线沿非球面法线入射，并经所述待测非球面反射后沿原光路返回，形成待测光；
干涉仪，用于产生平面波，并出射至非球面补偿镜，同时检测所述参考光和所述待测光形成的干涉条纹，以对所述待测非球面进行检测。
其中，所述非球面补偿镜还包括与所述干涉仪相匹配的标准具接口，用于安装在所述干涉仪的对应接口上。
其中，所述非球面补偿镜包括多个透镜，所述透镜的其中一个镜面作为参考面，其余镜面为补偿面。
其中，所述参考面和补偿面为平面或者球面。
其中，所述非球面补偿镜包括一个平面透镜和一个凹透镜；所述平面透镜和凹透镜沿光路依次设置，且所述平面透镜的第二平面为参考面，所述平面透镜的第一镜面和凹透镜的两个镜面为补偿面。
其中，所述非球面补偿镜包括第一透镜、第二透镜和第三透镜，第一透镜、第二透镜和第三透镜沿着光路的方向依次设置，第一透镜和第二透镜的前后镜面、以及第三透镜的第二镜面为补偿面，第三透镜的第一镜面为参考面。7、如权利要求1所述的***，其中，所述非球面补偿镜通过标准具接口安装在所述干涉仪上。
根据本发明第二方面，提供了一种非球面补偿镜，所述非球面补偿镜用于非球面光学检测***中，包括：
参考面以及至少一个补偿面；所述参考面用于将沿着所述参考面法线入射的光线反射后原路返回，形成参考光；而透过所述参考面以及所述至少一个补偿面的光线形成与待测非球面相匹配的非球面波，所述非球面波中的光线沿非球面法线入射，并经所述待测非球面反射后沿原光路返回，形成待测光。
其中，所述非球面补偿镜还包括与干涉仪相匹配的标准具接口，用于安装在所述干涉仪的对应接口上。
其中，所述非球面补偿镜包括多个透镜，所述透镜的其中一个镜面作为参考面，其余镜面为补偿面。
其中，所述参考面和补偿面为平面或者球面。
其中，所述非球面补偿镜包括一个平面透镜和一个凹透镜；所述平面透镜和凹透镜沿光路依次设置，且所述平面透镜的第二镜面为参考面，所述平面透镜的第一镜面和凹透镜的两个镜面为补偿面。
其中，所述非球面补偿镜包括第一透镜、第二透镜和第三透镜， 第一透镜、第二透镜和第三透镜沿着光路的方向依次设置，第一透镜和第二透镜的前后镜面、以及第三透镜的第二镜面为补偿面，第三透镜的第一镜面为参考面。
其中，所述非球面补偿镜通过标准具接口安装在所述干涉仪上。
根据本发明第三方面，提供了一种非球面光学检测方法，其包括：
步骤201：干涉仪发出平面波；
步骤202：所述干涉仪发出的平面波入射至非球面补偿镜，所述非球面补偿镜包括参考面和至少一个补偿面；沿所述参考面法线入射的部分光被所述参考面反射后原路返回，形成参考光；透过所述参考面和至少一个补偿面的光形成与待测非球面相匹配的非球面波；所述非球面波中的光线沿非球面法线入射，并经所述待测非球面反射后沿原光路返回，形成待测光；
步骤203：所述干涉仪检测所述参考光和待测光发生干涉后形成的干涉条纹，以实现对待测非球面的零位检测。
本发明采用上述技术方案取得的技术效果为：通过将参考面设置于非球面补偿镜的内部，且非球面补偿镜可以通过标准具接口直接安装在干涉仪上，不用将干涉仪发出的球面波转化为与待测非球面相匹配的非球面波，从而简化了非球面的检测光路结构，实现了对非球面方便、快捷的检测。
附图说明
图1是本发明一实施例中非球面光学检测***的框图；
图2是本发明一实施例中提供的非球面光学检测***中实施例1的光学设计结果示意图；
图3是本发明一实施例中提供的非球面光学检测***中实施例1的装配结果示意图；
图4是本发明一实施例中提供的非球面光学检测***中实施例2的光学设计结果示意图；
图5是本发明一实施例中提供的非球面光学检测***中实施例2的装配结果示意图；
图6是本发明非球面光学检测方法的流程图。
具体实施方式
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及具体实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅用以解释本发明，而不构成对本发明的限制。
如图1所示，本发明提出了一种非球面光学检测***，其包括：
非球面补偿镜S1，其包括参考面S2以及至少一个补偿面；所述参考面用于将沿着所述参考面法线入射的光线反射后原路返回，形成参考光；而透过所述参考面以及所述至少一个补偿面的光线形成与待测非球面相匹配的非球面波，所述非球面波中的光线沿非球面法线入射，并经所述待测非球面反射后沿原光路返回，形成待测光；
干涉仪，用于产生平面波，并出射至非球面补偿镜S1，并且检测所述参考光和所述待测光形成的干涉条纹，以对所述待测非球面进行检测。
其中，所述与待测非球面相匹配的非球面波是指所述非球面波中入射至所述待测非球面的所有光线均沿待测非球面的法线入射。
传统的非球面光学检测***中，参考面以独立的标准镜形式安装在干涉仪上，而本发明中将所述参考面S2设置于所述非球面补偿镜S1的内部，与所述非球面补偿镜S1形成为一个整体，在调整光路时无需单独对参考面S2和非球面补偿镜S1分别进行调整，节省了检测时间，且所述参考面S2可以是非球面补偿镜S1的其中一个面，进而节省了成本。
在一可能的实施例中，所述非球面补偿镜S1具有与所述干涉仪相匹配的标准具接口，且所述非球面补偿镜S1通过所述标准具接口与所述干涉仪连接；通过这种方式，具有参考面的所述非球面补偿镜 S1可以直接安装在干涉仪上，而无需单独提供安装设备。
本实施例中，所述干涉仪发出的平面波，经过所述非球面补偿镜S1之后，转换为与待测非球面S3相匹配的非球面波，使进入所述待测非球面的所有光线沿所述待测非球面的法线入射，经所述待测非球面反射后沿原光路返回，所形成的待测光与所述参考光发生干涉形成干涉条纹，所述干涉仪通过检测所述干涉条纹实现对非球面的零位检测。
本实施例中，非球面补偿镜S1的结构、参数是由待测非球面决定，具体需要根据待测非球面的结构进行设计，其需要包括参考面，且能够使得经过所述非球面补偿镜S1出射的光线沿着所述待测非球面上的法线入射至所述待测非球面上。
在一实施例中，所述非球面补偿镜S1包括一个参考面和多个补偿面，所述参考面和所述多个补偿面为平面或者球面。所述干涉仪发出的平面波中部分光线沿着所述参考面的法线入射至所述参考面后原路返回，形成反射光；所述干涉仪发出的平面波中透过所述参考面以及所述多个补偿面后的光线形成非球面波，所述非球面波中的光线沿着所述待测非球面的法线入射至所述待测非球面上，经所述待测非球面反射后原路返回形成待测光，并与所述参考光发生干涉。
在一实施例中，如图2所示，所述非球面补偿镜S1包括一平面透镜和一凹透镜，其中，所述平面透镜的第二镜面(即光出射面)作为参考面(在其他实施例中，所述平面透镜的第一镜面可作为参考面)，将垂直入射至所述第二镜面的一部分光线原路返回后形成参考光；透过所述平面透镜的光线进入所述凹透镜；所述凹透镜的两个球面作为补偿面，使得透过所述平面透镜的光线形成非球面波，并沿着待测非球面S3的法线入射至所述待测非球面。
图3示出了上述实施例中非球面补偿镜的结构图。如图3所示，非球面补偿镜包括第一部分P1和第二部分P2，其中第一部分为所述 非球面补偿镜的标准具接口，可以直接安装在所述干涉仪上；第二部分P2为镜组部分，包括平面透镜和凹透镜；P3指向所述非球面补偿的参考面。
在另一实施例中，如图4所示，所述非球面补偿镜S1包括三个透镜，沿着光路的方向，第一透镜和第二透镜的前后镜面、以及第三透镜的第二个镜面(即光出射面)为补偿面，其中第三个透镜的第一个面(即光入射面)作为参考面S2，干涉仪发出的平面波经过第一透镜、第二透镜后入射至第三透镜的参考面，光线沿参考面的法线入射，经参考面反射后形成参考光；而透过第三透镜的光线通过补偿镜之后，形成非球面波，并且沿待测非球面的法线入射，经过所述待测非球面反射后原路返回，形成待测光。
图5示出了上述实施例中非球面补偿镜的结构图。如图5所示，所述非球面补偿镜包括第一部分P1和第二部分P2，其中第一部分为所述非球面补偿镜的标准具接口，可以直接安装在所述干涉仪上；第二部分P2为镜组部分，包括三个透镜；P3指向所述非球面补偿的参考面。
本发明所述干涉仪可以是ZYGO公司的干涉仪。
如图6所示，本发明还提出了一种非球面光学检测方法，其包括：
步骤201：干涉仪发出平面波；
步骤202：所述干涉仪发出的平面波入射至非球面补偿镜，所述非球面补偿镜包括参考面和至少一个补偿面；所述平面波中沿所述参考面法线入射的部分光被所述参考面反射后原路返回，形成参考光；而透过所述参考面和所述至少一个补偿面的光线被转换为与待测非球面相匹配的非球面波，使得所述非球面波中的所有光线沿所述待测非球面的法线入射，经所述待测非球面反射后形成待测光；
步骤203：所述干涉仪检测所述参考光和待测光发生干涉后形成的干涉条纹，以实现对待测非球面的零位检测。
下面通过具体的实施例来解释一下本发明提供的非球面补偿镜的设计方法、装配方法的实施过程。
实施例1：
参照表1所述，表1为实施例1中非球面的方程参数。针对表1所示的非球面方程，采用本发明所述的设计方法，利用光学设计软件优化可以获得非球面补偿镜，结果如图2所示，图2是采用本发明提供的非球面补偿镜的设计方法设计的实施例1的光学设计结果示意图。
针对表1所示的非球面方程参数，采用本发明提供的非球面补偿镜的设计方法设计的光学设计结果见图2所述，在图2中，S1为非球面补偿镜，S2为参考面，S3为待测非球面，在设计非球面补偿镜S1的时，将参考面设置于非球面补偿镜S1内部，再将非球面补偿镜S1通过标准具接口直接安装于干涉仪的标准具接口位置，实现对待测非球面S3的方便、快捷检测。
参照表2所示，表2为实施例1中设计的非球面补偿镜的具体参数，参数K为二次曲面常数，非球面方程如公式(1)所示，其中，表面编号从靠近光入射方向从1到4，即平面透镜的第一镜面和第二镜面的编号为1和2，透镜的第一镜面和第二镜面的编号为3和4。参照图3，图3是采用本发明提供的非球面补偿镜的设计方法设计的实施例1的装配结果示意图。在图3中，P1是非球面补偿镜的标准具接口，P2是非球面补偿镜中的镜组，P3指向参考面。
表1 实施例1中非球面的方程参数
通光口径(mm) 曲面半径R(mm) K
65 -100.584 1.329873
Figure PCTCN2016103514-appb-000001
其中，z是非球面矢高，ρ是非球面的径向坐标。
表2 实施例1中非球面补偿镜的光学参数
Figure PCTCN2016103514-appb-000002
实施例2：
参照表3所述，表3为实施例2中的非球面方程参数。针对表3所示的非球面方程，采用专利所论述的设计方法，利用光学设计软件优化可以获得非球面补偿镜，结果如图4所示，图4是采用本发明提供的非球面补偿镜的设计方法设计的实施例2的光学设计结果示意图，编号方式同实施例1。
针对表3所示的非球面方程参数，采用本发明提供的非球面补偿镜的设计方法设计的光学设计结果见图4所述，在图4中，S1为非球面补偿镜，S2为干涉仪参考面，S3为待测非球面，先将干涉仪参考面S2设置于非球面补偿镜S1内部，再将非球面补偿镜S1通过标准具接口直接安装于干涉仪的标准具接口位置，实现对待测非球面S3的方便、快捷检测。
参照表4所示，表4为实施例2中设计的非球面补偿镜的具体参数，其中K为二次曲面常数，A4为4次项系数，A6为6次项系数，A8为8次项系数，非球面方程如公式(2)所示。参照图5所示，图5是采用本发明提供的非球面补偿镜的设计方法设计的实施例2的装配结果示意图。在图5中，P1是非球面补偿镜的标准具接口，P2是非球面补偿镜的镜组，P3指向参考面。
表3 实施例2中非球面的方程参数
通光口径mm) 曲率半径R(mm) K A4 A6 A8
72.5 -142.586 1.855450 5.6477E-8 6.107E-12 6.6230E-18
Figure PCTCN2016103514-appb-000003
其中，z是非球面矢高，ρ是非球面的径向坐标。
表4 实施例2中非球面补偿镜的光学参数
Figure PCTCN2016103514-appb-000004
本发明提供的非球面补偿镜的设计方法通过将参考面设置于非球面补偿镜的内部，且非球面补偿镜可以通过标准具接口直接安装在干涉仪上，不用将干涉仪发出的球面波转化为与待测非球面相匹配的非球面波，从而简化了非球面的检测光路结构，实现了对非球面方便、快捷的检测。
以上仅为本发明的优选实施例，并非因此限制本发明的专利范围，凡是利用本发明说明书及附图内容所作的等效结构或等效功能变换，或直接或间接运用在其他相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (15)

  1. 一种非球面光学检测***，包括：
    非球面补偿镜，其包括参考面以及至少一个补偿面，其中：
    所述参考面用于将沿着所述参考面法线入射的光线反射后原路返回，形成参考光；以及
    透过所述参考面以及所述至少一个补偿面的光线形成与待测非球面相匹配的非球面波，所述非球面波中的光线沿非球面法线入射，并经所述待测非球面反射后沿原光路返回，形成待测光；以及
    干涉仪，用于产生平面波，并出射至非球面补偿镜，同时检测所述参考光和所述待测光形成的干涉条纹，以对所述待测非球面进行检测。
  2. 如权利要求1所述的***，其中，所述非球面补偿镜还包括与所述干涉仪相匹配的标准具接口，用于安装在所述干涉仪的对应接口上。
  3. 如权利要求1所述的***，其中，所述非球面补偿镜包括多个透镜，所述透镜的其中一个镜面作为参考面，其余镜面为补偿面。
  4. 如权利要求1所述的***，其中，所述参考面和补偿面为平面或者球面。
  5. 如权利要求1所述的***，其中：
    所述非球面补偿镜包括一个平面透镜和一个凹透镜；以及
    所述平面透镜和凹透镜沿光路依次设置，且所述平面透镜沿光路方向的第二镜面为参考面，所述平面透镜沿光路方向的第一镜面和凹透镜的两个镜面为补偿面。
  6. 如权利要求1所述的***，其中：
    所述非球面补偿镜包括第一透镜、第二透镜和第三透镜；
    第一透镜、第二透镜和第三透镜沿着光路的方向依次设置；以及
    第一透镜和第二透镜的前后镜面、以及第三透镜的第二镜面为补偿面，第三透镜的第一镜面为参考面。
  7. 如权利要求1所述的***，其中，所述非球面补偿镜通过标准具接口安装在所述干涉仪上。
  8. 一种非球面补偿镜，其中，所述非球面补偿镜用于非球面光学检测***中，包括
    参考面以及至少一个补偿面，其中：
    所述参考面用于将沿着所述参考面法线入射的光线反射后原路返回，形成参考光；以及
    透过所述参考面以及所述至少一个补偿面的光线形成与待测非球面相匹配的非球面波，所述非球面波中的光线沿非球面法线入射，并经所述待测非球面反射后沿原光路返回，形成待测光。
  9. 如权利要求8所述的非球面补偿镜，其中，所述非球面补偿镜还包括与干涉仪相匹配的标准具接口，用于安装在所述干涉仪的对应接口上。
  10. 如权利要求8所述的非球面补偿镜，其中，所述非球面补偿镜包括多个透镜，所述透镜的其中一个镜面作为参考面，其余镜面为补偿面。
  11. 如权利要求8所述的非球面补偿镜，其中，所述参考面和补偿面为平面或者球面。
  12. 如权利要求8所述的非球面补偿镜，其中：
    所述非球面补偿镜包括一个平面透镜和一个凹透镜；以及
    所述平面透镜和凹透镜沿光路依次设置，且所述平面透镜的第二镜面为参考面，所述平面透镜的第一镜面和凹透镜的两个镜面为补偿面。
  13. 如权利要求8所述的非球面补偿镜，其中：
    所述非球面补偿镜包括第一透镜、第二透镜和第三透镜；
    第一透镜、第二透镜和第三透镜沿着光路的方向依次设置；以及
    第一透镜和第二透镜的前后镜面、以及第三透镜的第二镜面为补偿面，第三透镜的第一镜面为参考面。
  14. 如权利要求8所述的非球面补偿镜，其中，所述非球面补偿镜通过标准具接口安装在所述干涉仪上。
  15. 一种非球面光学检测方法，其包括：
    步骤201：干涉仪发出平面波；
    步骤202：所述干涉仪发出的平面波入射至非球面补偿镜，所述非球面补偿镜包括参考面和至少一个补偿面；沿所述参考面法线入射的部分光被所述参考面反射后原路返回，形成参考光；透过所述参考面和至少一个补偿面的光形成与待测非球面相匹配的非球面波；所述非球面波中的光线沿非球面法线入射，并经所述待测非球面反射后沿原光路返回，形成待测光；
    步骤203：所述干涉仪检测所述参考光和待测光发生干涉后形成的干涉条纹，以实现对待测非球面的零位检测。
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CN105444693A (zh) * 2015-11-25 2016-03-30 中国科学院长春光学精密机械与物理研究所 一种浅度非球面的面形误差测量方法
CN105627946A (zh) * 2015-12-21 2016-06-01 中国科学院长春光学精密机械与物理研究所 非球面空间位置的快速调整装置及调整方法

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CN111190286B (zh) * 2020-02-28 2023-07-04 中国科学院上海技术物理研究所 前后零位补偿结合检验凹非球面镜的光学***及设计方法
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