WO2018032656A1 - 器件高速取放装置 - Google Patents

器件高速取放装置 Download PDF

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Publication number
WO2018032656A1
WO2018032656A1 PCT/CN2016/108473 CN2016108473W WO2018032656A1 WO 2018032656 A1 WO2018032656 A1 WO 2018032656A1 CN 2016108473 W CN2016108473 W CN 2016108473W WO 2018032656 A1 WO2018032656 A1 WO 2018032656A1
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WO
WIPO (PCT)
Prior art keywords
pick
place
assembly
stage
point
Prior art date
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PCT/CN2016/108473
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English (en)
French (fr)
Inventor
肖智轶
Original Assignee
华天科技（昆山）电子有限公司
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Publication of WO2018032656A1 publication Critical patent/WO2018032656A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/914—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems incorporating rotary and rectilinear movements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/915—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rotary movements only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/917—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers control arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/918—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with at least two picking-up heads
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

Definitions

  • the invention relates to a device pick-and-place device, in particular to a device high-speed pick-and-place device for improving the pick-and-place speed and accuracy of the device.
  • the pick and place device is a product handling device that picks up a product from one location and places the product in another location.
  • a pick-and-place device such as a mechanical arm in a pick and place (called a picker) is used to place a wafer (die, or chip) into a material. Disk (tray disk) or another wafer carrier.
  • the main process of the robot arm pick-and-place is that the robot arm takes out a device at a predetermined position, then swings the arm to the tray or wafer position, lowers the device, and then swings the arm back to the predetermined position, thus repeating the action. .
  • the size is large, and the distance between the pick-and-place of the device causes the robot arm to be lengthened to complete a pick-and-place operation.
  • the pick-and-place of one device is mainly spent on the arm. During the swing back and forth, the efficiency is reduced, and the errors in picking and placing are also increased.
  • the present invention provides a high-speed pick-and-place device for a device, which utilizes a plurality of pick-and-place components uniformly disposed on the rotary transfer assembly to complete the high-speed pick-and-place of the device, thereby greatly improving the pick-and-place efficiency and Pick and place accuracy.
  • a high-speed pick-and-place device for a device comprising a rotary transfer assembly, a plurality of pick-and-place assemblies evenly spaced on the rotary transfer assembly, a first stage located in the pick-up area of the device, and the first stage being driven a first moving mechanism moving and positioned in a horizontal plane, a second stage located in the device placement area, and a second moving mechanism driving the second stage to move and position in a horizontal plane;
  • the rotary transfer assembly is periodically rotatable Transferting the pick-and-place assembly thereon to the device pick-up area and the device placement area; at least one of the rotary transfer assembly and the pick-and-place assembly can be moved up and down, so that the pick-and-place assembly reaches a preset on the first stage a pick-up point and a preset placement point on the second stage; a plurality of the pick-and-place assemblies are sequentially picked up at the pick-up point by the rotary transport assembly, and the devices are placed in sequence at the placement point; the first stage
  • the rotary conveying component is a conveyor belt conveyor or chain A strip conveying mechanism or a rotary conveyor or a rotary conveying mechanism.
  • the transmission distance of the rotary conveying assembly can be adjusted according to the distance between the pickup point and the placement point.
  • the rotary transport assembly includes a rotating body and a plurality of vertical brake assemblies uniformly disposed on the rotating body, and the vertical brake assembly drives the pick-and-place assembly to move up and down .
  • the vertical brake assembly simultaneously drives at least two pick and place assemblies to move up and down.
  • first stage and the second stage carry a wafer or a cartridge or a tape or carrier.
  • a central control system for controlling actuation of the rotary transfer assembly, the pick and place assembly, the first moving mechanism, and the second moving mechanism is further included.
  • a mechanical arm is further included, and the robot arm can pick up the device on the pick and place assembly and place it on a substrate.
  • the invention provides a high-speed pick-and-place device for a device, which decomposes the action of picking up and pulling a traditional mechanical arm, and is completed by different components.
  • the pick-and-place action is divided into two parts, and the pick-and-place assembly performs picking.
  • the action is performed by the rotary transfer component, and the pick and place component performs the placement action.
  • the device to be picked is placed on the first stage, and the picked up device is placed on the second stage.
  • the first stage and the second stage cooperate with precise movement to move the picking point and the placement point to the pick-and-place assembly.
  • the position of the drop Multiple settings on the rotary transfer unit Put the components, pick them up in turn, and place them in order after reaching the placement point.
  • the rotary transport assembly can employ a conveyor belt transport mechanism that rotates in a vertical plane, a conveyor belt transport mechanism that rotates in a horizontal plane, or a turntable transport mechanism that rotates in a horizontal plane.
  • the devices can be successively picked up at the pick-up point, the device is placed in the transfer point to sequentially place the device, and the first stage and the second stage are controlled to move horizontally, and the device to be picked up and to be placed can be placed.
  • the position of the device is moved to the picking point and the placing point, respectively, so that the picking and placing operations are almost synchronized. Therefore, the present invention can significantly shorten the picking and placing period and greatly improve the picking and placing efficiency.
  • the conveyor belt of the conveyor belt conveying mechanism can realize continuous transportation at a long distance, fully satisfying the distance between the pick-and-place of the device, solving the lengthening of the robot arm, and completing a pick-and-place operation.
  • the time is mainly spent in the process of swinging the arm back and forth, and the efficiency is lowered.
  • the problem is that the movement of the pick-and-place assembly only moves up and down, the stage is moved in the horizontal direction, the movement is simple, the overall running speed and the pick-and-place precision are improved, the mechanical arm movement is complicated, and the pick-and-place speed is large.
  • the transmission distance of the conveyor belt conveying mechanism can be adjusted according to the distance between the picking point and the placement point, and the application is more flexible, and the pick-and-place efficiency and the pick-and-place precision are further improved.
  • 1a is a schematic view showing a rotating operation of a high-speed pick-and-place device of a device in a vertical plane according to an embodiment of the present invention
  • 1b is a schematic view showing the operation of the side of the conveyor belt in which the pick-and-place assembly of the high-speed pick-and-place device of the device is vertically hung in a vertical plane according to the embodiment of the present invention
  • 1c is a schematic view of a vertical brake assembly simultaneously driving a plurality of pick-and-place assemblies according to an embodiment of the present invention
  • FIG. 2 is a schematic view showing the operation of the high-speed pick and place device of the device according to the second embodiment of the present invention
  • FIG. 3 is a schematic diagram showing the relative state of each pick-and-place assembly in the operation of the high-speed pick-and-place device of the device according to the second embodiment of the present invention
  • FIG. 4 is a schematic view showing the operation of a flip chip of a high-speed pick-and-place device of a device according to Embodiment 2 of the present invention
  • FIG. 5 is a schematic view showing the operation of a high-speed pick-and-place device for a device according to a third embodiment of the present invention
  • 1-rotary conveyor assembly 11-belt, 12-vertical brake assembly, 13-turntable, 14-drive mechanism, 2-push-and-drop assembly, 3-first stage, 31-pick point, 4-first moving mechanism , 5 - second stage, 51 - placement point, 6 - second moving mechanism, 7 - device, 8 - mechanical arm, 81 - pick and place, 9 - substrate.
  • a side view of a high-speed pick-and-place device of the present invention includes a rotary transfer assembly 1 and a plurality of pick-and-place assemblies 2 evenly spaced on the rotary transfer assembly.
  • One of the picking areas a first stage 3, a first moving mechanism 4 that drives the first stage to move and position in a horizontal plane, a second stage 5 located in the device placement area, and a second stage that drives the second stage to move and position in a horizontal plane
  • the second moving mechanism 6 6.
  • a conveyor belt transport mechanism is used herein as a rotary conveyor assembly.
  • the conveyor conveying mechanism comprises a support frame, a conveyor belt 11 mounted on the support frame, and a power source (such as a drive motor) for driving the conveyor belt to periodically rotate on the support frame, and the drive motor can pass through the reducer and the transmission gear set (drive gear and passive)
  • the gears, etc., etc. realize the function of driving the belt to rotate periodically, which is a common technique of the conveyor belt conveying mechanism, and will not be described herein.
  • the transmission mode of the conveyor belt conveying mechanism is not limited to the transmission gear set, as long as it can drive the belt to rotate and stop.
  • the conveyor belt is arranged to rotate periodically in a vertical plane and above the pick-up area and the placement area, ie above the first stage and the second stage, a plurality of pick-and-place assemblies 2 are evenly arranged
  • the power source rotates and stops the conveyor belt in a vertical plane by the rotation of the drive transmission gear set, so that the conveying device 7 reaches above the pickup point 31 on the first stage and on the second stage. Place the point 51 above.
  • the downstream pick-up and placement device is required. This function can be used with at least one of the rotary transfer assembly and the pick-and-place assembly.
  • each pick-and-place assembly 2 can pass a vertical brake
  • the assembly 12 drives the pick and place assembly up and down through the vertical brake assembly to reach the target area (pick point or placement point) to pick up and place the device.
  • Vertical brake assembly Linear cylinders, linear electric cylinders, linear modules, etc. can be used.
  • a linear cylinder is used.
  • the cylinder body is fixedly connected with the transmission belt through the mounting seat.
  • the power output shaft of the cylinder is fixedly connected with the pick-and-place assembly through the adapter seat, and the telescopic movement of the cylinder can be Drive the pick and place assembly to move up and down.
  • a plurality of pick-and-place assemblies are sequentially driven by the rotary transport assembly to pick up the device 7 at the pick-up point, and the device 7 is placed in sequence at the placement point; as a preferred embodiment, the pick-and-place function of the pick-and-place assembly can be passed through the vacuum nozzle In other embodiments, the pick-and-place assembly can also be realized by an adsorption workpiece such as a suction cup, a suction pad, a magnet, or the like, and other components having a pick-and-place function, such as a clamping component such as a jaw or a chuck, or a glued component. Components, etc.
  • the first stage is driven by the first moving mechanism to move the device to be picked up on the first stage to a picking point
  • the second stage is driven by the second moving mechanism
  • the device at the placement point on the two stages is removed.
  • the first stage 3 of the pickup area carries the device 7 to be picked up
  • the second stage 5 carries the device to be placed
  • the first stage and the second stage cooperate with the pick-and-place assembly to smoothly take the device out
  • two The movement and positioning in the horizontal plane are realized by the first and second moving mechanisms, respectively.
  • the first and second moving mechanisms respectively adjust the position to be picked up and the position to be placed in the lowering position of the pick and place assembly (pick point/placement) Point), to achieve continuous pick and place of the device.
  • the first stage carries a diced wafer or cartridge
  • the second stage carries another wafer, or a substrate/carrier, or a cartridge, or a braid.
  • a diced wafer is placed on the first stage, and another carrier wafer is placed on the second stage, and the device is mounted on the wafer through the high-speed pick-and-place device. Reorganization.
  • the first and second moving mechanisms may be implemented by a two-axis linear module, such as an X-axis linear module and a Y-axis linear module, and the X-axis linear module realizes the movement of the picking point/placement point in the left and right direction, Y
  • the linear module realizes the movement of the picking point/placement point in the front and rear direction.
  • it is not limited to such a two-axis linear module, and can be implemented by other methods such as cylinder or electric cylinder pushing.
  • the working principle of the high-speed pick-and-place device of the device in this embodiment is as follows:
  • the belt of the belt conveying mechanism rotates to drive a plurality of vertical brake assemblies and a plurality of pick-and-place assemblies to rotate at the same time.
  • the rotary transfer assembly stops rotating, and the vertical brake assembly drives the corresponding take-up
  • the assembly falls vertically, picks up the device, and then rises, the rotary transfer assembly continues to rotate, and when the next pick and place assembly reaches the pick-up point, the rotary transfer assembly stops here, repeating the picking action.
  • the rotary transfer assembly stops rotating, the vertical brake assembly drives its corresponding pick-and-place assembly to fall vertically, places the device, and then rises, the rotary transfer assembly continues to rotate.
  • the rotary transfer assembly stops here, repeating the above-mentioned placement action.
  • the picking point and the placing point can be adjusted to make the picking and placing synchronous. While being picked up and placed, the first stage of the pickup area is horizontally moved by the driving of the first moving mechanism, the device to be picked up is sequentially moved to the pickup point, and the second stage of the placement area is driven by the second moving mechanism.
  • the devices can be successively picked up at the pickup point, and the devices are placed in the placement point, and the first stage and the second stage are placed.
  • the horizontal movement moves the position of the device to be picked up and the position of the device to be placed to the picking point and the placing point respectively, and the picking and placing actions are synchronized, which significantly shortens the picking and placing period and greatly improves the picking and placing efficiency.
  • the conveyor belt of the conveyor belt conveying mechanism can realize continuous transportation at a long distance, fully satisfying the distance between the pick-and-place of the device, solving the lengthening of the robot arm, and completing a pick-and-place operation, and the time is mainly spent in the process of swinging the arm back and forth.
  • the efficiency will be reduced; and the movement of the pick-and-place assembly is only moving up and down, the stage is moved in the horizontal direction, the movement is simple, the overall running speed and the pick-and-place precision are improved, and the mechanical arm movement is complicated, and the pick-and-place operation is solved.
  • the problem of speed has a greater impact.
  • the transmission distance of the conveyor belt conveying mechanism can be adjusted according to the distance between the picking point and the placement point, and the application is more flexible, and the pick-and-place efficiency and the pick-and-place precision are further improved.
  • the conveyor belt is configured to rotate in a vertical plane and the pick and place assembly remains vertically hung on one side of the conveyor belt, see Figure 1b.
  • the conveyor belt is configured to periodically rotate in a horizontal plane and above the pick-up zone and the placement zone, i.e., above the first stage and the second stage, and a plurality of pick-and-place assemblies are evenly disposed on the sides of the conveyor belt.
  • the up and down movement of the conveyor belt as a whole may also be controlled to specify that the pick and place assembly reaches the target area (pick point or placement point) to pick and place the device.
  • the conveyor belt may be replaced by a conveyor chain, that is, the rotary conveyor assembly adopts a chain conveyor mechanism, and the chain conveyor mechanism is prior art, and details are not described herein.
  • the rotary transfer assembly, the vertical brake assembly, the pick and place assembly, and the first and second moving mechanisms are controlled to operate or stop by a central control system.
  • Central control systems such as computer systems, embedded systems, etc., are not shown.
  • FIG. 2 is a side view of another embodiment of the high-speed pick-and-place device of the present invention, which differs from Embodiment 1 in that the conveying direction of the conveyor belt is clockwise, and the picking area is opposite to the placing area (FIG. 1a).
  • Figure 1b, Figure 2) The transport path of the device carried by the transmission mode is greater than the counterclockwise direction. Different transmission methods can be selected depending on whether other processes or test stops are required during the pick-and-place period of one device.
  • FIG. 3 it is a schematic diagram of the relative state of each pick-and-place assembly in the operation of the high-speed pick-and-place device of the device according to the second embodiment of the present invention.
  • This embodiment takes a vertical brake assembly corresponding to a pick-and-place assembly as an example.
  • a pick-and-place assembly moves to the top of the pick-up area to be picked up, and the conveyor stops; at time t2, the vertical brake assembly corresponding to the pick-and-place assembly moves the pick-and-place assembly down to the device and sucks the device; t3 takes a The vertical brake assembly corresponding to the assembly moves the pick-and-place assembly up to the initial height; the power source drives the conveyor belt to move clockwise, and at time t4, the pick-and-place assembly moves to the top of the pick-up area to be picked up, the conveyor stops, and the device is picked up.
  • a robot arm 8 can be attached, as shown in FIG.
  • the device in the pick-up area is a wafer-level package back-cut chip, that is, the chip solder ball is arranged face up in the pick-up area, and the pick-and-place assembly picks up the solder ball surface of the chip, which is transported by the conveyor belt, and an additional mechanical arm end is provided with a pick-and-place part.
  • the robot arm 8 draws a chip and directly places it on another substrate such as the PCB board 9, which can realize flip chip soldering of the chip to avoid chip flipping action.
  • FIG. 5 is a side view of still another embodiment of the high-speed pick-and-place device of the present invention, which differs from Embodiment 1 in that a rotary-type transport mechanism that rotates in a horizontal direction is used as a rotary transport assembly, and the rotary transport mechanism includes The turntable 13 and the drive mechanism 14 for driving the turntable are rotated, so that the plurality of pick-and-place assemblies 2 can be evenly disposed on the lower surface or the side of the turntable.
  • the drive mechanism drives the turntable to rotate and stop in a horizontal plane so that the transfer device reaches the pick-up point and the placement point.
  • each pick and place assembly can be moved up and down by a vertical brake assembly to pick up and place the device at the target area (pick point or placement point).
  • the up and down movement of the turntable as a whole can also be controlled to specify that the pick and place assembly reaches the target area (pick point or placement point) to pick and place the device.
  • the carousel conveying mechanism can be deformed into a rotating rod conveying mechanism, that is, including a rotating body and a plurality of rotating rods evenly arranged on the rotating body, and the vertical brake assembly and the pick-and-place assembly are mounted on the rotating rod .
  • the pick and place assembly is driven up and down by the vertical brake assembly.

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
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Abstract

一种器件高速取放装置，包括转动式传送组件（1）、若干取放组件（2）、位于器件拾取区的第一载台（3）、位于器件放置区的第二载台（5）、驱动第一、第二载台（3、5）在水平面内移动并定位的第一、第二移动机构（4、6）；转动式传送组件（1）可周期性转动传送其上的取放组件（2）到达器件拾取区和器件放置区；转动式传送组件（1）和取放组件（2）至少其一可上下移动，使取放组件（2）到达第一载台（3）上预设的拾取点（31）和第二载台上（5）预设的放置点（51），依次拾取器件（7）和放置器件（7）；第一、第二载台（3、5）在第一、第二移动机构（4、6）驱动下，可调节待拾取器件（7）和待放置位置位于取放组件（2）下降位置。所述器件高速取放装置利用在转动式传送组件（1）上均匀设置的多个取放组件（2），完成了器件（7）的连续性高速取放，大大提高了取放效率和取放精度。

Description

器件高速取放装置 技术领域
本发明涉及一种器件取放装置，尤其是涉及一种器件高速取放装置，以提高器件的取放速度和精度。
背景技术
取放装置是一种产品处理装置，可以从一位置拾取一产品，并且将该产品放置于另一位置。在半导体封装领域中，取放装置如PP机(pick and place，或称为挑晶机)中的机械手臂，用于将晶圆切割形成的器件(die，或称芯片chip)，放置到料盘(tray盘)或者另一晶圆载板上。如专利CN102983094A，机械手臂取放的主要流程为，机械手臂在预定位置取出一颗器件，然后，摆动手臂到达料盘或晶圆位置，放下器件，再摆动手臂回到预定位置，如此重复该动作。然而，对于8寸晶圆甚至是12寸晶圆，尺寸较大，器件取放之间的距离导致机械手臂必须加长，来完成一次取放动作，一颗器件的取放，时间主要耗费在手臂来回摆动过程中，效率会降低，拾取和摆放的误差也会加大。
为处理此项问题，提出了许多复杂的机制，例如美国专利US20080000756A1，设置多个机械手臂同时取放，由于机械手 臂只能沿固定轨道水平移动和垂直移动，故机械手臂需要能伸缩或翻越以实现相互之间的蔽障，该装置虽相对增加取放效率，但机械手臂动作复杂，还是会对取放速度有较大影响。
发明内容
为了解决上述技术问题，本发明提出一种器件高速取放装置，利用在转动式传送组件上均匀设置的多个取放组件，完成了器件的连续性高速取放，大大提高了取放效率和取放精度。
本发明的技术方案是这样实现的：
一种器件高速取放装置，包括转动式传送组件、均匀间隔设置于所述转动式传送组件上的若干取放组件、位于器件拾取区的一第一载台、驱动所述第一载台在水平面内移动并定位的第一移动机构、位于器件放置区的第二载台和驱动所述第二载台在水平面内移动并定位的第二移动机构；所述转动式传送组件可周期性转动传送其上的取放组件到达器件拾取区和器件放置区；所述转动式传送组件和所述取放组件至少其一可上下移动，使所述取放组件到达第一载台上预设的拾取点和第二载台上预设的放置点；若干所述取放组件在转动式传送组件的带动下，依次在拾取点拾取器件，在放置点依次放置器件；所述第一载台在所述第一移动机构驱动下，可将第一载台上待拾取器件移动至拾取点，所述第二载台在所述第二移动机构驱动下，可将第二载台上待放置器件位置移动至放置点。
进一步的，所述转动式传送组件为传送带式输送机构或链 条式输送机构或转盘式输送机构或转杆式输送机构。
进一步的，所述转动式传送组件的传输距离可根据拾取点与放置点间的距离进行调节。
进一步的，所述取放组件可上下移动时，所述转动式传送组件包括转动本体和若干均匀排布设于所述转动本体上的垂直制动器组件，由垂直制动器组件驱动所述取放组件上下移动。
进一步的，所述垂直制动器组件同时驱动至少两个取放组件上下移动。
进一步的，所述第一载台和所述第二载台上承载晶圆或料盒或编带或载板。
进一步的，还包括用于控制所述转动式传送组件、所述取放组件、所述第一移动机构、所述第二移动机构作动的中央控制***。
进一步的，还包括一机械手臂，所述机械手臂能够拾取所述取放组件上器件，并将其放置于一基板上。
本发明的有益效果是：本发明提供一种器件高速取放装置，将传统机械手臂来回拾取的动作分解，由不同组件配合完成，具体为：将取放动作分为，由取放组件执行拾取动作，由转动式传送组件执行传输动作，再由取放组件执行放置动作。同时待拾取的器件放置在第一载台上，将拾取后的器件放置在第二载台上，第一载台和第二载台配合精密移动，将拾取点和放置点移至取放组件下落位置。转动式传送组件上设置多个取 放组件，依次拾取，到达放置点后依次放置。转动式传送组件可采用在竖直平面内转动的传送带输送机构，也可采用在水平面内转动的传送带输送机构，还可以采用在水平面内转动的转盘式输送机构来实现。这样，随着转动式传送组件的转动，可在拾取点依次连续拾取器件，传送到达放置点依次放置器件，而控制第一载台和第二载台水平移动，可将待拾取器件和待放置器件位置分别移动到拾取点和放置点，使拾取和放置动作几乎同步，因此，本发明能够显著缩短拾取和放置周期，大幅提高取放效率。传送带输送机构的传送带可实现较远距离的连续输送，充分满足器件取放之间的距离需要，解决机械手臂加长，完成一次取放动作，时间主要耗费在手臂来回摆动过程中，效率会降低的问题；且取放组件的移动仅有上下移动，载台配合在水平方向移动，动作简单，提高了整体的运行速度和取放精度，解决了机械手臂动作复杂，会对取放速度有较大影响的问题。更佳的，传送带输送机构的传输距离可根据拾取点与放置点间的距离进行调节，应用更加灵活，更加提高了取放效率和取放精度。
附图说明
图1a为本发明实施例一器件高速取放装置垂直平面内转动工作示意图；
图1b为本发明实施例一器件高速取放装置取放组件竖直挂于垂直平面内转动的传送带侧边工作示意图；
图1c为本发明实施例一垂直制动器组件同时驱动多个取放组件示意图；
图2为本发明实施例二器件高速取放装置工作示意图；
图3为本发明实施例二器件高速取放装置操作中各取放组件相对状态示意图；
图4为本发明实施例二器件高速取放装置倒装芯片的工作示意图；
图5为本发明实施例三器件高速取放装置工作示意图；
结合附图，作如下说明：
1-转动式传送组件，11-传送带，12-垂直制动器组件，13-转盘，14-驱动机构，2-取放组件，3-第一载台，31-拾取点，4-第一移动机构，5-第二载台，51-放置点，6-第二移动机构，7-器件，8-机械手臂，81-取放件，9-基板。
具体实施方式
为使本发明能够更加易懂，下面结合附图对本发明的具体实施方式做详细的说明。为方便说明，实施例附图的结构中各组成部分未按正常比例缩放，故不代表实施例中各结构的实际相对大小。
实施例1
参见图1a，为本发明一器件高速取放装置的侧视图，该器件高速取放装置包括转动式传送组件1、均匀间隔设置于所述转动式传送组件上的若干取放组件2、位于器件拾取区的一 第一载台3、驱动所述第一载台在水平面内移动并定位的第一移动机构4、位于器件放置区的第二载台5和驱动所述第二载台在水平面内移动并定位的第二移动机构6。
作为一种优选实施例，这里使用传送带输送机构作为转动式传送组件。传送带输送机构包括支撑架、安装到支撑架上的传送带11和驱动该传送带在支撑架上周期性转动的动力源(比如驱动电机)，驱动电机可经减速器、传动齿轮组(主动齿轮和被动齿轮等)等实现驱动传送带周期性转动的功能，此为传送带输送机构常用技术，在此不再赘述。传送带输送机构的传动方式不以传动齿轮组为限，只要能够带动传送带转动及停止即可。作为一种优选实施例，传送带设置为在垂直平面内周期性转动，且位于拾取区和放置区的上方，即位于第一载台和第二载台的上方，若干取放组件2均匀设置在传送带表面，动力源通过驱动传动齿轮组的转停，实现传送带在竖直平面内的逆时针转动与停止，以便传送器件7达到第一载台上的拾取点31上方和第二载台上的放置点51的上方。取放组件到达第一载台的拾取点上方和第二载台上的放置点的上方后，需要下行拾取和放置器件，这一功能可采用转动式传送组件和取放组件至少其一可上下移动来实现，以使取放组件到达第一载台上的拾取点31位置和第二载台上的放置点51位置，作为一种优选实施方式，各取放组件2可以分别通过一个垂直制动器组件12，通过垂直制动器组件驱动取放组件上下移动，以便到达目标区域(拾取点或放置点)拾取和放置器件。垂直制动器组件 可采用直线气缸、直线电缸、线性模组等，比如采用直线气缸，气缸本体通过安装座与传动带固定连接，气缸的动力输出轴通过转接座与取放组件固定连接，气缸的伸缩动作可带动取放组件上下移动。
若干取放组件在转动式传送组件的带动下，可依次在拾取点拾取器件7，在放置点依次放置器件7；作为一种优选实施例，取放组件的拾取和放置功能可通过真空吸嘴实现，在其他实施例中，取放组件还可以通过吸盘、吸垫、磁铁等吸附式工件实现，还可以为其他有拾取和放置功能的组件，例如夹爪、夹头等夹持组件或黏取组件等。
所述第一载台在所述第一移动机构驱动下，可将第一载台上待拾取器件移动至拾取点，所述第二载台在所述第二移动机构驱动下，可将第二载台上放置点处的器件移开。这样，由拾取区的第一载台3承载待拾取的器件7，第二载台5承载待放置的器件，第一载台和第二载台配合取放组件顺利将器件取放完毕，两者分别通过第一、第二移动机构实现水平面内的移动和定位。这样，在上一取放组件拾取/放置和下一取放组件拾取/放置期间，第一、第二移动机构分别实时调节待拾取器件和待放置位置位于取放组件下降位置(拾取点/放置点)，实现器件的连续取放。例如，第一载台上承载的是划片后的晶圆或料盒，第二载台上承载的是另一片晶圆，或基板/载板，或料盒，或编带。如第一载台上放一划片后晶圆，第二载台上放置另一载板晶圆，通过器件高速取放装置可完成器件在晶圆上的 重组。
上述第一、第二移动机构可采用两轴线性模组实现，比如由X轴线性模组和Y轴线性模组组成，X轴线性模组实现拾取点/放置点在左右方向的移动，Y轴线性模组实现拾取点/放置点在前后方向的移动。但不限于这种两轴线性模组，也可采用其他比如气缸或电缸推动的方式实现。
综上，本实施例器件高速取放装置的工作原理如下：
传动带输送机构的传动带转动，带动其上的若干垂直制动器组件和若干取放组件同时转动，当第一个取放组件到达拾取点时，转动式传送组件停止转动，垂直制动器组件驱动其对应的取放组件垂直下落，拾取器件，而后上升，转动式传送组件继续转动，当下一个取放组件到达拾取点时，转动式传送组件在此停止，重复上述拾取动作。同样，当第一个已拾取器件的取放组件到达放置点时，转动式传送组件停止转动，垂直制动器组件驱动其对应的取放组件垂直下落，放置器件，而后上升，转动式传送组件继续转动，当下一个取放组件到达放置点时，转动式传送组件在此停止，重复上述放置动作。具体实施时，可对拾取点和放置点进行调整，使拾取和放置同步进行。在拾取和放置的同时，拾取区的第一载台在第一移动机构的驱动下水平移动，将待拾取器件依次移动至拾取点，放置区的第二载台在第二移动机构的驱动下水平移动，将待放器件位置移动至放置点。这样，随着传送带的转动，可在拾取点依次连续拾取器件，传送到达放置点依次放置器件，而第一载台和第二载台 水平移动，将待拾取器件和待放置器件位置分别移动到拾取点和放置点，拾取和放置动作同步，显著缩短了拾取和放置周期，大幅提高取放效率。这里，传送带输送机构的传送带可实现较远距离的连续输送，充分满足了器件取放之间的距离需要，解决了机械手臂加长，完成一次取放动作，时间主要耗费在手臂来回摆动过程中，效率会降低的问题；且取放组件的移动仅有上下移动，载台配合在水平方向移动，动作简单，提高了整体的运行速度和取放精度，解决了机械手臂动作复杂，会对取放速度有较大影响的问题。更佳的，传送带输送机构的传输距离可根据拾取点与放置点间的距离进行调节，应用更加灵活，更加提高了取放效率和取放精度。
其他实施例中，传送带设置为在竖直平面内转动，取放组件保持竖直挂于传送带的一侧边，参见图1b。
其他实施例中，传送带设置为在水平面内周期性转动，且位于拾取区和放置区的上方，即位于第一载台和第二载台的上方，若干取放组件均匀设置在传送带侧边。
其他实施例中，也可以控制传送带整体的上下移动，以便指定取放组件到达目标区域(拾取点或放置点)拾取和放置器件。
在其他实施例中，可以有至少两个取放组件同时下降拾取和/或放置多颗器件，以增加拾取和/或放置速度；也可以通过一个垂直制动器组件同时驱动至少两个取放组件上下移动，参见图1c，该垂直制动器组件下降时，同时拾取/放置多颗器件， 提高拾取和/或放置速度。
在其他实施例中，传送带可以替换为传送链条，即转动式传送组件采用链条式输送机构，链条式输送机构为现有技术，在此不再赘述。
上述转动式传送组件、垂直制动器组件、取放组件、第一、第二移动机构由一中央控制***控制其运转或停止。中央控制***如计算机***、嵌入式***等，图中未示出。
实施例2
参见图2，为本发明器件高速取放装置另一实施例的侧视图，其与实施例1不同之处在于，传送带传送方向为顺时针转动，在拾取区与放置区相对方向(如图1a、图1b、图2)不变情况下，该传送方式所载器件运输路程大于逆时针方向。可依据一颗器件的取放期间内，是否需要做其他工序或测试停留，而选择不同的传送方式。
如图3所示，为本发明实施例2器件高速取放装置操作中各取放组件相对状态示意图，该实施方式以一个垂直制动组件对应一个取放组件为例。t1时刻，a取放组件移动至拾取区待取器件上方，传送带停止；t2时刻a取放组件对应的垂直制动组件将取放组件下移至器件上，并吸住器件；t3时刻a取放组件对应的垂直制动组件将取放组件上移至初始高度；动力源带动传送带顺时针移动，t4时刻b取放组件移动至拾取区待取器件上方，传送带停止，同时拾取过器件的r取放组件移动至放 置区待放置位置上方，传送带停止；t5时刻b取放组件和r取放组件通过各自垂直制动组件下移，b取放组件拾取下一颗器件，r取放组件释放所载器件；t6时刻b取放组件和r取放组件通过各自垂直制动组件上升到初始高度，传送带通过驱动装置继续顺时针移动，重复t4至t6时段的动作。
本实施例中，可附加一机械手臂8，如图4所示。如拾取区内器件为晶圆级封装的背切芯片，即芯片焊球面朝上排列在拾取区，取放组件吸取芯片的焊球面，由传送带传输，附加的机械手臂末端设置一取放件81，比如吸嘴或吸盘，机械手臂8吸取一芯片，直接放置到另一基板如PCB板9，可实现芯片的倒装焊，避免芯片翻转动作。
实施例3
参见图5，为本发明器件高速取放装置的又一实施例的侧视图，与实施例1不同之处在于，使用水平方向转动的转盘式输送机构作为转动式传送组件，转盘式输送机构包括转盘13和驱动转盘旋转的驱动机构14，这样，若干取放组件2可均匀设置在转盘下表面或者侧边。驱动机构驱动转盘在水平面上的转动与停止，以便传送器件到达拾取点和放置点。同样，各取放组件可以分别通过一个垂直制动器组件实现上下移动，以便到达目标区域(拾取点或放置点)拾取和放置器件。
其他实施例中，也可以控制转盘整体的上下移动，以便指定取放组件到达目标区域(拾取点或放置点)拾取和放置器件。
其他实施例中，转盘式输送机构可变形为转杆式输送机构，即包括转动本体和若干均匀排布设于所述转动本体上的转杆，垂直制动器组件及取放组件安装到该转杆上。通过垂直制动器组件驱动取放组件上下移动。
以上实施例是参照附图，对本发明的优选实施例进行详细说明。本领域的技术人员通过对上述实施例进行各种形式上的修改或变更，但不背离本发明的实质的情况下，都落在本发明的保护范围之内。

Claims (8)

  1. 一种器件高速取放装置，其特征在于：包括转动式传送组件(1)、均匀间隔设置于所述转动式传送组件上的若干取放组件(2)、位于器件拾取区的一第一载台(3)、驱动所述第一载台在水平面内移动并定位的第一移动机构(4)、位于器件放置区的第二载台(5)和驱动所述第二载台在水平面内移动并定位的第二移动机构(6)；所述转动式传送组件可周期性转动传送其上的取放组件到达器件拾取区和器件放置区；所述转动式传送组件和所述取放组件至少其一可上下移动，使所述取放组件到达第一载台上预设的拾取点(31)和第二载台上预设的放置点(51)；若干所述取放组件在转动式传送组件的带动下，依次在拾取点拾取器件(7)，在放置点依次放置器件；所述第一载台在所述第一移动机构驱动下，可将第一载台上待拾取器件移动至拾取点，所述第二载台在所述第二移动机构驱动下，可将第二载台上待放置器件位置移动至放置点。
  2. 根据权利要求1所述的器件高速取放装置，其特征在于：所述转动式传送组件为传送带式输送机构或链条式输送机构或转盘式输送机构或转杆式输送机构。
  3. 根据权利要求1所述的器件高速取放装置，其特征在于：所述转动式传送组件的传输距离可根据拾取点与放置点间的距离进行调节。
  4. 根据权利要求1所述的器件高速取放装置，其特征在 于：所述取放组件可上下移动时，所述转动式传送组件包括转动本体和若干均匀排布设于所述转动本体上的垂直制动器组件(12)，由垂直制动器组件驱动所述取放组件上下移动。
  5. 根据权利要求4所述的器件高速取放装置，其特征在于：所述垂直制动器组件同时驱动至少两个取放组件上下移动。
  6. 根据权利要求1所述的器件高速取放装置，其特征在于：所述第一载台和所述第二载台上承载晶圆或料盒或编带或载板。
  7. 根据权利要求1所述的器件高速取放装置，其特征在于：还包括用于控制所述转动式传送组件、所述取放组件、所述第一移动机构、所述第二移动机构作动的中央控制***。
  8. 根据权利要求1所述的器件高速取放装置，其特征在于：还包括一机械手臂(8)，所述机械手臂能够拾取所述取放组件上器件，并将其放置于一基板(9)上。
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