WO2017166392A1 - 阵列基板及其制造方法、显示面板和显示装置 - Google Patents
阵列基板及其制造方法、显示面板和显示装置 Download PDFInfo
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- WO2017166392A1 WO2017166392A1 PCT/CN2016/082371 CN2016082371W WO2017166392A1 WO 2017166392 A1 WO2017166392 A1 WO 2017166392A1 CN 2016082371 W CN2016082371 W CN 2016082371W WO 2017166392 A1 WO2017166392 A1 WO 2017166392A1
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Definitions
- Embodiments of the present disclosure relate to an array substrate and a method of fabricating the same, a display panel, and a display device.
- the TFT-LCD Thin Film Transistor-Liquid Crystal Display
- the TFT-LCD has good image display quality, low energy consumption and environmental protection, and is widely used in the field of displays.
- the display panel in the TFT-LCD is formed by pairing the array substrate and the counter substrate, and the array substrate and the counter substrate are filled with liquid crystal in the cavity behind the cassette.
- Data lines and gate lines intersecting vertically and horizontally are formed on the array substrate, and the data lines and the gate lines are intersected to form pixel units arranged in a matrix form.
- An embodiment of the present disclosure provides an array substrate including a substrate substrate, a plurality of gate lines disposed on the substrate substrate, a plurality of first data lines, a plurality of second data lines, and a matrix arrangement a plurality of rows and columns of pixel cells, wherein each row of the pixel cells is driven by a corresponding gate line, wherein each of the plurality of rows of pixel cells constitutes one pixel cell row group and the pixel cell row group is Receiving the same gate signal during operation of the array substrate; each column of the pixel unit is driven by a corresponding first data line and a second data line, and the adjacent first data line and the second data line are mutually Insulating, disposed in different layers, and connected to different pixel units, the adjacent first data lines and the second data lines at least partially overlapping in a direction perpendicular to a board surface of the base substrate .
- the pixel unit of the 2m-1th row and the pixel unit of the 2mth row constitute one pixel unit row group and receive the same during operation of the array substrate.
- the gate signal, m is a natural number greater than or equal to one.
- an array substrate further includes a plurality of first vias and a thin film transistor disposed in each of the pixel units, wherein the first data line and each pixel unit row group The source and the drain of the thin film transistor in the row of the pixel unit are disposed in the same layer, and the second data line passes through the corresponding first via and the other pixel in the pixel unit row group.
- the thin film transistor is electrically connected.
- the first via hole and the gate line at least partially overlap in a direction of a board surface of the array substrate.
- an array substrate provided by an embodiment of the present disclosure further includes a first passivation layer, wherein the first passivation layer is disposed between the first data line and the second data line.
- the first passivation layer is an inorganic insulating layer.
- an array substrate further includes a shield electrode layer and a common electrode, wherein the shield electrode layer is disposed between the first passivation layer and the second data line, and the shielding
- the electrode layer is disposed in the same layer as the common electrode, is formed of the same material, and is applied with the same voltage.
- an array substrate provided by an embodiment of the present disclosure further includes a second passivation layer, wherein the second passivation layer is disposed between the shield electrode layer and the second data line.
- the second passivation layer is an inorganic insulating layer.
- an array substrate further includes a planarization layer, wherein the planarization layer is disposed between the shield electrode layer and the first passivation layer.
- the planarization layer is a resin layer.
- an array substrate further includes a protective layer and a pixel electrode, wherein the protective layer is disposed on the second data line, and the protective layer and the pixel electrode are disposed in the same layer and are The same material is formed.
- the protective layer is an indium tin oxide layer.
- An embodiment of the present disclosure provides a display panel including the array substrate according to any embodiment of the present disclosure.
- An embodiment of the present disclosure provides a display device including the display panel of any of the embodiments of the present disclosure.
- An embodiment of the present disclosure provides a method for fabricating an array substrate, comprising: forming a plurality of gate lines, a plurality of first data lines, a plurality of second data lines, and a plurality of rows arranged in a matrix on the substrate.
- each of the rows of the pixel units is driven by a corresponding gate line, wherein each of the plurality of rows of pixel units constitutes one pixel unit row group; each column of pixel units is corresponding to the first data
- the line and the second data line are driven, and the adjacent first data line and the second data line are mutually exclusive
- the edge is disposed at a different layer and is connected to a different pixel unit, and the adjacent first data line and the second data line at least partially overlap in a direction perpendicular to a board surface of the base substrate.
- the method for fabricating an array substrate according to an embodiment of the present disclosure further includes forming a first passivation layer between the first data line and the second data line.
- a method for fabricating an array substrate according to an embodiment of the present disclosure further includes forming a shield electrode layer and a common electrode in a same patterning process, wherein the shield electrode layer is disposed on the first passivation layer and Between the second data lines.
- a method of fabricating an array substrate according to an embodiment of the present disclosure further includes forming a second passivation layer between the shield electrode layer and the second data line.
- a method for fabricating an array substrate according to an embodiment of the present disclosure further includes forming a protective layer and a pixel electrode in a same patterning process, wherein the protective layer is disposed on the second data line.
- 1 is a top plan view of an array substrate
- FIG. 2 is a top plan view of an array substrate according to an embodiment of the present disclosure
- FIG. 3 is a cross-sectional view of an example of an array substrate according to an embodiment of the present disclosure taken along line AA' in FIG. 2;
- FIG. 4 is a cross-sectional view of still another example of an array substrate according to an AA' line in FIG. 2 according to an embodiment of the present disclosure
- FIG. 5A to FIG. 5I are schematic cross-sectional views of a method of fabricating an array substrate corresponding to FIG. 4 according to an embodiment of the present disclosure, taken along line BB' of FIG. 2;
- FIG. 6 is a cross-sectional view of a display panel according to an embodiment of the present disclosure.
- the array substrate of the liquid crystal display panel can be driven by a progressive scanning method.
- the refreshing frequency is increased, the driving time of the pixel electrode may be insufficient, which may result in poor picture quality, which hinders large-size, high-resolution liquid crystal display products.
- development of. The array substrate of the liquid crystal display panel can also adopt the method of double-row scanning, that is, two rows of pixel electrodes are in a charging state at any time, which can provide twice the charging time of the original progressive scanning driving mode for each pixel electrode, ensuring The picture quality is especially suitable for large-size, high-resolution liquid crystal display products.
- the two-line scanning method requires two data lines corresponding to each column of pixel units, and the two data lines need to be separated by a certain distance.
- a black matrix may be disposed on a counter substrate (for example, a color filter substrate) on a side close to a light emitting surface of the liquid crystal display panel corresponding to the data line on the array substrate. Therefore, when the two data lines are disposed in the same layer, the width of the black matrix is correspondingly increased in the width direction of the data line, resulting in a decrease in the aperture ratio of the liquid crystal display panel.
- a counter substrate for example, a color filter substrate
- the charging time of each row of pixel electrodes is 1/(1024 ⁇ 60) s, which is about 16.3 ⁇ s, that is, from one Switching the gray scale to another gray scale needs to be completed in about 16.3 ⁇ s (this also includes the time required for the charging voltage to reach the required value and the total deflection of the liquid crystal).
- the charging time of each row of pixel electrodes is 1/(512 ⁇ 60) s, which is about 32.6 ⁇ s, that is, the two-line scanning method provides twice the pixel electrode in each row of pixel units. The charging time of the progressive scan drive mode.
- Figure 1 is a top plan view of an array substrate 100'.
- the array substrate 100' includes a plurality of first data lines 112', a plurality of second data lines 113', a plurality of gate lines 111', and a plurality of pixel units 114', each of the pixel units 114' is provided with a thin film transistor 120' and a pixel electrode 118', wherein the first data line 112' and the second data line 113' are disposed in the same layer and respectively respectively with films in different rows of pixel units
- the source 121' of the transistor 120' is electrically connected.
- the drain 122' in the thin film transistor 120' is electrically connected to the pixel unit 118' through the second via 116'.
- Each two rows of pixel units 114' receive the same gate signal during operation of the array substrate 100', for example, two gate lines for driving the first row and the second row of pixel cells in the figure receive the same during operation The gate signal, whereby the first row and the second row of pixel cells are turned on and off simultaneously.
- the black matrix 180' covers the first data line 112', the plurality of second data lines 113', and the plurality of gate lines 111'.
- the black matrix 180' may be disposed on the opposite substrate of the liquid crystal panel opposite to the array substrate. Upper, or can be directly disposed on the array substrate.
- the array substrate 100' shown in FIG. 1 can realize the operation mode of two-line scanning, and can provide charging time twice that of the original progressive scanning driving mode for each pixel electrode, but compared with the progressive scanning driving method, black
- the area covered by the matrix 180' is increased, resulting in a decrease in the aperture ratio of the liquid crystal display panel using the array substrate, thereby increasing energy consumption.
- An embodiment of the present disclosure provides an array substrate including a substrate substrate, a plurality of gate lines disposed on the substrate substrate, a plurality of first data lines, a plurality of second data lines, and a plurality of rows arranged in a matrix form. And a plurality of columns of pixel units, wherein each row of pixel units is driven by a corresponding gate line, wherein each of the plurality of rows of pixel units constitutes one pixel unit row group and the pixel unit row group receives the same gate during operation of the array substrate a pole signal; each column of pixel units is driven by a corresponding first data line and a second data line, and the adjacent first data line and the second data line are insulated from each other, disposed in different layers, and connected to different pixel units, The first data line and the second data line at least partially overlap in a direction perpendicular to a board surface of the base substrate.
- the array substrate provided by the embodiment of the present disclosure reduces the area occupied by the two data lines, thereby reducing the area of the black matrix corresponding to the corresponding need, thereby improving the aperture ratio of the liquid crystal display panel using the array substrate, and reducing the liquid crystal. Panel power consumption.
- FIG. 2 is a schematic plan view of an array substrate according to an embodiment of the present disclosure
- FIG. 3 is a cross-sectional view of an example of an array substrate according to an AA′ line in FIG. 2 according to an embodiment of the present disclosure
- a further example of an array substrate provided by the disclosed embodiment is a cross-sectional view along the line AA' in FIG. 2
- FIG. 5I is an array substrate corresponding to FIG. 4 according to the embodiment of the present disclosure, along the line BB' in FIG.
- an embodiment of the present disclosure provides an array substrate 100. It includes a substrate substrate 110, a plurality of gate lines 111 disposed on the substrate substrate 110, a plurality of first data lines 112, a plurality of second data lines 113, and a plurality of rows and columns of pixel units arranged in a matrix form. 114, wherein each row of pixel units 114 is driven by a corresponding gate line 111. In the multi-row pixel unit 114, every two rows constitute one pixel unit row group and the pixel unit row group receives the same gate signal during the operation of the array substrate 100, for example, two gate line connections for one pixel unit row group. Go to the same gate driver.
- Each column of pixel units 114 is driven by a corresponding first data line 112 and a second data line 113, and adjacent first data lines 112 and second data lines 113 are insulated from each other, disposed in different layers, and connected to the columns.
- the adjacent first data line 112 and second data line 113 at least partially overlap in a direction perpendicular to the board surface of the base substrate 110.
- the adjacent first data line 112 and second data line 113 completely overlap in a direction perpendicular to the board surface of the base substrate 110.
- the projection of the second data line 113 on the upper layer with respect to the substrate 110 completely falls into the projection of the first data line 112 of the lower layer with respect to the base substrate 110, and thus the width of the second data line 113 is less than or equal to The width of the first data line 112.
- the first data line 112 and the second data line 113 adjacent to each other between the two columns of pixel units are respectively used to drive two columns of pixel units located on both sides thereof, and the first data line 112 is used in the figure.
- Driving the pixel units in the first, third, fifth, ... rows in the left column, and the second data line 113 is used to drive the second, fourth, sixth, ..., rows in the right column Pixel unit in .
- first data line 112 and the second data line 113 adjacent to each other between two columns of pixel units may be used to drive a column of pixel units located on the same side thereof, for example, the first data line 112 is used to drive pixel units in rows 1, 3, 5... of the column, and second data line 113 is used for rows 2, 4, 6... in the column Pixel unit in .
- the two are generally occupied.
- the area of the substrate is reduced with respect to the arrangement of the two in parallel with each other, so that the area covered by the black matrix 180 in FIG. 2 is reduced, which improves the aperture ratio of the liquid crystal display panel using the array substrate.
- the 2m-1 row pixel unit and the 2m row pixel unit form one pixel unit row group and receive the same gate signal during the operation of the array substrate 100, m is a natural number greater than or equal to 1.
- two rows of pixel units constituting one pixel unit row group are not adjacent, for example, the 4m-3th row and the 4th m-1th row pixel unit constitute one pixel unit row group, the 4m- 2
- the row and the 4th row pixel unit constitute one pixel unit row group, m is a natural number greater than or equal to 1; or, if the entire array substrate includes 2n rows of pixel units, the mth row and the n+mth row pixel unit constitute one pixel Unit row group, m, n is a natural number greater than or equal to 1, and m ⁇ n.
- the array substrate 100 further includes a plurality of first vias 115 and a thin film transistor 120 disposed in each of the pixel units 114, wherein the first data line and each pixel unit row group
- the source and drain of the thin film transistor in one row of pixel cells are disposed in the same layer
- the second data line is electrically connected to the thin film transistor in the other row of pixel cells in the pixel cell row group through the corresponding first via.
- the first data line 112 and the second m-1 row pixel unit have the source 121 and the drain of the thin film transistor 120.
- the second data line 113 passes through the first via 115 and the source 121 (or the drain 122) of the thin film transistor 120 in the second m row of pixel units.
- the first data line 112 is disposed in the same layer as the source 121 and the drain 122 of the thin film transistor 120 in the pixel unit of the 2mth row and is electrically connected to the source 121 (or the drain 122), and the second data line 113 passes The first via 115 is electrically connected to the source 121 (or the drain 122) of the thin film transistor 120 in the pixel cell of the 2m-1th row.
- the drain 122 of the thin film transistor 120 is electrically connected to the pixel unit 118 through the second via 116.
- the operation principle of the two-line scanning of the array substrate 100 shown in FIG. 2 can be as follows. The following description will be described by taking a case where the pixel unit of the 2m-1th row and the pixel unit of the 2mth row constitute one pixel unit row group (m is a natural number greater than or equal to 1), but in other embodiments, the pixel unit row group constitutes The same applies to the method.
- the gate line of the pixel unit of the first row and the gate line of the pixel unit of the second row receive the same gate turn-on signal, and simultaneously open the pixel unit of the first row and the pixel unit of the second row; Transmitting a data signal to the first row of pixel cells or the second row of pixel cells through the first data line 112, and correspondingly transmitting data signals to the second row of pixel cells or the first row of pixel cells through the second data line 113, undergoing a
- the gate line of the pixel unit of the first row and the pixel of the second row of pixels receive the same gate-off signal, and the pixel unit of the first row and the pixel of the second row are turned off, thereby simultaneously driving the pixel unit of the first row and the pixel unit 2 rows of pixel units.
- the gate line of the pixel unit of the third row receives the same gate turn-on signal as the gate line of the pixel unit of the fourth row, and the pixel unit of the third row and the pixel of the fourth row are turned on;
- the data signal is transmitted to the third row of pixel units or the fourth row of pixel units through the first data line 112, and the data signal is transmitted to the fourth row of pixel units or the third row of pixel units through the second data line 113, respectively.
- the gate line of the pixel unit of the third row and the pixel of the fourth row of pixels receive the same gate-off signal, and the pixel unit of the third row and the pixel of the fourth row are turned off, thereby simultaneously driving the pixel unit of the third row and Line 4 pixel unit.
- the above operation is sequentially performed for each subsequent pixel unit row group until the pixel unit rows of the entire array substrate are charged, thereby completing the scanning of one frame of the screen.
- the 2m-1th row of pixel cells and the 2mth row of pixel cells can be driven by the same output channel of the same gate driver or gate driver to receive the same gate signal.
- the number of gate driver or gate driver output channels is reduced, simplifying circuit design and saving the cost of the gate driver.
- the first via 115 and the gate line 111 at least partially overlap in the direction of the board surface of the array substrate 100 .
- the first via 115 is overlapped with the gate line 111 so that the first via 115 does not occupy the area of the pixel electrode 118, thereby increasing the aperture ratio.
- the shape of the thin film transistor 120 is not limited to the U-shaped thin film transistor as shown in FIG. 2, and may be a linear thin film transistor, which is not limited herein.
- FIG. 3 is a cross-sectional view of an example of an array substrate according to an embodiment of the present disclosure taken along line AA' in FIG.
- an array substrate 100 according to an embodiment of the present disclosure further includes a first passivation layer 130 , wherein the first passivation layer 130 is disposed between the first data line 112 and the second data line 113 .
- the first passivation layer 130 insulates the adjacent first data line 112 and the second data line 113 from each other, and reduces signal crosstalk between the first data line 112 and the second data line 113.
- the first passivation layer 130 is an inorganic insulating layer.
- FIG. 4 is a cross-sectional view of still another example of an array substrate according to an AA' line in FIG. 2 according to an embodiment of the present disclosure.
- an array substrate 100 according to an embodiment of the present disclosure further includes a shield electrode layer 140 and a common electrode, wherein the shield electrode layer 140 is disposed between the first passivation layer 130 and the second data line 113, and is shielded.
- the electrode layer 140 is disposed in the same layer as the common electrode, is formed of the same material, and is applied with the same voltage.
- the shield electrode layer 140 may reduce signal crosstalk between the first data line 112 and the second data line 113.
- the shield electrode layer 140 may be made of indium tin oxide. (ITO) formation.
- ITO indium tin oxide.
- the array substrate 100 provided by an embodiment of the present disclosure may further include a second passivation layer 150 , wherein the second passivation layer 150 is disposed between the shield electrode layer 140 and the second data line 113 .
- the second passivation layer 150 insulates the shield electrode layer 140 from the second data line 113 and reduces signal crosstalk between the first data line 112 and the second data line 113.
- the second passivation layer 150 is an inorganic insulating layer.
- the shielding electrode 140 may be directly formed on the first passivation layer 130.
- the array substrate 100 may further include a planarization layer 160, wherein the planarization layer 160 is disposed on the shield electrode layer 140. Between the first passivation layer 130 and the first.
- the planarization layer 160 can function as a flattening to facilitate uniform formation of subsequent layers while reducing signal crosstalk between the first data line 112 and the second data line 113.
- the planarization layer 160 is, for example, a resin layer.
- the array substrate 100 provided by an embodiment of the present disclosure may further include a protective layer 170 and a pixel electrode, wherein the protective layer 170 is disposed on the second data line 113, for example, covering the second data line 113, the protective layer 170 and the pixel electrode.
- the same layer is disposed and formed of the same material, that is, the protective layer 170 can be formed without increasing the process.
- the protective layer 170 may protect the second data line 113 from being oxidized by the second data line 113.
- the protective layer 170 is, for example, an indium tin oxide (ITO) layer.
- ITO indium tin oxide
- An embodiment of the present disclosure provides a method for fabricating an array substrate, comprising: forming a plurality of gate lines, a plurality of first data lines, a plurality of second data lines, and a plurality of rows arranged in a matrix on the substrate.
- each row of pixel cells is driven by a corresponding gate line, and each of the plurality of rows of pixel cells constitutes one pixel cell row group; each column of pixel cells is composed of a corresponding first data line and a second The data line is driven, the adjacent first data line and the second data line are insulated from each other, disposed in different layers, and connected to different pixel units in the column, the adjacent first data line and the second data line are vertical At least partially overlapping in the direction of the board surface of the base substrate.
- the method for fabricating an array substrate according to an embodiment of the present disclosure further includes forming a first passivation layer between the first data line and the second data line.
- the method for fabricating an array substrate according to an embodiment of the present disclosure further includes forming a shield electrode layer between the first passivation layer and the second data line.
- the method for fabricating an array substrate according to an embodiment of the present disclosure further includes forming a second passivation layer between the shield electrode layer and the second data line.
- the method for fabricating an array substrate according to an embodiment of the present disclosure further includes forming a protective layer on the second data line.
- FIG. 5A to FIG. 5I are schematic cross-sectional views of a method of fabricating an array substrate corresponding to FIG. 4 according to an embodiment of the present disclosure, taken along line BB′ of FIG. 2 , for illustrating that embodiments of the present disclosure are not limited thereto. It shows the specific structure and steps.
- an embodiment of the present disclosure provides an example of a method for manufacturing an array substrate, as shown in FIG. 5A to FIG. 5I, which specifically includes the following steps:
- Step 1 As shown in FIG. 5A, a first metal layer is formed on the base substrate 110, and a gate line 111 is formed by a first patterning process; for example, the first metal layer is formed by a magnetron sputtering method, and the first step is made.
- the metal layer material includes any one of aluminum, molybdenum, aluminum-nickel alloy, chromium, copper, or a combination thereof; or, as the gate line 111 is formed, a common electrode line is further formed;
- Step 2 As shown in FIG. 5B, a gate insulating layer 117 is formed on the gate line 111; for example, the gate insulating layer 117 is formed by a chemical vapor deposition method, and the material for forming the gate insulating layer 117 includes silicon nitride, silicon oxide, and oxynitride. Any one or combination of silicon;
- Step 3 As shown in FIG. 5C, an active layer 119 is formed on the gate insulating layer 117 by a second patterning process; for example, the active layer 119 is formed by a chemical vapor deposition method, and the material for forming the active layer 119 includes amorphous Silicon, polysilicon, oxide semiconductor, etc.;
- Step 4 As shown in FIG. 5D, a second metal layer is formed on the active layer 119, and the source 121, the drain 122, and the first data line 112 are formed by a third patterning process (the first data line 112 is as shown in FIG. 4).
- the second metal layer is formed by magnetron sputtering, and the second metal layer material is made of any one of aluminum, molybdenum, aluminum-nickel alloy, chromium, copper, or a combination thereof;
- Step 5 As shown in FIG. 5E, a first passivation layer 130 is formed on the source 121 and the drain 122, and a first via 115 corresponding to the source 121 is formed by a fourth patterning process (the source 121) A via 115 is shown in FIG. 4 and a second via 116 corresponding to the drain 122; for example, the first passivation layer 130 is formed by chemical vapor deposition, and the material of the first passivation layer 130 is made of oxide. Or nitride;
- Step 6 As shown in FIG. 5F, a planarization layer 160 is formed on the first passivation layer 130 by a fifth patterning process; for example, the planarization layer 160 is formed by a chemical vapor deposition method, and a material for forming the planarization layer is, for example, Resin
- Step 7 As shown in FIG. 5G, the shield electrode layer 140 is formed on the planarization layer 160 by a sixth patterning process; for example, the material for fabricating the shield electrode layer 140 includes indium tin oxide (ITO) or indium zinc oxide (IZO). Or, as the shield electrode layer 140 is formed, a common electrode located in the pixel unit is formed, the common electrode and the shield electrode layer being formed, for example, of the same material, and the common electrode may pass through the additionally formed via hole with the common electrode line Electrical connection
- Step 8 As shown in FIG. 5H, a second passivation layer 150 is formed on the shield electrode layer 140 by a seventh patterning process; for example, the second passivation layer 150 is formed by a chemical vapor deposition method to form a second passivation layer.
- the material of 150 includes an oxide or a nitride;
- Step 9 forming a third metal layer on the second passivation layer 150, and forming a second data line 113 by the eighth patterning process (the second data line 113 is as shown in FIG. 4); for example, the third metal layer passes the magnetic Forming a method of controlling sputtering, forming a third metal layer material comprising any one of aluminum, molybdenum, aluminum-nickel alloy, chromium, copper or a combination thereof;
- Step 10 As shown in FIG. 5I, a pixel electrode 118 located in the pixel unit and a protective layer 170 over the second data line 113 are formed on the second passivation layer 150 by the ninth patterning process (the protective layer 170 is as 4]; for example, the pixel electrode 118 and the protective layer 170 are formed of the same material, which includes, for example, indium tin oxide (ITO).
- the protective layer 170 is as 4]; for example, the pixel electrode 118 and the protective layer 170 are formed of the same material, which includes, for example, indium tin oxide (ITO).
- ITO indium tin oxide
- each patterning process includes processes such as exposure, development, etching, and stripping.
- Embodiments of the present disclosure also provide a display panel 10 including the array substrate of any of the embodiments of the present disclosure.
- the display panel 10 further includes a counter substrate 200.
- the display panel 10 is formed by the array substrate 100 and the counter substrate 200.
- the array substrate 100 and the counter substrate 200 are filled in the cavity after the box. liquid crystal.
- the opposite substrate 200 is, for example, a color filter substrate, and includes a counter substrate substrate 210, a black matrix 180, and a color film unit (not shown in FIG. 6).
- the width of the black matrix 180 on the color filter substrate is the same as that on the array substrate.
- the total width of one data line and the second data line is equal or larger.
- the embodiment of the display panel illustrated in FIG. 6 is an embodiment based on the array substrate illustrated in FIG. 4, but the present disclosure is not limited thereto, and the display panel may be prepared, for example, based on the embodiment of the array substrate illustrated in FIG. 3.
- Embodiments of the present disclosure provide a display device, including any of the embodiments of the present disclosure.
- Display panel
- the display device may be any product or component having a display function, such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator, and the like.
- a display function such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator, and the like.
- the array substrate, the display panel and the display device provided by the embodiments of the present disclosure reduce the area occupied by the two data lines, so that the area of the black matrix corresponding to the corresponding need is reduced, thereby improving the aperture ratio of the liquid crystal display panel.
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Abstract
Description
Claims (20)
- 一种阵列基板,包括衬底基板、设置于所述衬底基板上的多条栅线、多条第一数据线、多条第二数据线和以矩阵形式排布的多行和多列像素单元,其中,每行所述像素单元由相应的栅线驱动,所述多行像素单元中,每两行构成一个像素单元行组且所述像素单元行组在所述阵列基板的工作过程中接收相同的栅极信号;每列所述像素单元由相应的第一数据线和第二数据线驱动,相邻的所述第一数据线和所述第二数据线相互绝缘、设置于不同的层,且连接到不同的像素单元,所述相邻的第一数据线和所述第二数据线在垂直于所述衬底基板的板面的方向上至少部分交叠。
- 根据权利要求1所述的阵列基板,其中,第2m-1行所述像素单元与第2m行所述像素单元构成一个像素单元行组且在所述阵列基板的工作过程中接收相同的栅极信号,m为大于或等于1的自然数。
- 根据权利要求1或2所述的阵列基板,还包括多个第一过孔和设置在每个所述像素单元中的薄膜晶体管,其中,所述第一数据线与每个像素单元行组中的一行所述像素单元中的薄膜晶体管的源极和漏极同层设置,所述第二数据线通过相应的所述第一过孔与所述像素单元行组中的另一行所述像素单元中的薄膜晶体管电连接。
- 根据权利要求3所述的阵列基板,其中,所述第一过孔与所述栅线在所述阵列基板的板面方向上至少部分交叠。
- 根据权利要求1或2所述的阵列基板,还包括第一钝化层,其中,所述第一钝化层设置于所述第一数据线与所述第二数据线之间。
- 根据权利要求5所述的阵列基板,其中,所述第一钝化层为无机绝缘层。
- 根据权利要求5所述的阵列基板,还包括屏蔽电极层和公共电极,其中,所述屏蔽电极层设置于所述第一钝化层和所述第二数据线之间,所述屏蔽电极层与所述公共电极同层设置、由相同的材料形成且被施加相同的电压。
- 根据权利要求7所述的阵列基板,还包括第二钝化层,其中,所述第二钝化层设置在所述屏蔽电极层和所述第二数据线之间。
- 根据权利要求8所述的阵列基板,其中,所述第二钝化层为无机绝缘层。
- 根据权利要求8所述的阵列基板,还包括平坦化层,其中,所述平坦化层设置于所述屏蔽电极层与所述第一钝化层之间。
- 根据权利要求10所述的阵列基板,其中,所述平坦化层为树脂层。
- 根据权利要求10所述的阵列基板,还包括保护层和像素电极,其中,所述保护层设置在所述第二数据线上,所述保护层和所述像素电极同层设置且由相同的材料形成。
- 根据权利要求12所述的阵列基板,其中,所述保护层为氧化铟锡层。
- 一种显示面板,包括如权利要求1-13任一项所述的阵列基板。
- 一种显示装置,包括如权利要求14所述的显示面板。
- 一种阵列基板的制造方法,包括:在衬底基板上形成多条栅线、多条第一数据线、多条第二数据线和以矩阵形式排布的多行和多列像素单元,其中,每行所述像素单元由相应的栅线驱动,所述多行像素单元中,每两行构成一个像素单元行组;每列像素单元由相应的第一数据线和第二数据线驱动,相邻的所述第一数据线和所述第二数据线相互绝缘、设置于不同的层,且连接到不同的像素单元,所述相邻的第一数据线和所述第二数据线在垂直于衬底基板的板面的方向上至少部分交叠。
- 根据权利要求16所述的阵列基板的制造方法,还包括,在所述第一数据线和所述第二数据线之间形成第一钝化层。
- 根据权利要求17所述的阵列基板的制造方法,还包括,在同一次图案化工艺中形成屏蔽电极层和公共电极,其中,所述屏蔽电极层设置在所述第一钝化层和所述第二数据线之间。
- 根据权利要求18所述的阵列基板的制造方法,还包括,在所述屏蔽电极层和所述第二数据线之间形成第二钝化层。
- 根据权利要求19所述的阵列基板的制造方法,还包括,在同一次图 案化工艺中形成保护层和像素电极,其中,所述保护层设置在所述第二数据线上。
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106054481A (zh) * | 2016-08-08 | 2016-10-26 | 深圳市华星光电技术有限公司 | 像素结构、阵列基板及显示面板 |
CN106094381A (zh) * | 2016-08-25 | 2016-11-09 | 深圳市华星光电技术有限公司 | 一种薄膜晶体管液晶显示器 |
CN106229319A (zh) * | 2016-09-05 | 2016-12-14 | 京东方科技集团股份有限公司 | 阵列基板及其制造方法、显示面板和显示装置 |
CN106601772B (zh) * | 2016-12-13 | 2019-09-06 | 上海天马有机发光显示技术有限公司 | 一种有机发光显示面板、装置及制备方法 |
CN106773407A (zh) * | 2016-12-29 | 2017-05-31 | 深圳市华星光电技术有限公司 | 显示面板及其制作方法 |
CN106773389A (zh) * | 2016-12-30 | 2017-05-31 | 惠科股份有限公司 | 液晶显示装置及其面板、显示面板与***电路的连接结构 |
CN117348302A (zh) | 2017-01-16 | 2024-01-05 | 株式会社半导体能源研究所 | 显示装置 |
JP6904889B2 (ja) * | 2017-11-16 | 2021-07-21 | パナソニック液晶ディスプレイ株式会社 | 液晶表示パネル |
KR102674763B1 (ko) * | 2018-12-19 | 2024-06-14 | 엘지디스플레이 주식회사 | 표시 장치 |
CN111381407A (zh) * | 2018-12-29 | 2020-07-07 | 北京小米移动软件有限公司 | 显示面板、显示设备、扫描方法及装置 |
CN109683371A (zh) * | 2019-01-29 | 2019-04-26 | 深圳市华星光电半导体显示技术有限公司 | 显示面板 |
CN110085190B (zh) * | 2019-06-10 | 2021-08-24 | 北海惠科光电技术有限公司 | 阵列基板以及显示面板 |
CN110297366B (zh) * | 2019-06-28 | 2021-12-14 | 上海天马微电子有限公司 | 一种显示面板及驱动方法、显示装置及驱动方法 |
CN110853531B (zh) * | 2019-11-21 | 2021-11-05 | 京东方科技集团股份有限公司 | 显示用驱动背板及其制备方法、显示面板 |
CN113138501A (zh) * | 2020-01-19 | 2021-07-20 | 松下液晶显示器株式会社 | 液晶显示面板 |
CN113219734B (zh) * | 2020-01-21 | 2023-09-05 | 松下电器(美国)知识产权公司 | 液晶显示面板 |
US20240049542A1 (en) * | 2021-02-08 | 2024-02-08 | Boe Technology Group Co., Ltd. | Display substrate and manufacturing method therefor, and display apparatus |
CN113488487A (zh) * | 2021-06-30 | 2021-10-08 | 昆山龙腾光电股份有限公司 | 一种薄膜晶体管阵列基板及显示装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101398581A (zh) * | 2007-09-28 | 2009-04-01 | 群康科技(深圳)有限公司 | 液晶显示面板及其所采用的基板的制造方法 |
CN102707524A (zh) * | 2012-05-02 | 2012-10-03 | 京东方科技集团股份有限公司 | 一种阵列基板、显示装置和显示装置的驱动方法 |
US20130162616A1 (en) * | 2011-12-22 | 2013-06-27 | Jae Hwa Park | Transparent display apparatus |
CN104049427A (zh) * | 2013-03-12 | 2014-09-17 | 三星显示有限公司 | 液晶显示器 |
CN104460144A (zh) * | 2013-09-24 | 2015-03-25 | 业鑫科技顾问股份有限公司 | 薄膜晶体管基板、驱动薄膜晶体管基板的方法及显示装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD579292S1 (en) * | 2006-02-23 | 2008-10-28 | Jared Wayne Hanlon | Non threaded fastener pulling tool with saw wrench, nail pick, and bottle opener combination |
JP5376723B2 (ja) * | 2008-06-09 | 2013-12-25 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
US8259249B2 (en) * | 2009-10-12 | 2012-09-04 | Samsung Electronics Co., Ltd. | Display substrate, method of manufacturing the display substrate and display device having the display substrate |
CN102411241B (zh) * | 2011-11-23 | 2014-06-18 | 深圳市华星光电技术有限公司 | 液晶显示面板及液晶显示装置 |
US8665264B2 (en) | 2011-11-23 | 2014-03-04 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | LCD panel and LCD device |
KR102040812B1 (ko) * | 2013-02-12 | 2019-11-06 | 삼성디스플레이 주식회사 | 액정 표시 장치 |
CN103413812B (zh) | 2013-07-24 | 2016-08-17 | 北京京东方光电科技有限公司 | 阵列基板及其制备方法、显示装置 |
CN203455564U (zh) * | 2013-07-24 | 2014-02-26 | 北京京东方光电科技有限公司 | 阵列基板及显示装置 |
TWI526755B (zh) * | 2014-09-01 | 2016-03-21 | 群創光電股份有限公司 | 液晶顯示面板 |
CN104460163B (zh) * | 2014-12-25 | 2017-07-28 | 上海天马微电子有限公司 | 一种阵列基板及其制作方法及显示装置 |
-
2016
- 2016-03-29 CN CN201610190726.5A patent/CN105629614A/zh active Pending
- 2016-05-17 US US15/540,132 patent/US10216057B2/en not_active Expired - Fee Related
- 2016-05-17 WO PCT/CN2016/082371 patent/WO2017166392A1/zh active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101398581A (zh) * | 2007-09-28 | 2009-04-01 | 群康科技(深圳)有限公司 | 液晶显示面板及其所采用的基板的制造方法 |
US20130162616A1 (en) * | 2011-12-22 | 2013-06-27 | Jae Hwa Park | Transparent display apparatus |
CN102707524A (zh) * | 2012-05-02 | 2012-10-03 | 京东方科技集团股份有限公司 | 一种阵列基板、显示装置和显示装置的驱动方法 |
CN104049427A (zh) * | 2013-03-12 | 2014-09-17 | 三星显示有限公司 | 液晶显示器 |
CN104460144A (zh) * | 2013-09-24 | 2015-03-25 | 业鑫科技顾问股份有限公司 | 薄膜晶体管基板、驱动薄膜晶体管基板的方法及显示装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114280861A (zh) * | 2020-09-27 | 2022-04-05 | 京东方科技集团股份有限公司 | 阵列基板及显示装置 |
CN114280861B (zh) * | 2020-09-27 | 2023-09-05 | 京东方科技集团股份有限公司 | 阵列基板及显示装置 |
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CN105629614A (zh) | 2016-06-01 |
US10216057B2 (en) | 2019-02-26 |
US20180136528A1 (en) | 2018-05-17 |
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