WO2017056769A1 - レーザ加工方法及びレーザ加工装置 - Google Patents
レーザ加工方法及びレーザ加工装置 Download PDFInfo
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- WO2017056769A1 WO2017056769A1 PCT/JP2016/074039 JP2016074039W WO2017056769A1 WO 2017056769 A1 WO2017056769 A1 WO 2017056769A1 JP 2016074039 W JP2016074039 W JP 2016074039W WO 2017056769 A1 WO2017056769 A1 WO 2017056769A1
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- silicon substrate
- laser light
- cutting line
- modified region
- laser
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
- B23K26/048—Automatically focusing the laser beam by controlling the distance between laser head and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
Definitions
- the present disclosure relates to a laser processing method and a laser processing apparatus.
- a processing object including a silicon substrate having a plurality of functional elements formed in a matrix on the surface with a laser beam on the back surface of the silicon substrate as a laser beam incident surface
- the workpiece passes between adjacent functional elements.
- a modified region near the surface of the silicon substrate along the planned cutting line set in a lattice shape and then polishing the back surface of the silicon substrate so that the silicon substrate has a predetermined thickness.
- a laser processing method for cutting an object for each functional element is known (see, for example, Patent Document 1).
- the laser processing method as described above it is possible to reduce the number of scans of the laser beam with respect to one scheduled cutting line (that is, the number of columns in which the modified region is formed with respect to one scheduled cutting line). Is important. Therefore, there is a case where a crack is greatly extended from the modified region in the thickness direction of the silicon substrate with the formation of the modified region by condensing laser light having a high transmittance with respect to silicon on the silicon substrate.
- laser light having a high transmittance with respect to silicon is condensed on the silicon substrate, the surface of the silicon substrate opposite to the laser light incident surface may be damaged, and the characteristics of the functional element may be deteriorated.
- one form of the present disclosure provides a laser processing method and a laser processing apparatus that can improve processing efficiency while suppressing the occurrence of damage to the surface of the processing object opposite to the laser light incident surface.
- the purpose is to do.
- a laser processing method includes a laser having a wavelength larger than 1064 nm on a processing target including a silicon substrate having a plurality of functional elements formed on a surface, with the back surface of the silicon substrate being a laser light incident surface. Concentrates light along a scheduled cutting line set so as to pass between adjacent functional elements while maintaining the distance between the surface of the silicon substrate and the first light condensing point of the laser light at the first distance.
- the first step of forming the first modified region along the planned cutting line by moving the first condensing point of the laser beam and the back surface of the silicon substrate on the workpiece after the first step Laser light having a wavelength larger than 1064 nm is condensed as the laser light incident surface, and the distance between the surface of the silicon substrate and the second light condensing point of the laser light is maintained at a second distance larger than the first distance.
- the thickness of the silicon substrate from the first modified region and the second modified region is increased with the formation of the first modified region and the second modified region, as compared with the case where laser light having a wavelength of 1064 nm or less is used.
- the crack can be greatly extended in the direction.
- the laser beam may have a wavelength of 1099 ⁇ m to 1342 ⁇ m.
- the cracks can be further extended from the first modified region and the second modified region in the thickness direction of the silicon substrate with the formation of the first modified region and the second modified region.
- the laser is in a direction perpendicular to both the thickness direction of the silicon substrate and the extending direction of the planned cutting line with respect to the position where the first condensing point of the laser beam is aligned.
- the distance for offsetting the second light condensing point may be 24 ⁇ m or less.
- a crack is reliably connected between the first modified region and the second modified region, and the first modified region and the second modified region are formed along with the formation of the first modified region and the second modified region.
- a crack can be reliably extended from the quality region in the thickness direction of the silicon substrate.
- the laser is in a direction perpendicular to both the thickness direction of the silicon substrate and the extending direction of the planned cutting line with respect to the position where the first condensing point of the laser beam is aligned.
- the distance for offsetting the second light condensing point may be 4 ⁇ m or more and 18 ⁇ m or less.
- the crack is more reliably connected between the first modified region and the second modified region, and the first modified region and the second modified region are formed along with the formation of the first modified region and the second modified region.
- a crack can be more reliably extended from the modified region in the thickness direction of the silicon substrate.
- the first laser light is directed in a direction perpendicular to both the thickness direction of the silicon substrate and the extending direction of the planned cutting line with respect to the planned cutting line.
- a crack extending from the first modified region to the surface side of the silicon substrate can be aligned on the planned cutting line.
- a laser processing apparatus includes a support base that supports a processing target including a silicon substrate having a plurality of functional elements formed on a surface, and a laser light source that emits laser light having a wavelength greater than 1064 nm. And a condensing optical system for condensing the laser light emitted from the laser light source on the workpiece supported by the support base so that the back surface of the silicon substrate becomes a laser light incident surface, a support base, a laser light source, and A control unit that controls at least one operation of the condensing optical system, and the control unit is adjacent to each other while maintaining the distance between the surface of the silicon substrate and the first condensing point of the laser light at the first distance.
- the first condensing point of the laser beam is moved along the scheduled cutting line set so as to pass between the functional elements, and then the distance between the surface of the silicon substrate and the second condensing point of the laser beam is set to the first point.
- Second greater than one distance
- the second laser light in a direction perpendicular to both the thickness direction of the silicon substrate and the extending direction of the line to be cut with respect to the position where the first light condensing point of the laser light is matched, while being kept apart.
- the second condensing point of the laser beam is moved along the planned cutting line while offsetting the condensing point.
- this laser processing apparatus for the same reason as the laser processing method described above, it is possible to improve the processing efficiency while suppressing the occurrence of damage to the surface of the processing object opposite to the laser light incident surface. it can.
- a laser processing method and a laser processing apparatus capable of improving processing efficiency while suppressing the occurrence of damage on the surface of the processing object opposite to the laser light incident surface. It becomes possible to do.
- FIG. 1 is a schematic configuration diagram of a laser processing apparatus used for forming a modified region.
- FIG. 2 is a plan view of a workpiece to be modified.
- FIG. 3 is a cross-sectional view taken along the line III-III of the workpiece of FIG.
- FIG. 4 is a plan view of an object to be processed after laser processing.
- FIG. 5 is a cross-sectional view taken along the line VV of the workpiece in FIG. 6 is a cross-sectional view of the workpiece of FIG. 4 along the line VI-VI.
- FIG. 7A is a cross-sectional view taken along a planned cutting line of an object to be processed during laser processing.
- FIG. 7B is a plan view of the workpiece after cutting.
- FIG. 8A is a cross-sectional view taken along a planned cutting line of the workpiece during laser processing.
- FIG. 8B is a plan view of the workpiece after cutting.
- FIG. 9A is a cross-sectional view taken along a planned cutting line of an object to be processed during laser processing.
- FIG. 9B is a plan view of the workpiece after cutting.
- FIG. 10A is a cross-sectional view taken along a planned cutting line of an object to be processed during laser processing.
- FIG. 10B is a plan view of the workpiece after cutting.
- (A) of FIG. 11 is a figure which shows the photograph of the surface parallel to the cutting scheduled line of the silicon substrate after a cutting
- FIG. 11B is a view showing a photograph of the surface side of the silicon substrate after cutting.
- FIG. 12 is a figure which shows the photograph of a surface parallel to the cutting scheduled line of the silicon substrate after 1st modified region and 2nd modified region formation.
- FIG. 12B is a view showing a photograph of a surface perpendicular to the planned cutting line of the silicon substrate after the formation of the first modified region and the second modified region.
- FIG. 13 is a figure which shows the photograph of a surface parallel to the cutting scheduled line of the silicon substrate after 1st modified region and 2nd modified region formation.
- FIG. 13B is a view showing a photograph of a surface perpendicular to the planned cutting line of the silicon substrate after the formation of the first modified region and the second modified region.
- FIG. 14 is a graph showing the relationship between the offset amount and the crack length.
- FIG. 15 is a graph showing the relationship between the offset amount and the number of splashes.
- FIG. 16A is a view showing a photograph of a plane parallel to the planned cutting line of the silicon substrate after cutting.
- FIG. 16B is a view showing a photograph of the surface side of the silicon substrate after cutting.
- FIG. 17A is a view showing a photograph of the surface side of the silicon substrate after cutting when the offset amount is 2 ⁇ m.
- FIG. 17B is a view showing a photograph of the surface side of the silicon substrate after cutting when the offset amount is 4 ⁇ m.
- FIG. 17C is a view showing a photograph of the surface side of the silicon substrate after cutting when the offset amount is 6 ⁇ m.
- FIG. 16A is a view showing a photograph of a plane parallel to the planned cutting line of the silicon substrate after cutting.
- FIG. 16B is a view showing a photograph of the surface side of the silicon substrate after cutting.
- FIG. 17A is a view showing a photograph of the surface side
- FIG. 18A is a diagram showing a surface perpendicular to the planned cutting line of the silicon substrate when the offset amount is small.
- FIG. 18B is a diagram showing a surface perpendicular to the planned cutting line of the silicon substrate when the offset amount is large.
- FIG. 19 is a cross-sectional view for explaining a method of manufacturing a semiconductor chip using the laser processing method of the embodiment.
- FIG. 20 is a cross-sectional view for explaining a semiconductor chip manufacturing method using the laser processing method of the embodiment.
- FIG. 21 is a cross-sectional view for explaining a method of manufacturing a semiconductor chip using the laser processing method of the embodiment.
- FIG. 22 is a cross-sectional view for explaining a method of manufacturing a semiconductor chip using the laser processing method of the embodiment.
- FIG. 23 is a cross-sectional view for explaining a method of manufacturing a semiconductor chip using the laser processing method of the embodiment.
- FIG. 24 is a cross-sectional view for explaining a method of manufacturing a semiconductor chip using the laser processing method of the embodiment.
- FIG. 25A is a cross-sectional view taken along a planned cutting line of the workpiece before polishing.
- FIG. 26B is a cross-sectional view taken along a planned cutting line of the workpiece after polishing.
- FIG. 26A is a cross-sectional view taken along a planned cutting line of the workpiece before polishing.
- FIG. 27B is a cross-sectional view taken along the planned cutting line of the workpiece after polishing in FIG.
- FIG. 27A is a cross-sectional view taken along a planned cutting line of the workpiece before polishing.
- FIG. 28B is a cross-sectional view taken along the planned cutting line of the workpiece after polishing.
- the modified region is formed in the processing object along the planned cutting line by condensing the laser beam on the processing object.
- the formation of the modified region will be described with reference to FIGS.
- a laser processing apparatus 100 includes a laser light source 101 that oscillates a laser beam L, a dichroic mirror 103 that is arranged to change the direction of the optical axis (optical path) of the laser beam L by 90 °, and And a condensing lens 105 for condensing the laser light L. Further, the laser processing apparatus 100 includes a support base 107 for supporting the workpiece 1 irradiated with the laser light L condensed by the condensing lens 105, and a stage 111 for moving the support base 107. , A laser light source control unit 102 for controlling the laser light source 101 to adjust the output, pulse width, pulse waveform, and the like of the laser light L, and a stage control unit 115 for controlling the movement of the stage 111.
- the laser light L emitted from the laser light source 101 is changed in the direction of its optical axis by 90 ° by the dichroic mirror 103, and is placed inside the processing object 1 placed on the support base 107.
- the light is condensed by the condensing lens 105.
- the stage 111 is moved, and the workpiece 1 is moved relative to the laser beam L along the planned cutting line 5. Thereby, a modified region along the planned cutting line 5 is formed on the workpiece 1.
- the stage 111 is moved in order to move the laser light L relatively, but the condensing lens 105 may be moved, or both of them may be moved.
- a plate-like member for example, a substrate, a wafer, or the like
- a scheduled cutting line 5 for cutting the workpiece 1 is set in the workpiece 1.
- the planned cutting line 5 is a virtual line extending linearly.
- the laser beam L is cut in a state where the condensing point (condensing position) P is aligned with the inside of the workpiece 1 as shown in FIG. 3. It moves relatively along the planned line 5 (that is, in the direction of arrow A in FIG. 2).
- the modified region 7 is formed on the workpiece 1 along the planned cutting line 5, and the modified region formed along the planned cutting line 5. 7 becomes the cutting start region 8.
- the condensing point P is a portion where the laser light L is condensed.
- the planned cutting line 5 is not limited to a straight line, but may be a curved line, a three-dimensional shape in which these lines are combined, or a coordinate designated.
- the planned cutting line 5 is not limited to a virtual line but may be a line actually drawn on the surface 3 of the workpiece 1.
- the modified region 7 may be formed continuously or intermittently.
- the modified region 7 may be in the form of a line or a dot. In short, the modified region 7 only needs to be formed at least inside the workpiece 1.
- a crack may be formed starting from the modified region 7, and the crack and the modified region 7 may be exposed on the outer surface (front surface 3, back surface, or outer peripheral surface) of the workpiece 1. .
- the laser light incident surface when forming the modified region 7 is not limited to the front surface 3 of the workpiece 1 and may be the back surface of the workpiece 1.
- the modified region 7 when the modified region 7 is formed inside the workpiece 1, the laser light L passes through the workpiece 1 and is near the condensing point P located inside the workpiece 1. Especially absorbed. Thereby, the modified region 7 is formed in the workpiece 1 (that is, internal absorption laser processing). In this case, since the laser beam L is hardly absorbed by the surface 3 of the workpiece 1, the surface 3 of the workpiece 1 is not melted. On the other hand, when the modified region 7 is formed on the surface 3 of the workpiece 1, the laser light L is absorbed particularly near the condensing point P located on the surface 3 and melted and removed from the surface 3. Then, removal portions such as holes and grooves are formed (surface absorption laser processing).
- the modified region 7 is a region where the density, refractive index, mechanical strength and other physical characteristics are different from the surroundings.
- Examples of the modified region 7 include a melt treatment region (meaning at least one of a region once solidified after melting, a region in a molten state, and a region in a state of being resolidified from melting), a crack region, and the like.
- a dielectric breakdown region, a refractive index change region, etc. there is a region where these are mixed.
- the modified region 7 includes a region where the density of the modified region 7 in the material of the workpiece 1 is changed compared to the density of the non-modified region, and a region where lattice defects are formed.
- the modified region 7 can be said to be a high dislocation density region.
- the area where the density of the melt processing area, the refractive index changing area, the density of the modified area 7 is changed as compared with the density of the non-modified area, and the area where lattice defects are formed are further included in the interior of these areas or the modified areas.
- cracks (cracks, microcracks) are included in the interface between the region 7 and the non-modified region.
- the included crack may be formed over the entire surface of the modified region 7, or may be formed in only a part or a plurality of parts.
- the workpiece 1 includes a substrate made of a crystal material having a crystal structure.
- the workpiece 1 includes a substrate formed of at least one of gallium nitride (GaN), silicon (Si), silicon carbide (SiC), LiTaO 3 , and sapphire (Al 2 O 3 ).
- the workpiece 1 includes, for example, a gallium nitride substrate, a silicon substrate, a SiC substrate, a LiTaO 3 substrate, or a sapphire substrate.
- the crystal material may be either an anisotropic crystal or an isotropic crystal.
- the workpiece 1 may include a substrate made of an amorphous material having an amorphous structure (amorphous structure), for example, a glass substrate.
- the modified region 7 can be formed by forming a plurality of modified spots (processing marks) along the planned cutting line 5.
- the modified region 7 is formed by collecting a plurality of modified spots.
- the modified spot is a modified portion formed by one pulse shot of pulsed laser light (that is, one pulse of laser irradiation: laser shot).
- Examples of the modified spot include a crack spot, a melting treatment spot, a refractive index change spot, or a mixture of at least one of these.
- the size and length of cracks to be generated are appropriately determined in consideration of the required cutting accuracy, required flatness of the cut surface, thickness, type, crystal orientation, etc. of the workpiece 1. Can be controlled.
- the modified spot can be formed as the modified region 7 along the planned cutting line 5.
- a metal substrate 11 formed on the surface 10a of the silicon substrate 10 was prepared as an object to be processed.
- the metal film 11 is constituted by forming a 20 ⁇ m thick Cr film on the surface 10 a of the silicon substrate 10 and forming a 50 ⁇ m thick Au film on the Cr film.
- the back surface 10b of the silicon substrate 10 is used as the laser light incident surface, and the laser light L0 having a wavelength of 1064 nm is condensed inside the silicon substrate 10 to form the line 5 to be cut.
- the modified region 7 was formed inside the silicon substrate 10 along the planned cutting line 5 by moving the condensing point P of the laser beam L0 along the line.
- the crack F that extends in the thickness direction of the silicon substrate 10 from the modified region 7 with the formation of the modified region 7 (that is, the formation of the modified region 7 without applying an external force to the silicon substrate 10).
- the irradiation conditions of the laser beam L0 were adjusted so that the cracks F) generated along with the laser beam L0 reached the surface 10a of the silicon substrate 10. In this case, as shown in FIG. 7B, the metal film 11 was not splashed.
- the back surface 10b of the silicon substrate 10 is used as the laser light incident surface, and the laser light L1 having a wavelength of 1342 nm is condensed inside the silicon substrate 10 to form the cutting line 5
- the modified region 7 was formed inside the silicon substrate 10 along the planned cutting line 5 by moving the condensing point P of the laser beam L1 along the line.
- the irradiation condition of the laser beam L1 was adjusted so that the crack F extending from the modified region 7 reached the surface 10a of the silicon substrate 10.
- the irradiation conditions of the laser beam L1 are the same as the irradiation conditions of the laser beam L0 described above, except that the wavelengths are different.
- a splash S was generated in the metal film 11.
- the back surface 10b of the silicon substrate 10 is used as the laser light incident surface, and the laser light L1 having a wavelength of 1342 nm is condensed inside the silicon substrate 10 to form the line 5 to be cut.
- the modified region 7 was formed inside the silicon substrate 10 along the planned cutting line 5 by moving the condensing point P of the laser beam L1 along the line.
- the irradiation condition of the laser beam L1 was adjusted so that the crack F extending from the modified region 7 did not reach the surface 10a of the silicon substrate 10 and was contained in the silicon substrate 10.
- the pulse energy of the laser beam L1 was made smaller than in the cases of (a) and (b) of FIG. In this case, as shown in FIG. 9B, the metal film 11 was not splashed.
- the back surface 10b of the silicon substrate 10 is used as the laser light incident surface, and the laser light L1 having a wavelength of 1342 nm is condensed inside the silicon substrate 10 to form the cutting line 5
- the first modified region 7a and the second modified region 7b were formed inside the silicon substrate 10 along the planned cutting line 5 by moving the condensing point P of the laser beam L1 along the line.
- the crack F does not reach the front surface 10a of the silicon substrate 10 only by forming the first modified region 7a, and the second modified region on the back surface 10b side of the silicon substrate 10 with respect to the first modified region 7a.
- the irradiation condition of the laser beam L1 was adjusted so that the crack F reached the surface 10a of the silicon substrate 10 when 7b was formed. In this case, as shown in FIG. 10B, a splash S was generated in the metal film 11.
- FIG. 11A and 11B show a case where the first modified region 7a and the second modified region 7b are formed inside the silicon substrate 10 under the conditions of FIGS. 10A and 10B. It is a figure which shows the photograph of this silicon substrate. More specifically, FIG. 11A is a diagram showing a photograph of a plane parallel to the planned cutting line of the silicon substrate 10 after cutting, and FIG. 11B is a diagram showing the silicon substrate 10 after cutting. It is a figure which shows the photograph of the surface 10a side (metal film 11). Referring to (b) of FIG. 11, it can be confirmed that a dark portion exists in the region surrounded by the alternate long and short dash line in the metal film 11. This is the splash S that becomes a problem.
- the crack F is larger from the modified region 7 in the thickness direction of the silicon substrate 10 than when the laser beam L0 having a wavelength of 1064 nm or less is used. Can be extended. Further, when the laser light L1 having a wavelength larger than 1064 nm, such as 1342 nm, is used, the modified region is deeper than the laser light incident surface of the silicon substrate 10 as compared with the case where the laser light L0 having a wavelength of 1064 nm or less is used. 7 can be formed.
- the laser beam L1 having a wavelength larger than 1064 nm has a higher transmittance with respect to silicon than the laser beam L0 having a wavelength of 1064 nm or less. Therefore, from the viewpoint of improving the processing efficiency by reducing the number of scans of the laser light L for one scheduled cutting line 5 (that is, the number of columns in which the modified region 7 is formed for one scheduled cutting line 5), Laser light L1 having a wavelength larger than 1064 nm may be used.
- the crack F is removed from the silicon substrate 10 using the laser beam L1 having a wavelength larger than 1064 nm.
- Splash S occurs in the metal film 11 when trying to reach the surface 10a.
- a functional element for example, a semiconductor operating layer formed by crystal growth, a light receiving element such as a photodiode, a light emitting element such as a laser diode, or a circuit is formed on the surface 10a of the silicon substrate 10 opposite to the laser light incident surface. If a splash S occurs when a circuit element or the like is formed, the characteristics of the functional element may be deteriorated.
- the splash S is generated on the surface 10a of the silicon substrate 10 when the laser light L1 having a wavelength larger than 1064 nm is used, and the laser light is applied to the crack F greatly extended from the formed modified region 7.
- L1 is condensed, which is considered to be caused by an increase in the influence of missing light (light that escapes to the surface 10a side of the silicon substrate 10 without contributing to the formation of the modified region 7 in the laser light L1). .
- the inventors of the present invention when forming the second modified region 7b in the cases of (a) and (b) of FIG.
- the second modified region 7b “the thickness direction of the silicon substrate 10 and the position where the condensing point P of the laser beam L1 is aligned when the first modified region 7a is formed” "Laser focusing point P of laser beam L1 is offset in a direction perpendicular to both of the extending directions of cutting line 5 (the direction perpendicular to the cross section of silicon substrate 10 in FIG. 10A)” It is referred to as “offset the condensing point P of the light L1”, and “distance to offset the condensing point P of the laser light L1” is referred to as “offset amount”.
- FIGS. 12A and 12B are views showing photographs of the silicon substrate 10 when the condensing point P of the laser beam L1 is not offset when forming the second modified region 7b. More specifically, FIG. 12A is a diagram showing a photograph of a plane parallel to the planned cutting line of the silicon substrate 10 after the formation of the first modified region 7a and the second modified region 7b. 12B is a diagram showing a photograph of a surface perpendicular to the planned cutting line of the silicon substrate 10 after the formation of the first modified region 7a and the second modified region 7b. Referring to (b) of FIG.
- FIGS. 13A and 13B are photographs of the silicon substrate 10 when the condensing point P of the laser beam L1 is offset when the second modified region 7b is formed (when the offset amount is 8 ⁇ m).
- FIG. 13A is a diagram showing a photograph of a plane parallel to the planned cutting line of the silicon substrate 10 after the formation of the first modified region 7a and the second modified region 7b.
- 13B is a view showing a photograph of a surface perpendicular to the planned cutting line of the silicon substrate 10 after the formation of the first modified region 7a and the second modified region 7b.
- FIG. 14 is a graph showing the relationship between the offset amount and the length of the crack F.
- the length of the crack F is the length of the crack F extending from the first modified region 7a to the surface 10a side of the silicon substrate 10.
- the condensing point P of the laser beam L1 may be offset or not offset (even when the offset amount is 0 ⁇ m). It can be confirmed that the length of the crack F extending from 7a to the surface 10a side of the silicon substrate 10 does not change.
- FIG. 15 is a graph showing the relationship between the offset amount and the number of splashes S.
- the number of splashes S is the number of splashes S (the number per 15 mm in length of the planned cutting line 5) generated in a region separated by 20 ⁇ m or more on both sides from the planned cutting line 5.
- the condensing point P of the laser beam L1 is offset when forming the second modified region 7b, the number of splashes S is reduced as compared with the case where the offset is not offset (when the offset amount is 0 ⁇ m). I can confirm that.
- the number of the splashes S generated in the regions separated by 20 ⁇ m or more on both sides from the scheduled cutting line 5 is counted particularly because the characteristics of the functional elements formed on the surface 10 a of the silicon substrate 10 are such splashes S. This is because it causes a problem of deterioration. Dicing streets (regions between adjacent functional elements) are often provided in regions within 20 ⁇ m on both sides of the planned cutting line 5, so that the splash S generated in the region causes a problem of deteriorating the characteristics of the functional devices. Unlikely.
- FIGS. 16A and 16B are photographs showing the silicon substrate 10 when the condensing point P of the laser beam L1 is offset when forming the second modified region 7b. More specifically, FIG. 16A is a diagram showing a photograph of a surface parallel to the cutting line 5 of the silicon substrate 10 after cutting, and FIG. 16B is a silicon substrate after cutting. 10 is a view showing a photograph of the surface 10a side (metal film 11) of FIG. Referring to FIG. 16A, the first modified region 7a and the second modified region that have already been formed by offsetting the condensing point P of the laser beam L1 when forming the second modified region 7b.
- the laser beam L1 is suppressed from being focused on the crack F extending from the region 7b, and the second modified region 7b is formed to be large. That is, it is considered that the ratio of the laser beam L1 that contributes to the formation of the second modified region 7b increases and the ratio of the missing light decreases. Referring to FIG. 16B, it can be confirmed that the splash S is not generated.
- FIG. 11 (a) showing a photograph of the silicon substrate 10 when the condensing point P of the laser beam L1 is not offset when forming the second modified region 7b
- the second modification is made. It can be confirmed that the mass region 7b is formed small. This is considered to be due to the fact that the laser beam L1 is condensed on the crack F extending from the first modified region 7a and the second modified region 7b that have been formed, and the amount of light passing through is increased.
- the laser light irradiation conditions other than the offset amount are the same.
- FIG. 17 are photographs showing the surface 10a side (metal film 11) of the silicon substrate 10 after cutting. More specifically, FIG. 17A shows the case where the offset amount is 2 ⁇ m, FIG. 17B shows the case where the offset amount is 4 ⁇ m, and FIG. 17C shows the case where the offset amount is 6 ⁇ m. Is the case. In each case, the irradiation conditions of the laser light other than the offset amount are the same. Referring to FIGS. 17A and 17B, when forming the second modified region 7b, the splash S is generated on the side opposite to the side where the condensing point P of the laser beam L1 is offset.
- the splash S is further away from the planned cutting line 5 as the offset amount is increased.
- the region where the splash S is generated decreases as the offset amount increases. Even in the cases of FIGS. 17A and 17B, the region where the splash S is generated compared to the case where the condensing point P of the laser beam L1 is not offset when forming the second modified region 7b. Is decreasing.
- FIG. 18A is a diagram showing a surface perpendicular to the cutting line 5 of the silicon substrate 10 when the offset amount is small
- FIG. 18B is a diagram of the silicon substrate 10 when the offset amount is large. It is a figure which shows a surface perpendicular
- the second laser beam L1 of the crack F extending from the first modified region 7a and the second modified region 7b that has been formed.
- a portion F1 to which the condensing point P2 is matched is inclined at a small angle with respect to the thickness direction D of the silicon substrate 10. Therefore, the incident angle ⁇ of the laser beam L1 with respect to the portion F1 increases. Therefore, the light L2 that has not contributed to the formation of the second modified region 7b in the laser light L1 offsets the condensing point P of the laser light L1 at a small angle with respect to the thickness direction D of the silicon substrate 10. Proceeds to the opposite side to the side that has been made.
- the optical path length of the escape light L2 reaching the surface 10a of the silicon substrate 10 is shortened, and the amount of absorption and the degree of scattering of the escape light L2 in the silicon substrate 10 are reduced. Note that “small”, “large”, “short”, and the like are used in comparison with the case of FIG.
- the splash S is generated on the side opposite to the side where the condensing point P of the laser beam L ⁇ b> 1 is offset, It is considered that the splash S is further away from the planned cutting line 5 as the offset amount is increased, and the generation region of the splash S is reduced as the offset amount is increased.
- a semiconductor chip manufacturing method using the laser processing method of the embodiment will be described.
- a workpiece 1 including a silicon substrate 10 having a functional element layer 15 formed on a surface 10 a is prepared, and a workpiece to be processed on a protective film 22 held by a ring-shaped holding member 20.
- the functional element layer 15 side of the object 1 is attached.
- the functional element layer 15 includes a plurality of functional elements arranged in a matrix.
- the first modified region 7a is formed along each of the scheduled cutting lines 5 set in a lattice shape so as to pass between adjacent functional elements. More specifically, the back surface 10b of the silicon substrate 10 is used as the laser light incident surface, and the laser light L1 having a wavelength larger than 1064 nm is condensed on the silicon substrate 10 so that the surface 10a of the silicon substrate 10 and the laser light L The first focusing point P1 of the laser light L1 is moved along the planned cutting line 5 while maintaining the distance from the first focusing point P1 at the first distance, so that the first along the planned cutting line 5 The modified region 7a is formed (first step).
- the distance by which the first condensing point P1 of the laser light L1 is offset in the direction perpendicular to both the thickness direction of the silicon substrate 10 and the extending direction of the planned cutting line 5 is set to 0.
- the first condensing point P1 of the laser light L1 is moved along the scheduled cutting line 5 while maintaining the above. That is, when viewed from the thickness direction of the silicon substrate 10, the state of the laser beam L along the planned cutting line 5 is maintained while maintaining the state where the first condensing point P ⁇ b> 1 of the laser light L is located on the planned cutting line 5.
- the first condensing point P1 is moved.
- the first modified region 7a is formed inside the silicon substrate 10 along the planned cutting line 5 in a state of being located on the planned cutting line 5 when viewed from the thickness direction of the silicon substrate 10. .
- the second modified region 7b is formed along each of the planned cutting lines 5 set in a lattice shape so as to pass between adjacent functional elements. More specifically, the laser beam L1 having a wavelength larger than 1064 nm is condensed on the silicon substrate 10 using the back surface 10b of the silicon substrate 10 as the laser beam incident surface, and the surface 10a of the silicon substrate 10 and the laser beam L1 are collected. While maintaining the distance with the 2nd condensing point P2 to the 2nd distance larger than the 1st distance, and offsetting the 2nd condensing point P2 of laser light L1, laser light along cutting scheduled line 5 is carried out.
- the second modified region 7b is formed along the planned cutting line 5 (second step). That is, when viewed from the thickness direction of the silicon substrate 10, the second condensing point P ⁇ b> 2 of the laser beam L is maintained along the planned cutting line 5 while maintaining a state of being separated from the planned cutting line 5 by a predetermined distance (cutting). The second condensing point P2 of the laser light L is moved (parallel to the planned line 5). Thus, the second modified region 7b is located along the planned cutting line 5 (parallel to the planned cutting line 5) in a state of being separated from the planned cutting line 5 by a predetermined distance when viewed from the thickness direction of the silicon substrate 10. A) formed inside the silicon substrate 10;
- the crack F extended in the thickness direction of the silicon substrate 10 from the first modified region 7a and the second modified region 7b reaches the surface 10a of the silicon substrate 10, and the functional element layer 15 is cut for each functional element. Is done.
- the thickness of the silicon substrate 10 is 775 ⁇ m
- the first modified region 7 a and the second modified region 7 b are formed in a region from the surface 10 a of the silicon substrate 10 to a depth of 160 ⁇ m.
- the above first step and second step are performed by the laser processing apparatus 100 described above. That is, the support 107 supports the workpiece 1.
- the laser light source 101 emits laser light L1 having a wavelength larger than 1064 nm.
- a condensing lens (condensing optical system) 105 is a laser beam emitted from the laser light source 101 onto the workpiece 1 supported by the support 107 so that the back surface 10b of the silicon substrate 10 becomes a laser beam incident surface. L1 is condensed.
- the stage control unit (control unit) 115 and the laser light source control unit (control unit) 102 operate the support base 107 and the laser light source 101, respectively, so that the first process and the second process described above are performed. Control.
- the movement of the first condensing point P1 and the second condensing point P2 of the laser light L with respect to the scheduled cutting line 5 may be realized by the operation on the condensing lens 105 side, It may be realized by both operations on the optical lens 105 side.
- the workpiece 1 is thinned to a predetermined thickness by polishing the back surface 10 b of the silicon substrate 10.
- the crack F extended in the thickness direction of the silicon substrate 10 from the first modified region 7a and the second modified region 7b reaches the back surface 10b of the silicon substrate 10, and the workpiece 1 is cut for each functional element. Is done.
- the silicon substrate 10 is thinned to a thickness of 200 ⁇ m.
- the expansion film 23 is attached to the back surface 10 b of the silicon substrate 10 and the holding member 20.
- the protective film 22 is removed.
- the workpiece 1 cut for each functional element 15 a that is, the plurality of semiconductor chips 1 ⁇ / b> A are separated from each other.
- the adhesive film 23 is reduced in adhesive force by irradiating the extended film 23 with ultraviolet rays, and each semiconductor chip 1A is picked up.
- the silicon substrate 10 When the back surface 10b of the silicon substrate 10 is polished, as shown in FIGS. 25A and 25B, the silicon substrate is left so that the first modified region 7a and the second modified region 7b remain. 10 may be polished, and as shown in FIGS. 26 (a) and 26 (b), the silicon substrate 10 may have a first modified region 7a and no second modified region 7b. The back surface 10b of the silicon substrate 10 may be polished, and as shown in FIGS. 27A and 27B, the back surface of the silicon substrate 10 is not left so that the first modified region 7a and the second modified region 7b do not remain. 10b may be polished.
- the laser light L1 having a wavelength larger than 1064 nm is used.
- the first modified region 7a and the second modified region 7b are accompanied by the formation of the first modified region 7a and the second modified region 7b.
- the crack F can be greatly extended in the thickness direction of the silicon substrate 10.
- the second focusing point P2 of the laser beam L1 is offset. Therefore, it can suppress that the splash S arises in the surface 10a of the workpiece 1 on the opposite side to a laser beam incident surface. Therefore, according to the laser processing method and the laser processing apparatus 100 of the embodiment, the processing efficiency can be improved while suppressing the occurrence of the splash S.
- the first modified region 7a and the second modified region 7b form silicon from the first modified region 7a and the second modified region 7b.
- the crack F can be extended more in the thickness direction of the substrate 10.
- the laser beam L1 having a wavelength of 1342 ⁇ m can extend the crack F more greatly.
- the offset amount for offsetting the second condensing point P2 of the laser beam L1 when forming the second modified region 7b is set to 24 ⁇ m or less, the gap between the first modified region 7a and the second modified region 7b is set.
- the crack F is securely connected, and the first modified region 7a and the second modified region 7b are cracked in the thickness direction of the silicon substrate 10 with the formation of the first modified region 7a and the second modified region 7b. F can be extended reliably.
- the offset amount is 4 ⁇ m or more and 18 ⁇ m or less, the crack F is more reliably connected between the first modified region 7a and the second modified region 7b, and the first modified region 7a and the second modified region are connected.
- the crack F can be more reliably extended from the region 7b in the thickness direction of the silicon substrate 10.
- the offset amount is 6 ⁇ m or more and 16 ⁇ m or less, the suppression of the occurrence of the splash S and the connection and extension of the crack F can be realized in a well-balanced manner.
- the thickness direction of the silicon substrate 10 and the extension of the planned cutting line 5 with respect to the planned cutting line 5 are extended.
- the first condensing point P1 of the laser light L1 is moved along the planned cutting line 5 while maintaining the distance for offsetting the first condensing point P1 of the laser light L1 in the direction perpendicular to both directions.
- the crack F extending from the first modified region 7 a to the surface 10 a side of the silicon substrate 10 can be aligned on the planned cutting line 5.
- a laser is formed on one side in a direction perpendicular to both the thickness direction of the silicon substrate 10 and the extending direction of the planned cutting line 5 with respect to the planned cutting line 5.
- the first condensing point P1 of the light L1 is offset and the second modified region 7b is formed, the thickness direction of the silicon substrate 10 and the extending direction of the planned cutting line 5 are changed with respect to the planned cutting line 5.
- the second condensing point P2 of the laser light L1 may be offset to the other side in the direction perpendicular to both directions.
- the first condensing point P1 of the laser light L is separated from the planned cutting line 5 to one side by a predetermined distance.
- the first focused point P1 of the laser beam L is moved along the planned cutting line 5 (in parallel with the planned cutting line 5) while forming the second modified region 7b while maintaining the above-described state.
- the second condensing point P ⁇ b> 2 of the laser beam L is maintained along the planned cutting line 5 while maintaining a state where it is separated from the planned cutting line 5 to the other side by a predetermined distance (You may move the 2nd condensing point P2 of the laser beam L (parallel to the cutting scheduled line 5).
- the first modified region 7a is formed along the planned cutting line 5 (scheduled to be cut) in a state where it is separated from the planned cutting line 5 to one side by a predetermined distance when viewed from the thickness direction of the silicon substrate 10.
- the second modified region 7b is formed in the silicon substrate 10 (in parallel with the line 5), and the second modified region 7b is separated from the planned cutting line 5 to the other side by a predetermined distance when viewed from the thickness direction of the silicon substrate 10. Thus, it is formed inside the silicon substrate 10 along the planned cutting line 5 (in parallel with the planned cutting line 5). In this case, the first modified region 7a and the second modified region 7b can be formed in a well-balanced manner on one side and the other side with respect to the planned cutting line 5.
- the first modified region 7a forming step (first step) is performed on all the planned cutting lines 5 set in a lattice shape, and then the lattice shape is set.
- the present invention is not limited to an example in which the formation process (second process) of the second modified region 7b is performed on all the planned cutting lines 5.
- the step of forming the first modified region 7a (first step) and the step of forming the second modified region 7b (second step) may be performed as follows.
- the formation process (first process) of the first modified region 7a is performed on the planned cutting lines 5 extending in the first direction among all the planned cutting lines 5 set in a lattice shape, and then Then, the process of forming the second modified region 7b (second process) is performed on the planned cutting line 5 extending in the first direction. Subsequently, the first modified region 7a is formed on the planned cutting line 5 extending in the second direction (the direction perpendicular to the first direction) among all the planned cutting lines 5 set in a lattice shape ( The first step) is performed, and then the second modified region 7b forming step (second step) is performed on the planned cutting line 5 extending in the second direction.
- region 7a is implemented for every one planned cutting line 5 with respect to the multiple scheduled cutting line 5, and after that, the 2nd modified area 7b
- the forming step (second step) may be performed. That is, the process of forming the first modified region 7a (first process) and the process of forming the second modified region 7b (second process) are performed on one cutting planned line 5, A step of forming the first modified region 7a (first step) and a step of forming the second modified region 7b (second step) may be performed on one line 5 to be cut.
- the back surface 10b of the silicon substrate 10 may not be polished after the first modified region 7a forming step (first step) and the second modified region 7b forming step (second step).
- first step first step
- second step second step
- the workpiece 1 can be turned into the planned cutting line 5 without polishing the back surface 10b of the silicon substrate 10. Can be cut along.
- DESCRIPTION OF SYMBOLS 1 ... Processing target object, 5 ... Planned cutting line, 7a ... 1st modified region, 7b ... 2nd modified region, 10 ... Silicon substrate, 10a ... Front surface, 10b ... Back surface, 15a ... Functional element, 100 ... Laser processing Device: 101 ... Laser light source, 102 ... Laser light source control unit (control unit), 105 ... Condensing lens (condensing optical system), 107 ... Support base, 115 ... Stage control unit (control unit), L1 ... Laser light , P1... First focusing point, P2.
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Abstract
Description
Claims (6)
- 表面に複数の機能素子が形成されたシリコン基板を含む加工対象物に、前記シリコン基板の裏面をレーザ光入射面として、1064nmよりも大きい波長を有するレーザ光を集光させて、前記シリコン基板の前記表面と前記レーザ光の第1集光点との距離を第1距離に維持しつつ、隣り合う前記機能素子の間を通るように設定された切断予定ラインに沿って前記レーザ光の前記第1集光点を移動させることで、前記切断予定ラインに沿って第1改質領域を形成する第1工程と、
前記第1工程の後に、前記加工対象物に、前記シリコン基板の前記裏面をレーザ光入射面として、1064nmよりも大きい波長を有する前記レーザ光を集光させて、前記シリコン基板の前記表面と前記レーザ光の第2集光点との距離を前記第1距離よりも大きい第2距離に維持しつつ、且つ、前記レーザ光の前記第1集光点を合わせた位置に対して、前記シリコン基板の厚さ方向及び前記切断予定ラインの延在方向の両方向に垂直な方向に前記レーザ光の前記第2集光点をオフセットさせつつ、前記切断予定ラインに沿って前記レーザ光の前記第2集光点を移動させることで、前記切断予定ラインに沿って第2改質領域を形成する第2工程と、を含む、レーザ加工方法。 - 前記レーザ光は、1099μm以上1342μm以下の波長を有する、請求項1記載のレーザ加工方法。
- 前記レーザ光の前記第1集光点を合わせた位置に対して、前記シリコン基板の前記厚さ方向及び前記切断予定ラインの前記延在方向の両方向に垂直な前記方向に前記レーザ光の前記第2集光点をオフセットさせる距離は、24μm以下である、請求項1又は2記載のレーザ加工方法。
- 前記レーザ光の前記第1集光点を合わせた位置に対して、前記シリコン基板の前記厚さ方向及び前記切断予定ラインの前記延在方向の両方向に垂直な前記方向に前記レーザ光の前記第2集光点をオフセットさせる前記距離は、4μm以上18μm以下である、請求項3記載のレーザ加工方法。
- 前記第1工程では、前記切断予定ラインに対して、前記シリコン基板の前記厚さ方向及び前記切断予定ラインの前記延在方向の両方向に垂直な前記方向に前記レーザ光の前記第1集光点をオフセットさせる距離を0に維持しつつ、前記切断予定ラインに沿って前記レーザ光の前記第1集光点を移動させる、請求項1~4のいずれか一項記載のレーザ加工方法。
- 表面に複数の機能素子が形成されたシリコン基板を含む加工対象物を支持する支持台と、
1064nmよりも大きい波長を有するレーザ光を出射するレーザ光源と、
前記シリコン基板の裏面がレーザ光入射面となるように前記支持台に支持された前記加工対象物に、前記レーザ光源から出射された前記レーザ光を集光する集光光学系と、
前記支持台、前記レーザ光源及び前記集光光学系の少なくとも1つの動作を制御する制御部と、を備え、
前記制御部は、前記シリコン基板の前記表面と前記レーザ光の第1集光点との距離を第1距離に維持しつつ、隣り合う前記機能素子の間を通るように設定された切断予定ラインに沿って前記レーザ光の前記第1集光点を移動させ、その後に、前記シリコン基板の前記表面と前記レーザ光の第2集光点との距離を前記第1距離よりも大きい第2距離に維持しつつ、且つ、前記レーザ光の前記第1集光点を合わせた位置に対して、前記シリコン基板の厚さ方向及び前記切断予定ラインの延在方向の両方向に垂直な方向に前記レーザ光の前記第2集光点をオフセットさせつつ、前記切断予定ラインに沿って前記レーザ光の前記第2集光点を移動させる、レーザ加工装置。
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Publication number | Publication date |
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JP6605277B2 (ja) | 2019-11-13 |
JP2017069307A (ja) | 2017-04-06 |
TWI708649B (zh) | 2020-11-01 |
CN108093626A (zh) | 2018-05-29 |
DE112016004420T5 (de) | 2018-07-05 |
CN108093626B (zh) | 2020-07-03 |
KR20180058760A (ko) | 2018-06-01 |
TW201713446A (zh) | 2017-04-16 |
KR102586503B1 (ko) | 2023-10-11 |
US20180272465A1 (en) | 2018-09-27 |
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