WO2017054682A1

WO2017054682A1 - Film thickness detection apparatus

Info

Publication number: WO2017054682A1
Application number: PCT/CN2016/099940
Authority: WO
Inventors: 戚务昌; 邓娟
Original assignee: 威海华菱光电股份有限公司
Priority date: 2015-09-30
Filing date: 2016-09-23
Publication date: 2017-04-06
Also published as: CN105136012A

Abstract

A film thickness detection apparatus. The apparatus comprises: a power source, a common electrode (12), at least one detection electrode (22) and a detection circuit (25), wherein the power source is used to provide an electrical signal; the common electrode (12) is electrically connected to the power source; various detection electrodes (22) and the common electrode (12) are opposite and arranged at intervals in a first direction, the intervals between the common electrode (12) and the various detection electrodes (22) constitute a transmission channel of a film to be measured, the first direction is perpendicular to a first plane, and the first plane is parallel to a movement direction of the film to be measured; and the detection circuit (25) is electrically connected to the detection electrode (22), and is used to detect an induced electrical signal of the detection electrode (22). The detection apparatus can measure to obtain the thickness of a film to be measured without the need that a mechanical apparatus leads an electrode to generate displacement, is lighter and convenient to use, and can detect the thickness of more objects.

Description

膜厚的检测装置Film thickness detecting device

技术领域Technical field

本申请涉及厚度检测的技术领域，具体而言，涉及一种膜厚的检测装置。The present application relates to the technical field of thickness detection, and in particular to a film thickness detecting device.

背景技术Background technique

薄片状物品，如纸张、票据、塑料待测膜、纺织物品等的在线连续厚度测量，在其产品的生产、检测、处理、回收等过程中处于越来越重要的地位。当前，待测膜厚度的检测技术要包括使用霍尔器件、反射型超声波检测、透射型超声波检测、电磁感应式检测、涡流式检测等技术。但这些技术对应的检测装置体积较大，成本较高，不利于这些技术的应用。Online continuous thickness measurement of flaky items, such as paper, bills, plastic film to be tested, textile articles, etc., is playing an increasingly important role in the production, testing, processing, and recycling of products. At present, the detection technology of the film thickness to be tested should include the use of Hall devices, reflective ultrasonic detection, transmission type ultrasonic detection, electromagnetic induction detection, eddy current detection and the like. However, the detection devices corresponding to these technologies are large in size and high in cost, which is not conducive to the application of these technologies.

近年来，通过电极间的静电感应进行待测膜厚度的检测技术在不断研究探索之中，例如公开号为CN210302446Y的文件公开了一种电容式纸厚传感器，其主要是将电容器的容量变化转化成振荡频率的变化，再通过频压转换模块将频率的变化转换成电压的变化。公开号为CN103363887A的文件也公开了一种材料厚度的检测方法，利用平板电容的极板作为厚度检测的敏感器件，实测对象的厚度变化引起的电容活动极板产生位移，导致平板电容器的容量发生变化。In recent years, the detection technology of the film thickness to be tested by electrostatic induction between electrodes has been continuously researched and explored. For example, the document disclosed in CN210302446Y discloses a capacitive paper thickness sensor, which mainly converts the capacitance change of the capacitor into The change of the oscillation frequency is converted into a voltage change by the frequency conversion module. The document disclosed in CN103363887A also discloses a method for detecting the thickness of a material. The plate of the plate capacitor is used as a sensitive device for thickness detection, and the displacement of the movable plate caused by the thickness variation of the measured object causes displacement of the plate capacitor. Variety.

上述这些通过电极间的静电感应的检测待测膜厚度的技术在一定程度上减小了检测装置的体积，但仍需要传动机构，因此与检测设备的小型化发展还不相符。The above-mentioned techniques for detecting the thickness of the film to be tested by electrostatic induction between the electrodes reduce the volume of the detecting device to a certain extent, but still require a transmission mechanism, and thus are not in conformity with the miniaturization of the detecting device.

发明内容Summary of the invention

本申请旨在提供一种膜厚的检测装置，以解决现有技术中的检测装置较复杂的问题。The present application aims to provide a film thickness detecting device to solve the problem of the complicated detecting device in the prior art.

为了实现上述目的，根据本申请的一个方面，提供了一种膜厚的检测装置，该检测装置包括：电源、公共电极、至少一个检测电极与检测电路。其中，电源用于提供电信号；公共电极与上述电源电连接；各检测电极与上述公共电极在第一方向上相对且间隔设置，上述公共电极与各上述检测电极之间的间隔构成待测膜的传输通道，上述第一方向与第一平面垂直，上述第一平面与上述待测膜的移动方向平行；检测电路与上述检测电极电连接，用于检测上述检测电极的感应电信号。In order to achieve the above object, according to an aspect of the present application, a film thickness detecting device is provided, the detecting device comprising: a power source, a common electrode, at least one detecting electrode, and a detecting circuit. The power source is used to provide an electrical signal; the common electrode is electrically connected to the power source; the detecting electrodes and the common electrode are opposite to each other in a first direction, and the interval between the common electrode and each of the detecting electrodes constitutes a film to be tested. The first channel is perpendicular to the first plane, the first plane is parallel to the moving direction of the film to be tested, and the detecting circuit is electrically connected to the detecting electrode for detecting the induced electrical signal of the detecting electrode.

进一步地，上述检测装置还包括：第一基板与第二基板，其中，第二基板与上述第一基板在上述第一方向上间隔设置，上述第一基板的第一表面朝向上述第二基板的第一表面，且上述第一基板的第一表面与上述第二基板的第一表面均平行于上述第一平面，上述公共电极设置在上述第一基板的第一表面上，上述检测电极设置在上述第二基板的第一表面上，上述检测电路设置在上述第二基板的第二表面。Further, the detecting device further includes: a first substrate and a second substrate, wherein the second substrate and the first substrate are spaced apart from each other in the first direction, and the first surface of the first substrate faces the second substrate a first surface, wherein the first surface of the first substrate and the first surface of the second substrate are both parallel to the first plane, the common electrode is disposed on the first surface of the first substrate, and the detecting electrode is disposed at On the first surface of the second substrate, the above The detecting circuit is disposed on the second surface of the second substrate.

进一步地，上述检测装置还包括：第一屏蔽电极与第二屏蔽电极，第一屏蔽电极设置在上述第一基板的第一表面上，并且，围绕上述公共电极设置；第二屏蔽电极设置在上述第二基板的第一表面上，并且围绕上述检测电极设置。Further, the detecting device further includes: a first shielding electrode and a second shielding electrode, wherein the first shielding electrode is disposed on the first surface of the first substrate, and is disposed around the common electrode; the second shielding electrode is disposed on the The first surface of the second substrate is disposed around the detecting electrode.

进一步地，上述检测装置中包括N个检测电极对，且N个上述检测电极对沿第二方向间隔设置，上述第二方向与上述待测膜的移动方向垂直，上述第二方向与上述第一方向垂直，且每个上述检测电极对包括沿第三方向间隔设置的至少2个检测电极，上述第三方向与上述第一方向垂直，且上述第三方向为上述待测膜的移动方向，上述N≥2。Further, the detecting device includes N detecting electrode pairs, and the N detecting electrodes are spaced apart in the second direction, the second direction is perpendicular to the moving direction of the film to be tested, and the second direction is the first The direction is vertical, and each of the detecting electrode pairs includes at least two detecting electrodes spaced apart in the third direction, the third direction is perpendicular to the first direction, and the third direction is a moving direction of the film to be tested, N ≥ 2.

进一步地，每个上述检测电极对中的相邻2个上述检测电极的间隔小于每个上述检测电极在上述第三方向上的长度。Further, an interval between two adjacent ones of the detection electrode pairs is smaller than a length of each of the detection electrodes in the third direction.

进一步地，上述检测装置还包括：输入部与输入输出部，且输入部用于将上述电源的电信号输入至上述公共电极，上述输入部设置在上述第一基板的第二表面；输入输出部用于向上述检测电路提供电压，且将上述检测电路的电信号输出，上述输入输出部设置在上述第二基板的第二表面。Further, the detecting device further includes: an input unit and an input/output unit, wherein the input unit is configured to input an electrical signal of the power source to the common electrode, the input unit is disposed on a second surface of the first substrate; and the input/output unit And a voltage is supplied to the detection circuit, and an electrical signal of the detection circuit is output, and the input/output portion is disposed on a second surface of the second substrate.

进一步地，上述检测电路包括：采样单元、阻抗匹配单元与放大单元，采样单元的输入端与上述检测电极电连接；阻抗匹配单元一端与上述采样单元的输出端电连接；放大单元一端与上述阻抗匹配单元的另一端电连接，另一端与上述输入输出部电连接。Further, the detecting circuit includes: a sampling unit, an impedance matching unit and an amplifying unit, wherein an input end of the sampling unit is electrically connected to the detecting electrode; one end of the impedance matching unit is electrically connected to an output end of the sampling unit; and one end of the amplifying unit and the impedance The other end of the matching unit is electrically connected, and the other end is electrically connected to the input and output unit.

进一步地，当上述检测电路还包括输出单元，上述输出单元设置在上述放大单元与上述输入输出部之间。Further, when the detecting circuit further includes an output unit, the output unit is disposed between the amplifying unit and the input and output unit.

进一步地，所有上述检测电极围成的区域在第一平面的投影面积小于或等于上述公共电极的第一表面的面积。Further, a projected area of the area surrounded by all the detecting electrodes in the first plane is smaller than or equal to an area of the first surface of the common electrode.

进一步地，当上述检测装置包括一个检测电极时，上述检测电极在第二方向上的总长度大于等于上述待测膜的长度；当上述检测装置包括沿上述第二方向依次设置的M个上述检测电极对时，第一个上述检测电极对与第M个上述检测电极对在上述第二方向之间的距离大于等于上述待测膜的长度，上述第二方向与上述待测膜的移动方向垂直，上述M≥2。Further, when the detecting device includes a detecting electrode, the total length of the detecting electrode in the second direction is greater than or equal to the length of the film to be tested; and when the detecting device includes M detecting devices sequentially disposed along the second direction In the electrode pair, the distance between the first detecting electrode pair and the Mth detecting electrode pair in the second direction is greater than or equal to the length of the film to be tested, and the second direction is perpendicular to the moving direction of the film to be tested. , above M ≥ 2.

应用本申请的技术方案，无需机械装置引导电极产生位移就能够测量得到待测膜的厚度，更加轻便，方便使用，能够应用到很多领域中。By applying the technical solution of the present application, the thickness of the film to be tested can be measured without the mechanical device guiding the displacement of the electrode, which is lighter and more convenient to use, and can be applied to many fields.

附图说明DRAWINGS

构成本申请的一部分的说明书附图用来提供对本申请的进一步理解，本申请的示意性实施例及其说明用于解释本申请，并不构成对本申请的不当限定。在附图中：The accompanying drawings, which are incorporated in the claims of the claims In the drawing:

图1示出了本申请一种典型实施方式提出的膜厚的检测装置的侧视图；1 is a side view showing a film thickness detecting device proposed by an exemplary embodiment of the present application;

图2示出了一种实施例提供的公共电极的第一表面的俯视图； 2 shows a top view of a first surface of a common electrode provided by an embodiment;

图3示出了一种实施例提供的检测电极的第一表面的俯视图；3 is a top plan view showing a first surface of a detecting electrode provided by an embodiment;

图4示出了一种实施例提供的检测电路的结构图；4 is a structural diagram of a detection circuit provided by an embodiment;

图5示出了一种实施例提供的膜厚的检测装置的剖面结构示意图；FIG. 5 is a cross-sectional structural view showing a film thickness detecting device according to an embodiment;

图6示出了另一种实施例提供的膜厚的检测装置的剖面结构示意图；6 is a cross-sectional structural view showing a film thickness detecting device provided by another embodiment;

图7示出了一种实施例提供的膜厚的检测装置的电路原理示意图；FIG. 7 is a schematic diagram showing the circuit principle of a film thickness detecting device provided by an embodiment; FIG.

图8示出了一种实施例提供的膜厚的检测装置的工作时序示意图；以及FIG. 8 is a schematic view showing the operation timing of a film thickness detecting device provided by an embodiment;

图9示出了一种实施例中的输出信号SIG、控制信号SP及时钟信号CLK的时序图。FIG. 9 shows a timing diagram of the output signal SIG, the control signal SP, and the clock signal CLK in one embodiment.

具体实施方式detailed description

应该指出，以下详细说明都是例示性的，旨在对本申请提供进一步的说明。除非另有指明，本文使用的所有技术和科学术语具有与本申请所属技术领域的普通技术人员通常理解的相同含义。It should be noted that the following detailed description is illustrative and is intended to provide a further description of the application. All technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, unless otherwise indicated.

需要注意的是，这里所使用的术语仅是为了描述具体实施方式，而非意图限制根据本申请的示例性实施方式。如在这里所使用的，除非上下文另外明确指出，否则单数形式也意图包括复数形式，此外，还应当理解的是，当在本说明书中使用术语“包含”和/或“包括”时，其指明存在特征、步骤、操作、器件、组件和/或它们的组合。It is to be noted that the terminology used herein is for the purpose of describing particular embodiments, and is not intended to limit the exemplary embodiments. As used herein, the singular " " " " " " There are features, steps, operations, devices, components, and/or combinations thereof.

正如背景技术所介绍的，现有的检测装置需要引导产生位移的机械装置，为了解决如上的技术问题，本申请提出了一种膜厚的检测装置。As described in the background art, the prior art detecting device needs to guide a mechanical device that generates displacement. In order to solve the above technical problem, the present application proposes a film thickness detecting device.

本申请的一种典型的是实施方式中，提供了一种膜厚的检测装置，如图1所示(该图中未画出电源)，该检测装置包括电源、公共电极12、至少一个检测电极22与检测电路25。其中，电源用于提供电信号；公共电极12与上述电源电连接；各检测电极22与公共电极12在第一方向上相对且间隔设置，上述公共电极12与对应的检测电极22之间的间隔的大小相同，且间隔构成待测膜的传输通道，上述第一方向与第一平面垂直，上述第一平面与上述待测膜的移动方向平行；检测电路25与上述检测电极22电连接，用于检测上述检测电极22的感应电信号，进而检测出待测膜的厚度。该检测装置中的公共电极12与检测电极22均为导电电极，由导电材料形成。In a typical embodiment of the present application, a film thickness detecting device is provided, as shown in FIG. 1 (the power source is not shown in the drawing), the detecting device includes a power source, a common electrode 12, and at least one detection. The electrode 22 is connected to the detection circuit 25. The power source is used to provide an electrical signal; the common electrode 12 is electrically connected to the power source; the detecting electrodes 22 and the common electrode 12 are opposite and spaced apart in the first direction, and the interval between the common electrode 12 and the corresponding detecting electrode 22 is The detecting device 25 is electrically connected to the detecting electrode 22, and the first plane is perpendicular to the first plane, and the first plane is parallel to the moving direction of the film to be tested; the detecting circuit 25 is electrically connected to the detecting electrode 22, and the spacing is the same as the transmission channel of the film to be tested. The induced electrical signal of the detecting electrode 22 is detected to detect the thickness of the film to be tested. The common electrode 12 and the detecting electrode 22 in the detecting device are both conductive electrodes and are formed of a conductive material.

该检测装置中，公共电极12与检测电极22都是平面电极，公共电极12与检测电极22相对且间隔设置，二者之间形成类似平板电容结构，并且二者之间没有固定的介质填充而是形成一个传输通道。当电源向公共电极12提供电信号后，公共电极12带电荷，检测电极22上感应出电荷。In the detecting device, the common electrode 12 and the detecting electrode 22 are both planar electrodes, and the common electrode 12 is opposite to and spaced apart from the detecting electrode 22, and a flat-plate capacitor structure is formed therebetween, and there is no fixed medium filling between the two. Is to form a transmission channel. When the power source supplies an electrical signal to the common electrode 12, the common electrode 12 is charged, and the charge is detected on the detecting electrode 22.

检测电极22感应出电荷的多少取决于于两个电极的面积、两个电极相隔的距离、公共电极12上所携带的电荷量以及两个电极之间的介电常数。在结构一定的情况下，检测电极22上感应出的电荷只与两个电极之间介电常数有关。当待测膜经过传输通道时，改变了两个电极间的介质的介电常数，使检测电极22上感应的电荷的数量也随之发生变化，待测膜的厚度不同，两个电极间的介电常数也不相同，进而检测电极22上感应的电荷也不相同，因此通过检测极板上感应电信号的多少可以计算出待测膜的厚度。The amount of charge induced by the detecting electrode 22 depends on the area of the two electrodes, the distance between the two electrodes, the amount of charge carried on the common electrode 12, and the dielectric constant between the two electrodes. In the case where the structure is constant, the charge induced on the detecting electrode 22 is only related to the dielectric constant between the two electrodes. When the film to be tested passes through the transmission channel, two electric lights are changed. The dielectric constant of the dielectric between the electrodes causes the amount of charge induced on the detecting electrode 22 to change accordingly. The thickness of the film to be tested is different, and the dielectric constant between the two electrodes is also different, and the sensing electrode 22 is induced. The charge is also different, so the thickness of the film to be tested can be calculated by detecting the amount of induced electrical signals on the plate.

该检测装置无需机械装置引导电极产生位移就能够测量得到待测膜的厚度，更加轻便，方便使用，能够应用到很多领域中。The detecting device can measure the thickness of the film to be tested without the mechanical device guiding the displacement of the electrode, is lighter and more convenient to use, and can be applied to many fields.

本申请的一种实施例中，上述公共电极12包括间隔设置的多个公共电极部，本领域技术人员可以根据实际情况设置一定数目的公共电极部。In an embodiment of the present application, the common electrode 12 includes a plurality of common electrode portions disposed at intervals, and a person skilled in the art may set a certain number of common electrode portions according to actual conditions.

本申请的一种实施例中，上述检测装置中包含一个公共电极12。In an embodiment of the present application, the detecting device includes a common electrode 12.

本申请的另一个实施例中，如图1所示，上述检测装置还包括：第一基板11与第二基板21。其中，第二基板21与第一基板11在上述第一方向上间隔设置，上述第一基板11的第一表面朝向上述第二基板21的第一表面，且上述第一基板11的第一表面与上述第二基板21的第一表面均平行于上述第一平面，上述公共电极12设置在上述第一基板11的第一表面上，上述检测电极22设置在上述第二基板21的第一表面上，上述检测电路25设置在上述第二基板21的第二表面。In another embodiment of the present application, as shown in FIG. 1, the detecting device further includes: a first substrate 11 and a second substrate 21. The second substrate 21 and the first substrate 11 are spaced apart from each other in the first direction, the first surface of the first substrate 11 faces the first surface of the second substrate 21, and the first surface of the first substrate 11 The first surface of the second substrate 21 is parallel to the first plane, the common electrode 12 is disposed on the first surface of the first substrate 11, and the detecting electrode 22 is disposed on the first surface of the second substrate 21. The detection circuit 25 is disposed on the second surface of the second substrate 21.

第一基板11是公共电极12的载体，第二基板21是检测电极22的载体，并且第一基板11与第二基板21相对放置以方便构成传输通道。The first substrate 11 is a carrier of the common electrode 12, the second substrate 21 is a carrier of the detecting electrode 22, and the first substrate 11 is placed opposite to the second substrate 21 to facilitate formation of a transmission channel.

为了便于待测膜在两个极板间顺利传输，根据待测膜品的尺寸的不同，两个极板间的距离在1mm到10mm之间。但是二者的距离并不限于该范围，本领域技术人员可以根据具体的情况，将二者的距离设置在合适的范围内。In order to facilitate the smooth transmission of the film to be tested between the two plates, the distance between the two plates is between 1 mm and 10 mm depending on the size of the film to be tested. However, the distance between the two is not limited to the range, and those skilled in the art can set the distance between the two within a suitable range according to a specific situation.

第一基板11可以是玻璃基板、PCB基板、金属板基板或陶瓷板基板，第二基板21也可以是上述基板中的一种。两个基板的材料可以相同也可以不相同。The first substrate 11 may be a glass substrate, a PCB substrate, a metal plate substrate, or a ceramic plate substrate, and the second substrate 21 may be one of the above substrates. The materials of the two substrates may be the same or different.

本申请的一种实施例中第一基板11为PCB基板，在PCB基板上设计好所需要的图像，设置公共电极12，并且通过电源向公共电极12输入电信号，使其携带电荷。In one embodiment of the present application, the first substrate 11 is a PCB substrate, a desired image is designed on the PCB substrate, the common electrode 12 is disposed, and an electrical signal is input to the common electrode 12 through a power source to carry a charge.

本申请的再一种实施例中，公共电极12上施加的电压在10～50V之间，本领域技术人员可以根据基板结构以及公共电极12与检测电极22之间的距离，对公共电极12施加合适的电压。In still another embodiment of the present application, the voltage applied to the common electrode 12 is between 10 and 50 V. Those skilled in the art can apply the common electrode 12 according to the substrate structure and the distance between the common electrode 12 and the detecting electrode 22. The right voltage.

更具体的一种实施例中，对公共电极12施加的电压为24V。并且通过电源将脉冲电压信号通过输入部14施加到公共电极12上，如图8中的POP信号，其占空比可以根据检测电极22的输出的信号的时序确定，本发明的一种实施例中POP脉冲电压信号的占空比50％。In a more specific embodiment, the voltage applied to the common electrode 12 is 24V. And a pulse voltage signal is applied to the common electrode 12 through the input portion 14 through a power source, such as the POP signal in FIG. 8, whose duty ratio can be determined according to the timing of the signal of the output of the detecting electrode 22, an embodiment of the present invention The duty cycle of the POP pulse voltage signal is 50%.

为了减少噪音信号对公共电极12上的信号的干扰，如图1所示，同时为了减少噪音信号对检测电极22上的信号的干扰，优选上述检测装置还包括第一屏蔽电极13与第二屏蔽电极23。其中，如图2所示，第一屏蔽电极13设置在上述第一基板11的第一表面上，并且围绕上述公共电极12设置；第二屏蔽电极23设置在上述第二基板21的第一表面上，并且围绕上述检测电极22设置。In order to reduce the interference of the noise signal on the signal on the common electrode 12, as shown in FIG. 1, and in order to reduce the interference of the noise signal on the signal on the detecting electrode 22, it is preferable that the detecting device further includes the first shielding electrode 13 and the second shielding. Electrode 23. Wherein, as shown in FIG. 2, the first shield electrode 13 is disposed on the first surface of the first substrate 11 and surrounds The common electrode 12 is disposed; the second shield electrode 23 is disposed on the first surface of the second substrate 21 and disposed around the detecting electrode 22.

本申请的一种实施例中，如图3所示，上述检测装置中包括N个检测电极对2，且N个上述检测电极对2沿第二方向间隔设置，上述第二方向与上述待测膜的移动方向垂直，且每个上述检测电极对2包括沿第三方向间隔设置的至少2个检测电极22，上述第三方向与上述第一方向垂直，且上述第三方向为上述待测膜的移动方向，N≥2。In an embodiment of the present application, as shown in FIG. 3, the detecting device includes N detecting electrode pairs 2, and the N detecting electrodes 2 are spaced apart in the second direction, and the second direction is compared with the foregoing The moving direction of the film is perpendicular, and each of the detecting electrode pairs 2 includes at least two detecting electrodes 22 spaced apart in the third direction, the third direction is perpendicular to the first direction, and the third direction is the film to be tested. The direction of movement, N ≥ 2.

上述的实施例中，N个检测电极对2构成N个像素，通过设置N个检测电极对2可以测量待测膜不同位置处的厚度，这样可以进一步提高检测装置的检测精度。本领域技术人员可以根据具体的待测膜与检测精度的要求来设置像素的个数。In the above embodiment, the N detecting electrode pairs 2 constitute N pixels, and by setting the N detecting electrode pairs 2, the thickness at different positions of the film to be tested can be measured, which can further improve the detection accuracy of the detecting device. A person skilled in the art can set the number of pixels according to specific requirements of the film to be tested and the detection accuracy.

为了使得检测电极22尽可能的覆盖待测膜，相邻像素之间的间隙尽可能小，也就是说每个检测电极22的面积要尽可能大，这样能够进一步提高检测装置的准确性。In order to make the detecting electrode 22 cover the film to be tested as much as possible, the gap between adjacent pixels is as small as possible, that is to say, the area of each detecting electrode 22 is as large as possible, which can further improve the accuracy of the detecting device.

本申请的另一种实施例中，每个上述检测电极对2中的相邻2个上述检测电极22的间隔小于每个上述检测电极22在上述第三方向上的长度。一个像素中的相邻的两个检测电极22之间的间隔与待测膜的运动速度及检测装置对信号的响应速度有关，为了便于更加明确的区分相邻的两个检测电极22上的信号变化，一个像素中的两个检测电极22间的间隔可以大一些，但间隔过大，会造成信号丢失，所以二者的间隔还是要小于每个上述检测电极22在上述第三方向上的长度。In another embodiment of the present application, the interval between two adjacent detection electrodes 22 in each of the pair of detection electrodes 2 is smaller than the length of each of the detection electrodes 22 in the third direction. The interval between two adjacent detecting electrodes 22 in one pixel is related to the moving speed of the film to be tested and the response speed of the detecting device to the signal, in order to more clearly distinguish the signals on the adjacent two detecting electrodes 22. Variation, the interval between the two detecting electrodes 22 in one pixel may be larger, but the interval is too large, which may cause signal loss, so the interval between the two is still smaller than the length of each of the above detecting electrodes 22 in the above-mentioned third direction.

本申请的一种实施例中，检测电极22在第三方向上的长度为4mm，一个像素中的两个检测电极22间的间隔在1～3mm之间。In one embodiment of the present application, the length of the detecting electrode 22 in the third direction is 4 mm, and the interval between the two detecting electrodes 22 in one pixel is between 1 and 3 mm.

本申请的另一个实施例中，如图1所示，上述检测装置还包括输入部14与输入输出部24。其中，输入部14用于将上述电源的电信号输入至上述公共电极12，上述输入部14设置在上述第一基板11的第二表面，输入输出部24用于向上述检测电路25提供电压，且将上述检测电路25的电信号输出，上述输入输出部24设置在上述第二基板21的第二表面。In another embodiment of the present application, as shown in FIG. 1, the detecting device further includes an input portion 14 and an input/output portion 24. The input unit 14 is configured to input an electrical signal of the power source to the common electrode 12, the input unit 14 is disposed on a second surface of the first substrate 11, and the input/output unit 24 is configured to supply a voltage to the detection circuit 25. The electric signal of the detection circuit 25 is output, and the input/output unit 24 is provided on the second surface of the second substrate 21.

本申请的再一种实施例中，如图4所示，上述检测电路25包括采样单元251、阻抗匹配单元252、放大单元254。其中，采样单元251的输入端与上述检测电极22电连接；阻抗匹配单元252的输出端与上述采样单元251的另一端电连接；放大单元254一端与上述阻抗匹配单元252的另一端电连接，另一端与上述输入输出部24电连接。In still another embodiment of the present application, as shown in FIG. 4, the detection circuit 25 includes a sampling unit 251, an impedance matching unit 252, and an amplification unit 254. The input end of the sampling unit 251 is electrically connected to the detecting electrode 22; the output end of the impedance matching unit 252 is electrically connected to the other end of the sampling unit 251; and one end of the amplifying unit 254 is electrically connected to the other end of the impedance matching unit 252. The other end is electrically connected to the input/output unit 24 described above.

采样单元251将检测电极22上感应得到的电信号传输至阻抗匹配单元252，阻抗匹配单元252对感应电信号波形的进行整形、提高稳定性。采样的信号为模拟信号，阻抗匹配单元252通常由三极管电路构成。感应电信号是一种比较微弱的信号，需要放大单元254进行放大处理后，才能更好地在后续电路中进行数字化及运算处理。本领域技术人员可以根据具体的情况选择合适的放大单元254，例如可以选择差分放大单元。 The sampling unit 251 transmits the electrical signal induced on the detecting electrode 22 to the impedance matching unit 252, and the impedance matching unit 252 shapes the waveform of the induced electrical signal to improve stability. The sampled signal is an analog signal, and the impedance matching unit 252 is typically constructed of a triode circuit. The inductive electrical signal is a relatively weak signal, and the amplification unit 254 is required to perform amplification processing to better perform digitization and arithmetic processing in subsequent circuits. A person skilled in the art can select a suitable amplifying unit 254 according to a specific situation, for example, a differential amplifying unit can be selected.

放大单元254输出的信号可以直接传输至后续电路进行厚度计算，根据感应电信号计算待测膜厚度的方式，可以采用现有技术中的任一种根据感应电荷或感应电压计算厚度的方式，此处不再赘述。The signal outputted by the amplifying unit 254 can be directly transmitted to a subsequent circuit for thickness calculation, and the thickness of the film to be tested can be calculated according to the induced electrical signal, and the thickness can be calculated according to the induced charge or the induced voltage by any of the prior art. I won't go into details here.

本申请的一种实施例中，上述检测电路25中还包括输出单元255，输出单元255的一端与上述放大单元254的另一端电连接，另一端与上述输入输出部24电连接。放大单元254输出的信号也可以通过输出单元255传输至输入输出部24，进而传输至后续电路进行厚度计算。In an embodiment of the present application, the detecting circuit 25 further includes an output unit 255. One end of the output unit 255 is electrically connected to the other end of the amplifying unit 254, and the other end is electrically connected to the input/output unit 24. The signal output from the amplifying unit 254 can also be transmitted to the input/output unit 24 through the output unit 255, and then transmitted to the subsequent circuit for thickness calculation.

输出单元255为可被控制导通与否的单元，如果输出单元255导通，则将放大单元254的输出信号传输至后续电路进行厚度计算，如果控制输出单元255断开，则停止对当前放大单元254所输出的信号进行厚度计算。通过设置输出单元255，实现了选择性地进行厚度计算。The output unit 255 is a unit that can be controlled to be turned on or not. If the output unit 255 is turned on, the output signal of the amplifying unit 254 is transmitted to a subsequent circuit for thickness calculation, and if the control output unit 255 is turned off, the current amplification is stopped. The signal output by unit 254 is subjected to thickness calculation. By setting the output unit 255, it is possible to selectively perform the thickness calculation.

本申请的另一种实施例中，当上述检测装置包括沿上述第二方向设置的N个检测电极对2时，上述检测电路25还包括移位控制单元253，上述移位控制单元253的一端与上述阻抗匹配单元252相连接，移位控制单元253的另一端与放大单元254相连接。移位控制单元253用于控制感应电信号的输出顺序。多个像素所检测到的信号按照一定的顺序传输到信号总路线上，在信号总路线上依时序形成一行像素所对应的信号，放大单元254对信号总路线上的按照时序排列的每个像素对应的电信号进行放大，然后，放大后的信号经过输出单元255。移位控制单元253能够进一步保证该检测装置能够准确地检测出待测膜的各个位置的厚度。In another embodiment of the present application, when the detecting device includes N detecting electrode pairs 2 disposed along the second direction, the detecting circuit 25 further includes a shift control unit 253, one end of the shift control unit 253 Connected to the impedance matching unit 252 described above, the other end of the shift control unit 253 is connected to the amplification unit 254. The shift control unit 253 is for controlling the output order of the induced electrical signals. The signals detected by the plurality of pixels are transmitted to the signal total route in a certain order, and the signals corresponding to one row of pixels are formed in time on the signal total route, and the amplifying unit 254 corresponds to each pixel of the signal on the total route in time series. The signal is amplified, and then the amplified signal passes through the output unit 255. The shift control unit 253 can further ensure that the detecting device can accurately detect the thickness of each position of the film to be tested.

本申请的一种实施例中，如图4所示，上述控制电路还包括复位单元256，上述复位单元256设置在上述采样单元251与上述阻抗匹配单元252之间，在上述采样单元251采样之前复位单元256发出的复位信号RESET信号将检测电极22上的感应电信号进行复位。In an embodiment of the present application, as shown in FIG. 4, the control circuit further includes a reset unit 256, and the reset unit 256 is disposed between the sampling unit 251 and the impedance matching unit 252 before sampling by the sampling unit 251. The reset signal RESET signal from the reset unit 256 resets the induced electrical signal on the detecting electrode 22.

为了进一步精确检测得到待测膜的各个位置的厚度，本申请优选所有上述检测电极22围成的区域在第一平面的投影面积小于或者等于上述公共电极12的第一表面的面积。也就是说，所有上述检测电极22围成的区域在第一平面的投影区域为第一区域，公共电极12的第一表面在第一平面的投影区域为第二区域，第二区域在第一区域内。In order to further accurately detect the thickness of each position of the film to be tested, it is preferred in the present application that the area of the area surrounded by all of the detecting electrodes 22 in the first plane is smaller than or equal to the area of the first surface of the common electrode 12. That is, the projection area of the area surrounded by all the detection electrodes 22 in the first plane is the first area, the projection area of the first surface of the common electrode 12 in the first plane is the second area, and the second area is in the first area. within the area.

本申请的一种实施例中，当上述检测装置包括一个检测电极22时，上述检测电极22在第二方向上的总长度大于等于上述待测膜的长度；当上述检测装置包括沿上述第二方向依次设置的M个上述检测电极对2时，第一个上述检测电极对2与第M个上述检测电极对2在上述第二方向之间的距离大于等于上述待测膜的长度，上述第二方向与上述待测膜的移动方向垂直，上述第二方向为上述待测膜的移动方向。这样能够更进一步得到精确的检测结果，其中，M≥2。In an embodiment of the present application, when the detecting device includes a detecting electrode 22, the total length of the detecting electrode 22 in the second direction is greater than or equal to the length of the film to be tested; and when the detecting device includes the second When the M pairs of the detecting electrodes are sequentially disposed, the distance between the first detecting electrode pair 2 and the Mth detecting electrode pair 2 in the second direction is greater than or equal to the length of the film to be tested, The two directions are perpendicular to the moving direction of the film to be tested, and the second direction is the moving direction of the film to be tested. This can further obtain accurate detection results, where M ≥ 2.

本申请的另一种实施例中，如图5所示，上述第一基板11的第一表面与上述第二基板21的间隔内设置有第一间隔板32与第二间隔板52，上述第一间隔板32与上述第一基板11及第二基板21垂直，上述第一间隔板32与上述第二间隔板52平行。第一间隔板32与第二间隔板52用于调整传输通道在第二方向上的尺寸。In another embodiment of the present application, as shown in FIG. 5, a first spacer 32 and a second spacer 52 are disposed in the interval between the first surface of the first substrate 11 and the second substrate 21, and the foregoing A spacer 32 is perpendicular to the first substrate 11 and the second substrate 21, and the first spacer 32 is parallel to the second spacer 52. The first spacer 32 and the second spacer 52 are used to adjust the size of the transmission channel in the second direction.

又一种实施例中，如图6所示，上述检测装置还包括第一连接板31与第二连接板51，上述第一连接板31设置在上述第一基板11的第二表面上，上述第二连接板52设置在上述第二基板21的第二表面上，上述第一连接板31与上述第二连接板51之间的间隔内设置有第一间隔板32与第二间隔板52，且上述第一间隔板32与上述第一基板11及第二基板21垂直，上述第一间隔板32与上述第二间隔板52平行。该实施例中的第一间隔板32与第二间隔板52用于调整传输通道在第二方向上的尺寸。In another embodiment, as shown in FIG. 6, the detecting device further includes a first connecting plate 31 and a second connecting plate 51. The first connecting plate 31 is disposed on the second surface of the first substrate 11, The second connecting plate 52 is disposed at the second a first partitioning plate 32 and a second spacing plate 52 are disposed in a space between the first connecting plate 31 and the second connecting plate 51 on the second surface of the substrate 21, and the first spacing plate 32 and the first The substrate 11 and the second substrate 21 are perpendicular, and the first spacer 32 is parallel to the second spacer 52. The first spacer 32 and the second spacer 52 in this embodiment are used to adjust the size of the transmission channel in the second direction.

为了使得本领域技术人员能够更加清楚地了解本申请的方案，以下将结合具体的实施例进行说明In order to enable those skilled in the art to more clearly understand the solution of the present application, the following will be described in conjunction with specific embodiments.

本申请一种具体的实施例中，如图1至图3所示，检测装置包括电源、第一基板11、第二基板21、第一屏蔽电极13、第二屏蔽电极23、一个公共电极12、40个检测电极对2(40个像素)、输入部14、输入输出部24与检测电路25。In a specific embodiment of the present application, as shown in FIG. 1 to FIG. 3, the detecting device includes a power source, a first substrate 11, a second substrate 21, a first shielding electrode 13, a second shielding electrode 23, and a common electrode 12. 40 detection electrode pairs 2 (40 pixels), an input unit 14, an input/output unit 24, and a detection circuit 25.

其中，第一基板11与第二基板21均为PCB基板，检测电极22与公共电极12之间的距离为2mm。相邻像素之间在第二方向上的间隔为0.4mm，每个像素在第二方向上的长度为4.6mm，检测装置在第二方向上的检测总长度为200mm。每个像素中包括2个上述检测电极22，并且，2个上述检测电极22在上述第三方向上的间隔为2mm，每个检测电极22在第三方向上的长度为4mm。The first substrate 11 and the second substrate 21 are both PCB substrates, and the distance between the detecting electrode 22 and the common electrode 12 is 2 mm. The interval between adjacent pixels in the second direction is 0.4 mm, the length of each pixel in the second direction is 4.6 mm, and the total length of detection of the detecting device in the second direction is 200 mm. Two detection electrodes 22 are included in each pixel, and the interval between the two detection electrodes 22 in the above-described third direction is 2 mm, and the length of each detection electrode 22 in the third direction is 4 mm.

并且，如图4所示，检测电路25中包括采样单元251、复位单元256、阻抗匹配单元252、移位控制单元253、放大单元254与输出单元255。并且移位控制单元253包括开关模块253a与开关控制模块253b，其中，放大单元254为差分放大单元，采样单元251的输入端与上述检测电极22电连接，且采样单元251、阻抗匹配单元252、移位控制单元253、放大单元254、输出单元255依次电连接，且输出单元255与输入输出部24的一端电连接，将经检测电路25处理得到的感应信号输送至后续的电路中，将电信号转化为厚度。Further, as shown in FIG. 4, the detecting circuit 25 includes a sampling unit 251, a reset unit 256, an impedance matching unit 252, a shift control unit 253, an amplifying unit 254, and an output unit 255. And the shift control unit 253 includes a switch module 253a and a switch control module 253b, wherein the amplifying unit 254 is a differential amplifying unit, the input end of the sampling unit 251 is electrically connected to the detecting electrode 22, and the sampling unit 251, the impedance matching unit 252, The shift control unit 253, the amplifying unit 254, and the output unit 255 are electrically connected in sequence, and the output unit 255 is electrically connected to one end of the input/output unit 24, and the sensing signal processed by the detecting circuit 25 is sent to a subsequent circuit to be powered. The signal is converted to thickness.

电源通过输入部14对公共电极12施加24V的电压信号，且此电压信号为脉冲电压信号，且其占空比为50％。当待测膜通过传输通道时，设置在第二基板21的第一表面的40个像素，感应出电信号。每个像素中的一个检测电极22的感应电信号传输至采样单元251的一个输入端，另一个检测电极22的感应电信号传输至采样单元251的另一个输入端。The power supply applies a voltage signal of 24 V to the common electrode 12 through the input portion 14, and this voltage signal is a pulse voltage signal, and its duty ratio is 50%. When the film to be tested passes through the transmission channel, 40 pixels disposed on the first surface of the second substrate 21 induce an electrical signal. The induced electrical signal of one of the detecting electrodes 22 is transmitted to one input terminal of the sampling unit 251, and the induced electrical signal of the other detecting electrode 22 is transmitted to the other input terminal of the sampling unit 251.

检测电极22的感应电信号在每次输入至采样单元251前，都需要通过复位单元256对检测电极22中的信号进行清零复位，以保证采样单元251得到的信号准确。复位单元256由复位信号TESET来进行控制。The induced electrical signal of the detecting electrode 22 needs to be reset to the signal in the detecting electrode 22 by the reset unit 256 before each input to the sampling unit 251 to ensure that the signal obtained by the sampling unit 251 is accurate. The reset unit 256 is controlled by a reset signal TESET.

检测电极22上的信号复位后，采样单元进行采样，检测电极22的感应电信号输入至采样单元251中，并且，经阻抗匹配单元252处理后，由移位控制单元253进行处理。阻抗匹配单元252由三极管电路构成，可以对信号波形进行整形、提高稳定性。After the signal on the detecting electrode 22 is reset, the sampling unit performs sampling, and the induced electric signal of the detecting electrode 22 is input to the sampling unit 251, and after being processed by the impedance matching unit 252, is processed by the shift control unit 253. The impedance matching unit 252 is composed of a triode circuit, which can shape the signal waveform and improve stability.

移位控制单元253由开关模块253a和开关控制模块253b两部分构成，如图7所示，开关控制模块253b将接收到的外部控制信号SP在时钟信号CLK的驱动下(外部控制信号SP由输入输出部24提供)，通过内部的移位寄存器逐渐传输到开关模块253a所对应的每个像素的开关上，使每个像素所对应的开关依次开启，每个像素所对应的开关开启后，相应像素(检测电极对2)上的感应电信号就会传输到信号总线上，每个像素所对应的开关依次开启，每个像素所检测到的信号就会依次传输到信号总路线上，在信号总路线上依时序形成一行像素所对应的信号。放大单元254对信号总路线上的按照时序排列的每个像素对应的电信号进行放大，然后，放大后的信号经过输出单元255、输入输出部24传输到后续电路中，将电压信号转化为薄膜厚度。The shift control unit 253 is composed of a switch module 253a and a switch control module 253b. As shown in FIG. 7, the switch control module 253b drives the received external control signal SP under the drive of the clock signal CLK (the external control signal SP is input. The output unit 24 is gradually transmitted to the switch of each pixel corresponding to the switch module 253a through the internal shift register, so that the switch corresponding to each pixel is sequentially turned on, and the switch corresponding to each pixel is turned on, correspondingly The inductive electrical signal on the pixel (detection electrode pair 2) is transmitted to the signal bus, and the switches corresponding to each pixel are sequentially turned on, each The signals detected by the pixels are sequentially transmitted to the signal total route, and the signals corresponding to one row of pixels are formed in time on the signal total route. The amplifying unit 254 amplifies the electric signal corresponding to each pixel arranged in time series on the signal total route, and then the amplified signal is transmitted to the subsequent circuit through the output unit 255 and the input/output unit 24, and converts the voltage signal into a film thickness. .

图8为本发明的检测装置的工作时序示意图，SP信号为外部控制信号，开始每一行的扫描，CLK信号为***工作时钟信号，如前述SP信号在时钟信号CLK的驱动下，通过内部的移位寄存器逐渐传输到开关模块253a所对应的每一像素的开关上，并依次开启相应像素。8 is a schematic diagram showing the operation timing of the detecting device of the present invention. The SP signal is an external control signal, and scanning of each line is started. The CLK signal is a system operating clock signal. If the SP signal is driven by the clock signal CLK, the internal shift is performed. The bit register is gradually transmitted to the switch of each pixel corresponding to the switch module 253a, and the corresponding pixel is sequentially turned on.

RESET信号为复位单元256的控制信号，通过复位信号每个像素在进行有效信号读取前都要进行复位清零，从而得到每个像素准确真实的有效信号。RESET信号与POP信号的动作时序相连。POP信号为施加在公共电极12上的脉冲电压信号，在RESET信号有效期区间对应公共电极12是没有施加电压的区间。The RESET signal is the control signal of the reset unit 256. Each pixel is reset and cleared before the valid signal is read by the reset signal, thereby obtaining an accurate and valid signal for each pixel. The RESET signal is connected to the action timing of the POP signal. The POP signal is a pulse voltage signal applied to the common electrode 12, and the common electrode 12 corresponds to a section where no voltage is applied in the RESET signal validity period.

图9是输出信号SIG、控制信号SP及时钟信号CLK之间的时序图。通过移位控制单元253，在数据总线上依次得到各像素的两个电极上的信号V1和V2，各像素两个检测电极22上的信号再通过差分放大单元254及输出单元255进行差分放大后向外输出，并在后续电路中进行数字化及运算处理，形成厚度分布的图像。FIG. 9 is a timing chart between the output signal SIG, the control signal SP, and the clock signal CLK. The signals V1 and V2 on the two electrodes of each pixel are sequentially obtained on the data bus by the shift control unit 253, and the signals on the two detecting electrodes 22 of each pixel are differentially amplified by the differential amplifying unit 254 and the output unit 255. It is output to the outside and digitized and processed in subsequent circuits to form an image of thickness distribution.

从以上的描述中，可以看出，本申请上述的实施例实现了如下技术效果：From the above description, it can be seen that the above-mentioned embodiments of the present application achieve the following technical effects:

本申请的膜厚的检测装置无需机械装置引导电极产生位移就能够测量得到待测膜的厚度，更加轻便，方便使用，能够应用到很多领域中。The film thickness detecting device of the present application can measure the thickness of the film to be tested without the mechanical device guiding the displacement of the electrode, is lighter and more convenient to use, and can be applied to many fields.

以上所述仅为本申请的优选实施例而已，并不用于限制本申请，对于本领域的技术人员来说，本申请可以有各种更改和变化。凡在本申请的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本申请的保护范围之内。 The above description is only the preferred embodiment of the present application, and is not intended to limit the present application, and various changes and modifications may be made to the present application. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of this application are intended to be included within the scope of the present application.

Claims

一种膜厚的检测装置，其特征在于，所述检测装置包括：A film thickness detecting device, characterized in that the detecting device comprises:

电源，用于提供电信号；a power source for providing an electrical signal;

公共电极(12)，与所述电源电连接；a common electrode (12) electrically connected to the power source;

至少一个检测电极(22)，与所述公共电极(12)在第一方向上相对且间隔设置，所述公共电极(12)与各所述检测电极(22)之间的间隔构成待测膜的传输通道，所述第一方向与第一平面垂直，所述第一平面与所述待测膜的移动方向平行；以及At least one detecting electrode (22) is disposed opposite to and spaced apart from the common electrode (12) in a first direction, and an interval between the common electrode (12) and each of the detecting electrodes (22) constitutes a film to be tested a transmission channel, the first direction being perpendicular to the first plane, the first plane being parallel to a moving direction of the film to be tested;

检测电路(25)，与所述检测电极(22)电连接，用于检测所述检测电极(22)的感应电信号。A detecting circuit (25) is electrically connected to the detecting electrode (22) for detecting an induced electrical signal of the detecting electrode (22).
根据权利要求1所述的检测装置，其特征在于，所述检测装置还包括：The detecting device according to claim 1, wherein the detecting device further comprises:

第一基板(11)；First substrate (11);

第二基板(21)，与所述第一基板(11)在所述第一方向上间隔设置，所述第一基板(11)的第一表面朝向所述第二基板(21)的第一表面，a second substrate (21) spaced apart from the first substrate (11) in the first direction, a first surface of the first substrate (11) facing the first of the second substrate (21) surface,

且所述第一基板(11)的第一表面与所述第二基板(21)的第一表面均平行于所述第一平面，所述公共电极(12)设置在所述第一基板(11)的第一表面上，所述检测电极(22)设置在所述第二基板(21)的第一表面上，所述检测电路(25)设置在所述第二基板(21)的第二表面。And the first surface of the first substrate (11) and the first surface of the second substrate (21) are both parallel to the first plane, and the common electrode (12) is disposed on the first substrate ( On the first surface of 11), the detecting electrode (22) is disposed on the first surface of the second substrate (21), and the detecting circuit (25) is disposed on the second substrate (21) Two surfaces.
根据权利要求2所述的检测装置，其特征在于，所述检测装置还包括：The detecting device according to claim 2, wherein the detecting device further comprises:

第一屏蔽电极(13)，设置在所述第一基板(11)的第一表面上，并且围绕所述公共电极(12)设置；以及a first shield electrode (13) disposed on the first surface of the first substrate (11) and disposed around the common electrode (12);

第二屏蔽电极(23)，设置在所述第二基板(21)的第一表面上，并且围绕所述检测电极(22)设置。A second shield electrode (23) is disposed on the first surface of the second substrate (21) and disposed around the detecting electrode (22).
根据权利要求3所述的检测装置，其特征在于，所述检测装置中包括N个检测电极对(2)，且N个所述检测电极对(2)沿第二方向间隔设置，所述第二方向与所述待测膜的移动方向垂直，所述第二方向与所述第一方向垂直，且每个所述检测电极对(2)包括沿第三方向间隔设置的至少2个检测电极(22)，所述第三方向与所述第一方向垂直，且所述第三方向为所述待测膜的移动方向，所述N≥2。The detecting device according to claim 3, wherein the detecting device includes N detecting electrode pairs (2), and the N detecting electrode pairs (2) are spaced apart in a second direction, the Two directions are perpendicular to a moving direction of the film to be tested, the second direction is perpendicular to the first direction, and each of the detecting electrode pairs (2) includes at least two detecting electrodes spaced apart in a third direction (22) The third direction is perpendicular to the first direction, and the third direction is a moving direction of the film to be tested, and the value is N≥2.
根据权利要求4所述的检测装置，其特征在于，每个所述检测电极对(2)中的相邻2个所述检测电极(22)的间隔小于每个所述检测电极(22)在所述第三方向上的长度。The detecting device according to claim 4, wherein an interval between two adjacent ones of said detecting electrode pairs (2) is smaller than each of said detecting electrodes (22) The length of the third party up.
根据权利要求5所述的检测装置，其特征在于，所述检测装置还包括： The detecting device according to claim 5, wherein the detecting device further comprises:

输入部(14)，用于将所述电源的电信号输入至所述公共电极(12)，所述输入部(14)设置在所述第一基板(11)的第二表面；以及An input portion (14) for inputting an electrical signal of the power source to the common electrode (12), the input portion (14) being disposed on a second surface of the first substrate (11);

输入输出部(24)，用于向所述检测电路(25)提供电压，且将所述检测电路(25)的电信号输出，所述输入输出部(24)设置在所述第二基板(21)的第二表面。An input/output portion (24) for supplying a voltage to the detecting circuit (25), and outputting an electrical signal of the detecting circuit (25), the input/output portion (24) being disposed on the second substrate ( 21) The second surface.
根据权利要求6所述的检测装置，其特征在于，所述检测电路(25)包括：The detecting device according to claim 6, wherein the detecting circuit (25) comprises:

采样单元(251)，输入端与所述检测电极(22)电连接；a sampling unit (251), the input end is electrically connected to the detecting electrode (22);

阻抗匹配单元(252)，一端与所述采样单元(251)的输出端电连接；以及An impedance matching unit (252) having one end electrically connected to an output end of the sampling unit (251);

放大单元(254)，一端与所述阻抗匹配单元(252)的另一端电连接，另一端与所述输入输出部(24)电连接。The amplifying unit (254) has one end electrically connected to the other end of the impedance matching unit (252) and the other end electrically connected to the input/output portion (24).
根据权利要求7所述的检测装置，其特征在于，所述检测电路(25)还包括输出单元(255)，所述输出单元(255)设置在所述放大单元(254)与所述输入输出部(24)之间。The detecting device according to claim 7, wherein said detecting circuit (25) further comprises an output unit (255), said output unit (255) being disposed at said amplifying unit (254) and said input and output Between the departments (24).
根据权利要求1所述的检测装置，其特征在于，所有所述检测电极(22)围成的区域在所述第一平面的投影面积小于或等于所述公共电极(12)的第一表面的面积。The detecting device according to claim 1, wherein a projected area of the area surrounded by all of the detecting electrodes (22) is smaller than or equal to a first surface of the common electrode (12) area.
根据权利要求4所述的检测装置，其特征在于，当所述检测装置包括一个检测电极(22)时，所述检测电极(22)在第二方向上的总长度大于等于所述待测膜的长度；当所述检测装置包括沿所述第二方向依次设置的M个所述检测电极对(2)时，第一个所述检测电极对(2)与第M个所述检测电极对(2)在所述第二方向之间的距离大于等于所述待测膜的长度，所述第二方向与所述待测膜的移动方向垂直，其中所述M≥2。 The detecting device according to claim 4, wherein when the detecting means comprises a detecting electrode (22), the total length of the detecting electrode (22) in the second direction is greater than or equal to the film to be tested a length of the first detecting electrode pair (2) and the Mth detecting electrode pair when the detecting device includes M pairs of the detecting electrodes (2) sequentially disposed along the second direction (2) The distance between the second directions is greater than or equal to the length of the film to be tested, and the second direction is perpendicular to the moving direction of the film to be tested, wherein the M≥2.