CN205027302U - Detection apparatus for membrane is thick - Google Patents
Detection apparatus for membrane is thick Download PDFInfo
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- CN205027302U CN205027302U CN201520770330.9U CN201520770330U CN205027302U CN 205027302 U CN205027302 U CN 205027302U CN 201520770330 U CN201520770330 U CN 201520770330U CN 205027302 U CN205027302 U CN 205027302U
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Abstract
The utility model provides a detection apparatus for membrane is thick. This detection device includes: NULL, a plurality of detection electrode group and detection circuitry. Wherein, each detection electrode group and NULL be relative and interval setting on the first direction, and NULL's first surface is relative with the first surface that every detection electrode organized, and a plurality of detection electrode group includes at least one detection electrode along second orientation interval setting, each detection electrode group, and the first direction is perpendicular with first plane, and the second orientation is perpendicular with the moving direction of the membrane that awaits measuring, and first plane is parallel with the second orientation, detection circuitry and electric connection of a plurality of detection electrode group, detection circuitry include aversion the control unit, and aversion the control unit is used for controlling the output order of the influence electricity signal of a plurality of detection electrode group. This detection device can more accurately detect out the thickness of the membrane that awaits measuring.
Description
Technical field
The application relates to the technical field that film thickness detects, in particular to a kind of pick-up unit of thickness.
Background technology
Flake article, as the on-line continuous thickness measure of paper, bill, plastic sheeting, textile fabric etc., are in more and more consequence in the process such as production, detection, process, recovery of its product.Current, the detection technique of film thickness will comprise the technology such as Hall, reflection-type ultrasound wave, transmission-type are ultrasonic, induction, eddy current type.But pick-up unit volume corresponding to these technology is comparatively large, and cost is higher, is unfavorable for the application of these technology.
In recent years, the detection technique of film thickness is carried out among continuous research and probe by interelectrode electrostatic induction, the patent of such as publication number CN210302446Y is disclosed a kind of capacitive paper thickness sensor, the volume change of capacitor is mainly changed into the change of oscillation frequency by it, then the change of frequency is converted to the change of voltage by frequency pressure modular converter.Publication number is the detection method that the patent of CN103363887A also discloses a kind of material thickness, utilize the Sensitive Apparatus of pole plate as Thickness sensitivity of capacity plate antenna, the electric capacity movable polar plate that the variation in thickness of actual measurement object causes produces displacement, causes the capacity of plate condenser to change.
Above-mentioned these reduce the volume of pick-up unit to a certain extent by the technology of the detection film thickness of interelectrode electrostatic induction, but still need gear train, therefore also do not conform to the miniaturization of checkout equipment.
In addition, pick-up unit of the prior art accurately can not measure the thickness of each position of film, is unfavorable for the homogeneity of film product thickness.
Utility model content
The application aims to provide a kind of pick-up unit of thickness, to solve the problem that pick-up unit of the prior art accurately can not measure the thickness of each position of film.
To achieve these goals, according to an aspect of the application, provide a kind of pick-up unit of thickness, this pick-up unit comprises: public electrode, multiple detecting electrode group and testing circuit.Wherein, each detecting electrode group and interval relative in a first direction with above-mentioned public electrode is arranged, and the first surface of above-mentioned public electrode is relative with the first surface of each above-mentioned detecting electrode group, multiple above-mentioned detecting electrode group is arranged along second direction interval, each above-mentioned detecting electrode group comprises at least one detecting electrode, above-mentioned first direction and the first plane orthogonal, above-mentioned second direction is vertical with the moving direction of film to be measured, and above-mentioned first plane is parallel with above-mentioned second direction; Testing circuit is electrically connected with multiple above-mentioned detecting electrode group, and above-mentioned testing circuit comprises shift control unit, and above-mentioned shift control unit is for controlling the output order of the electrical signal of reaction of multiple above-mentioned detecting electrode group.
Further, above-mentioned shift control unit comprises switch module and switch control module.
Further, in above-mentioned switch module, comprise multiple switch, the corresponding above-mentioned switch of each detecting electrode group.
Further, above-mentioned switch control module comprises shift register, and the external control signal received transfers in above-mentioned switch module by above-mentioned shift register, opens each above-mentioned switch one by one.
Further, said external control signal is driven by clock signal.
Further, above-mentioned testing circuit also comprises sampling unit, impedance matching unit and amplifying unit.Wherein, the input end of sampling unit is electrically connected with above-mentioned detecting electrode group; Impedance matching unit one end is electrically connected with the output terminal of above-mentioned sampling unit, and the other end is electrically connected with above-mentioned shift control unit; Amplifying unit one end is electrically connected with above-mentioned shift control unit.
Further, above-mentioned testing circuit also comprises reset unit, and above-mentioned reset unit is arranged between above-mentioned sampling unit and above-mentioned impedance matching unit, and before above-mentioned sampling unit sampling, the signal of above-mentioned detecting electrode resets by above-mentioned reset unit.
Further, above-mentioned reset unit adopts reset signal to implement above-mentioned reset, and the valid interval correspondence of above-mentioned reset signal is applied between the dead space of the electric signal on above-mentioned public electrode.
Further, above-mentioned detection device also comprises first substrate and second substrate, second substrate and above-mentioned first substrate interval on above-mentioned first direction is arranged, the first surface of above-mentioned first substrate is towards the first surface of above-mentioned second substrate, and the first surface of the first surface of above-mentioned first substrate and above-mentioned second substrate is perpendicular to above-mentioned first plane, above-mentioned public electrode is arranged on the first surface of above-mentioned first substrate, above-mentioned detecting electrode is arranged on the first surface of above-mentioned second substrate, and above-mentioned testing circuit is arranged on the second surface of above-mentioned second substrate.
Further, above-mentioned detection device also comprises the first guarded electrode and secondary shielding electrode, and wherein, the first guarded electrode is arranged on the first surface of above-mentioned first substrate, and arranges around above-mentioned public electrode; Secondary shielding electrode is arranged on the first surface of above-mentioned second substrate, and arranges around above-mentioned detecting electrode.
The pick-up unit of application the application, pick-up unit comprises multiple detecting electrode group, when film to be measured is through transmission channel, each detecting electrode all induces electric charge, because the diverse location of the corresponding film to be measured of different detecting electrode group, so how many differences of electric charge that different detecting electrodes induces, and, the electrical signal of reaction of detecting electrode group can export by shift control unit in this pick-up unit in order, so just can obtain the thickness at film diverse location place to be measured.Further, this pick-up unit produces displacement without the need to mechanical hook-up leading electrode just can measure the thickness obtaining film to be measured, lighter, easy to use, can be applied in a lot of field.
Accompanying drawing explanation
The Figure of description forming a application's part is used to provide further understanding of the present application, and the schematic description and description of the application, for explaining the application, does not form the improper restriction to the application.In the accompanying drawings:
Fig. 1 shows the side view of the pick-up unit of the thickness that a kind of exemplary embodiment of the application proposes;
Fig. 2 shows the structural drawing of the testing circuit that a kind of embodiment provides;
Fig. 3 shows the circuit theory schematic diagram of the pick-up unit of the thickness that a kind of embodiment provides;
Fig. 4 shows the work schedule schematic diagram of the pick-up unit of the thickness that a kind of embodiment provides;
Fig. 5 shows the vertical view of the first surface of the public electrode that a kind of embodiment provides;
Fig. 6 shows the vertical view of the first surface of the detecting electrode that a kind of embodiment provides;
Fig. 7 shows the cross-sectional view of the pick-up unit of the thickness that a kind of embodiment provides;
Fig. 8 shows the cross-sectional view of the pick-up unit of the thickness that another kind of embodiment provides; And
Fig. 9 shows the sequential chart of output signal SIG, control signal SP and clock signal clk in a kind of embodiment.
Embodiment
It is noted that following detailed description is all exemplary, be intended to provide further instruction to the application.Unless otherwise, all technology used herein and scientific terminology have the identical meanings usually understood with the application person of an ordinary skill in the technical field.
It should be noted that used term is only to describe embodiment here, and be not intended to the illustrative embodiments of restricted root according to the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative is also intended to comprise plural form, in addition, it is to be further understood that, " comprise " when using term in this manual and/or " comprising " time, it indicates existing characteristics, step, operation, device, assembly and/or their combination.
Introduce as background technology, existing pick-up unit accurately can not detect the thickness of film diverse location to be measured, in order to solve problem as above, present applicant proposes a kind of pick-up unit of thickness.
The one of the application is typically in embodiment, and provide a kind of pick-up unit of thickness, this pick-up unit comprises public electrode 12, multiple detecting electrode group 2 and testing circuit 25 as shown in Figure 1.Wherein, each detecting electrode group 2 and interval relative in a first direction with above-mentioned public electrode 12 is arranged, and the first surface of above-mentioned public electrode 12 is relative with the first surface of each above-mentioned detecting electrode group 2, multiple above-mentioned detecting electrode group 2 is arranged along second direction interval, each above-mentioned detecting electrode group 2 comprises at least one detecting electrode 22, above-mentioned first direction and the first plane orthogonal, above-mentioned second direction is vertical with the moving direction of above-mentioned film to be measured, and above-mentioned first plane is parallel with above-mentioned second direction.Testing circuit 25 is electrically connected with multiple above-mentioned detecting electrode group 2, and above-mentioned testing circuit 25 comprises shift control unit 253, and as shown in Figure 2, above-mentioned shift control unit 253 is for controlling the output order of the electrical signal of reaction of multiple above-mentioned detecting electrode group 2.
In this pick-up unit, public electrode 12 and each detecting electrode 22 are all plane electrodes, public electrode 12 and interval relative in a first direction with detecting electrode 22 is arranged, public electrode 12 and each detecting electrode 22 form similar capacity plate antenna structure, and Filled Dielectrics unfixing therebetween but form a transmission channel.After electrically charged on public electrode 12, each detecting electrode 22 just can induce electric charge.
Detecting electrode 22 induces electric charge number depend on distance, the specific inductive capacity on public electrode 12 between the entrained quantity of electric charge and two electrodes of being separated by the area of two electrodes be oppositely arranged, two electrodes.When structure is certain, the electric charge that detecting electrode 22 induces is only relevant with specific inductive capacity between two electrodes.When film to be measured is through transmission channel, change the specific inductive capacity of two interelectrode media, the quantity of the electric charge of induction on detecting electrode 22 is also changed thereupon, the thickness of film to be measured is different, two interelectrode specific inductive capacity are not identical yet, and then the electric charge of induction is not identical yet on detecting electrode 22, therefore by electrical signal of reaction on Detection electrode number can calculate the thickness of film to be measured.
Pick-up unit in the application comprises multiple detecting electrode group 2, when film to be measured is through transmission channel, each detecting electrode 22 all induces electric charge, because the diverse location of the corresponding film to be measured of different detecting electrode groups 2, so how many differences of electric charge that different detecting electrodes 22 induces, further, the electrical signal of reaction of detecting electrode group 2 can export by shift control unit 253 in this pick-up unit in order, so just can obtain the thickness at film diverse location place to be measured.Further, this pick-up unit produces displacement without the need to mechanical hook-up leading electrode just can measure the thickness obtaining film to be measured, lighter, easy to use, can be applied in a lot of field.
In a kind of embodiment of the application, also comprise the power supply be electrically connected with public electrode 12 in this pick-up unit, for providing electric signal, and public electrode 12 and detecting electrode 22 are conductive electrode, are formed by conductive material.
In a kind of embodiment of the application, shift control unit 253 is made up of switch module 253a and switch control module 253b two parts, Fig. 3 is the circuit theory schematic diagram of the pick-up unit of the thickness of the application, switch control module 253b is by after the external control signal SP signal that receives, it is transferred to gradually on the switch of each detecting electrode group 2 (pixel) corresponding to switch module 253a, switch corresponding to each pixel is opened successively, after switch open corresponding to each pixel, electrical signal of reaction in respective pixel will be transferred on signal bus, signal general line forms the signal corresponding to one-row pixels according to sequential.
In the another kind of embodiment of the application, in above-mentioned switch module 253a, comprise multiple switch, the corresponding above-mentioned switch of each detecting electrode group 2.
In order to more rapidly and accurately by the external control signal SP Signal transmissions that receives in switch module 253a, above-mentioned switch control module 253b comprises shift register, above-mentioned shift register, by the external control signal SP Signal transmissions that receives to above-mentioned switch module 253a, opens each above-mentioned switch one by one.
In the another kind of embodiment of the application, as shown in Figure 3, said external control signal SP signal, under clock signal clk signal drives, is transferred to gradually on the switch of each pixel corresponding to switch module 253a by the shift register of inside, and opens respective pixel successively.
In another embodiment of the application, as shown in Figure 2, above-mentioned testing circuit 25 comprises sampling unit 251, impedance matching unit 252 and amplifying unit 254.Wherein, the input end of sampling unit 251 is electrically connected with above-mentioned detecting electrode group 2; Impedance matching unit 252 one end is electrically connected with the output terminal of above-mentioned sampling unit 251, and the other end is electrically connected with above-mentioned shift control unit 253; Amplifying unit 254 one end is electrically connected with the other end of above-mentioned shift control unit 253.
Sampling unit 251 detecting electrode 22 will be responded to the electric signal transmission that obtains to impedance matching unit 252, the carrying out shaping, improve stability of impedance matching unit 252 pairs of electrical signal of reaction waveforms.The signal of sampling is simulating signal, and impedance matching unit 252 is made up of transistor circuit usually.The order of the electrical signal of reaction that shift control unit 253 exports for control group matching unit 252.Signal detected by multiple pixel is transferred in signal general line in a certain order, and signal general line forms the signal corresponding to one-row pixels according to sequential.Further, electrical signal of reaction is a kind of fainter signal, needs the signal on signal bus to carry out, after amplification process, to carry out digitizing and calculation process better in subsequent conditioning circuit through amplifying unit 254.Therefore, amplifying unit 254 amplifies one by one according to the signal that ordered pair each pixel during certain on signal bus is corresponding, and those skilled in the art can select suitable amplifying unit 254 according to specific circumstances, such as, can select differential amplification unit 254.The thickness of each position of film to be measured can be detected so more exactly.
The signal that amplifying unit 254 exports both directly can transfer to subsequent conditioning circuit and carry out THICKNESS CALCULATION.In the utility model embodiment, specifically calculate the account form of film thickness to be measured according to electrical signal of reaction, can adopt of the prior art any one carry out the mode of thickness according to induced charge or induced voltage, repeat no more herein.
In a kind of embodiment of the application, also comprise output unit 255 in above-mentioned testing circuit 25, one end of output unit 255 is electrically connected with the other end of above-mentioned amplifying unit 254.The signal that amplifying unit 254 exports also can transfer to subsequent conditioning circuit by output unit 255 and carry out THICKNESS CALCULATION.
Output unit 255 is can controlled conducting processed whether unit, if output unit 255 conducting, then the output signal of amplifying unit 254 is transferred to subsequent conditioning circuit and carry out THICKNESS CALCULATION, if control output unit 255 to disconnect, then the signal to current amplifying unit 254 exports is stopped to carry out THICKNESS CALCULATION.By arranging output unit 255, achieving and optionally carrying out THICKNESS CALCULATION.
In a kind of embodiment of the application, above-mentioned testing circuit 25 also comprises reset unit 256, above-mentioned reset unit 256 is arranged between above-mentioned sampling unit 251 and above-mentioned impedance matching unit 252, and the signal on above-mentioned detecting electrode 22 resets by the reset signal that reset unit 256 sends before above-mentioned sampling unit 251 is sampled.
In the another kind of preferred embodiment of the application, the reset that just can realize signal in sampling unit 251 to adopt simple method, above-mentioned reset unit 256 adopts reset signal RESET signal to implement above-mentioned reset, as shown in Figure 4, the valid interval correspondence of above-mentioned reset signal RESET signal is applied between the dead space of the electric signal POP on above-mentioned public electrode 12.
In another embodiment of the application, as shown in Figure 1, above-mentioned detection device also comprises: first substrate 11 and second substrate 21.Wherein second substrate 21 and first substrate 11 interval on above-mentioned first direction is arranged, the first surface of above-mentioned first substrate 11 is towards the first surface of above-mentioned second substrate 21, and the first surface of above-mentioned first substrate 11 and the first surface of above-mentioned second substrate 21 are all parallel to above-mentioned first plane, above-mentioned public electrode 12 is arranged on the first surface of above-mentioned first substrate 11, above-mentioned detecting electrode 22 is arranged on the first surface of above-mentioned second substrate 21, and above-mentioned testing circuit 25 is arranged on the second surface of above-mentioned second substrate 21.
First substrate 11 is carriers of public electrode 12, and second substrate 21 is carriers of detecting electrode 22, and first substrate 11 is staggered relatively to facilitate formation transmission channel with second substrate 21.Transmit smoothly between two pole plates for the ease of film to be measured, according to the difference of the size of film product to be measured, the distance between two pole plates is between 1mm to 10mm.But the distance of the two is not limited to this scope, the distance of the two can according to specific circumstances, be arranged in suitable scope by those skilled in the art.
In a kind of embodiment of the application, above-mentioned public electrode 12 comprises spaced multiple public electrode portion, and those skilled in the art can arrange the public electrode portion of some according to actual conditions.
First substrate 11 can be glass substrate, PCB substrate, metal substrate sheet or ceramic wafer substrate, and second substrate 21 also can be the one in aforesaid substrate.The material of two substrates can identical also can not be identical.
In a kind of embodiment of the application, first substrate 11 is PCB substrate, and PCB substrate designs required image, arranges public electrode 12, and by power supply to public electrode 12 input electrical signal, makes it carry electric charge.And in this embodiment, second substrate 21 is also PCB substrate.
In another embodiment of the application, the voltage that public electrode 12 applies is between 10 ~ 50V, and those skilled in the art according to board structure and the distance between public electrode 12 and detecting electrode 22, can apply suitable voltage to public electrode 12.
More specifically in a kind of embodiment, the voltage applied public electrode 12 is 24V.And pulse voltage signal during this voltage signal, as the POP signal in Fig. 4, its dutycycle can be determined according to the sequential of the signal of the output of detecting electrode 22, the dutycycle 50% of POP pulse voltage signal in a kind of embodiment of the present utility model.
In order to reduce the interference of noise signal to the signal on public electrode 12, as shown in Figure 1, simultaneously in order to reduce the interference of noise signal to the signal on detecting electrode 22, preferred above-mentioned detection device also comprises the first guarded electrode 13 and secondary shielding electrode 23.Wherein, as shown in Figure 5, the first guarded electrode 13 is arranged on the first surface of above-mentioned first substrate 11, and arranges around above-mentioned public electrode 12; Secondary shielding electrode 23 is arranged on the first surface of above-mentioned second substrate 21, and arranges around above-mentioned detecting electrode 22.
In a kind of embodiment of the application, as shown in Figure 6, pick-up unit comprises multiple detecting electrode group 2, and multiple above-mentioned detecting electrode group 2 is arranged along second direction interval, above-mentioned second direction is vertical with the moving direction of above-mentioned film to be measured, and each above-mentioned detecting electrode group 2 comprises along spaced 2 detecting electrodes 22 of third direction, above-mentioned third direction is vertical with above-mentioned first direction, and above-mentioned third direction is vertical with above-mentioned second direction.
In the above embodiments, multiple detecting electrode group 2 forms multiple pixel, can measure the thickness at film diverse location place to be measured, can improve the accuracy of detection of pick-up unit so further by arranging multiple detecting electrode group 2.Those skilled in the art can arrange the number of pixel according to the requirement of concrete film to be measured and accuracy of detection.
In order to make detecting electrode 22 cover film to be measured as much as possible, the gap between neighbor is little as far as possible, and that is the area of each detecting electrode 22 is large as far as possible, can improve the accuracy of pick-up unit so further.
In the another kind of embodiment of the application, the interval of adjacent 2 the above-mentioned detecting electrodes 22 in each above-mentioned detecting electrode group 2 is less than the length of each above-mentioned detecting electrode 22 on above-mentioned third direction.Movement velocity and the response speed of pick-up unit to signal of the interval between two the adjacent detecting electrodes 22 in a pixel and film to be measured are relevant, for the ease of the signal intensity on two detecting electrodes 22 that differentiation is definitely adjacent, interval between two detecting electrodes 22 in a pixel can be larger, but interval is excessive, dropout can be caused, so the interval of the two is still less than the length of each above-mentioned detecting electrode 22 on above-mentioned third direction.
In a kind of embodiment of the application, the length of detecting electrode 22 on third direction is 4mm, is interposed between 1 ~ 3mm between two detecting electrodes 22 in a pixel.
In another embodiment of the application, as shown in Figure 1, above-mentioned detection device also comprises input part 14 and input and output portion 24.Wherein, input part 14 is for inputing to above-mentioned public electrode 12 by the electric signal of above-mentioned power supply, above-mentioned input part 14 is arranged on the second surface of above-mentioned first substrate 11, input and output portion 24 is for providing voltage to above-mentioned testing circuit 25, and the electric signal of above-mentioned testing circuit 25 is exported, above-mentioned input and output portion 24 is arranged on the second surface of above-mentioned second substrate 21.
In a kind of embodiment of the application, also comprise power supply in this pick-up unit, power supply is electrically connected with public electrode 12, and in a kind of embodiment, power supply is electrically connected with public electrode 12 with by input part 14, and power supply provides electric signal to public electrode 12.
In order to accurately detect the thickness obtaining each position of film to be measured further, the application region that preferably all above-mentioned detecting electrodes 22 surround is less than or equal to the area of the first surface of above-mentioned public electrode 12 in the projected area of the first plane.Illustrate further, that is, the region that all above-mentioned detecting electrodes 22 surround is first area in the view field of the first plane, and the first surface of public electrode 12 is second area in the view field of the first plane, and second area is in first area.
In a kind of embodiment of the application, when above-mentioned detection device comprises a detecting electrode 22, above-mentioned detecting electrode 22 total length is in a second direction more than or equal to the length of above-mentioned film to be measured; When above-mentioned detection device comprises the N number of above-mentioned detecting electrode group 2 set gradually along above-mentioned second direction, first above-mentioned detecting electrode group 2 and the distance of N number of above-mentioned detecting electrode group 2 between above-mentioned second direction are more than or equal to the length of above-mentioned film to be measured, and above-mentioned second direction is vertical with the moving direction of above-mentioned film to be measured.Can further obtain accurate testing result like this, wherein, N >=2.
In the another kind of embodiment of the application, as shown in Figure 7, the first space bar 32 and the second space bar 52 is provided with in the first surface of above-mentioned first substrate 11 and the interval of above-mentioned second substrate 21, above-mentioned first space bar 32 is vertical with above-mentioned first substrate 11 and second substrate 21, and above-mentioned first space bar 32 is parallel with above-mentioned second space bar 52.First space bar 32 and the second space bar 52 are for adjusting transmission channel size in a second direction.
Have in a kind of embodiment, as shown in Figure 8, above-mentioned detection device also comprises the first web joint 31 and the second web joint 51, above-mentioned first web joint 31 is arranged on the second surface of above-mentioned first substrate 11, above-mentioned second web joint 52 is arranged on the second surface of above-mentioned second substrate 21, the first space bar 32 and the second space bar 52 is provided with in interval between above-mentioned first web joint 31 and above-mentioned second web joint 51, and above-mentioned first space bar 32 is vertical with above-mentioned first substrate 11 and second substrate 21, above-mentioned first space bar 32 is parallel with above-mentioned second space bar 52.The first space bar 32 in this embodiment and the second space bar 52 are for adjusting transmission channel size in a second direction.
In order to the scheme making those skilled in the art clearly can understand the application, be described below with reference to specific embodiment.
In a kind of specific embodiment of the application, as shown in Figure 1, pick-up unit comprises power supply, first substrate 11, second substrate 21, first guarded electrode 13, secondary shielding electrode 23, public electrode 12,40 detecting electrode groups 2 (40 pixels), input part 14, input and output portion 24 and testing circuit 25.
Wherein, first substrate 11 and second substrate 21 are PCB substrate, and the distance between detecting electrode 22 and public electrode 12 is 2mm.Between neighbor in a second direction be spaced apart 0.4mm, each pixel length is in a second direction 4.6mm, and pick-up unit detection total length is in a second direction 200mm.Each pixel comprises 2 above-mentioned detecting electrodes 22, and 2 above-mentioned detecting electrodes 22 are spaced apart 2mm on above-mentioned third direction, and the length of each detecting electrode 22 on third direction is 4mm.
Further, as shown in Figure 2, testing circuit 25 comprises sampling unit 251, reset unit 256, impedance matching unit 252, shift control unit 253, amplifying unit 254 and output unit 255.And shift control unit 253 comprises switch module 253a and switch control module 253b, wherein, amplifying unit 254 is differential amplification unit, sampling unit 251 input end is electrically connected with above-mentioned detecting electrode 22, and sampling unit 251, impedance matching unit 252, shift control unit 253, amplifying unit 254, output unit 255 are electrically connected successively, and output unit 255 is electrically connected with the one end in input and output portion 24, circuit 25 is after testing processed the induced signal obtained to be delivered in follow-up circuit, is thickness by transform electrical signals.
Power supply applies the voltage signal of 24V by input part 14 pairs of public electrodes 12, when film to be measured is by transmission channel, is arranged on 40 pixels of the first surface of second substrate 21, induces electric signal.The electrical signal of reaction of a detecting electrode 22 in each pixel transfers to an input end of sampling unit 251, and the electrical signal of reaction of another detecting electrode 22 transfers to another input end of sampling unit 251.
The electrical signal of reaction of detecting electrode 22, inputing to sampling unit 251 before at every turn, all needs to carry out clearing by the data in reset unit 256 pairs of detecting electrodes 22 and resets, accurate to ensure the signal in sampling unit 251.Reset unit 256 is controlled by reset signal TESET.
After sampling unit 251 resets, the electrical signal of reaction of detecting electrode 22 inputs in sampling unit 251, and after impedance matching unit 252 processes, is processed by shift control unit 253.Signal in sampling unit 251 is simulating signal, and impedance matching unit 252 is made up of transistor circuit, can carry out shaping, improve stability signal waveform.
Shift control unit 253 is made up of switch module 253a and switch control module 253b two parts, as shown in Figure 3, switch control module 253b by the external control signal SP that receives under the driving of clock signal clk, be transferred on the switch of each pixel corresponding to switch module 253a gradually by the shift register of inside, switch corresponding to each pixel is opened successively, after switch open corresponding to each pixel, electrical signal of reaction in respective pixel (detecting electrode group 2) will be transferred on signal bus, switch corresponding to each pixel is opened successively, signal detected by each pixel will be transferred in signal general line successively, signal general line forms the signal corresponding to one-row pixels according to sequential, signal on signal bus transfers to successively in amplifying unit 254 and amplifies, and the signal after amplifying inputs to input and output portion 24 through output unit 255, be delivered in subsequent conditioning circuit by input and output portion 24 again.
Fig. 4 is the work schedule schematic diagram of pick-up unit of the present utility model, SP signal is external control signal, start the scanning of every a line, CLK signal is system works clock signal, SP signal is under the driving of clock signal clk signal, be transferred to gradually on the switch of each pixel corresponding to switch module 253a by the shift register of inside, and open respective pixel successively.
RESET signal is the control signal of reset unit 256, will carry out reset reset by each pixel of reset signal before carrying out useful signal reading, thus waits until each pixel accurately real useful signal.RESET signal is connected with the action sequence of POP signal.POP signal is be applied to the pulse voltage signal on public electrode 12, is do not execute alive interval at the interval corresponding public electrode 12 of the RESET signal term of validity.
Fig. 9 is the sequential chart between output signal SIG signal, control signal SP signal and CLK signal.By shift control unit 253, obtain signal V1 and V2 on two electrodes of each pixel on the data bus successively, signal on each pixel 2 detecting electrodes 22 carries out the backward outer output of differential amplification by differential amplification unit 254 and output unit 255 again, and digitizing and calculation process is carried out in subsequent conditioning circuit, form the image of thickness distribution.
As can be seen from the above description, the application's the above embodiments achieve following technique effect:
Pick-up unit in the application comprises multiple detecting electrode group, when film to be measured is through transmission channel, each detecting electrode all induces electric charge, because the diverse location of the corresponding film to be measured of different detecting electrode groups, so how many differences of electric charge that different detecting electrodes induces, further, the electrical signal of reaction of detecting electrode group can export by shift control unit in this pick-up unit in order, so just can obtain the thickness at film diverse location place to be measured.Further, this pick-up unit produces displacement without the need to mechanical hook-up leading electrode just can measure the thickness obtaining film to be measured, lighter, easy to use, can be applied in a lot of field.
The foregoing is only the preferred embodiment of the application, be not limited to the application, for a person skilled in the art, the application can have various modifications and variations.Within all spirit in the application and principle, any amendment done, equivalent replacement, improvement etc., within the protection domain that all should be included in the application.
Claims (10)
1. a pick-up unit for thickness, is characterized in that, described pick-up unit comprises:
Public electrode (12);
Multiple detecting electrode group (2), and interval relative in a first direction with described public electrode (12) is arranged, and the first surface of described public electrode (12) is relative with the first surface of each described detecting electrode group (2), multiple described detecting electrode group (2) is arranged along second direction interval, each described detecting electrode group (2) comprises at least one detecting electrode (22), described first direction and the first plane orthogonal, described second direction is vertical with the moving direction of film to be measured, and described first plane is parallel with described second direction; And
Testing circuit (25), be electrically connected with multiple described detecting electrode group (2), described testing circuit (25) comprises shift control unit (253), and described shift control unit (253) is for controlling the output order of the electrical signal of reaction of multiple described detecting electrode group (2).
2. pick-up unit according to claim 1, is characterized in that, described shift control unit (253) comprises switch module (253a) and switch control module (253b).
3. pick-up unit according to claim 2, is characterized in that, comprises multiple switch in described switch module (253a), the corresponding described switch of each detecting electrode group (2).
4. pick-up unit according to claim 3, it is characterized in that, described switch control module (253b) comprises shift register, the external control signal received transfers in described switch module (253a) by described shift register, opens switch described in each one by one.
5. pick-up unit according to claim 4, is characterized in that, described external control signal is driven by clock signal.
6. pick-up unit according to claim 1 or 5, it is characterized in that, described testing circuit (25) also comprises:
Sampling unit (251), input end is electrically connected with described detecting electrode group (2);
Impedance matching unit (252), one end is electrically connected with the output terminal of described sampling unit (251), and the other end is electrically connected with described shift control unit (253); And
Amplifying unit (254), one end is electrically connected with described shift control unit (253).
7. pick-up unit according to claim 6, it is characterized in that, described testing circuit (25) also comprises reset unit (256), described reset unit (256) is arranged between described sampling unit (251) and described impedance matching unit (252), before described sampling unit (251) sampling, the signal of described detecting electrode (22) resets by described reset unit (256).
8. pick-up unit according to claim 7, it is characterized in that, described reset unit (256) adopts reset signal to implement described reset, and the valid interval correspondence of described reset signal is applied between the dead space of the electric signal on described public electrode (12).
9. the pick-up unit according to any one of claim 1 to 5 and 8, is characterized in that, described pick-up unit also comprises:
First substrate (11);
Second substrate (21), and described first substrate (11) is arranged at interval in said first direction, the first surface of described first substrate (11) towards the first surface of described second substrate (21),
And the first surface of the first surface of described first substrate (11) and described second substrate (21) is perpendicular to described first plane, described public electrode (12) is arranged on the first surface of described first substrate (11), described detecting electrode (22) is arranged on the first surface of described second substrate (21), and described testing circuit (25) is arranged on the second surface of described second substrate (21).
10. pick-up unit according to claim 9, is characterized in that, described pick-up unit also comprises:
First guarded electrode (13), is arranged on the first surface of described first substrate (11), and arranges around described public electrode (12); And
Secondary shielding electrode (23), is arranged on the first surface of described second substrate (21), and arranges around described detecting electrode (22).
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105136011A (en) * | 2015-09-30 | 2015-12-09 | 威海华菱光电股份有限公司 | Detection apparatus of film thickness |
| WO2017054682A1 (en) * | 2015-09-30 | 2017-04-06 | 威海华菱光电股份有限公司 | Film thickness detection apparatus |
| CN107607595A (en) * | 2017-09-21 | 2018-01-19 | 京东方科技集团股份有限公司 | Optical filter detection means and method |
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2015
- 2015-09-30 CN CN201520770330.9U patent/CN205027302U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105136011A (en) * | 2015-09-30 | 2015-12-09 | 威海华菱光电股份有限公司 | Detection apparatus of film thickness |
| WO2017054682A1 (en) * | 2015-09-30 | 2017-04-06 | 威海华菱光电股份有限公司 | Film thickness detection apparatus |
| CN105136011B (en) * | 2015-09-30 | 2018-09-14 | 威海华菱光电股份有限公司 | The detection device of film thickness |
| CN107607595A (en) * | 2017-09-21 | 2018-01-19 | 京东方科技集团股份有限公司 | Optical filter detection means and method |
| CN107607595B (en) * | 2017-09-21 | 2020-05-12 | 京东方科技集团股份有限公司 | Optical filter detection device and method |
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